An ion pump power supply circuit

Abstract

The present invention discloses an ion pump power supply circuit. The circuit includes: a voltage adjustment output module, a control module, and a current-voltage conversion module; the input end of the voltage adjustment output module receives a low-voltage DC input voltage; the high-voltage output end of the voltage adjustment output module is connected to the ion pump anode; the ion pump housing is electrically connected to the input end of the current-voltage conversion module through an electron gun housing; the output end of the current-voltage conversion module is electrically connected to the control module; the ground end of the current-voltage conversion module is connected to a signal ground; the voltage adjustment output module converts the low-voltage DC input voltage and outputs a high-voltage DC voltage to the ion pump anode, thereby generating an operating current in the ion pump cavity and returning the high-voltage DC voltage to the current-voltage conversion module through the ion pump housing and the electron gun housing; the current-voltage conversion module detects the operating current in the ion pump cavity and converts the operating current into a voltage signal; and the control module determines the vacuum degree in the ion pump cavity based on the voltage signal.

Description

Technical Field

[0001] The embodiments of the present invention relate to the technical field of ion pumps, and in particular to an ion pump power supply circuit. Background Art

[0002] The electron source of a transmission electron microscope (TEM) must operate in an ultra-high vacuum environment (1E-7 Pa to 1E-8 Pa) to ensure electron beam stability and imaging resolution. An ion pump is key to achieving this ultra-high vacuum. A high-voltage power supply generates a strong electric field within the pump, which ionizes residual gas molecules and adsorbs them onto a titanium film, creating an ultra-high vacuum environment.

[0003] Currently, traditional ion pump power supply circuits require a current return line due to an unreasonable design of the feedback current signal system, which makes the ion pump power supply circuit larger and difficult to integrate into a compact cavity. In addition, traditional ion pump power supply circuits cannot measure the vacuum degree inside the ion pump cavity, and usually use external vacuum detection equipment to monitor the vacuum degree of the ion pump cavity, which increases complexity and application costs. Summary of the Invention

[0004] The present invention provides an ion pump power supply circuit, which simplifies the ion pump working current detection circuit and simultaneously realizes the measurement of the vacuum degree of the ion pump cavity through a voltage signal.

[0005] To achieve the above objectives, an embodiment of the present invention provides an ion pump power supply circuit, which includes: a voltage adjustment output module, a control module and a current-voltage conversion module;

[0006] The input end of the voltage adjustment output module receives a low-voltage DC input voltage; the high-voltage output end of the voltage adjustment output module is connected to the anode of the ion pump; the ion pump housing is electrically connected to the input end of the current-voltage conversion module through the electron gun housing; the output end of the current-voltage conversion module is electrically connected to the control module; the ground end of the current-voltage conversion module is connected to the signal ground;

[0007] The voltage adjustment output module is used to convert the low-voltage DC input voltage and output it into a high-voltage DC voltage to the ion pump anode so that a working current is generated in the ion pump cavity and returned to the current-voltage conversion module through the ion pump housing and the electron gun housing;

[0008] The current-voltage conversion module is used to detect the operating current in the ion pump cavity and convert the operating current into a voltage signal;

[0009] A control module is used to determine the vacuum degree in the ion pump chamber according to the voltage signal.

[0010] Optionally, the ion pump power supply circuit further includes: a voltage sampling module and a feedback voltage adjustment module; the voltage adjustment output module includes a voltage adjustment unit and a voltage output unit;

[0011] The input end of the voltage adjustment unit receives the input of the low-voltage DC input voltage; the output end of the voltage adjustment unit is electrically connected to the input end of the voltage output unit; the high-voltage output end of the voltage output unit is connected to the anode of the ion pump; the control module is also electrically connected to the control end of the voltage adjustment unit;

[0012] The input end of the voltage sampling module is electrically connected to the high-voltage output end of the voltage output unit; the sampling output end of the voltage sampling module is electrically connected to the input end of the feedback voltage adjustment module; the output end of the feedback voltage adjustment module is electrically connected to the control module; the ground end of the voltage sampling module is connected to the signal ground;

[0013] The voltage sampling module is used to collect and feed back the high-voltage DC voltage output by the voltage output unit in real time; the feedback voltage adjustment module is used to adjust the output error amplification signal to the control module according to the high-voltage DC feedback voltage and the reference voltage signal;

[0014] The control module is configured to output a pulse control signal to the voltage adjustment unit according to the error amplification signal and the voltage signal so that the voltage adjustment unit adjusts the low-voltage DC voltage signal.

