A lens attitude compensation mechanism, a lens adjustment system and an optical device

Abstract

This invention relates to the field of semiconductor equipment technology, specifically to a lens attitude compensation mechanism, a lens adjustment system, and an optical device. The lens attitude compensation mechanism includes: a middle cylinder connected to a first outer cylinder via a linear drive; the middle cylinder has a spherical concave surface, and at least two angle drive components are evenly distributed on its outer periphery, with the number of angle drive components being even; a compensation lens is installed inside a first inner cylinder; a spherical convex surface matching the spherical concave surface is provided inside the first inner cylinder; the linear drive drives the compensation lens to move along the optical axis; the drive end of the angle drive component abuts against the first inner cylinder; the extension and retraction of the angle drive component causes the spherical convex surface to rotate within the spherical concave surface, thereby realizing the rotation of the compensation lens; this application can realize the individual control of the precise angle adjustment of the compensation lens and the displacement adjustment along the optical axis, overcoming the defects caused by the mutual coupling of pitch and yaw adjustment and linear adjustment.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, specifically to a lens posture compensation mechanism, a lens adjustment system, and an optical device. Background Technology

[0002] In the semiconductor chip manufacturing field, the feature size of IC chips is getting smaller and smaller, and the manufacturing difficulty of IC chips is getting higher and higher. To obtain qualified IC chips, the performance requirements for lithography machines are also increasing. Within lithography machines, to achieve more precise line lithography, the requirements for illumination lenses also increase. These requirements include processing accuracy, the number of lens groups, and adjustment and compensation accuracy. The precise magnification of the illumination lens is often achieved through precise assembly and adjustment, as well as its internal adjustment and compensation mechanism. This requires the entire illumination system's mechanical structure to not only meet the requirements of precise assembly to ensure each lens is in the optimal position, but also to guarantee high-precision control of the compensation lens position to achieve the best working state of the lens.

[0003] Currently, the compensation structure of existing compensation lenses generally adopts a three-point ejection method to adjust the pitch and yaw of the illumination lens and to perform linear displacement along the optical axis. The angle adjustment and the displacement adjustment along the optical axis are coupled together. That is, during the process of adjusting the pitch and yaw angle, there is often a linear movement along the optical axis, which is not conducive to the final adjustment of the centering position, making it difficult for the compensation lens to achieve the best adjustment effect. Summary of the Invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the shortcomings of the existing compensation structure of the compensation lens, which uses a three-point ejection method to adjust the pitch and yaw of the illumination lens and to make linear displacement along the optical axis. The angle adjustment and the displacement adjustment along the optical axis are coupled together. During the pitch and yaw angle adjustment, linear movement along the optical axis is often accompanied, which is not conducive to the final adjustment of the centering position, and makes it difficult to achieve the best adjustment effect at the center of the lens.

[0005] To overcome the above-mentioned defects, the present invention provides a lens posture compensation mechanism, comprising: a first outer cylinder, a middle cylinder, a first inner cylinder, and a compensation lens;

[0006] The intermediate cylinder is sleeved inside the first outer cylinder, and the intermediate cylinder is connected to the first outer cylinder through a linear drive member; a spherical concave surface is provided inside the intermediate cylinder near one end; at least two angle drive members are evenly distributed on the outer periphery of the intermediate cylinder, and the number of angle drive members is even.

[0007] The first inner cylinder is located inside the intermediate cylinder;

[0008] The compensating lens is installed inside the first inner cylinder; a spherical convex surface adapted to the spherical concave surface is provided outside the first inner cylinder; the spherical concave surface and the spherical convex surface are concentrically arranged, and the rotation center of the compensating lens coincides with the center of the spherical convex surface;

[0009] The linear drive is adapted to drive the intermediate cylinder to move linearly along the optical axis, thereby driving the compensation lens to move linearly along the optical axis.

[0010] The driving ends of all angle driving components abut against the position of the offset compensation lens outside the first inner cylinder;

[0011] The angle driving component is adapted to extend and retract to rotate the spherical convex surface of the first inner cylinder within the spherical concave surface, thereby causing the compensating lens to rotate around the rotation center.

