Device and method for preparing phosphine and hydrogen mixed gas

Abstract

The invention relates to the technical field of gas configuration, in particular to a phosphorane and hydrogen mixed gas configuration device and method.The method comprises the steps that whether a configuration system is tightly connected or not is detected, and configuration preparation work is conducted; the method comprises the steps that phosphorane is introduced into a target tank, hydrogen is introduced into an intermediate tank, a controller monitors the reading change of an electronic balance module and the reading of a pressure gauge module in real time, and introduction is stopped after the phosphorane and the hydrogen are introduced into a preset component mass; according to the method, when phosphorane and hydrogen are introduced into the target tank, the display of the pressure gauge module is continuously concerned through the controller, the display of the pressure gauge module is continuously concerned through the controller, so that the leakage of the corresponding gas conveying pipeline is judged, an alarm is given, sudden stop operation is carried out, or hydrogen in the intermediate tank is introduced into the target tank to be mixed, and mixed gas is obtained. And when the reading of the pressure gauge module is abnormal, the gas conveying pipeline is closed, the gas introduction is stopped, and an alarm is given, so that workers can be informed of evacuating from a workshop at the first time when the gas leaks, and the safety of the workers is guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of gas configuration, and in particular to a device and method for configuring a phosphine-hydrogen mixed gas. Background Art

[0002] In advanced electronics industries like semiconductor manufacturing, there is a growing demand for high-precision, high-performance electronic gas mixtures. For example, in semiconductor manufacturing, a mixture of phosphine and hydrogen is often used as a doping source. To ensure doping stability and repeatability, the accuracy of the phosphine concentration is extremely high. With the continuous advancement and innovation of technologies in fields such as integrated circuits and high-performance liquid crystals, the quality requirements for high-purity electronic gas mixtures are also becoming increasingly stringent, requiring not only higher purity but also lower relative concentration deviation.

[0003] The main methods for preparing pure electronic gas mixtures include gravimetric, pressure, and mass flow ratio methods. The weighing method is currently recognized as the most accurate and widely used method for gas distribution, both domestically and internationally. The pressure method suffers from poor gas distribution accuracy and is typically used where weighing is not feasible and concentration deviation requirements are low. The mass flow ratio method is primarily used for continuous supply of electronic gas mixtures. For electronic gas mixtures such as phosphine and hydrogen, which require extremely high concentration accuracy, the weighing method can better meet these precision requirements.

[0004] Since phosphine is flammable, explosive, and highly toxic, the above-mentioned methods for preparing phosphine-hydrogen mixed gas do not effectively detect gas leakage during the preparation of the mixed gas, posing a safety hazard. Summary of the Invention

[0005] The present invention aims to provide a device and method for preparing a phosphine-hydrogen mixed gas, which aims to promptly notify workers when a gas leak occurs during the preparation of the phosphine-hydrogen mixed gas, thereby preventing the gas leak from causing harm to personnel.

[0006] To achieve the above objectives, in a first aspect, the present invention provides a method for preparing a phosphine-hydrogen mixed gas, comprising the following steps:

[0007] Check whether the configuration system is connected tightly and make configuration preparations;

[0008] Phosphine is introduced into the target tank and hydrogen into the intermediate tank respectively. The controller monitors the reading changes of the electronic balance module and the pressure gauge module in real time. When the mass of phosphine and hydrogen reaches the preset component mass, the introduction is stopped.

[0009] The controller analyzes and determines whether a leak occurs in the corresponding gas delivery pipeline based on the indication of the pressure gauge module, and executes an alarm and an emergency stop operation or passes the hydrogen in the intermediate tank into the target tank for mixing to obtain a mixed gas.

[0010] The specific method of detecting whether the configuration system is connected tightly and performing configuration preparation is as follows:

[0011] Check whether the configuration system valves are closed, whether the gas delivery pipelines are tightly connected, and whether the gas source is sufficient;

[0012] Evacuate the configuration system to remove air and other impurities in the gas delivery pipeline to complete the configuration preparation work.

