Device for ultrasonically cleaning quartz tube of tube furnace

Abstract

The invention discloses a device for ultrasonically cleaning a quartz tube of a tube furnace. The device comprises an ultrasonic cleaning pool, a lifting adjusting mechanism is arranged at the upper end of the ultrasonic cleaning pool, a quartz tube cleaning mechanism is arranged in the lifting adjusting mechanism, and a quartz tube fixing structure is arranged in the ultrasonic cleaning pool. According to the device for ultrasonically cleaning the quartz tube of the tube furnace, the quartz tube cleaning mechanism is arranged, after the quartz tube is placed in a quartz tube fixing structure, a cleaning brush extends into the quartz tube, and a sliding sleeve slides on the surface of a driving shaft through extrusion of a contact; the first connecting rod is matched with the second connecting rod to push the clamping frame to extend so that the cleaning brush can be tightly attached to the inner wall of the quartz tube, comprehensive cleaning of the interior of the quartz tube can be achieved in cooperation with driving of the second gear motor, and meanwhile the cleaning effect can be further improved in cooperation with sound production of the ultrasonic generator in the ultrasonic cleaning pool.

Description

Technical Field

[0001] The invention relates to the technical field of quartz tube processing, in particular to a device for ultrasonically cleaning a quartz tube of a tubular furnace. Background Art

[0002] Quartz tubing is a specialized industrial glass tubing material made primarily of silicon dioxide, produced by melting natural crystalline quartz (such as crystal or pure silica) or synthetic silane at high temperatures. It is a fundamental material with excellent physical and chemical properties.

[0003] For example, the Chinese patent publication number (CN109365399A) discloses a device for ultrasonically cleaning the quartz tube of a tubular furnace, which states: "The present invention aims to solve the problems that the quartz tube of the tubular furnace is slender, which makes cleaning time-consuming and labor-intensive. Moreover, since the furnace tube is long and open at both ends, the waste liquid after cleaning is difficult to collect, which poses a safety hazard and may cause harm to the cleaning personnel. The quartz tube is fixed on a cleaning rack, and the top plug and the bottom plug are respectively installed at the openings at the upper and lower ends of the quartz tube. The output end of the ultrasonic generator passes through the top plug and extends below the liquid level of the cleaning liquid in the quartz tube. One end of the water outlet pipe passes through the bottom plug and is connected to the interior of the quartz tube, and the other end of the water outlet pipe is connected to the waste liquid pool. The device for ultrasonically cleaning the quartz tube of a tubular furnace of the present invention can perform closed cleaning of the quartz tube of the tubular furnace and effectively collect the cleaning waste liquid at the same time."

[0004] In summary, the device still has the following technical problems: the above-mentioned device achieves the purpose of cleaning the quartz tube by setting an ultrasonic generating mechanism and the principle of low-frequency vibration, but general ultrasonic cleaning can only clean the dirt accumulated on the surface of the quartz tube, but after the quartz tube is subjected to high temperature, a carbonized layer will appear inside the quartz tube. This carbonized layer is left on the surface of the quartz tube when other materials are heated. Therefore, ultrasonic cleaning alone cannot achieve complete cleaning. For this reason, it is necessary to propose a device for ultrasonically cleaning the quartz tube of a tubular furnace to provide a new technical solution to solve the technical problems mentioned in the above patents. Summary of the Invention

[0005] Based on this, it is necessary to provide a device for ultrasonically cleaning the quartz tube of a tubular furnace to address the above technical problems. By setting up a quartz tube cleaning mechanism, the quartz tube is placed inside the quartz tube fixed structure, and the cleaning brush extends to the inside of the quartz tube. The sliding sleeve is squeezed by the contact to slide on the surface of the drive shaft. The first connecting rod cooperates with the second connecting rod to push the clamping frame to extend so that the cleaning brush is close to the inner wall of the quartz tube. The second reduction motor is driven to achieve comprehensive cleaning of the inside of the quartz tube. At the same time, the ultrasonic generator is used to generate sound inside the ultrasonic cleaning tank, which can further improve the cleaning effect.

[0006] In order to solve the above technical problems, the present invention adopts the following technical solutions: The invention discloses a device for ultrasonically cleaning a quartz tube of a tubular furnace.

