Multi-station rotation driving detection device for substrate detection

Abstract

The invention relates to the technical field of substrate detection, in particular to a multi-station rotary driving detection device for substrate detection, which comprises a support frame, the support frame comprises a support column, a vertical frame and an annular frame, and a driving motor is arranged in the support column; and the turntable is rotationally connected with the support frame and is driven by the driving motor. According to the invention, the first trapezoidal block and the second trapezoidal block are arranged, so that an innovative detection mode of partition detection and step-by-step coverage is adopted in the substrate detection process. When the substrate is in contact with the first trapezoidal block, more than 50% of the area of the substrate firstly enters the shooting range of the industrial camera, and first detection is completed; and along with continuous rising of the substrate and contact with the second trapezoidal block, the remaining undetected area is gradually exposed in the visual field of the camera, so that second detection is realized. The staged and progressive detection mode ensures that each corner of the substrate can be completely captured by the industrial camera, so that a detection blind area is effectively avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of substrate detection, in particular to a multi-station rotationally driven detection device for substrate detection. Background Art

[0002] In modern electronic manufacturing and other industries, substrates are core basic components, and their quality inspection is directly related to the performance and reliability of electronic products. At present, most substrate inspection devices use a single fixed-angle inspection or simple translational scanning method, which makes it difficult to fully cover the surface of the substrate. In traditional fixed-angle inspection, since the substrate needs to be fixed in a specific position, the area in contact with the clamping structure cannot be captured by the camera, resulting in a large proportion of detection blind areas. Defects such as scratches and holes hidden in these areas are easily overlooked. Although the simple translational scanning inspection method can avoid detection blind areas, it requires the substrate to be turned over before inspection. This flipping process not only increases the complexity of the inspection process, extends the inspection cycle, and reduces production efficiency, but also easily introduces new problems in the flipping operation.

[0003] Therefore, there is an urgent need for a device that can achieve all-round and efficient detection of substrates without complicated flipping operations, so as to solve many problems in the existing technology. Summary of the Invention

[0004] The purpose of the present invention is to provide a multi-station rotary drive detection device for substrate detection, which solves the problem that the substrate cannot be detected in an all-round and efficient manner.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions: A multi-station rotary drive detection device for substrate detection, comprising: The support frame includes a support column, a vertical frame and a ring frame, wherein a driving motor is provided in the support column; a turntable, rotatably connected to the support frame and driven by the drive motor; Three sets of fixing components are evenly arranged on the surface of the turntable in a circumferential direction and are used to detachably fix the base plate; A loading assembly, provided on the surface of the support frame, for assisting the substrate in loading onto the fixing assembly; The auxiliary mechanism is provided on the surface of the support frame and is located below the detection component, and is used for lifting the fixed component upward to the detection position.

[0006] Preferably, the fixing assembly includes a sliding rod and a sliding frame, the sliding frame is arranged as an N-shaped structure, the two arms of the sliding frame are slidably inserted on the top of the sliding rod, the top of the sliding rod and the bottom of the sliding frame are both provided with a slot for placing the substrate, and the inside of the slot is provided with a roller.

[0007] Preferably, the detection component includes an N-shaped frame, and the first trapezoidal block and the second trapezoidal block are fixedly installed on the side where the two arms of the N-shaped frame are close to each other, and the first trapezoidal block and the second trapezoidal block are staggered with each other. Two supporting arms are fixedly installed on the side where the two arms of the N-shaped frame are close to each other, and industrial cameras are fixedly installed on the surfaces of the supporting arms. The first trapezoidal block is a slope, and the slope faces downward, and the second trapezoidal block is two slopes, and the two slopes face upward and downward respectively.

[0008] Preferably, the auxiliary mechanism includes a first connecting arm, a first electric push rod is fixedly mounted on the surface of the first connecting arm, and a connecting disk is fixedly mounted on the top end of the first electric push rod.

[0009] Preferably, an air pump is fixedly mounted on the surface of the first connecting arm, an air outlet end of the air pump is connected to a hose, the other end of the hose is connected to a thimble tube, and the thimble tube is fixedly mounted on the surface of the connecting disk.

