Ultrasonic wave sensor device and operation method thereof

Abstract

The invention provides an ultrasonic wave sensor device and an operation method thereof, and the ultrasonic wave sensor device comprises an ultrasonic wave probe which comprises a plurality of probe elements; a plurality of compensation circuits respectively coupled to the plurality of probe elements; and a system coupled to the plurality of compensation circuits. The system is used for comparing the electric energy signals returned by each of the plurality of probe elements with expected values, generating a comparison result, and providing corresponding compensation circuit control signals in the plurality of compensation circuits according to the comparison result. The compensation circuit provides at least one compensation voltage according to the control signal to adjust the voltage transmitted to the corresponding probe element in the plurality of probe elements so as to correspondingly adjust a plurality of electric energy signals transmitted back to the system by the plurality of probe elements.

Description

Technical Field

[0001] The present invention relates to an ultrasonic sensor device, and in particular to an ultrasonic sensor device capable of adjusting a probe's return electric energy signal. Background Art

[0002] Generally speaking, an ultrasound probe is typically composed of an array of multiple probe elements, potentially 128, 192, or even more. These probe elements convert electrical energy into 1-15 MHz (Hertz, cycle / sec) ultrasound waves, which are emitted from the probe in a parallel or fan-shaped pattern. Ultrasound waves pass through the probe's sound-conducting medium or tissue. When they encounter tissue interfaces of varying densities, some of the energy is reflected. This reflected energy is then received by the probe's piezoelectric layer and converted into electrical signals, resulting in a grayscale image that appears on the screen.

[0003] The energy required by these probe elements typically comes from the voltage provided by the system. However, the probe elements are arranged in multiple elements (128, 192, or even more). Whether due to natural attenuation, inconsistent materials or structures within each probe element, or other unexpected factors, the power signals returned by individual probe elements may be affected, resulting in a decrease in the overall image quality provided by the ultrasound probe.

[0004] Therefore, it is necessary to design a new ultrasonic sensor device and an operating method thereof to overcome the above-mentioned defects. Summary of the Invention

[0005] The present invention aims to provide an ultrasonic sensor device and operating method thereof, which can solve the problem of return power signal being affected by natural attenuation, inconsistent materials or structures among the probe elements, or other unexpected factors, thereby improving the overall image quality provided by the ultrasonic probe.

[0006] To achieve the above objectives, the present invention provides an ultrasonic sensor device, comprising: an ultrasonic probe comprising a plurality of probe elements, each of the plurality of probe elements being configured to convert a received voltage into an ultrasonic wave and transmit it, and to receive reflected ultrasonic waves and convert them into an electrical energy signal; a plurality of compensation circuits respectively coupled to the plurality of probe elements; and a system coupled to the plurality of compensation circuits, the system providing a corresponding voltage to each of the plurality of probe elements via each of the plurality of compensation circuits, and receiving the electrical energy signal from each of the plurality of probe elements via the plurality of compensation circuits; wherein the system compares the electrical energy signal returned by each of the plurality of probe elements with an expected value, generates a comparison result, and provides a control signal corresponding to the compensation circuit in the plurality of compensation circuits based on the comparison result. The compensation circuit provides at least one compensation voltage based on the control signal to adjust the voltage transmitted to the corresponding probe element among the plurality of probe elements, thereby correspondingly adjusting the plurality of electrical energy signals returned by the plurality of probe elements to the system.

[0007] Preferably, if the comparison result is that the electric energy signal is less than the expected value, the control signal is increased and the compensation voltage is correspondingly increased; wherein, if the comparison result is that the electric energy signal is greater than the expected value, the control signal is reduced and the compensation voltage is correspondingly reduced.

[0008] Preferably, the plurality of probe elements have a plurality of structures, and the plurality of structures enable each of the corresponding plurality of probe elements to have a different expected value; wherein the corresponding plurality of compensation voltages adjust the voltage received by the corresponding plurality of probe elements having the plurality of structures, so as to correspondingly adjust the plurality of electrical energy signals returned by the corresponding plurality of probe elements having the plurality of structures to conform to the different plurality of expected values.

