Light uniformizing device and method

Abstract

The invention provides a dodging device and method which can be applied to the technical field of optical detection and measurement. The dodging device comprises a light source used for generating an illumination light beam used for irradiating a sample; the vibration module is used for controlling the illumination light beam to scan the surface of the sample so as to form uniform light spots on the surface of the sample.

Description

Technical Field

[0001] The present disclosure relates to the technical field of optical detection and measurement, and in particular to a light homogenization device and method. Background Art

[0002] Existing light homogenization devices typically use principles or methods such as beam expansion and collimation, DOE / microlenses, or superlens arrays to adjust the non-uniform light intensity distribution of the illumination light source to a relatively uniform light intensity distribution. However, beam expansion and collimation affect the optical power density of the irradiated sample surface; DOE / microlenses, or superlens arrays are expensive to manufacture, and different component materials have different loss or reflection / transmittances for different wavelengths of light, meaning that the same material can only be used in a single wavelength band.

[0003] Therefore, a light homogenizing device is needed to solve the technical problems of the above-mentioned devices, such as reduced light intensity, high processing precision requirements, high processing costs, and the inability to universally use light homogenizing devices for light sources of different frequencies. Summary of the Invention

[0004] In view of this, the present disclosure provides a light uniforming device, including: a light source for generating an illumination beam, the illumination beam being used to irradiate a sample; and a vibration module for controlling the illumination beam to scan the surface of the sample to form a uniform light spot on the surface of the sample.

[0005] According to an embodiment of the present disclosure, the vibration module is used to drive the light source to vibrate back and forth to control the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample, wherein the vibration direction of the light source is perpendicular to the propagation direction of the illumination light beam.

[0006] According to an embodiment of the present disclosure, there is a first aperture between the light source and the sample, and the first aperture is used to limit the range of the uniform light spot.

[0007] According to an embodiment of the present disclosure, the light homogenizing device also includes a second aperture, which is located between the light source and the sample; the vibration module drives the second aperture to vibrate back and forth to control the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample, wherein the vibration direction of the second aperture is perpendicular to the propagation direction of the illumination light beam.

[0008] According to an embodiment of the present disclosure, the light-transmitting area of ​​the second aperture is in a circular or rectangular shape.

[0009] According to an embodiment of the present disclosure, the illumination light beam is a Gaussian light beam.

[0010] According to an embodiment of the present disclosure, the vibration module drives the sample to vibrate reciprocatingly to control the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample, wherein the vibration direction of the sample is perpendicular to the propagation direction of the illumination light beam.

[0011] According to an embodiment of the present disclosure, there is a third aperture between the light source and the sample, and the third aperture is used to cut off the divergent light of the illumination light beam.

[0012] According to an embodiment of the present disclosure, the light homogenizing device also includes an imaging module, which is used to receive imaging light from the sample and image the sample, wherein the imaging light is reflected light formed by the surface of the sample reflecting the illumination light beam or transmitted light generated by the illumination light beam passing through the sample.

[0013] An embodiment of the present disclosure also provides a light uniforming method, which includes: controlling a light source to generate an illumination beam, the illumination beam being used to illuminate a sample; and controlling the illumination beam to scan the surface of the sample to form a uniform light spot on the surface of the sample.

[0014] According to the embodiments of the present disclosure, the position and / or intensity of the instantaneous light spot formed by the illumination light beam irradiating the surface of the sample changes with the vibration output by the vibration module, and the illumination light beam is scanned back and forth on the surface of the sample, thereby achieving the homogenization of the light intensity distribution of the non-uniform light beam without reducing the intensity of the light beam; in addition, the light homogenization device disclosed in the present disclosure has a simple structure and can achieve light homogenization by relying solely on the vibration drive provided by the vibration device. It does not require precise optical lens processing and is relatively inexpensive. It can also be applied to lighting light sources of various types and frequency ranges and has extremely high versatility. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The above and other objects, features and advantages of the present disclosure will become more apparent through the following description of the embodiments of the present disclosure with reference to the accompanying drawings, in which:

[0016] Figure 1 The following schematically shows a light homogenization device according to an embodiment of the present disclosure;

[0017] Figure 2 A schematic diagram of a light homogenization device according to an embodiment of the present disclosure is shown;

[0018] Figure 3 Schematic diagram showing the interception of the Gaussian beam by the aperture during the vibration of the second aperture;

