Vacuum switching valve

Abstract

The vacuum switching valve comprises a valve body and air cylinder assemblies, the air cylinder assemblies are fixed to the two ends of the valve body, each air cylinder assembly comprises a piston rod and a sliding block, the sliding block is fixed to the end, located in the valve body, of the piston rod, the piston rod is in sliding connection with the valve body, and the valve body comprises a first ventilation opening and a second ventilation opening. A sliding block guide rail, a valve plate driving guide rail and a fixed sliding rail are arranged in the valve body, the sliding block guide rail is in sliding connection with the sliding block, the valve plate driving guide rail is fixedly connected with the valve plate, the fixed sliding rail is in sliding connection with the valve plate driving guide rail, and when the valve plate is in an initial state, the valve plate is located at a second ventilation opening. When the valve plate is in the switching position, the valve plate is located at the first ventilation opening position. According to the invention, the main path and the alternative path which are connected into one loop are arranged, so that the influence on the operation of equipment production caused by fluctuation on the pressure intensity of the moving part in the switching process can be prevented.

Description

Technical Field

[0001] The present invention belongs to the technical field of switching valves, and in particular relates to a vacuum switching valve. Background Art

[0002] During the switching process, common switching valves have a slow switching speed and cannot reach the switching state instantly. In special scenarios or under special circumstances, this may cause gas leakage or affect upstream production. If dust and other substances are present in the usage scenario, dust may enter the switching valve during the switching process, causing dust accumulation and problems with sealing and mechanical performance.

[0003] Currently available switching valves are generally used in normal pressure or positive pressure environments and cannot be used in vacuum environments. In addition, some common switching valves require manual intervention during use, which is inconvenient to use. Summary of the Invention

[0004] The purpose of the present invention is to provide a vacuum switching valve to solve the problem in the prior art that the valve is generally used in a normal pressure or positive pressure environment and cannot be used in a vacuum environment.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions: A vacuum switching valve comprises a valve body and a cylinder assembly, wherein a first upper cover and a second upper cover are mounted on one side of the valve body, and a first lower cover and a second lower cover are mounted on the other side of the valve body, a cylinder assembly is fixed to both ends of the valve body, the cylinder assembly comprises a piston rod and a slider, one end of the piston rod located in the valve body is fixed with a slider, the piston rod is slidably connected to the valve body, the valve body comprises a first vent and a second vent, a slider guide rail, a valve plate drive guide rail and a fixed slide rail are provided inside the valve body, the slider guide rail is slidably connected to the slider, the valve plate drive guide rail is fixedly connected to the valve plate, the fixed slide rail is slidably connected to the valve plate drive guide rail, and the fixed slide rail is connected to the valve body via a shear frame; When the valve plate is in the initial state, the valve plate is in the second vent position, and the airflow passes through the first upper cover, the first vent, and the first lower cover in sequence; When the valve plate is in the switching position, the valve plate is in the first vent position, and the airflow passes through the second upper cover, the second vent, and the second lower cover.

[0006] Preferably, the cylinder assembly further includes a first sealing plate and a second sealing plate, the first sealing plate being fixedly connected to the second sealing plate, and the second sealing plate being fixed to the valve body.

[0007] Preferably, a second safety valve is installed at one end of the valve body, the internal space of the valve body is connected to the internal space of the second safety valve, the second safety valve has a three-way valve, and the three-way valve is connected to the cylinder assembly through an external pipeline.

[0008] Preferably, a first safety valve is installed at one end of the valve body, the internal space of the valve body is communicated with the internal space of the first safety valve, and the first safety valve is communicated with the cylinder assembly through an external pipeline.

[0009] Preferably, the slider guide rail has a guide groove and a first U-shaped groove, the slider cooperates with the guide groove, the valve plate drive guide rail is installed with a first limit pin, the first limit pin is slidably connected to the first U-shaped groove, the valve body is provided with a limit groove, and the limit groove is slidably connected to the slider.

[0010] Preferably, the valve plate driving guide rail is further installed with a second limiting pin, and the fixed slide rail has a second U-shaped groove, and the second U-shaped groove is slidably connected to the second limiting pin.

