Plasma generator

Abstract

The invention belongs to the technical field of material treatment and processing, and particularly discloses a plasma generator, which comprises a cathode, an anode, a gas distribution ring, a cathode water-cooled jacket and a driving unit, and is characterized in that one end of the cathode water-cooled jacket is coaxially connected with the cathode; one end of the anode is a closed end, a gas distribution ring is mounted in an anode mounting cavity, an anode mounting cavity is formed in one side, close to the closed end, of the anode, and an insulating seat is arranged between the anode and the cathode; an annular cavity is formed between the anode and the cathode, the annular cavity between the anode and the cathode sequentially comprises a buffer channel and a discharge channel in the axial direction, and the two ends of the buffer channel communicate with the anode mounting cavity and the discharge channel correspondingly; the gas distribution ring is communicated with the buffer channel, a plurality of gas inlet holes are formed in the circumferential direction of the gas distribution ring, a working gas inlet communicated with the anode mounting cavity is formed in the closed end of the anode, and a feeding port communicated with the gas distribution ring is further formed in the closed end of the anode. According to the invention, the interaction time between the material and the plasma high temperature can be prolonged.

Description

Technical Field

[0001] The present invention relates to the technical field of material handling and processing, and in particular to a plasma generator. Background Art

[0002] Thermal plasma, a high-temperature, high-energy plasma state, typically reaches temperatures ranging from several thousand to tens of thousands of degrees Celsius. This provides excellent conditions for the rapid melting and vaporization of materials and the synthesis of new materials. For example, this technology can evaporate or decompose impurities in materials at high temperatures, achieving material purification. It can effectively remove difficult-to-remove impurities and is ideally suited for purifying high-precision materials such as high-purity metals, semiconductors, and nanomaterials. This technology provides an effective means for preparing and synthesizing materials in high-temperature environments, and therefore has broad application prospects in fields such as semiconductor and optoelectronic material purification, the synthesis of carbon nanotubes and graphene for new energy applications, and the processing of spherical powders for 3D printing.

[0003] Plasma generators, which generate this characteristic through direct current arc discharge, primarily consist of a cathode and an anode. The working gas is ionized by the electric field between the cathode and anode electrodes, generating a high-temperature arc. This arc is then ejected through the discharge channel toward the generator outlet, forming a plasma jet. Existing arc thermal plasma generators produce plasma jets with large temperature gradients and short high-temperature zones. This results in a short interaction time between the material and the plasma's high temperature, hindering their application in high-end fields such as material purification, processing, and synthesis. Summary of the Invention

[0004] The present invention provides a plasma generator, the purpose of which is to prolong the interaction time between materials and plasma high temperature.

[0005] The present invention is achieved through the following technical solution: a plasma generator comprising a cathode, an anode, a gas distribution ring, a cathode water cooling jacket, and a drive unit, wherein the cathode is located inside the anode and is coaxially arranged with the anode, one end of the cathode water cooling jacket is coaxially fixedly connected to the cathode, and the drive unit is used to drive the cathode water cooling jacket to rotate; One end of the anode is a closed end, a gas distribution ring is installed in the anode mounting cavity, and the other end of the anode is an open end. The anode is provided with an anode mounting cavity on a side of the anode near the closed end, and an insulating seat is provided between the anode and the cathode for insulating the two. An annular cavity is formed between the anode and the cathode, and the annular cavity between the anode and the cathode includes a buffer channel and a discharge channel in sequence along its axial direction. The two ends of the buffer channel are respectively connected to the anode mounting cavity and the discharge channel, and the gap distance of the discharge channel is smaller than the gap distance of the buffer channel. The gas distribution ring is connected to the buffer channel, and a plurality of air inlet holes are provided in the circumference of the gas distribution ring. The closed end of the anode is provided with a working gas inlet connected to the anode mounting cavity, and the closed end of the anode is also provided with a feed port connected to the gas distribution ring.

[0006] Compared with the existing technology, this solution has the following advantages and beneficial effects: In this solution, the material enters the gas distribution ring from the feed port, and the working gas is introduced from the working gas inlet. The working gas and the material are mixed to drive the material into the annular cavity between the anode and the cathode. Since the annular cavity between the anode and the cathode includes a buffer channel and a discharge channel, the gap distance of the buffer channel is greater than the gap distance of the discharge channel. The gas distribution ring and the buffer channel can play a buffering and transition role for the material mixture, and can enable the material to enter the discharge channel more evenly for plasma discharge, and can effectively prolong the interaction time between the material and the high temperature of the plasma, so that the material is fully ionized.

