Device and method for adjusting pointing and radial positions of light

Abstract

The invention relates to the field of optics, and provides a device and a method for adjusting pointing and radial positions of light. The device for adjusting the pointing and radial positions of the light comprises a first driving part; the first optical wedge prism is mounted on the first driving part, and the first driving part is suitable for driving the first optical wedge prism to rotate in a plane perpendicular to the optical axis; the second driving part is arranged at the emergent end of the first optical wedge prism; the second optical wedge prism is installed on a second driving piece, the deflection angle of the second optical wedge prism is the same as that of the first optical wedge prism, and the second driving piece is suitable for driving the second optical wedge prism to rotate in the plane perpendicular to the optical axis; the third driving part is arranged at the emergent end of the second optical wedge prism; the optical flat plate is mounted on the third driving part, the third driving part is suitable for driving the optical flat plate to rotate in a plane parallel to the optical axis, and the optical axis penetrates through the optical flat plate all the time. The pointing and radial position adjusting device for light effectively decouples the adjustment of pointing and radial positions.

Description

Technical Field

[0001] The present invention relates to the field of optics and provides a device and method for adjusting the direction and radial position of light. Background Art

[0002] Precisely adjusting the direction and position of free-space light beams has important application value in fields such as free-space optical communications, laser mapping, photolithography, autonomous driving, microscopy, projectors, and optical scientific research experiments. The precision requirements in these fields make the adjustment of the direction and position of light beams a key challenge. Existing adjustment methods and technologies have some shortcomings in achieving this goal: methods based on reflection and light source position and attitude control usually face challenges in compactness and precision. In particular, for light sources such as polarized light, the reflection-based adjustment method will introduce uncontrollable polarization changes. In addition, although rotating a biprism can adjust the direction of the light beam, it cannot adjust its radial position; and rotating an optical parallel plate can only adjust the radial position but cannot change the direction of the light beam. Therefore, current technologies cannot fully meet the needs of achieving high-precision light beam pointing and position adjustment in a compact space.

[0003] To address these challenges, researchers have proposed a variety of solutions, but most methods still have limitations in practical applications. For example, although precise steering control can be achieved by changing the angle of the mirror through an electric adjustment device, the device itself has a complex structure and occupies a large space, making it difficult to meet the needs of high-precision beam adjustment. Similarly, although the combination of optical lenses and mirrors can achieve a certain degree of beam adjustment, it is easy to introduce distortion and scattering when adjusting the beam position, affecting the quality of the beam. In addition, although micro-lenses based on micro-electromechanical systems (MEMS) technology are small in size and have a fast response speed, they still have certain limitations in terms of high-precision adjustment and long-term stability.

[0004] In summary, existing technologies make it difficult to achieve high-precision, polarization-free, and distortion-free beam pointing and position adjustment in a compact space. This limits the further development of free-space optical communications, laser mapping, photolithography, autonomous driving, microscopes, projectors, and optical scientific research experiments. Summary of the Invention

[0005] An embodiment of the present invention provides a device for adjusting the direction and radial position of light, which is used to solve the defects of the light beam adjustment device in the related art, such as large size, poor precision, and incompatibility with the light beam direction and radial position adjustment.

[0006] The embodiment of the present invention also provides a method for adjusting the direction and radial position of light.

[0007] A first embodiment of the present invention provides a device for adjusting the direction and radial position of light, comprising: a first driving member; a first optical wedge prism mounted on the first driving member, wherein the first driving member is adapted to drive the first optical wedge prism to rotate in a plane perpendicular to the optical axis; a second driving member, disposed at the exit end of the first optical wedge prism; a second optical wedge prism mounted on the second driving member, wherein the deflection angle of the second optical wedge prism is the same as the deflection angle of the first optical wedge prism, and the second driving member is adapted to drive the second optical wedge prism to rotate in a plane perpendicular to the optical axis; a third driving member, disposed at the exit end of the second optical wedge prism; The optical plate is mounted on the third driving member. The third driving member is adapted to drive the optical plate to rotate in a plane parallel to the optical axis, and the optical axis always passes through the optical plate.