[0011] Preferably, the valve body also includes a first ventilation plate and a second ventilation plate that cooperate with the valve plate internally, and the fixed slide rails are provided with two groups, one group of fixed slide rails is fixedly connected to the first ventilation plate, and the other group of fixed slide rails is fixedly connected to the second ventilation plate; when the valve plate is in the initial state, the valve plate is fitted with the second ventilation plate, and the airflow passes through the first upper cover, the first ventilation plate, the first vent, and the first lower cover; when the valve plate is in the switching position, the valve plate is fitted with the first ventilation plate, and the airflow passes through the second upper cover, the second ventilation plate, the second vent, and the second lower cover.

[0012] Preferably, the first ventilation plate has a first positioning hole, the second ventilation plate has a second positioning hole, and the fixed slide rail is installed with two groups of positioning pins, one group of positioning pins is installed in the first positioning hole, and the other group of positioning pins is installed in the second positioning hole.

[0013] Preferably, the shearing frame is provided in multiple groups, and one group of shearing frames includes two rocker arms, the middle parts of the two rocker arms are rotatably connected, one end of the rocker arm is rotatably mounted on a fixed slide rail, and the other end of the rocker arm is rotatably connected to the valve body.

[0014] Preferably, the first ventilation plate is installed with a first sealing ring, and the second ventilation plate is installed with a second sealing ring; when the valve plate is in the initial state, the valve plate fits with the second sealing ring; when the valve plate is in the switching position, the valve plate fits with the first sealing ring.

[0015] Beneficial effects: By providing a main passage formed by airflow passing through the first upper cover, the first ventilation plate, the first ventilation port, and the first lower cover, and a backup passage formed by the second upper cover, the second ventilation plate, the second ventilation port, and the second lower cover, the first safety valve and the second safety valve can monitor the internal pressure of the cylinder assembly and the valve body, ensuring that when the valve plate position is switched, the pressure is adjusted according to the internal pressure value of the cylinder assembly and the valve body, so that the pressure of the main passage and the backup passage is balanced when the adjustment is made, preventing the pressure of the upstream components of this embodiment from fluctuating during the switching process, thereby affecting the production operation of the equipment; By providing a valve plate driving guide rail and a fixed slide rail, the valve plate driving guide rail drives the fixed slide rail to move, and the fixed slide rail drives the second ventilation plate to descend under the restriction of the shear frame. The second sealing ring of the second ventilation plate and the valve plate will not be significantly worn, and the contact conditions between the first sealing ring and the valve plate are similar. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional schematic diagram of the vacuum switching valve.

[0017] Figure 2 This is a plan view of the vacuum switching valve.

[0018] Figure 3 This is a cross-sectional view of the vacuum switching valve formed by cutting through the first plane.

[0019] Figure 4 This is a cross-sectional view of the vacuum switching valve formed by cutting through the second plane.

[0020] Figure 5 It is a three-dimensional schematic diagram of the first ventilation plate, the second ventilation plate, the slider guide rail, the valve plate drive guide rail and the fixed slide rail in the vacuum switching valve.

[0021] Figure 6 This is a planar schematic diagram of the first ventilation plate, the second ventilation plate, the slider guide rail, the valve plate drive guide rail and the fixed slide rail in the vacuum switching valve.

[0022] Figure 7 It is a three-dimensional schematic diagram of the second safety valve in the vacuum switching valve.

[0023] Figure 8-9 This is a cross-sectional view of the second safety valve in the vacuum switching valve.

[0024] Figure 10 for Figure 1 Cross-sectional view in the AA direction.

[0025] As shown in the figure: 1. first safety valve; 2. first upper cover; 3. first lower cover; 4. second safety valve; 5. second upper cover; 6. second lower cover; 7. valve body; 71. first vent; 72. second vent; 73. first ventilation plate; 74. second ventilation plate; 75. first positioning hole; 76. second positioning hole; 77. first sealing ring; 78. second sealing ring; 79. limiting groove; 8. cylinder assembly; 81. piston rod; 82. slider; 83. first sealing plate; 84. second sealing plate; 9. slider guide rail; 91. first U-shaped groove; 92. guide groove; 10. valve plate drive guide rail; 101. first limiting pin; 102. second limiting pin; 11. fixed slide rail; 111. positioning pin; 112. second U-shaped groove; 12. shear frame; 13. valve plate. DETAILED DESCRIPTION

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the present invention will be briefly introduced below in conjunction with the drawings and the description of the embodiments or the prior art. Obviously, the following description of the structure of the drawings is only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention.

