Filtering device, filtering system and filtering method

Abstract

In order to achieve efficient filtration, the present invention is provided with a first liquid holding section (101) for holding a liquid, a second liquid holding section (201) provided with a first hole (411) in the bottom surface thereof and a second hole (421) in a surface different from the bottom surface thereof, and a third liquid holding section (301) provided with a third hole (421) in the first liquid holding section (101). The first liquid holding part (101) is provided with a first hole (411), the second liquid holding part (201) is communicated with the first liquid holding part (101) through the first hole (411), the third liquid holding part (301) is communicated with the first liquid holding part (101) through the second hole (421), a first filter (412) is arranged in the first hole (411), and a second filter (422) is arranged in the second hole (421).

Description

Technical Field

[0001] The present invention relates to the technology of a filtering device, a filtering system and a filtering method. Background Art

[0002] With the advancement of nano-microtechnology, industries are using particles ranging in size from tens of nanometers to hundreds of micrometers. For example, microparticles are used in automotive paints and cosmetics. Microscopic observation is used to evaluate and inspect microparticles in such solutions. Electron microscopes with sufficient resolution are often used to evaluate particles in greater detail. Microscopic evaluation is also becoming important in inspecting foreign particles mixed in manufactured materials. In the field of precision equipment, detecting trace foreign particles contained in cleaning fluids is crucial when evaluating the cleanliness of components.

[0003] Patent Document 1 discloses a technique for microscopically observing particles suspended at low concentrations in a large volume of liquid. Patent Document 1 discloses a particle capture device and a particle measurement method, which states, "a particle capture device for capturing particles contained in a liquid, comprising a filter unit 10 including a filter membrane 11. The filter unit 10 is configured so that liquid flowing into the filter unit 10 passes through a portion of the filter membrane 11."

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Laid-Open No. 2017-138226 Summary of the Invention

[0007] Problems to be solved by the invention

[0008] In the method described in Patent Document 1, microparticles on a filter membrane are sometimes efficiently observed by passing a liquid containing microparticles through a portion of the filter membrane. In the technique described in Patent Document 1, a large amount of liquid must be passed through to recover low-concentration microparticles to a density suitable for microscopic observation. If the area of ​​the filter membrane through which the liquid passes is small, filtering a large amount of liquid can be time-consuming.

[0009] The present invention has been made in view of the above background, and an object of the present invention is to achieve efficient filtration.

[0010] Means for solving problems

[0011] In order to solve the above-mentioned problems, the present invention has a first liquid retention part, a second liquid retention part and a third liquid retention part, the first liquid retention part retains the liquid of the filtration object, a first hole is provided on the bottom surface of the first liquid retention part, and a second hole is provided on the surface of the first liquid retention part different from the bottom surface, the second liquid retention part is connected to the first liquid retention part via the first hole, the third liquid retention part is connected to the first liquid retention part via the second hole, a first filter is provided in the first hole, and a second filter is provided in the second hole.

[0012] Other solutions will be described appropriately in the embodiments.

[0013] Effects of the Invention

[0014] According to the present invention, efficient filtration can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram (part 1) showing an example of the structure of the filtration device according to the first embodiment.

[0016] Figure 2 This is a schematic diagram (part 2) showing an example of the structure of the filtration device according to the first embodiment.

[0017] Figure 3 It is a diagram showing a configuration example of a filtration system.

[0018] Figure 4 It is a diagram showing an exploded state of the filter device.

[0019] Figure 5 This is a diagram showing the structure of the first filter (part 1).

[0020] Figure 6 This is a diagram showing the structure of the first filter (part 2).

[0021] Figure 7 This is a diagram (part 1) showing an overview of filtration of a particulate suspension using a filtration device.

[0022] Figure 8 This is a diagram (part 2) showing an overview of filtration of a particulate suspension using a filtration device.

[0023] Figure 9 This is a diagram (part 3) showing an overview of filtration of a particulate suspension using a filtration device.

[0024] Figure 10 This is a table showing numerical values ​​related to the area of ​​the first hole.

[0025] Figure 11This is a schematic diagram (part 1) showing an example of the structure of a filtration device according to the second embodiment.

[0026] Figure 12 This is a schematic diagram (part 2) showing an example of the structure of the filtration device according to the second embodiment.

[0027] Figure 13 This is a schematic diagram (part 3) showing an example of the structure of the filtration device according to the second embodiment.

[0028] Figure 14 This is a schematic diagram (Part 4) showing an example of the structure of the filtration device according to the second embodiment.

[0029] Figure 15 This is a schematic diagram (part 1) showing an example of the structure of a filtration device according to a third embodiment.

[0030] Figure 16 This is a schematic diagram (part 2) showing an example of the structure of the filtration device according to the third embodiment.

[0031] Figure 17 This is a schematic diagram (Part 3) showing an example of the structure of the filtration device according to the third embodiment.

[0032] Figure 18 This is a schematic diagram (Part 4) showing an example of the structure of the filtration device according to the third embodiment.

[0033] Figure 19 This is a schematic diagram (part 1) showing an example of the structure of a filtration device according to a fourth embodiment.

[0034] Figure 20 This is a schematic diagram (part 2) showing an example of the structure of the filtration device according to the fourth embodiment.

[0035] Figure 21 This is a schematic diagram (part 3) showing an example of the structure of the filtration device according to the fourth embodiment.

[0036] Figure 22 It is a diagram showing a modified example of the arrangement of the first liquid retaining part.

[0037] Figure 23 This is a diagram (part 1) showing a filtration device according to a fifth embodiment.

[0038] Figure 24 This is a diagram showing a filtration device according to the fifth embodiment (part 2).

[0039] Figure 25 This is a diagram showing an example of the structure of a filtration device according to the sixth embodiment.

[0040] Figure 26This is a flowchart showing the steps of the filtering method according to this embodiment.

[0041] Figure 27 This is a schematic diagram (part 1) for explaining the steps of the filtration method according to the present embodiment.

[0042] Figure 28 This is a schematic diagram (part 2) for explaining the steps of the filtration method according to this embodiment.

[0043] Figure 29 This is a schematic diagram (part 3) for explaining the steps of the filtration method of this embodiment.

[0044] Figure 30 This is a schematic diagram (part 4) for explaining the steps of the filtration method of this embodiment.

[0045] Figure 31 This is a schematic diagram (part 5) for explaining the steps of the filtration method of this embodiment.

[0046] Figure 32 This is a schematic diagram (part six) for explaining the steps of the filtration method of this embodiment.

[0047] Figure 33 This is a schematic diagram (part seven) for explaining the steps of the filtration method of this embodiment.

[0048] Figure 34 This is a schematic diagram for explaining the steps of the filtration method according to this embodiment (part eight).

[0049] Figure 35 This is a schematic diagram (part 9) for explaining the steps of the filtration method according to this embodiment.

[0050] Figure 36 This is a schematic diagram (part 10) for explaining the steps of the filtration method of this embodiment.

[0051] Figure 37 This is a schematic diagram showing another example of the filtration device according to the second embodiment.

[0052] Figure 38 This is a diagram showing the structure of another example of the first filter used in the filtration device of the second embodiment.

[0053] Figure 39 This is a schematic diagram showing another example of the filtration device according to the third embodiment. DETAILED DESCRIPTION

[0054] Hereinafter, the mode for implementing the present invention will be described with reference to the accompanying drawings. Figure 7 and Figure 9The term "particles" includes, but is not limited to, particles formed by pulverization, sintering, crystallization, etc., particles precipitated or generated by chemical reactions, particles generated by external stimulation or external factors, organic fibers, microplastics, pollen, cells, blood cells, bacteria, viruses, etc.

[0055] In addition, in each figure, the same reference numerals are attached to the same structure, and overlapping description is omitted.

[0056] [First embodiment]

[0057] Figure 1 and Figure 2 This is a schematic diagram showing an example of the structure of the filtration device 1 according to the first embodiment.

[0058] Figure 1 Show Figure 2 The A2-A2 sectional view in the figure, Figure 2 Show Figure 1 A1-A1 sectional view in the figure.

[0059] like Figure 1 As shown, the filtration device 1 is composed of a first member 100, a second member 200, and a third member 300. The first member 100, which is a first container, has a cylindrical space inside and a first liquid holding portion 101 for holding liquid. That is, the first liquid holding portion 101 is provided in the first member 100. The first liquid holding portion 101 is filled with and holds a liquid containing microparticles 701 (see Figure 7 、 Figure 9 ) solution (referred to as microparticle suspension 700 (refer to Figure 7 、 Figure 9 )). It should be noted that in Figure 1 and Figure 2 In the example shown, the cross-sectional shape (cross-sectional shape) of the first liquid retaining member 101 when cut in a direction perpendicular to the axial direction of the first liquid retaining member 101 is approximately circular. However, the cross-sectional shape of the first liquid retaining member 101 is not limited to a circle and may also be a polygon. Furthermore, a first hole 411 is provided on the bottom surface of the first liquid retaining member 101, and a second hole 421 is provided on a surface (side surface) of the first liquid retaining member 101 that is different from the bottom surface.