[0007] In this solution, the driving unit drives the cathode water-cooling tube to drive the cathode to rotate, with the aim of causing the cathode to rotate to form a stable plasma discharge and a uniform temperature field.

[0008] Furthermore, it also includes a mounting plate and a mounting cylinder, the mounting cylinder is connected to the mounting plate, the cathode water cooling jacket is coaxially rotatably connected to the mounting cylinder, and the drive unit is mounted on the mounting plate.

[0009] Beneficial effects: The mounting plate and mounting tube in this solution facilitate the installation of the drive unit and the cathode water cooling jacket.

[0010] Furthermore, the driving unit includes a motor, a driving gear and a driven gear, the driven gear is coaxially fixedly connected to the cathode water cooling jacket, the driving gear is coaxially fixedly connected to the output shaft of the motor, and the driving gear and the driven gear are meshed with each other.

[0011] Beneficial effects: In this solution, the active driven gear and the driven gear in the drive unit transmit the power of the motor to the cathode water cooling jacket, thereby driving the cathode water cooling jacket to rotate, and then driving the cathode to rotate.

[0012] Furthermore, the mounting cylinder includes a first cylinder and a second cylinder coaxially connected, the outer diameter of the first cylinder is smaller than the outer diameter of the second cylinder, a through hole is opened on the mounting plate, the first cylinder passes through the through hole, one side of the second cylinder is connected to the mounting plate, and the driven gear is located in the second cylinder.

[0013] Beneficial effect: In this solution, the mounting cylinder includes a first cylinder and a second cylinder that are connected to each other. The first cylinder facilitates the installation of the cathode water cooling tube, and the setting of the second cylinder facilitates shielding and protecting the driving gear and the driven gear. Moreover, since the diameters of the first cylinder and the second cylinder are different, the first cylinder and the second cylinder can be respectively located on both sides of the mounting plate, and it is more convenient to install and cooperate with the mounting plate.

[0014] Furthermore, the cathode water cooling jacket includes an outer tube and an inner tube arranged coaxially, a gap being formed between the outer tube and the inner tube, one end of the inner tube being open and located inside the outer tube, and the other end of the inner tube extending out of the outer tube, the outer tube being rotatably connected to the mounting tube, a water inlet cavity communicating with the outer tube being provided in the mounting tube, and a cooling water inlet being provided on the mounting tube and communicating with the water inlet cavity; An inner water outlet is provided on the side wall of the inner tube, a cooling water outlet communicating with the inner water outlet is provided on the mounting cylinder, and shaft seals are provided between the outer tube and the mounting cylinder and between the inner tube and the mounting cylinder.

[0015] Beneficial Effects: The cathode water-cooling jacket in this solution comprises an outer tube and an inner tube. Cooling water is introduced into the water inlet chamber through the cooling water inlet, then enters the outer tube and finally the inner tube before being discharged through the cooling water outlet on the inner tube and the cooling water outlet on the mounting tube, thereby achieving a water-cooling cycle. This facilitates cooling of the cathode water-cooling jacket, preventing heat transfer from the high-temperature plasma zone that could affect its service life. The shaft seal in this solution ensures the tightness of the cathode water-cooling jacket and prevents water leakage.

[0016] Furthermore, a magnetic fluid is connected between the mounting tube and the insulating seat, the cathode water cooling jacket passes through the magnetic fluid and is connected to the cathode, and a sealing ring is provided between the insulating seat and the magnetic fluid.

[0017] Beneficial effects: In this solution, the magnetic fluid is a sealed transmission device, the purpose of which is to achieve dynamic sealing.

[0018] Furthermore, an anode fixing flange is provided at one end of the anode installation cavity, and the end of the anode is fixed to the anode fixing flange to form a closed end.

[0019] Beneficial effects: In this solution, the anode fixing flange is connected to the end of the anode to form a closed end, so that the anode fixing flange is easy to disassemble and the gas distribution ring is easy to install or replace.

[0020] Furthermore, the air inlet holes on the gas distribution ring each have an angle with the axis of the gas distribution ring.

[0021] Beneficial effect: Such a setting makes the air inlet hole form a hole with a certain inclination angle, rather than a hole perpendicular to the axis of the gas distribution ring. Such a setting can make the wind entering the gas distribution ring from the air inlet hole produce a swirl, thereby driving the material entering the gas distribution ring to form a swirl state with the gas, thereby increasing the time for the material to enter the buffer channel and the discharge channel, allowing the material to enter the discharge channel more evenly, extending the interaction time between the material and the plasma, and thereby improving the purification effect.

