Safe transportation device and method for high-purity phosphine storage tank

Abstract

The invention discloses a safe transportation device and method for a high-purity phosphine storage tank, and belongs to the field of gas transportation. A safe transportation device of a high-purity phosphine storage tank comprises a transportation bottom plate, a tank body is arranged at the top end of the transportation bottom plate, a valve rod is rotationally connected to the top of the tank body, a limiting frame is fixedly installed at the top end of the transportation bottom plate, a bearing plate is arranged at the top of the valve rod, and the bearing plate and the valve rod are coaxially arranged; a hollow cylinder is fixedly mounted at the bottom end of the bearing plate; the bearing plate is pushed to move downwards through the adjusting screw rod, and continuous axial pressure is applied to the top of the valve rod through the disc spring and the buffer block which are arranged inside, so that the axial assembly clearance of the valve rod is eliminated, constant pre-tightening force is provided, vertical vibration energy generated in the transportation process can be effectively absorbed through the damping characteristic of the buffer block, and the service life of the valve rod is prolonged. Therefore, resonance of the valve rod caused by bumping of the road surface is avoided, and the problem of thread loosening or leakage is avoided.

Description

Technical Field

[0001] This invention relates to the field of gas transportation technology, and in particular to a safe transportation device and method for a high-purity phosphine storage tank. Background Technology

[0002] High-purity phosphine, as a key electronic specialty gas indispensable in the semiconductor integrated circuit manufacturing process, has the dangerous characteristics of being highly toxic, flammable, and spontaneously combustible in air. Its storage and transportation safety requirements are extremely high. At present, the industrial transportation of high-purity phosphine storage tanks mainly relies on dedicated grid-type transport cages or containers. Existing transport devices usually adopt a structure of metal frame and arc-shaped clamps, that is, the storage tank is placed upright on the base, and the tank body is circumferentially locked by metal clamps or nylon straps set in the lower part of the tank body to prevent the storage tank from tipping over, colliding, or shifting during the transportation vehicle.

[0003] However, existing transportation devices pose significant safety hazards in practical applications. Because the valve assembly of the storage tank is located at the very top of the tank, and the fixing points of existing devices are mostly concentrated on the tank body, the continuous low-frequency vibrations generated by vehicle movement and the instantaneous impacts caused by road bumps during long-distance transportation are transmitted to the valve at the top, subjecting the valve assembly to severe alternating loads. This continuous shaking easily disrupts the thread preload between the valve stem and the bottle neck, leading to fretting wear or stress relaxation of the threaded pair, resulting in valve stem loosening, seal failure, or even minor leaks. For high-purity phosphine, even a small gas leak can cause serious safety accidents, and the infiltration of external air can also render the high-purity gas inside the tank unusable. Therefore, developing a safe transportation device that can limit valve movement and effectively prevent valve stem loosening caused by transportation vibrations is a pressing technical problem that needs to be solved in this field. Summary of the Invention

[0004] The purpose of this invention is to solve the problems in the prior art mentioned above, and to provide a safe transportation device and method for high-purity phosphine storage tanks.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A safe transport device for a high-purity phosphine storage tank includes a transport base plate, a tank body at the top of the transport base plate, a valve stem rotatably connected to the top of the tank body, a limit frame fixedly installed at the top of the transport base plate, a support plate at the top of the valve stem, the support plate and the valve stem being coaxially arranged, a hollow cylinder fixedly installed at the bottom of the support plate, a disc spring fixedly installed inside the hollow cylinder, a buffer block fixedly installed at the bottom of the disc spring, the bottom of the buffer block being adapted to contact the top of the valve stem, and a second limit plate for limiting the valve stem at the bottom of the support plate.

[0006] Preferably, a limiting plate is fixedly installed inside the limiting frame. The limiting plate consists of two interconnected upper and lower rings that are sleeved on the surface of the tank.

