Static electricity detection method and portable static electricity detector

Abstract

The invention relates to the technical field of electrostatic detection, in particular to an electrostatic detection method and a portable electrostatic detector. The method comprises the following steps: acquiring environment information, an original electrostatic signal and physical information of a detected object, wherein the physical information comprises a detection distance from the detected object and shape information of the detected object; converting the original electrostatic signal into initial electrostatic field intensity based on the environmental information; performing geometric correction on the initial electrostatic field intensity based on the shape information and the detection distance to obtain the electrostatic field intensity, and calculating the product of the detection distance and the electrostatic field intensity as an initial electrostatic voltage value; and performing environment compensation on the initial electrostatic voltage value based on the environment information to obtain an electrostatic voltage value of the measured object. According to the invention, the static detection precision of the detected object can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of electrostatic detection, and in particular to an electrostatic detection method and a portable electrostatic detector. Background Art

[0002] The hazards posed by electrostatic discharge (ESD) are becoming increasingly prominent in the semiconductor manufacturing, microelectronics, and other high-precision manufacturing industries. Because the electronic components and precision devices used in these industries are extremely sensitive to static electricity, the instantaneous high voltage and strong current generated by ESD can cause permanent damage to electronic components, disrupt circuit function, and even disrupt the entire production process, resulting in significant economic losses. Therefore, real-time and accurate ESD testing of production environments and equipment has become a critical step in ensuring product quality, improving production efficiency, and reducing economic losses.

[0003] Related technologies primarily use simple electrostatic sensors to capture static signals and convert them into electrostatic field strength and voltage values ​​based on fixed conversion formulas. However, these detection devices only consider the static signal itself, ignoring the impact of environmental factors and the characteristics of the object being measured, resulting in inaccurate static detection results. Summary of the Invention

[0004] In order to solve the problem of inaccurate electrostatic detection in the prior art, the present application provides an electrostatic detection method and a portable electrostatic detector.

[0005] In the first aspect, the present application provides an electrostatic detection method, which adopts the following technical solution: A static electricity detection method is applied to a portable static electricity detector. The static electricity detector includes a processing module. The method is executed by the processing module and includes: Acquiring environmental information, original electrostatic signals, and physical information of the object being measured, wherein the physical information includes a detection distance from the object being measured and shape information of the object being measured; converting the original electrostatic signal into an initial electrostatic field intensity based on the environmental information; Performing geometric correction on the initial electrostatic field strength based on the shape information and the detection distance to obtain the electrostatic field strength, and calculating the product of the detection distance and the electrostatic field strength as the initial electrostatic voltage value; Environmental compensation is performed on the initial electrostatic voltage value based on the environmental information to obtain the electrostatic voltage value of the object to be measured.

[0006] By adopting the above technical solution, the environment, electrostatic signals and physical information of the object are first collected, and the initial electrostatic field strength is obtained by preprocessing the signal with environmental information. Then, geometric correction is performed based on the object shape and detection distance to obtain a more accurate electrostatic field strength and calculate the initial electrostatic voltage value. Finally, the final electrostatic voltage value is obtained by combining environmental factor compensation. This comprehensive consideration of multiple factors effectively eliminates the influence of factors such as environmental interference, object shape differences and changes in detection distance on the measurement results, greatly improving the accuracy and reliability of electrostatic detection, meeting the strict requirements of high-precision industries such as semiconductor manufacturing for electrostatic detection accuracy, and reducing the risk of product damage caused by electrostatic discharge.

[0007] In a preferred example, the present application may be further configured as follows: the environmental information includes interference information; The converting the original electrostatic signal into an initial electrostatic field intensity based on the environmental information includes: determining whether the original electrostatic signal has interference based on the interference information; When it is determined that interference exists in the original electrostatic signal, determining the interference type, and selecting an interference removal method based on the interference type to process the original electrostatic signal to obtain a first intermediate electrostatic signal; determining a gain of the first intermediate electrostatic signal based on an effective range, and amplifying the first intermediate electrostatic signal based on the gain to obtain a second intermediate electrostatic signal; The second intermediate electrostatic signal is converted into the initial electrostatic field intensity.

[0008] By adopting the above technical solution, through accurate identification of different interference types and adaptive filtering algorithms, combined with range adaptive amplification, the environmental electromagnetic interference and signal attenuation problems are effectively suppressed, signal distortion and detection errors caused by interference are avoided, and the signal-to-noise ratio is significantly improved. The measurement results of the initial electrostatic field strength are closer to the true value, enhancing the accuracy and stability of electrostatic detection in complex electromagnetic environments.

[0009] In a preferred example, the present application may be further configured as follows: performing geometric correction on the initial electrostatic field strength based on the shape information and the detection distance to obtain the electrostatic field strength includes: Determining whether the measured object has a regular shape based on the shape information; When the measured object is of the regular shape, determining the shape type of the measured object, and determining a geometric correction coefficient based on the shape type; When the object to be measured is of irregular shape, a finite element algorithm is used to calculate the geometric correction coefficient; The initial electrostatic field strength is geometrically corrected based on the geometric correction coefficient to obtain the electrostatic field strength.

