Angle zeroing adaptive compensation device and method for capacitive film thickness measurement

Abstract

The present invention discloses an angle zeroing adaptive compensation device and method for capacitive film thickness measurement, belonging to the field of film thickness measurement technology. The device comprises: a capacitive sensor for measuring film thickness, wherein an air blowing device is mounted on the sensor probe of the capacitive sensor; a position compensation mechanism for driving the capacitive sensor; the position compensation mechanism comprising a compensation execution unit and a compensation system; and a deflection sensor for detecting displacement of the capacitive sensor. The capacitive sensor is mounted on the power output unit of the compensation execution unit; the compensation system receives a detection signal from the deflection sensor and controls the operation of the compensation execution unit based on the detection signal and compensation logic. The present invention combines the Bernoulli effect, sensor technology, and an advanced closed-loop control system to ensure that the distance between the film and the sensor probe remains constant throughout the entire detection process, thereby minimizing errors and ensuring the accuracy and reliability of the detection data.

Description

Technical Field

[0001] The present invention belongs to the technical field of film thickness measurement, and in particular relates to an angle zeroing adaptive compensation device and method for capacitive film thickness measurement. Background Art

[0002] In recent years, with the rapid advancement of science and technology, the application areas of film products have been continuously expanding, and they are now found in a wide range of industries, including agriculture, printing, packaging, and insulation materials. The demand for films in these industries has not only continued to rise in quantity, but also placed higher demands on quality and technical content. The market demand is particularly strong for high-quality, high-tech films with excellent performance. Against this backdrop, the film production industry has ushered in unprecedented development opportunities, achieving significant increases in both production scale and technical level. However, despite this considerable scale of film production capacity, the problem of online measurement of film thickness uniformity during production has remained elusive.

[0003] In the space environment, spacecraft face the rigors of extreme temperature fluctuations, high vacuum conditions, strong radiation, and other harsh conditions, making the reliability of their sealing components extremely important. As a key sealing material, the uniformity and accuracy of the thickness of fluororubber film is directly related to the quality of the sealing performance. If the film thickness becomes uneven or deviates from the design requirements, it is very likely to cause seal failure, leading to internal gas leakage or intrusion of materials from the external space environment, seriously threatening the normal operation of the spacecraft and even endangering the safety of the entire space mission. Therefore, accurately measuring the thickness of fluororubber film and promptly identifying and addressing potential thickness anomalies is crucial to ensuring the sealing and safety of spacecraft.

[0004] During the manufacturing process of spacecraft sealing components, measuring the thickness of fluororubber films is undoubtedly a core element of quality control. Real-time monitoring of film thickness can promptly identify process issues, such as uneven film coating and thickness variations during vulcanization, allowing targeted adjustments and optimization of the production process to ensure product quality and consistency. Furthermore, for mass-produced sealing components, the application of thickness inspection technology ensures that every component strictly meets design requirements, effectively reducing product scrap rates due to thickness deviations, thereby lowering production costs and improving production efficiency.

[0005] Film thickness uniformity is a key quality indicator. For single-layer films, uneven thickness directly impacts key properties such as tear resistance, impact resistance, and barrier properties. For composite films, thickness uniformity is even more critical, as uneven thickness in any single layer can lead to quality defects in the entire composite, significantly reducing the yield of high-quality film. Therefore, testing film thickness uniformity and compliance with standards has become a critical monitoring item on film production lines and a key technology essential for producing high-quality films.

[0006] In the existing film thickness detection technology, mechanical leveling technology uses mechanical structures such as guide rails, sliders, and servo motors to force the electrode plate to remain parallel to the measured surface. However, this method is prone to mechanical wear in a dynamic vibration environment, and the response speed is less than 10 milliseconds, making it difficult to adapt to the requirements of high-speed production lines. Static angle calibration is based on the pre-set angle coefficient of the standard plane, but this method assumes that the angle is fixed and cannot effectively compensate for real-time angle changes that may occur during the operation of the production line. Although multi-sensor fusion compensation technology improves measurement accuracy by combining equipment such as laser displacement sensors or inclinometers, it also increases the complexity and cost of the system. Fixed angle model compensation is corrected through theoretical formulas, but it requires a preset angle and cannot cope with unknown angle deviations.