[0013] The specific method of introducing phosphine into the target tank and hydrogen into the intermediate tank respectively, monitoring the reading change of the electronic balance module and the reading of the pressure gauge module in real time, and stopping the introduction of phosphine and hydrogen after the mass of the components reaches the preset mass is as follows:

[0014] Phosphine and hydrogen are introduced into the target tank and the intermediate tank respectively, and the reading changes of the electronic balance module and the reading of the pressure gauge module on the gas transmission pipeline are monitored in real time through the controller;

[0015] When the reading of the electronic balance module reaches the preset component mass, the gas delivery pipeline is closed and the introduction of phosphine and hydrogen is stopped.

[0016] The pressure gauge module indications include two situations: consistent indications and decreased indications.

[0017] The controller analyzes and determines whether a leak occurs in the corresponding gas delivery pipeline based on the reading of the pressure gauge module, and issues an alarm and performs an emergency stop operation or passes the hydrogen in the intermediate tank into the target tank for mixing to obtain a mixed gas in the following specific manner:

[0018] If the readings of the pressure gauge modules are consistent, the gas delivery pipeline is sealed and no leakage occurs, and the controller passes the hydrogen in the intermediate tank into the target tank for mixing to obtain a mixed gas;

[0019] If the reading of the pressure gauge module decreases, it means that the gas delivery pipeline is leaking, and the controller closes the gas delivery pipeline for emergency stop and sends an alarm to the workshop.

[0020] The mixed gas contains 0-15% phosphine and the rest is hydrogen.

[0021] In a second aspect, the present invention further provides a phosphine-hydrogen mixed gas configuration device, which is applied to the phosphine-hydrogen mixed gas configuration method as described in the first aspect above, and includes a gas delivery pipeline, a target tank, an intermediate tank, a hydrogen tank, a phosphine tank, a pressure gauge module, an electronic balance module and a controller, wherein the target tank, the intermediate tank, the hydrogen tank and the phosphine tank are connected via the gas delivery pipeline, the pressure gauge module is connected to the gas delivery pipeline, the electronic balance module is respectively connected to the target tank and the intermediate tank, and the controller is respectively connected to the pressure gauge module and the electronic balance module.

[0022] The present invention provides a phosphine-hydrogen mixed gas configuration method, which includes detecting whether a configuration system is tightly connected and performing configuration preparation work; respectively introducing phosphine into a target tank and introducing hydrogen into an intermediate tank; a controller monitoring the reading changes of an electronic balance module and the reading of a pressure gauge module in real time; and stopping the introduction of phosphine and hydrogen after the masses of the introduced phosphine and hydrogen reach a preset component mass; and analyzing and judging whether a corresponding gas transmission pipeline leaks based on the readings of the pressure gauge modules, and issuing an alarm and performing an emergency stop operation or introducing the hydrogen in the intermediate tank into the target tank for mixing to obtain a mixed gas. The method can accurately configure phosphine-hydrogen mixed gases with different concentration requirements through precise weighing and automated control, thereby meeting the strict requirements of industries such as semiconductor manufacturing on gas concentration accuracy. At the same time, the safety and reliability of the gas distribution process are ensured. Specifically, when phosphine and hydrogen are introduced, the quality of phosphine and hydrogen is monitored by the electronic balance module, and the pressure gauge module monitors the air pressure of the gas transmission pipeline. After the monitored phosphine and hydrogen quality reaches the preset component quality, the controller stops the introduction of phosphine and hydrogen based on the preset program. During this process, the controller also continuously monitors the reading of the pressure gauge module. When the pressure gauge module reading is abnormal, the controller closes the gas transmission pipeline, stops the gas introduction, and sounds an alarm, so that workers can be notified to evacuate the workshop as soon as a gas leak occurs, ensuring their safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 The present invention provides a flow chart of a method for configuring a phosphine-hydrogen mixed gas.

