Radio frequency and high-voltage direct current lead-in structure of electrostatic chuck

Abstract

The invention discloses a radio frequency and high-voltage direct current introduction structure of an electrostatic chuck, a direct current plug is arranged in the electrostatic chuck, the electrostatic chuck is arranged on the surface of a conductive base, and the electrostatic chuck comprises a switching assembly and a power transmission assembly. The switching assembly comprises a switching element connected to the direct current plug. The power transmission assembly comprises a radio frequency transmission sleeve and a wire which are coaxially arranged, the wire is sleeved with the radio frequency transmission sleeve, and a first radio frequency transmission seat and a second radio frequency transmission seat are arranged at the two ends of the radio frequency transmission sleeve respectively. The two ends of the wire are provided with a first transmission element and a second transmission element. The first transmission element and the second transmission element are connected with the electrostatic chuck and the power supply assembly respectively and transmit direct current to the electrostatic chuck. The introduction structure has the advantages of being simple in structure, easy to align and connect, detachable and convenient to maintain, and meanwhile, the risk that the direct-current electrode is damaged in the dismounting, mounting and maintaining process of the electrostatic chuck can be reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor equipment, in particular to a structure for introducing radio frequency and high-voltage direct current into an electrostatic chuck. BACKGROUND

[0002] In the manufacture of semiconductors, an electrostatic chuck generates electrostatic Coulomb force through high-voltage direct current to achieve the adsorption and fixation of a wafer; the electrostatic chuck generates a radio frequency negative direct bias electric field on the metal disc of the electrostatic chuck by introducing a radio frequency voltage, which can assist in improving the etching rate and adjusting the ion bombardment energy.

[0003] Currently, the structure for introducing radio frequency and high-voltage direct current into an electrostatic chuck has the problems of complex structure, difficulty in connection, radio frequency crosstalk, and difficulty in maintenance and replacement. At the same time, during the connection process with the direct current electrode of the electrostatic chuck, since the introduction structure is directly connected with the direct current electrode, and the direct current electrode is relatively fragile, the connection between the two can easily cause contact damage, affecting the service life of the electrostatic chuck, and further affecting the production efficiency of the semiconductor. SUMMARY

[0004] The purpose of the present application is to provide a structure for introducing radio frequency and high-voltage direct current into an electrostatic chuck, which has a simple structure and is easy to align and connect, is designed to be detachable for easy maintenance, and the application of the introduction structure can reduce the risk of damage to the direct current electrode in the on / off control of the electrostatic chuck, improve the service life of the electrostatic chuck, and further improve the production efficiency of the semiconductor.

[0005] In order to achieve the above purpose, the present application provides a structure for introducing radio frequency and high-voltage direct current into an electrostatic chuck, the electrostatic chuck is arranged on the surface of a conductive base, a direct current plug is arranged inside the electrostatic chuck, and the introduction structure comprises:

[0006] a switching component comprising a switching element connected to the direct current plug, the switching element being arranged between the electrostatic chuck and the conductive base;

[0007] a power transmission component comprising at least one radio frequency transmission sleeve and a wire arranged coaxially, the radio frequency transmission sleeve being arranged outside the wire, both ends of the radio frequency transmission sleeve being provided with a first radio frequency transmission seat and a second radio frequency transmission seat; both ends of the wire being provided with a first transmission element and a second transmission element;

[0008] the first transmission element is connected to the switching element, and at the same time, the radio frequency transmission sleeve is electrically connected with the surface of the conductive base;

[0009] the second transmission element is connected to a power supply component to transmit direct current; at the same time, the radio frequency transmission sleeve is also in conduction with the power supply component to transmit radio frequency current.

[0010] Optionally, the adapter element comprises an adapter plug, an adapter positioning seat and a fixing member;

[0011] The adapter plug, the adapter positioning seat and the fixing member are arranged in sequence along the extension direction of the DC plug;

[0012] The adapter plug is provided with a socket section and a lead-out section connected with each other, the socket section is coaxially sleeved on the outside of the DC plug, the lead-out section passes through the adapter positioning seat, and the lead-out section is connected with the fixing member at the end away from the DC plug, and the fixing member fixes the adapter positioning seat on the adapter plug.

[0013] Optionally, the adapter positioning seat is provided with a first end portion, a second end portion and a ring body connecting the first end portion and the second end portion;

[0014] The first end portion is in contact with the socket section of the adapter plug, the outer diameter of the first end portion is smaller than that of the ring body, and the first end portion extends into the electrostatic chuck;

[0015] The second end portion is in contact with the fixing member, the second end portion is provided with a countersunk hole, and the fixing member is accommodated in the countersunk hole.

[0016] Optionally, the adapter assembly further comprises an adapter fixing seat, which is coaxially sleeved on the outside of the adapter positioning seat;

[0017] The adapter fixing seat comprises a longitudinal extension section arranged along the extension direction of the DC plug and a horizontal extension section arranged perpendicularly to the longitudinal extension section, the outer diameter of the horizontal extension section is greater than that of the longitudinal extension section, and the horizontal extension section is clamped between the electrostatic chuck and the conductive base;

[0018] The second end portion of the adapter positioning seat is further provided with a positioning ring, the outer diameter of the positioning ring is the same as that of the longitudinal extension section, the positioning ring is in contact with the surface of the longitudinal extension section away from the DC plug, and the surface of the positioning ring away from the DC plug is further provided with a first positioning protrusion.

[0019] Optionally, the first transmission element comprises:

[0020] A first connector is arranged at one end of the wire;

[0021] A first plug is connected with the first connector at one end and is in plug-in connection with the adapter plug at the other end;

[0022] A first positioning seat is sleeved on the first plug and the first connector;

[0023] When the first plug is connected with the adapter plug, the first positioning seat clamps the adapter element.

[0024] Optionally, the second transmission element comprises:

[0025] a second joint, one end of which is connected to the wire and the other end of which is connected to the power supply assembly to transmit direct current; and

[0026] a second fixed seat and a second positioning seat arranged in sequence away from the power supply assembly; the second joint passes through the second fixed seat and the second positioning seat, and the second fixed seat and the second positioning seat are coaxially sleeved with the second joint; the second fixed seat and the second positioning seat are arranged inside the radio frequency transmission sleeve, and the second fixed seat and the second positioning seat fix the second joint to the second radio frequency transmission seat.

[0027] Optionally, the second joint is provided with a second positioning protrusion at the connection with the wire, and the second positioning protrusion is clamped between the second fixed seat and the second positioning seat.

[0028] The second radio frequency transmission seat is internally provided with a fixed block, and the second positioning seat is located between the fixed block and the second fixed seat, and the second positioning seat is fixed to the second radio frequency transmission seat through the second fixed seat.

[0029] Optionally, the second fixed seat is provided with a limiting groove on the surface facing the second positioning seat, the limiting groove is provided with an annular side wall, the annular side wall includes an inner wall facing the second positioning protrusion and an outer wall opposite to the inner wall, the shape of the annular inner wall of the limiting groove is matched with the second positioning protrusion, and the second positioning protrusion is accommodated in the limiting groove.