[0007] Preferably, the top of the limiting frame is rotatably connected to the two opposite sides of the fixed sleeve, the surface of the fixed sleeve is fixedly connected to the connecting plate, the other end of the connecting plate is fixedly connected to the fixed cylinder, the two sides inside the fixed cylinder are slidably connected to the sliding rods, the two sliding rods are fixedly connected to the connecting spring, the top of the tank is provided with a support plate, and the two sides of the support plate are provided with insertion holes.

[0008] Preferably, the support plate has grooves on both sides that are adapted to the size of the fixed cylinder, the insertion holes are opened on the inner walls of the opposite sides of the grooves, and the two sliding rods are adapted to be inserted into the inside of the insertion holes.

[0009] Preferably, telescopic rods are fixedly connected to both sides of the bottom end of the support plate, and an adjusting screw is rotatably connected to the inside of the support plate. A push plate is rotatably connected to the bottom end of the adjusting screw, and push rods are fixedly connected to both sides of the bottom end of the push plate. The bottom end of the telescopic rod is fixedly connected to the top end of the bearing plate, and the bottom end of the push rod is adapted to contact the top end of the bearing plate.

[0010] Preferably, an adjusting block is rotatably connected inside the support plate. The top of the adjusting block has a hexagonal groove. A hemisphere is fixedly installed on the top of the support plate. An annular groove that is adapted to and slidably connected to the hemisphere is opened at the bottom of the adjusting block. The bottom of the adjusting block is rotatably connected to the surface of the support plate. A fixing plate is fixedly connected to the bottom surface of the adjusting block. A spiral groove is opened at the bottom of the fixing plate.

[0011] Preferably, the bottom end of the support plate is provided with a cross groove, the cross grooves are evenly distributed around the circumference, a cross slider is slidably connected inside the cross groove, a connecting rod is fixedly connected to one end of the cross slider near the circumference of the support plate, a guide sleeve adapted to the connecting rod is fixedly installed inside the cross groove, a connecting rod is fixedly connected to one end of the connecting rod away from the cross slider, a protrusion is fixedly connected to the top of the other side of the connecting rod, and the top of the protrusion is slidably connected inside the spiral groove.

[0012] Preferably, the bottom end of the cross slider is rotatably connected to a second limiting plate, the second limiting plate and the valve stem are adapted to each other and in contact. An L-shaped plate is fixedly connected to one end of the cross slider near the edge of the support plate. A pressure spring is fixedly connected to one end of the bottom of the L-shaped plate near the second limiting plate. A push rod is fixedly connected to the other end of the pressure spring. An inner groove is formed inside the edge of the support plate. A sliding plate is slidably connected inside the inner groove. A spring is fixedly connected between the sliding plate and the inner wall of the groove. The push rod is slidably connected inside the L-shaped plate. One end of the push rod contacts the second limiting plate, and the other end of the push rod passes through the L-shaped plate and contacts the sliding plate.

[0013] Preferably, a turntable is rotatably connected to the top of the support plate, and a circular groove is formed at the eccentric part of the top of the turntable. A pull rope is fixedly connected to the top of the sliding plate, and the pull rope is fixedly installed at the edge of the bottom of the turntable away from the sliding plate. A guide block is fixedly installed to the top of the support plate, and a slide rod is slidably connected inside the guide block. A cylindrical block is fixedly connected to one end of the slide rod, and the bottom end of the cylindrical block is slidably connected inside the circular groove. An abutment block is fixedly connected to the other end of the slide rod, and teeth are provided at the end of the abutment block away from the slide rod. A buffer spring is fixedly connected between the abutment block and the guide block. A damping plate is fixedly connected to the top of the support plate, and a bottom groove adapted to slide and connect with the damping plate is formed at the bottom end of the abutment block. The surface of the adjusting block is provided with slots at equal intervals that are adapted to engage with the teeth of the abutment block.

[0014] This invention also provides a method for using a safe transport device for high-purity phosphine storage tanks, comprising the following steps: Step 1: Place the tank on top of the transport base plate, and use the limiting plate inside the limiting frame to connect to the surface of the tank to complete the initial positioning and anti-tipping fixation of the tank.

