Powder rotating holder assembly and powder atomic layer deposition device

Abstract

The invention relates to a powder rotating gripper assembly and a powder atomic layer deposition device. The rotary clamp holder is provided with an inner cavity and a baffle detachably arranged in the inner cavity in a protruding mode, and the connector is provided with an assembly cavity matched with the clamp holder check block in shape. The clamp holder stop block is detachably inserted into the assembly cavity so that the torque of the connector can be transmitted to the rotary clamp holder through the clamp holder stop block. The rotary clamp holder can be applied to the process working conditions of vacuum, high temperature and corrosive atmosphere meeting atomic layer deposition, powder, especially nanoscale powder, can be prevented from being accumulated on the inner wall of the rotary clamp holder, so that the rotary fluidization state of the powder can be further improved under the same batch, the batch of single-time coated powder can be improved, and the production efficiency is improved. Therefore, the fluidization state of the powder is improved, and the coating uniformity of the film is improved; in addition, the rotary holder and the connector are easy to disassemble and assemble, so that the powder rotary holder assembly also has the advantage of being easy to disassemble and assemble; in addition, the baffle is simple in overall assembly and disassembly steps and easy to disassemble and assemble.

Description

Technical Field

[0001] This application relates to the field of powder fluidization for atomic layer deposition, and in particular to powder rotary clamping device and powder atomic layer deposition apparatus. Background Technology

[0002] Atomic layer deposition (ALD) is a type of chemical vapor deposition that achieves monolayer thin film growth by alternately introducing precursors onto the substrate surface. Powder ALD is a process specifically designed for depositing atomic layers on powder substrates. Due to the high specific surface area of ​​powders, a fluidized bed system is required to improve powder dispersion and achieve uniform coating during ALD deposition.

[0003] Compared to atomic layer deposition on planar substrates, powder atomic layer deposition requires a special reaction vessel to hold the powder. The purpose of this is to reduce powder agglomeration and achieve a good fluidization state of the powder, thereby achieving uniform coating of the atomic layer.

[0004] Traditional powder fluidized beds include vertical fluidized beds and rotating fluidized beds. Compared to vertical fluidized beds, rotating fluidized beds have the advantages of higher precursor utilization and lower precursor consumption. The device required to hold the powder in a rotating fluidized bed is called a powder rotary holder, or simply a rotary holder or holder. The powdered material is placed inside the rotary holder, which is rotated by a motor.

[0005] However, for powders with larger specific surface area or lighter unit mass, the rotary holder of a traditional rotary fluidized bed cannot effectively drive the powder fluidization, causing the powder to mainly accumulate on the inner wall of the rotary holder, which reduces the uniformity of film coating and limits the possibility of large-volume powder coating.

[0006] Furthermore, atomic layer deposition processes mostly require conditions above room temperature, thus preventing the rapid assembly and disassembly of powder holders. Summary of the Invention

[0007] Therefore, it is necessary to provide a powder rotary clamp assembly and a powder atomic layer deposition apparatus.

[0008] One embodiment of this application is a powder rotary clamp assembly, comprising a rotary clamp and a connector; the rotary clamp has an inner cavity and a baffle detachably protruding from the inner cavity, the inner cavity being configured to carry powder for an atomic layer deposition process; the rotary clamp also has a clamp stop located outside the inner cavity; the connector is configured to connect a drive structure, the connector having an assembly cavity adapted to the shape of the clamp stop; the clamp stop is detachably inserted into the assembly cavity so that the torque of the connector is transmitted to the rotary clamp through the clamp stop.

[0009] The aforementioned powder rotary clamp assembly can be applied to processes requiring vacuum, high temperature, and corrosive atmospheres for atomic layer deposition. Through the cooperation of the rotary clamp and connector, and with a removable baffle designed inside the rotary clamp, it helps prevent powder, especially nanoscale powder, from accumulating on the inner wall of the rotary clamp. Therefore, it can further improve the powder rotation fluidization state at the same batch size and increase the powder batch size for a single coating, thereby improving the powder fluidization state and thus enhancing the uniformity of film coating. Furthermore, the rotary clamp and connector are easy to assemble and disassemble, giving the powder rotary clamp assembly the advantage of easy assembly and disassembly. In addition, the overall baffle assembly and disassembly steps are simple, making it easy to install and remove the baffle.

[0010] In some embodiments, the baffle extends in a direction parallel to the axis of the inner cavity.

[0011] In some embodiments, the number of baffles is at least two, and each baffle is evenly distributed relative to the axis of the inner cavity.

[0012] In some embodiments, the number of baffles is three or four.

[0013] In some embodiments, the connector includes a connector stop and a connector end cap connected together; the connector stop is configured as a connection drive structure, the connector stop has an assembly cavity adapted to the shape of the clamping stop; the connector end cap has a shaped hole, the clamping stop passes through the shaped hole and is detachably inserted into the assembly cavity.

[0014] In some embodiments, the connector stop includes a connected body and a connecting end, the connecting end being configured as a connection drive structure, the body being located between the connecting end and the connector end cap, and the body having the assembly cavity; or, the connector end cap having a cover body, and the cover body having the irregular hole and the fixing hole, the cover body being screwed to the body through the fixing hole.

[0015] As an example, the main body and the connecting end are integrally formed.

[0016] In some embodiments, the rotary clamp includes a first end cap, a second end cap, and a clamping cylinder; the clamping cylinder has the inner cavity, and the baffle is detachably protruding from the inner wall of the clamping cylinder; the first end cap and the second end cap are detachably connected to the two ends of the clamping cylinder, and the first end cap is provided with the clamping stop.

[0017] In some embodiments, the gripper cylinder has a baffle mounting groove on its inner wall, and the baffle is partially embedded in the baffle mounting groove; or, the first end cap and the second end cap are respectively screwed to the gripper cylinder; or, the baffle is screwed to the baffle mounting groove.