[0010] Preferably, the interior of the sliding rod is a hollow structure, and the bottom end of the sliding rod is provided with an ejector hole that is adapted to the size of the ejector tube. The two arms of the sliding frame are set to be hollow structures, and the two arms of the sliding frame are provided with a long groove on the side close to each other. The long groove is divided into an upper half and a lower half with the top of the sliding rod as the dividing line. After the ejector tube is inserted into the ejector hole, an air pump is used to blow high-pressure air into the interior of the sliding rod, and the gas enters the interior of the sliding frame through the long groove of the lower half, and then is discharged from the long groove of the upper half. At this time, the substrate is located between the two arms of the sliding frame, which can clean the substrate. At the same time, the substrate can also be moved during the detection process of the detection component, so that the high-pressure gas coming out of the long groove acts on the entire surface of the substrate, thereby enhancing the cleaning effect and improving the detection accuracy.

[0011] Preferably, the loading assembly includes a second connecting arm, a second electric push rod is fixedly mounted on the surface of the second connecting arm, a pin rod matching the size of the pin hole is fixedly mounted on the free end of the second electric push rod, and a cross bar is integrally formed between the two arms of the sliding frame near the bottom end.

[0012] Preferably, the upper and lower ends of the slide bar are provided with connecting ears, the upper connecting ear can limit the slide bar from sliding down from the turntable, and a spring is fixedly installed on the surface of the lower connecting ear, and the top of the spring is fixedly connected to the turntable.

[0013] Preferably, two guide grooves are provided on the surface of the annular frame, the angle between the two guide grooves is 120 degrees, and the guide grooves and the slots of the slide rods correspond to each other.

[0014] Preferably, the turntable rotates by 120 degrees each time; during the rotation of the turntable, three groups of fixed components circulate in different workstations, one group of fixed components is located below the detection component, for detecting the substrate; one group of fixed components is located at the corresponding position of the loading component, for realizing substrate loading; the other group of fixed components is for manual operation, for removing and classifying the substrates that have completed the inspection.

[0015] The present invention has at least the following beneficial effects: By placing the first and second trapezoidal blocks, the substrate inspection process employs an innovative "partitioned inspection, gradual coverage" approach. When the substrate contacts the first trapezoidal block, over 50% of the substrate's area enters the industrial camera's field of view, completing the initial inspection. As the substrate continues to rise and contact the second trapezoidal block, the remaining uninspected area gradually becomes visible to the camera, enabling a second inspection. This phased, progressive inspection method ensures that every corner of the substrate is fully captured by the industrial camera, effectively avoiding blind spots.

[0016] During loading, the downward force provided by the spring effectively secures the slide bar, ensuring it remains stationary while the ejector rod pushes the slide frame upward. This feature allows for more convenient and stable insertion of the substrate between the slide frame and the slide bar, simplifying the loading process and improving loading accuracy and efficiency. After the substrate is inspected under the detection assembly, the first electric push rod drives the connecting plate downward. The spring's pull on the slide bar, combined with gravity, allows for a smoother downward movement of the slide bar, slide frame, and substrate. Furthermore, the weight of the slide frame overcomes resistance to substrate movement, ensuring stable operation of all components throughout the downward movement process, preventing relative sliding and guaranteeing the stability and reliability of the unloading process.

[0017] By setting up a sliding frame, it naturally presses down on the top of the substrate due to its own gravity, forming a stable structure with the slide rod clamping it up and down. The two are closely matched with the substrate through the card slot. During the operation of the device, they effectively resist external interference and greatly reduce the risk of displacement and shaking of the substrate. It ensures that the substrate remains stable during transmission and detection, laying a solid foundation for accurate detection. The sliding frame adopts a hollow structure and has long grooves carefully set on both sides to construct a unique cleaning channel. During the substrate detection process, the high-pressure gas delivered by the auxiliary mechanism passes through the hollow space inside the sliding frame and is ejected from the long groove in a direction. It can quickly and efficiently remove dust, impurities and other contaminants attached to the surface of the substrate. At the same time, when the substrate moves under the action of the detection component, the airflow ejected from the long groove can more comprehensively cover the surface of the substrate, realizing simultaneous cleaning and detection, which not only avoids the interference of contaminants on the detection results, but also improves the detection efficiency and accuracy.

