Gas detection device and gas detection method

Abstract

The invention relates to the technical field of gas concentration detection, and particularly provides a gas detection device and a gas detection method.The gas detection device comprises a tunable metamaterial detector and a differentiator, the tunable metamaterial detector is configured to be capable of being switched among a plurality of target wavebands and detecting target light of the target wavebands, and the differentiator is configured to be switched among the target wavebands; the corresponding detection light intensity is obtained; wherein the target light is absorbed by mixed gas, and the mixed gas comprises a plurality of gas components; the detection light intensity comprises a first type of light intensity after being absorbed by various gas components and a second type of light intensity after being absorbed by a single gas component; and the differentiator is configured to perform dual-wavelength differential calculation on the first-class light intensity and the second-class light intensity to obtain the concentration of the gas components. According to the invention, the requirements of anti-interference performance, low cost and small size in a complex gaseous environment can be met.

Description

Technical Field

[0001] The present invention relates to the technical field of gas concentration detection, and in particular to a gas detection device and a gas detection method. Background Art

[0002] Detecting gas concentration in mixed gases is a key requirement in fields such as industrial safety, environmental monitoring, and energy and chemical engineering. In micro-electro-mechanical system (MEMS) non-dispersive infrared (NDIR) gas sensors, high-Q metamaterial structures effectively overcome the difficulties of traditional gas interference mitigation, which requires multi-channel and complex decoupling algorithms. These sensors utilize narrowband filtering to replace the large filters used in existing technologies to suppress interference from gases with similar absorption peaks. Despite this, these sensors struggle to achieve the desired balance between interference mitigation, low cost, and compact size in complex gaseous environments. Summary of the Invention

[0003] The gas detection device and gas detection method provided by the embodiments of the present invention at least solve the problem that existing high-Q metamaterial structures are difficult to take into account the anti-interference, low cost and small volume requirements in complex gaseous environments, and can take into account the anti-interference, low cost and small volume requirements in complex gaseous environments.

[0004] In a first aspect, the present invention provides a gas detection device, comprising a tunable metamaterial detector, configured to switch between multiple target bands and detect target light in the target bands to obtain corresponding detection light intensities; wherein the target light is absorbed by a mixed gas, and the mixed gas includes multiple gas components; the detection light intensity includes a type of light intensity after being absorbed by multiple gas components, and a type of light intensity after being absorbed by a single gas component; and a differentiator, configured to perform dual-wavelength differential calculation on the type one light intensity and the type two light intensities to obtain concentrations of the multiple gas components.

[0005] In one embodiment of the present invention, the differentiator includes: a first calculation unit, configured to perform calculations based on the two types of light intensities to obtain two types of concentrations; wherein the two types of concentrations are the concentrations of the gas components corresponding to the two types of light intensities; and a second calculation unit, configured to perform normalized calculations based on the one type of light intensity and the two types of concentrations to obtain a one type of concentration; wherein the one type of concentration is the concentration corresponding to the remaining gas components in the mixed gas.

[0006] In one embodiment of the present invention, the tunable metamaterial detector includes: a metamaterial component for performing narrow-band filtering and enhancing absorption efficiency on the target light in the target band to obtain a corresponding target light signal; a tuning component for switching the target band of the metamaterial component; and a detection component for converting the target light signal to obtain the corresponding detection light intensity.

[0007] In one embodiment of the present invention, the tunable metamaterial detector also includes: a first substrate, provided with a first metal layer, the first metal layer having a microstructure for resonance enhancement; a second substrate, arranged on one side of the first substrate along the first direction and connected to the first substrate; the second substrate is hollow along the first direction, an elastic beam is provided in the second substrate, a pyroelectric detection component is provided on the side of the elastic beam close to the first metal layer, and a second metal layer is provided on the side of the pyroelectric detection component close to the first metal layer; a first medium is provided between the elastic beam and the first substrate; a third substrate, arranged on the side of the second substrate away from the first substrate along the first direction and connected to the second substrate; a third metal layer is provided on the side of the third substrate close to the elastic beam; a second medium is provided between the third substrate and the elastic beam; wherein the metamaterial component includes the first metal layer, the first medium and the second metal layer; the tuning component includes the second metal layer, the elastic beam, the second medium and the third metal layer; and the detection component includes the second metal layer and the pyroelectric detection component.

[0008] In one embodiment of the present invention, the first substrate is configured as a chalcogenide glass substrate, and the chalcogenide glass substrate, the second substrate, and the third substrate are vacuum bonded; along the first direction, the first metal layer is disposed on a side of the chalcogenide glass substrate close to the second substrate; wherein an annular transition layer is disposed between the chalcogenide glass substrate and the second substrate, and the transition layer connects the chalcogenide glass substrate and the second substrate respectively.

[0009] In one embodiment of the present invention, the elastic beam includes: a plurality of beam arm portions; the plurality of beam arm portions are arranged in sequence and spaced apart along the circumference of the second substrate; each of the beam arm portions includes a first arm and a second arm, one end of the first arm is connected to the inner wall surface of the second substrate, and the other end is connected to the second arm at an angle; a bearing portion is arranged between the plurality of beam arm portions and connected to one end of the second arm away from the first arm; the thermoelectric detection component is arranged on the bearing portion; and a hollow portion is arranged on the bearing portion and corresponds to the thermoelectric detection component.

[0010] In one embodiment of the present invention, the present invention further comprises: a metamaterial narrowband light source configured to emit the target light; wherein the wavelength band of the target light matches the target wavelength band.

[0011] In a second aspect, the present invention also provides a gas detection method, comprising the steps of: switching a target band of a tunable metamaterial detector; wherein the tunable metamaterial detector can switch between a plurality of target bands; detecting target light in the target band according to the tunable metamaterial detector to obtain a corresponding detection light intensity; wherein the target light is absorbed by a mixed gas, and the mixed gas includes a plurality of gas components; the detection light intensity includes a first type of light intensity after being absorbed by the plurality of the gas components, and a second type of light intensity after being absorbed by a single gas component; performing dual-wavelength differential calculation based on the first type of light intensity and the second type of light intensity to obtain the concentrations of the plurality of gas components.

[0012] In one embodiment of the present invention, dual-wavelength difference calculation is performed based on the first type of light intensity and the second type of light intensity to obtain the concentrations of the plurality of gas components, including the steps of: performing calculation based on the second type of light intensity to obtain the second type of concentration; wherein the second type of concentration is the concentration of the gas components corresponding to the second type of light intensity; performing normalization calculation based on the first type of light intensity and the second type of concentration to obtain the first type of concentration; wherein the first type of concentration is the concentration corresponding to the remaining gas components in the mixed gas.

[0013] In one embodiment of the present invention, the mixed gas includes a first gas component and a second gas component; the concentration of the second gas component is calculated based on the two types of light intensities and is expressed as: Where, is the concentration of the second gas component, is the corresponding Class 1 and Class 2 light intensity, is the corresponding second gain coefficient, is the corresponding third absorption coefficient; and the concentration of the first gas component is obtained by normalizing the concentration of the second gas component and the first type of light intensity, which is expressed as: Where, is the concentration of the first gas component, is the corresponding Class 1 light intensity, is the corresponding first gain coefficient, is the corresponding first absorption coefficient, is the corresponding second absorption coefficient.

[0014] In one embodiment of the present invention, before detecting target light in a target band according to a tunable metamaterial detector and obtaining a corresponding detection light intensity, the steps further include: setting a first metal layer in a first substrate; setting a pyroelectric detection component on a second substrate; setting a second metal layer on a side of the pyroelectric detection component facing away from the second substrate; processing the side of the second substrate facing away from the pyroelectric detection component to obtain an elastic beam; setting a third metal layer on a third substrate; and bonding the first substrate, the second substrate, and the third substrate to obtain the tunable metamaterial detector.

[0015] In one embodiment of the present invention, before detecting target light in a target band according to a tunable metamaterial detector and obtaining a corresponding detection light intensity, the steps further include: disposing a first metal layer on a chalcogenide glass substrate; disposing a pyroelectric detection component, a second metal layer, and an annular transition layer on a second substrate; wherein the second metal layer is disposed on a side of the pyroelectric detection component facing away from the second substrate; processing is performed on a side of the second substrate facing away from the pyroelectric detection component to obtain an elastic beam; disposing a third metal layer on a third substrate; and vacuum bonding the chalcogenide glass substrate, the second substrate, and the third substrate to obtain the tunable metamaterial detector.

[0016] The above technical solution of the present invention has the following beneficial effects compared with the prior art:

[0017] The gas detection device and method described in the present invention overcome the limitations of traditional fixed-wavelength detection devices by utilizing a tunable metamaterial detector that can switch between multiple target wavelengths, enabling detection of both Class I and Class II light intensities. A differentiator is then used to perform dual-wavelength differential calculations on the Class I and Class II light intensities to determine the concentrations of the corresponding gas components. The entire device is highly versatile, compact, and low-cost, possessing strong anti-interference capabilities and rapid response capabilities. This effectively addresses the prior art issue of mutual interference between gases with similar absorption peaks during non-dispersive infrared gas detection. This method eliminates the reliance of existing devices on specific gas instances and enables precise detection of the concentrations of each gas component in a mixed gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other embodiments can be obtained based on these drawings without inventive work. In the drawings:

[0019] Figure 1 This is one of the structural diagrams of the gas detection device in the preferred embodiment of the present invention.