[0018] In some embodiments, the two ends of the gripper cylinder are respectively provided with a first mounting groove and a second mounting groove; the first end cap is provided with a first protrusion, which is embedded in the first mounting groove; the second end cap is provided with a second protrusion, which is embedded in the second mounting groove; or, the first end cap is provided with a first slot communicating with the inner cavity; or, the second end cap is provided with a second slot communicating with the inner cavity; or, the powder rotating gripper assembly further includes a first filter and a second filter; the first filter is disposed between the first end cap and the gripper cylinder; the second filter is disposed between the gripper cylinder and the second end cap.

[0019] As an example, the mesh size of the filter is greater than 1000 mesh.

[0020] In some embodiments, a powder atomic layer deposition apparatus includes the powder rotary clamp assembly described in any embodiment. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of an embodiment of the powder rotary clamp assembly described in this application.

[0023] Figure 2 for Figure 1 The illustrated embodiment is shown as an exploded view of the structure from another direction.

[0024] Figure 3 for Figure 1 A schematic diagram of the rotating clamp in the embodiment shown.

[0025] Figure 4 for Figure 3 Another schematic diagram of the embodiment shown.

[0026] Figure 5 for Figure 4 The illustrated embodiment is shown in an exploded view.

[0027] Figure 6 for Figure 5 Another schematic diagram of the embodiment shown.

[0028] Figure 7 for Figure 4 Another schematic diagram of the embodiment shown.

[0029] Figure 8 for Figure 7 A schematic cross-sectional view along the AA direction of the embodiment shown.

[0030] Figure 9 for Figure 7 A schematic cross-sectional view along the BB direction of the embodiment shown.

[0031] Figure 10 for Figure 1 A schematic diagram of the connector in the embodiment shown.

[0032] Figure 11 for Figure 10 Another schematic diagram of the embodiment shown.

[0033] Figure 12 for Figure 11 Another schematic diagram of the embodiment shown.

[0034] Figure 13 for Figure 12 The illustrated embodiment is shown in an exploded view.

[0035] Figure 14 for Figure 13 Another schematic diagram of the embodiment shown.

[0036] Figure 15 This is a partial structural schematic diagram of another embodiment of the powder rotary clamp assembly described in this application.

[0037] Figure 16 for Figure 15 A partial structural exploded view of the embodiment shown.

[0038] Figure 17 for Figure 16 A schematic diagram of a portion of the structure of the illustrated embodiment from another direction.

[0039] Figure 18 for Figure 17 Another schematic diagram of the embodiment shown.

[0040] Reference numerals: Rotary clamp 100, Rotation direction 101, First end cover 110, Clamp stop 111, First protrusion 112, First slot 113, Transmission shaft 114, Fan-shaped misaligned end 115, Second end cover 120, Shaft connection 121, Second protrusion 122, Second slot 123, Clamp rotating cylinder 130, Inner cavity 131, Inner wall 132, Baffle mounting groove 133, First mounting groove 134, Second mounting groove 135, Baffle 140, Plate 1 41. Parallel mounting plate 142. First straight toothed plate 143. Second straight toothed plate 144. Convex plate 145. Concave plate 146. Plane 147. Convex surface 148. Concave surface 149. Force 150. Long convex tooth 151. Short convex tooth 152. Connector 200. Connector stop 210. Body 211. Connecting end 212. Assembly cavity 213. Connector end cap 220. Cover body 221. Irregular hole 222. Fixing hole 223. Powder rotary clamp assembly 300. Detailed Implementation

[0041] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0042] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0043] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0044] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0045] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and or" as used in this application includes any and all combinations of one or more of the associated listed items.

[0046] This application discloses a powder rotary clamp assembly and a powder atomic layer deposition apparatus, which includes some or all of the technical features of the following embodiments; that is, the powder rotary clamp assembly and the powder atomic layer deposition apparatus include some or all of the following structures. In one embodiment of this application, a powder rotary clamp assembly includes a rotary clamp and a connector; the rotary clamp has an inner cavity and a baffle detachably protruding from the inner cavity, the inner cavity being configured to carry powder for the atomic layer deposition process; the rotary clamp also has a clamp stop located outside the inner cavity; the connector is configured to connect a drive structure, the connector having an assembly cavity adapted to the shape of the clamp stop; the clamp stop is detachably inserted into the assembly cavity so that the torque of the connector is transmitted to the rotary clamp through the clamp stop. The aforementioned powder rotary holder assembly can be applied to processes requiring vacuum, high temperature, and corrosive atmospheres for atomic layer deposition. Through the cooperation of the rotary holder and connector, and with a removable baffle designed inside the rotary holder, it helps prevent powder, especially nanoscale powder, from accumulating on the inner wall of the rotary holder. Therefore, it can further improve the powder rotation fluidization state at the same batch size and increase the powder batch size for single coating, thereby improving the powder fluidization state and thus enhancing the uniformity of film coating. Furthermore, the rotary holder and connector are easy to assemble and disassemble, giving the powder rotary holder assembly the advantage of easy assembly and disassembly. In addition, the overall baffle assembly and disassembly steps are simple, facilitating baffle installation and removal. The following section will combine... Figures 1 to 18 The powder rotary clamp assembly and the powder atomic layer deposition apparatus are described in detail below.