[0030] The second positioning seat is provided with a positioning through hole and an auxiliary through hole, the positioning through hole and the auxiliary through hole are in communication with each other, the positioning through hole is coaxially arranged with the wire, and the auxiliary through hole is eccentrically arranged with the positioning through hole; the positioning through hole and the auxiliary through hole both penetrate through the second positioning seat.

[0031] The positioning through hole includes a first stepped hole, a second stepped hole and a third stepped hole, the diameter of the hole decreases in sequence away from the power supply assembly, the shape of the first stepped hole is matched with the shape of the annular outer wall of the limiting groove, the shape of the second stepped hole is matched with the shape of the second positioning protrusion, and the third stepped hole is matched with the diameter of the wire. Optionally, the structure further includes: an output assembly, one end of the output assembly is connected to the power supply assembly, and the other end of the output assembly is connected to the second transmission element; the output assembly includes:

[0032] a direct current output plug, one end of which is insertable into the power supply assembly, and the other end of which is connectable with the second joint in a plug-in manner;

[0033] a radio frequency output plug, which is coaxially sleeved outside the direct current output plug; one end of the radio frequency output plug is inserted into the power supply assembly, and the other end of the radio frequency output plug is connected with the radio frequency transmission sleeve in a plug-in manner.

[0034] Optionally, the output assembly further comprises: an output end positioning seat and an output end fixing seat arranged in sequence away from the power supply assembly; the output end positioning seat and the output end fixing seat are coaxially sleeved on the DC output plug, and the output end positioning seat and the output end fixing seat fix the DC output plug on the RF output plug;

[0035] When the RF output plug is inserted into the second RF transmission seat, the DC output plug is inserted into the second connector, and the output end fixing seat is sleeved outside the second connector.

[0036] Optionally, the diameter of the first end of the RF output plug inserted into the power supply assembly is smaller than the diameter of the second end of the RF output plug connected to the second connector.

[0037] The output end positioning seat is clamped between the first end and the second end of the RF output plug, and the output end fixing seat is fixedly connected with the RF output plug.

[0038] The output end positioning seat is connected with the RF output plug through the output end fixing seat and is fixed in the RF output plug. Optionally, an isolation layer is arranged between the wire and the RF transmission sleeve.

[0039] Compared with the prior art, the technical scheme of the application has at least the following beneficial effects:

[0040] The introduction structure of the application prevents the introduction structure and the electrostatic chuck from being repeatedly inserted and pulled out to damage the DC electrode, improves the service life of the electrostatic chuck, and further improves the production efficiency of the semiconductor.

[0041] The introduction structure of the application adopts a mechanical connection structure that is clamped with each other, a resistance stop structure generated by screw rotation, and a coaxial positioning structure formed by thread pairs, to tightly combine each component together. For example, the introduction fixing seat is fixed between the electrostatic chuck and the conductive base through the horizontal extension section and the longitudinal extension section of the introduction fixing seat; the introduction positioning seat is fixed on the introduction plug through the fixing piece; the second positioning seat is fixed in the RF transmission sleeve by arranging a fixing block in the second RF transmission seat and designing the second fixing seat and the second RF transmission seat as a detachable connection, to realize coaxial constraint of the second transmission element and the second RF transmission seat; the output end positioning seat is clamped in the RF transmission plug through the non-uniform diameter design of the RF output plug, and the output end positioning seat is fixed in the RF output plug through the connection of the output end fixing seat and the RF output plug, to realize coaxial constraint of each component in the output assembly. The above mechanical connection structure also realizes the detachable purpose of the introduction structure, facilitates maintenance and replacement of each component, and reduces maintenance cost.

[0042] The introduction structure of the components of the electrostatic chuck has simple structure, is convenient to manufacture, and the connection mode between the components is simple and convenient to operate. Meanwhile, the adapter assembly, the first transmission element, the second transmission element and the output assembly are coaxial design, which is convenient for the mutual plug-in alignment connection. BRIEF DESCRIPTION OF DRAWINGS

[0043] Figure 1 The schematic block diagram of the radio frequency and high-voltage direct current introduction structure of the electrostatic chuck.

[0044] Figure 2 The schematic diagram of the radio frequency current transmission in the radio frequency and high-voltage direct current introduction structure of the electrostatic chuck.

[0045] Figure 3 The schematic diagram of the adapter assembly in the radio frequency and high-voltage direct current introduction structure of the electrostatic chuck.

[0046] Figure 4 The schematic diagram of the wire structure in the radio frequency and high-voltage direct current introduction structure of the electrostatic chuck.

[0047] Figure 5 The assembly structure schematic diagram of the first transmission element in the radio frequency and high-voltage direct current introduction structure of the electrostatic chuck.

[0048] Figure 6 The connection schematic diagram of the radio frequency transmission sleeve and the conductive base in the radio frequency and high-voltage direct current introduction structure of the electrostatic chuck.

[0049] Figure 7 The connection relationship schematic diagram of the power transmission assembly and the adapter assembly with the electrostatic chuck in the radio frequency and high-voltage direct current introduction structure of the electrostatic chuck.

[0050] Figure 8 The assembly structure schematic diagram of the radio frequency transmission sleeve and the second transmission element in the radio frequency and high-voltage direct current introduction structure of the electrostatic chuck.

[0051] Figure 9 The assembly structure schematic diagram of the second transmission element in the radio frequency and high-voltage direct current introduction structure of the electrostatic chuck.

[0052] Figure 10 The schematic diagram of the second positioning seat in the radio frequency and high-voltage direct current introduction structure of the electrostatic chuck.

[0053] Figure 11 The assembly structure schematic diagram of the output assembly in the radio frequency and high-voltage direct current introduction structure of the electrostatic chuck.

[0054] In the figure, 100 - adapter assembly, 110 - adapter plug, 120 - adapter fixing seat, 130 - adapter positioning seat, 131 - first positioning protrusion, 132 - positioning ring, 133 - counterbore, 140 - fixing member, 200 - first transmission element, 210 - first plug, 220 - first positioning seat, 221 - first positioning groove, 300 - second transmission element, 320 - second fixing seat, 330 - second positioning seat, 331 - positioning through hole, 3311 - first stepped hole, 3312 - second stepped hole, 3313 - third stepped hole, 332 - auxiliary through hole, 400 - output assembly, 410 - DC output plug, 420 - output end fixing seat, 430 - output end positioning seat, 440 - RF output plug, 510 - RF transmission sleeve, 511 - first RF transmission seat, 512 - second RF transmission seat, 5121 - fixing block, 513 - RF transmission straight pipe, 514 - RF transmission elbow pipe, 521 - first joint, 522 - second joint, 5221 - second positioning protrusion, 523 - isolation layer, 524 - wire, 600 - power supply assembly, 611 - DC power supply, 612 - DC power filter, 613 - connecting wire, 621 - RF power supply, 622 - RF matcher, 700 - electrostatic chuck, 701 - DC plug of electrostatic chuck, 702 - DC electrode of electrostatic chuck, 703 - ceramic disc, 704 - conductive disc, 705 - insulating sleeve, 800 - conductive base, 801 - induction coil, 901 - fixing member. DETAILED DESCRIPTION

[0055] The technical solutions of the present application will be described clearly and completely below in combination with the drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0056] In the description of the present application, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0057] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting" should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection; it can be directly connected, or indirectly connected through intermediate medium, or the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0058] In semiconductor manufacturing, electrostatic chuck is used to fix wafer, to ensure the stability and consistency of wafer during process processing. The electrostatic chuck generates electrostatic adsorption force by direct current voltage (about 800V-2000V) to adsorb wafer; adjusts ion energy by radio frequency power to adjust etching and bombardment effect. Therefore, the electrostatic chuck needs to receive direct current and radio frequency current at the same time to transmit direct current voltage and radio frequency power to realize wafer adsorption and etching.

