Multi-guide capillary electroplating layer thickness measuring instrument with counterweight mechanism

Abstract

The invention discloses a multi-guide capillary electroplating layer thickness measuring instrument with a counterweight mechanism, which comprises a base, a moving platform mechanism which is arranged on the base and comprises X, Y and Y1 three-direction moving parts, and a lifting system which is arranged in the Z-axis direction and is connected with the large-stroke counterweight mechanism, comprising an X-ray generating device, a double-camera mechanism, a light path assembly of a multi-guide capillary tube and a protective cover frame component with a counterweight mechanism, according to the multi-guide capillary tube electroplating layer thickness measuring instrument with the balance weight mechanism, the overall scheme of the multi-guide capillary tube, the double-Y-direction movement mechanism and the short-range camera and the long-range camera is adopted, so that the structure is compact, and the precision of the movement platform is high; the multi-guide capillary tube focuses the X-ray, so that the rapid measurement requirement of a tiny area can be met, and the measurement stability is high; and due to the close-shot and long-shot double cameras, the instrument is more convenient to use.

Description

Technical Field

[0001] The invention belongs to the field of X-ray detection and relates to an instrument for measuring the thickness of electroplating layers using a multi-conducting capillary tube with a counterweight mechanism. Background Art

[0002] In the process of using X-rays to detect the thickness of the electroplating layer, the X-ray generator emits X-rays, which are irradiated to the surface of the sample to be measured through a specific collimator hole. The electroplating layer of the sample absorbs the X-ray energy, and the outer electrons transition to release energy. The detection device detects the released energy and calculates the thickness of the electroplating layer. The current practice is that the X-ray generator emits X-rays, which are irradiated to the surface of the sample to be measured through a specific collimator hole. The electroplating layer of the sample absorbs the X-ray energy, and the outer electrons transition to release energy. The detection device detects the released energy and calculates the thickness of the electroplating layer. The current structure is relatively complex and cannot achieve switching between near and far views. When measuring quickly in a small area, the measurement stability is not high and it is not easy to adjust. Therefore, it is necessary to find a new structure or method. Summary of the Invention

[0003] In view of this, it is necessary to overcome at least one of the above-mentioned deficiencies in the prior art. The present invention provides an instrument for measuring the thickness of electroplated layers using a multi-capillary tube with a counterweight mechanism, comprising: a base, a movable platform mechanism mounted on the base, a lifting system mounted on the base, an optical path assembly mounted on the lifting system, and a frame member for protecting against X-rays, the frame member including a protective cover with a counterweight mechanism; the movable platform mechanism includes three-dimensional movable components in X, Y, and Y1 directions, the X and Y directions forming a planar movable component in the X and Y axes, and the Y1 direction forming a movable component based on the planar movable component and in the same direction as the Y direction; the lifting system is a lifting system in the Z axis direction, and the lifting system is also connected to a long-stroke counterweight mechanism; the optical path assembly includes an X-ray generator, a filter and an optical shutter switching device mounted below the X-ray generator, a multi-capillary tube for focusing the X-rays, and a mechanism for adjusting the position of the multi-capillary tube; the optical path assembly also includes a dual-camera mechanism, which includes a near-view camera and a far-view camera.

[0004] The counterweight mechanism is installed on both sides of the instrument machine, and the counterweight mechanism balances the weight of the instrument cover, making opening and closing the cover more reasonable; the multi-conducting capillary and X-ray tube mechanism is installed on the instrument Z-axis assembly, generates an X-ray source and converges the rays, and is the core mechanism of the instrument; the detector assembly is installed on the instrument Z-axis assembly, is a component that receives the X-ray source to excite the sample to generate energy information and amplifies the energy information, and is the core component of the instrument; the mobile platform mechanism is installed on the instrument frame, and the sample to be tested is placed on the mobile platform panel, which can achieve high-precision movement; the lifting drive mechanism is installed on the instrument frame, when testing samples of different heights, when the lifting drive mechanism drives the Z-axis assembly to rise or fall; the Z-axis counterweight mechanism is installed on the instrument frame, when the lifting drive mechanism drives the Z-axis assembly to rise or fall, it balances most of the weight of the Z-axis, thereby reducing the burden on the lifting drive mechanism.

[0005] According to the prior art described in the background of the present invention, the existing structure is relatively complex and cannot achieve switching between near and far views. When quickly measuring a small area, the measurement stability is low and it is difficult to adjust. However, the instrument for measuring the thickness of a plating layer using a multi-capillary tube with a counterweight mechanism disclosed in the present invention adopts an overall solution of a multi-capillary tube, a dual Y-axis motion mechanism, and near and far view cameras, resulting in a compact structure and a high-precision motion platform. The multi-capillary tube focuses X-rays to meet the needs of rapid measurement of a small area and has high measurement stability. The dual near and far view cameras make the instrument more convenient to use.

