Laser surface treatment device and laser surface treatment system

Abstract

This laser surface treatment device is provided, for example, with: a laser device that outputs laser light; an optical head that irradiates the laser light output from the laser device onto the surface of an object; a detection unit that detects a physical quantity that changes in accordance with the irradiation state of the laser light; and a control unit that controls the power of the laser light output from the optical head on the basis of the physical quantity detected by the detection unit, the laser surface treatment device irradiating the surface with the laser light and treating the surface. Furthermore, the laser surface treatment system may be provided with, as a detection unit, an intensity detection unit that detects the intensity of light from the surface or a position closer to the optical head than the surface.

Description

TECHNICAL FIELD

[0001] The present application relates to a laser surface processing apparatus and a laser surface processing system. BACKGROUND

[0002] Conventionally, a method of removing a coating film or an adhering matter on a surface of a structure by irradiation of laser light is known (for example, Patent Literature 1).

[0003] PRIOR ART DOCUMENT

[0004] PATENT LITERATURE

[0005] Patent Literature 1: Japanese Patent No. 5574354 SUMMARY

[0006] PROBLEMS TO BE SOLVED BY THE INVENTION

[0007] In the surface layer removal based on the irradiation of laser light, for example, in the case where the surface has a concave-convex shape, there is a concern that the reflected light at the surface of the irradiated laser light advances in an unintended direction, and thus the securing of safety is an important problem.

[0008] Further, if it is possible to detect whether or not the laser light is irradiated to the surface in a desired state, whether or not there is an abnormality in the operation state of each part in the inside of the laser surface processing apparatus, and the like, store the same as data, notify using communication, and improve, it is beneficial.

[0009] Therefore, one of the problems to be solved by the present application is, for example, to obtain a new laser surface processing apparatus and a laser surface processing system in which the safety is further improved or the irradiation state of the laser light is improved.

[0010] MEANS FOR SOLVING THE PROBLEMS

[0011] The laser surface processing apparatus of the present application has, for example, a laser device that outputs laser light, an optical head that irradiates the laser light output from the laser device to a surface of an object, a detection section that detects a physical quantity that changes according to the irradiation of the laser light, and a control section that controls at least one of the power of the laser light output from the optical head and the irradiation position of the laser light on the surface based on the physical quantity detected by the detection section, and the laser surface processing apparatus irradiates the laser light to the surface to perform processing of the surface.

[0012] It can also be that the laser surface processing apparatus has an intensity detection section as the detection section, and the intensity detection section detects the intensity of light from the surface or a position closer to the optical head than the surface.

[0013] In the laser surface treatment apparatus, the control section can control the laser device so as to reduce the output power of the laser light in a case where the intensity of the light detected by the intensity detection section is equal to or higher than a first threshold value.

[0014] In the laser surface treatment apparatus, the control section can control the laser device so as to reduce the output power of the laser light in a case where a ratio of the intensity of the light detected by the intensity detection section to the output power of the laser light is equal to or lower than a second threshold value.

[0015] The laser surface treatment apparatus can include a plurality of intensity detection sections provided at mutually separated positions as the intensity detection section.

[0016] In the laser surface treatment apparatus, the sensors of the plurality of intensity detection sections can be disposed so as to be positioned between the optical axis of the laser light output from the optical head or a virtual line overlapping the optical axis.

[0017] In the laser surface treatment apparatus, the control section can control the laser device so as to reduce the output power of the laser light in a case where a difference between the intensities of the light detected by the two intensity detection sections is equal to or higher than a third threshold value.

[0018] The laser surface treatment apparatus can include a region intensity detection section that acquires a two-dimensional brightness image as the intensity detection section.

[0019] The laser surface treatment apparatus can include a temperature detection section that remotely detects the temperature of the surface as the detection section.

[0020] In the laser surface treatment apparatus, the control section can control the laser device so as to reduce the output power of the laser light in a case where there is a point having a temperature equal to or higher than a fourth threshold value within a given range of the surface.

[0021] In the laser surface treatment apparatus, the control section can control the laser device so as to increase the output power of the laser light in a case where there is a point having a temperature equal to or lower than a fifth threshold value within a given range of the surface.

[0022] The laser surface treatment apparatus can be operable in a normal mode and a low output mode in which the output power of the laser light is lower than in the normal mode, and the control section can control the laser device so as to increase the output power of the laser light and return to the normal mode in a case where there is a point having a temperature equal to or lower than the fifth threshold value within a given range of the surface in a state where the laser surface treatment apparatus is operable in the low output mode.

[0023] Also, the laser surface treatment apparatus can include a detection unit having a sensor mounted to a housing of the optical head or a housing in which the optical head is accommodated.

[0024] Also, the laser surface treatment apparatus can include a detection unit having a sensor provided to a mounting mechanism mountable on a worker or an object.

[0025] In the laser surface treatment apparatus, the optical head can include a scanning mechanism that moves the spot of the laser on the surface by scanning the spot of the laser on the surface, and the control unit can control operation of the scanning mechanism.

[0026] In the laser surface treatment apparatus, the optical head can include a diffractive optical element, and a rotating mechanism that rotates the spot of the laser on the surface by rotating the diffractive optical element, and the control unit can control operation of the rotating mechanism.

[0027] The laser surface treatment system according to the present application includes, for example, a server electrically connected to the control unit of the laser surface treatment apparatus via an electric communication line, and a storage device that stores control data related to control performed by the control unit, the control data being read out by the server and written into the control data, the server writing the control data acquired via the control unit into the storage device.

[0028] In the laser surface treatment system, the control unit can perform control to reduce the output power of the laser based on a physical quantity detected by the detection unit, and the control data can include data acquired within a given time before a point in time at which control to reduce the output power of the laser is performed.

[0029] In the laser surface treatment system, the laser surface treatment system can include a storage unit provided corresponding to the control unit, the storage unit storing the control data, the control data stored in the storage device being downloaded via the server and the electric communication line and stored in the storage unit, and the control unit can control at least one of the power of the laser output from the optical head and the irradiation position of the laser on the surface based on the downloaded control data.

[0030] It can also be that the laser surface treatment system is provided with an analysis device that calculates a value of the control data or a range of the value of the control data for each processing condition of the processing of the surface based on the control data stored in the storage device, the value of the control data or the range of the value of the control data calculated by the analysis device is stored in the storage device, the value of the control data or the range of the value of the control data is downloaded to the storage section via the server and the electric communication line, and the control section controls at least one of the power of the laser output from the optical head and the irradiation position of the laser on the surface based on the downloaded value of the control data or the range of the value of the control data.

[0031] In the laser surface treatment system, it can also be that the control section performs control to reduce the output power of the laser based on the physical quantity detected by the detection section, and the control data includes data acquired within a given time before a point in time at which control to reduce the output power of the laser is performed.

[0032] In the laser surface treatment system, it can also be that the analysis device acquires, as the control data, data that is a precursor to a change in the physical quantity that achieves control to reduce the output power of the laser, based on data acquired within a given time before a point in time at which control to reduce the output power of the laser is performed, and the control performed by the control section is performed based on the data that is the precursor.

[0033] -Effects of Invention-

[0034] According to the present application, for example, a new laser surface treatment device and a laser surface treatment system that can improve protection or improve the irradiation state of a laser after improvement can be obtained. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 is an explanatory schematic configuration diagram of a laser surface treatment device of an embodiment.

[0036] Figure 2 is a schematic plan view showing one example of a scan trajectory of a surface of an object irradiated with a laser from a laser surface treatment device of an embodiment.

[0037] Figure 3 is an explanatory and schematic front view of a laser irradiation device included in a laser surface treatment device of the first embodiment.

[0038] Figure 4 is an explanatory block diagram of a control device included in a laser surface treatment device of an embodiment.