[0018] The meticulously designed ejector hole at the bottom of the slide bar creatively integrates the dual functions of mechanical transmission and gas delivery. The hole's dimensions are precisely matched to the ejector tube and rod. This not only provides precise guidance for the ejector tube during inspection, ensuring smooth high-pressure airflow into the slide bar for automatic cleaning, but also serves as a channel for the ejector rod during loading, ensuring smooth lifting of the slide frame. This integrated design eliminates the redundant, single-function holes found in traditional devices, significantly simplifying the structure.

[0019] The guide grooves on the surface of the annular frame not only provide precise positioning and guidance for substrate loading, making it easy for operators to quickly and accurately push the substrates into the slide slots; they also serve as channels for substrate removal during unloading, guiding the substrates out smoothly and effectively preventing deformation of the substrates due to uneven force during manual operation. It has both loading guidance and unloading assistance functions. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0021] in: Figure 1 It is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the structure of the detection component of the present invention; Figure 3 This is a schematic diagram of the auxiliary mechanism structure of the present invention; Figure 4 This is a schematic structural diagram of the feeding assembly of the present invention; Figure 5 This is a schematic diagram of the structure of the drive motor of the present invention; Figure 6 This is a schematic diagram of the structure of the fixing assembly of the present invention; Figure 7 is a cross-sectional view of the slide bar of the present invention; Figure 8 A cross-sectional view of a sliding frame according to the present invention; Figure 9 It is a schematic diagram of the sliding frame structure of the present invention.

[0022] In the picture: 1. Support frame; 101. Support column; 102. Vertical frame; 103. Ring frame; 1031. Guide groove; 2. Detection assembly; 21. N-shaped frame; 22. First trapezoidal block; 23. Support arm; 24. Industrial camera; 25. Second trapezoidal block; 3. Turntable; 4. Auxiliary mechanism; 41. First electric push rod; 42. Air pump; 43. Hose; 44. Ejector tube; 45. Connecting plate; 46. First connecting arm; 5. Fixing assembly; 51. Sliding rod; 52. Spring; 53. Sliding frame; 531. Long slot; 54. Card slot; 55. Roller; 6. Loading assembly; 61. Second connecting arm; 62. Second electric push rod; 63. Ejector rod; 7. Drive motor. DETAILED DESCRIPTION

[0023] In order to make the purpose, features, and advantages of the present invention more obvious and easy to understand, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described below are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0024] Example: like Figure 1-9 As shown, a multi-station rotary drive detection device for substrate detection includes: The support frame 1 includes a support column 101, a vertical frame 102, and an annular frame 103. The support column 101 is provided with a drive motor 7. The vertical frame 102 is welded to the surface of the support column 101. The annular frame 103 is horizontally fixed to the surface of the vertical frame 102 and is sleeved on the outer periphery of the turntable 3. The turntable 3 is connected to the support frame 1 through a high-precision deep groove ball bearing and driven by a drive motor 7. The turntable 3 rotates at a precise angle of 120 degrees per step. The internally integrated angle encoder provides real-time feedback of the rotation angle information. Three sets of fixing components 5 are evenly arranged on the surface of the turntable 3 in the circumferential direction and are used to detachably fix the substrate. The three sets of fixing components 5 are cyclically switched to the loading station, the inspection station and the unloading station in sequence to realize the continuous operation of substrate inspection; The loading assembly 6 is provided on the surface of the support frame 1 and is used to assist the substrate in loading onto the fixing assembly 5; The auxiliary mechanism 4 is provided on the surface of the support frame 1 and is located below the detection component 2, and is used to lift the fixing component 5 upward to the detection position.