[0007] The device for ultrasonically cleaning the quartz tube of the tube furnace specifically includes an ultrasonic cleaning tank, a lifting adjustment mechanism is provided at the upper end of the ultrasonic cleaning tank, a quartz tube cleaning mechanism is provided inside the lifting adjustment mechanism, and a quartz tube fixing structure is provided inside the ultrasonic cleaning tank; The lifting and adjusting mechanism includes two electric telescopic rods fixedly connected to the back of the ultrasonic cleaning tank. The upper end of the ultrasonic cleaning tank is provided with a top frame, and the bottom end of the ultrasonic cleaning tank is fixedly connected to an ultrasonic generator.

[0008] As a preferred embodiment of the device for ultrasonically cleaning quartz tubes in a tubular furnace provided by the present invention, a side support plate is fixedly connected to one side of the top frame, the side support plate is fixedly connected to the output end of the electric telescopic rod, the four corners of the top frame are respectively fixedly connected to connecting seats, the interiors of the connecting seats are respectively fixedly connected to guide rods, and the guide rods are slidably arranged on the front and rear sides of the ultrasonic cleaning tank.

[0009] As a preferred embodiment of the device for ultrasonically cleaning the quartz tube of a tubular furnace provided by the present invention, the quartz tube cleaning mechanism includes two polished rods symmetrically fixedly arranged inside the top frame, a first reduction motor is fixedly connected to the inside of the top frame, the transmission end of the first reduction motor is rotatably connected to a screw rod, the surface of the screw rod is threadedly connected to a movable seat, and the movable seat is slidably connected to the surface of the polished rod.

[0010] As a preferred embodiment of the device for ultrasonically cleaning the quartz tube of a tubular furnace provided by the present invention, the bottom end of the movable seat is fixedly connected to a connecting frame, the top surface of the connecting frame is fixedly connected to a guide frame, a slide groove is provided inside the guide frame, the surface of the screw rod is slidably connected to a bearing block, the bearing block is arranged inside the slide groove, and the bearing block is arranged on the side of the top frame close to the first reduction motor, the bottom end of the bearing block is fixedly connected to a sliding rod, and the sliding rod is slidably arranged on the inner wall of the slide groove.

[0011] As a preferred embodiment of the device for ultrasonically cleaning the quartz tube of a tube furnace provided by the present invention, a sliding rod is slidably connected to the interior of the connecting frame, the connecting frame is L-shaped as a whole, a second reduction motor is fixedly connected to the surface of the short end of the connecting frame, the transmission end of the second reduction motor is rotatably connected to the transmission wheel, the interior of the connecting frame is rotatably connected to the drive shaft, the end of the drive shaft close to the transmission wheel is fixedly connected to the driven wheel, and the driven wheel and the transmission wheel are connected by a belt drive.

[0012] As a preferred embodiment of the device for ultrasonically cleaning the quartz tube of a tubular furnace provided by the present invention, a first support plate is fixedly connected to the surface of the drive shaft, a guide groove is provided on the surface of the drive shaft, a sliding sleeve is sleeved on the surface of the drive shaft, a guide rod is fixedly connected to the interior of the sliding sleeve, and the guide rod is slidably arranged inside the guide groove.

[0013] As a preferred embodiment of the device for ultrasonically cleaning the quartz tube of a tubular furnace provided by the present invention, the sliding sleeve is fixedly connected to the second support plate at one end away from the first support plate, the surface of the drive shaft is sleeved with a first spring, the surface of the first support plate is hingedly connected to the second connecting rod, the second support plate is hingedly connected to the first connecting rod on a side close to the first support plate, the first connecting rod and the second connecting rod are hingedly connected to a clamping frame at one end close to each other, a cleaning brush is fixedly connected to the surface of the clamping frame, a touch plate is fixedly connected to the inside of the ultrasonic cleaning tank, and a contact is fixedly connected to the side of the second support plate away from the first support plate.

[0014] As a preferred embodiment of the device for ultrasonically cleaning the quartz tube of a tubular furnace provided by the present invention, a rectangular frame is fixedly provided inside the ultrasonic cleaning tank, avoidance grooves are provided on both sides of the ultrasonic cleaning tank, and a loading trough is provided on the front of the ultrasonic cleaning tank.