[0008] According to one embodiment of the present invention, a measuring component is further included. The measuring component is disposed at the exit end of the optical flat plate and is used to measure at least one of a directional parameter of light and a radial parameter of light.

[0009] According to an embodiment of the present invention, there are a plurality of first optical wedge prisms, and the plurality of first optical wedge prisms are all disposed on the first driving member.

[0010] According to an embodiment of the present invention, there are a plurality of first optical wedge prisms, and the first driving members are arranged in a one-to-one correspondence with the first optical wedge prisms.

[0011] According to one embodiment of the present invention, there are a plurality of second optical wedge prisms, and the plurality of second optical wedge prisms are all disposed on the second driving member.

[0012] According to an embodiment of the present invention, there are a plurality of second optical wedge prisms, and the second driving members are provided in a one-to-one correspondence with the second optical wedge prisms.

[0013] According to an embodiment of the present invention, there may be a plurality of optical plates, and the plurality of optical plates are all disposed on the third driving member.

[0014] According to an embodiment of the present invention, there may be a plurality of optical plates, and the third driving members are provided in a one-to-one correspondence with the optical plates.

[0015] A second aspect of the present invention provides a method for adjusting the light direction and radial position adjustment device as described above, comprising: The first driving member drives the first optical wedge prism to move; the second driving member drives the second optical wedge prism to move, so as to adjust the direction of light passing through the first optical wedge prism and the second optical wedge prism; The optical plate is driven by the third driving member to adjust the displacement of the light passing through the optical plate in the radial direction of the optical axis.

[0016] According to the first embodiment of the present invention, a device for adjusting the pointing and radial position of light, provided by a first aspect of the present invention, achieves precise adjustment of the beam's pointing direction. By utilizing the refractive properties of a wedge prism, the incident light beam undergoes a fixed deflection angle related to the wedge angle and refractive index. By rotating the first wedge prism, the beam's deflection direction can be changed. Combined with a high-precision driver, this device can meet the requirements for precise beam pointing in quantum optics experiments. The combined use of two wedge prisms enables two-dimensional vector adjustment of the beam's pointing direction. When the two wedge prisms have large thicknesses and are oriented in the same direction, the deflection angles add; when they are oriented in opposite directions, they cancel each other, enabling pointing adjustment in any direction within the xy plane. The adjustment range is doubled compared to a single wedge prism. Phase difference control eliminates the nonlinear error associated with traditional single-prism adjustment, improving pointing stability and making it suitable for beam tracking scenarios in space laser communications. The rotation of the optical plate enables non-directional adjustment of the beam's radial position. When the light beam passes through the rotating optical plate, it undergoes two refractions within the plate, accumulating radial position offsets without changing the beam's propagation direction. This design enables adjustment of radial position offset without affecting pointing, effectively decoupling the adjustment of pointing and radial position. For example, in photolithography processing, the beam offset caused by workbench vibration can be compensated in real time to ensure that the processing line width error meets the design requirements.

[0017] According to the second aspect of the present invention, an adjustment method for a device for adjusting the pointing and radial position of light, provided in an embodiment, can achieve basic adjustment of the light beam's pointing direction. Because the wedge prism operates on the principle of refraction, no polarization changes are introduced during the adjustment process, making it suitable for polarization-sensitive scenarios. Furthermore, the device has a compact structure and reduces radial space usage compared to reflector solutions. The combined adjustment of the dual wedge prisms effectively expands the pointing adjustment range and eliminates the nonlinear error associated with single prism adjustment through phase difference control, thereby improving pointing accuracy. This method can dynamically compensate for environmental disturbances (such as optical path offset caused by temperature changes). In laser mapping, it can improve the stability of beam pointing and meet the requirements of high-precision three-dimensional scanning. It also effectively achieves non-directional offset adjustment of the radial position of the light beam, and the adjustment process does not affect the beam's pointing direction. Through decoupling control from the dual wedge prisms, the radial position can be adjusted independently. Furthermore, the combination of multiple optical plates enables radial position adjustment in any direction in the xy plane, adapting to complex optical path calibration requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 It is a schematic side view of the device for adjusting the direction and radial position of light provided by the present invention.