[0025] In this embodiment, the fixing assembly 5 includes a sliding rod 51 and a sliding frame 53. The sliding frame 53 is configured as an N-shaped structure. The two arms of the sliding frame 53 are slidably inserted into the top of the sliding rod 51. The top of the sliding rod 51 and the bottom of the sliding frame 53 are both provided with a card slot 54 for placing the substrate. The inside of the card slot 54 is provided with a roller 55. The roller 55 is made of polyurethane rubber-coated material, and has low friction when in contact with the substrate, ensuring the smooth fixation and movement of the substrate.

[0026] The substrate is placed between the slide frame 53 and the slide rod 51. The slide frame 53 uses its own gravity to press on the surface of the substrate, thereby achieving stable placement of the substrate. The upper and lower ends of the substrate are in contact with the rollers 55, thereby facilitating the movement of the substrate.

[0027] In this embodiment, the detection component 2 includes an N-shaped frame 21, and the first trapezoidal block 22 and the second trapezoidal block 25 are fixedly installed on the side where the two arms of the N-shaped frame 21 are close to each other. The first trapezoidal block 22 and the second trapezoidal block 25 are staggered with each other. Two support arms 23 are fixedly installed on the side where the two arms of the N-shaped frame 21 are close to each other, and the surfaces of the support arms 23 are fixedly installed with industrial cameras 24. The first trapezoidal block 22 is a slope, and the slope faces downward. The second trapezoidal block 25 is two slopes, and the two slopes face upward and downward respectively.

[0028] The N-shaped frame 21 is welded from aluminum alloy profiles. The first and second trapezoidal blocks 22 and 25 are constructed from a composite material of WC-Co-based cemented carbide and polytetrafluoroethylene (PTFE), using a powder metallurgy process to create a gradient structure. This maintains the rigidity of the cemented carbide while utilizing the self-lubricating properties of PTFE to reduce the coefficient of friction. Four industrial cameras 24, each with high resolution and frame rate, utilize high-resolution lenses to accurately detect even minute surface defects on the substrate. The staggered layout of the first and second trapezoidal blocks 22 and 25, coupled with the movement of the substrate during inspection, enables comprehensive, blind-spot-free inspection of the substrate.

[0029] In this embodiment, the auxiliary mechanism 4 includes a first connecting arm 46, a first electric push rod 41 is fixedly installed on the surface of the first connecting arm 46, and a connecting disk 45 is fixedly installed on the top of the first electric push rod 41. The first electric push rod 41 can drive the connecting disk 45 to move in the vertical direction, thereby driving the entire sliding rod 51 and the substrate to move in the vertical direction, making it convenient to move the substrate to the detection area.

[0030] In this embodiment, an air pump 42 is fixedly mounted on the surface of the first connecting arm 46 , the air outlet end of the air pump 42 is connected to a hose 43 , the other end of the hose 43 is connected to a ejector tube 44 , and the ejector tube 44 is fixedly mounted on the surface of the connecting disk 45 .

[0031] The interior of the slide rod 51 is a hollow structure, and the bottom end of the slide rod 51 is provided with a pin hole that matches the size of the pin tube 44. The two arms of the sliding frame 53 are set to be hollow structures, and a long groove 531 is provided on the side where the two arms of the sliding frame 53 are close to each other. The long groove 531 is divided into an upper half and a lower half with the top of the slide rod 51 as the dividing line.

[0032] The surface of the connecting plate 45 at the top of the first electric push rod 41 is provided with a mounting hole for the ejector tube 44. An air pump 42 delivers high-pressure air to the ejector tube 44 via a hose 43. The hollow channel within the slide rod 51 communicates with the ejector tube 44. Air enters through the lower half of the long slots 531 in the two arms of the slide frame 53 and exits through the upper half, acting on the substrate. This ensures that the high-pressure airflow evenly covers the substrate surface, cleaning it and improving inspection accuracy.

[0033] In this embodiment, the loading assembly 6 includes a second connecting arm 61, a second electric push rod 62 is fixedly installed on the surface of the second connecting arm 61, a pin rod 63 that is adapted to the size of the pin hole is fixedly installed at the free end of the second electric push rod 62, and a cross bar is integrally formed between the two arms of the sliding frame 53 near the bottom end.

