Excimer laser and method for replacing a lens thereof

Abstract

The application relates to the technical field of excimer lasers, and discloses an excimer laser and a lens replacing method thereof. The excimer laser comprises a discharge cavity, and window piece assemblies are arranged at two ends of the discharge cavity; the excimer laser further comprises a lens holder fixing plate, a lens adjusting plate and a lens mounting plate; the lens holder fixing plate is fixedly arranged at one end of the discharge cavity corresponding to one of the window piece assemblies; one side of the lens adjusting plate is connected with the lens holder fixing plate through an elastic assembly, and the relative position between the lens adjusting plate and the lens holder fixing plate is adjusted through an adjusting assembly; the lens mounting plate is internally provided with an OC lens, and one side of the lens mounting plate is fixedly connected with the other side of the lens adjusting plate. The relative position between the lens adjusting plate and the lens holder fixing plate can be adjusted through the adjusting assembly, that is, the position of the OC lens is adjusted, the replacing precision of the OC lens is ensured, and the output power and the beam quality of the excimer laser are ensured.

Description

Technical Field

[0001] This invention relates to the field of excimer laser technology, and in particular to an excimer laser and a method for replacing its lenses. Background Technology

[0002] An excimer laser is a type of gas laser device that uses excimer molecules as its working medium. Inside the laser cavity, inert and halogen gases are excited by a strong electron beam to form excimer states. The laser light emitted when these excimer molecules transition to their ground state is then produced. Because of its very short wavelength in the ultraviolet range, excimer lasers are cold lasers with no thermal effect. They are highly directional, have high wavelength purity, and high output power pulsed lasers, with photon energy wavelengths ranging from 157 nm to 353 nm. Therefore, excimer lasers are widely used in fields such as integrated circuit lithography, ophthalmic surgery, micromachining, laser annealing, and display panel manufacturing.

[0003] However, due to the characteristics of excimer lasers, their optical lenses, as consumables, need to be replaced frequently. Among them, the OC mirror (Output Coupler) plays a key role in the laser, mainly used to adjust the laser's output power and beam quality. Therefore, ensuring its positional accuracy after replacement is crucial. Summary of the Invention

[0004] To solve the above-mentioned technical problems, the present invention provides an excimer laser and a method for replacing its lens, ensuring the replacement accuracy of the OC lens, thereby ensuring the output power and beam quality of the excimer laser.

[0005] The technical solution adopted by this invention to solve its technical problem is:

[0006] An excimer laser includes a discharge cavity, wherein a laser working substance is disposed inside the discharge cavity, and window assemblies are respectively disposed at both ends of the discharge cavity;

[0007] It also includes a frame fixing plate, a lens adjustment plate, and a lens mounting plate. The frame fixing plate is fixed to one end of the discharge cavity corresponding to one of the window lens components. One side of the lens adjustment plate is connected to the frame fixing plate through an elastic component, and the relative position between the lens adjustment plate and the frame fixing plate is adjusted through an adjustment component. An OC lens is provided in the lens mounting plate, and one side of the lens mounting plate is fixedly connected to the other side of the lens adjustment plate.

[0008] Preferably, the adjustment assembly includes a first adjustment assembly, a second adjustment assembly, and a third adjustment assembly, wherein:

[0009] The first adjustment component is used to enable the lens adjustment plate to swing relative to the frame fixing plate about a first axis;

[0010] The second adjustment component is used to enable the lens adjustment plate to deflect relative to the frame fixing plate about a second axis;

[0011] The third adjustment component is used to enable the lens adjustment plate to deflect relative to the frame fixing plate about a third axis;

[0012] The first axis, the second axis, and the third axis are all perpendicular to each other.

[0013] Preferably, the first adjustment component includes two ball bearing mounting seats and a ball bearing disposed opposite to each other. One end of each ball bearing mounting seat is provided with a tapered hole. The other end of one ball bearing mounting seat is connected to the lens adjustment plate, and the other end of the other ball bearing mounting seat is connected to the frame fixing plate. The ball bearing is disposed in the two tapered holes.

[0014] Preferably, the second adjustment assembly includes a ball head mounting seat fixed to the frame fixing plate and a first threaded sleeve fixed to the lens adjustment plate. The ball head mounting seat has a V-groove at one end near the lens adjustment plate. The first threaded sleeve is internally threaded with a first ball head screw, and the ball head of the first ball head screw is received in the V-groove.