[0020] Figure 2 It is a schematic principle diagram of the device for adjusting the direction and radial position of light provided by the present invention.

[0021] Figure 3 It is a schematic flow chart of the method for adjusting the direction and radial position of light provided by the present invention.

[0022] Reference numerals: 100, first driving member; 102, first optical wedge prism; 104, optical axis; 106, second driving member; 108, second optical wedge prism; 110, third driving member; 112, optical plate; 114, light source; 116, measurement component. DETAILED DESCRIPTION

[0023] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention but are not intended to limit the scope of the present invention.

[0024] like Figures 1 to 2 As shown, a first embodiment of the present invention provides a device for adjusting the direction and radial position of light, comprising: A first driving member 100; The first optical wedge prism 102 is mounted on the first driving member 100 , and the first driving member 100 is adapted to drive the first optical wedge prism 102 to rotate in a plane perpendicular to the optical axis 104 ; A second driving member 106 is disposed at the output end of the first wedge prism 102; The second wedge prism 108 is mounted on the second driving member 106. The deflection angle of the second wedge prism 108 is the same as the deflection angle of the first wedge prism 102. The second driving member 106 is adapted to drive the second wedge prism 108 to rotate in a plane perpendicular to the optical axis 104. A third driving member 110 is disposed at the output end of the second wedge prism 108; The optical plate 112 is mounted on the third driving member 110 . The third driving member 110 is adapted to drive the optical plate 112 to rotate in a plane parallel to the optical axis 104 , so that the optical axis 104 always passes through the optical plate 112 .

[0025] According to the first embodiment of the present invention, a device for adjusting the direction and radial position of light, provided by a first aspect of the present invention, achieves precise adjustment of the beam's direction. By utilizing the refractive properties of a wedge prism, the incident light beam undergoes a fixed deflection angle related to the wedge angle and refractive index. By rotating the first wedge prism 102, the direction of the beam's deflection can be changed. Combined with a high-precision driver, this device can meet the requirements for precise beam pointing in quantum optics experiments. The combined use of two wedge prisms enables two-dimensional vector adjustment of the beam's direction. When the two wedge prisms have large thicknesses and are oriented in the same direction, the deflection angles add together; when they are oriented in opposite directions, they cancel each other out, enabling adjustment of the beam's direction in any direction within the xy plane. The adjustment range is doubled compared to a single wedge prism. Phase difference control eliminates nonlinear errors encountered with conventional single-prism adjustment, improving pointing stability and making it suitable for beam tracking scenarios in space laser communications. The rotation of the optical plate 112 enables non-directional adjustment of the beam's radial position. When the light beam passes through the rotating optical plate 112, it undergoes two refractions within the plate, accumulating radial position offsets without changing the beam's propagation direction. This design allows for radial position adjustment without affecting the beam's pointing direction, effectively decoupling the adjustment of the beam's pointing direction from that of the radial position. For example, in photolithography, beam offset caused by worktable vibration can be compensated in real time to ensure that the processing line width error meets the design requirements.

[0026] Please continue to see Figures 1 to 2 The first driver 100 can utilize a high-precision servo motor or piezoelectric ceramic drive structure and be secured to the optical platform via a rigid bracket. Its rotation axis is perpendicular to and coaxial with the optical axis 104. The first wedge prism 102 can be made of a low-dispersion material such as fused quartz or K9 glass, with a wedge angle accuracy controlled within ±5″. It is secured to the rotating platform of the first driver 100 via optical adhesive or a mechanical clamp. When the first driver 100 receives a control signal, it drives the first wedge prism 102 to rotate from 0 to 360 degrees within a plane perpendicular to the optical axis 104.

