Dry-wet electrochemical polishing machine device

Abstract

The invention discloses a dry-wet electrochemical mechanical polishing device which comprises an electrolytic polishing module, a clamping conductive module, a circumferential swing assembly, a composite motion module and an axial motion assembly. The electrolytic polishing module is used for containing electrolyte and polishing sand, and the electrolytic polishing module is provided with a cathode bar; the clamping conductive module is located above the electrolytic polishing module and used for clamping a to-be-polished part, and the to-be-polished part serves as an anode; the composite motion module is used for controlling the clamping conductive module to move and comprises an upper arm and a lower arm, and the axial motion assembly is connected with the upper arm through a transverse lock and drives the composite motion module to do axial feeding motion; the circumferential swing assembly is connected with the lower arm through a bearing and drives the lower arm of the composite motion module to do horizontal circumferential motion. Through a three-dimensional motion mechanism composed of the axial motion assembly, the circumferential swing assembly, the composite motion module and the clamping conductive module, axial feeding motion and horizontal circumferential motion of a workpiece in the electrolytic polishing module are achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of electrochemical mechanical polishing, and in particular to a dry and wet electrochemical mechanical precision polishing device and method. Background Art

[0002] Electrochemical mechanical polishing (ECMP) is an ultra-precision surface machining technology based on the synergistic effect of electrochemical anodic dissolution and mechanical grinding. During wet electrochemical polishing, the workpiece acts as the anode and selectively dissolves in the electrolyte. Microscopically raised areas on the surface are preferentially dissolved due to the concentrated current density. Simultaneously, the dissolution products react with electrolyte components (such as phosphoric acid) to form a gradient-distributed passivation film. This passivation film is thicker (approximately 50-100 nm) in microscopic depressions and thinner (approximately 10-20 nm) in raised areas. Dry mechanical polishing, on the other hand, selectively removes the thin film from raised areas through the mechanical removal of the passivation film by abrasive particles, thereby achieving precise control of the surface topography.

[0003] Existing electrochemical mechanical polishing equipment, as detailed in CN118143853A, can suffer from surface damage during mechanical polishing. Subsurface cracks and plastic deformation layers (up to 1-10μm in depth) can be easily introduced during polishing, impacting component fatigue life. Specifically, subsurface cracks arise from the impact and compression of abrasives (such as diamond and Al₂O₃ particles) on the material surface during mechanical polishing. For example, the hard phase WC in cemented carbide is prone to brittle fracture, forming microcracks that propagate along grain boundaries. Plastic deformation of the soft phase Co leads to lattice distortion, but this fails to mitigate the brittle failure of the WC. The plastic deformation layer forms because the surface material experiences repeated shear stress during polishing, leading to dislocation proliferation and grain refinement.

[0004] Furthermore, traditional electrochemical mechanical polishing of cemented carbides (such as WC-Co) takes several hours per part, achieving an Ra of only 0.1 μm. This long polishing time is due to the extremely slow oxidation rate of WC due to its chemical inertness. Once the Co dissolves, the WC grains protrude, creating microscopic roughness that requires repeated mechanical removal. During this process, if the mechanical action and electrochemical corrosion are not synchronized, the localized passivation film is not promptly removed, hindering continued dissolution. Furthermore, uneven abrasive distribution makes it difficult to achieve improved surface flatness, resulting in an Ra stuck at 0.1 μm.

[0005] Therefore, it is necessary to provide an electrochemical mechanical precision polishing machine to solve the above problems. Summary of the Invention

[0006] In order to solve the above problems, a dry and wet electrochemical mechanical precision polishing device and method are provided, which realize efficient and ultra-precision polishing through the synergistic effect of a three-dimensional composite motion mechanism and electrolysis-abrasive particles.