[0010] By adopting the above technical solution, the impact of different shapes and detection distances on the electrostatic field distribution can be accurately quantified, the measurement deviation caused by the geometric characteristics of the object can be effectively corrected, the error in electrostatic field strength detection can be reduced, and the accuracy and reliability of the detection results can be greatly improved.

[0011] In a preferred example, the present application may be further configured as follows: the shape types include: a planar conductor, a spherical conductor, and a cylindrical conductor; The determining of a geometric correction coefficient based on the shape type includes: When the object to be measured is the planar conductor, extracting size information of the object to be measured from the shape information, and judging whether the object to be measured is an infinite planar conductor or a finite planar conductor based on the size information and the detection distance; When the measured object is the finite plane conductor, obtaining an edge correction coefficient as a geometric correction coefficient; When the measured object is the spherical conductor or the cylindrical conductor, a geometric correction coefficient is calculated based on the size information and the detection distance.

[0012] By adopting the above technical solution, by extracting the quantitative relationship between object size information and detection distance, combined with edge effect correction and theoretical formula calculation, the electric field distortion caused by uneven charge distribution on the surface of conductors of different shapes is effectively compensated.

[0013] In a preferred example, the present application may be further configured as follows: the calculation of the geometric correction coefficient using a finite element algorithm includes: constructing a geometric model of the object to be measured based on the shape information, and dividing the geometric model into a plurality of finite elements; Establishing an electrostatic field control equation for each finite element, combining the electrostatic field control equations of the plurality of finite elements to obtain a global equation group; solving the global equation group to obtain a node potential, and calculating a simulated electric field strength based on the node potential; The geometric correction coefficient is calculated based on the simulated electric field strength and the initial electrostatic field strength.

[0014] By adopting the above technical solution, a geometric model is constructed based on shape information and finite elements are divided. The electrostatic field control equation is established and solved to obtain the node potential, and then the simulated electric field strength is calculated. Finally, the geometric correction coefficient is determined by comparing the initial electrostatic field strength. The electrostatic field problem of complex irregular objects is converted into a computable numerical model, which can accurately simulate the charge distribution and electric field characteristics on the surface of the object, effectively correct the electric field distortion error caused by the irregular shape of the object, and greatly improve the accuracy of the electrostatic field strength measurement of irregular objects.

[0015] In a preferred example, the present application may be further configured as follows: the environmental information also includes current temperature and current humidity; The performing environmental compensation on the initial electrostatic voltage value based on the environmental information to obtain the electrostatic voltage value of the object under test includes: Determining a unit temperature compensation coefficient corresponding to a current temperature, calculating a temperature difference between the current temperature and a reference temperature, and using the product of the temperature difference and the unit temperature compensation coefficient as the temperature compensation coefficient; Determining a unit humidity compensation coefficient corresponding to the current humidity, calculating a humidity difference between the current humidity and a reference humidity, and using the product of the humidity difference and the unit humidity compensation coefficient as the humidity compensation coefficient; Environmental compensation is performed on the initial electrostatic voltage value based on the temperature compensation coefficient and the humidity compensation coefficient to obtain the electrostatic voltage value of the measured object.

[0016] By adopting the above technical solution, the impact of changes in ambient temperature and humidity on electrostatic voltage measurement is fully taken into account, effectively eliminating measurement errors caused by factors such as changes in the material dielectric constant due to temperature changes and surface charge leakage due to humidity changes. This significantly improves the accuracy and stability of electrostatic voltage detection results under different environmental conditions, making the detection results more in line with actual working conditions.

[0017] In a preferred example, the present application may be further configured as follows: the environmental information also includes light information; The step of obtaining environmental information, original electrostatic signals, and physical information of the object under test includes: Controlling the contour sensor to collect physical information of the measured object; Based on the light information, it is determined whether there is insufficient light. When it is determined that there is insufficient light, the infrared sensor is controlled to start, and the infrared sensor is controlled to assist the electrostatic sensor in collecting the original electrostatic signal.

[0018] By adopting the above technical solution, the infrared sensor is enabled to assist in collection when the light is insufficient, and the contour sensor is controlled to obtain the physical information of the object. This effectively solves the detection error problem caused by the decline in the performance of auxiliary equipment in traditional electrostatic detection in dark environments. The characteristic of the infrared sensor that is not affected by light is utilized to ensure the accuracy of the collection of physical information such as the object contour and distance.

[0019] In a second aspect, the present application provides a portable static electricity detector, comprising: a contour sensor, an static electricity sensor, an infrared sensor, an environmental detection module, a processing module, and a display interface; The contour sensor is used to obtain physical information of the object being measured; The electrostatic sensor is used to collect the original electrostatic signal; The infrared sensor is used to assist the electrostatic sensor in collecting the original electrostatic signal in insufficient light conditions; The environment detection module is used to obtain environmental information; The processing module is configured to execute the electrostatic detection method according to any one of the first aspects; The display interface is used to display the electrostatic voltage value of the object being measured.