[0027] The second driver 106 is positioned directly behind the output optical axis 104 of the first wedge prism 102 and utilizes the same drive architecture as the first driver 100, ensuring synchronized control. The second wedge prism 108's material, wedge angle, and machining precision are identical to those of the first wedge prism 102. The second wedge prism 108 is mounted on a rotating platform on the second driver 106, ensuring a coaxial error of less than 10 microns with the optical axis 104 of the two prisms. The second driver 106 rotates the second wedge prism 108 in a plane perpendicular to the optical axis 104, with its rotation angle synchronized with that of the first wedge prism 102 in real time or maintaining a specific phase difference.

[0028] The third drive element 110 can utilize a rotating structure parallel to the optical axis 104 and can be driven by a high-precision worm gear system or voice coil motor, with the plane of rotation perpendicular to the optical axis 104. The optical plate 112 can be made of highly uniform optical glass, preferably with a surface parallelism better than λ / 200 (λ being the operating wavelength). It is mounted to the center of the rotating platform of the third drive element 110 using vacuum suction or a flexible clamp, ensuring that the optical axis 104 always passes through the plate's geometric center. The third drive element 110 drives the optical plate 112 to rotate between 0 and 90 degrees within a plane parallel to the optical axis 104.

[0029] According to an embodiment of the present invention, a light source 114 is further included. The light source 114 is disposed at the incident end of the first wedge prism 102 .

[0030] In one embodiment of the present invention, light source 114 can be a laser or a broadband light source 114, which is fixedly mounted directly in front of the optical axis 104 of the incident end of first optical wedge prism 102. The axis of the light beam emitted by light source 114 is strictly coaxial with the optical axis 104 of first optical wedge prism 102. The light beam emitted by light source 114 is directly incident on first optical wedge prism 102, providing the initial light beam input for the entire adjustment device.

[0031] The integrated light source 114 forms a complete beam adjustment system, eliminating the need for an external light source 114 device, enhancing the device's integration and portability. Furthermore, the coaxial arrangement of the light source 114 and the wedge prism ensures the stability of the beam's initial incident angle, paving the way for subsequent precise adjustment.

[0032] According to an embodiment of the present invention, a measuring component 116 is further included. The measuring component 116 is disposed at the output end of the optical plate 112 and is used to measure at least one of a directional parameter of light and a radial parameter of light.

[0033] In one embodiment of the present invention, measurement assembly 116 can be a high-precision beam profiler or position-sensitive detector, fixedly mounted on an extension of optical axis 104 at the output end of optical plate 112. This assembly can collect the pointing angle (e.g., pitch and yaw) and radial position offset (x / y axis offset) of the output beam in real time and feed this data back to the control system.

[0034] Measurement component 116 enables closed-loop control, significantly improving the accuracy and real-time performance of beam adjustment. For example, in photolithography, beam pointing deviation can be corrected in real time to ±0.1 milliradians, and radial position offset errors can be controlled within ±1 micron, meeting the requirements of high-precision scenarios. Furthermore, this provides quantitative data support for system debugging, facilitating rapid optimization of adjustment parameters.

[0035] According to an embodiment of the present invention, there are a plurality of first wedge prisms 102 , and the plurality of first wedge prisms 102 are all disposed on the first driving member 100 .

[0036] In one embodiment of the present invention, the first driver 100 is an integrated rotating platform on which two to four first wedge prisms 102 are mounted in parallel, each prism having a consistent wedge angle and refractive index. The first driver 100 drives the multiple wedge prisms to rotate synchronously about the optical axis 104, maintaining the same thickness along the direction of greatest thickness.

[0037] Combining multiple wedge prisms enhances the sensitivity and range of beam pointing adjustments. For example, a single wedge prism can achieve ±5 milliradian pointing adjustments, while combining two prisms extends the adjustment range to ±10 milliradians. Furthermore, the superimposed refractive effect increases the minimum resolution of pointing adjustments to 0.01 milliradians, making it suitable for laser mapping scenarios requiring wide angle adjustments.