[0007] In order to achieve the above object, the present invention adopts the following technical solutions: A dry and wet electrochemical mechanical polishing device comprises an electrolytic polishing module, a clamping conductive module, a circular swing component, a composite motion module and an axial motion component; The electrolytic polishing module is used to contain electrolyte and polishing sand, and the electrolytic polishing module is provided with a cathode rod; the clamping conductive module is located above the electrolytic polishing module, and is used to clamp the part to be polished, and the part to be polished serves as an anode; the composite motion module is used to control the movement of the clamping conductive module, which includes an upper arm and a lower arm, and the upper arm and the lower arm are connected by a longitudinal lock; the axial motion component is connected to the upper arm through a transverse lock, driving the composite motion module to perform axial feed motion; the circular swing component is connected to the lower arm through a bearing, driving the lower arm of the composite motion module to perform horizontal circular motion; the three-dimensional motion mechanism composed of the axial motion component, the circular swing component, the composite motion module and the clamping conductive module realizes axial feed motion and horizontal circular motion of the workpiece in the electrolytic polishing module.

[0008] As a further technical solution, the axial motion assembly includes a connecting rod, a rotating motor, an eccentric shaft and a rotating disk. The rotating motor drives the rotating disk. The eccentric shaft is arranged on the rotating disk, and the eccentric shaft is connected to the vertically arranged connecting rod.

[0009] As a further technical solution, the connecting rod is connected to the upper arm via a transverse lock.

[0010] As a further technical solution, the composite motion module further includes a fixer and a rotating handle; the lower arm is connected to the fixer, a quick-release rotating handle is provided at the bottom of the fixer, and the rotating handle is connected to clamp the conductive module.

[0011] As a further technical solution, the composite motion module further includes an auxiliary positioner, which is connected to the swing assembly and is connected to the lower arm via a bearing.

[0012] As a further technical solution, the swing assembly includes a hollow rod, a rotary motor, a conveyor belt, an eccentric gear and an eccentric rod. The hollow rod is connected to the auxiliary positioner of the composite motion module, the lower arm passes through the hollow rod, and the hollow rod is connected to the eccentric rod. The two ends of the eccentric rod are each connected to an eccentric gear. The two eccentric gears are connected by a conveyor belt. The two eccentric gears are each driven by a rotary motor; the conveyor belt uses a synchronous toothed belt to connect the eccentric gears and is coaxially fixed to the rotary motor. As a further technical solution, the clamping conductive module includes a latch rod and a conductive disk, one end of the latch rod is connected to the lower arm of the composite motion module through a quick-release interface, and the other end of the latch rod is connected to the conductive disk; the conductive disk is used to fix the polishing clamping tool and the conductive rod.

[0013] As a further technical solution, the polishing clamping tool includes a reducing sleeve, a fixed sleeve, a porous clamping rod, an adjustable clip, and a clamp; in addition, the conductive rod is connected to the power anode to form a current loop with the cathode rod 14.

[0014] As a further technical solution, the electrolytic polishing module also includes a positioning base, a clamping device, an electrolytic connector, an air pipe, a power supply, an air circulator, and a protective cover; wherein, the positioning base is used to accurately place the solution barrel, the clamping device is fixed to the protective cover through the mounting bases on both sides of the protective cover, and is used to clamp the solution barrel, the electrolytic connector connects the cathode rod and the negative pole of the power supply, and the electrolytic connector and the air pipe are jointly fixed on the annular groove of the solution barrel; the air circulator is installed on the top of the protective cover, and is used to adjust the temperature and humidity in the polishing area.

[0015] As a further technical solution, the interior of the solution barrel is divided into two layers, the upper layer contains polishing liquid, and the lower layer stores polishing sand. The outer wall of the barrel is provided with an annular liquid collecting tank.