[0015] Preferably, the third adjustment component includes an abutment fixed to the frame fixing plate and a second threaded sleeve fixed to the lens adjustment plate. The end of the abutment near the lens adjustment plate is an abutment surface. The second threaded sleeve is internally threaded with a second ball-head screw, and the ball head of the second ball-head screw abuts against the abutment surface.

[0016] Preferably, the frame fixing plate has a first through hole, and the side of the frame fixing plate away from the lens adjusting plate has a first slot communicating with the first through hole; the lens adjusting plate has a second through hole, and the side of the lens adjusting plate away from the frame fixing plate has a second slot communicating with the second through hole.

[0017] The elastic component includes a first pin disposed in the first slot and a second pin disposed in the second slot, a spring connecting the first pin and the second pin, and the spring being disposed in the first through hole and the second through hole.

[0018] Preferably, the lens adjustment plate has a third through hole in the middle corresponding to the window assembly, and a gas guide channel connected to the third through hole is provided on one side of the lens adjustment plate. A gas pipe for delivering protective gas is provided on the gas guide channel. A first pipe is connected between one side of the third through hole and the window assembly. The lens mounting plate is attached to the other side of the third through hole, and a second pipe is provided on the side of the lens mounting plate away from the lens adjustment plate corresponding to the OC lens.

[0019] Preferably, one end of the lens mounting plate is bolted to the lens adjusting plate, and the other end of the lens mounting plate is connected to the lens adjusting plate via a connecting assembly.

[0020] The connecting assembly includes a sliding block and a connecting post. The sliding block has a locking spring inside. One end of the connecting post passes through the locking spring and connects to the lens adjustment plate. The end of the lens mounting plate has a locking groove, which engages with the sliding block.

[0021] Preferably, the lens mounting plate is provided with a receiving groove, and a fixing frame is provided on one side of the receiving groove. The OC lens is disposed in the receiving groove and abuts against the fixing frame. Sealing rings are provided between the OC lens and the fixing frame and between the OC lens and the bottom surface of the receiving groove.

[0022] A method for replacing lenses in an excimer laser includes the following steps:

[0023] Remove the second pipe;

[0024] Remove the lens mounting plate from the lens adjustment plate;

[0025] Remove the old OC lens;

[0026] Place the sealing ring, OC lens, sealing ring, and fixing frame into the receiving groove in sequence, and then fix them with screws;

[0027] Connect the lens mounting plate to the lens adjustment plate;

[0028] Adjust the position of the OC lens by adjusting the components;

[0029] Connect the second conduit to the lens mounting plate.

[0030] The excimer laser and its lens replacement method according to an embodiment of the present invention have the following advantages compared with the prior art: by setting the OC lens inside the lens mounting plate, and fixing a lens adjustment plate to one side of the lens mounting plate, and connecting the lens adjustment plate to the frame fixing plate through an elastic component, the relative position between the lens adjustment plate and the frame fixing plate can be adjusted by the adjustment component. Thus, after replacing the OC lens, the relative position between the lens adjustment plate and the frame fixing plate can be adjusted by the adjustment component, thereby realizing the position adjustment of the OC lens, achieving rapid replacement, ensuring the replacement accuracy of the OC lens, and thus ensuring the output power and beam quality of the excimer laser. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of an excimer laser.

[0032] Figure 2 This is a schematic diagram of the excimer laser of the present invention.

[0033] Figure 3 This is a schematic diagram of the structure of the excimer laser without the discharge cavity of the present invention.

[0034] Figure 4 for Figure 3 The main view.

[0035] Figure 5 for Figure 4 A cross-sectional schematic diagram of AA.

[0036] Figure 6 for Figure 4 A cross-sectional view of BB.

[0037] Figure 7 for Figure 4 A cross-sectional view of CC.

[0038] Figure 8 This is a schematic diagram showing the connection between the lens adjustment plate and the lens mounting plate of the present invention.

[0039] Figure 9 for Figure 8 A cross-sectional schematic diagram of DD.

[0040] Figure 10 for Figure 8 A cross-sectional schematic diagram of the EE.