[0059] Referring to Figure 3 , the electrostatic chuck 700 comprises a ceramic disc 703, a direct current electrode 702 and a conductive disc 704; the ceramic disc 703 directly contacts the surface of wafer in semiconductor manufacturing; the direct current electrode 702 is arranged in the ceramic disc 703, used to generate adsorption force after receiving direct current voltage to adsorb wafer; the conductive disc 704 is located below the ceramic disc 703 and arranged on the upper surface of the conductive base 800, receiving radio frequency current through the conductive base 800. The conductive disc 704 is provided with a power supply hole, the power supply hole penetrates the conductive disc 704 and extends to the direct current electrode 702, and the power supply hole is provided with a direct current plug 701, one end of the direct current plug 701 is welded with the direct current electrode 702, and the direct current plug 701 can transmit direct current to the direct current electrode 702.

[0060] In the prior art, the radio frequency current and direct current voltage generated by the power supply assembly are transmitted to the electrostatic chuck through the power transmission assembly, but the connection between the power transmission assembly and the electrostatic chuck and the connection between the power transmission assembly and the power supply assembly are designed to have the problems of complex structure and difficult connection and maintenance; and because the direct current electrode of the electrostatic chuck is relatively fragile, the direct current electrode is easily damaged when the power transmission assembly and the electrostatic chuck are plugged in and out, thereby affecting the service life of the electrostatic chuck; at the same time, when the transmission of direct current and radio frequency current fails, the entire lead-in structure needs to be replaced, which has the problem of high maintenance cost.

[0061] To solve the above problems, referring to Figure 1 and Figure 2The present invention provides a structure for introducing radio frequency and high-voltage direct current into an electrostatic chuck, comprising: an adapter assembly 100 and a power transmission assembly; the adapter assembly 100 is connected to a DC plug 701 of an electrostatic chuck 700, thereby preventing the power transmission assembly from directly plugging and unplugging the DC electrode 702 in the prior art and damaging the DC electrode 702; one end of the power transmission assembly is connected to the adapter assembly 100, and the other end is connected to a power supply assembly 600, so as to transmit radio frequency current and direct current to the electrostatic chuck 700.

[0062] See also Figure 3 The adapter assembly 100 includes an adapter element connected to the DC plug, and the adapter element is arranged between the electrostatic chuck 700 and the conductive base 800.

[0063] The power transmission component includes at least one coaxially arranged radio frequency transmission sleeve 510 and a wire 524. The radio frequency transmission sleeve is sleeved outside the wire 524. The two ends of the radio frequency transmission sleeve are respectively provided with a first radio frequency transmission seat 511 and a second radio frequency transmission seat 512 (see Figure 2 ); A first transmission element 200 and a second transmission element 300 are provided at both ends of the wire 524.

[0064] The first transmission element 200 is connected to the adapter element, while the first RF transmission base 511 contacts the surface of the conductive base 800. The second transmission element 300 is connected to the power supply assembly 600 to transmit direct current. At the same time, the second RF transmission base 512 is also connected to the power supply assembly 600 to transmit RF current.

[0065] In this embodiment, to generate RF current and DC power, the power supply assembly 600 includes an RF power supply 621 and a DC power supply 611. The RF power supply 621 is connected to the second RF transmission base 512 and transmits the RF current through the RF transmission sleeve 510 to the first RF transmission base 511, and then to the surface of the conductive base 800 and the electrostatic chuck 700. The DC power supply 611 is connected to the wire 524 and transmits the DC power through the wire 524 to the DC electrode 702 of the electrostatic chuck 700.

[0066] In the preferred embodiment, see Figure 1To realize the integrated design of the output end of the power supply assembly 600, so that the integrated design output end can output direct current and radio frequency current at the same time, the power supply assembly 600 further comprises: a direct current filter 612 and a radio frequency matching device 622. The radio frequency matching device 622 is used to match the impedance of the radio frequency power supply 621 to the plasma above the wafer to improve the radio frequency power feeding effect; the output end of the radio frequency matching device 622 is connected to the radio frequency transmission sleeve 510, and the input end is connected to the radio frequency power supply 621. The direct current filter 612 is used to process radio frequency interference signals, and the output end thereof is connected to the wire 524 through a connecting line 613, and the input end is connected to the direct current power supply 611. Wherein, the connecting line 613 is embedded in the radio frequency matching device 622, and the output end of the direct current filter 612 and the output end of the radio frequency matching device 622 are coaxially insulated and fixed and integrated together, so that the output end of the radio frequency matching device 622 can output radio frequency current and direct current, and constitutes the integrated design output end of the power supply assembly 600. At this time, the radio frequency transmission sleeve and the second transmission element 300 can be connected to the integrated design output end of the power supply assembly 600 to transmit radio frequency current and direct current to the electrostatic chuck 700.

[0067] Referring to Figure 3 , an insulating sleeve 705 is arranged along the hole wall of the power supply hole to isolate the adapter plug 110 from the conductive disc 704, so as to prevent short circuit caused by direct contact between the two.

[0068] In this embodiment, referring to Figure 3 and Figure 7 , the adapter element comprises an adapter plug 110, an adapter positioning seat 130 and a fixing member 140, and the adapter plug 110, the adapter positioning seat 130 and the fixing member 140 are sequentially arranged along the extending direction of the direct current plug 701.

[0069] Specifically, the adapter plug 110 is a bidirectional plug structure, and the adapter plug 110 is provided with a plug hole section and a lead-out section connected to each other. The plug hole section is coaxially sleeved outside the direct current plug 701 (as shown in Figure 3 ), so as to realize the electrical connection between the adapter plug 110 and the direct current electrode of the electrostatic chuck 700. The lead-out section penetrates through the adapter positioning seat 130, and the end of the lead-out section away from the direct current plug 701 is connected to the fixing member 140, and the fixing member 140 fixes the adapter positioning seat 130 on the adapter plug 110.

[0070] In an embodiment, the plug hole section of the adapter plug 110 is completely inserted into the power supply hole, and the lead-out section of the adapter plug 110 extends out of the power supply hole, so as to facilitate the positioning of the adapter plug 110 and the direct current plug 701 by the adapter positioning seat 130.