[0015] Step 2: Adjust the position of the support plate by sliding the lever, rotate the adjusting screw to push the bearing plate down, and use the disc spring and buffer block at the bottom of the bearing plate to axially and elastically press the top of the valve stem to eliminate axial clearance.

[0016] Step 3: Rotate the adjusting block to drive the cross slider towards the center using the bottom spiral groove, which in turn drives the limiting plate to radially clamp the valve stem, thus further restricting the tank.

[0017] Step 4: After reaching the destination, push the abutment block outward to release the lock on the adjusting block, rotate the adjusting block in the opposite direction to release the limit plate 2, rotate the adjusting screw in the opposite direction to release the axial pressure, and remove the tank.

[0018] Compared with the prior art, the present invention provides a safe transportation device and method for high-purity phosphine storage tanks, which has the following beneficial effects: 1. The safety transport device for this high-purity phosphine storage tank uses an adjusting screw to push the support plate downwards. The internal disc spring and buffer block apply continuous axial pressure to the top of the valve stem. This not only eliminates the axial assembly gap of the valve stem and provides a constant preload, but also effectively absorbs the vertical vibration energy generated during transportation by utilizing the damping characteristics of the buffer block. This prevents the valve stem from resonating due to road bumps, thus avoiding problems such as loose threads or leakage.

[0019] 2. The safety transport device for this high-purity phosphine storage tank uses a spiral groove to drive two limit plates to radially clamp the valve stem, and is designed with an overload self-locking mechanism; this not only ensures effective fixation of the valve stem, but also avoids damage to the precision valve stem and its sealing structure due to excessive clamping force caused by human error, significantly improving transport safety and equipment durability. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of a safe transportation device for a high-purity phosphine storage tank proposed in this invention; Figure 2 This is a schematic diagram of the top structure of the limiting frame of a safety transport device for a high-purity phosphine storage tank proposed in this invention; Figure 3 This is a partial disassembled structural diagram of the connection between the fixed cylinder and the support plate of the safety transportation device for a high-purity phosphine storage tank proposed in this invention. Figure 4 This invention provides a schematic cross-sectional view of the support plate and bearing plate of a safe transport device for a high-purity phosphine storage tank. Figure 1 ; Figure 5 This is a schematic cross-sectional view of the support plate structure of a safe transportation device for a high-purity phosphine storage tank proposed in this invention. Figure 6 This invention provides a schematic cross-sectional view of the support plate and bearing plate of a safe transport device for a high-purity phosphine storage tank. Figure 2 ; Figure 7 This is a schematic diagram of the surface structure of the adjusting block of a safety transport device for a high-purity phosphine storage tank proposed in this invention; Figure 8 This invention proposes a safe transportation device for a high-purity phosphine storage tank. Figure 4 Enlarged structural diagram at point A in the middle; Figure 9 This invention proposes a safe transportation device for a high-purity phosphine storage tank. Figure 6 Enlarged structural diagram at point B; Figure 10 This invention proposes a safe transportation device for a high-purity phosphine storage tank. Figure 6Enlarged structural diagram at point C.

[0021] In the diagram: 1. Transport base plate; 21. Tank body; 22. Valve stem; 31. Limiting frame; 32. Limiting plate one; 41. Fixing sleeve; 42. Connecting plate; 43. Fixing cylinder; 44. Sliding rod; 45. Connecting spring; 46. Support plate; 47. Insertion hole; 51. Telescopic rod; 52. Adjusting screw; 53. Push plate; 54. Push rod one; 61. Bearing plate; 62. Hollow cylinder; 63. Disc spring; 64. Buffer block; 71. Adjusting block; 72. Hemisphere; 73. Fixing plate 74. Spiral groove; 75. Cross groove; 76. Cross slider; 77. Link 1; 78. Link 2; 79. Protrusion; 801. Limiting plate 2; 802. L-shaped plate; 803. Pressure spring; 804. Push rod 2; 805. Sliding plate; 806. Turntable; 807. Circular groove; 808. Pull rope; 809. Guide block; 810. Sliding rod; 811. Cylindrical block; 812. Abutment block; 813. Buffer spring; 814. Damping plate; 815. Slot. Detailed Implementation

