Rotary magnetic particle grinding device and method for fine grooves

By using a rotating magnetic particle grinding device and method, magnetic abrasive particles are used to perform multi-degree-of-freedom motion under an alternating electromagnetic field, which solves the problems of high surface roughness and many burrs in fine grooves, and realizes efficient and stable automated finishing processing, which is suitable for aerospace, precision optics and microelectronic devices.

CN120715792APending Publication Date: 2025-09-30UNIV OF SCI & TECH LIAONING +1
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Patent Information

Application Number
CN202511012013.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-07-22
Publication Date
2025-09-30

AI Technical Summary

Technical Problem

Traditional mechanical grinding tools have difficulty in effectively processing micro grooves, resulting in high surface roughness and many burrs. Manual operations also have problems such as poor consistency, low efficiency, and dust pollution, and cannot meet the quality requirements of aerospace, precision optics, and microelectronic devices.

Method used

A rotating magnetic particle grinding device is used, and magnetic abrasive particles form a multi-degree-of-freedom composite motion with the workpiece to be processed under the action of an alternating rotating electromagnetic field to achieve non-contact grinding. Magnetic abrasive particles of different particle sizes are combined for coarse and fine grinding, and a flow pump is used to drip out the grinding fluid to reduce cutting heat.

Benefits of technology

The surface roughness of the micro-grooves is improved by more than 2 levels, burrs are removed, and efficient and stable automated finishing processing is achieved to meet engineering application requirements and solve the technical bottleneck of micro-nanoscale burrs and surface integrity control.

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Abstract

The invention relates to the technical field of magnetic grinding, and provides a rotary magnetic particle grinding device and method for a micro groove, and the device comprises a magnetic pole and a magnetic pole clamp; the motor is used for driving the magnetic pole clamps and the magnetic poles to rotate; the workpiece clamp is used for clamping and fixing a to-be-machined precision part; the sliding table is provided with the workpiece clamp and drives the workpiece clamp and the precision part to be machined to reciprocate in the Z-axis direction; magnetic abrasive particles are attached to the magnetic pole, the magnetic pole is driven by the motor to rotate, the dynamic magnetic line penetrating effect of an alternating rotating electromagnetic field is formed, and the precise part to be machined is driven by the sliding table to move so that an area to be machined on the precise part to be machined can be matched with the magnetic pole. And the magnetic abrasive particles form multi-degree-of-freedom composite motion in the machining area of the to-be-machined precision part, so that the magnetic abrasive particles and the machining area of the to-be-machined precision part generate relative motion to form sliding friction, and polishing and deburring of the surface of the to-be-machined precision part are achieved. According to the invention, precise polishing of micron-level surface roughness can be realized.
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Description

Technical Field

[0001] The present invention relates to the field of magnetic grinding technology, and in particular to a rotating magnetic particle grinding device and method for fine grooves. Background Art

[0002] The core technical challenges currently faced in machining precision parts with microgrooves lie in three key areas: machining accessibility, surface quality control, and process stability. Because microgrooves typically have submillimeter feature sizes, traditional mechanical grinding tools are limited by tool size effects and mechanical interference, making it difficult to effectively machine the groove walls, bottoms, and step transition areas. This is particularly true within high-aspect-ratio microstructures, where unmachined residual bands are common, often exceeding Ra 0.8μm in surface roughness.

[0003] Process defects generated during front-end machining primarily manifest in two categories: micron-scale burrs (typically 5-20μm in height) concentrated on the edges of the grooves, and residual machining texture and a plastic deformation layer at the bottom of the grooves. These surface integrity defects can significantly impact the service performance of parts, causing lamination instability in fluid components, increasing scattering losses in optical devices, and accelerating contact fatigue failure in transmission components.

[0004] Currently, the post-processing process for fine grooves is still mainly manual, and this processing method has obvious technical limitations. First, process consistency is difficult to ensure, and the surface roughness fluctuation between batches can reach more than 15%; second, processing efficiency is low, and the processing time for a single piece usually exceeds 12 minutes; third, human factors lead to serious degradation of edge sharpness, and the deviation of the transition zone fillet radius generally exceeds 10%. In addition, the problem of dust pollution in the manual operation environment also seriously restricts the sustainable development of the process. This current technical status quo can no longer meet the increasingly high quality requirements for micro-structured parts in fields such as aerospace, precision optics, and microelectronics. Summary of the Invention

[0005] The present invention aims to solve at least one technical problem in the background art and provide a rotating magnetic particle grinding device and method for fine grooves.

