Large-size mask plate taking and placing MGV trolley

Abstract

The invention discloses an MGV trolley for taking and placing a large-size mask plate. Comprising a trolley body, a direction adjusting mechanism assembly arranged on the trolley body, a swing adjusting mechanism assembled together with the direction adjusting mechanism, and a specification adjusting and clamping mechanism assembled together with the swing adjusting mechanism and used for clamping different specifications of mask plates to be taken and placed. The direction adjusting mechanism assembly is used for moving and adjusting the specification adjusting and clamping mechanism in the up-down, left-right and front-back directions; the swing adjusting mechanism is used for adjusting the inclination angle of the specification adjusting and clamping mechanism relative to the direction adjusting mechanism; the whole trolley is driven by electric drive, all fine adjustment mechanisms are manually adjusted, the mask taking, placing and transferring functions of an imported full-automatic mechanical arm are achieved, operation is simpler, the manufacturing cost is far lower than that of the full-automatic mechanical arm, the operation intensity of workers in a dust-free room is relieved, and the transferring efficiency of the large-size mask is improved; and the risk that the large-size mask plate is accidentally collided and damaged in the transfer process is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of mask assembly, in particular to a large-size mask taking and placing MGV vehicle. Background Art

[0002] The mask production process includes exposure, development, etching, cleaning, CD measurement, AOI, repair, and lamination. During the production process, the mask must be removed from its dedicated packaging and placed on the transfer mechanism of the equipment in each process. The mask also needs to be transported between processes. After all processes are completed, it is returned to the packaging. Currently, the industry generally uses manual lifting or fully automatic robot-assisted removal, placement, and transfer of large-size masks.

[0003] Large-size masks are too difficult to lift manually due to their large size and weight. There is a risk of collision and damage to the mask during the lifting process. The fully automatic robots commonly used in the industry are all imported from abroad. A set of robots costs over a million yuan, and the operation process is very complicated.

[0004] There is an urgent need for a large-size mask picking and placing MGV vehicle, which uses electric drive for overall movement and manual adjustment of each fine-tuning mechanism to realize the mask picking and placing and transportation functions of imported fully automatic robots. It is simpler to operate and the cost is much lower than that of fully automatic robots. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to propose an MGV trolley for picking up and placing large-size masks. The overall movement of the MGV trolley for picking up and placing large-size masks is electrically driven, and each fine-tuning mechanism is manually adjusted, realizing the mask picking up and placing and transportation functions of an imported fully automatic manipulator. The operation is simpler and the cost is much lower than that of a fully automatic manipulator. The labor intensity of workers in the clean room is reduced, the transportation efficiency of large-size masks in various processes is improved, and the risk of accidental collision damage to large-size masks during transportation is reduced.

[0006] To solve the above technical problems, the present invention provides a large-size mask pick-up and placement MGV, comprising: a trolley body, a direction adjustment mechanism assembly provided on the trolley body, a swing adjustment mechanism assembled with the direction adjustment mechanism, and a size adjustment and clamping mechanism assembled with the swing adjustment mechanism for clamping masks of different sizes to be picked up and placed;

[0007] The direction adjustment mechanism assembly is used to adjust the specification and clamping mechanism to move in the up, down, left, right, front and back directions;

[0008] The swing adjustment mechanism is used to adjust the specification adjustment and clamping mechanism to an inclination angle relative to the direction adjustment mechanism;

[0009] The trolley body is also provided with a guide positioning mechanism for positioning the trolley body to dock with the pick-and-place plate transfer mechanism when the trolley body moves horizontally.

[0010] Preferably, the large-size mask pick-up and placement MGV trolley further includes a pick-up and placement transfer mechanism and a guide positioning mechanism for positioning the trolley body to dock with the pick-up and placement transfer mechanism when the trolley body moves horizontally.

[0011] Preferably, the trolley body includes a main component, shock-absorbing casters arranged at the rear end of the bottom of the main component, and guide positioning rollers arranged on both sides of the front end of the bottom of the main component. A ground brake is also arranged on the bottom side of the main component, and a display screen, a status indicator light and a buzzer are also arranged on the main component.