[0025] Figure 2 It is a flowchart of the specific method of detecting whether the configuration system connection is tight and performing configuration preparation work.

[0026] Figure 3 This is a flowchart of a specific method in which phosphine is introduced into a target tank and hydrogen is introduced into an intermediate tank respectively, a controller monitors the reading changes of an electronic balance module and a pressure gauge module in real time, and the introduction of phosphine and hydrogen is stopped when the mass of the introduced components reaches a preset mass.

[0027] Figure 4 It is a flowchart of the specific method in which the controller analyzes and determines whether a leak occurs in the corresponding gas transmission pipeline based on the indication of the pressure gauge module, executes an alarm and performs an emergency stop operation, or passes the hydrogen in the intermediate tank into the target tank for mixing to obtain a mixed gas.

[0028] Figure 5 This is a connection diagram of a phosphine-hydrogen mixed gas configuration device provided by the present invention.

[0029] In the figure: 101-gas delivery pipeline, 102-target tank, 103-intermediate tank, 104-hydrogen tank, 105-phosphine tank, 106-pressure gauge module, 107-electronic balance module, 108-controller. DETAILED DESCRIPTION

[0030] The following describes embodiments of the present invention in detail, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and are not to be construed as limiting the present invention.

[0031] See also Figures 1 to 4 In a first aspect, the present invention provides a method for preparing a phosphine-hydrogen mixed gas, comprising the following steps:

[0032] S1 checks whether the configuration system is connected tightly and performs configuration preparations;

[0033] Specific method:

[0034] S11 checks whether the configuration system valve is closed, whether the gas delivery pipeline 101 is tightly connected, and whether the gas source is sufficient;

[0035] In the embodiment of the present invention, the controller 108 controls the opening and closing of each control valve, whether the gas source is sufficient, whether the gas delivery pipeline 101 is tightly connected, and whether there is leakage under high pressure and negative pressure conditions.

[0036] S12 evacuates the configuration system to remove air and other impurities in the gas delivery pipeline 101, completing the configuration preparation work.

[0037] In the embodiment of the present invention, the other impurities are hydrogen and phosphine remaining from the uploaded preparation of the mixed gas.

[0038] S2: Phosphine is introduced into the target tank 102 and hydrogen is introduced into the intermediate tank 103 respectively. The controller 108 monitors the reading change of the electronic balance module 107 and the reading of the pressure gauge module 106 in real time. When the mass of phosphine and hydrogen reaches the preset component mass, the introduction is stopped;

[0039] Specific method:

[0040] S21 introduces phosphine and hydrogen into the target tank 102 and the intermediate tank 103 respectively, and monitors the reading changes of the electronic balance module 107 and the reading of the pressure gauge module 106 on the gas delivery pipeline 101 in real time through the controller 108;

[0041] In an embodiment of the present invention, the controller 108 opens the valve on the gas delivery pipeline 101 to pass phosphine and hydrogen into the target tank 102 and the intermediate tank 103, respectively. During this process, the controller 108 monitors the changes in the reading of the electronic balance module 107 and the reading of the pressure gauge module 106 on the gas delivery pipeline 101 in real time.

[0042] S22 After the reading of the electronic balance module 107 reaches the preset component mass, the gas delivery pipeline 101 is closed, and the introduction of phosphine and hydrogen is stopped.

[0043] In an embodiment of the present invention, when the reading change value of the electronic balance module 107 reaches a certain proportion of the preset component mass (e.g., 80%), the controller 108 first closes the coarse addition control valve on the gas delivery pipeline 101, and then opens the fine addition control valve to perform precise inflation until the mass of phosphine and hydrogen in the target tank 102 and the intermediate tank 103 reaches the set value, and then closes all control valves on the gas delivery pipeline 101.

[0044] In step S3, the controller 108 analyzes and determines whether a leak occurs in the corresponding gas delivery pipeline 101 based on the reading of the pressure gauge module 106, and performs an alarm and emergency stop operation or passes the hydrogen in the intermediate tank 103 into the target tank 102 for mixing to obtain a mixed gas.

