Off-axis hologram object parameter angle closed-loop adjustment method and system based on piezoelectric screw

Abstract

The invention relates to an off-axis hologram object parameter angle closed-loop adjustment method and system based on a piezoelectric screw. The method comprises the following steps: S1, obtaining a hologram and obtaining a spectrogram; s2, calculating a zero-order frequency spectrum size and suppressing a zero order; s3, determining a credible range of a positive primary spectrum; s4, calculating a theoretical physical parameter angle, adjusting the inclination angle of the reflector to the theoretical physical parameter angle, and executing the step S1; s5, detecting the center coordinates of the positive and negative primary spectrums, judging whether the spectrums are effective double peaks or not, if not, checking an optical path, and executing S1; otherwise, executing S6; s6, judging whether the positive first-order spectral drop is within the credible range of the spectrogram or not, if not, finely adjusting the angle of the reflector through the piezoelectric screw, and executing S5 again until the positive first-order spectral drop is within the credible range of the spectrogram or not; otherwise, executing S7; and S7, extracting current positive-level frequency spectrum information, and performing sample intensity and phase reconstruction. Compared with the prior art, the method has the advantages of quick response, high adjustment accuracy, high efficiency and the like.

Description

Technical Field

[0001] The present invention relates to the field of optical imaging technology, and in particular to a closed-loop adjustment method and system for an off-axis hologram object parameter angle based on a piezoelectric screw. Background Art

[0002] Digital holography offers full-field-of-view, non-destructive, high-precision, and digital focusing capabilities, and can simultaneously determine multiple information, such as quantitative intensity and phase. Digital holography has been widely applied in quantitative imaging of living cells, microscopic particle tracking, and surface topography detection. Off-axis digital holography, in particular, has attracted widespread interest among researchers across various fields, primarily because it can recover object information with only a single hologram. This not only improves the system's measurement efficiency but also reduces the impact of environmental influences on multi-frame measurements.

[0003] Off-axis holograms are commonly used in optical imaging, information storage, interferometry, and other fields. In these applications, higher frequency-domain bandwidth utilization of the +1-order term in the hologram indicates greater high-frequency information about the object, leading to higher-quality reconstructed images. However, due to uncertainties in the object angle and variations in system parameters, there may be initial overlap between the zero-order term and the ±1-order terms, resulting in the inability to obtain the positive and negative first-order terms or reduced accuracy.

[0004] It can be seen that precise adjustment of the object parameter angle is crucial to the quality of the reconstructed image. Currently, during experiments, object parameter angle adjustment often relies on manual adjustment based on the experimenter's experience. This method has disadvantages such as low adjustment accuracy, slow response speed, susceptibility to vibration, and low efficiency. Therefore, there is an urgent need to provide a method and system for adjusting the object parameter angle of an off-axis hologram with high adjustment accuracy, fast response speed, high stability, and high efficiency. Summary of the Invention

[0005] The purpose of the present invention is to overcome the defects of the above-mentioned prior art, such as poor adjustment accuracy, susceptibility to vibration, slow response and low efficiency, and to provide a piezoelectric screw-based off-axis hologram object parameter angle closed-loop adjustment method and system with higher accuracy and efficiency.

[0006] The purpose of the present invention can be achieved by the following technical solutions:

[0007] This solution provides a closed-loop adjustment method for the object parameter angle of an off-axis hologram based on a piezoelectric screw, the method comprising the following steps:

[0008] S1: Obtain the hologram, perform Fourier transform to obtain the spectrum, and perform centralization processing;

[0009] S2: Calculate the zero-order spectrum size based on the parameters of the optical system and suppress the zero-order;

[0010] S3: Determine the credible range of the positive first-order spectrum based on the size of the zero-order spectrum and the size of the spectrum image;

[0011] S4: Determine the theoretical object parameter angle at which the positive first-order spectrum falls within the credible range based on the size of the zero-order spectrum and the parameters of the optical system, adjust the inclination angle of the reflector of the optical system to the theoretical object parameter angle, and execute step S1;

[0012] S5: Detect the center coordinates of the positive and negative first-order spectra to determine whether they are valid double peaks. If not, check the optical path and execute S1; otherwise, execute S6.