[0006] In addition, the multi-conductor capillary device for measuring the thickness of electroplated layers with a counterweight mechanism disclosed in the present invention also has the following additional technical features: Furthermore, the multi-capillary instrument for measuring the thickness of electroplated layers with a counterweight mechanism further comprises a rocker for controlling the movement of the mobile platform mechanism, a button for controlling the lifting system, and an indicator light for displaying the status of the instrument.

[0007] Furthermore, the large-stroke counterweight mechanism includes a mechanism bracket and a long arm rod connected to the mechanism bracket through a fixed swivel pin, the long arm rod is connected to the short arm rod through a first swivel pin, the short arm rod is connected to the fixed foot through a second swivel pin, and the fixed foot is fixed on the Z-axis assembly that needs counterweight; the connecting head is connected to the long arm rod through a third swivel pin, one end of the screw is fixed on the connecting head, and the other end of the screw is connected to the connecting stop rod passing through the directional hole of the mechanism bracket, and the connecting stop rod and the screw are constrained by the directional hole on the mechanism bracket; a nut, a spring seat, and a mold spring are sequentially installed on the screw, and a convex retaining ring is installed on the upper end of the mold spring, and the convex retaining ring and the concave retaining ring cooperate to serve as a fixed side support for the mold spring.

[0008] Specific process: When the fixed foot moves downward with the Z-axis assembly, the short arm rod connected to the fixed foot by the swivel pin also moves downward, and the long arm rod connected to the short arm rod by the swivel pin is driven to rotate along the fixed swivel pin. The long arm rod rotates along the fixed swivel pin, driving the connecting head and the screw to move leftward along the directional hole on the mechanism bracket. The spring seat installed on the screw compresses the mold spring under the push of the nut. The upper end of the mold spring is equipped with a convex retaining ring. The convex retaining ring and the concave retaining ring cooperate as the fixed side support of the mold spring, and the compression force of the mold spring is used to balance the gravity of the Z-axis assembly; when the fixed foot moves upward with the Z-axis assembly, the short arm rod connected to the fixed foot by the swivel pin also moves upward, and the long arm rod connected to the short arm rod by the swivel pin is driven to rotate along the fixed swivel pin. The long arm rod rotates along the fixed swivel pin, driving the connecting head and the screw to move rightward along the directional hole on the mechanism bracket. The compressed mold spring pushes the spring seat, screw, and connecting retaining rod installed on the screw to move rightward, and the compression force of the mold spring is used to balance the gravity of the Z-axis assembly. The protective cover counterweight mechanism utilizes the mold spring force to balance the protective cover's gravitational torque. Adjusting the nut adjusts the balancing force, thereby providing balanced assistance for the Z-axis assembly's ascent and descent. The fixed, first, second, and third pivot pins all have stepped shaft structures. Their larger diameter ends secure to corresponding mounting components through an interference fit, while their smaller diameter ends are used for connection to other components.

[0009] Furthermore, the directional hole on the mechanism bracket for limiting the movement of the connecting rod and the screw only along the length direction is a long strip through hole, the length direction of which is consistent with the movement direction of the connecting rod and the screw, and is used to limit the connecting rod and the screw to move left and right only along the direction of the directional hole.

[0010] Furthermore, an annular groove is provided at one end of the spring seat close to the mold spring, and the lower end of the mold spring is embedded in the annular groove to prevent the mold spring from deflecting during compression and release.

[0011] Furthermore, the convex retaining ring is fixedly connected to the mechanism bracket by bolts, and the inner ring of the concave retaining ring is provided with a step surface adapted to the outer ring of the convex retaining ring, and the two cooperate to form a limiting structure for the upper end of the mold spring.

[0012] Furthermore, the length of the long arm is greater than that of the short arm, and the ratio of the lengths thereof is 3:1 to 5:1, so as to amplify the small stroke of the mold spring into a large stroke counterweight of the Z-axis assembly.

[0013] Furthermore, one side of the fixed foot connected to the Z-axis assembly is provided with anti-slip teeth, and the anti-slip teeth cooperate with the grooves on the surface of the Z-axis assembly to enhance the stability of the connection between the fixed foot and the Z-axis assembly.

[0014] Furthermore, a locking nut is provided at one end of the screw rod connected to the connector, and the locking nut is used to prevent the screw rod from loosening and falling off from the connector during long-term use.