[0060] Furthermore, the second member 200 and the third member 300 are second containers that are different from the first member 100 .

[0061] In addition, the second member 200 includes a hollow second liquid retaining portion 201 inside. The second liquid retaining portion 201 can store liquid inside. The liquid stored in the second liquid retaining portion 201 is liquid that has passed through the first filter 412 (filtered). In addition, a hole is provided on the upper surface of the second member 200. This hole, together with the hole provided on the bottom surface of the first liquid retaining portion 101, forms the first hole 411. In other words, the second liquid retaining portion 201 is connected to the first liquid retaining portion 101 via the first hole 411. The hole provided on the bottom surface of the first liquid retaining portion 101 and the hole provided on the upper surface of the second member 200 are preferably approximately the same size, but may be different (in this embodiment, the holes are approximately the same size).

[0062] In this manner, the second liquid retaining part 201 is provided in the second member 200 which is a container different from the first member 100 .

[0063] The third member 300 includes a third liquid retaining portion 301, which is a hollow space, inside. The third liquid retaining portion 301 can store liquid. The liquid stored in the third liquid retaining portion 301 is liquid that has passed through the second filter 422 (filtered). Furthermore, a hole is provided on the side of the third member 300. This hole, together with the hole provided on the side of the first liquid retaining portion 101, forms the second hole 421. That is, the third liquid retaining portion 301 is connected to the first liquid retaining portion 101 via the second hole 421. It should be noted that the hole provided on the side of the first liquid retaining portion 101 and the hole provided on the side of the third member 300 are preferably approximately the same size, but may be different (in this embodiment, the holes are of approximately the same size).

[0064] It should be noted that in this embodiment, the volume of the second liquid retention unit 201 > the volume of the third liquid retention unit 301 > the volume of the first liquid retention unit 101. However, the first liquid retention unit 101 only needs to have a volume that can hold the liquid before filtration. Similarly, the volume of the second liquid retention unit 201 only needs to have a volume that can hold the (filtered) liquid that has passed through the first filter 412. Furthermore, the volume of the third liquid retention unit 301 only needs to have a volume that can hold the (filtered) liquid that has passed through the second filter 422.

[0065] Furthermore, a first exhaust port 501 is provided on any surface constituting the second liquid retaining part 201. The first exhaust port 501 is provided above the second liquid retaining part 201 to prevent the liquid stored in the second liquid retaining part 201 from flowing into the first exhaust port 501.

[0066] Furthermore, a second exhaust port 502 is provided on any surface constituting the third liquid holding part 301. The second exhaust port 502 is preferably provided above the third liquid holding part 301 to prevent the liquid stored in the third liquid holding part 301 from flowing into the second exhaust port 502.

[0067] Also, a first filter 412 is provided in the first hole 411 , and a second filter 422 is provided in the second hole 421 .

[0068] Thus, the first hole 411 of the filtration device 1 is provided on the bottom surface of the first liquid holding portion 101. In addition, a device for concentrating the particle suspension 700 and capturing the particles 701 (see Figure 7 and Figure 9 ) first filter 412. Furthermore, the filtration device 1 is provided with a second hole 421 on a surface different from the bottom surface of the first liquid retaining portion 101. A second filter 422 for filtering the particle suspension 700 is provided in the second hole 421. Furthermore, as described above, the second member 200 includes the second liquid retaining portion 201. Similarly, the third member 300 includes the third liquid retaining portion 301. The second liquid retaining portion 201 and the third liquid retaining portion 301 are substantially airtight.

[0069] The capacity of the first liquid retaining part 101 depends on the concentration of the particle suspension 700 to be filtered, the staining of the particles 701, and the conditions for washing the particles 701. Specifically, the first liquid retaining part 101 has a capacity of approximately 10 to 2000 ml.

[0070] The first filter 412 and the second filter 422 are sheets having multiple fine pores and have a thickness ranging from several μm to several tens of μm. The pore size of the first filter 412 and the second filter 422 is approximately 10 nm to 10 μm. However, this is not limiting; any pore size smaller than that of the particles 701 suspended in the particle suspension 700 to be filtered and capable of recovering the particles 701 as the filtrate can be used. Regarding the pore size of the multiple fine pores, the same pore size can be used in the first filter 412 and the second filter 422. However, the pore size of the first filter 412 and the second filter 422 does not necessarily have to be the same.

[0071] The area of ​​the second hole 421 is preferably larger than that of the first hole 411. In this embodiment, the area of ​​the second hole 421 is greater than that of the first hole 411. Since the first filter 412 is sized to fit within a microscope, the first hole 411 (first filter 412) cannot be made larger than that. Therefore, by making the area of ​​the second hole 421 (second filter 422) larger than that of the first hole 411 (first filter 412), the filtration speed can be increased. This configuration shortens the filtration time compared to a case where only the first hole 411 (first filter 412) is provided.

[0072] However, the second hole 421 does not need to be larger than the first hole 411. In addition, the second liquid holding part 201 and the third liquid holding part 301 have a liquid 711 (see Figure 9 ) volume. Furthermore, the first member 100, the second member 200, and the third member 300 are made of a material resistant to the solution used in the particle suspension 700. Examples of such materials include polypropylene (PP), polycarbonate (PC), polyethylene (PE), polyethersulfone (PES), polyethylene terephthalate (PET), fluororesins such as polytetrafluoroethylene, nylon, and polyetheretherketone (PEEK). Using these resin materials offers the advantages of being inexpensive and lightweight.

[0073] In addition, if Figure 1 As shown, the bottom surface (bottom) of the first liquid retaining portion 101 is spaced a predetermined distance from the lower end of the second hole 421. Consequently, a metering portion 113 capable of storing a predetermined amount of the particle suspension 700 is formed below the second hole 421. However, the metering portion 113 is not necessarily required. Without the metering portion 113, the distance from the lower end of the second hole 421 to the first filter 412 is approximately zero.

[0074] The predetermined distance is the height distance between the bottom surface of the first liquid retaining portion 101 (i.e., the upper surface of the first filter 412) and the lower end of the second hole 421, and is appropriately set based on the specifications of the filtration device 1. A shorter predetermined distance results in a smaller volume of the measuring portion 113, while a longer predetermined distance results in a larger volume of the measuring portion 113.

[0075] It should be noted that the outer shape of the first member 100 at the first liquid retaining part 101 is not limited to Figure 1 Such a quadrilateral shape may also be a circular shape.

[0076] (Filter system Z)

[0077] Figure 3 : is a diagram showing a structural example of a filtration system Z. Figure 3 In the figure, the filter device 1 is shown Figure 2 A2-A2 sectional view.

[0078] When using the filtration system Z, an exhaust pump 521 is connected to the first exhaust port 501 and the second exhaust port 502 of the filtration device 1. The exhaust pump 521 generates a pressure difference for filtering the liquid. Furthermore, the first exhaust port 501 and the second exhaust port 502 are connected to the exhaust pump 521 via a pipe 513. The pipe 513 is provided with a first exhaust valve 511, a second exhaust valve 512, and a pipe filter 531. The pipe filter 531 prevents fine particles from flowing from the filtration device 1 into the exhaust pump 521.

[0079] In this manner, the second liquid holding part 201 and the third liquid holding part 301 are connected to the exhaust pump 521 .

[0080] The first exhaust valve 511 is provided at the first exhaust port 501 and is capable of switching between exhausting the second liquid holding unit 201 and opening it to the atmosphere. Furthermore, the second exhaust valve 512 is provided at the second exhaust port 502 and, similar to the first exhaust valve 511, is capable of switching between exhausting the third liquid holding unit 301 and opening it to the atmosphere. In this manner, the first exhaust valve 511 and the second exhaust valve 512 can be switched between the exhaust pump 521 side and the atmosphere-open side.

[0081] The exhaust pump 521 uses a diaphragm vacuum pump, a dry pump, or other pumps that can operate under low vacuum. As described above, the piping filter 531 is used to prevent fine particles from being sucked into the exhaust pump 521, to prevent the exhaust pump 521 from malfunctioning, and to prevent fine particles from being released from the exhaust port of the exhaust pump 521. The piping filter 531 uses, for example, an air filter such as a HEPA filter. In order to prevent fine particles from being sucked into the exhaust pump 521 separately from the piping filter 531, a collection pipe not shown in the figure may also be used as needed. It should be noted that in Figure 3 In the illustrated example, one pipe filter 531 is provided, but two pipe filters 531 may be provided so as to correspond to the first exhaust valve 511 and the second exhaust valve 512 , respectively.

