Quartz tank processing jig and processing method
By using precise positioning and welding of the inner tube and bending tube processing fixtures, the problems of low dimensional accuracy and efficiency in traditional quartz jar processing have been solved, achieving high-efficiency and high-precision quartz jar processing.
Patent Information
- Application Number
- CN202510950194.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-10
- Publication Date
- 2025-10-31
AI Technical Summary
In traditional quartz jar manufacturing processes, the use of graphite block stacking affects product dimensional accuracy, is inefficient, and makes the process difficult.
By employing internal tube processing fixtures and tube bending fixtures, the quartz disc, inner tube, outer tube, and bend are precisely positioned and welded to fix them, simplifying the processing and improving efficiency.
It has achieved high-precision quartz jar processing, simplified the processing flow, reduced costs, and improved processing efficiency and quality.
Smart Images
Figure CN120862887A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of quartz product processing technology, and more specifically, to a quartz jar processing fixture and processing method. Background Technology
[0002] Quartz jars, as core containers for processing high-purity materials, are widely used in precision manufacturing fields such as semiconductors and photovoltaics. Their manufacturing process requires extremely high dimensional accuracy and chemical stability to meet the demands of harsh process environments. In traditional quartz jar manufacturing processes, graphite is selected as a key auxiliary material due to its high-temperature resistance.
[0003] Related technologies typically use high-purity graphite blocks as the basic components of the processing mold, which are then manually assembled to form the target mold structure. Current processing methods mainly rely on stacking graphite blocks to ensure dimensional accuracy, but this method not only affects product dimensional accuracy but also results in low processing efficiency and a difficult processing procedure. Summary of the Invention
[0004] The purpose of this invention is to provide a quartz jar processing fixture and processing method, which can simplify the processing process, improve processing efficiency, reduce processing costs, and ensure high-precision processing quality.
[0005] The embodiments of the present invention can be implemented as follows: In a first aspect, the present invention provides a quartz jar processing fixture, comprising: An inner tube processing fixture includes a first base plate and a first side plate. The first side plate is fixed to one side of the first base plate. Two spaced first positioning grooves are provided on the first base plate. The two first positioning grooves are arranged in a direction perpendicular to the first side plate. The first positioning grooves are used to place a quartz disc. The quartz disc has multiple circular holes. A pipe bending fixture includes a second base plate and a second side plate. The two second side plates are respectively disposed on both sides of the second base plate. A second positioning groove is provided on the top of the second side plate. An arc groove is provided on the second base plate. A baffle is provided at one end of the arc groove.
[0006] In an optional embodiment, the bottom of the first positioning groove is a concave arc shape.
[0007] In an optional embodiment, the width of the first positioning groove along the direction perpendicular to the first side plate is the same as the thickness of the quartz disc, and the length of the first positioning groove along the direction parallel to the first side plate is less than the diameter of the quartz disc.
[0008] In an optional embodiment, the width of the arc groove along the direction perpendicular to the second side plate is less than the diameter of the quartz disc, and the length of the arc groove along the direction parallel to the second side plate is greater than or equal to the distance between the two first positioning grooves.
[0009] In an optional embodiment, the distance between the two second side plates is greater than or equal to the diameter of the quartz disc.
[0010] In an optional embodiment, the end of the arcuate groove away from the baffle extends through the second base plate.
[0011] In an optional embodiment, the two second side plates are offset on both sides of the second base plate.
[0012] In an optional embodiment, the second positioning groove includes a bent pipe base plate, a bent pipe positioning plate, and a bent pipe baffle. The bent pipe positioning plate and the bent pipe baffle are the sidewalls of the second positioning groove. The bent pipe positioning plate and the bent pipe baffle are arranged perpendicularly. An opening is provided at one end of the second positioning groove away from the bent pipe positioning plate and the bent pipe baffle. The plane of the bent pipe positioning plate is set at an angle to the length direction of the arc groove.
[0013] In an optional embodiment, the angle between the plane of the bend positioning plate and the length direction of the arc groove is 8°-8.5°.
