Chip AOI detection equipment

Abstract

The present application relates to the technical field of product detection, and particularly relates to a chip AOI detection device, which comprises a device bearing table, a moving mechanism, a longitudinal moving piece, a transverse moving piece and a turnover mechanism; after an operator moves a grabbing device to a required area by cooperation of the moving mechanism and the longitudinal moving piece, the operator moves a chip to a grabbing area by a transfer device, then continuously shoots the surface of the chip by a high-speed camera, then continues to turn over the plane of the chip by the turnover mechanism, and the high-speed camera can effectively shoot the cracks of multiple chip planes and inclined planes of the chip in the turning process, so that the detection precision is improved, the whole display surface of the chip can be quickly turned over and shot, the device has good practicability and economy, and is beneficial to promotion and use of the device.

Description

Technical Field

[0001] This invention relates to the technical field of product testing, and specifically to a chip AOI testing device. Background Technology

[0002] AOI inspection, short for Automatic Optical Inspection, is a core quality inspection technology in chip manufacturing and packaging. It automatically acquires images of the chip's surface or interior using an optical imaging system, and combines image processing algorithms with artificial intelligence (AI) technology to automatically identify, judge, and classify defects in the chip's appearance, structure, or circuitry. Ultimately, it replaces or assists manual labor in achieving efficient and high-precision quality screening.

[0003] Traditional AOI inspection mainly relies on cameras to capture planar images for comparison and identification of qualified products. However, since most chips adopt a multi-layered module stacked structure, they are prone to oblique cracks due to bending. The accuracy of planar imaging cannot meet the actual needs. At the same time, the traditional chip clamping structure cannot accurately capture the planar image of all chips. It is necessary to change the clamps and cause motion interference, which affects the imaging effect. The only solution is to add cameras and change the camera angle, which is not only inefficient but also costly and affects the detection accuracy. Summary of the Invention

[0004] In order to solve the above-mentioned problems in the existing technology, the present invention aims to provide a chip AOI inspection device with a simple structure, which can effectively realize the rapid flipping of the chip to achieve full-surface imaging, and at the same time effectively identify oblique cracks to improve the detection accuracy.

[0005] The technical solution adopted in this invention is as follows: a chip AOI inspection device, mounted on a device carrier platform, includes a moving mechanism, a longitudinal displacement plate on the moving mechanism, the moving mechanism being used to assist the longitudinal displacement plate in lateral movement, a movable plate on the longitudinal displacement plate, and a longitudinal moving component on the longitudinal displacement plate to facilitate the longitudinal movement of the movable plate, a flipping mechanism on the side of the movable plate away from the longitudinal displacement plate for clamping a chip and changing the chip clamping position, a high-speed camera below the flipping mechanism for facilitating the imaging of the clamped chip, and a lateral moving component on the movable plate for adjusting the position of the flipping mechanism;

[0006] The flipping mechanism includes two sets of rotating gears. A positioning rod is provided at the middle of the opposite side of the two sets of rotating gears. A sliding rod is provided at the middle of the positioning rod. The sliding rod passes through and is slidably connected to the positioning rod. Abutment blocks are provided at the opposite ends of the two sets of sliding rods. The abutment blocks abut against the clamped chip. Connecting rods are provided on both sides of the positioning rod. A wedge-shaped guide block is provided on the side of one of the connecting rods near the clamped chip. The two sets of wedge-shaped guide blocks are axially symmetrically distributed at the clamping center of the chip. A flipping component is also provided on the connecting rod. The flipping component cooperates with the abutment block to change the clamping plane of the chip.

[0007] A thrust sliding plate is provided in the middle of the sliding rod, the sliding rod passes through and is fixedly connected to the thrust sliding plate, and a thrust spring is provided between the thrust sliding plate and the positioning rod, which is passed through by the sliding rod to flexibly clamp the chip.