[0038] According to an embodiment of the present invention, there are multiple first optical wedge prisms 102 , and the first driving members 100 are disposed in a one-to-one correspondence with the first optical wedge prisms 102 .

[0039] In one embodiment of the present invention, each first wedge prism 102 is independently equipped with a micro-drive motor (e.g., a piezoelectric ceramic drive). Multiple drive motors are integrated on the same mounting base, but each drive element can be independently controlled. The rotation axis of each wedge prism is perpendicular to the optical axis 104, and the wedge angle of each prism can be independently adjusted.

[0040] The independently driven multi-wedge prism structure enables multi-dimensional decoupled adjustment of beam pointing. For example, by controlling the rotation angle of two independent wedge prisms, the pointing direction can be adjusted in any direction within the xy plane with an adjustment accuracy of up to 0.005 milliradians. This avoids the nonlinear errors associated with traditional single wedge prisms when adjusting complex angles, making it suitable for precise beam pointing control in quantum optics experiments.

[0041] According to an embodiment of the present invention, there are multiple second wedge prisms 108 , and the multiple second wedge prisms 108 are all disposed on the second driving member 106 .

[0042] In one embodiment of the present invention, the second driving member 106 utilizes a coaxial rotation structure, with two to three second wedge prisms 108 sequentially mounted along the optical axis 104. The deflection angle of each prism is consistent with that of the first wedge prism 102. The second driving member 106 drives the plurality of second wedge prisms 108 to rotate synchronously, and each prism maintains an adjustable phase difference with the corresponding prism of the first wedge prism 102 in the direction of greater thickness.

[0043] Synchronous adjustment of multiple second wedge prisms 108 enhances the flexibility of pointing adjustments. By varying the phase difference between the prisms, vectorial beam synthesis can be achieved. For example, in optical communication systems, adjusting the phase difference between two second wedge prisms 108 can quickly compensate for beam jitter caused by atmospheric turbulence, with a short response time and improved pointing stability to ±0.5 microradians.

[0044] According to an embodiment of the present invention, there are multiple second optical wedge prisms 108 , and the second driving members 106 are disposed in a one-to-one correspondence with the second optical wedge prisms 108 .

[0045] In one embodiment of the present invention, each second wedge prism 108 is equipped with an independent servo motor drive system. Each drive unit achieves synchronized angular alignment through a precision gear train, while also supporting independent angle adjustment. The mounting plane of the second wedge prisms 108 is perpendicular to the output optical axis 104 of the first wedge prism 102, and the wedge angle of each prism is independently programmable via the control system.

[0046] The independently driven multi-second wedge prism 108 structure enables dynamic, real-time compensation of beam pointing. For example, in an autonomous driving lidar system, if a bumpy vehicle causes the beam pointing to deviate, the independently driven second wedge prism 108 can quickly correct the pointing error, ensuring that the radar scanning pattern meets the design accuracy error. It also supports simultaneous adjustment of multiple beams, improving the system's environmental adaptability.

[0047] According to one embodiment of the present invention, there are multiple optical plates 112 , and the multiple optical plates 112 are all disposed on the third driving member 110 .

[0048] In one embodiment of the present invention, third driver 110 utilizes a multi-layered parallel rotating platform, stacking two to four optical plates 112 in a plane parallel to optical axis 104. Each plate is made of a material with a consistent refractive index and preferably exhibits surface parallelism better than λ / 100 (λ being the operating wavelength). Third driver 110 drives multiple optical plates 112 to rotate synchronously around optical axis 104, with each plate rotating at the same angle, ensuring that optical axis 104 always passes through the center of all plates.

[0049] The combination of multiple optical plates 112 significantly improves the range and accuracy of radial position adjustment. For example, a single optical plate 112 can achieve radial displacement adjustment from 0 to 1 mm. A combination of three plates expands the adjustment range to 0 to 3 mm, with a displacement resolution of 1 nanometer. This makes it suitable for nanometer-level beam translation control in photolithography. Furthermore, the multi-plate structure can compensate for eccentricity errors caused by the rotation of a single plate.