[0045] In the embodiment of the present invention, the indication conditions of the pressure gauge module 106 include two conditions: the indication is consistent and the indication decreases.

[0046] Specific method:

[0047] If the readings of the pressure gauge module 106 are consistent, the gas delivery pipeline 101 is sealed and no leakage occurs. The controller 108 then passes the hydrogen in the intermediate tank 103 into the target tank 102 for mixing to obtain a mixed gas.

[0048] In an embodiment of the present invention, if the readings of the pressure gauge module 106 are consistent, the gas delivery pipeline 101 is sealed and no leakage occurs. The controller 108 then opens the gas delivery pipeline 101 and passes the hydrogen in the intermediate tank 103 into the target tank 102 for mixing to obtain a mixed gas. At this time, the total mass of the gas in the target tank 102 is weighed again by the electronic balance module 107 to see whether it is consistent with the set value. If there is a deviation, the amount of phosphine or hydrogen introduced is fine-tuned according to the deviation to ensure that the quality and concentration of the mixed gas meet the requirements.

[0049] S32 If the reading of the pressure gauge module 106 decreases, the gas delivery pipeline 101 leaks, and the controller 108 closes the gas delivery pipeline 101 for emergency stop and sends an alarm to the workshop.

[0050] In an embodiment of the present invention, if the reading of the pressure gauge module 106 decreases, the gas delivery pipeline 101 leaks, and the controller 108 immediately closes the gas delivery pipeline 101, performs an emergency stop on the system, and sends an alarm to the workshop to inform the workers to evacuate the workshop to ensure their safety.

[0051] See also Figure 5 In a second aspect, the present invention further provides a phosphine-hydrogen mixed gas configuration device, which is applied to the phosphine-hydrogen mixed gas configuration method as described in the first aspect above, and includes a gas delivery pipeline 101, a target tank 102, an intermediate tank 103, a hydrogen tank 104, a phosphine tank 105, a pressure gauge module 106, an electronic balance module 107 and a controller 108. The target tank 102, the intermediate tank 103, the hydrogen tank 104 and the phosphine tank 105 are connected via the gas delivery pipeline 101, the pressure gauge module 106 is connected to the gas delivery pipeline 101, the electronic balance module 107 is respectively connected to the target tank 102 and the intermediate tank 103, and the controller 108 is respectively connected to the pressure gauge module 106 and the electronic balance module 107.

[0052] In an embodiment of the present invention, the controller 108 opens the valves on the gas delivery pipeline 101, and respectively passes phosphine and hydrogen into the target tank 102 and the intermediate tank 103. During this process, the controller 108 monitors the change in the reading of the electronic balance module 107 and the reading of the pressure gauge module 106 on the gas delivery pipeline 101 in real time. When the value of the change in the reading of the electronic balance module 107 reaches a certain proportion of the preset component mass (such as 80%), the controller 108 first closes the rough control valve on the gas delivery pipeline 101, and then opens the fine control valve to perform precise inflation until the mass of phosphine and hydrogen in the target tank 102 and the intermediate tank 103 reaches the set value, and then closes all the control valves on the gas delivery pipeline 101. If If the readings of the pressure gauge module 106 are consistent, the gas delivery pipeline 101 is sealed and no leakage occurs. The controller 108 then opens the gas delivery pipeline 101 and passes the hydrogen in the intermediate tank 103 into the target tank 102 for mixing to obtain a mixed gas. At this time, the total mass of the gas in the target tank 102 is weighed again by the electronic balance module 107 to see if it is consistent with the set value. If there is a deviation, the amount of phosphine or hydrogen introduced is fine-tuned according to the deviation to ensure that the quality and concentration of the mixed gas meet the requirements. If the reading of the pressure gauge module 106 decreases, the gas delivery pipeline 101 leaks. The controller 108 immediately closes the gas delivery pipeline 101, performs an emergency stop on the system, and sends an alarm to the workshop to inform the workers to evacuate the workshop to ensure their safety.