[0039] Figure 5is a diagram showing one example of a temperature distribution of an object surface acquired by a region temperature sensor in a case where the region temperature sensor is provided as a sensor in the laser surface treatment apparatus of the first embodiment.

[0040] Figure 6 is a graph showing one example of a temporal change in intensity detected by a light sensor in a case where the light sensor is provided as a sensor in the laser surface treatment apparatus of the first embodiment.

[0041] Figure 7 is a graph showing another example of a temporal change in intensity detected by a light sensor in a case where the light sensor is provided as a sensor in the laser surface treatment apparatus of the first embodiment. Figure 6

[0042] Figure 8 is a diagram showing one example of an image acquired by a region image sensor in a case where the region image sensor is provided as a sensor in the laser surface treatment apparatus of the first embodiment.

[0043] Figure 9 is a diagram showing another example of an image acquired by a region image sensor in a case where the region image sensor is provided as a sensor in the laser surface treatment apparatus of the first embodiment.

[0044] Figure 10 is an exemplary and schematic front view of the laser irradiation apparatus of the second embodiment.

[0045] Figure 11 is a diagram showing one example of a detection range of a temperature distribution of three region temperature sensors in a case where the three region temperature sensors are provided as sensors in the laser irradiation apparatus of the second embodiment.

[0046] Figure 12 is a graph showing one example of a temporal change in intensity detected by three light sensors in a case where the three light sensors are provided as sensors in the laser irradiation apparatus of the second embodiment.

[0047] Figure 13 is a graph showing another example of a temporal change in intensity detected by three light sensors in a case where the three light sensors are provided as sensors in the laser irradiation apparatus of the second embodiment.

[0048] Figure 14 is an exemplary schematic structural diagram of a part of the laser surface treatment apparatus of the third embodiment.

[0049] Figure 15 ​is an illustrative and schematic side view showing an internal structure of a part of a laser irradiation device included in the laser surface treatment device of the 4th embodiment.

[0050] Figure 16 is a schematic plan view showing one example of a spot pattern formed on a virtual irradiation surface by the laser irradiation device included in the laser surface treatment device of the 4th embodiment.

[0051] Figure 17 is a schematic configuration diagram of the laser surface treatment system of the 5th embodiment.

[0052] Figure 18 is an illustrative block diagram of a control device included in the laser surface treatment device of the 5th embodiment. DETAILED DESCRIPTION

[0053] Hereinafter, illustrative embodiments of the present application are disclosed. The structures of the embodiments shown below and the effects and results (effects) brought by the structures are one example. The present application can also be realized by structures other than those disclosed in the following embodiments. In addition, according to the present application, at least one of various effects (including derivative effects) obtained by the structures can be obtained.

[0054] The following embodiments have the same structural elements. Hereinafter, common reference numerals are assigned to these same structural elements, and sometimes repeated explanations are omitted.

[0055] In this specification, ordinal numbers are assigned for the purpose of distinguishing directions, positions, members, thresholds, and the like. In addition, the ordinal numbers do not indicate priority order, sequence, or number.

[0056] In addition, in the drawings, an arrow X indicates an X direction, an arrow Y indicates a Y direction, and an arrow Z indicates a Z direction. The X direction, the Y direction, and the Z direction cross each other and are orthogonal.

[0057] [Laser surface treatment device system]

[0058] Figure 1 is a diagram showing a schematic configuration of the laser surface treatment device 100 of the embodiment. As shown in Figure 1 , the laser surface treatment device 100 is provided with a movable laser irradiation device 200, a mounting device 300, and a cable 400.

[0059] The laser irradiation device 200 irradiates the laser L to the surface la of the object 1 from which the surface layer is removed. By irradiating the laser L under suitable conditions, at the place on the surface la where the laser L is irradiated and in the vicinity thereof, laser ablation occurs due to the energy of the laser L, and the surface layer is removed thinly. At this time, the object 1, which is the object of surface treatment, is an example in which the surface la of the object 1, which is the surface of the main body (base material) including the object 1, is removed together with the dirt or rust, coating film, paint, or the like, which is a coating material, and the like.

[0060] The object 1 is related to, for example, a house, a structure, a building, a building material, a product, a component, or the like. In addition, the material constituting the object 1 is, for example, metal, concrete, mortar, or the like, but is not limited thereto. The object 1 is an example of an object.

[0061] The worker W holds the laser irradiation device 200 and uses it. The worker W can change the position of the laser irradiation device 200 by changing his or her own position. In addition, the worker W can change the output direction of the laser L from the laser irradiation device 200 by changing the posture of the laser irradiation device 200. That is, the worker W can change the position at which the laser L is irradiated to the surface la to remove the surface layer, and perform the work of removing the surface layer over a wide range of the surface la, by changing the position and the posture of the laser irradiation device 200.

[0062] The mounting device 300 mounts various devices such as the laser device 301, the power supply device 302, and the cooling device 303. These devices are difficult to mount on the laser irradiation device 200 because of their large size or weight. For this reason, in the laser surface treatment device 100, the devices mounted on the mounting device 300 are separated from the laser irradiation device 200, and the mounting device 300 and the laser irradiation device 200 are connected by the cable 400, thereby achieving weight reduction and size reduction of the laser irradiation device 200. In addition, the length of the cable 400 is made relatively long, so that the processing of the surface la can be performed in a relatively wide range away from the mounting device 300.

[0063] In addition, the mounting device 300 is, for example, a mobile body configured to be movable such as a truck (automobile, vehicle). Since the mounting device 300 is movable, the place where the processing of removing the surface layer by the laser surface treatment device 100 is performed can be easily changed. In addition, the mounting device 300 is not limited to an automobile, and can be, for example, a vehicle other than an automobile such as a train, or a ship or the like. In addition, the mounting device 300 can not have a power source itself like a trailer.

[0064] The laser device 301 has a laser oscillator, and as one example, is configured to output a laser having a power of 6000 [W]. The laser oscillator is one example of a laser device. The laser oscillator outputs a laser having a wavelength of, for example, 400 [nm] or more and 1200 [nm] or less. Typically, a fiber laser oscillator having a wavelength of 1070 [nm] is mounted. They can also be a semiconductor laser oscillator having a wavelength of 940 [nm], a semiconductor laser oscillator having a wavelength of 450 [nm], or a disk laser having a wavelength of 1064 [nm], a solid-state laser. In addition, in order to improve the removal efficiency of the surface layer, the laser device 301 can also be a continuous wave laser.

[0065] The laser device 301 and the laser irradiation device 200 are optically connected via the optical fiber cable 401. The optical fiber cable 401 has an optical fiber (not shown) having a core and a cladding surrounding the core. The optical fiber transmits the laser output from the laser device 301 to the laser irradiation device 200.

[0066] For application to a relatively large object 1 such as a house, a building, or a structure, the length of the optical fiber cable 401 and the cable 400 is set to, for example, 5 [m] or more and 300 [m] or less, so that the distance between the laser device 301 and the laser irradiation device 200 can be ensured to be relatively long. Since there is a trade-off relationship between the optical density and the transmittable cable length due to energy shift caused by stimulated Raman scattering, in order to achieve transmission of the laser under such a long distance, it is preferable that the diameter of the core of the optical fiber be 50 [μm] or more, more preferably 80 [μm] or more, and further preferably 100 [μm] or more.

[0067] In addition, in order to obtain a high-quality processed surface (surface layer removal surface) that is less uneven and has high shape accuracy, it is important to maintain the laser output from the optical fiber to the laser irradiation device 200 with high quality. From such a viewpoint, in the specifications having the above length and diameter, the optical fiber is configured to output a laser having an M 2 beam quality of 10 or less. The M 2 beam quality is also referred to as an M 2 factor. In the case where the optical fiber is a single-mode optical fiber, the M 2 beam quality is set to 1.5 or less, and in this case, the output of the laser is set to 300 [W] or more and 5000 [W] or less. In addition, in the case where the optical fiber is a multi-mode optical fiber, the M 2 beam quality is set to 10 or less, and in this case, the output of the laser is set to 500 [W] or more and 20000 [W] or less.

