Galvanometer and laser radar

Abstract

The invention provides a galvanometer and a laser radar. The galvanometer comprises a fixed seat, a first support and a second support, wherein the fixed seat is provided with a first hollow area; the supporting frame is arranged in the first hollowed-out area, the supporting frame is connected with the fixing base through a first shaft, and the supporting frame is provided with a second hollowed-out area; the reflecting mirror is arranged in the second hollow area, and the reflecting mirror is connected with the supporting frame through a second shaft; wherein at least one of the first shaft and the second shaft is a bending shaft. According to the embodiment of the invention, at least one of the galvanometer, the first shaft and the second shaft is the bending shaft, and the bending shaft has a larger length than a straight shaft under the condition that the area of the reflector is not reduced, so that the length of the first shaft and / or the second shaft can be increased, and the torsion angle of the galvanometer can be increased under the condition that the galvanometer provides a larger torsion angle. The structural stress borne by the first shaft and / or the second shaft can be reduced, so that the galvanometer has better reliability.

Description

Technical Field

[0001] The present application relates to the field of laser detection technology, and in particular to a galvanometer and a laser radar. Background Art

[0002] LiDAR (LiDAR) is a radar system that uses laser beams to detect the position, velocity, and other characteristic parameters of a target object. In recent years, the use of galvanometers (galvanometers) in LiDAR has become a growing trend. Galvanometers are micro-mirrors with advantages such as small size, high oscillation frequency, and no rotating parts.

[0003] With the widespread application of LiDAR, people have also put forward higher requirements for LiDAR, such as the need to achieve a larger scanning field of view and a longer detection distance. This requires the galvanometer to provide a larger torsion angle. However, a larger torsion angle also means greater structural stress, which affects the reliability of the galvanometer. Summary of the Invention

[0004] The present application provides a galvanometer and a laser radar, aiming to make the galvanometer have better reliability when providing a larger torsion angle.

[0005] The specific technical solutions are as follows:

[0006] An embodiment of the first aspect of the present application provides a galvanometer, which includes: a fixing seat, the fixing seat having a first hollow area; a support frame, the support frame is arranged in the first hollow area, the support frame is connected to the fixing seat via a first axis, and the support frame is provided with a second hollow area; a reflector, the reflector is arranged in the second hollow area, the reflector is connected to the support frame via a second axis; wherein, at least one of the first axis and the second axis is a bending axis.

[0007] In the galvanometer in the embodiment of the present application, at least one of the first axis and the second axis is a bent axis. Without reducing the area of ​​the reflector, the bent axis has a larger length than the straight axis. Thus, the length of the first axis and / or the second axis can be increased. In this way, when the galvanometer provides a larger torsion angle, the structural stress borne by the first axis and / or the second axis can be reduced, thereby making the galvanometer have better reliability.

[0008] In some embodiments, the bending axis includes a first segment, a second segment, a third segment, a fourth segment, a fifth segment, a sixth segment and a seventh segment connected in sequence; the first segment, the third segment, the fifth segment and the seventh segment are all straight segments and extend along a first direction; along the first direction, the third segment and the fifth segment are both located between the first segment and the seventh segment; along the second direction, the first segment and the seventh segment are both located between the third segment and the fifth segment, and the second direction is perpendicular to the first direction.

[0009] In some embodiments, the second segment, the fourth segment, and the sixth segment are all straight segments and extend along the second direction.

[0010] In some embodiments, the second segment and the sixth segment are both straight segments and extend along the second direction; the fourth segment includes a first sub-segment, a second sub-segment, and a third sub-segment connected in sequence, the first sub-segment is connected to the third segment, the third sub-segment is connected to the fifth segment, the first sub-segment and the third sub-segment are straight segments and extend along the second direction; along the first direction, the third sub-segment is located between the second segment and the first sub-segment.