[0019] Figure 4 A schematic diagram showing a comparison of the light uniformity effects when the second aperture performs simple harmonic motion at different maximum vibration speeds;

[0020] Figure 5A A schematic diagram showing a comparison of the light uniformity effects of the second aperture with different aperture sizes when the maximum vibration speed v=1 is shown; and

[0021] Figure 5B The figure schematically shows a comparison of the light uniformity effects of the second aperture with different aperture sizes when the maximum vibration speed v=2. DETAILED DESCRIPTION

[0022] In order to make the objectives, technical solutions and advantages of the present disclosure more clearly understood, the present disclosure is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0023] The terms used herein are only for describing specific embodiments and are not intended to limit the present disclosure. The terms "comprise," "include," etc. used herein indicate the presence of features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0024] All terms used herein, including technical and scientific terms, have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0025] When expressions such as “at least one of A, B, and C, etc.” are used, they should generally be interpreted in accordance with the meaning commonly understood by those skilled in the art. For example, “a system having at least one of A, B, and C” should include but is not limited to systems having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, and C, etc. When expressions such as “at least one of A, B, or C, etc.” are used, they should generally be interpreted in accordance with the meaning commonly understood by those skilled in the art. For example, “a system having at least one of A, B, or C” should include but is not limited to systems having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, and C, etc.

[0026] It should also be noted that directional terms such as "upper," "lower," "front," "back," "left," and "right" mentioned in the embodiments are merely references to the directions in the accompanying drawings and are not intended to limit the scope of protection of this disclosure. Throughout the drawings, identical elements are represented by identical or similar reference numerals. Conventional structures or configurations will be omitted where they may cause confusion in understanding this disclosure.

[0027] Prior art light homogenization devices are generally based on principles or methods such as beam expansion and collimation, DOE / microlenses, or superlens arrays, to adjust a beam with a non-uniform light intensity distribution emitted by an illumination source into a beam with a relatively uniform light intensity distribution. Among them, light homogenization devices using the beam expansion and collimation principle amplify the Gaussian distribution of the illumination source, reducing the difference in illumination intensity between different areas within a certain area to achieve a relatively uniform light intensity distribution within a certain area. However, this reduces the optical power density irradiated on the surface of the sample. Light homogenization devices using DOE / microlenses or superlens arrays effectively disperse and redistribute the illumination light field intensity by creating various microstructures on the surface of the optical element, regulating the light field phase and intensity, making the light field intensity distribution at the illumination end uniform and ultimately achieving relatively uniform light intensity. However, the processing of micro-nanostructures requires precision in three dimensions, which is costly. In addition, the material of the micro-nanostructure elements has different loss or reflection / transmittance for light of different wavelengths, and the same material can only be used in one wavelength band.

[0028] Therefore, a light homogenizing device is needed to solve the technical problems of the above light homogenizing devices, such as reduced illumination, high processing precision requirements, high processing costs, and the inability to universally use light homogenizing devices for light sources of different frequencies.

[0029] In view of this, the present disclosure provides a light homogenizing device, comprising: a light source for generating an illumination beam for irradiating a sample; and a vibration module for controlling the illumination beam to scan the surface of the sample to form a uniform light spot on the surface of the sample.

[0030] Figure 1 The figure schematically shows a light homogenizing device according to an embodiment of the present disclosure.

[0031] like Figure 1 As shown, the light source 101 emits an illumination beam 102, which illuminates the surface of the sample 104 through the illumination light path; under the action of the vibration module 103, the instantaneous light spot formed by the illumination beam 102 on the surface of the sample produces relative motion relative to the surface of the sample, scanning the surface of the sample back and forth; based on the persistence of vision effect or the time integration effect of light intensity, a uniform light spot is formed on the surface of the sample, thereby achieving uniform illumination of the surface of the sample.

[0032] According to the embodiments of the present disclosure, there may be one or more vibration modules. Under the action of the vibration modules, the reciprocating motion of the instantaneous light spot may be a one-dimensional reciprocating motion or a two-dimensional reciprocating motion. The two-dimensional reciprocating motion may be the alternating reciprocating motion of the instantaneous light spot along the mutually perpendicular X-axis and Y-axis on the XY plane, or the sum of two reciprocating motions simultaneously performed along the X-axis direction and the Y-axis direction. The two reciprocating motions simultaneously performed along the X-axis direction and the Y-axis direction may both be simple harmonic motions. When the frequencies of the two simple harmonic motions are the same or in an integer ratio, the reciprocating motion in the two-dimensional plane may be synthesized; for example, when the frequencies of the two simple harmonic motions are the same and the initial phase difference is When , a regular elliptical instantaneous light spot motion trajectory can be synthesized, and the instantaneous light spot moves back and forth along the trajectory, scanning the surface of the sample back and forth.

