On-off valve and semiconductor processing equipment

Abstract

The invention provides an on-off valve and semiconductor processing equipment, the on-off valve comprises a valve body and a valve membrane, the valve body is provided with a pressurization chamber, a fluid inlet, a fluid outlet, a first flow channel communicated with the fluid inlet and a second flow channel communicated with the fluid outlet, the pressurization chamber is communicated with the first flow channel and / or the second flow channel, and the fluid inlet is communicated with the fluid outlet. The pressurizing cavity is used for pressurizing fluid in the first flow channel and / or the second flow channel, and the valve membrane can block and open the first flow channel and / or the second flow channel. According to the on-off valve, the pressurization cavity is formed in the valve body and communicated with the first flow channel and / or the second flow channel, the fluid in the first flow channel and / or the second flow channel is pressurized through the pressurization cavity, and when the valve membrane is opened, the cavity where the valve membrane is opened can be rapidly filled with the high-pressure fluid; and the generation of microbubbles in the opening process of the valve membrane of the on-off valve is effectively prevented.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor manufacturing, and more particularly, relates to an on-off valve and semiconductor processing equipment. Background Art

[0002] The rapid development of the semiconductor industry is placing increasing demands on fluid control systems within production processes, particularly for the precise control of high-purity, high-viscosity fluids. As a key component in fluid control systems, the performance of on-off valves directly impacts the quality and efficiency of semiconductor manufacturing.

[0003] During semiconductor processing, fluid transfer systems need to have high cleanliness, no pollution, and high reliability. During the opening and closing process of traditional ball valves, the friction between the ball and the valve seat easily produces tiny particles. These particles will contaminate the fluid system and reduce the yield of semiconductor products. To solve this problem, diaphragm valves are widely used in the semiconductor industry due to their structural characteristics. However, during the opening process of existing diaphragm valves, cavities will be formed in the flow channel inside the valve body. When processing high-viscosity fluids, microbubbles are easily generated and difficult to eliminate. For example, these microbubbles generated during the photoresist delivery process of semiconductor equipment will seriously affect the glue coating uniformity and product quality during the semiconductor manufacturing process. Summary of the Invention

[0004] The present invention provides an on-off valve and a semiconductor processing device, which can prevent microbubbles from being generated in a flow channel inside a valve body during the opening process of the on-off valve.

[0005] The technical solution adopted by the present invention to solve the technical problem is as follows: In a first aspect, the present invention provides an on-off valve, comprising a valve body and a valve membrane; The valve body has a pressurized chamber, a fluid inlet, a fluid outlet, a first flow channel connected to the fluid inlet, and a second flow channel connected to the fluid outlet. The pressurized chamber is connected to the first flow channel and / or the second flow channel. The pressurized chamber is used to pressurize the fluid inside the first flow channel and / or the second flow channel. The valve membrane can block and conduct the first flow channel and the second flow channel.

[0006] Preferably, there is a first flow between the pressurized chamber and the valve membrane, a second flow between the pressurized chamber and the fluid inlet, and a third flow between the pressurized chamber and the fluid outlet, and the first flow is smaller than the smallest of the second flow and the third flow.

[0007] Preferably, the valve membrane includes a flexible diaphragm and a driving block, the flexible diaphragm and the driving block are fixedly connected, and the driving block is used to drive the flexible diaphragm to block and conduct the first flow channel and the second flow channel.

[0008] Preferably, a mounting groove is provided on the valve body, the flexible diaphragm is provided in the mounting groove, and an edge of the flexible diaphragm is interference fit with the valve body.

[0009] Preferably, the valve body has a curved surface structure at a position corresponding to the flexible diaphragm.

[0010] Preferably, the center of the flexible diaphragm has a protruding structure for blocking the first flow channel and / or the second flow channel, and a raised structure is provided between the protruding structure of the flexible diaphragm and the edge of the flexible diaphragm, which is away from the arc surface structure.

[0011] Preferably, a compression block for the flexible diaphragm is provided in the mounting groove.

