Waveguide resonance array type power equipment multi-parameter online monitoring system

Through the waveguide resonant array multi-parameter online monitoring system, temperature, local discharge and mechanical vibration sensors are integrated, combined with intelligent algorithms and adaptive communication technology, the multi-parameter coupled interference and anti-interference problems of power equipment monitoring are solved, and high-precision and real-time power equipment status monitoring is achieved.

CN120595061AInactive Publication Date: 2025-09-05SHAANXI SAIPRI ELECTRIC CO LTD +1
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Patent Information

Application Number
CN202511113388.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-08-11
Publication Date
2025-09-05
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

Traditional power equipment monitoring methods have problems such as single point monitoring limitations, multi-parameter coupling interference, insufficient anti-interference capability and poor real-time and scalability, and cannot achieve comprehensive, accurate and timely multi-parameter monitoring of power equipment.

Method used

The waveguide resonant array-type multi-parameter online monitoring system is adopted, and the distributed perception capability of the waveguide resonant array is used, combined with light sensing and intelligent algorithms, temperature, local discharge and mechanical vibration sensors are integrated, fault diagnosis is carried out through the FFT algorithm and DBO-optimized LightGBM model, and data transmission of Modbus TCP and IEC 61850 protocols is supported, combining induction power withdrawal and high-temperature lithium sub-battery power supply.

Benefits of technology

It realizes high-precision and anti-interference monitoring of multi-parameter power equipment, with a spatial resolution of up to centimeters, a fault diagnosis accuracy of >95%, and an early warning response time <10 seconds. The system maintains data transmission stability in a strong electromagnetic interference environment.

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Abstract

The invention relates to the technical field of power equipment state monitoring, in particular to a waveguide resonance array type power equipment multi-parameter online monitoring system which comprises a waveguide resonance array module, a multi-parameter sensor integration module, a signal processing and analyzing module, a data transmission and communication module and a power management module. The waveguide resonance array is of a distributed annular or linear arrangement structure, and real-time monitoring of multiple parameters such as temperature, partial discharge and mechanical vibration is achieved through a waveguide Bragg grating (WBG) and a micro-ring resonator. The signal processing module combines an FFT algorithm and a DBO optimized LightGBM model to carry out feature extraction and fault diagnosis, and data is transmitted to a cloud platform through a Modbus TCP or IEC 61850 protocol. The system supports multi-scene deployment, has anti-electromagnetic interference capability, and can be widely applied to state monitoring of power equipment such as high-voltage cables and transformers. The temperature monitoring precision reaches + / -0.5 DEG C, the partial discharge detection sensitivity is superior to 10pC, and the response time is less than 10s.
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Description

Technical Field

[0001] The present invention relates to the technical field of power equipment status monitoring, in particular to a waveguide resonance array type power equipment multi-parameter online monitoring system. Background Art

[0002] The reliable operation of power equipment is the key to ensuring grid stability. Traditional monitoring methods have the following limitations: Limitations of Single-Point Monitoring: Existing technologies often use single-point sensors (such as thermocouples and vibration sensors), which cannot fully cover the device's spatial temperature field or partial discharge distribution. For example, the chip temperature distribution within an IGBT module is uneven, and single-point monitoring can easily lead to misjudgments.

[0003] Multi-parameter coupling interference: When power equipment is operating, parameters such as temperature, vibration, and partial discharge are interrelated. Traditional independent sensors cannot simultaneously collect and analyze these parameters. For example, transformer oil viscosity and temperature changes are strongly coupled, requiring simultaneous monitoring to accurately assess insulation condition.

[0004] Insufficient anti-interference capabilities: Strong electromagnetic interference exists in power environments, and traditional electronic sensors are easily affected by noise. For example, partial discharge signals are often drowned out by background noise, resulting in reduced detection sensitivity.

[0005] Poor real-time performance and scalability: Existing systems rely heavily on wired communications, resulting in limited deployment flexibility and delayed data processing. For example, power line monitoring requires manual inspections to obtain data, which cannot provide timely warnings of potential hazards such as wildfires and tree obstructions.