[0015] Optionally, the current-voltage conversion module includes: an operational amplifier unit and an IV conversion resistor;

[0016] The ion pump housing is connected to the first input terminal of the operational amplifier unit and the ground terminal of the operational amplifier unit through the electron gun housing; the second input terminal of the operational amplifier unit is electrically connected to the first terminal of the IV conversion resistor and is connected to the signal ground; the second terminal of the IV conversion resistor is electrically connected to the output terminal of the operational amplifier unit; the output terminal of the operational amplifier unit is also electrically connected to the control module; and the power supply terminal of the operational amplifier unit is electrically connected to the voltage source.

[0017] Optionally, the voltage sampling module includes: a first resistor and a second resistor;

[0018] The first end of the first resistor is electrically connected to the high voltage output end of the voltage output unit; the second end of the first resistor is electrically connected to the first end of the second resistor; and the second end of the second resistor is electrically connected to the second input end of the operational amplifier unit.

[0019] Optionally, the feedback voltage adjustment module includes: a voltage follower, an error amplifier and a first capacitor;

[0020] The first input end of the voltage follower is electrically connected to the sampling output end of the voltage sampling module; the second input end of the voltage follower is electrically connected to the output end of the voltage follower; the output end of the voltage follower is also electrically connected to the first input end of the error amplifier; the second input end of the error amplifier receives the reference voltage signal; the output end of the error amplifier is electrically connected to the first input end of the error amplifier and is electrically connected to the control module; the first end of the first capacitor is electrically connected to the output end of the error amplifier; the second end of the first capacitor is electrically connected to the first input end of the error amplifier.

[0021] Optionally, the ion pump power supply circuit further includes: a protection module; the current-voltage conversion module is connected to the electron gun housing through the protection module.

[0022] Optionally, the protection module includes: a second capacitor, a first diode and a second diode;

[0023] The first end of the second capacitor, the first end of the first diode and the second end of the second diode are electrically connected to the first input end of the operational amplifier unit; the first end of the second capacitor, the first end of the first diode and the second end of the second diode are all electrically connected to the electron gun housing through the ion pump housing.

[0024] Optionally, the control module is configured to output a pulse control signal to the voltage adjustment unit according to the error amplification signal and the voltage signal so that the voltage adjustment unit adjusts the low-voltage DC input voltage, specifically:

[0025] The control module is configured to determine a current signal based on the voltage signal, and when the error amplification signal is a first error amplification signal and when the current signal is less than a first preset current signal, output a first pulse control signal to the voltage adjustment unit so that the voltage output unit keeps outputting a first high-voltage direct current voltage;

[0026] When the error amplified signal is the first error amplified signal and when the current signal is greater than the first preset current signal, outputting a second pulse control signal to the voltage adjustment unit so that the voltage output unit outputs a second high-voltage DC voltage;

[0027] When the error amplified signal is a second error amplified signal and when the current signal is within a preset current signal range, outputting a third pulse control signal to the voltage adjustment unit so that the voltage output unit maintains a second high-voltage direct current voltage;

[0028] When the error amplification signal is the second error amplification signal and when the current signal is not within the preset current signal range, a fourth pulse control signal is output to the voltage adjustment unit so that the voltage output unit outputs a third high-voltage DC voltage.

[0029] Optionally, the voltage adjustment unit includes a switching circuit.

[0030] Optionally, the voltage output unit includes a primary boost subunit and a secondary boost rectifier subunit;

[0031] The output end of the voltage adjustment unit is electrically connected to the input end of the secondary boost rectifier unit through the primary boost subunit; the output end of the secondary boost rectifier unit is electrically connected to the anode of the ion pump.

[0032] In an embodiment of the present invention, a voltage adjustment output module receives a low-voltage DC input voltage through its input terminal; a high-voltage output terminal of the voltage adjustment output module is connected to the ion pump anode; the ion pump housing is electrically connected to the input terminal of a current-voltage conversion module through an electron gun housing; and the output terminal of the current-voltage conversion module is electrically connected to a control module. Thus, the voltage adjustment output module converts the low-voltage DC input voltage and outputs it to a high-voltage DC voltage to the ion pump anode, thereby connecting the ion pump anode to the high-voltage DC voltage and generating an operating current in the ion pump cavity. The operating current generated in the ion pump cavity flows through the ion pump housing and the electron gun housing into the current-voltage conversion module, which detects the operating current in the ion pump cavity and determines a voltage signal based on the operating current. The control module determines the vacuum level in the ion pump cavity based on the voltage signal based on a current-vacuum model. Thus, the ion pump housing and the electron gun housing serve as a return path for the current signal, simplifying the current detection circuit and avoiding the need, as in the prior art, to feed the current signal back to a resistor via a return line to measure the current signal flowing through the resistor, which would increase the overall circuit size. Furthermore, this solution measures the vacuum level in the ion pump cavity using the current signal.