[0011] In some embodiments, the second subsegment is a straight line segment, and an included angle between the second subsegment and the first subsegment is greater than or equal to 135° and less than or equal to 165°.

[0012] In some embodiments, a connection portion between any two adjacent segments is formed with a rounded corner structure.

[0013] In some embodiments, a minimum distance between the second segment and the fourth segment along the first direction is not less than 25 μm; and / or a minimum distance between the fourth segment and the sixth segment along the first direction is not less than 25 μm.

[0014] In some embodiments, a minimum distance between the second segment and the fourth segment along the first direction is not less than 50 μm; and / or a minimum distance between the fourth segment and the sixth segment along the first direction is not less than 50 μm.

[0015] In some embodiments, the second segment, the fourth segment and the sixth segment are all straight segments, the angle between the second segment and the first segment is greater than 90°, the angle between the fourth segment and the third segment is greater than 90°, and the angle between the sixth segment and the fifth segment is greater than 90°; the second segment is parallel to the sixth segment.

[0016] In some embodiments, the bending axis includes a first segment, a second segment, and a third segment connected in sequence, a first bending angle is formed between the first segment and the second segment, a second bending angle is formed between the second segment and the third segment, and the first bending angle and the second bending angle are both less than 90°.

[0017] In some embodiments, the galvanometer mirror has a first central axis, the first central axis passes through the center of the reflector, and the first axis extends along a first direction;

[0018] The first section and the third section are located on both sides of the first central axis.

[0019] In some embodiments, the first segment has a first end away from the reflector, the third segment has a second end close to the reflector, the maximum distance between the first end and the first center axis is L1, the maximum distance between the second end and the first center axis is L2, and the length of the bending axis along the first direction is L3, then L1, L2, and L3 satisfy the relationship: 0.5L3<L1<L3; 0.5L3<L2<L3.

[0020] In some embodiments, the width of the first segment gradually decreases from one end away from the second segment to one end close to the second segment; the width of the third segment gradually decreases from one end away from the second segment to one end close to the second segment; the width of the second segment gradually decreases from the middle to both ends.

[0021] An embodiment of the second aspect of the present application provides a laser radar, which includes the galvanometer in any of the above embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic structural diagram of a galvanometer provided in one embodiment of the present application;

[0023] Figure 2 A schematic structural diagram of a galvanometer provided in another embodiment of the present application;

[0024] Figure 3 A schematic structural diagram of a galvanometer provided in another embodiment of the present application;

[0025] Figure 4 A schematic structural diagram of a bending shaft provided in one embodiment of the present application;

[0026] Figure 5 A schematic structural diagram of a bending shaft provided in another embodiment of the present application;

[0027] Figure 6 A schematic structural diagram of a bending shaft provided in another embodiment of the present application;

[0028] Figure 7 A schematic structural diagram of a galvanometer provided in another embodiment of the present application;

[0029] Figure 8 Stress distribution diagram obtained by numerical simulation of the galvanometer (using direct axis);

[0030] Figure 9 Stress distribution diagram obtained by numerical simulation of the galvanometer (using a curved axis with uniform width in each section);

[0031] Figure 10 Stress distribution diagram obtained by numerical simulation of the galvanometer (using a curved axis with varying widths in each section);

[0032] Figure 11 Schematic diagram of a laser radar in one embodiment of the present application (the arrows in the figure represent laser beams).

[0033] The description of the reference numerals in the figures is as follows:

[0034] 10. Galvanometer;

[0035] 100. Fixed seat; 101. First hollow area;

[0036] 200, support frame; 201, second hollow area;

[0037] 300, reflector;

[0038] 400, first axis;

[0039] 500, second axis;

[0040] 600, bent shaft;

[0041] 610, first section; 620, second section; 630, third section; 640, fourth section; 641, first subsection; 642, second subsection; 643, third subsection; 650, fifth section; 660, sixth section; 670, seventh section;

[0042] 20. Laser transmitter;