[0012] Optionally, a slider is provided inside the first outer cylinder, and a slide rail adapted to the slider is provided outside the intermediate cylinder; the slide rail is parallel to the optical axis direction.

[0013] Optionally, an encapsulation plate is fixedly provided at one end of the intermediate cylinder near the compensating lens.

[0014] Optionally, the linear drive includes:

[0015] The stator structure is fixedly mounted on the first outer cylinder;

[0016] A moving part structure is fixed to the intermediate cylinder; the moving part structure is adapted to move linearly relative to the stator structure along the optical axis.

[0017] Optionally, a first track groove is provided on the first inner cylinder at the position corresponding to the driving end of the angle driving member, and a gap is provided between the side wall of the first track groove and the driving end.

[0018] The present invention also provides a lens adjustment system, comprising:

[0019] The aforementioned lens posture compensation mechanism;

[0020] Multiple fixed lens assemblies are arranged sequentially with the lens posture compensation mechanism, and adjacent fixed lens assemblies are detachably connected; the lens posture compensation mechanism is detachably connected to adjacent fixed lens assemblies; the centers of the multiple fixed lens assemblies and the rotation center of the compensation lens are all located on the same optical axis.

[0021] Optionally, the fixed lens assembly includes:

[0022] The second outer cylinder is provided with an even array of adjustment structures evenly distributed around its outer periphery;

[0023] The second inner cylinder is spaced inside the second outer cylinder; the even-numbered adjustment structures abut against the second inner cylinder respectively;

[0024] The fixed lens is installed inside the second inner cylinder;

[0025] The even-number adjustment structure is adapted to extend and retract to rotate or translate the fixed lens.

[0026] Optionally, each set of adjustment structures includes two set screws spaced apart along a direction parallel to the optical axis; or, the adjustment structure is a linear electronically controlled drive structure.

[0027] Optionally, a second track groove is provided on the second inner cylinder at the abutment end position corresponding to the adjustment structure, and a gap is provided between the side wall of the second track groove and the abutment end.

[0028] The present invention also provides an optical device, including the aforementioned lens adjustment system.

[0029] The technical solution of the present invention has the following advantages compared with the prior art:

[0030] 1. The lens attitude compensation mechanism provided by the present invention includes: a first outer cylinder; a middle cylinder sleeved inside the first outer cylinder, and the middle cylinder being connected to the first outer cylinder via a linear drive member; a spherical concave surface is provided inside the middle cylinder near one end; at least two angle drive members are evenly distributed around the outer periphery of the middle cylinder, and the number of angle drive members is even; a first inner cylinder located inside the middle cylinder; a compensation lens installed inside the first inner cylinder; a spherical convex surface adapted to the spherical concave surface is provided outside the first inner cylinder; the spherical concave surface and the spherical convex surface are concentrically arranged, and the rotation center of the compensation lens coincides with the center of the spherical convex surface; the linear drive member is adapted to drive the middle cylinder along the optical axis. The direction is linearly moved, thereby driving the compensation lens to move linearly along the optical axis; the driving ends of all angle driving components abut against the position outside the first inner cylinder away from the compensation lens; the angle driving components are adapted to extend and retract to drive the spherical convex surface of the first inner cylinder to rotate within the spherical concave surface, thereby driving the compensation lens to rotate around the rotation center; the lens attitude compensation mechanism described in this application is used for the mechanical adjustment of lens elements, and can realize the individual control of the precise angle adjustment of the compensation lens and the displacement adjustment along the optical axis, that is, the adjustment along the optical axis and the angle adjustment are completely separated and there is no coupling relationship, which is beneficial to the final adjustment of the centering position and overcomes the defects caused by the mutual coupling of pitch and yaw adjustment and linear adjustment. Furthermore, by adopting the spherical fitting centering and long-distance apex adjustment method, the center position of the compensation lens can be guaranteed to the maximum extent, that is, under stable centering, the angle can be precisely adjusted, and the adjustment accuracy can be controlled by the distance of the apex from the center of the sphere, which has the advantages of high speed, high efficiency and high precision response. The lens attitude compensation mechanism described in this application can perform lens adjustment including but not limited to the illumination lens of a lithography machine and any lens suitable for optics. In addition, the lens attitude compensation mechanism described in this application has no elastic elements such as springs, which can eliminate the uncertainty error such as offset caused by elastic elements; this application adopts a direct mechanical connection, which can achieve a fast response; making the adjustment more stable and achieving more precise control.