[0008] The connecting rod is provided with a sliding groove. One end of the thrust sliding plate passes through and is slidably connected to the adjacent sliding groove. The end of the connecting rod near the adjacent rotating gear is provided with an expansion plate. The plane of the expansion plate is perpendicular to the plane of the adjacent rotating gear. The expansion plate is provided with a guide rail through groove. A constraint rod is provided in the guide rail through groove. The constraint rod passes through and is slidably connected to the guide rail through groove. The two ends of the constraint rod are fixedly connected to the opposite sides of the rotating gear. The two sets of constraint rods on the rotating gear are parallel to each other.

[0009] The guide rail through groove includes an oblique groove and a transverse groove. The oblique groove connects to the transverse groove, and the oblique groove expands obliquely away from the connecting end of the transverse groove away from the thrust spring.

[0010] In one embodiment, the moving mechanism includes a moving beam with a plurality of moving guide rails for guidance. A moving plate is slidably connected to the plurality of moving guide rails. Two sets of moving motors are provided at both ends of the moving beam. A conveyor belt is provided between the rotating wheels of the two sets of moving motors and wraps around the two sets of rotating wheels. The guiding direction of the conveyor belt is the same as the axial direction of the moving guide rails. The moving plate is fixedly connected to a portion of the conveyor belt. The longitudinal moving member is disposed between the longitudinal displacement plate and the moving plate.

[0011] In one embodiment, the longitudinal moving member includes several sliding guide rails, the guiding direction of the sliding guide rails being perpendicular to the guiding direction of the moving guide rails. The moving plate is also provided with a drive motor and a positioning block. The positioning block is also provided with a rotating wheel. A moving belt that wraps around the two sets of rotating wheels is provided between the drive motor and the rotating wheel of the positioning block. The guiding direction of the moving belt is the same as the axial direction of the sliding guide rails. The longitudinal displacement plate is fixedly connected to a portion of the moving belt.

[0012] In one embodiment, the lateral moving member includes two sets of connecting uprights, which are fixedly connected to the side end of the movable plate that has a flipping mechanism. A guide rod is provided between the two sets of connecting uprights. A fastening ring is provided on the side of the rotating gear away from the opposite side. The fastening ring passes through and is rotatably connected to the inner cavity of the rotating gear. A supporting lateral sliding plate is also provided on the fastening ring. The guide rod passes through and is slidably connected to the supporting lateral sliding plate.

[0013] In one embodiment, the movable plate has a rectangular groove in the middle, and a meshing rack is provided on one side of the inner cavity of the rectangular groove. The meshing rack is set in the same direction as the moving direction of the movable plate. The fastening ring is also provided with a motor fixing frame, and the motor fixing frame is also provided with an expansion motor. An expansion gear is provided on the rotating shaft of the expansion motor, and the expansion gear meshes with the meshing rack.

[0014] In one embodiment, a plurality of fixed sliding rods are provided between the two sets of connecting plates, and a sliding plate is provided in the middle of the plurality of fixed sliding rods. The fixed sliding rods pass through and are slidably connected to the sliding plate. The sliding plate is also connected to the adjacent motor mounting bracket. The sliding plate is also provided with a connecting bracket, which is connected to the high-speed camera to cooperate with the placement of the mobile high-speed camera on one side of the chip.

[0015] In one embodiment, the fastening ring is further provided with a connecting support plate, the connecting support plate is provided with a self-rotating motor, the rotating shaft of the self-rotating motor is provided with a meshing gear, and the meshing gear meshes with a similar rotating gear.

[0016] The beneficial effects of this invention are as follows: This invention is a chip AOI inspection device with a simple structure that effectively achieves rapid imaging of all surfaces of the chip by flipping it over, while effectively identifying oblique cracks and improving detection accuracy. The specific implementation method is as follows:

[0017] The operator first starts the moving motor to drive the conveyor belt to rotate, so that the moving plate moves laterally on the moving guide rail. At the same time, the operator continues to start the drive motor to rotate the moving belt between the positioning blocks, so that the longitudinal displacement plate moves longitudinally. After the entire structure of the flipping mechanism moves to the chip conveying area, the chip can be gripped.