[0022] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0023] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0024] Reference Figures 1-10A safe transport device for a high-purity phosphine storage tank includes a transport base plate 1, which is cast from high-strength alloy steel and has a forklift slot at the bottom for easy movement. A tank body 21 is mounted on the top of the transport base plate 1, and a valve stem 22 is rotatably connected to the top of the tank body 21. A limit frame 31 is fixedly installed on the top of the transport base plate 1, and the limit frame 31 adopts a frame-type welded structure to provide rigid support. A bearing plate 61 is mounted on the top of the valve stem 22, and the bearing plate 61 and the valve stem 22 are coaxially arranged to ensure that the applied pressure is transmitted along the axis of the valve stem 22. A hollow cylinder 62 is fixedly installed at the bottom of the bearing plate 61. A disc spring 63 is fixedly installed inside the hollow cylinder 62. The disc spring 63 is in the form of multiple stacked pieces. A buffer block 64 is fixedly installed at the bottom of the disc spring 63. The bottom surface of the buffer block 64 has a groove that matches the shape of the handwheel at the top of the valve stem 22. The buffer block 64 is made of hard rubber material to avoid hard metal contact and absorb high-frequency vibration. The bottom of the buffer block 64 and the top of the valve stem 22 are adapted to contact each other. A limiting plate 801 for limiting the valve stem 22 is provided at the bottom of the bearing plate 61.

[0025] Reference Figure 1 The limiting frame 31 has a limiting plate 32 fixedly installed inside. The limiting plate 32 consists of two interconnected rings that fit onto the surface of the tank 21. The inner side wall of the limiting plate 32 is covered with an anti-slip rubber pad, which increases the friction with the surface of the tank 21 while preventing scratches on the paint surface of the tank.

[0026] Reference Figures 1-3 The top of the limiting frame 31 is rotatably connected to the two opposite sides of the fixed sleeve 41. The surface of the fixed sleeve 41 is fixedly connected to the connecting plate 42. The other end of the connecting plate 42 is fixedly connected to the fixed cylinder 43. The two sides inside the fixed cylinder 43 are slidably connected to the sliding rod 44. The end of the sliding rod 44 away from the connecting spring 45 extends out of the fixed cylinder 43. The top of the sliding rod 44 is fixedly installed with a push rod that is easy for the operator to push. The two sliding rods 44 are fixedly connected to the connecting spring 45. The connecting spring 45 is always in a compressed state, so that the two sliding rods 44 have a tendency to pop out. The tank body 21 is provided with a support plate 46. The support plate 46 serves as the mounting base for the top pressure mechanism. The two sides of the support plate 46 are provided with insertion holes 47. The two sides of the support plate 46 are provided with grooves that are adapted to the size of the fixed cylinder 43. The insertion holes 47 are opened on the inner walls of the opposite sides of the grooves. The two sliding rods 44 are fitted into the insertion holes 47 to form a snap-fit ​​connection structure that can be quickly disassembled.

[0027] Reference Figures 4-5Telescopic rods 51 are fixedly connected to both sides of the bottom end of the support plate 46. The telescopic rods 51 include an outer rod and an inner rod, which serve to guide and restrict the relative rotation of the bearing plate 61. An adjusting screw 52 is coaxially rotatably connected inside the support plate 46. The adjusting screw 52 passes through the support plate 46. A push plate 53 is rotatably connected to the bottom end of the adjusting screw 52. Push rods 54 are fixedly connected to both sides of the bottom end of the push plate 53. The bottom end of the telescopic rod 51 is fixedly connected to the top end of the bearing plate 61. The bottom end of the push rod 54 and the top end of the bearing plate 61 are matched and contacted, thereby uniformly transmitting the downward pressure to the bearing plate 61.