[0082] The first exhaust valve 511 and the second exhaust valve 512 can be used in either manual or electric mode. When the electric type is used as the first exhaust valve 511 and the second exhaust valve 512, the control device 600 can be used to link it with the operation of the exhaust pump 521, thereby simplifying the operation. The piping 513 uses, for example, a metal or rubber piping. It is preferable to use a piping 513 with a hardness that the piping 313 will not be damaged by suction during exhaust, thereby preventing exhaust from stagnating. If the first exhaust valve 511 and the second exhaust valve 512 are electric, the first exhaust valve 511 and the second exhaust valve 512 can be controlled by the control device 600. In addition, the exhaust pump 521 can be controlled manually or by the control device 600. The drainage 711 (refer to Figure 9 ) can be processed as needed using a purification (sterilization) device not shown.

[0083] (Replacement of the First Filter 412)

[0084] Figure 4 1 is a diagram showing an exploded state of the filter device 1. Figure 4 In the filter device 1, Figure 1 The same is shown in a cross-sectional view.

[0085] like Figure 4 As shown, the first member 100 is attachable to and detachable from the second member 200 and the third member 300. By removing the first member 100 from the second member 200 and the third member 300, the first filter 412 provided in the first hole 411 can be attached and removed. This allows the user to easily remove the first filter 412. After filtering the particles 701 in the particle suspension 700 using the first filter 412 and the second filter 422, the user can remove the first filter 412. Furthermore, by placing the removed first filter 412 under a microscope (not shown), the user can observe the particles 701 recovered by the first filter 412 using the microscope. The microscope in this embodiment refers to an electron microscope, an optical microscope, an atomic force microscope, or the like. The particle suspension 700 is vacuum-filtered using the first filter 412 having multiple micropores using the exhaust pump 521, resulting in a state where the particles 701 are dispersed and captured on the first filter 412. The first filter 412, with the particles 701 dispersed and captured, serves as a sample for microscopic observation. In this way, a sample for microscopic observation can be prepared. It should be noted that the second filter 422 is not used for microscopic observation.

[0086] In addition, the second member 200 and the third member 300 may be disassembled or non-disassembled.

[0087] (Structure of First Filter 412)

[0088] Figure 5 and Figure 6 4 is a diagram showing the structure of the first filter 412 .

[0089] like Figure 5 and Figure 6 As shown, the first filter 412 has a filter body 431 and a frame 432 provided on the periphery of the filter body 431. The frame 432 has a hardness that can be grasped. In the example shown in FIG. 4 , the frame 432a is provided around the filter body 431a having a quadrilateral shape. Figure 6 In the example shown, a frame 432b is provided around a filter body 431b having a circular shape. It should be noted that the shapes of the filter body 431 and the frame 432 are not limited to Figure 5 and Figure 6 The shapes shown may also be polygonal shapes other than elliptical shapes or quadrilaterals.

[0090] like Figure 5 and Figure 6 As shown, the filter body 431, which is thin and difficult to handle alone, is fixed to the frame 432. This makes it easy for the user to hold the first filter 412. As a result, it is easy to attach and detach the first filter 412 relative to the filter device 1, or to mount the first filter 412 on the sample stage of a microscope (not shown). By using a conductive material as the frame 432, it is possible to mitigate the charge caused by the electron beam, for example, during electron microscope observation. Alternatively, the filter body 431 can be directly subjected to a conductive treatment such as a coating based on gold or platinum. This is also effective in alleviating the charge caused by the electron beam.

[0091] The filter body 431 is made of, for example, polycarbonate (PC), polyester (PET), polyimide (PI), regenerated cellulose, nitrocellulose, cellulose acetate, cellulose mixed ester, polypropylene, nylon, polyamide, polytetrafluoroethylene (PTFE), polyvinylidene chloride (PVC), polyvinylidene fluoride (PVDF), polyethersulfone (PES), or the like.

[0092] A membrane filter suitable for the filter body 431 is selected from the following viewpoints.

[0093] (1) Chemical resistance to the reagents used.

[0094] (2) Whether the components contained in the sample can be adsorbed by the filter material.

[0095] (3) Is the pore size of the filter body 431 smaller than the particles 701 to be collected?

[0096] In addition, the filter body 431 of the first filter 412 and the filter body of the second filter 422 may be made of the same material or different materials.

[0097] (Filtering Overview)

[0098] Next, use Figures 7 to 9 The following describes the outline of the filtration of the particle suspension 700 (liquid) using the filtration device 1. Note that the detailed steps of the filtration of the particle suspension 700 will be described later. Figure 3 .

[0099] Figures 7 to 9 1 and 2 are diagrams schematically illustrating filtration of a particulate suspension 700 using the filtration device 1. In the following drawings, only elements necessary for explaining the filtration device 1 are denoted by reference numerals.

[0100] First, if Figure 7 As shown, a particle suspension 700 containing particles 701 is injected into the first liquid retaining part 101. The injected particle suspension 700 is substantially blocked by the first filter 412 and the second filter 422 from flowing into the second liquid retaining part 201 and the third liquid retaining part 301.

[0101] Although Figures 7 to 9 The diagram is omitted, but Figure 3 As shown, an exhaust pump 521 is connected to the first exhaust port 501 and the second exhaust port 502. The first exhaust valve 511 and the second exhaust valve 512 are switched to the side connected to the exhaust pump 521 (exhaust state). Then, the second liquid retaining unit 201 and the third liquid retaining unit 301 are evacuated (exhausted) by the exhaust pump 521. As a result, the solution (effluent 711) obtained by filtering the particles 701 from the particle suspension 700 flows through the first filter 412 and the second filter 422 into the second liquid retaining unit 201 and the third liquid retaining unit 301. At this time, the particles 701 are filtered in the first filter 412 and the second filter 422.

[0102] As a result, if Figure 8 As shown in FIG. 1 , the drain liquid 711 is recovered to the second liquid holding part 201 and the third liquid holding part 301. Then, as shown in FIG. Figure 8 As shown, as a result of the suction by the exhaust pump 521, the particle suspension 700 injected into the first liquid retaining part 101 is concentrated near the measuring part 113 provided below the second filter 422. Concentration near the measuring part 113 means that the liquid level of the particle suspension 700 reaches near the upper end of the measuring part 113 (the lower end of the second hole 421).

[0103] Then, if Figure 8 As shown, when the particle suspension 700 is concentrated near the metering unit 113, the first exhaust valve 511 connected to the second liquid retaining unit 201 is opened to the atmosphere. Note that the second exhaust valve 512 remains switched to the exhaust pump 521 (exhaust state). As a result, filtration through the first filter 412 ceases, and only filtration through the second filter 422 continues. In other words, filtration is performed solely by the second filter 422 (third liquid retaining unit 301).

[0104] exist Figure 8 If suction is performed on the second liquid retaining part 201 while the liquid level of the particle suspension 700 is maintained, the liquid level of the particle suspension 700 may be sucked to a position below the upper end of the measuring part 113. In contrast, by suctioning only on the third liquid retaining part 301, when the liquid level of the particle suspension 700 reaches the upper end of the measuring part 113, the particle suspension 700 solution is not further discharged into the third liquid retaining part 301.

[0105] Then, if Figure 9 As shown, when the particle suspension 700 is concentrated below the second filter 422, the suction by the exhaust pump 521 is stopped. As a result, the filtration by the second filter 422 is also stopped, and the concentrated particle suspension 700 is stored in the metering part 113 located below the second filter 422. The particle suspension 700 stored in the metering part 113 is appropriately referred to as concentrated liquid. Figures 7 to 9 The method shown here concentrates the particle suspension 700 to a predetermined volume by adjusting the first exhaust valve 511. After adding a reagent or the like to the concentrated liquid, the second liquid holding unit 201 is further aspirated, and the concentrated liquid stored in the metering unit 113 is recovered into the second liquid holding unit 201. The first filter 412 is then recovered. This process will be described later.

[0106] (Area of ​​the first hole 411)

[0107] Figure 10 This is a table showing recommended numerical values ​​regarding the area of ​​the first hole 411 .

[0108] like Figure 10 As shown, the area of ​​first hole 411 for recovering microparticles 701 is determined by the number of microparticles 701 in microparticle suspension 700, the observation area per field of view during microscopic observation, and the particle density per unit observation area. The observation area per field of view under a microscope is determined by the observation magnification of the microscope.

[0109] For example, using the filter device 1 with a first hole 411 having a diameter of φ2.5 mm, 50 mL of the particle suspension 700 with a particle concentration of 2000 particles / mL is filtered.2 In this case, 20 particles 701 can be observed per field of view. The area of ​​each field of view of the observation image when observed with a microscope at a magnification of 100 to 10,000 times is 0.0001 to 0.01 mm 2 By concentrating and recovering particles 701 at a density that allows observation of at least one particle 701 per field of view, particles 701 can be observed in any field of view. Specifically, the concentration of particles 701 and the diameter of first pores 411 (first filter 412) are adjusted to a density that allows observation of at least one particle 701 per field of view. This allows observation of particles 701 in any field of view, shortening the time required for observation.

