High-precision grinding machine
The symmetrical arrangement of the hydrostatic slider and guide rail design, combined with the marble base and wear-resistant layer, solves the problem of inconsistent oil film pressure on the hydrostatic slider of the grinder, achieving high-precision and stable grinding.
Patent Information
- Application Number
- CN202510906264.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-02
- Publication Date
- 2025-09-19
AI Technical Summary
The consistency of the oil film pressure of the hydrostatic slider of the existing grinder is difficult to control, resulting in low machining accuracy, and the rigidity of the hydrostatic slider and hydrostatic guide rail affects the accuracy of the grinder.
The symmetrically arranged left and right hydrostatic sliders are used, and the design of the main channel and side oil pressure control area achieves high consistency of oil pressure. Marble material is used on the base to reduce deformation, and the wear-resistant layer is combined to improve the wear resistance of the guide rail.
The grinding machine's machining accuracy and operating stability are improved, energy consumption is reduced, and the output power of the hydraulic oil tank is reduced through a design with less overflow.
Smart Images

Figure CN120663213A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of machine tools, in particular to a high-precision grinding machine. Background Art
[0002] With the development of industrialization, the requirements for the processing accuracy of grinding machines are getting higher and higher. Therefore, the slide rail structure of the grinding machine has been upgraded from the original hard contact slide rail to a hydrostatic guide rail controlled by the pressure of the pressure oil film. The hydrostatic guide rail is widely used in precision machine tools because of its low friction and good vibration resistance of the pressure oil film during movement. However, the existing grinding machine assembly structure adopts a multiple hydrostatic slider arrangement on both sides of the slide, and the oil pressure of each hydrostatic slider is independently controlled. Therefore, it is difficult to ensure high consistency. For example, the Chinese patent application number is 2022101930816, and the patent name is Hydrostatic Sliders and Hydrostatic Guides, which is an assembly structure of multiple sliders. In addition, the rigidity of the hydrostatic sliders and hydrostatic guides is also an important factor affecting the accuracy of the grinding machine. How to ensure that the hydrostatic sliders and hydrostatic guides do not deform under high pressure is also one of the technical problems that the industry needs to solve. Summary of the Invention
[0003] The purpose of the present invention is to provide a high-precision grinding machine to solve the problem that the existing grinding machine adopts a multi-stage independently controlled static pressure slide, the oil film pressure consistency is difficult to control, and the grinding machine has low processing accuracy.
[0004] The technical solution adopted by the present invention to solve its technical problems is: a high-precision grinding machine, including a base, a slide assembly that can move back and forth on the base, a left static pressure slider and a right static pressure slider are fixedly installed on both sides of the slide assembly, and a left guide rail that cooperates with the left static pressure slider and a right guide rail that cooperates with the right static pressure slider are provided on the base; a group of upper oil pressure control areas and lower oil pressure control areas are provided on the left static pressure slider and the right static pressure slider along the moving direction of the slide assembly, and the upper oil pressure control areas and the lower oil pressure control areas are connected to the base A layer of pressure oil film is formed between the two parts; a group of side oil pressure control areas are respectively provided on the left side surface or the right side surface of the left static pressure slider and the right side surface or the left side surface along the moving direction of the slide assembly, and a layer of pressure oil film is formed between the side oil pressure control area and the base; the left static pressure slider and the right static pressure slider are symmetrically arranged on both sides of the slide assembly; all the upper oil pressure control areas and the lower oil pressure control areas on the left static pressure slider and the right static pressure slider are interconnected, and all the side oil pressure control areas on the left static pressure slider and the right static pressure slider are interconnected.
[0005] In order to reduce the heat generated during the grinding process, which may cause the base to deform and affect the stability and accuracy of the slide assembly, the base is made of marble with a density of 3000KG / M 3 , elastic modulus is 70GPa, linear expansion coefficient is 4.61*10 -6 / °C; the inner walls of the left guide rail and the right guide rail are coated with a wear-resistant layer.