[0012] Preferably, a valve cover is provided on the valve body, the valve cover is fixedly connected to the valve body, the valve cover is pressed on the clamping block, and the valve cover is provided with a first air channel for pressurizing the pressurization chamber and a second air channel for pressurizing the drive block to drive the drive block axially.

[0013] Preferably, the on-off valve further includes a first pressure regulating mechanism connected to the first air channel and a second pressure regulating mechanism connected to the second air channel.

[0014] Preferably, a boost block is provided in the pressurized chamber, and the boost block is dynamically sealed with the pressurized chamber, and the gas flowing in from the first air channel is used to drive the boost block to move so as to pressurize the pressurized chamber.

[0015] Preferably, the on-off valve further includes a valve membrane driving structure, and the valve membrane driving structure is used to drive the valve membrane to block and conduct the first flow channel and the second flow channel.

[0016] Preferably, the on-off valve further includes a pressurizing structure, and the pressurizing structure is used to pressurize the pressurized chamber.

[0017] Preferably, the number of the pressurized chambers is two, one of which is communicated with the first flow channel, and the other of which is communicated with the second flow channel.

[0018] A second aspect of the present invention provides a semiconductor processing device, comprising a delivery pipeline and an on-off valve provided on the delivery pipeline, wherein the on-off valve is the on-off valve described above.

[0019] The on-off valve provided by the present invention includes a valve body and a valve membrane, wherein the valve body has a pressurized chamber, a fluid inlet, a fluid outlet, a first flow channel connected to the fluid inlet, and a second flow channel connected to the fluid outlet, wherein the pressurized chamber is connected to the first flow channel and / or the second flow channel, and the pressurized chamber is used to pressurize the fluid inside the first flow channel and / or the second flow channel, and the valve membrane can block and conduct the first flow channel and / or the second flow channel. The on-off valve is provided with a pressurized chamber in the valve body, and the pressurized chamber is connected to the first flow channel and / or the second flow channel, and the fluid in the first flow channel and / or the second flow channel is pressurized by the pressurized chamber. When the valve membrane is opened, the high-pressure fluid can quickly fill the cavity opened by the valve membrane, thereby effectively preventing the generation of microbubbles during the opening of the valve membrane of the on-off valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1 A schematic cross-sectional view of an on-off valve according to an embodiment of the present invention; Figure 2 An exploded view of an on-off valve provided in an embodiment of the present invention; Figure 3 A schematic diagram of the connection structure between the flexible diaphragm and the drive block of the on-off valve provided in an embodiment of the present invention; Figure 4 for Figure 3 AA direction cross-section diagram. DETAILED DESCRIPTION

[0022] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0023] In the description of the present invention, it should be understood that the terms "including" and "having" and any variations thereof used herein are intended to cover non-exclusive inclusions. For example, a process, method, system, product or apparatus that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to these processes, methods, products or apparatuses.

[0024] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0025] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. It should be understood that the term "and / or" used in this article is merely a way to describe the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0026] In the semiconductor industry, in process liquid circuits with high requirements for cleanliness and corrosion resistance, on-off valve bodies often use PTFE diaphragms to open and close to isolate the upstream and downstream of the circuit to achieve the on-off function of the liquid circuit; the PTFE diaphragm valve blocks the liquid circuit by controlling the opening and closing of the diaphragm. The PTFE diaphragm will form a certain amount of cavity in the process from closing to opening. For low-viscosity fluids, due to the small flow resistance, the fluid can quickly fill the cavity area; high-viscosity fluids have large flow resistance, and the fluid filling cavity speed is much slower than the PTFE diaphragm opening speed, resulting in a vacuum during the diaphragm opening process. Moreover, it is difficult for the fluid to be evenly filled to various positions in the valve, and microbubbles are easily generated. Moreover, due to the high viscosity of the fluid, the negative pressure bubbles generated are difficult to eliminate. Based on the above reasons, the present application provides an on-off valve and semiconductor processing equipment.

[0027] The on-off valve and semiconductor processing equipment provided by the present invention are described in detail below with reference to specific embodiments.