[0043] 30. Controller. DETAILED DESCRIPTION

[0044] In order to make the purpose, technical solutions and advantages of this application more clearly understood, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0045] In the description of this application, it should be understood that if the terms "up", "down", "left", "right", etc. indicate an orientation or position relationship based on the orientation or position relationship shown in the drawings, it is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the position relationship in the drawings are only used for illustrative purposes and cannot be understood as a limitation on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0046] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood to imply or suggest relative importance or implicitly indicate the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0047] In the description of this application, unless otherwise expressly specified or limited, terms such as "installed," "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components, unless otherwise expressly limited. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0048] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0049] LiDAR (LiDAR) is a radar system that uses laser beams to detect the position, velocity, and other characteristic parameters of a target object. In recent years, the use of galvanometers (galvanometers) in LiDAR has become a growing trend. Galvanometers are micro-mirrors with advantages such as small size, high oscillation frequency, and no rotating parts.

[0050] With the widespread application of LiDAR, people have also put forward higher requirements for LiDAR, such as the need to achieve a larger scanning field of view and a longer detection distance. This requires the galvanometer to provide a larger torsion angle and optical diameter. However, a large optical diameter means an increase in the size of the reflector, which increases the structural stress of the torsion axis. A larger torsion angle also means greater structural stress, all of which will affect the reliability of the galvanometer.

[0051] Based on the above situation, an embodiment of the first aspect of the present application provides a galvanometer, which aims to make the galvanometer have better reliability when providing a larger torsion angle.

[0052] like Figure 1 、 Figure 2 as well as Figure 3As shown, the galvanometer 10 in the embodiment of the present application includes a fixing base 100, a support frame 200, and a reflector 300. The fixing base 100 has a first hollow area 101, and the support frame 200 is disposed in the first hollow area 101. The support frame 200 is connected to the fixing base 100 via a first axis 400. The support frame 200 is provided with a second hollow area 201, and the reflector 300 is disposed in the second hollow area 201. The reflector 300 is connected to the support frame 200 via a second axis 500. At least one of the first axis 400 and the second axis 500 is a curved axis 600.

[0053] The fixing base 100 is used to fix and install the entire galvanometer 10 structure, and the first hollow area 101 in the fixing base 100 is used to accommodate the moving part of the galvanometer 10. The support frame 200 and the reflector 300 constitute the moving part of the galvanometer 10, wherein the reflector 300 is used to reflect the laser beam. When the laser radar is working, the support frame 200 is twisted relative to the fixing base 100, and the reflector 300 is twisted relative to the support frame 200, so that the reflector 300 deflects the laser beam to scan various positions in the field of view. Usually, a coil is provided on the support frame 200 and / or the reflector 300, and the galvanometer 10 is set in an external magnetic field. When the coil is energized, a Lorentz force is generated, which drives the support frame 200 and the reflector 300 to deflect in the magnetic field. The changing electrical signal in the coil drives the support frame 200 and the reflector 300 to continuously reciprocate.

[0054] The first axis 400 is used to connect the support frame 200 and the fixing base 100 , and the second axis 500 is used to connect the fixing base 100 and the galvanometer 10 . The first axis 400 may also be called a slow axis, and the second axis 500 may also be called a fast axis.

[0055] In the galvanometer 10 of the related art, the fast axis and the slow axis are both straight axes, so that the lengths of the fast axis and the slow axis are relatively short. The stress calculation formula of the axis structure in the torsion state is:

[0056] τ max =Gbθα / L

[0057] Where, τ max represents the maximum stress of the shaft, G is the shear modulus, b is the thickness of the shaft, θ is the torsion angle of the shaft, α is a coefficient related to the width and thickness of the shaft, and L is the total length of the shaft.

[0058] It can be seen from the above formula that the maximum stress borne by the shaft is inversely proportional to the total length of the shaft. Therefore, by increasing the total length of the shaft, the maximum stress borne by the shaft can be reduced.