[0033] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present invention, nor is it intended to limit the scope of the present invention. Other features of the present invention will become readily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0035] Figure 1 It is a structural diagram of an ion pump power supply circuit in the prior art;

[0036] Figure 2 1 is a schematic structural diagram of an isolation detection circuit provided by an embodiment of the present invention;

[0037] Figure 3 1 is a structural diagram of another isolation detection circuit provided by an embodiment of the present invention;

[0038] Figure 4 1 is a structural diagram of another isolation detection circuit provided by an embodiment of the present invention;

[0039] Figure 5 1 is a structural diagram of another isolation detection circuit provided by an embodiment of the present invention;

[0040] Figure 6 1 is a structural diagram of another isolation detection circuit provided by an embodiment of the present invention;

[0041] Figure 7 1 is a structural diagram of another isolation detection circuit provided by an embodiment of the present invention;

[0042] Figure 8 1 is a structural diagram of another isolation detection circuit provided by an embodiment of the present invention;

[0043] Figure 9 It is a structural diagram of another isolation detection circuit provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0044] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative work should fall within the scope of protection of the present invention.

[0045] It should be noted that the terms "first", "second", etc. in the description and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0046] Figure 1 It is a structural diagram of the ion pump power supply circuit in the prior art; Figure 1 As shown, the ion pump power supply circuit includes a high-voltage power supply V, a high-voltage output line L1, a return line L2, and a current detection module 01 composed of a detection resistor R1, a resistor R2, a resistor R3, a resistor R4, a resistor R5 and an operational amplifier U; the ground terminal of the operational amplifier U is connected to the electron gun housing 02; the power supply terminal of the operational amplifier U is electrically connected to the voltage source; the output terminal of the high-voltage power supply V is electrically connected to the ion pump anode A through the high-voltage output line L1; the ion pump housing B (i.e., the ion pump cathode) is electrically connected to the current detection module 01 through the return line L2. Connection; the ground terminal of the current detection module 01 is connected to the electron gun housing 02; that is, in the prior art, the high-voltage generating power supply V outputs a high-voltage signal to the ion pump anode A through the output line L1, thereby generating a working current in the ion pump, and the generated working current returns to the current detection module 01 for detection through the return line L2. Specifically, the generated working current passes through the detection resistor R1, and the resistors R2, R3, R4, R5 and the operational amplifier U can detect the voltage across the resistor R1, thereby determining the working current generated in the ion pump based on the voltage.

[0047] In the prior art, the current signal in the ion pump needs to be detected through the return line L2 and a certain current detection module 01, which will increase a certain amount of wiring and make the cavity space utilization rate in the electron gun low; at the same time, the prior art cannot reflect the vacuum degree in the ion pump cavity.

[0048] To solve the above problems, an embodiment of the present invention provides an ion pump power supply circuit. Figure 2 FIG. 1 is a schematic structural diagram of an ion pump power supply circuit provided by an embodiment of the present invention; Figure 2As shown, the ion pump power supply includes: a voltage adjustment output module 10, a current-voltage conversion module 20 and a control module 30; the input end of the voltage adjustment output module 10 receives a low-voltage DC input voltage; the high-voltage output end of the voltage adjustment output module 10 is connected to the ion pump anode A; the ion pump housing B is electrically connected to the input end of the current-voltage conversion module 20 through the electron gun housing 02; the output end of the current-voltage conversion module 20 is electrically connected to the control module 30; and the ground end of the current-voltage conversion module 20 is connected to the signal ground.

[0049] The voltage adjustment and output module 10 is used to convert the low-voltage DC input voltage and output it to a high-voltage DC voltage to the ion pump anode A, thereby generating an operating current in the ion pump cavity and returning it to the current-voltage conversion module 20 through the ion pump housing B and the electron gun housing 02. The current-voltage conversion module 20 is used to detect the operating current in the ion pump cavity and convert it into a voltage signal. The control module 30 is used to determine the vacuum level in the ion pump cavity based on the voltage signal. It will be understood that the ion pump housing B is mounted on the electron gun housing 02; the electron gun housing 02 houses the ion pump power supply circuit of this embodiment.

[0050] The voltage adjustment output module 10 can convert the low-voltage DC input voltage into an adjustable high-voltage DC voltage to the ion pump anode A through inversion, rectification and boosting. For example, the high-voltage DC voltage is 0-7 kV. The voltage adjustment output module 10 can be any adjustment module, which is not limited in this embodiment.