[0028] Figure 1 A cross-sectional schematic diagram of an on-off valve provided in an embodiment of the present invention, Figure 2For an exploded view of the on-off valve provided in an embodiment of the present invention, please refer to Figure 1 、 Figure 2 A first aspect of an embodiment of the present invention provides an on-off valve, comprising a valve body 1 and a valve membrane 2. The valve body 1 has a pressurized chamber 11, a fluid inlet 12, a fluid outlet 13, a first flow channel 14 connected to the fluid inlet 12, and a second flow channel 15 connected to the fluid outlet 13. The pressurized chamber 11 is connected to the first flow channel 14 and / or the second flow channel 15. The pressurized chamber 11 is used to pressurize the fluid inside the first flow channel 14 and / or the second flow channel 15. The valve membrane 2 can block and conduct the first flow channel 14 and the second flow channel 15.

[0029] The valve body 1 of this embodiment is a one-piece metal structure made of stainless steel, offering excellent corrosion resistance and mechanical strength. A first flow channel 14 and a second flow channel 15 are provided within the valve body 1. One end of the first flow channel 14 communicates with the fluid inlet 12, while one end of the second flow channel 15 communicates with the fluid outlet 13. The fluid inlet 12 and fluid outlet 13 are located on either side of the valve body 1 for connection to external pipelines.

[0030] The valve diaphragm 2 of this embodiment can block and open the first flow channel 14 and the second flow channel 15. The valve diaphragm 2 of this embodiment is mounted on the valve body 1 and is used to control the on / off state of the first flow channel 14 and the second flow channel 15. The valve diaphragm 2 of this embodiment is made of PTFE and has a smooth surface. It maintains a seal with the inner wall of the valve body 1, ensuring that the valve diaphragm 2 can move flexibly while effectively blocking the flow channels.

[0031] The pressurized chamber 11 of this embodiment is arranged inside the valve body 1, and the pressurized chamber 11 is connected to the first flow channel 14 and the second flow channel 15. The volume of the pressurized chamber 11 of this embodiment can be designed according to actual needs. For example, the volume of the pressurized chamber 11 is 1-5 cubic centimeters. For example, the pressurized chamber 11 of this embodiment is pressurized by a pressurizing block that is movably and sealedly connected to the valve body 1. The volume of the pressurized chamber 11 is changed by driving the pressurizing block to move, thereby achieving pressurization of the pressurized chamber 11. Since the pressurized chamber 11 is connected to the first flow channel 14 and / or the second flow channel 15, the pressurization of the pressurized chamber 11 causes pressure to act on the fluid in the first flow channel 14 and / or the second flow channel 15. During the opening process of the valve membrane 2, the high-pressure fluid formed by the pressurization of the pressurized chamber 11 will replenish the cavity formed by the opening of the valve membrane 2, thereby preventing the generation of microbubbles during the opening process of the on-off valve.

[0032] The on-off valve provided in this embodiment includes a valve body 1 and a valve membrane 2. The valve body 1 has a pressurized chamber 11, a fluid inlet 12, a fluid outlet 13, a first flow channel 14 connected to the fluid inlet 12, and a second flow channel 15 connected to the fluid outlet 13. The pressurized chamber 11 is connected to the first flow channel 14 and / or the second flow channel 15. The pressurized chamber 11 is used to pressurize the fluid inside the first flow channel 14 and / or the second flow channel 15. The valve membrane 2 can block and conduct the first flow channel 14 and / or the second flow channel 15. The on-off valve is provided with a pressurized chamber 11 in the valve body 1, and the pressurized chamber 11 is connected to the first flow channel 14 and / or the second flow channel 15. The fluid in the first flow channel 14 and / or the second flow channel 15 is pressurized by the pressurized chamber 11. When the valve membrane 2 is opened, the high-pressure fluid can quickly fill the cavity opened by the valve membrane 2, effectively preventing the generation of microbubbles during the opening of the valve membrane 2 of the on-off valve.

