Chip defect multi-surface detection device

By designing a chip defect multi-faceted inspection device with a right-angle prism module and adjustment mechanism, the problems of high cost and large space occupation in chip multi-faceted inspection are solved, realizing simultaneous multi-faceted inspection, reducing equipment cost and optimizing space utilization.

CN223597541UActive Publication Date: 2025-11-25SUZHOU MURAN PHOTOELECTRIC TECH CO LTD
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Patent Information

Application Number
CN202423090777.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-13
Publication Date
2025-11-25
Estimated Expiration
2034-12-13

AI Technical Summary

Technical Problem

Existing chip defect detection equipment can only detect one side, resulting in high detection costs and large equipment footprint, and it cannot achieve multi-sided detection.

Method used

A chip defect multi-faceted inspection device was designed. It adopts a combination of right-angle prism module, surface light source, beam splitter prism and central aperture surface light source to form a square chamber. With the help of telecentric lens and adjustment mechanism, it can realize the simultaneous multi-faceted inspection of chip.

Benefits of technology

This enables simultaneous multi-faceted inspection of chips, reducing inspection costs and minimizing equipment space requirements.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a chip defect multi-face detection device which comprises a detection shell, a display mechanism used for chip multi-face display is installed on the detection shell, a camera is installed in the detection shell, and an adjusting mechanism used for driving the camera to adjust the size of a light spot in the detection shell is further installed on the detection shell. According to the utility model, through the cooperation of the rectangular prism module, the surface light source, the beam splitter prism and the mesopore surface light source, the four rectangular prisms are closed together to form a square chamber, and the chip is placed in the square chamber, so that a camera can detect the front surface and four side surfaces of the chip at the same time; through the arranged adjusting mechanism, the product is small, a telecentric lens needs to be used, and the working distance of the telecentric lens is relatively fixed, so that in order to facilitate focusing, the device is provided with the focusing adjusting mechanism, the position of the telecentric lens can be adjusted through a knob, and a shot picture can be clearly displayed.
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Description

TECHNICAL FIELD

[0001] The utility model belongs to chip technical field especially, and it relates to chip defect multi -surface detection device. BACKGROUND

[0002] Chip is the core component in modern electronic technology, and its role is very extensive. Chips can be used to complete various circuit functions, such as digital signal processing, analog signal conversion, etc. Therefore, chips have a wide range of applications in various electronic devices, automobiles, medical devices and other fields. The defects of chip will directly or indirectly affect the quality of chip, so the detection of chip defects is particularly important.

[0003] But the chip defect detection is either artificial through microscope to naked eye recognition, or through the vision system to carry out automatic detection, since the chip is a square structure, each face needs to be detected, but the conventional detection can only detect a single face, to realize the multi -surface detection of chip, it needs multiple cameras multiple stations to carry out detection, so the detection cost is high, and the space required by the equipment is also large. UTILITY MODEL CONTENTS

[0004] In view of the problems existing in the prior art, the utility model provides chip defect multi -surface detection device, solves the problem that the ground is uneven, and the body is inclined when landing, and is easy to tilt and rise, and hits the nearby shelter.

[0005] The utility model is realized in this way, chip defect multi -surface detection device, including detection shell, the display mechanism for chip multi -surface display is installed on the detection shell, the camera is installed in the detection shell, the adjusting mechanism for driving the camera in the detection shell is also installed on the detection shell Adjust the size of the light spot.

[0006] As preferred in the utility model, the display mechanism includes a face light source, a light splitting prism, a central hole face light source and a right angle prism module, the right angle prism module is communicated and installed on the upper end of the detection shell, the central hole face light source, the light splitting prism and the face light source are sequentially and vertically communicated and installed in the detection shell, and the central hole face light source is communicated with the right angle prism module.

[0007] As preferred in the utility model, the right angle prism module includes a first right angle prism, a second right angle prism, a third right angle prism and a fourth right angle prism, the first right angle prism, the second right angle prism, the third right angle prism and the fourth right angle prism are installed on the detection shell, and the end of the first right angle prism, the second right angle prism, the third right angle prism and the fourth right angle prism abuts each other to form a square display cavity for placing chips, and the central hole face light source is communicated with the square display cavity.

[0008] As preferred in the utility model, the pneumatic unit comprises a pneumatic driving assembly, a telecentric lens is connected to the camera, and the telecentric lens and the light splitting prism are on the same central axis.

[0009] As preferred in the utility model, the adjusting mechanism comprises a threaded rod, a sliding block and a knob, a secondary shell is installed in communication with the lower end of the detection shell, the threaded rod is arranged along the longitudinal direction of the secondary shell, and both ends of the threaded rod are rotatably connected to both sides in the secondary shell, the sliding block is threadedly connected to the threaded rod, and the lower end of the sliding block abuts against the inner wall of the secondary shell, the knob is arranged on the outer wall of the secondary shell and is threadedly connected with the threaded rod, and the camera is connected to the sliding block.

