A ceramic substrate thickness detection device

Abstract

The application provides a ceramic substrate thickness detection device, relates to the thickness detection field, and comprises a base, a support frame slidingly arranged on the base, a laser range finder arranged on the support frame, and an adjusting mechanism arranged on the support frame. The adjusting mechanism comprises a U-shaped frame slidingly arranged on the support frame, a guide groove arranged on the base, a scale one arranged on the U-shaped frame, a rectangular block slidingly arranged on the support frame, and an adjusting groove arranged on the support frame. In order to solve the problem that the measuring device cannot judge whether the thickness of the ceramic plate is uniform in the prior art, so that the measurement result has errors, the adjusting mechanism is arranged to realize the rapid detection of the thickness of the ceramic substrate. The adjusting mechanism is arranged to solve the problem that the manual discharging efficiency is low in the prior art. The adjusting mechanism is arranged to solve the problem that dust affects the detection accuracy in the prior art.

Description

TECHNICAL FIELD

[0001] The application relates to the thickness detection field, in particular to a ceramic substrate thickness detection device. BACKGROUND

[0002] The ceramic substrate thickness detection device is a device specially used for detecting the thickness of a ceramic substrate (or ceramic substrate plate) and judging whether the thickness is within a tolerance range, but the existing measuring device cannot judge whether the thickness of the ceramic plate is uniform, so that the measurement result has an error.

[0003] For example, the size measuring device for ceramic plate processing detection disclosed in Chinese invention patent (application number: 202411001361.8) has the following disclosure in the specification: the existing size measuring device is limited by its own size, so that it can only detect the length, width or thickness of the side edge of the ceramic plate, and cannot judge whether the thickness of the ceramic plate is uniform, and the measurement result has an error; the above patent can prove the defects existing in the prior art.

[0004] Therefore, we improve it and propose a ceramic substrate thickness detection device. SUMMARY

[0005] The purpose of the present application is to solve the problem that the existing measuring device cannot judge whether the thickness of the ceramic plate is uniform, so that the measurement result has an error.

[0006] In order to achieve the above-mentioned purpose of the application, the present application provides a ceramic substrate thickness detection device to improve the above-mentioned problems.

[0007] The present application is as follows:

[0008] The application comprises a base, a support frame slidingly arranged on the base, a laser range finder arranged on the support frame, and an adjusting mechanism arranged on the support frame.

[0009] The adjusting mechanism comprises a U-shaped frame slidingly arranged on the support frame, a guide groove arranged on the base, a scale one arranged on the U-shaped frame, a rectangular block slidingly arranged on the support frame, an adjusting groove arranged on the support frame, a jacking column rotatably arranged on the rectangular block, a spring one arranged on the rectangular block, and a scale two arranged on the base.

[0010] As a preferred technical scheme of the present application, the U-shaped frame is slidingly arranged on the guide groove, the jacking column is slidingly arranged on the adjusting groove, and the two ends of the spring one are respectively connected to the corresponding surfaces of the support frame and the rectangular block.

[0011] As a preferred technical scheme of the present application, the U-shaped frame is provided with an adaptive slot, the adaptive slot is slidably provided with an adaptive barrel, the knock-over column is rotatably arranged on the adaptive barrel, the knock-over column is slidably provided with a rotating ring, the knock-over column is provided with spring two outside, and the two ends of the spring two are connected to the corresponding surfaces of the rotating ring and the adaptive barrel respectively.

[0012] As a preferred technical scheme of the present application, the rectangular block is provided with a cavity, the rotating shaft is rotatably arranged in the cavity, and the drum is arranged on the rotating shaft.

[0013] As a preferred technical scheme of the present application, the base is provided with a deflection slot, the drive shaft is rotatably arranged on the deflection slot, and the limiting block is arranged on the drive shaft.

[0014] As a preferred technical scheme of the present application, the limiting block and the deflection slot are matched, and the drive shaft and the deflection slot are connected through the torsional spring.

[0015] As a preferred technical scheme of the present application, the lead screw is rotatably arranged on the base, the U-shaped frame is threadedly connected to the lead screw, the motor is arranged on the base, and the output ends of the lead screw and the motor are connected.