[0068] The power supply unit 302 includes, for example, a battery or generator, to supply the laser irradiation device 200 with the power required for its various components to operate. Power is supplied from the power supply unit 302 to the laser irradiation device 200 via cable 402.

[0069] Additionally, the cooling device 303 includes, for example, a tank for storing refrigerant such as coolant and a pump for dispensing the refrigerant, and supplies refrigerant to the laser irradiation device 200 to cool its various parts. Refrigerant is supplied from the cooling device 303 to the laser irradiation device 200 via a refrigerant pipe 403.

[0070] [Laser Surface Treatment Device]

[0071] The laser irradiation device 200 is an optical device for appropriately irradiating the object 1 with a laser input from the laser device 301 via the fiber optic cable 401. Optical components such as lenses, mirrors, and DOEs are housed within the housing 201 of the laser irradiation device 200.

[0072] A laser L, shaped by optical components with a given beam diameter and beam shape, is output from the laser irradiation device 200. The laser L irradiates the surface 1a of the object 1. The laser irradiation device 200 is an example of an optical head. Alternatively, the optical head may be housed within the housing 201 of the laser irradiation device 200.

[0073] The laser irradiation device 200 can operate in a normal output mode and a low output mode where the output power of the laser L is lower than that in the normal output mode. The output power and other parameters in both the normal output mode and the low output mode can be preset. The low output mode is also known as the safety mode.

[0074] In addition, a laser scanner can be installed in the laser irradiation device 200. Figure 2 This is a top view of surface 1a, showing an example of the scanning trajectory of the laser spot S of laser L on surface 1a. (See attached image.) Figure 2 As shown, the laser scanner causes the light spot S to orbit around the center C (the center of rotation for scanning), forming a ring-shaped illumination area Ai near the center C, creating a non-illumination area An that is not directly illuminated by the light spot S. For example, as a laser scanner, the housing 201 contains an optical component through which the laser passes and a motor that rotates this optical component. By using this motor to rotate the optical component in the output direction of the laser L, such a scanning trajectory can be achieved. The laser scanner is an example of a scanning mechanism.

[0075] In a case where it is assumed that the light spot S is scanned in a manner that does not generate the non-irradiation region An, the closer to the center C, the higher the energy density of the laser light L, and a deviation in the energy density based on the place of the irradiation region Ai is generated, and there is a concern that processing unevenness is generated. In this regard, according to the present embodiment, since the irradiation region Ai is formed in a circular ring shape that surrounds the periphery of the non-irradiation region An, it is possible to suppress the energy density from being too high at a position close to the center C and easily generating processing unevenness. Further, by the worker W moving the housing 201 of the movable laser light irradiation device 200 to move the irradiation region Ai on the surface 1a, it is possible to perform processing with respect to the non-irradiation region An, and there is also a case where processing of the non-irradiation region An is performed by transferring heat generated by the laser light L irradiated to the irradiation region Ai to the non-irradiation region An. The size of the non-irradiation region An is appropriately set.

[0076] Figure 3 is a front view of the laser light irradiation device 200A (200) of the first embodiment. As Figure 1 and Figure 3 indicated, in the present embodiment, the sensor 112 is provided on the surface 201a of the housing 201 of the laser light irradiation device 200A. The sensor 112 detects a physical quantity that changes according to the irradiation state of the laser light L.

[0077] Figure 4 is a block diagram of the control device 110 that controls the output of the laser light of the laser device 301. The control device 110 includes: an arithmetic processing section 111, a main storage section 121, an auxiliary storage section 122, the sensor 112, and the laser device 301. The arithmetic processing section 111 is, for example, a processor (circuit) such as a CPU (central processing unit) that operates in accordance with a program. The main storage section 121 is, for example, a RAM (random access memory), a ROM (read only memory), or the like, and the auxiliary storage section 122 is, for example, an HDD (hard disk drive), an SSD (solid state drive), or the like. The arithmetic processing section 111 has a detection processing section 111a, a determination section 111b, and a processing control section 111c.

[0078] The detection processing section 111a acquires a detection value (data) corresponding to the physical quantity detected by the sensor 112. The sensor 112 and the detection processing section 111a are one example of a detection section. Further, the detection processing section 111a also exists in a case where it is included in the sensor 112. The data obtained by the detection processing section 111a is one example of control data.

[0079] The determination unit 111b compares the detection value obtained by the detection processing unit 111a with a given threshold determined based on the type of sensor 112, other conditions, etc.

[0080] The processing control unit 111c controls the output power of the laser from the laser device 301 based on the determination result of the determination unit 111b. The processing control unit 111c (control device 110) is an example of a control unit that controls the power of the laser L output from the laser irradiation device 200 based on the detection value of the sensor 112.

[0081] [Area Temperature Sensor]

[0082] Sensor 112 can be, for example, a region temperature sensor such as an infrared thermal imaging camera. In this case, sensor 112 acquires the intensity of far-infrared radiation emitted from the material at various locations within a two-dimensional detection range, i.e., the intensity distribution of far-infrared radiation. The intensity of far-infrared radiation is an example of a physical quantity that varies depending on the irradiation state of the laser L. Sensor 112 and detection processing unit 111a are examples of temperature detection units, also referred to as region temperature detection units.

[0083] Figure 5 An example of an image It is shown, representing the temperature distribution of detected values ​​at various locations on surface 1a. In this image It, regions are divided according to temperature range; regions with higher average temperatures within the temperature range have finer meshes in the dot pattern, while regions with lower average temperatures have coarser meshes. Figure 5 As shown, the temperature distribution on surface 1a becomes more pronounced closer to the center C (refer to...). Figure 2 The temperature distribution is radial, with higher temperatures and lower temperatures further away from the center C. Furthermore, in this case, the detection processing unit 111a is installed within the sensor 112. The sensor 112 is an example of a temperature sensor that remotely detects the temperature of the surface 1a. Additionally, in... Figure 5 In the diagram, the colorless region Ah near the center C represents the area where the temperature exceeds the upper limit of the detection temperature range of the infrared thermal imaging camera.

[0084] The determination unit 111b obtains the representation from the sensor 112. Figure 5 This is two-dimensional temperature distribution data. And, as... Figure 5 As shown, it is determined whether there exists a point in a roughly fixed-width, arc-shaped, partially annular, or annular region Ad radially from the center C where the temperature exceeds a threshold. This threshold is an example of a fourth threshold.

[0085] Furthermore, if the determination unit 111b determines that there is a point in the arc-shaped region Ad where the temperature is above the threshold, the processing control unit 111c controls the laser device 301 to reduce the output power of the laser to below a given value.

[0086] Furthermore, the determination unit 111b determines whether there is a point within region Ad where the temperature falls below a threshold. If, in this determination, there is a point within the arc-shaped region Ad where the temperature falls below the threshold, the processing control unit 111c can also control the laser device 301 to increase the laser output power. This, for example, can suppress excessive temperature drops on surface 1a due to a sustained low output mode. This threshold is a value lower than the fourth threshold and is an example of the fifth threshold.

[0087] When the processing control unit 111c controls the laser device 301 to reduce the output power of the laser based on the detection value of the sensor 112, which is a regional temperature sensor, as described above, it can also control the laser device 301 to change the state of the laser irradiation device 200 from outputting laser L in normal output mode to outputting laser L in low output mode.