[0033] According to an embodiment of the present disclosure, the light source 101 can be a traditional thermal radiation light source, such as an incandescent lamp, a halogen tungsten lamp, etc.; it can also be a gas discharge light source, such as a xenon lamp, a mercury lamp, etc.; it can also be a laser light source, such as a He-Ne laser, a semiconductor laser, etc.; it can also be an LED light source, such as a monochrome LED, a white light LED, etc.

[0034] According to an embodiment of the present disclosure, the light intensity distribution type of the illumination light beam 102 emitted by the light source 101 can be a non-uniform distribution, wherein the type of non-uniform distribution can be one or a combination of multiple distributions such as Gaussian distribution, Lambertian distribution, multi-peak distribution or annular distribution.

[0035] According to an embodiment of the present disclosure, the vibration module 103 controls the illumination light beam 102 to scan the surface of the sample. For example, the vibration module 103 causes the light source 101 and the sample 104 to generate relative motion in a direction perpendicular to the propagation direction of the illumination light beam 102, so that the instantaneous light spot formed on the surface of the sample by the illumination light beam 102 produces changes in position and / or intensity to scan the surface of the sample, wherein the effect obtained by observing the scanning at any point on the surface of the sample 102 that can be illuminated by the illumination light beam 102 can be that light of different light intensities reciprocates to illuminate the any point.

[0036] According to an embodiment of the present disclosure, the vibration module 103 controls the illumination light beam 102 to scan the surface of the sample, and can also drive the optical device in the illumination light path to vibrate, so that the illumination light beam 102 produces a reciprocating motion perpendicular to the propagation direction of the illumination light beam 102 under the influence of the optical device, thereby causing the instantaneous light spot on the surface of the sample to change position to scan the surface of the sample.

[0037] According to an embodiment of the present disclosure, the vibration module may be one or more vibration generating devices such as an electromagnetic vibration table, a voice coil motor, a piezoelectric ceramic actuator, or a piezoelectric vibration table.

[0038] According to the embodiments of the present disclosure, the position and / or intensity of the instantaneous light spot formed by the illumination light beam irradiating the surface of the sample changes with the vibration output by the vibration module, and the illumination light beam is scanned back and forth on the surface of the sample, thereby achieving the homogenization of the light intensity distribution of the non-uniform light beam without reducing the intensity of the light beam; in addition, the light homogenization device disclosed in the present disclosure has a simple structure, and can achieve light homogenization only by relying on the vibration drive provided by the vibration device, without the need for precise optical lens processing, and is relatively inexpensive. It can also be applied to lighting sources of various types and frequency ranges, and has extremely high versatility.

[0039] According to an embodiment of the present disclosure, the vibration module is used to drive the light source to vibrate back and forth to control the illumination beam to scan the surface of the sample to form a uniform light spot on the surface of the sample, wherein the vibration direction of the light source is perpendicular to the propagation direction of the illumination beam.

[0040] According to embodiments of the present disclosure, a vibration module can be coupled to a light source, transmitting the vibrations generated by the vibration module to the light source, causing the light source to vibrate back and forth along a predetermined direction in a plane perpendicular to the propagation direction of the illumination beam. The instantaneous light spot formed by the illumination beam projected onto the surface of the sample can then undergo corresponding reciprocating vibrations under the influence of the reciprocating vibrations of the light source, rapidly scanning the sample's surface back and forth.

[0041] According to an embodiment of the present disclosure, the vibration module may be coupled to the light source by a direct fixed connection, or may be indirectly connected to the light source via a vibration conducting device.

[0042] According to embodiments of the present disclosure, the reciprocating vibration frequency of the light source can be significantly greater than the imaging frequency of the observer. For example, when the observer is a human, the imaging frequency of the human eye can be 60 Hz. The imaging frequency of the human eye represents the highest frequency at which the human eye can perceive light flicker. Above this frequency, flickering light is perceived as continuous light. In this case, the reciprocating vibration frequency of the light source needs to be significantly greater than 60 Hz, for example, it can be set to 200 Hz.