[0033] Furthermore, a first flow path exists between the pressurized chamber 11 and the valve diaphragm 2, a second flow path exists between the pressurized chamber 11 and the fluid inlet 12, and a third flow path exists between the pressurized chamber 11 and the fluid outlet 13. The first flow path is less than the minimum of the second and third flow paths. During use of the on-off valve of this embodiment, the fluid inlet 12 is connected to an upstream pipeline, and the fluid outlet 13 is connected to a downstream pipeline. The first flow path of this embodiment is less than the minimum of the second and third flow paths. This design ensures that the pressure of the fluid within the pressurized chamber 11 can effectively act on the valve diaphragm 2, while reducing the impact of the pressurized chamber 11 on the pressures of the fluid inlet 12 and fluid outlet 13.

[0034] During the opening process of the on-off valve of this embodiment, by pressurizing the pressurized chamber 11, the fluid in the pressurized chamber 11 is compressed, that is, the liquid pressure in the first flow channel 14 and / or the second flow channel 15 increases. During the opening process of the valve diaphragm 2, due to the high viscosity of the fluid, the first flow is smaller than the smallest of the second flow and the third flow. During the use of the on-off valve, the distance between the upstream and downstream pipeline outlets and the on-off valve pressurized chamber 11 is much larger than the distance from the pressurized chamber 11 to the valve diaphragm 2. According to the law of least resistance, the high-pressure fluid in the pressurized chamber 11 will first replenish the cavity opened by the valve diaphragm 2. Under the action of high pressure, the fluid fills the cavity opened by the valve diaphragm 2 at a faster speed, and due to the pressurization, the liquid evenly fills the cavity opened by the valve diaphragm 2, thereby preventing the generation of microbubbles during the opening process of the valve diaphragm 2.

[0035] Figure 3 Schematic diagram of the connection structure between the flexible diaphragm and the drive block of the on-off valve provided in an embodiment of the present invention, Figure 4 for Figure 3 For the AA cross-section, please refer to Figure 1-4The valve membrane 2 of this embodiment includes a flexible diaphragm 21 and a driving block 22 . The flexible diaphragm 21 and the driving block 22 are fixedly connected. The driving block 22 can drive the flexible diaphragm 21 to block and conduct the first flow channel 14 and the second flow channel 15 . The flexible diaphragm 21 of this embodiment is made of polytetrafluoroethylene (PTFE). PTFE has excellent corrosion resistance and can withstand erosion by corrosive media such as acids, alkalis, and solvents at room temperature. It is suitable for various corrosive environments. PTFE can maintain its good performance at extremely high temperatures. The operating temperature range is from -200°C to +260°C, which is suitable for applications under extreme temperature conditions. The PTFE diaphragm has an extremely low friction coefficient, which enables it to achieve good sealing performance during the sealing process and reduce wear and friction. Moreover, the surface of the PTFE material is smooth and has anti-adhesion properties. It is not easy to adhere to solid particles or dirt, which helps to reduce the maintenance and cleaning of the valve. The drive block 22 of this embodiment is made of metal materials, such as stainless steel, aluminum alloy, etc., and has sufficient rigidity and strength. The flexible diaphragm 21 and the drive block 22 of this embodiment are threadedly connected, and the connection method is simple.

[0036] In this embodiment, the center portion of the flexible diaphragm 21 is fixedly connected to the driver block 22, while the edge portion contacts the valve body 1, forming a seal. The diameter of the driver block 22 is smaller than that of the flexible diaphragm 21. For example, the diameter of the driver block 22 is 50%-70% of the diameter of the flexible diaphragm 21. In this embodiment, the driver block 22 is in a movable, sealing connection with the valve cover 4 provided on the valve body 1.

[0037] The valve body 1 of this embodiment is provided with a mounting groove 17, and the flexible diaphragm 21 is disposed in the mounting groove 17. The edge of the flexible diaphragm 21 has an interference fit with the valve body 1. The edge of the flexible diaphragm 21 of this embodiment has an interference fit with the valve body 1, and this interference fit ensures a tight seal between the flexible diaphragm 21 and the valve body 1.