[0088] [Intensity Sensor]

[0089] Sensor 112 is, for example, a photodiode, an intensity sensor that detects the intensity of light from surface 1a or a position closer to the laser irradiation device 200 than surface 1a. In this case, the detected light is scattered or reflected light from surface 1a or from smoke or other objects located between surface 1a and the laser irradiation device 200. Light intensity is an example of a physical quantity that varies depending on the irradiation state of the laser L. Furthermore, sensor 112 and detection processing unit 111a are examples of intensity detection units.

[0090] Figure 6 , Figure 7 These are graphs illustrating an example of the time-varying detection value (light intensity) of the detection unit including sensor 112. Figure 6 , Figure 7 In the example, the time waveform of the intensity changes with time tp as the boundary, and the average value of the detected value per unit time increases.

[0091] exist Figure 6 In the example, with time tp as the boundary, although the minimum value remains unchanged, the average value, maximum value, and amplitude increase. For example, after time tp, such a time-varying change can be observed when the intensity of reflected light increases in a specific direction.

[0092] exist Figure 7In the example of FIG. 11, the minimum value, the maximum value, and the average value increase at the time tp, although the amplitude does not change. For example, in a case where the intensity of the reflected light increases in a specific direction after the time tp, such a temporal change can be seen.

[0093] In Figure 6 , Figure 7 In this case, it is not preferable to continue the state after the time tp. For this reason, the determination section 111b determines, for example, whether the detection value becomes above a given threshold value for a given number of times within a given time. Alternatively, the determination section 111b can determine, for example, whether a time average of the detection value within the given time is above a threshold value. These threshold values are one example of the first threshold value.

[0094] Further, in the determination by the determination section 111b, for example, in a case where the detection value becomes above a given threshold value for a given number of times within a given time, or in a case where a time average of the detection value within the given time is above a threshold value, the processing control section 111c controls the laser device 301 so that the output power of the laser light is reduced. In this case, the laser device 301 can also be controlled so that the output of the laser light is stopped. Thereby, it is possible to suppress the laser light L from being output to a direction different from the desired output direction.

[0095] In addition, the determination section 111b determines whether the ratio of the detection value (the intensity of the light) to the output power of the laser light of the laser device 301 is below a given threshold value, and in a case where the ratio of the detection value to the output power of the laser light is below the threshold value in the determination by the determination section 111b, the processing control section 111c can control the laser device 301 so that the output power of the laser light is reduced. In this case, it is also possible to suppress the laser light L from being output to a direction different from the desired output direction. The threshold value in this case is one example of the second threshold value.

[0096] The processing control section 111c can also control the laser device 301 so that the laser irradiation device 200 changes from a state where the laser light L is output in the normal output mode to a state where the laser light L is output in the low output mode, in a case where the laser device 301 is controlled so that the output power of the laser light is reduced based on the determination based on the detection value of the sensor 112 as the intensity sensor, as described above.

[0097] [Area Intensity Sensor]

[0098] The sensor 112 can also be, for example, an area intensity sensor that acquires a two-dimensional intensity image of light from the surface 1a or a position closer to the laser irradiation apparatus 200 than the surface 1a. In this case, the detected light is scattered light or reflected light from the surface 1a or from smoke or the like located between the surface 1a and the laser irradiation apparatus 200. In addition, the sensor 112 detects the intensity of light at each position. Thus, in this case, the intensity of light is one example of a physical quantity that varies depending on the irradiation state of the laser L. The sensor 112 and the detection processing section 111a are one example of an area intensity detection section.

[0099] Figure 8 , Figure 9 are one example of a two-dimensional intensity image Iv acquired by the detection section including the sensor 112. In Figure 8 , Figure 9 In the example of Figs. 25A and 25B, both include the region Ab in which the intensity is high due to heating by the laser L, and the region Ac in which the intensity is high due to scattered light caused by smoke generated by irradiation of the laser L. The intensity value of the region Ac is higher than the intensity value of the surrounding region, and the intensity value of the region Ab is higher than the intensity value of the region Ac. Thus, by threshold-based binarization processing or the like of the intensity image data, the regions Ab and Ac can be extracted. Extraction of the regions Ab and Ac is performed by the detection processing section 111a, for example.

[0100] Figure 8 The example of Fig. 26 illustrates a state in which the laser L is scattered due to diffusion of smoke. In this case, there is a concern that the power density of the surface 1a on which the laser L is generated will locally decrease or deviate. For this reason, the determination section 111b determines whether the width of the region Ac is equal to or greater than a given threshold value, and in the case where the determination section 111b determines that the width of the region Ac is equal to or greater than the given threshold value, the processing control section 111c can control the laser apparatus 301 so as to decrease the output power of the laser. By this, it is possible to suppress generation of smoke and to suppress local decrease or deviation of the power density of the surface 1a of the laser L. In addition, since the unevenness of the surface 1a decreases as the removal of the surface layer progresses, in the case where the irradiation region Ai is substantially circular as illustrated in Fig. 26, the region Ab is close to circular. For this reason, the determination section 111b determines whether the circularity of the region Ab is equal to or less than a given threshold value, and in the case where the determination section 111b determines that the circularity of the region Ab is equal to or less than the given threshold value, the processing control section 111c can control the laser apparatus 301 so as to decrease the output power of the laser. In this case as well, it is possible to suppress generation of smoke and to suppress local decrease or deviation of the power density of the surface 1a of the laser L. Figure 2 Figure 9 ​The following state is shown: Through the operation of the processing control unit 111c as described above, the irradiation state of the laser L on the surface 1a is improved, and both regions Ab and Ac are reduced in size and their roundness is increased. In this state, smoke generation is suppressed, and local reductions and deviations in the power density of the laser L on the surface 1a are suppressed.

[0101] In addition, when the processing control unit 111c controls the laser device 301 to reduce the output power of the laser based on the determination of the detection value of the sensor 112, which is a regional intensity sensor, as described above, it can also control the laser device 301 to change the state of the laser irradiation device 200 from outputting laser L in normal output mode to outputting laser L in low output mode.

[0102] As described above, according to this embodiment, for example, a new laser surface treatment apparatus 100 with improvements such as enhanced protection or improved irradiation state of laser L can be obtained.

[0103] [Second Implementation]

[0104] Figure 10 This is a front view of the laser irradiation device 200B (200) according to the second embodiment. Figure 10 As shown, in this embodiment, a plurality of sensors 112, in this example, three sensors 112, are disposed on the surface 201a of the housing 201 of the laser irradiation device 200B, and are separated from each other. These sensors 112 are configured such that a virtual line overlapping the optical axis of the laser L output from the laser irradiation device 200B is located between them. The virtual line overlaps with an extension line that extends the optical axis of the laser L output from the laser irradiation device 200B from the emission end in a direction opposite to the emission direction (irradiation direction). This configuration results in an increased probability of detecting reflected light from the irradiation area Ai on the surface 1a in various directions using multiple sensors 112, making it easier to ensure safety against reflected light in various directions. Furthermore, the number of sensors 112 is not limited to three; it can be two or more.

[0105] [Different types of sensors]

[0106] Figure 10At least two of the three sensors 112 can also be different kinds of sensors 112. Specifically, for example, it can also be that one of the sensors 112 is a region temperature sensor and another of the sensors 112 is a region intensity sensor. In this case, these two sensors 112 can be set to obtain detection values for at least partially the same place on the surface la. With such a structure, the following effect is obtained: based on the detection values obtained by the multiple sensors 112 of different kinds, it is easy to more reliably ensure safety.

[0107] In addition, for example, it can also be that the following is set as the determination criterion for the end of the processing for the irradiation region Ai: based on the detection value of the region temperature sensor as one sensor 112, it is ensured that the temperature within the region Ad (refer to Figure 5 ) is in a state where it is within a given range, and at the same time, based on the detection value obtained by the region intensity sensor as another sensor 112, the circularity of the region Ab (refer to Figure 8 、 Figure 9 ) is below a given threshold value. With such a structure and control, the following effect is obtained: it is easy to obtain a high-quality processed surface that is less uneven and has high shape accuracy.