[0028] Reference Figure 4 , Figure 6 , Figure 7 and Figure 9 An adjusting block 71 is rotatably connected inside the bearing plate 61. The top of the adjusting block 71 has a hexagonal groove for use with an external hexagonal wrench for adjustment. A hemisphere 72 is fixedly mounted on the top of the bearing plate 61. The bottom of the adjusting block 71 has an annular groove that slides and adapts to the hemisphere 72. The cooperation between the hemisphere 72 and the annular groove restricts the horizontal displacement of the adjusting block 71, ensuring the stability of its rotation center. The bottom of the adjusting block 71 is rotatably connected to the surface of the bearing plate 61. A fixing disk 73 is fixedly connected to the bottom surface of the adjusting block 71. The bottom of the fixing disk 73 has a spiral groove 74, which is distributed along an Archimedean spiral trajectory. A cross groove 75 is provided at the bottom end, and the cross grooves 75 are evenly distributed around the circumference. A cross slider 76 is slidably connected inside the cross groove 75. A connecting rod 77 is fixedly connected to one end of the cross slider 76 near the circumference of the bearing plate 61. A guide sleeve adapted to the connecting rod 77 is fixedly installed inside the cross groove 75. A connecting rod 78 is fixedly connected to one end of the connecting rod 77 away from the cross slider 76. A protrusion 79 is fixedly connected to the top of the other side of the connecting rod 78. The top of the protrusion 79 has a rounded corner. The top of the protrusion 79 is slidably connected inside the spiral groove 74. When the fixed plate 73 rotates, the inner wall of the spiral groove 74 squeezes the protrusion 79, driving the connecting rod 78 to perform radial reciprocating motion.

[0029] Reference Figures 6-10The bottom end of the cross slider 76 is rotatably connected to a limiting plate 801. The limiting plate 801 is arc-shaped, and its inner surface is provided with anti-slip texture to increase the clamping friction of the valve stem 22. The limiting plate 801 and the valve stem 22 are in compatible contact. An L-shaped plate 802 is fixedly connected to one end of the cross slider 76 near the edge of the bearing plate 61. A pressure spring 803 is fixedly connected to the bottom end of the L-shaped plate 802 near the limiting plate 801. The other end of the pressure spring 803 is fixedly connected to a push rod 804. An inner groove is opened inside the edge of the bearing plate 61, and the inner groove slides inside. A sliding plate 805 is connected, and a spring is fixedly connected between the sliding plate 805 and the inner wall of the groove. The spring is used to provide a reset force to the sliding plate 805. A push rod 804 is slidably connected inside the L-shaped plate 802. One end of the push rod 804 contacts the limiting plate 801, and the other end of the push rod 804 passes through the L-shaped plate 802 and contacts the sliding plate 805. A turntable 806 is rotatably connected to the top of the bearing plate 61. A circular groove 807 is opened at the eccentric part of the top of the turntable 806. A pull rope 808, which is a high-strength steel wire rope, is fixedly connected to the top of the sliding plate 805. A pull rope 808 is fixedly installed on the edge of the bottom of the turntable 806, away from the sliding plate 805. A guide block 809 is fixedly installed on the top of the bearing plate 61. A slide rod 810 is slidably connected inside the guide block 809. A cylindrical block 811 is fixedly connected to one end of the slide rod 810. The bottom end of the cylindrical block 811 is slidably connected inside the circular groove 807. The extension and retraction of the cylindrical block 811 is controlled by the eccentric trajectory of the circular groove 807. An abutment block 812 is fixedly connected to the other end of the slide rod 810. The abutment block 812 has teeth on the end away from the slide rod 810. A buffer spring 813 is fixedly connected between the abutment block 812 and the guide block 809 to provide power for the ejection of the abutment block 812. A damping plate 814 is fixedly connected to the top of the bearing plate 61. The bottom end of the abutment block 812 is provided with a bottom groove that is adapted to and slidably connected to the damping plate 814. The damping increases the resistance to movement and prevents the abutment block 812 from ejecting too quickly. The surface of the adjusting block 71 is provided with slots 815 that are adapted to and engage with the teeth of the abutment block 812 at equal intervals. When the abutment block 812 is inserted into the slot 815, the adjusting block 71 is mechanically locked to realize the overload protection function.