[0020] In a preferred example, the present application can be further configured as follows: the processing module includes: at least one processor; Memory; At least one application, wherein the at least one application is stored in a memory and configured to be executed by at least one processor, and the at least one application is configured to: execute the electrostatic detection method as described in any one of the first aspects.

[0021] In summary, this application has the following beneficial technical effects: This application collects environmental, electrostatic signals, and physical information of objects, obtains the initial electrostatic field strength by preprocessing the signal with environmental information, then performs geometric correction based on the object shape and detection distance to obtain a more accurate electrostatic field strength and calculate the initial electrostatic voltage value, and finally obtains the final electrostatic voltage value by combining environmental factor compensation. This comprehensive consideration of multiple factors effectively eliminates the influence of environmental interference, object shape differences, and changes in detection distance on the measurement results, greatly improving the accuracy and reliability of electrostatic detection, meeting the stringent requirements of high-precision industries such as semiconductor manufacturing for electrostatic detection accuracy, and reducing the risk of product damage caused by electrostatic discharge. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 1 is a flow chart of an electrostatic detection method provided in an embodiment of the present application; Figure 2 It is a structural diagram of a processing module provided in an embodiment of the present application. DETAILED DESCRIPTION

[0023] The following is combined with Figure 1 -Attached Figure 2 This application is described in further detail.

[0024] This specific embodiment is merely an explanation of the present application and is not a limitation of the present application. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but as long as they are within the scope of the claims of the present application, they are protected by the patent law.

[0025] To make the purpose, technical solutions, and advantages of the embodiments of this application more clear, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0026] In this document, the term "and / or" simply describes a relationship between related objects, indicating that three possible relationships exist. For example, "A and / or B" can represent: A exists alone, A and B exist simultaneously, or B exists alone. Furthermore, the character " / " in this document, unless otherwise specified, generally indicates an "or" relationship between the related objects.

[0027] It should be noted that in the optional embodiments of the present application, the object information and other related data involved, when the embodiments in the present application are applied to specific products or technologies, need to obtain the permission or consent of the object, and the collection, use and processing of the relevant data need to comply with the relevant laws, regulations and standards of the relevant countries and regions. In other words, if the embodiments of the present application involve data related to the object, it needs to be obtained through the authorization and consent of the object, the authorization and consent of the relevant departments, and in compliance with the relevant laws, regulations and standards of the country and region. If personal information is involved in the embodiments, the acquisition of all personal information requires the consent of the individual. If sensitive information is involved, the separate consent of the information subject needs to be obtained. The embodiments also need to be implemented with the authorization and consent of the object.

[0028] An embodiment of the present application provides a portable electrostatic detector, comprising: a contour sensor, an electrostatic sensor, an infrared sensor, an environmental detection module, a processing module, and a display interface. The contour sensor is used to obtain physical information of the object being measured. The electrostatic sensor is used to collect raw electrostatic signals. The infrared sensor is used to assist the electrostatic sensor in collecting raw electrostatic signals in low-light conditions. The environmental detection module is used to obtain environmental information. The processing module is used to process the raw electrostatic signal based on the physical information and environmental information of the object being measured to obtain an accurate electrostatic voltage value of the object being measured. The display interface is used to display the electrostatic voltage value of the object being measured.

[0029] The present application provides a method for detecting static electricity. Figure 1 As shown, the method is applied to a portable static electricity detector. The method provided in the embodiment of the present application is executed by a processing module of the static electricity detector. The method includes steps S101 to S104, wherein: S101 , obtaining environmental information, original electrostatic signals, and physical information of a measured object, where the physical information includes a detection distance from the measured object and shape information of the measured object.

[0030] Specifically, the environmental detection module of the electrostatic detector integrates multiple environmental sensors, including electromagnetic sensors, temperature sensors, humidity sensors, and photosensors. The electromagnetic sensor is used to detect the intensity of electromagnetic interference, the temperature sensor obtains the current temperature, the humidity sensor obtains the current humidity, and the photosensor obtains light information (i.e., the ambient light intensity).

[0031] The electrostatic detector also includes an electrostatic sensor and a contour sensor. The electrostatic sensor is used to collect raw electrostatic signals, which represent the charge distribution signal of the physical object being measured. The signal strength is proportional to the charge of the object. The contour sensor can be loaded with a laser rangefinder or an ultrasonic sensor probe to obtain the vertical distance to the surface of the object being measured. The contour sensor can be a structured light camera or a TOF camera, which is used to obtain point cloud data on the surface of the object being measured and identify the object shape type, such as plane, spherical, cylindrical or irregular, through point cloud processing algorithms (such as PCA principal component analysis).

[0032] S102: Convert the original electrostatic signal into an initial electrostatic field intensity based on the environmental information.

[0033] Specifically, the environmental information includes interference information (such as electromagnetic interference information). When it is determined that the original electrostatic signal has interference based on the interference information, interference removal processing is performed on the original electrostatic signal to obtain a first intermediate electrostatic signal.