[0015] Furthermore, the lifting mechanism includes a driving assembly and a screw assembly, the driving assembly includes a stepper motor installed on a support frame to provide power, a synchronous pulley installed on the output shaft of the stepper motor, power is transmitted between the driving assembly and the screw assembly through a synchronous belt, the support frame is fixed to the motor fixing frame, and the encoder is connected to the synchronous pulley through an encoder connecting shaft; the screw assembly includes a bearing seat, a screw nut sleeve installed on the bearing seat, a screw nut installed on the inner side of the screw nut sleeve with an interference fit, and a screw installed in the screw nut; the stepper motor of the lifting drive mechanism rotates, and the synchronous pulley installed on the stepper motor transmits power to the synchronous pulley of the screw assembly through a synchronous belt, the synchronous pulley, the screw nut sleeve and the screw nut rotate at the same time, and the rotation of the nut pushes the screw up and down, making the overall structure compact and easy to assemble and adjust; the screw nut can be used to rotate to drive the screw up or down; a synchronous belt is used for transmission between the stepper motor and the screw nut to reduce vibration and noise of the stepper motor.

[0016] Furthermore, angular contact ball bearings are installed at both ends of the screw nut sleeve, the angular contact ball bearings are installed on the bearing seat and fastened by the bearing cover, the synchronous pulley is installed on the outside of the screw nut sleeve, the lower end of the screw is connected to the Z-axis assembly through a nut, and a retaining ring is installed at the upper end of the screw.

[0017] Furthermore, the stepper motor of the lifting drive mechanism rotates, and the synchronous pulley installed on the stepper motor transmits power to the synchronous pulley of the screw assembly through the synchronous belt. The synchronous pulley, the screw nut sleeve, and the screw nut rotate at the same time, and the rotation of the nut pushes the screw up and down.

[0018] Furthermore, the encoder is used to monitor the rotation angle and speed of the stepper motor in real time to achieve precise control of the lifting position of the Z-axis component.

[0019] Furthermore, the motor mounting bracket is provided with an elongated mounting hole, and the support bracket is connected to the motor mounting bracket by screws passing through the elongated mounting hole. The tension of the synchronous belt is adjusted by adjusting the position of the screws in the elongated mounting hole.

[0020] More specifically, a stepped mounting hole is provided inside the bearing seat, the angular contact ball bearing is mounted in the stepped mounting hole, and is fastened to the end face of the bearing seat via a bearing gland to limit the axial displacement of the angular contact ball bearing.

[0021] More specifically, an interference fit is adopted between the lead screw nut and the lead screw nut sleeve, and the interference is 0.02-0.05mm to ensure that there is no relative rotation between the two.

[0022] More specifically, a flat key is used to connect the synchronous pulley and the lead screw nut sleeve to transmit torque and prevent relative sliding.

[0023] More specifically, the pitch accuracy of the lead screw is within ±0.02mm / m to ensure the lifting accuracy of the Z-axis assembly.

[0024] More specifically, the retaining ring is an elastic retaining ring installed in the annular groove at the upper end of the screw rod, and is used to limit the maximum rising position of the screw rod and prevent it from escaping from the screw rod nut.

[0025] Furthermore, the counterweight mechanism includes a left counterweight mechanism, a right counterweight mechanism and a rotating shaft connecting the left and right counterweight mechanisms, the left and right counterweight mechanisms are installed on the instrument frame, the protective cover is connected to the left and right rotating shaft seats of the left and right counterweight mechanisms, and is opened or closed by rotating along the rotating shaft; the protective cover counterweight mechanism includes a left (right) side support frame, a left (right) rotating shaft seat, the left (right) rotating shaft seat is fixed to the two ends of the rotating shaft passing through the ball support, the left (right) rotating shaft seat is connected to the screw connector that realizes a certain angle of rotation and upward movement through a rotating pin, the connecting block rod passes through the directional hole on the left (right) support frame and is connected to the upper end of the screw rod, the lower end of the screw rod is connected to the screw connector by a thread, the connecting block rod and the screw move along the directional hole on the left (right) support frame; the screw upper A spring seat, a nut, a mold spring, a convex retaining ring and a concave retaining ring are installed. The convex retaining ring is located at the upper end of the mold spring. The convex retaining ring and the concave retaining ring cooperate to serve as the upper support of the mold spring. A stop block is provided next to the left (right) rotating shaft seat, and the blocking bolt is installed on the left (right) support frame. The protective cover counterweight mechanism uses the elastic force of the mold spring to balance the gravity torque of the protective cover. The balancing force can be adjusted by adjusting the nut, so that the protective cover automatically opens to the maximum angle by relying on the elastic force of the mold spring after opening a certain angle, and reaches a closed state by relying on its own gravity after closing to a certain angle. The instrument protective cover counterweight mechanism counterweights the protective cover to reduce the operator's work intensity of opening the cover. The structure is simple and compact; it is easy to install and the structure is easy to adjust; it has high stability and long service life, which greatly reduces maintenance costs.

[0026] Furthermore, the directional hole on the left (right) side support frame is a long strip through hole, and its length direction is consistent with the movement direction of the connecting blocking rod and the screw rod.