[0031] 2. The present invention provides a slider inside the first outer cylinder and a slide rail adapted to the slider outside the intermediate cylinder; the slide rail is parallel to the optical axis direction; by setting the adapted slider and slide rail, the present application makes the movement of the intermediate cylinder along the optical axis more stable and ensures the adjustment accuracy.

[0032] 3. In this invention, an encapsulation plate is fixedly provided at one end of the intermediate cylinder near the compensating lens; this application adopts the above technical solution, and the encapsulation plate limits the first inner cylinder to prevent the first inner cylinder from falling out of the intermediate cylinder.

[0033] 4. The present invention provides a first track groove on the first inner cylinder at the position corresponding to the driving end of the angle driving member, and provides a gap between the side wall of the first track groove and the driving end; the present application adopts the above technical solution, and the side wall of the first track groove and the driving end have a clearance allowance to avoid the angle driving member from getting stuck during operation.

[0034] 5. The lens adjustment system provided by the present invention includes: the lens posture compensation mechanism; multiple fixed lens assemblies, sequentially arranged with the lens posture compensation mechanism, and adjacent fixed lens assemblies being detachably connected; the lens posture compensation mechanism and adjacent fixed lens assemblies being detachably connected; the centers of the multiple fixed lens assemblies and the rotation center of the compensation lens are all located on the same optical axis; This application adopts the above technical solution, allowing the lens posture compensation mechanism and fixed lens assemblies to be independently installed and adjusted before being integrated and adjusted; furthermore, the lens posture compensation mechanism and fixed lens assemblies can be individually detached and freely stacked for mechanical assembly, which can be used for efficient test replacement or damaged replacement. In addition, the lens adjustment system of this application has no springs or other elastic elements, eliminating uncertainties such as offset caused by elastic elements; this application uses a direct mechanical connection, enabling rapid response; making the adjustment more stable and achieving more precise control.

[0035] 6. The fixed lens assembly of the present invention includes: a second outer cylinder, on which an even number of adjustment structures are uniformly distributed around its outer periphery; a second inner cylinder, spaced apart and fitted inside the second outer cylinder; the even number of adjustment structures respectively abutting against the second inner cylinder; and a fixed lens installed inside the second inner cylinder; the even number of adjustment structures are adapted to extend and retract to drive the fixed lens to rotate or translate; the present application adopts the above technical solution, which can perform dual adjustment of angle and displacement, and the lens adjustment system of the present application can perform lens adjustment including but not limited to the illumination lens of a lithography machine, as well as the adjustment of any lens or lens group suitable for optics.

[0036] 7. Each adjustment structure of the present invention includes: two set screws spaced apart along a direction parallel to the optical axis; or, the adjustment structure is a linear electronically controlled drive structure; the present application adopts the above technical solution, which can perform dual adjustment of angle and displacement. When the lens is assembled and adjusted to find the centering position, the precise manual adjustment and locking of the relative positions of each lens can be achieved by rotating the set screws; or the precise adjustment, locking or compensation of the relative positions of each lens can be achieved by controlling the linear electronically controlled drive structure.

[0037] 8. The present invention provides a second track groove at the abutment end position of the adjustment structure on the second inner cylinder, and provides a gap between the side wall of the second track groove and the abutment end; the present application adopts the above technical solution, and the side wall of the second track groove and the abutment end have a gap allowance to avoid jamming when the adjustment structure is in operation. Attached Figure Description

[0038] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0039] Figure 1 This is a three-dimensional structural diagram of the lens attitude compensation mechanism provided in an embodiment of the present invention;

[0040] Figure 2 This is a partial three-dimensional structural diagram of the lens attitude compensation mechanism provided in an embodiment of the present invention. Figure 1 ;

[0041] Figure 3 This is a partial three-dimensional structural diagram of the lens attitude compensation mechanism provided in an embodiment of the present invention. Figure 2 ;

[0042] Figure 4 This is a partial three-dimensional structural diagram of the lens attitude compensation mechanism provided in an embodiment of the present invention. Figure 3 ;

[0043] Figure 5 This is a partial cross-sectional view of the lens attitude compensation mechanism provided in an embodiment of the present invention.