[0034] The second electric push rod 62 has a certain stroke and thrust, and the ejector rod 63 at its free end precisely fits into the ejector hole at the bottom of the slide 51. When loading, the second electric push rod 62 pushes the ejector rod 63 upward, and the ejector rod 63 passes through the ejector hole to lift the slide 53, allowing the substrate to be directly inserted between the two arms of the slide 53.

[0035] In this embodiment, connecting ears are provided at the upper and lower ends of the slide rod 51. The upper connecting ear can limit the slide rod 51 from sliding down from the turntable 3. A spring 52 is fixedly installed on the surface of the lower connecting ear, and the top of the spring 52 is fixedly connected to the turntable 3.

[0036] The spring 52 provides a downward force that effectively secures the slide bar 51 during loading, ensuring that the slide bar 51 remains stationary while the ejector rod 63 pushes the slide frame 53 upward. This feature allows for more convenient and stable insertion of the substrate between the slide frame 53 and the slide bar 51, simplifying the loading process and improving the accuracy and efficiency of loading. After the substrate is inspected under the inspection assembly 2, the first electric push rod 41 drives the connecting plate 45 downward. At this time, the pull of the spring 52 on the slide bar 51 works in conjunction with gravity to smooth the downward movement of the slide bar 51, the slide frame 53, and the substrate. At the same time, the weight of the slide frame 53 overcomes the resistance to substrate movement, ensuring stable operation of all components throughout the downward movement process, avoiding relative sliding and guaranteeing the stability and reliability of the unloading process.

[0037] In this embodiment, two guide grooves 1031 are formed on the surface of the annular frame 103 . The angle between the two guide grooves 1031 is 120 degrees. The guide grooves 1031 and the engaging grooves 54 of the sliding rod 51 correspond to each other.

[0038] The guide groove 1031 on the surface of the annular frame 103 not only provides precise positioning and guidance for substrate loading, making it convenient for the operator to quickly and accurately push the substrate to the sliding rod 51 slot 54; at the same time, when unloading, it also serves as a channel for the substrate to be moved out, guiding the substrate to be pulled out smoothly, and effectively avoiding deformation of the substrate due to uneven force during manual operation, and has the functions of both loading guidance and unloading assistance.

[0039] In this embodiment, the turntable 3 rotates 120 degrees each time; during the rotation of the turntable 3, the three groups of fixed components 5 circulate in different workstations, one group of fixed components 5 is located below the detection component 2, for detecting the substrate; one group of fixed components 5 is located at the corresponding position of the loading component 6, for realizing substrate loading; the other group of fixed components 5 is for manual operation, for removing and classifying the substrates that have completed the inspection.

[0040] In the above embodiments, the relevant semi-automatic and automated equipment are all controlled by circuits of external systems, which will not be elaborated in this application.

[0041] The workflow is as follows: First, place the substrate in the guide groove 1031 of the annular frame 103. At this time, the turntable 3 is in the initial position, and one set of fixing components 5 is located at the corresponding position of the loading component 6. Start the second electric push rod 62, which pushes the ejector rod 63 upward. The ejector rod 63 passes through the ejector hole at the bottom end of the slide bar 51 and acts on the cross bar, thereby moving the entire slide frame 53 upward. Push the substrate from the guide groove 1031 to between the two arms of the slide frame 53. Then, the second electric push rod 62 retracts, driving the ejector rod 63 downward. At this time, the slide frame 53 moves downward under the action of its own gravity, and then the top of the substrate is located in the slot 54 of the slide frame 53. The slot 54 of the slide frame 53 and the slot 54 of the slide bar 51 can be used to fix the substrate, so that the substrate can be stably moved to the bottom of the detection component 2 for detection.