[0047] To address the issues of powder accumulating primarily on the inner wall of the rotary gripper and the inability to quickly assemble and disassemble the powder gripper, in some embodiments, a powder rotary gripper assembly 300 is provided, such as... Figure 1 and Figure 2 As shown, it includes a rotary clamp 100 and a connector 200; combined with Figure 3 and Figure 4 The rotary clamp 100 has an inner cavity 131 and a baffle 140 detachably protruding from the inner cavity 131. The inner cavity 131 is configured to carry powder for atomic layer deposition. The rotary clamp 100 also has a clamp stop 111 located outside the inner cavity 131. The connector 200 is configured to connect a drive structure, combined with... Figure 1 and Figure 10 The connector 200 is provided with an assembly cavity 213 that is adapted to the shape of the clamping block 111; the clamping block 111 is detachably inserted into the assembly cavity 213 so that the torque of the connector 200 is transmitted to the rotary clamp 100 through the clamping block 111. This design can be applied to processes requiring vacuum, high temperature, and corrosive atmospheres for atomic layer deposition. Through the cooperation of the rotary holder 100 and connector 200, and with a removable baffle 140 inside the rotary holder 100, it helps prevent powder, especially nanoscale powder, from accumulating on the inner wall 132 of the rotary holder 100. Therefore, it can further improve the powder rotation fluidization state under the same batch size and increase the powder batch size for a single coating, thereby improving the powder fluidization state and thus enhancing the uniformity of film coating. Furthermore, the rotary holder 100 and connector 200 are easy to assemble and disassemble, giving the powder rotary holder assembly 300 the advantage of easy assembly and disassembly. In addition, the overall assembly and disassembly steps for the baffle 140 are simple, making it easy to assemble and disassemble the baffle 140.

[0048] In each embodiment, the powder rotary holder assembly 300 is a powder rotary holder for powder atomic layer deposition. The powder rotary holder assembly 300 is connected to a drive structure, such as a stepper motor, via a connector 200, or via an intermediate structural component. Typically, the rotation of the powder rotary clamp assembly 300 is driven by a stepper motor outside the cavity. The mechanical transmission parts between the motor shaft and the powder rotary clamp assembly 300 require special design and do not meet the requirements of high temperature resistance, corrosion resistance, and easy disassembly under vacuum conditions. Therefore, the powder rotary clamp assembly 300 adopts a design with clamp stop 111 and connector 200. The output structure of the drive structure, such as the stepper motor, acts on the rotary clamp 100 through the connector 200. On the one hand, there is no need to design or change the output structure of the drive structure to meet the requirements of high temperature resistance, corrosion resistance, and easy disassembly under vacuum conditions, thereby greatly reducing the requirements for the drive structure. Moreover, the internal structure design of the powder rotating drum and the transmission component design improve the uniformity of film coating, which is conducive to achieving large-volume powder coating. On the other hand, it is easy to assemble or disassemble the rotary clamp 100 and the connector 200, so that the powder rotary clamp assembly 300 also has the advantage of easy disassembly.

[0049] The inner wall of a traditional gripper drum is inconvenient to machine in one piece, which could improve the structure of powder fluidization. To solve this problem, in various embodiments, such as... Figure 7 and Figure 9 As shown, the rotary gripper 100 has an inner cavity 131 and a baffle 140 detachably protruding from the inner cavity 131. The inner cavity 131 is configured to carry powder for atomic layer deposition (ALD) processes. This design, using the baffle 140 as the internal structure of the rotary gripper 100, achieves better powder dispersion, thereby improving coating quality and enabling low-cost manufacturing of the rotary gripper 100. In some embodiments, the extending direction of the baffle 140 is parallel to the axis of the inner cavity 131. In some embodiments, the number of baffles 140 is at least two, and each baffle 140 is evenly distributed relative to the axis of the inner cavity 131. In some embodiments, such as... Figure 6 and Figure 7As shown, the number of baffles 140 is four. In other embodiments, the number of baffles 140 is two, three, or five, etc. Compared with traditional rotary grippers, the presence of internal baffles 140 allows for more uniform powder dispersion and improves the rotational fluidization state of the powder. This solves the problem of nanoscale powders with larger specific surface areas or lighter unit mass accumulating on the inner wall of the gripper, resulting in more uniform coating of nanoscale powders. At the same time, for micron-sized and other general powders, the powder coating amount per batch can be increased under the same gripper volume conditions. That is, because the problem of large-scale powder accumulation is improved, the coating yield can be increased.

[0050] Furthermore, this design achieves the synergistic effect of multiple baffles 140. When there are at least two baffles 140 and they are evenly distributed relative to the axis of the inner cavity 131, the powder is guided and blocked by multiple baffles 140 as the rotary gripper 100 rotates within the inner cavity 131. These baffles 140 can divide the powder into multiple small areas and continuously disrupt and redistribute the powder during rotation to prevent accumulation, making the powder more evenly dispersed throughout the inner cavity 131. For example, when the powder accumulates near the inner wall 132, adjacent baffles 140 can push the powder towards the central area of ​​the inner cavity 131, preventing excessive concentration of powder near the inner wall 132, thereby improving the uniformity of powder dispersion. On the other hand, the arrangement of baffles 140 can effectively change the flow path of the powder in the inner cavity 131. When the powder passes through the baffles 140, it is obstructed and guided by the baffles 140, forming multiple small eddies and vortices. These small eddies and vortices generate more collisions and friction between powder particles, further optimizing the powder's fluidization state, making it more loose and fluid. Moreover, a good fluidization state helps the powder to fully contact the reactive gas during atomic layer deposition, improving the uniformity of film coating. Furthermore, in atomic layer deposition, the powder processing efficiency directly affects the speed and quality of film coating. This embodiment, by setting multiple baffles 140, increases the contact area and contact time between the powder and the reactive gas. As the powder passes through the baffles 140, it is continuously agitated and redistributed, allowing the powder particles to be more fully exposed to the reactive gas, thereby accelerating the film deposition rate and improving powder processing efficiency.