[0110] It should be noted that if the diameter of first hole 411 is large, bubbles may form in a portion of first filter 412. This can cause particles 701 to remain unrecovered in first filter 412. In this case, the uniform dispersion of particles 701 in first filter 412 cannot be maintained. Furthermore, if the diameter of first hole 411 is small, bubbles may cover the entire bottom surface, making filtration impossible and preventing particle recovery. While this depends on other factors, such as the concentration and volume of the liquid, the diameter of first hole 411 is preferably approximately 0.5 to 6 mm.

[0111] The filtration device 1 of the first embodiment includes a first filter 412 disposed in the first hole 411 and a second filter 422 disposed in the second hole 421. By utilizing multiple filters for filtration, filtration time can be shortened. Furthermore, the area of ​​the second hole 421 (i.e., the area of ​​the second filter 422) is larger than the area of ​​the first hole 411 (the first filter 412). This configuration further shortens filtration time. Furthermore, the filtration device 1 of the first embodiment can efficiently concentrate large amounts of particle suspensions at low concentrations, allowing the particles to be recovered in an area suitable for observation.

[0112] Furthermore, the provision of metering unit 113 allows the solution (particle suspension 700) to be maintained at a constant volume while being concentrated. Furthermore, by adding additives to the solution (particle suspension 700) held in metering unit 113, a process for reacting the particles 701 with the additives at a desired (predetermined) concentration can be performed in metering unit 113. Furthermore, by filtering the particles 701 through first filter 412, which has a small filtration area, the particles 701 can be recovered at a density suitable for microscopic observation, facilitating microscopic observation.

[0113] [Second embodiment]

[0114] Next, refer to Figures 11 to 14A second embodiment of the present invention will be described.

[0115] The second embodiment further adds components to the filter device 1 of the first embodiment. Hereinafter, description of the parts common to the first embodiment may be omitted.

[0116] Figures 11 to 14 : is a schematic diagram showing an example of the structure of the filtering device 1a according to the second embodiment. Figures 11 to 14 , an example of the structure of a porous filter device 1 a having a plurality of first holes 411 is shown.

[0117] Figure 11 is a longitudinal section showing the filter device 1a ( Figure 12 In addition, Figure 12 yes Figure 11 B1-B1 sectional view of the . And, Figure 13 It shows Figure 11 The B2-B2 cross section of FIG. Figure 14 It shows Figure 11 The B3-B3 section view.

[0118] In the first component 100a of the filter device 1a, there is a structure in which first holes 411 are arranged in two rows in parallel. In addition, first filters 412 are respectively provided in the first holes 411. Figures 11 to 13 In the example shown, each row of first holes 411 includes four first holes 411. It should be noted that rows of first holes 411 are sometimes referred to simply as "rows" below. Thus, the filter device 1a includes a plurality of first holes 411, each of which is provided with a first filter 412.

[0119] Furthermore, the second holes 421 and the second filter 422 are provided so as to correspond to the rows of the first holes 411. Furthermore, the third liquid retaining unit 301 is provided so as to correspond to the rows of the first holes 411. That is, one second hole 421, one second filter 422, and one third liquid retaining unit 301 are provided for each row of the first holes 411.

[0120] like Figure 12 As shown, the first holes 411 arranged in a row are arranged at equal intervals. However, the first holes 411 do not have to be arranged at equal intervals. In addition, the number of the first holes 411 is determined by the movable range of the microscope stage, the intervals between the first holes 411, etc.

[0121] In addition, if Figure 13As shown, in the filtration device 1a, a first liquid retaining portion 101 is provided for each column. In other words, a common first liquid retaining portion 101 is provided for the first wells 411 constituting the column. Thus, in the filtration device 1a, a common first liquid retaining portion 101, second wells 421, and second filter 422 are provided for the plurality of first wells 411.

[0122] In addition to the effects shown in the first embodiment, the filter device 1a having such a structure is also suitable for filtering one type of particle suspension 700 using the first filter 412 provided in one row. That is, one type of particle suspension 700 can be filtered for one row of the first holes 411. However, Figure 13 As shown, the measuring part 113 is formed in a manner corresponding to each of the first holes 411. That is, the first liquid holding part 101 is connected to the upper part of the measuring part 113. In addition, different reagents 731 can be added to the particles 701 filtered by each first filter 412 (see Figure 35 ).

[0123] Furthermore, the first holes 411 in a row can be made to have the same area (the same diameter). In this case, for each of the first filters 412 constituting a row, the particles 701 in the particle suspension 700 can be recovered after being filtered in equal amounts. In addition, the same particle suspension 700 can be injected into each of the first liquid holding portions 101 arranged in parallel, or a particle suspension 700 in which different particles 701 are suspended can be injected. Figure 11 As shown, the second hole 421 exists in the upper portion of the metering portion 113. Figures 12 to 14 As shown, the second hole 421 and the second filter 422 connected to the first liquid retaining part 101 are provided corresponding to the first liquid retaining part 101. That is, one second hole 421 and one second filter 422 are provided for each first liquid retaining part 101. In other words, as described above, one second hole 421, one second filter 422, and one third liquid retaining part 301 are provided for each row of first holes 411.

[0124] Furthermore, in the filtration device 1a, the first member 100a is also attachable to and detachable from the second member 200 and the third member 300. Furthermore, a common second liquid retaining portion 201 and third liquid retaining portion 301 are provided for each first liquid retaining portion 101. It should be noted that the total area of ​​the first filter 412 is smaller than the area of ​​the second filter 422.

[0125] In addition, if Figure 11As shown, the first component 100a of the filter device 1a is divided into components denoted by reference numerals 131, 132a, and 132b. In such a structure, the user can detach the components denoted by reference numerals 132a and 132b from the second component 200 and the third component 300, respectively. However, the first component 100a may also be detached as shown in FIG. Figure 11 Shown is not split.

[0126] [Third embodiment]

[0127] Next, refer to Figures 15 to 18 A third embodiment of the present invention will be described.

[0128] Figures 15 to 18 : is a schematic diagram showing an example of the structure of the filter device 1b of the third embodiment. Figures 15 to 18 , an example of the structure of a porous filter device 1 b having a plurality of first holes 411 is shown.

[0129] Figure 15 This is a schematic diagram showing an example of the structure of a filtration device 1b according to the third embodiment.

[0130] Figure 15 A longitudinal sectional view of the filter device 1b is shown. Figure 16 yes Figure 15 The C1-C1 sectional view in the figure. In addition, Figure 17 yes Figure 15 The C2-C2 sectional view in the figure.

[0131] like Figure 15 and Figure 16 As shown, in the filter device 1b, the number of first holes 411 provided in the first member 100b is one. Figure 11 As shown, the first holes 411 can also be arranged in two rows. In one row, there are multiple (in Figure 16 In the example shown, there are four first holes 411. In this way, in the filter device 1b, a plurality of first holes 411 are provided, and a first filter 412 is provided for each first hole 411.

[0132] Moreover, if Figure 16 As shown in FIG. 1 , a first liquid holding portion 101 is provided for each of the plurality of first holes 411. That is, a first liquid holding portion 101 is independently provided for each of the first holes 411 arranged in a row. Figure 16As shown, a metering unit 113 is provided for each of the first liquid holding units 101. By setting such a structure, the type of particle suspension 700 injected into each first liquid holding unit 101 can be different. In other words, more than one (plural) particle suspensions 700 can be injected into the filtering device 1b. Thus, different particle suspensions 700 can be filtered in each first filter 412. In addition, as Figure 15 As shown, the lower end of the second hole 421 is at least arranged on the upper part of the metering portion 113. Figure 17 As shown, the second filter 422 connected to the first liquid retaining part 101 can be composed of a single filter.

[0133] It should be noted that a second liquid retention part 201 and a third liquid retention part 301 are provided in common for each first liquid retention part 101 .

[0134] Figure 18 This is a diagram showing another example of the filtering device 1b.

[0135] like Figure 18 As shown, the second filter 422 connected to the first liquid retaining part 101 may be provided so as to correspond to each of the plurality of first liquid retaining parts 101 .

[0136] It should be noted that, in the filter device 1b, the total area of ​​the first filter 412 is smaller than the total area of ​​the second filter 422. However, the total area of ​​the first filter 412 may be greater than the total area of ​​the second filter 422.

[0137] [Fourth embodiment]

[0138] Next, refer to Figures 19 to 22 , a fourth embodiment of the present invention is described.

[0139] Figure 19 and Figure 20 : is a schematic diagram showing an example of the structure of a filter device 1c according to the fourth embodiment. Figure 19 and Figure 20 , a schematic diagram showing an example of the structure of a porous filter device 1 c provided with a plurality of first holes 411 is shown.