[0015] As a preferred embodiment of the device for ultrasonically cleaning the quartz tube of a tubular furnace provided by the present invention, rectangular grooves are provided on both sides of the rectangular frame, a lifting plate is slidably connected to the interior of the rectangular frame, a lifting rod is fixedly connected to the bottom surface of the lifting plate, both ends of the lifting rod are slidably arranged on the inner wall of the rectangular groove, a second spring is provided inside the rectangular frame, the top surface of the lifting plate is fixedly connected to the vertical pole, a fixing ring is provided on the upper end of the vertical pole, and the fixing ring is clamped with the vertical pole.

[0016] Compared with the prior art, the present invention has the following beneficial effects: The device for ultrasonically cleaning a quartz tube of a tubular furnace provided by the present invention provides a quartz tube cleaning mechanism. After the quartz tube is placed inside a quartz tube fixing structure, a cleaning brush extends into the interior of the quartz tube. The sliding sleeve slides on the surface of the drive shaft through contact compression. The first connecting rod cooperates with the second connecting rod to push the clamping frame to extend so that the cleaning brush is tightly attached to the inner wall of the quartz tube. In conjunction with the drive of the second reduction motor, comprehensive cleaning of the interior of the quartz tube can be achieved. At the same time, in conjunction with the ultrasonic generator to generate sound inside the ultrasonic cleaning tank, the cleaning effect can be further improved.

[0017] The device for ultrasonically cleaning quartz tubes of a tubular furnace provided by the present invention can adapt to quartz tubes of various lengths and sizes by arranging the connecting frame in the quartz tube cleaning mechanism in parallel with the cleaning brush. The first connecting rod and the second connecting rod expand the cleaning brush so that it can match the interior of quartz tubes of various sizes, thereby achieving cleaning of various quartz tubes, thereby improving the overall applicability of the device.

[0018] The device for ultrasonically cleaning the quartz tube of a tube furnace provided by the present invention can replace different fixing rings according to the different sizes of the quartz tubes by clamping the fixing ring and the vertical rod, thereby realizing the cleaning of various quartz tubes. In conjunction with the electric telescopic rod, when the connecting frame is lowered as a whole, the lifting rod can be pushed to slide downward inside the rectangular groove, thereby driving the quartz tube to descend. In this way, the quartz tube can be completely immersed in the cleaning solution, thereby increasing the efficiency of ultrasonic cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the solutions in the present invention, a brief introduction will be given below to the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0020] Figure 1 A schematic diagram of the overall structure of the device for ultrasonically cleaning a quartz tube of a tubular furnace provided by the present invention; Figure 2 A schematic rear view of the overall structure of the device for ultrasonically cleaning a quartz tube of a tubular furnace provided by the present invention; Figure 3 A schematic diagram of the connection structure between the lifting and adjusting mechanism of the device for ultrasonically cleaning the quartz tube of a tubular furnace provided by the present invention and the quartz tube cleaning mechanism; Figure 4 A schematic structural diagram of a quartz tube cleaning mechanism of a device for ultrasonically cleaning a quartz tube of a tubular furnace provided by the present invention; Figure 5 The device for ultrasonically cleaning the quartz tube of a tubular furnace provided by the present invention Figure 4 Schematic diagram of the enlarged structure at A in the middle; Figure 6 A schematic structural diagram of a cleaning brush in a quartz tube cleaning mechanism of an apparatus for ultrasonically cleaning a quartz tube of a tubular furnace provided by the present invention; Figure 7 A schematic diagram of the internal structure of a sliding sleeve of a device for ultrasonically cleaning a quartz tube of a tubular furnace provided by the present invention; Figure 8 A schematic diagram of the connection structure of the ultrasonic cleaning tank and the quartz tube fixing structure of the device for ultrasonically cleaning the quartz tube of a tubular furnace provided by the present invention; Figure 9A schematic diagram of the internal structure of the quartz tube fixing structure of the device for ultrasonically cleaning the quartz tube of a tubular furnace provided by the present invention; Figure 10 The device for ultrasonically cleaning the quartz tube of a tubular furnace provided by the present invention Figure 6 Schematic diagram of the enlarged structure at point B in the middle.