[0014] Secondly, the present invention provides a processing method applied to the quartz jar processing fixture described in any of the foregoing embodiments, the steps of which include: Quartz disc positioning: Insert two quartz discs vertically downward along the first positioning groove to ensure that the quartz discs fit tightly with the first base plate; The inner tube assembly and positioning involves passing one inner tube through the circular hole of the quartz disc, making the end of the inner tube abut against the first side plate, and then installing multiple inner tubes in sequence. The inner tube and the quartz disc are welded and fixed together. The outer tube is positioned by placing it in the arc groove so that the end face of the outer tube abuts against the baffle. The bent pipe is positioned by placing it in the second positioning groove so that the welding hole on the outer pipe surface is in gap contact with the welding surface of the bent pipe. The outer tube and the bend are welded and fixed together. Assembly and positioning: The assembly of the welded and fixed quartz disc and the inner tube is inserted into the outer tube, so that one side of the quartz disc abuts against the baffle, thus completing the positioning with the outer tube; The outer tube and the quartz disc are welded and fixed together.
[0015] The beneficial effects of the quartz jar processing fixture and processing method provided in the embodiments of the present invention include: The quartz jar processing fixture of the present invention includes an inner tube processing fixture and a tube bending fixture. The inner tube processing fixture includes a first base plate and a first side plate. The first side plate is fixed to one side of the first base plate, and two spaced-apart first positioning grooves are formed on the first base plate. The two first positioning grooves are arranged perpendicular to the first side plate. The first positioning grooves are used to place a quartz disc. Multiple circular holes are formed on the quartz disc. The tube bending fixture includes a second base plate and a second side plate. Two second side plates are respectively disposed on both sides of the second base plate. A second positioning groove is formed on the top of the second side plate. An arcuate groove is formed on the second base plate. A baffle is provided at one end of the arcuate groove. By setting the first positioning groove, the quartz disc can be accurately positioned, and the inner tube of the quartz jar can be positioned through the circular holes of the quartz disc. Simultaneously, the first side plate can axially position multiple inner tubes, allowing the inner tube processing fixture to fix and weld the quartz disc and the inner tube. The outer tube of the quartz jar is placed by setting the arcuate groove, and the baffle provides axial positioning for the outer tube. The bend is positioned by setting a second side plate and a second positioning groove, so that the welding end of the bend is close to the outer tube, thereby welding and fixing the bend and the outer tube. This invention can position and weld and fix components with high precision requirements for quartz tanks, simplifying the processing, improving processing efficiency, reducing processing costs, and ensuring high-precision processing quality. Attached Figure Description
[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 This is a schematic diagram of the machining structure of the inner tube machining fixture provided in this embodiment; Figure 2 This is a schematic diagram of the pipe bending fixture provided in this embodiment; Figure 3 This is a schematic diagram of the processing structure of the pipe bending fixture provided in this embodiment.
[0018] Icons: 10-Inner tube processing fixture; 11-First base plate; 111-First positioning groove; 12-First side plate; 20-Bending pipe processing fixture; 21-Second base plate; 211-Circular arc groove; 212-Baffle; 22-Second side plate; 221-Second positioning groove; 2211-Bending pipe base plate; 2212-Bending pipe positioning plate; 2213-Bending pipe baffle; 30-Quartz jar; 31-Quartz round plate; 311-Round hole; 32-Inner tube; 33-Outer tube; 34-Bending pipe; 341-First tube section; 342-Second tube section. Detailed Implementation
[0019] Related technologies typically use high-purity graphite blocks as the basic components of the processing mold, which are then manually assembled to form the target mold structure. This method not only affects the dimensional accuracy of the product but also results in low processing efficiency and a difficult processing procedure.
[0020] To address the aforementioned problems, this invention provides a quartz jar 30 processing fixture and processing method, which can simplify the processing process, improve processing efficiency, reduce processing costs, and ensure high-precision processing quality.
[0021] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0022] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.
[0023] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0024] In the description of this invention, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed, they are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.
[0025] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.
[0026] It should be noted that, where there is no conflict, the features in the embodiments of the present invention can be combined with each other.