[0108] [Multiple detection ranges]

[0109] Figure 11 An example of the detection ranges of the three region temperature sensors in the case where the sensors 112 of Figure 10 are region temperature sensors is shown. The detection range I is also referred to as an imaging range. As shown in Figure 11 , the places of the detection ranges I are each different. In addition, in the example of Figure 11 , the detection processing section 111a can synthesize the detection values within the detection ranges I of each sensor 112. Specifically, for example, the detection processing section 111a obtains the temperature of each position where the two detection ranges I overlap by averaging the temperature values of each detection range I at the position. Thereby, the above-mentioned operations of the determination section 111b and the processing control section 111c can be performed on a wider detection range I. Furthermore, although not shown, by setting each detection range I to be elongated in the circumferential direction of the center C, a wider detection range I can be set as the processing target.

[0110] [Temporal change of multiple intensity sensors]

[0111] Figure 12 、 Figure 13 are graphs showing an example of the temporal change of the detection values (intensity of light) of the detection section including the three sensors 112. In Figure 12 、 Figure 13In the example of FIG. 10, the three sensors 112 are all intensity sensors, and the time waveform of the intensity changes at the time tp. In addition, in each graph, the time change of the detection value of the three sensors 112 is distinguished by the reference numerals A, B, C and the line type.

[0112] In Figure 12 In the example of FIG. 10, the amplitude of the intensity detected by one sensor 112 (A) becomes larger than before at the time tp, and the amplitude of the intensity detected by two sensors 112 (B, C) becomes smaller than before. For example, in a case where the intensity of the reflected light increases in a specific direction after the time tp, such a time change can be seen.

[0113] In Figure 13 In the example of FIG. 10, the intensity detected by the three sensors 112 (A, B, C) is substantially 0 after the time tp. For example, in a case where the laser irradiation device 200 does not face the surface la, the laser L is irradiated to a position deviated from the surface la, or the like after the time tp, such a time change can be seen.

[0114] In Figure 12 , Figure 13 In such a case, it is not preferable to continue the state after the time tp. For this reason, the determination section 111b, for example, calculates the difference between the intensities detected by two sensors 112, and determines whether the difference is equal to or greater than a given threshold value. The determination section 111b performs this determination for all combinations of two sensors 112 among the plurality of sensors 112. For example, in a case where the laser irradiation device 200 has three sensors 112 (A to C), the determination section 111b performs this determination for the three combinations of the sensors (A, B), the sensors (B, C), and the sensors (C, A).

[0115] In addition, in a case where at least one of the above-described differences becomes equal to or greater than a given threshold value in the determination of the determination section 111b, the processing control section 111c controls the laser device 301 so that the output power of the laser is reduced. In this case, the laser device 301 can also be controlled so that the output of the laser is stopped. Thereby, it is possible to suppress the laser L from being output to a direction different from the desired output direction. This threshold value is one example of the third threshold value.

[0116] In addition, the determination section 111b determines whether the ratio of the above-described differences with respect to the output power is equal to or greater than a given threshold value, and in a case where the ratio of the difference is equal to or less than the threshold value in the determination of the determination section 111b, the processing control section 111c can also control the laser device 301 so that the output power of the laser is reduced.

[0117] Further, in the present embodiment, the processing control section 111c can also control the laser device 301 so that the laser irradiation device 200 changes from a state in which the laser L is outputted in the normal output mode to a state in which the laser L is outputted in the low output mode, in a case where the laser device 301 is controlled so that the output power of the laser is reduced in accordance with the determination based on the detection value of the sensor 112.

[0118] As explained above, according to the present embodiment, the processing control section 111c can perform more reliable or higher-precision control based on the detection values of the plurality of sensors 112 from the viewpoints of ensuring safety and improving the irradiation state of the laser.

[0119] [3rd Embodiment]

[0120] Figure 14 is a diagram showing a schematic structure of a part of the laser surface treatment device 100C (100) of the 3rd embodiment. As shown in Figure 1 In the present embodiment, the sensor 112 is not provided to the housing 201 of the laser irradiation device 200, but is provided to the mounting mechanism 202 which is constituted independently from the housing 201 and which is capable of being detachably mounted to the worker W. In Figure 14 the example, the mounting mechanism 202 is constituted as a band which is detachable to the head of the worker W. According to such a structure, in the vicinity of the portion where the mounting mechanism 202 is mounted, the safety for the worker can be further improved. Further, the mounting mechanism 202 is not limited to the band, but can be a mechanism different from the band such as a belt, a clip, a face joint, and the like. In addition, the mounting mechanism 202 can also be constituted so as to be detachable to something other than the worker W. That is, according to the present embodiment, the protection against the laser can be improved for the worker who wants to avoid irradiation of the laser, an object (for example, a precision device, and the like), a place, and the like. Further, the protection object against the laser which is mounted with the mounting mechanism 202 can also be different respectively.

[0121] [4th Embodiment]

[0122] Figure 15 is a side view showing a part of the internal structure of the laser irradiation device 200D (200) included in the laser surface treatment device 100 of the 4th embodiment. As shown in Figure 15 The laser irradiation device 200D has a diffractive optical element 203 (hereinafter, referred to as a DOE 203, DOE: diffractive optical element), a motor 204, a rotation transmission mechanism 205, and a window member 206.

[0123] The DOE 203 has, for example, a structure in which a plurality of diffraction gratings having different periods are overlapped, and is capable of splitting the transmitted laser light into a plurality of light beams to be appropriately disposed. Figure 16 is a plan view showing one example of a spot pattern P1 formed on a virtual irradiation plane Pv intersecting the Y direction by the laser irradiation device 200D. By the DOE 203, for example, as shown in Figure 16 , a spot pattern P1 including a plurality of spots S formed by a plurality of light beams is formed. Further, the spot pattern formed by the DOE 203 is not limited to Figure 16 the spot pattern P1, and various spot patterns can be formed by replacing the DOE 203 with another structure.

[0124] The motor 204 and the rotation transmission mechanism 205 are a mechanism for rotating the DOE 203 around a central axis Cr along the optical axis of the laser light, and are one example of a rotation mechanism. The rotation transmission mechanism 205 is, for example, a set of gears that mesh with each other, and transmits the rotation of the shaft 204a of the motor 204 to a ring gear provided to the outer periphery of the DOE 203. The rotation transmission mechanism 205 is also referred to as a reduction mechanism. As shown in Figure 16 , the spot pattern P1 rotates around the central axis Cr in conjunction with the rotation of the shaft 204a of the motor 204. The window member 206 is embedded in the opening portion of the housing 201, and transmits the laser light.

[0125] According to this structure, the spot pattern Pl rotates around the center axis Cr on the virtual irradiation surface Pv with a substantially fixed angular velocity with the rotation of the DOE 203. Thus, since the spots S of the plurality of light beams whose power densities are appropriately adjusted by the DOE 203, respectively, can be rotated on the surface la, it is possible to suppress the deviation of the power density caused by the place of the surface la, and further, it is possible to suppress the deviation of the processing state of the surface la caused by the place, for example, compared to the case where the spot of one light beam whose power density is not particularly adjusted is rotated on the surface la. In addition, the spot pattern Pl does not include the spot S in the vicinity of the center axis Cr. Thus, it is possible to suppress the energy density from becoming high in the vicinity of the center axis Cr compared to other parts, with the continuous irradiation of laser light. In addition, by changing the rotation speed of the shaft 204a in the motor 204, it is possible to change the rotation speed of the spot pattern Pl. In the case where the rotation of the spot pattern Pl is combined with the movement, i.e., scanning, of the center of gravity of the spot pattern Pl, by appropriate adjustment of the rotation speed and the movement speed thereof, it is possible to appropriately change the energy density of the laser light of the surface la. Furthermore, the rotation of the DOE 203 and the rotation of the optical member in the above-described laser scanner are the same in terms of the rotation of the spot S. Therefore, the control device 110 can perform the same control as the control of the rotation of the DOE 203, by controlling the rotation of the spot S as in the first embodiment. The control of the rotation and the scanning of the spot S and the spot pattern Pl performed by the control device 110 is one example of the irradiation position (change) control of the laser light.