[0140] Figure 19 A longitudinal sectional view of the filter device 1c is shown ( Figure 20 D2-D2 sectional view of the Figure 20 A cross-sectional view of the filter device 1c is shown ( Figure 19 D1-D1 sectional view). It should be noted that Figure 20 In the figure, the drain pipe 551 and the drain recovery part 552 are omitted.

[0141] like Figure 19 and Figure 20 As shown, the filter device 1c is composed of a fourth member 150 as a first container and a second member 200. The fourth member 150 is equivalent to Figures 11 to 18 The first component 100a and the third component 300 are shown.

[0142] In the filter device 1c, the frame 122 of the fourth member 150 is formed with a plurality of recesses, thereby forming a plurality of ( Figures 19 and 20 In the example shown, there are four first liquid holding parts 101. In addition, there are multiple (in Figures 19 and 20 In the example shown, there are four first holes 411, and each first hole 411 is provided with a first filter 412. In the filtration device 1c, the second hole 421 is provided together with the first liquid retaining part 101 in the fourth member 150 (first container). In addition, a first liquid retaining part 101 is provided for each of the plurality of first holes 411. Figure 20 As shown, a space 121 corresponding to the third liquid retaining part 301 is provided between the first liquid retaining part 101 and the frame 122 .

[0143] In addition, a second filter 422 is provided on a portion of the wall surface constituting the first liquid holding portion 101. It should be noted that the second filter 422 is provided in the second hole 421 provided on the side of the first liquid holding portion 101. Thus, a space 121 is provided around the second hole 421 and between the frame 122 of the fourth member 150 serving as the first container. Figure 20 In the example shown, the cylindrical second filter 422 is provided so as to surround the first liquid retaining portion 101, but the present invention is not limited thereto. Figure 21 As shown, the second filter 422 may be provided only on a portion of the circumference of the first liquid retaining unit 101. In this case, the portion of the first liquid retaining unit 101 other than the portion where the second filter 422 is provided is formed by the frame 122. Furthermore, the measuring unit 113 is provided from the lower end of the second hole 421 to the bottom surface (bottom) of the first liquid retaining unit 101.

[0144] Furthermore, the frame 122 is provided with a second exhaust port 502. The space 121 is connected to the drain recovery unit 552 via the second exhaust port 502 and the drain pipe 551. The exhaust pump 521 (see FIG. 1 ) is connected to the suction connection member 553 connected to the upper portion of the drain recovery unit 552. Figure 3 ). The particle suspension 700 is injected into the first liquid holding part 101 (refer to Figure 7After that, the exhaust pump 521 connected to the suction connection part 553 is used for suction. Thus, a pressure difference is generated between the space 121 connected to the drainage recovery part 552 and the first liquid holding part 101. Through this pressure difference, the drainage 711 (see Figure 8 and Figure 9 ) is discharged to the outside of the first liquid retaining unit 101 through the second filter 422. The discharged waste liquid 711 passes through the waste liquid pipe 551 and is recovered in the waste liquid recovery unit 552.

[0145] Furthermore, the upper portion of the first liquid retaining part 101 is joined to the upper portion of the frame 122. Therefore, the space 121 is sealed except for the second exhaust port 502.

[0146] It should be noted that all first liquid retaining parts 101 may not have Figure 20 、 Figure 21 For example, a common first liquid holding portion 101 (which may also be connected) may be provided for a plurality of first filters 412. Figures 19 and 20 101 shown as the first liquid retaining portion).

[0147] like Figures 19 and 20 As shown, a portion of the side surface (wall surface) of the first liquid retaining unit 101 of the filtration device 1c is formed by the second filter 422. Furthermore, in the filtration device 1c, the airtightness of the space 121 outside the first liquid retaining unit 101 is ensured by the frame 122. The space 121 is evacuated by an exhaust pump 521 connected to the second exhaust port 502, thereby filtering the particulate suspension 700 through the second filter 422 disposed around the first liquid retaining unit 101.

[0148] In addition, the bottom surface of each first liquid holding part 101 becomes the first hole 411. Figure 20 and Figure 21 As shown, the first liquid holding parts 101 are arranged at equal intervals. However, the first liquid holding parts 101 do not need to be arranged at equal intervals. In addition, as described above, the outer side of the first liquid holding part 101 is formed into a highly airtight space 121 by the frame 122.

[0149] Figure 22 1 and 2 are diagrams showing modified examples of the arrangement of the first liquid retaining part 101 .

[0150] exist Figure 22 In the example shown, the first liquid holding parts 101 are arranged at equal intervals in the row direction and the column direction. Figure 20 、 Figure 21The frame 122 shown is covered, and the frame 122 and each first liquid holding part 101 are substantially sealed. Figure 22 In the embodiment, the second filter 422 is also disposed in the second hole 421 .

[0151] In the structure of the filtration device 1c, the space 121 provided around the first liquid holding part 101 corresponds to the third liquid holding part 301, and it is not necessary to provide the third liquid holding part 301 as in the first to third embodiments. Figure 22 As shown, theoretically, the number of first holes 411 (ie, cylindrical containers) can be arranged without limitation. The number of first holes 411 is determined by the movable range of the microscope stage and the intervals between the first holes 411.

[0152] [Fifth embodiment]

[0153] Next, refer to Figure 23 and Figure 24 , a fifth embodiment of the present invention is described.

[0154] Figure 23 and Figure 24 It is a diagram showing a filtration device 1 according to a fifth embodiment.

[0155] The filtration device 1 of the fifth embodiment includes a liquid feeding nozzle 801 capable of injecting liquid into the first liquid retaining part 101. The liquid fed by the liquid feeding nozzle 801 is the particle suspension 700 or the like.

[0156] exist Figure 23 In the figure, it is shown that the filter device 1 of the first embodiment includes a liquid feeding nozzle 801. Figure 24 , it is shown that the filtration device 1 b of the third embodiment includes a liquid feeding nozzle 801 .

[0157] according to Figure 23 and Figure 24The illustrated structure enables the discharge of the particle suspension 700 from a predetermined position (predetermined height) relative to the first filter 412 at a predetermined rate when the particle suspension 700 is conveyed to the first liquid retaining unit 101. The predetermined position (predetermined height) refers to a height relative to the first filter 412 at which no bubbles are generated on the surface of the first filter 412. If the diameter of the first hole 411 is small, conveying the particle suspension 700 from a position high relative to the first filter 412 may result in bubbles covering the entire bottom surface. In such a situation, filtration may become impossible, and the particles 701 may be unable to be recovered. It should be noted that it is also possible to increase the suction by the exhaust pump 521 to draw the bubbles toward the second liquid retaining unit 201. However, due to the undesirable nature of strong suction of the particle suspension 700 and the difficulty of storing it in the measuring unit 113, the suction of bubbles by the exhaust pump 521 is not preferred.

[0158] exist Figure 23 and Figure 24 In the illustrated configuration, the liquid supply nozzle 801 is positioned near the first filter 412, and the particle suspension 700 is then supplied from the liquid supply nozzle 801. Thus, the particle suspension 700 supplied from the liquid supply nozzle 801 allows air near the first filter 412 to escape. Consequently, the formation of bubbles on the first filter 412 can be avoided.

[0159] In addition, even with Figure 23 and Figure 24 When transporting the particle suspension 700 using the structure shown, bubbles may sometimes cover the entire bottom surface of the first hole 411, that is, the entire upper surface of the first filter 412. This situation may prevent the exhaust pump 521 from filtering the particle suspension 700. In such cases, the liquid delivery nozzle 801 is brought closer to the first filter 412 than during transport of the particle suspension 700, and the particle suspension 700 is sucked and discharged at a predetermined rate one or more times. This allows the liquid delivery nozzle 801 to suck and eliminate bubbles, or allow bubbles to escape into the particle suspension 700. This allows bubbles to be removed from the bottom surface of the first hole 411 (that is, the upper surface of the first filter 412).

[0160] In this manner, when the first hole 411 is not filled with the particle suspension 700, the liquid supply nozzle 801 is positioned at a predetermined position on the first filter 412. The situation in which the first hole 411 is not filled with the particle suspension 700 refers to the presence of bubbles in the first hole 411 (the upper surface of the first filter 412), as described above. Furthermore, the predetermined position refers to a position suitable for removing bubbles. The particle suspension 700 is then discharged from the liquid supply nozzle 801 at a predetermined rate. The predetermined rate refers to a rate suitable for removing bubbles. Furthermore, even after the particle suspension 700 is injected into the first liquid retaining part 101, bubbles may remain in the first hole 411. In such cases, after positioning the liquid supply nozzle 801 near the first filter 412, as described above, the bubbles can be removed by repeatedly performing suction and delivery with the liquid supply nozzle 801. Note that this process is unnecessary when the first hole 411 (i.e., the upper surface of the first filter 412) is filled with the particle suspension 700.