[0027] The following detailed description, through embodiments and in conjunction with the accompanying drawings, details the overall structure, working principle, and technical effects of the quartz jar 30 processing fixture provided by the present invention, as well as the detailed steps, implementation principles, and technical effects of the supporting processing method.
[0028] Please refer to Figures 1-3 The present invention provides a quartz jar 30 processing fixture, which is used to process quartz jar 30, and assembles and welds parts of quartz jar 30.
[0029] The quartz jar 30 processing fixture includes an inner tube processing fixture 10 and a tube bending processing fixture 20. The inner tube processing fixture 10 includes a first base plate 11 and a first side plate 12. The first side plate 12 is fixed to one side of the first base plate 11. Two spaced-apart first positioning grooves 111 are formed on the first base plate 11. The two first positioning grooves 111 are arranged perpendicular to the first side plate 12. The first positioning grooves 111 are used to place a quartz disc 31. Multiple circular holes 311 are formed on the quartz disc 31. The tube bending processing fixture 20 includes a second base plate 21 and a second side plate 22. The second side plate 22 is respectively disposed on both sides of the second base plate 21. A second positioning groove 221 is formed on the top of the second side plate 22. An arcuate groove 211 is formed on the second base plate 21. A baffle 212 is provided at one end of the arcuate groove 211.
[0030] It is understood that the quartz jar 30 in this embodiment includes a quartz disc 31, an inner tube 32, an outer tube 33, and a bent tube 34. The quartz disc 31 serves as the end plates at both ends of the quartz jar 30. The inner tube 32 is disposed inside the quartz jar 30. The outer tube 33 forms the sidewall of the quartz jar 30. The bent tube 34 is disposed on the outer sidewall of the quartz jar 30. The inner tube processing fixture 10 is used to assemble and position the quartz disc 31 and the inner tube 32, and to weld and fix the quartz disc 31 and the inner tube 32. The bent tube processing fixture 20 is used to assemble and position the outer tube 33 and the bent tube 34, and to weld and fix the outer tube 33 and the bent tube 34. Additionally, the bent tube processing fixture 20 is also used to assemble the quartz disc 31 and the inner tube 32 assembly within the outer tube 33, and to weld and fix the quartz disc 31 and the outer tube 33.
[0031] Specifically, the processing procedure of the inner tube processing fixture 10 is as follows: two quartz discs 31 are placed and fixed in the first positioning groove 111, and then an inner tube 32 is passed through the circular holes 311 of the quartz discs 31 in sequence. It is understood that during the installation of the quartz discs 31, the circular holes 311 of the two quartz discs 31 may be misaligned. First, an inner tube 32 is passed through to position the two quartz discs 31 circumferentially. Then, the other inner tubes 32 are installed sequentially. During the installation of the inner tubes 32, one end of the inner tube 32 is made to abut against the first sidewall, thus making the multiple inner tubes 32 flush. Finally, the contact points between the inner tubes 32 and the quartz discs 31 are welded and fixed. By setting the first positioning groove 111, the inner tube processing fixture 10 ensures that the two quartz discs 31 are arranged in parallel, thereby guaranteeing high coaxiality of the multiple inner tubes 32 and solving the problem of coaxiality deviation of the inner tubes 32 in traditional processes.
[0032] The processing procedure of the pipe bending fixture 20 is as follows: The outer tube 33 is placed in the arc groove 211, with one end of the outer tube 33 abutting against the baffle 212, thus precisely positioning the outer tube 33. One end of the bent tube 34 is placed in the second positioning groove 221, precisely positioning the bent tube 34 so that the other end of the bent tube 34 is close to or in contact with the welding position of the outer tube 33, and the bent tube 34 and the outer tube 33 are welded and fixed. Finally, the welded and fixed quartz disc 31 and inner tube 32 assembly is removed from the inner tube processing fixture 10, and the assembly is inserted into the outer tube 33, so that one end of the quartz disc 31 abuts against the baffle 212, thus precisely positioning the quartz disc 31 and the outer tube 33, so that the quartz disc 31 is located at both ends of the outer tube 33, and then the quartz disc 31 and the outer tube 33 are welded and fixed.