[0009] Preferably, each of the multiple compensation circuits includes: a peak detector for detecting the peak value of the voltage; a comparator coupled to the peak detector and the system, the comparator for comparing the control signal provided by the system and the voltage; and an adjustment circuit coupled to the comparator and a corresponding one of the multiple probe elements, the adjustment circuit for providing the compensation voltage according to the control signal.

[0010] Preferably, the voltage is an AC voltage, the peak detector is used to detect the peak value of the AC voltage, and the comparator compares the control signal and the peak value of the AC voltage; wherein the adjustment circuit is a variable gain amplifier, and the compensation voltage provided by the variable gain amplifier according to the control signal is a compensated AC voltage to adjust the AC voltage.

[0011] Preferably, the voltage is a DC voltage, the peak detector is used to detect the peak value of the DC voltage, and the comparator compares the control signal and the peak value of the DC voltage; wherein the adjustment circuit is a voltage doubling circuit, and the compensation voltage provided by the voltage doubling circuit according to the control signal is a compensated DC voltage to adjust the DC voltage.

[0012] The present invention provides an operating method for an ultrasonic sensor device, comprising: comparing, by a system of the ultrasonic sensor device, electrical energy signals returned by each of a plurality of ultrasonic probe elements of the ultrasonic sensor device with an expected value and generating a comparison result; providing, based on the comparison result, a control signal corresponding to a compensation circuit in a plurality of compensation circuits of the ultrasonic sensor device; and providing, based on the control signal, at least one compensation voltage by the compensation circuit to adjust the voltage transmitted to the corresponding probe element among the plurality of probe elements, thereby correspondingly adjusting the plurality of electrical energy signals returned by the probe elements to the system.

[0013] Preferably, if the comparison result is that the electric energy signal is less than the expected value, the control signal is increased and the compensation voltage is correspondingly increased; wherein, if the comparison result is that the electric energy signal is greater than the expected value, the control signal is reduced and the compensation voltage is correspondingly reduced.

[0014] Preferably, the plurality of probe elements have a plurality of structures, and the plurality of structures enable each of the corresponding plurality of probe elements to have a different expected value; wherein the corresponding plurality of compensation voltages adjust the voltages received by the corresponding plurality of probe elements having the plurality of structures, so as to correspondingly adjust the plurality of electrical energy signals returned by the corresponding plurality of probe elements having the plurality of structures to conform to the different expected values.

[0015] Preferably, the peak value of the voltage is detected by a peak detector of each of the multiple compensation circuits; wherein, the control signal provided by the system and the peak value of the voltage are compared by a comparator of each of the multiple compensation circuits; wherein, the compensation voltage is provided according to the control signal by an adjustment circuit of each of the multiple compensation circuits to adjust the voltage accordingly.

[0016] Compared to the prior art, the ultrasonic sensor device and operating method provided by embodiments of the present invention compares a preset value with the electrical energy signal returned by each probe element. The system then provides a control signal to a compensation circuit as a basis for adjusting the voltage supplied to each probe element. This solves the problem of the returned electrical energy signal being affected by natural attenuation, inconsistent materials or structures within each probe element, or other unexpected factors, thereby improving the overall image quality provided by the ultrasonic probe. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic diagram illustrating the structure of an exemplary probe element of an ultrasonic sensor device according to various embodiments of the present disclosure is shown;

[0018] Figure 2 A functional block diagram of an ultrasonic sensor device according to various embodiments of the present disclosure is shown;

[0019] Figure 3 A circuit diagram illustrating an exemplary compensation circuit of an ultrasonic sensor device according to various embodiments of the present disclosure is shown;

[0020] Figure 4 A circuit diagram illustrating another exemplary compensation circuit of an ultrasonic sensor device according to various embodiments of the present disclosure is shown;

[0021] Figure 5 A flow chart illustrating the process of operating a method for an ultrasonic sensor device according to various embodiments of the present disclosure is shown. DETAILED DESCRIPTION

[0022] In order to provide a further understanding of the purpose, structure, features and functions of the present invention, the following detailed description is given in conjunction with the embodiments.