[0034] The first electrostatic signal is then amplified based on the effective range to generate a second intermediate electrostatic signal, ensuring that the amplified signal is within the ADC sampling range. The second intermediate electrostatic signal is converted from an analog signal to a digital signal and converted to the initial electrostatic field strength (unit: V / m) using a calibration curve (voltage-electric field strength comparison table).

[0035] S103 , performing geometric correction on the initial electrostatic field intensity based on the shape information and the detection distance to obtain the electrostatic field intensity, and calculating the product of the detection distance and the electrostatic field intensity as the initial electrostatic voltage value.

[0036] Specifically, the shape information is used to determine whether the object being measured is regular in shape. If the object being measured is regular in shape, the shape type of the object being measured is determined, and a geometric correction coefficient is determined based on the shape type. If the object being measured is irregular in shape, the geometric correction coefficient is calculated using a finite element algorithm.

[0037] Furthermore, the initial electrostatic field intensity is geometrically corrected based on the geometric correction coefficient to obtain the electrostatic field intensity.

[0038] S104 , performing environmental compensation on the initial electrostatic voltage value based on the environmental information to obtain the electrostatic voltage value of the object to be measured.

[0039] Specifically, the unit temperature compensation coefficient corresponding to the current temperature is determined, the temperature difference between the current temperature and the reference temperature is calculated, and the product of the temperature difference and the unit temperature compensation coefficient is used as the temperature compensation coefficient. The unit humidity compensation coefficient corresponding to the current humidity is determined, the humidity difference between the current humidity and the reference humidity is calculated, and the product of the humidity difference and the unit humidity compensation coefficient is used as the humidity compensation coefficient.

[0040] This embodiment collects environmental, electrostatic signal, and object physical information, pre-processes the signal with environmental information to obtain the initial electrostatic field strength, then performs geometric correction based on the object shape and detection distance to obtain a more accurate electrostatic field strength and calculate the initial electrostatic voltage value. Finally, the final electrostatic voltage value is obtained by combining environmental factor compensation. This multi-factor comprehensive consideration effectively eliminates the influence of environmental interference, object shape differences, and changes in detection distance on the measurement results, greatly improving the accuracy and reliability of electrostatic detection, meeting the stringent requirements of high-precision industries such as semiconductor manufacturing for electrostatic detection accuracy, and reducing the risk of product damage caused by electrostatic discharge.

[0041] In a possible implementation of the embodiment of the present application, the environmental information includes interference information; The original electrostatic signal is converted into the initial electrostatic field strength based on the environmental information, including: Determine whether the original electrostatic signal has interference based on the interference information; When it is determined that the original electrostatic signal has interference, determining the interference type, and selecting an interference removal method based on the interference type to process the original electrostatic signal to obtain a first intermediate electrostatic signal; determining a gain of the first intermediate electrostatic signal based on the effective range, and amplifying the first intermediate electrostatic signal based on the gain to obtain a second intermediate electrostatic signal; The second intermediate electrostatic signal is converted into an initial electrostatic field intensity.

[0042] In this embodiment, the electromagnetic sensor may be a loop antenna capable of detecting environmental electromagnetic interference and comparing the electromagnetic interference intensity in the interference information with a preset interference intensity threshold. If the current electromagnetic interference intensity exceeds the preset interference intensity threshold, interference is determined to be present. If the current electromagnetic interference intensity does not exceed the preset interference intensity threshold, interference is determined to be absent, and no interference processing is performed. The next step of determining the signal gain is directly executed.

[0043] When it is determined that there is interference in the original electrostatic signal, the interference type is determined. Specifically, the original electrostatic signal is sampled at high frequency by a high-speed analog-to-digital converter to obtain a discrete time series. Time domain features are extracted from the discrete time series. The time domain features include: pulse width (duration of the pulse in the signal), periodicity (whether the signal shows regular repetition) and amplitude mutation (whether there is an instantaneous large amplitude jump). The time domain signal is converted into a frequency domain spectrum, the amplitude of each frequency component is calculated, and the spectrum features are extracted, including: the main frequency component (the frequency point or frequency band with the highest energy in the spectrum), the bandwidth range (the frequency span of the signal energy distribution) and the harmonic distribution (the frequency multiple component of the main frequency). According to the extracted time domain and frequency domain features, they are compared with the preset interference type feature library. The preset interference types include high-frequency pulse interference, power frequency interference, narrowband interference and white noise interference.

[0044] Specifically, the time domain characteristics of high-frequency pulse interference are: a single pulse width less than 1ms, significant amplitude changes (e.g., rising edge less than 100ns), and non-periodic or sporadic occurrence. The frequency domain characteristics are: a spectrum covering a wide frequency band (e.g., 100kHz to 1GHz), no obvious single-frequency peaks, and a continuous energy distribution. If a signal contains spikes less than 1ms and a spectrum bandwidth greater than 10MHz, it is classified as high-frequency pulse interference (e.g., ESD discharge or switching transient noise).