[0044] Figure 6 This is a partial top view of the lens attitude compensation mechanism provided in an embodiment of the present invention.

[0045] Figure 7 This is a three-dimensional structural diagram of the third fixed lens assembly provided in an embodiment of the present invention;

[0046] Figure 8 This is a partial three-dimensional structural diagram of the third fixed lens assembly provided in an embodiment of the present invention;

[0047] Figure 9 This is a cross-sectional view of the third fixed lens assembly provided in an embodiment of the present invention.

[0048] Figure 10 This is a three-dimensional structural diagram of the lens adjustment system provided in an embodiment of the present invention;

[0049] Figure 11 This is a cross-sectional structural diagram of the lens adjustment system provided in an embodiment of the present invention.

[0050] Explanation of reference numerals in the attached figures:

[0051] 1. First outer cylinder; 2. Intermediate cylinder; 3. First inner cylinder; 4. Encapsulation plate; 5. First pressure ring; 6. Second outer cylinder; 7. Second inner cylinder; 8. Second pressure ring; 9. Linear drive component; 10. First slide rail; 11. Second slide rail; 12. Third slide rail; 13. First drive component; 14. Second drive component; 15. Third drive component; 16. Fourth drive component; 17. First set screw; 18. Second set screw; 19. Third set screw; 20. Fourth set screw; 21. Fifth set screw; 22. Sixth set screw; 23. Seventh set screw; 24. Moving element structure; 25. Compensating lens; 26. First fixed lens; 27. Second fixed lens; 28. Third fixed lens; 29. ​​Fourth fixed lens; 30. Fifth fixed lens; 31. First track groove; 32. Second track groove; 33. Spherical mating surface; 34. Slider; 35. Stator structure; 36. First fixed lens assembly; 37. Second fixed lens assembly; 38. Third fixed lens assembly; 39. Fourth fixed lens assembly; 40. Fifth fixed lens assembly; 41. Spherical concave surface; 42. Spherical convex surface. Detailed Implementation

[0052] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0053] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0054] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0055] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0056] In the semiconductor and optics fields, all lenses often require precise and rapid adjustment feedback to ensure the perfect use of the optical system. This necessitates that the mechanical adjustment structure of the lens not only provide high-precision adjustment but also rapid feedback, adjusting the lens to the appropriate position as soon as possible. Based on the above requirements, this application proposes a lens attitude compensation mechanism and a lens adjustment system.

[0057] Existing compensation structures for compensating lenses often involve linear movement along the optical axis during pitch and yaw angle adjustments, requiring multiple alignment adjustments of all lenses to achieve the desired result. This process is extremely complex. Based on this, this application proposes a novel lens attitude compensation mechanism.

[0058] like Figures 1 to 6 One specific embodiment of the lens posture compensation mechanism shown includes: a first outer cylinder 1, a middle cylinder 2, a first inner cylinder 3, and a compensation lens 25.

[0059] like Figure 1 As shown, the intermediate cylinder 2 is sleeved inside the first outer cylinder 1, and the intermediate cylinder 2 is connected to the first outer cylinder 1 through a linear drive member 9.