[0051] In order to optimize the transmission structure of the rotary clamp 100 for easy disassembly and installation, in various embodiments, such as Figure 4 and Figure 8As shown, the rotary clamp 100 also includes a clamping stop 111 located outside the inner cavity 131; the clamping stop 111 is detachably inserted into the assembly cavity 213 so that the torque of the connector 200 is transmitted to the rotary clamp 100 through the clamping stop 111. Exemplarily, the clamping stop 111 axially engages with the connector 200 in the assembly cavity 213, so that the clamping stop 111 can only be inserted into the assembly cavity 213 of the connector 200 along the axis of the inner cavity 131, i.e., the extending direction of the clamping stop 111, or so that the clamping stop 111 can only be removed from the assembly cavity 213 along the axis of the inner cavity 131. Exemplarily, as... Figure 5 and Figure 6 As shown, the clamping block 111 includes a transmission shaft 114 and a fan-shaped misaligned end 115. The fan-shaped misaligned end 115 is detachably inserted into the assembly cavity 213 and forms an axial misalignment with the irregular hole 222 of the connector 200, so that the clamping block 111 can only be removed from the assembly cavity 213 along the axis of the inner cavity 131 when the irregular hole 222 is in a predetermined position. As an example, the rotational speed of the rotary gripper 100 will not be too high, because the centrifugal force at high speeds would be too great, and the powder would stick to the inner wall of the gripper drum 130, which would reduce the fluidization effect. Compared with the traditional rotary gripper transmission mechanism with its complex structure, the gripper stop 111 of the rotary gripper 100, in conjunction with the connector 200, can stably transmit torque at low speeds. In the high-temperature chamber, the rotary gripper 100 and the connector 200 can be installed with one hand or with only one robotic arm, without involving the tightening of screws or the increased maintenance costs due to bearing aging, thus facilitating the atomic layer deposition process.

[0052] Furthermore, this design offers several advantages. First, the clamping block 111 is detachably inserted into the assembly cavity 213 of the connector 200 via an axial fit. This design simplifies and speeds up the assembly and disassembly of the rotary clamp 100 and the connector 200, eliminating the need for complex tools or cumbersome procedures and significantly improving equipment maintenance and replacement efficiency. Second, the fan-shaped misaligned end 115 of the clamping block 111 forms an axial misalignment with the irregular hole 222 of the connector 200. The clamping block 111 can only be disassembled when the irregular hole 222 is in a predetermined position. This effectively prevents equipment damage or powder leakage due to misoperation during disassembly, ensuring equipment stability and safety. Third, the clamping block 111 engages with the connector 200 via a transmission shaft 114, ensuring stable and efficient torque transmission from the connector 200 to the rotary clamp 100. This prevents power transmission failure due to loose or worn transmission components, guaranteeing stable operation of the rotary clamp 100 during atomic layer deposition. On the other hand, the axial engagement between the clamp stop 111 and the connector 200 can effectively reduce errors and vibrations during transmission, thus ensuring the stability of the rotary clamp 100 during high-speed rotation, improving the uniformity of powder fluidization and coating, and thereby enhancing the quality of film coating.

[0053] In each embodiment, such as Figure 10 and Figure 11As shown, the connector 200 is configured as a connection drive structure. The connector 200 has an assembly cavity 213 that matches the shape of the gripper stop 111. Exemplarily, the connector 200 and the gripper stop 111 are misaligned to axially limit the gripper stop 111 when it is inserted into the assembly cavity 213, preventing the gripper stop 111 from uncontrollably detaching from the connector 200, thus axially limiting the rotary gripper 100. This structural design, through the misalignment of the connector 200 and the gripper stop 111, achieves axial limiting when the gripper stop 111 is inserted into the assembly cavity 213, effectively preventing the gripper stop 111 from loosening due to vibration or impact during equipment operation, ensuring a stable and reliable connection between the rotary gripper 100 and the connector 200. On the other hand, the axial limiting design makes the clamp stop 111 more stable when transmitting torque, avoiding power transmission interruption or failure due to component loosening, thereby ensuring the smooth operation of the rotary clamp 100 in the atomic layer deposition process and improving the uniformity of powder fluidization and coating. Furthermore, the axial limiting function prevents the clamp stop 111 from accidentally detaching from the connector 200 during equipment operation, avoiding equipment damage or powder leakage due to component detachment, and ensuring safe operation of the equipment under complex process conditions such as high temperature, vacuum, and corrosive atmospheres. Moreover, by preventing the clamp stop 111 from loosening, the need for frequent maintenance or replacement due to component damage or loss is reduced, lowering equipment maintenance costs and downtime. Furthermore, the matching design between the connector 200 and the clamp stop 111, along with the axial limiting function, ensures the accuracy of power transmission, reduces transmission errors, and improves the rotational accuracy and stability of the rotary clamp 100, thereby enhancing the uniformity and quality of film coating.

[0054] In some embodiments, the connector 200 includes a connector stop 210 and a connector end cap 220 connected together; the connector stop 210 is configured as a connection drive structure, combined with Figure 14The connector stop 210 has an assembly cavity 213 that matches the shape of the clamp stop 111; the connector end cap 220 has a shaped hole 222, through which the clamp stop 111 passes and is detachably inserted into the assembly cavity 213. This design, on the one hand, through the separate structure of the connector stop 210 and the connector end cap 220, allows the connector 200 to provide more stable support and a more reliable connection when connected to the rotary clamp 100 and the drive structure. Furthermore, the connector stop 210 and the clamp stop 111 fit tightly together through the assembly cavity 213, while the connector end cap 220 further secures the clamp stop 111 through the shaped hole 222, thereby enhancing the structural stability of the entire assembly. On the other hand, the engagement of the irregular hole 222 of the connector end cap 220 with the clamping block 111 effectively prevents the clamping block 111 from loosening or shifting due to vibration or external force during rotation. This ensures that the connection between the clamping block 111 and the connector 200 remains tight and reliable, avoiding power transmission failure or equipment malfunction due to loose components. Furthermore, the split structure of the connector 200 makes the assembly and disassembly of the clamping block 111 more convenient and quick. Through the irregular hole 222 of the connector end cap 220, the clamping block 111 can be quickly inserted into or removed from the assembly cavity 213 without complex tools or operating procedures, greatly improving the efficiency of equipment maintenance and replacement. Moreover, the split design of the connector block 210 and the connector end cap 220 allows for the replacement of only damaged or worn parts during equipment maintenance, without replacing the entire connector 200. This partial replacement method not only reduces equipment maintenance costs but also minimizes equipment downtime and improves equipment availability. Furthermore, the irregular hole 222 of the connector end cap 220 provides additional axial and radial positioning functions for the clamp stop 111, allowing the position of the clamp stop 111 to be finely adjusted as needed during equipment operation to optimize equipment performance and powder processing effect.