[0051] When the high-voltage DC voltage is output to the ion pump anode A, a working current is generated in the ion pump cavity, and the working current generated in the ion pump cavity is returned to the signal ground through the ion pump housing B and the electron gun housing 02, thus forming a complete current feedback loop; that is, in this embodiment, the electron gun housing 02 is involved in the current return path, and there is no need to adopt the return line L2 in the prior art; at the same time, the current-voltage conversion module 20 in this embodiment can detect the working current in the ion pump cavity and convert the working current into a voltage signal in the current feedback loop; that is, the current-voltage conversion module 20 is a specific structure adapted to the current feedback loop; thus, in this embodiment, the electron gun housing 02 is involved in the current return path, and there is no need to adopt the return line L2 in the prior art; at the same time, the current-voltage conversion module 20 with a specific structure is adopted, thereby realizing a simplified design of the ion pump working current detection circuit and improving the space utilization of the electron gun cavity.

[0052] In addition, in this embodiment, in the current feedback loop, the voltage signal converted by the current-voltage conversion module 20 can also be sent to the control module 30, and the control module 30 can determine the vacuum degree in the ion pump chamber based on the voltage signal based on the voltage-vacuum degree model; it can be understood that the voltage-vacuum degree model is a model based on the output of a certain high-voltage DC voltage signal by the voltage adjustment output module 20;

[0053] This embodiment utilizes the electron gun housing 02 as a return path for the current signal and utilizes a current-to-voltage conversion module 20 of a specific structure to simplify the ion pump operating current detection circuit and improve space utilization within the electron gun cavity. This avoids the need in the prior art to feed back the current signal to the resistor via a return line, thereby measuring the current signal flowing through the resistor based on an operational amplifier and peripheral resistors, which would result in a larger overall circuit size. Furthermore, this solution also utilizes the current signal to measure the vacuum degree of the ion pump cavity.

[0054] Optionally, based on the above embodiment, the structure of the current-voltage conversion module 20 is further refined. Figure 3 FIG. 1 is a schematic structural diagram of an ion pump power supply circuit provided by an embodiment of the present invention; Figure 3 As shown, the current-voltage conversion module 20 includes: an operational amplifier unit U1A and an IV conversion resistor R0; the electron gun housing 02 is connected to the first input terminal (+) of the operational amplifier unit U1A and the ground terminal of the operational amplifier unit U1A; the second input terminal (-) of the operational amplifier unit U1A is electrically connected to the first terminal of the IV conversion resistor R0 and to the signal ground; the second terminal of the IV conversion resistor R0 is electrically connected to the output terminal of the operational amplifier unit U1A; the output terminal of the operational amplifier unit U1A is also electrically connected to the control module 30; and the power supply terminal of the operational amplifier unit U1A is electrically connected to the voltage source VCC.

[0055] Specifically, the current return path in this embodiment is as follows: the high-voltage DC voltage output by the voltage adjustment output module 10 is output to the ion pump anode A, generating a working current in the ion pump cavity. This working current flows through the ion pump housing B and the electron gun housing 02 into the ground terminal of the operational amplifier unit U1A, and then flows back to the signal ground after passing through the output terminal of the operational amplifier unit U1A and the IV conversion resistor R0, thus forming a complete current feedback loop; the voltage signal corresponding to the current signal flowing through the IV conversion resistor R0 is the voltage signal output by the operational amplifier unit U1A; thus, the working current in the ion pump cavity can be reflected by the voltage signal output by the operational amplifier unit U1A. In addition, based on the voltage-vacuum model, the vacuum degree in the ion pump cavity can be determined by the voltage signal output by the operational amplifier unit U1A.

[0056] Optionally, based on the above embodiment, the ion pump power supply circuit is further optimized. Figure 4 FIG. 1 is a schematic diagram of a structure of an ion pump power supply circuit provided by an embodiment of the present invention. Figure 4 As shown, the ion pump power supply circuit further includes: a voltage sampling module 40 and a feedback voltage adjustment module 50; the voltage adjustment output module 10 includes a voltage adjustment unit 11 and a voltage output unit 12;

[0057] The input end of the voltage adjustment unit 11 receives an input low-voltage DC input voltage; the output end of the voltage adjustment unit 11 is electrically connected to the input end of the voltage output unit 12; the high-voltage output end of the voltage output unit 12 is connected to the ion pump anode A; the control module 30 is also electrically connected to the control end of the voltage adjustment unit 11;