[0006] To solve the above problems, the present invention proposes a waveguide resonant array multi-parameter online monitoring system, which utilizes the distributed sensing capability of the waveguide resonant array, combines optical sensing with intelligent algorithms, and realizes high-precision, anti-interference monitoring of multiple parameters of power equipment. Summary of the Invention

[0007] The core of this invention lies in the distributed sensing and multi-parameter coordinated monitoring of waveguide resonant arrays. The waveguide resonant array is composed of multiple waveguide resonators, each of which integrates different types of sensors: Temperature monitoring: Temperature changes are inverted through the wavelength drift of the waveguide Bragg grating (WBG), with an accuracy of ±0.5°C; Partial discharge monitoring: Utilizes the evanescent field effect of microring resonators to detect electromagnetic pulses generated by discharge, with a sensitivity better than 10pC; Mechanical vibration monitoring: Analyze vibration signals through changes in waveguide resonant frequency, with a frequency resolution of 0.1Hz.

[0008] The signal processing module uses an FFT algorithm for spectrum analysis and a DBO-optimized LightGBM model for fault diagnosis. Data transmission supports Modbus TCP and IEC 61850 protocols, ensuring compatibility with existing power systems. The power management module uses a combination of inductive power generation and battery power to meet the needs of long-term online monitoring.

[0009] The technical solution adopted by the present invention to solve the technical problem is: a waveguide resonant array type power equipment multi-parameter online monitoring system, comprising: Waveguide resonator array module: A distributed ring or linear array consisting of 5-20 waveguide resonators with a spacing of 1-5 cm. It uses silicon-based or ceramic materials, and a periodic structure is etched on the surface to form a Bragg grating or micro-ring resonator cavity. Multi-parameter sensor integrated module: Integrates waveguide Bragg grating (WBG), microring resonator and electromagnetic coupling sensor for simultaneous monitoring of parameters such as temperature, partial discharge and mechanical vibration; Signal processing and analysis module: including FFT spectrum analysis unit and DBO optimized LightGBM fault diagnosis model, realizing signal feature extraction and equipment health status assessment; Data transmission and communication module: supports Modbus TCP, IEC 61850 and other communication protocols, and transmits data to the cloud platform via optical fiber or LoRa wireless; Power management module: It uses a combination of inductive power extraction and high-temperature lithium-ion battery (13000mAh) for power supply, and supports stable operation in an environment of -40℃ to 150℃.

[0010] Specifically, the Bragg grating period of the waveguide resonator is 200-500 nanometers, the diameter of the microring resonant cavity is 50-200 micrometers, and wavelength drift compensation can be achieved through thermal tuning or stress tuning.

[0011] Specifically, the multi-parameter sensor integration module adopts dynamic mode multiplexing technology to achieve multi-channel signal time-sharing multiplexing through a silicon optical tunable filter array, thereby reducing crosstalk between sensors.

[0012] Specifically, the signal processing and analysis module has a built-in anti-aliasing filter, a sampling frequency of 10kHz-1MHz, and supports 16-bit resolution signal acquisition.

[0013] Specifically, the data transmission and communication module adopts adaptive frequency hopping technology to achieve anti-electromagnetic interference communication in the 2.4GHz frequency band, with a bit error rate of less than 10 -6 .

[0014] Specifically, the power management module obtains energy from the power transmission line through the magnetic field coupling principle, and the output power is not less than 200 μW under a 50 Hz alternating magnetic field.

[0015] Specifically, the system supports multi-device cascading, and a single master node can manage 16 slave nodes, with a coverage radius of up to 10 kilometers.

[0016] Specifically, the waveguide resonant array module adopts a three-dimensional packaging structure, has a protection level of IP68, and can withstand 10kV / m electromagnetic interference.

[0017] Specifically, the system has a built-in self-calibration module, which regularly performs online calibration on the sensor through standard gas or vibration source, and the calibration cycle is 1-7 days.

[0018] Specifically, the system can be linked with the drone inspection system, and when an equipment abnormality is detected, the drone is automatically triggered to go to the fault point for visible light / infrared imaging verification.

