MEMS three-axis gyroscope structure for vehicle

Abstract

The invention provides an MEMS three-axis gyroscope structure for a vehicle, and belongs to the technical field of gyroscopes, the MEMS three-axis gyroscope structure for the vehicle comprises a driving unit, a detection unit and a first coupling unit, the driving unit comprises two groups of driving assemblies, and the two groups of driving assemblies are distributed at intervals in the Y direction; the driving assembly comprises driving mass blocks and a driving module connected to the driving mass blocks, the driving module drives the driving mass blocks to move in the X direction under the action of electrostatic force, and the two driving mass blocks move in opposite directions; the detection unit comprises a Z-axis detection part and an X / Y-axis detection part which are located between the two driving mass blocks, the Z-axis detection part is used for moving in the Y direction under the action of the driving mass blocks, and the X / Y-axis detection part is used for twisting around the X axis or the Y axis under the action of the driving mass blocks; the first coupling unit is elastically connected between the two driving mass blocks and used for limiting the two driving mass blocks to move in the same direction in the X direction.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of gyro structure, and more particularly to a MEMS three-axis gyro structure for vehicles. BACKGROUND

[0002] Silicon-based MEMS gyroscopes have achieved wide application in the automotive electronics field due to their small size, light weight, low cost, and high reliability, and provide important motion state sensing support for key functions such as vehicle navigation, attitude control, automatic navigation, and safety systems. As an important form of silicon-based MEMS gyroscopes, three-axis gyroscopes have multi-dimensional and key applications in vehicles, providing core support for safe driving, precise control, and intelligent experience of vehicles.

[0003] However, the three-axis gyroscopes in the prior art have the defect of low integration. The sensing structures of each axis are often designed separately or simply combined, which makes it difficult to further reduce the overall volume, is not conducive to the rationalization of the layout of the vehicle body structure, and easily introduces errors during assembly, affecting the measurement consistency.

[0004] In addition, the existing three-axis gyroscopes have insufficient robustness and weak suppression ability to environmental disturbances such as vibration and temperature, which affects the measurement accuracy of MEMS gyroscopes when applied to vehicles. The driving routes of vehicles are complex and changeable, especially when driving on bumpy roads, steep slopes, and waterlogged sections, etc. The MEMS gyroscope will be subjected to severe vibration and impact, which greatly reduces the stability and accuracy of the measurement data, and cannot meet the demand for high-precision motion sensing of automobiles in complex scenarios. SUMMARY

[0005] The purpose of the present application is to provide a MEMS three-axis gyro structure for vehicles, which aims to solve the problem of low integration and insufficient robustness of existing three-axis gyroscopes, which affects the detection accuracy when applied to vehicles.

[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present application is: A MEMS three-axis gyro structure for vehicles is provided, comprising: A driving unit comprising two groups of driving components, the two groups of driving components being spaced apart along the Y direction, the driving component comprising a driving mass, a driving module connected to the driving mass, the driving module being used to receive an external input electrical signal, the driving module driving the driving mass to move along the X direction under the action of electrostatic force, and the two groups of driving masses moving in opposite directions; a detection unit comprising a Z-axis detection part and an X / Y-axis detection part between the two driving masses, the Z-axis detection part being configured to move along the Y direction under the action of the driving masses, and the X / Y-axis detection part being configured to twist around the X axis or the Y axis under the action of the driving masses; a first coupling unit elastically connected between the two driving masses and configured to limit the same-direction movement of the two driving masses along the X direction.

[0007] In a possible implementation, the first coupling unit comprises a plurality of limiting blocks, each of which is connected between the two driving masses, the plurality of limiting blocks are distributed along the X direction, and the limiting blocks on the opposite sides in the Y direction are configured to move along the X direction with the corresponding driving masses.

[0008] In a possible implementation, the Z-axis detection part comprises: a first mass elastically connected to one of the driving masses; a second mass elastically connected to the other driving mass, the second mass and the first mass being configured to move along the X direction under the action of the driving masses and having a freedom degree of reverse movement along the Y direction; a Z-axis detection structure comprising two Z-axis masses distributed along the Y direction, one of the Z-axis masses being elastically connected to the first mass, the other Z-axis mass being elastically connected to the second mass, and the two Z-axis masses being configured to move reversely along the Y direction; The vehicle MEMS three-axis gyroscope structure further comprises a second coupling unit elastically connected between the two Z-axis masses and configured to limit the same-direction movement of the two Z-axis masses along the Y direction.