[0012] The transmission gear of the first gear is connected with the transmission gear of the first gear to the first axle, and the transmission gear of the second gear is connected with the transmission gear of the first gear to the first gear. The movable member is assembled together with the output end of the first screw rod member, the first bevel gear member is fixedly arranged on the left and right fixed plates, the second hand wheel is assembled together with the input end of the first screw rod member through the first bevel gear member, and the second sliding member is controlled to slide left and right on the second guide rail member by the first screw rod member; the front and rear adjustment mechanism includes a front and rear fixed frame installed on the second sliding member, a third hand wheel, a second bevel gear member, a second screw rod member, and a third guide rail member, the second screw rod member and the third guide rail member are fixed on the front and rear fixed frame in the same direction, the third sliding member is assembled together with the third guide rail member, the third sliding member is assembled together with the output end of the second screw rod member, the second bevel gear member is fixedly arranged on the front and rear fixed frames, the third hand wheel is assembled together with the input end of the second screw rod member through the second bevel gear member, and the third sliding member is controlled to slide back and forth on the third guide rail member by the second screw rod member.

[0013] Preferably, the swing adjustment mechanism includes a swing fixed bracket, a fourth hand wheel, an angle adjustment deceleration component, a third screw rod component, and a hinge shaft, the fourth hand wheel is connected to the input end of the third screw rod component through the angle adjustment deceleration component, the output end of the third screw rod component is equipped with a hinge shaft, the angle adjustment deceleration component is fixedly arranged on the swing fixed bracket, and the swing angle of the output end of the third screw rod component is adjusted through the angle adjustment deceleration component.

[0014] Preferably, the specification adjustment and clamping mechanism includes a clamping and fixing bracket of the hinge shaft installed at the output end of the third screw rod component, a fifth hand wheel, a second reducer, a transmission synchronous belt, a fourth guide rail component, a fourth sliding component, a clamping and releasing pushing component, a clamping and releasing sensor and a mask clamp; the clamping and fixing bracket is provided with a hinge sleeve that cooperates with the hinge shaft, the clamping and releasing sensor is provided on the mask clamp, the second reducer, the fourth guide rail component and the clamping and releasing pushing component are fixedly provided on the clamping and fixing bracket, the fourth sliding component is connected to the first The four guide rail components are assembled together, the fifth hand wheel is connected to the input end of the second reducer, the output end of the second reducer is connected to the input end of the clamping and releasing pushing component through a transmission synchronous belt, the output end of the clamping and releasing pushing component is assembled with the upper component and the lower component of the fourth sliding component, the upper component and the lower component of the fourth sliding component are respectively assembled with the upper part and the lower part of the clamp of the mask clamp, and the clamping and releasing pushing component pushes the component so that the upper part and the lower part of the clamp of the mask clamp can clamp and release masks of different specifications.

[0015] Preferably, the clamping and fixing bracket is provided with a camera for photographing the state of the upper and lower mask plates being butted together in real time.

[0016] Preferably, the main body component is further provided with a display screen which is communicatively connected or wired to the camera and is used to display the docking status of the upper and lower mask plates captured in real time.

[0017] Preferably, the horizontal movement mechanism includes a rolling and steering wheel component, a battery device, an operating handle and a controller, and a connecting mounting plate. The connecting mounting plate is connected to the main component, and the battery device is arranged on the main component. After the operating handle and the controller are operated, they drive the large-size mask plate picking and placing MGV vehicle forward, backward, stop and turn.

[0018] Preferably, the guiding and positioning mechanism includes a fixed guide rail, a movable guide rail, and a quick clamp. The fixed guide rail and the movable guide rail are fixed near the pick-up and placement transfer mechanism. The fixed guide rail and the movable guide rail are assembled together by a quick clamp. The movable guide rail is opened during guiding and positioning by a foldable quick clamp, and folded when not in operation. When the mask pick-up and placement MGV trolley moves, the guiding and positioning roller is pushed into the groove of the movable guide rail to achieve guidance. After reaching the junction position with the pick-up and placement transfer mechanism, the rough positioning of the mask pick-up and placement MGV trolley and the pick-up and placement transfer mechanism is achieved, and then the up, down, left, right, front, back and swing angle position of the MASK is fine-tuned by the handwheel to achieve precise positioning.