[0018] At this point, the two sets of expansion motors start, driving the two sets of expansion gears to rotate in opposite directions. The meshing racks of the expansion gears push the motor fixing frame to move relative to each other, causing the sliding rod in the middle of the positioning rod on the rotating gear connected to the snap ring to move relative to each other. Then, the abutment blocks on the two sets of sliding rods clamp the vertical chip against the abutment plane. At this time, the high-speed camera below can start taking pictures. During the shooting process, the meshing gear on the connecting support plate starts, driving the rotating gear to rotate along the axis of the snap ring. During the rotation, the two sets of abutment blocks clamp the chip and rotate, so that the high-speed camera below can clearly take pictures of the oblique surface and the front of the chip. This avoids the situation where the oblique surface of the chip has oblique cracks, and the projected surface pictures cannot be completely captured, thus improving the detection accuracy.

[0019] Due to the abutment action of the two sets of abutment blocks, the sides of the chip cannot be photographed, requiring the chip to be flipped and clamped at the edge. At this point, after rotating the chip to the initial clamping position, the expansion motor is activated to drive the two sets of expansion gears to rotate in opposite directions. The relative movement of the positioning rod causes the constraint rod on the positioning rod to pass through the oblique groove from the transverse groove. This causes the connecting rods connected to the opposing expansion plates to abut against each other, and the connecting rods on both sides of the sliding rod approach each other. During this approach, the connecting rod with the wedge-shaped guide block first touches the two oblique corners of the chip, creating four symmetrical support points on the chip. The support points prevent the chip from falling off, allowing it to flip along the clamping center of the abutment block. At the same time, the push spring is pushed outward by the sliding plate connected by the two sets of abutment blocks. Since the abutment blocks are usually made of soft material, they will not affect the chip during the clamping process of the connecting rod. After the chip flips to a horizontal position, the two sets of abutment blocks switch positions and clamp the chip on both sides. This will drive the expansion gears on the two sets of expansion motors to rotate in opposite directions, causing the constraint rod to flow back into the horizontal groove from the oblique groove. After that, the connecting rod will be removed from the chip's shooting area, and the high-speed camera can continue to perform the above-mentioned rotation shooting.

[0020] Since the high-speed camera is connected to the sliding plate via the connecting bracket, the high-speed camera moves as the fastening ring moves. At the same time, since the high-speed camera usually has a large shooting range, it will not affect the shooting accuracy of the chip, effectively reducing the positioning function of the high-speed camera and simplifying the shooting difficulty.

[0021] Based on the shooting results, the moving mechanism and longitudinal moving parts are used to move qualified and unqualified products to different areas for easy collection and transfer.

[0022] The device has a simple structure and effectively utilizes the moving clamp of the connecting rod to flip the chip. At the same time, it can assist a high-speed camera in capturing oblique cracks while flipping the chip, effectively improving detection accuracy and efficiency, reducing costs, and has good practicality and economy, which is beneficial to the promotion and use of the equipment. Attached Figure Description

[0023] The present invention will now be described in further detail with reference to the accompanying drawings and specific implementation methods.

[0024] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0025] Figure 2 This is a partial three-dimensional structural schematic diagram of the present invention;

[0026] Figure 3 This is a three-dimensional structural diagram of the longitudinal moving component of the present invention;

[0027] Figure 4 This is a three-dimensional structural diagram of the lateral moving component of the present invention;

[0028] Figure 5 This is a three-dimensional structural diagram of the flipping mechanism of the present invention;

[0029] Figure 6 This is a three-dimensional structural diagram of the flipping mechanism of the present invention;

[0030] Figure 7 This is a partial three-dimensional structural schematic diagram of the flipping mechanism of the present invention.