[0058] The input end of the voltage sampling module 40 is electrically connected to the high voltage output end of the voltage output unit 12; the sampling output end of the voltage sampling module 40 is electrically connected to the input end of the feedback voltage adjustment module 50; the output end of the feedback voltage adjustment module 50 is electrically connected to the control module 30; the ground end of the voltage sampling module 40 is connected to the signal ground;

[0059] The voltage sampling module 40 is used to collect and feedback the high-voltage DC voltage signal output by the voltage output unit 12 in real time; the feedback voltage adjustment module 50 is used to adjust the output error amplification signal to the control module 30 according to the high-voltage DC feedback voltage and the reference voltage signal; the control module 30 is used to output a pulse control signal to the voltage adjustment unit 11 according to the error amplification signal and the voltage signal so that the voltage adjustment unit 11 adjusts the low-voltage DC input voltage.

[0060] Among them, the voltage sampling module 40 can collect and feedback the high-voltage DC voltage output by the voltage output unit 12 in real time; the feedback voltage adjustment module 50 adjusts the output error amplification signal to the control module 30 according to the high-voltage DC feedback voltage and the reference voltage signal; the reference voltage signal is the minimum DC voltage signal that allows a beam to be formed in the ion pump, thereby accelerating the start-up time of the ion pump; the reference voltage signal can be set to different values ​​according to actual needs; in this way, the control module 30 can output a pulse control signal to the voltage adjustment unit 11 according to the error amplification signal and the voltage signal, so that the voltage adjustment unit 11 adjusts the low-voltage DC input voltage, and then the voltage output unit 12 adjusts the output high-voltage DC voltage. In this way, the low-voltage DC input voltage is adjusted by the voltage adjustment unit 11, thereby shortening the start-up time of the ion pump, avoiding the problem in the prior art that the low-voltage DC input voltage cannot be adjusted, and the voltage output unit 12 cannot adjust the output high-voltage DC voltage, which makes it difficult to form a beam in the pump body, and the ion pump starts. It takes several hours or even longer.

[0061] Optionally, this embodiment refines the voltage sampling module 40. Figure 5 FIG. 1 is a schematic structural diagram of another ion pump power supply circuit provided by an embodiment of the present invention; Figure 5 As shown, the voltage sampling module 40 includes: a first resistor R11 and a second resistor R12; the first end of the first resistor R11 is electrically connected to the high-voltage output end of the voltage output unit 12; the second end of the first resistor R11 is electrically connected to the first end of the second resistor R12; the second end of the second resistor R12 is electrically connected to the second input end of the operational amplifier unit U1A.

[0062] In this embodiment, the first resistor R11 and the second resistor R12 are used as the voltage sampling module 40, so as to divide the high-voltage DC voltage signal and feed it back to the feedback voltage adjustment module 50. In addition, it should be noted that the second input terminal of the operational amplifier unit U1A is connected to the signal ground. In this embodiment, the second end of the second resistor R12 is directly connected to the second end of the operational amplifier unit U1A. In this way, the second end of the second resistor R12 shares the signal ground of the second end of the operational amplifier unit U1A, thereby meeting the ground level of the ground terminal of the voltage sampling module 40.

[0063] Optionally, this embodiment refines the feedback voltage adjustment module 50. Figure 6 FIG. 1 is a schematic structural diagram of another ion pump power supply circuit provided by an embodiment of the present invention; Figure 6 As shown, the feedback voltage adjustment module 50 includes: a voltage follower 51, an error amplifier 52 and a first capacitor C1; the first input end of the voltage follower 51 is electrically connected to the sampling output end of the voltage sampling module 40 (that is, the first end of the second resistor R12); the second input end of the voltage follower 51 is electrically connected to the output end of the voltage follower 51; the output end of the voltage follower 51 is also electrically connected to the first input end of the error amplifier 52; the second input end of the error amplifier 52 receives the reference voltage signal VREF; the output end of the error amplifier 52 is electrically connected to the first input end of the error amplifier 52 and is electrically connected to the control module 30; the first end of the first capacitor C1 is electrically connected to the output end of the error amplifier 52; the second end of the first capacitor C1 is electrically connected to the first input end of the error amplifier 52. Specifically, the divided voltage output by the voltage sampling module 40 is fed back to the voltage follower 51, and the voltage follower 51 follows the divided voltage output to the error amplifier 52. The error amplifier 52 performs error amplification based on the divided voltage and the reference voltage signal and outputs the error amplified signal to the control module 30. The control module 30 then outputs a pulse control signal to the voltage adjustment unit 11 based on the error amplified signal and the voltage signal output by the current-voltage conversion module 20, so that the voltage adjustment unit 11 adjusts the low-voltage DC input voltage to a certain AC voltage signal, and then boosts the certain AC voltage signal through the voltage output unit 12 and converts it into a high-voltage DC voltage output, thereby shortening the start-up time of the ion pump.