[0038] The valve body 1 of this embodiment has a curved surface structure at the portion corresponding to the flexible diaphragm 21. For example, the portion of the valve body 1 corresponding to the flexible diaphragm 21 is a hemispherical structure. The hemispherical structure reduces the dead zone at the corners, thereby reducing the risk of bubbles caused by the dead zone at the corners during the opening of the valve membrane 2. The center of the flexible diaphragm 21 has a raised structure 211 for blocking the first flow channel 14 and / or the second flow channel 15. The raised structure 211 of the flexible diaphragm 21 and the edge of the flexible diaphragm 21 have a raised structure 212 that deviates from the curved surface structure. The design of the raised structure 212 enables the flexible diaphragm 21 to deform evenly when subjected to pressure, thereby avoiding stress concentration and extending the service life of the flexible diaphragm 21. At the same time, the raised structure 212 can also reduce the driving force that drives the valve membrane 2 to block the first flow channel 14 and the second flow channel 15, thereby improving the sensitivity of the valve membrane 2.

[0039] In this embodiment, a diaphragm compression block 3 is disposed within the mounting groove 17. Made of the same material as the valve body 1, the diaphragm compression block 3 has a smooth surface. The function of the diaphragm compression block 3 is to securely secure the edge of the flexible diaphragm 21 within the mounting groove 17, further preventing displacement of the flexible diaphragm 21 during operation.

[0040] The valve body 1 of this embodiment is provided with a valve cover 4, which is fixedly connected to the valve body 1 and is pressed onto the clamping block 3. The valve cover 4 is provided with a first air channel 41 for pressurizing the pressurized chamber 11, and a second air channel 42 for pressurizing the drive block 22 to drive the drive block 22 axially. The valve cover 4 of this embodiment is made of the same material as the valve body 1 and is fixedly connected to the valve body 1 by bolts. The number of bolts is 4-8 and is evenly distributed on the valve cover 4. The valve cover 4 of this embodiment is pressed onto the clamping block 3, that is, the upper surface of the clamping block 3 of this embodiment protrudes from the mounting groove 17. After the valve cover 4 is fixedly connected to the valve body 1, the valve cover 4 further serves to compress the flexible diaphragm 21.

[0041] In this embodiment, one end of the first air channel 41 is connected to an external air source device, and the other end of the first air channel 41 is in communication with the pressurized chamber 11. One end of the second air channel 42 is connected to the external air source device, and the other end of the second air channel 42 is in communication with the space above the driving block 22. In this embodiment, the dimensions of the first air channel 41 and the second air channel 42 are not particularly limited.

[0042] Exemplarily, the on-off valve also includes a first pressure regulating mechanism connected to the first air channel 41 and a second pressure regulating mechanism connected to the second air channel 42. The first pressure regulating mechanism and the second pressure regulating mechanism are both conventional pneumatic pressure regulating structures, which can accurately control the air pressure of the first air channel 41 and the second air channel 42. During the operation of the on-off valve, the air pressure of the first air channel 41 is first adjusted by the first pressure regulating mechanism so that the pressure in the pressurized chamber 11 reaches a preset value, and pressure is applied to the fluid in the first flow channel 14 and / or the second flow channel 15. Then the air source device draws air through the second air channel 42, drives the valve membrane 2 to move to open the valve, and controls the conduction of the first flow channel 14 and the second flow channel 15. When it is necessary to block the flow channel, the air source device pressurizes through the second air channel 42, so that the drive block 22 drives the flexible diaphragm 21 to move downward, and the flexible diaphragm 21 blocks the first flow channel 14 and the second flow channel 15.

[0043] For example, the first and second pressure regulating mechanisms of this embodiment each include a pressure sensor and a controller. The first pressure regulating mechanism can monitor the pressure within the pressurized chamber 11 in real time via the pressure sensor. The controller controls the operating state of the gas source device based on feedback from the pressure sensor to ensure that an appropriate pressure is maintained within the pressurized chamber 11. For example, this embodiment can flexibly adjust the pressurization value within the pressurized chamber 11 to accommodate fluids of varying viscosities.