[0006] In order to reduce the overflow of pressure oil, under the action of oil pressure, the gap between the upper and lower surfaces of the left and right hydrostatic sliders and the left guide rail and the right guide rail is 0.02mm, and the gap between the side of the left and right hydrostatic sliders with the side oil pressure control area and the left guide rail and the right guide rail is 0.02mm.
[0007] In order to form internal oil pressure in the upper oil pressure control area and the lower oil pressure control area and reduce the overflow loss of the pressure oil, the upper oil pressure control area includes an upper sinking platform, in which a row of upper oil holes and a main oil inlet hole are arranged; the lower oil pressure control area includes a lower sinking platform, in which a row of lower oil holes are arranged; the upper oil holes and the lower oil holes correspond to each other one by one and are connected.
[0008] Preferably, the communicating upper oil delivery hole and lower oil delivery hole are not on the same straight line.
[0009] In order to ensure the pressure consistency on the left and right sides of the slide assembly, the side oil pressure control area includes a side sinking platform, and a group of side oil holes and a side oil inlet hole are provided in the side sinking platform. The bottom of the side oil hole is connected to an oil outlet channel, and a connecting pipeline is provided between the oil outlet channels of the left static pressure slider and the right static pressure slider.
[0010] In order to ensure the high consistency of oil pressure in the upper oil pressure control area, the lower oil pressure control area and the side oil pressure control area, main channels are provided in the left static pressure slider and the right static pressure slider, an upper oil inlet channel is provided between the main channel and the main oil inlet hole, and a side oil inlet channel is provided between the main channel and the side oil inlet hole.
[0011] In order to ensure the consistency of pressure of multiple left static pressure sliders and right static pressure sliders, the main channel is a through hole arranged along the length direction of the left static pressure slider or the right static pressure slider, and connecting structures are provided at both ends of the main channel. When multiple left static pressure sliders or right static pressure sliders need to be arranged, a main channel connecting pipeline is provided between the main channels of the two adjacent left static pressure sliders or right static pressure sliders.
[0012] In order to facilitate accurate adjustment of the oil pressure of each oil delivery hole, adjusting bolts for adjusting the oil output and oil output pressure are provided in the upper oil delivery hole and the side oil delivery hole.
[0013] In order to monitor the oil pressure in the left and right sliders in real time, pressure sensors are provided at the ends of the main channels of the left and right static pressure sliders, and pressure sensors are also provided at the ends of the oil outlet channels.
[0014] Beneficial effects of the present invention: The present invention maintains a high degree of consistency in the oil pressure exerted on the base by the left and right sliders through the design of the hydrostatic slider structure and the change of the connection relationship. At the same time, the base is made of marble material and a wear-resistant layer is provided in the guide rail, so that the guide rail has a small deformation under the action of oil pressure and oil temperature. Therefore, under the combined effect of maintaining small pressure fluctuations and small deformation of the base, the slide assembly of the present invention can run smoothly and significantly improve the processing accuracy of the grinder. In addition, the left hydrostatic slider, the right hydrostatic slider cooperate with the left guide rail and the right guide rail, and a side oil pressure control area is provided on one side of the left hydrostatic slider and the right hydrostatic slider to apply pressure to one side of the left guide rail and the right guide rail. At the same time, the oil outlet pipelines on the left and right hydrostatic sliders are connected in combination with the oil outlet pipeline, so that the oil pressures in the side oil pressure control areas of the left and right hydrostatic sliders complement each other and remain consistent, thereby ensuring the stability of the pressure on both sides of the slide assembly. Compared with the existing structure in which side oil pressure control areas are set on both sides of the hydrostatic slider to apply pressure on both sides of the left and right guide rails, this structure can overcome the errors caused by the machining accuracy of the guide rails. Even if there are certain errors in the machining accuracy of the guide rails, it will not affect the balance of the left and right forces of the slide assembly. The hydrostatic slider flow channel design of the present invention enables the pressure of each oil delivery hole to be highly consistent. At the same time, the main oil inlet hole and the upper oil delivery hole of the upper oil pressure control area are both set in the upper sinking platform. Combined with the matching clearance between the hydrostatic slider and the guide rail, after the pressure oil enters the upper sinking platform from the upper oil delivery hole, the amount of oil overflowing from the matching clearance between the hydrostatic slider and the guide rail is small. The pressure oil is pressed into the lower sinking platform through the upper oil delivery hole, so that the upper oil pressure control area and the lower oil pressure control area maintain a constant and consistent pressure output on the upper and lower surfaces of the guide rails. Due to the small overflow volume, this structure can play a role in boosting, which can effectively reduce the oil inlet pressure of the main channel, thereby reducing the output power of the hydraulic oil tank and reducing energy consumption. The side oil pressure control area uses a similar structure to the upper oil pressure control area and a pressure-compensating mechanism for the left and right static pressure sliders. This reduces overflow and ensures pressure consistency on both sides. The present invention utilizes a structure where adjusting bolts are installed on the upper and side oil ports, allowing for fine-tuning of oil pressure. This structure offers excellent versatility and simple and convenient adjustment.