[0019] With the above structure, the large-size reticle pick-and-place MGV vehicle includes: a vehicle body, a direction adjustment mechanism assembly provided on the vehicle body, a swing adjustment mechanism assembled with the direction adjustment mechanism, and a size adjustment and clamping mechanism assembled with the swing adjustment mechanism for clamping reticles of different sizes to be picked up and placed. The direction adjustment mechanism assembly is used to adjust the size adjustment and clamping mechanism's movement in the up-down, left-right, and forward-backward directions; the swing adjustment mechanism is used to adjust the inclination angle of the size adjustment and clamping mechanism relative to the direction adjustment mechanism. The vehicle body is also provided with a guide positioning mechanism for positioning the vehicle body to dock with the pick-and-place transfer mechanism when it moves horizontally. The large-size reticle pick-and-place MGV vehicle is electrically driven for overall movement, with each fine-tuning mechanism manually adjusted. This vehicle implements the reticle pick-and-place and transfer functions of an imported fully automatic robot, offering simpler operation and a cost significantly lower than that of a fully automatic robot. This reduces the labor intensity of cleanroom workers, improves the transfer efficiency of large-size reticles in various processes, and reduces the risk of accidental collision damage to large-size reticles during transfer. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is the overall structure diagram of the large-size mask taking and placing MGV of the present invention;

[0021] Figure 2 This is a schematic diagram of the working of the various components of the MGV for taking and placing large-size masks of the present invention;

[0022] Figure 3 This is a left side view of the MGV for taking and placing large-size masks of the present invention;

[0023] Figure 4 A top view of the MGV for taking and placing large-size masks of the present invention;

[0024] Figure 5 This is an exploded structural diagram of the MGV for taking and placing large-size masks of the present invention;

[0025] Figure 6This is a structural diagram of the main body of the MGV for taking and placing large-size masks of the present invention;

[0026] Figure 7 This is a structural diagram of the direction adjustment mechanism assembly of the MGV for taking and placing large-size masks of the present invention;

[0027] Figure 8 This is a structural diagram of the swing adjustment mechanism of the MGV trolley for taking and placing large-size masks of the present invention;

[0028] Figure 9 This is a structural diagram of the specification adjustment and clamping mechanism of the MGV trolley for taking and placing large-size masks of the present invention;

[0029] Figure 10 This is a structural diagram of the horizontal moving mechanism of the MGV trolley for taking and placing large-size masks of the present invention;

[0030] Figure 11 This is a structural diagram of the guiding and positioning mechanism of the MGV vehicle for taking and placing large-size masks of the present invention. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0032] Example 1

[0033] See also Figures 1 to 5 ;

[0034] This embodiment discloses a large-size reticle pick-and-place MGV, comprising: a trolley body 10, a direction adjustment mechanism assembly 20 disposed on the trolley body 10, a swing adjustment mechanism 60 assembled with the direction adjustment mechanism 20, and a size adjustment and clamping mechanism 40 assembled with the swing adjustment mechanism 60 for clamping reticles of different sizes to be picked up and placed;

[0035] The direction adjustment mechanism assembly 20 is used to adjust the specification and clamping mechanism to move in the up, down, left, right, front and back directions;

[0036] The swing adjustment mechanism 60 is used to adjust the tilt angle of the specification adjustment and clamping mechanism 40 relative to the direction adjustment mechanism assembly 20;

[0037] The trolley body 10 is also provided with a horizontal movement mechanism for the trolley to move horizontally.

[0038] Example 2

[0039] This embodiment is based on the first embodiment. In this embodiment, the large-size mask plate picking and placing MGV trolley further includes a pick-and-place plate transfer mechanism 70 and a guide positioning mechanism for positioning the trolley body to dock with the pick-and-place plate transfer mechanism when the trolley body moves horizontally.