[0013] S6: Determine whether the positive first-order spectrum is within the credible range of the spectrum. If not, fine-tune the angle of the reflector by using the piezoelectric screw and re-execute S5 until the positive first-order spectrum is within the credible range of the spectrum. Otherwise, execute S7.

[0014] S7: Adaptively extract the current positive first-order spectrum information, reconstruct the intensity and phase of the sample according to the extracted information, and reset the reflector.

[0015] Furthermore, the credible range is a circular structure, the inner radius of the credible range is larger than the radius of the zero-order spectrum region, and the outer radius of the credible range is smaller than twice the radius of the zero-order spectrum region.

[0016] Furthermore, the method for fine-tuning the angle of the reflector in S6 includes the following specific steps:

[0017] S61: Obtain the center coordinates of the positive and negative first-order spectrums, and obtain the effective radius between the center of the positive first-order spectrum and the center of the image;

[0018] S62: Compare the effective radius of the positive first-order spectrum with the radius of the credible range. If the effective radius is greater than or equal to the outer radius of the credible range, execute S63; if the effective radius is less than or equal to the inner radius of the credible range, execute S64.

[0019] S63: Decrease the inclination angle of the reflector gradually until the effective radius is smaller than the outer radius of the credible range and larger than the inner radius;

[0020] S64: Increase the inclination angle of the reflector in a gradient until the effective radius is larger than the inner circle radius of the credible range and smaller than the outer circle radius.

[0021] Furthermore, in the process of obtaining the size of the credible range, if the minimum size of the spectrum image is less than twice the radius of the zero-order spectrum area, the outer radius of the credible range is less than the difference between the minimum size of the spectrum image and half the radius of the zero-order spectrum area.

[0022] Furthermore, in S2, the size of the zero-order spectrum is obtained based on a cluster detection method.

[0023] This solution also provides a system for closed-loop adjustment of the object parameter angle of an off-axis hologram based on a piezoelectric screw, comprising a semiconductor laser, a collimating and beam expanding lens, a beam splitter prism, a reflector, a CCD camera, and a control module;

[0024] The semiconductor laser and the sample are located on opposite sides of a beam splitter prism, the reflector and the CCD camera are located on opposite sides of the beam splitter prism, the reflector is mounted on a reflector frame, and the reflector frame is provided with a piezoelectric ceramic drive structure for adjusting the reflector angle; the control module is respectively connected to the CCD camera and the piezoelectric ceramic drive structure, and drives the piezoelectric ceramic drive structure according to the detection results of the CCD camera.

[0025] Furthermore, the optical path of the system is as follows: the laser light generated by the semiconductor laser is collimated and expanded by a beam expander, and then a beam of light is irradiated on the sample surface through a beam splitter prism, and another beam of light is irradiated on the reflector surface. After reflection, the light is captured by a CCD camera.

[0026] Furthermore, the reflector frame is provided with a mounting frame for fixing the reflector, one end of the mounting frame is movably connected to the reflector frame, and the piezoelectric ceramic drive structure includes left and right adjustment piezoelectric screws, which are fixed on the reflector frame and drive the mounting frame to adjust the left and right inclination angles of the mounting frame.

[0027] Furthermore, the piezoelectric ceramic driving structure further includes an up-and-down adjustment piezoelectric screw, which is fixed on the reflector frame and drives the connecting mounting frame to adjust the up-and-down tilt angle of the mounting frame.

[0028] Furthermore, a first objective lens is detachably mounted on a side of the beam splitter prism facing the reflector, and a second objective lens is detachably mounted on a side of the beam splitter prism facing the sample.