[0007] Although existing thin film thickness detection technologies have improved detection accuracy to a certain extent through mechanical adjustment, temperature compensation, dielectric constant correction and dynamic filtering algorithms, these technologies still have many shortcomings, such as poor dynamic adaptability, reliance on external benchmarks and additional equipment, etc. For example, thin film defect detection technology faces problems such as slow detection speed, low accuracy, easy fatigue and high missed detection rate in application. In addition, thin film thermal property testing technology has obvious limitations in thermal property testing of nanoscale thin films. Traditional thermal property testing instruments based on heat detection are difficult to meet the requirements of high sensitivity and non-destructive testing. Although online film thickness measuring instruments provide real-time and high-precision solutions, they still need to be further optimized and improved in terms of application scope and efficiency improvement. Summary of the Invention

[0008] The purpose of this invention is to provide an adaptive angle zeroing compensation device and method for capacitive film thickness measurement. This device aims to effectively address measurement errors caused by wrinkles on the film surface or external interference, thereby significantly improving the accuracy of the detection process and the reliability of the results. By combining the Bernoulli effect, sensor technology, and an advanced closed-loop control system, the device ensures that the film maintains ideal flatness throughout the detection process and that the distance between the film and the sensor probe remains constant, thereby minimizing errors and ensuring the accuracy and reliability of the test data.

[0009] A first object of the present invention is to provide an angle zeroing adaptive compensation device for capacitive film thickness measurement, comprising:

[0010] A capacitive sensor for measuring film thickness, wherein an air blowing device is installed on the sensor probe of the capacitive sensor;

[0011] A position compensation mechanism that drives the capacitive sensor to move; the position compensation mechanism includes a compensation execution unit and a compensation system;

[0012] A deflection sensor for detecting displacement of a capacitive sensor; wherein:

[0013] The capacitive sensor is installed on the power output part of the compensation execution part; the compensation system receives the detection signal of the offset sensor and controls the action of the compensation execution part according to the detection signal and the compensation logic.

[0014] Preferably, the compensation execution part includes a fixed base plate, a swing arm mechanism and a linear motion mechanism, and a swing arm bracket is installed on the upper surface of the fixed base plate; the linear motion mechanism is installed on the swing arm bracket, and the swing arm mechanism includes two swing arms parallel to each other, the upper end of the swing arm is connected to the swing arm bracket through an upper bearing, and the lower end of the swing arm is connected to the swing block through a lower bearing, and the two upper bearings and the two lower bearings are located at the vertices of a parallelogram; the swing block is connected to the power output part of the linear motion mechanism.

[0015] Preferably, the linear motion mechanism includes an electric control slide mounted on a swing arm bracket and a slide connecting block for driving the sensor probe to move. The power output part of the electric control slide is connected to the capacitive sensor in sequence through a slide rail and a slide sensor connecting block.

[0016] Preferably, the offset sensor is an angle sensor, and the angle sensor is mounted on any one of the upper bearings.

[0017] Preferably, the swing block is located above the fixed base plate, with a gap between the two.

[0018] Preferably, the sensor probe of the capacitive sensor is connected to an air blowing device.

[0019] Preferably, the detection surface of the sensor probe is located on a vertical plane, and the movement direction of the power output part is perpendicular to the detection surface.

[0020] A second object of the present invention is to provide an angle zeroing adaptive compensation method for capacitive film thickness measurement, comprising:

[0021] S1. Hang the film flatly on the detection frame and move it to the sensor probe;

[0022] S2. Start the air blowing device and use the Bernoulli effect to make the film tightly adsorbed on the detection surface of the sensor probe;

[0023] S3, using the deflection sensor to detect the displacement of the capacitive sensor in real time;

[0024] S4. The compensation system receives the detection signal of the offset sensor in real time, and controls the action of the compensation execution unit according to the detection signal and the compensation logic.