[0126] [5th Embodiment]

[0127] Figure 17 is a schematic configuration diagram of the laser surface treatment system 1000 of the fourth embodiment. The laser surface treatment system 1000 includes a server 10, a storage device 30, and a plurality of laser surface treatment devices 100D (100). The server 10 and the plurality of laser surface treatment devices 100D are electrically connected via an electric communication line 20. In addition, the server 10 is electrically connected to the storage device 30. The server 10 can perform readout and writing of data to and from the storage device 30. The laser surface treatment device 100D can download the data of the storage device 30 via the electric communication line 20 and the server 10. In addition, the server 10 can upload control data related to the processing performed by the laser surface treatment device 100D to the storage device 30. The electric communication line 20 is a network that communicates data by wire or wirelessly, and is configured to include, for example, the Internet, a local area network, a wide area network, an intranet, and the like. The server 10 and the control device 110 of the laser surface treatment device 100D are communicably electrically connected via the electric communication line 20. In addition, the server 10 and the storage device 30 can also be electrically connected via the electric communication line 20.

[0128] The storage device 30 stores various control data related to the control of the surface treatment performed by the control device 110 of the laser surface treatment device 100D. The control data is, for example, data indicating the value, range, processing step, threshold value, event of an abnormality exceeding the threshold value, and whether the processing state is qualified, of a parameter used in the control. The storage device 30 is, for example, a RAID, and can also be configured to include a plurality of storage devices.

[0129] In the control data, in addition to the control data of each processing condition in the surface treatment at normal times, control data corresponding to the abnormal times is also included, for example, control data such as a threshold value to be referred to when reducing the output power of the laser from the laser device 301.

[0130] The server 10 manages the readout and writing of the control data of the storage device 30, and the communication of data between the storage device 30 and the control device 110. The server 10 can write the control data transmitted from each laser surface treatment device 100D to the storage device 30. In this case, the control device 110 can transmit the control data according to a request from the server 10, or can transmit the control data at a given timing.

[0131] The control device 110 transmits various control data in the control execution of the surface treatment to the server 10, and the server 10 can store the control data in the storage device 30. The control data is, for example, various data including data detected by the sensor 112 at a large number and variety of surface treatments performed by a plurality of laser surface treatment devices 100D, data input by the worker W, the operator, and the like.

[0132] The server 10 can also function as an analysis device. In this case, the server 10 can determine control data indicating appropriate control parameters (values, ranges of values, and the like) and appropriate control steps corresponding to the kind of surface treatment, and the like, using machine learning, deep learning, and the like based on the data collected from a plurality of laser surface treatment devices 100D to the storage device 30. Furthermore, the server 10 can also be a server that calculates the average value and the like of the control parameters in various conditions.

[0133] The server 10 that functions as the analysis device can also acquire, as control data, data that is a precursor to changes in various physical quantities that lead to the control of reducing the output power of the laser light from the laser device 301, based on data representing physical quantities acquired within a given time before the point in time at which the control was performed, when the control device 110 performs the control. As data that is the precursor, for example, are data such as the distance to the object, the surface temperature of the object, the posture of the laser light irradiation device 200, the temperature, and the like. Based on a comparison with a threshold value corresponding to these data or temporal changes in the data, it is possible to capture a precursor to a situation in which the control of reducing the output power of the laser light is performed.

[0134] In addition, the server 10 transmits the control data stored in the storage device 30 to the control device 110 of each laser surface treatment device 100D. That is, the control data is downloaded from the storage device 30 to the laser surface treatment device 100D via the server 10 and the electric communication line 20, and stored in the auxiliary storage section 122 (see FIG. 4) of the laser surface treatment device 100D. Figure 18 In this case, the server 10 can transmit the control data according to a request from the control device 110, or can transmit the control data at a given timing.

[0135] With such a configuration, in the laser surface treatment system 1000, the control data is collected from the plurality of laser surface treatment devices 100D, further analyzed, and accumulated to the storage device 30. In various surface treatments, each laser surface treatment device 100D can download the control data accumulated from the storage device 30, the control data obtained by analysis, and effectively utilize these control data, and perform more suitable surface treatment.

[0136] Figure 18 is a block diagram of the control device 110 of the laser surface treatment device 100D of the present embodiment. The control device 110 is provided with: an arithmetic processing section 111, a sensor 112, a camera 113, an input section 114, an output section 115, a communication device 116, a laser device 301, a motor 204, a laser scanner 207, a main storage section 121, and an auxiliary storage section 122.

[0137] The input section 114 is, for example, a touch panel, a keyboard, a button, or the like, and electrically acquires an operation input based on an operator such as an operator or a worker W.

[0138] The output section 115 is, for example, a display output section such as an LED, a display, a sound output section such as a speaker, a buzzer.

[0139] The sensor 112 is a sensor that detects a physical quantity related to the control of the surface treatment, the state of the laser irradiation apparatus 200, and is, for example, a temperature sensor, a rotational speed sensor, a voltage sensor, a current sensor, a water leakage sensor, a distance sensor, an acceleration sensor, a gyro sensor, a compass, a piezoelectric element, a GPS, and the like. Among these, the acceleration sensor, the gyro sensor, the compass, the GPS, and the like are sensors that detect the position and attitude of the laser irradiation apparatus 200. In addition, the distance sensor is, for example, a laser range finder, a LiDAR, an ultrasonic sensor, a camera, an RGB-D sensor, and the like.

[0140] These sensors 112 also function as the sensors 112 for ensuring safety in the above-described first embodiment. That is, for example, in a case where a detection value exceeding a given threshold value, or a temporal change in the detection value exceeding a given threshold value, occurs in the detection value of the sensor 112, the processing control section 111c controls the laser device 301 so that the output power of the laser is reduced, where the given threshold value corresponds to such phenomena as an abnormal high temperature of the laser irradiation apparatus 200, a sharp rise in the temperature, a fall of the laser irradiation apparatus 200, a collision, a fall, and the like of the worker W, and various abnormalities in the laser irradiation apparatus 200.

[0141] The camera 113 is, for example, a visible light camera, an infrared camera, an RGB-D sensor, and the like. The camera 113 is also an example of the sensor 112.

[0142] The communication apparatus 116 performs transmission and reception of control data by wire or wirelessly via the electric communication line 20 between the server 10.

[0143] The arithmetic processing section 111 has a detection processing section 111a, a determination section 111b, a processing control section 111c, an input processing section 111d, an image processing section 111e, a processing state determination section 111f, an information acquisition section 111g, a processing condition setting section 111i, an output control section 111j, an information collection section 111k, a transmission information generation section 111m, a special information generation section 111n, a transmission control section 111o, a reception control section 111p, a writing processing section 111q, and a readout processing section 111r. The arithmetic processing section 111 performs arithmetic processing according to the installed program, and functions as the detection processing section 111a, the determination section 111b, the processing control section 111c, the input processing section 111d, the image processing section 111e, the processing state determination section 111f, the information acquisition section 111g, the processing condition setting section 111i, the output control section 111j, the information collection section 111k, the transmission information generation section 111m, the special information generation section 111n, the transmission control section 111o, the reception control section 111p, the writing processing section 111q, and the readout processing section 111r.