[0022] Furthermore, the air inlet holes on the gas distribution ring have an angle of 30-60° with the axis of the gas distribution ring.

[0023] Beneficial effect: The included angle of the angle in this solution enables the inclination angle of the air inlet to better meet the conditions for forming a swirl.

[0024] Furthermore, the gap distance of the discharge channel formed between the anode and the cathode is 2-5 mm.

[0025] Beneficial effects: The radial length of the annular plasma high-temperature beam generated in this scheme is between 2 and 5 mm, and the energy is more concentrated, which helps to improve the heating efficiency of the material. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The drawings described herein are used to provide a further understanding of the embodiments of the present invention, constitute a part of this application, and do not constitute a limitation of the embodiments of the present invention. In the drawings: Figure 1 A longitudinal cross-sectional view of an embodiment of a plasma generator of the present invention; Figure 2 A partial cross-sectional view of an embodiment of a plasma generator of the present invention.

[0027] Markings and corresponding parts names in the accompanying drawings: Cathode 1, anode 2, anode mounting cavity 201, gas distribution ring 3, air inlet 301, insulating seat 4, magnetic fluid 5, cathode water cooling jacket 6, outer tube 601, inner tube 602, inner water outlet 6021, water inlet cavity 603, cooling water outlet 7, cooling water inlet 8, motor 9, mounting plate 10, first cylinder 11, second cylinder 12, driving gear 13, driven gear 14, anode fixing flange 15, buffer channel 16, discharge channel 17, feed port 18, working gas inlet 19, bearing 20, shaft seal 21. DETAILED DESCRIPTION

[0028] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with examples and drawings. The exemplary embodiments of the present invention and their descriptions are only used to explain the present invention and are not intended to limit the present invention.

[0029] like Figure 1-Figure 2 As shown, this embodiment provides a plasma generator, including a cathode 1, an anode 2, a gas distribution ring 3, a cathode water cooling jacket 6 and a drive unit. The cathode 1 is located inside the anode 2 and is coaxially arranged with the anode 2. In this embodiment, the anode 2 is designed as a hollow cylindrical structure, and the cathode 1 is designed as a cylindrical solid structure. Both the cathode 1 and the anode 2 are made of high-temperature resistant materials or refractory metal materials. In this embodiment, both the cathode 1 and the anode 2 are made of high-temperature resistant graphite materials.

[0030] In this embodiment, the diameter of the cathode 1 is between 60-80 mm, and the length is between 200 mm-1200 mm, and can be appropriately adjusted according to process requirements.

[0031] One end of the cathode water cooling jacket 6 is coaxially fixedly connected to the cathode 1. In this embodiment, the cathode water cooling jacket 6 is threadedly connected to the cathode 1. The driving unit is used to drive the cathode water cooling jacket 6 to rotate, thereby driving the cathode 1 to rotate to form a stable plasma discharge and a uniform temperature field.

[0032] One end of the anode 2 is a closed end, and the other end of the anode 2 is an open end. An anode mounting cavity 201 is provided on the side of the anode 2 near its closed end. An insulating seat 4 is provided between the anode 2 and the cathode 1 for insulating the two. The insulating seat 4 in this embodiment is made of an insulating material, such as an epoxy board, epoxy resin, or polytetrafluoroethylene. The insulating seat 4 adopts a hollow cylindrical structure design, and one end of the insulating seat 4 extends into the anode mounting cavity 201 and abuts against the end of the cathode 1. The other end of the insulating seat 4 extends outward to form a table for fixed installation with other components. A sealing ring is provided between the outwardly extending end of the insulating seat 4 and the closed end of the anode 2. The setting of the insulating seat 4 has the effect of insulating the cathode 1 and the anode 2.

[0033] In this embodiment, a concave step is provided at the left end of the anode 2, and the above-mentioned anode mounting cavity 201 is formed at the concave step at the left end of the anode 2, and a gas distribution ring 3 is installed in the anode mounting cavity 201; an anode fixing flange 15 is provided at one end of the anode mounting cavity 201, and the concave step at the left end of the anode 2 is used to be fixed to the anode fixing flange 15 by bolts, and the end of the anode 2 is fixed to the anode fixing flange 15 to form a closed end. After the anode fixing flange 15 is fixed to the anode 2, the gas distribution ring 3 can be fixed and limited.