[0009] In a possible implementation, the second coupling unit comprises a plurality of coupling modules, the plurality of coupling modules being distributed along the X direction, and each of the coupling modules being connected between the two Z-axis masses.

[0010] In a possible implementation, the coupling module comprises: a third mass elastically connected to one of the Z-axis masses; a fourth mass elastically connected to the other Z-axis mass; wherein the third mass and the fourth mass are elastically connected.

[0011] In a possible implementation, the driving mass has a driving part extending towards the Z-axis detection part, and the first mass and the second mass are respectively connected to the driving part of the corresponding driving mass.

[0012] In a possible implementation, the middle part of the Z-axis mass block is provided with a plurality of characteristic rods and first detection electrodes, and each of the characteristic rods is distributed with the first detection electrodes on opposite sides in the Y direction.

[0013] In a possible implementation, the X / Y-axis detection part comprises: a biaxial mass block with a receiving through hole in the center, the biaxial mass block being elastically connected between the two driving mass blocks; an intermediate coupling structure arranged in the receiving through hole, the intermediate coupling structure being elastically connected to the biaxial mass block.

[0014] In a possible implementation, the intermediate coupling structure comprises: an outer coupling ring arranged in the receiving through hole and elastically connected to the biaxial mass block in the X direction; an inner coupling beam elastically connected to the inner periphery of the outer coupling ring in the Y direction.

[0015] In a possible implementation, the driving module comprises a force adding module and a detection module.

[0016] The vehicle MEMS three-axis gyroscope structure provided by the application has the following beneficial effects: compared with the prior art, the driving mass blocks in the gyroscope structure need to work in the reverse resonance mode, the first coupling unit is arranged to limit the same-direction movement of the two driving mass blocks in the X direction, the driving mode can be forced to concentrate on the preset reverse resonance mode, the mode mixing is reduced, a stable reference vibration is provided for subsequent angular velocity detection, the same-direction disturbance of the two driving mass blocks caused by the vibration (impact, etc.) or the structural change caused by the temperature change in the external environment can be offset by the limiting effect of the first coupling unit on the same-direction movement of the two driving mass blocks, and the anti-interference ability of the gyroscope structure to the environmental interference is significantly improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description only some embodiments of the application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0018] Figure 1 The structure schematic diagram of the vehicle MEMS three-axis gyroscope structure provided by the embodiment of the application; Figure 2 The local enlarged structure schematic diagram of the Z-axis mass block adopted by the embodiment of the application; Figure 3A driving motion mode diagram of the MEMS three-axis gyroscope structure for vehicles provided by the embodiment of the present application; Figure 4 An X-axis detection mode diagram of the MEMS three-axis gyroscope structure for vehicles provided by the embodiment of the present application; Figure 5 A Z-axis detection mode diagram of the MEMS three-axis gyroscope structure for vehicles provided by the embodiment of the present application; Figure 6 A Y-axis detection mode diagram of the MEMS three-axis gyroscope structure for vehicles provided by the embodiment of the present application.

[0019] In the drawings: 11 - driving mass; 111 - driving part; 12 - driving module; 121 - force adding module; 122 - detection module; 21 - first mass; 22 - second mass; 23 - Z-axis mass; 24 - coupling arm; 25 - feature rod; 30 - X / Y-axis detection part; 31 - double-axis mass; 32 - outer coupling ring; 33 - inner coupling beam; 41 - limiting block; 51 - third mass; 52 - fourth mass; 60 - first detection electrode; 62 - second detection electrode. DETAILED DESCRIPTION

[0020] In order to make the technical problems to be solved by the present application, technical solutions and beneficial effects clearer, the present application will be further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and are not used to limit the present application.

[0021] In the claims, specification, and above drawings of the present application, unless otherwise explicitly defined, the terms such as "first", "second", or "third" are used only to distinguish different objects, and are not used to describe a specific sequence.

[0022] In the claims, specification, and above drawings of the present application, unless otherwise explicitly defined, the terms such as "fixedly connected" or "fixedly connected" should be understood in a broad sense, that is, any connection mode between the two without displacement relationship and relative rotation relationship, that is, including non-detachable fixed connection, detachable fixed connection, integration and fixed connection through other devices or elements.