[0064] It should also be noted that while the voltage follower 51 is outputting the divided voltage, since the voltage follower 51 maintains a high impedance state when outputting the divided voltage, it can also prevent the current signal detected by the current-voltage conversion module 20 from flowing into the voltage follower 51, thereby improving the accuracy of the current signal detection by the current-voltage conversion module 20.

[0065] Optional, continue to refer to Figure 6 , the voltage adjustment unit 11 adjusts the low-voltage DC input voltage signal to be refined, and the control module 30 outputs a pulse control signal to the voltage adjustment unit 11 according to the error amplification signal and the voltage signal so that the voltage adjustment unit 11 adjusts the low-voltage DC input voltage, specifically:

[0066] The control module 30 is used to determine the current signal based on the voltage signal, and when the error amplification signal is the first error amplification signal and when the current signal is less than a first preset current signal (e.g., 10 nA), output a first pulse control signal to the voltage adjustment unit 11 so that the voltage output unit 12 maintains outputting a first high-voltage DC voltage (e.g., 7 kV). Since when the current signal is less than the first preset current signal (e.g., 10 nA), it indicates that the ion pump is not started, at this time the voltage output unit 12 needs to maintain outputting the first high-voltage DC voltage.

[0067] When the error amplification signal is the first error amplification signal, and when the current signal is greater than the first preset current signal, a second pulse control signal is output to the voltage adjustment unit 11 so that the voltage output unit 12 outputs a second high-voltage DC voltage (e.g., 5 kV); when the current signal is greater than the first preset current signal, it indicates that the ion pump is started, and the voltage output unit 12 outputs the second high-voltage DC voltage, thereby reducing power consumption; at the same time, it can also reduce the influence of leakage current in the pump body on the detection current signal of the current-voltage conversion module.

[0068] When the error amplified signal is the second error amplified signal and the current signal is within a preset current signal range (e.g., 300nA-10μA), a third pulse control signal is output to the voltage adjustment unit 11 so that the voltage output unit maintains outputting the second high-voltage DC voltage (e.g., 5kV);

[0069] When the error amplification signal is the second error amplification signal and the operating current is outside the preset current signal range, a fourth pulse control signal is output to the voltage adjustment unit 11 to cause the voltage output unit 12 to maintain outputting the third high-voltage DC voltage. The third high-voltage DC voltage is the minimum safety protection voltage. Further adjusting the output voltage in this manner can further reduce power consumption and minimize the impact of leakage current within the pump body on the detection current signal of the IV conversion module.

[0070] Optional, Figure 7 FIG. 1 is a schematic structural diagram of an ion pump power supply circuit provided by an embodiment of the present invention; Figure 7 As shown, the ion pump power supply circuit also includes a protection module 60. The current-voltage conversion module 20 is connected to the electron gun housing 02 via the protection module 60. When the high-voltage DC voltage suddenly changes, a high voltage of a certain magnitude may be induced on the signal ground. This induced high voltage releases current through the protection module 60, preventing damage to the current-voltage conversion module 20. Thus, the protection module 60 provides protection.

[0071] Optionally, this embodiment refines the protection module 60. Figure 8 FIG. 1 is a schematic structural diagram of another ion pump power supply circuit provided by an embodiment of the present invention; Figure 8 As shown, the protection module 60 includes: a second capacitor C2, a first diode D1, and a second diode D2; the first end of the second capacitor C2, the first end of the first diode D1, and the second end of the second diode D2 are electrically connected to the first input end of the operational amplifier unit U1A; the first end of the second capacitor C2, the first end of the first diode D1, and the second end of the second diode D2 are electrically connected to the ion pump housing 02. The second capacitor C2, the first diode D1, and the second diode D2 can function to induce a high voltage of a certain amplitude on the signal ground when a sudden change occurs in the high-voltage DC voltage signal, and the induced high voltage releases current through the protection module 60.

[0072] Optional, continue to refer to Figure 8 The voltage adjustment unit 11 includes a switch circuit. The switch circuit may include a single or multiple transistors. The switch circuit can convert a low-voltage DC voltage signal into an AC signal with a certain duty cycle by adjusting the conduction time of the internal transistors.