[0040] Example 3

[0041] See also Figure 6 This embodiment is based on the second embodiment. In this embodiment, the trolley body 10 includes a main component 11, a shock-absorbing caster 14 arranged at the rear end of the bottom of the main component, and a guide positioning roller 16 arranged on both sides of the front end of the bottom of the main component. A ground brake 15 is also provided on the bottom side of the main component, and a status indicator light and a buzzer 12 are also provided on the main component.

[0042] See also Figure 7 , the direction adjustment mechanism assembly 20 includes an up and down adjustment mechanism 21, a left and right adjustment mechanism 22 and a front and back adjustment mechanism 23; the up and down adjustment mechanism 21 includes a first guide rail component installed on the main component, a first sliding component assembled with the first guide rail component, a first hand wheel, a first reducer, a transmission chain and a sprocket, the fixing frame of the first reducer and the sprocket is fixedly arranged on the main component, the first and first sliding components are driven to move up and down on the guide rail by the transmission chain, the transmission chain is assembled with the first reducer output shaft through the sprocket, and the first hand wheel is assembled with the first reducer input shaft; the left and right adjustment mechanism 22 includes left and right fixed plates, a second hand wheel, a first screw rod component, a first gear component, a second guide rail component, a second sliding component and left and right movable plates installed on the first sliding component, the first screw rod component and the second guide rail component are fixed to the left and right fixed plates along the same direction, the second sliding component is assembled with the second guide rail component, the second The sliding member is assembled with the output end of the first screw rod member, the first bevel gear member is fixedly arranged on the left and right fixed plates, the second hand wheel is assembled with the input end of the first screw rod member through the first bevel gear member, and the second sliding member is controlled to slide left and right on the second guide rail member by the first screw rod member; the front and rear adjustment mechanism 23 includes a front and rear fixed frame installed on the second sliding member, a third hand wheel, a second bevel gear member, a second screw rod member, and a third guide rail member, the second screw rod member and the third guide rail member are fixed on the front and rear fixed frames in the same direction, the third sliding member is assembled with the third guide rail member, the third sliding member is assembled with the output end of the second screw rod member, the second bevel gear member is fixedly arranged on the front and rear fixed frames, the third hand wheel is assembled with the input end of the second screw rod member through the second bevel gear member, and the third sliding member is controlled to slide back and forth on the third guide rail member by the second screw rod member.

[0043] See also Figure 8 The swing adjustment mechanism 30 includes a swing fixed bracket 31, a fourth hand wheel 32, an angle adjustment deceleration component 33, a third screw rod component 34, and a hinge shaft 35, which are arranged on the third slider component. The fourth hand wheel 32 is connected to the input end of the third screw rod component 34 through the angle adjustment deceleration component 33, and the output end of the third screw rod component 34 is equipped with a hinge shaft 35. The angle adjustment deceleration component 33 is fixedly arranged on the swing fixed bracket 31, and the swing angle of the output end of the third screw rod component 34 is adjusted by the angle adjustment deceleration component 33.

[0044] See also Figure 9 The specification adjustment and clamping mechanism 40 includes a clamping and fixing bracket 41 of the hinge shaft installed at the output end of the third screw rod component, a fifth hand wheel 43, a second reducer 44, a transmission synchronous belt, a fourth guide rail component, a fourth sliding component, a clamping and releasing pushing component, a clamping and releasing sensor and a mask clamp 45; a hinge sleeve 42 that cooperates with the hinge shaft 35 is provided on the clamping and fixing bracket 41, a clamping and releasing sensor 46 is provided on the mask clamp 45, the second reducer 44, the fourth guide rail component and the clamping and releasing pushing component are fixedly provided on the clamping and fixing bracket 41, the fourth sliding component and the fourth The guide rail components are assembled together, the fifth hand wheel is connected to the input end of the second reducer 44, the output end of the second reducer 44 is connected to the input end of the clamping and releasing pushing component through a transmission synchronous belt, and the output end of the clamping and releasing pushing component is assembled together with the upper component and the lower component of the fourth sliding component, and the upper component and the lower component of the fourth sliding component are respectively assembled together with the upper part and the lower part of the clamp of the mask clamp 45, and the clamp upper part and the lower part of the clamp of the mask clamp 45 are pushed by the clamping and releasing pushing component to clamp and release the masks 60 of different specifications.