[0034] An annular cavity is formed between the anode 2 and the cathode 1, and the annular cavity between the anode 2 and the cathode 1 includes a buffer channel 16 and a discharge channel 17 in sequence along its axial direction. The two ends of the buffer channel 16 are respectively connected to the anode mounting cavity 201 and the discharge channel 17. The gap distance of the discharge channel 17 is smaller than the gap distance of the buffer channel 16. Specifically: The buffer channel 16 and the discharge channel 17 inside the anode 2 are connected at a closed position so that the left cavity of the anode 2 is larger than the right cavity of the anode 2 (the left and right directions in this embodiment are described based on the perspective shown in the figure. The plasma generator shown in the figure is in a horizontal state, but in actual use, the plasma generator in this embodiment should be Figure 1 Similarly, the diameter of the left part of the cathode 1 is smaller than the diameter of the right part of the cathode 1, so that the annular cavity between the cathode 1 and the anode 2 forms a buffer channel 16 and a discharge channel 17 with different spacings. In this embodiment, the gap distance of the discharge channel 17 formed between the anode 2 and the cathode 1 is 2-5mm, where the gap distance refers to the thickness of the annular cavity of the discharge channel 17. In this embodiment, the preferred gap distance of the discharge channel 17 is 3mm.

[0035] The gas distribution ring 3 is connected to the buffer channel 16, that is, the left end of the gas distribution ring 3 is an open end, and a plurality of air inlet holes 301 are provided circumferentially of the gas distribution ring 3. In this embodiment, the plurality of air inlet holes 301 are evenly distributed circumferentially, and the air inlet holes 301 on the gas distribution ring 3 have an angle with the axis of the gas distribution ring 3, and the angle is 30-60°, so that the air inlet holes 301 form an inclined hole structure, so that the swirl effect formed by the gas entering from the air inlet holes 301 is better, and the closed end of the anode 2 is provided with a working gas inlet 19 connected to the anode mounting cavity 201, and the closed end of the anode 2 is also provided with a feed port 18 connected to the gas distribution ring 3. In this embodiment, the working gas inlet 19 and the feed port 18 are both provided on the anode fixing flange 15.

[0036] In this embodiment, as a preferred size, eight air inlet holes 301 are provided on the circumference of the gas distribution ring 3, and the angle between the air inlet holes 301 and the axis of the gas distribution ring 3 is 30°. The setting of the air inlet holes 301 on the gas distribution ring 3 can extend the life of the electrode and the interaction time between the material and the plasma.

[0037] A plasma generator in this embodiment further includes a mounting plate 10 and a mounting cylinder, the mounting cylinder is connected to the mounting plate 10, the cathode water cooling jacket 6 is coaxially rotatably connected to the mounting cylinder via a bearing 20, and the drive unit is mounted on the mounting plate 10. The drive unit in this embodiment includes a motor 9, a driving gear 13, and a driven gear 14. The motor 9 is fixed to the mounting plate 10 by bolts, and the driven gear 14 and the cathode water cooling jacket 6 are coaxially fixedly connected by the cooperation of a key and a keyway. The driving gear 13 is coaxially fixedly connected to the output shaft of the motor 9, and the driving gear 13 and the driven gear 14 are meshed with each other.

[0038] In this embodiment, the mounting tube includes a coaxially connected first and second tubes 11, 12. The outer diameter of the first tube 11 is smaller than that of the second tube 12. The mounting plate 10 is provided with a through hole through which the first tube 11 passes, thereby positioning the first and second tubes 11, 12 on opposite sides of the mounting plate 10. One side of the second tube 12 is bolted to the mounting plate 10, thereby securing the entire mounting tube to the mounting plate 10. The driven gear 14 is located within the second tube 12, which provides shielding and protection for the driven gear 14.

[0039] Combine Figure 2 As shown, the cathode water cooling jacket 6 in this embodiment includes an outer tube 601 and an inner tube 602 that are coaxially arranged. There is a gap between the outer tube 601 and the inner tube 602, thereby forming a channel for water flow.