[0020] Figure 2 Schematic diagram of the structure of a differentiator in a preferred embodiment of the present invention.

[0021] Figure 3 1 is a schematic structural diagram of a tunable metamaterial detector in a preferred embodiment of the present invention.

[0022] Figure 4 This is one of the exploded structural diagrams of the tunable metamaterial detector in the preferred embodiment of the present invention.

[0023] Figure 5 This is the second schematic diagram of the explosion structure of the tunable metamaterial detector in the preferred embodiment of the present invention.

[0024] Figure 6 This is one of the cross-sectional structural diagrams of the tunable metamaterial detector in the preferred embodiment of the present invention.

[0025] Figure 7 This is the second schematic cross-sectional view of the tunable metamaterial detector in the preferred embodiment of the present invention.

[0026] Figure 8 It is a schematic structural diagram of the elastic beam in a preferred embodiment of the present invention.

[0027] Figure 9 This is the second structural diagram of the gas detection device in the preferred embodiment of the present invention.

[0028] Figure 10 It is a schematic diagram of the partial structure of the metamaterial narrow-band light source in a preferred embodiment of the present invention.

[0029] Figure 11 It is a flow chart of the gas detection method in a preferred embodiment of the present invention.

[0030] Figure 12 It is a schematic structural diagram of an electronic device in a preferred embodiment of the present invention.

[0031] The above drawings include the following reference numerals:

[0032] D1, first direction; 10, tunable metamaterial detector; 101, metamaterial element; 102, tuning element; 103, detection element; 111, first substrate; 1110, chalcogenide glass substrate; 1111, first etching cavity; 1112, second etching cavity; 112, second substrate; 1121, third etching cavity; 1122, elastic beam; 11221, beam arm; 11221a, first arm; 11221b, second arm; 11222, bearing portion; 11223, hollow portion; 1123, fourth etching cavity; 1124, transition layer; 113, third substrate; 12, first metal layer; 1 3. Thermoelectric detection component; 131. First thermoelectric dielectric layer; 132. Thermocouple layer; 133. Second thermoelectric dielectric layer; 14. Second metal layer; 15. First dielectric; 16. Third metal layer; 17. Second dielectric; 20. Differentiator; 21. First computing unit; 22. Second computing unit; 30. Metamaterial narrowband light source; 31. First nanoantenna; 32. Second nanoantenna; 401. Computing unit; 402. ROM; 403. RAM; 404. Bus; 405. I / O interface; 406. Input unit; 407. Output unit; 408. Storage unit; 409. Communication unit. DETAILED DESCRIPTION

[0033] Embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be construed as limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the present invention. It should be understood that the drawings and embodiments of the present invention are for illustrative purposes only and are not intended to limit the scope of protection of the present invention.

[0034] It should be noted that gas concentration detection of mixed gases is one of the key requirements in industrial safety, environmental monitoring, energy and chemical industries, etc. Non-dispersive infrared technology, as a common gas analysis method, is widely used in gas concentration detection of mixed gases.

[0035] Non-dispersive infrared (NDIR) technology is a gas detection technique based on the principle of infrared spectral absorption. Specifically, different gas molecules have characteristic absorption capabilities for specific wavelengths of infrared light. When infrared light passes through a medium containing the gas being measured, the specific wavelengths are absorbed by the gas molecules, resulting in a decrease in light intensity that conforms to the Lambert-Beer law. For mixed gases, the absorption peaks of infrared light for different gas components differ. Therefore, by measuring the attenuation of specific wavelengths of light, the gas concentration of the corresponding component can be inferred.

[0036] However, the infrared absorption spectra of various components in a gas mixture may overlap, leading to cross-interference when detecting at a single wavelength, affecting the accuracy of the test results. Existing technologies typically use multi-channel detection and decoupling algorithms to minimize cross-interference. While this can mitigate the impact of interference to a certain extent, the effectiveness is limited.

[0037] High-Q metamaterial structures are also used in microelectromechanical system (MEMS) non-dispersive infrared gas sensors. Q is a quality factor used to measure the performance of electronic devices. A higher Q indicates a greater ratio of energy stored to energy lost per unit time.

[0038] High-Q metamaterial structures not only overcome the difficulties of traditional anti-gas interference technology, which requires multiple channels and complex decoupling algorithms, but also utilize narrowband filtering characteristics to replace the large-scale filters used in existing technologies to suppress gas interference with similar absorption peaks. However, it also has problems.

[0039] Specifically, high-Q metamaterial structures rely on nanoscale precision machining processes, resulting in high manufacturing costs and low yields. Any process errors can easily cause the absorption peak wavelength to drift, affecting detection results.

[0040] In the face of dramatic changes in gas concentration, or fluctuations in ambient temperature or light source, the broadening of absorption linewidths can lead to partial overlap of spectral peaks. High-Q metamaterial filtering, due to its narrow bandwidth, is unable to dynamically adapt to such interference. Traditional algorithms can only rely on post-process decoupling, which cannot prevent the substantial degradation of the signal-to-noise ratio caused by physical layer signal aliasing.

[0041] When detecting the concentration of mixed gases, it is often necessary to integrate multiple sets of high-Q metamaterial detectors, which results in bulky hardware and high cost.

[0042] In summary, in order to solve the problem that high Q value metamaterial structures cannot meet the requirements of anti-interference, low cost and small volume in complex gaseous environments, refer to Figure 1 As shown, an embodiment of the present invention provides a gas detection device, including a tunable metamaterial detector 10 and a differentiator 20 .

[0043] The tunable metamaterial detector 10 is designed to achieve high sensitivity, rapid tuning, and detection of target wavelengths within a specific range. Specifically, the tunable metamaterial detector 10 is tunable, meaning it can switch between multiple target wavelength bands. Those skilled in the art will be able to configure different methods for switching the target wavelength band of the tunable metamaterial detector 10 based on actual needs.

[0044] Those skilled in the art can select a tunable metamaterial detector 10 with an appropriate target wavelength band based on the actual gas mixture detection requirements. This requires only that the target wavelength band of the tunable metamaterial detector 10 correspond to the absorption peak wavelength of the corresponding gas component in the gas mixture. The configuration of the tunable metamaterial detector 10 makes the device versatile and significantly expands its application range.

[0045] The tunable metamaterial detector 10 can be integrated using MEMS technology during production. Detection is achieved using a single, highly integrated tunable metamaterial detector 10, eliminating the need for hardware replacement or the use of discrete components and multiple detector arrays as in the prior art, thus miniaturizing the entire device.

[0046] In different target bands, the tunable metamaterial detector 10 can detect target light in the corresponding target band and obtain corresponding detection light intensity. The detection light intensity is usually an electrical signal.

[0047] In the embodiment of the present invention, the target light is absorbed by the mixed gas, which includes multiple gas components, and the gas concentrations of these gas components need to be detected.

[0048] Before detection, the mixed gas can be identified to determine the corresponding components, and then a suitable tunable metamaterial detector 10 can be selected based on the components. Those skilled in the art can select a gas component identification method based on actual needs. For example, the gas components of the mixed gas can be preliminarily tested through physical properties and / or chemical properties.

[0049] For example, the color of the gas can be observed. If it is yellow-green, it may contain chlorine. Alternatively, an acid-base test can be performed, including contacting the mixed gas with moistened pH paper and observing the color change of the paper. If it turns red, it may contain some acidic gas.

[0050] The detection light intensity includes a type of light intensity after being absorbed by multiple gas components, and a type of light intensity after being absorbed by a single gas component.

[0051] For example, when detecting a mixture of carbon monoxide and carbon dioxide, the strongest absorption peak for carbon dioxide is at 4.25 microns, with a weaker absorption peak at 15 microns. In contrast, the strongest absorption peak for carbon monoxide is at 4.67 microns, with no weaker absorption peak. Therefore, a tunable metamaterial detector 10 capable of switching between at least two target wavelengths, 4.25 to 4.67 microns and 15 microns, is selected.

[0052] Conventional, non-high-Q tunable metamaterial detectors 10 do not require high-precision, high-cost processes, nor do they require complex, expensive back-end circuitry and algorithms. They are compatible with mass production and low-cost, with a wavelength error of approximately 10%. Therefore, when the target wavelength of the tunable metamaterial detector 10 is set to 4.25 microns, measurements can be made in the target wavelength range of 3.825 to 4.675 microns, which covers the strong absorption peak wavelengths of carbon dioxide and carbon monoxide. After detection, the tunable metamaterial detector 10 detects a type of light intensity after absorption by carbon monoxide and carbon dioxide.

[0053] After completing the detection of the target band, the target wavelength of the tunable metamaterial detector 10 is switched to 15 μm, which enables measurement of the target band of 13.5 μm to 16.5 μm, and obtains the Class II light intensity after only carbon dioxide absorption.

[0054] It is worth noting that not all detectors can detect weak signals at weak absorption peaks. In the embodiment of the present invention, the tunable metamaterial detector 10 used has high sensitivity, so it can detect weak absorption peaks.

[0055] Specifically, the tunable metamaterial detector 10 has high absorption efficiency due to impedance matching, typically exceeding 90%, ensuring that the vast majority of incident target light is absorbed rather than wasted through reflection or transmission. For example, a tunable metamaterial detector 10 based on a metallic metamaterial achieves extremely high sensitivity through strong local enhancement. For example, a tunable metamaterial detector 10 based on a low-dimensional metamaterial achieves high sensitivity through plasmon enhancement and quantum effects.