[0023] In the claims, specification, and above drawings of the present application, the terms such as "include", "have" and their variants are intended to mean "contain but not limited to".

[0024] In the present application, Figure 1The X direction marked is the +X direction, the Y direction marked is the +Y direction, and the +Z direction is the direction outward of the paper, and the -Z direction is the direction inward of the paper.

[0025] Please refer to Figures 1 to 6 The MEMS three-axis gyroscope structure for vehicle comprises a driving unit, a detecting unit and a first coupling unit. The driving unit comprises two groups of driving assemblies, which are spaced apart along the Y direction. The driving assembly comprises a driving mass 11 and a driving module 12 connected to the driving mass 11. The driving module 12 is used for receiving an external input electrical signal. Under the action of electrostatic force, the driving module 12 drives the driving mass 11 to move along the X direction, and the two driving masses 11 move in opposite directions. The detecting unit comprises a Z-axis detecting part and an X / Y-axis detecting part 30 located between the two driving masses 11. The Z-axis detecting part is used for moving along the Y direction under the action of the driving mass 11. The X / Y-axis detecting part 30 is used for being twisted around the X axis or the Y axis under the action of the driving mass 11. The first coupling unit is elastically connected between the two driving masses 11, and is used for limiting the same-direction movement of the two driving masses 11 along the X direction. The Z-axis detecting part and the X / Y-axis detecting part 30 are spaced apart along the X axis and are relatively independent. The Z-axis detecting part is elastically connected to the two driving masses 11, and the X / Y-axis detecting part 30 is also elastically connected to the two driving masses 11. The first coupling unit can be connected to the two opposite sides of the driving mass 11 along the X direction.

[0026] In the specific implementation, the three-axis gyroscope structure is mounted on a fixed detecting layer. The three-axis gyroscope structure is located in a plane, and the fixed detecting layer is located below the plane of the three-axis gyroscope structure (-Z direction). In the detection process, the Z-axis detecting part changes position along the Y direction. The electrode in the Z-axis detecting part (the electrode is in the same layer as the Z-axis detecting part, but needs to be electrically connected to the fixed detecting layer) identifies the position change of the Z-axis detecting part. According to the change of the capacitance value caused by the position change, the angular velocity of the Z-axis detecting part is calculated (the conversion process is a prior art, which will not be described here). The X / Y-axis detecting part 30 rotates around the X axis or the Y axis. The fixed detecting layer identifies the change of the capacitance value caused by the position change of the X / Y-axis detecting part 30 through the corresponding electrodes of the layer and the X / Y-axis detecting part 30, so as to calculate the angular velocity of the X / Y-axis detecting part 30.

[0027] Correspondingly, the driving mass 11, the driving module 12, the Z-axis detecting part, the X / Y-axis detecting part 30 and the first coupling unit are all elastically connected to the fixed detecting layer.

[0028] It should be noted that the elastic connection in the present application is realized by using elastic beams, for example, the elastic connection between the first coupling unit and the drive mass 11, that is, one end of the elastic beam is connected to the first coupling unit, and the other end is connected to the drive mass 11; again, for example, the elastic connection between the drive mass 11 and the fixed detection layer, that is, one end of the elastic beam is connected to the fixed detection layer, and the other end is connected to the drive mass 11, and the point where the elastic beam is connected to the fixed detection layer is the support anchor point. However, the degrees of freedom provided by each elastic beam to the corresponding mass block are not the same, for example, the elastic beam corresponding to the drive mass 11 allows the drive mass 11 to have a degree of freedom along the X-axis, and the elastic beam corresponding to the first mass block 21 allows the first mass block 21 to have a degree of freedom along the Y-axis.