[0144] The input processing section 111d acquires data corresponding to the operation input in the input section 114. The data obtained by the input processing section 111d is one example of the control data.

[0145] The image processing section 111e performs given image processing on the image data acquired by the camera 113. The image data, the data of the value, and the like processed by the image processing section 111e are one example of the control data.

[0146] The processing state determination section 111f determines whether or not the state of the surface treatment of the surface la of the object 1 after the surface treatment is acceptable by analyzing the image data after the image processing by the image processing section 111e. The processing state determination section 111f compares the data obtained by the image analysis and the data corresponding to the state of the processing being acceptable or the data corresponding to the state of the processing being unacceptable, according to the object, the kind of the surface layer to be removed, and the like, and thereby determines whether or not the state of the processing is acceptable, for example, according to the ratio of the area of the region in which the brightness is higher than the threshold value to the entire area, or the like.

[0147] The information acquisition section 111g can acquire data indicating whether or not the state of the processing input by the input section 114 is acceptable. The data obtained by the information acquisition section 111g is one example of the control data.

[0148] The processing condition setting section 111i acquires data indicating the type and the content of the surface treatment to be performed thereafter, which is input by the input section 114 and obtained by the input processing section 111d, for example, acquires data indicating the material of the object 1, the object to be removed, and the like, and refers to the auxiliary storage section 122 to acquire the value or the range of the appropriate control data corresponding to the data indicating the type and the content of the surface treatment, and sets the value or the range of the control data indicating the processing condition corresponding to the surface treatment.

[0149] As one example, as shown in Table 1, in the auxiliary storage section 122, the value (range) of the power of the laser device 301 and the value (range) of the rotational speed of the shaft 204a of the motor 204 are stored for each material (for example, iron, steel, brass, copper, zinc, and the like) of the object 1 (base material) and for each kind of the object to be removed (for example, the kind of rust such as red rust, black rust, white rust, and the like) in the surface la.

[0150] [Table 1]

[0151]

[0152] Further, for example, as shown in Table 2, in the auxiliary storage section 122, in addition to the material of the object 1 (base material) and the object of removal, the value (range) of the power of the laser device 301 and the value (range) of the rotational speed of the shaft 204a of the motor 204 can be stored for each of the specifications (for example, the thickness of rust) of the object of removal.

[0153] [Table 2]

[0154]

[0155] In addition, in the auxiliary storage section 122, the value (range) of the power of the laser device 301 and the value (range) of the rotational speed of the shaft 204a of the motor 204 are stored for each of the surface treatments performed. Table 3 is the value (range) of the power of the laser device 301 and the value (range) of the rotational speed of the shaft 204a of the motor 204 set for each of the material (for example, steel, stainless steel, aluminum, copper, glass, and the like) of the object 1 (base material) and each of the object of removal (for example, the kind of resin such as epoxy resin, polyurethane resin, fluororesin, and the like) when the object 1 (base material) is metal and the object of removal is a synthetic resin material.

[0156] [Table 3]

[0157]

[0158] Further, the material of the object 1, the object of removal, the specification of the object of removal, and the like are not limited to the cases exemplified in these tables.

[0159] The processing control section 111c controls the operation of the laser device 301, the motor 204, the laser scanner 207, and the like so that the surface treatment corresponding to the processing condition set by the processing condition setting section 111i is performed.

[0160] The output control section 111j controls the operation of the output section 115 so that a given display output or sound output is performed. In addition, in the detection value of the sensor 112, in a case where a detection value exceeding a given threshold value or a temporal change in the detection value exceeding a given threshold value occurs, the output control section 111j can control the output section 115 so that a given warning output is performed, the given threshold value corresponding to the phenomenon of each of the various abnormalities in the laser irradiation device 200 described above.

[0161] The information collection section 111k collects the detection values corresponding to the physical quantities detected by each sensor 112 obtained by the detection processing section 111a at a given timing, for example, at fixed time intervals, within the time from the start of the processing to the end of the processing, and stores them in the auxiliary storage section 122, for example. The start of the processing and the end of the processing are determined based on the data indicating the operation for starting the processing input by the input section 114 and obtained by the input processing section 111d, for example. The start of the processing can also be set as the output start time point of the laser device 301. In addition, the information collection section 111k can also collect the data acquired by the input processing section 111d according to the operation input of the input section 114 at that time, and store it as an event log in the auxiliary storage section 122.

[0162] The transmission information generation section 111m generates transmission information to be transmitted to the server 10 by picking up the data corresponding to a given condition from among the control data stored in the auxiliary storage section 122. In the transmission information, for example, the data not transmitted among all the data (control data) related to the control of the surface treatment can be included, or only the data designated among the data not transmitted can be included. In addition, in the transmission information, the control data collected by the information collection section 111k within the time from the start of the processing to the end of the processing can also be included. In this case, in the transmission information, the control data collected for each of a plurality of processes can also be included.

[0163] In the execution of the surface treatment, when an event satisfying a specific condition occurs, the special information generation section 111n generates special information including data indicating the event. This special information is also transmitted to the server 10. That is, the special information is one example of the transmission information. The special information includes data indicating the physical quantities acquired within a given time before the time point at which the control of reducing the output power of the laser of the laser device 301 is performed, for example, when an abnormality occurs at which such control is performed. In this case, in the special information, data acquired by the input processing section 111d according to the operation input of the input section 114, and the like can also be included.

[0164] The transmission control section 111o controls the communication device 116 so as to transmit the transmission information and the special information to the server 10. In addition, the reception control section 111p controls the communication device 116 so as to receive information from the server 10. The reception control section 111p downloads the data transmitted from the server 10. This data is one example of the control data.

[0165] The write processing section 111q controls writing of data to the auxiliary storage section 122. The write processing section 111q acquires data received by the reception control section 111p, that is, downloaded data, and writes it to the auxiliary storage section 122. At this time, the data stored in the auxiliary storage section 122 described above, such as the data shown in Tables 1 to 3, is updated with the downloaded data. As described above, the processing condition setting section 111i sets the processing condition based on the data stored in the auxiliary storage section 122, and the processing control section 111c performs surface processing in accordance with the processing condition set by the processing condition setting section 111i. Therefore, in the laser surface processing apparatus 100, surface processing can be performed with the latest, more appropriate processing condition that has been updated.

[0166] The above-described embodiments are one example, and are not intended to limit the scope of the invention. The above-described embodiments can be implemented in various other ways, and various omissions, substitutions, combinations, and modifications can be made without departing from the spirit of the invention. In addition, the specifications (configuration, type, direction, model, size, length, width, thickness, height, number, arrangement, position, material, and the like) of each structure, shape, and the like can be appropriately changed.

[0167] For example, the control section of the laser surface processing apparatus can acquire control data based on the detection value of the sensor in one or more trial runs of surface processing performed by the laser surface processing apparatus, and determine whether or not the processing state is acceptable or the degree thereof based on the acquired control data (e.g., image data or the like). In this case, the control section can acquire control data that is expected to improve the processing state by arithmetic operation (e.g., extrapolation, interpolation, machine learning, or the like) based on the control data acquired at the time of the trial run while referring to the storage section of the laser surface processing apparatus or a storage device electrically connected via an electric communication line, and set as control data at the time of the next surface processing. At this time, the control data that becomes a candidate can be output from the output section by display or the like, and the control data can be selected or confirmed by operation input by an operator in the input section, whereby the control data at the time of the next surface processing can be determined.

[0168] Industrial applicability

[0169] The present invention can be used for a laser surface processing apparatus and a laser surface processing system.