[0161] like Figure 24 As shown, in the case of a porous filter device 1b in which each of the first liquid holding parts 101 is independent, a liquid feeding nozzle 801 can be provided in each of the first liquid holding parts 101. Thus, when feeding liquid to the first liquid holding part 101, liquid can be fed to the first holes 411 one by one, or multiple liquid feeding nozzles 801 can be used to feed the multiple first holes 411 simultaneously.

[0162] On the other hand, Figures 11 to 14 As shown, it is also possible to consider the case where the first liquid retaining unit 101 is not independent of the first wells 411. In other words, a common first liquid retaining unit 101 is provided for multiple first wells 411. In such a case, it is preferable to simultaneously deliver liquid to each first well 411 using multiple liquid delivery nozzles 801 during injection into the first liquid retaining unit 101. Simultaneous liquid delivery by multiple liquid delivery nozzles 801 prevents bubbles from transferring to adjacent first wells 411 (i.e., first filters 412). In such a case, a dispenser (not shown) equipped with multiple pipettes (multichannel pipettes) corresponding to the liquid delivery nozzles 801 can simultaneously dispense the particle suspension 700 to multiple first wells 411. In particular, by aligning the spacing between the first wells 411 with that of a commercially available multichannel pipette, liquid can be delivered simultaneously to multiple first wells 411. Alternatively, the spacing between the first wells 411 can be set based on the spacing of a arbitrarily designed multichannel pipette.

[0163] It should be noted that the placement of the liquid-feeding nozzle 801 relative to the first liquid retaining part 101 and the delivery of the microparticle suspension 700 by the liquid-feeding nozzle 801 may be performed manually or mechanically.

[0164] [Sixth embodiment]

[0165] Next, refer to Figure 25 , a sixth embodiment of the present invention is described.

[0166] Figure 25 This is a diagram showing an example of the structure of the filtration device 1 according to the sixth embodiment.

[0167] Figure 25 The filter device 1 shown is Figure 1 The filtration device 1 shown in FIG. 1 has a liquid feeding nozzle 801 capable of injecting liquid into the first liquid holding portion 101. The liquid is a particle suspension 700 or a cleaning liquid. Figure 7 and Figure 9 After filtering the particle suspension 700 in the steps shown, particles 701 may be captured by the second filter 422. In this case, a predetermined liquid is fed from the liquid feeding nozzle 801 toward the second filter 422. The predetermined liquid is the particle suspension 700 or a cleaning liquid. This allows the particles 701 captured by the second filter 422 to be cleaned. This allows the particles 701 captured by the second filter 422 to be returned to the particle suspension 700 injected into the first liquid retaining portion 101. It should be noted that at this point, it is preferable that at least the first hole 411 be filled with liquid.

[0168] It should be noted that Figure 25 The method shown is not limited to the filter device 1 shown in the first embodiment, and can also be applied to the filter devices 1a to 1c shown in the second to fifth embodiments. Figures 11 to 14 ), when the first liquid retaining unit 101 is independent of the first hole 411, as in the filtration device 1a shown in FIG. ), it is preferable to transport the suspension while the liquid level is above the measuring unit 113. When the liquid level of the particle suspension 700 is below the lower end of the second filter 422 and the second filter 422 is cleaned using the liquid feeding nozzle 801, the particles 701 may flow into a specific measuring unit 113. This may result in differences in the concentration of the particle suspension 700 stored in each measuring unit 113.

[0169] In addition, regarding the third embodiment ( Figures 15 to 18 ) shown in the filter device 1b, the fourth embodiment ( Figures 19 to 22The method described in the sixth embodiment can also be applied to the filter device 1c shown in FIG. In filter devices 1b and 1c, the first liquid retaining portion 101 is provided independently of the first hole 411. When cleaning the second filter 422 of these filter devices 1b and 1c using the method described in the sixth embodiment, it is sufficient that at least the first hole 411 is filled with liquid. This is because, unlike the filter device 1a shown in the second embodiment, the concentration of the particle suspension 700 stored in each measuring portion 113 is unlikely to differ.

[0170] [Seventh embodiment: Filtration method]

[0171] Next, refer to Figure 26 Flowchart and refer to Figures 27 to 36 , shows a process of filtering a particle suspension 700 using the filtering device 1 .

[0172] Figure 26 This is a flowchart showing the steps of the filtering method of this embodiment. Figures 27 to 36 It is a schematic diagram for explaining the steps of the filtering method of this embodiment. Figures 27 to 36 In the embodiment, the filtration device 1 shown in the first embodiment is used, but the particle suspension 700 can also be concentrated and recovered in the same steps in the filtration devices 1a to 1c of the second to fourth embodiments. In the following description, the step numbers represent Figure 26 The step numbers of the flowchart shown are as follows. Figure 3 As shown, the filter device 1 is connected to the exhaust pump 521. Figures 27 to 36 In the description, refer to Figure 3 In addition, Figures 26 to 36 In the embodiment, the first exhaust valve 511 , the second exhaust valve 512 and the exhaust pump 521 are controlled by the control device 600 .

[0173] First, if Figure 27 As shown in FIG. 1 , the particle suspension 700 is injected into the first liquid holding portion 101 ( S1 ). Figure 23 and Figure 24As shown, it is preferred that the liquid-feeding nozzle 801 delivers liquid from a predetermined position relative to the first filter 412 at a predetermined liquid-feeding speed. The predetermined position and the predetermined liquid-feeding speed refer to the position and liquid-feeding speed of the liquid-feeding nozzle 801 at which no bubbles are generated on the surface of the first filter 412. That is, when the particle suspension 700 as a liquid is injected from the liquid-feeding nozzle 801 into the first liquid retaining portion 101, the injection is performed according to the following steps. That is, the particle suspension 700 is injected from the liquid-feeding nozzle 801 into the first filter 412 at a height at which no bubbles are generated on the surface of the first filter 412. Thus, by making the diameter of the first hole 411 smaller, bubbles cover the entire surface of the first filter 412, thereby avoiding the problem of being unable to filter and recover the particles 701.

[0174] Then, if Figure 28 As shown, concentration by suction filtration through the first filter 412 and the second filter 422 is started (S2). Specifically, the control device 600 switches to Figure 3 The first exhaust valve 511 and the second exhaust valve 512 and the exhaust pump 521 (see Figure 3 ) side. Then, the control device 600 exhausts the second liquid holding part 201 and the third liquid holding part 301 by exhausting the gas through the exhaust pump 521. Figure 28 hollow arrows).

[0175] It should be noted that step S2 is the first process. That is, in step S2 , after the particle suspension 700 containing the particles 701 is injected into the first liquid holding part 101 , the exhaust pump 521 exhausts the second liquid holding part 201 and the third liquid holding part 301 .

[0176] Thus, the first filter 412 and the second filter 422 filter the particle suspension 700. Through such filtration, the drainage 711 is discharged to the second liquid holding part 201 and the third liquid holding part 301. It should be noted that if bubbles are generated on the bottom surface of the first hole 411 (i.e., on the surface of the first filter 412), the filtration by the first filter 412 may be hindered. In such a case, Figure 23 and Figure 24 As shown, suction and discharge are repeated one or more times with the tip of the liquid feeding nozzle 801 close to the first filter 412. This allows bubbles to be removed from the bottom surface of the first hole 411 (the surface of the first filter 412).

[0177] Then, if Figure 29As shown, when the liquid level of the particle suspension 700 reaches the vicinity of the metering unit 113 (near the lower end of the second hole 421), the control device 600 stops the suction of the second liquid holding unit 201 (S3). Then, the control device 600 switches the first exhaust valve 511 to the atmospheric opening side. As a result, the second liquid holding unit 201 is opened to the atmosphere. Then, after the second liquid holding unit 201 is opened to the atmosphere, only the exhaust of the third liquid holding unit 301 is performed ( Figure 29 That is, after the second liquid holding part 201 is opened to the atmosphere, the concentration based on suction filtration is continued using only the second filter 422 (S4). That is, the control device 600 continues to exhaust the third liquid holding part 301. In this way, the upper end of the metering part 113 can be aligned with the liquid surface of the particle suspension 700. As described above, Figure 29 In the state of , if the second liquid holding part 201 is sucked, the liquid level of the particle suspension 700 may be sucked to a position lower than the upper end of the measuring part 113. In contrast, by sucking only the third liquid holding part 301, when the liquid level of the particle suspension 700 reaches the upper end of the measuring part 113, the solution of the particle suspension 700 will not be further discharged to the third liquid holding part 301. In addition, the third liquid holding part 301 is under negative pressure, so the solution of the particle suspension 700 will not drip into the second liquid holding part 201. At this time, in order to return the particles 701 captured by the second filter 422 to the particle suspension 700, as shown in FIG. Figure 25 As shown, the particle suspension 700 , cleaning liquid, etc. are sometimes supplied to the second filter 422 .