[0006] To achieve the above-mentioned object, the present invention provides a rotating magnetic particle grinding device for fine grooves, comprising: magnetic pole; A magnetic pole clamp, used for clamping and fixing the magnetic pole; a motor, used for driving the magnetic pole fixture and the magnetic pole to rotate; Workpiece fixture, used to clamp and fix the precision parts to be processed; The slide is installed with the workpiece fixture, driving the workpiece fixture and the precision parts to be processed to move back and forth along the Z-axis direction; Magnetic abrasive particles are attached to the magnetic poles, which are driven to rotate by the motor to form a dynamic magnetic field penetration effect of the alternating rotating electromagnetic field. The precision parts to be processed are driven to move by the slide so that the area to be processed on the precision parts to be processed cooperates with the magnetic poles. The magnetic abrasive particles form a multi-degree-of-freedom composite motion in the processing area of ​​the precision parts to be processed, so that the magnetic abrasive particles and the processing area of ​​the precision parts to be processed produce relative motion and form friction, thereby achieving polishing of the surface of the precision parts to be processed and deburring.

[0007] According to one aspect of the present invention, the magnetic poles include X-axis magnetic poles and Y-axis magnetic poles, and the X-axis magnetic poles and the Y-axis magnetic poles are respectively clamped and driven to rotate by corresponding magnetic pole clamps and motors, thereby realizing simultaneous grinding of precision parts in the X-axis and Y-axis directions.

[0008] According to one aspect of the present invention, the magnetic abrasive grains contain a ferromagnetic phase.

[0009] To achieve the above object, the present invention further provides a method for grinding fine grooves using rotating magnetic particles, comprising: Attach magnetic abrasive particles to the magnetic pole, clamp the magnetic pole with a magnetic pole fixture, install the magnetic pole fixture on a three-jaw chuck, and drive the magnetic pole to rotate through a motor; Clamp the precision parts to be processed on the workpiece fixture, install the workpiece fixture on the slide, and drive the workpiece fixture and the precision parts to be processed to move back and forth along the Z axis through the slide; Measure the distance between the magnetic pole and the precision part to be processed, determine whether the precision part to be processed can be ground by the magnetic abrasive when feeding, and set the grinding and cutting pressure; The motor drives the magnetic poles to rotate, forming a dynamic magnetic field penetration effect of the alternating rotating electromagnetic field; The slide drives the precision parts to be processed to be ground and fed along the Z-axis direction, so that the area to be processed on the precision parts to be processed cooperates with the magnetic poles, and the magnetic abrasive particles form a multi-degree-of-freedom composite motion in the processing area of ​​the precision parts to be processed, so that the magnetic abrasive particles and the processing area of ​​the precision parts to be processed produce relative motion and form sliding friction, thereby achieving polishing of the surface of the precision parts to be processed and deburring.

[0010] According to one aspect of the present invention, the magnetic poles include X-axis magnetic poles and Y-axis magnetic poles, and the X-axis magnetic poles and the Y-axis magnetic poles are respectively clamped by corresponding magnetic pole clamps, and then the X-axis magnetic poles and the Y-axis magnetic poles are respectively driven to rotate by corresponding motors, and the magnetic abrasives on the X-axis magnetic poles and the Y-axis magnetic poles are used to grind the precision parts to be processed in the X and Y directions at the same time.

[0011] According to one aspect of the present invention, when grinding the surface of a precision part to be machined, the precision part to be machined is firstly rough ground by magnetic abrasive particles, and then fine ground by magnetic abrasive particles.

[0012] According to one aspect of the present invention, when grinding the surface of a precision part to be processed, magnetic abrasive particles with an average particle size of 120 μm are first used to grind the surface of the precision part to be processed for 10 minutes, and then magnetic abrasive particles with an average particle size of 160 μm are used to grind and polish the surface of the precision part to be processed.

[0013] According to one aspect of the present invention, it also includes: when the magnetic pole drives the magnetic abrasive particles to approach the precision part to be processed to a preset distance, the flow pump is turned on to continuously drip the grinding fluid onto the precision part to be processed until the grinding of the workpiece is completed.