[0056] After the first and second light intensities are measured by the tunable metamaterial detector 10 , the first and second light intensities can be subjected to dual-wavelength differential calculation by the differentiator 20 to obtain the concentrations of the various gas components.

[0057] The same gas molecule can have multiple different vibration modes, each corresponding to a different energy change. Therefore, the same gas may have different absorption peaks. The vibration modes of different gas molecules may have similar vibration frequencies, which will cause the absorption peaks to overlap and cause interference in gas detection.

[0058] Based on this, the first type of light intensity is a mixed absorption signal after being absorbed by multiple gas components and is therefore difficult to process directly. However, the second type of light intensity is absorbed by only a single gas component and is a specific absorption signal of that gas component at the corresponding absorption peak wavelength. Therefore, it can be directly processed by the differentiator 20 to obtain the corresponding gas concentration.

[0059] Taking the detection of a mixture of carbon monoxide and carbon dioxide as an example, the carbon dioxide concentration can be calculated based on the intensity of the second type of light absorbed only by carbon dioxide. Furthermore, the carbon monoxide concentration can be calculated by combining the carbon dioxide concentration with the intensity of the first type of light absorbed by both carbon monoxide and carbon dioxide. In other words, the embodiment of the present invention uses the detection results at the weak absorption peak to first calculate the concentration of the gas component with the unique absorption peak in the mixed gas, and then infers the concentration of the unknown gas component.

[0060] The two light intensity detection data are subjected to dual-wavelength differential calculation by the differentiator 20, which has strong anti-interference capability, can accurately remove the interference signals between different gases, eliminate gas cross-interference, and suppress the influence of environmental fluctuations such as temperature change, light source drift, and device noise, thereby realizing independent and accurate measurement of each gas component in the mixed gas, improving the detection signal-to-noise ratio, and having high detection accuracy.

[0061] Furthermore, the subwavelength-scale structural characteristics of the metamaterial in the tunable metamaterial detector 10 enable efficient localization of the electromagnetic field and rapid response. Combined with tunability and real-time processing of various light intensities by the differentiator 20, this allows for dynamic process monitoring with millisecond-level time resolution. Specifically, the metamaterial, through the free or bound charges in its subwavelength-scale structure, generates forced oscillations and electromagnetic responses driven by localized electromagnetic fields, thereby enabling macroscopic manipulation of the effective permittivity and permeability.

[0062] Compared with the existing technology, the gas detection device described in the embodiment of the present invention can get rid of the dependence on specific gas instances. Through the combination of tunability and dual-wavelength differential, it demonstrates versatility and high efficiency in multi-scenario and multi-gas detection applications, providing a new technical path and solution for the field of gas detection.

[0063] In summary, the gas detection device described in the present invention breaks through the limitations of traditional fixed wavelength detection devices through the tunable metamaterial detector 10 that can switch between multiple target bands, realizes the detection of Class I light intensity and Class II light intensity, and combines with the differentiator 20 to perform dual-wavelength differential calculations on Class I light intensity and Class II light intensity to obtain the concentration of the corresponding gas components. The entire device has high versatility, small size, low cost, strong anti-interference ability and fast response ability. It effectively solves the problem of mutual interference between gases with similar absorption peaks in non-dispersive infrared gas detection in the prior art. It can get rid of the dependence of existing devices on specific gas instances and realize accurate detection of the concentration of each gas component in the mixed gas.

[0064] Reference Figure 2 As shown, in the gas detection device of the present invention, in some embodiments, the differentiator 20 includes a first calculation component 21 and a second calculation component 22.

[0065] The first calculation unit 21 is configured to perform calculations based on the second type of light intensity to obtain the second type of concentration, wherein the second type of concentration is the concentration of the gas component corresponding to the second type of light intensity.

[0066] It should be noted that the number of calculations required by the first calculation unit 21 varies depending on the number of gas components in the mixed gas. For example, if the mixed gas contains two gas components, the first calculation unit 21 needs to calculate once; if the mixed gas contains three gas components, the first calculation unit 21 needs to calculate twice.

[0067] The second calculation unit 22 is configured to perform normalized calculation based on the first-class light intensity and the second-class concentration to obtain the first-class concentration, wherein the first-class concentration is the concentration corresponding to the remaining gas components in the mixed gas.

[0068] To facilitate understanding of the working principles of the various components in the differentiator 20 , a mixed gas including two gas components and a mixed gas including three gas components are respectively used as examples for explanation below.

[0069] In the case where the mixed gas includes two gas components, for ease of distinction, the two gas components are respectively recorded as a first gas component and a second gas component.

[0070] During gas detection, the mixed gas is first detected by the tunable metamaterial detector 10. By switching the target wavelength of the tunable metamaterial detector 10, the intensity of the target light at the first target wavelength after being absorbed by both the first and second gas components is obtained; and the intensity of the target light at the second target wavelength after being absorbed only by the second gas component is obtained. It can be expressed as:

[0071] ;

[0072] .

[0073] Where, The intensity of the target light at the first target wavelength after being absorbed by the first gas component and the second gas component is directly output by the tunable metamaterial detector 10 switched to the first target wavelength band.

[0074] is the first gain coefficient, which is a system gain coefficient determined by factors such as the sensitivity and optical path length of the tunable metamaterial detector 10 and can be obtained through calibration of a standard gas experiment.

[0075] is the concentration of the first gas component, which is currently unknown but can be calculated.

[0076] is the first absorption coefficient, which represents the absorption coefficient of the first gas component at the first target wavelength and is obtained by calibration from a spectral database or a standard gas ratio experiment.

[0077] is the concentration of the second gas component, which is currently unknown but can be calculated.

[0078] is the second absorption coefficient, which represents the absorption coefficient of the second gas component at the first target wavelength and is obtained by calibration from the spectrum database or standard gas ratio experiment.

[0079] The intensity of the first type II light after the target light is absorbed by the second gas component at the second target wavelength is directly output by the tunable metamaterial detector 10 switched to the second target wavelength band.

[0080] is the second gain coefficient, which is a system gain coefficient determined by factors such as the sensitivity and optical path length of the tunable metamaterial detector 10 and can be obtained through calibration of a standard gas experiment.

[0081] is the third absorption coefficient, which represents the absorption coefficient of the second gas component at the second target wavelength and is obtained by calibration from a spectral database or a standard gas ratio experiment.

[0082] Then, the first calculation unit 21 calculates the concentration of the second gas component based on the first and second class light intensity. It is expressed as:

[0083] .

[0084] Finally, the concentration of the first gas component is obtained by normalizing the concentration of the second gas component and the Class I light intensity, eliminating the interference between the gas components and the interference of common mode environmental factors, and achieving accurate detection of the concentrations of both.

[0085] .

[0086] In the case where the mixed gas includes three gas components, for ease of distinction, the three gas components are respectively recorded as a third gas component, a fourth gas component, and a fifth gas component.

[0087] During gas detection, the mixed gas is first detected by the tunable metamaterial detector 10. By switching the target wavelength of the tunable metamaterial detector 10, the intensity of the target light at the third target wavelength after being simultaneously absorbed by the third, fourth, and fifth gas components is obtained; the intensity of the target light at the fourth target wavelength after being absorbed only by the third gas component is obtained; and the intensity of the target light at the fifth target wavelength after being absorbed only by the fourth gas component is obtained. These are expressed as:

[0088] ,

[0089] ,

[0090] .

[0091] Where, The intensity of the target light at the third target wavelength after being simultaneously absorbed by the third gas component, the fourth gas component, and the fifth gas component is directly output by the tunable metamaterial detector 10 switched to the third target wavelength band.

[0092] is the third gain coefficient, which is a system gain coefficient determined by factors such as the sensitivity and optical path length of the tunable metamaterial detector 10 and can be obtained through calibration of a standard gas experiment.

[0093] is the concentration of the third gas component, which is currently unknown but can be calculated.

[0094] is the fourth absorption coefficient, which represents the absorption coefficient of the third gas component at the third target wavelength and is obtained by calibration from a spectral database or a standard gas ratio experiment.

[0095] is the concentration of the fourth gas component, which is currently unknown but can be calculated.

[0096] is the concentration of the fifth gas component, which is currently unknown but can be calculated.

[0097] is the fifth absorption coefficient, which represents the absorption coefficient of the fourth gas component at the third target wavelength and is obtained by calibration from the spectrum database or standard gas ratio experiment.

[0098] is the sixth absorption coefficient, which represents the absorption coefficient of the fifth gas component at the third target wavelength and is obtained by calibration from the spectrum database or standard gas ratio experiment.

[0099] The second type II light intensity of the target light at the fourth target wavelength after being absorbed only by the third gas component is directly output by the tunable metamaterial detector 10 switched to the fourth target wavelength band.

[0100] The fourth gain coefficient is a system gain coefficient determined by factors such as the sensitivity and optical path length of the tunable metamaterial detector 10 , and can be obtained through calibration of a standard gas experiment.

[0101] is the seventh absorption coefficient, representing the absorption coefficient of the third gas component at the fourth target wavelength, which is obtained by calibration from the spectrum database or standard gas ratio experiment.

[0102] The intensity of the third type II light at the fifth target wavelength after being absorbed only by the fourth gas component is directly output by the tunable metamaterial detector 10 switched to the fifth target wavelength band.