[0029] Compared with the prior art, the present invention has the following advantages:

[0030] (1) This solution determines the size of the zero-order spectrum and the credible range based on the acquired off-axis hologram, determines the theoretical object parameter angle, and adjusts the reflector to the corresponding angle through the piezoelectric screw. Then, based on the actual spacing between the positive and negative first-order spectra and the size of the credible range, the piezoelectric screw is used to fine-tune the reflector so that the positive first-order spectrum region is within the credible range. This adjustment method is based on the information of the off-axis hologram, cooperates with the piezoelectric screw for adaptive adjustment, and initially determines the theoretical object parameter angle, which effectively simplifies the adjustment steps of the reflector. Compared with multiple manual adjustments, the adaptive adjustment of the piezoelectric screw avoids adjustment vibration, improves adjustment accuracy, has a fast response speed, simple steps, and improves the adjustment efficiency of the object parameter angle.

[0031] (2) This solution, based on the precise adjustment characteristics of piezoelectric screws, can achieve precise adjustment of the object parameter angle, significantly improving the imaging quality of the hologram. Compared with traditional mechanical adjustment, the piezoelectric drive method has the advantages of fast response speed and high adjustment accuracy, which can better meet the dynamic adjustment requirements in off-axis hologram applications.

[0032] (3) This solution uses the off-axis hologram captured by the CCD camera. Based on the feedback information in the hologram, it drives the piezoelectric screw to adjust the mirror to the corresponding angle. The adjusted angle is then fed back into the next hologram captured, forming a closed-loop feedback mechanism. The closed-loop feedback mechanism enables real-time angle adjustment, avoiding the errors and delays of traditional manual adjustment and improving the stability and reliability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 A flow chart of the closed-loop regulation method provided by the present invention;

[0034] Figure 2 A schematic structural diagram of the optical path system corresponding to the adjustment method provided by the present invention;

[0035] Figure 3 A schematic diagram of the hologram after processing provided by the present invention;

[0036] In the figure: 1. semiconductor laser, 2. collimator and beam expander, 3. beam splitter, 4. reflector, 5. CCD camera, 6. sample, 7. reflector frame, 71. mounting frame, 8. left and right adjustment piezoelectric screw, 9. up and down adjustment piezoelectric screw. DETAILED DESCRIPTION

[0037] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0038] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0039] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0040] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limiting the present invention.

[0041] It should be noted that the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0042] Furthermore, terms such as "horizontal" and "vertical" do not necessarily mean that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0043] Example 1

[0044] like Figure 1 and Figure 3 As shown, this embodiment provides a closed-loop adjustment method for the object parameter angle of an off-axis hologram based on a piezoelectric screw, the method comprising the following steps:

[0045] S1: Obtain the hologram, transform it into a spectrum, and perform centralization processing;

[0046] S2: Calculate the zero-order spectrum size based on the parameters of the optical system and suppress the zero-order;

[0047] S3: Determine the credible range of the positive first-order spectrum based on the size of the zero-order spectrum and the size of the spectrum image;

[0048] S4: Determine the theoretical object parameter angle at which the positive first-order spectrum falls within the credible range based on the size of the zero-order spectrum and the parameters of the optical system, adjust the inclination angle of the reflector of the optical system to the theoretical object parameter angle, and execute step S1;

[0049] S5: Detect the center coordinates of the positive and negative first-order spectra to determine whether they are valid double peaks. If not, check the optical path and execute S1; otherwise, execute S6.

[0050] S6: Determine whether the positive first-order spectrum is within the credible range of the spectrum. If not, accurately adjust the angle of the reflector by using the piezoelectric screw and re-execute S5 until the positive first-order spectrum is within the credible range of the spectrum. Otherwise, execute S7.

[0051] S7: Adaptively extract the current positive first-order spectrum information, reconstruct the intensity and phase of the sample according to the extracted information, and reset the reflector.

[0052] Based on the acquired off-axis hologram, the size of the zero-order spectrum and the credible range is determined, the theoretical object parameter angle is determined, and the reflector is adjusted to the corresponding angle through the piezoelectric screw. Then, based on the comparison between the actual spacing of the positive and negative first-order spectra and the size of the credible range, the reflector is fine-tuned through the piezoelectric screw so that the positive first-order spectrum area is within the credible range.

