Deep ultraviolet picosecond laser-electrolysis compounded aluminum oxide single crystal ultra-large length-diameter ratio deep hole processing technology

Abstract

The invention relates to the technical field of special material processing equipment, in particular to a deep purple picosecond laser-electrolysis compounded aluminum oxide single crystal ultra-large length-diameter ratio deep hole processing technology which comprises a rack adopting the deep purple picosecond laser-electrolysis compounded aluminum oxide single crystal ultra-large length-diameter ratio deep hole processing technology. An electrolyte collecting box is arranged on the left side of the rack, a fixing frame is fixedly installed on the inner wall of the left side of the electrolyte collecting box, a four-jaw chuck is fixedly installed at the end of the fixing frame and used for clamping and fixing aluminum oxide single crystals, an electric sliding table is arranged in the middle of the rack, and a supporting frame is fixedly installed on a sliding base of the electric sliding table. A laser focusing head is arranged at the end of the supporting frame, a liquid spraying ring is installed on the front side of the laser focusing head through a plurality of connecting rods, and a laser generator is fixedly installed on a right side plate body of the rack. The deep purple picosecond laser and electrolysis combined machining operation can be achieved, and it is ensured that the machining process is stable and efficient.

Description

Technical Field

[0001] The present invention relates to the technical field of special material processing equipment, and in particular to a deep ultraviolet picosecond laser-electrolysis composite alumina single crystal ultra-large aspect ratio deep hole processing technology. Background Art

[0002] Alumina single crystals, due to their exceptional high-temperature resistance, corrosion resistance, and insulation properties, have found widespread application in high-end fields such as aerospace and microelectronics. For example, in the manufacture of combustion chamber nozzles for aircraft engines, alumina single crystals, thanks to their high-temperature resistance, can withstand the impact of high-temperature combustion gases, ensuring stable engine operation. In microelectronic chip packaging substrates, their excellent insulation properties effectively prevent short circuits and enhance chip reliability.

[0003] However, the ultra-high hardness (Mohs hardness can reach level 9) and brittleness of alumina single crystals make deep hole processing with ultra-large aspect ratios a very challenging problem in the industry. Traditional machining methods, such as using carbide drills for drilling, have an extremely fast wear rate due to the extremely high hardness of alumina single crystals. Frequent drill bit replacement not only increases machining costs, but also easily leads to machining accuracy deviations during the replacement process, resulting in an increase in the scrap rate of workpieces. More seriously, the stress concentration generated during the machining process can easily cause the brittle alumina single crystal workpiece to crack, greatly limiting the machining quality and efficiency.

[0004] Although the single laser processing method has the advantages of non-contact and fast processing speed, when processing deep holes in alumina single crystals, the highly concentrated laser energy will produce a large heat-affected zone in the processing area. This will not only cause the hole wall material to undergo phase change, resulting in deterioration of material properties, but also form obvious recast layers and microcracks on the hole wall surface, seriously affecting the surface quality of the deep hole. Moreover, as the depth of the deep hole increases, the laser energy gradually attenuates during the propagation process, which greatly reduces the processing efficiency and makes it difficult to achieve efficient processing of deep holes with ultra-large aspect ratios.

[0005] For high-hardness, low-conductivity materials such as alumina single crystal, the processing efficiency of simple electrolytic processing is extremely low. During the deep hole processing with a large aspect ratio, the renewal and flow of the electrolyte in the deep hole become extremely difficult, which can easily lead to uneven electrolyte concentration in the processing area, making the processing process unstable and difficult to ensure processing accuracy and surface quality.

[0006] Some existing composite processing technologies mostly use a combination of long-wavelength lasers and electrolysis. The photon energy of long-wavelength lasers is relatively low, and when processing aluminum oxide single crystals, they cannot achieve the same precise material removal as deep ultraviolet picosecond lasers, resulting in limited improvements in processing accuracy and surface quality. Furthermore, these technologies lack tooling specifically designed for the material properties of aluminum oxide single crystals and efficient electrolyte circulation systems, making it difficult to meet the stringent requirements for high precision, high efficiency, and high stability required for deep hole processing with extremely large aspect ratios. Therefore, the development of an innovative composite processing device that integrates the advantages of deep ultraviolet picosecond lasers and electrolysis is urgent. Summary of the Invention

[0007] The purpose of the present invention is to provide a deep ultraviolet picosecond laser-electrolysis composite aluminum oxide single crystal ultra-large aspect ratio deep hole processing process to solve the defects mentioned in the above background technology.