[0103] is the fifth gain coefficient, which is a system gain coefficient determined by factors such as the sensitivity and optical path length of the tunable metamaterial detector 10 and can be obtained through calibration of a standard gas experiment.

[0104] is the eighth absorption coefficient, representing the absorption coefficient of the fourth gas component at the fifth target wavelength, which is obtained by calibration from the spectrum database or standard gas ratio experiment.

[0105] Then, the first calculation unit 21 calculates the concentration of the third gas component and the concentration of the fourth gas component based on the second class II light intensity and the third class II light intensity.

[0106] ,

[0107] .

[0108] Finally, the concentration of the fifth gas component is obtained by normalizing the concentration of the third gas component, the concentration of the fourth gas component, and the Class II light intensity. It can be expressed as:

[0109] .

[0110] By setting up this structure, the differentiator 20 can cooperate well with the tunable metamaterial detector 10 with high sensitivity and fast response capability, and perform dual-wavelength differential calculation on the two light intensity detection data output by the tunable metamaterial detector 10. It has strong anti-interference ability, can accurately strip off the interference signals between different gases, eliminate gas cross-interference, and suppress the influence of environmental fluctuations such as temperature changes, light source drift, and device noise, thereby realizing independent and accurate measurement of each gas component in the mixed gas, improving the detection signal-to-noise ratio, and having high detection accuracy.

[0111] Reference Figure 3 As shown, in some embodiments of the gas detection device of the present invention, the tunable metamaterial detector 10 includes a metamaterial component 101 , a tuning component 102 and a detection component 103 .

[0112] Metamaterial element 101 is used to narrowband filter target light in a target wavelength band and enhance absorption efficiency, thereby obtaining a corresponding target light signal. A metamaterial structure is a specially designed, microscopic structure that exhibits narrowband filtering properties, precisely controlling the specific wavelength of infrared light entering the detector and utilizing plasmon resonance to enhance detection sensitivity. Metamaterial structures include, but are not limited to, all-dielectric metamaterial structures, low-dimensional metamaterial structures, and metallic metamaterial structures. In embodiments of the present invention, metallic metamaterial structures are preferred.

[0113] Tuning element 102 is used to switch the target wavelength of metamaterial element 101. Those skilled in the art can, based on actual needs, utilize external stimuli such as voltage and temperature to alter the intrinsic physical parameters of metamaterial element 101, such as dielectric constant, magnetic permeability, material phase transition, and structural deformation, to adjust its electromagnetic response, thereby dynamically adjusting the target wavelength of tunable metamaterial detector 10. Tuning methods include, but are not limited to, electrical tuning, thermal tuning, mechanical tuning, optical tuning, and chemical tuning. In embodiments of the present invention, a combination of electrical and mechanical tuning is preferred.

[0114] It should be noted that, depending on different tuning methods, the position of the tuning component 102 relative to the detection component 103 is not fixed, and may be above or below the detection component 103 .

[0115] Detector 103 is used to convert the target light signal into a corresponding detection light intensity. Since the target light used for gas concentration detection is infrared light, detector 103 is an infrared detector. The detection light intensity obtained by detector 103 is an electrical signal. Infrared detection includes, but is not limited to, photoelectric detection and pyroelectric detection. In this embodiment of the present invention, pyroelectric detection is preferred.

[0116] Further, refer to Figure 4 、 Figure 5 and Figure 6As shown, in the gas detection device of the present invention, in some embodiments, the tunable metamaterial detector 10 further includes a first substrate 111, a second substrate 112, and a third substrate 113. Preferably, the three substrates are all silicon substrates.

[0117] The first substrate 111 is penetrated along the first direction D1, and a first metal layer 12 is provided in the first substrate 111. According to different actual needs, those skilled in the art can set the first metal layer 12 in different shapes. For example, the first metal layer 12 is set to a cross, a circle, or a square. The absorption peak bandwidth, polarization sensitivity, and angle sensitivity of first metal layers 12 of different shapes are different. By changing the size of the first metal layer 12, such as the length, the absorption peak of the metamaterial can be changed. For example, if polarization insensitivity and angle insensitivity are to be achieved, a first metal layer 12 with a cross structure is used. Preferably, the material of the first metal layer 12 is set to gold, and the thickness of the first metal layer 12 is set to 30 to 200 nanometers.

[0118] The first metal layer 12 has a microstructure, which is the key to achieving resonance enhancement. The microstructure can be set to a periodic U-shaped or tree-branched array. Through the microstructure, the free electrons on the surface of the first metal layer 12 are coupled with the electromagnetic field to stimulate localized surface plasmon resonance, thereby improving the light absorption efficiency in a specific band.

[0119] The second substrate 112 is arranged on one side of the first substrate 111 along the first direction D1 and is connected to the first substrate 111. Preferably, the two substrates are connected by silicon-silicon bonding or adhesive bonding. The second substrate 112 is hollow along the first direction D1, and an elastic beam 1122 is provided in the second substrate 112. The elastic beam 1122 is a key structure for achieving tuning. When subjected to the force of the tuning element 102, it can drive the corresponding components to move, thereby achieving tuning. It should be noted that in some other embodiments, for example, when tuning is achieved by changing the dielectric constant, effective refractive index, conductivity, etc. of the medium, the elastic beam 1122 is not required.

[0120] A pyroelectric detection component 13 is provided on one side of the elastic beam 1122 close to the first metal layer 12 , and a second metal layer 14 is provided on one side of the pyroelectric detection component 13 close to the first metal layer 12 .

[0121] The pyroelectric detection component 13 is used to convert the temperature difference between the hot end and the cold end into a voltage output to obtain the corresponding detection light intensity. Preferably, the pyroelectric detection component 13 includes a first thermoelectric layer 131, a thermocouple layer 132, and a second thermoelectric layer 133 stacked in sequence on the elastic beam 1122. It can be understood that the second metal layer 14, the second thermoelectric layer 133, the thermocouple layer 132, the first thermoelectric layer 131, and the elastic beam 1122 are stacked in sequence.

[0122] The first thermodielectric layer 131 is used to isolate the elastic beam 1122 from the thermocouple layer 132. Those skilled in the art can adjust the material of the first thermodielectric layer 131 according to actual needs. For example, the material of the first thermodielectric layer 131 is silicon oxide or silicon nitride. The thickness of the first thermodielectric layer 131 is set to 30 to 1000 nanometers.

[0123] Thermocouple layer 132 converts the temperature difference between the hot and cold ends of the thermocouple into a voltage output based on the Seebeck effect, generating the corresponding detected light intensity. The Seebeck effect, also known as the primary thermoelectric effect, refers to the thermoelectric phenomenon in which a voltage difference between two different conductors or semiconductors is caused by a temperature difference between the two materials.

[0124] The second thermodielectric layer 133 is used to isolate the second metal layer 14 from the thermocouple layer 132. Those skilled in the art will be able to select the material of the second thermodielectric layer 133 based on actual needs. Exemplarily, the material of the second thermodielectric layer 133 is silicon oxide or silicon nitride. The thickness of the second thermodielectric layer 133 is set to 30 to 1000 nanometers. Preferably, a titanium layer approximately 50 nm thick is provided between the second thermodielectric layer 133 and the second metal layer 14 as an adhesion layer to enhance the adhesion of the second metal layer 14. The titanium layer is not shown in the figure.

[0125] It should be noted that most photodetectors are refrigerated, requiring large cooling equipment. This results in high power consumption, bulk, high cost, and slow startup. Furthermore, the operating frequency of most uncooled MEMS photodetectors falls outside the mid-infrared band, making them unsuitable for gas detection. While some refrigerated MEMS photodetectors have been developed to cover the mid-infrared band, these are still in the laboratory research stage. Therefore, pyroelectric detection is preferred in the embodiments of the present invention.

[0126] A first medium 15 is provided between the elastic beam 1122 and the first substrate 111. The first medium 15 is used to constrain the electromagnetic field to form standing waves within the first medium 15, thereby enhancing the local field strength and improving the light-matter interaction efficiency. Preferably, the first medium 15 is air.

[0127] The third substrate 113 is disposed along the first direction D1 on a side of the second substrate 112 facing away from the first substrate 111 and is connected to the second substrate 112. Preferably, the two substrates are connected via silicon-silicon bonding or adhesive bonding. A third metal layer 16 is disposed on the side of the third substrate 113 proximal to the elastic beam 1122, and a second dielectric 17 is disposed between the third substrate 113 and the elastic beam 1122. Preferably, the second dielectric 17 is air.

[0128] In this embodiment, metamaterial element 101 includes a first metal layer 12, a first dielectric 15, and a second metal layer 14. Tuning element 102 includes second metal layer 14, elastic beam 1122, second dielectric 17, and third metal layer 16. Detection element 103 includes second metal layer 14 and pyroelectric detection component 13. In other words, second metal layer 14 is a common functional layer in tunable metamaterial detector 10.

[0129] When the second metal layer 14 is combined with the first metal layer 12 and the first dielectric 15, the second metal layer 14 prevents electromagnetic waves from transmitting through its high conductivity, forming a closed electromagnetic field environment. Simultaneously, the second metal layer 14 and the first dielectric 15 form impedance matching, reducing reflection losses. Furthermore, the second metal layer 14 transfers the heat energy converted from light energy to the thermoelectric detection component 13. Compared to low-dimensional metamaterials and all-dielectric metamaterials, this metallic metamaterial has a strong electric field enhancement effect, high process maturity, environmental stability, and integration, as well as low production cost and extremely high sensitivity. Preferably, the material of the second metal layer 14 is gold, and the thickness of the second metal layer 14 is set to 100 to 300 nanometers.