[0045] The clamping bracket 41 is provided with a camera 47 for taking real-time photos of the state of the upper and lower masks 60 when they are docked.

[0046] The main body member 10 is further provided with a display screen 13 which is in communication connection or wired connection with the camera 47 and is used to display the docking status of the upper and lower masks 60 captured in real time.

[0047] Example 4

[0048] See also Figure 10This embodiment is based on the first embodiment. In this embodiment, the horizontal movement mechanism 80 includes a rolling and steering wheel component 83, a battery device, an operating handle and controller 81, and a connecting mounting plate 82. The connecting mounting plate 82 is connected to the main component 10. The battery device is arranged on the main component 10. After the operating handle and controller 81 are operated, the large-size mask plate picking and placing MGV vehicle moves forward, backward, stops and turns.

[0049] Example 5

[0050] See also Figure 11 This embodiment is based on the third embodiment. In this embodiment, the guide and positioning mechanism 50 includes a fixed guide rail 53, a movable guide rail 51, and a quick clamp 52. The fixed guide rail 53 and the movable guide rail 51 are fixed near the pick-up and placement transfer mechanism. The fixed guide rail 53 and the movable guide rail 51 are assembled together by the quick clamp 52. The movable guide rail 51 is opened during guiding and positioning by a foldable quick clamp, and folded when not in use. When the mask pick-up and placement MGV trolley moves, the guide positioning roller 16 is pushed into the groove of the movable guide rail 51 to achieve guidance. After reaching the intersection position with the pick-up and placement transfer mechanism 70, the rough front, back, left, and right positioning of the mask pick-up and placement MGV trolley and the pick-up and placement transfer mechanism 70 is achieved, and then the up, down, left, right, front, back, and swing angle positions of the mask 60 are fine-tuned by the hand wheel to achieve precise positioning.

[0051] Any large-size mask pick-up and placement MGV of Embodiments 1 to 5 further comprises:

[0052] 1. The MGV for picking and placing large-size masks can achieve six degrees of freedom adjustment, including overall horizontal movement, lifting adjustment, left and right adjustment, front and back adjustment, swing angle adjustment, clamping and release;

[0053] 2. Large-size mask placement MGV can be compatible with the installation of large-size masks of various specifications: the specification adjustment and the clamping mechanism stroke are adjustable, and it is compatible with large-size masks of various specifications from 6th to 10.5th generations;

[0054] 3. The MGV vehicle for large-size mask placement realizes non-contact placement during the placement and transportation of masks, avoiding marks left by touching the edge of the mask when manually lifting the mask, which increases the difficulty of cleaning.

[0055] 4. When the MGV trolley is docking with the pick-and-place transfer mechanism 70 for large-size masks, it can dock with the pick-and-place transfer mechanism 70 when the mask is tilted or horizontally placed.

[0056] 5. The overall movement of the MGV for taking and placing large-size masks is driven by a battery device and rolling and steering wheel components. It moves easily and can achieve precise positioning and steering in the horizontal direction. The adjustment of the mask up and down, left and right, front and back, swing angle, clamping and loosening is manually fine-tuned by an operating hand wheel, which is convenient and flexible.

[0057] 6. The docking and positioning of the large-size mask pick-and-place MGV trolley and the pick-and-place transfer mechanism 70 adopts a two-stage positioning mode of coarse positioning and precise adjustment: the trolley first achieves coarse positioning with the pick-and-place transfer mechanism 70 through the guided positioning rollers and tracks, and is fixed with the ground brake. Then, the operating handwheels of each axis of the trolley are fine-tuned to adjust the up-down, left-right, front-back, and angular position of the mask to achieve precise docking and positioning with the pick-and-place transfer mechanism 70.