[0043] According to the embodiments of the present disclosure, by coupling a vibration module with a light source, the light source is driven by the vibration module to vibrate back and forth, allowing the instantaneous light spot formed by the illumination beam on the surface of the sample to rapidly scan the sample back and forth, integrating the light intensity at each point on the sample surface to achieve the technical effect of uniform light. Furthermore, this implementation is simple and applicable to a variety of illumination sources that are insensitive to vibration. Furthermore, this implementation is insensitive to the wavelength of the light beam and can achieve uniform light for a variety of single-wavelength or multi-wavelength mixed light sources.

[0044] According to an embodiment of the present disclosure, there is also a first aperture between the light source and the sample, and the first aperture is used to limit the range of the uniform light spot.

[0045] According to an embodiment of the present disclosure, a first aperture may be provided in the propagation path of the illumination beam between the light source and the sample, and the first aperture may limit the illuminated area of ​​the sample surface to the projection range of the light hole of the first aperture.

[0046] According to an embodiment of the present disclosure, driven by a vibration module, the light source can perform reciprocating vibrations perpendicular to the propagation direction of the illumination light beam; during the reciprocating vibration of the illumination light beam, the first aperture can intercept part of the illumination light beam irradiated at its light hole for illuminating the surface of the sample; when the light intensity distribution of the illumination light beam is non-uniform, the light intensity of the part of the illumination light beam intercepted by the light hole can change accordingly following the reciprocating vibration of the illumination light beam, thereby realizing reciprocating scanning of the light hole projection area on the surface of the sample based on the change in light intensity.

[0047] According to an embodiment of the present disclosure, the uniform light spot may be an area with relatively uniform light intensity formed by reciprocating scanning of a portion of the intercepted illumination light beam on the surface of the sample.

[0048] According to an embodiment of the present disclosure, the first diaphragm may be a variable aperture diaphragm. By adjusting the aperture of the light hole of the first diaphragm, the range of the uniform light spot can be adjusted, thereby adjusting the uniform light effect.

[0049] For example, when the uniform light effect at the edge of the uniform light spot is poor, the aperture of the light hole of the first aperture can be reduced to cover the non-uniform part at the edge of the uniform light spot, thereby improving the overall uniform light effect.

[0050] According to an embodiment of the present disclosure, the uniform light spot range can be adjusted by changing the relative distance between the first aperture and the light source and / or the sample.

[0051] For example, the range of the uniform light spot can be reduced by reducing the distance between the first aperture and the sample, and the non-uniform part of the edge area of ​​the uniform light spot can be blocked to improve the overall uniform light effect.

[0052] According to an embodiment of the present disclosure, by moving the position of the first aperture on a plane perpendicular to the propagation direction of the illumination light beam, it is also possible to control the position of the uniform light spot on the surface of the sample.

[0053] According to an embodiment of the present disclosure, by setting a first aperture in the propagation light path of the illumination light beam, it is also possible to avoid the illumination light beam from illuminating other areas of the surface of the sample except the projection area of ​​the light hole, thereby improving the contrast between the uniformly illuminated area of ​​the surface of the sample and other areas.

[0054] According to an embodiment of the present disclosure, the light homogenizing device may further include a second aperture, which is located between the light source and the sample; the vibration module drives the second aperture to vibrate back and forth to control the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample, wherein the vibration direction of the second aperture is perpendicular to the propagation direction of the illumination light beam.

[0055] According to embodiments of the present disclosure, a vibration module can be coupled to a second aperture, transmitting the vibrations generated by the vibration module to the second aperture, causing the second aperture to vibrate back and forth in a specific direction on a plane perpendicular to the propagation direction of the illumination beam. The illumination beam passes through the aperture of the second aperture, forming a transient light spot on the surface of the sample. Driven by the second aperture, the transient light spot can generate reciprocating vibrations in the same direction, rapidly scanning the sample surface. Within a certain time range, the light intensity integrals of multiple points on the sample surface within the scanning range of the transient light spot converge or approach, thereby forming a uniform light spot and achieving uniform illumination of the illumination beam.

[0056] According to an embodiment of the present disclosure, the vibration module and the second aperture may be coupled by a direct fixed connection or an indirect connection via a vibration conducting device.