[0055] In some of these embodiments, such as Figure 12 and Figure 13 As shown, the connector stop 210 includes a body 211 and a connecting end 212 connected to each other. The connecting end 212 is configured as a connection drive structure. The body 211 is located between the connecting end 212 and the connector end cover 220, and the body 211 is provided with the assembly cavity 213. In some embodiments, such as Figure 13 and Figure 14As shown, the connector end cap 220 has a cover body 221, and the cover body 221 has the irregular hole 222 and the fixing hole 223. The cover body 221 is screwed to the body 211 through the fixing hole 223. As an example, the body 211 and the connection end 212 are integrally formed. For example, the irregular hole 222 is used for the clamping block 111 to pass through, so that the clamping block 111 is installed in the assembly cavity 213. By rotating the cover 221, the irregular hole 222 and the clamping block 111 are misaligned, restricting the clamping block 111 from disengaging from the irregular hole 222 and the assembly cavity 213. Then, the cover 221 is screwed to the body 211 through the fixing hole 223, so that the clamping block 111 cannot be directly removed from the assembly cavity 213. That is, the clamping block 111 can only be removed from the assembly cavity 213 along the axis of the inner cavity 131 when the irregular hole 222 is in a predetermined position.

[0056] This design, on the one hand, through the misaligned fit between the irregular hole 222 of the connector end cap 220 and the clamp stop 111, and the screw-fit fixation between the end cap and the body 211, effectively prevents the clamp stop 111 from accidentally loosening or shifting during equipment operation. This ensures that the connection between the rotary clamp 100 and the connector 200 remains stable and reliable, avoiding equipment failure or powder leakage due to loose components, thus improving the safety and reliability of the equipment. On the other hand, the body 211 of the connector stop 210 and the connecting end 212 are integrally set, combined with the screw-fit fixation of the connector end cap 220, forming a robust overall structure. This effectively resists vibration and impact generated during equipment operation, ensuring stable operation of the equipment under complex process conditions and extending the service life of the equipment. On the other hand, the connector end cap 220 is connected to the body 211 by screws. This design makes the installation and removal of the clamping block 111 simple and quick. By rotating the cover 221, the irregular hole 222 can be misaligned or aligned with the clamping block 111, thereby quickly fixing or releasing the clamping block 111, greatly improving the efficiency of equipment maintenance and replacement. Furthermore, the body 211 of the connector block 210 has an assembly cavity 213, which can accommodate clamping blocks 111 of different shapes and sizes, enabling the equipment to adapt to different types of rotary clamps 100, thus improving the equipment's versatility and flexibility and meeting the needs of various atomic layer deposition processes. Furthermore, the connector stop 210 body 211 and the connection end 212 are integrally set, and the assembly cavity 213 and the clamp stop 111 are precisely matched to ensure that the torque is stably and efficiently transmitted from the drive structure to the rotary clamp 100, thereby reducing transmission error, improving the rotation accuracy and stability of the rotary clamp 100, and thus improving the uniformity and quality of film coating.

[0057] In some embodiments, the rotary gripper 100 includes a first end cap 110, a second end cap 120, and a gripper cylinder 130. The gripper cylinder 130 has an inner cavity 131, and a baffle 140 is detachably protruding from the inner wall 132 of the gripper cylinder 130. The first end cap 110 and the second end cap 120 are detachably connected to the two ends of the gripper cylinder 130, and the first end cap 110 has a gripper stop 111 protruding from it, so as to connect the connector 200 through the gripper stop 111, so that the connector 200 transmits torque to the gripper cylinder 130 through the gripper stop 111. It can be understood that torque is the moment that causes an object to rotate about a rotation axis, that is, the product of force and lever arm. The driving structure sequentially drives the connected gripper cylinder 130 through the connector 200 and the gripper stop 111. In some embodiments, the first end cap 110 and the second end cap 120 are screwed onto the gripper cylinder 130. This design, on the one hand, allows for simple and quick assembly and disassembly of the rotary gripper 100 by screwing the first end cap 110 and the second end cap 120 to the gripper cylinder 130, facilitating rapid replacement or maintenance of internal components such as the baffle 140 and reducing equipment downtime; furthermore, this detachable design allows for individual replacement of damaged or worn end caps or cylinders without replacing the entire rotary gripper assembly, reducing maintenance costs. On the other hand, the first end cap 110 and the second end cap 120, respectively connecting to both ends of the gripper cylinder 130, form a closed and stable structure, effectively enhancing the overall rigidity of the rotary gripper 100 and reducing vibration and deformation during high-speed rotation. On the other hand, the clamp stop 111 is mounted on the first end cover 110. Through cooperation with the connector 200, it can stably transmit torque from the drive structure to the clamp drum 130, ensuring the smooth operation of the rotary clamp 100. Furthermore, the removable end cover design facilitates cleaning and maintenance of the inner cavity 131 of the clamp drum 130, and makes filter replacement easy. Especially when processing nano-sized powders, it can quickly clean residual powder on the inner wall 132, ensuring long-term stable operation of the equipment.