[0010] Compared with the prior art, the utility model has the beneficial effects as follows:

[0011] The utility model discloses a right-angle prism module, a surface light source, a light splitting prism and a central hole surface light source are cooperated, four right-angle prisms are closed together to form a square chamber, and the chip is placed in the square chamber, so that the camera can detect the front face and four side faces of the chip simultaneously.

[0012] The adjusting mechanism is arranged, the telecentric lens is used for the product small, and the working distance of the telecentric lens is relatively fixed, so that the adjusting mechanism of focusing is designed for the convenience of focusing, the position of the telecentric lens can be adjusted through the knob, and the captured picture is clearly displayed. BRIEF DESCRIPTION OF DRAWINGS

[0013] Fig. 1 It is the whole structure schematic diagram provided by the utility model embodiment;

[0014] Fig. 2 It is the top view of the right-angle prism module provided by the utility model embodiment.

[0015] In the drawing: 1, detection shell; 2, camera; 3, surface light source; 4, light splitting prism; 5, central hole surface light source; 6, right-angle prism module; 601, first right-angle prism; 602, second right-angle prism; 603, third right-angle prism; 604, fourth right-angle prism; 7, telecentric lens; 8, threaded rod; 9, sliding block; 10, knob; 11, secondary shell. DETAILED DESCRIPTION

[0016] In order to further understand the utility model content, characteristics and efficacy of the utility model, the following examples are cited, and the drawings are described in detail as follows.

[0017] The structure of the utility model is described in detail below in combination with the drawings.

[0018] AsFigs. 1-2 The chip defect multi-surface detection device provided by the embodiment of the utility model shows, the chip is placed in the display mechanism can show the four edges of the chip;

[0019] The display mechanism can show the four edges of the chip;

[0020] The adjusting device is used for adjusting the distance between the camera 2 and the display mechanism.

[0021] As preferred in the utility model, the display mechanism comprises a surface light source 3, a light splitting prism 4, a central hole surface light source 5 and a right-angle prism module 6, the right-angle prism module 6 is communicated and installed at the upper end of the detection shell 1, the central hole surface light source 5, the light splitting prism 4 and the surface light source 3 are sequentially and vertically communicated and installed in the detection shell 1, and the central hole surface light source 5 is communicated with the right-angle prism module 6;

[0022] The surface light source 3, the light splitting prism 4 and the central hole surface light source 5 are vertically arranged and communicated with each other, and only the edges of the surface light source 3, the light splitting prism 4 and the central hole surface light source 5 are clamped in the detection shell 1;

[0023] The central hole surface light source 5 is a special surface light source, and its main feature is that there is a hole in the center of the light-emitting plane. From the appearance, it looks like a part of the light-emitting plane is removed in the middle, forming a hole. The existence of this hole is to facilitate some specific application scenarios, such as machine vision detection systems, so that some parts of the detected object (such as needing to be observed from the back or having protruding parts) can pass through the light source, while the light source can also illuminate the object around;

[0024] The light splitting prism 4 is an optical element, and its main function is to decompose a beam of incident light into two or more beams of different directions according to certain proportions or wavelength characteristics. Its principle is based on the fact that different wavelengths of light have different refractive indices in the medium. Through special prism structure and optical interface design, light refraction, reflection and other phenomena are generated, so that the purpose of light splitting is achieved;

[0025] The surface light source 3 refers to a light source that can emit light on a relatively large plane or curved surface. The light emitted by the light source can cover a relatively large area, and the distribution of light on the plane or curved surface is relatively uniform.

[0026] As the utility model is preferred, the right-angle prism module 6 includes a first right-angle prism 601, a second right-angle prism 602, a third right-angle prism 603 and a fourth right-angle prism 604, the first right-angle prism 601, the second right-angle prism 602, the third right-angle prism 603 and the fourth right-angle prism 604 are installed on the detection shell 1, and the ends of the first right-angle prism 601, the second right-angle prism 602, the third right-angle prism 603 and the fourth right-angle prism 604 abut against each other to form a square display cavity for placing a chip, and the central hole area light source 5 is in communication with the square display cavity.

[0027] The first right-angle prism 601, the second right-angle prism 602, the third right-angle prism 603 and the fourth right-angle prism 604 can be fixedly installed on the detection shell 1 or bonded on the detection shell 1.

[0028] The ends of the first right-angle prism 601, the second right-angle prism 602, the third right-angle prism 603 and the fourth right-angle prism 604 can be abutted together by bonding to form the square display cavity, the detection shell 1 is provided with a through cavity, the through cavity is in communication with the display cavity, and the central hole area light source 5 is in communication with the display cavity through the through cavity.

[0029] As the utility model is preferred, the camera 2 is connected with a telecentric lens 7, and the telecentric lens 7 and the light splitting prism 4 are on the same central axis.