[0031] Figure Descriptions: 1. Equipment support platform; 2. Moving mechanism; 21. Moving crossbeam; 22. Moving plate; 23. Moving motor; 24. Conveyor belt; 25. Moving guide rail; 3. Longitudinal moving component; 31. Longitudinal displacement plate; 32. Drive motor; 33. Moving belt; 34. Positioning block; 35. Sliding guide rail; 4. Lateral moving component; 41. Movable plate; 411. Rectangular groove; 412. Meshing rack; 42. Connecting vertical plate; 43. Guide rod; 44. Fixed slide rod; 45. High-speed camera; 451. Sliding plate; 452. Connecting frame; 5. Tilting mechanism. Mechanism; 51. Rotating gear; 511. Self-rotating motor; 512. Connecting support plate; 513. Meshing gear; 52. Fastening ring; 521. Motor fixing frame; 522. Expansion motor; 523. Expansion gear; 53. Supporting transverse slide plate; 54. Positioning rod; 541. Sliding rod; 542. Abutment block; 543. Thrust spring; 55. Expansion plate; 551. Inclined groove; 552. Transverse groove; 554. Constraint rod; 56. Connecting rod; 561. Sliding groove; 562. Wedge-shaped guide block; 57. Thrust sliding plate; 6. Chip. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the invention and are not intended to limit the invention; that is, the described embodiments are merely some embodiments of the invention, and not all embodiments. The components of the embodiments of the invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0033] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0034] The following is combined Figure 1-7 This invention describes a specific embodiment of an AOI (Automated Optical Inspection) device for a chip 6, mounted on a device carrier platform 1. The device carrier platform 1 is primarily used for the combined loading of various devices for this type of product. It utilizes robotic arms, sensors, and a control system to process the chip 6. Since this type of product typically has complex functions, the general-purpose device carrier platform 1 serves as a support structure and is not part of the invention's scope, therefore it will not be described in detail. The device includes a moving mechanism 2, on which a longitudinal displacement plate 31 is provided. The moving mechanism 2 assists in the lateral movement of the longitudinal displacement plate 31. A movable plate 41 is provided on the longitudinal displacement plate 31, and a longitudinal moving component 3 is provided on the longitudinal displacement plate 31 to facilitate the longitudinal movement of the movable plate 41. A flipping mechanism 5 is provided on the side of the movable plate 41 away from the longitudinal displacement plate 31 to hold the chip 6 and change the holding position of the chip 6. A high-speed camera 45 is provided below the flipping mechanism 5 to facilitate the filming of the held chip 6. The chip 6 is a general term and is usually a rectangular body with pins or solder joints on its surface. The high-speed camera 45 mainly takes multiple shots in a short time, which is existing technology. The movable plate 41 is also provided with a lateral moving part 4 to move the position of the flipping mechanism 5. In the implementation process, the chip 6 is usually transferred to the middle of the flipping mechanism 5 by a special gripper, conveying structure or robot arm for gripping. Since it is not the inventive point of this invention, it is not shown in the figure. The above functions can be achieved automatically or manually.

[0035] The flipping mechanism 5 includes two sets of rotating gears 51. A positioning rod 54 is provided at the middle of the opposite side of the two sets of rotating gears 51. A sliding rod 541 is provided at the middle of the positioning rod 54. The sliding rod 541 passes through and is slidably connected to the positioning rod 54. An abutment block 542 is provided at the opposite end of the two sets of sliding rods 541. The abutment block 542 is made of soft material and abuts against the clamped chip 6. Connecting rods 56 are provided on both sides of the positioning rod 54. A wedge-shaped guide block 562 is provided on the side of one of the connecting rods 56 near the clamped chip 6. The two sets of wedge-shaped guide blocks 562 are axially symmetrically distributed at the clamping center of the chip 6. A flipping component is also provided on the connecting rod 56. The flipping component cooperates with the abutment block 542 to change the clamping plane of the chip 6.

[0036] Beneficially, the moving mechanism 2 includes a moving beam 21, on which are provided several moving guide rails 25 for guidance. The number of these rails is not unique and depends on the situation. A moving plate 22 is slidably connected to several moving guide rails 25. Two sets of moving motors 23 are provided at both ends of the moving beam 21. The attached drawing adopts a simple drawing method to mainly show the structure. The two sets of moving motors 23 can be freely replaced with a combination of one set of moving motors 23 and rotating wheels. A transmission belt 24 is provided between the rotating wheels of the two sets of moving motors 23, which wraps around the two sets of rotating wheels. The guiding direction of the transmission belt 24 is the same as the axial direction of the moving guide rails 25. The moving plate 22 is fixedly connected to part of the transmission belt 24. The longitudinal moving component 3 is located between the longitudinal displacement plate 31 and the moving plate 22.