[0045] The time domain characteristics of power frequency interference (50 / 60Hz) are: a periodic sine wave with a fixed period of 20ms (50Hz) or 16.7ms (60Hz) and a stable amplitude. The frequency domain characteristics are: a single frequency peak (50Hz or 60Hz), possibly accompanied by second and third harmonics (100Hz, 150Hz, etc.). If the amplitude of the 50Hz or 60Hz component in the spectrum exceeds a threshold (such as 30μV), and the energy of the harmonic components decreases in sequence, it is determined to be power frequency interference (such as power transformer or motor leakage).

[0046] Narrowband interference (such as 2.4GHz and 900MHz) has time-domain characteristics: a near-sine wave, long duration (>10ms), and stable periodicity. Frequency-domain characteristics: energy concentrated in a single frequency point or narrow frequency band (bandwidth <100kHz), such as 2.4GHz WiFi (bandwidth 22MHz) and 900MHz RF signals. If the energy at a frequency point in the spectrum is significantly higher than adjacent frequencies (e.g., a peak value at least 10dB higher than the surrounding frequency) and the bandwidth is <100kHz, it is considered narrowband interference (such as wireless communication devices or RFID tags).

[0047] White noise is characterized by random fluctuations in the time domain, lacking obvious periodicity or pulse characteristics, and by a uniform distribution of energy across the entire measurement frequency band (e.g., 10Hz-100MHz), with no prominent frequency components. If the amplitude differences between frequency components in the spectrum are less than 3dB, and there are no single-frequency peaks, it is classified as white noise (e.g., thermal noise or semiconductor device noise floor).

[0048] The correspondence between interference type and filtering method is pre-set, including: high-frequency pulse interference uses a sliding window median filter, power frequency interference uses an IIR notch filter, and narrowband interference uses an adaptive notch filter. The center frequency is dynamically adjusted based on the FFT result, the step size factor μ = 0.05, and the convergence time is less than 20ms. White noise uses a Kalman filter.

[0049] Determine the current signal peak value and the maximum value of the effective range, calculate the product of the maximum value of the effective range and the upper limit ratio (optionally 80% or 90%), and use the ratio of this product and the current signal peak value as the gain of the first intermediate electrostatic signal.

[0050] The second intermediate electrostatic signal is an analog signal, which is converted into a digital signal and mapped into electric field strength. The data is pre-fitted with a polynomial to obtain a mapping relationship between voltage and electric field strength. The second intermediate electrostatic signal is converted into the initial electrostatic field strength based on the mapping relationship.

[0051] This embodiment effectively suppresses environmental electromagnetic interference and signal attenuation problems by accurately identifying different interference types and adapting filtering algorithms, combined with range adaptive amplification, avoiding signal distortion and detection errors caused by interference, and significantly improving the signal-to-noise ratio. The measurement results of the initial electrostatic field strength are closer to the true value, enhancing the accuracy and stability of electrostatic detection in complex electromagnetic environments.

[0052] A possible implementation of the embodiment of the present application is to perform geometric correction on the initial electrostatic field strength based on shape information and detection distance to obtain the electrostatic field strength, including: Determine whether the object being measured has a regular shape based on shape information; When the object being measured is of regular shape, the shape type of the object being measured is determined, and the geometric correction coefficient is determined based on the shape type; when the object being measured is of irregular shape, the geometric correction coefficient is calculated using a finite element algorithm; The initial electrostatic field intensity is geometrically corrected based on the geometric correction coefficient to obtain the electrostatic field intensity.

[0053] In this embodiment, a contour sensor is used to collect point cloud data of the surface of the object being measured. The point cloud data includes three-dimensional coordinate information of each point on the surface of the object.

[0054] A plane is fitted to the collected point cloud data, and the distance from each point to the fitted plane is calculated. If the distance error from a preset percentage (e.g., 95%) of the points to the fitted plane is less than the preset distance, the object is determined to be a planar conductor. If the object's dimensions (length and width) satisfy the requirement that the detection distance is less than 1 / 10 of the object's smallest side length, the object is determined to be an infinite planar conductor; otherwise, it is determined to be a finite planar conductor.

[0055] The point cloud data is matched with the preset sphere and cylinder respectively. When the matching degree reaches a certain ratio, it is determined to meet the corresponding regular shape type.

[0056] If the point cloud data cannot meet the above-mentioned regular shape judgment conditions, it is considered to be an irregular shape.

[0057] After determining the geometric correction coefficient, the product of the initial electrostatic field intensity and the geometric correction coefficient is calculated to obtain the electrostatic field intensity.

[0058] This embodiment accurately quantifies the impact of different shapes and detection distances on the electrostatic field distribution, effectively corrects the measurement deviation caused by the geometric characteristics of the object, reduces the error in electrostatic field strength detection, and greatly improves the accuracy and reliability of the detection results.

[0059] In a possible implementation of the embodiment of the present application, the shape types include: a planar conductor, a spherical conductor, and a cylindrical conductor; Determines geometric correction factors based on shape type, including: When the object to be measured is a planar conductor, the size information of the object to be measured is extracted from the shape information, and the object to be measured is judged to be an infinite planar conductor or a finite planar conductor based on the size information and the detection distance; When the object being measured is a finite plane conductor, the edge correction coefficient is obtained as the geometric correction coefficient; When the object being measured is a spherical or cylindrical conductor, the geometric correction factor is calculated based on the size information and the detection distance.