[0040] One end of the inner tube 602 is open and located within the outer tube 601, with a gap between the open end of the inner end and the outer tube 601 to facilitate the flow of cooling water. The other end of the inner tube 602 extends out of the outer tube 601 and is sealed with the first cylinder 11. The outer tube 601 is rotatably connected to the mounting tube. In this embodiment, the outer tube 601 is rotatably connected to the inner wall of the first cylinder 11 of the mounting tube via a bearing 20. A water inlet chamber 603 communicating with the outer tube 601 is provided in the mounting tube, and a cooling water inlet 8 communicating with the water inlet chamber 603 is provided on the mounting tube. An inner water outlet hole 6021 is provided on the side wall of the inner tube 602. In this embodiment, there are multiple inner water outlet holes 6021, and the multiple inner water outlet holes 6021 are evenly distributed along the circumference of the inner tube 602. A cooling water outlet 7 connected to the inner water outlet hole 6021 is provided on the first barrel 11 of the mounting tube. Shaft seals 21 are provided between the outer tube 601 and the first barrel 11 of the mounting tube, and between the inner tube 602 and the first barrel 11 of the mounting tube. In this embodiment, the shaft seal 21 between the outer tube 601 and the first barrel 11 of the mounting tube is arranged close to the water inlet chamber 603, and there are two shaft seals 21 between the inner tube 602 and the first barrel 11 of the mounting tube, and the two shaft seals 21 are respectively located on both sides of the inner water outlet hole 6021. In this embodiment, the cooling water outlet 7 is installed on the first barrel 11 of the mounting tube and is connected to the cavity where the inner water outlet hole 6021 is located.

[0041] like Figure 2As shown, in the direction indicated by the arrow in the figure, the cooling water enters the water inlet chamber 603 from the cooling water inlet 8, then enters the gap between the outer tube 601 and the inner tube 602, and then enters the inner tube 602, and finally flows out from the inner water outlet 6021 on the inner tube 602 and is discharged through the cooling water outlet 7. In this way, by continuously introducing cooling water into the cathode water cooling jacket 6 and then discharging it, a reciprocating circulation of cooling water is realized, thereby having the effect of cooling the cathode water cooling jacket 6, and can reduce the high temperature generated between the cathode 1 and the anode 2 to which the cathode water cooling jacket 6 is subjected, avoid the cathode water cooling jacket 6 from having an excessively high temperature, and thus improve the service life of the cathode water cooling jacket 6.

[0042] In this embodiment, a magnetic fluid 5 is connected between the mounting tube and the insulating seat 4, the cathode water cooling jacket 6 passes through the magnetic fluid 5 and is threadedly connected to the cathode 1, and a sealing ring is provided between the insulating seat 4 and the magnetic fluid 5. The magnetic fluid 5 is a sealing transmission device that can play a role of dynamic sealing.

[0043] The specific implementation process is as follows: During operation, a plasma generator in this embodiment introduces working gas (including inert gases such as nitrogen and argon) through the working gas inlet 19 and flows through the gas distribution ring 3 into the annular cavity between the cathode 1 and the anode 2. High voltage is applied to the working gas, causing ionization discharge, and then switching to a DC operating mode to form a stable plasma discharge. The maximum arc temperature is >4000°C, and the high-temperature zone length is >200mm. This plasma discharge forms a mixture of purified substances and gases, which is then discharged to a separation device at the rear end for separation and collection.

[0044] 1) The cathode 1 of the plasma generator provided by the present invention adopts a rotating design, which not only prolongs the service life of the electrode, but also improves the stability and uniformity of plasma discharge; 2) The length of the high-temperature zone (discharge channel 17) of the plasma generator provided by the present invention can be adjusted according to actual process requirements, and has significant advantages such as high heating efficiency and uniform heating during material handling and processing; 3) The radial length of the annular plasma high-temperature beam generated by the present invention is between 2 and 5 mm, and the energy is more concentrated, which helps to improve the heating efficiency of the material.

[0045] It should be noted that the above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present application. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the scope of the present application. Therefore, the present application is not limited to the embodiments shown herein, but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

[0046] In the description of the present invention, it should be noted that the terms "first", "second", "third", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0047] In the description of this document, the terms "up", "down", "left", "right", "front", "back", "top", "bottom", "inside", "outside", "middle", "vertical", "horizontal", "lateral", "longitudinal", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only used to illustrate the relative position relationship between the various components or components, and do not particularly limit the specific installation orientation of the various components or components.

[0048] In the descriptions of this document, some terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0049] In this document, the terms "installed," "disposed," "provided with," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integral structures; mechanical connections or electrical connections; direct connections, indirect connections through an intermediary, or internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0050] The structures, proportions, sizes, etc. drawn in the drawings in this application are only used to match the contents disclosed in this technical briefing document for those skilled in the art to understand and read, and are not used to limit the conditions under which this application can be implemented. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed in this application without affecting the efficacy and purpose that can be achieved by this application.