[0023] This disclosure proposes an ultrasonic sensor device comprising an ultrasonic probe. The ultrasonic probe comprises multiple probe elements. These probe elements are used to convert voltage received from a system into ultrasonic waves for transmission, and to receive reflected ultrasonic waves and convert them into electrical energy signals, thereby performing ultrasonic scanning of an object, such as human skin. For example, each probe element can be connected to the system via its own cable to receive and transmit signals, and these probe elements can be controlled by the system.

[0024] Next, please refer to Figure 1 , depicts a schematic structural diagram of an exemplary probe element 110 and a probe element 120 of an ultrasonic sensor device 100 according to multiple embodiments of the present disclosure. It should be noted that, for the convenience of description, Figure 1 The probe element 110 and the probe element 120 are used as examples, but the present invention is not limited thereto. In some embodiments, the ultrasound probe may be composed solely of a plurality of probe elements 110 (e.g., 128 or more), solely of a plurality of probe elements 120 (e.g., 128 or more), solely of a plurality of other types of probe elements (e.g., 128 or more), or any combination of the aforementioned plurality of probe elements (e.g., probe elements 110, probe elements 120, or other probe elements) (e.g., 128 or more).

[0025] Probe element 110 and probe 120 are coupled to system 130 to receive voltage provided by system 130, convert it into ultrasonic waves, and transmit them. They also receive reflected ultrasonic waves and convert them into electrical energy signals, which are then transmitted back to system 130. The structure of probe element 110 may include an impedance matching layer 111, an electrode 112, a piezoelectric layer 113, an electrode 114, a backing layer 115, a vacuum chamber 116, and a housing 117. The structure of probe element 120 may include an electrode 122, a piezoelectric layer 123, an electrode 124, a substrate 125, a vacuum chamber 126, a housing 127, and a silicon dioxide layer 128. It will be appreciated that when an ultrasonic probe includes multiple probe elements 110, the layers within these probe elements 110 may be non-uniform in material, resulting in a discrepancy between the electrical energy signal transmitted back to system 130 and the expected value. Similarly, when the ultrasound probe includes multiple probe elements 120, the same reason may cause the electric energy signal transmitted back to the system 130 to differ from the preset value that should be received. Or when the ultrasound probe includes multiple probe elements 110 and multiple probe elements 120 at the same time, due to the different structures of the two, the electric energy signal transmitted back to the system 130 differs from the preset value that should be received. This difference will cause unevenness in the overall ultrasound imaging and may lead to errors in image interpretation. The compensation circuit provided in the present disclosure can provide a compensation voltage between the system and the probe elements to adjust the electric energy signals transmitted back by these probe elements with different structures or uneven materials to meet the preset values, thereby improving the quality of the overall ultrasound image. The following will refer to Figures 2 to 4 Detailed description.

[0026] Figure 2 FIG2 shows a functional block diagram of an ultrasonic sensor device 200 according to various embodiments of the present disclosure. The ultrasonic sensor device 200 includes an ultrasonic probe 210, a system 230, and a compensation module 240. The ultrasonic probe 210 includes a probe element 211a, a probe element 211b, and a probe element 211c. Figure 2 The ultrasonic probe 210 includes three probe elements as an example, but the present disclosure is not limited thereto. In various embodiments, the probe element 211a, the probe element 211b and the probe element 211c may correspond to the following references: Figure 1The compensation module 240 includes compensation circuits 241a, 241b, and 241c, which are coupled to the probe elements 211a, 211b, and 211c, respectively. The system 230 includes channels 231a, 231b, and 231c, which are coupled to the compensation circuits 241a, 241b, and 241c, respectively. The system 230 also includes a control terminal 232, which is coupled to the compensation circuits 241a, 241b, and 241c and provides a control signal CS to the compensation circuits 241a, 241b, and 241c.