[0053] This adjustment method uses information from off-axis holograms, coupled with piezoelectric screws for adaptive adjustment, and initially determines the theoretical object parameter angle, effectively simplifying the mirror adjustment process. Compared to multiple manual adjustments, the adaptive adjustment of the piezoelectric screw avoids adjustment vibration and improves adjustment accuracy. It also offers a fast response speed and simplified procedures, improving the efficiency of object parameter angle adjustment.

[0054] In this embodiment, the credible range is a circular structure, the inner radius of the credible range is larger than the radius of the zero-order spectrum region, and the outer radius of the credible range is less than twice the radius of the zero-order spectrum region.

[0055] Furthermore, in the process of obtaining the size of the credible range, if the minimum size of the spectrum image is less than twice the radius of the zero-order spectrum area, the outer radius of the credible range is less than the difference between the minimum size of the spectrum image and half the radius of the zero-order spectrum area.

[0056] Considering that the image size will be limited in order to ensure the detection of effective double peaks in the positive and negative first-level spectrum regions, when the outer circle of the credible range exceeds the image range, the outer circle size of the credible range is limited based on the minimum size of the image to ensure that the credible range is within the image range and the positive first-level spectrum is accurately detected.

[0057] In this embodiment, the method for fine-tuning the angle of the reflector in S6 includes the following specific steps:

[0058] S61: Obtain the center coordinates of the positive and negative first-order spectrums, and obtain the effective radius between the center of the positive first-order spectrum and the center of the image;

[0059] S62: Compare the effective radius of the positive first-order spectrum with the radius of the credible range. If the effective radius is greater than or equal to the outer radius of the credible range, execute S63; if the effective radius is less than or equal to the inner radius of the credible range, execute S64.

[0060] S63: Decrease the inclination angle of the reflector gradually until the effective radius is smaller than the outer radius of the credible range and larger than the inner radius;

[0061] S64: Increase the inclination angle of the reflector in a gradient until the effective radius is larger than the inner circle radius of the credible range and smaller than the outer circle radius.

[0062] The effective radius of the detected positive-first-order spectrum determines whether it is within the trustworthy range. The relationship between the effective radius and the physical parameter angle determines the direction of physical parameter angle adjustment. A few subtle adjustments using the piezoelectric screws can bring the positive-first-order spectrum region within the trustworthy range. This highly accurate, convenient, and responsive adjustment significantly improves the efficiency of physical parameter angle adjustment and ultimately the accuracy of the information obtained.

[0063] In this embodiment, in S2, the size of the zero-order spectrum is obtained based on the cluster detection method, and based on the separation condition formula Calculate the theoretical object parameter angle θ, where B is the bandwidth obtained by the cluster detection method, and λ is the laser wavelength used in the optical system.

[0064] Taking into account that when the sample is replaced, the corresponding objective lens in the optical path needs to be replaced, and the replacement of the objective lens will cause the optical path parameters to change, then due to the different parameters of the optical path system, the size of the zero-order will be different. Therefore, it is necessary to calculate the size of the zero-order area first. Through the clustering-based method of detecting zero-order, the corresponding theoretical range is obtained. The effective radius of the zero-order area is generally taken as twice the corresponding bandwidth, because the theoretical zero-order area size is the highest spatial frequency of the object structure and cannot be fully referred to. However, the actual radius of the zero-order is definitely smaller than the theoretical range, so it can be used as a basis for judging whether the positive and negative first levels are covered, which can effectively suppress the zero-order and judge the credible range.

[0065] This adjustment method uses an off-axis hologram captured by a CCD camera. Based on the feedback from the hologram, it drives a piezoelectric screw to adjust the mirror to the corresponding angle. This angle is then fed back into the next hologram captured, creating a closed-loop feedback mechanism. This mechanism enables real-time angle adjustment, avoiding the errors and delays associated with traditional manual adjustment and improving system stability and reliability.