[0060] In this embodiment, for wireless planar conductors, the geometric correction factor is directly set to 1. This is because when the detection distance is much smaller than the object size, the electric field distribution can be approximately assumed to be uniform, and no correction is required. For finite planar conductors, the corresponding edge correction factor is obtained by consulting a pre-established edge effect coefficient table, which can be established through theoretical calculation or experimental measurement to cover correction factor values ​​for different size ratios and detection distances.

[0061] For spherical conductors, the geometric correction factor is calculated using the formula r / (r+d) based on the sphere radius r and the detection distance d. This formula is derived based on the theoretical model of the electric field distribution of spherical conductors and can reflect the effect of distance on the electric field strength.

[0062] For a cylindrical conductor, the radius of the cylinder is recorded as R, the length is recorded as L, and the detection distance is d.

[0063] This embodiment extracts the quantitative relationship between object size information and detection distance, combines edge effect correction and theoretical formula calculation, and effectively compensates for the electric field distortion caused by uneven charge distribution on the surface of conductors of different shapes.

[0064] A possible implementation of the embodiment of the present application is to calculate the geometric correction coefficient using a finite element algorithm, including: constructing a geometric model of the object to be measured based on shape information, and dividing the geometric model into multiple finite elements; Establishing the electrostatic field control equation for each finite element, combining the electrostatic field control equations of multiple finite elements to obtain a global equation system; solving the global equation system to obtain the node potential, and calculating the simulated electric field intensity based on the node potential; The geometric correction factor is calculated based on the simulated electric field strength and the initial electrostatic field strength.

[0065] In this embodiment, based on the collected point cloud data, a three-dimensional modeling software or algorithm (such as a triangular meshing algorithm) is used to construct a geometric model of the object to be measured, and it is divided into multiple finite element units. The size of the finite element unit is set according to the calculation accuracy requirements, and the general unit size is not greater than 1 / 10 of the detection distance.

[0066] The electrostatic field control equation is established for each finite element, which is based on the Poisson equation simplified from Maxwell's equations. Where V is the potential, ρ is the charge density (which can be determined by pre-measuring the charge of the object being measured), and ε is the dielectric constant. The governing equations for multiple finite element units are combined to form a global system of equations. Numerical methods (such as the finite element method or finite difference method) are used to solve this global system of equations and obtain the potential value at each node.

[0067] Based on the obtained node potentials, the electric field strength at each node is calculated using numerical differentiation methods (such as the central difference method), thereby obtaining the simulated electric field strength distribution of the entire model. The ratio of the simulated electric field strength at the detection probe to the initial electrostatic field strength is calculated as the geometric correction factor.

[0068] This embodiment constructs a geometric model based on shape information and divides the finite element, establishes and solves the electrostatic field control equation to obtain the node potential, and then calculates the simulated electric field strength. Finally, the geometric correction coefficient is determined by comparing the initial electrostatic field strength, and the electrostatic field problem of complex irregular objects is converted into a computable numerical model. It can accurately simulate the charge distribution and electric field characteristics on the surface of the object, effectively correct the electric field distortion error caused by the irregular shape of the object, and greatly improve the accuracy of the electrostatic field strength measurement of irregular objects.

[0069] In a possible implementation of the embodiment of the present application, the environmental information further includes current temperature and current humidity; Perform environmental compensation on the initial electrostatic voltage value based on the environmental information to obtain the electrostatic voltage value of the object being measured, including: Determine the unit temperature compensation coefficient corresponding to the current temperature, calculate the temperature difference between the current temperature and the reference temperature, and use the product of the temperature difference and the unit temperature compensation coefficient as the temperature compensation coefficient; Determine the unit humidity compensation coefficient corresponding to the current humidity, calculate the humidity difference between the current humidity and the reference humidity, and use the product of the humidity difference and the unit humidity compensation coefficient as the humidity compensation coefficient; The initial electrostatic voltage value is environmentally compensated based on the temperature compensation coefficient and the humidity compensation coefficient to obtain the electrostatic voltage value of the object being measured.

[0070] In this embodiment, the unit temperature compensation coefficient is a predetermined constant that represents the degree of change in the electrostatic voltage value per unit temperature change and can be obtained through experimentation or theoretical calculation. The reference temperature is a reference standard ambient temperature, which can be selected as 25°C. The unit humidity compensation coefficient is also a predetermined constant that represents the degree of change in the electrostatic voltage value per unit humidity change.

[0071] The unit temperature compensation coefficient and the unit humidity compensation coefficient can both be voltage values ​​or ratios. When both are voltage values, the sum of the temperature compensation times, the humidity compensation coefficient, and the initial electrostatic voltage value is calculated as the electrostatic voltage value of the measured object. When both are ratios, the initial electrostatic voltage value multiplied by (1 + temperature compensation coefficient + humidity compensation coefficient) is calculated as the electrostatic voltage value of the measured object.