[0025] Preferably, S3 specifically comprises: using the angle sensor to detect the displacement of the capacitive sensor in real time; in S4, the compensation system first determines whether the output value of the angle sensor is within a threshold range, and if not, the compensation logic is started, otherwise the compensation logic is not started.

[0026] Preferably, when the compensation logic is started, the following steps are performed:

[0027] S5. Calculate the deviation based on the output value of the angle sensor, and calculate the output value based on the deviation. The output is the full-speed running trend value of the electric control slide, and the range is [-10, 10].

[0028] S6, MCU divides the PID output value into three intervals to control the motor push rod movement: in the first interval [-10, -3], the motor drives the push rod forward; in the second interval (3, 10], the motor drives the push rod backward; in the third interval [-3, 3], the motor stops running and maintains the current position;

[0029] S7. Calculate the corresponding vertical displacement according to the angle change of the parallelogram;

[0030] S8, generating a compensation displacement instruction opposite to the displacement direction to eliminate the measurement error;

[0031] S9. The electric control slide drives the slide sensor connection block to perform a reset action according to the compensation displacement instruction and return to the standard detection position.

[0032] The advantages and positive effects of this application are:

[0033] The invention solves the measurement error problem caused by the angle deviation between the sensor and the film through the angle zero adaptive compensation method, and improves the measurement accuracy in complex situations. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0035] Figure 1 1 is a measurement principle diagram of a parallel plate capacitance sensor in a preferred embodiment of the present invention;

[0036] Figure 2 A structural diagram of a preferred embodiment of the present invention;

[0037] Figure 3 A flowchart of a preferred embodiment of the present invention;

[0038] Figure 4 This is a measurement result diagram when the technical solution of the present invention is not adopted;

[0039] Figure 5 This is a diagram of the measurement results after adopting the technical solution of the present invention;

[0040] Figure 6 This is an end view of the sensor probe in a preferred embodiment of the present invention.

[0041] 1. Film; 2. Sensor probe; 2-1. Sensor sensitive element; 2-2. Blowing hole; 3. Slide sensor connection block; 4. Swing arm bracket; 5. Swing arm; 6. Electric control slide; 7. Bearing; 8. Swing block; 9. Fixed base plate; 10. Angle sensor; 11. Blowing device; 12. Slide rail. DETAILED DESCRIPTION

[0042] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0043] The basic theory of the application of the present invention is explained as follows: In order to meet the specific requirements of dynamic measurement and effectively overcome the many shortcomings inherent in traditional parallel plate capacitance sensors, the present invention places the two plates of the capacitance sensor in the same plane. In this way, the area above the plane where the two plates are located naturally forms the working interval of the sensor, and this specific plane is defined as the measuring surface. In actual operation, the thin film material to be measured is placed directly above the two parallel plates. The result of this is that the presence of the film will directly change the dielectric constant of the working interval, which in turn leads to a corresponding change in capacitance. Based on this principle, a clear functional relationship is established between the capacitance value of the capacitance sensor and the thickness of the film. By accurately measuring the change in capacitance value, the actual thickness value of the film can be accurately detected. The specific measurement principle can be obtained by Figure 1 For intuitive display, Figure 1In the diagram, A and B represent the two measuring plates, the x-axis indicates the position of the measuring surface, and M indicates the location of the object to be measured. This design not only improves measurement accuracy and stability, but also greatly expands the application range of capacitive sensors.