[0027] Example: Figure 1 and Figure 2 As shown, this embodiment provides a vacuum switching valve, a vacuum switching valve, including a valve body 7, a cylinder assembly 8, a first upper cover 2 and a second upper cover 5 are installed on one side of the valve body 7, and a first lower cover 3 and a second lower cover 6 are installed on the other side of the valve body 7. Cylinder assemblies 8 are fixed at both ends of the valve body 7. The cylinder assembly 8 adopts a high-speed cylinder. After adding a quick exhaust valve, a voltage stabilizer and other devices, it is measured that under a pressure of 0.5 MPa, the maximum speed can reach more than 2000 mm / s. With the support of the two groups of cylinder assemblies 8, during operation, the load borne by a single cylinder assembly 8 is much smaller than the rated load of the cylinder. Therefore, during the switching process, the speed of the equipment can reach about 0.1S.

[0028] like Figure 1 and Figure 4 As shown, the cylinder assembly 8 includes a piston rod 81 and a slider 82. The slider 82 is fixed to one end of the piston rod 81 located in the valve body 7. The piston rod 81 is slidably connected to the valve body 7. Figure 10The valve body 7 is provided with a limiting groove 79, which is a rectangular parallelepiped. The slider 82 has a corresponding matching rectangular parallelepiped part. The limiting groove 79 is slidably connected to the slider 82 to limit the movement direction of the slider 82, prevent the slider 82 from deflecting, and maintain linear movement. The cylinder assembly 8 also includes a first sealing plate 83 and a second sealing plate 84. The first sealing plate 83 is fixedly connected to the second sealing plate 84, and the second sealing plate 84 is fixed to the valve body 7.

[0029] like Figure 3 and Figure 7 As shown, the second safety valve 4 is installed at one end of the valve body 7, the first safety valve 1 and the second safety valve 4 are externally connected to a control box, the control box includes a gas control module, and the internal space of the valve body 7 is connected to the internal space of the second safety valve 4, as shown in FIG. Figure 8 and Figure 9 As shown, the second safety valve 4 has a three-way valve, which is connected to the cylinder assembly 8 through an external pipeline. The three-way valve connects the cylinder assembly 8 and the gas control module. The first safety valve 1 is installed at one end of the valve body 7. The internal space of the valve body 7 is connected to the internal space of the first safety valve 1. The first safety valve 1 is connected to the cylinder assembly 8 through an external pipeline.

[0030] like Figure 4 and Figure 5 As shown, the valve body 7 includes a first vent 71 and a second vent 72. The valve body 7 is provided with a slider guide rail 9, a valve plate drive guide rail 10 and a fixed slide rail 11. The valve body 7 also includes a first vent plate 73 and a second vent plate 74 that cooperate with the valve plate 13. The fixed slide rail 11 is provided with two groups. One group of fixed slide rails 11 is fixedly connected to the first vent plate 73, and the other group of fixed slide rails 11 is fixedly connected to the second vent plate 74. The first vent plate 73 has a first positioning hole 75. The first vent plate 73 is arranged It is equipped with a first sealing ring 77, the second ventilation plate 74 has a second positioning hole 76, and the second ventilation plate 74 is equipped with a second sealing ring 78. The first sealing ring 77 and the second sealing ring 78 are elliptical sealing rings, which reduce the movable stroke of the cylinder assembly 8. The fixed slide rail 11 is equipped with two groups of positioning pins 111, one group of positioning pins 111 is installed in the first positioning hole 75, and the other group of positioning pins 111 is installed in the second positioning hole 76, which makes it convenient to combine the fixed slide rail 11 with the second ventilation plate 74 or the first ventilation plate 73.

[0031] like Figure 5 and Figure 6As shown, the slider guide rail 9 has a guide groove 92 and a first U-shaped groove 91, the slider 82 cooperates with the guide groove 92, and the valve plate drive guide rail 10 is installed with a first limit pin 101, the first limit pin 101 is slidingly connected to the first U-shaped groove 91, the slider guide rail 9 is slidingly connected to the slider 82, the first limit pin 101 is slidingly connected to the first U-shaped groove 91, and the second U-shaped groove 112 is slidingly connected to the second limit pin 102, which can prevent the slider guide rail 9 from deviating and maintain synchronous movement.