[0072] This embodiment fully considers the impact of changes in ambient temperature and humidity on electrostatic voltage measurement, effectively eliminating measurement errors caused by factors such as changes in material dielectric constant due to temperature changes and surface charge leakage due to humidity changes, and significantly improves the accuracy and stability of electrostatic voltage detection results under different environmental conditions, making the detection results more in line with actual working conditions.

[0073] In a possible implementation of the embodiment of the present application, the environmental information further includes light information; Obtain environmental information, original electrostatic signals and physical information of the object being measured, including: Get the light information collected by the environmental sensor; Based on the light information, it is determined whether there is insufficient light. When it is determined that there is insufficient light, the infrared sensor is controlled to start, and the infrared sensor is controlled to assist the contour sensor in collecting physical information of the object being measured; The electrostatic sensor is controlled to collect the original electrostatic signal.

[0074] In this embodiment, the light information includes the current ambient light intensity. The current ambient light intensity is compared with the preset light intensity threshold. If the current ambient light intensity is lower than the preset light intensity threshold, it is determined that there is insufficient light. If the current ambient light intensity is not lower than the preset light intensity threshold, it is determined that there is no insufficient light.

[0075] When there is insufficient light, the infrared sensor is turned on and infrared light is irradiated on the surface of the object to improve the detectability of the object being measured.

[0076] This embodiment enables infrared sensors to assist in collection when light is insufficient, and at the same time controls the contour sensor to obtain physical information of the object, effectively solving the problem of detection errors caused by the performance degradation of auxiliary equipment in traditional electrostatic detection in dark environments. The infrared sensor's characteristic of not being affected by light ensures the accuracy of the collection of physical information such as the object's contour and distance.

[0077] In the embodiment of the present application, a processing module is provided, such as Figure 2 As shown, Figure 2 The processing module 200 shown includes a processor 201 and a memory 203. The processor 201 and the memory 203 are connected, for example, via a bus 202. Optionally, the processing module 200 may further include a transceiver 204. It should be noted that in practical applications, the number of transceivers 204 is not limited to one, and the structure of the processing module 200 does not constitute a limitation on the embodiments of the present application.

[0078] The processor 201 may be a CPU (Central Processing Unit), a general-purpose processor, a DSP (Digital Signal Processor), an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), or other programmable logic devices, transistor logic devices, hardware components, or any combination thereof. It may implement or execute the various exemplary logic blocks, modules, and circuits described in conjunction with the disclosure of this application. The processor 201 may also be a combination that implements computing functions, such as a combination of one or more microprocessors, a combination of a DSP and a microprocessor, and the like.

[0079] The bus 202 may include a path for transmitting information between the above components. The bus 202 may be a PCI (Peripheral Component Interconnect) bus or an EISA (Extended Industry Standard Architecture) bus. The bus 202 may be divided into an address bus, a data bus, a control bus, etc. For ease of representation, Figure 2 Only one thick line is used in the diagram, but it does not mean that there is only one bus or one type of bus.

[0080] The memory 203 may be a ROM (Read Only Memory) or other types of static storage devices that can store static information and instructions, a RAM (Random Access Memory) or other types of dynamic storage devices that can store information and instructions, or an EEPROM (Electrically Erasable Programmable Read Only Memory), a CD-ROM (Compact Disc Read Only Memory) or other optical disk storage, optical disk storage (including compact discs, laser discs, optical discs, digital versatile discs, Blu-ray discs, etc.), a magnetic disk storage medium or other magnetic storage device, or any other medium that can be used to carry or store desired program code in the form of instructions or data structures and can be accessed by a computer, but is not limited thereto.

[0081] The memory 203 is used to store application code for executing the solution of the present application, and is controlled by the processor 201. The processor 201 is used to execute the application code stored in the memory 203 to implement the content shown in the above-mentioned static electricity detection method embodiment.

[0082] Figure 2 The processing module shown is merely an example and should not limit the functions and scope of use of the embodiments of the present application.

[0083] An embodiment of the present application provides a computer-readable storage medium having a computer program stored thereon. When the computer-readable storage medium is run on a computer, the computer can execute the contents shown in the aforementioned electrostatic detection method embodiment.

[0084] It should be understood that although the steps in the flowcharts of the accompanying drawings are shown in sequence as indicated by the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some of the steps in the flowcharts of the accompanying drawings may include multiple sub-steps or multiple stages, and these sub-steps or stages are not necessarily executed at the same time, but can be executed at different times, and their execution order is not necessarily sequential, but can be executed in turn or alternately with other steps or at least a portion of the sub-steps or stages of other steps.

[0085] An embodiment of the present application provides a computer program product, including a computer program. When the computer program is executed by a processor, the contents shown in the aforementioned electrostatic detection method embodiment are implemented.