[0059] In the galvanometer 10 in the embodiment of the present application, at least one of the first axis 400 and the second axis 500 is a bent axis 600. Without reducing the area of ​​the reflector 300, the bent axis 600 has a larger length than the straight axis. Thus, the length of the first axis 400 and / or the second axis 500 can be increased. In this way, when the galvanometer 10 provides a larger torsion angle, the structural stress borne by the first axis 400 and / or the second axis 500 can be reduced, thereby making the galvanometer 10 have better reliability.

[0060] In some embodiments, as Figure 4 、 Figure 5 as well as Figure 6 As shown, the bending shaft 600 includes a first segment 610, a second segment 620, a third segment 630, a fourth segment 640, a fifth segment 650, a sixth segment 660, and a seventh segment 670, which are connected in sequence. The first segment 610, the third segment 630, the fifth segment 650, and the seventh segment 670 are all straight segments and extend along a first direction. Along the first direction, the third segment 630 and the fifth segment 650 are both located between the first segment 610 and the seventh segment 670. Along the second direction, the first segment 610 and the seventh segment 670 are both located between the third segment 630 and the fifth segment 650, with the second direction being perpendicular to the first direction.

[0061] In this embodiment, the curved shaft 600 comprises seven segments, of which the first segment 610, the third segment 630, the fifth segment 650, and the seventh segment 670 are straight segments extending along a first direction. Furthermore, along the first direction, the third segment 630 and the fifth segment 650 are located between the first segment 610 and the seventh segment 670; along the second direction, the first segment 610 and the seventh segment 670 are located between the third segment 630 and the fifth segment 650. The first segment 610 and the third segment 630 are connected by the second segment 620, the third segment 630 and the fifth segment 650 are connected by the fourth segment 640, and the fifth segment 650 and the seventh segment 670 are connected by the sixth segment 660. This arrangement gives the curved shaft 600 a serpentine structure, significantly increasing its length compared to a straight shaft. Accordingly, when the galvanometer mirror 10 provides a larger torsion angle, the structural stress borne by the bending axis 600 can be significantly reduced, thereby significantly improving the reliability of the galvanometer mirror 10.

[0062] In one embodiment, Figure 4 As shown, the second segment 620 , the fourth segment 640 and the sixth segment 660 are all straight segments and extend along the second direction.

[0063] Typically, both the fast and slow axes of the galvanometer mirror 10 are fabricated using a photolithography process. During the photolithography process, straight segments are easier to control in terms of their morphology, thus helping to reduce morphological deviations after molding. Therefore, constructing the second segment 620, the fourth segment 640, and the sixth segment 660 as straight segments helps improve the molding accuracy of the curved shaft 600.

[0064] In one embodiment, Figure 5 As shown, the second segment 620 and the sixth segment 660 are both straight segments and extend along the second direction. The fourth segment 640 includes a first sub-segment 641, a second sub-segment 642, and a third sub-segment 643, which are sequentially connected. The first sub-segment 641 is connected to the third segment 630, and the third sub-segment 643 is connected to the fifth segment 650. The first sub-segment 641 and the third sub-segment 643 are straight segments and extend along the second direction. Along the first direction, the third sub-segment 643 is located between the second segment 620 and the first sub-segment 641.

[0065] In this embodiment, the second segment 620, the sixth segment 660, and the first and third subsegments 641 and 643 are all straight segments, which helps reduce post-lithographic morphology deviations. Furthermore, the fourth segment 640 includes a first subsegment 641, a second subsegment 642, and a third subsegment 643, which are sequentially connected. Along the first direction, the third subsegment 643 is located between the second segment 620 and the first subsegment 641. That is, the third subsegment 643 is closer to the second segment 620 than the first subsegment 641. Compared to the fourth segment 640 being entirely straight segments, the length of the curved axis 600 along the first direction can be reduced while maintaining the overall length of the curved axis 600. This allows for a larger reflector 300 to be provided, thereby increasing the reflective area.