[0073] Optional, Figure 9 FIG. 1 is a schematic structural diagram of an ion pump power supply circuit provided by an embodiment of the present invention; Figure 9As shown, the voltage output unit 12 includes a primary boost subunit 121 and a secondary boost rectifier unit 122. The output end of the voltage adjustment unit 11 is electrically connected to the input end of the secondary boost rectifier unit 122 via the primary boost subunit 121. The output end of the secondary boost rectifier unit 122 is electrically connected to the ion pump anode A. The primary boost subunit 121 can perform a primary boost process on the AC signal with a certain duty cycle output by the switching circuit. The primary boost subunit 121 can include a transformer. The secondary boost rectifier unit 122 can rectify the AC signal after the primary boost process of the primary boost subunit, and then perform a secondary boost process to ultimately output a high-voltage DC voltage signal. The secondary boost rectifier unit 122 can include a voltage doubling rectifier circuit. The voltage doubling rectifier circuit includes a single voltage doubling rectifier circuit composed of multiple capacitors and diodes. The number of stages of the voltage doubling rectifier circuit is not limited in this embodiment. In some embodiments, the secondary boost rectifier unit 122 includes a third capacitor C3, a third diode D3, a fourth capacitor C4, and a fourth diode D4. A first end of the third capacitor C3 is electrically connected to the first output end of the secondary coil of the transformer; a first end of the fourth capacitor C4 is electrically connected to the second output end of the secondary coil of the transformer; a second end of the third capacitor C3 is electrically connected to the first end of the third diode D3 and the second end of the fourth diode D4; a second end of the third diode D3 is electrically connected to the second output end of the secondary coil of the transformer; and a first end of the fourth diode D4 is electrically connected to the second end of the fourth capacitor C4.

[0074] Optional, continue to refer to Figure 9 The power supply circuit also includes: an input filter module and an output filter module; the input filter module 70 may include a first filter inductor L1 and a first filter capacitor C11; the output filter module 80 may include a first filter resistor R1 and a second filter capacitor C12; the first end of the first filter inductor L1 is electrically connected to the first input end of the low-voltage DC input voltage; the second end of the first filter inductor L1 is electrically connected to the first end of the first filter capacitor C11; the second end of the second filter capacitor C12 is electrically connected to the second input end of the low-voltage DC input voltage; the first end of the first filter resistor R1 is electrically connected to the output end of the voltage doubler rectifier circuit; the second end of the first filter resistor R1 is electrically connected to the first end of the second filter capacitor C12; the second end of the second filter capacitor C12 is connected to the signal ground.

[0075] The input filter module 70, consisting of the first filter inductor L1 and the first filter capacitor C11, can filter the low-voltage DC voltage signal; the output filter module 80, consisting of the first filter resistor R1 and the second filter capacitor C12, can filter the output high-voltage DC voltage. In some embodiments, a first current-limiting resistor R2 is also included; the first end of the first current-limiting resistor R2 is electrically connected to the first end of the first filter resistor R1; and the second end of the first current-limiting resistor R2 is electrically connected to the ion pump anode A.

[0076] Note that the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will appreciate that the present invention is not limited to the specific embodiments herein, and that various obvious changes, readjustments, and substitutions are possible for those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the scope of the present invention. The scope of the present invention is determined by the scope of the appended claims.

Claims

1. An ion pump power supply circuit, characterized in that: include: Voltage adjustment output module, control module and current-voltage conversion module; The input end of the voltage adjustment output module receives a low-voltage DC input voltage; the high-voltage output end of the voltage adjustment output module is connected to the anode of the ion pump; the ion pump housing is electrically connected to the input end of the current-voltage conversion module through the electron gun housing; the output end of the current-voltage conversion module is electrically connected to the control module; the ground end of the current-voltage conversion module is connected to the signal ground; The voltage adjustment output module is used to convert the low-voltage DC input voltage and output it into a high-voltage DC voltage to the ion pump anode so that a working current is generated in the ion pump cavity and returned to the current-voltage conversion module through the ion pump housing and the electron gun housing; The current-voltage conversion module is used to detect the operating current in the ion pump cavity and convert the operating current into a voltage signal; A control module is used to determine the vacuum degree in the ion pump chamber according to the voltage signal.