[0130] When second metal layer 14, third metal layer 16, and second dielectric 17 work together, they form capacitor plates. Applying voltage to the second and third metal layers 14, 16, respectively, electrostatic forces drive the displacement of elastic beam 1122, changing the gap size between second dielectric 17 and first dielectric 15, thereby achieving tuning. Compared to other tuning methods, this combined electrical and mechanical tuning approach has a response time of microseconds to milliseconds, making it capable of handling rapidly changing gas conditions.

[0131] Compared with the method of changing the size of the first metal layer 12 , this method of changing the dielectric layer parameters will not cause the absorption peak bandwidth, polarization sensitivity, and angle sensitivity to deviate from the optimal solution.

[0132] During operation, the second metal layer 14 cooperates with the first metal layer 12 and the first dielectric 15 to absorb the vast majority of the target light rather than being wasted by reflection or transmission. Through Joule heating and dielectric loss mechanisms, light energy is rapidly converted into lattice vibrations, significantly increasing the rate of heat generation. The second metal layer 14 localizes thermal energy at the hot end of the thermoelectric detection component 13. This heat localization effect significantly increases the temperature difference between the hot and cold ends, thereby generating a stronger voltage signal through the Seebeck effect.

[0133] By sharing the second metal layer 14, the air inside the tunable metamaterial detector 10 is separated, forming the first dielectric 15 and the second dielectric 17, effectively preventing coupling between the metamaterial and the electromagnetic field. Compared to other tuning methods, designers do not need to study the material properties of the tuning element 102, resulting in less effort and a simpler process. Furthermore, the shared second metal layer 14 structure reduces the overall size of the tunable metamaterial detector 10, facilitating integration.

[0134] Preferably, a first etching cavity 1111 is provided on the first substrate 111 , and the first etching cavity 1111 is used to accommodate the first metal layer 12 , the first medium 15 , the second metal layer 14 and the pyroelectric detection component 13 , and facilitates the displacement of the elastic beam 1122 to achieve tuning.

[0135] During production, etching can be performed on one side of the first substrate 111 along the first direction D1 to form a first etched cavity 1111. A first metal layer 12 is then formed in the first etched cavity 1111. Preferably, a titanium layer is first disposed at the bottom of the first etched cavity 1111. The titanium layer is approximately 50 nm thick and serves as an adhesion layer to enhance the adhesion of the first metal layer 12.

[0136] Then, etching is performed on the other side of the first substrate 111 along the first direction D1 to expose the first metal layer 12 and form a second etched cavity 1112 to allow the target light to pass through. It will be understood that the first etched cavity 1111 and the second etched cavity 1112 are connected. During subsequent bonding, the second substrate 112 is disposed on the side of the first substrate 111 where the first etched cavity 1111 is disposed.

[0137] Those skilled in the art can set the depth of the first etching cavity 1111 according to actual needs, and reserve a margin for the elastic beam 1122 to prevent the first metal layer 12 and the second metal layer 14 from contacting each other during the tuning process.

[0138] Reference Figure 7 As shown, in other embodiments, the second substrate 112 and the third substrate 113 are still configured as silicon substrates, and the corresponding structures are not further described. The difference is that the first substrate 111 is configured as a chalcogenide glass substrate 1110, and the chalcogenide glass substrate 1110, the second substrate 112, and the third substrate 113 are vacuum bonded. Along the first direction D1, the first metal layer 12 is disposed on the side of the chalcogenide glass substrate 1110 that is closest to the second substrate 112. An annular transition layer 1124 is disposed between the chalcogenide glass substrate 1110 and the second substrate 112, respectively connecting the chalcogenide glass substrate 1110 and the second substrate 112.

[0139] In the embodiment where the first substrate 111 is a silicon substrate, the silicon substrate is not light-transmissive. To allow the target light to be absorbed and detected, a second etched cavity 1112 is etched to expose the first metal layer 12, allowing the target light to pass through. In this case, air is typically used as the first medium 15 and the second medium 17. Although this structure makes the tunable metamaterial detector 10 relatively simple to manufacture and can meet most detection requirements, it still has some shortcomings in some special detection scenarios.

[0140] To further enhance the performance of the tunable metamaterial detector 10, this embodiment utilizes vacuum bonding of the three substrates to enable the pyroelectric detection component 13 to operate in a vacuum environment. This eliminates heat loss from gas conduction and convection, reduces thermal noise, and improves response speed and sensitivity. In this manner, key performance characteristics of the tunable metamaterial detector 10, such as detectivity, can be improved by at least an order of magnitude compared to detectors using air as the medium.

[0141] In the case of vacuum bonding, air is no longer used as a medium, and both the first medium 15 and the second medium 17 are vacuum media. It can be understood that light, as an electromagnetic wave, can propagate in a vacuum.

[0142] Due to vacuum bonding, light cannot pass through the second etch cavity 1112. To allow low-loss transmission of target light in the mid-infrared range, the first substrate 111 can be configured as a mid-infrared-transmissive substrate. The mid-infrared range is where most gases experience their strongest and most characteristic infrared absorption, allowing the target light to pass through. Those skilled in the art can configure the first substrate 111 based on actual needs, such as chalcogenide glass, germanium, or the like.

[0143] In this embodiment, the first substrate 111 is a chalcogenide glass substrate 1110. Chalcogenide glass is a non-oxide glass material primarily composed of chalcogen elements, combined with germanium, arsenic, antimony, and other elements. Chalcogenide glass has excellent transmittance for mid-infrared light, achieving a transmittance exceeding 95% after coating. The wavelength range extends up to 20 μm, and the cost is low, costing one-third to one-fifth the price of germanium wafers with high transmittance in the mid-infrared range.

[0144] By using only the first substrate 111 as a chalcogenide glass substrate 1110, while the second and third substrates 112 and 113 remain silicon substrates, costs can be effectively reduced. While chalcogenide glass is inexpensive, it is still more expensive than silicon wafers. This also ensures high overall production quality and high production efficiency. When using a silicon wafer as a substrate, the elastic beams 1122 can be directly etched onto it, achieving a high etching rate and compatibility with most MEMS processes.

[0145] It should be noted that due to the inconsistency in thermal expansion coefficients between chalcogenide glass and silicon, an annular transition layer 1124 is required during bonding, through which the chalcogenide glass substrate 1110 and the second substrate 112 are connected, thereby avoiding deformation and cracking during high-temperature bonding due to the inconsistency in thermal expansion coefficients.

[0146] Those skilled in the art will be able to select the material of transition layer 1124 based on actual needs. For example, transition layer 1124 includes a silicon nitride layer, a titanium layer, and a gold layer stacked sequentially from second substrate 112 toward chalcogenide glass substrate 1110. For reference, the corresponding thermal expansion coefficients are: 2.6 ppm / K for silicon, 3.5 ppm / K for silicon nitride, 8.6 ppm / K for titanium, 14.2 ppm / K for gold, and 10-20 ppm / K for chalcogenide glass. "ppm" represents parts per million, and "K" represents Kelvin.

[0147] Preferably, a fourth etched cavity 1123 is provided on the second substrate 112. The fourth etched cavity 1123 is used to accommodate the first metal layer 12, the second metal layer 14, and the pyroelectric detection component 13, and facilitates the displacement and tuning of the elastic beam 1122. Due to vacuum bonding, after packaging is completed, the interior of the fourth etched cavity 1123 is vacuum, that is, the first medium 15 is a vacuum medium.

[0148] During production, etching can be performed on one side of the second substrate 112 along the first direction D1 to obtain a fourth etching cavity 1123. Then, the pyroelectric detection component 13 is formed in the fourth etching cavity 1123. Next, the second metal layer 14 is formed on the pyroelectric detection component 13.

[0149] Simultaneously, the transition layer 1124 can be formed during the formation of the pyroelectric detection component 13 and the second metal layer 14. For example, while forming the first thermoelectric dielectric layer 131 or the second thermoelectric dielectric layer 133 of the pyroelectric detection component 13, the silicon nitride layer in the transition layer 1124 can be formed at the cavity opening of the fourth etching cavity 1123, that is, at the bonding region between the second substrate 112 and the chalcogenide glass substrate 1110.

[0150] Simultaneously with the formation of the second metal layer 14, the titanium and gold layers of transition layer 1124 can be formed on the silicon nitride layer. Layers made of the same material can have consistent thicknesses, eliminating the need for additional steps and costs. The processing of other components, such as the elastic beam 1122, is similar to that described above and will not be further elaborated.

[0151] Preferably, on this basis, the chalcogenide glass substrate 1110 and the second substrate 112 are metal hot-pressed or adhesively bonded through the transition layer 1124. Since both metal hot-pressing bonding and adhesive bonding are low-temperature bonding processes, they are very friendly to materials with large differences in thermal expansion coefficients such as silicon and chalcogenide glass, which is conducive to ensuring the high product quality of the detector.

[0152] It should be noted that conventional detectors are limited by the additional process required for vacuum bonding, and in order to facilitate the transmission of infrared light, or when integrated into gas sensors, they are limited by the gas sensor's breathability requirements, making vacuum packaging often difficult to achieve.