[0042] Drive motor 7 starts, rotating turntable 3 120 degrees, moving fixed assembly 5, which holds the substrate, below detection assembly 2. At this point, first electric push rod 41 of auxiliary mechanism 4 activates, pushing connecting plate 45 upward. Connecting plate 45 drives ejector tube 44 into the ejector hole at the bottom of slide bar 51. Simultaneously, air pump 42 activates, blowing high-pressure air into slide bar 51 through hose 43 and ejector tube 44. The air then enters the slide bar 53 through slots 531 in the lower half of its arms and is discharged through slots 531 in the upper half, cleaning the substrate surface. During the cleaning process, the detection component 2 starts to work. As the auxiliary mechanism 4 continues to push the fixed component 5 upward, the slide rod 51 drives the substrate to move upward, and the substrate will first contact the bottom slope of the second trapezoidal block 25. Under the guidance of the slope, the substrate moves toward one side of the second trapezoidal block 25 until the edge of the substrate contacts the tip of the second trapezoidal block 25. At this time, the substrate continues to move upward. Since the first trapezoidal block 22 and the second trapezoidal block 25 are staggered with each other and the position design of the support arm 23, more than half of the entire substrate can be within the shooting field of view of the industrial camera 24 on the two support arms 23 on the same side of the first trapezoidal block 22, and the two support arms 23 are located on both sides of the substrate, so that both sides of the substrate can be inspected at the same time. As the substrate continues to move upward, this side can be fully detected by the industrial camera 24. Then, the substrate will come into contact with the inclined surface of the first trapezoidal block 22. Under the action of this inclined surface, the substrate will move in the direction of the same side of the second trapezoidal block 25. At this time, the other half of the substrate that has just not been detected enters the detection range and can be detected by the industrial camera 24. When the side of the substrate is flush with the side wall of the first trapezoidal block 22, the substrate is continued to move upward. At this time, the substrate is within the shooting range of the two industrial cameras 24 on the same side of the second trapezoidal block 25, and double-sided detection of the substrate can be achieved. Through this detection method, the detection blind spot caused by the substrate contacting the card slot 54 is effectively avoided, ensuring comprehensive and accurate quality inspection of the substrate.

[0043] After the industrial camera 24 completes its inspection and filming, the first electric push rod 41 of the auxiliary mechanism 4 drives the connecting plate 45 downward. At this point, the slide bar 51 begins to move downward under its own weight and the action of the spring 52, driving the substrate downward with it. During this downward movement, the bottom corner of the substrate contacts the top slope of the second trapezoidal block 25. Guided by this slope, the substrate moves again, cleverly avoiding the obstruction of the second trapezoidal block 25. This allows the slide bar 51 and substrate to move smoothly downward until they reach a position suitable for manual operation. It is important to note that as the substrate moves downward, its bottom corner contacts the top slope of the second trapezoidal block 25, causing the substrate to move under the influence of the slope, generating a certain amount of upward resistance. Because the slide frame 53 is sufficiently heavy, this weight is sufficient to overcome the upward resistance of the substrate, allowing the substrate to move smoothly to one side. During this process, the slide frame 53 and the slide bar 51 do not slide relative to each other, ensuring the stability and reliability of the entire downward movement.

[0044] After inspection is complete, the drive motor 7 is restarted, rotating the turntable 3 120 degrees, moving the inspected fixed assembly 5 to a position accessible for manual operation. The operator manually removes the substrate from the guide slots 1031 of the annular frame 103, extracting it from the slide rods 51 and the retaining slots 54 of the sliding frame 53. This completes unloading and allows the substrates to be sorted. The loading, inspection, and unloading process is then repeated, achieving continuous inspection of the substrates.

[0045] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the above-described embodiments. The above-described embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A multi-station rotary drive detection device for substrate detection, characterized in that: include: A support frame (1) comprising a support column (101), a vertical frame (102) and an annular frame (103), wherein a driving motor (7) is provided in the support column (101); A turntable (3) is rotatably connected to the support frame (1) and driven by the drive motor (7); Three groups of fixing components (5) are evenly arranged on the surface of the turntable (3) in a circumferential direction and are used for detachably fixing the base plate; A loading assembly (6) is provided on the surface of the support frame (1) and is used to assist in loading a substrate onto the fixing assembly (5); An auxiliary mechanism (4) is provided on the surface of the support frame (1) and is located below the detection component (2), and is used to lift the fixing component (5) upward to a detection position.