[0066] Example 2

[0067] This embodiment is basically the same as embodiment 1, and the difference lies in the following technical features: Figure 2 As shown, this embodiment provides a system for closed-loop adjustment of the object parameter angle of an off-axis hologram based on a piezoelectric screw, comprising a semiconductor laser 1, a collimating and beam expanding lens 2, a beam splitter prism 3, a reflector 4, a CCD camera 5, and a control module;

[0068] The semiconductor laser 1 and the sample 6 are located on opposite sides of the beam splitter prism 3, the reflector 4 and the CCD camera 5 are located on opposite sides of the beam splitter prism 3, the reflector 4 is mounted on a reflector frame 7, and the reflector frame 7 is provided with a piezoelectric ceramic drive structure for adjusting the angle of the reflector 4; the control module is respectively connected to the CCD camera 5 and the piezoelectric ceramic drive structure, and drives the piezoelectric ceramic drive structure according to the detection results of the CCD camera 5.

[0069] In this embodiment, the optical path of the system is as follows: the laser light generated by the semiconductor laser 1 passes through the collimator and the beam expander 2, and then passes through the beam splitter prism 3 to irradiate the surface of the sample 6. The light reflected by the sample 6 is split by the beam splitter prism 3 and then irradiated on the reflector 4. The reflector 4 reflects the light and then passes through the beam splitter prism 3 to be captured by the CCD camera 5.

[0070] In a preferred embodiment, a mounting bracket 71 for securing the reflector 4 is provided on the reflector frame 7. One end of the mounting bracket 71 is movably connected to the reflector frame 7. The piezoelectric ceramic drive structure includes a left-right adjustment piezoelectric screw 8, which is fixed to the reflector frame 7 and drives the mounting bracket 71 to adjust the left-right tilt angle of the mounting bracket 71. The piezoelectric ceramic drive structure also includes a vertical adjustment piezoelectric screw 9, which is fixed to the reflector frame 7 and drives the mounting bracket 71 to adjust the vertical tilt angle of the mounting bracket 71.

[0071] By adjusting the angle in multiple directions, the positive and negative primary spectrum regions can be positioned appropriately for easy observation and confirmation. The fine-tuning properties of the piezoelectric screws enable precise adjustment of the object parameter angle, significantly improving the hologram's imaging quality. Compared to traditional mechanical adjustment, the piezoelectric drive method offers advantages such as fast response and high adjustment precision, better meeting the dynamic adjustment requirements of off-axis holographic applications.

[0072] In this embodiment, a first objective lens is detachably mounted on the side of the beam splitter 3 facing the reflector 4, and a second objective lens is detachably mounted on the side of the beam splitter 3 facing the sample. The first and second objective lenses can be replaced with appropriate magnifications according to sample requirements.

[0073] The above describes in detail the preferred embodiments of the present invention. It should be understood that those skilled in the art can make numerous modifications and variations based on the concepts of the present invention without inventive effort. Therefore, any technical solutions that can be derived by those skilled in the art through logical analysis, reasoning, or limited experimentation based on the concepts of the present invention and the prior art should be within the scope of protection defined by the claims.

Claims

1. A closed-loop adjustment method for the object parameter angle of an off-axis hologram based on a piezoelectric screw, characterized in that: The method comprises the following steps: S1: Acquire the hologram, perform Fourier transform to obtain the spectrum, and perform centralization processing; S2: Calculate the zero-order spectrum size based on the parameters of the optical system and suppress the zero-order; S3: Determine the credible range of the positive first-order spectrum based on the size of the zero-order spectrum and the size of the spectrum image; S4: Determine the theoretical object parameter angle at which the positive first-order spectrum falls within the credible range based on the size of the zero-order spectrum and the parameters of the optical system, adjust the inclination angle of the reflector of the optical system to the theoretical object parameter angle, and execute step S1; S5: Detect the center coordinates of the positive and negative first-order spectra to determine whether they are valid double peaks. If not, check the optical path and execute S1; otherwise, execute S6. S6: Determine whether the positive first-order spectrum is within the credible range of the spectrum. If not, fine-tune the angle of the reflector by using the piezoelectric screw and re-execute S5 until the positive first-order spectrum is within the credible range of the spectrum. Otherwise, execute S7. S7: Adaptively extract the current positive first-order spectrum information, reconstruct the intensity and phase of the sample according to the extracted information, and reset the reflector.