[0016] The working process of the present invention is as follows: The axial motion assembly rotates the eccentric shaft via a drive motor, converting the motor's rotational motion into vertical reciprocating motion for the upper arm of the composite motion module. The lower arm of the composite motion module is connected to the hollow rod of the circular swing assembly via a lubricated bearing. The rotary motor drives the lower arm in uniform circular motion within the horizontal plane. Transverse and longitudinal locks provide a flexible connection between the upper and lower arms, ensuring synchronization between vertical and circular motion. A rotating handle is provided at the end of the lower arm for locking the clamping conductive module; when the rotary motor and the axial drive motor are started synchronously, the compound motion module drives the clamping conductive module to perform two movements: vertical reciprocating motion, driven by the eccentric shaft, so that the workpiece moves up and down periodically in the polishing liquid to enhance the exchange efficiency of the polishing liquid; horizontal circular motion, so that the surface of the workpiece is evenly contacted with the polishing sand; after the workpiece to be polished is immersed in the electrolytic polishing liquid, a closed current loop is formed between the clamping conductive module and the cathode rod, triggering an electrochemical reaction on the surface of the workpiece (anodic dissolution); at the same time, under the synergistic effect of mechanical movement, the vertical motion pressure can promote the cutting effect of the polishing sand on the micro-protrusions on the surface of the workpiece, and the circular motion shear force can accelerate the peeling of the reaction products, ultimately achieving efficient electrochemical mechanical polishing.

[0017] Compared with the existing technology, one or more of the above technical solutions have the following beneficial effects: The present invention proposes a dry and wet electrochemical polishing machine that achieves ultra-precision machining of metal surfaces through the synergistic effect of electrochemical dissolution and mechanical grinding. The machine features a multi-degree-of-freedom motion mechanism consisting of an electrolytic polishing module, a clamping conductive module, a circular oscillating assembly, a compound motion module, and an axial motion assembly. The axial motion assembly enables the up and down movement of the upper and lower arms of the compound motion module, while the workpiece to be polished at the lower portion is immersed in the electrolyte. The circular oscillating assembly causes the workpiece to be polished at the lower portion to undergo circular motion. The two arms cooperate to achieve a compound motion system combining axial and radial circular motion. Vertical reciprocating motion causes the workpiece to periodically move up and down in the polishing fluid, enhancing the efficiency of polishing fluid exchange. Horizontal circular motion ensures uniform contact between the workpiece surface and polishing grit. After the workpiece to be polished is immersed in the electrolytic polishing fluid, a closed current loop is formed between the clamping conductive module and the cathode rod, triggering an electrochemical reaction (anodic dissolution) on the workpiece surface. Simultaneously, under the synergistic effect of mechanical motion, the vertical motion pressure promotes the polishing grit's cutting action on microscopic protrusions on the workpiece surface, while the circular motion shear force accelerates the exfoliation of reaction products, ultimately achieving efficient electrochemical mechanical polishing.

[0018] Furthermore, an annular groove is provided on the outer ring of the solution barrel so that the polishing particles generated during the polishing process are deposited into the solution barrel under the action of centrifugal force.

[0019] Furthermore, the clamping conductive module clamps the workpiece and places it in the polishing tank, which contains polishing liquid and polishing sand, and is driven by a robotic arm to apply a motion load; a conductive rod is provided in the middle of the conductive disk. When the workpiece to be polished is immersed in the polishing liquid for polishing, a current loop is formed with the cathode rod in the electrolytic connector, causing an electrochemical dissolution reaction on the surface of the workpiece, and electrochemical mechanical polishing is performed under the action of pressure and speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The accompanying drawings, which constitute a part of the present invention, are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0021] Figure 1 It is a schematic diagram of the overall structure of a dry and wet electrochemical polishing machine; Figure 2 It is a schematic diagram of the electrolytic polishing module of a dry and wet electrochemical polishing machine; Figure 3 It is a schematic diagram of a clamping conductive module of a dry and wet electrochemical polishing machine; Figure 4 It is a schematic diagram of a circular oscillating component of a dry or wet electrochemical polishing machine; Figure 5 It is a schematic diagram of a composite motion module of a dry and wet electrochemical polishing machine; Figure 6It is a schematic diagram of the axial motion components of a dry or wet electrochemical polishing machine; Figure: 1, electrolytic polishing module; 2, clamping conductive module; 3, circular swing assembly; 4, compound motion module; 5, axial motion assembly; 11, positioning base; 12, solution barrel; 13, pressing device; 14, cathode rod; 15, electrolytic connector; 16, air pipe; 17, power supply; 18, air circulator; 19, protective cover; 21, latch rod; 22, conductive disk; 23, reducing sleeve; 24, fixing sleeve; 25, multiple Hole clamping rod; 26, conductive rod; 27, adjustable clip; 28, clamp; 31, hollow rod; 32, rotating motor; 33, conveyor belt; 34, eccentric gear; 35, eccentric rod; 41, rotating handle; 42, fixer; 43, auxiliary positioner; 44, lower arm; 45, sliding roller; 46, longitudinal lock; 47, upper arm; 48, transverse lock; 51, connecting rod; 52, rotating motor; 53, eccentric shaft; 54, rotating disk; DETAILED DESCRIPTION See also Figures 1 to 6 This embodiment provides a dry and wet electrochemical polishing device, comprising: Electrolytic polishing module 1, the tank is filled with electrolyte and polishing sand, and insoluble metal serves as the cathode.