[0044] In this embodiment, a boost block 5 is disposed within the pressurized chamber 11. The boost block 5 is dynamically sealed to the pressurized chamber 11. The boost block 5 is made of stainless steel with a smooth surface. A sealing structure made of fluororubber is provided around the boost block 5. In this embodiment, a gas source device is connected via a first air passage 41 to drive the boost block 5 to move, thereby pressurizing the pressurized chamber 11.

[0045] The on-off valve of this embodiment operates as follows: the driver block 22 and the valve cover 4 form a cylinder-like structure. The second air passage 42 on the valve cover 4 allows compressed air or vacuum to flow, driving the driver block 22 up and down, thereby driving the flexible diaphragm 21 to open and close the first and second flow passages 14, 15. The first air passage 41 above the booster block 5 allows compressed air to flow, driving the booster block 5 downward, thereby pressurizing the pressurized chamber 11.

[0046] The process of the on-off valve from closing to opening is as follows: compressed air is passed into the first air channel 41 above the boost block 5, driving the boost block 5 to move downward, the fluid in the pressurized chamber 11 is compressed, and air is extracted through the second air channel 42. The driving block 22 drives the flexible diaphragm 21 to move upward and open. Due to the high viscosity of the fluid, the first flow between the pressurized chamber 11 and the valve membrane 2 is smaller than the second flow between the pressurized chamber 11 and the fluid inlet 12 and the third flow between the pressurized chamber 11 and the fluid outlet 13, that is, the distance between the outlet of the upstream and downstream pipelines connected to the on-off valve and the pressurized chamber 11 is much greater than the distance from the pressurized chamber 11 to the flexible diaphragm 21. According to the law of least resistance, the high-pressure fluid in the pressurized chamber 11 will first replenish the cavity opened by the flexible diaphragm 21. Under the action of high pressure, the fluid fills the cavity opened by the flexible diaphragm 21 at a faster speed and the liquid evenly fills the diaphragm cavity due to the pressurization, thereby preventing the generation of microbubbles in the pipeline during the opening of the on-off valve.

[0047] When the valve is closed, the first air channel 41 above the boosting block 5 stops passing positive pressure and switches to atmospheric conditions. The boosting block 5 slowly moves upward and resets under the influence of the liquid circuit pressure. Compressed air is passed from the second air channel 42 above the drive block 22 of the valve membrane 2. The compressed air drives the drive block 22 together with the flexible diaphragm 21 to block the first flow channel 14 and the second flow channel 15 circuits.

[0048] In a specific embodiment, the on-off valve further includes a valve diaphragm drive structure, which is used to drive the valve diaphragm 2 to block and conduct the first flow channel 14 and the second flow channel 15. For example, the valve diaphragm drive structure includes a cylinder and a piston, wherein the cylinder is fixed to the valve cover, and the piston is connected to the drive block 22. The valve diaphragm drive structure of this embodiment adopts a cylinder structure, which has higher energy conversion efficiency, a long service life, and a high degree of reliability. Of course, the valve diaphragm drive structure of this embodiment can also adopt other linear drive structures, and this embodiment does not particularly limit the specific structure of the valve diaphragm drive structure.

[0049] Furthermore, the on-off valve also includes a boosting structure for boosting the pressure in the pressurized chamber 11. For example, the boosting structure of this embodiment is also a cylinder structure, with the cylinder barrel fixed to the valve cover, and the piston for boosting the pressure in the pressurized chamber 11. For example, the piston is fixedly connected to the boosting block 5 disposed in the pressurized chamber 11. Of course, the boosting structure of this embodiment can also use other linear drive structures to drive the boosting block 5, and this embodiment does not specifically limit the specific structure of the boosting structure.