[0066] Furthermore, the second subsegment 642 is a straight segment, and the angle between the second subsegment 642 and the first subsegment 641 is greater than or equal to 135° and less than or equal to 165°. If the angle between the second subsegment 642 and the first subsegment 641 is too large, the effect of reducing the length of the bending axis 600 along the first direction will be less obvious. If the angle between the second subsegment 642 and the first subsegment 641 is too small, a loading effect is likely to occur during the etching process, resulting in uneven etching. After repeated experiments and verification, the applicant found that when the angle between the second subsegment 642 and the first subsegment 641 is greater than or equal to 135° and less than or equal to 165°, the reduction in the length of the bending axis 600 along the first direction is more obvious, and it is less likely to cause a loading effect during etching.

[0067] In some embodiments, the connection between any two adjacent sections is formed with a rounded corner structure. By forming the connection between adjacent components into a rounded corner structure, stress concentration at the connection can be weakened or avoided.

[0068] In some embodiments, the minimum distance between the second segment 620 and the fourth segment 640 along the first direction is not less than 25 μm. Figure 4 For the embodiment in which the fourth segment 640 is a straight segment, the distance between each part of the second segment 620 and the fourth segment 640 is equal, so the distance between the second segment 620 and the fourth segment 640 is equal to the minimum distance between the two along the first direction. Figure 5 For the embodiment in which the fourth segment 640 includes the first sub-segment 641, the second sub-segment 642, and the third sub-segment 643, the third sub-segment 643 is closer to the second segment 620 than the first sub-segment 641 and the second sub-segment 642. Therefore, the minimum distance between the second segment 620 and the fourth segment 640 along the first direction is equal to the distance between the third sub-segment 643 and the second segment 620.

[0069] The connection between the second segment 620 and the third segment 630, as well as the connection between the third segment 630 and the fourth segment 640, is formed with a rounded corner structure. The larger the rounded corner radius of the rounded corner structure, the better the effect of reducing stress concentration. The size of the rounded corner radius is limited by the distance between the second segment 620 and the fourth segment 640. In other words, when the distance between the second segment 620 and the fourth segment 640 is large, the rounded corner half-angle of the rounded corner structure can be set relatively large. After extensive testing and verification, the applicant found that the distance between the second segment 620 and the fourth segment 640 along the first direction must be ensured to be no less than 25 μm to ensure that the rounded corner structure at the connection between the second segment 620 and the third segment 630, as well as the rounded corner structure at the connection between the third segment 630 and the fourth segment 640, has a sufficient rounded corner radius, thereby achieving a more significant effect of reducing stress concentration.

[0070] In some embodiments, the minimum distance between the fourth segment 640 and the sixth segment 660 along the first direction is not less than 25 μm. Figure 4 For the embodiment in which the fourth segment 640 is a straight segment, the distance between each portion of the sixth segment 660 and the fourth segment 640 is equal, and therefore, the distance between the sixth segment 660 and the fourth segment 640 is equal to the minimum distance between the two along the first direction. Figure 5 For the embodiment in which the fourth segment 640 includes the first sub-segment 641, the second sub-segment 642, and the third sub-segment 643, the first sub-segment 641 is closer to the sixth segment 660 than the second sub-segment 642 and the third sub-segment 643. Therefore, the minimum distance between the sixth segment 660 and the fourth segment 640 along the first direction is equal to the distance between the first sub-segment 641 and the sixth segment 660.