[0041] Wherein: 1-Discharge chamber, 2-Window lens assembly, 3-Frame fixing plate, 4-Lens adjustment plate, 5-Lens mounting plate, 51-Snap-fit ​​groove, 6-OC lens, 7-First adjustment component, 71-Ball bearing mounting seat, 72-Ball bearing, 8-Second adjustment component, 81-Ball head mounting seat, 82-First threaded sleeve, 83-First ball head screw, 9-Third adjustment component, 91-Abutment seat, 92-Second threaded sleeve, 93-Second ball head screw, 10-Elastic component, 101-First pin, 102-Second pin, 103-Spring, 20-Air pipe, 30-Bolt, 40-Connecting component, 401-Sliding block, 402-Connecting column, 403-Clamping spring, 50-Fixing frame, 60-Sealing ring, 70-First pipe, 80-Second pipe. Detailed Implementation

[0042] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0043] Figure 1 This is a schematic diagram of an excimer laser. The discharge cavity has windows at both ends. The laser's HR mirror is a high-reflection mirror (total reflection mirror). The laser's OC mirror partially reflects and projects the laser light, which is then amplified and output within the oscillating cavity. Changes in the angle of the OC mirror (R2) affect the laser's operating efficiency. Therefore, the excimer laser's OC mirror needs to be adjusted to achieve higher operating efficiency; simultaneously, the excimer OC mirror needs to be replaced periodically. The excimer laser of this application effectively solves the angle adjustment problem after OC mirror replacement.

[0044] like Figures 2-4 As shown, a preferred embodiment of the present invention provides an excimer laser, including a discharge cavity 1, wherein a laser working substance is disposed inside the discharge cavity 1, and window assemblies 2 are respectively disposed at both ends of the discharge cavity 1. This is prior art and will not be described in detail here.

[0045] It also includes a frame fixing plate 3, a lens adjusting plate 4, and a lens mounting plate 5. The frame fixing plate 3 is fixed to one end of the discharge cavity 1 via a support leg corresponding to one of the window lens components 2. One side of the lens adjusting plate 4 is connected to the frame fixing plate 3 via an elastic component 10, and the relative position between the lens adjusting plate 4 and the frame fixing plate 3 is adjusted by an adjusting component. The lens mounting plate 5 is provided with an OC lens 6, and one side of the lens mounting plate 5 is fixedly connected to the other side of the lens adjusting plate 4.

[0046] Based on the above-mentioned technical features, the excimer laser has an OC lens 6 placed inside a lens mounting plate 5, with a lens adjustment plate 4 fixedly connected to one side of the lens mounting plate 5. The lens adjustment plate 4 is connected to a frame fixing plate 3 via an elastic component 10. The relative position between the lens adjustment plate 4 and the frame fixing plate 3 can be adjusted via the adjustment component. Therefore, after replacing the OC lens 6, the relative position between the lens adjustment plate 4 and the frame fixing plate 3 can be adjusted via the adjustment component, thus achieving position adjustment of the OC lens 6. This enables rapid replacement while ensuring the accuracy of the OC lens 6 replacement, thereby guaranteeing the output power and beam quality of the excimer laser.

[0047] In this embodiment, the adjustment assembly includes a first adjustment assembly 7, a second adjustment assembly 8, and a third adjustment assembly 9, wherein: the first adjustment assembly 7 is used to enable the lens adjustment plate 4 to swing relative to the frame fixing plate 3 about a first axis; the second adjustment assembly 8 is used to enable the lens adjustment plate 4 to deflect relative to the frame fixing plate 3 about a second axis; and the third adjustment assembly 9 is used to enable the lens adjustment plate 4 to deflect relative to the frame fixing plate 3 about a third axis. The first axis, the second axis, and the third axis are all perpendicular to each other.

[0048] like Figure 5 As shown, specifically, the first adjustment component 7 includes two ball bearing mounting seats 71 and a ball bearing 72 arranged opposite to each other. One end of each ball bearing mounting seat 71 is provided with a tapered hole, and the axis of the tapered hole is a first axis. One end of one ball bearing mounting seat 71 is connected to the lens adjustment plate 4, and the other end of the other ball bearing mounting seat 71 is connected to the frame fixing plate 3. The ball bearing 72 is disposed within the two tapered holes, so that when the position of the lens adjustment plate 4 is adjusted, the lens adjustment plate 4 swings around the outer periphery of the ball bearing 72, thereby realizing the swinging of the lens adjustment plate 4 relative to the frame fixing plate 3 around the first axis.