[0058] Exemplarily, the second end cap 120 is provided with a shaft connection portion 121, which and the clamping stop 111 are respectively located at the two ends of the clamping cylinder 130, that is, the clamping cylinder 130 is located between the shaft connection portion 121 and the clamping stop 111; the second end cap 120 is adaptedly connected to the force-bearing structure through the shaft connection portion 121, so that when the clamping cylinder 130 rotates, the second end cap 120 rotates synchronously, but does not transmit torque through the shaft connection portion 121. Exemplarily, the shaft connection portion 121 is configured to be mounted on the force-bearing structure, such as a mounting base, by means of a bearing. This design, on the one hand, by using a bearing to mount the shaft connection portion 121 and the force-bearing structure, such as a mounting base, can significantly reduce the friction between the second end cap 120 and the force-bearing structure, thereby ensuring that the rotary clamp 100 is in a rotating environment while reducing mechanical wear caused by friction and extending the service life of the equipment. On the other hand, the bearing assembly ensures that the second end cover 120 rotates synchronously with the gripper drum 130, while preventing torque transmission through the shaft connection 121. This reduces vibration and sway caused by uneven torque transmission, improving the rotational accuracy and stability of the equipment. Furthermore, the design of the shaft connection 121 ensures that the second end cover 120 is connected to the load-bearing structure only through bearings, without transmitting torque. This prevents structural damage or deformation caused by mis-transmitted torque, ensuring the reliability of the equipment during long-term operation. Moreover, the bearing assembly effectively disperses the radial and axial forces experienced by the second end cover 120 during rotation, improving the equipment's load-bearing capacity and enabling it to adapt to more complex process conditions and higher speed requirements. Furthermore, since the shaft connection 121 does not transmit torque, even if torque overload occurs during equipment operation, it will not damage the second end cover 120 or the load-bearing structure, further enhancing the equipment's safety.

[0059] In some embodiments, the gripper cylinder 130 has a baffle mounting groove 133 on its inner wall 132, and the baffle 140 is partially embedded in the baffle mounting groove 133. In some embodiments, the baffle 140 is screwed into the baffle mounting groove 133. For example, as shown... Figure 5 and Figure 6 As shown, the baffle 140 includes a plate body 141 and a pair of parallel mounting plates 142. The pair of parallel mounting plates 142 are integrally formed with the plate body 141, and the two parallel mounting plates 142 are parallel and perpendicular to the plate body 141. Figure 7 and Figure 9Each of the parallel mounting plates 142 is at least partially embedded in one of the baffle mounting grooves 133, so that the baffle 140 can be easily and detachably mounted on the gripper cylinder 130 and protrude from the inner wall 132, while also meeting the requirements of stable installation, high temperature resistance, corrosion resistance, and easy disassembly under vacuum conditions. This design, on the one hand, fixes the baffle 140 in the baffle mounting groove 133 by screws, making the installation and disassembly of the baffle 140 simple and quick, facilitating rapid replacement of damaged or worn baffles 140, and reducing equipment downtime; and on the other hand, the detachable baffle 140 design allows for individual replacement of the baffle 140 without replacing the entire gripper cylinder 130, reducing maintenance costs. On the other hand, the parallel mounting plate 142 of the baffle 140 is embedded in the baffle mounting groove 133 and fixed by screws. This design ensures the stable installation of the baffle 140 on the inner wall 132 of the gripper drum 130, and can withstand the centrifugal force and vibration generated during rotation. Furthermore, the stable installation of the baffle 140 ensures its guiding and dispersing effect on the powder during rotation, optimizing the powder fluidization state and improving the uniformity of film coating. Moreover, the design of the baffle 140 adapts to complex process conditions such as vacuum, high temperature, and corrosive atmospheres. Its materials and structure are resistant to high temperatures and corrosion, ensuring the stability and reliability of the equipment during long-term operation. Finally, the detachable baffle design facilitates cleaning and maintenance of the inner wall 132 of the gripper drum 130, especially when processing nanoscale powders, enabling rapid removal of residual powder and preventing powder accumulation and agglomeration.

[0060] In some embodiments, the powder rotary gripper assembly 300 further includes a first filter and a second filter; the first filter is disposed between the first end cap 110 and the gripper cylinder 130; the second filter is disposed between the gripper cylinder 130 and the second end cap 120. As an example, the mesh size of the filter is greater than 1000 mesh. This design, on the one hand, effectively prevents powder from escaping, ensuring that the powder in the inner cavity 131 of the gripper cylinder 130 is within the process environment, thereby improving the quality and uniformity of film coating. Furthermore, the filter's placement between the end cap and the gripper cylinder 130 enhances the equipment's sealing, preventing powder leakage to the external environment and also preventing external impurities from entering the inner cavity 131, ensuring stable operation of the production process under vacuum or a specific atmosphere. On the other hand, the replaceable design of the filter screen allows for quick replacement or cleaning of clogged filter screens after the equipment has been running for a period of time, reducing equipment maintenance time and costs. Furthermore, the equipment's filtration function can be restored simply by replacing the filter screen, without the need for a major overhaul of the entire powder rotary clamp assembly 300, thus reducing maintenance difficulty and costs.

[0061] In some embodiments, the first end cap 110 has a first slot 113 communicating with the inner cavity 131; or, the second end cap 120 has a second slot 123 communicating with the inner cavity 131. In some embodiments, the first end cap 110 has a first slot 113 communicating with the inner cavity 131, and the second end cap 120 has a second slot 123 communicating with the inner cavity 131. Other embodiments follow the same principle and will not be described in detail. This structural design facilitates the delivery of the precursor to the inner cavity 131 through the first slot 113 and / or the second slot 123, allowing the precursor to enter the inner cavity 131 through the first slot 113 and / or the second slot 123.