2. The closed-loop adjustment method for the object parameter angle of an off-axis hologram based on a piezoelectric screw according to claim 1, characterized in that: The credible range is a circular structure, the inner radius of the credible range is greater than the radius of the zero-order spectrum region, and the outer radius of the credible range is less than twice the radius of the zero-order spectrum region.

3. The closed-loop adjustment method for the off-axis hologram object parameter angle based on a piezoelectric screw according to claim 2, characterized in that: The method for fine-tuning the angle of the reflector in S6 includes the following specific steps: S61: Obtain the center coordinates of the positive and negative first-order spectrums, and obtain the effective radius between the center of the positive first-order spectrum and the image center; S62: Compare the effective radius of the positive first-order spectrum with the radius of the credible range. If the effective radius is greater than or equal to the outer radius of the credible range, execute S63; if the effective radius is less than or equal to the inner radius of the credible range, execute S64. S63: Decrease the inclination angle of the reflector gradually until the effective radius is smaller than the outer radius of the credible range and larger than the inner radius; S64: Increase the inclination angle of the reflector in a gradient until the effective radius is larger than the inner circle radius of the credible range and smaller than the outer circle radius.

4. The closed-loop adjustment method for the object parameter angle of an off-axis hologram based on a piezoelectric screw according to claim 2, characterized in that: In the process of obtaining the size of the credible range, if the minimum size of the spectrum image is less than twice the radius of the zero-order spectrum region, the outer radius of the credible range is less than the difference between the minimum size of the spectrum image and half the radius of the zero-order spectrum region.

5. The closed-loop adjustment method for the off-axis hologram object parameter angle based on a piezoelectric screw according to claim 1, characterized in that: In S2, the size of the zero-order spectrum is obtained based on a cluster detection method.

6. A system based on the closed-loop adjustment method of the off-axis hologram object parameter angle based on a piezoelectric screw according to any one of claims 1 to 5, characterized in that: It includes a semiconductor laser (1), a collimating and beam expanding lens (2), a beam splitter (3), a reflector (4), a CCD camera (5) and a control module; The semiconductor laser (1) and the sample (6) are located on opposite sides of a beam splitter prism (3); the reflector (4) and the CCD camera (5) are located on opposite sides of the beam splitter prism (3); the reflector (4) is mounted on a reflector frame (7); and the reflector frame (7) is provided with a piezoelectric ceramic drive structure for adjusting the angle of the reflector (4); and the control module is connected to the CCD camera (5) and the piezoelectric ceramic drive structure, respectively, and drives the piezoelectric ceramic drive structure according to the detection result of the CCD camera (5).

7. The system according to claim 6, characterized in that The optical path of the system is as follows: the laser light generated by the semiconductor laser (1) passes through the collimator and the beam expander (2), and then passes through the beam splitter prism (3) to irradiate the surface of the sample (6), and the other beam passes through the beam splitter prism (3) to irradiate the reflector (4), and the sample (6) and the reflector (4) reflect the light and then pass through the beam splitter prism (3) to be captured by the CCD camera (5).

8. The system according to claim 6, wherein: The reflector frame (7) is provided with a mounting frame (71) for fixing the reflector (4); one end of the mounting frame (71) is movably connected to the reflector frame (7); the piezoelectric ceramic drive structure includes a left-right adjustment piezoelectric screw (8); the left-right adjustment piezoelectric screw (8) is fixed to the reflector frame (7) and drives the mounting frame (71) to adjust the left-right inclination angle of the mounting frame (71).

9. The system according to claim 8, characterized in that The piezoelectric ceramic drive structure further comprises an up-and-down adjustment piezoelectric screw (9), which is fixed on the reflector frame (7) and drives the connecting mounting frame (71) to adjust the up-and-down inclination angle of the mounting frame (71).

10. The system according to claim 6, wherein: A first objective lens is detachably mounted on the side of the beam splitter prism (3) facing the reflector (4), and a second objective lens is detachably mounted on the side of the beam splitter prism (3) facing the sample.

Images