[0008] To achieve the above object, the present invention provides the following technical solutions: The deep ultraviolet picosecond laser-electrolysis composite aluminum oxide single crystal ultra-large aspect ratio deep hole processing process includes the following steps: 1. Workpiece clamping and equipment preparation stage: S1. Fix the alumina single crystal with a four-jaw chuck and adjust the workpiece position so that the processing part is aligned with the inlet and outlet holes; S2. Start the electric slide and adjust the position of the laser focusing head on the support frame to keep a suitable distance between the laser focusing head and the workpiece to ensure smooth laser transmission; S3. Connect the air inlet pipe to the external inert gas source so that the multiple air blowing nozzles of the air blowing ring can discharge air normally; connect the electrolyte delivery pipe to the external electrolyte delivery pipe so that the electrolyte nozzles of the liquid spraying ring can discharge liquid normally; 2. Processing and operation stage: S4. Turn on the laser generator, and the laser emitted by the laser light source is transmitted to the laser focusing head through the deep ultraviolet picosecond laser transmission optical path. After the laser focusing head focuses the laser, it is irradiated on the processing part of the aluminum oxide single crystal through the central light hole of the liquid spray ring; S5. Simultaneously, the electrolyte delivery system is started, and the electrolyte enters the spray ring through the electrolyte delivery pipeline and is sprayed on the processing area by multiple electrolyte nozzles to achieve electrolytic processing; S6, the electric slide drives the laser focusing head and the liquid spray ring to move slowly along the processing direction to perform processing in the depth direction; S7. During the processing, the blowing ring blows inert gas into the processing area through the blowing nozzle to prevent the material from oxidizing and blow away the processing debris; 3. Waste liquid collection and treatment stage: S8, the electrolytic waste liquid generated by the processing flows into the collection chamber of the electrolyte collection box, is filtered through the mesh filter of the filter cartridge, and impurities remain in the filter cartridge; S9, the filtered waste liquid is discharged through the drain hole, the inner concave hole and the discharge pipe; S10. After the processing is completed, turn off the laser generator, electrolyte delivery system and inert gas source, take out the filter cartridge by the handle, clean the internal impurities, and remove the processed workpiece.

[0009] In the technical solution of the present invention, a frame is included for the ultra-large aspect ratio deep hole processing process of alumina single crystal using the deep ultraviolet picosecond laser-electrolysis composite. An electrolyte collection box is provided on the left side of the frame, and a fixing frame is fixedly installed on the left inner wall of the electrolyte collection box. A four-jaw chuck is fixedly installed on the end of the fixing frame, and the four-jaw chuck is used for clamping and fixing the alumina single crystal. An electric slide is provided in the middle of the frame, and a support frame is fixedly installed on the slide seat of the electric slide. A laser focusing head is provided at the end of the support frame, and a liquid spray ring is installed on the front side of the laser focusing head through multiple connecting rods. The liquid spray ring is used for spraying the electrolyte, and a laser generator for realizing laser processing is fixedly installed on the right side plate of the frame.

[0010] In the technical solution of the present invention, a collection chamber is provided inside the electrolyte collection box, and the collection chamber is used for collecting electrolytic waste liquid.

[0011] In the technical solution of the present invention, a drainage hole is provided on the bottom wall of the collection chamber, an inner concave hole is provided on the bottom wall of the drainage hole, a discharge pipe is fixedly installed on the bottom wall of the inner concave hole, and the discharge pipe is used for discharging electrolytic waste liquid.