[0044] Monolithic capacitive sensors utilize an innovative coplanar plate design, placing the two plates on the same plane—the measurement surface. This design allows the electric field between the plates to be distributed through edge effects, thus forming a working interval. When the film being measured approaches the sensor's surface, the film's dielectric properties affect the equivalent dielectric constant of the working interval, thereby changing key parameters such as the plate shape, spacing, and area. When the film is in close contact with the sensor surface, it changes the dielectric constant of the working interval, thereby changing the capacitance value. In this way, monolithic capacitive sensors can accurately detect the thickness of the film being measured. The unique design of this sensor provides high sensitivity and accuracy in measuring film thickness, leading to its widespread application in industrial production.

[0045] Air layer capacitance above the film for:

[0046]

[0047] film capacitors for:

[0048]

[0049] Assume that the total capacitance between the probe and the lower plate is , then:

[0050]

[0051] in is the dielectric constant of vacuum, is the dielectric constant of the film material, S is the coverage area of ​​the plate, d is the film thickness, and H is the distance from the sensor to the film. , H, S are all constants, if it is known , the film thickness d of the film being tested can be calculated. The thickness of a film capacitor directly affects its capacitance, with thinner films increasing the capacitance. Using a capacitive sensor measurement circuit, a voltage value related to the film thickness can be obtained. A microprocessor processes this data to accurately determine the current film thickness.

[0052] See also Figure 2 , an angle zeroing adaptive compensation device for capacitive film thickness measurement, comprising:

[0053] A capacitive sensor for measuring film thickness, wherein a blowing device 11 is installed on the sensor probe 2 of the capacitive sensor;

[0054] A position compensation mechanism that drives the capacitive sensor to move; the position compensation mechanism includes a compensation execution unit and a compensation system;

[0055] A deflection sensor for detecting displacement of a capacitive sensor; wherein:

[0056] The capacitive sensor is installed on the power output part of the compensation execution part; the compensation system receives the detection signal of the offset sensor and controls the action of the compensation execution part according to the detection signal and the compensation logic.

[0057] The operating principle of the present invention is as follows: a film to be tested is placed on a test stand and air is blown through it using an air blowing device. When air is blown through the film using a capacitive sensor, the airflow creates a gap between the film and the capacitive sensor. Due to the accelerated airflow, the static pressure in this area decreases significantly due to the Bernoulli effect. The air outside the film is at atmospheric pressure, resulting in a relatively high static pressure. On the inside of the film, near the sensor, the static pressure decreases significantly due to the high-speed airflow. This pressure difference causes the film to move toward the low-pressure area (the sensor surface) and ultimately adhere to the sensor probe 2 of the capacitive sensor. Once the film contacts the surface (detection surface) of the sensor probe 2, the airflow creates a stable low-pressure area between the film and the capacitive sensor, further enhancing the adhesion effect. At this point, the film is firmly adhered to the surface of the sensor probe 2. This design effectively reduces wrinkling of the film caused by its own characteristics or external factors, resulting in a smoother surface and avoiding measurement errors caused by wrinkles.

[0058] Once the film is adsorbed onto the surface of the sensor probe 2, the system gradually reaches a state of dynamic equilibrium. The adsorption force attempts to pull the film further toward the surface of the sensor probe 2, while the thrust resists the adsorption force, preventing the film from getting too close to the sensor probe 2.

[0059]

[0060] When these two forces are equal, the film will be stably attached to the surface of the sensor probe 2 and will not move or detach. Figure 2 shown.

[0061] Environmental changes (such as vibration, air pressure fluctuations, or temperature variations) can cause the sensor arm to move, affecting the gap between the membrane and sensor probe 2. As the arm moves forward, it exerts a forward thrust on the membrane. This thrust causes the membrane to vary in distance from the sensor probe 2. If the gap is too small, the membrane may come too close to the surface of the sensor probe 2, potentially causing damage. If the gap is too large, the detection signal will weaken, reducing measurement accuracy. To mitigate measurement errors caused by arm movement, a displacement compensation module is embedded in the device. This module applies a reverse pull to effectively offset the arm's forward thrust on the membrane.