[0049] like Figure 6 As shown, the second adjustment assembly 8 includes a ball joint mounting base 81 fixed to the frame fixing plate 3 and a first threaded sleeve 82 fixed to the lens adjusting plate 4. The ball joint mounting base 81 has a V-groove at one end near the lens adjusting plate 4. The first threaded sleeve 82 is internally threaded with a first ball joint screw 83, the ball head of which is received within the V-groove. When the first ball joint screw 83 is rotated, causing the lens adjusting plate 4 to move, the frame fixing plate 3 and the lens adjusting plate 4 oscillate around the outer periphery of the ball bearing 72, and the lens adjusting plate 4 deflects slightly around the second axis. Simultaneously, the ball head on the first ball joint screw 83 slides along the direction of the V-groove, which limits the movement of the ball head of the first ball joint screw 83.

[0050] like Figure 5 As shown, the third adjustment assembly 9 includes an abutment seat 91 fixed to the frame fixing plate 3 and a second threaded sleeve 92 fixed to the lens adjustment plate 4. The abutment seat 91 has an abutment surface at one end near the lens adjustment plate 4. The second threaded sleeve 92 is internally threaded with a second ball-head screw 93, and the ball head of the second ball-head screw 93 abuts against the abutment surface. When the second ball-head screw 93 is rotated, it causes the lens adjustment plate 4 to move, resulting in a oscillation around the outer circumference of the ball bearing 72 between the frame fixing plate 3 and the lens adjustment plate 4, and a slight deflection of the lens adjustment plate 4 around the third axis. At this time, the second ball-head screw 93 slides on the abutment surface. When the first ball-head screw 83 is rotated, the second ball-head screw 93 slides vertically on the abutment surface.

[0051] like Figure 5 As shown, in this embodiment, the frame fixing plate 3 has a first through hole, and the side of the frame fixing plate away from the lens adjusting plate has a first slot communicating with the first through hole. The lens adjusting plate 4 has a second through hole, and the side of the lens adjusting plate 4 away from the frame fixing plate 3 has a second slot communicating with the second through hole.

[0052] The elastic component 10 includes a first pin 101 disposed in the first slot and a second pin 102 disposed in the second slot. A spring 103 connects the first pin 101 and the second pin 102, and the spring 103 is disposed in the first through hole and the second through hole. During installation, the first pin 101 is first sleeved onto one end of the spring 103, and the spring 103 passes through the first through hole of the frame fixing plate 3, with the first pin 101 engaging with the first slot. The spring 103 is stretched and passed through the second through hole on the lens adjusting plate 4. Then, the second pin 102 is sleeved onto the other end of the spring 103. The spring 103 is then released to lock it in place, allowing the second pin 102 to engage with the second slot.

[0053] When adjusting the first ball screw 83 and the second ball screw 93, the lens adjustment plate 4 is deflected around the central axis of the light-transmitting hole at the center of the frame fixing plate 3.

[0054] like Figure 3-4As shown, in this embodiment, the lens adjustment plate 4 has a third through hole in the middle corresponding to the window assembly. One side of the lens adjustment plate has a gas guide channel connected to the third through hole. A gas pipe 20 for conveying protective gas is provided on the gas guide channel. A first pipe 70 connects one side of the third through hole to the window assembly. The lens mounting plate 5 is attached to the other side of the third through hole. A second pipe 80 is provided on the side of the lens mounting plate 5 away from the lens adjustment plate 4 corresponding to the OC lens 6. Both the first pipe 70 and the second pipe 80 are corrugated pipes. Because the photon energy of the excimer laser is high, it causes significant damage to optical lenses. Therefore, to improve the working time of the OC lens 6 and reduce damage, it is necessary to seal and protect the OC lens 6 with N2 to extend its service life. This application uses a gas pipe to deliver N2, thus achieving protection for the OC lens 6. The axial direction of the first pipe 70 coincides with the axial direction of the second pipe 80, and both are the first axial direction.

[0055] Meanwhile, since the first pipe 70 is connected to the third through hole, after N2 is injected from the gas pipe 20, it is injected along the gas guide channel on the lens adjustment plate 4, forming a positive pressure environment of N2 in the laser channel between the OC lens 6 and the first pipe 70. This can expel air and dust, prevent contaminants from entering the laser channel, protect the window assembly 2, and cool the OC lens 6.