[0062] In some embodiments, the two ends of the gripper cylinder 130 are respectively provided with a first mounting groove 134 and a second mounting groove 135; the first end cap 110 is provided with a first protrusion 112, which is embedded in the first mounting groove 134; the second end cap 120 is provided with a second protrusion 122, which is embedded in the second mounting groove 135. This design, on the one hand, with the first protrusion 112 embedded in the first mounting groove 134 and the second protrusion 122 embedded in the second mounting groove 135, makes the connection between the first end cap 110 and the second end cap 120 and the gripper cylinder 130 tighter and more stable, effectively preventing the end caps from loosening or shifting due to vibration or external force during equipment operation; and on the other hand, this embedded connection method enhances the structural rigidity of the entire rotary gripper 100, reducing vibration and deformation caused by component loosening during high-speed rotation, ensuring stable operation of the equipment. On the other hand, the embedded connection between the end caps, including the first end cap 110 and the second end cap 120, and the gripper drum 130 provides a better sealing contact surface, reducing powder leakage or external gas ingress caused by gaps at the connection, and further improving the sealing performance of the equipment under complex process conditions such as vacuum, high temperature, or corrosive atmosphere. Furthermore, the good sealing performance effectively prevents powder from leaking into the external environment during equipment operation, avoiding pollution of the surrounding environment, and also prevents external impurities from entering the inner cavity 131, ensuring the purity and processing quality of the powder. Moreover, the embedded design allows the end caps to be quickly positioned and embedded into the mounting slot of the gripper drum 130 during installation, reducing alignment and adjustment time during installation and improving the efficiency of equipment assembly and disassembly. This design also makes the connection between the end caps and the gripper drum 130 more intuitive and simple, facilitating quick disassembly and replacement of damaged parts during maintenance, reducing the difficulty and cost of equipment maintenance.

[0063] To address the issue of powder buildup on one side during continuous rotary fluidization, as an example, such as... Figure 15As shown, there are four baffles 140, namely a first straight toothed plate 143, a second straight toothed plate 144, a convex plate 145, and a concave plate 146. Each baffle 140 is evenly distributed relative to the axis of the inner cavity 131. The first straight toothed plate 143 and the second straight toothed plate 144 are arranged opposite each other, and the convex plate 145 and the concave plate 146 are arranged opposite each other. That is, the convex plate 145 and the concave plate 146 are positioned between the first straight toothed plate 143 and the second straight toothed plate 144. Figure 16 and Figure 18 Both the first straight toothed plate 143 and the second straight toothed plate 144 are provided with long protrusions 151 and short protrusions 152, and the long protrusions 151 and the short protrusions 152 are arranged sequentially, that is, there is a short protrusion 152 between two adjacent long protrusions 151, and there is a long protrusion 151 between two adjacent short protrusions 152. For example, the first straight toothed plate 143 and the second straight toothed plate 144 have the same shape, only different names for easy distinction. It can also be understood that the plate body 141 of the first straight toothed plate 143 and the second straight toothed plate 144 is provided with long protrusions 151 and short protrusions 152. The convex plate 145 has opposing planes 147 and convex surfaces 148, and the concave plate 146 has opposing planes 147 and concave surfaces 149. Figure 15 and Figure 17 In the rotation direction 101, the convex surface 148 of the convex plate 145 faces the plane 147 of the concave plate 146, separated by the first straight toothed plate 143; the concave surface 149 of the concave plate 146 faces the plane 147 of the convex plate 145, separated by the second straight toothed plate 144. In the rotation axial direction, the convex surface 148 protrudes from both ends of the rotary clamp 100 towards the center, and the concave surface 149 is recessed from both ends of the rotary clamp 100 towards the center. With this structural design, when the rotary clamp 100 is rotating along the rotation direction 101, the convex plate 145 generates a force 150 towards both ends of the rotary clamp 100 through the convex surface 148, and the concave plate 146 generates a force 150 towards the middle of the rotary clamp 100 through the concave surface 149. In conjunction with two straight toothed plates, including the first straight toothed plate 143 and the second straight toothed plate 144, the alternating long convex teeth 151 and short convex teeth 152 form a wave-like force 150, which can disperse the powder, thereby solving the problem of powder accumulation on one side during continuous rotary fluidization, and thus facilitating more complete rotary fluidization.

[0064] Specifically, the baffle 140 is made in three forms, including a concave-convex baffle and a straight toothed baffle. The concave-convex baffle has one straight surface and the other concave-convex surface, with the concave-convex surface facing the rotation direction of the gripper. The two baffles are installed symmetrically. Their function is to apply a force along the rotation axis to the coated powder during the rotary fluidization process. When the powder passes through the convex plate 145, it experiences a force 150 (axial force) from the center to the left and right due to the baffle structure, causing the powder to move towards the sides of the convex surface 148 of the convex plate 145. When the powder passes through the concave plate 146, it experiences a force 150 (axial force) from the left and right to the center due to the baffle structure, causing the powder to move towards the center of the concave surface 149 of the concave plate 146. Thus, during continuous rotary fluidization, the powder moves back and forth inside the gripper's rotating cylinder, i.e., from both ends. This avoids the problem of powder accumulation on one side during loading and allows the powder to move back and forth during rotary fluidization, resulting in more thorough rotary fluidization.

[0065] The straight-tooth plate is constructed by cutting toothed structures of varying heights along the upper edge of the baffle. For example, each tooth is 2mm wide, spaced 2mm apart, and varies in height to form long protruding teeth 151 and short protruding teeth 152. The varying heights of the spaced teeth create a wavy trajectory during rotation, which, combined with the spacing of the teeth, better disperses the powder, breaking it up as much as possible during rotation and preventing powder agglomeration. Ultimately, this results in better rotational fluidization of the powder, thus positively impacting rotational fluidized bed deposition (GFLD).