[0058] 7. The guide and positioning mechanism of the MGV trolley for loading and unloading large-size masks adopts a folding design. The movable guide rail can be retracted when not loading or unloading the mask, avoiding affecting other operations of workers and saving space in the clean room.

[0059] 8. The up and down, left and right, and front and back moving axes of the MGV for picking up and placing large-size masks are all equipped with linear scales, and the angle swing axis is equipped with a protractor to facilitate precise position adjustment of each axis;

[0060] 9. The lifting mechanism, swing mechanism, and clamping mechanism of the MGV trolley for taking and placing large-size masks all adopt a worm gear reduction structure with a self-locking function to prevent the mask from falling when the equipment is moved;

[0061] 10. The lifting mechanism and clamping mechanism of the MGV trolley for taking and placing large-size masks are equipped with a manual anti-loosening clamp to provide double insurance to prevent the risk of the mask falling;

[0062] 11. The specification adjustment and clamping mechanism of the MGV trolley for taking and placing large-size masks is equipped with a clamping and releasing sensor, which can automatically alarm when the mask is not clamped;

[0063] 12. The up and down adjustment mechanism of the MGV trolley for taking and placing large-size masks also adopts gas spring counterweight balancing to offset the influence of the up and down adjustment mechanism's own weight, making it easier to adjust the handwheel up and down;

[0064] 13. The camera and display on the MGV for large-size reticle placement facilitate docking with the placement transfer mechanism 70 and provide a clearer view of the docking details when placing and picking the reticle.

[0065] 14. The working status indicator and alarm of the large-size mask pick-up and placement MGV display the real-time status when the mask is handed over and transferred to the pick-up and placement transfer mechanism 70, reminding unauthorized personnel to avoid it;

[0066] 15. The fixed cushions, clamping pads and casters of the MGV trolley installation platform for taking and placing large-size masks are all made of anti-static materials to prevent static electricity from affecting the mask.

[0067] It should be understood that the above are only preferred embodiments of the present invention and cannot limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention description and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A large-size mask pick-up and placement MGV, characterized by: include: A trolley body, a direction adjustment mechanism assembly provided on the trolley body, a swing adjustment mechanism assembled with the direction adjustment mechanism, and a size adjustment and clamping mechanism assembled with the swing adjustment mechanism for clamping masks of different sizes to be taken in and out; The direction adjustment mechanism assembly is used to adjust the specification and clamping mechanism to move in the up, down, left, right, front and back directions; The swing adjustment mechanism is used to adjust the specification adjustment and clamping mechanism to an inclination angle relative to the direction adjustment mechanism; The trolley body is also provided with a guide positioning mechanism for positioning the trolley body to dock with the pick-and-place plate transfer mechanism when the trolley body moves horizontally.

2. The large-size mask pick-up and placement MGV according to claim 1 is characterized in that: The large-size mask plate picking and placing MGV trolley also includes a pick-and-place plate transfer mechanism and a guide positioning mechanism for positioning the trolley body to dock with the pick-and-place plate transfer mechanism when moving horizontally.

3. The large-size mask pick-up and placement MGV according to claim 2, characterized in that: The trolley body includes a main component, shock-absorbing casters arranged at the rear end of the bottom of the main component, and guide positioning rollers arranged on both sides of the front end of the bottom of the main component. A ground brake is also arranged on the bottom side of the main component. A display screen, a status indicator light and a buzzer are also arranged on the main component.

4. The large-size mask pick-up and placement MGV according to claim 3 is characterized in that: The direction adjustment mechanism assembly includes an up and down adjustment mechanism, a left and right adjustment mechanism and a front and back adjustment mechanism; the up and down adjustment mechanism includes a first guide rail component installed on the main component, a first sliding component assembled with the first guide rail component, a first hand wheel, a first reducer, a transmission chain and a sprocket, the fixing frame of the first reducer and the sprocket is fixedly arranged on the main component, the first and first sliding components are driven to move up and down on the guide rail by the transmission chain, the transmission chain is assembled with the first reducer output shaft through the sprocket, and the first hand wheel is assembled with the first reducer input shaft; the left and right adjustment mechanism includes left and right fixed plates, a second hand wheel, a first screw rod component, a first gear component, a second guide rail component, a second sliding component and left and right movable plates installed on the first sliding component, the first screw rod component and the second guide rail component are fixed to the left and right fixed plates along the same direction, the second sliding component is assembled with the second guide rail component, and the second sliding structure The gear train is fixedly mounted on the front and rear ends of the gear train, and the gear train is installed on a third party's gear train to move along the gear train, so that the gear train can move along the gear train to the left and right ends of the gear train.