[0060] like Figure 5 and Figure 6 As shown, a spherical concave surface 41 is provided inside the intermediate cylinder 2 near one end. The intermediate cylinder 2 is a cylindrical shape with an opening along its axial direction. Figure 5 As shown, the lower opening side of the intermediate cylinder 2 is one end, and the upper opening side is the other end. The spherical concave surface 41 is a closed annular concave surface along the inner circumferential wall of the intermediate cylinder 2. At least two angle driving members are evenly distributed on the outer circumference of the intermediate cylinder 2, and the number of angle driving members is even. Specifically, the number of angle driving members can be four, namely the first driving member 13, the second driving member 14, the third driving member 15, and the fourth driving member 16. The first inner cylinder 3 is located inside the intermediate cylinder 2. The compensating lens 25 is installed inside the first inner cylinder 3. Specifically, as shown... Figure 5 As shown, the compensating lens 25 can be fixedly installed by the first pressure ring 5 combined with the first inner cylinder 3; more specifically, the first pressure ring 5, the first inner cylinder 3, and the compensating lens 25 can be fixed by adhesive bonding. The first inner cylinder 3 is a cylindrical shape with an opening along the axial direction of the first inner cylinder 3. Figure 5As shown, the lower opening side of the first inner cylinder 3 is one end, and the upper opening side is the other end. A spherical convex surface 42, adapted to the spherical concave surface 41, is provided on the outside of the first inner cylinder 3. The spherical convex surface 42 is a closed annular convex surface along the outer peripheral wall of the first inner cylinder 3. The spherical concave surface 41 and the spherical convex surface 42 are concentrically arranged, and the rotation center of the compensation lens 25 coincides with the center of the spherical convex surface 42, achieving centering of the compensation lens 25. A spherical mating surface 33 is formed at the junction of the spherical concave surface 41 and the spherical convex surface 42.

[0061] The linear drive 9 is adapted to drive the intermediate cylinder 2 to move linearly along the optical axis, thereby driving the compensation lens 25 to move linearly along the optical axis.

[0062] Specifically, such as Figure 1 and Figure 2 As shown, the linear drive component 9 is a direct drive motor, specifically including a stator structure 35 and a mover structure 24. The stator structure 35 is fixedly mounted on the first outer cylinder 1; the mover structure 24 is fixed on the intermediate cylinder 2; the mover structure 24 is adapted to move linearly relative to the stator structure 35 along the optical axis.

[0063] Furthermore, such as Figure 2 , Figure 3 and Figure 5 As shown, a slider 34 is provided inside the first outer cylinder 1, and a slide rail adapted to the slider 34 is provided outside the intermediate cylinder 2; the slide rail is parallel to the optical axis direction. The number of slide rails can be three, and the three slide rails and the linear drive 9 are evenly distributed on the outer periphery of the intermediate cylinder 2. The three slide rails are: the first slide rail 10, the second slide rail 11, and the third slide rail 12.

[0064] An encapsulation plate 4 is fixedly provided at one end of the intermediate cylinder 2 near the compensating lens 25. The encapsulation plate 4 is adapted to limit the first inner cylinder 3 and prevent the first inner cylinder 3 from coming out of the intermediate cylinder 2. A spherical concave surface 41 adapted to the spherical convex surface 42 is provided at the position where the encapsulation plate 4 contacts the spherical convex surface 42 of the intermediate cylinder 2.

[0065] like Figure 4 and Figure 5As shown, the angle driving member is adapted to extend and retract to rotate the spherical convex surface 42 of the first inner cylinder 3 within the spherical concave surface 41, thereby causing the compensating lens 25 to rotate around the rotation center. The compensating lens 25 rotates around the rotation center through the opposing operation of the driving ends. The driving ends of all angle driving members abut against the outside of the first inner cylinder 3 at positions offset from the compensating lens 25; that is, the driving ends of the angle driving members and the positions of the compensating lens 25 are misaligned along the axial direction of the first inner cylinder 3, so that when the driving ends of the angle driving members extend and retract to push against the first inner cylinder 3, the first inner cylinder 3 and the compensating lens 25 can rotate around the rotation center.