[0057] According to an embodiment of the present disclosure, the vibration frequency of the reciprocating vibration of the second aperture can be adaptively adjusted based on different observers to achieve a good uniform light effect for different observers.

[0058] For example, when the observer is a human, the imaging frequency of the human eye can be 60 Hz. In this case, the reciprocating vibration frequency of the second aperture can be much higher than the imaging frequency of the human eye, for example, it can be set to 200 Hz. When the observer is a camera, the reciprocating vibration frequency of the second aperture can be much higher than the inverse of the camera exposure time. For example, when the camera exposure time is 5 ms, the reciprocating vibration frequency of the second aperture can be set to 300 Hz.

[0059] According to an embodiment of the present disclosure, the vibration frequency of the second aperture may be adjusted by setting the vibration device before the vibration begins, or by adjusting the vibration frequency of the vibration device in real time during the vibration process.

[0060] Figure 2 A schematic diagram of a light homogenization device according to an embodiment of the present disclosure is shown.

[0061] like Figure 2 As shown, the vibration module can be a vibration component driven by a motor, which is coupled with the diaphragm to drive the diaphragm to perform reciprocating vibration perpendicular to the propagation direction of the illumination light beam.

[0062] According to the embodiments of the present disclosure, by coupling the vibration module to the second aperture and driving the second aperture to vibrate back and forth, a transient light spot can be rapidly scanned back and forth across the sample surface. This, based on the time-integrated effect of the light intensity, forms a uniform light spot on the sample surface, thereby achieving uniform illumination of the illumination beam. Furthermore, this implementation is simple, and the uniform illumination effect can be adjusted in real time by adjusting the vibration frequency of the second aperture.

[0063] According to an embodiment of the present disclosure, the light-transmitting area of ​​the second aperture is in a circular or rectangular shape.

[0064] According to an embodiment of the present disclosure, the shape of the light hole of the second aperture can be circular or rectangular, or any other shape other than circular and rectangular, such as hexagonal, slit-shaped, etc.

[0065] According to the embodiments of the present disclosure, the shape of the light hole of the second aperture can be determined according to the requirements for the uniform light effect; for example, a circular light hole can be selected to achieve isotropic uniformity; a rectangular light hole can be selected to improve the scanning coverage efficiency and to more easily achieve a flat-top distribution; a slit-shaped light hole can be selected to achieve a better unidirectional uniform light effect, etc.

[0066] According to the embodiments of the present disclosure, by selecting light holes of the second aperture of different shapes, on-demand configuration for different light homogenization requirements can be achieved, which has high flexibility and adaptability, and can enable the light homogenization device to be applied to a variety of application scenarios with different light homogenization requirements.

[0067] According to an embodiment of the present disclosure, the illumination light beam is a Gaussian light beam.

[0068] According to the embodiments of the present disclosure, a Gaussian beam is a beam with a light intensity distribution that is strong at the center and weak at the edges, exponentially decaying from the center outward, and having no clear boundaries. The light intensity distribution of a Gaussian beam complies with the following formulas (1) to (3):

[0069] (1);

[0070] (2);

[0071] (3);

[0072] in, is the maximum intensity at the center of the beam, is the beam waist radius, r is the radial distance from the central optical axis of the beam, z is the propagation distance of the beam, is the beam radius at the propagation distance z, that is, the intensity at which the light intensity drops to the central value. The radius of is the Rayleigh range, is the wavelength of the light beam.

[0073] In a specific embodiment, the light hole of the second aperture can be rectangular, with a width of L0 and a height of Y0; the second aperture reciprocates along the x-axis on a plane perpendicular to the propagation direction of the light beam, and its speed relative to the light source is , then taking the center of the second aperture as the origin, the intensity distribution of the Gaussian beam can be expressed as shown in the following formulas (4) and (5):

[0074] (4);

[0075] (5);

[0076] in, is the maximum intensity at the center of the beam, , is the waist radius, represents the instantaneous position abscissa of the center of the Gaussian beam, is the initial position of the central light intensity peak of the Gaussian light source, Indicates the coordinate point ( ) is the distance from the center of the Gaussian beam.