[0071] Specifically, the adapter positioning seat 130 is made of insulating material, which is provided with a first end, a second end, and a ring body connecting the first end and the second end. The first end is in contact with the socket segment of the adapter plug 110, the outer diameter of the first end is smaller than that of the ring body, and the first end extends into the electrostatic chuck (i.e. the first end extends into the energizing hole until it contacts the socket segment of the adapter plug 110). At this time, referring to Figure 3 When the socket segment of the adapter plug 110 is completely inserted into the energizing hole, when the end surface of the first end of the adapter positioning seat 130 contacts the socket segment of the adapter plug 110, the end surface of the first end of the adapter positioning seat 130 inserted into the energizing hole is misaligned with the end surface of the adapter fixing seat 120, so that the adapter plug 110 is tightly wrapped in insulating material (insulating sleeve 705, adapter positioning seat 130), so as to increase the creepage distance of the electric conduction disc 704 of the electrostatic chuck 700 and the adapter plug 110, and reduce the probability of sparking between the adapter plug 110 and the electrostatic chuck 700 (i.e. the electric conduction disc 704 in Figure 3 ).

[0072] Specifically, the second end of the adapter positioning seat 130 is in contact with the fixing member 140, and the second end is provided with a countersunk hole 133, and the fixing member 140 is accommodated in the countersunk hole 133. When connecting the adapter positioning seat 130 and the adapter plug 110, the first end of the adapter positioning seat 130 is sleeved on the adapter plug 110 until the first end contacts the socket segment of the adapter plug 110; at the same time, the lead-out segment of the adapter plug 110 is located in the ring body of the adapter positioning seat 130, and the fixing member 140 is connected to the lead-out segment of the adapter plug 110 away from the DC plug, and the fixing member 140 is accommodated in the countersunk hole 133, so that the fixing member 140 is in contact with the second end of the adapter positioning seat 130 to realize the connection and fixation of the adapter positioning seat 130 and the adapter plug 110.

[0073] Optionally, the second end of the adapter positioning seat 130 is not provided with a countersunk hole, the lead-out segment of the adapter plug 110 protrudes from the end surface of the second end of the adapter positioning seat 130, the fixing member 140 is in contact with the end surface of the second end of the adapter positioning seat 130 and is connected and fixed with the lead-out segment of the adapter plug 110.

[0074] In the preferred embodiment, the lead-out segment of the adapter plug 110 is threadedly connected with the fixing member 140. The fixing member 140 is threadedly connected to the DC plug 701 side (i.e. the DC plug 701 side of the adapter plug 110) along the thread of the adapter plug 110. Figure 3The adapter 110 is moved in the upward direction until the adapter positioning seat 130 is in close contact with the adapter plug 110 in the power-through hole; at this time, the fixing member 140 and the two ends of the adapter positioning seat 130 are squeezed tightly to form a constraint, so that the adapter plug 110, the adapter positioning seat 130 and the fixing member 140 form a tightly connected whole (i.e., the adapter element), so that the adapter element can be plugged in and out relative to the adapter fixing seat 120, which facilitates the plug-in and unplug connection between the adapter element and the DC plug 701; and the detachable connection of the adapter element facilitates the maintenance and replacement of various components in the adapter element.

[0075] In another preferred embodiment, to protect the DC electrodes, see Figure 3 The outer diameter of the ring body of the adapter positioning seat 130 (i.e., the contact position between the ring body and the lower surface of the conductive plate) is larger than the diameter of the power-through hole. This can limit the depth of the first end of the adapter positioning seat 130 inserted into the power-through hole (usually, the depth of the first end of the adapter positioning seat 130 inserted into the power-through hole is 3mm-5mm); at the same time, when the adapter positioning seat 130 is subjected to the force acting toward the DC plug 701 (i.e., Figure 3 When the adapter positioning seat 130 is subjected to an upward force), the force will act on the electrostatic chuck 700 through the ring body of the adapter positioning seat 130, and will not act directly on the DC electrode 702 through the adapter plug 110, and can also protect the DC electrode 702 from damage.

[0076] In this embodiment, Figure 3 As shown, the adapter assembly further includes: an adapter fixing seat 120 , which is made of insulating material and is coaxially sleeved on the outside of the adapter positioning seat 130 .

[0077] Specifically, such as Figure 3 As shown, the adapter fixing seat 120 includes: a longitudinal extension section arranged along the extension direction of the DC plug 701 and a horizontal extension section arranged perpendicular to the longitudinal extension section. The outer diameter of the horizontal extension section is larger than the outer diameter of the longitudinal extension section. The horizontal extension section is clamped between the electrostatic chuck 700 and the conductive base 800 to fix the adapter fixing seat 120. The adapter fixing seat 120 is used to limit the position of the adapter element. When the adapter element is plugged in and out of the DC plug 701, since the axis of the adapter fixing seat 120 coincides with the axis of the adapter positioning seat 130 (i.e., the adapter fixing seat 120 and the adapter positioning seat 130 are coaxially connected), the adapter element can move relative to the adapter fixing seat 120 along its axial direction (i.e., the adapter element can move linearly during the plugging and unplugging process), thereby facilitating the plugging and unplugging of the adapter element and the DC plug 701.

[0078] Furthermore, a positioning ring 132 is further provided at the second end of the adapter positioning seat 130. The outer diameter of the positioning ring 132 is the same as the outer diameter of the longitudinal extension section. The positioning ring 132 contacts the surface of the longitudinal extension section away from the DC plug 701, so that the longitudinal extension section is sandwiched between the positioning ring 132 of the adapter positioning seat 130 and the electrostatic chuck 700. At this time, when the adapter positioning seat 130 is subjected to a force acting toward the DC plug 701 side (i.e. Figure 3 When the adapter positioning seat 130 is subjected to an upward force), the force will act on the electrostatic chuck 700 through the adapter positioning seat 130 and the adapter fixing seat 120 in sequence, and will not act directly on the DC electrode 702 through the adapter plug 110, so as to protect the DC electrode 702 from damage.

[0079] See Figure 3 During the connection process between the adapter assembly 100 and the electrostatic suction cup 700, the socket section of the adapter plug 110 is inserted into the power-on hole of the electrostatic suction cup 700 to connect the adapter plug 110 to the DC plug 701; the adapter fixing seat 120 is clamped between the conductive base 800 and the electrostatic suction cup 700 through the horizontal extension section of the adapter fixing seat 120; the adapter positioning seat 130 is inserted into the adapter fixing member 140 along the adapter plug 110; at the same time, the fixing member 140 is threadedly connected to the lead-out section of the adapter plug 110 and moved toward the DC plug 701 until the first end of the adapter positioning seat 130 is in close contact with the socket section of the adapter plug 110 in the power-on hole, and at this time, the fixing member 140 is screwed into the countersunk hole 133 of the adapter positioning seat 130. During normal use, adapter assembly 100 can be permanently connected to DC plug 701 to prevent damage to DC electrode 702 from repeated plugging and unplugging of the power transmission assembly and electrostatic chuck 700. Furthermore, because the adapter element is detachable, no adhesive is required between its components; instead, adapter plug 110 and DC plug 701 are secured solely through mechanical connection. This facilitates component replacement and reduces production costs. Furthermore, the components are simple in structure and easy to connect, making manufacturing and installation easier.