[0027] Reference Figure 2 As shown, the ultrasonic sensor device 200 includes an ultrasonic probe 210, a plurality of compensation circuits 241a, 241b, 241c, and a system 230. The ultrasonic probe 210 includes a plurality of probe elements 211a, 211b, 211c. Each of the plurality of probe elements 211a, 211b, 211c is used to convert a received voltage TX into an ultrasonic wave and transmit it, and to receive a reflected ultrasonic wave and convert it into an electric energy signal RX. The plurality of compensation circuits 241a, 241b, 241c 241b, 241c are coupled to the plurality of probe elements 211a, 211b, 211c respectively; the system 230 is coupled to the plurality of compensation circuits 241a, 241b, 241c, and the system 230 provides a corresponding voltage TX to each of the plurality of probe elements 211a, 211b, 211c through each of the plurality of compensation circuits 241a, 241b, 241c, and receives a corresponding voltage TX from the plurality of probe elements 211a, 211b, 211c through the plurality of compensation circuits 241a, 241b, 241c. Each of the plurality of probe elements 211a, 211b, and 211c receives an electrical energy signal RX. The system 230 compares the electrical energy signal RX returned by each of the plurality of probe elements 211a, 211b, and 211c with an expected value, generates a comparison result, and provides a control signal CS to a corresponding compensation circuit 211a in the plurality of compensation circuits 241a, 241b, and 241c based on the comparison result. The compensation circuit 211a provides at least one compensation voltage based on the control signal CS to adjust the voltage TX transmitted to the corresponding probe element 211a, 211b, and 211c, thereby correspondingly adjusting the plurality of electrical energy signals RX returned by the plurality of probe elements 211a, 211b, and 211c to the system 230. This solves the problem of the returned electrical energy signal being affected by natural attenuation, inconsistent materials or structures of the layers in the probe elements, or other unexpected factors, thereby improving the overall image quality provided by the ultrasound probe.

[0028] Next, channel 231a, compensation circuit 241a, and probe element 211a will be used as an example. Other similar components can similarly perform the functions described below. System 130 / 230 provides voltage TX to probe element 211a via compensation circuit 241a through channel 231a. Probe element 211a converts voltage TX to generate ultrasonic waves that are transmitted to the object being measured. Probe element 211a then receives the ultrasonic waves reflected by the object being measured, converts them into an electrical energy signal RX, and transmits them back to system 130 / 230 via channel 231a. When system 130 / 230 receives electrical energy signal RX, it compares the electrical energy signal RX returned by probe element 211a with an expected value and generates a comparison result. The expected value can be a predetermined strength (e.g., voltage or current) of the electrical energy signal corresponding to the probe element within the system. For example, it can be the strength of the electrical energy signal required to produce a corresponding image brightness. In other words, based on the comparison results, the system can determine whether the received power signal strength is sufficient to produce an image with the corresponding brightness. To achieve this, the system then provides a control signal CS to the compensation circuit 241a based on the comparison result. Based on the control signal CS, the compensation circuit 241a provides a compensation voltage to adjust the voltage TX transmitted to the probe element 211a to voltage TX'. Because the voltage received by the probe element 211a is voltage TX', the power signal RX transmitted back from the probe element 211a to the system 130 / 230 is adjusted accordingly to the change in voltage TX', ensuring that the power signal RX meets the expected value.