[0012] In the technical solution of the present invention, a filter cartridge is inserted into the drainage hole, a mesh filter is fixedly installed on the bottom of the filter cartridge, and a handle is rotatably connected to the inner wall of the filter cartridge; This setting can realize the filtering operation of the electrolytic waste liquid, thereby achieving the effect of filtering out impurities in the electrolytic waste liquid.

[0013] In the technical solution of the present invention, an anti-splash box is fixedly installed on the top surface of the electrolyte collection box, and an inlet and outlet hole is provided on the right side plate of the anti-splash box; The entry and exit holes of this arrangement can be used for the entry and exit operations of the workpiece.

[0014] In the technical solution of the present invention, a laser emitting light source is provided on the laser generator, the output end of the laser emitting light source is connected to a deep ultraviolet picosecond laser transmission optical path, and a support rod is fixedly installed between the deep ultraviolet picosecond laser transmission optical path and the frame.

[0015] In the technical solution of the present invention, the laser focusing head, the laser emission light source, and the deep ultraviolet picosecond laser transmission optical path are located on the same horizontal axis. An air blowing ring is fixedly installed on the annular side surface of the laser focusing head, and a plurality of air blowing nozzles are fixedly installed on the left side surface of the air blowing ring. An air inlet pipeline is installed on the side surface of the air blowing ring, and the air inlet pipeline is connected to an external inert gas source. The blowing nozzle and other components of this device can use inert gas to blow out from the blowing nozzle to form a tight protective atmosphere in the processing area, effectively isolating oxygen and impurities. At the same time, the blowing can also blow away impurities in the processing area, greatly reducing the oxidation of materials and impurity pollution during the processing process, ensuring the purity of the processing environment.

[0016] In the technical solution of the present invention, a central light hole is provided at the center of the liquid spray ring, and the central light hole is used for the laser to pass through.

[0017] In the technical solution of the present invention, a plurality of electrolyte nozzles are fixedly mounted on the left side of the liquid spray ring, and an electrolyte delivery pipeline is fixedly mounted on the side of the liquid spray ring, and the electrolyte delivery pipeline is connected to an external electrolyte delivery pipeline; This setting can deliver electrolyte for machining operations, ensuring that the electrolyte can fully and in real time cover the machining area and can be quickly updated to avoid affecting the machining effect due to local changes in electrolyte concentration.

[0018] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention adopts a composite processing method of deep ultraviolet picosecond laser and electrolysis. The deep ultraviolet picosecond laser can achieve precise material removal, reduce the heat-affected zone and recast layer, and the electrolysis can dissolve debris and trim the hole wall in time. The two work together to avoid stress cracking in traditional mechanical processing and thermal damage in single laser processing, and realize low-damage processing of deep holes with ultra-large aspect ratio in alumina single crystal, thereby improving the processing quality of the workpiece.

[0019] 2. The present invention utilizes a four-jaw chuck to firmly clamp the workpiece, an anti-splash box to prevent electrolyte splashing, a filter cartridge to filter waste liquid impurities, and cooperates with the electrolyte nozzle of the spray ring and the air nozzle of the blow ring to form a processing environment adapted to the characteristics of alumina single crystals, solving the problems of insufficient tooling and poor electrolyte circulation in traditional composite technology, ensuring a stable and efficient processing process, and achieving the effect of improving processing efficiency and stability.

[0020] 3. The present invention utilizes a laser focusing head, a deep ultraviolet picosecond laser transmission optical path and an electric slide to achieve precise positioning and feeding, meeting the stringent precision requirements of deep holes with ultra-large aspect ratios. Compared with long-wavelength laser composite technology, the processing precision and surface quality are significantly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 For the present invention Figure 1 Enlarged view of point A in the middle; Figure 3 This is one of the partial structural diagrams of the present invention; Figure 4 This is the second partial structural diagram of the present invention; The meaning of each number in the figure is: 1. Frame; 10. Electrolyte collection box; 11. Collection chamber; 12. Drain hole; 121. Inner concave hole; 13. Discharge pipe; 14. Filter cartridge; 141. Handle; 142. Mesh filter; 2. Anti-splash box; 20. Inlet and outlet holes; 21. Fixed bracket; 22. Four-jaw chuck; 3. Laser generator; 30. Laser emission light source; 31. Deep ultraviolet picosecond laser transmission optical path; 32. Support rod; 4. Electric slide; 40. Support frame; 41. Air blowing ring; 42. Air blowing nozzle; 43. Air inlet pipe; 44. Laser focusing head; 45. Spray ring; 451. Center light hole; 46. Connecting rod; 47. Electrolyte nozzle; 48. Electrolyte delivery pipeline. DETAILED DESCRIPTION