[0021] The markings in the figure are as follows: 1. Ultrasonic cleaning tank; 2. Lifting and adjusting mechanism; 3. Quartz tube cleaning mechanism; 4. Quartz tube fixing structure; 5. Electric telescopic rod; 6. Side support plate; 7. Top frame; 8. Connecting seat; 9. Guide rod; 10. First reduction motor; 11. Screw rod; 12. Polished rod; 13. Moving seat; 14. Connecting frame; 15. Carrying block; 16. Guide frame; 17. Slide; 18. Slide rod; 19. Second reduction motor; 20. Drive shaft; 21. Transmission wheel; 22. Driven wheel; 23. Leather Belt; 24. First support plate; 25. First spring; 26. Sliding sleeve; 27. Second support plate; 28. First connecting rod; 29. ​​Second connecting rod; 30. Snap-on frame; 31. Cleaning brush; 32. Contact; 33. Guide groove; 34. Guide rod; 35. Avoidance groove; 36. Feeding trough; 37. Touch plate; 38. Rectangular frame; 39. Rectangular groove; 40. Lifting plate; 41. Lifting rod; 42. Second spring; 43. Vertical pole; 44. Fixed ring; 45. Ultrasonic generator. DETAILED DESCRIPTION

[0022] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0023] As described in the background technology, general ultrasonic cleaning can only clean the dirt accumulated on the surface of the quartz tube. However, after the quartz tube is exposed to high temperature, a carbonized layer will appear inside the tube. This carbonized layer is left on the surface of the quartz tube when other materials are heated. Therefore, ultrasonic cleaning alone cannot achieve complete cleaning.

[0024] In order to solve this technical problem, the present invention provides a device for ultrasonically cleaning a quartz tube of a tubular furnace.

[0025] Specifically, please refer to Figures 1-9 The ultrasonic cleaning device for the quartz tube of the tubular furnace specifically includes an ultrasonic cleaning tank 1, a lifting adjustment mechanism 2 is provided at the upper end of the ultrasonic cleaning tank 1, a quartz tube cleaning mechanism 3 is provided inside the lifting adjustment mechanism 2, and a quartz tube fixing structure 4 is provided inside the ultrasonic cleaning tank 1; The lifting and adjusting mechanism 2 includes two electric telescopic rods 5 fixedly connected to the back of the ultrasonic cleaning tank 1. A top frame 7 is provided at the upper end of the ultrasonic cleaning tank 1, and an ultrasonic generator 45 is fixedly connected to the bottom end of the ultrasonic cleaning tank 1.

[0026] The device for ultrasonically cleaning a quartz tube of a tubular furnace provided by the present invention is characterized in that a quartz tube cleaning mechanism 3 is provided. After the quartz tube is placed inside a quartz tube fixing structure 4, a cleaning brush 31 extends into the interior of the quartz tube. The sliding sleeve 26 is squeezed on the surface of the drive shaft 20 by the contact 32. The first connecting rod 28 cooperates with the second connecting rod 29 to push the clamping frame 30 to extend so that the cleaning brush 31 is tightly attached to the inner wall of the quartz tube. In conjunction with the drive of the second reduction motor 19, comprehensive cleaning of the interior of the quartz tube can be achieved. At the same time, in conjunction with the ultrasonic generator 45 to generate sound inside the ultrasonic cleaning tank 1, the cleaning effect can be further improved.

[0027] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0028] Example 1

[0029] Please refer to Figures 1-9 A device for ultrasonically cleaning a quartz tube of a tubular furnace comprises an ultrasonic cleaning tank 1, a lifting and adjusting mechanism 2 is provided at the upper end of the ultrasonic cleaning tank 1, a quartz tube cleaning mechanism 3 is provided inside the lifting and adjusting mechanism 2, and a quartz tube fixing structure 4 is provided inside the ultrasonic cleaning tank 1; The lifting and adjusting mechanism 2 includes two electric telescopic rods 5 fixedly connected to the back of the ultrasonic cleaning tank 1. A top frame 7 is provided at the upper end of the ultrasonic cleaning tank 1, and an ultrasonic generator 45 is fixedly connected to the bottom end of the ultrasonic cleaning tank 1.

[0030] Specifically, a rectangular frame 38 is fixedly provided inside the ultrasonic cleaning tank 1 , avoidance grooves 35 are provided on both sides of the ultrasonic cleaning tank 1 , and a loading groove 36 is provided on the front of the ultrasonic cleaning tank 1 .