[0050] According to an embodiment of the present invention, there are multiple optical plates 112 , and the third driving members 110 are disposed in a one-to-one correspondence with the optical plates 112 .

[0051] In one embodiment of the present invention, each optical plate 112 can be equipped with an independent rotational drive (e.g., an electromagnetically driven rotation frame). Each drive is mounted on a common rigid base, and the rotation axis of each plate is parallel to the optical axis 104. The rotation angle of each optical plate 112 can be independently adjusted by a control system, and the rotation planes of each plate are parallel to each other and perpendicular to the output optical axis 104.

[0052] The independently driven multi-optical plate 112 structure enables two-dimensional decoupled adjustment of the radial position of the light beam. For example, by controlling the rotation angle of two independent optical plates 112, radial displacement can be adjusted in any direction within the xy plane with an adjustment accuracy of 0.1 micron. This also compensates for radial position offset introduced by adjustment of the wedge prism. In a microscope system, this structure enables nanometer-scale positioning of the light beam on the sample surface, improving imaging resolution.

[0053] like Figure 3 As shown, a second embodiment of the present invention provides a method for adjusting the direction and radial position of light as described above, comprising: Step 10, driving the first wedge prism 102 to move by the first driving member 100; Step 20: The second driving member 106 drives the second wedge prism 108 to adjust the direction of the light passing through the first wedge prism 102 and the second wedge prism 108; In step 30 , the third driving member 110 drives the optical plate 112 to move, so as to adjust the displacement of the light passing through the optical plate 112 in the radial direction of the optical axis 104 .

[0054] According to the second aspect of the present invention, an adjustment method for a device for adjusting the pointing and radial position of light, provided in an embodiment, can achieve basic adjustment of the beam's pointing direction. Because the wedge prism operates on the principle of refraction, the adjustment process does not introduce polarization changes, making it suitable for polarization-sensitive scenarios. Its compact structure reduces radial space usage compared to reflector solutions. The combined adjustment of dual wedge prisms effectively expands the pointing adjustment range and eliminates the nonlinear error associated with single prism adjustment through phase difference control, thereby improving pointing accuracy. This approach can dynamically compensate for environmental disturbances (such as optical path deviation caused by temperature changes). In laser mapping, it can improve beam pointing stability and meet the requirements of high-precision three-dimensional scanning. It also effectively achieves non-directional adjustment of the beam's radial position, without affecting the beam's pointing direction. Through decoupled control from the dual wedge prisms, the radial position can be adjusted independently. Furthermore, the combination of multiple optical plates 112 enables radial position adjustment in any direction in the xy plane, adapting to complex optical path calibration requirements.

[0055] Please continue to see Figure 3In the second aspect of the present invention, the method for adjusting the direction and radial position of light provided by the embodiment mainly includes the following steps: In step 10, after receiving the electrical control signal, the first driver 100 drives the first wedge prism 102 to rotate about the optical axis 104 in a plane perpendicular to the optical axis 104. For example, the wedge angle of the wedge prism is θ, and the refractive index is n. According to the law of refraction, when a light beam passes through the wedge prism, it will produce a fixed deflection angle δ = θ(n-1). When the first wedge prism 102 rotates, the angle of the direction of its greater thickness relative to the optical axis 104 changes, causing the direction of the refracted light beam to rotate synchronously in the xy plane. For example, when the wedge angle θ = 1 degree and the refractive index n = 1.5, the deflection angle δ ≈ 0.5 degrees. Rotating the first wedge prism 102 360 degrees can achieve full-plane adjustment of the direction.