[0032] like Figure 5 and Figure 6 As shown, the valve plate drive guide rail 10 is also equipped with a second limit pin 102, the fixed slide rail 11 has a second U-shaped groove 112, the second U-shaped groove 112 is slidingly connected to the second limit pin 102, the valve plate drive guide rail 10 is fixedly connected to the valve plate 13, the fixed slide rail 11 is slidingly connected to the valve plate drive guide rail 10, the fixed slide rail 11 is connected to the valve body 7 through a shear frame 12, each fixed slide rail 11 is connected to the valve body 7 with a shear frame 12, so that the force on both ends of the fixed slide rail 11 is uniform, when the second limit pin 102 of the valve plate drive guide rail 10 moves to the two ends of the second U-shaped groove 112 or the first limit pin 101 moves to the two ends of the first U-shaped groove 91, the fixed slide rail 11 gives the valve plate drive guide rail 10 a force relatively perpendicular to the direction of movement, so that the valve plate 13 is in better contact with the second ventilation plate 74 or the first ventilation plate 73, and the sealing efficiency is higher.

[0033] like Figure 5 and Figure 6 As shown, there are multiple groups of shearing frames 12. One group of shearing frames 12 includes two rocker arms. The middle parts of the two rocker arms are rotatably connected. One end of the rocker arm is rotatably mounted on the fixed slide rail 11, and the other end of the rocker arm is rotatably connected to the valve body 7.

[0034] like Figure 1 and Figure 3 As shown, when the valve plate 13 is in the initial state, the valve plate 13 is at the second vent 72 position, the valve plate 13 is in contact with the second vent plate 74, and the valve plate 13 is in contact with the second sealing ring 78. The airflow passes through the first upper cover 2, the first vent plate 73, the first vent 71, and the first lower cover 3 to form a main passage. When the valve plate 13 is in the switching position, the valve plate 13 is at the first vent 71 position, the valve plate 13 is in contact with the first vent plate 73, and the valve plate 13 is in contact with the first sealing ring 77. The airflow passes through the second upper cover 5, the second vent plate 74, the second vent 72, and the second lower cover 6 to form a backup passage.

[0035] In actual use, this embodiment will be connected to a control box, and the main passage and the backup passage will be connected to a pipe together and connected to the control box. The control box includes a circuit control module and a gas path control module. The gas path control module and the second safety valve 4 are connected to the cylinder assembly 8. The gas path control module controls the movement of the gas in the main passage, the backup passage and in this embodiment and monitors the internal pressure value. The circuit control module controls the movement of the piston rod 81 of the cylinder assembly 8. This embodiment is fixed on the C-shaped steel. The first upper cover 2 and the second upper cover 5 are flange-connected to the air intake pipe, and the first lower cover 3 and the second lower cover 6 are flange-connected to the PUMP. In the initial state, the main passage is in an open state and the backup passage is in a closed state. When a signal for switching the position of the valve plate 13 is detected or a signal for manually switching the position of the valve plate 13 is required, the piston rod 81 drives the slider 82 to move, the slider 82 drives the valve plate drive guide rail 10 to move, the valve plate drive guide rail 10 drives the valve plate 13 to leave the second ventilation plate 74 and move toward the first ventilation plate 73, the valve plate drive guide rail 10 drives the fixed slide rail 11 to move, and the fixed slide rail 11 drives the second ventilation plate 74 to descend under the limiting action of the shear frame 12, and the second sealing ring 78 of the second ventilation plate 74 and the valve plate 13 will not be significantly worn. When the valve plate 13 moves to the first ventilation plate 74 , the second ventilation plate 74 will be in the initial position, and the first sealing ring 77 of the first ventilation plate 74 will contact the valve plate 13; when the signal of resetting the switching valve plate 13 or the signal of manually resetting the switching valve plate 13 is detected, it is similar to the above movement; the first safety valve 1 and the second safety valve 4 can monitor the internal pressure of the cylinder assembly 8 and the valve body 7 to ensure that when the position of the valve plate 13 is switched, the pressure is adjusted according to the internal pressure value of the cylinder assembly 8 and the valve body 7, so that the pressure of the main passage and the alternative passage is balanced when the adjustment is made, so as to prevent the pressure of the upstream components of this embodiment from fluctuating during the switching process, thereby affecting the operation of the equipment production.