[0029] The vehicle MEMS three-axis gyroscope structure provided by the present application is used in specific use process, the relative two sides of the drive mass 11 along the X-axis are respectively elastically connected with the first coupling unit, the corresponding first coupling unit here has small stiffness in the X direction and large stiffness in the Y direction, so the drive mass 11 has a degree of freedom in the X direction, when the driving module 12 applies force, one of the drive mass 11 receives the driving force in the +X direction, and the other drive mass 11 receives the driving force in the -X direction, so the two drive mass 11 move towards each other (see Figure 3 ), the force is reversed after half a period, and the two drive mass 11 finally oscillate in the X direction, when there is angular velocity input in the Z direction (see Figure 5 ), the Z-axis detection part has Y-direction displacement change, and the corresponding electrode in the Z-axis detection part detects the change of the corresponding capacitance gap of the Z-axis detection part to realize differential detection; when there is angular velocity input in the X direction (see Figure 4 ), the X / Y-axis detection part 30 twists around the Y-axis under the action of the Coriolis force, and the fixed detection layer detects the change of the corresponding capacitance gap of the X / Y-axis detection part 30 to realize differential detection; when there is angular velocity input in the Y direction (see Figure 6 ), the X / Y-axis detection part 30 twists around the X-axis under the action of the Coriolis force, and the fixed detection layer detects the change of the corresponding capacitance gap of the X / Y-axis detection part 30 to realize differential detection.

[0030] It should be noted that in the case of reverse movement of the two drive mass 11 along the X direction, the X / Y-axis detection part 30 and the Z-axis detection part connected with the two drive mass 11 have corresponding motion postures, which are defined as initial motion states, and the Y-direction position change of the Z-axis detection part occurs on the basis of the initial motion state, and similarly, the twisting of the X / Y-axis detection part 30 also occurs on the basis of the initial motion state.

[0031] The MEMS three-axis gyroscope structure for vehicles provided in the application has the following advantages: compared with the prior art, the driving mass 11 in the gyroscope structure needs to work in the reverse resonance mode, the first coupling unit is arranged to limit the same-direction motion of the two driving masses 11 in the X direction, the driving mode can be forced to concentrate on the preset reverse resonance mode, the mode mixing is reduced, and a stable reference vibration is provided for subsequent angular velocity detection; the vibration (impact, etc.) in the external environment or the structural change caused by temperature change can cause the same-direction disturbance of the two driving masses 11, the limitation of the first coupling unit on the same-direction motion of the two driving masses 11 can offset the common-mode disturbance, and the anti-interference ability of the gyroscope structure to the environmental interference is significantly improved.

[0032] In some embodiments, referring to Figure 1 The first coupling unit includes a plurality of limiting blocks 41, each limiting block 41 is connected between the two driving masses 11, the plurality of limiting blocks 41 are spaced apart along the X direction, and the limiting blocks 41 are located on opposite sides in the Y direction to move with the corresponding driving masses 11 along the X direction.

[0033] For example, the first coupling unit includes two limiting blocks 41, the two limiting blocks 41 extend along the Y direction, and the two limiting blocks 41 are connected to the driving masses 11 on opposite sides in the X direction (that is, each side of the opposite sides of the two driving masses in the X direction is connected to a limiting block 41), and the middle part of the limiting block 41 is elastically connected to the fixed detection layer.

[0034] The driving mass 11 and the fixed detection layer are connected by an elastic beam, the elastic beam has small stiffness in the X direction and large stiffness in the Y direction, so the driving mass 11 has a degree of freedom in the X direction; in the process of driving the limiting block to move, the limiting block 41 extends along the Y axis and is connected between the two driving masses 11, the limiting block 41 is supported by the anchor point of the middle part connected to the fixed detection layer, and swings with the two driving masses 11.

[0035] In the embodiment, the limiting blocks 41 are symmetrically arranged in the X direction, can synchronously constrain the same-direction motion of the driving masses 11 from both sides, the limiting effect is more balanced, and structural bias caused by unilateral constraint is avoided; the middle part of the limiting block 41 is connected to the fixed detection layer, so that when the driving mass 11 moves reversely, the limiting block 41 can swing adaptively with the reverse displacement, and the effective motion is not hindered; the symmetric arrangement of the limiting blocks 41 can make the driving unit bear force more evenly, reduce parasitic stress caused by asymmetric constraint, and enhance the structural stability during long-term work.