[0037] Beneficially, the longitudinal moving component 3 includes several sliding guide rails 35, the number of which depends on the actual situation. With the setting of two sets of moving structures, the detection position can be freely changed, which is convenient for detection or for classifying and placing the detected products. The guiding direction of the sliding guide rail 35 is perpendicular to the guiding direction of the moving guide rail 25. The moving plate 22 is also equipped with a drive motor 32 and a positioning block 34. The positioning block 34 is also equipped with a rotating wheel. A moving belt 33 is provided between the drive motor 32 and the rotating wheel of the positioning block 34, which wraps around the two sets of rotating wheels. It mainly cooperates with the rotating wheel on the drive motor 32 to support the moving belt 33. The guiding direction of the moving belt 33 is the same as the axial direction of the sliding guide rail 35. The longitudinal displacement plate 31 is fixedly connected to part of the moving belt 33.

[0038] Beneficially, the lateral moving part 4 includes two sets of connecting upright plates 42, which are fixedly connected to the side end of the movable plate 41 where the flipping mechanism 5 is provided. A guide rod 43 is provided between the two sets of connecting upright plates 42. A fastening ring 52 is provided on the side of the rotating gear 51 away from the opposite side. The fastening ring 52 passes through and is rotatably connected to the inner cavity of the rotating gear 51. A supporting transverse sliding plate 53 is also provided on the fastening ring 52. The guide rod 43 passes through and is slidably connected to the supporting transverse sliding plate 53 to facilitate the support of the rotating gear 51. A thrust sliding plate 57 is provided in the middle of the sliding long rod 541. The sliding long rod 541 passes through and is fixedly connected to the thrust sliding plate 57. A thrust spring 543 is provided between the thrust sliding plate 57 and the positioning long rod 54, which is passed through by the sliding long rod 541 to flexibly clamp the chip 6.

[0039] Specifically, the connecting rod 56 is provided with a sliding groove 561. One end of the thrust sliding plate 57 passes through and is slidably connected to the adjacent sliding groove 561. The end of the connecting rod 56 near the adjacent rotating gear 51 is provided with an expansion plate 55. The plane of the expansion plate 55 is perpendicular to the plane of the adjacent rotating gear 51. The expansion plate 55 is provided with a guide rail through groove. A constraint rod 554 is provided in the guide rail through groove. The constraint rod 554 passes through and is slidably connected to the guide rail through groove. The two ends of the constraint rod 554 are fixedly connected to the opposite side of the rotating gear 51. The two sets of constraint rods 554 on the rotating gear 51 are parallel to each other. Specifically, the guide rail through groove includes an inclined groove 551 and a transverse groove 552. The inclined groove 551 connects to the transverse groove 552. The connecting end of the inclined groove 551 away from the transverse groove 552 expands obliquely away from the thrust spring 543, presenting a bent linear structure.

[0040] In implementation, the expansion motor 522 is started to drive the two sets of expansion gears 523 to rotate in opposite directions. Due to the relative movement of the positioning rod 54, the constraint rod 554 on the positioning rod 54 passes through the transverse groove 552 and the oblique groove 551. After the connecting rods 56 connected to the opposing expansion plates 55 abut, the connecting rods 56 on both sides of the sliding rod 541 move closer to each other. During the approach process, the connecting rods 56 with wedge-shaped guide blocks 562 first touch the two oblique corners of the chip 6, creating four symmetrical support points for the chip 6, so it will not fall off. This causes the chip 6 to flip along the clamping center of the abutment block 542. At the same time, the push sliding plate 57, which resists the two sets of abutment blocks 542, squeezes the push spring 543 to move outward. Since the abutment blocks 542 are usually made of soft material, they will not affect the chip 6 during the clamping process of the connecting rod 56. After the chip 6 is flipped to the horizontal, the two sets of abutment blocks 542 are swapped and clamped to both sides of the chip 6. This will drive the expansion gears 523 on the two sets of expansion motors 522 to rotate in the opposite direction. This will cause the constraint rod 554 to flow back into the horizontal groove 552 from the inclined groove 551. Then, the connecting rod 56 will be removed from the shooting area of ​​the chip 6, which will allow the high-speed camera 45 to continue to perform the above-mentioned rotation shooting.