[0016] As a preferred technical scheme of the present application, the transfer cavity is arranged in the support frame, the cleaning hole is arranged on the support frame, the transfer cavity and the cleaning hole are communicated, the connecting pipe is fixedly penetrated through the transfer cavity and the cavity, and the piston plate is slidably arranged on the cavity.

[0017] As a preferred technical scheme of the present application, the drum is provided with an oval slot, the connecting column is arranged on the piston plate, the rolling ball is rotatably arranged on the connecting column, and the spring three is arranged on the corresponding surfaces of the cavity and the piston plate.

[0018] As a preferred technical scheme of the present application, the rectangular block is provided with an external slot, the one-way valve one is arranged on the external slot, the external slot and the cavity are communicated, and the one-way valve two is arranged on the connecting pipe two.

[0019] Compared with the prior art, the present application has the following beneficial effects:

[0020] In the scheme of the present application:

[0021] 1. In order to solve the problem that the measuring device in the prior art cannot judge whether the thickness of the ceramic plate is uniform, so that the measurement result has errors, the adjusting mechanism is arranged, the drum rolls along the surface of the ceramic substrate, and cooperates with the laser range finder, so that whether the thickness of the ceramic substrate is uniform can be quickly found, and the rapid detection of the thickness of the ceramic substrate is realized.

[0022] 2. Through the setting of the adjusting mechanism, when the roller slides back, the support frame extrudes the ceramic substrate, realizing the automatic discharge of the ceramic substrate, solving the problem of low efficiency of manual discharge in the prior art;

[0023] 3. Through the setting of the adjusting mechanism, through the rotation of the roller as the drive, the cleaning hole is always in the exhaust state, realizing the automatic cleaning of the surface of the ceramic substrate, solving the problem of dust affecting the detection accuracy in the prior art. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 The structure schematic diagram of the ceramic substrate thickness detection device provided by the present application is provided;

[0025] Figure 2 The base local section structure schematic diagram of the ceramic substrate thickness detection device provided by the present application is provided;

[0026] Figure 3 The rectangular block local section structure schematic diagram of the ceramic substrate thickness detection device provided by the present application is provided;

[0027] Figure 4 The ceramic substrate thickness detection device provided by the present application is provided; Figure 3 The A area enlarged structure schematic diagram of the ceramic substrate thickness detection device provided by the present application is provided;

[0028] Figure 5 The support frame internal structure schematic diagram of the ceramic substrate thickness detection device provided by the present application is provided;

[0029] Figure 6 The ceramic substrate thickness detection device provided by the present application is provided; Figure 5 The B area enlarged structure schematic diagram of the ceramic substrate thickness detection device provided by the present application is provided;

[0030] Figure 7 The roller overall structure schematic diagram of the ceramic substrate thickness detection device provided by the present application is provided.

[0031] Indicated in the figure:

[0032] 1, base; 101, support frame; 102, laser range finder;

[0033] 2, adjusting mechanism; 201, U-shaped frame; 202, guide groove; 203, scale one; 204, rectangular block; 205, adjusting groove; 206, jacking column; 207, spring one; 208, scale two; 209, fitting groove; 210, fitting cylinder; 211, rotating ring; 212, spring two; 213, cavity; 214, rotating shaft; 215, roller; 216, deflection groove; 217, drive shaft; 218, limiting block; 219, screw rod; 220, motor; 221, transmission cavity; 222, cleaning hole; 223, connecting pipe; 224, piston plate; 225, oval groove; 226, connecting column; 227, ball; 228, spring three; 229, external groove; 230, one-way valve one; 231, one-way valve two. DETAILED DESCRIPTION

[0034] In order to enable persons skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by persons skilled in the art without creative labor should belong to the protection scope of the present application.

[0035] As described in the background, the existing measuring device cannot determine whether the thickness of the ceramic plate is uniform, resulting in errors in the measurement results.

[0036] In order to solve this technical problem, the present application provides a ceramic substrate thickness detection device, which is applied to thickness detection.