[0080] In this embodiment, see Figure 5 and Figure 7 The first transmission element 200 further includes: a first connector 521, a first plug 210 and a first positioning seat 220. The first connector 521 is provided at one end of the wire 524 (see Figure 4) is connected to the first connector 521, and the other end is in plug-in connection with the adapter plug 110. The first positioning seat 220 is made of insulating material, and is sleeved on the first plug 210 and the first connector 521. The first positioning seat 220 can be fixed on the adapter positioning seat 130 by means of detachable fixing structure (for example, screw) to support the weight of the wire 524 and the pulling force of the wire 524, and prevent the transmission connector from contacting the conductive base 800 to cause short circuit during the plug-in and plug-out of the adapter plug 110. When the first plug 210 is connected with the adapter plug 110, the first positioning seat 220 is clamped on the adapter element (i.e. the adapter positioning seat 130).

[0081] In the preferred embodiment, the adapter element is coaxially arranged (i.e. the adapter plug 110 and the adapter positioning seat 130 are coaxially arranged), and the first plug 210, the first connector 521 and the first positioning seat 220 are also coaxially arranged. When the first transmission element 200 is in plug-in connection with the adapter element, the first transmission element 200 and the adapter element are also located on the same axis, which facilitates the alignment of the adapter plug 110 and the first plug 210, and facilitates the plug-in and plug-out connection of the adapter assembly 100 and the first transmission element 200.

[0082] In the preferred embodiment, the first plug 210 is in plug-in connection with the adapter plug 110. Figure 5 and Figure 7 In order to facilitate the positioning operation during the plug-in process of the first plug 210 and the adapter plug 110, the first positioning seat 220 is provided with a first positioning groove 221 (see Figure 5 ) on the surface away from the direct current electrode. The positioning ring 132 of the adapter positioning seat 130 is also provided with a first positioning block 131 (see Figure 3 ) away from the surface of the direct current electrode. The first positioning groove 221 and the first positioning block 131 are matched. When the first plug 210 is connected with the adapter plug 110, with the insertion of the first transmission element 200, the first plug 210 is inserted into the lead-out section of the adapter plug 110, and the first positioning groove 221 and the first positioning block 131 are clamped together to prevent the transmission connector from being connected with the adapter plug 110 and causing the problem of open circuit.

[0083] Further, in order to facilitate the maintenance and replacement of the first transmission element 200, the first transmission element 200 is designed to be detachably connected. The connection between the first plug 210 and the first connector 521 can be threaded connection.

[0084] In the preferred embodiment, the first plug 210 is in plug-in connection with the adapter plug 110. Figure 7When the first transmission element 200 is connected with the adapter assembly 100, the first plug 210 is inserted into the lead-out section of the adapter plug 110, at this time, the direct current is transmitted to the direct current electrode 702 of the electrostatic chuck 700 through the wire 524, the first joint 521, the first plug 210, the adapter plug 110 and the direct current plug 701 in turn; meanwhile, the first radio frequency transmission seat 511 is connected to the conductive base 800, and the radio frequency current is transmitted to the electrostatic chuck 700 through the conductive base 800. In the normal use process, whether the electrostatic chuck 700 is connected with the direct current can be controlled by plugging the first transmission element 200 and the adapter assembly 100, whether the electrostatic chuck 700 is connected with the radio frequency current can be controlled by connecting the first radio frequency transmission seat 511 and the conductive base 800, and the on / off control of the electrostatic chuck 700 is completed; at this time, the electrostatic chuck 700 does not need to be controlled by moving the adapter assembly 100 to control whether the electrostatic chuck 700 is connected with the direct current, so as to prevent the direct current electrode 702 of the electrostatic chuck 700 from being damaged. The first transmission element 200 is designed to be detachable, and the components thereof do not need to be bonded, so that the components are convenient to replace, the production cost is reduced, and the components are simple in structure and easy to connect, so that the production and installation are facilitated.

[0085] In the preferred embodiment, refer to Figure 6 Because there is a contact gap between the first radio frequency transmission seat and the surface of the conductive base 800, the contact between them is not close enough, which causes the radio frequency current transmission performance to be reduced. Therefore, in order to enhance the conductive performance of the first radio frequency transmission seat and the surface of the conductive base 800, the surface of the conductive base 800 is provided with an elastic induction coil 801. When the first radio frequency transmission seat contacts the surface of the conductive base 800, the first radio frequency transmission seat compresses the induction coil 801 and makes it compressed, so that the first radio frequency transmission seat 511 is tightly compressed with the induction coil 801; at this time, the two ends of the induction coil 801 contact the first radio frequency transmission seat and the conductive base 800 respectively, and the radio frequency current of the first radio frequency transmission seat 511 is transmitted to the conductive base 800.

[0086] In the embodiment, refer to Figure 8 and Figure 9 The second transmission element 300 further comprises a second joint 522 and a second fixed seat 320, a second positioning seat 330 arranged in the direction away from the power supply assembly 600 in turn.

[0087] Specifically, one end of the second joint 522 is connected with the wire 524 (refer to Figure 4 ), and the other end is connected with the power supply assembly 600 to transmit the direct current; and as Figure 8 and Figure 9As shown, the second joint 522 passes through the second fixing seat 320 and the second positioning seat 330 respectively. The second fixing seat 320 and the second positioning seat 330 are both made of insulating material, and are coaxially sleeved with the second joint 522 respectively (i.e. the second joint 522, the second fixing seat 320 and the second positioning seat 330 are arranged on the same axis, and the second fixing seat 320 and the second positioning seat 330 are both sleeved on the second joint 522); the second fixing seat 320 and the second positioning seat 330 are arranged inside the second radio frequency transmission seat 512, and the second fixing seat 320 and the second positioning seat 330 fix the second joint 522 in the second radio frequency transmission seat. Further, the second joint 522 is coaxially arranged with the second radio frequency transmission seat 512, and the operation of coaxially plugging the second joint 522 in the second radio frequency transmission seat 512 compared with the power supply assembly 600 can be realized, which facilitates the power connection of the output end of the integrated design of the second transmission element 300 and the power supply assembly 600.

[0088] Further, referring to Figure 8 and Figure 9 In order to prevent the second joint 522 from being separated from the second positioning seat 330 and the second fixing seat 320 during the plugging process of the second transmission element 300 and the power supply assembly 600, the second joint 522 is provided with a second positioning block 5221 on the surface. The second positioning block 5221 is clamped between the second fixing seat 320 and the second positioning seat 330. When the second joint 522 is subjected to the force towards the power supply assembly 600 and the force away from the power supply assembly 600 (i.e. the force to the left or the force to the right in the figure), it can be fixed in the second radio frequency transmission seat 512 through the second positioning block 5221, which ensures that the second joint 522 will not be displaced during the plugging process of the second transmission element 300. Figure 8

[0089] Further, referring to Figure 8 ​In order to tightly connect the second transmission element 300 with the radio frequency transmission sleeve 510, the second radio frequency transmission seat 512 is abutted against a fixed component 901, which is made of insulating material and is arranged on the lower electrode device, and the fixed component 901 provides a supporting force for the second radio frequency transmission seat 512. The second radio frequency transmission seat 512 is internally provided with a fixed block 5121; the second positioning seat 330 is located between the fixed block 5121 and the second fixed seat 320, and the second positioning seat 330 is fixed in the second radio frequency transmission seat 512 through the second fixed seat 320. When assembling the second transmission element 300, the second positioning seat 330 and the second fixed seat 320 are sequentially passed through the second joint 522, and are inserted into the second radio frequency transmission seat 512, and the second positioning seat 330 is fixed between the fixed block 5121 and the second fixed seat 320 through the connection and fixation of the second fixed seat 320 and the second radio frequency transmission seat 512.