[0030] In this invention, the tank 21 containing high-purity phosphine is first placed on the top of the transport base plate 1. At this time, the limiting plate 32 inside the limiting frame 31 is fitted onto the surface of the tank 21 to achieve initial positioning. Then, the two sliding rods 44 are pressed into the fixed cylinder 43 to compress the connecting spring 45. The fixed cylinder 43 on one side is placed into the groove of the support plate 46. The two sliding rods 44 are released, so that the two sliding rods 44 are inserted into the insertion hole 47 under the action of the rebound force of the connecting spring 45, thereby completing the limitation of one side of the support plate 46. This method is repeated to limit the other side of the support plate 46.

[0031] The operator rotates the adjusting screw 52, ​​which pushes the push plate 53 and push rod 54 downward. The push rod 54 then pushes the entire bearing plate 61 to slide downward along the telescopic rod 51 until the buffer block 64 at the bottom of the bearing plate 61 is in close contact with the top of the valve stem 22. During this process, the disc spring 63 inside the hollow cylinder 62 is compressed. The high stiffness and elasticity of the disc spring 63 apply a continuous axial preload to the valve stem 22, which not only eliminates the axial assembly gap of the valve stem 22, but also absorbs the vibration energy from the vertical direction when the transport vehicle is bumpy, preventing the valve stem 22 from loosening due to resonance.

[0032] Simultaneously, the operator inserts a hexagonal wrench into the hexagonal groove at the top of the adjusting block 71 and manually rotates the adjusting block 71. The adjusting block 71 drives the bottom fixed plate 73 to rotate synchronously. The spiral groove 74 at the bottom of the fixed plate 73 rotates accordingly and pushes the protrusion 79 placed inside it to move radially. The protrusion 79 drives the cross slider 76 to slide towards the center in the cross groove 75 through the connecting rod 78 and the connecting rod 77, thereby driving the limiting plate 801 to move inward to radially clamp the valve stem 22. As the clamping force increases, when the limiting plate 801 contacts the valve stem 22 and reaches a certain pressure, the generated reaction force pushes the push rod 804 to compress the pressure spring 803 and move backward. The push rod 804 then pushes the sliding plate 805 to slide in the inner groove. The sliding plate 805 pulls the turntable 806 through the pull rope 808. Since the connection between the pull rope 808 and the turntable 806 is located at the bottom of the turntable 806 and away from the sliding plate 806, On one side of 05, the turntable 806 will rotate when it is pulled. Since the bottom of the cylindrical block 811 is initially attached to the inner wall of the circular groove 807, and since the circular groove 807 on the turntable 806 is eccentrically set, when the turntable 806 rotates to a specific angle, the cylindrical block 811, which was originally limited by the side wall of the circular groove 807, is released, so that the abutment block 812 pops out under the action of the rebound force of the buffer spring 813. Due to the friction effect between the abutment block 812 and the damping plate 814, the abutment block 812 moves slowly and smoothly. When the abutment block 812 is inserted into the slot 815 on the surface of the adjusting block 71, the adjusting block 71 is locked instantly by the cooperation of the abutment block 812 and the damping plate 814, so that it cannot continue to rotate. This avoids damage to the precision valve caused by excessive clamping force of the limit plate 201 on the valve stem 22 due to human error, and thus realizes automatic control of clamping force and overload protection.

[0033] A method for using a safe transport device for a high-purity phosphine storage tank comprises the following steps: Step 1: Place the tank 21 on top of the transport base plate 1, and use the limiting plate 32 inside the limiting frame 31 to fit onto the surface of the tank 21 to complete the initial positioning and anti-tipping fixation of the tank 21.

[0034] Step 2: Adjust the position of the support plate 46 by sliding rod 44, rotate the adjusting screw 52 to push the bearing plate 61 down, and use the disc spring 63 and buffer block 64 at the bottom of the bearing plate 61 to axially and elastically press the top of the valve stem 22 to eliminate axial clearance.