[0036] In some embodiments, referring to Figure 1The Z-axis detection part comprises a first mass block 21, a second mass block 22 and a Z-axis detection structure, the first mass block 21 is elastically connected with one of the driving mass blocks 11; the second mass block 22 is elastically connected with the other driving mass block 11, the second mass block 22 and the first mass block 21 are used to move along the X direction under the action of the driving mass block 11 and have the freedom of reverse movement along the Y direction; the Z-axis detection structure comprises two Z-axis mass blocks 23 which are spaced apart along the Y direction, one of the Z-axis mass blocks 23 is elastically connected to the first mass block 21, the other Z-axis mass block 23 is elastically connected to the second mass block 22, and the two Z-axis mass blocks 23 are used to move reversely along the Y direction. The MEMS three-axis gyroscope structure for vehicles further comprises a second coupling unit which is elastically connected between the two Z-axis mass blocks 23 and is used to limit the same-direction movement of the two Z-axis mass blocks 23 along the Y direction.

[0037] The Z-axis detection structure is located between the first mass block 21 and the second mass block 22, the Z-axis mass block 23 is elastically connected to the fixed detection layer, and the second coupling unit can be specifically elastically connected to the relative two sides of the Z-axis detection structure along the X direction.

[0038] When the two driving mass blocks 11 move reversely along the X direction, the first mass block 21 and the second mass block 22 move reversely along with the two driving mass blocks 11, when there is a Z-direction angular velocity input, the Z-axis mass block 23 is subjected to a Y-direction Coriolis force, and the elastic beam between the Z-axis mass block 23 and the fixed detection layer has a large Y-direction stiffness, so that the first mass block 21 and the second mass block 22 drive the two Z-axis mass blocks 23 to move towards each other along the Y direction, the electrodes in the Z-axis detection part detect the position change of the Z-axis mass block 23 along the Y direction, and differential detection is realized according to the change of the capacitance gap.

[0039] The Z-axis detection relies on the Y-direction differential mode movement of the Z-axis mass block 23, by introducing the second coupling unit, the same-direction movement of the Z-axis mass block 23 along the Y direction is limited, and the zero drift error of the Z-axis measurement can be significantly reduced; the two Z-axis mass blocks 23 correspond to two driving assemblies respectively, and cooperate with the constraint of the second coupling unit to ensure that the differential mode signal of the Z-axis detection is more accurate.

[0040] In some embodiments, referring to Figure 1 The second coupling unit comprises a plurality of coupling modules, the plurality of coupling modules are spaced apart along the X direction, and each coupling module is connected between the two Z-axis mass blocks 23.

[0041] Specifically, two coupling modules can be arranged, and the coupling arms 24 are arranged on the opposite sides of the Z-axis mass block 23 in the X direction. The coupling arms 24 extend in the X direction, and the coupling arms 24 on the same side of the two Z-axis mass blocks 23 form a coupling mounting portion. Each coupling module is mounted in the corresponding coupling mounting portion and between the two coupling arms 24 in the coupling mounting portion.

[0042] The coupling module is located between the two coupling arms 24, so that the Z-axis detection portion is compact in structure and the overall volume can be reduced, meeting the demand for miniaturization of vehicle devices. The coupling arms 24 provide clear mounting boundaries for the coupling module, avoiding weakening of the suppression effect due to position deviation.

[0043] In some embodiments, referring to Figure 1 , the coupling module includes a third mass block 51 and a fourth mass block 52. The third mass block 51 is elastically connected to one of the Z-axis mass blocks 23. The fourth mass block 52 is elastically connected to the other Z-axis mass block 23. The third mass block 51 and the fourth mass block 52 are elastically connected and are both elastically connected to the fixed detection layer.

[0044] The third mass block 51 and the fourth mass block 52 restrict the same direction movement of the two Z-axis mass blocks 23 in the Y direction, do not obviously hinder the opposite differential mode movement of the Z-axis mass block 23, ensure the complete transmission of the Z-axis angular velocity signal, and the third mass block 51 and the fourth mass block 52 are symmetrically distributed with the X axis as the symmetry axis, which can balance the stress caused by thermal expansion and cold contraction and reduce the influence of temperature drift on Z-axis detection.

[0045] In some embodiments, referring to Figure 1 , the driving mass block 11 has a driving portion 111 extending toward the Z-axis detection portion. The first mass block 21 and the second mass block 22 are respectively connected to the driving portion 111 of the corresponding driving mass block 11.