[0033] Specifically, in the inner tube processing fixture 10, the bottom of the first positioning groove 111 is a concave arc shape. It can be understood that setting the bottom of the first positioning groove 111 to a concave arc shape makes the bottom of the first positioning groove 111 fit against the circular edge of the quartz disc 31, thereby preventing the quartz disc 31 from shaking in the first positioning groove 111 and affecting the processing accuracy of the quartz jar 30.
[0034] Furthermore, the width of the first positioning groove 111 along the direction perpendicular to the first side plate 12 is the same as the thickness of the quartz disc 31. The length of the first positioning groove 111 along the direction parallel to the first side plate 12 is less than the diameter of the quartz disc 31. It is understood that the length of the first positioning groove 111 is less than the diameter of the quartz disc 31, and the width of the first positioning groove 111 matches the thickness of the quartz disc 31, so that the quartz disc 31 can be snapped and fixed within the first positioning groove 111. It should be noted that in this embodiment, when the quartz disc 31 is installed in the first positioning groove 111, all the circular holes 311 of the quartz disc 31 are located outside the first positioning groove 111, so that the inner tube 32 can be smoothly installed.
[0035] Furthermore, in the pipe bending fixture 20, the width of the arc groove 211 along the direction perpendicular to the second side plate 22 is smaller than the diameter of the quartz disc 31. It is understood that the arc groove 211 is used to place the outer tube 33. The diameter of the outer tube 33 and the diameter of the quartz disc 31 are the same as the outer diameter of the quartz container 30. The arc groove 211 is used to support the bottom of the outer tube 33, ensuring that the outer tube 33 does not roll on the second side plate 22. The length of the arc groove 211 along the direction parallel to the second side plate 22 is greater than or equal to the distance between the two first positioning grooves 111. It is understood that the distance between the two first positioning grooves 111 is the distance between the two quartz discs 31, which is the axial length of the quartz container 30. The length of the arc groove 211 should ensure that the quartz container 30 can be completely placed within it.
[0036] In this embodiment, the distance between the two second side plates 22 is greater than the outer diameter of the outer tube 33, so that the outer tube 33 can be placed between the two second side plates 22. Specifically, the distance between the second side plates 22 is slightly greater than the outer diameter of the outer tube 33, so that the bent tube 34 is positioned close to the outer tube 33 when placed in the second positioning groove 221.
[0037] In this embodiment, the end of the arc groove 211 away from the baffle 212 passes through the second base plate 21. It can be understood that the outer tube 33 can be installed axially in the arc groove 211 from the end away from the baffle 212 until one end of the outer tube 33 abuts against the baffle 212, thereby completing the precise positioning of the outer tube 33.
[0038] Furthermore, the two second side plates 22 are offset on both sides of the second base plate 21. It can be understood that the two bent pipes 34 are offset on both sides of the outer tube 33, and the two bent pipes 34 face opposite directions. By offsetting the second side plates 22, it is convenient to install the bent pipes 34, and one end of the bent pipes 34 is set towards the middle of the quartz jar 30.
[0039] Specifically, the second positioning groove 221 includes a bend bottom plate 2211, a bend positioning plate 2212, and a bend baffle 2213. The bend positioning plate 2212 and the bend baffle 2213 form the sidewalls of the second positioning groove 221. The bend positioning plate 2212 and the bend baffle 2213 are vertically arranged. Each end of the second positioning groove 221 away from the bend positioning plate 2212 and the bend baffle 2213 has an opening. It can be understood that the bend positioning plate 2212 abuts against the sidewall of the bend 34, the bend baffle 2213 abuts against the inlet end of the bend 34, and the bend bottom plate 2211 supports one end of the bend 34. The bend 34 is positioned by the two sidewalls of the two second positioning grooves 221. The bend 34 can enter the second positioning groove 221 through the opening.
[0040] In this embodiment, the bent pipe 34 includes a first pipe section 341 and a second pipe section 342 that are bent and connected to each other. The first pipe section 341 is placed in the second positioning groove 221 for positioning, and the second pipe section 342 is used for welding and fixing to the outer pipe 33.