[0022] The following will provide a clear and complete description of the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0023] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0024] See also Figures 1-4 The deep ultraviolet picosecond laser-electrolysis composite aluminum oxide single crystal ultra-large aspect ratio deep hole processing process of the present invention comprises the following steps: 1. Workpiece clamping and equipment preparation stage: S1. Clamp the aluminum oxide single crystal with the four-jaw chuck 22 and adjust the workpiece position so that the processing part is aligned with the inlet and outlet hole 20; S2. Start the electric slide 4 and adjust the position of the laser focusing head 44 on the support frame 40 to maintain a suitable distance between the laser focusing head 44 and the workpiece to ensure smooth laser transmission; S3. Connect the air inlet pipe 43 to an external inert gas source so that the multiple air blowing nozzles 42 of the air blowing ring 41 can discharge air normally; connect the electrolyte delivery pipe 48 to an external electrolyte delivery pipe so that the electrolyte nozzles 47 of the liquid spraying ring 45 can discharge liquid normally; 2. Processing and operation stage: S4. Turn on the laser generator 3. The laser light emitted by the laser emitting light source 30 is transmitted to the laser focusing head 44 via the deep ultraviolet picosecond laser transmission optical path 31. The laser focusing head 44 focuses the laser light and then irradiates the processing part of the aluminum oxide single crystal through the central light hole 451 of the liquid spray ring 45. S5. Simultaneously, the electrolyte delivery system is started, and the electrolyte enters the spray ring 45 through the electrolyte delivery pipeline 48 and is sprayed on the processing area by multiple electrolyte nozzles 47 to achieve electrolytic processing; S6, the electric slide 4 works, the slide on it moves, driving the laser focusing head 44 and the spray ring 45 to move slowly along the processing direction to perform processing in the depth direction; S7. During the processing, the blowing ring 41 blows inert gas into the processing area through the blowing nozzle 42 to prevent the material from oxidizing and blow away the processing debris; 3. Waste liquid collection and treatment stage: S8, the electrolytic waste liquid generated during processing flows into the collection chamber 11 of the electrolyte collection box 10, is filtered through the mesh filter 142 of the filter cartridge 14, and impurities remain in the filter cartridge 14; S9, the filtered waste liquid is discharged through the drain hole 12, the inner concave hole 121 and the discharge pipe 13; S10. After the processing is completed, the laser generator 3, the electrolyte delivery system and the inert gas source are turned off, the filter cartridge 14 is taken out through the handle 141, the internal impurities are cleaned, and the processed workpiece is removed.

[0025] In this embodiment, a rack 1 is included for the deep ultraviolet picosecond laser-electrolysis composite alumina single crystal ultra-large aspect ratio deep hole processing process. An electrolyte collection box 10 is provided on the left side of the rack 1. A fixing frame 21 is fixedly installed on the left inner wall of the electrolyte collection box 10. A four-claw chuck 22 is fixedly installed on the end of the fixing frame 21. The four-claw chuck 22 is used for clamping and fixing the alumina single crystal. An electric slide 4 is provided in the middle of the rack 1. A support frame 40 is fixedly installed on the slide seat of the electric slide 4. The support frame 40 is fixedly installed on the end of the fixing frame 21. A laser focusing head 44 is provided at the end, and a liquid spray ring 45 is installed on the front side of the laser focusing head 44 through multiple connecting rods 46. The liquid spray ring 45 is used for spraying the electrolyte. A laser generator 3 for laser processing is fixedly installed on the right side plate of the frame 1, so that the four-jaw chuck 22 can be used to firmly clamp the aluminum oxide single crystal. The laser focusing head 44 accurately focuses the laser, and the liquid spray ring 45 synchronously sprays the electrolyte, so that the laser and electrolysis work together to achieve efficient material removal and trimming, thereby achieving the effect of improving processing synergy.