[0170] -Explanation of reference numerals-

[0171] 1 … object (article)

[0172] 1a … surface

[0173] 10 … server (analysis device)

[0174] 20... electric communication line

[0175] 30... storage device

[0176] 100, 100C, 100D... laser surface treatment device

[0177] 110... control device (control section)

[0178] 111... arithmetic processing section

[0179] 111a... detection processing section (detection section)

[0180] 111b... determination section

[0181] 111c... processing control section (control section)

[0182] 111d... input processing section

[0183] 111e... image processing section

[0184] 111f... processing state determination section

[0185] 111g... information acquisition section

[0186] 111i... processing condition setting section

[0187] 111j... output control section

[0188] 111k... information collection section

[0189] 111m... transmission information generation section

[0190] 111n... special information generation section

[0191] 111o... transmission control section

[0192] 111p... reception control section

[0193] 111q... write processing section

[0194] 111r... read processing section

[0195] 112... sensor (detection section)

[0196] 113... camera (detection section)

[0197] 114... input section

[0198] 115... output section

[0199] 116... communication device

[0200] 121... main storage section

[0201] 122 … auxiliary storage section

[0202] 200, 200A, 200B, 200D … laser irradiation device

[0203] 201 … housing

[0204] 201a … surface

[0205] 202 … mounting mechanism

[0206] 203 … DOE (Diffractive Optical Element)

[0207] 204 … motor (rotation mechanism)

[0208] 204a … shaft

[0209] 205 … rotation transmission mechanism (rotation mechanism)

[0210] 206 … window member

[0211] 207 … laser scanner (scanning mechanism)

[0212] 300 … mounting device

[0213] 301 … laser device

[0214] 302 … power supply device

[0215] 303 … cooling device

[0216] 400 … cable

[0217] 401 … optical fiber cable

[0218] 402 … electric cable

[0219] 403 … refrigerant pipe

[0220] 1000 … laser surface treatment system

[0221] Ab … area

[0222] Ac … area

[0223] Ad … area

[0224] Ah … area

[0225] Ai … irradiation area

[0226] An … non-irradiation area

[0227] C … center

[0228] Cr … center axis

[0229] I … detection range

[0230] It… image

[0231] Iv… luminance image

[0232] P1… light spot pattern

[0233] Pv… virtual irradiation surface

[0234] L… laser

[0235] S… light spot

[0236] tp… time

[0237] W… worker

[0238] X… direction

[0239] Y… direction

[0240] Z… direction.

Claims

1. A laser surface treatment apparatus, characterized in that, have: Laser device, outputs laser light; An optical head illuminates the surface of an object with the laser emitted from the laser device; The detection unit detects physical quantities that change according to the irradiation of the laser; and The control unit controls at least one of the power of the laser output from the optical head and the irradiation position of the laser on the surface, based on the physical quantity detected by the detection unit. The laser surface treatment device irradiates the surface with a laser to treat the surface.

2. The laser surface treatment apparatus according to claim 1, wherein, The laser surface treatment apparatus includes an intensity detection unit as the detection unit, which detects the intensity of light from the surface or a position closer to the optical head than the surface.

3. The laser surface treatment apparatus according to claim 2, wherein, When the intensity of the light detected by the intensity detection unit is above a first threshold, the control unit controls the laser device to reduce the output power of the laser.

4. The laser surface treatment apparatus according to claim 2, wherein, If the ratio of the intensity of the light detected by the intensity detection unit to the output power of the laser is below a second threshold, the control unit controls the laser device to reduce the output power of the laser.

5. The laser surface treatment apparatus according to claim 2, wherein, The laser surface treatment device includes multiple intensity detection units located at mutually separated positions as intensity detection units.

6. The laser surface treatment apparatus according to claim 5, wherein, The sensors of the plurality of intensity detection units are configured such that the optical axis of the laser output from the optical head or a virtual line overlapping the optical axis is located therebetween.

7. The laser surface treatment apparatus according to claim 5, wherein, If the difference in light intensity detected by the two intensity detection units is greater than or equal to a third threshold, the control unit controls the laser device to reduce the output power of the laser.

8. The laser surface treatment apparatus according to claim 2, wherein, The laser surface treatment device includes a region intensity detection unit for acquiring a two-dimensional brightness image as the intensity detection unit.

9. The laser surface treatment apparatus according to claim 1, wherein, The laser surface treatment apparatus includes a temperature detection unit for remotely detecting the temperature of the surface as the detection unit.

10. The laser surface treatment apparatus according to claim 9, wherein, If there is a point on the surface with a temperature of a fourth threshold or higher within a given range, the control unit controls the laser device to reduce the output power of the laser.

11. The laser surface treatment apparatus according to claim 9, wherein, If there is a point on the surface with a temperature below a fifth threshold within a given range, the control unit controls the laser device to increase the output power of the laser.

12. The laser surface treatment apparatus according to claim 11, wherein, The laser surface treatment device can operate in a normal mode and a low-output mode in which the laser output power is lower than that in the normal mode. When the laser surface treatment device is operating in the low output mode, and there is a point on the surface with a temperature below the fifth threshold within a given range, the control unit controls the laser device to increase the output power of the laser and return to the normal mode.

13. The laser surface treatment apparatus according to claim 1, wherein, The laser surface treatment apparatus includes a detection unit with a sensor, which is mounted on the housing of the optical head or in the housing containing the optical head.

14. The laser surface treatment apparatus according to claim 1, wherein, The laser surface treatment device includes a detection unit with a sensor, which is mounted on a mounting mechanism that can be installed on a worker or an object.

15. The laser surface treatment apparatus according to claim 1, wherein, The optical head has a scanning mechanism that moves the laser spot on the surface by scanning the laser spot on the surface. The control unit controls the operation of the scanning mechanism.

16. The laser surface treatment apparatus according to claim 1, wherein, The optical head has a diffractive optical element and a rotation mechanism that rotates the laser spot on the surface by rotating the diffractive optical element. The control unit controls the operation of the rotating mechanism.

17. A laser surface treatment system, characterized in that, have: The server is communicatively electrically connected via an electrical communication line to the control unit of the laser surface treatment apparatus according to any one of claims 1 to 16; and The storage device stores control data related to the control performed by the control unit, and reads and writes the control data through the server. The server writes the control data obtained via the control unit into the storage device.

18. The laser surface treatment system according to claim 17, wherein, The control unit controls the reduction of the laser's output power based on the physical quantities detected by the detection unit. The control data includes data acquired within a given time period prior to the time point at which the output power of the laser is reduced.

19. The laser surface treatment system according to claim 17, wherein, The laser surface treatment system includes a storage unit, which is correspondingly arranged with the control unit to store the control data. The control data stored in the storage device is downloaded via the server and the electrical communication line and stored in the storage unit. The control unit controls at least one of the power of the laser output from the optical head and the irradiation position of the laser on the surface, based on the downloaded control data.

20. The laser surface treatment system according to claim 19, wherein, The laser surface treatment system includes an analysis device that calculates the value of the control data or a range of that value for each processing condition of the surface treatment based on the control data stored in the storage device. The value of the control data calculated by the analysis device, or the range of that value, is stored in the storage device. The value or range of the control data is downloaded to the storage unit via the server and the electrical communication line. The control unit controls at least one of the power of the laser output from the optical head and the irradiation position of the laser on the surface, based on the value or range of the downloaded control data.

21. The laser surface treatment system according to claim 20, wherein, The control unit controls the reduction of the laser's output power based on the physical quantities detected by the detection unit. The control data includes data acquired within a given time period prior to the time point at which the output power of the laser is reduced.

22. The laser surface treatment system according to claim 21, wherein, The analysis device acquires data, based on data obtained within a given time period prior to the control point for reducing the laser's output power, to obtain precursor data of changes in physical quantities that indicate a change in the physical quantity leading to the control of reducing the laser's output power, as the control data. The control performed by the control unit is based on the data that serves as the precursor.

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