[0019] Beneficial effects of the present invention: Distributed waveguide resonator array: Through a circular or linear arrangement of 5-20 resonators, it can achieve three-dimensional reconstruction of the device surface temperature field and partial discharge area with a spatial resolution of centimeters; Dynamic mode multiplexing technology: Utilizes silicon optical tunable filters to achieve time-division multiplexing of multi-channel signals, expanding the number of sensors to 32 and reducing system costs. Anti-interference design: Using magnetic field coupling power supply and adaptive frequency hopping communication, it can maintain data transmission stability even in 10kV / m electromagnetic interference environment; Intelligent diagnosis model: The DBO-optimized LightGBM model, combined with historical equipment data, achieves a fault type identification accuracy rate of >95% and an early warning response time of <10 seconds. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below with reference to the accompanying drawings and examples.

[0021] Figure 1 This is a diagram of the architecture of the waveguide resonant array type multi-parameter online monitoring system for power equipment provided by the present invention; Figure 2 This is a diagram of the architecture of the waveguide resonance array module in the waveguide resonance array type power equipment multi-parameter online monitoring system provided by the present invention; Figure 3 This is a diagram of the architecture of the multi-parameter sensor integration module in the waveguide resonant array type power equipment multi-parameter online monitoring system provided by the present invention; Figure 4 This is an architectural diagram of the signal processing and analysis module in the waveguide resonant array type power equipment multi-parameter online monitoring system provided by the present invention; Figure 5This is an architectural diagram of the data transmission and communication module in the waveguide resonant array type power equipment multi-parameter online monitoring system provided by the present invention; Figure 6 This is an architectural diagram of the power management module in the waveguide resonant array type power equipment multi-parameter online monitoring system provided by the present invention. DETAILED DESCRIPTION

[0022] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0023] like Figure 1-6 As shown, the waveguide resonant array type power equipment multi-parameter online monitoring system of the present invention includes: Waveguide resonator array module: A distributed array of 5-20 waveguide resonators is formed, supporting circular or linear arrangements with a spacing of 1-5 cm (e.g., a 2 cm linear arrangement is used for high-voltage cable monitoring, and a 3 cm circular arrangement is used for transformer monitoring). The resonator substrate is made of silicon or ceramic: Silicon-based materials: Suitable for temperature-sensitive scenarios (-50°C to 150°C). Surface-etched Bragg gratings with a period of 200-500 nm (WBG with a period of 300 nm) are used to monitor wavelength drift through the thermo-optical effect. Ceramic material: Suitable for strong electromagnetic interference environments (such as GIS equipment), using a micro-ring resonant cavity with a diameter of 50-200 microns (micro-ring with a diameter of 100 microns) and using the evanescent field effect to couple electromagnetic signals.

[0024] The array structure achieves vibration resistance (withstands 10g acceleration) and electromagnetic shielding (built-in 2000-mesh electromagnetic shielding net) through three-dimensional packaging (protection level IP68), and the frequency drift is less than 0.02% under a 10kV / m power frequency electric field.

[0025] Multi-parameter sensor integrated module: The module integrates three types of core sensors and implements multi-channel signal decoupling through dynamic mode multiplexing technology: Temperature monitoring: Waveguide Bragg grating (WBG), wavelength drift is linearly related to temperature (sensitivity 10pm / °C), and responds through a 3.5GHz center frequency resonator; Partial discharge monitoring: The microring resonator couples ultra-high frequency electromagnetic waves (300MHz-3GHz) and detects 0.05pC-level discharge signals through an 8.2GHz center frequency resonator; Mechanical vibration monitoring: Based on the piezoelectric thermal effect, the SAW resonator responds to 1-10kHz vibration signals with a 5.8GHz center frequency (resolution 0.01g).

[0026] Dynamic multiplexing technology uses a silicon optical tunable filter array (wavelength tuning range 1520-1560nm) to time-share different sensor channels, with crosstalk suppression of <-30dB (refer to CN116148602A patent) and supports parallel acquisition of 32 sensors.

[0027] Signal processing and analysis module: Anti-aliasing filter (cut-off frequency 1MHz) and 16-bit ADC are used for signal acquisition, and the sampling frequency is dynamically adjustable (10kHz-1MHz); The FFT spectrum analysis unit calculates the vibration main frequency and discharge pulse spectrum characteristics (such as ns-level pulse rising edge slope) in real time.