[0015] The present invention will be described in more detail below with reference to the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 Schematic diagram of the three-dimensional structure of the left static pressure slider or the right static pressure slider in the present invention Figure 1 .
[0017] Figure 2 Schematic diagram of the three-dimensional structure of the left static pressure slider or the right static pressure slider in the present invention Figure 2 .
[0018] Figure 3 It is a top view of the left static pressure slider or the right static pressure slider in the present invention.
[0019] Figure 4 for Figure 3 Cross-sectional view of AA in the figure.
[0020] Figure 5 for Figure 3 Cross-sectional view of the BB.
[0021] Figure 6 It is a left view of the left static pressure slider or the right static pressure slider in the present invention.
[0022] Figure 7 for Figure 6 Cross-sectional view of CC.
[0023] Figure 8 It is a side view of the left static pressure slider or the right static pressure slider in the present invention.
[0024] Figure 9 for Figure 8 Cross-sectional view of DD.
[0025] Figure 10 This is an exploded view of the present invention.
[0026] Figure 11 It is a cross-sectional view of the present invention.
[0027] Figure 12 for Figure 11 A partial enlarged view of middle A.
[0028] Figure 13 Schematic diagram of the flow direction of the hydraulic oil in the present invention.
[0029] Figure 14 It is a schematic diagram of the three-dimensional structure of the adjusting bolt in the present invention. DETAILED DESCRIPTION
[0030] Examples, such as Figures 1 to 14 As shown, a high-precision grinding machine includes a base 1, a slide assembly 2 that can move back and forth on the base 1, a left hydrostatic slider 3 and a right hydrostatic slider 4 are fixedly installed on both sides of the slide assembly 2, and a left guide rail 5 that cooperates with the left hydrostatic slider 3 and a right guide rail 6 that cooperates with the right hydrostatic slider 4 are provided on the base 1. The left and right hydrostatic sliders move back and forth in the guide rails, driving the slide assembly 2 to make a linear reciprocating motion along the guide rails.
[0031] In order to ensure the operation accuracy, it is necessary that each point of the left hydrostatic slider 3 and the right hydrostatic slider 4 apply the same force to the base 1. And the force exerted by the left hydrostatic slider 3 and the right hydrostatic slider 4 on the base 1 remains the same. In the prior art, multiple left hydrostatic sliders 3 and multiple right hydrostatic sliders 4 are independently controlled and oiled. Therefore, the fluctuation error is large, resulting in poor stability of the base movement, easy to swing left and right and jump up and down, causing processing errors in the workpiece and affecting the processing accuracy of the grinder. To this end, the present invention has modified and adjusted the connection method of the existing hydrostatic slider, guide rail and hydrostatic slider, and the matching relationship between the hydrostatic slider and the guide rail, so as to achieve high-precision operation.
[0032] First, the present invention increases the length of the hydrostatic slider and adjusts the design of the oil passages and oil pressure control areas to ensure consistent oil pressure across all oil pressure control areas. Furthermore, if multiple hydrostatic sliders are used, they are connected in series on the same side to ensure high consistency in oil pressure and reduce fluctuations.