[0077] According to an embodiment of the present disclosure, the light intensity distribution projected onto the surface of the sample can be expressed as the following formula (6):

[0078] Y0 (6);

[0079] Where L0 is the width of the rectangular light hole, Y0 is the height of the rectangular light hole, is the maximum intensity at the center of the beam, , is the waist radius, is the initial position of the central light intensity peak of the Gaussian light source, is the vibration speed of the second aperture.

[0080] Figure 3 The schematic diagram of the light hole intercepting the Gaussian beam during the vibration process of the second aperture is shown schematically.

[0081] like Figure 3 As shown, the Gaussian light source 301 shows the light intensity distribution at different positions through a curve, where Figure 3 As shown by the dotted line 302 in Figure 3 At the moment of movement shown, the light hole intercepts the area containing the maximum light intensity of the Gaussian beam; in addition, the rectangular frame 303 represents the second aperture opening area, and the speed of the second aperture at this time is v.

[0082] Figure 4 The diagram schematically shows a comparison of the light uniforming effects when the second aperture performs simple harmonic motion at different maximum vibration speeds.

[0083] like Figure 4 As shown in FIG, at different maximum vibration speeds of the second aperture, the light homogenizing device exhibits different light homogenizing effects on the Gaussian beam. As the maximum vibration speed increases, the light homogenizing effect becomes significantly better, and the light intensity distribution presents a nearly flat-top distribution.

[0084] Figure 5A The figure schematically shows a comparison of the light uniformity effects of the second aperture with different aperture sizes when the maximum vibration speed v=1.

[0085] Figure 5B The figure schematically shows a comparison of the light uniformity effects of the second aperture with different aperture sizes when the maximum vibration speed v=2.

[0086] Figure 5A and Figure 5B The light hole of the second aperture in can be circular, such as Figure 5A and Figure 5B As shown in the figure, apertures with different diameters L can produce different light homogenization effects at the same maximum speed; and apertures with the same diameter L can produce different light homogenization effects at different maximum vibration speeds. Based on this, it can be seen that when setting the parameters of the light homogenization device, it is necessary to comprehensively consider the aperture size and the aperture vibration speed.

[0087] According to the embodiments of the present disclosure, a Gaussian light beam has a clear light intensity distribution law, which is strong in the middle, weak at the edges, and exponentially decays from the center to the outside. By using a Gaussian light beam as the illumination beam, simulation calculations of the parameter settings of the uniform light device can be achieved, reducing the workload of on-site experimental adjustments.

[0088] According to the embodiments of the present disclosure, the propagation optical path of the light source and / or the illumination beam may be sensitive to vibration. This sensitivity can be manifested in that long-term vibration can cause damage to the light source or optical devices in the optical path. Therefore, in the above situation, other methods need to be adopted to make the illumination beam and the sample move relative to each other to achieve uniform light.

[0089] Based on the above problems, the present disclosure provides the following embodiment, wherein the vibration module drives the sample to vibrate reciprocatingly to control the illumination beam to scan the surface of the sample to form a uniform light spot on the surface of the sample, wherein the vibration direction of the sample is perpendicular to the propagation direction of the illumination beam.

[0090] According to embodiments of the present disclosure, a vibration module can be coupled to a sample, transmitting the vibrations generated by the module to the sample, causing the sample to undergo simple harmonic oscillation along a predetermined direction, centered around an initial position, on a plane perpendicular to the propagation direction of the illumination beam. The instantaneous light spot formed by the illumination beam projected onto the sample's surface can be rapidly scanned back and forth across the sample's surface, forming a uniform light spot across the sample, thereby achieving uniform illumination of the illumination beam.

[0091] According to the embodiments of the present disclosure, the sample is driven to vibrate back and forth by a vibration module to achieve uniform light, which effectively avoids the damage that the vibration generated by the vibration device may cause to the light source and optical path components during the uniform light process, thereby improving the stability and reliability of the uniform light device and the overall service life of the uniform light device.

[0092] According to an embodiment of the present disclosure, a third aperture is present between the light source and the sample, and the third aperture is used to intercept divergent light rays of the illumination light beam.

[0093] According to the embodiments of the present disclosure, the third aperture, the light source, and the illumination light path can remain relatively stationary. By adjusting the position of the third aperture and the size of the light hole, it is possible to cut off the divergent light with relatively weak light intensity in the illumination beam, thereby preventing the divergent light from irradiating or scanning the surface of the sample, forming an area with relatively weak light intensity, and affecting the overall uniform lighting effect.