[0037] Specifically, please refer to Figures 1-7 As shown in the figure, the ceramic substrate thickness detection device specifically comprises: a base 1, a support frame 101 slidingly arranged on the base 1, a laser range finder 102 arranged on the support frame 101, an adjusting mechanism 2 comprising a U-shaped frame 201 slidingly arranged on the support frame 101, a guide groove 202 arranged on the base 1, a scale one 203 arranged on the U-shaped frame 201, a rectangular block 204 slidingly arranged on the support frame 101, an adjusting groove 205 arranged on the support frame 101, a jacking column 206 rotatably arranged on the rectangular block 204, a spring one 207 arranged on the rectangular block 204, and a scale two 208 arranged on the base 1.

[0038] The adjusting mechanism 2 comprises a U-shaped frame 201 slidingly arranged on the support frame 101, a guide groove 202 arranged on the base 1, a scale one 203 arranged on the U-shaped frame 201, a rectangular block 204 slidingly arranged on the support frame 101, an adjusting groove 205 arranged on the support frame 101, a jacking column 206 rotatably arranged on the rectangular block 204, a spring one 207 arranged on the rectangular block 204, and a scale two 208 arranged on the base 1.

[0039] The ceramic substrate thickness detection device provided by the application can quickly find whether the thickness of the ceramic substrate is uniform through the adjustment mechanism 2, the roller 215 rolling along the surface of the ceramic substrate, and the laser range finder 102, and realizes the rapid detection of the thickness of the ceramic substrate.

[0040] The adjustment mechanism 2 is provided, and when the roller 215 slides and resets, the support frame 101 extrudes the ceramic substrate, so that the automatic discharge of the ceramic substrate is realized, and the problem of low efficiency of manual discharge in the prior art is solved.

[0041] The adjustment mechanism 2 is provided, and the rotation of the roller 215 is used as driving, so that the cleaning hole 222 is always in an exhaust state, the automatic cleaning of the surface of the ceramic substrate is realized, and the problem of dust affecting the detection accuracy in the prior art is solved.

[0042] In order for those skilled in the art to better understand the application, the technical solutions in the embodiments of the application will be described clearly and completely below with reference to the drawings.

[0043] It should be noted that the embodiments in the application and the features and technical solutions in the embodiments can be combined with each other without conflict.

[0044] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0045] Embodiment 1, please refer to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 、 Figure 7 The ceramic substrate thickness detection device is shown in the drawings, the U-shaped frame 201 is slidingly arranged on the guide groove 202, the jacking column 206 is slidingly arranged on the adjusting groove 205, and the two ends of the spring 207 are connected to the corresponding surfaces of the support frame 101 and the rectangular block 204, respectively.

[0046] In use, as Figure 1As shown, a ceramic substrate is placed on a base 1. The elasticity of spring 207 causes two rectangular blocks 204 to slide towards each other along the support frame 101. The push pins 206 on the two rectangular blocks 204 clamp and fix the ceramic substrate. The length and width of the ceramic substrate can be quickly read through scale 203 and scale 208. Then, the U-shaped frame 201 is driven to slide along the guide groove 202. At this time, the U-shaped frame 201 and the support frame 101 move synchronously. The support frame 101 is in close contact with the ceramic substrate by its own weight. When the thickness of the ceramic substrate is uneven, the support frame 101 will slide up or down along the U-shaped frame 201. When the support frame 101 moves up or down, the laser rangefinder 102 can quickly determine that the thickness of the ceramic substrate is uneven. Conversely, if the support frame 101 does not slide along the U-shaped rod, the thickness of the ceramic substrate is uniform.

[0047] Furthermore, the U-shaped frame 201 is provided with an adapter groove 209, and an adapter cylinder 210 is slidably provided on the adapter groove 209. The push column 206 is rotatably provided on the adapter cylinder 210, and a rotating ring 211 is slidably provided on the push column 206. A second spring 212 is provided on the outside of the push column 206. The two ends of the second spring 212 are respectively connected to the corresponding surfaces of the rotating ring 211 and the adapter cylinder 210. Driven by the second spring 212, the support frame 101 is tightly attached to the ceramic substrate, reducing the error of the laser rangefinder 102 in measuring the thickness of the ceramic substrate.