[0031] Specifically, rectangular grooves 39 are provided on both sides of the rectangular frame 38, and a lifting plate 40 is slidably connected to the inside of the rectangular frame 38. A lifting rod 41 is fixedly connected to the bottom surface of the lifting plate 40, and both ends of the lifting rod 41 are slidably set on the inner wall of the rectangular groove 39. A second spring 42 is provided inside the rectangular frame 38, and a vertical rod 43 is fixedly connected to the top surface of the lifting plate 40. A fixing ring 44 is provided at the upper end of the vertical rod 43, and the fixing ring 44 is clamped with the vertical rod 43. The bottom end of the fixing ring 44 is connected to the socket at the top end of the vertical rod 43 through a pin.

[0032] Through the above structural design, when the device is used, the upper end of the vertical rod 43 is first replaced with a corresponding fixing ring 44. After completion, the quartz tube is installed inside the fixing ring 44 through the loading trough 36. After completion, the first reduction motor 10 is turned on, and the first reduction motor 10 drives the screw rod 11 to rotate, thereby driving the connecting frame 14 to move to one side of the first reduction motor 10.

[0033] Example 2

[0034] The device for ultrasonic cleaning of the quartz tube of the tubular furnace provided in Example 1 is further optimized. Specifically, Figure 3-Figure 7 As shown, one side of the top frame 7 is fixedly connected to a side support plate 6, which is fixedly connected to the output end of the electric telescopic rod 5. The four corners of the top frame 7 are respectively fixedly connected to a connecting seat 8, and the inside of the connecting seat 8 is respectively fixedly connected to a guide rod 9, which is slidably arranged on the front and rear sides of the ultrasonic cleaning tank 1.

[0035] Specifically, the quartz tube cleaning mechanism 3 includes two polished rods 12 symmetrically fixedly arranged inside the top frame 7. The inside of the top frame 7 is fixedly connected to a first reduction motor 10. The transmission end of the first reduction motor 10 is rotatably connected to a screw rod 11. The surface of the screw rod 11 is threadedly connected to a movable seat 13, and the movable seat 13 is slidably connected to the surface of the polished rod 12.

[0036] Specifically, the bottom end of the movable seat 13 is fixedly connected to the connecting frame 14, the top surface of the connecting frame 14 is fixedly connected to the guide frame 16, a slide groove 17 is provided inside the guide frame 16, the surface of the screw rod 11 is slidably connected to the bearing block 15, the bearing block 15 is arranged inside the slide groove 17, and the bearing block 15 is arranged on the side of the top frame 7 close to the first reduction motor 10, the bottom end of the bearing block 15 is fixedly connected to the slide rod 18, and the slide rod 18 is slidably arranged on the inner wall of the slide groove 17.

[0037] Specifically, the interior of the connecting frame 14 is slidably connected to a slide rod 18, and the connecting frame 14 is L-shaped as a whole. The surface of the short end of the connecting frame 14 is fixedly connected to a second reduction motor 19, and the transmission end of the second reduction motor 19 is rotatably connected to a transmission wheel 21. The interior of the connecting frame 14 is rotatably connected to a drive shaft 20, and the end of the drive shaft 20 close to the transmission wheel 21 is fixedly connected to a driven wheel 22, and the driven wheel 22 is connected to the transmission wheel 21 through a belt 23.

[0038] Specifically, the surface of the drive shaft 20 is fixedly connected to the first support plate 24, the surface of the drive shaft 20 is provided with a guide groove 33, the surface of the drive shaft 20 is sleeved with a sliding sleeve 26, the interior of the sliding sleeve 26 is fixedly connected to a guide rod 34, and the guide rod 34 is slidably arranged inside the guide groove 33.

[0039] Specifically, the end of the sliding sleeve 26 away from the first support plate 24 is fixedly connected to the second support plate 27, the surface of the drive shaft 20 is sleeved with a first spring 25, the surface of the first support plate 24 is hingedly connected to the second connecting rod 29, the second support plate 27 is hingedly connected to the first connecting rod 28 on the side close to the first support plate 24, and the ends of the first connecting rod 28 and the second connecting rod 29 close to each other are hingedly connected to the clamping frame 30, the surface of the clamping frame 30 is fixedly connected to the cleaning brush 31, the interior of the ultrasonic cleaning tank 1 is fixedly connected to the touch plate 37, and the side of the second support plate 27 away from the first support plate 24 is fixedly connected to the contact 32.