[0033] The specific design structure is as follows: Main flow channels 10 are provided within each of the left and right hydrostatic sliders 3 and 4. These channels 10 are through-holes extending along the length of the left and right hydrostatic sliders 3 and 4, and are provided at both ends with connection structures, such as internally threaded holes or quick connectors. When the slide assembly 2 is shorter, a configuration with one left hydrostatic slider 3 and one right hydrostatic slider 4 can be employed. In this case, one end of each hydrostatic slider 3 and one right hydrostatic slider 4 serves as the oil inlet, while the other end is blocked by a plug 14, allowing hydraulic oil to exit through the upper and side oil inlet channels 74 and 94. When the slide assembly 2 is too long and multiple left hydrostatic sliders 3 and right hydrostatic sliders 4 are required, the main channels 10 of two adjacent left hydrostatic sliders 3 or right hydrostatic sliders 4 are connected by a main channel connecting pipe 13. The hydraulic oil flows from the oil inlet of the frontmost hydrostatic slider along the main channel 10 through the main channel connecting pipe 13 to the main channel 10 of the last hydrostatic slider. A plug 14 is provided at the end of the main channel 10 of the last hydrostatic slider to block the end of the main channel 10, so that the hydraulic oil flows out from the upper oil inlet channel 74 and the side oil inlet channel 94. The main channel connecting pipe 13 is used to connect multiple left hydrostatic sliders 3 or right hydrostatic sliders 4 in series, thereby ensuring the consistency of the oil supply pressure of all left hydrostatic sliders 3 or right hydrostatic sliders 4.
[0034] One end of the main flow channel 10 of the left static pressure slider 3 is connected to a left main oil inlet pipe 15, and one end of the main flow channel 10 of the right static pressure slider 4 is connected to a right main oil inlet pipe 16. Pressure sensors 12 and oil pressure regulating valves 17 are provided to monitor the left and right main oil inlet pipes 15, 16. The pressures of the left and right main oil inlet pipes 15, 16 are sensed by the pressure sensors 12 and adjusted in real time by the oil pressure regulating valves 17. One end of the left and right main oil inlet pipes 15, 16 is connected to a main oil inlet pipe 20, which is connected to a hydraulic oil tank 19.
[0035] The left static pressure slider 3 and the right static pressure slider 4 are both provided with a set of upper oil pressure control area 7 and lower oil pressure control area 8 along the moving direction of the slide assembly 2. Figure 1 As shown, there are three upper oil pressure control areas 7 spaced apart, and three corresponding lower oil pressure control areas 8 are also provided. The upper oil pressure control area 7 includes an upper sink 71, in which a row of upper oil delivery holes 72 and a main oil inlet hole 73 are provided. The main oil inlet hole 73 is connected to an upper oil inlet channel 74, which is connected to the main channel 10. Figure 5 The hydraulic oil enters the upper oil inlet channel 74 from the main flow channel 10 , and then exits from the main oil inlet hole 73 and enters the upper sinking platform 71 .
[0036] The lower oil pressure control area 8 includes a sinking platform 81, and a row of lower oil holes 82 are arranged in the sinking platform 81. The upper oil holes 72 and the lower oil holes 82 correspond to each other and are connected. The hydraulic oil enters from the upper oil hole 72 and exits from the lower oil hole 82, so that the hydraulic oil enters the sinking platform 81. In order to form a local reflux, reduce the flow rate of the hydraulic oil between the upper oil hole 72 and the lower oil hole 82, and maintain a stable pressure, the upper oil hole 72 and the lower oil hole 82 that are connected are not on the same straight line, but are staggered. In order to detect the pressure of the hydraulic oil, a pressure sensor mounting hole 821 is provided in the lower oil hole 82, and a pressure sensor 12 is installed on the pressure sensor mounting hole 821 for detecting the oil pressure of the upper and lower oil pressure control areas. As shown Figure 4 shown.