[0056] like Figure 7 As shown in this application, to ensure the connection reliability and sealing of the OC lens 6, the lens mounting plate 5 is provided with a receiving groove, and a fixing frame 50 is provided on one side of the receiving groove. The OC lens 6 is disposed in the receiving groove and abuts against the fixing frame 50. Sealing rings 60 are provided between the OC lens 6 and the fixing frame 50, and between the OC lens and the bottom surface of the receiving groove. Furthermore, when the OC lens 6 needs to be replaced, only the fixing frame 50 needs to be removed.

[0057] like Figures 8-10As shown, in this embodiment, one end of the lens mounting plate 5 is connected to the lens adjusting plate 4 by bolts 30, and the other end of the lens mounting plate 5 is connected to the lens adjusting plate 4 by a connecting assembly 40. The connecting assembly 40 includes a sliding block 401 and a connecting post 402. The sliding block 401 has a locking spring 403 inside, and one end of the connecting post 402 passes through the locking spring 403 and connects to the lens adjusting plate 4. The end of the lens mounting plate 5 has a V-shaped locking groove 51, which engages with the sliding block 401. The lens adjusting plate 4 has a groove for mounting the lens mounting plate 5. After the OC lens 6 is installed on the lens mounting plate 5, the locking groove 51 is first connected to the sliding block 401, and then the bolts 30 are used to connect the lens mounting plate 5 and the lens adjusting plate 4, thus fixing the lens mounting plate 5 to the lens adjusting plate 4.

[0058] like Figure 8 As shown, to ensure accurate positioning and convenient installation during the replacement of the OC lens 6, the bolt 30 and its mating structure are ingeniously designed. The bolt 30 structure includes: a nut, a cylindrical rod, a tapered angle, and a threaded post. The lens adjustment plate 4 has a circular hole, and the nut engages with the platform on the circular hole to press the lens mounting plate tightly. The cylindrical rod and the circular hole on the lens adjustment plate 4 are precisely fitted together, enabling relatively accurate positioning between the bolt 30 and the lens mounting plate 5.

[0059] The hole structure on the lens adjustment plate 4 includes: a cylindrical hole, a tapered angle, and a threaded post. The tapered angle on the bolt 30 acts as a guide when inserted into the hole, enabling quick and precise installation in confined spaces. The tapered angle inside the hole guides the bolt's threaded post during installation, also enabling quick and precise installation in confined spaces. The cylindrical rod of the bolt 30 and the cylindrical hole of the hole have a precise fit, ensuring accurate positioning of the lens adjustment plate and the lens mounting plate.

[0060] To address the aforementioned technical problems, this application also provides a method for replacing lenses in an excimer laser, comprising the following steps:

[0061] Step 1: Loosen the screws of the second pipe 80 and move the second pipe 80 away from the lens mounting plate 5 to remove the second pipe 80.

[0062] Step 2: Remove the lens mounting plate 5 from the lens adjustment plate 4. When removing the lens mounting plate 5, first remove the bolt 30, then gently pry up the lens mounting plate 5, and finally disengage the snap-fit ​​groove 51 of the lens mounting plate 5 from the sliding block 401 to remove the lens mounting plate 5.

[0063] Step 3: Remove the retaining frame 50 and take out the old OC lens 6 from the receiving slot;

[0064] Step 4: Place the sealing ring 60, OC lens 6, sealing ring 60, and fixing frame 50 into the receiving groove in sequence, and then fix them with screws;

[0065] Step 5: Connect the lens mounting plate 5 to the lens adjustment plate 4;

[0066] Step Six: Adjust the position of the OC mirror 6 using the adjustment components. The laser beam is perpendicular to the light-transmitting surface of the OC mirror 6. When the laser beam passes through the OC mirror 6, part of it is reflected back to the discharge cavity 1, where it oscillates and amplifies. The remaining part passes through the OC mirror 6 and is emitted outwards. Only when the light reflected by the OC mirror 6 (partial reflector) and the HR mirror (total reflection mirror) can oscillate repeatedly can the laser be sufficiently amplified, ensuring the best output efficiency of the laser. Since the frame itself cannot guarantee that the two mirrors are perfectly perpendicular, and the precision of the mirror itself cannot guarantee that the new OC mirror 6 will remain consistent with the original mirror, the working efficiency of the OC mirror 6 needs to be restored by fine-tuning its light-receiving surface angle after replacement. Furthermore, due to the frequent replacement of the OC mirror 6 and the limited space in the laser, a convenient adjustment mechanism and method are needed. This solution addresses these issues.