[0066] Specifically, such as Figure 4As shown, the first driving member 13 is positioned relative to the third driving member 15, and the second driving member 14 is positioned relative to the fourth driving member 16. Assuming the direction along the optical axis is the Z-axis, the direction of the line connecting the centers of the second driving member 14 and the fourth driving member 16 is the Y-axis, and the direction of the line connecting the centers of the first driving member 13 and the third driving member 15 is the X-axis. The first driving member 13 and the third driving member 15 form a group, enabling the compensation lens 25 to rotate around the Y-axis for angle adjustment; the second driving member 14 and the fourth driving member 16 form a group, enabling the compensation lens 25 to rotate around the X-axis for angle adjustment. When the first driving member 13 extends to push the first inner cylinder 3, the third driving member 15 retracts and moves back a corresponding distance; or when the third driving member 15 extends to push the first inner cylinder 3, the first driving member 13 retracts and moves back a corresponding distance; the first driving member 13 and the third driving member 15 always maintain a pressing state against the first inner cylinder 3, allowing the compensation lens 25 to rotate around the Y-axis. With the compensating lens 25 rotating around the Y-axis, the second driving member 14 and the fourth driving member 16 can be in a loose or tight state. If the second driving member 14 and the fourth driving member 16 are in a loose state, the compensating lens 25 can be adjusted to rotate around the Y-axis individually, or the compensating lens 25 can be adjusted to rotate around the Y-axis first, after which the compensating lens 25 may have other actions. If the second driving member 14 and the fourth driving member 16 are in a tight state, the adjustment of the second driving member 14 and the fourth driving member 16 has been completed and they are temporarily not moving. When adjusting the first driving member 13 and the third driving member 15, a small amount of sliding occurs between the driving ends of the second driving member 14 and the fourth driving member 16 and the first track groove 31. Only a certain relative push force needs to be set for the driving source corresponding to the second driving member 14 and the fourth driving member 16 to ensure that the adjustment requirement of rotating around the Y-axis can be operated normally. Similarly, when the second driving member 14 extends to push the first inner cylinder 3, the fourth driving member 16 retracts and moves back a corresponding distance; or when the fourth driving member 16 extends to push the first inner cylinder 3, the second driving member 14 retracts and moves back a corresponding distance; the second driving member 14 and the fourth driving member 16 always maintain a tight pressing state on the first inner cylinder 3, so that the compensation lens 25 rotates around the X-axis.With the compensating lens 25 rotating around the X-axis, the first driving member 13 and the third driving member 15 can be in a loose or tight state. If the first driving member 13 and the third driving member 15 are in a loose state, the compensating lens 25 can be adjusted to rotate around the X-axis individually, or the compensating lens 25 can be adjusted to rotate around the X-axis first, after which the compensating lens 25 may have other actions. If the first driving member 13 and the third driving member 15 are in a tight state, the adjustment of the first driving member 13 and the third driving member 15 has been completed and is temporarily not in action. When adjusting the second driving member 14 and the fourth driving member 16, a small amount of sliding occurs between the driving end of the first driving member 13 and the third driving member 15 and the first track groove 31. Only a certain relative push force needs to be set for the driving source corresponding to the first driving member 13 and the third driving member 15 to ensure that the adjustment requirement of rotating around the X-axis operates normally.

[0067] Furthermore, such as Figure 4 As shown, a first track groove 31 is provided on the first inner cylinder 3 at the position corresponding to the driving end of the angle driving component, and a gap is provided between the side wall of the first track groove 31 and the driving end. The angle compensation of the compensating lens 25, i.e., rotation, is all micro-compensation, so a certain gap is left between the side wall of the first track groove 31 and the driving end to ensure that the driving end does not derail. Specifically, the first driving component 13, the second driving component 14, the third driving component 15, and the fourth driving component 16 are all linear drive structures, which can be linear drive sources such as voice coil motors. Fine angle adjustment is achieved through electronically controlled top adjustment, realizing fast and high-precision angle adjustment response.

[0068] like Figures 7 to 11 As shown, the present invention also provides a lens adjustment system, including: the lens posture compensation mechanism and a plurality of fixed lens assemblies.

[0069] Current illumination lenses use mechanical adjustment systems where all fixed lenses are integrated into a single large fixed lens barrel, making installation and adjustment difficult. If a problem occurs with any individual lens, all lenses must be disassembled and reassembled. This application overcomes these shortcomings by using a detachable connection method.