[0050] In a specific embodiment, there are two pressurized chambers 11, one of which is connected to the first flow channel 14, and the other is connected to the second flow channel 15. The volumes of the two pressurized chambers 11 are equal. The two pressurized chambers 11 are symmetrically distributed on the valve body 1. The on-off valve of this embodiment can pressurize the fluid in the first flow channel 14 and the second flow channel 15 at the same time. When the two pressurized chambers 11 are pressurized, the high-pressure fluid in the first flow channel 14 and the second flow channel 15 will replenish the cavity opened by the valve diaphragm 2 more quickly. Under the action of high pressure, the fluid fills the cavity opened by the valve diaphragm 2 at a faster speed. The pressurization of the pressurized chamber 11 allows the liquid to evenly fill the cavity opened by the valve diaphragm 2, thereby better preventing the generation of microbubbles during the opening of the on-off valve.

[0051] The on-off valve provided in an embodiment of the present invention includes a valve body and a valve membrane, wherein the valve body has a pressurized chamber, a fluid inlet, a fluid outlet, a first flow channel connected to the fluid inlet, and a second flow channel connected to the fluid outlet, the pressurized chamber is connected to the first flow channel and / or the second flow channel, the pressurized chamber is used to pressurize the fluid inside the first flow channel and / or the second flow channel, and the valve membrane can block and conduct the first flow channel and / or the second flow channel. The on-off valve is provided with a pressurized chamber in the valve body, and the pressurized chamber is connected to the first flow channel and / or the second flow channel, and the fluid in the first flow channel and / or the second flow channel is pressurized by the pressurized chamber. When the valve membrane is opened, the high-pressure fluid can quickly fill the cavity opened by the valve membrane, thereby effectively preventing the generation of microbubbles during the opening of the valve membrane of the on-off valve.

[0052] A second aspect of an embodiment of the present invention provides a semiconductor processing device, comprising a delivery pipeline and an on-off valve arranged on the delivery pipeline, wherein the on-off valve is the on-off valve described in the above embodiment.

[0053] See also Figure 1 and Figure 2 , the on-off valve comprises a valve body 1 and a valve membrane 2; The valve body 1 has a pressurized chamber 11, a fluid inlet 12, a fluid outlet 13, a first flow channel 14 connected to the fluid inlet 12, and a second flow channel 15 connected to the fluid outlet 13. The pressurized chamber 11 is connected to the first flow channel 14 and / or the second flow channel 15. The pressurized chamber 11 is used to pressurize the fluid inside the first flow channel 14 and / or the second flow channel 15. The valve membrane 2 can block and conduct the first flow channel 14 and the second flow channel 15.

[0054] Specifically, the semiconductor processing equipment is used in the manufacturing process of semiconductor wafers, and includes a processing unit and a delivery pipeline connecting the processing units. The delivery pipeline is made of stainless steel and is used to transport high-viscosity fluids, etc. An on-off valve is installed on the delivery pipeline to control the flow of fluid in the pipeline. Exemplarily, the on-off valve is connected to the delivery pipeline via a flange made of stainless steel, with a sealing ring made of fluororubber provided between the flanges. The flanges are fixedly connected by bolts, and the number of bolts is 6-12, evenly distributed around the flanges. Exemplarily, the semiconductor processing equipment of this embodiment is a photolithography device, wherein the delivery pipeline is used to transport photoresist.

[0055] During the opening process, the existing diaphragm valve will form a cavity in the flow channel inside the valve body 1. When processing high-viscosity fluids, microbubbles are easily generated and difficult to eliminate. For example, these microbubbles generated during the photoresist transportation process of semiconductor equipment will seriously affect the glue coating uniformity and product quality during the semiconductor manufacturing process. The on-off valve provided by the embodiment of the present invention includes a valve body 1 and a valve membrane 2, wherein the valve body 1 has a pressurized chamber 11, a fluid inlet 12, a fluid outlet 13, a first flow channel 14 connected to the fluid inlet 12, and a second flow channel 15 connected to the fluid outlet 13. The pressurized chamber 11 is connected to the first flow channel 14 and / or the second flow channel 15. The pressurized chamber 11 is used to pressurize the fluid inside the first flow channel 14 and / or the second flow channel 15. The valve membrane 2 can block and conduct the first flow channel 14 and / or the second flow channel 15. The on-off valve is configured by setting a pressurized chamber 11 in the valve body 1 and connecting the pressurized chamber 11 with the first flow channel 14 and / or the second flow channel 15. The fluid in the first flow channel 14 and / or the second flow channel 15 is pressurized by the pressurized chamber 11. When the valve diaphragm 2 is opened, the high-pressure fluid can quickly fill the cavity opened by the valve diaphragm 2, effectively preventing the generation of microbubbles during the opening process of the valve diaphragm 2 of the on-off valve.