[0022] The conductive module 2 is clamped, and the part to be polished is clamped. The part to be polished serves as an anode and is immersed in the electrolyte of the electrolytic polishing module 1.

[0023] The circular swing component 3 is driven by a rotary motor, which drives the lower arm of the composite motion module to move in a horizontal circular motion through an eccentric rod; The composite motion module 4 is driven by a rotary motor to drive the upper arm and the lower arm, and synchronously controls the clamping conductive module 2 to make the workpiece perform circular motion and axial feed motion in the electrolyte at the same time.

[0024] The axial motion component 5 is driven by a rotary motor and controls the axial feed motion of the composite motion module 4 through an eccentric rod.

[0025] The dry and wet electrochemical polishing machine proposed in this embodiment uses the part to be polished as the anode and an insoluble metal (titanium (Ti)-based cathode) as the cathode, and both electrodes are immersed in an electrolytic cell at the same time; in wet electrochemical polishing, the workpiece acts as the anode and undergoes selective dissolution in the electrolyte, and the microscopic raised areas on its surface are preferentially dissolved due to the concentrated current density. At the same time, the dissolved products react with the electrolyte to form a passivation film with a gradient distribution; dry mechanical polishing selectively removes the thin film on the raised areas through the mechanical removal of the passivation film by abrasive particles, thereby achieving precise control of the surface morphology. That is, the present invention achieves efficient and ultra-precision polishing through the synergistic effect of a three-dimensional composite motion mechanism and electrolysis-abrasive particles.

[0026] Specifically: In this embodiment, the rotating motor 52 in the axial motion component 5 is connected to the rotating disk 54 through a needle bearing, and the eccentric shaft 53 is connected to the rotating disk 54, converting the rotational motion of the motor into eccentric motion. The eccentric shaft 53 is connected to the upper arm 47 in the compound motion module 4 through the connecting rod 51, thereby driving the compound motion module 4 to move up and down; the lower arm 44 of the compound motion module 4 is connected to the hollow rod 31 in the circular swing component 3 through a lubricated bearing, and the rotating motor 32 drives the eccentric gear 34 to move, driving the lower arm 44 to perform uniform circular motion in the horizontal plane.

[0027] It should be noted that the upper arm 47 and the lower arm 44 are flexibly connected through a transverse lock and a longitudinal lock to ensure the synchronization of the up and down movement and the circular movement.