[0094] In a specific embodiment, the illumination beam can be a Gaussian beam, the light hole of the third aperture can be circular and the aperture of the light hole can be adjustable, so that the optical axis of the illumination beam can be aligned with the center of the light hole of the third aperture. By setting the aperture size of the third light hole, the area within the beam radius starting from the center of the beam is intercepted for irradiating the sample, while the divergent light with weak light intensity that is farther away from the beam center than the beam radius is blocked.

[0095] According to an embodiment of the present disclosure, by setting a third aperture to perform spatial filtering on the illumination light beam irradiating the sample, it is possible to avoid divergent light with relatively weak light intensity irradiating the surface of the sample, thereby forming a weak light intensity area on the surface of the sample, reducing the contrast between the uniform light area and the non-uniform light area, and thus improving the overall uniform light effect.

[0096] According to an embodiment of the present disclosure, the light homogenizing device may further include an imaging module, which is used to receive imaging light from the sample and image the sample, wherein the imaging light may be reflected light formed by the illumination light beam reflected from the surface of the sample or transmitted light generated by the illumination light beam passing through the sample.

[0097] According to embodiments of the present disclosure, the imaging module can be an imaging device such as the human eye or a camera that exhibits persistence of vision or time integration. The imaging module can be positioned on the same side as the light source to receive imaging light generated by an illumination beam reflected from the sample surface to image the sample surface. Alternatively, the imaging module can be positioned on the side opposite the illumination light source to receive an illumination beam transmitted through the sample to image the sample surface.

[0098] According to an embodiment of the present disclosure, when the imaging module is a camera, the vibration period of the vibration module needs to be much smaller than the exposure time of the camera, so that the illumination light beam can scan the imaging area on the sample surface multiple times within the camera exposure time, realize light intensity integration on the picture taken by the camera, and obtain a better uniform light effect.

[0099] According to an embodiment of the present disclosure, the exposure time of the camera is correlated with the vibration frequency of the vibration module. The best uniform light effect can be obtained by first determining the exposure time and then adjusting the vibration frequency. The best uniform light effect can also be obtained by first determining the vibration frequency and then adjusting the camera exposure time.

[0100] According to an embodiment of the present disclosure, when the vibration module drives the sample to vibrate back and forth, the imaging device can follow the movement of the sample with the same frequency, direction and amplitude to achieve imaging of the sample.

[0101] According to the embodiments of the present disclosure, by allowing an imaging module with a persistence of vision effect or a time integration effect to cooperate with a vibration module to image the surface of the sample, the imaging of the sample can be effectively achieved; in addition, the image formed by the imaging device can also be used to provide a reference for the adjustment of the uniform light device.

[0102] According to an embodiment of the present disclosure, the light homogenizing device may further include a feedback adjustment module, which is configured to adjust the vibration module according to the imaging effect of the imaging device so that the light homogenizing device achieves the best light homogenizing effect.

[0103] According to an embodiment of the present disclosure, when the vibration module drives the light source to vibrate to achieve uniform light, the feedback adjustment module can adjust the vibration mode of the vibration module and then adjust the vibration parameters of the light source such as the vibration speed, direction and amplitude based on the analysis results of the imaging module to achieve the best uniform light effect.

[0104] According to an embodiment of the present disclosure, when the vibration module drives the second aperture, positioned between the light source and the sample, to vibrate and achieve light homogenization, the feedback adjustment module can adjust the vibration mode of the vibration module based on the analysis results of the image captured by the imaging module, thereby adjusting the vibration parameters of the second aperture, such as the vibration speed, direction, and amplitude, to achieve the optimal light homogenization effect. Specifically, when the second aperture has an adjustable aperture size, the feedback adjustment module can further achieve the optimal light homogenization effect by collaboratively adjusting the aperture size of the second aperture and the vibration mode of the vibration device.

[0105] According to an embodiment of the present disclosure, when the vibration module drives the sample to vibrate to achieve uniform light, the feedback adjustment module can adjust the vibration mode of the vibration module and then adjust the vibration parameters of the sample such as vibration speed, direction and amplitude based on the analysis results of the image formed by the imaging module to achieve the best uniform light effect.

[0106] According to the embodiments of the present disclosure, by setting up a feedback adjustment module, real-time automatic adjustment of the light homogenizing device is achieved based on feedback, which can avoid the technical problems of long adjustment time and poor adjustment effect when manually adjusting multiple parameters of the light homogenizing device, and can improve the adjustment speed of the light homogenizing device and the light homogenizing effect of the light homogenizing device.