2. The ion pump power supply circuit according to claim 1, characterized in that: Also includes: Voltage sampling module and feedback voltage adjustment module; the voltage adjustment output module includes a voltage adjustment unit and a voltage output unit; The input end of the voltage adjustment unit receives the input of the low-voltage DC input voltage; the output end of the voltage adjustment unit is electrically connected to the input end of the voltage output unit; the high-voltage output end of the voltage output unit is connected to the anode of the ion pump; the control module is also electrically connected to the control end of the voltage adjustment unit; The input end of the voltage sampling module is electrically connected to the high-voltage output end of the voltage output unit; the sampling output end of the voltage sampling module is electrically connected to the input end of the feedback voltage adjustment module; the output end of the feedback voltage adjustment module is electrically connected to the control module; the ground end of the voltage sampling module is connected to the signal ground; The voltage sampling module is used to collect and feed back the high-voltage DC voltage output by the voltage output unit in real time; the feedback voltage adjustment module is used to adjust the output error amplification signal to the control module according to the high-voltage DC feedback voltage and the reference voltage signal; The control module is configured to output a pulse control signal to the voltage adjustment unit according to the error amplification signal and the voltage signal so that the voltage adjustment unit adjusts the low-voltage DC voltage signal.

3. The ion pump power supply circuit according to claim 2, characterized in that: The current-voltage conversion module includes: an operational amplifier unit and an IV conversion resistor; The ion pump housing is connected to the first input terminal of the operational amplifier unit and the ground terminal of the operational amplifier unit through the electron gun housing; the second input terminal of the operational amplifier unit is electrically connected to the first terminal of the IV conversion resistor and is connected to the signal ground; the second terminal of the IV conversion resistor is electrically connected to the output terminal of the operational amplifier unit; the output terminal of the operational amplifier unit is also electrically connected to the control module; and the power supply terminal of the operational amplifier unit is electrically connected to the voltage source.

4. The ion pump power supply circuit according to claim 3, characterized in that: The voltage sampling module includes: a first resistor and a second resistor; The first end of the first resistor is electrically connected to the high voltage output end of the voltage output unit; the second end of the first resistor is electrically connected to the first end of the second resistor; and the second end of the second resistor is electrically connected to the second input end of the operational amplifier unit.

5. The ion pump power supply circuit according to claim 2, characterized in that: The feedback voltage adjustment module includes: a voltage follower, an error amplifier and a first capacitor; The first input end of the voltage follower is electrically connected to the sampling output end of the voltage sampling module; the second input end of the voltage follower is electrically connected to the output end of the voltage follower; the output end of the voltage follower is also electrically connected to the first input end of the error amplifier; the second input end of the error amplifier receives the reference voltage signal; the output end of the error amplifier is electrically connected to the first input end of the error amplifier and is electrically connected to the control module; the first end of the first capacitor is electrically connected to the output end of the error amplifier; the second end of the first capacitor is electrically connected to the first input end of the error amplifier.

6. The ion pump power supply circuit according to claim 3, characterized in that: Also includes: Protection module; The current-voltage conversion module is connected to the electron gun housing through the protection module.

7. The ion pump power supply circuit according to claim 6, characterized in that: The protection module includes: a second capacitor, a first diode and a second diode; The first end of the second capacitor, the first end of the first diode and the second end of the second diode are electrically connected to the first input end of the operational amplifier unit; the first end of the second capacitor, the first end of the first diode and the second end of the second diode are all electrically connected to the electron gun housing through the ion pump housing.

8. The ion pump power supply circuit according to claim 2, characterized in that: The control module is configured to output a pulse control signal to the voltage adjustment unit according to the error amplification signal and the voltage signal so that the voltage adjustment unit adjusts the low-voltage DC input voltage, specifically: The control module is configured to determine a current signal based on the voltage signal, and when the error amplification signal is a first error amplification signal and when the current signal is less than a first preset current signal, output a first pulse control signal to the voltage adjustment unit so that the voltage output unit keeps outputting a first high-voltage direct current voltage; When the error amplified signal is the first error amplified signal and when the current signal is greater than the first preset current signal, outputting a second pulse control signal to the voltage adjustment unit so that the voltage output unit outputs a second high-voltage DC voltage; When the error amplified signal is a second error amplified signal and when the current signal is within a preset current signal range, outputting a third pulse control signal to the voltage adjustment unit so that the voltage output unit maintains a second high-voltage direct current voltage; When the error amplification signal is the second error amplification signal and when the current signal is not within the preset current signal range, a fourth pulse control signal is output to the voltage adjustment unit so that the voltage output unit outputs a third high-voltage DC voltage.

9. The ion pump power supply circuit according to claim 2, characterized in that: The voltage adjustment unit includes a switch circuit.

10. The ion pump power supply circuit according to claim 2, characterized in that: The voltage output unit includes a primary boost subunit and a secondary boost rectifier subunit; The output end of the voltage adjustment unit is electrically connected to the input end of the secondary boost rectifier unit through the primary boost subunit; the output end of the secondary boost rectifier unit is electrically connected to the anode of the ion pump.

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