[0027] Furthermore, the rotation pin is a stepped shaft structure, the large diameter end of which is fixed to the corresponding mounting component through hole-shaft interference fit, and the small diameter end is used to connect other components.

[0028] Furthermore, an annular groove is provided at one end of the spring seat close to the mold spring, and the lower end of the mold spring is embedded in the annular groove.

[0029] Furthermore, the convex retaining ring is fixedly connected to the left (right) support frame by bolts, and the inner ring of the concave retaining ring is provided with a step surface adapted to the outer ring of the convex retaining ring.

[0030] Furthermore, a side where the left (right) rotating shaft seat is connected to the protective cover is provided with anti-slip teeth, and the anti-slip teeth match the grooves on the surface of the protective cover.

[0031] Furthermore, one end of the screw connected to the screw connector is provided with a locking nut. Furthermore, the stopper is made of elastic material, and a buffer layer is provided on its surface.

[0032] Furthermore, the mold spring is a cylindrical helical compression spring, the material of which is chrome-vanadium alloy steel, and the surface is blackened.

[0033] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments with reference to the accompanying drawings, in which: Figure 1 It is a schematic diagram of the overall structure appearance of the present invention; Figure 2 It is a schematic diagram of the main components of the present invention; Figure 3 yes Figure 2 Schematic side view of Figure 4 It is an overall schematic diagram of the large-stroke counterweight structure; Figure 5 yes Figure 4 Schematic diagram of local section; Figure 6 This is a schematic diagram of the general assembly of the lifting drive mechanism; Figure 7 yes Figure 6 A partial cross-sectional diagram of ; Figure 8 yes Figure 6 Schematic diagram of the screw assembly; Figure 9 yes Figure 6 Schematic diagram of the drive components; Figure 10 This is a schematic diagram of the overall side direction of the protective cover counterweight mechanism; Figure 11 It is a schematic diagram of the counterweight mechanism of a single protective cover; Figure 12 is a cross-sectional schematic diagram of the protective cover counterweight mechanism; Figure 13 1 is a schematic diagram of a forward cross-section of the protective cover counterweight mechanism; Figure 14 It is a schematic diagram of the left-hand shaft seat of the protective cover counterweight mechanism; Figure 15 It is a multi-conducting capillary and X-ray tube mechanism; Figure 16 It is the detector assembly; Figure 17 It is a mobile platform organization; Among them, A-control panel B-safety protection device C-mobile platform mechanism D-instrument housing E- Top cover counterweight mechanism FZ axis counterweight mechanism G- Multi-conducting capillary and X-ray tube mechanism H- Panoramic camera mechanism I- Close-range camera J-Button rocker assembly K-Lifting drive mechanism M-Detector assembly F1 - Mechanism bracket F2 - Third turning pin F3 - Connector F4 - Screw F5 - Nut F6 - Spring seat F7 - Die spring F8 - Convex retaining ring F9 - Concave retaining ring F10 - Connecting stopper F11 - First turning pin F12 - Short arm F13 - Second turning pin F14 - Fixed foot F15 - Long arm F16 - Guide pin F17 - Fixed turning pin K1 - Stepper motor K2 - Motor fixing bracket K3 - Synchronous pulley K4 - Encoder connecting shaft K5 - Encoder K6 - Synchronous belt K7 - Bearing seat K8 - Screw K9 - Retaining ring K10 - Bearing cover K11 - Angular contact ball bearing K12 - Screw nut K13 - Synchronous pulley K14 - Screw nut sleeve K15 - Nut K16 - Support bracket Ea - Left counterweight mechanism Eb - Right counterweight mechanism Ec - Rotating shaft E1 - Left support frame E2 - Connecting stop rod E3 - Blocking bolt E4 - Screw connector E5 - Photoelectric switch mounting plate E6 - Left rotating shaft seat E7 - Stop block E8 - Concave retaining ring E9 - Convex retaining ring E10 - Mold spring E11 - Screw E12 - Spring seat E13 - Rotating pin E14 - Ball support E15 - Nut E16 - Photoelectric switch E17 - Open cover light shield. DETAILED DESCRIPTION