[0030] As the utility model is preferred, the adjusting mechanism includes a threaded rod 8, a sliding block 9 and a knob 10, the lower end of the detection shell 1 is in communication with a secondary shell 11, the threaded rod 8 is arranged along the longitudinal direction of the secondary shell 11, both ends of the threaded rod 8 are rotatably connected to both sides in the secondary shell 11, the sliding block 9 is screw-connected to the threaded rod 8, and the lower end of the sliding block 9 abuts against the inner wall of the secondary shell 11, the knob 10 is arranged on the outer wall of the secondary shell 11, and the knob 10 is screw-connected with the threaded rod 8, and the camera 2 is connected to the sliding block 9, when the knob 10 drives the threaded rod 8 to rotate, the sliding block 9 reciprocates along the longitudinal direction of the secondary shell 11.

[0031] One end of the threaded rod 8 connected with the knob 10 extends out of the secondary shell 11 and is connected with the knob 10 (the part of the threaded rod 8 extending out is not screw-threaded and is rotatably connected with the secondary shell 11), or the knob 10 extends into the secondary shell 11 and is connected with the threaded rod 8, so that the knob 10 is rotatably connected with the secondary shell 11.

[0032] The camera 2 is detachably connected to the sliding block 9, for example, the camera 2 is screw-connected to the sliding block 9.

[0033] Because the product is small, the telecentric lens 7 needs to be used, and the working distance of the telecentric lens 7 is relatively fixed, therefore, in order to facilitate focusing, the device is designed with a focusing adjusting mechanism, the position of the camera 2 can be adjusted through a knob to drive the telecentric lens 7 to move, so that the captured picture is clearly displayed.

[0034] Working principle, the chip is placed in the right-angle prism module 6, the area light source 3 provides light source upward, the light source is irradiated in the display cavity in sequence through the light splitting prism 4 and the hole on the middle hole light source 5, the four sides of the chip in the display cavity are refracted on the light splitting prism 4 through the first right-angle prism 601, the second right-angle prism 602, the third right-angle prism 603 and the fourth right-angle prism 604 respectively, the front surface of the chip is directly refracted on the light splitting prism 4 through the light source downward, so that the five surfaces of the chip can be directly seen on the light splitting prism 4, similar to Fig. 2 The five surfaces are expanded, then the camera 2 is moved to adjust the telecentric lens 7 for focusing.

[0035] It should be noted that, in the present document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0036] Although the embodiments of the present application have been shown and described, it is to be understood that for the purpose of the present application, the embodiments change, modify, replace and vary in many ways without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A multi-faceted inspection apparatus for chip defects, characterized by, The utility model provides a chip display device, which comprises a detection shell (1), a display mechanism for multi-face display of a chip is installed on the detection shell (1), a camera (2) is installed in the detection shell (1), and an adjusting mechanism for driving the camera (2) to adjust the size of a light spot in the detection shell (1) is further installed on the detection shell (1).

2. The chip defect multi-facet inspection apparatus of claim 1, wherein: The display mechanism comprises a surface light source (3), a light splitting prism (4), a central-hole surface light source (5) and a right-angle prism module (6), the right-angle prism module (6) is communicatively installed at the upper end of the detection shell (1), the central-hole surface light source (5), the light splitting prism (4) and the surface light source (3) are sequentially and vertically arranged and installed in the detection shell (1) in communication, and the central-hole surface light source (5) is in communication with the right-angle prism module (6).

3. The chip defect multi-facet inspection apparatus of claim 2, wherein: The right-angle prism module (6) comprises a first right-angle prism (601), a second right-angle prism (602), a third right-angle prism (603) and a fourth right-angle prism (604), the first right-angle prism (601), the second right-angle prism (602), the third right-angle prism (603) and the fourth right-angle prism (604) are installed on the detection shell (1), and the ends of the first right-angle prism (601), the second right-angle prism (602), the third right-angle prism (603) and the fourth right-angle prism (604) abut against each other to form a square display cavity for placing a chip, and the central-hole surface light source (5) is in communication with the square display cavity.

4. The chip defect multi-facet inspection apparatus of claim 3, wherein: The camera (2) is connected with a telecentric lens (7), and the telecentric lens (7) and the light splitting prism (4) are on the same central axis.

5. The chip defect multi-facet inspection apparatus of claim 1, wherein: The adjusting mechanism comprises a threaded rod (8), a sliding block (9) and a knob (10), a secondary shell (11) is communicatively installed at the lower end of the detection shell (1), the threaded rod (8) is arranged along the longitudinal direction of the secondary shell (11), both ends of the threaded rod (8) are rotatably connected to the two sides in the secondary shell (11) respectively, the sliding block (9) is threadedly connected to the threaded rod (8), and the lower end of the sliding block (9) abuts against the inner wall of the secondary shell (11), the knob (10) is arranged on the outer wall of the secondary shell (11), and the knob (10) is threadedly connected with the threaded rod (8), and the camera (2) is connected to the sliding block (9), when the knob (10) drives the threaded rod (8) to rotate, the sliding block (9) reciprocates along the longitudinal direction of the secondary shell (11).

Citation Information

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