[0014] According to the solution of the present invention, the homemade cylindrical magnetic pole is clamped on the three-jaw chuck through the magnetic pole clamp. The magnetic abrasive contains ferromagnetic phase and can be adsorbed on the magnetic pole. Under the action of the magnetic field force of the magnetic pole, a magnetic particle brush is formed along the direction of the magnetic force line. The position of the magnetic pole is adjusted to be close to the precision part to be processed, leaving a certain processing gap. The magnetic particle brush can be pressed onto the groove structure of the precision part to be processed. As the motor spindle rotates, relative movement is generated between the magnetic abrasive and the precision part to be processed, which will scratch and grind the grooves and other structures on the precision part to be processed, remove a small amount of material in the groove of the precision part to be processed, remove burrs, and dilute the pit texture. At the same time, the grinding fluid dripping from the flow pump reduces the cutting heat, improves the surface quality, and completes the finishing process.

[0015] According to the present invention, the surface roughness of precision parts after grinding and finishing can be improved by more than two levels, with a high surface burr removal rate. The grinding efficiency is high, the quality is stable, and the functional and key performance indicators meet the requirements. The feasibility and practicality of engineering applications have been verified, achieving the expected goals. The invention solves the bottleneck problem of precision finishing of micro-grooves, realizes the requirements of automated and mechanized finishing, and achieves the expected results.

[0016] According to the aforementioned solution of the present invention, the present invention addresses the need for burr removal and surface finishing of the bottom, sidewalls, and ridges of micro-scale cavities and grooves by employing non-contact magnetic abrasive grinding technology, breaking through the limitations of traditional machining. Through the penetrating properties of a high-gradient rotating magnetic field, a group of magnetic abrasive particles is driven to form a grinding track within the machining area, creating a microscopic sliding action between the abrasive particles and the workpiece surface, thereby achieving precision polishing to micron-scale surface roughness. This invention is particularly suitable for the precision machining of hidden areas difficult to reach with traditional tools, such as micro-grooves and microporous structures with aspect ratios greater than 5:1, thereby resolving the technical bottleneck of micro- and nano-scale burr and surface integrity control. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic diagram showing the principle of magnetic particle milling of a rotary magnetic particle milling device for fine grooves according to one embodiment of the present invention; Figure 2 A top view schematically showing the structural arrangement of a rotary magnetic particle grinding device for fine grooves according to one embodiment of the present invention; Figure 3 A front view schematically showing the structural arrangement of a rotary magnetic particle grinding device for fine grooves according to one embodiment of the present invention; Figure 4 Schematic representation Figure 3 A magnified view of the grinding position of the precision parts to be processed; Figure 5 A side view schematically showing the structural arrangement of a rotary magnetic particle grinding device for fine grooves according to one embodiment of the present invention; Figure 6 Schematically represents the cross-section of the raw data of the observation points on the precision part to be processed; Figure 7 Schematic representation of the data cross-section of the observation point on the precision part to be machined after grinding; Figure 8 Schematic representation of the micro-groove surface texture of the precision part to be machined before grinding; Figure 9 Schematic representation of the micro-groove surface texture of the precision part to be machined after grinding. DETAILED DESCRIPTION

[0018] The present invention will now be discussed with reference to exemplary embodiments. It should be understood that the embodiments discussed are only intended to enable those skilled in the art to better understand and implement the present invention, rather than to imply any limitation on the scope of the present invention.

[0019] As used herein, the term "including" and variations thereof are to be interpreted as open-ended terms meaning "including, but not limited to." The term "based on" is to be interpreted as "based, at least in part, on." The terms "one embodiment" and "an embodiment" are to be interpreted as "at least one embodiment."