[0062]

[0063] The displacement compensation module adjusts the tension to maintain a dynamic balance between the film and the sensor. This ensures that the film is neither pushed too close to the sensor due to thrust, nor out of the optimal detection range due to excessive gaps.

[0064] To monitor the distance between the film and the sensor in real time and dynamically adjust the tension, the displacement compensation module works in conjunction with a closed-loop control system. This system compares the system output with the desired output and adjusts the system input accordingly to minimize output errors. This system continuously monitors the gap between the film and the sensor and adjusts the tension based on the actual deviation to maintain a constant gap, effectively reducing measurement errors.

[0065] In order to solve the problem of distance change between the detection film and the sensor caused by external force, a dual-axis angle sensor is integrated at the sensor bracket shaft. The angle sensor is used to monitor the angle change of the sensor bracket in real time. When the sensor bracket tilts, the angle sensor outputs the corresponding angle value. Based on this angle value, PID control generates a reverse compensation displacement command, driving the sensor bracket to perform the corresponding reset action to offset the displacement deviation caused by external forces. This process is completed collaboratively by the displacement calculation module and the drive control module, forming a closed-loop control system through real-time interaction, ensuring that the gap between the capacitive sensor and the film to be detected remains constant.

[0066] The present invention constructs a complete set of adaptive compensation mechanisms by organically combining real-time angle monitoring, precise displacement calculation and dynamic compensation control. This mechanism can effectively eliminate the influence of external interference on the detection results, significantly improve the stability and accuracy of the detection system, and is particularly suitable for the field of high-precision detection. Specifically, the system continuously monitors the angle changes of the bracket with the help of an angle sensor, and uses trigonometric functions to quickly calculate the corresponding vertical displacement, ensuring that the compensation instructions can respond to external interference in real time, and effectively prevent detection errors caused by delays or errors. This technical solution adopts a closed-loop control system to convert angle changes into precise displacement compensation instructions, solving the error accumulation problem that may exist in traditional open-loop control. Regardless of how the direction or size of the external force interference fluctuates, the system can flexibly adjust the position of the capacitive sensor through a dynamic compensation mechanism to ensure that the detection distance always remains stable. This adaptive angle compensation technology not only realizes the dynamic adjustment of the detection distance, but also fundamentally solves the problem of detection errors caused by external force interference through the synergistic effect of real-time monitoring, precise calculation and closed-loop control.

[0067] In order to better understand the technical concept of the present invention, the following non-limiting description is given:

[0068] The compensation execution part includes a fixed base plate 9, a swing arm mechanism and a linear motion mechanism. A swing arm bracket 4 is installed on the upper surface of the fixed base plate 9; the linear motion mechanism is installed on the swing arm bracket 4, and the swing arm mechanism includes two mutually parallel swing arms 5. The upper end of the swing arm 5 is connected to the swing arm bracket 4 via an upper bearing, and the lower end of the swing arm 5 is connected to the swing block 8 via a lower bearing. Four bearings 7 (two upper bearings and two lower bearings) are located at the vertices of the parallelogram; the swing block 8 is connected to the power output part of the linear motion mechanism.

[0069] The linear motion mechanism includes an electric control slide 6 installed on the swing arm bracket 4 and a slide connecting block 3 that drives the sensor probe 2 to move. The power output part of the electric control slide 6 is connected to the capacitive sensor through the slide rail 12 and the slide sensor connecting block 3 in sequence.

[0070] The offset sensor is an angle sensor 10 , which is installed on any upper bearing.

[0071] The swing block 8 is located above the fixed base plate 9, with a gap between the two.

[0072] The sensor probe 2 of the capacitive sensor is connected to an air blowing device 11, which includes an air pump and an air pipe; Figure 6 The sensor sensitive element 2-1 is evenly provided with air holes 2-2 around it, and the gas blown out by the air pump passes through the air pipe and is blown out from the air holes 2-2.

[0073] The detection surface of the sensor probe 2 is located on a vertical plane, and the movement direction of the power output part is perpendicular to the detection surface.