[0178] It should be noted that step S3 is the second step. That is, in step S3, the liquid level of the particle suspension 700 reaches near the lower end of the second hole 421, thereby stopping the exhaust of the second liquid holding part 201. Then, in step S4, the exhaust of the third liquid holding part 301 is continued.

[0179] Alternatively, the solution in the microparticle suspension 700 may be gradually replaced with a different type of solution. In such a case, after the replaced solution is transferred to the first liquid holding unit 101, the concentration and discharge steps S1 to S3 are repeated. This allows the solution in the microparticle suspension 700 to be replaced.

[0180] Then, if Figure 30As shown, the liquid level of the particle suspension 700 has been concentrated to the upper end of the metering section 113 (reaching the lower end of the second hole), and drainage from the third liquid retaining section 301 is no longer performed. The control device 600 then stops the filtration by the exhaust pump 521 (S5). The control device 600 then switches the second exhaust valve 512 to the atmospheric side. This also opens the third liquid retaining section 301 to the atmosphere (S6). This allows the concentrated solution to be retained within the capacity of the metering section 113. By concentrating the particle suspension 700 in the metering section 113, the volume of the particle suspension 700 (concentrated solution) can be maintained constant.

[0181] Step S5 is the third step. That is, in step S5, the liquid level of the particle suspension 700 reaches the lower end of the second hole 421, whereby the exhaust of the third liquid retaining part 301 is stopped.

[0182] In the case of adding an additive to the particle suspension 700, the additive is added to the concentrated particle suspension 700 (concentrate) (S7). As a result, Figure 31 As shown, the particle suspension 700 becomes a mixture (liquid) of the particle suspension 700 and the additive, namely, the additive mixture 721. Since the liquid volume of the concentrated liquid is constant, the concentration of the additive relative to the concentrated liquid can be adjusted to the desired concentration by adjusting the amount of the additive added. The additive is, for example, an antimicrobial agent. The antimicrobial agent is added to stop the activity of microorganisms and to confirm whether the solution of the particle suspension 700 has an effect on the microorganisms as particles 701 at a specified time. It should be noted that within a short period of time, the solution of the additive mixture 721 will not drip onto the second liquid retaining portion 201. Through step S7, the reaction between the additive and the particle suspension 700 can be carried out in the filtration device 1.

[0183] Next, the control device 600 switches the first exhaust valve 511 to the exhaust pump 521 side. Then, the control device 600 performs suction by the exhaust pump 521, thereby sucking the second liquid holding part 201 ( Figure 32 As a result, the additive mixed liquid 721 is discharged into the second liquid retaining part 201. The discharged liquid 711 becomes a mixed liquid of the solution of the particle suspension 700 and the additive.

[0184] Step S8 is the fourth step. Specifically, in step S8, the second liquid holding unit 201 is evacuated. In particular, after step S6, when the additive is added to the particle suspension 700 in step S7, the second liquid holding unit 201 is evacuated.

[0185] Through step S8, as Figure 33As shown, the solution (discharge 711) of the additive mixture 721 stored in the metering unit 113 is completely recovered through the first filter 412. Figure 33 As shown, the particles 701 are recovered by the first filter 412 .

[0186] When the filtration of the solution of the additive mixture 721 is completed, the control device 600 stops the suction by the exhaust pump 521 (S9). Sometimes, the particles 701 recovered by the first filter 412 are modified, including a fixation process or a dyeing process for observation under a microscope. When such a modification is performed, as shown in step S9, the control device 600 stops the suction of the second liquid holding part 201 and switches the first exhaust valve 511 to the atmosphere-opening side. Then, as shown in FIG. Figure 34 As shown, a liquid reagent 731 is added to the first filter 412 (S10). The reagent 731 is used for modification such as fixation and dyeing. Then, the particles 701 and the reagent 731 are allowed to react for a desired time as needed. In this way, the reaction between the particles 701 and the reagent 731 can be carried out in the filter device 1. When the reagent 731 is added, it is also possible to Figure 23 、 Figure 24 Liquid delivery is performed as shown. That is, after the tip of the liquid delivery nozzle 801 for delivering the reagent 731 is positioned at a predetermined distance from the first filter 412, the reagent 731 is delivered by the liquid delivery nozzle 801. As described above, the predetermined position is a position where the delivered reagent 731 does not form bubbles on the surface of the first filter 412. That is, when injecting the liquid reagent 731 from the liquid delivery nozzle 801 into the first liquid retaining portion 101, the injection is performed according to the following steps. That is, the reagent 731 is injected from the liquid delivery nozzle 801 into the first filter 412 at a height that does not generate bubbles on the surface of the first filter 412.

[0187] Then, after the reaction of the microparticles 701 by the reagent 731, the control device 600 switches the first exhaust valve 511 to the exhaust pump 521 side, and then suction is performed by the exhaust pump 521. Thus, suction of the second liquid holding part 201 is started ( Figure 35 By the suction in step S11, as shown in FIG. Figure 35As shown, the reagent 731 is discharged into the second liquid retaining part 201. When cleaning the reagent 731, after the reagent 731 attached to the particles 701 is completely filtered out, the cleaning liquid (not shown) is transferred to the first liquid retaining part 101 for filtration in step S11. This cleans the reagent 731 attached to the particles 701, and the cleaning liquid can be discharged into the second liquid retaining part 201. In this manner, the reagent 731 is discharged, the particles 701 are cleaned with the cleaning liquid, and the particles 701 are dried. It should be noted that the drain 711 becomes a mixture of the solution of the particle suspension 700, the additive, and the reagent 731.

[0188] Step S11 is the fifth step. After step S8, a predetermined reagent 731 is added to the particles 701 present on the surface of the first filter 412, and then step S11 is performed.

[0189] Then, if Figure 36 As shown, when the reagent 731 (or cleaning solution) is completely discharged from the surface of the first filter 412, the user presses Figure 4 In the steps shown, the first filter 412 is removed from the filtration device 1 ( S12 ). Then, the user places the removed first filter 412 on a microscope and observes the first filter 412 using the microscope ( S13 ).

[0190] It should be noted that in Figures 27 to 36 In the process shown, at the timing of step S3, Figure 25 The second filter 422 is shown to be used for processing the particle suspension 700, cleaning fluid, etc., but is not limited thereto. Figure 25 As shown, the treatment of feeding the particle suspension 700, the cleaning liquid, etc. to the second filter 422 can be performed at the time when the second filter 422 is exposed. That is, at any time in steps S3 (second process) to S13, as shown in FIG. Figure 25 As shown, the second filter 422 may be treated by feeding the particle suspension 700 and the cleaning solution. However, it is preferably performed at any time in steps S3 to S8 (the fourth step), and more preferably at any time before adding the additive (S3 to S6).

[0191] The present invention is not limited to the above-described embodiments and includes various variations. For example, the above-described embodiments are described in detail to facilitate understanding of the present invention and are not necessarily limited to having all of the described structures. In addition, a portion of the structure of a certain embodiment can be replaced with the structure of another embodiment, and the structure of another embodiment can be added to the structure of a certain embodiment. In addition, other structures can be added, deleted, or replaced with a portion of the structure of each embodiment.

[0192] For example, a first liquid holding portion 101 common to a plurality of first holes 411 as in the second embodiment and a first liquid holding portion 101 corresponding to one of the first holes 411 as in the third embodiment may be mixed. Figure 11 One of the components denoted by reference numerals 132a and 132b is replaced with Figures 15 to 18 This makes it possible to easily realize a state in which a first liquid retaining part 101 common to a plurality of first holes 411 and a first liquid retaining part 101 corresponding to one of the first holes 411 coexist.

[0193] Figure 37 This is a schematic diagram showing another example of the filtering device 1a according to the second embodiment. Figure 38 This is a diagram showing the structure of another example of the first filter 412a used in the filtration device 1a of the second embodiment.

[0194] like Figure 13 As shown, the first filter 412 can be independently provided in a manner corresponding to the first holes 411, or can be provided as shown in FIG. Figure 37 In this manner, the first filter 412 is provided for each first hole 411 (see Figure 13 ), the first filter 412a (refer to Figure 37 ). In the case where the first filter 412a is composed of one filter, as shown in FIG. Figure 37 As shown, the first filter 412a is disposed between the first component 100a and the second component 200. Figure 37 In the embodiment, the first member 100a and the second member 200 are separated. However, when filtering the particle suspension 700, the first member 100a and the second member 200 are in close contact. Furthermore, when filtering the particle suspension 700, the first filter 412a is fixed by being sandwiched between the closely contacted first member 100a and the second member 200. The first member 100a and the second member 200 are configured so that the particle suspension 700 to be filtered does not leak even when the first filter 412a is sandwiched between them.

[0195] In addition, if Figure 37 As shown, by separating the first member 100a and the second member 200, the first filter 412a can be easily removed.