[0071] The connection between the sixth segment 660 and the fifth segment 650, as well as the connection between the fifth segment 650 and the fourth segment 640, is formed with a rounded corner structure. The larger the radius of the rounded corner structure, the better the effect of reducing stress concentration. The size of the rounded corner radius is limited by the distance between the sixth segment 660 and the fourth segment 640. In other words, when the distance between the sixth segment 660 and the fourth segment 640 is large, the rounded half-angle of the rounded corner structure can be set relatively large. After extensive testing and verification, the applicant found that the distance between the fourth segment 640 and the sixth segment 660 along the first direction must be no less than 25 μm to ensure that the rounded corner structure at the connection between the sixth segment 660 and the fifth segment 650, as well as the rounded corner structure at the connection between the fifth segment 650 and the fourth segment 640, has a sufficient radius to achieve a more significant effect of reducing stress concentration.

[0072] Furthermore, the minimum distance between the second segment 620 and the fourth segment 640 along the first direction is no less than 50 μm. After extensive testing and verification, the applicant has found that when the minimum distance between the second segment 620 and the fourth segment 640 along the first direction is no less than 50 μm, stress concentration at the connection between the second segment 620 and the third segment 630, and at the connection between the third segment 630 and the fourth segment 640, is significantly reduced.

[0073] Furthermore, the minimum distance between the fourth segment 640 and the sixth segment 660 along the first direction is no less than 50 μm. After extensive testing and verification, the applicant has found that when the minimum distance between the fourth segment 640 and the sixth segment 660 along the first direction is no less than 50 μm, stress concentration at the connection between the sixth segment 660 and the fifth segment 650, and at the connection between the fifth segment 650 and the fourth segment 640, is significantly reduced.

[0074] In one embodiment, Figure 6 As shown, the second segment 620, the fourth segment 640 and the sixth segment 660 are all straight segments, the angle between the second segment 620 and the first segment 610 is greater than 90°, the angle between the fourth segment 640 and the third segment 630 is greater than 90°, the angle between the sixth segment 660 and the fifth segment 650 is greater than 90°, and the second segment 620 is parallel to the sixth segment 660.

[0075] As can be seen from the fact that the first section 610, the third section 630, the fifth section 650, and the seventh section 670 all extend along the first direction, the angle between the second section 620 and the third section 630 is also greater than 90°, the angle between the fourth section 640 and the fifth section 650 is also greater than 90°, and the angle between the sixth section 660 and the seventh section 670 is also greater than 90°. Thus, a curved axis 600 that is longer than a straight axis can also be constructed. This helps reduce the structural stress borne by the first axis 400 and / or the second axis 500, thereby improving the reliability of the galvanometer 10.

[0076] In other embodiments, such as Figure 7 As shown, the bending shaft 600 includes a first section 610, a second section 620 and a third section 630 connected in sequence, a first bending angle is formed between the first section 610 and the second section 620, and a second bending angle is formed between the second section 620 and the third section 630, and both the first bending angle and the second bending angle are less than 90°.

[0077] This arrangement allows the curved axis 600 to have an S-shaped structure. This allows for a curved axis 600 that is longer than a straight axis. This helps reduce the structural stress on the first axis 400 and / or the second axis 500, thereby improving the reliability of the galvanometer 10.

[0078] Furthermore, the galvanometer 10 has a first central axis that passes through the center of the reflector 300. The first axis 400 extends along a first direction, and the first segment 610 and the third segment 630 are located on either side of the first central axis. In other words, the first segment 610 and the third segment 630 are both offset from the first central axis. This arrangement facilitates increasing the first and second bending angles. Increasing the first bending angle can reduce stress concentration at the connection between the first segment 610 and the second segment 620, while increasing the second bending angle can reduce stress concentration at the connection between the second segment 620 and the third segment 630.

[0079] Specifically, the first segment 610 has a first end away from the reflector 300, the third segment 630 has a second end close to the reflector 300, the maximum distance between the first end and the first central axis is L1, the maximum distance between the second end and the first central axis is L2, and the length of the bending axis 600 along the first direction is L3. Then, L1, L2, and L3 satisfy the relationship:

[0080] 0.5L3<L1<L3;

[0081] 0.5L3<L2<L3.