[0029] In some embodiments, when the system 130 / 230 finds that the power signal RX is smaller than the expected value, the system 130 / 230 increases the control signal CS, and the compensation circuit 211a makes the voltage TX' greater than the voltage TX according to the control signal CS. In some embodiments, when the system 130 / 230 finds that the power signal RX is larger than the expected value, the system 130 / 230 decreases the control signal CS, and the compensation circuit 211a makes the voltage TX' less than the voltage TX according to the control signal CS. The operation of the compensation circuit in accordance with the control signal in various embodiments of the present disclosure to adjust the voltage provided to the probe element will be described below with reference to FIG. Figure 3 and Figure 4 Detailed description.

[0030] Figure 3 FIG. 1 is a circuit diagram illustrating an exemplary compensation circuit 341 of an ultrasonic sensor device according to various embodiments of the present disclosure. Figure 3 In the example, the voltage provided will be described as an AC voltage. The compensation circuit 341 (for example Figure 2The compensation circuit 241a, compensation circuit 241b or compensation circuit 241c in the embodiment includes a peak detector 342, a comparator 343 and an adjustment circuit 344. The peak detector 342 is used to detect the peak value of the AC voltage ac1 provided by the system 330. The comparator 343 is coupled to the peak detector 342 and the system 330, and is used to compare the control signal CS provided by the system 330 with the peak value of the AC voltage ac1 detected by the peak detector 342. The adjustment circuit 344 is coupled to the comparator 343 and the corresponding probe element (at Figure 3 Not shown, for example Figure 1 Probe element 110, probe element 120, or Figure 2 The adjustment circuit 344 provides a compensation AC voltage according to the control signal CS to adjust the AC voltage ac1 to ac1'. In this example, the adjustment circuit 344 can be a variable gain amplifier (VGA) corresponding to the AC voltage. Figure 3 As shown in the figure, the peak detector 342, the comparator 343 and the adjustment circuit 344 can be composed of a variety of different electronic components. The number and connection method of these electronic components are only for illustration and do not constitute a limitation to the present disclosure. The number and connection method of different electronic components that can achieve similar functions are all in line with the technology proposed in the present disclosure.

[0031] Figure 4 FIG. 4 is a circuit diagram illustrating another exemplary compensation circuit 441 of an ultrasonic sensor device according to various embodiments of the present disclosure. Figure 3 ,At Figure 4 The voltages provided in the examples are DC voltages. Figure 3 The compensation circuit 341, the compensation circuit 441 (for example Figure 2 The compensation circuit 241a, compensation circuit 241b or compensation circuit 241c in the embodiment includes a peak detector 442, a comparator 443 and an adjustment circuit 444. The peak detector 442 is used to detect the peak value of the DC voltage Vb1 provided by the system 430. The comparator 443 is coupled to the peak detector 442 and the system 430, and is used to compare the control signal CS provided by the system 430 with the peak value of the DC voltage Vb1 detected by the peak detector 442. The adjustment circuit 444 is coupled to the comparator 443 and the corresponding probe element (at Figure 4 Not shown, for example Figure 1 Probe element 110, probe element 120, or Figure 2The adjustment circuit 444 provides a compensation DC voltage according to the control signal CS to adjust the DC voltage Vb1 to Vb1'. In this example, the adjustment circuit 444 can be a voltage doubling circuit corresponding to the AC voltage. Figure 3 ,like Figure 4 As shown in the figure, the peak detector 442, the comparator 443 and the adjustment circuit 444 can be composed of a variety of different electronic components. The number and connection method of these electronic components are only for illustration and do not constitute a limitation to the present disclosure. The number and connection method of different electronic components that can achieve similar functions are all in line with the technology proposed in the present disclosure.

[0032] Figure 5 A flow chart of a process 500 of an operation method for an ultrasonic sensor device according to various embodiments of the present disclosure is shown. In step S501, an ultrasonic sensor device (e.g., Figure 1 and Figure 2 The ultrasonic sensor device 100 or the ultrasonic sensor device 200 in the system (such as the system in the above figures) is compared with each ultrasonic probe element of the ultrasonic sensor device (such as Figure 2 The electrical energy signal returned by the probe element 211a, the probe element 211b or the probe element 211c in Figure 2 The electric energy signal RX) in the circuit is equal to the expected value and a comparison result is generated.