[0041] Beneficially, the movable plate 41 has a rectangular groove 411 in the middle, and a meshing rack 412 is provided on one side of the inner cavity of the rectangular groove 411. The meshing rack 412 is set in the same direction as the moving direction of the movable plate 41. The fastening ring 52 is also provided with a motor fixing bracket 521, and the motor fixing bracket 521 is also provided with an expansion motor 522. The rotating shaft of the expansion motor 522 is provided with an expansion gear 523, which meshes with the meshing rack 412. Specifically, there are also several fixed sliding rods 44 between the two sets of connecting upright plates 42. A sliding plate 451 is provided in the middle of the several fixed sliding rods 44. The fixed sliding rods 44 pass through and slide on the sliding plate 451. The sliding plate 451 is also connected to the adjacent motor fixing bracket 521. A connecting bracket 452 is also provided on the sliding plate 451. The connecting bracket 452 is connected to the high-speed camera 45 to cooperate with the moving high-speed camera 45 to be placed on one side of the chip 6.

[0042] Specifically, the fastening ring 52 is also provided with a connecting support plate 512, the connecting support plate 512 is provided with a self-rotating motor 511, the rotating shaft of the self-rotating motor 511 is provided with a meshing gear 513, the meshing gear 513 meshes with the adjacent rotating gear 51, and by rotating the rotating gear 51, the above-mentioned part of the structure is driven to rotate, so that multiple planes of the chip 6 are captured by the high-speed camera 45 in a rotating manner during the rotation process, and the oblique cracks are effectively captured by the tilt angle, which facilitates the improvement of the detection accuracy of the equipment.

[0043] Working principle of this invention:

[0044] The operator first starts the moving motor 23 to drive the conveyor belt 24 to rotate, so that the moving plate 22 moves laterally on the moving guide rail 25. At the same time, the operator continues to start the drive motor 32 to rotate the moving belt 33 between the positioning blocks 34, so that the longitudinal displacement plate 31 moves longitudinally. After the entire structure of the flipping mechanism 5 moves to the conveying area of ​​the chip 6, the chip 6 can be gripped.

[0045] At this time, the two sets of starting expansion motors 522 drive the two sets of expansion gears 523 to rotate in opposite directions. The meshing rack 412 of the expansion gears 523 pushes the motor fixing frame 521 to move relative to each other, which in turn drives the sliding rod 541 in the middle of the positioning rod 54 on the rotating gear 51 connected to the fastening ring 52 to move relative to each other. Then, the abutment blocks 542 on the two sets of sliding rods 541 clamp the vertical chip 6 against the plane. At this time, the high-speed camera 45 below can take pictures. During the shooting process, the meshing gear 513 on the starting support plate 512 drives the rotating gear 51 to rotate along the axis of the fastening ring 52. During the rotation, the two sets of abutment blocks 542 clamp the chip 6 and rotate, so that the high-speed camera 45 below can clearly take pictures of the oblique surface and the front of the chip 6. This avoids the situation where the oblique surface of the chip 6 has oblique cracks and the projection surface pictures cannot be completely captured, thus improving the detection accuracy.