[0037] The thickness of the left hydrostatic slider 3 and the right hydrostatic slider 4 is smaller than that of the left guide rail 5 and the right guide rail 6. When the left hydrostatic slider 3 and the right hydrostatic slider 4 are assembled into the left guide rail 5 and the right guide rail 6, under the action of hydraulic oil, the left hydrostatic slider 3 and the right hydrostatic slider 4 are suspended in the left guide rail 5 and the right guide rail 6. A layer of pressure oil film is formed between the upper oil pressure control area 7 and the lower oil pressure control area 8 of the left hydrostatic slider 3 or the right hydrostatic slider 4 and the upper and lower surfaces of the left guide rail 5 or the right guide rail 6. Under the action of oil pressure, the gap between the upper and lower surfaces of the left hydrostatic slider 3 and the right hydrostatic slider 4 and the upper and lower surfaces of the left guide rail 5 and the right guide rail 6 is approximately 0.02 mm. After the hydraulic oil enters the upper sinking platform 71, part of it enters the lower sinking platform 81 through the upper oil delivery hole 72 and the lower oil delivery hole 82, and the other part enters the gap between the left hydrostatic slider 3 and the right hydrostatic slider 4 and the upper surfaces of the left guide rail 5 and the right guide rail 6, forming a pressure oil film; after the hydraulic oil enters the lower sinking platform 81, it overflows into the gap between the left hydrostatic slider 3 and the right hydrostatic slider 4 and the lower surfaces of the left guide rail 5 and the right guide rail 6, forming a pressure oil film; the gap between the upper and lower surfaces of the left hydrostatic slider 3 and the right hydrostatic slider 4 and the upper and lower surfaces of the left guide rail 5 and the right guide rail 6 is kept constant by the oil pressure between the upper oil pressure control area 7 and the lower oil pressure control area 8 and the upper and lower surfaces of the left guide rail 5 and the right guide rail 6. The hydraulic oil overflowing from the gap between the upper and lower surfaces of the left and right hydrostatic sliders 3 and 4 and the upper and lower surfaces of the left and right guide rails 5 and 6 falls into the oil collecting tank 18 below. The hydraulic oil in the oil collecting tank 18 returns to the hydraulic oil tank 19 through the return oil pipe 21, and is then pumped back to the main oil inlet pipe 20 through the hydraulic oil tank 19.
[0038] Two side oil pressure control areas 9 are respectively provided on the left side or right side of the left static pressure slider 3 and the right side or left side of the right static pressure slider 4 along the moving direction of the slide assembly 2, that is, when the side oil pressure control area 9 of the left static pressure slider 3 is located on the left side, the side oil pressure control area 9 of the right static pressure slider 4 is located on the right side; when the side oil pressure control area 9 of the left static pressure slider 3 is located on the right side, the side oil pressure control area 9 of the right static pressure slider 4 is located on the left side. Under the action of the oil pressure in the side oil pressure control area 9, a pressure oil film is formed between the left or right side of the left hydrostatic slider 3 and the left or right side of the left guide rail 5. Under the action of the pressure oil film, a certain gap is maintained between the left hydrostatic slider 3 and the left or right side of the left guide rail 5. Under the action of the oil pressure in the side oil pressure control area 9, a pressure oil film is formed between the right or left side of the right hydrostatic slider 4 and the right or left side of the right guide rail 6. Under the action of the pressure oil film, a certain gap is maintained between the right hydrostatic slider 5 and the right or left side of the right guide rail 6. This gap is preferably the same as the gap between the upper and lower surfaces of the left and right hydrostatic sliders 3 and 4 and the upper and lower surfaces of the left and right guide rails 5 and 6 to improve the stability of the oil pressure. The left and right hydrostatic sliders 3 and 4 are symmetrically arranged on both sides of the slide assembly 2. Using one side of the left static pressure slider 3 and the right static pressure slider 4 to cooperate with the left guide rail 5 and the right guide rail 6 can effectively reduce the processing accuracy of the left guide rail 5 and the right guide rail 6. Even if there are processing errors in the left guide rail 5 and the right guide rail 6, it will not affect the cooperation accuracy of the left static pressure slider 3 and the right static pressure slider 4 with the left guide rail 6, thereby reducing the difficulty and cost of processing the left guide rail 5 and the right guide rail 6.