[0082] The above relationship defines the degree of deviation of the first segment 610 from the first central axis, as well as the degree of deviation of the third segment 630 from the first central axis. After extensive testing, the applicant has found that satisfying the above relationship significantly reduces stress concentration at the connection between the first segment 610 and the second segment 620, as well as at the connection between the second segment 620 and the third segment 630.

[0083] In one embodiment, the first section 610, the second section 620, and the third section 630 are all sections of uniform width. That is, the width of the first section 610 is equal at all locations, the width of the second section 620 is equal at all locations, and the width of the third section 630 is equal at all locations. This makes the curved shaft 600 easier to process and form.

[0084] In another embodiment, please refer to Figure 7 The width of the first segment 610 gradually decreases from the end away from the second segment 620 to the end closer to the second segment 620; the width of the third segment 630 gradually decreases from the end away from the second segment 620 to the end closer to the second segment 620; and the width of the second segment 620 gradually decreases from the middle to both ends. After extensive research, the applicant discovered that constructing the first segment 610, the second segment 620, and the third segment 630 in the above-described structure can reduce the maximum stress of the bending axis 600 when the torsion angle of the reflector 300 remains the same.

[0085] Figures 8 to 10 is the stress distribution diagram obtained by numerical simulation using the finite element method. Figure 8 The stress distribution when the galvanometer 10 adopts a straight axis is shown. According to the results of numerical simulation, when the straight axis is rotated by 20°, the maximum stress value is 1566 MPa. Figure 9 and Figure 10 The stress distribution of the galvanometer 10 is shown when the bending shaft 600 has an S-shaped structure. Figure 9 The bending shaft 600 has a first section 610, a second section 620 and a third section 630 with uniform widths. According to the results of numerical simulation, when the bending shaft 600 is twisted by 20°, the maximum stress value is 765 MPa. Figure 10In the bending axis 600, the width of the first section 610 gradually decreases from the end away from the second section 620 to the end close to the second section 620; the width of the third section 630 gradually decreases from the end away from the second section 620 to the end close to the second section 620; and the width of the second section 620 gradually decreases from the middle to both ends. According to the results of numerical simulation, when the bending axis 600 is twisted 20°, the maximum stress value is 653 MPa. Therefore, constructing the first section 610, the second section 620 and the third section 630 into the above-mentioned width-varying structural form can further reduce the maximum stress borne by the bending axis 600, thereby further improving the reliability of the galvanometer 10.

[0086] In some embodiments, the first axis 400 is a curved axis 600, there are two first axes 400, and the two first axes 400 are symmetrical about the center of the reflector 300. This arrangement ensures that when the support frame 200 is twisted in different directions relative to the fixing base 100, the force applied to the first axis 400 remains substantially consistent.

[0087] In some embodiments, the second axis 500 is a bending axis 600, and there are two second axes 500, which are symmetrical about the center of the reflector 300. This arrangement ensures that when the reflector 300 is twisted in different directions relative to the support frame 200, the forces acting on the second axes 500 remain substantially consistent.

[0088] An embodiment of the second aspect of the present application provides a laser radar, which includes the galvanometer 10 in any of the above embodiments.

[0089] Specifically, if Figure 11 As shown, the laser radar can also include a laser emitter 20 and a controller 30, wherein the laser emitter 20 is used to emit a laser beam, and the controller 30 is electrically connected to the laser emitter 20 and the galvanometer 10, and is used to control the laser emitter 20 to emit the laser beam and control the deflection of the galvanometer 10.

[0090] In the laser radar in the embodiment of the present application, in the galvanometer 10 therein, at least one of the first axis 400 and the second axis 500 is a bent axis 600. Without reducing the area of ​​the reflector 300, the bent axis 600 has a larger length than the straight axis. Thus, the length of the first axis 400 and / or the second axis 500 can be increased. In this way, when the galvanometer 10 provides a larger torsion angle, the structural stress borne by the first axis 400 and / or the second axis 500 can be reduced, thereby making the galvanometer 10 have better reliability.