[0028] Furthermore, a holder 42 is provided at the end of the lower arm 44, and a quick-release rotary handle 41 is provided at the bottom for locking and clamping the conductive module 2. When the rotary motor 52 and the axial rotary motor 32 are started synchronously, the composite motion module 4 drives the clamping conductive module 2 to perform two movements: vertical reciprocating motion, driven by the eccentric shaft 53, so that the workpiece moves up and down periodically in the polishing liquid, enhancing the efficiency of the polishing liquid exchange; and horizontal circular motion, so that the workpiece surface is evenly contacted with the polishing sand. Furthermore, after the workpiece to be polished is immersed in the electrolytic polishing liquid, a closed current loop is formed between the clamping conductive module 2 and the cathode rod 14, triggering an electrochemical reaction (anodic dissolution) on the workpiece surface. At the same time, under the synergistic effect of mechanical motion, the vertical motion pressure can promote the polishing sand to cut the microscopic protrusions on the workpiece surface, and the circular motion shear force can accelerate the peeling of the reaction products, ultimately achieving efficient electrochemical mechanical polishing.

[0029] In this embodiment, Figure 2As shown, the electrolytic polishing module 1 includes a positioning base 11, a solution barrel 12, a pressing device 13, a cathode rod 14, an electrolysis connector 15, an air pipe 16, a power supply 17, an air circulator 18, and a protective cover 19; wherein, the positioning base 11 is used to accurately place the solution barrel 12, the pressing device 13 is fixed to the protective cover 19 through the mounting seats on both sides of the protective cover, and is used to press the solution barrel 12, the electrolysis connector 15 connects the cathode rod 14 and the negative electrode of the power supply, the cathode rod 14 adopts a titanium (Ti)-based cathode rod, the electrolysis connector 15 and the air pipe 16 are fixed together on the annular groove of the solution barrel 12, and one end thereof is connected to the power supply 17; an air circulator 18 is also provided, which is installed on the top of the protective cover 19 and is used to adjust the polishing area The temperature and humidity in the polishing area are as follows: more specifically, the positioning base 11 is provided with a positioning boss on the top for accurately placing the solution barrel; the solution barrel 12 is made of corrosion-resistant polypropylene, and is divided into two layers, the upper layer contains the polishing liquid, and the lower layer stores the polishing sand. The outer wall of the barrel is provided with an annular liquid collecting tank; the clamping device adopts a manual clamping mechanism and is fixed by the mounting seats on both sides of the protective cover; the electrolytic connector connects the cathode rod and the negative pole of the power supply; the air circulator is installed on the top of the protective cover, and has a built-in temperature sensor and a humidity sensor for adjusting the temperature and humidity in the polishing area; the protective cover is connected to the positioning base through a magnetic sealing strip; the cathode rod is fixed to the edge of the solution barrel by an adjustable bracket, and is inserted into the solution barrel to form a current loop with the sample to be polished. In this embodiment, Figure 3 As shown, the clamping conductive module 2 includes a latch rod 21, a conductive disk 22, a reducing sleeve 23, a fixed sleeve 24, a porous clamping rod 25, a conductive rod 26, an adjustable clip 27, and a clamp 28; one end of the latch rod 21 is connected to the output end of the composite motion module 4 through a quick release interface, and the other end of the latch rod 21 is connected to the conductive disk 22; the conductive disk 22 is used to fix the polishing clamping tool and the conductive rod 26, and is equipped with a variety of clamping tools, which can simultaneously clamp non-standard round rods and gaskets. , hole parts and other special metal workpieces; specifically including a reducing sleeve 23, a fixed sleeve 24, a porous clamping rod 25, an adjustable clip 27, and a clamp 28; in addition, the conductive rod 26 is connected to the anode of the power supply 17 to form a current loop with the cathode rod 14; further, the reducing sleeve 23 is adapted to polishing tools of different sizes; the fixed sleeve 24 has a locking thread; the porous clamping rod 25 is used to clamp hole parts; the adjustable clip 27 has adjustable clamping force, and the clamp 28 can quickly replace the structure.