[0020] Figure 1 A schematic diagram showing the principle of magnetic particle milling of a rotary magnetic particle milling device for fine grooves according to one embodiment of the present invention; Figure 2 A top view schematically showing the structural arrangement of a rotary magnetic particle grinding device for fine grooves according to one embodiment of the present invention; Figure 3 A front view schematically showing the structural arrangement of a rotary magnetic particle grinding device for fine grooves according to one embodiment of the present invention; Figure 4 Schematic representation Figure 3 A magnified view of the grinding position of the precision parts to be processed; Figure 5 Schematically shows a side view of the structural arrangement of a rotating magnetic particle grinding device for fine grooves according to an embodiment of the present invention. Figure 1-Figure 5 As shown, in this embodiment, the rotary magnetic particle grinding device for fine grooves includes: Magnetic pole 1; A magnetic pole clamp 2, used for clamping and fixing the magnetic pole 1; The motor 3 drives the three-jaw chuck 5 and the magnetic pole fixture 2 and magnetic pole 1 mounted on the three-jaw chuck to rotate through the output shaft and the synchronous pulley 4; A workpiece fixture 6 is used to clamp and fix the precision part 7 to be processed; The slide 8 is installed with the workpiece fixture 6, which drives the workpiece fixture 6 and the precision part to be processed 7 to move back and forth along the Z axis; Magnetic abrasive particles 9 are attached to the magnetic pole 1, which is driven to rotate by the motor 3 to form a dynamic magnetic field penetration effect of the alternating rotating electromagnetic field. The precision part 7 to be processed is driven to move by the slide 8 so that the area to be processed on the precision part 7 to be processed cooperates with the rotating magnetic pole 1. The magnetic abrasive particles form a multi-degree-of-freedom composite motion in the processing area of ​​the precision part to be processed, causing the magnetic abrasive particles and the processing area of ​​the precision part to be processed to produce relative motion and form friction, thereby achieving polishing of the surface of the precision part to be processed (materials such as titanium alloy and high-temperature alloy) and deburring.

[0021] Furthermore, if Figure 2 、 Figure 3 and Figure 5 As shown, in this embodiment, the magnetic poles include X-axis magnetic poles and Y-axis magnetic poles, which are clamped and driven to rotate by corresponding magnetic pole clamps and motors respectively, so as to realize simultaneous grinding of precision parts in the X-axis and Y-axis directions.

[0022] Furthermore, in this embodiment, the magnetic abrasive grains contain a ferromagnetic phase.

[0023] According to the above solution of the present invention, the principle of magnetic abrasive grinding is as follows: Figure 1As shown, the homemade cylindrical pole is clamped on the three-jaw chuck through the pole clamp. The magnetic abrasive contains ferromagnetic phase and can be adsorbed on the pole. Under the action of the magnetic field force of the pole, a magnetic brush is formed along the direction of the magnetic line of force. The position of the pole is adjusted to be close to the precision part to be processed, leaving a certain processing gap. The magnetic brush can be pressed onto the groove structure of the precision part to be processed. As the motor spindle rotates, relative movement occurs between the magnetic abrasive and the precision part to be processed, which will scratch and grind the grooves and other structures on the precision part to be processed, remove a small amount of material in the groove of the precision part to be processed, remove burrs, and dilute the pit texture. At the same time, the grinding fluid dripping from the flow pump tube 10 reduces the cutting heat, improves the surface quality, and completes the finishing process.

[0024] Furthermore, in order to achieve the above-mentioned purpose, the present invention also provides a method for grinding fine grooves with rotating magnetic particles, Figure 1-Figure 5 Shown, including: Attach magnetic abrasive particles 9 to the magnetic pole 1, clamp the magnetic pole 1 with a magnetic pole clamp 2, install the magnetic pole clamp 2 on a three-jaw chuck connected to the output shaft of the motor, and drive the magnetic pole 1 to rotate through the motor 3; Clamp the precision part 7 to be processed on the workpiece fixture 6, install the workpiece fixture 6 on the slide 8, and drive the workpiece fixture 6 and the precision part 7 to be processed to move back and forth along the Z axis direction through the slide 8; Measure the distance between the magnetic pole 1 and the precision part 7 to be processed, determine whether the precision part 7 to be processed can be ground by the magnetic abrasive particles when feeding, and set the grinding and cutting pressure; The motor 3 drives the magnetic pole 1 to rotate, forming a dynamic magnetic field penetration effect of the alternating rotating electromagnetic field; The slide drives the precision part 7 to be processed to be ground and fed along the Z-axis direction, so that the area to be processed on the precision part 7 is coordinated with the magnetic pole 1, and the magnetic abrasive particles form a multi-degree-of-freedom composite motion in the processing area of ​​the precision part to be processed, so that the magnetic abrasive particles 9 and the processing area of ​​the precision part 7 to be processed produce relative motion and form sliding friction, thereby achieving polishing of the surface of the precision part to be processed and deburring.