[0048] Furthermore, a cavity 213 is provided on the rectangular block 204, and a rotating shaft 214 is rotatably provided inside the cavity 213. A roller 215 is provided on the rotating shaft 214. When the U-shaped frame 201 slides along the guide groove 202, the U-shaped frame 201 and the support frame 101 move synchronously. The roller 215 on the support frame 101 rolls along the surface of the ceramic substrate. In this way, when detecting whether the ceramic substrate is uniform, the roller 215 rolling along the surface of the ceramic substrate can reduce the friction of the device and prevent scratches on the surface of the ceramic substrate.

[0049] Furthermore, a deflection groove 216 is provided on the base 1, a drive shaft 217 is rotatably mounted on the deflection groove 216, and a limit block 218 is provided on the drive shaft 217.

[0050] The ceramic substrate is positioned by limiting block 218, such as... Figure 4 As shown, the elasticity of spring 207 allows the two rectangular blocks 204 to slide towards each other along the support frame 101. The push column 206 on the two rectangular blocks 204 clamps and fixes the ceramic substrate, and centers the ceramic substrate. The length and width of the ceramic substrate are quickly measured by scale 203 and scale 208, reducing measurement errors.

[0051] Further, the limiting block 218 is matched with the deflection groove 216, and the driving shaft 217 is connected with the deflection groove 216 through a torsion spring;

[0052] When the U-shaped frame 201 slides to the bottom of the guide groove 202, the support frame 101 is synchronously displaced and passes through the surface of the ceramic substrate, at this time the roller 215 is separated from the ceramic substrate, the two jacking columns 206 are separated from the extrusion on both sides of the ceramic substrate, the support frame 101 is driven to move downward by the elasticity of the spring 212, so that the roller 215 is tightly attached to the base 1, and then the U-shaped frame 201 is driven to slide to reset, the support frame 101 slides to reset and extrudes the limiting block 218, so that the limiting block 218 rotates to close, as shown, at this time the support frame 101 resets and jacks the ceramic substrate, so that the ceramic substrate is discharged; Figure 4

[0053] Further, a lead screw 219 is rotationally arranged on the base 1, the U-shaped frame 201 is threadedly connected with the lead screw 219, a motor 220 is arranged on the base 1, the lead screw 219 is connected with the output end of the motor 220, the U-shaped frame 201 is driven to slide along the guide groove 202 by the rotation of the lead screw 219, and the lead screw 219 is driven to rotate by the motor 220;

[0054] The center positioning of the ceramic substrate is realized through the adjusting mechanism 2, and the roller 215 rolls along the surface of the ceramic substrate, when the roller 215 slides up and down, the uneven thickness of the ceramic substrate can be quickly found by means of the laser range finder 102, when the roller 215 slides to reset, the center limiting of the ceramic substrate is released, and the automatic discharge of the ceramic substrate is realized.

[0055] In the embodiment 2, the ceramic substrate thickness detection device provided in the embodiment 1 is further optimized, specifically, as shown in Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 and Figure 7 The delivery cavity 221 is arranged in the support frame 101, the cleaning hole 222 is arranged on the support frame 101, the delivery cavity 221 and the cleaning hole 222 are communicated, the connecting pipe 223 is fixedly penetrated through the delivery cavity 221 and the cavity 213, and the piston plate 224 is slidably arranged on the cavity 213;

[0056] When the piston plate 224 slides, the piston plate 224 extrudes the air in the cavity 213 into the connecting pipe 223, the air is transferred to the delivery cavity 221 through the connecting pipe 223, and finally is discharged from the cleaning hole 222 on the delivery cavity 221, wherein the cleaning hole 222 is obliquely arranged at the bottom of the support frame 101, as shown in Figure 5 ​As shown, the air discharged from the cleaning hole 222 can clean the dust or impurities on the surface of the ceramic substrate, and the inclined arrangement of the cleaning hole 222 is compared with the vertical arrangement, and the cleaning hole 222 is arranged at an angle of 45 degrees, wherein the airflow blown by the cleaning hole 222 is tangent to the surface of the substrate, and the dust or impurities is subjected to an oblique thrust, so that the dust or impurities is more easily separated from the surface of the ceramic substrate, and the vertical airflow is only a positive pressure impact, and the impurities is easily pressed back to the surface;