[0053] The above disclosure is merely a preferred embodiment of a phosphine-hydrogen mixed gas preparation device and method of the present invention and is not intended to limit the scope of the present invention. Persons skilled in the art will appreciate that equivalent variations made by implementing all or part of the above-described process according to the claims of the present invention are still within the scope of the present invention.

Claims

1. A method for preparing a phosphine-hydrogen mixed gas, characterized in that: The following steps are involved: Check whether the configuration system is connected tightly and make configuration preparations; Phosphine is introduced into the target tank and hydrogen into the intermediate tank respectively. The controller monitors the reading changes of the electronic balance module and the pressure gauge module in real time. When the mass of phosphine and hydrogen reaches the preset component mass, the introduction is stopped. The controller analyzes and determines whether a leak occurs in the corresponding gas delivery pipeline based on the indication of the pressure gauge module, and executes an alarm and an emergency stop operation or passes the hydrogen in the intermediate tank into the target tank for mixing to obtain a mixed gas.

2. The method for preparing a phosphine-hydrogen mixed gas according to claim 1, wherein: The specific method of checking whether the configuration system is connected tightly and performing configuration preparation is as follows: Check whether the configuration system valves are closed, whether the gas delivery pipelines are tightly connected, and whether the gas source is sufficient; Evacuate the configuration system to remove air and other impurities in the gas delivery pipeline to complete the configuration preparation work.

3. The method for preparing a phosphine-hydrogen mixed gas according to claim 1, It is characterized by: The specific method of introducing phosphine into the target tank and hydrogen into the intermediate tank respectively, monitoring the reading change of the electronic balance module and the reading of the pressure gauge module in real time by the controller, and stopping the introduction of phosphine and hydrogen after the mass of the preset components is reached: Phosphine and hydrogen are introduced into the target tank and the intermediate tank respectively, and the reading changes of the electronic balance module and the reading of the pressure gauge module on the gas transmission pipeline are monitored in real time through the controller; When the reading of the electronic balance module reaches the preset component mass, the gas delivery pipeline is closed and the introduction of phosphine and hydrogen is stopped.

4. The method for preparing a phosphine-hydrogen mixed gas according to claim 1, wherein ； The pressure gauge module indication conditions include two conditions: the indication is consistent and the indication is reduced.

5. The method for preparing a phosphine-hydrogen mixed gas according to claim 4, wherein ； The controller analyzes and determines whether a leak occurs in the corresponding gas delivery pipeline based on the reading of the pressure gauge module, and issues an alarm and performs an emergency stop operation or passes the hydrogen in the intermediate tank into the target tank for mixing to obtain a mixed gas in the following specific manner: If the readings of the pressure gauge modules are consistent, the gas delivery pipeline is sealed and no leakage occurs, and the controller passes the hydrogen in the intermediate tank into the target tank for mixing to obtain a mixed gas; If the reading of the pressure gauge module decreases, it means that the gas delivery pipeline is leaking, and the controller closes the gas delivery pipeline for emergency stop and sends an alarm to the workshop.

6. The method for preparing a phosphine-hydrogen mixed gas according to claim 1, wherein ； The mixed gas contains 0-15% phosphine and the rest is hydrogen.

7. A phosphine-hydrogen mixed gas preparation device, used in the phosphine-hydrogen mixed gas preparation method according to any one of claims 1 to 6, characterized in that ； The device comprises a gas delivery pipeline, a target tank, an intermediate tank, a hydrogen tank, a phosphine tank, a pressure gauge module, an electronic balance module and a controller. The target tank, the intermediate tank, the hydrogen tank and the phosphine tank are connected via the gas delivery pipeline. The pressure gauge module is connected to the gas delivery pipeline. The electronic balance module is respectively connected to the target tank and the intermediate tank. The controller is respectively connected to the pressure gauge module and the electronic balance module.

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