[0028] Intelligent diagnostic model: The LightGBM model optimized by DBO (Differential Bayesian Optimization) has the following input features: Temperature gradient (triggering an early warning when the temperature difference between adjacent resonators is greater than 5°C); Discharge pulse amplitude-repetition rate matrix (e.g., corona discharge is characterized by high-frequency, low-amplitude pulses); Entropy value of the vibration signal time-frequency diagram (entropy value > 0.7 when the bolt is loose).

[0029] The model was trained with 100,000 sets of field data, with an accuracy rate of 97.3% in identifying five types of discharges and an early warning response time of less than 10 seconds.

[0030] Data transmission and communication module: Supports Modbus TCP (within substations) and IEC 61850 (smart grid) protocols, with optical fiber transmission delay less than 200ms; LoRa wireless transmission uses adaptive frequency hopping technology (2.4GHz band, 16 hopping points), with a bit error rate of <10 -6 , covering a radius of 500 meters (switch cabinet scenario) to 10 kilometers (transmission line cascade scenario).

[0031] Power management module: Based on the principle of magnetic field coupling, the output power is ≥ 200μW in a 50Hz alternating magnetic field (for example, 250μW is obtained near the transformer winding); It also includes a backup power supply: a 13000mAh high-temperature lithium-ion battery with a battery life of 180 days at -40°C and supports wireless charging (charging efficiency ≥ 75%).

[0032] Example 1: Collaborative monitoring of 110kV high-voltage cable temperature and partial discharge 1. System Configuration Waveguide resonator array: 12 silicon-based waveguide resonators are linearly arranged on the cable outer sheath with a spacing of 2 cm, a Bragg grating period of 300 nm, and a microring resonator cavity diameter of 80 μm; Sensor integration: Each resonator integrates 3.5GHz WBG (temperature) and 8.2GHz micro-ring (discharge), and time-sharing acquisition is performed through silicon optical filters; Signal processing: FFT sampling frequency 100kHz, LightGBM model input features include: Temperature sequence (temperature rise rate > 2°C / min within 5 minutes of sliding window); Discharge pulse rise time (corona discharge <10ns, creeping discharge >50ns); Communication and power supply: Modbus TCP is used to transmit data to the substation SCADA system. The inductive power module draws power from the cable induction current (output 300 μW). The backup battery capacity is 5000 mAh.

[0033] 2. Test results Temperature monitoring: accuracy of ±0.3°C at 25°C, error <±0.5°C in the range of -10°C to 80°C; Partial discharge: Detection sensitivity 8pC (missing rate <3% at 10pC discharge), positioning accuracy ±5cm (calculated by 3×3 array phase difference); Typical case: A continuous weak discharge of 1pC was detected in a cable joint during operation. Three months later, cracks were found in the insulator during disassembly, verifying the early warning capability.

[0034] Example 2: Multi-parameter monitoring of 220kV transformer oil 1. System Configuration Waveguide resonator array: 8 95% Al2O3 ceramic resonators are distributed in a ring on the side wall of the fuel tank, with a spacing of 3 cm. The diameter of the micro-ring resonator cavity is 100 microns, and a 0.2mm wide microstrip spiral structure is etched to enhance the electric field; Sensor Integration: 3.5GHz resonator: monitors oil temperature (-40℃ to 120℃); 5.8GHz resonator: monitors viscosity (0-1200cP) by changing the surface acoustic wave velocity caused by changes in oil viscosity; 8.2GHz resonator: couples UHF signals generated by partial discharge in oil; Signal processing: DBO optimization parameters include a learning rate of 0.05 and a tree depth of 8. Input features are the viscosity change rate (>5% / month) and the temperature-water content correlation matrix. Power supply: Power is taken from the transformer winding magnetic field induction (250μW), supporting continuous operation for 30 days without external power supply.

[0035] 2. Test results Oil parameters: Viscosity monitoring accuracy ±2% (measured value of 100cP oil at 20°C is 98-102cP), water content accuracy ±3% (0-100ppm); Fault diagnosis: Winding overheat fault recognition rate of 97% (threshold: oil temperature rise > 60K and viscosity drop > 10%), oil quality deterioration warning lead time ≥ 15 days; Anti-interference: Frequency drift under 100kV / m power frequency electric field is less than 0.015%, meeting GB / T17626.3 standard.