[0026] like Figure 1 As shown, the electrolyte collection box 10 is provided with a collection chamber 11 inside. The collection chamber 11 is used for collecting electrolytic waste liquid, so that the electrolytic waste liquid generated by the processing can be collected in a centralized manner to prevent the waste liquid from flowing freely and polluting the environment. At the same time, it provides convenience for subsequent filtration treatment, thereby achieving the effect of facilitating centralized management of waste liquid.

[0027] like Figure 1 As shown, a drainage hole 12 is provided on the bottom wall of the collection chamber 11, and an inner concave hole 121 is provided on the bottom wall of the drainage hole 12. A discharge pipe 13 is fixedly installed on the bottom wall of the inner concave hole 121. The discharge pipe 13 is used for discharging electrolytic waste liquid, so that the filtered waste liquid is gathered to the inner concave hole 121 through the drainage hole 12, and then discharged smoothly through the discharge pipe 13, thereby reducing the waste liquid residue in the box and achieving the effect of improving the waste liquid discharge efficiency.

[0028] like Figure 1 and Figure 4 As shown, a filter cartridge 14 is inserted into the drain hole 12, and a mesh filter screen 142 is fixedly installed on the bottom of the filter cartridge 14. A handle 141 is rotatably connected to the inner wall of the filter cartridge 14. The mesh filter screen 142 can filter impurities in the waste liquid, and the handle 141 is used for easy removal and cleaning, making the discharged waste liquid cleaner, thereby achieving the effect of purifying the waste liquid and facilitating maintenance.

[0029] Specifically, an anti-splash box 2 is fixedly installed on the top surface of the electrolyte collection box 10, and an inlet and outlet hole 20 is provided on the right side plate of the anti-splash box 2. The inlet and outlet hole 20 facilitates the entry and exit of the workpiece. The anti-splash box 2 can prevent the electrolyte from splashing during processing, keep the working environment clean, and achieve the effect of taking into account both workpiece operation and anti-splash.

[0030] Furthermore, a laser emitting light source 30 is provided on the laser generator 3, and the output end of the laser emitting light source 30 is connected to a deep ultraviolet picosecond laser transmission optical path 31. A support rod 32 is fixedly installed between the deep ultraviolet picosecond laser transmission optical path 31 and the frame 1, so that the laser can be stably transmitted to the processing area, ensuring the stability of the laser energy and achieving the effect of ensuring the accuracy of laser transmission.

[0031] In addition, the laser focusing head 44, the laser emitting light source 30 and the deep ultraviolet picosecond laser transmission optical path 31 are located on the same horizontal axis. A blowing ring 41 is fixedly installed on the annular side of the laser focusing head 44, and a plurality of blowing nozzles 42 are fixedly installed on the left side of the blowing ring 41. An air inlet pipe 43 is installed on the side of the blowing ring 41. The air inlet pipe 43 is connected to an external inert gas source and can use inert gas to be blown out from the blowing nozzle 42 to form a tight protective atmosphere in the processing area, effectively isolating oxygen and impurities. At the same time, the air blowing can also blow away impurities in the processing area, greatly reducing the oxidation of materials and impurity pollution during the processing, and ensuring the purity of the processing environment.

[0032] It is worth noting that a central light hole 451 is provided at the center of the spray ring 45. The central light hole 451 is used for the laser to pass through, so that the laser can pass through smoothly. At the same time, the spray ring 45 does not block the light path, ensuring that the laser and electrolyte action areas are consistent, thereby achieving the effect of taking into account both laser transmission and electrolyte spraying.