[0046] Due to the abutment action of the two sets of abutment blocks 542, the sides of the chip 6 cannot be photographed, so the chip 6 needs to be flipped to the edge for clamping. At this time, after rotating the chip 6 to the initial clamping position, the expansion motor 522 is started to continue driving the two sets of expansion gears 523 to rotate in opposite directions. Due to the relative movement of the positioning rod 54, the constraint rod 554 on the positioning rod 54 passes through the oblique groove 551 from the transverse groove 552, so that the connecting rods 56 connected to the opposing expansion plates 55 abut after contact. The connecting rods 56 on both sides of the sliding rod 541 move closer to each other. During the process of approaching, the connecting rods 56 with wedge-shaped guide blocks 562 first touch the two oblique corners of the chip 6, generating four sets of symmetrical support for the chip 6. The chip 6 will not fall off because it is held in place by the point of contact with the abutment block 542. This allows the chip 6 to flip along the clamping center of the abutment block 542. At the same time, the pusher sliding plate 57 connected to the two sets of abutment blocks 542 pushes the pusher spring 543 outward. Since the abutment block 542 is usually made of soft material, it will not affect the chip 6 during the clamping process of the connecting rod 56. After the chip 6 flips to the horizontal position, the two sets of abutment blocks 542 switch positions and clamp the chip 6 on both sides. This will drive the expansion gears 523 on the two sets of expansion motors 522 to rotate in the opposite direction. This will cause the constraint rod 554 to flow back into the transverse groove 552 from the inclined groove 551. Then, the connecting rod 56 will leave the shooting area of ​​the chip 6, and the high-speed camera 45 can continue to perform the above-mentioned rotation shooting.

[0047] Since the high-speed camera 45 is connected to the sliding plate 451 through the connecting bracket 452, the high-speed camera 45 moves as the fastening ring 52 moves. At the same time, since the high-speed camera 45 usually has a large shooting range, it will not affect the shooting accuracy of the chip 6, effectively reducing the positioning function of the high-speed camera 45 and simplifying the shooting difficulty.

[0048] Based on the shooting results, the moving mechanism 2 and the longitudinal moving part 3 are used to move qualified and unqualified products to different areas for easy collection and transfer.

[0049] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0050] The above description is merely an example and illustration of the structure of the present invention. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the structure of the invention or the scope defined by the claims of the present invention, they should all fall within the protection scope of the present invention.

Claims

1. A chip AOI detection device, installed on a device carrying table (1), characterized in that: The utility model provides mobile mechanism (2) including, the longitudinal displacement board (31) is equipped on the mobile mechanism (2), the mobile mechanism (2) is used to assist longitudinal displacement board (31) transverse movement, the movable plate (41) is equipped on the longitudinal displacement board (31), the longitudinal displacement board (31) is equipped with longitudinal moving piece (3), and it is convenient to assist movable plate (41) longitudinal movement, the movable plate (41) is equipped with turnover mechanism (5) on the side away from the longitudinal displacement board (31), is used to hold chip and changes chip holding position, the high speed camera (45) is equipped below turnover mechanism (5), and it is convenient to shoot the chip held, the movable plate (41) is equipped with transverse moving piece (4) still, is used to move turnover mechanism (5) position; The turnover mechanism (5) includes two groups of rotating gear (51), and the middle part of the opposite side of the two groups of rotating gear (51) is equipped with the locating long rod (54), the middle part of the locating long rod (54) is equipped with the sliding long rod (541), the sliding long rod (541) is through and is slidably connected to the locating long rod (54), and the opposite ends of the two groups of sliding long rods (541) are equipped with the abutting block (542), the abutting block (542) abuts the chip held, and the two sides of the locating long rod (54) are equipped with the connecting long rod (56), one side of the connecting long rod (56) is equipped with the wedge-shaped guide block (562) close to the chip held, and the two groups of wedge-shaped guide blocks (562) are axially symmetrically distributed on the holding center of the chip. The middle part of the sliding long rod (541) is equipped with the thrust sliding plate (57), the sliding long rod (541) is through and fixedly connected to the thrust sliding plate (57), and the thrust spring (543) is through the sliding long rod (541) between the thrust sliding plate (57) and the locating long rod (54), so as to flexibly hold the chip. The connecting long rod (56) is equipped with the sliding long groove (561), one end of the thrust sliding plate (57) is connected to the adjacent sliding long groove (561) and is slidably connected, one end of the connecting long rod (56) close to the adjacent rotating gear (51) is equipped with the expansion plate (55), the plane of the expansion plate (55) is perpendicular to the plane of the adjacent rotating gear (51), the expansion plate (55) is equipped with the guide rail through groove, the guide rail through groove is equipped with the constraint long rod (554), the constraint long rod (554) is through and slidably connected to the guide rail through groove, and the two ends of the constraint long rod (554) are fixedly connected to the opposite sides of the rotating gear (51), and the two groups of constraint long rods (554) on the rotating gear (51) are parallel to each other. The guide rail through groove includes the oblique groove (551) and the horizontal groove (552), the oblique groove (551) is connected to the horizontal groove (552), and the connecting end direction of the oblique groove (551) away from the horizontal groove (552) is obliquely expanded away from the thrust spring (543).