[0035] The following describes embodiments of the present invention in detail, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0036] In the description of the present invention, it should be understood that the terms "upper", "lower", "bottom", "top", "front", "back", "inside", "outside", "horizontal", "vertical", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0037] In the description of the present invention, it should be noted that, unless otherwise clearly stipulated and limited, the terms "connection", "communication", "connected", "connection" and "fitting" should be understood in a broad sense. For example, it can be a fixed connection, an integral connection, or a detachable connection; it can be the internal communication of two elements; it can be directly connected or indirectly connected through an intermediate medium; "fitting" can be the fit between surfaces, or the fit between points and surfaces or lines and surfaces, and also includes the fit between holes and axes. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0038] According to an embodiment of the present invention, as shown in the figure, it includes a base, a movable platform mechanism mounted on the base, a lifting system mounted on the base, an optical path assembly mounted on the lifting system, and a frame member for protecting against X-rays, wherein the frame member includes a protective cover with a counterweight mechanism; the movable platform mechanism includes three-dimensional movable components in X, Y, and Y1 directions, wherein the X and Y directions form a planar movable component in the X and Y directions, and the Y1 direction forms a movable component based on the planar movable component and in the same direction as the Y direction; the lifting system is a lifting system in the Z direction and is further connected to a long-stroke counterweight mechanism; the optical path assembly includes an X-ray generator, a filter and an optical shutter switching device mounted below the X-ray generator, a multi-conducting capillary for focusing the X-rays, and a mechanism for adjusting the position of the multi-conducting capillary; the optical path assembly also includes a dual-camera mechanism, which includes a near-view camera and a far-view camera.

[0039] According to some embodiments of the present invention, the multi-capillary instrument for measuring the thickness of electroplating layers with a counterweight mechanism further includes a joystick for controlling the movement of the mobile platform mechanism, a button for controlling the lifting system, and an indicator light for displaying the instrument status.

[0040] According to some embodiments of the present invention, the large-stroke counterweight mechanism includes a mechanism bracket F1 and a long arm rod F15 connected to the mechanism bracket F1 through a fixed swivel pin F17, the long arm rod F15 is connected to the short arm rod F12 through a first swivel pin F11, the short arm rod F12 is connected to the fixed foot F14 through a second swivel pin F13, and the fixed foot F14 is fixed on the Z-axis component that needs counterweight; the connecting head F3 is connected to the long arm rod F15 through a third swivel pin F2, one end of the screw rod F4 is fixed on the connecting head F3, and the other end of the screw rod F4 is connected to the connecting block rod F10 passing through the directional hole of the mechanism bracket F1, the connecting block rod F10 and the screw rod F4 are constrained by the directional hole on the mechanism bracket F1; a nut F5, a spring seat F6, and a mold spring F7 are sequentially installed on the screw rod F4, and the mold spring F7 The upper end of the mold is provided with a convex retaining ring F8, which cooperates with the concave retaining ring F9 to serve as a fixed side support for the mold spring F7.

[0041] Specific process: When the fixed foot F14 moves downward with the Z-axis assembly, the short arm F12 connected to the fixed foot F14 through the swivel pin F13 also moves downward, and the long arm F15 connected to the short arm F12 through the swivel pin F11 is driven to rotate along the fixed swivel pin F17. The long arm F15 rotates along the fixed swivel pin F17 to drive the connector F3 and the screw F4 to move left along the directional hole on the mechanism bracket F1. The spring seat F6 installed on the screw F4 compresses the mold spring F7 under the push of the nut F5. The upper end of the mold spring F7 is equipped with a convex retaining ring F8. The convex retaining ring F8 and the concave retaining ring F9 cooperate as the fixed side support of the mold spring F7, and the compression force of the mold spring F7 is used to balance the gravity of the Z-axis assembly; when the fixed foot F14 moves upward with the Z-axis assembly, the convex retaining ring F8 and the concave retaining ring F9 are connected to the fixed foot F14 through the swivel pin F13. The connected short arm F12 also moves upward, driving the long arm F15, connected to it via the swing pin F11, to rotate along the fixed swing pin F17. This rotation of the long arm F15 along the fixed swing pin F17 drives the connector F3 and screw F4 to the right along the directional hole in the mechanism bracket F1. The compressed mold spring F7 pushes the spring seat F6, screw F4, and connecting stopper F10 mounted on screw F4 to the right, using the compression force of the mold spring F7 to balance the weight of the Z-axis assembly. The protective cover counterweight mechanism uses the mold spring force to balance the protective cover's weight torque. The adjustment nut F5 adjusts the balancing force, thereby providing a balanced assist for the Z-axis assembly's ascent and descent. The fixed swing pin F17, first swing pin F11, second swing pin F13, and third swing pin F2 all feature stepped shaft structures. Their larger diameter ends are secured to their corresponding mounting components via an interference fit, while their smaller diameter ends are used for connection to other components.

[0042] Furthermore, the directional hole on the mechanism bracket for limiting the movement of the connecting rod F10 and the screw F4 only along the length direction is a long strip through hole, the length direction of which is consistent with the movement direction of the connecting rod F10 and the screw F4, and is used to limit the connecting rod F10 and the screw F4 to move left and right only along the direction of the directional hole.

[0043] Furthermore, an annular groove is provided at one end of the spring seat F6 close to the mold spring F7, and the lower end of the mold spring F7 is embedded in the annular groove to prevent the mold spring F7 from deflecting during compression and release.