[0090] In the preferred embodiment, the second fixed seat 320 is threadedly connected with the radio frequency transmission sleeve 510; and the outer diameter of the second positioning seat 330 is at least smaller than the bottom diameter of the thread of the second fixed seat 320.

[0091] Further, in order to coaxially limit the second joint when the second fixed seat 320 is connected with the second radio frequency transmission seat 512, the second fixed seat 320 is internally provided with a limiting groove on the surface facing the second positioning seat 330, the limiting groove is provided with an annular side wall, the annular side wall includes an inner wall facing the second positioning protrusion and an outer wall opposite to the inner wall, the limiting groove is shaped to be matched with the second positioning protrusion 5221, and the second positioning protrusion 5221 is accommodated in the limiting groove. The shape of the limiting groove is generally a circular ring, but is not limited to a circular ring.

[0092] Meanwhile, referring to Figure 10 In order to facilitate the second positioning seat 330 to be sleeved on the second joint 522, the second positioning seat 330 is provided with a positioning through hole 331 and an auxiliary through hole 332. The positioning through hole 331 and the auxiliary through hole 332 are in communication with each other, the positioning through hole 331 is coaxially arranged with the wire 524, the auxiliary through hole 332 is eccentrically arranged with the positioning through hole 331, and the positioning through hole 331 and the auxiliary through hole 332 penetrate through the second positioning seat 330. The positioning through hole 331 includes a first stepped hole 3311, a second stepped hole 3312 and a third stepped hole 3313 (see Figure 9), the first stepped hole 3311 is adapted to the shape of the annular outer wall of the limiting groove, the second stepped hole is adapted to the shape of the second positioning block 5221, and the third stepped hole 3313 is adapted to the diameter of the wire 524. The axis of the auxiliary through hole 332 deviates from the axis of the positioning through hole 331 (i.e., deviates from the axis of the second positioning seat 330), and the size of the auxiliary through hole 332 is greater than the size of the second positioning block 5221 of the second connector 522, so as to facilitate the insertion of the second connector 522 into the second positioning seat 330; wherein the size of the auxiliary through hole 332 can allow the second connector 522 to pass through.

[0093] In a preferred embodiment, the second positioning block is cylindrical, and the corresponding limiting groove is a circular limiting groove. The inner wall diameter of the limiting groove is the same as the diameter of the second positioning block, and the second positioning block is accommodated in the limiting groove. The positioning through hole 331 of the second positioning seat 330 includes a first stepped hole 3311, a second stepped hole 3312, and a third stepped hole 3313, which are sequentially reduced in diameter away from the power supply assembly 600. The first stepped hole 3311 is adapted to the diameter of the annular outer wall of the limiting groove, the second stepped hole is adapted to the diameter of the second positioning block 5221, and the third stepped hole 3313 is adapted to the diameter of the wire 524. The axis of the auxiliary through hole 332 deviates from the axis of the positioning through hole 331, and the diameter of the auxiliary through hole 332 is adapted to the diameter of the second positioning block 5221 of the second connector 522. The diameter of the auxiliary through hole 332 allows the second connector 522 to pass through. When the second positioning block is of other shapes, the limiting groove of the second fixing seat is adaptively matched with the positioning through hole and the auxiliary through hole of the second positioning seat.

[0094] In use of the second positioning seat 330, the second connector 522 is inserted into the auxiliary through hole 332, and the position of the second connector 522 is adjusted in the auxiliary through hole 332, so that the second positioning block 5221 of the second connector 522 corresponds to the second stepped hole 3312 of the positioning through hole 331, and the wire 524 near the second connector 522 corresponds to the third stepped hole 3313 of the positioning through hole 331. Then the second connector 522 is pressed into the positioning through hole 331, so that the second connector 522 and the wire 524 are clamped in the positioning through hole 331, and the positioning of the second connector 522 is completed. In the process of fixing the second positioning seat 330 with the second fixing seat 320, the limiting groove of the second fixing seat 320 is sleeved on the second positioning block 5221 of the second connector 522, and one end of the limiting groove of the second fixing seat 320 is inserted into the first stepped hole 3311 of the second positioning seat 330, so as to realize the positioning of the second connector between the second positioning seat 330 and the second fixing seat 320, and ensure the coaxial fixing of the second connector 522 and the second radio frequency transmission seat 512.

[0095] Referring to Figure 8 In the installation of the second transmission element 300, the second joint 522 is inserted into the auxiliary through hole 332 of the second positioning seat 330, and after the second positioning lug 5221 of the second joint 522 corresponds to the second stepped hole 3312 of the second positioning seat 330, the second joint 522 is pressed into the positioning through hole 331, so that the second joint 522 is clamped in the positioning through hole 331, ensuring the coaxial fixation of the second joint 522 and the second positioning seat 330; at this time, the second joint 522 and the second positioning seat 330 are located at the axis of the second radio frequency transmission seat 512. Then, the second fixed seat 320 is inserted into the second radio frequency transmission seat 512 and is sleeved on the second joint 522, so that the second positioning lug 5221 contacts the limiting groove of the second fixed seat 320, and at the same time, one end of the limiting groove of the second fixed seat 320 is inserted into the first stepped hole 3311 of the second positioning seat 330; with the close connection of the second fixed seat 320 and the second radio frequency transmission seat 512, the second positioning seat 330 is clamped between the fixed block 5121 of the second radio frequency transmission seat 512 and the second fixed seat 320, realizing the coaxial arrangement of the second joint 522, the second positioning seat 330, the second fixed seat 320 and the second radio frequency transmission seat 512. The second transmission element 300 is designed to be detachable, and the components thereof do not need to be bonded, facilitating the replacement of the components, reducing the production cost, and the components are simple in structure and easy to connect, facilitating production and installation.

[0096] In the embodiment, to facilitate the connection of the output end of the power supply assembly 600 with the second transmission element 300, the introduction structure further comprises an output assembly 400, one end of the output assembly 400 being connected with the power supply assembly 600 and the other end being connected with the second transmission element 300.

[0097] Specifically, referring to Figure 11 The output assembly 400 comprises a direct current output plug 410 and a radio frequency output plug 440. One end of the direct current output plug 410 can be inserted into the power supply assembly 600 (i.e. the output end of the integrated design of the power supply assembly 600), so as to be connected with the connecting wire 613 (i.e. realizing the electrical connection with the direct current power supply 611), and the other end can be plug-connected with the second joint 522, so as to transmit direct current to the wire 524.

[0098] The radio frequency output plug 440 is coaxially sleeved on the outside of the direct current output plug 410 (e.g. Figure 11The one end of the DC output plug 410 can be inserted into the power supply assembly 600 (i.e. the output end of the integrated design of the power supply assembly 600), connected with the RF matching device 622 (i.e. to realize the electrical connection with the RF power supply), and the other end can be plugged into the RF transmission sleeve 510 to transmit the RF current. At this time, the DC current is generated by the DC power supply 611, processed by the DC filter 612, and then transmitted to the wire 524 through the connecting wire 613, the DC output plug 410, and the second connector 522 in sequence; the RF current is generated by the RF power supply 621, processed by the RF matching device 622, and then transmitted to the second RF transmission seat 512 through the RF output plug 440.