[0033] It is worth noting that a plurality of electrolyte nozzles 47 are fixedly installed on the left side of the spray ring 45, and an electrolyte delivery pipeline 48 is fixedly installed on the side of the spray ring 45. The electrolyte delivery pipeline 48 is connected to an external electrolyte delivery pipeline. The external electrolyte delivery pipeline is filled with electrolyte. After being transported through the pipeline, the electrolyte is evenly sprayed out from the electrolyte nozzle 47, fully covering the processing area and quickly updating it, avoiding local uneven concentration of the electrolyte, thereby achieving the effect of improving the stability of electrolytic processing.

[0034] Finally, it should be noted that the laser generator 3, laser emitting light source 30, deep ultraviolet picosecond laser transmission optical path 31, laser focusing head 44, electric slide 4, corresponding control system and external power supply involved in the present invention are all universal standard parts or parts known to technical personnel in this field. Their structures and principles are known to technical personnel in this field through technical manuals or through conventional experimental methods. In the idle space of this device, all the above-mentioned electrical components, which refer to power elements, electrical components and adapted controllers and power supplies, are connected through wires. The specific connection means should refer to the working principle of the present invention. The electrical connection between each electrical component is completed in the order of working, and the detailed connection means are all well-known technologies in this field.

[0035] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely preferred examples of the present invention and are not intended to limit the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. Deep ultraviolet picosecond laser-electrolysis composite alumina single crystal ultra-large aspect ratio deep hole processing process, characterized by: The following steps are involved:

1. Workpiece clamping and equipment preparation stage: S1. Clamp the aluminum oxide single crystal with a four-jaw chuck (22), and adjust the position of the workpiece so that the processing part is aligned with the inlet and outlet hole (20); S2, start the electric slide (4), adjust the position of the laser focusing head (44) on the support frame (40), so that the laser focusing head (44) and the workpiece maintain a suitable distance to ensure smooth transmission of the laser; S3, connecting the air inlet pipe (43) to an external inert gas source so that the multiple air blowing nozzles (42) of the air blowing ring (41) can discharge air normally; connecting the electrolyte delivery pipe (48) to an external electrolyte delivery pipe so that the electrolyte nozzles (47) of the liquid spraying ring (45) can discharge liquid normally; 2. Processing and operation stage: S4, turning on the laser generator (3), transmitting the laser light emitted by the laser emitting light source (30) to the laser focusing head (44) via the deep ultraviolet picosecond laser transmission optical path (31), focusing the laser light by the laser focusing head (44), and irradiating the laser light onto the processing part of the aluminum oxide single crystal through the central light hole (451) of the liquid spray ring (45); S5. Simultaneously, the electrolyte delivery system is started, and the electrolyte enters the spray ring (45) through the electrolyte delivery pipeline (48), and is sprayed on the processing area by multiple electrolyte nozzles (47), thereby achieving electrolytic processing; S6, the electric slide (4) drives the laser focusing head (44) and the liquid spray ring (45) to move slowly along the processing direction to perform processing in the depth direction; S7. During the processing, the blowing ring (41) blows inert gas into the processing area through the blowing nozzle (42) to prevent oxidation of the material and blow away the processing debris; 3. Waste liquid collection and treatment stage: S8, the electrolytic waste liquid generated during processing flows into the collection chamber (11) of the electrolyte collection box (10), is filtered through the mesh filter (142) of the filter cartridge (14), and impurities remain in the filter cartridge (14); S9, the filtered waste liquid is discharged through the drainage hole (12), the inner concave hole (121) and the discharge pipe (13); S10: After the processing is completed, the laser generator (3), the electrolyte delivery system and the inert gas source are turned off, the filter cartridge (14) is taken out through the handle (141), the internal impurities are cleaned, and the processed workpiece is removed at the same time.