[0044] Furthermore, the convex retaining ring F8 is fixedly connected to the mechanism bracket F1 by bolts, and the inner ring of the concave retaining ring F9 is provided with a step surface adapted to the outer ring of the convex retaining ring F8, and the two cooperate to form a limiting structure for the upper end of the mold spring F7.

[0045] Furthermore, the length of the long arm F15 is greater than that of the short arm F12, and the ratio of the lengths thereof is 3:1 to 5:1, so as to amplify the small stroke of the mold spring F7 into a large stroke counterweight of the Z-axis assembly.

[0046] Furthermore, the side of the fixed foot F14 connected to the Z-axis assembly is provided with anti-slip teeth, which cooperate with the grooves on the surface of the Z-axis assembly to enhance the stability of the connection between the fixed foot F14 and the Z-axis assembly.

[0047] Furthermore, a locking nut is provided at one end of the screw rod F4 connected to the connector F3, and the locking nut is used to prevent the screw rod F4 from loosening and falling off from the connector F3 during long-term use.

[0048] According to some embodiments of the present invention, the lifting mechanism includes a drive assembly and a screw assembly, the drive assembly includes a stepper motor K1 installed on a support frame K16 and providing power, a synchronous pulley K3 installed on the output shaft of the stepper motor K1, power is transmitted between the drive assembly and the screw assembly through a synchronous belt K6, the support frame K16 is fixed on the motor fixing frame K2, and the encoder K5 is connected to the synchronous pulley K3 through the encoder connecting shaft K4; the screw assembly includes a bearing seat K7, a screw nut sleeve K14 installed on the bearing seat K7, and an interference fit is installed on the screw nut sleeve K14 The inner lead screw nut K12 and the lead screw installed in the lead screw nut; the stepper motor of the lifting drive mechanism rotates, and the synchronous pulley installed on the stepper motor transmits power to the synchronous pulley of the lead screw assembly through the synchronous belt, and the synchronous pulley and the lead screw nut sleeve lead screw nut rotate at the same time, and the rotation of the nut pushes the lead screw up and down, making the overall structure compact and easy to assemble and adjust; the lead screw can be driven up or down by rotating the lead screw nut; a synchronous belt is used between the stepper motor and the lead screw nut to reduce the vibration and noise of the stepper motor.

[0049] Furthermore, angular contact ball bearings K11 are installed at both ends of the screw nut sleeve K14, and the angular contact ball bearings K11 are installed on the bearing seat K7 and fastened by the bearing cover K10. The synchronous pulley K13 is installed on the outside of the screw nut sleeve K14, and the lower end of the screw K8 is connected to the Z-axis assembly through the nut K15. The upper end of the screw K8 is installed with a retaining ring K9.

[0050] Furthermore, the stepper motor of the lifting drive mechanism rotates, and the synchronous pulley installed on the stepper motor transmits power to the synchronous pulley of the screw assembly through the synchronous belt. The synchronous pulley, the screw nut sleeve, and the screw nut rotate at the same time, and the rotation of the nut pushes the screw up and down.

[0051] Furthermore, the encoder is used to monitor the rotation angle and speed of the stepper motor in real time to achieve precise control of the lifting position of the Z-axis component.

[0052] Furthermore, a long strip mounting hole is provided on the motor mounting bracket, and the support bracket is connected to the motor mounting bracket by screws passing through the long strip mounting hole. The tension of the synchronous belt is adjusted by adjusting the position of the screws in the long strip mounting hole.

[0053] Specifically, a stepped mounting hole is provided inside the bearing seat, the angular contact ball bearing is mounted in the stepped mounting hole, and is fastened to the end face of the bearing seat through a bearing gland to limit the axial displacement of the angular contact ball bearing.

[0054] Specifically, an interference fit is adopted between the screw nut and the screw nut sleeve, and the interference is 0.02-0.05mm to ensure that there is no relative rotation between the two.

[0055] Specifically, a flat key is used to connect the synchronous pulley and the screw nut sleeve to transmit torque and prevent relative sliding.

[0056] Specifically, the pitch accuracy of the lead screw is within ±0.02mm / m to ensure the lifting accuracy of the Z-axis assembly.

[0057] Specifically, the retaining ring is an elastic retaining ring installed in the annular groove at the upper end of the screw rod, and is used to limit the maximum rising position of the screw rod and prevent it from escaping from the screw rod nut.