[0099] Further, in order to fix the relative position between the DC output plug 410 and the RF output plug 440 (i.e. the coaxial arrangement of the two) and to achieve insulation isolation, referring to Figure 11 , the output assembly 400 further comprises an output end positioning seat 430 and an output end fixing seat 420 arranged in sequence away from the power supply assembly 600. The output end positioning seat 430 and the output end fixing seat 420 are made of insulating material, and both of them are coaxially sleeved with the DC output plug 410 (i.e. the output end positioning seat 430 and the output end fixing seat 420 are sleeved on the DC output plug 410, and both of them are coaxially arranged with the DC output plug 410). The output end positioning seat 430 and the output end fixing seat 420 fix the DC output plug 410 to the RF output plug 440. At this time, the DC output plug 410, the output end positioning seat 430, the output end fixing seat 420, and the RF output plug 440 are coaxially arranged, which facilitates the plug-in connection between the output assembly 400 and the second transmission element 300. When the RF output plug 440 is inserted into the second RF transmission seat 512, the DC output plug 410 is inserted into the second connector 522, and the output end fixing seat 420 is sleeved outside the second connector 522.

[0100] Further, referring to Figure 11 , the diameter of the first end of the RF output plug 440 inserted into the power supply assembly 600 is smaller than the diameter of the second end connected with the second connector 522, so as to prevent the output assembly 400 from being inserted into the power supply assembly 600 excessively and damaging the power supply assembly 600. At the same time, the output end positioning seat 430 is clamped between the first end and the second end of the RF output plug 440, and the output end fixing seat 420 is fixedly connected with the RF output plug 440. The output end positioning seat 430 can be connected with the RF output plug 440 through the output end fixing seat 420 and fixed in the RF output plug 440.

[0101] In the preferred embodiment, the output end fixing seat 420 is threadedly connected with the RF output plug 440.

[0102] Further, the second fixing seat 320, the second positioning seat 330 and the second joint 522 are coaxially arranged, and the DC output plug 410, the output end positioning seat 430, the output end fixing seat 420 and the radio frequency output plug 440 are coaxially arranged, so as to facilitate the connection and fixing of the second transmission element 300 and the output assembly 400.

[0103] When the output assembly 400 is installed, the DC output plug 410 is inserted into the output end positioning seat 430 and is inserted into the second end of the radio frequency output plug 440 together and is fixed between the first end and the second end of the radio frequency output plug 440. The output end fixing seat 420 is inserted into the radio frequency output plug 440 and is sleeved on the DC output plug 410; the output end positioning seat 430 is clamped in the radio frequency output plug 440 with the close connection of the output end fixing seat 420 and the radio frequency output plug 440. The output assembly 400 is designed to be detachable, and the components thereof do not need to be bonded, so that the components are convenient to replace, the production cost is reduced, and the components are simple in structure and easy to connect, so that the production and installation are facilitated.

[0104] In the embodiment, the isolation layer 523 is arranged between the wire 524 and the radio frequency transmission sleeve, so as to prevent the direct contact of the wire 524 with the radio frequency transmission sleeve 510 and cause the interference of the DC and radio frequency circuits.

[0105] In an embodiment, in order to facilitate the maintenance of the radio frequency transmission sleeve, the radio frequency transmission sleeve further comprises a radio frequency transmission elbow 514 and a radio frequency transmission straight pipe 513 which connect the first radio frequency transmission seat 511 and the second radio frequency transmission seat 512 together. Figure 2 , Figure 7 and Figure 8 The radio frequency transmission elbow 514 and the radio frequency transmission straight pipe 513 are usually made of copper material, and the radio frequency transmission elbow 514 and the radio frequency transmission straight pipe 513 are connected by plugging, so as to facilitate the replacement or maintenance of the radio frequency transmission sleeve. In actual use, the number of the radio frequency transmission elbow 514 and the number of the radio frequency transmission straight pipe 513 can be determined according to the needs. In the embodiment, one radio frequency transmission straight pipe 513 and one radio frequency transmission elbow 514 are selected, so that the radio frequency transmission sleeve forms an L-shaped structure. Referring to Figure 8 , the radio frequency transmission straight pipe 513 is connected to the second radio frequency transmission seat 512 by plugging; and referring to Figure 6 and Figure 7 , the radio frequency transmission elbow 514 is connected to the first radio frequency transmission seat 511 of the conductive base 800 by plugging.

[0106] In the preferred embodiment, a surface between two adjacent components (for example, adjacent radio frequency transmission elbow 514 and radio frequency transmission straight pipe 513) of radio frequency transmission sleeve 510 is provided with a springy and conductive surface contact to improve the conductivity of the connection between the two adjacent components of radio frequency transmission sleeve 510.

[0107] In another embodiment, radio frequency transmission sleeve 510 is fixed in position by a support component of insulating material to provide support and insulation for radio frequency transmission sleeve 510. When first transmission element 200 is connected to adapter component 100, first radio frequency transmission seat 511 is brought into contact with conductive base 800 by the support component; when second transmission element 300 is connected to output component 400, second radio frequency transmission seat 512 is fixed to the lower electrode device (i.e. the device to which electrostatic chuck 700 belongs) by the support component (for example, fixed component 901 in the present embodiment).

[0108] In the process of providing direct current and radio frequency current to electrostatic chuck 700 by power supply component 600, the direct current is generated by direct current power supply 611, processed by direct current filter 612, transmitted to conductive wire 524 through connecting wire 613, direct current output plug 410, second connector 522 in sequence, and then transmitted to first transmission element 200 through conductive wire 524, so that the direct current is transmitted to direct current electrode 702 of electrostatic chuck 700 through first connector 521, first plug 210, adapter plug 110, and direct current plug 701 in sequence. At the same time, the radio frequency current is generated by radio frequency power supply 621, processed by radio frequency matching device 622, transmitted to second radio frequency transmission seat 512 through radio frequency output plug 440, and then transmitted to conductive base 800 through first radio frequency transmission seat 511, and then transmitted to electrostatic chuck 700, so that the radio frequency and high-voltage direct current of electrostatic chuck 700 are introduced.

[0109] In summary, the structure for introducing radio frequency and high-voltage direct current of the electrostatic chuck of the present application has the advantages of simple structure, easy disassembly and assembly. By connecting the adapter component with the direct current electrode, the adapter component and the electrostatic chuck are prevented from being repeatedly plugged and unplugged to damage the direct current electrode, thereby improving the service life of the electrostatic chuck and the production efficiency of the semiconductor. At the same time, the coaxial design of the adapter component, the first transmission element, the second transmission element, and the output component facilitates plugging and unplugging positioning.

[0110] Although the content of the present application has been described in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation of the present application. After reading the above content, various modifications and alternatives of the present application will be apparent to those skilled in the art. Therefore, the scope of protection of the present application should be defined by the appended claims.