[0030] In this embodiment, Figure 4As shown, the swing assembly 3 includes a hollow rod 31, a rotary motor 32, a conveyor belt 33, an eccentric gear 34, and an eccentric rod 35. The hollow rod 31 is connected to the auxiliary positioner 43 of the composite motion module 4. The lower arm 44 passes through the hollow rod 31, and the hollow rod 31 is connected to the eccentric rod 35. The eccentric rod 35 is connected to an eccentric gear 34 at each end. The two eccentric gears 34 are connected by a conveyor belt 33. The two eccentric gears 34 are each driven by a rotary motor 32. The conveyor belt 33 uses a synchronous toothed belt to connect the eccentric gears 34 and is coaxially fixed to the rotary motor 32. Specifically, the rotary motor 32 is fixed by a shock-absorbing base. The hollow rod 31 is used to accurately transmit the swing power of the composite motion module. The upper end is connected to the eccentric rod 35. The eccentric rod 35 is connected to the eccentric gears at both ends through bearings.

[0031] In this embodiment, Figure 5 The composite motion module 4 includes a rotating handle 41, a fixer 42, an auxiliary positioner 43, a lower arm 44, a sliding roller 45, a longitudinal lock 46, an upper arm 47 and a transverse lock 48. The transverse lock 48 is connected to the upper end of the upper arm 47, and the lower end of the upper arm 47 is connected to the longitudinal lock 46. The longitudinal lock 46 is connected to the lower arm 44 through the sliding roller 45, and is connected to the fixer 42 through the lower arm 44. A quick-release rotating handle 41 is provided at the bottom of the fixer 42; the rotating handle 41 is rotated 90° to complete the fixing / release of the clamping conductive module 2; the auxiliary positioner 43 is rigidly connected to the hollow rod 31 of the swing assembly 3 through a high-strength flange, and a precision cross roller bearing is provided inside; the lower arm 44 and the upper arm 47 are connected by the longitudinal lock 46, and a sliding roller 45 is provided inside. Specifically, the bottom of the holder 42 is equipped with a quick-release rotating handle, which adopts a cam locking mechanism and can quickly fix or release the clamped conductive module by rotating it 90 degrees; the lower arm is driven by a hollow rod and an auxiliary positioner to move horizontally in a circular motion, and the end is connected to the clamped conductive module; the upper arm is connected to the axial motion component through a transverse lock to form a complete motion chain, and the lower arm and the upper arm are flexibly connected through a longitudinal lock; through a precise mechanical structure and an optimized motion control algorithm, the vertical reciprocating motion and horizontal circular motion of the workpiece to be polished are simultaneously realized.

[0032] In this embodiment, Figure 6As shown, the axial motion component 5 includes a connecting rod 51, a rotating motor 52, an eccentric shaft 53 and a rotating disk 54. The rotating motor 52 is fixed on the side wall of the box and is connected to the rotating disk through a coupling. An eccentric shaft 53 is set on the rotating disk 54. The eccentric shaft 53 is equipped with a locking nut and is connected to the rotating disk 54 through a needle bearing; the eccentric shaft 53 is connected to the vertically arranged connecting rod 51, and the other end of the connecting rod 51 is connected to the transverse lock. When the rotating motor 52 is working, the rotating disk 54 rotates at a constant speed, and the eccentric shaft 53 connected to it performs a circular motion, and then the connecting rod 51 transmits the up and down motion; the eccentric shaft 53 converts the axial motion into eccentric motion; the connecting rod converts the eccentric motion into up and down motion and transmits it to the transverse lock at the other end; the transverse lock is connected to the compound motion module to transmit the up and down motion.

[0033] It needs to be explained that the clamping conductive module 2 can use a variety of tooling fixtures to clamp a specific workpiece to be polished; when the clamping conductive module 2 is fixed, the power is started, and the rotating motor can automatically adjust the forward and reverse rotation and speed according to the program settings; the circular swing component 3 and the axial motion component 5 jointly drive the compound motion module 4 to form a three-dimensional motion mechanism, controlling the clamping conductive module to perform circular motion and axial feed motion in the electrolyte at the same time. This process can perform electrolytic polishing on different parts of the part to be polished.

[0034] As a preferred embodiment, the electrolytic polishing module 1 is further provided with an air circulator 18 capable of adjusting temperature and humidity.