[0051] The terms used in this document are those commonly used in the art currently in consideration of the functions of the present disclosure, but these terms may vary according to the intentions of those skilled in the art, precedents, or new technologies in the art. In addition, specific terms may be selected by the applicant, and in such cases, their detailed meanings will be described in the detailed description of the present disclosure. Therefore, the terms used in the document should not be understood as simple names, but rather as a general description based on the meaning of the terms and the present disclosure.

[0052] Flowcharts or text are used in this document to illustrate the operational steps performed according to the embodiments of the present application. It should be understood that the operational steps in the embodiments of the present application are not necessarily performed in the exact order in which they are described. Instead, the various steps may be processed in reverse order or simultaneously, as needed. Furthermore, other operations may be added to these processes, or one or more operations may be removed from these processes.

[0053] The above are only preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. A plasma generator comprising a cathode, an anode, a gas distribution ring, a cathode water cooling jacket, and a drive unit, wherein the cathode is located inside the anode and is coaxially arranged with the anode, characterized in that: One end of the cathode water cooling jacket is coaxially fixedly connected to the cathode, and the driving unit is used to drive the cathode water cooling jacket to rotate; One end of the anode is a closed end, a gas distribution ring is installed in the anode mounting cavity, and the other end of the anode is an open end. The anode is provided with an anode mounting cavity on a side of the anode near the closed end, and an insulating seat is provided between the anode and the cathode for insulating the two. An annular cavity is formed between the anode and the cathode, and the annular cavity between the anode and the cathode includes a buffer channel and a discharge channel in sequence along its axial direction. The two ends of the buffer channel are respectively connected to the anode mounting cavity and the discharge channel, and the gap distance of the discharge channel is smaller than the gap distance of the buffer channel. The gas distribution ring is connected to the buffer channel, and a plurality of air inlet holes are provided in the circumference of the gas distribution ring. The closed end of the anode is provided with a working gas inlet connected to the anode mounting cavity, and the closed end of the anode is also provided with a feed port connected to the gas distribution ring.

2. A plasma generator according to claim 1, characterized in that: It also includes a mounting plate and a mounting cylinder, the mounting cylinder is connected to the mounting plate, the cathode water cooling jacket is coaxially rotatably connected to the mounting cylinder, and the drive unit is mounted on the mounting plate.

3. A plasma generator according to claim 2, characterized in that: The driving unit includes a motor, a driving gear and a driven gear. The driven gear is coaxially fixedly connected to the cathode water cooling jacket. The driving gear is coaxially fixedly connected to the output shaft of the motor. The driving gear and the driven gear are meshed with each other.

4. A plasma generator according to claim 3, characterized in that: The mounting cylinder includes a first cylinder and a second cylinder coaxially connected, the outer diameter of the first cylinder is smaller than the outer diameter of the second cylinder, a through hole is opened on the mounting plate, the first cylinder passes through the through hole, one side of the second cylinder is connected to the mounting plate, and the driven gear is located in the second cylinder.

5. A plasma generator according to any one of claims 2 to 4, characterized in that: The cathode water cooling jacket includes an outer tube and an inner tube arranged coaxially, with a gap between the outer tube and the inner tube, one end of the inner tube is open and located inside the outer tube, and the other end of the inner tube extends out of the outer tube, the outer tube is rotatably connected to the mounting tube, a water inlet cavity communicating with the outer tube is provided in the mounting tube, and a cooling water inlet communicating with the water inlet cavity is provided on the mounting tube; An inner water outlet is provided on the side wall of the inner tube, a cooling water outlet communicating with the inner water outlet is provided on the mounting cylinder, and shaft seals are provided between the outer tube and the mounting cylinder and between the inner tube and the mounting cylinder.

6. A plasma generator according to claim 5, characterized in that: A magnetic fluid is connected between the mounting tube and the insulating seat, the cathode water cooling jacket passes through the magnetic fluid and is connected to the cathode, and a sealing ring is provided between the insulating seat and the magnetic fluid.

7. The plasma generator according to claim 1, characterized in that: An anode fixing flange is provided at one end of the anode installation cavity, and the end of the anode is fixed to the anode fixing flange to form a closed end.

8. The plasma generator according to claim 1, characterized in that: The air inlet holes on the gas distribution ring all have an included angle with the axis of the gas distribution ring.

9. A plasma generator according to claim 8, characterized in that: The air inlet holes on the gas distribution ring have an angle of 30-60° with the axis of the gas distribution ring.

10. The plasma generator according to claim 1, characterized in that: The gap distance of the discharge channel formed between the anode and the cathode is 2-5 mm.

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