[0025] Furthermore, in this embodiment, the magnetic poles include X-axis magnetic poles and Y-axis magnetic poles, which are respectively clamped by corresponding magnetic pole clamps, and then driven to rotate by corresponding motors, respectively, so that the precision parts to be processed are ground in the X and Y directions at the same time by the magnetic abrasives on the X-axis magnetic poles and the Y-axis magnetic poles.

[0026] Furthermore, according to one embodiment of the present invention, when grinding the surface of the precision part to be processed, the precision part to be processed is firstly rough ground by magnetic abrasive particles, and then fine ground by magnetic abrasive particles.

[0027] Furthermore, in this embodiment, when grinding the surface of the precision part to be processed, the surface of the precision part to be processed is first ground for 10 minutes using magnetic abrasive particles with an average particle size of 120 μm, and then ground and polished using magnetic abrasive particles with an average particle size of 160 μm.

[0028] Furthermore, according to one embodiment of the present invention, the rotating magnetic particle grinding method for fine grooves of the present invention also includes: when the magnetic pole drives the magnetic abrasive particles close to the precision parts to be processed to a preset distance, the flow pump tube is opened to continuously drip the grinding liquid onto the precision parts to be processed until the grinding of the workpiece is completed.

[0029] According to the above scheme of the present invention, when the specified grinding time is reached, the device of the present invention stops rotating, slowly withdraws the magnetic pole, removes the precision parts after grinding, cleans and blows them dry, observes and takes photos of the grinding area with an ultra-depth of field 3D microscope, and records the experimental results.

[0030] like Figure 6 and Figure 7 As shown in the figure, after 30 minutes of grinding using the device of the present invention, the width of the fine groove (the average value of 20 points) changes from the original Ra0.1613μm to Ra0.0459μm. Comparing the surface texture of the fine groove with that before polishing, it can be seen that the machining marks left after mechanical polishing have been significantly removed.

[0031] like Figure 8 As shown in Figure 9, the surface of the micro-grooves before grinding exhibited distinct machining textures, with numerous grooves and burrs, resulting in a rough, uneven surface. The unmachined surface of the grooves was first ground for 10 minutes using magnetic abrasive particles with an average particle size of 120 μm to remove the larger grooves. Fine grinding was then performed using magnetic abrasive particles with an average particle size of 160 μm. This reduced grinding time, improved grinding efficiency, and enhanced grinding quality. The surface morphology of the micro-grooves after 13 minutes of grinding using small-particle abrasive particles is shown in Figure 9. It can be seen that after grinding, the micro-grooves had a smooth, uniform surface texture, and the original machining texture was effectively removed.

[0032] Through testing, the present invention's solution can improve the surface roughness of precision parts after grinding and finishing by more than two levels, achieving a high surface burr removal rate. It achieves high grinding efficiency, stable quality, and meets the required functional and key performance indicators. Its feasibility and practicality in engineering applications have been verified, achieving the desired objectives. It also resolves the bottleneck issue of precision finishing of micro-grooves, realizes the requirements of automated and mechanized finishing, and achieves the desired results.

[0033] The entire grinding process will not have a serious impact on the original sharp angles of the edges; an ultrasonic cleaner is used to clean oil and other impurities before and after processing, and finally demagnetization is performed.

[0034] According to the aforementioned solution of the present invention, the present invention addresses the need for burr removal and surface finishing of the bottom, sidewalls, and ridges of micro-scale cavities and grooves by employing non-contact magnetic abrasive grinding technology, breaking through the limitations of traditional machining. Through the penetrating properties of a high-gradient rotating magnetic field, a group of magnetic abrasive particles is driven to form a grinding track within the machining area, creating a microscopic sliding action between the abrasive particles and the workpiece surface, thereby achieving precision polishing to micron-scale surface roughness. This invention is particularly suitable for the precision machining of hidden areas difficult to reach with traditional tools, such as micro-grooves and microporous structures with aspect ratios greater than 5:1, thereby resolving the technical bottleneck of micro- and nano-scale burr and surface integrity control.

[0035] The above description is merely a preferred embodiment of the present application and an illustration of the technical principles employed. Those skilled in the art should understand that the scope of the invention involved in this application is not limited to the technical solutions formed by the specific combination of the above-mentioned technical features, but also encompasses other technical solutions formed by any combination of the above-mentioned technical features or their equivalents without departing from the inventive concept. For example, a technical solution formed by replacing the above-mentioned features with (but not limited to) technical features with similar functions disclosed in this application.