[0196] And, as Figure 37 As shown, in the case where the first filter 412a is composed of one filter, as shown in FIG. Figure 38As shown, the first filter 412a has a structure in which a frame 432a is provided around a filter body 431a having a quadrilateral shape. Figure 38 As shown in the reference numeral 441, the particles 701 are recovered at the portion corresponding to the first hole 411. Figure 37 and Figure 38 With the structure shown, when observing under a microscope, multiple recovery results can be observed by setting the first filter 412a only once.

[0197] Figure 39 This is a schematic diagram showing another example of the filtration device 1b according to the third embodiment.

[0198] As described above, the first filter 412 may be independently provided in a manner corresponding to the first holes 411, or may be provided as shown in FIG. Figure 39 In the case where the first filter 412a is composed of a filter, as shown in FIG. Figure 39 As shown, the first filter 412a is disposed between the first component 100b and the second component 200. Figure 39 In the embodiment, the first member 100b and the second member 200 are separated. However, when filtering the particle suspension 700, the first member 100b and the second member 200 are in close contact. Furthermore, when filtering the particle suspension 700, the first filter 412a is fixed by being sandwiched between the closely contacted first member 100b and the second member 200. The first member 100b and the second member 200 are configured so that the particle suspension 700 to be filtered does not leak even when the first filter 412a is sandwiched between them.

[0199] In addition, if Figure 39 As shown, by separating the first member 100b and the second member 200, the first filter 412a can be easily removed.

[0200] And, as Figure 39 As shown, when the first filter 412a is composed of a single filter, the structure of the first filter 412a and the recovery position of the particles 701 are the same as those of the first filter 412a. Figure 38 Same as shown.

[0201] Furthermore, the control device 600 and other components described above may be implemented in hardware, for example, by designing a portion or all of them using integrated circuits. Furthermore, the structure and functions of the control device 600 may be implemented in software by having a processor such as a CPU interpret and execute programs that implement each function. Programs, tables, files, and other information that implement the functions of the control device 600 may be stored not only on a hard disk (HD) but also on a storage device such as a memory or SSD (Solid State Drive), or on a recording medium such as an IC (Integrated Circuit) card, SD (Secure Digital) card, or DVD (Digital Versatile Disc).

[0202] In addition, in each embodiment, the control lines and information lines are shown as necessary for explanation, and not all control lines and information lines are necessarily shown in the product. In reality, it is considered that almost all the components are connected to each other.

[0203] Description of reference numerals:

[0204] 1. 1a~1c Filtering device

[0205] 100 First component (first container)

[0206] 101 first liquid holding unit

[0207] 121 Space (third liquid holding portion)

[0208] 122 frame

[0209] 150 Fourth component (first container)

[0210] 113 Metrology Department

[0211] 200 Second component (second container)

[0212] 201 second liquid holding unit

[0213] 300 Third component (second container)

[0214] 301 Third liquid holding unit

[0215] 411 First Hole

[0216] 412, 412a first filter

[0217] 421 Second Hole

[0218] 422 Second Filter

[0219] 431, 431a, 431b filter body

[0220] 432, 432a, 432b frameworks

[0221] 501 First exhaust port

[0222] 502 Second exhaust port

[0223] 511 First Exhaust Valve

[0224] 512 Second exhaust valve

[0225] 521 Exhaust Pump

[0226] 531 Pipe filter

[0227] 551 drain pipe

[0228] 552 Drainage Recovery Department

[0229] 553 Suction connection parts

[0230] 600 Control Device

[0231] 700 Microparticle Suspension (Liquid)

[0232] 701 particles

[0233] 711 Drainage

[0234] 721 Additive mixture (including liquid and additives)

[0235] 731 Reagent (Liquid)

[0236] 801 Liquid delivery nozzle

[0237] Z Filtration System

[0238] S2 starts concentration (first step)

[0239] S3: Stopping the suction of the second liquid holding unit (second step)

[0240] S4 Concentration (Second Process)

[0241] S5 Stop suction (third step)

[0242] S8: Suctioning the Second Liquid Retention Unit (Fourth Step)

[0243] S11: Start suction of the second liquid holding portion (fifth step).

Claims

1. A filtering device, characterized in that: The filtering device comprises a first liquid holding portion, a second liquid holding portion and a third liquid holding portion, The first liquid holding portion holds the liquid to be filtered. A first hole is provided on the bottom surface of the first liquid retaining portion, and a second hole is provided on a surface of the first liquid retaining portion different from the bottom surface. The second liquid retaining portion is in communication with the first liquid retaining portion via the first hole. The third liquid retaining part is in communication with the first liquid retaining part via the second hole. A first filter is disposed in the first hole, and a second filter is disposed in the second hole.

2. The filtering device according to claim 1, characterized in that An area of ​​the second hole is larger than an area of ​​the first hole.

3. The filtering device according to claim 1, characterized in that A predetermined distance is provided between the bottom surface of the first liquid retaining portion and the lower end of the second hole.

4. The filtering device according to claim 1, characterized in that The first liquid holding portion is provided in the first container, The second liquid holding portion is provided in a second container that is different from the first container. The first container is removable relative to the second container. By removing the first container from the second container, the first filter provided in the first hole can be attached and detached.

5. The filtering device according to claim 1, characterized in that The first filter includes a filter body and a frame provided on the outer periphery of the filter body. The frame has a hardness that allows it to be gripped.

6. The filtering device according to claim 1, characterized in that The filter device is provided with a plurality of first holes, and the first filter is provided for each of the first holes.

7. The filtering device according to claim 6, characterized in that The first liquid retaining portion, the second hole, and the second filter are provided in common for the plurality of first holes.

8. The filtering device according to claim 6, characterized in that The first liquid retaining portion is provided for each of the plurality of first holes.

9. The filtering device according to claim 8, characterized in that The second hole is provided in the first container together with the first liquid retaining portion. A space serving as the third liquid retaining portion is provided between the periphery of the second hole and the frame of the first container.

10. A filtration system, characterized in that: The filtration system comprises a first liquid holding portion, a second liquid holding portion and a third liquid holding portion, The first liquid holding portion holds the liquid to be filtered. A first hole is provided on the bottom surface of the first liquid retaining portion, and a second hole is provided on a surface of the first liquid retaining portion different from the bottom surface. The second liquid retaining portion is in communication with the first liquid retaining portion via the first hole. The third liquid retaining part is in communication with the first liquid retaining part via the second hole. A first filter is provided in the first hole, and a second filter is provided in the second hole, The second liquid holding portion and the third liquid holding portion are connected to an exhaust pump.

11. A filtering method, characterized in that: The filtering method is a filtering method performed by a filtering system, The filtration system comprises a first liquid holding portion, a second liquid holding portion and a third liquid holding portion, The first liquid holding portion holds the liquid to be filtered. A first hole is provided on the bottom surface of the first liquid retaining portion, and a second hole is provided on a surface of the first liquid retaining portion different from the bottom surface. The second liquid retaining portion is in communication with the first liquid retaining portion via the first hole. The third liquid retaining part is in communication with the first liquid retaining part via the second hole. A first filter is provided in the first hole, and a second filter is provided in the second hole, The second liquid holding portion and the third liquid holding portion are connected to an exhaust pump. The filtration system performs a first step in which, while a particle suspension containing particles is injected into the first liquid holding part, the second liquid holding part and the third liquid holding part are exhausted by the exhaust pump.

12. The filtering method according to claim 11, characterized in that There is a predetermined distance between the bottom surface of the first liquid retaining portion and the lower end of the second hole. The filtration system performs the following steps after the first step: In the second step, when the liquid level of the particle suspension reaches the vicinity of the lower end of the second hole, the exhaust of the second liquid holding portion is stopped and the exhaust of the third liquid holding portion is continued; In a third step, when the liquid level of the particle suspension reaches the lower end of the second hole, the exhaust of the third liquid holding portion is stopped; and In the fourth step, the second liquid retaining portion is exhausted.

13. The filtering method according to claim 11, characterized in that The filtration system includes a liquid feeding nozzle capable of injecting the liquid into the first liquid holding portion. When the liquid is injected from the liquid feeding nozzle into the first liquid retaining portion, the microparticle suspension is injected from the liquid feeding nozzle onto the first filter at a height at which no bubbles are generated on the surface of the first filter.

14. The filtering method according to claim 12, characterized in that After the third step, if an additive is added to the microparticle suspension, the fourth step is performed.

15. The filtering method according to claim 12, characterized in that: The filtration system includes a liquid feeding nozzle capable of injecting the liquid into the first liquid holding portion. The liquid-feeding nozzle feeds a predetermined liquid toward the second filter at any timing between the second step to the fourth step.

16. The filtering method according to claim 12, characterized in that: After the fourth step, a predetermined reagent is added to the fine particles present on the surface of the first filter, and then a fifth step is performed to exhaust the second liquid retaining portion.

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