[0035] Step 3: Rotate the adjusting block 71, and use the bottom spiral groove 74 to drive the cross slider 76 to converge towards the center, thereby driving the limiting plate 801 to radially clamp the valve stem 22, thus completing the further restriction of the tank 21.

[0036] Step 4: After reaching the destination, push the abutment block 812 outward to release the lock on the adjusting block 71, rotate the adjusting block 71 in the opposite direction to release the limit plate 801, rotate the adjusting screw 52 in the opposite direction to release the axial pressure, and move out of the tank 21.

[0037] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A safe transport device for a high-purity phosphine storage tank, comprising a transport base plate (1), a tank body (21) being disposed at the top of the transport base plate (1), and a valve stem (22) being rotatably connected to the top of the tank body (21), characterized in that, A limiting frame (31) is fixedly installed at the top of the transport base plate (1). A bearing plate (61) is provided at the top of the valve stem (22). The bearing plate (61) and the valve stem (22) are coaxially arranged. A hollow cylinder (62) is fixedly installed at the bottom of the bearing plate (61). A disc spring (63) is fixedly installed inside the hollow cylinder (62). A buffer block (64) is fixedly installed at the bottom of the disc spring (63). The bottom of the buffer block (64) and the top of the valve stem (22) are adapted to contact each other. A limiting plate (801) for limiting the valve stem (22) is provided at the bottom of the bearing plate (61).

2. The safe transport device for a high-purity phosphine storage tank according to claim 1, characterized in that, The limiting frame (31) is internally fixedly installed with a limiting plate (32), which consists of two interconnected upper and lower rings and is fitted onto the surface of the tank (21).

3. The safe transport device for a high-purity phosphine storage tank according to claim 1, characterized in that, The top of the limiting frame (31) is rotatably connected to the two opposite sides of the top of the fixed sleeve (41). The surface of the fixed sleeve (41) is fixedly connected to the connecting plate (42). The other end of the connecting plate (42) is fixedly connected to the fixed cylinder (43). The two sides inside the fixed cylinder (43) are slidably connected to the sliding rods (44). The two sliding rods (44) are fixedly connected to the connecting spring (45). The tank body (21) is provided with a support plate (46). The two sides of the support plate (46) are provided with insertion holes (47).

4. The safe transport device for a high-purity phosphine storage tank according to claim 3, characterized in that, The support plate (46) has grooves on both sides that are adapted to the size of the fixed cylinder (43). The insertion hole (47) is opened on the inner wall of the opposite sides of the groove. The two sliding rods (44) are adapted to be inserted into the inside of the insertion hole (47).

5. A safe transport device for a high-purity phosphine storage tank according to claim 3, characterized in that, Telescopic rods (51) are fixedly connected to both sides of the bottom end of the support plate (46). An adjusting screw (52) is rotatably connected to the inside of the support plate (46). A push plate (53) is rotatably connected to the bottom end of the adjusting screw (52). A push rod (54) is fixedly connected to both sides of the bottom end of the push plate (53). The bottom end of the telescopic rod (51) is fixedly connected to the top end of the bearing plate (61). The bottom end of the push rod (54) and the top end of the bearing plate (61) are adapted to contact each other.

6. The safe transport device for a high-purity phosphine storage tank according to claim 1, characterized in that, An adjusting block (71) is rotatably connected inside the bearing plate (61). The top of the adjusting block (71) is provided with a hexagonal groove. A hemisphere (72) is fixedly installed on the top of the bearing plate (61). An annular groove that is adapted to and slidably connected to the hemisphere (72) is provided at the bottom of the adjusting block (71). The bottom of the adjusting block (71) is rotatably connected to the surface of the bearing plate (61). A fixing plate (73) is fixedly connected to the bottom surface of the adjusting block (71). A spiral groove (74) is provided at the bottom of the fixing plate (73).