[0070] like Figure 10 and Figure 11As shown, multiple fixed lens assemblies are sequentially arranged with the lens attitude compensation mechanism, and adjacent fixed lens assemblies are detachably connected; the lens attitude compensation mechanism is detachably connected to adjacent fixed lens assemblies, specifically, through a flange structure. The centers of the multiple fixed lens assemblies and the rotation center of the compensation lens 25 are all located on the same optical axis. Specifically, a first fixed lens assembly 36, a lens attitude compensation mechanism, a second fixed lens assembly 37, a third fixed lens assembly 38, a fourth fixed lens assembly 39, and a fifth fixed lens assembly 40 are arranged sequentially. A first fixed lens 26 is installed in the first fixed lens assembly 36, a compensation lens 25 is installed in the lens attitude compensation mechanism, a second fixed lens 27 is installed in the second fixed lens assembly 37, a third fixed lens 28 is installed in the third fixed lens assembly 38, a fourth fixed lens 29 is installed in the fourth fixed lens assembly 39, and a fifth fixed lens 30 is installed in the fifth fixed lens assembly 40.

[0071] like Figure 7 As shown, taking the third fixed lens assembly 38 as an example, the fixed lens assembly includes: a second outer cylinder 6, a second inner cylinder 7, and a fixed lens. Other fixed lens assemblies have the same structure and principle as the third fixed lens assembly 38.

[0072] like Figure 8 and Figure 9 As shown, an even array of adjustment structures is evenly distributed around the outer periphery of the second outer cylinder 6; the second inner cylinder 7 is spaced inside the second outer cylinder 6; the even array of adjustment structures respectively abut against the second inner cylinder 7. The fixed lens is installed inside the second inner cylinder 7; specifically, as shown... Figure 9 As shown, the fixed lens can be fixedly installed by means of the second pressure ring 8 combined with the second inner cylinder 7; more specifically, the second pressure ring 8, the second inner cylinder 7, and the fixed lens can be fixed by adhesive bonding. The even-numbered adjustment structure is suitable for telescopically driving the fixed lens to rotate or translate. The more adjustment structures there are, the more precise the adjustment effect.

[0073] Specifically, such as Figure 8As shown, each adjustment structure includes two set screws spaced apart along a direction parallel to the optical axis; or, the adjustment structure is a linear electrically controlled drive structure, which can be a linear drive source such as a voice coil motor. When the adjustment structure consists of two set screws spaced apart along a direction parallel to the optical axis, the threaded connection of the set screws extends through the second outer cylinder 6 and abuts against the outer periphery of the second inner cylinder 7. There are four sets of adjustment structures: the first set consists of a first set screw 17 and a second set screw 18 arranged vertically; the second set consists of a third set screw 19 and a fourth set screw 20 arranged vertically; the third set consists of a fifth set screw 21 and a sixth set screw 22 arranged vertically; and the fourth set consists of a seventh set screw 23 and an eighth set screw arranged vertically. The first and third sets of adjustment structures are symmetrically arranged, as are the second and fourth sets. Assuming the direction along the optical axis is the Z-axis, the line connecting the first and third sets is the Y-axis, and the line connecting the second and fourth sets is the X-axis. The first and third sets of adjustment structures form an adjustment pair, enabling displacement along the Y-axis and rotation around the X-axis to achieve angle adjustment. When the first and third sets of adjustment structures adjust simultaneously in the same direction, the second inner cylinder 7 can achieve translational movement along the Y-axis. When the first setter 17 and the fifth setter 21 move in one direction, while the second setter 18 and the sixth setter 22 move in the opposite direction, the second inner cylinder 7 rotates around the X-axis, achieving angular movement around the X-axis.

[0074] The second and fourth adjustment structures form an adjustment pair, enabling displacement along the X-axis and rotation around the Y-axis for angle adjustment. When both adjustment structures move in the same direction simultaneously, the second inner cylinder 7 can translate along the X-axis. When the third and seventh setter screws 19 and 23 move in one direction, while the fourth and eighth setter screws move in the opposite direction, the second inner cylinder 7 rotates around the Y-axis, achieving angular movement around the Y-axis.

[0075] Furthermore, such as Figure 8 As shown, a second track groove 32 is provided on the second inner cylinder 7 at the abutting end position corresponding to the adjustment structure, and a gap is provided between the side wall of the second track groove 32 and the abutting end.