[0056] The on-off valve of the semiconductor processing equipment of this embodiment can eliminate micro bubbles generated during the photoresist transportation process, thereby improving the uniformity of the photoresist coating process and the quality of semiconductor products.

[0057] In the above description, the reference terms "one embodiment", "some embodiments", "example", "specific example", etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0058] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An on-off valve, characterized in that: Including valve body and valve diaphragm; The valve body has a pressurized chamber, a fluid inlet, a fluid outlet, a first flow channel connected to the fluid inlet, and a second flow channel connected to the fluid outlet. The pressurized chamber is connected to the first flow channel and / or the second flow channel. The pressurized chamber is used to pressurize the fluid inside the first flow channel and / or the second flow channel. The valve membrane can block and conduct the first flow channel and the second flow channel.

2. The on-off valve according to claim 1, characterized in that: There is a first flow between the pressurized chamber and the valve membrane, a second flow between the pressurized chamber and the fluid inlet, and a third flow between the pressurized chamber and the fluid outlet, and the first flow is smaller than the smallest of the second and third flows.

3. The on-off valve according to claim 1, characterized in that: The valve membrane includes a flexible diaphragm and a driving block. The flexible diaphragm and the driving block are fixedly connected. The driving block is used to drive the flexible diaphragm to block and conduct the first flow channel and the second flow channel.

4. The on-off valve according to claim 3, characterized in that: The valve body is provided with a mounting groove, the flexible diaphragm is arranged in the mounting groove, and the edge of the flexible diaphragm is interference-fitted with the valve body.

5. The on-off valve according to claim 3, characterized in that: The valve body has a curved surface structure at a position corresponding to the flexible diaphragm.

6. The on-off valve according to claim 5, characterized in that: The center of the flexible diaphragm has a protruding structure for blocking the first flow channel and / or the second flow channel, and a ridge structure facing away from the arc surface structure is provided between the protruding structure of the flexible diaphragm and the edge of the flexible diaphragm.

7. The on-off valve according to claim 4, characterized in that: A pressing block of the flexible diaphragm is arranged in the installation groove.

8. The on-off valve according to claim 7, characterized in that: A valve cover is provided on the valve body, the valve cover is fixedly connected to the valve body, the valve cover is pressed on the clamping block, and the valve cover is provided with a first air channel for pressurizing the pressurized chamber and a second air channel for pressurizing the drive block to drive the drive block to move axially.

9. The on-off valve according to claim 8, characterized in that: The on-off valve further includes a first pressure regulating mechanism connected to the first air passage and a second pressure regulating mechanism connected to the second air passage.

10. The on-off valve according to claim 8, characterized in that: A pressurizing block is provided in the pressurizing chamber, and the pressurizing block is dynamically and sealedly connected to the pressurizing chamber. The gas flowing in from the first air channel is used to drive the pressurizing block to move so as to pressurize the pressurizing chamber.

11. The on-off valve according to claim 1, characterized in that: The on-off valve further includes a valve membrane driving structure, which is used to drive the valve membrane to block and connect the first flow channel and the second flow channel.

12. The on-off valve according to claim 1, characterized in that: The on-off valve further includes a pressurizing structure, which is used to pressurize the pressurizing chamber.

13. The on-off valve according to any one of claims 1 to 12, characterized in that: There are two pressurized chambers, one of which is communicated with the first flow channel, and the other of which is communicated with the second flow channel.

14. A semiconductor processing device, characterized in that: It comprises a delivery pipeline and an on-off valve arranged on the delivery pipeline, and the on-off valve is the on-off valve according to any one of claims 1 to 13.

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