[0046] Specifically, each driving mass block 11 has two spaced driving portions 111 on the side facing the Z-axis detection portion. The driving portions 111 extend in the Y direction. The first mass block 21 is mounted between the two driving portions 111 of one driving mass block 11, and the second mass block 22 is mounted between the two driving portions 111 of the other driving mass block 11.

[0047] The elastic beams between the first mass 21 and the driving part 111 are located at the four corners of the first mass 21, and the elastic beams between the second mass 22 and the driving part 111 are located at the four corners of the second mass 22. The elastic beams on the first mass 21 and the second mass 22 have greater stiffness in the X direction and smaller stiffness in the Y direction, so as to ensure the movement of the first mass 21 and the second mass 22 in the Y direction. The driving part 111 can provide a clear installation boundary for the first mass 21 and the second mass 22, so as to avoid detection errors caused by position deviation.

[0048] In some embodiments, referring to Figures 1 to 2 , the middle part of the Z-axis mass 23 is provided with a plurality of feature rods 25 and first detection electrodes 60. Each feature rod 25 is distributed with first detection electrodes 60 on the opposite sides in the Y direction.

[0049] In this embodiment, the first detection electrodes 60 and the feature rods 25 are located at the same layer, that is, the same Z-axis height. The first detection electrodes 60 need to be electrically connected with the fixed detection layer to realize the transmission of the capacitance signal.

[0050] The feature rods 25 extend in the X direction, and a plurality of feature rods 25 are distributed at intervals in the Y direction. Each feature rod 25 corresponds to two first detection electrodes 60. When the Z-axis mass 23 is displaced in the Y direction, the first detection electrodes 60 detect the position change of the corresponding feature rod 25 to realize differential detection. Each feature rod 25 on the Z-axis mass 23 is provided with a plurality of feature rods 25, which can improve the sensitivity of the first detection electrodes 60.

[0051] In some embodiments, referring to Figure 1 , the X / Y-axis detection part 30 includes a dual-axis mass 31 and an intermediate coupling structure. The dual-axis mass 31 is provided with a receiving through hole in the center, and the dual-axis mass 31 is elastically connected between the two driving masses 11 (specifically, the dual-axis mass 31 is elastically connected to the two driving masses 11 on the opposite sides in the Y direction). The intermediate coupling structure is arranged in the receiving through hole and is elastically connected to the dual-axis mass 31. The intermediate coupling structure is elastically connected to the fixed detection layer, and the fixed detection layer has a second detection electrode 62 located in the lower layer of the dual-axis mass 31.

[0052] The dual-axis mass 31 is driven by the driving unit and can simultaneously respond to the X direction and Y direction angular velocities without the need for a separate structure, which improves the integration and reduces the volume. The intermediate coupling structure connects the dual-axis mass 31 and the fixed detection layer, which can isolate the mutual interference of the X and Y direction movements and ensure the independence of the X and Y axis detection. The intermediate coupling structure in the receiving through hole makes the support of the dual-axis mass 31 more balanced, reduces the parasitic vibration caused by the center deviation, and improves the repeatability of the X and Y axis measurement.

[0053] In some embodiments, referring to Figure 1 , the intermediate coupling structure includes an outer coupling ring 32 and an inner coupling beam 33, the outer coupling ring 32 is arranged in the accommodation through hole and is elastically connected to the biaxial mass 31 along the X direction; the inner coupling beam 33 is elastically connected to the inner periphery of the outer coupling ring 32 along the Y direction; Wherein, the opposite sides of the inner coupling beam 33 in the X direction are elastically connected to the fixed detection layer.

[0054] The intermediate coupling structure can match the independence of X and Y axis movements, the outer coupling ring 32 is connected to the opposite sides of the biaxial mass 31 (in the accommodation through hole) in the X direction, which has low stiffness in the X direction and high stiffness in the Y direction, can adapt to X direction torsional pendulum and suppress interference; the inner coupling beam 33 is connected to the opposite sides of the outer coupling ring 32 (inner periphery) in the Y direction, which has low stiffness in the Y direction and high stiffness in the X direction, and the cross interference is reduced through the differential design of stiffness.

[0055] In some embodiments, referring to Figure 1 , the driving module 12 includes a force adding module 121 and a detection module 122.