2. The multi-station rotary drive detection device for substrate detection according to claim 1, characterized in that: The fixing assembly (5) comprises a slide rod (51) and a slide frame (53), wherein the slide frame (53) is arranged in an n-shaped structure, and two arms of the slide frame (53) are slidably inserted on the top of the slide rod (51), and a slot (54) for placing a substrate is provided at the top of the slide rod (51) and the bottom of the slide frame (53), and a roller (55) is provided inside the slot (54).

3. The multi-station rotary drive detection device for substrate detection according to claim 2, characterized in that: The detection component (2) comprises an n-shaped frame (21), wherein a first trapezoidal block (22) and a second trapezoidal block (25) are fixedly mounted on one side of two arms of the n-shaped frame (21) close to each other, respectively; the first trapezoidal block (22) and the second trapezoidal block (25) are staggered with each other; two support arms (23) are fixedly mounted on one side of two arms of the n-shaped frame (21) close to each other, and an industrial camera (24) is fixedly mounted on the surface of each support arm (23); the first trapezoidal block (22) is a sloped surface facing downward, and the second trapezoidal block (25) is two sloped surfaces, and the two slopes are respectively facing upward and downward.

4. The multi-station rotary drive detection device for substrate detection according to claim 3, characterized in that: The auxiliary mechanism (4) comprises a first connecting arm (46), a first electric push rod (41) is fixedly mounted on the surface of the first connecting arm (46), and a connecting disk (45) is fixedly mounted on the top end of the first electric push rod (41).

5. The multi-station rotary drive detection device for substrate detection according to claim 4, characterized in that: An air pump (42) is fixedly mounted on the surface of the first connecting arm (46); an air outlet end of the air pump (42) is connected to a hose (43); the other end of the hose (43) is connected to a thimble tube (44); and the thimble tube (44) is fixedly mounted on the surface of the connecting disk (45).

6. The multi-station rotary drive detection device for substrate detection according to claim 5, characterized in that: The interior of the slide rod (51) is a hollow structure, and the bottom end of the slide rod (51) is provided with an ejector hole that matches the size of the ejector tube (44). The two arms of the slide frame (53) are set as hollow structures, and the two arms of the slide frame (53) are provided with a long groove (531) on the side close to each other. The long groove (531) is provided with an upper half and a lower half with the top of the slide rod (51) as the dividing line.

7. The multi-station rotary drive detection device for substrate detection according to claim 6, characterized in that: The loading assembly (6) includes a second connecting arm (61), a second electric push rod (62) is fixedly mounted on the surface of the second connecting arm (61), a thimble rod (63) adapted to the size of the thimble hole is fixedly mounted on the free end of the second electric push rod (62), and a cross bar is integrally formed between the two arms of the sliding frame (53) near the bottom end.

8. The multi-station rotary drive detection device for substrate detection according to claim 7, characterized in that: The upper and lower ends of the slide bar (51) are both provided with connecting ears. The upper connecting ear can limit the slide bar (51) from sliding down from the turntable (3). A spring (52) is fixedly mounted on the surface of the lower connecting ear. The top end of the spring (52) is fixedly connected to the turntable (3).

9. The multi-station rotary drive detection device for substrate detection according to claim 1, characterized in that: Two guide grooves (1031) are formed on the surface of the annular frame (103), and the two guide grooves (1031) are 120 degrees apart. The guide grooves (1031) and the clamping grooves (54) of the slide bar (51) correspond to each other.

10. The multi-station rotary drive detection device for substrate detection according to claim 1, characterized in that: The turntable (3) rotates at an angle of 120 degrees each time; during the rotation of the turntable (3), the three groups of fixed components (5) are circulated in different workstations, wherein one group of fixed components (5) is located below the detection component (2) and is used to detect the substrate; one group of fixed components (5) is located at a corresponding position of the loading component (6) and is used to load the substrate; and the other group of fixed components (5) is for manual operation and is used to remove and classify the substrates that have completed the inspection.

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