[0036] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A vacuum switching valve, characterized in that: The invention comprises a valve body (7) and a cylinder assembly (8), wherein a first upper cover (2) and a second upper cover (5) are mounted on one side of the valve body (7), and a first lower cover (3) and a second lower cover (6) are mounted on the other side of the valve body (7). The cylinder assembly (8) is fixed at both ends of the valve body (7), and the cylinder assembly (8) comprises a piston rod (81) and a slider (82). The slider (82) is fixed at one end of the piston rod (81) located in the valve body (7), and the piston rod (81) is slidably connected to the valve body (7). The valve body (7) includes a first vent (71) and a second vent (72), and a slider guide rail (9), a valve plate drive guide rail (10) and a fixed slide rail (11) are provided inside the valve body (7), the slider guide rail (9) is slidably connected to the slider (82), the valve plate drive guide rail (10) is fixedly connected to the valve plate (13), the fixed slide rail (11) is slidably connected to the valve plate drive guide rail (10), and the fixed slide rail (11) is connected to the valve body (7) via a shear frame (12); When the valve plate (13) is in the initial state, the valve plate (13) is at the second vent (72) position, and the airflow passes through the first upper cover (2), the first vent (71), and the first lower cover (3) in sequence; When the valve plate (13) is in the switching position, the valve plate (13) is in the first vent (71) position, and the airflow passes through the second upper cover (5), the second vent (72), and the second lower cover (6).

2. The vacuum switching valve according to claim 1, characterized in that: The cylinder assembly (8) further comprises a first sealing plate (83) and a second sealing plate (84), wherein the first sealing plate (83) is fixedly connected to the second sealing plate (84), and the second sealing plate (84) is fixed to the valve body (7).

3. The vacuum switching valve according to claim 1, characterized in that: A second safety valve (4) is installed at one end of the valve body (7), and the internal space of the valve body (7) is communicated with the internal space of the second safety valve (4). The second safety valve (4) has a three-way valve, and the three-way valve is communicated with the cylinder assembly (8) through an external pipeline.

4. The vacuum switching valve according to claim 1, characterized in that: A first safety valve (1) is installed at one end of the valve body (7), the internal space of the valve body (7) is communicated with the internal space of the first safety valve (1), and the first safety valve (1) is communicated with the cylinder assembly (8) through an external pipeline.

5. The vacuum switching valve according to claim 1, characterized in that: The slider guide rail (9) has a guide groove (92) and a first U-shaped groove (91), the slider (82) cooperates with the guide groove (92), the valve plate driving guide rail (10) is installed with a first limit pin (101), the first limit pin (101) is slidably connected to the first U-shaped groove (91), and the valve body (7) is provided with a limit groove (79), and the limit groove (79) is slidably connected to the slider (82).

6. The vacuum switching valve according to claim 1, characterized in that: The valve plate driving guide rail (10) is further provided with a second limiting pin (102), and the fixed slide rail (11) has a second U-shaped groove (112), and the second U-shaped groove (112) is slidably connected to the second limiting pin (102).

7. The vacuum switching valve according to claim 1, characterized in that: The valve body (7) further comprises a first ventilation plate (73) and a second ventilation plate (74) which cooperate with the valve plate (13) inside. The fixed slide rails (11) are provided with two groups, one group of fixed slide rails (11) is fixedly connected to the first ventilation plate (73), and the other group of fixed slide rails (11) is fixedly connected to the second ventilation plate (74). When the valve plate (13) is in an initial state, the valve plate (13) is in contact with the second ventilation plate (74), and air flows through the first upper cover (2), the first ventilation plate (73), the first ventilation port (71), and the first lower cover (3); When the valve plate (13) is in the switching position, the valve plate (13) fits the first ventilation plate (73), and the airflow passes through the second upper cover (5), the second ventilation plate (74), the second ventilation port (72), and the second lower cover (6).

8. The vacuum switching valve according to claim 7, characterized in that: The first ventilation plate (73) has a first positioning hole (75), the second ventilation plate (74) has a second positioning hole (76), and the fixed slide rail (11) is installed with two groups of positioning pins (111), one group of positioning pins (111) is installed in the first positioning hole (75), and the other group of positioning pins (111) is installed in the second positioning hole (76).

9. The vacuum switching valve according to claim 1, characterized in that: The shearing racks (12) are provided in multiple groups, and one group of shearing racks (12) includes two rocker arms, the middle parts of the two rocker arms are rotatably connected, one end of the rocker arm is rotatably mounted on a fixed slide rail (11), and the other end of the rocker arm is rotatably connected to the valve body (7).

10. The vacuum switching valve according to claim 7 or 8, characterized in that: The first ventilation plate (73) is installed with a first sealing ring (77), and the second ventilation plate (74) is installed with a second sealing ring (78); When the valve plate (13) is in an initial state, the valve plate (13) is in contact with the second sealing ring (78); When the valve plate (13) is in the switching position, the valve plate (13) fits the first sealing ring (77).

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