[0107] The present disclosure also provides a light uniforming method, which includes: controlling a light source to generate an illumination beam, the illumination beam being used to irradiate a sample; and controlling the illumination beam to scan a surface of the sample to form a uniform light spot on the surface of the sample.

[0108] According to an embodiment of the present disclosure, controlling the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample can be achieved by driving the light source to vibrate back and forth to control the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample, wherein the vibration direction of the light source is perpendicular to the propagation direction of the illumination light beam.

[0109] According to an embodiment of the present disclosure, a first aperture may be further provided between the light source and the sample, and the first aperture is used to limit the range of the uniform light spot.

[0110] According to an embodiment of the present disclosure, controlling the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample can also be achieved by setting a second aperture between the light source and the sample, and allowing the vibration module to drive the second aperture to vibrate back and forth to control the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample, wherein the vibration direction of the second aperture is perpendicular to the propagation direction of the illumination light beam.

[0111] According to an embodiment of the present disclosure, the shape of the light-transmitting area of ​​the second aperture may be set to be circular or rectangular.

[0112] According to an embodiment of the present disclosure, controlling the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample can also be achieved by allowing the vibration module to drive the sample to vibrate reciprocatingly to control the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample, wherein the vibration direction of the sample is perpendicular to the propagation direction of the illumination light beam.

[0113] According to an embodiment of the present disclosure, a third aperture may be further provided between the light source and the sample, and the third aperture is used to intercept divergent light rays of the illumination light beam.

[0114] According to an embodiment of the present disclosure, the light homogenization method may further include receiving imaging light from the sample and imaging the sample, wherein the imaging light is reflected light formed by the illumination light beam reflected from the surface of the sample or transmitted light generated by the illumination light beam passing through the sample.

[0115] The embodiments of the present disclosure are described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present disclosure. Although each embodiment has been described separately above, this does not mean that the measures in each embodiment cannot be used in combination to advantage. The scope of the present disclosure is defined by the appended claims and their equivalents. Without departing from the scope of the present disclosure, those skilled in the art may make various substitutions and modifications, which should all fall within the scope of the present disclosure.

Claims

1. A light homogenizing device, characterized in that: include: a light source, for generating an illumination beam, wherein the illumination beam is used to illuminate the sample; The vibration module is used to control the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample.

2. The light homogenizing device according to claim 1, characterized in that: The vibration module is used to drive the light source to vibrate back and forth to control the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample, wherein the vibration direction of the light source is perpendicular to the propagation direction of the illumination light beam.

3. The light homogenizing device according to claim 2, characterized in that: There is also a first aperture between the light source and the sample, and the first aperture is used to limit the range of the uniform light spot.

4. The light homogenizing device according to claim 1, characterized in that: Also comprising a second aperture, the second aperture being positioned between the light source and the sample; The vibration module drives the second aperture to vibrate back and forth to control the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample, wherein the vibration direction of the second aperture is perpendicular to the propagation direction of the illumination light beam.

5. The light homogenizing device according to claim 4, characterized in that: The light-transmitting area of ​​the second aperture is in a circular or rectangular shape.

6. The light homogenizing device according to claim 1, characterized in that: The illumination light beam is a Gaussian light beam.

7. The light homogenizing device according to claim 1, characterized in that: The vibration module drives the sample to vibrate back and forth to control the illumination light beam to scan the surface of the sample to form a uniform light spot on the surface of the sample, wherein the vibration direction of the sample is perpendicular to the propagation direction of the illumination light beam.

8. The light homogenizing device according to claim 7, characterized in that: A third aperture is provided between the light source and the sample, and the third aperture is used to intercept divergent light of the illumination light beam.

9. The light homogenizing device according to claim 1, characterized in that: It also includes an imaging module, which is used to receive imaging light from the sample and image the sample, wherein the imaging light is reflected light formed by the surface of the sample reflecting the illumination light beam or transmitted light generated by the illumination light beam passing through the sample.

10. A light uniforming method, characterized in that: The method comprises: controlling the light source to generate an illumination beam, wherein the illumination beam is used to illuminate the sample; The illumination light beam is controlled to scan the surface of the sample to form a uniform light spot on the surface of the sample.

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