[0041] Furthermore, the plane of the bend positioning plate 2212 is set at an angle to the length direction of the arc groove 211. It is understood that the bend positioning plate 2212 is used to abut against the side wall of the bend 34, and the length direction of the arc groove 211 is the axial direction of the outer pipe 33. By setting an angle between the bend positioning plate 2212 and the length direction of the arc groove 211, one end of the bend 34 forms an angle with the outer pipe 33, thereby causing one end of the bend 34 to face outwards from the outer pipe 33, facilitating the connection of the bend 34 to an external pipe. It is understood that in this embodiment, the first pipe portion 341 of the bend 34 is inclined outwards from the outer pipe 33.
[0042] Specifically, in this embodiment, the angle between the plane of the bend positioning plate 2212 and the length direction of the arc groove 211 is 8°-8.5°.
[0043] The present invention also provides a processing method applied to the quartz jar 30 processing fixture provided in the above embodiments, the steps of which include: The quartz disc 31 is positioned by inserting two quartz discs 31 vertically downward along the first positioning groove 111 to ensure that the quartz disc 31 fits tightly with the first base plate 11.
[0044] The inner tubes 32 are assembled and positioned. One inner tube 32 is passed through the round hole 311 of the quartz round plate 31 so that the end of the inner tube 32 abuts against the first side plate 12. Then the other inner tubes 32 are installed in sequence.
[0045] Specifically, an inner tube 32 passes through two quartz discs 31 in sequence, and the inner tube 32 abuts against the first side plate 12, so that the circular holes 311 of the two quartz discs 31 are set one-to-one under the action of the inner tube 32.
[0046] The inner tube 32 and the quartz disc 31 are welded and fixed together.
[0047] Position the outer tube 33 by placing it in the arc groove 211 so that the end face of the outer tube 33 abuts against the baffle 212.
[0048] The bend 34 is positioned by placing it in the second positioning groove 221, so that the welding hole on the surface of the outer tube 33 is in gap contact with the welding surface of the bend 34. Specifically, the outer tube 33 is set in the arc groove 211, and the outer tube 33 is rotated so that the welding position on the outer tube 33 corresponds to the bend 34.
[0049] The outer tube 33 and the bend 34 are welded and fixed.
[0050] For assembly and positioning, the welded and fixed quartz disc 31 and inner tube 32 assembly is inserted into the outer tube 33, so that one side of the quartz disc 31 abuts against the baffle 212, completing the positioning with the outer tube 33. Specifically, after fixing the quartz disc 31 and inner tube 32, and fixing the outer tube 33 and bent tube 34 in the above steps, the assembly of the inner quartz disc 31 and inner tube 32 is removed from the inner tube processing fixture 10 and inserted into the outer tube 33. One of the quartz discs 31 abuts against the baffle 212, thereby aligning the two quartz discs 31 with the two ends of the outer tube 33 respectively.
[0051] The outer tube 33 and the quartz disc 31 are welded and fixed.
[0052] The beneficial effects of the quartz jar 30 processing fixture and processing method provided in this embodiment of the invention include: The quartz jar 30 processing fixture of the present invention includes an inner tube processing fixture 10 and a tube bending processing fixture 20. The inner tube processing fixture 10 includes a first base plate 11 and a first side plate 12. The first side plate 12 is fixed to one side of the first base plate 11, and the first base plate 11 has two spaced-apart first positioning grooves 111. The two first positioning grooves 111 are arranged in a direction perpendicular to the first side plate 12. The first positioning grooves 111 are used to place a quartz disc 31. The quartz disc 31 has multiple circular holes 311. The tube bending processing fixture 20 includes a second base plate 21 and a second side plate 22. The two second side plates 22 are respectively disposed on both sides of the second base plate 21. A second positioning groove 221 is formed on the top of the second side plate 22. An arcuate groove 211 is formed on the second base plate 21. A baffle 212 is provided inside one end of the arcuate groove 211. The first positioning groove 111 enables precise positioning of the quartz disc 31, and the circular hole 311 of the quartz disc 31 positions the inner tube 32 of the quartz jar 30. Simultaneously, the first side plate 12 provides axial positioning for multiple inner tubes 32, allowing the inner tube processing fixture 10 to fix and weld the quartz disc 31 and the inner tubes 32. An arc groove 211 is provided to place the outer tube 33 of the quartz jar 30, and a baffle 212 provides axial positioning for the outer tube 33. The second side plate 22 and the second positioning groove 221 position the bent tube 34, ensuring that the welding end of the bent tube 34 is close to the outer tube 33, thereby welding and fixing the bent tube 34 and the outer tube 33. This invention enables the positioning and welding of high-precision components of the quartz jar 30, simplifying the processing, improving processing efficiency, reducing processing costs, and ensuring high-precision processing quality.