7. A safe transport device for a high-purity phosphine storage tank according to claim 6, characterized in that, The bottom end of the support plate (61) is provided with a cross groove (75), which is evenly distributed around the circumference of the cross groove (75). A cross slider (76) is slidably connected inside the cross groove (75). A connecting rod (77) is fixedly connected to one end of the cross slider (76) near the circumference of the support plate (61). A guide sleeve that matches the connecting rod (77) is fixedly installed inside the cross groove (75). A connecting rod (78) is fixedly connected to one end of the connecting rod (77) away from the cross slider (76). A protrusion (79) is fixedly connected to the top of the other side of the connecting rod (78). The top of the protrusion (79) is slidably connected inside the spiral groove (74).

8. A safe transport device for a high-purity phosphine storage tank according to claim 7, characterized in that, The bottom end of the cross slider (76) is rotatably connected to a limiting plate two (801), and the limiting plate two (801) and the valve stem (22) are in compatible contact. An L-shaped plate (802) is fixedly connected to one end of the cross slider (76) near the edge of the bearing plate (61). A pressure spring (803) is fixedly connected to one end of the bottom of the L-shaped plate (802) near the limiting plate two (801). A push rod two (804) is fixedly connected to the other end of the pressure spring (803). The bearing plate (61) has an inner groove at the edge, and a sliding plate (805) is slidably connected inside the inner groove. A spring is fixedly connected between the sliding plate (805) and the inner wall of the groove. The push rod (804) is slidably connected inside the L-shaped plate (802). One end of the push rod (804) contacts the limiting plate (801), and the other end of the push rod (804) passes through the L-shaped plate (802) and contacts the sliding plate (805).

9. A safe transport device for a high-purity phosphine storage tank according to claim 8, characterized in that, A turntable (806) is rotatably connected to the top of the bearing plate (61). A circular groove (807) is provided at the eccentric part of the top of the turntable (806). A pull rope (808) is fixedly connected to the top of the sliding plate (805). The pull rope (808) is fixedly installed on the edge of the bottom of the turntable (806) away from the sliding plate (805). A guide block (809) is fixedly installed on the top of the bearing plate (61). A slide rod (810) is slidably connected inside the guide block (809). A cylindrical block (811) is fixedly connected to one end of the slide rod (810). The bottom end of the cylindrical block (811) is slidably connected to... Inside the circular groove (807), the other end of the slide rod (810) is fixedly connected to an abutment block (812). The abutment block (812) is provided with teeth at the end away from the slide rod (810). A buffer spring (813) is fixedly connected between the abutment block (812) and the guide block (809). A damping plate (814) is fixedly connected to the top of the bearing plate (61). The bottom end of the abutment block (812) is provided with a bottom groove that is adapted to slide and connect with the damping plate (814). The surface of the adjusting block (71) is provided with slots (815) that are adapted to engage with the teeth of the abutment block (812) at equal intervals.

10. A method of using a safety transport device for a high-purity phosphine storage tank, for use with the safety transport device for a high-purity phosphine storage tank as described in any one of claims 1-9, characterized in that, The main steps include: Step 1: Place the tank (21) on the top of the transport base plate (1), and use the limiting plate (32) inside the limiting frame (31) to fit onto the surface of the tank (21) to complete the initial positioning and anti-tipping fixation of the tank (21); Step 2: Adjust the position of the support plate (46) by sliding rod (44), rotate the adjusting screw (52) to push the bearing plate (61) down, and use the disc spring (63) and buffer block (64) at the bottom of the bearing plate (61) to axially elastically press the top of the valve stem (22) to eliminate axial gap; Step 3: Rotate the adjusting block (71), and use the spiral groove (74) at the bottom to drive the cross slider (76) to converge towards the center, and drive the limiting plate (801) to radially clamp the valve stem (22) to complete the further limitation of the tank (21); Step 4: After reaching the destination, push the abutment block (812) outward to release the lock on the adjusting block (71), rotate the adjusting block (71) in the opposite direction to release the second limiting plate (801), rotate the adjusting screw (52) in the opposite direction to release the axial pressure, and move out of the tank (21).

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