[0076] When the adjustment structure is a linear electronically controlled drive structure, the corresponding fixed lens can also be used as a compensation lens.

[0077] The present invention also provides an optical device, including the aforementioned lens adjustment system. The optical device may be a lithography machine.

[0078] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A lens posture compensation mechanism, characterized in that, include: The first outer cylinder (1); An intermediate cylinder (2) is fitted inside the first outer cylinder (1), and the intermediate cylinder (2) is connected to the first outer cylinder (1) through a linear drive member (9); a spherical concave surface (41) is provided inside the intermediate cylinder (2) near one end; at least two angle drive members are evenly distributed on the outer periphery of the intermediate cylinder (2), and the number of angle drive members is even. The first inner cylinder (3) is located inside the intermediate cylinder (2); A compensating lens (25) is installed inside the first inner cylinder (3); a spherical convex surface (42) adapted to the spherical concave surface (41) is provided outside the first inner cylinder (3); the spherical concave surface (41) and the spherical convex surface are concentrically arranged, and the rotation center of the compensating lens (25) coincides with the center of the spherical convex surface; The linear drive (9) is adapted to drive the intermediate cylinder (2) to move linearly along the optical axis, thereby driving the compensation lens (25) to move linearly along the optical axis. The driving ends of all angle driving components abut against the position of the first inner cylinder (3) offset from the compensation lens (25); The angle drive is adapted to extend and retract to drive the spherical convex surface (42) of the first inner cylinder (3) to rotate within the spherical concave surface (41), thereby driving the compensation lens (25) to rotate around the rotation center.

2. The lens posture compensation mechanism according to claim 1, characterized in that, A slider (34) is provided inside the first outer cylinder (1), and a slide rail adapted to the slider (34) is provided outside the intermediate cylinder (2); the slide rail is parallel to the optical axis direction.

3. The lens posture compensation mechanism according to claim 1, characterized in that, An encapsulation plate (4) is fixedly provided at one end of the intermediate cylinder (2) near the compensating lens (25).

4. The lens posture compensation mechanism according to claim 1, characterized in that, The linear drive (9) includes: The stator structure (35) is fixedly mounted on the first outer cylinder (1); The moving part structure (24) is fixed on the intermediate cylinder (2); the moving part structure (24) is adapted to move linearly relative to the stator structure (35) along the optical axis.

5. The lens posture compensation mechanism according to claim 1, characterized in that, A first track groove (31) is provided on the first inner cylinder (3) at the position corresponding to the driving end of the angle driving member, and a gap is provided between the side wall of the first track groove (31) and the driving end.

6. A lens adjustment system, characterized in that, include: The lens attitude compensation mechanism according to any one of claims 1-5; Multiple fixed lens assemblies are arranged sequentially with the lens posture compensation mechanism, and adjacent fixed lens assemblies are detachably connected; the lens posture compensation mechanism is detachably connected with adjacent fixed lens assemblies; the centers of the multiple fixed lens assemblies and the rotation center of the compensation lens (25) are all located on the same optical axis.

7. The lens adjustment system according to claim 6, characterized in that, The fixed lens assembly includes: The second outer cylinder (6) has an even array of adjustment structures evenly distributed on its outer periphery; The second inner cylinder (7) is spaced inside the second outer cylinder (6); the even-numbered adjustment structures abut against the second inner cylinder (7) respectively; The fixed lens is installed inside the second inner cylinder (7); The even-number adjustment structure is adapted to extend and retract to rotate or translate the fixed lens.

8. The lens adjustment system according to claim 7, characterized in that, Each set of adjustment structures includes: two set screws spaced apart along a direction parallel to the optical axis; or, the adjustment structure is a linear electronically controlled drive structure.

9. The lens adjustment system according to claim 7 or 8, characterized in that, A second track groove (32) is provided on the second inner cylinder (7) at the abutment end position corresponding to the adjustment structure, and a gap is provided between the side wall of the second track groove (32) and the abutment end.

10. An optical device, characterized in that, The lens adjustment system includes any one of claims 6-8.

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