[0067] After replacing the OC lens 6, turning the first ball end screw 83 with an Allen wrench will cause the position of the first ball end screw 83 on the lens adjusting plate 4 to move perpendicular to the frame fixing plate 3. At this time, the lens adjusting plate 4 uses the connection line between the ball bearing mounting seat 71 and the second ball end screw 93 (set along the second axis) as the axis of rotation. By turning the first ball end screw 83 clockwise or counterclockwise, the OC lens 6 can be deflected around the second axis. Turning the second ball end screw 93 with an Allen wrench will cause the position of the second ball end screw 93 on the lens adjusting plate 4 to move perpendicular to the frame fixing plate 3. At this time, the lens adjusting plate 4 uses the connection line between the first ball end screw 83 and the ball bearing mounting seat 71 (along the third axis) as the axis of rotation. By turning the second ball end screw 93 clockwise or counterclockwise, the OC lens 6 can be deflected around the third axis. Add an energy meter (or other testing tool) to the outside of the laser. Fine-tune the deflection angle of the OC lens 6 by rotating the first ball screw 83 and the second ball screw 93. Once the energy meter meets the requirements, the adjustment of the OC lens 6 is complete.

[0068] In this adjustment method, the first ball screw 83 and the second ball screw 93 are adjusted using an Allen wrench. The movement of the set screw, with the frame adjustment plate 302 acting as a lever, amplifies the adjustment accuracy twice, effectively ensuring the realization of fine-tuning the OC lens angle. The structure is compact, with few parts, saving space. The tension of the spring and the self-locking of the threaded pair ensure the stability of the operation after adjustment.

[0069] Step 7: Connect the second pipe 80 to the lens mounting plate 5.

[0070] In summary, this application has the following advantages:

[0071] 1. This design has a simple and compact structure, low cost, and can meet the technical requirements of OC lens 6 adjustment, window replacement, and optical path gas protection.

[0072] 2. The simple structure of this case reduces the amount of work required by assemblers, simplifies their work, and reduces their workload.

[0073] 3. This design facilitates the disassembly and replacement of OC lens 6. OC lens 6 is installed stably and securely, meeting the requirements for long-term stable operation of the laser. The replacement operation is simple and has a foolproof positioning mechanism, reducing the requirements for debugging equipment and personnel.

[0074] 4. This technical solution can satisfy the fine-tuning of the OC lens 6 in all directions along the central axis; moreover, by converting the rotational force of the Allen wrench lever-set screw into the movement of the frame adjustment plate as a lever, the adjustment accuracy is amplified three times, effectively ensuring the realization of fine-tuning the OC lens angle; at the same time, the tension of the spring and the self-locking of the threaded pair ensure the stability of the operation after the adjustment is completed.

[0075] 5. The aperture where the OC lens 6 is located is fully sealed and protected by N2 gas in this technical solution, which effectively improves the lifespan of the OC lens 6.

[0076] 6. The first pipe 70 and the second pipe 80 of this technical solution are corrugated pipes, which have good extensibility and are convenient to cooperate with other devices before and after the OC lens 6 adjustment device, and facilitate the disassembly, assembly and debugging of the OC lens 6 adjustment device and other devices before and after it.

[0077] 7. This solution significantly reduces the processing requirements for components, the technical requirements for assembly and debugging personnel, and the requirements for debugging equipment; at the same time, it greatly improves installation and debugging efficiency. These factors result in cost savings and increased efficiency.

[0078] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the original technical principle of the present invention, and these improvements and substitutions should also be considered within the scope of protection of the present invention.