[0153] In the embodiment of the present invention, this vacuum bonding method effectively improves the detection rate of the tunable metamaterial detector 10 without the need for additional processes. For the tuning component 102, vacuum is used as the medium, eliminating leakage and loss issues, air damping, and increasing the response speed. For the metamaterial component 101, vacuum provides the lowest possible loss, thereby achieving the theoretically narrowest resonance linewidth and the highest spectral resolution and sensitivity. Vacuum does not involve the dispersion effects of materials (such as infrared absorption peaks, ultraviolet transitions, etc.), and its electromagnetic properties remain constant across the entire frequency band. This means that the resonant wavelength of the MIM (Metal-Insulator-Metal) structure is determined only by geometric parameters such as the thickness, period, and spacing of the vacuum layer. In other words, the method of tuning by changing the thickness of the vacuum medium in the metamaterial is still feasible, and theoretically, a more stable spectral response can be achieved.

[0154] Reference Figure 8 As shown, in some embodiments of the gas detection device according to the present invention, the elastic beam 1122 includes a beam arm portion 11221, a bearing portion 11222, and a hollow portion 11223. Multiple beam arms 11221 are provided, spaced apart along the circumference of the second substrate 112. Each beam arm 11221 includes a first arm 11221a and a second arm 11221b. One end of the first arm 11221a is connected to the inner wall of the second substrate 112, and the other end is connected to the second arm 11221b at an angle. The bearing portion 11222 is provided between the multiple beam arms 11221, and the end of the second arm 11221b facing away from the first arm 11221a is connected to the bearing portion 11222. A pyroelectric detection component 13 is provided on the bearing portion 11222, and a second metal layer 14 is provided on the side of the pyroelectric detection component 13 facing away from the bearing portion 11222.

[0155] In this embodiment of the present invention, the hollow cross-section of the second substrate 112 and the shape of the supporting portion 11222 are configured as squares, and the two are concentrically arranged. Four beam arms 11221 are provided, and each beam arm 11221 has a first arm 11221a connected to one of the inner walls of the second substrate 112, and a second arm 11221b connected to one of the side walls of the supporting portion 11222. This allows for stable and reliable tuning, and in conjunction with the second metal layer 14 and the third metal layer 16, achieves rapid response and improves detection efficiency. Furthermore, this facilitates production and processing.

[0156] The hollow portion 11223 is provided on the bearing portion 11222 and is provided corresponding to the thermoelectric detection component 13. During operation, the hollow portion 11223 is used to maintain the hot end temperature of the upper thermocouple layer 132.

[0157] Reference Figure 9 As shown, the gas detection device described in the present invention, in some embodiments, further includes a metamaterial narrowband light source 30. The metamaterial narrowband light source 30 is configured to emit target light. The wavelength of the target light matches the target wavelength. The narrowband in the light source is usually described by the full width at half maximum of the spectrum. When the full width at half maximum of the spectrum is small, such as a few nanometers or even sub-nanometer level, it can be called a narrowband light source. By providing a metamaterial narrowband light source 30 that can emit target light with a wavelength matching the target wavelength, energy can be prevented from being dispersed, which is beneficial to improving sensitivity, and the absorption coefficients in the calculation formula are also more stable.

[0158] Further, refer to Figure 10 As shown, in some embodiments of the gas detection device of the present invention, the metamaterial narrowband light source 30 includes a first nanoantenna 31 and a second nanoantenna 32. The first nanoantenna 31 is arranged in a cross shape, and the second nanoantenna 32 is arranged in an X shape. Multiple first nanoantennas 31 and second nanoantennas 32 are provided, and the multiple first nanoantennas 31 and the multiple second nanoantennas 32 are staggered to prevent electromagnetic coupling between the two due to their proximity.

[0159] Exemplarily, the first nanoantennas 31 are arranged in multiple rows, with multiple first nanoantennas 31 arranged in each row. The second nanoantennas 32 are also arranged in multiple rows, with multiple first nanoantennas 32 arranged in each row. The second nanoantennas 32 are arranged in the gaps between the first nanoantennas 31.

[0160] By providing this metamaterial narrowband light source 30, the unique, shape-dependent electromagnetic resonance characteristics of the two nanoantennas can be exploited to generate two independent narrowband emission wavelengths. This creates a very compact structure and facilitates the simplification of the multi-gas detection process. In this embodiment of the present invention, the two nanoantennas are designed to emit at wavelengths of 4.2 microns and 15 microns, respectively, enabling the use of the tunable metamaterial detector 10 to detect the concentrations of carbon monoxide and carbon dioxide.

[0161] The metamaterial narrowband light source 30 also includes a coil. During operation, the coil generates heat when energized. This heat is transferred to the two nanoantennas, exciting free carriers within them. These excited carriers release energy as light of a specific wavelength through radiative relaxation (i.e., electromagnetic resonance). This energy, in conjunction with the tunable metamaterial detector 10, enables concentration detection of mixed gases.

[0162] On the other hand, refer to Figure 11 As shown, an embodiment of the present invention further provides a gas detection method, which is applied to the gas detection device as described in any of the above embodiments. The gas detection method includes the following steps:

[0163] The target band of the tunable metamaterial detector 10 is switched.

[0164] The tunable metamaterial detector 10 can switch between multiple target bands. It is understood that the target band needs to be switched at least once during the gas detection process. It is also understood that switching the target band is not required before each detection. For example, when detecting a mixture of two gas components, if the current band of the tunable metamaterial detector 10 happens to be the desired target band during the first measurement, detection can be performed directly, thus requiring only one switch after the first measurement is completed.

[0165] The target light in the target wavelength band is detected by the tunable metamaterial detector 10 to obtain the corresponding detection light intensity.

[0166] The target light is absorbed by a mixed gas containing multiple gas components. The detection light intensity includes a first type of light intensity after being absorbed by multiple gas components, and a second type of light intensity after being absorbed by a single gas component.

[0167] The concentrations of various gas components are obtained by performing dual-wavelength difference calculation based on the first-class light intensity and the second-class light intensity.

[0168] Preferably, dual-wavelength differential calculation is implemented by the differentiator 20 .

[0169] The gas detection method described in the present invention overcomes the limitations of traditional fixed-wavelength detection devices by using a tunable metamaterial detector 10 that can switch between multiple target bands, enabling detection of both Class I and Class II light intensities. The method then performs dual-wavelength differential calculations on the Class I and Class II light intensities to obtain the concentrations of the corresponding gas components. The entire device is highly versatile, compact, and low-cost, and possesses strong anti-interference and rapid response capabilities. It effectively addresses the prior art issue of interference between gases with similar absorption peaks during non-dispersive infrared gas detection. It eliminates the reliance of existing devices on specific gas instances and enables accurate detection of the concentrations of each gas component in a mixed gas.

[0170] In some embodiments, the gas detection method of the present invention performs dual-wavelength differential calculation on the first type of light intensity and the second type of light intensity using a differentiator 20 to obtain the concentrations of multiple gas components, including the following steps:

[0171] First, calculate based on the second type of light intensity to obtain the second type of concentration.

[0172] Among them, the second type of concentration is the concentration of the gas component corresponding to the second type of light intensity.

[0173] Then, the first-class concentration is obtained by normalizing the first-class light intensity and the second-class concentration.

[0174] Among them, one type of concentration is the concentration corresponding to the remaining gas components in the mixed gas.

[0175] The following uses a mixture of carbon monoxide and carbon dioxide as an example. The strong absorption peak wavelength of carbon dioxide is 4.25 microns and the weak absorption peak wavelength is 15 microns, while the strong absorption peak wavelength of carbon monoxide is 4.67 microns and there is no weak absorption peak.

[0176] When detecting through the tunable metamaterial detector 10, the target wavelength is first set to 4.25 microns. The wavelength error of the conventional non-high-Q tunable metamaterial detector 10 is about 10%, that is, the target band corresponds to 3.825 microns to 4.675 microns. At this time, a type of light intensity after absorption by carbon monoxide and carbon dioxide can be obtained.

[0177] Then, the target wavelength is set to 15 microns, which enables measurement of the target band from 13.5 microns to 16.5 microns, and obtains the second-class light intensity after only carbon dioxide absorption.

[0178] On this basis, the concentration of carbon dioxide is calculated based on the second-class light intensity. The concentration of carbon dioxide and the first-class light intensity are then normalized to obtain the concentration of carbon monoxide.

[0179] It should be noted that those skilled in the art can flexibly adjust the detection and calculation order during actual detection. For example, the intensity of the second type of light after only carbon dioxide absorption can be measured first, and the concentration of carbon dioxide can be calculated. Then, the intensity of the first type of light after carbon monoxide and carbon dioxide absorption can be measured, and the concentration of carbon monoxide can be calculated.

[0180] In some embodiments, the gas detection method of the present invention further includes the following steps before detecting target light in a target wavelength band using the tunable metamaterial detector 10 to obtain the corresponding detection light intensity:

[0181] First, a first metal layer 12 is provided in the first substrate 111 .

[0182] Next, the pyroelectric detection element 13 is provided on the second substrate 112 .

[0183] Next, a second metal layer 14 is provided on the side of the pyroelectric detection component 13 facing away from the second substrate 112 .

[0184] Subsequently, the side of the second substrate 112 facing away from the pyroelectric detection component 13 is processed to obtain the elastic beam 1122 .

[0185] Then, a third metal layer 16 is provided on the third substrate 113 .