2. The deep ultraviolet picosecond laser-electrolysis composite aluminum oxide single crystal ultra-large aspect ratio deep hole processing process as claimed in claim 1, comprising a frame (1) using the deep ultraviolet picosecond laser-electrolysis composite aluminum oxide single crystal ultra-large aspect ratio deep hole processing process, characterized in that: An electrolyte collection box (10) is provided on the left side of the frame (1), a fixing frame (21) is fixedly installed on the left inner wall of the electrolyte collection box (10), a four-jaw chuck (22) is fixedly installed on the end of the fixing frame (21), and the four-jaw chuck (22) is used for clamping and fixing the aluminum oxide single crystal, an electric slide (4) is provided in the middle of the frame (1), a support frame (40) is fixedly installed on the slide seat of the electric slide (4), a laser focusing head (44) is provided at the end of the support frame (40), a spray ring (45) is installed on the front side of the laser focusing head (44) through a plurality of connecting rods (46), and the spray ring (45) is used for spraying the electrolyte, and a laser generator (3) for realizing laser processing is fixedly installed on the right side plate of the frame (1).

3. The deep ultraviolet picosecond laser-electrolysis composite aluminum oxide single crystal ultra-large aspect ratio deep hole processing process according to claim 2, characterized in that: A collection chamber (11) is provided inside the electrolyte collection box (10), and the collection chamber (11) is used for collecting electrolytic waste liquid.

4. The deep ultraviolet picosecond laser-electrolysis composite aluminum oxide single crystal ultra-large aspect ratio deep hole processing process according to claim 3, characterized in that: A drainage hole (12) is provided on the bottom wall of the collection chamber (11), an inner concave hole (121) is provided on the bottom wall of the drainage hole (12), and a discharge pipe (13) is fixedly mounted on the bottom wall of the inner concave hole (121), and the discharge pipe (13) is used for discharging electrolytic waste liquid.

5. The deep ultraviolet picosecond laser-electrolysis composite aluminum oxide single crystal ultra-large aspect ratio deep hole processing process according to claim 4, characterized in that: A filter cartridge (14) is inserted into the drainage hole (12), a mesh filter (142) is fixedly mounted on the bottom of the filter cartridge (14), and a handle (141) is rotatably connected to the inner wall of the filter cartridge (14).

6. The deep ultraviolet picosecond laser-electrolysis composite aluminum oxide single crystal ultra-large aspect ratio deep hole processing process according to claim 2, characterized in that: An anti-splash box (2) is fixedly mounted on the top surface of the electrolyte collection box (10), and an inlet and outlet hole (20) is provided on the right side plate of the anti-splash box (2).

7. The deep ultraviolet picosecond laser-electrolysis composite aluminum oxide single crystal ultra-large aspect ratio deep hole processing process according to claim 2, characterized in that: The laser generator (3) is provided with a laser emitting light source (30), the output end of the laser emitting light source (30) is connected to a deep ultraviolet picosecond laser transmission optical path (31), and a support rod (32) is fixedly installed between the deep ultraviolet picosecond laser transmission optical path (31) and the frame (1).

8. The deep ultraviolet picosecond laser-electrolysis composite aluminum oxide single crystal ultra-large aspect ratio deep hole processing process according to claim 7, characterized in that: The laser focusing head (44), the laser emitting light source (30) and the deep ultraviolet picosecond laser transmission optical path (31) are located on the same horizontal axis. A blowing ring (41) is fixedly installed on the annular side surface of the laser focusing head (44), and a plurality of blowing nozzles (42) are fixedly installed on the left side surface of the blowing ring (41). An air inlet pipe (43) is installed on the side surface of the blowing ring (41), and the air inlet pipe (43) is connected to an external inert gas source.

9. The deep ultraviolet picosecond laser-electrolysis composite aluminum oxide single crystal ultra-large aspect ratio deep hole processing process according to claim 8, characterized in that: A central light hole (451) is provided at the center of the liquid spray ring (45), and the central light hole (451) is used for the laser to pass through.

10. The deep ultraviolet picosecond laser-electrolysis composite aluminum oxide single crystal ultra-large aspect ratio deep hole processing process according to claim 9, characterized in that: A plurality of electrolyte nozzles (47) are fixedly mounted on the left side of the liquid spray ring (45), and an electrolyte delivery pipeline (48) is fixedly mounted on the side of the liquid spray ring (45), and the electrolyte delivery pipeline (48) is connected to an external electrolyte delivery pipeline.

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