[0057] Further, the drum 215 is provided with an elliptical groove 225, the piston plate 224 is provided with a connecting column 226, the connecting column 226 is rotatably provided with a ball 227, and the corresponding surfaces of the cavity 213 and the piston plate 224 are provided with a spring three 228;

[0058] Further, the rectangular block 204 is provided with an external groove 229, the external groove 229 is provided with a one-way valve one 230, the external groove 229 and the cavity 213 are communicated, and the connecting pipe 223 is provided with a one-way valve two 231;

[0059] The external groove 229 and the one-way valve one 230 enable one-way conduction between the external environment and the cavity 213, and the one-way valve two 231 enables one-way conduction between the connecting pipe 223 and the transmission cavity 221, when the drum 215 rolls along the surface of the ceramic substrate, the elliptical groove 225 on the drum 215 extrudes the ball 227, the ball 227, the connecting column 226 and the piston plate 224 are synchronously slid upward, the air in the cavity 213 is discharged into the transmission cavity 221 through the connecting pipe 223 and the one-way valve two 231, and then the ball 227, the connecting column 226 and the piston plate 224 are synchronously slid downward under the elastic driving of the spring three 228, the external air enters the cavity 213 from the external groove 229 and the one-way valve one 230, and then when the drum 215 rotates, the exhaust hole is always in an exhaust state, so that the automatic cleaning of the ceramic substrate is realized, and the up-down displacement of the drum 215 caused by dust or impurities is prevented, and the accuracy of measurement of the device is improved;

[0060] The adjusting mechanism 2 realizes the automatic cleaning of the surface of the ceramic substrate, prevents the up-down displacement of the drum 215 caused by dust or impurities, prevents the influence of dust or impurities on measurement, and improves the accuracy of measurement of the device.

[0061] The use process of the ceramic substrate thickness detection device provided by the application is as follows:

[0062] In use, the ceramic substrate is placed on the base 1, the two rectangular blocks 204 are slid along the support frame 101 by the elasticity of the spring 207, the top driving columns 206 on the two rectangular blocks 204 clamp and fix the ceramic substrate, the ceramic substrate is limited by the limiting block 218, the ceramic substrate is centrally positioned, the length and width of the ceramic substrate can be quickly read through the scale 1 203 and the scale 2 208, the motor 220 is started, the motor 220 drives the screw rod 219 to rotate, the screw rod 219 drives the U-shaped frame 201 to slide along the guide groove 202, the U-shaped frame 201 and the support frame 101 are synchronously displaced, when the support frame 101 is upward or downward, the laser range finder 102 can quickly judge that the thickness of the ceramic substrate is uneven, otherwise, the support frame 101 does not slide along the U-shaped rod, the thickness of the ceramic substrate is uniform, the roller 215 on the support frame 101 is driven by the spring 2 212 to tightly adhere to the ceramic substrate, at this time the roller 215 rolls along the surface of the ceramic substrate, the oval groove 225 on the roller 215 extrudes the ball 227, the ball 227, the connecting column 226 and the piston plate 224 are synchronously upwardly slid, the air in the cavity 213 is discharged into the transmission cavity 221 through the connecting pipe 223 and the one-way valve 2 231, and then the ball 227, the connecting column 226 and the piston plate 224 are synchronously downwardly slid by the elasticity of the spring 3 228, the external air enters the cavity 213 from the external groove 229 and the one-way valve 1 230, and then when the roller 215 rotates, the exhaust hole is always in the state of exhausting, so that the automatic cleaning of the ceramic substrate is realized, when the roller 215 is synchronously displaced and passes through the surface of the ceramic substrate, the roller 215 and the ceramic substrate are separated, the two top driving columns 206 are separated from the extrusion on the two sides of the ceramic substrate, the support frame 101 is driven by the elasticity of the spring 2 212 to move downward, so that the roller 215 tightly adheres to the base 1, the output end of the motor 220 is reversely rotated, the screw rod 219 drives the U-shaped frame 201 to slide back to the original position, the support frame 101 slides back to the original position and extrudes the limiting block 218, so that the limiting block 218 is rotated and closed, at this time the support frame 101 is reset and slides and drives the ceramic substrate, so that the ceramic substrate is automatically discharged.