2. The chip AOI detection device according to claim 1, characterized in that: The moving mechanism (2) comprises a moving beam (21) provided with a plurality of moving guide rails (25) for guiding, a moving plate (22) slidably connected to the moving guide rails (25), two groups of moving motors (23) provided at both ends of the moving beam (21), a transmission belt (24) wrapping the rotating wheels of the two groups of moving motors (23), the guiding direction of the transmission belt (24) being the same as the axial direction of the moving guide rails (25), the moving plate (22) being fixedly connected to part of the transmission belt (24), and the longitudinal moving part (3) being arranged between the longitudinal displacement plate (31) and the moving plate (22).

3. The chip AOI detection device according to claim 2, characterized in that: The longitudinal moving part (3) comprises a plurality of sliding guide rails (35), the guiding direction of the sliding guide rails (35) being perpendicular to the guiding direction of the moving guide rails (25), the moving plate (22) further being provided with a driving motor (32) and a positioning block (34), the positioning block (34) also being provided with rotating wheels, a moving belt (33) wrapping the rotating wheels of the driving motor (32) and the positioning block (34) being arranged between the driving motor (32) and the positioning block (34), the guiding direction of the moving belt (33) being the same as the axial direction of the sliding guide rails (35), and the longitudinal displacement plate (31) being fixedly connected to part of the moving belt (33).

4. The chip AOI detection device according to claim 1, characterized in that: The lateral moving part (4) comprises two groups of connecting vertical plates (42) fixedly connected to the side end of the movable plate (41) provided with the overturning mechanism (5), a guide rod (43) arranged between the two groups of connecting vertical plates (42), a buckling ring (52) arranged on the side of the rotating gear (51) away from the opposite side, the buckling ring (52) penetrating into and being rotatably connected to the inner cavity side of the rotating gear (51), a supporting lateral sliding plate (53) further arranged on the buckling ring (52), and the guide rod (43) penetrating and being slidably connected to the supporting lateral sliding plate (53).

5. The chip AOI detection device according to claim 4, characterized in that: The movable plate (41) is provided with a rectangular groove (411) in the middle, one side of the inner cavity of the rectangular groove (411) is provided with an engagement rack (412), the arrangement direction of the engagement rack (412) is the same as the moving direction of the movable plate (41), the buckling ring (52) is further provided with a motor fixing frame (521), the motor fixing frame (521) is further provided with an expansion motor (522), an expansion gear (523) is arranged on the rotating shaft of the expansion motor (522), and the expansion gear (523) engages with the engagement rack (412).

6. The chip AOI detection device according to claim 5, characterized in that: A plurality of fixed slide rods (44) are arranged between the two groups of connecting vertical plates (42), and the middle of each fixed slide rod (44) is provided with a sliding plate (451), the fixed slide rod (44) penetrates and is slidingly connected to the sliding plate (451), the sliding plate (451) is also connected to the adjacent motor fixing frame (521), and a connecting frame (452) is further arranged on the sliding plate (451), the connecting frame (452) is connected to the high-speed camera (45), and is used for cooperating with the movement of the high-speed camera (45) to be placed on one side of the chip.

7. The chip AOI detection device according to claim 4, characterized in that: A connecting support plate (512) is further arranged on the buckle connecting ring (52), the connecting support plate (512) is provided with a rotation motor (511), a meshing gear (513) is arranged on the rotation shaft of the rotation motor (511), and the meshing gear (513) meshes with the adjacent rotation gear (51).

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