[0091] The above content is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A galvanometer, characterized in that: include: A fixing seat, wherein the fixing seat has a first hollow area; a support frame, the support frame being disposed in the first hollow area, the support frame being connected to the fixing seat via a first axis, and the support frame being provided with a second hollow area; a reflector, the reflector being disposed in the second hollow area and connected to the support frame via a second axis; At least one of the first axis and the second axis is a bending axis.

2. The galvanometer according to claim 1, characterized in that The bending axis includes a first section, a second section, a third section, a fourth section, a fifth section, a sixth section and a seventh section which are connected in sequence; The first segment, the third segment, the fifth segment and the seventh segment are all straight segments and extend along a first direction; Along the first direction, the third segment and the fifth segment are both located between the first segment and the seventh segment; Along a second direction, the first segment and the seventh segment are both located between the third segment and the fifth segment, and the second direction is perpendicular to the first direction.

3. The galvanometer according to claim 2, characterized in that The second segment, the fourth segment, and the sixth segment are all straight segments and extend along the second direction.

4. The galvanometer according to claim 2, characterized in that The second segment and the sixth segment are both straight segments and extend along the second direction; The fourth segment includes a first subsegment, a second subsegment, and a third subsegment connected in sequence, the first subsegment is connected to the third segment, the third subsegment is connected to the fifth segment, and the first subsegment and the third subsegment are straight segments and extend along the second direction; Along the first direction, the third sub-segment is located between the second sub-segment and the first sub-segment.

5. The galvanometer according to claim 4, characterized in that: The second subsegment is a straight line segment, and an included angle between the second subsegment and the first subsegment is greater than or equal to 135° and less than or equal to 165°.

6. The galvanometer according to claim 3 or 4, characterized in that: The connection parts between any two adjacent sections are formed with a rounded corner structure.

7. The galvanometer according to claim 6, characterized in that: A minimum distance between the second segment and the fourth segment along the first direction is not less than 25 μm; And / or the minimum distance between the fourth segment and the sixth segment along the first direction is not less than 25 μm.

8. The galvanometer according to claim 6, characterized in that: A minimum distance between the second segment and the fourth segment along the first direction is not less than 50 μm; And / or the minimum distance between the fourth segment and the sixth segment along the first direction is not less than 50 μm.

9. The galvanometer according to claim 2, characterized in that: The second segment, the fourth segment, and the sixth segment are all straight segments. The angle between the second segment and the first segment is greater than 90°, the angle between the fourth segment and the third segment is greater than 90°, and the angle between the sixth segment and the fifth segment is greater than 90°. The second section is parallel to the sixth section.

10. The galvanometer according to claim 1, characterized in that: The bending axis includes a first segment, a second segment and a third segment connected in sequence, a first bending angle is formed between the first segment and the second segment, a second bending angle is formed between the second segment and the third segment, and the first bending angle and the second bending angle are both less than 90°.

11. The galvanometer according to claim 10, characterized in that: The galvanometer mirror has a first central axis, the first central axis passes through the center of the reflector, and the first axis extends along a first direction; The first section and the third section are located on both sides of the first central axis.

12. The galvanometer according to claim 11, characterized in that: The first segment has a first end away from the reflector, the third segment has a second end close to the reflector, the maximum distance between the first end and the first central axis is L1, the maximum distance between the second end and the first central axis is L2, and the length of the bending axis along the first direction is L3, then L1, L2, and L3 satisfy the relationship: 0.5L3<L1<L3; 0.5L3<L2<L3.

13. The galvanometer according to claim 10, characterized in that: The width of the first section gradually decreases from an end away from the second section to an end close to the second section; The width of the third section gradually decreases from an end away from the second section to an end close to the second section; The width of the second section gradually decreases from the middle to both ends.

14. A laser radar, characterized in that: The invention comprises the galvanometer according to any one of claims 1 to 13.

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