[0074] See also Figure 3 A method for adaptively compensating for angle zeroing of capacitive film thickness measurement is provided, wherein the method utilizes the above-mentioned adaptively compensating device for angle zeroing of capacitive film thickness measurement and performs the following steps:

[0075] S1. Hang the film flatly on the detection frame and move it to the sensor probe 2;

[0076] S2. Start the air blowing device and use the Bernoulli effect to make the film tightly adsorbed on the detection surface of the sensor probe 2, thereby effectively reducing the generation of wrinkles;

[0077] S3, using the deflection sensor to detect the displacement of the capacitive sensor in real time;

[0078] S4. The compensation system receives the detection signal of the offset sensor in real time, and controls the action of the compensation execution unit according to the detection signal and the compensation logic.

[0079] S3 specifically includes: the angle sensor 10 can be used to detect the displacement of the capacitive sensor in real time; in S4, the compensation system first determines whether the output value of the angle sensor 10 is within the threshold range. If it is not within the threshold range, the compensation logic is started, otherwise the compensation logic is not started.

[0080] When the compensation logic is started, the following steps are performed:

[0081] S5. Calculate the deviation based on the output value of the angle sensor 10, and calculate the output value based on the deviation. The output is the full-speed running trend value of the electric control slide, and the range is [-10, 10].

[0082] S6, MCU divides the PID output value into three intervals to control the motor push rod movement: in the first interval [-10, -3], the motor drives the push rod forward; in the second interval (3, 10], the motor drives the push rod backward; in the third interval [-3, 3], the motor stops running and maintains the current position;

[0083] S7. Calculate the corresponding vertical displacement according to the angle change of the parallelogram;

[0084] S8, generating a compensation displacement instruction opposite to the displacement direction to eliminate the measurement error;

[0085] S9, the electric control slide drives the slide sensor connection block to perform a reset action according to the compensation displacement instruction and returns to the standard detection position;

[0086] S10: After the detection is completed, the detection result is output.

[0087] See also Figure 4 and Figure 5 ,from Figure 4 It can be seen that after the sensor probe is offset by 5°, the measurement value fluctuates by about 13 μm. Figure 5 It can be seen that after adding PID compensation (P takes 15, I takes 0.5, D takes 0.1), Figure 5 It can be seen that the fluctuation range of the measurement data has been significantly improved, and the fluctuation range is about 3um. Obviously, the present invention has made significant progress in film thickness detection, greatly improved the accuracy of detection, and fully demonstrated its excellent high-precision detection capabilities. Not only that, the present invention also has the functions of real-time monitoring and data feedback, which can instantly obtain data and provide feedback during the detection process to ensure the accuracy and timeliness of the test results. In addition, the non-contact measurement method it adopts effectively avoids the errors and damage that may be caused by traditional contact measurements, and further improves the reliability and stability of the detection. At the same time, the system also integrates automation technology, which can automatically complete the detection process and greatly improve the detection efficiency. In summary, this technical solution provides solid and important technical support for high-precision film thickness detection.

[0088] More importantly, this system not only excels technically but also possesses broad application value and market prospects. Whether in optical thin film production or other fields requiring high-precision film thickness measurement, it can leverage its unique advantages to meet the needs of a wide range of complex scenarios. Furthermore, its exceptional reliability and superiority have been repeatedly demonstrated in practical applications, further validating its market potential and application value.

[0089] In the above embodiments, all or part of the embodiments can be implemented by software, hardware, firmware, or any combination thereof. When implemented in whole or in part in the form of a computer program product, the computer program product includes one or more computer instructions. When the computer program instructions are loaded or executed on a computer, the process or function described in the embodiment of the present invention is generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via a wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL) or wireless (e.g., infrared, wireless, microwave, etc.)) method. The computer-readable storage medium can be any available medium that can be accessed by a computer or a data storage device such as a server or data center that includes one or more available media integrated. The available medium can be a magnetic medium (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid-state drive (SSD)).