[0039] The side oil pressure control area 9 includes a side sink 91, which is provided with a side oil inlet hole 93 and a group of side oil delivery holes 92. A side oil inlet channel 94 is provided between the main channel 10 and the side oil inlet hole 93. Hydraulic oil enters the side sink 91 from the main channel 10 through the side oil inlet channel 94 and the side oil inlet hole 93. An oil outlet channel 95 is provided at the bottom of the side oil delivery hole 92. A connecting pipe 96 is provided between the oil outlet channels 95 of the left static pressure slider 3 and the right static pressure slider 4. The connecting pipe 96 keeps the side oil delivery holes 92 of the left static pressure slider 3 and the right static pressure slider 4 connected, thereby achieving mutual compensation of the side oil pressure of the left static pressure slider 3 and the right static pressure slider 4, so that the two are consistent. In order to facilitate the detection of the oil pressure in the side oil pressure control area 9, a pressure sensor 12 is provided on the oil outlet channel 95 to monitor the pressure of the side oil pressure control area 9.
[0040] To achieve universal use of the left and right hydrostatic slides 3 and 4 and facilitate fine-tuning of the pressure of the pressure oil film, adjusting bolts 11 for adjusting the oil output and pressure are provided in the upper and side oil holes 72 and 92. These adjusting bolts 11 are threadedly engaged with the upper and side oil holes 72 and 92, and are provided with oil holes 111. By screwing the adjusting bolts 11 in, the distance between the adjusting bolts 11 and the left and right guide rails 5 and 6 is changed, thereby adjusting the oil output and pressure of the upper and side oil holes 72 and 92. Furthermore, the adjusting bolts 11 can be replaced with different oil hole 111 diameters to meet the oil pressure requirements of different grinding machines, thereby enhancing the universal use of the left and right hydrostatic slides 3 and 4.
[0041] The present invention also changes the traditional cast iron base into marble, the density of which is 3000KG / M 3 , elastic modulus is 70GPa, linear expansion coefficient is 4.61*10 -6 / °C. Marble has the advantages of a low thermal expansion coefficient, rapid heat absorption and dissipation, and is less susceptible to overheating and deformation. Therefore, during high-speed operation of the grinder, it can quickly dissipate heat generated by the oil film, ensuring that the left and right guide rails 5 and 6 do not deform. The combined effects of constant oil pressure and minimal deformation of the left and right guide rails 5 and 6 ensure smooth operation of the slide assembly 2 and improve the grinding machine's machining accuracy. Furthermore, a wear-resistant coating is applied to the inner walls of the left and right guide rails 5 and 6 to enhance their wear resistance.
[0042] It has been measured that on the same grinding machine, when the static pressure slider installation structure of the present invention is adopted, the oil film pressure deviation of each upper oil pressure control area, lower oil pressure control area and side oil pressure control area is 0.02μ, while when the traditional static pressure slider and its installation method are adopted, the oil film pressure deviation of each upper oil pressure control area, lower oil pressure control area and side oil pressure control area is 10-20μ. Therefore, from the overall point of view, the present invention can greatly improve the processing accuracy of the grinding machine.
[0043] The present invention has been described above with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-described method. Any non-substantial improvements made using the method concepts and technical solutions of the present invention, or any direct application of the above-described concepts and technical solutions to other situations without modification, fall within the scope of protection of the present invention.