[0036] It should be understood that the size of the serial numbers of each step in the content of the invention and the implementation methods of the present invention does not absolutely mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the implementation methods of the present invention.

Claims

1. A rotary magnetic particle grinding device for fine grooves, characterized in that: include: magnetic pole; A magnetic pole clamp, used for clamping and fixing the magnetic pole; a motor, used for driving the magnetic pole fixture and the magnetic pole to rotate; Workpiece fixture, used to clamp and fix the precision parts to be processed; The slide is installed with the workpiece fixture, driving the workpiece fixture and the precision parts to be processed to move back and forth along the Z-axis direction; Magnetic abrasive particles are attached to the magnetic poles, which are driven to rotate by the motor to form a dynamic magnetic field penetration effect of the alternating rotating electromagnetic field. The precision parts to be processed are driven to move by the slide so that the area to be processed on the precision parts to be processed cooperates with the magnetic poles. The magnetic abrasive particles form a multi-degree-of-freedom composite motion in the processing area of ​​the precision parts to be processed, so that the magnetic abrasive particles and the processing area of ​​the precision parts to be processed produce relative motion and form friction, thereby achieving polishing of the surface of the precision parts to be processed and deburring.

2. The rotary magnetic particle grinding device for fine grooves according to claim 1, characterized in that: The magnetic poles include X-axis magnetic poles and Y-axis magnetic poles, which are clamped and driven to rotate by corresponding magnetic pole clamps and motors respectively, so as to realize simultaneous grinding of precision parts in the X-axis and Y-axis directions.

3. The rotary magnetic particle grinding device for fine grooves according to claim 1 or 2, characterized in that: The magnetic abrasive grains contain a ferromagnetic phase.

4. A method for grinding fine grooves with rotating magnetic particles, characterized in that: include: Attach magnetic abrasive particles to the magnetic pole, clamp the magnetic pole with a magnetic pole fixture, install the magnetic pole fixture on a three-jaw chuck, and drive the magnetic pole to rotate through a motor; Clamp the precision parts to be processed on the workpiece fixture, install the workpiece fixture on the slide, and drive the workpiece fixture and the precision parts to be processed to move back and forth along the Z axis through the slide; Measure the distance between the magnetic pole and the precision part to be processed, determine whether the precision part to be processed can be ground by the magnetic abrasive when feeding, and set the grinding and cutting pressure; The motor drives the magnetic poles to rotate, forming a dynamic magnetic field penetration effect of the alternating rotating electromagnetic field; The slide drives the precision parts to be processed to be ground and fed along the Z-axis direction, so that the area to be processed on the precision parts to be processed cooperates with the magnetic poles, and the magnetic abrasive particles form a multi-degree-of-freedom composite motion in the processing area of ​​the precision parts to be processed, so that the magnetic abrasive particles and the processing area of ​​the precision parts to be processed produce relative motion and form sliding friction, thereby achieving polishing of the surface of the precision parts to be processed and deburring.

5. The rotary magnetic particle grinding method for fine grooves according to claim 4, characterized in that: The magnetic poles include an X-axis magnetic pole and a Y-axis magnetic pole, which are respectively clamped by corresponding magnetic pole fixtures, and then driven to rotate by corresponding motors, respectively. The magnetic abrasive particles on the X-axis magnetic pole and the Y-axis magnetic pole are used to grind the precision parts to be processed in the X and Y directions at the same time.

6. The rotary magnetic particle grinding method for fine grooves according to claim 4, characterized in that: When grinding the surface of the precision parts to be processed, the precision parts to be processed are firstly roughly ground by magnetic abrasive particles, and then finely ground by magnetic abrasive particles.

7. The rotary magnetic particle grinding method for fine grooves according to claim 6, characterized in that: When grinding the surface of the precision parts to be processed, first use magnetic abrasives with an average particle size of 120μm to grind the surface of the precision parts to be processed for 10 minutes, and then use magnetic abrasives with an average particle size of 160μm to grind and polish the surface of the precision parts to be processed.

8. The rotary magnetic particle grinding method for fine grooves according to any one of claims 4 to 7, characterized in that: Also includes: When the magnetic pole drives the magnetic abrasive particles to approach the precision part to be processed to a preset distance, the flow pump is turned on to continuously drip the grinding fluid onto the precision part to be processed until the workpiece is ground.