[0058] According to some embodiments of the present invention, the counterweight mechanism includes a left counterweight mechanism Ea, a right counterweight mechanism Eb and a rotating shaft Ec connecting the left and right counterweight mechanisms, the left and right counterweight mechanisms are installed on the instrument frame, the protective cover is connected to the left and right rotating shaft seats of the left and right counterweight mechanisms, and is opened or closed by rotating along the rotating shaft; the protective cover counterweight mechanism includes a left (right) side support frame, a left (right) rotating shaft seat, the left (right) rotating shaft seat is fixed to the two ends of the rotating shaft passing through the ball support, the left (right) rotating shaft seat is connected to the screw connector that realizes a certain angle of rotation and upward movement through a rotating pin, the connecting baffle rod passes through the directional hole on the left (right) support frame and is connected to the upper end of the screw, the lower end of the screw is connected to the screw connector by a thread, the connecting baffle rod and the screw move along the directional hole on the left (right) support frame; a spring seat, a nut, and a mold are installed on the screw. Spring, convex retaining ring and concave retaining ring, the convex retaining ring is located at the upper end of the mold spring, the convex retaining ring and the concave retaining ring cooperate as the upper support of the mold spring, a stop block is provided next to the left (right) rotating shaft seat, and the blocking bolt is installed on the left (right) support frame. The protective cover counterweight mechanism uses the elastic force of the mold spring to balance the gravity torque of the protective cover. The adjusting nut can adjust the size of the balancing force, so that the protective cover can automatically open to the maximum angle by relying on the elastic force of the mold spring after opening a certain angle, and reach the closed state by relying on its own gravity after closing to a certain angle. The instrument protective cover counterweight mechanism counterweights the protective cover to reduce the operator's work intensity of opening the cover. The structure is simple and compact; it is easy to install and the structure is easy to adjust; it has high stability and long service life, which greatly reduces maintenance costs.

[0059] Furthermore, the directional hole on the left (right) side support frame is a long strip through hole, and its length direction is consistent with the movement direction of the connecting blocking rod and the screw rod.

[0060] Furthermore, the rotation pin is a stepped shaft structure, the large diameter end of which is fixed to the corresponding mounting component through hole-shaft interference fit, and the small diameter end is used to connect other components. Furthermore, an annular groove is provided at one end of the spring seat close to the mold spring, and the lower end of the mold spring is embedded in the annular groove. Furthermore, the convex retaining ring is fixedly connected to the left (right) side support frame by bolts, and the inner ring of the concave retaining ring is provided with a step surface adapted to the outer ring of the convex retaining ring. Furthermore, a side where the left (right) rotating shaft seat is connected to the protective cover is provided with anti-slip teeth, and the anti-slip teeth cooperate with the grooves on the surface of the protective cover. Furthermore, one end of the screw connected to the screw connector is provided with a locking nut. Furthermore, the stopper is made of elastic material, and a buffer layer is provided on its surface. Furthermore, the mold spring is a cylindrical helical compression spring, the material of which is chrome-vanadium alloy steel, and the surface is blackened.

[0061] Any reference to "one embodiment," "an embodiment," "an exemplary embodiment," etc., means that a particular component, structure, or feature described in connection with that embodiment is included in at least one embodiment of the present invention. Such exemplary expressions throughout this specification do not necessarily refer to the same embodiment. Moreover, when a particular component, structure, or feature is described in connection with any embodiment, it is intended that implementation of such component, structure, or feature in connection with other embodiments is within the scope of those skilled in the art.

[0062] Although specific embodiments of the present invention have been described in detail with reference to a number of illustrative embodiments thereof, it should be understood that a variety of other modifications and embodiments may be devised by those skilled in the art that fall within the spirit and scope of the principles of the present invention. Specifically, within the scope of the foregoing disclosure, the accompanying drawings, and the claims, reasonable variations and improvements may be made in the arrangement of components and / or dependent combinations without departing from the spirit of the present invention. Except for variations and improvements in components and / or arrangement, the scope thereof is defined by the appended claims and their equivalents.

Claims

1. An instrument for measuring the thickness of electroplating layers using a multi-conducting capillary tube with a counterweight mechanism, characterized in that: include: A base, a mobile platform mechanism mounted on the base, a lifting system mounted on the base, an optical path component mounted on the lifting system, and a frame member for protecting against X-rays, the frame member including a protective cover with a counterweight mechanism; The mobile platform mechanism includes three-way moving parts of X, Y and Y1, wherein the X and Y form a plane moving assembly in the X and Y axes, and the Y1 forms a moving part based on the plane moving assembly and in the same direction as the Y axis; The lifting system is a lifting system in the Z-axis direction, and the lifting system is also connected to a large-stroke counterweight mechanism; The optical path assembly includes an X-ray generating device, a filter and a shutter switching device installed below the X-ray generating device, a multi-conducting capillary for focusing the X-rays, and a mechanism for adjusting the position of the multi-conducting capillary; the optical path assembly also includes a dual-camera mechanism, which includes a near-view camera and a long-view camera.