[0033] In step S502, the system provides a control signal (e.g., a control signal at the corresponding compensation circuit of the ultrasonic sensor device) (e.g., the compensation circuit in the above figures) according to the comparison result. Figures 2 to 4 The control signal CS in .

[0034] In step S503, the compensation circuit provides at least one compensation voltage according to the control signal to adjust the voltage transmitted to the corresponding probe element (for example, Figure 2 、 Figure 3 and Figure 4 The voltage TX', AC voltage ac1' or DC voltage Vb1') is used to adjust the power signal sent back to the system by the probe element.

[0035] Similar to the above discussion, in some embodiments, the steps may further include: using each compensation circuit peak detector (for example, Figure 3 and Figure 4 The peak detector 342 or the peak detector 442 in the compensation circuit detects the peak value of the voltage; Figure 3 and Figure 4The comparator 343 or the comparator 443 in the system compares the control signal and the voltage provided by the system; by the adjustment circuit of each compensation circuit (for example, respectively Figure 3 and Figure 4 The adjustment circuit 344 or the adjustment circuit 444 in FIG. 1 provides a compensation voltage according to the control signal to adjust the voltage accordingly. Through the above steps, the power signal transmitted back to the system by each probe element can be adjusted to the expected value.

[0036] In summary, the present invention provides an ultrasonic sensor device and operating method thereof. The ultrasonic sensor device includes an ultrasonic probe, multiple compensation circuits, and a system. The ultrasonic probe includes multiple probe elements; multiple compensation circuits are respectively coupled to the multiple probe elements; and a system is coupled to the multiple compensation circuits. The system compares the electrical energy signals returned by each of the multiple probe elements with expected values, generates comparison results, and provides corresponding compensation circuit control signals to the multiple compensation circuits based on the comparison results. The compensation circuits provide at least one compensation voltage based on the control signals to adjust the voltages transmitted to corresponding probe elements in the multiple probe elements, thereby correspondingly adjusting the multiple electrical energy signals transmitted to the system from the multiple probe elements. By comparing a preset value with the electrical energy signals returned by each probe element, the system provides control signals to the compensation circuits as a basis for adjusting the voltages supplied to each probe element. This solves the problem of the returned electrical energy signals being affected by natural attenuation, inconsistent materials or structures between layers in the probe elements, or other unexpected factors, thereby improving the overall image quality provided by the ultrasonic probe.

[0037] Although the present invention is described in conjunction with the accompanying drawings, the embodiments disclosed in the drawings are intended to illustrate preferred embodiments of the present invention and should not be construed as limiting the present invention. For the purpose of clearly describing the required components, the proportions in the schematic drawings do not represent the proportional relationships of the actual components.

[0038] The present invention has been described with reference to the above embodiments. However, the above embodiments are merely exemplary embodiments of the present invention. It should be noted that the disclosed embodiments do not limit the scope of the present invention. On the contrary, modifications and improvements that do not depart from the spirit and scope of the present invention are intended to be protected by the present invention.

Claims

1. An ultrasonic sensor device, characterized in that: include: An ultrasonic probe comprising a plurality of probe elements, each of which is used to convert a received voltage into ultrasonic waves and transmit the ultrasonic waves, and to receive reflected ultrasonic waves and convert the reflected ultrasonic waves into electrical energy signals; a plurality of compensation circuits, respectively coupled to the plurality of probe elements; as well as a system coupled to the plurality of compensation circuits, the system providing the corresponding voltage to each of the plurality of probe elements through each of the plurality of compensation circuits, and receiving the power signal from each of the plurality of probe elements through the plurality of compensation circuits; The system is configured to compare the electrical energy signals returned by each of the plurality of probe elements with an expected value, generate a comparison result, and provide a corresponding compensation circuit control signal to the plurality of compensation circuits based on the comparison result. The compensation circuit provides at least one compensation voltage based on the control signal to adjust the voltage transmitted to the corresponding probe element among the plurality of probe elements, thereby correspondingly adjusting the plurality of electrical energy signals returned by the plurality of probe elements to the system.