[0090] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. An angle zeroing adaptive compensation device for capacitive film thickness measurement, characterized in that: include: A capacitive sensor for measuring film thickness, wherein a blowing device (11) is installed on a sensor probe (2) of the capacitive sensor; A position compensation mechanism that drives the capacitive sensor to move; the position compensation mechanism includes a compensation execution unit and a compensation system; An angle sensor (10) for detecting displacement of a capacitance sensor, wherein the angle sensor (10) is mounted on any upper bearing; wherein: The capacitive sensor is installed at the power output part of the compensation execution part; the compensation system receives the detection signal of the angle sensor (10) and controls the action of the compensation execution part according to the detection signal and the compensation logic; The compensation execution part includes a fixed base plate (9), a swing arm mechanism and a linear motion mechanism, wherein a swing arm bracket (4) is installed on the upper surface of the fixed base plate (9); the linear motion mechanism is installed on the swing arm bracket (4); the swing arm mechanism includes two swing arms (5) installed in parallel with each other, the upper end of the swing arm (5) is connected to the swing arm bracket (4) through an upper bearing, and the lower end of the swing arm (5) is connected to the swing block (8) through a lower bearing, and the two upper bearings and the two lower bearings are located at the vertices of a parallelogram; the swing block (8) is connected to the power output part of the linear motion mechanism.

2. The angle zeroing adaptive compensation device for capacitive film thickness measurement according to claim 1, characterized in that: The linear motion mechanism comprises an electric control slide (6) mounted on a swing arm bracket (4) and a slide connecting block (3) for driving the sensor probe (2) to move, wherein the power output portion of the electric control slide (6) is connected to the capacitive sensor via a slide rail (12) and the slide sensor connecting block (3) in sequence.

3. The angle zeroing adaptive compensation device for capacitive film thickness measurement according to claim 1, characterized in that: The swing block (8) is located above the fixed base plate (9), with a gap between the two.

4. The angle zeroing adaptive compensation device for capacitive film thickness measurement according to any one of claims 1 to 3, characterized in that: The detection surface of the sensor probe (2) is located on a vertical plane, and the movement direction of the power output part is perpendicular to the detection surface.

5. An angle zeroing adaptive compensation method for capacitive film thickness measurement, characterized in that: The method of using the angle zeroing adaptive compensation device for capacitive film thickness measurement according to any one of claims 1 to 4 is as follows: S1. Hang the film flatly on the detection frame and move it to the sensor probe (2); S2, starting the air blowing device, using the Bernoulli effect to make the film tightly adsorbed on the detection surface of the sensor probe (2); S3, using the angle sensor (10) to detect the displacement of the capacitive sensor in real time; S4, the compensation system receives the detection signal of the angle sensor (10) in real time, and controls the action of the compensation execution unit according to the detection signal and the compensation logic. The compensation system first determines whether the output value of the angle sensor (10) is within a threshold range. If it is not within the threshold range, the compensation logic is started. Otherwise, the compensation logic is not started.

6. The angle zeroing adaptive compensation method for capacitive film thickness measurement according to claim 5, characterized in that: When the compensation logic is started, the following steps are performed: S5, calculating the deviation according to the output value of the angle sensor (10), calculating the output value according to the deviation, and outputting the full speed running trend value of the electric control slide in the range of [-10, 10]; S6, MCU divides the PID output value into three intervals to control the motor push rod movement: in the first interval [-10, -3], the motor drives the push rod forward; in the second interval (3, 10], the motor drives the push rod backward; in the third interval [-3, 3], the motor stops running and maintains the current position; S7. Calculate the corresponding vertical displacement according to the angle change of the parallelogram; S8, generating a compensation displacement instruction opposite to the displacement direction to eliminate the measurement error; S9. The electric control slide drives the slide sensor connection block to perform a reset action according to the compensation displacement instruction and return to the standard detection position.

Images