Claims
1. A high-precision grinding machine, comprising a base (1), a slide assembly (2) arranged on the base (1) and movable back and forth, characterized in that: A left static pressure slider (3) and a right static pressure slider (4) are fixedly mounted on both sides of the slide assembly (2), and a left guide rail (5) cooperating with the left static pressure slider (3) and a right guide rail (6) cooperating with the right static pressure slider (4) are provided on the base (1); a set of upper oil pressure control areas (7) and lower oil pressure control areas (8) are provided on the left static pressure slider (3) and the right static pressure slider (4) along the moving direction of the slide assembly (2), and a layer of pressure oil film is formed between the upper oil pressure control area (7) and the lower oil pressure control area (8) and the upper and lower surfaces of the base (1); the left side of the left static pressure slider (3) A group of side oil pressure control areas (9) are respectively provided on the right side or the left side of the right static pressure slider (4) along the moving direction of the slide assembly (2), and a layer of pressure oil film is formed between the side oil pressure control areas (9) and the side of the base (1); the left static pressure slider (3) and the right static pressure slider (4) are symmetrically arranged on both sides of the slide assembly (2); all the upper oil pressure control areas (7) and the lower oil pressure control areas (8) on the left static pressure slider (3) and the right static pressure slider (4) are interconnected, and all the side oil pressure control areas (9) on the left static pressure slider (3) and the right static pressure slider (4) are interconnected.
2. The high-precision grinding machine according to claim 1, wherein: The base (1) is made of marble with a density of 3000KG / M 3 , elastic modulus is 70GPa, linear expansion coefficient is 4.61*10 -6 / °C; the inner walls of the left guide rail (5) and the right guide rail (6) are coated with a wear-resistant layer.
3. The high-precision grinding machine according to claim 1, wherein: Under the action of oil pressure, the gaps between the upper and lower surfaces of the left static pressure slider (3) and the right static pressure slider (4) and the left guide rail (5) and the right guide rail (6) are 0.02 mm, and the gaps between the side of the left static pressure slider (3) and the right static pressure slider (4) with the side oil pressure control area (9) and the left guide rail (5) and the right guide rail (6) are 0.02 mm.
4. The high-precision grinding machine according to claim 1, wherein: The upper oil pressure control area (7) includes an upper sinking platform (71), wherein a row of upper oil delivery holes (72) and a main oil inlet hole (73) are arranged in the upper sinking platform (71); the lower oil pressure control area (8) includes a lower sinking platform (81), wherein a row of lower oil delivery holes (82) are arranged in the lower sinking platform (81); the upper oil delivery holes (72) and the lower oil delivery holes (82) correspond to each other one by one and are in communication with each other.
5. The high-precision grinding machine according to claim 4, characterized in that: The communicating upper oil delivery hole (72) and lower oil delivery hole (82) are not on the same straight line.
6. The high-precision grinding machine according to claim 4, wherein: The side oil pressure control area (9) includes a side sink (91), a group of side oil delivery holes (92) and a side oil inlet hole (93) are provided in the side sink (91), an oil outlet channel (95) is connected to the bottom of the side oil delivery hole (92), and a connecting pipeline (96) is provided between the oil outlet channels (95) of the left static pressure slider (3) and the right static pressure slider (4).
7. The high-precision grinding machine according to claim 4, characterized in that: A main flow channel (10) is provided in both the left static pressure slider (3) and the right static pressure slider (4), an upper oil inlet flow channel (74) is provided between the main flow channel (10) and the main oil inlet hole (73), and a side oil inlet flow channel (94) is provided between the main flow channel (10) and the side oil inlet hole (93).
8. The high-precision grinding machine according to claim 7, wherein: The main flow channel (10) is a through hole arranged along the length direction of the left static pressure slider (3) or the right static pressure slider (4), and connecting structures are provided at both ends of the main flow channel (10). When multiple left static pressure sliders (3) or right static pressure sliders (4) need to be arranged, a main flow channel connecting pipeline (13) is provided between the main flow channels (10) of two adjacent left static pressure sliders (3) or right static pressure sliders (4).
9. The high-precision grinding machine according to claim 4, wherein: Adjustment bolts (11) for adjusting the oil output volume and oil output pressure are provided in the upper oil delivery hole (72) and the side oil delivery hole (92).
10. The high-precision grinding machine according to claim 4, wherein: The upper oil delivery hole (72) or the lower oil delivery hole (82) of the left static pressure slider (3) or the right static pressure slider (4) is connected to a pressure sensor (12), and the end of the oil outlet channel (95) is also provided with a pressure sensor (12).