[0040] Through the above structural design, the movable seat 13 drives the connecting frame 14 to move, and at the same time drives the driving shaft 20 at the bottom to pass through the avoidance groove 35 and plug into the interior of the quartz tube. The driving shaft 20 continues to move so that the contact 32 contacts the contact plate 37. At this time, the contact 32 applies a reaction force to the second support plate 27. At the same time, the second support plate 27 slides on the surface of the driving shaft 20 and compresses the first spring 25. When the second support plate 27 and the first support plate 24 approach each other, the second connecting rod 29 and the first connecting rod 28 extend outward. When the first connecting rod 28 and the second connecting rod 29 extend, they push the clamping frame 30 to drive the cleaning brush 31 to be in close contact with the inner wall of the quartz tube. At this time, the electric telescopic rod 5 is turned on to retract its output end. When the output end of the electric telescopic rod 5 retracts, the top frame 7 is pulled downward through the side support plate 6, and at the same time, the guide rod 9 slides downward inside the ultrasonic cleaning tank 1; As the top frame 7 moves, it drives the connecting frame 14 and the driving shaft 20 to descend as a whole. As the driving shaft 20 descends, it drives the cleaning brush 31 to descend. The cleaning brush 31 pulls the quartz tube inside the fixing ring 44 to move toward the interior of the ultrasonic cleaning tank 1. After the fixing ring 44 is subjected to force, it is transmitted to the lifting plate 40 through the vertical rod 43. The lifting plate 40 is squeezed and drives the lifting rod 41 to slide downward inside the rectangular groove 39, and at the same time compresses the second spring 42 until the quartz tube is completely immersed in the interior of the ultrasonic cleaning tank 1. Then, the ultrasonic generator 45 and the second reduction motor 19 are turned on. The second reduction motor 19 drives the transmission wheel 21 to rotate the driven wheel 22 through the belt 23. When the driven wheel 22 rotates, it drives the driving shaft 20 to rotate. When the driving shaft 20 rotates, it drives the cleaning brush 31 to rotate inside the quartz tube and clean it. , cooperate with the ultrasonic cleaning of the ultrasonic generator 45; after cleaning is completed, the electric telescopic rod 5 pushes the top frame 7 to rise, and the quartz tube rises from the water. After completion, the second reduction motor 19 and the ultrasonic generator 45 are turned off, and the first reduction motor 10 is controlled to be turned on. The first reduction motor 10 reverses and drives the screw 11 to rotate in the opposite direction. At this time, the movable seat 13 drives the connecting frame 14 to move to the side away from the first reduction motor 10. At the same time, the pressure of the contact 32 gradually decreases, the second connecting rod 29 and the first connecting rod 28 shrink inward, and the first spring 25 pushes the second support plate 27 to reset. When the first connecting rod 28 and the second connecting rod 29 are flipped, the cleaning brush 31 stops contacting the inner wall of the quartz tube. After the entire quartz tube cleaning mechanism 3 is taken out from the inside of the quartz tube, the fixing ring 44 can be opened to take out the cleaned quartz tube.

Claims

1. A device for ultrasonically cleaning a quartz tube of a tubular furnace, characterized in that: The ultrasonic cleaning tank (1) comprises an upper end of the ultrasonic cleaning tank (1) provided with a lifting and adjusting mechanism (2), a quartz tube cleaning mechanism (3) provided inside the lifting and adjusting mechanism (2), and a quartz tube fixing structure (4) provided inside the ultrasonic cleaning tank (1); The lifting and adjusting mechanism (2) comprises two electric telescopic rods (5) fixedly connected to the back of the ultrasonic cleaning tank (1); a top frame (7) is provided at the upper end of the ultrasonic cleaning tank (1); and an ultrasonic generator (45) is fixedly connected to the bottom end of the ultrasonic cleaning tank (1).

2. The device for ultrasonically cleaning a quartz tube of a tubular furnace according to claim 1, characterized in that: One side of the top frame (7) is fixedly connected to a side support plate (6), and the side support plate (6) is fixedly connected to the output end of the electric telescopic rod (5). The four corners of the top frame (7) are respectively fixedly connected to connecting seats (8), and the interiors of the connecting seats (8) are respectively fixedly connected to guide rods (9), and the guide rods (9) are slidably arranged on the front and rear sides of the ultrasonic cleaning tank (1).