[0056] Wherein, the force adding module 121 provides electrostatic force driving, the detection module 122 monitors the motion state of the driving mass 11, forms feedback adjustment, ensures that the driving mode is stable at the resonance point, and reduces the driving frequency deviation caused by environmental changes; the detection module 122 can compensate the driving error in real time, ensures that the reverse motion of the two driving masses 11 is strictly symmetrical, and provides stable reference vibration for subsequent angular velocity detection.

[0057] The above only describes the preferred embodiments of the present application and is not used to limit the present application, any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A MEMS three-axis gyroscope structure for a vehicle, characterized in that: include: A drive unit comprising two sets of drive assemblies spaced apart along the Y direction, each drive assembly comprising a drive mass and a drive module connected to the drive mass, the drive module being configured to receive an external electrical signal and drive the drive mass to move along the X direction under the action of electrostatic force, with the two sets of drive masses moving in opposite directions; a detection unit comprising a Z-axis detection portion and an X / Y-axis detection portion located between the two driving masses, the Z-axis detection portion being configured to move along the Y direction under the action of the driving masses, and the X / Y-axis detection portion being configured to twist around the X-axis or around the Y-axis under the action of the driving masses; The first coupling unit is elastically connected between the two driving mass blocks and is used to limit the same-direction movement of the two driving mass blocks along the X direction.

2. The MEMS three-axis gyroscope structure for a vehicle according to claim 1, wherein: The first coupling unit includes a plurality of limit blocks, each of which is connected between two driving mass blocks. The plurality of limit blocks are spaced apart along the X direction. The limit blocks are located on opposite sides in the Y direction and are used to move along the X direction with the corresponding driving mass block.

3. The MEMS three-axis gyroscope structure for a vehicle according to claim 1, wherein: The Z-axis detection unit includes: a first mass elastically connected to one of the driving masses; a second mass block elastically connected to the other driving mass block, the second mass block and the first mass block being configured to move along the X direction under the action of the driving mass block and having the freedom to move in the opposite direction along the Y direction; The Z-axis detection structure includes two Z-axis mass blocks spaced apart along the Y-direction, wherein one of the Z-axis mass blocks is elastically connected to the first mass block, and the other Z-axis mass block is elastically connected to the second mass block, and the two Z-axis mass blocks are configured to move in opposite directions along the Y-direction; The vehicle-use MEMS three-axis gyroscope structure further includes a second coupling unit, which is elastically connected between the two Z-axis mass blocks and is used to limit the same-direction movement of the two Z-axis mass blocks along the Y direction.

4. The MEMS three-axis gyroscope structure for a vehicle according to claim 3, wherein: The second coupling unit includes a plurality of coupling modules, which are spaced apart along the X direction, and each coupling module is connected between two Z-axis mass blocks.

5. The MEMS three-axis gyroscope structure for a vehicle according to claim 4, wherein: The coupling module includes: a third mass block, elastically connected to one of the Z-axis mass blocks; a fourth mass block, elastically connected to the other Z-axis mass block; Wherein, the third mass block and the fourth mass block are elastically connected.

6. The MEMS three-axis gyroscope structure for a vehicle according to claim 3, wherein: The driving mass has a driving portion extending toward the Z-axis detection portion, and the first mass and the second mass are respectively connected to the driving portion corresponding to the driving mass.

7. The MEMS three-axis gyroscope structure for a vehicle according to claim 3, wherein: A plurality of characteristic rods and first detection electrodes are provided in the middle of the Z-axis mass block, and the first detection electrodes are distributed on two opposite sides of each characteristic rod along the Y direction.

8. The MEMS three-axis gyroscope structure for a vehicle according to claim 1, wherein: The X / Y axis detection unit includes: A dual-axis mass block, with a receiving hole in the center, and the dual-axis mass block is elastically connected between the two driving mass blocks; An intermediate coupling structure is provided in the accommodating through hole, and the intermediate coupling structure is elastically connected to the dual-axis mass block.

9. The MEMS three-axis gyroscope structure for a vehicle according to claim 8, wherein: The intermediate coupling structure includes: an external coupling ring, disposed in the accommodating through hole and elastically connected to the dual-axis mass block along the X direction; The inner coupling beam is elastically connected to the inner periphery of the outer coupling ring along the Y direction.

10. The vehicle MEMS three-axis gyroscope structure according to claim 1, wherein: The driving module includes a force adding module and a detection module.

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