5. The large-size mask pick-up and placement MGV according to claim 4 is characterized in that: The swing adjustment mechanism includes a swing fixed bracket, a fourth hand wheel, an angle adjustment deceleration component, a third screw rod component, and a hinge shaft, the fourth hand wheel is connected to the input end of the third screw rod component through the angle adjustment deceleration component, the output end of the third screw rod component is equipped with a hinge shaft, the angle adjustment deceleration component is fixedly arranged on the swing fixed bracket, and the swing angle of the output end of the third screw rod component is adjusted through the angle adjustment deceleration component.

6. The large-size mask pick-up and placement MGV according to claim 5, characterized in that: The specification adjustment and clamping mechanism includes a clamping and fixing bracket of the hinge shaft installed at the output end of the third screw rod component, a fifth hand wheel, a second reducer, a transmission synchronous belt, a fourth guide rail component, a fourth sliding component, a clamping and releasing pushing component, a clamping and releasing sensor and a mask clamp; the clamping and fixing bracket is provided with a hinge sleeve that cooperates with the hinge shaft, the clamping and releasing sensor is provided on the mask clamp, the second reducer, the fourth guide rail component and the clamping and releasing pushing component are fixedly provided on the clamping and fixing bracket, the fourth sliding component and the fourth guide rail component are fixedly provided with a hinge sleeve that cooperates with the hinge shaft The rail components are assembled together, the fifth hand wheel is connected to the input end of the second reducer, the output end of the second reducer is connected to the input end of the clamping and relaxing pushing component through a transmission synchronous belt, the output end of the clamping and relaxing pushing component is assembled together with the upper component and the lower component of the fourth sliding component, the upper component and the lower component of the fourth sliding component are respectively assembled together with the upper part and the lower part of the clamp of the mask clamp, and the clamping and relaxing pushing component pushes the component so that the upper part and the lower part of the clamp of the mask clamp can clamp and release masks of different specifications.

7. The large-size mask pick-up and placement MGV according to claim 6, characterized in that: The clamping and fixing bracket is provided with a camera for real-time photographing the state of the upper and lower mask plates when they are docked.

8. The large-size mask pick-up and placement MGV according to claim 7, characterized in that: The main body component is also provided with a display screen which is communicatively connected or wired to the camera and is used to display the docking status of the upper and lower mask plates in real time.

9. The large-size mask pick-up and placement MGV according to claim 1, characterized in that: The horizontal movement mechanism includes a rolling and steering wheel component, a battery device, an operating handle and a controller, and a connecting mounting plate. The connecting mounting plate is connected to the main component, and the battery device is arranged on the main component. After the operating handle and the controller are operated, the large-size mask plate picking and placing MGV trolley moves forward, backward, stops and turns.

10. The large-size mask pick-up and placement MGV according to claim 3, characterized in that: The guiding and positioning mechanism includes a fixed guide rail, a movable guide rail, and a quick clamp. The fixed guide rail and the movable guide rail are fixed near the pick-up and placement transfer mechanism. The fixed guide rail and the movable guide rail are assembled together by a quick clamp. The movable guide rail is opened during guiding and positioning by a foldable quick clamp, and folded when not in use. When the mask pick-up and placement MGV trolley moves, the guiding and positioning roller is pushed into the groove of the movable guide rail to achieve guidance. After reaching the intersection position with the pick-up and placement transfer mechanism, the rough positioning of the mask pick-up and placement MGV trolley and the pick-up and placement transfer mechanism is achieved, and then the up, down, left, right, front, back and swing angle position of the MASK is fine-tuned by a hand wheel to achieve precise positioning.

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