[0036] Example 3: 35kV switchgear mechanical vibration and bolt loosening monitoring 1. System Configuration Waveguide resonator array: Six silicon-based resonators are mounted on the inside of the cabinet door, with a spacing of 4 cm, using a thermally tuned structure (Pt100 thermistors compensate for temperature drift); Sensor integration: 5.8GHz SAW resonator, vibration sensitive direction perpendicular to the cabinet door surface, detecting 0.01g vibration; Signal processing: FFT analysis of the key frequency band 10-1000Hz, feature extraction including: Bolt loosening characteristic frequency: 100Hz (fundamental frequency) and 200Hz (multiple frequency) component amplitude ratio> 1.5; Normal operating vibration frequency band: 50-150Hz (when the circuit breaker is open or closed); Communication: LoRa wireless transmission (470MHz frequency band), transmission power 14dBm, coverage radius 500 meters.

[0037] 2. Test results Vibration monitoring: frequency resolution 0.05Hz, amplitude measurement range 0.01-10g, linearity > 0.99; Fault location: Through the calculation of the signal phase difference of 6 resonators, the error of the loose bolt position is less than ±5 cm; Field application: After six months of operation, a switchgear cabinet detected a sudden increase in 100 Hz vibration components. During maintenance, it was discovered that the busbar fixing bolts were loose (torque decreased by 30%).

[0038] Example 4: 500kV transmission line sag-temperature-breeze vibration monitoring 1. System Configuration Waveguide resonator array: 16 zirconia ceramic resonators are distributed in the conductor hardware with a spacing of 1.5 cm. The three-dimensional package (IP68) can withstand -40℃ to 150℃. Sensor Integration: 3.5GHz WBG: monitors conductor temperature (-50°C to 150°C); 5.8GHz SAW: monitors breeze vibrations (1-100Hz); 8.2GHz micro-ring: Assists in monitoring corona discharge (determining wire breakage); Data fusion: Establish a temperature-sag mathematical model: ΔS = 0.0012 × ΔT × L (L is the span, ΔT is the temperature rise), combined with UAV visible light imaging; Power supply: 13000mAh high-temperature lithium-ion battery, average daily power consumption 70mAh at -40°C, battery life 180 days.

[0039] 2. Test results Temperature accuracy: ±0.8°C (the deviation between the measured value and the thermocouple is less than 1°C at -30°C); Sag monitoring: The error is less than 0.5 meters at a span of 500 meters, and the deviation between the calculated sag increment and the measured value is less than 3% when the temperature rises by 50°C. Warning case: A line detected that the temperature was >40°C and the sag was >15 meters for three consecutive days, triggering an overload warning to avoid conductor breakage accidents.

[0040] Example 5: 110kV GIS equipment anti-electromagnetic interference partial discharge monitoring 1. System Configuration Waveguide resonator array: 10 silicon-based resonators are distributed near the GIS basin insulator, with a spacing of 3 cm, encapsulated in a 316L stainless steel cavity (wall thickness 1 mm), and built-in 2000 mesh electromagnetic shielding mesh; Sensor integration: 8.2GHz microring resonator, inner wall etched microstrip spiral structure (electric field enhancement 40%), detection sensitivity 0.05pC; Signal processing: Adaptive Kalman filtering eliminates 50Hz power frequency interference, and the CNN model analyzes group delay characteristics to identify discharge types: Corona discharge: group delay time <5ns; Suspended potential discharge: group delay fluctuation> 20ns; Communication: IEC 61850 protocol access to substation automation system, optical fiber transmission delay <100ms.

[0041] 2. Test results Anti-interference capability: Under 10kV / m electromagnetic interference, the signal-to-noise ratio of 0.1pC discharge signal is greater than 15dB, and the false alarm rate is less than 1%; Discharge identification: 97.3% accuracy for five types of discharge (tested on 100,000 data sets), with a 1pC continuous discharge detected in a 220kV GIS three months in advance. Long-term stability: After 12 months of continuous operation, the frequency drift is less than 0.02%, meeting the GB / T26860-2011 standard.