3. The device for ultrasonically cleaning a quartz tube of a tubular furnace according to claim 2, characterized in that: The quartz tube cleaning mechanism (3) comprises two polished rods (12) symmetrically fixedly arranged inside a top frame (7); a first reduction motor (10) is fixedly connected inside the top frame (7); a driving end of the first reduction motor (10) is rotatably connected to a screw rod (11); a surface of the screw rod (11) is threadedly connected to a movable seat (13); and the movable seat (13) is slidably connected to the surface of the polished rod (12).

4. The device for ultrasonically cleaning a quartz tube of a tubular furnace according to claim 3, characterized in that: The bottom end of the movable seat (13) is fixedly connected to a connecting frame (14), the top surface of the connecting frame (14) is fixedly connected to a guide frame (16), a slide groove (17) is provided inside the guide frame (16), the surface of the screw rod (11) is slidably connected to a bearing block (15), the bearing block (15) is arranged inside the slide groove (17), and the bearing block (15) is arranged on a side of the top frame (7) close to the first reduction motor (10), the bottom end of the bearing block (15) is fixedly connected to a slide rod (18), and the slide rod (18) is slidably arranged on the inner wall of the slide groove (17).

5. The device for ultrasonically cleaning a quartz tube of a tubular furnace according to claim 4, characterized in that: The connecting frame (14) is internally slidably connected to a slide bar (18), and the connecting frame (14) is L-shaped as a whole. The surface of the short end of the connecting frame (14) is fixedly connected to a second reduction motor (19), and the transmission end of the second reduction motor (19) is rotatably connected to a transmission wheel (21). The interior of the connecting frame (14) is rotatably connected to a drive shaft (20), and one end of the drive shaft (20) close to the transmission wheel (21) is fixedly connected to a driven wheel (22), and the driven wheel (22) is connected to the transmission wheel (21) through a belt (23).

6. The device for ultrasonically cleaning a quartz tube of a tubular furnace according to claim 5, characterized in that: A first support plate (24) is fixedly connected to the surface of the drive shaft (20), a guide groove (33) is provided on the surface of the drive shaft (20), a sliding sleeve (26) is sleeved on the surface of the drive shaft (20), a guide rod (34) is fixedly connected inside the sliding sleeve (26), and the guide rod (34) is slidably arranged inside the guide groove (33).

7. The device for ultrasonically cleaning a quartz tube of a tubular furnace according to claim 6, characterized in that: The end of the sliding sleeve (26) away from the first support disk (24) is fixedly connected to the second support disk (27), the surface of the drive shaft (20) is sleeved with a first spring (25), the surface of the first support disk (24) is hingedly connected to the second connecting rod (29), the side of the second support disk (27) close to the first support disk (24) is hingedly connected to the first connecting rod (28), the end of the first connecting rod (28) and the second connecting rod (29) close to each other is hingedly connected to a clamping frame (30), the surface of the clamping frame (30) is fixedly connected to a cleaning brush (31), the interior of the ultrasonic cleaning tank (1) is fixedly connected to a touch plate (37), and the side of the second support disk (27) away from the first support disk (24) is fixedly connected to a contact (32).

8. The device for ultrasonically cleaning a quartz tube of a tubular furnace according to claim 7, characterized in that: A rectangular frame (38) is fixedly provided inside the ultrasonic cleaning tank (1), avoidance grooves (35) are provided on both sides of the ultrasonic cleaning tank (1), and a loading groove (36) is provided on the front of the ultrasonic cleaning tank (1).

9. The device for ultrasonically cleaning a quartz tube of a tube furnace according to claim 8, characterized in that: Rectangular grooves (39) are provided on both sides of the rectangular frame (38), a lifting plate (40) is slidably connected to the interior of the rectangular frame (38), a lifting rod (41) is fixedly connected to the bottom surface of the lifting plate (40), and both ends of the lifting rod (41) are slidably arranged on the inner wall of the rectangular groove (39), a second spring (42) is provided inside the rectangular frame (38), a vertical rod (43) is fixedly connected to the top surface of the lifting plate (40), and a fixing ring (44) is provided at the upper end of the vertical rod (43), and the fixing ring (44) is clamped to the vertical rod (43).

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