2. The multi-capillary instrument for measuring the thickness of electroplating layer with a counterweight mechanism according to claim 1, characterized in that: The multi-conductor capillary instrument for measuring the thickness of electroplating layers with a counterweight mechanism further comprises a rocker for controlling the movement of the mobile platform mechanism, a button for controlling the lifting system, and an indicator light for displaying the status of the instrument.

3. The multi-capillary instrument for measuring the thickness of electroplating layer with a counterweight mechanism according to claim 1, characterized in that: The large-stroke counterweight mechanism includes a mechanism bracket and a long arm rod connected to the mechanism bracket through a fixed swivel pin, the long arm rod is connected to the short arm rod through a first swivel pin, the short arm rod is connected to the fixed foot through a second swivel pin, and the fixed foot is fixed on the Z-axis assembly that needs counterweight; the connecting head is connected to the long arm rod through a third swivel pin, one end of the screw is fixed on the connecting head, and the other end of the screw is connected to the connecting baffle rod passing through the directional hole of the mechanism bracket, and the connecting baffle rod and the screw are constrained by the directional hole on the mechanism bracket; a nut, a spring seat, and a mold spring are sequentially installed on the screw, and a convex retaining ring is installed on the upper end of the mold spring, and the convex retaining ring and the concave retaining ring cooperate to serve as a fixed side support for the mold spring.

4. The multi-capillary instrument for measuring the thickness of electroplated layers with a counterweight mechanism according to claim 3, characterized in that: The directional hole on the mechanism bracket for limiting the movement of the connecting blocking rod and the screw rod only along the length direction is a long strip through hole, and the length direction is consistent with the movement direction of the connecting blocking rod and the screw rod.

5. The multi-capillary instrument for measuring the thickness of electroplating layer with a counterweight mechanism according to claim 3, characterized in that: An annular groove is provided at one end of the spring seat close to the mold spring, and the lower end of the mold spring is embedded in the annular groove.

6. The multi-capillary instrument for measuring the thickness of electroplating layer with a counterweight mechanism according to claim 3, characterized in that: The convex retaining ring is fixedly connected to the mechanism bracket by bolts, and the inner ring of the concave retaining ring is provided with a step surface adapted to the outer ring of the convex retaining ring, and the two cooperate to form a limiting structure for the upper end of the mold spring.

7. The multi-capillary electroplating thickness measuring instrument with a counterweight mechanism according to claim 1, characterized in that: The lifting mechanism includes a drive assembly and a screw assembly. The drive assembly includes a stepper motor installed on a support frame to provide power, a synchronous pulley installed on the output shaft of the stepper motor, and power is transmitted between the drive assembly and the screw assembly through a synchronous belt. The support frame is fixed on the motor fixing frame, and the encoder is connected to the synchronous pulley through an encoder connecting shaft; the screw assembly includes a bearing seat, a screw nut sleeve installed on the bearing seat, a screw nut installed on the inner side of the screw nut sleeve with an interference fit, and a screw installed in the screw nut.

8. The multi-capillary instrument for measuring the thickness of electroplating layers with a counterweight mechanism according to claim 7, characterized in that: Angular contact ball bearings are installed at both ends of the screw nut sleeve, and the angular contact ball bearings are installed on the bearing seat and fastened by the bearing cover. The synchronous pulley is installed on the outside of the screw nut sleeve. The lower end of the screw is connected to the Z-axis assembly through a nut, and a retaining ring is installed at the upper end of the screw.

9. The multi-capillary instrument for measuring the thickness of electroplating layer with a counterweight mechanism according to claim 1, characterized in that: The counterweight mechanism includes a left counterweight mechanism, a right counterweight mechanism and a rotating shaft connecting the left and right counterweight mechanisms. The left and right counterweight mechanisms are installed on the instrument frame. The protective cover is connected to the left and right rotating shaft seats of the left and right counterweight mechanisms and is opened or closed by rotating along the rotating shaft; the protective cover counterweight mechanism includes a left / right support frame and a left / right rotating shaft seat. The left / right rotating shaft seat is fixed to the two ends of the rotating shaft passing through the ball support. The left / right rotating shaft seat is connected to the screw connector that realizes a certain angle of rotation and upward movement through a rotating pin, and the connecting rod passes through The directional hole on the left / right support frame is connected to the upper end of the screw, and the lower end of the screw is connected to the screw connecting head through a thread, and the connecting stop rod and the screw move along the directional hole on the left / right support frame; a spring seat, a nut, a mold spring, a convex retaining ring and a concave retaining ring are installed on the screw, the convex retaining ring is located at the upper end of the mold spring, and the convex retaining ring and the concave retaining ring cooperate as the upper support of the mold spring, a stop block is provided next to the left / right rotating shaft seat, and a blocking bolt is installed on the left / right support frame.

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