[0086] The above are only some of the implementation methods of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. A static electricity detection method, characterized in that: Applied to a portable static electricity detector, the static electricity detector includes a processing module, and the method is executed by the processing module, the method including: Acquiring environmental information, original electrostatic signals, and physical information of the object being measured, wherein the physical information includes a detection distance from the object being measured and shape information of the object being measured; converting the original electrostatic signal into an initial electrostatic field intensity based on the environmental information; Performing geometric correction on the initial electrostatic field strength based on the shape information and the detection distance to obtain the electrostatic field strength, and calculating the product of the detection distance and the electrostatic field strength as the initial electrostatic voltage value; Environmental compensation is performed on the initial electrostatic voltage value based on the environmental information to obtain the electrostatic voltage value of the object to be measured.

2. The static electricity detection method according to claim 1, wherein: The environmental information includes interference information; The converting the original electrostatic signal into an initial electrostatic field intensity based on the environmental information includes: determining whether the original electrostatic signal has interference based on the interference information; When it is determined that interference exists in the original electrostatic signal, determining the interference type, and selecting an interference removal method based on the interference type to process the original electrostatic signal to obtain a first intermediate electrostatic signal; determining a gain of the first intermediate electrostatic signal based on an effective range, and amplifying the first intermediate electrostatic signal based on the gain to obtain a second intermediate electrostatic signal; The second intermediate electrostatic signal is converted into the initial electrostatic field intensity.

3. The static electricity detection method according to claim 1, wherein: The geometrically correcting the initial electrostatic field strength based on the shape information and the detection distance to obtain the electrostatic field strength includes: Determining whether the measured object has a regular shape based on the shape information; When the measured object is of the regular shape, determining the shape type of the measured object, and determining a geometric correction coefficient based on the shape type; When the object to be measured is of irregular shape, a finite element algorithm is used to calculate the geometric correction coefficient; The initial electrostatic field strength is geometrically corrected based on the geometric correction coefficient to obtain the electrostatic field strength.

4. The static electricity detection method according to claim 3, characterized in that: The shape types include: planar conductor, spherical conductor and cylindrical conductor; The determining of a geometric correction coefficient based on the shape type includes: When the object to be measured is the planar conductor, extracting size information of the object to be measured from the shape information, and judging whether the object to be measured is an infinite planar conductor or a finite planar conductor based on the size information and the detection distance; When the measured object is the finite plane conductor, obtaining an edge correction coefficient as a geometric correction coefficient; When the measured object is the spherical conductor or the cylindrical conductor, a geometric correction coefficient is calculated based on the size information and the detection distance.

5. The static electricity detection method according to claim 3, wherein: The method of calculating the geometric correction coefficient by using a finite element algorithm includes: constructing a geometric model of the object to be measured based on the shape information, and dividing the geometric model into a plurality of finite elements; Establishing an electrostatic field control equation for each finite element, and combining the electrostatic field control equations of the plurality of finite elements to obtain a global equation group; Solving the global equations to obtain node potentials, and calculating simulated electric field strength based on the node potentials; The geometric correction coefficient is calculated based on the simulated electric field strength and the initial electrostatic field strength.

6. The static electricity detection method according to claim 1, wherein: The environmental information also includes current temperature and current humidity; The performing environmental compensation on the initial electrostatic voltage value based on the environmental information to obtain the electrostatic voltage value of the object under test includes: Determining a unit temperature compensation coefficient corresponding to a current temperature, calculating a temperature difference between the current temperature and a reference temperature, and using the product of the temperature difference and the unit temperature compensation coefficient as the temperature compensation coefficient; Determining a unit humidity compensation coefficient corresponding to the current humidity, calculating a humidity difference between the current humidity and a reference humidity, and using the product of the humidity difference and the unit humidity compensation coefficient as the humidity compensation coefficient; Environmental compensation is performed on the initial electrostatic voltage value based on the temperature compensation coefficient and the humidity compensation coefficient to obtain the electrostatic voltage value of the measured object.

7. The static electricity detection method according to claim 1, wherein: The environmental information also includes light information; The step of obtaining environmental information, original electrostatic signals, and physical information of the object under test includes: Controlling the contour sensor to collect physical information of the measured object; Based on the light information, it is determined whether there is insufficient light. When it is determined that there is insufficient light, the infrared sensor is controlled to start, and the infrared sensor is controlled to assist the electrostatic sensor in collecting the original electrostatic signal.

8. A portable static electricity detector, characterized in that: include: Contour sensor, electrostatic sensor, infrared sensor, environmental detection module, processing module and display interface; The contour sensor is used to obtain physical information of the object being measured; The electrostatic sensor is used to collect the original electrostatic signal; The infrared sensor is used to assist the electrostatic sensor in collecting the original electrostatic signal in insufficient light conditions; The environment detection module is used to obtain environmental information; The processing module is used to execute the electrostatic detection method according to any one of claims 1 to 7; The display interface is used to display the electrostatic voltage value of the object being measured.

9. The portable static electricity detector according to claim 8, characterized in that: The processing module includes: at least one processor; Memory; At least one application, wherein the at least one application is stored in a memory and configured to be executed by at least one processor, and the at least one application is configured to: execute the electrostatic detection method according to any one of claims 1 to 7.

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