[0186] Finally, the first substrate 111 , the second substrate 112 and the third substrate 113 are bonded together to obtain the tunable metamaterial detector 10 .

[0187] Furthermore, in some embodiments of the gas detection method of the present invention, a first metal layer 12 is provided in the first substrate 111, comprising the steps of:

[0188] First, etching is performed on one side of the first substrate 111 along the first direction D1 to obtain a first etching cavity 1111 .

[0189] Preferably, dry or wet etching can be used to obtain the first etching cavity 1111. Exemplarily, the etching depth is 4 to 10 microns.

[0190] Next, a first metal layer 12 is formed in the first etching cavity 1111 .

[0191] Preferably, the first metal layer 12 can be formed by evaporation or sputtering, or by lift-off or etching. Preferably, the material of the first metal layer 12 is set to gold, and the thickness of the first metal layer 12 is set to 30 to 200 nanometers. Preferably, a titanium layer is first provided in the first etching cavity 1111 as an adhesion layer to improve the adhesion of the first metal layer 12.

[0192] Finally, etching is performed on the other side of the first substrate 111 along the first direction D1 to expose the first metal layer 12 and obtain a second etching cavity 1112 .

[0193] Preferably, dry or wet etching can be used until the first metal layer 12 is exposed.

[0194] Furthermore, in some embodiments of the gas detection method of the present invention, a pyroelectric detection component 13 is provided on the second substrate 112, comprising the steps of:

[0195] First, a first thermoelectric layer 131 is formed on one side of the second substrate 112 along the first direction D1.

[0196] Preferably, a prestressed first thermodielectric layer 131 can be formed on the second substrate 112 by plasma-enhanced vapor deposition or low-pressure chemical vapor deposition. Those skilled in the art can determine the material of the first thermodielectric layer 131 based on actual needs. Exemplarily, the material of the first thermodielectric layer 131 is silicon oxide or silicon nitride. The thickness of the first thermodielectric layer 131 is set to 30 to 1000 nanometers.

[0197] Next, a thermocouple layer 132 is formed on the side of the first thermoelectric dielectric layer 131 facing away from the second substrate 112 .

[0198] Finally, a second thermoelectric layer 133 is formed on the side of the thermocouple layer 132 facing away from the first thermoelectric layer 131 to obtain the thermoelectric detection component 13.

[0199] Preferably, a prestressed second thermoelectric layer 133 can be formed on the thermocouple layer 132 by plasma enhanced vapor deposition or low pressure chemical vapor deposition. Those skilled in the art can set the material of the second thermoelectric layer 133 according to actual needs. Exemplarily, the material of the second thermoelectric layer 133 is silicon oxide or silicon nitride. The thickness of the second thermoelectric layer 133 is set to 30 to 1000 nanometers.

[0200] The step of forming a thermocouple layer 132 on a side of the first thermoelectric dielectric layer 131 facing away from the second substrate 112 includes the following steps:

[0201] First, undoped polysilicon is formed on the side of the first thermoelectric dielectric layer 131 facing away from the second substrate 112 .

[0202] Preferably, undoped polysilicon is formed on the first thermoelectric dielectric layer 131 by low pressure chemical vapor deposition.

[0203] Then, the undoped polysilicon is doped to form patterned p-type polysilicon and n-type polysilicon to obtain the thermocouple layer 132 .

[0204] Preferably, the undoped polysilicon is doped by ion implantation or diffusion process.

[0205] Furthermore, in some embodiments of the gas detection method of the present invention, the second metal layer 14 can be formed by evaporation or sputtering, as well as by stripping or etching. Evaporation or sputtering is used to grow metal, while stripping or etching is used to pattern metal. Preferably, the material of the second metal layer 14 is set to gold, and the thickness of the second metal layer 14 is set to 100 to 300 nanometers. Preferably, a titanium layer is provided between the second metal layer 14 and the second thermoelectric dielectric layer 133 to increase adhesion.

[0206] Furthermore, in some embodiments of the gas detection method of the present invention, processing is performed on a side of the second substrate 112 facing away from the pyroelectric detection component 13 to obtain the elastic beam 1122, including the following steps:

[0207] First, etching is performed on the side of the second substrate 112 facing away from the pyroelectric detection component 13 to obtain a third etching cavity 1121 .

[0208] Preferably, the third etching cavity 1121 can be obtained by etching in a dry or wet manner. The thickness of the elastic beam 1122 is equal to the thickness of the second substrate 112 minus the depth of the third etching cavity 1121 .

[0209] Then, etching is performed on the bottom of the third etching cavity 1121 to obtain the elastic beam 1122 .

[0210] Preferably, the beam arm portion 11221 , the bearing portion 11222 and the hollow portion 11223 can be obtained by etching in a dry or wet manner, so that the temperature of the hot end of the upper thermocouple layer 132 can be maintained through the hollow portion 11223 .

[0211] Furthermore, in some embodiments of the gas detection method of the present invention, the third metal layer 16 is formed on the third substrate 113 by evaporation or sputtering, and by stripping or etching.

[0212] Furthermore, in some embodiments of the gas detection method of the present invention, the first substrate 111 , the second substrate 112 , and the third substrate 113 are integrated by silicon-silicon bonding or adhesive bonding to obtain a tunable metamaterial detector 10 .

[0213] In other embodiments, the gas detection method of the present invention further includes the following steps before detecting target light in a target wavelength band using the tunable metamaterial detector 10 to obtain the corresponding detection light intensity:

[0214] A first metal layer 12 is provided on a chalcogenide glass substrate 1110 .

[0215] Preferably, the first metal layer 12 can be formed by evaporation or sputtering, or by stripping or etching. Preferably, the material of the first metal layer 12 is set to gold, and the thickness of the first metal layer 12 is set to 30 to 200 nanometers.

[0216] The pyroelectric detection component 13, the second metal layer 14 and the annular transition layer 1124 are arranged on the second substrate 112. The second metal layer 14 is arranged on the side of the pyroelectric detection component 13 facing away from the second substrate 112.

[0217] The side of the second substrate 112 facing away from the pyroelectric detection component 13 is processed to obtain the elastic beam 1122 .

[0218] A third metal layer 16 is provided on the third substrate 113 .

[0219] The chalcogenide glass substrate 1110 , the second substrate 112 and the third substrate 113 are vacuum bonded to obtain a tunable metamaterial detector 10 .

[0220] The second substrate 112 is provided with a pyroelectric detection component 13, a second metal layer 14 and an annular transition layer 1124, including the following steps:

[0221] First, etching is performed on one side of the second substrate 112 along the first direction D1 to obtain a fourth etching cavity 1123. Preferably, the fourth etching cavity 1123 can be obtained by etching in a dry or wet manner.

[0222] Next, a pyroelectric detection component 13 is formed at the bottom of the fourth etching cavity 1123 .

[0223] The formation of the pyroelectric detection component 13 is similar to that of other embodiments and will not be further described. It should be noted that, while forming the first thermoelectric dielectric layer 131 or the second thermoelectric dielectric layer 133 of the pyroelectric detection component 13, a silicon nitride layer can be formed at the cavity opening of the fourth etching cavity 1123. The silicon nitride layer serves as part of the transition layer 1124, thereby enabling good bonding between the second substrate 112 and the chalcogenide glass substrate 1110.

[0224] Finally, a second metal layer 14 is formed on the side of the pyroelectric detection component 13 facing away from the second substrate 112. It should be noted that, while forming the second metal layer 14, a titanium layer and a gold layer can be formed on the silicon nitride layer at the cavity opening of the fourth etching cavity 1123 to serve as a transition layer 1124.

[0225] The present invention further provides a non-transitory machine-readable medium storing a computer program, wherein the computer program, when executed by a processor of a computer, is used to cause the computer to execute the gas detection method described in any one of the above embodiments.

[0226] The present invention further provides a computer program product, comprising a computer program, wherein when the computer program is executed by a processor of a computer, the computer is configured to cause the computer to execute the gas detection method described in any one of the above embodiments.

[0227] The present invention also provides an electronic device comprising at least one processor and a memory communicatively coupled to the at least one processor. The memory stores a computer program executable by the at least one processor, wherein the computer program, when executed by the at least one processor, causes the electronic device to perform the gas detection method described in any one of the above embodiments.

[0228] Reference Figure 12 As shown, a block diagram of an electronic device that can be used as a server or client of an embodiment of the present invention will now be described, which is an example of a hardware device that can be applied to various aspects of the present invention. The electronic device is intended to represent various forms of digital electronic computer devices, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processing, cellular phones, smart phones, wearable devices, and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely examples and are not intended to limit the implementation of the present invention described and / or required herein.

[0229] Reference Figure 12 As shown, the electronic device includes a computing unit 401, which can perform various appropriate actions and processes according to a computer program stored in a read-only memory (ROM) 402 or a computer program loaded from a storage unit 408 into a random access memory (RAM) 403. Various programs and data required for the operation of the electronic device can also be stored in the RAM 403. The computing unit 401, ROM 402, and RAM 403 are connected to each other via a bus 404. An input / output (I / O) interface 405 is also connected to the bus 404.