2. The ultrasonic sensor device according to claim 1, wherein: If the comparison result shows that the electric energy signal is less than the expected value, the control signal is increased, and the compensation voltage is correspondingly increased; If the comparison result shows that the electric energy signal is greater than the expected value, the control signal is reduced, and the compensation voltage is correspondingly reduced.

3. The ultrasonic sensor device according to claim 1, wherein: The plurality of probe elements have a plurality of structures, and the plurality of structures enable each of the plurality of probe elements to have a different expected value; The corresponding compensation voltages adjust the voltages received by the corresponding probe elements with the various structures, so as to adjust the electrical energy signals returned by the corresponding probe elements with the various structures to conform to the different expected values.

4. The ultrasonic sensor device according to claim 1, wherein: Each of the plurality of compensation circuits comprises: A peak detector is used to detect the peak value of the voltage; a comparator coupled to the peak detector and the system, the comparator being configured to compare the control signal provided by the system with the voltage; and The adjustment circuit is coupled to the comparator and a corresponding one of the plurality of probe elements, and is used for providing the compensation voltage according to the control signal.

5. The ultrasonic sensor device according to claim 4, wherein: The voltage is an AC voltage, the peak detector is used to detect the peak value of the AC voltage, and the comparator compares the control signal with the peak value of the AC voltage; The adjustment circuit is a variable gain amplifier. The compensation voltage provided by the variable gain amplifier according to the control signal is a compensation AC voltage, so as to adjust the AC voltage.

6. The ultrasonic sensor device according to claim 4, wherein: The voltage is a DC voltage, the peak detector is used to detect the peak value of the DC voltage, and the comparator compares the control signal with the peak value of the DC voltage; The adjustment circuit is a voltage doubling circuit. The compensation voltage provided by the voltage doubling circuit according to the control signal is a compensated DC voltage to adjust the DC voltage.

7. A method for operating an acoustic wave sensor device, characterized in that: include: Comparing the electrical energy signals returned by each of the plurality of ultrasonic probe elements of the ultrasonic sensor device with an expected value by the system of the ultrasonic sensor device, and generating a comparison result; The system provides a corresponding compensation circuit control signal to a plurality of compensation circuits of the ultrasonic sensor device according to the comparison result; as well as The compensation circuit provides at least one compensation voltage according to the control signal to adjust the voltage transmitted to the corresponding probe element among the plurality of probe elements, so as to respectively adjust the plurality of electrical energy signals transmitted back to the system by the probe elements.

8. The method for operating the acoustic wave sensor device according to claim 7, wherein: If the comparison result shows that the electric energy signal is less than the expected value, the control signal is increased, and the compensation voltage is correspondingly increased; If the comparison result shows that the electric energy signal is greater than the expected value, the control signal is reduced, and the compensation voltage is correspondingly reduced.

9. The operating method for an acoustic wave sensor device according to claim 7, wherein: The plurality of probe elements have a plurality of structures, and the plurality of structures enable each of the plurality of probe elements to have a different expected value; The corresponding compensation voltages adjust the voltages received by the corresponding probe elements with the various structures, so as to adjust the electrical energy signals returned by the corresponding probe elements with the various structures to conform to the different expected values.

10. The operating method for an acoustic wave sensor device according to claim 7, wherein: detecting a peak value of the voltage by a peak detector of each of the plurality of compensation circuits; wherein the control signal provided by the system is compared with the peak value of the voltage by means of a comparator of each of the plurality of compensation circuits; The adjustment circuit of each of the plurality of compensation circuits provides the compensation voltage according to the control signal to adjust the voltage accordingly.

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