Claims

1. A radio frequency and high voltage direct current introduction structure for an electrostatic chuck, characterized in that: The electrostatic chuck is arranged on the surface of the conductive base, a DC plug is arranged inside the electrostatic chuck, and the introduction structure includes: a switching assembly, comprising a switching element connected to the DC plug, wherein the switching element is disposed between the electrostatic chuck and the conductive base; The power transmission component includes a coaxially arranged radio frequency transmission sleeve and a conductor, wherein the radio frequency transmission sleeve is sleeved on the outside of the conductor, and a first radio frequency transmission seat and a second radio frequency transmission seat are provided at both ends of the radio frequency transmission sleeve; and a first transmission element and a second transmission element are provided at both ends of the conductor; The first transmission element is connected to the adapter element, and at the same time, the first RF transmission seat is electrically connected to the surface of the conductive base; The second transmission element is connected to the power supply component to transmit direct current; at the same time, the second radio frequency transmission socket is also connected to the power supply component to transmit radio frequency current.

2. The radio frequency and high voltage direct current introduction structure of the electrostatic chuck according to claim 1, characterized in that: The adapter element includes an adapter plug, an adapter positioning seat and a fixing piece; Along the extension direction of the DC plug, an adapter plug, an adapter positioning seat and a fixing piece are sequentially arranged; The adapter plug is provided with a socket section and a lead section connected to each other. The socket section is coaxially sleeved on the outside of the DC plug. The lead section passes through the adapter positioning seat and the end of the lead section away from the DC plug is connected to a fixing member. The fixing member fixes the adapter positioning seat to the adapter plug.

3. The radio frequency and high voltage direct current introduction structure of the electrostatic chuck according to claim 2, characterized in that: The adapter positioning seat is provided with a first end, a second end and a ring connecting the first end and the second end; The first end portion contacts the socket section of the adapter plug, the outer diameter of the first end portion is smaller than the outer diameter of the ring body, and the first end portion extends into the electrostatic chuck; The second end portion is in contact with the fixing member. The second end portion is provided with a countersunk hole, and the fixing member is accommodated in the countersunk hole.

4. The radio frequency and high voltage direct current introduction structure of the electrostatic chuck according to claim 3, characterized in that: The adapter assembly further includes: an adapter fixing seat, the adapter fixing seat being coaxially sleeved on the outside of the adapter positioning seat; The adapter fixing seat includes: a longitudinal extension section arranged along the extension direction of the DC plug and a horizontal extension section arranged perpendicular to the longitudinal extension section, the outer diameter of the horizontal extension section is larger than the outer diameter of the longitudinal extension section, and the horizontal extension section is sandwiched between the electrostatic chuck and the conductive base; A positioning ring is further provided at the second end of the adapter positioning seat. The outer diameter of the positioning ring is the same as the outer diameter of the longitudinal extension section. The positioning ring contacts the surface of the longitudinal extension section away from the DC plug. A first positioning protrusion is further provided on the surface of the positioning ring away from the DC plug.

5. The radio frequency and high voltage direct current introduction structure of the electrostatic chuck according to claim 1, characterized in that: The first transmission element comprises: A first connector is provided at one end of the wire; a first plug, one end of which is connected to the first connector and the other end of which is pluggably connected to the adapter plug; a first positioning seat, wherein the first positioning seat is sleeved on the first plug and the first connector; When the first plug is connected to the adapter plug, the first positioning seat is engaged with the adapter element.

6. The radio frequency and high voltage direct current introduction structure of the electrostatic chuck according to claim 1, characterized in that: The second transmission element comprises: a second connector, one end of which is connected to the wire and the other end of which is connected to the power supply component to transmit direct current; and A second fixing seat and a second positioning seat are arranged in sequence away from the power supply component; the second connector passes through the second fixing seat and the second positioning seat respectively, and the second fixing seat and the second positioning seat are coaxially sleeved with the second connector respectively, the second fixing seat and the second positioning seat are arranged inside the second RF transmission seat, and the second fixing seat and the second positioning seat fix the second connector to the second RF transmission seat.

7. The radio frequency and high voltage direct current introduction structure of the electrostatic chuck according to claim 6, characterized in that: A second positioning protrusion is provided at the connection between the second connector and the wire, and the second positioning protrusion is sandwiched between the second fixing seat and the second positioning seat; A fixing block is provided inside the second radio frequency transmission seat, the second positioning seat is located between the fixing block and the second fixing seat, and the second positioning seat is fixed to the second radio frequency transmission seat through the second fixing seat.

8. The radio frequency and high voltage direct current introduction structure of the electrostatic chuck according to claim 7, characterized in that: The second fixing seat is provided with a limiting groove on a surface facing the second positioning seat, and the limiting groove is provided with an annular side wall, the annular side wall including an inner wall facing the second positioning protrusion and an outer wall opposite to the inner wall, the shape of the annular inner wall of the limiting groove is adapted to the second positioning protrusion, and the second positioning protrusion is accommodated in the limiting groove; The second positioning seat is provided with a positioning through hole and an auxiliary through hole, the positioning through hole and the auxiliary through hole are connected to each other, the positioning through hole is coaxial with the wire, the auxiliary through hole is eccentric to the positioning through hole, and the positioning through hole and the auxiliary through hole both pass through the second positioning seat; The positioning through hole includes a first stepped hole, a second stepped hole and a third stepped hole whose apertures decrease successively in the direction away from the power supply component. The first stepped hole is adapted to the shape of the annular outer wall of the limiting groove, the second stepped hole is adapted to the shape of the second positioning protrusion, and the third stepped hole is adapted to the diameter of the wire.

9. The radio frequency and high voltage direct current introduction structure of the electrostatic chuck according to claim 1, characterized in that: The introduction structure further includes: an output component, one end of which is connected to the power supply component, and the other end is connected to the second transmission element; the output component includes: A DC output plug, one end of which can be inserted into the power supply component and the other end of which can be plugged and unplugged into the second connector; The radio frequency output plug is coaxially sleeved on the outside of the DC output plug; one end of the radio frequency output plug is inserted into the power supply component, and the other end is pluggably connected to the second radio frequency transmission socket.

10. The radio frequency and high voltage direct current introduction structure of the electrostatic chuck according to claim 9, characterized in that: The output assembly further includes: an output terminal positioning seat and an output terminal fixing seat sequentially arranged in a direction away from the power supply assembly; the output terminal positioning seat and the output terminal fixing seat are coaxially sleeved on the outside of the DC output plug, and the output terminal positioning seat and the output terminal fixing seat fix the DC output plug to the RF output plug; When the RF output plug is inserted into the second RF transmission socket, the DC output plug is inserted into the second connector, and the output end fixing socket is sleeved on the outside of the second connector.

11. The radio frequency and high voltage direct current introduction structure of the electrostatic chuck according to claim 10, characterized in that: The diameter of the first end of the RF output plug inserted into the power supply assembly is smaller than the diameter of the second end connected to the second connector; The output terminal positioning seat is arranged between the first end and the second end of the radio frequency output plug, and the output terminal fixing seat is fixedly connected to the radio frequency output plug; The output end positioning seat is connected to the radio frequency output plug through the output end fixing seat and is fixed in the radio frequency output plug.

12. The radio frequency and high voltage direct current introduction structure of the electrostatic chuck according to claim 1, characterized in that: An isolation layer is provided between the wire and the radio frequency transmission sleeve.

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