[0230] Multiple components in the electronic device are connected to the I / O interface 405, including an input unit 406, an output unit 407, a storage unit 408, and a communication unit 409. The input unit 406 can be any type of device capable of inputting information into the electronic device. The input unit 406 can receive input digital or character information and generate key signal inputs related to user settings and / or function control of the electronic device. The output unit 407 can be any type of device capable of presenting information and can include, but is not limited to, a display, a speaker, a video / audio output terminal, a vibrator, and / or a printer. The storage unit 408 can include, but is not limited to, a magnetic disk and an optical disk. The communication unit 409 allows the electronic device to exchange information / data with other devices via a computer network such as the Internet and / or various telecommunication networks and can include, but is not limited to, a modem, a network card, an infrared communication device, and / or a wireless communication transceiver, such as a Bluetooth device, a WiFi device, a WiMax device, a cellular communication device, and / or the like.

[0231] Computing unit 401 can be any general-purpose and / or specialized processing component with processing and computing capabilities. Some examples of computing unit 401 include, but are not limited to, a CPU, a graphics processing unit (GPU), various specialized artificial intelligence (AI) computing units, various computing units that run machine learning model algorithms, a digital signal processor (DSP), and any suitable processor, controller, microcontroller, etc. Computing unit 401 performs the various methods and processes described above. For example, in some embodiments, method embodiments of the present invention may be implemented as a computer program tangibly embodied in a machine-readable medium, such as storage unit 408. In some embodiments, part or all of the computer program may be loaded and / or installed onto the electronic device via ROM 402 and / or communication unit 409. In some embodiments, computing unit 401 may be configured to perform the above-described methods by any other suitable means (e.g., via firmware).

[0232] The computer programs for implementing the methods of the embodiments of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor or controller of a general-purpose computer, a special-purpose computer, or other programmable data processing device, so that when the computer programs are executed by the processor or controller, the functions / operations specified in the flowcharts and / or block diagrams are implemented. The computer programs may be executed entirely on the machine, partially on the machine, as a stand-alone software package, partially on the machine and partially on a remote machine, or entirely on a remote machine or server.

[0233] In the context of embodiments of the present invention, a machine-readable medium may be a tangible medium that may contain or store a program for use by or in conjunction with an instruction execution system, apparatus, or device. A machine-readable medium may be a machine-readable signal medium or a machine-readable storage medium. A machine-readable signal medium may include, but is not limited to, an electronic, magnetic, optical, electromagnetic, or infrared system, apparatus, or device, or any suitable combination of the foregoing. More specific examples of machine-readable storage media may include an electrical connection based on one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), optical fibers, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.

[0234] It should be noted that the term "including" and its variations used in the embodiments of the present invention are open inclusions, that is, "including but not limited to". The term "based on" means "based at least in part on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one other embodiment"; and the term "some embodiments" means "at least some embodiments". The modifications of "one" and "a plurality of" mentioned in the embodiments of the present invention are illustrative and non-restrictive. Those skilled in the art should understand that unless the context clearly indicates otherwise, they should be understood as "one or more".

[0235] The various steps described in the method implementation schemes provided in the embodiments of the present invention may be performed in different orders and / or in parallel. In addition, the method implementation schemes may include additional steps and / or omit the steps shown. The scope of protection of the present invention is not limited in this respect.

[0236] The term "embodiment" in this specification refers to specific features, structures, or characteristics described in conjunction with the embodiment that can be included in at least one embodiment of the present invention. The appearance of this phrase in various places in the specification does not necessarily mean the same embodiment, nor does it mean that it is mutually exclusive with other embodiments and is independent or optional. The various embodiments in this specification are described in a related manner, and the same or similar parts between the various embodiments are referenced to each other. In particular, for the embodiments of the device, equipment, and system, since they are basically similar to the method embodiments, the description is relatively simple, and the relevant parts are referred to the partial description of the method embodiment.

[0237] The above-described embodiments merely illustrate several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of protection. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A gas detection device, characterized in that: include: A tunable metamaterial detector is configured to switch between multiple target bands and detect target light in the target bands to obtain corresponding detection light intensities; wherein the target light is absorbed by a mixed gas, the mixed gas including multiple gas components; the detection light intensities include a first type of light intensity after absorption by multiple gas components and a second type of light intensity after absorption by a single gas component; as well as, The differentiator is configured to perform dual-wavelength difference calculation on the first type of light intensity and the second type of light intensity to obtain the concentrations of the plurality of gas components.

2. The gas detection device according to claim 1, characterized in that The differentiator comprises: a first calculation unit configured to calculate according to the two types of light intensities to obtain two types of concentrations; wherein the two types of concentrations are concentrations of the gas components corresponding to the two types of light intensities; and The second calculation unit is configured to perform normalized calculation based on the first type of light intensity and the second type of concentration to obtain a first type of concentration; wherein the first type of concentration is the concentration corresponding to the remaining gas components in the mixed gas.

3. The gas detection device according to claim 1, characterized in that: The tunable metamaterial detector comprises: a metamaterial component, configured to perform narrow-band filtering on the target light in the target wavelength band and enhance absorption efficiency to obtain a corresponding target optical signal; a tuning element, configured to switch the target band of the metamaterial element; and The detection element is used to convert the target light signal to obtain the corresponding detection light intensity.

4. The gas detection device according to claim 3, characterized in that: The tunable metamaterial detector further comprises: A first substrate is provided with a first metal layer, wherein the first metal layer has a microstructure for resonance enhancement; a second substrate disposed on one side of the first substrate along a first direction and connected to the first substrate; the second substrate is hollow along the first direction, an elastic beam is disposed in the second substrate, a pyroelectric detection component is disposed on a side of the elastic beam close to the first metal layer, and a second metal layer is disposed on a side of the pyroelectric detection component close to the first metal layer; a first dielectric is disposed between the elastic beam and the first substrate; a third substrate, disposed along the first direction on a side of the second substrate facing away from the first substrate and connected to the second substrate; a third metal layer is disposed on a side of the third substrate close to the elastic beam; a second medium is disposed between the third substrate and the elastic beam; The metamaterial component includes the first metal layer, the first medium and the second metal layer; the tuning component includes the second metal layer, the elastic beam, the second medium and the third metal layer; and the detection component includes the second metal layer and the pyroelectric detection component.

5. The gas detection device according to claim 4, characterized in that: The first substrate is set as a chalcogenide glass substrate, and the chalcogenide glass substrate, the second substrate and the third substrate are vacuum bonded; along the first direction, the first metal layer is arranged on one side of the chalcogenide glass substrate; An annular transition layer is provided between the chalcogenide glass substrate and the second substrate, and the transition layer connects the chalcogenide glass substrate and the second substrate respectively.

6. The gas detection device according to claim 4, characterized in that: The elastic beam comprises: A plurality of beam arm portions are provided; the plurality of beam arm portions are sequentially spaced apart along the circumference of the second substrate; each beam arm portion includes a first arm and a second arm, one end of the first arm is connected to the inner wall surface of the second substrate, and the other end is connected to the second arm at an angle; a bearing portion, disposed between the plurality of beam arms and connected to an end of the second arm facing away from the first arm; the pyroelectric detection component is disposed on the bearing portion; and The hollow portion is provided on the bearing portion and corresponds to the pyroelectric detection component.

7. The gas detection device according to claim 1, characterized in that: Also includes: The metamaterial narrowband light source is configured to emit the target light; wherein the wavelength band of the target light matches the target wavelength band.

8. A gas detection method, applied to the gas detection device according to any one of claims 1 to 7, characterized in that: Including steps: Switching a target band of a tunable metamaterial detector; wherein the tunable metamaterial detector can switch between a plurality of target bands; Detecting target light in the target band according to the tunable metamaterial detector to obtain corresponding detection light intensity; wherein the target light is absorbed by a mixed gas, and the mixed gas includes multiple gas components; the detection light intensity includes a first type of light intensity after being absorbed by the multiple gas components, and a second type of light intensity after being absorbed by a single gas component; A dual-wavelength difference calculation is performed based on the first type of light intensity and the second type of light intensity to obtain the concentrations of the plurality of gas components.

9. The gas detection method according to claim 8, characterized in that: Performing dual-wavelength difference calculation based on the first type of light intensity and the second type of light intensity to obtain the concentrations of the plurality of gas components includes the steps of: Calculating according to the two types of light intensities to obtain two types of concentrations; wherein the two types of concentrations are the concentrations of the gas components corresponding to the two types of light intensities; A normalized calculation is performed based on the first-class light intensity and the second-class concentration to obtain the first-class concentration; wherein the first-class concentration is the concentration corresponding to the remaining gas components in the mixed gas.

10. The gas detection method according to claim 8, characterized in that: Before detecting the target light in the target band using the tunable metamaterial detector to obtain the corresponding detection light intensity, the method further includes the following steps: providing a first metal layer in the first substrate; providing a pyroelectric detection component on the second substrate; Disposing a second metal layer on a side of the pyroelectric detection component facing away from the second substrate; Processing the side of the second substrate facing away from the pyroelectric detection component to obtain an elastic beam; providing a third metal layer on the third substrate; Bonding the first substrate, the second substrate, and the third substrate to obtain the tunable metamaterial detector; or, providing a first metal layer on a chalcogenide glass substrate; A pyroelectric detection component, a second metal layer, and an annular transition layer are provided on a second substrate; wherein the second metal layer is provided on a side of the pyroelectric detection component facing away from the second substrate; Processing the side of the second substrate facing away from the pyroelectric detection component to obtain an elastic beam; providing a third metal layer on the third substrate; The chalcogenide glass substrate, the second substrate and the third substrate are vacuum bonded to obtain the tunable metamaterial detector.

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