[0056] In step 20, the second driver 106 is controlled in conjunction with the first driver 100, driving the second wedge prism 108 to rotate in a plane perpendicular to the optical axis 104. The deflection angle of the second wedge prism 108 is identical to that of the first wedge prism 102. The phase difference φ between the two wedge prisms in the direction of greater thickness can be adjusted by the driver: when φ = 0 degrees, the refraction directions of the two prisms are the same, and the deflection angles are superimposed; when φ = 180 degrees, the refraction directions are opposite, and the deflection angles cancel each other out. By adjusting the φ value in real time, vector synthesis of pointing angles can be achieved in the xy plane. For example, the first wedge prism 102 produces a y-direction deflection of 5 milliradians, and the second wedge prism 108 produces a 5 milliradian x-direction deflection. The combined deflections achieve a diagonal deflection of approximately 7.07 milliradians.

[0057] In step 30, third driver 110 rotates optical plate 112 in a plane parallel to optical axis 104. As optical plate 112 rotates, the light beam undergoes two refractions within the plate. The direction of the outgoing beam remains unchanged, but its radial position shifts. For example, if the plate has a thickness of 10 mm, a refractive index of 1.5, and a rotation angle of 10 degrees, the radial position shifts by approximately 0.87 mm. A rotation of 0 to 90 degrees allows for radial position adjustment of 0 to 5 mm.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A device for adjusting the direction and radial position of light, characterized in that: include: a first driving member (100); a first optical wedge prism (102) mounted on the first driving member (100), the first driving member (100) being adapted to drive the first optical wedge prism (102) to rotate in a plane perpendicular to the optical axis (104); a second driving member (106) disposed at the exit end of the first optical wedge prism (102); a second optical wedge prism (108) mounted on the second driving member (106), the deflection angle of the second optical wedge prism (108) being the same as the deflection angle of the first optical wedge prism (102), and the second driving member (106) being adapted to drive the second optical wedge prism (108) to rotate in a plane perpendicular to the optical axis (104); a third driving member (110) disposed at the exit end of the second wedge prism (108); An optical plate (112) is mounted on the third driving member (110), and the third driving member (110) is suitable for driving the optical plate (112) to rotate in a plane parallel to the optical axis (104), and the optical axis (104) always passes through the optical plate (112).

2. The device for adjusting the direction and radial position of light according to claim 1, characterized in that: The optical plate (112) further comprises a measuring component (116), wherein the measuring component (116) is arranged at the exit end of the optical plate (112), and the measuring component (116) is used to measure at least one of a directional parameter of light and a radial parameter of light.

3. The device for adjusting the direction and radial position of light according to claim 1 or 2, characterized in that: There are a plurality of first optical wedge prisms (102), and the plurality of first optical wedge prisms (102) are all arranged on the first driving member (100).

4. The device for adjusting the direction and radial position of light according to claim 1 or 2, characterized in that: There are a plurality of first optical wedge prisms (102), and the first driving members (100) are arranged in a one-to-one correspondence with the first optical wedge prisms (102).

5. The device for adjusting the direction and radial position of light according to claim 1 or 2, characterized in that: There are a plurality of second optical wedge prisms (108), and the plurality of second optical wedge prisms (108) are all arranged on the second driving member (106).

6. The device for adjusting the direction and radial position of light according to claim 1 or 2, characterized in that: There are a plurality of second optical wedge prisms (108), and the second driving members (106) are arranged in a one-to-one correspondence with the second optical wedge prisms (108).

7. The device for adjusting the direction and radial position of light according to claim 1 or 2, characterized in that: There may be a plurality of optical plates (112), and the plurality of optical plates (112) are all arranged on the third driving member (110).

8. The device for adjusting the direction and radial position of light according to claim 1 or 2, characterized in that: There may be a plurality of optical plates (112), and the third driving member (110) is provided in a one-to-one correspondence with the optical plates (112).

9. A method for adjusting the direction and radial position of light according to any one of claims 1 to 8, characterized in that: include: The first optical wedge prism (102) is driven to move by the first driving member (100); the second optical wedge prism (108) is driven to move by the second driving member (106) to adjust the direction of light passing through the first optical wedge prism (102) and the second optical wedge prism (108); The third driving member (110) drives the optical plate (112) to move, so as to adjust the displacement of light passing through the optical plate (112) in the radial direction of the optical axis (104).

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