Claims

1. An excimer laser comprising a discharge chamber, the interior of which is provided with a laser-active substance, characterized in that: Two ends of the discharge cavity are respectively provided with window sheet assemblies; Further comprising a frame fixing plate, a lens adjusting plate and a lens mounting plate, the frame fixing plate is fixed to one end of the discharge cavity corresponding to one of the window sheet assemblies, one side of the lens adjusting plate is connected to the frame fixing plate through an elastic assembly, and the relative position between the lens adjusting plate and the frame fixing plate is adjusted through an adjusting assembly, the lens mounting plate is provided with an OC lens, and the other side of the lens adjusting plate is fixedly connected to one side of the lens mounting plate; The adjusting assembly comprises a first adjusting assembly, a second adjusting assembly and a third adjusting assembly, wherein: The first adjusting assembly is used to realize the swing of the lens adjusting plate relative to the frame fixing plate around a first axis; The second adjusting assembly is used to realize the deflection of the lens adjusting plate relative to the frame fixing plate around a second axis; The third adjusting assembly is used to realize the deflection of the lens adjusting plate relative to the frame fixing plate around a third axis; The first axis, the second axis and the third axis are perpendicular to each other; The first adjusting assembly comprises two oppositely arranged ball mounting seats and balls, one end of the ball mounting seat is provided with a tapered hole, one end of one of the ball mounting seats is connected to the lens adjusting plate, the other end of the other ball mounting seat is connected to the frame fixing plate, and the balls are arranged in the two tapered holes; The second adjusting assembly comprises a ball head mounting seat fixed to the frame fixing plate and a first threaded sleeve fixed to the lens adjusting plate, one end of the ball head mounting seat close to the lens adjusting plate is provided with a V-shaped groove, the first threaded sleeve is threadedly connected with a first ball head screw, and the ball head of the first ball head screw is accommodated in the V-shaped groove; The third adjusting assembly comprises an abutting seat fixed to the frame fixing plate and a second threaded sleeve fixed to the lens adjusting plate, one end of the abutting seat close to the lens adjusting plate is an abutting surface, the second threaded sleeve is threadedly connected with a second ball head screw, and the ball head of the second ball head screw abuts against the abutting surface.

2. The excimer laser of claim 1, wherein: The frame fixing plate is provided with a first through hole, and one side of the frame fixing plate away from the lens adjusting plate is provided with a first clamping groove in communication with the first through hole, the lens adjusting plate is provided with a second through hole, and one side of the lens adjusting plate away from the frame fixing plate is provided with a second clamping groove in communication with the second through hole, The elastic assembly comprises a first pin arranged in the first clamping groove and a second pin arranged in the second clamping groove, a spring is connected between the first pin and the second pin, and the spring is arranged in the first through hole and the second through hole.

3. The excimer laser of claim 1, wherein: The middle part of the lens adjusting plate is provided with a third through hole corresponding to the window sheet assembly, one side of the lens adjusting plate is provided with an air guide channel communicated with the third through hole, an air pipe for conveying protective gas is arranged on the air guide channel, a first pipeline is connected between one side of the third through hole and the window sheet assembly, and a lens mounting plate is attached to the other side of the third through hole, and the lens mounting plate is provided with a second pipeline corresponding to the OC lens on the side away from the lens adjusting plate.

4. The excimer laser of claim 1, wherein: One end of the lens mounting plate is connected with the lens adjusting plate through a bolt, and the other end of the lens mounting plate is connected with the lens adjusting plate through a connecting assembly. The connecting assembly comprises a sliding block and a connecting column, the inside of the sliding block is provided with a clamping spring, one end of the connecting column passes through the clamping spring to connect the lens adjusting plate, and the end of the lens mounting plate is provided with a clamping groove, and the clamping groove is clamped with the sliding block.

5. The excimer laser of claim 3, wherein: The lens mounting plate is provided with a containing groove, one side of the containing groove is provided with a fixed frame, the OC lens is arranged in the containing groove and abuts against the fixed frame, and a sealing ring is arranged between the OC lens and the fixed frame and between the OC lens and the bottom surface of the containing groove.

6. The mirror replacement method of an excimer laser as claimed in claim 5, wherein: The method comprises the following steps: Remove the second pipeline; Remove the lens mounting plate from the lens adjusting plate; Take out the old OC lens; Put the sealing ring, OC lens, sealing ring, fixed frame into the containing groove in sequence, and then fix them with screws; Connect the lens mounting plate with the lens adjusting plate; Adjust the position of the OC lens through the adjusting assembly; Connect the second pipeline on the lens mounting plate.

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