[0053] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.
Claims
1. A quartz jar processing fixture, characterized in that, include: An inner tube processing fixture includes a first base plate and a first side plate. The first side plate is fixed to one side of the first base plate. Two spaced first positioning grooves are provided on the first base plate. The two first positioning grooves are arranged in a direction perpendicular to the first side plate. The first positioning grooves are used to place a quartz disc. The quartz disc has multiple circular holes. A pipe bending fixture includes a second base plate and a second side plate. The two second side plates are respectively disposed on both sides of the second base plate. A second positioning groove is provided on the top of the second side plate. An arc groove is provided on the second base plate. A baffle is provided at one end of the arc groove.
2. The quartz jar processing fixture according to claim 1, characterized in that, The bottom of the first positioning groove is a concave arc shape.
3. The quartz jar processing fixture according to claim 1, characterized in that, The width of the first positioning groove along the direction perpendicular to the first side plate is the same as the thickness of the quartz disc, and the length of the first positioning groove along the direction parallel to the first side plate is less than the diameter of the quartz disc.
4. The quartz jar processing fixture according to claim 1, characterized in that, The width of the arc groove perpendicular to the second side plate is less than the diameter of the quartz disc, and the length of the arc groove parallel to the second side plate is greater than or equal to the distance between the two first positioning grooves.
5. The quartz jar processing fixture according to claim 1, characterized in that, The distance between the two second side plates is greater than or equal to the diameter of the quartz disc.
6. The quartz jar processing fixture according to claim 1, characterized in that, The end of the arc groove away from the baffle passes through the second base plate.
7. The quartz jar processing fixture according to claim 1, characterized in that, The two second side plates are staggered on both sides of the second base plate.
8. The quartz jar processing fixture according to claim 1, characterized in that, The second positioning groove includes a bent pipe base plate, a bent pipe positioning plate, and a bent pipe baffle. The bent pipe positioning plate and the bent pipe baffle are the sidewalls of the second positioning groove. The bent pipe positioning plate and the bent pipe baffle are arranged perpendicularly. The end of the second positioning groove away from the bent pipe positioning plate and the bent pipe baffle is provided with an opening. The plane of the bent pipe positioning plate is set at an angle to the length direction of the arc groove.
9. The quartz jar processing fixture according to claim 8, characterized in that, The angle between the plane of the bend positioning plate and the length direction of the arc groove is 8°-8.5°.
10. A processing method, characterized in that, The steps of applying the quartz jar processing fixture according to any one of claims 1-9 include: Quartz disc positioning: Insert two quartz discs vertically downward along the first positioning groove to ensure that the quartz discs fit tightly with the first base plate; The inner tube assembly and positioning involves passing one inner tube through the circular hole of the quartz disc, making the end of the inner tube abut against the first side plate, and then installing multiple inner tubes in sequence. The inner tube and the quartz disc are welded and fixed together. The outer tube is positioned by placing it in the arc groove so that the end face of the outer tube abuts against the baffle. The bent pipe is positioned by placing it in the second positioning groove so that the welding hole on the outer pipe surface is in gap contact with the welding surface of the bent pipe. The outer tube and the bend are welded and fixed together. Assembly and positioning: The assembly of the welded and fixed quartz disc and the inner tube is inserted into the outer tube, so that one side of the quartz disc abuts against the baffle, thus completing the positioning with the outer tube; The outer tube and the quartz disc are welded and fixed together.