[0042] Example 6: Smart Grid Multi-Device Cascade Collaborative Monitoring System 1. System Configuration Cascade architecture: 1 master node manages 16 slave nodes, covering a radius of 10 kilometers, using a fiber optic ring network (self-healing time < 50ms); Slave node distribution: Cable terminal (4 slave nodes): monitoring temperature + discharge; Transformer (6 slave nodes): monitoring oil parameters + vibration; Switchgear (3 slave nodes): monitoring vibration + partial discharge; Transmission lines (3 slave nodes): monitoring sag + temperature; Linkage mechanism: Trigger drone inspections (visible light / infrared imaging) when anomalies occur; Generate maintenance work orders (associate defect types with historical data); Edge computing: The master node integrates an STM32WB MCU, processes 90% of redundant data locally, and only uploads characteristic values ​​(data volume is reduced by 90%).

[0043] 2. Test results System capacity: Process 512 channels of sensor data simultaneously with a delay of less than 200ms; Fault location: Correlation analysis of multi-device data enables a 98% accuracy rate in fault location (e.g., linkage between transformer partial discharge and abnormal cable terminal temperature). Application case: After a substation cascade system had been running for half a year, GIS partial discharge and abnormal transformer oil temperature were discovered. The combined diagnosis was that the system was a bushing insulation defect, reducing maintenance time by 40%.

[0044] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the above-described embodiments. The above-described embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. Waveguide resonant array type multi-parameter online monitoring system for power equipment, characterized by: include: Waveguide resonator array module: A distributed ring or linear array consisting of 5-20 waveguide resonators with a spacing of 1-5 cm. It uses silicon-based or ceramic materials, and a periodic structure is etched on the surface to form a Bragg grating or micro-ring resonator cavity. Multi-parameter sensor integrated module: Integrates waveguide Bragg grating, microring resonator and electromagnetic coupling sensor for simultaneous monitoring of temperature, partial discharge and mechanical vibration parameters; Signal processing and analysis module: including FFT spectrum analysis unit and DBO optimized LightGBM fault diagnosis model, realizing signal feature extraction and equipment health status assessment; Data transmission and communication module: supports Modbus TCP and IEC 61850 communication protocols, and transmits data to the cloud platform via optical fiber or LoRa wireless; Power management module: It uses a combination of inductive power extraction and high-temperature lithium-ion batteries to power the system, and supports stable operation in environments ranging from -40°C to 150°C.

2. The waveguide resonant array type multi-parameter online monitoring system for power equipment according to claim 1, characterized in that: The Bragg grating period of the waveguide resonator is 200-500 nanometers, the diameter of the microring resonant cavity is 50-200 micrometers, and wavelength drift compensation can be achieved through thermal tuning or stress tuning.

3. The waveguide resonant array type multi-parameter online monitoring system for power equipment according to claim 1, characterized in that: The multi-parameter sensor integrated module adopts dynamic mode multiplexing technology and realizes multi-channel signal time-sharing multiplexing through a silicon optical tunable filter array.

4. The waveguide resonant array type multi-parameter online monitoring system for power equipment according to claim 1, characterized in that: The signal processing and analysis module has a built-in anti-aliasing filter, a sampling frequency of 10kHz-1MHz, and supports 16-bit resolution signal acquisition.

5. The waveguide resonant array type multi-parameter online monitoring system for power equipment according to claim 1, characterized in that: The data transmission and communication module adopts adaptive frequency hopping technology to achieve anti-electromagnetic interference communication in the 2.4GHz frequency band, with a bit error rate of less than 10 -6 .

6. The waveguide resonant array type multi-parameter online monitoring system for power equipment according to claim 1, characterized in that: The power management module obtains energy from the transmission line through the principle of magnetic field coupling, and the output power is not less than 200μW under a 50Hz alternating magnetic field.

7. The waveguide resonant array type multi-parameter online monitoring system for power equipment according to claim 1, characterized in that: The system supports multi-device cascading, and a single master node can manage 16 slave nodes with a coverage radius of up to 10 kilometers.

8. The waveguide resonant array type multi-parameter online monitoring system for power equipment according to claim 1, characterized in that: The waveguide resonance array module adopts a three-dimensional packaging structure.

Citation Information

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