[0063] In the present application, unless specifically defined otherwise or limited differently, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected or communicated with each other; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise specifically limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0064] Obviously, the above-described embodiments are only some embodiments but not all the embodiments of the present application, the preferred embodiments of the present application are shown in the drawings, but do not limit the patent scope of the present application. The present application can be implemented in many different forms, and conversely, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing specific embodiments, or make equivalent replacements to some technical features therein. Any equivalent structure made by using the content of the present application specification and drawings, directly or indirectly applied to other related technical fields, is also within the patent protection scope of the present application.

Claims

1. A ceramic substrate thickness detection device, comprising a base (1), a support frame (101) slidingly arranged on the base (1), a laser range finder (102) arranged on the support frame (101), characterized in that, The adjusting mechanism (2) is arranged on the support frame (101); The adjusting mechanism (2) comprises a U-shaped frame (201) arranged on the support frame (101) in a sliding manner, a guide groove (202) arranged on the base (1), a scale I (203) arranged on the U-shaped frame (201), a rectangular block (204) arranged on the support frame (101) in a sliding manner, an adjusting groove (205) arranged on the support frame (101), a jacking column (206) arranged on the rectangular block (204) in a rotating manner, a spring I (207) arranged on the rectangular block (204), and a scale II (208) arranged on the base (1). A cavity (213) is arranged on the rectangular block (204), a rotating shaft (214) is arranged in the cavity (213) in a rotating manner, and a roller (215) is arranged on the rotating shaft (214). A transmission cavity (221) is arranged in the support frame (101), a cleaning hole (222) is arranged on the support frame (101), the transmission cavity (221) and the cleaning hole (222) are communicated, a connecting pipe (223) is fixedly arranged on the transmission cavity (221) and the cavity (213), and a piston plate (224) is arranged on the cavity (213) in a sliding manner. An oval groove (225) is arranged on the roller (215), a connecting column (226) is arranged on the piston plate (224), a ball (227) is arranged on the connecting column (226) in a rotating manner, and a spring III (228) is arranged on the corresponding surfaces of the cavity (213) and the piston plate (224).

2. The ceramic substrate thickness detection apparatus of claim 1, wherein The U-shaped frame (201) is arranged on the guide groove (202) in a sliding manner, the jacking column (206) is arranged on the adjusting groove (205) in a sliding manner, and the two ends of the spring I (207) are connected to the corresponding surfaces of the support frame (101) and the rectangular block (204) respectively.

3. The ceramic substrate thickness detection apparatus of claim 2, wherein An adaptive groove (209) is arranged on the U-shaped frame (201), an adaptive barrel (210) is arranged on the adaptive groove (209) in a sliding manner, the jacking column (206) is arranged on the adaptive barrel (210) in a rotating manner, a rotating ring (211) is arranged on the jacking column (206) in a sliding manner, a spring II (212) is arranged on the outer side of the jacking column (206), and the two ends of the spring II (212) are connected to the corresponding surfaces of the rotating ring (211) and the adaptive barrel (210) respectively.

4. The ceramic substrate thickness detection apparatus of claim 3, wherein A deflection groove (216) is arranged on the base (1), a driving shaft (217) is arranged on the deflection groove (216) in a rotating manner, and a limiting block (218) is arranged on the driving shaft (217).

5. The ceramic substrate thickness detection apparatus of claim 4, wherein The limiting block (218) is matched with the deflection groove (216), and the driving shaft (217) and the deflection groove (216) are connected through a torsional spring.

6. The ceramic substrate thickness detection apparatus of claim 5, wherein A lead screw (219) is arranged on the base (1) in a rotating manner, the U-shaped frame (201) is threadedly connected to the lead screw (219), a motor (220) is arranged on the base (1), and the output end of the lead screw (219) is connected to the motor (220).

7. The ceramic substrate thickness detection apparatus of claim 6 wherein, The rectangular block (204) is provided with an external slot (229), the external slot (229) is provided with a one-way valve one (230), the external slot (229) and the cavity (213) are communicated, and the connecting pipe (223) two is provided with a one-way valve two (231).

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