[0035] The above is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with this technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solutions and inventive concepts of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A dry and wet electrochemical mechanical polishing device, characterized in that: It includes an electrolytic polishing module, a clamping conductive module, a circular swing component, a compound motion module and an axial motion component; The electrolytic polishing module is used to contain electrolyte and polishing sand, and is provided with a cathode rod; the clamping conductive module is located above the electrolytic polishing module and is used to clamp the part to be polished, and the part to be polished serves as an anode; The composite motion module is used to control the movement of the clamping conductive module, and includes an upper arm and a lower arm, which are connected by a longitudinal lock; the axial motion component is connected to the upper arm through a transverse lock, driving the composite motion module to perform axial feed motion; the circular swing component is connected to the lower arm through a bearing, driving the lower arm of the composite motion module to perform horizontal circular motion.

2. The dry and wet electrochemical mechanical polishing device according to claim 1, characterized in that: The axial motion assembly includes a connecting rod, a rotating motor, an eccentric shaft and a rotating disk. The rotating motor drives the rotating disk. The eccentric shaft is arranged on the rotating disk. The eccentric shaft is connected to the vertically arranged connecting rod.

3. The dry and wet electrochemical mechanical polishing device according to claim 1, wherein: The connecting rod is connected to the upper arm through a transverse lock.

4. The dry and wet electrochemical mechanical polishing device according to claim 1, wherein: The composite motion module further comprises a fixer and a rotating handle; the lower arm is connected to the fixer, a quick-release rotating handle is provided at the bottom of the fixer, and the rotating handle is connected to clamp the conductive module.

5. The dry and wet electrochemical mechanical polishing device according to claim 1, wherein: The composite motion module further comprises an auxiliary positioner, which is connected to the circular swing assembly and is connected to the lower arm via a bearing.

6. The dry and wet electrochemical mechanical polishing device according to claim 1, wherein: The swing assembly includes a hollow rod, a rotating motor, a conveyor belt, an eccentric gear and an eccentric rod. The hollow rod is connected to the auxiliary positioner of the composite motion module. The lower arm passes through the hollow rod, and the hollow rod is connected to the eccentric rod. The two ends of the eccentric rod are each connected to an eccentric gear. The two eccentric gears are connected by a conveyor belt. The two eccentric gears are each driven by a rotating motor. The conveyor belt uses a synchronous toothed belt to connect the eccentric gears and is coaxially fixed to the rotating motor.

7. The dry and wet electrochemical mechanical polishing device according to claim 1, wherein: The clamping conductive module includes a latch rod and a conductive disk. One end of the latch rod is connected to the lower arm of the composite motion module through a quick-release interface, and the other end of the latch rod is connected to the conductive disk; the conductive disk is used to fix the polishing clamping tool and the conductive rod.

8. The dry and wet electrochemical mechanical polishing device according to claim 1, wherein: The polishing clamping tool includes a reducing sleeve, a fixed sleeve, a porous clamping rod, an adjustable clip, and a clamp; in addition, the conductive rod is connected to the power anode to form a current loop with the cathode rod 14.

9. The dry and wet electrochemical mechanical polishing device according to claim 1, wherein: The electrolytic polishing module also includes a positioning base, a clamping device, an electrolytic connector, an air pipe, a power supply, an air circulator, and a protective cover; wherein, the positioning base is used to accurately place the solution barrel, the clamping device is fixed to the protective cover through the mounting bases on both sides of the protective cover and is used to clamp the solution barrel, the electrolytic connector connects the cathode rod and the negative pole of the power supply, and the electrolytic connector and the air pipe are jointly fixed on the annular groove of the solution barrel; the air circulator is installed on the top of the protective cover and is used to adjust the temperature and humidity in the polishing area.

10. The dry and wet electrochemical mechanical polishing device according to claim 1, wherein: The interior of the solution barrel is divided into two layers, the upper layer contains polishing liquid, and the lower layer stores polishing sand. The outer wall of the barrel is provided with an annular liquid collecting tank.

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