[0066] In some embodiments, the rotary clamp 100 comprises four parts, which are fastened together by screws of different specifications. The first part is the first end cover 110, which can be referred to as the left end cover of the clamp. The left end of the rotating shaft of the first end cover 110 has two fan-shaped blocks, which together with the rotating shaft are called clamp blocks 111, used to cooperate with the connector blocks 210 of the connector 200 to transmit torque. The first end cover 110 is provided with a first slot 113, which allows the precursor to diffuse into and out of the interior of the clamp cylinder 130, i.e., the inner cavity 131, through the first slot 113. The second part is the clamp cylinder 130. The clamp cylinder 130 is specially designed with eight square slots on the left and right as baffle mounting slots 133 to facilitate the installation of the baffle 140. The clamp cylinder 130 is provided with four threaded holes on each side to facilitate the installation of the first end cover 110 and the second end cover 120. The first end cover 110 and the second end cover 120 can also be referred to as the left and right end covers. During the process, the left and right end caps are provided with protrusions, including a first protrusion 112 and a second protrusion 122, which cooperate with the grooves of the gripper cylinder 130 to press the metal filter screen. The purpose of setting the metal filter screen is to prevent powder from leaking out of the gripper cylinder 130, and at the same time facilitate the diffusion of the precursor into the gripper cylinder 130. The third part is the second end cap 120, which can be called the right end cap of the gripper. Its shaft connection 121 serves as a rotating shaft, which only provides support and does not transmit torque. The fourth part is a detachable baffle 140. As an example, four baffles 140 can be installed. The baffles 140 can prevent powder from accumulating on the inner wall 132 of the rotating gripper 100, so that the powder is more evenly dispersed, improves the rotational fluidization state of the powder, and different numbers of baffles 140 can be set according to process conditions and requirements. For example, a standard preset number of baffles 140, such as four baffles 140, is provided, and different numbers of baffles 140 can be installed and removed according to process conditions and requirements. With this design, the number of removable baffles 140 inside the rotary clamp 100 can be increased according to the needs of the process design. By increasing the baffle mounting slots 133 of the clamp rotating cylinder 130, such as square mounting slots, the maximum number of baffles 140 that can be installed can be increased.

[0067] The connector 200 is used in conjunction with the rotary clamp 100. The connector 200 comprises two parts. The first part is the connector stop 210, which has a groove on one side forming an assembly cavity 213. This cavity mates with the clamping stop 111 of the first end cover 110, for example, a fan-shaped stop, to transmit torque. The other side of the connector stop 210 has a connecting end 212, which serves as a rotating shaft and mates with a drive structure, such as a double diaphragm coupling inside a vacuum chamber, to transmit torque. The second part is the connector end cover 220, which can be called a coupling end cover. The irregular hole 222 in the middle of the connector end cover 220 can be a combination of a rectangular hole and an arc-shaped hole, such as... Figure 14As shown, the shape can also be a combination of a circular hole and a fan-shaped hole, or a combination of an elliptical hole and an arc-shaped hole, etc. The irregular hole 222 can pass through the clamping block 111 of the first end cover 110, such as the rotating shaft fan-shaped block, that is, the clamping block 111 can pass through the irregular hole 222. In this way, due to the misalignment of the clamping block 111 and the irregular hole 222 during rotation, the connector end cover 220 can play an axial limiting role for the entire rotating clamp 100. The connector block 210 and the connector end cover 220 are fastened together through two fixing holes 223, such as screws.

[0068] The following example illustrates the process. A stepper motor outside the cavity outputs torque at a set speed. The motor shaft is connected to the shaft of the magnetohydrodynamic (MHD) sealing device via a single diaphragm coupling. The MHD sealing device can transmit torque while maintaining the required vacuum level. The torque is transmitted to connector 200 through the MHD sealing device, which drives the rotary clamp 100 to rotate, ultimately achieving the rotary fluidization state of the powder.

[0069] In some embodiments, a powder atomic layer deposition apparatus includes the powder rotary holder assembly 300 described in any embodiment. Since the powder rotary holder assembly 300 described in any embodiment is used, the powder atomic layer deposition apparatus also possesses the beneficial technical effects of the powder rotary holder assembly 300, which will not be elaborated upon here.

[0070] It should be noted that other embodiments of this application also include a powder rotary clamp assembly and a powder atomic layer deposition apparatus formed by combining the technical features of the above embodiments.

[0071] The technical features of the embodiments described above can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered within the scope of this specification. The embodiments described above only illustrate several implementation methods of this application, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. A powder rotary clamp assembly (300), characterized in that, Includes a rotary clamp (100) and a connector (200); The rotary clamp (100) has an inner cavity (131) and a baffle (140) detachably protruding from the inner cavity (131), the inner cavity (131) being configured to carry powder for atomic layer deposition process; The rotary clamp (100) is also provided with a clamp stop (111) located outside the inner cavity (131). The connector (200) is configured to connect a drive structure, and the connector (200) has an assembly cavity (213) that is adapted to the shape of the clamp stop (111). The clamping stop (111) is detachably inserted into the assembly cavity (213) so that the torque of the connector (200) is transmitted to the rotary clamp (100) through the clamping stop (111).

2. The powder rotary clamp assembly (300) according to claim 1, characterized in that, The extension direction of the baffle (140) is parallel to the axis of the inner cavity (131).

3. The powder rotary clamp assembly (300) according to claim 2, characterized in that, The number of baffles (140) is at least two, and each baffle (140) is evenly distributed relative to the axis of the inner cavity (131).

4. The powder rotary clamp assembly (300) according to claim 3, characterized in that, The number of baffles (140) is three or four.

5. The powder rotary clamp assembly (300) according to claim 1, characterized in that, The connector (200) includes a connector stop (210) and a connector end cap (220) connected to each other. The connector stop (210) is configured as a connection drive structure, and the connector stop (210) is provided with the assembly cavity (213) that is adapted to the shape of the clamp stop (111). The connector end cap (220) is provided with a shaped hole (222), and the clamping block (111) passes through the shaped hole (222) and is detachably inserted into the assembly cavity (213).

6. The powder rotary clamp assembly (300) according to claim 5, characterized in that, The connector stop (210) includes a connected body (211) and a connecting end (212), the connecting end (212) being configured as a connection drive structure, the body (211) being located between the connecting end (212) and the connector end cap (220), and the body (211) having the assembly cavity (213); or, The connector end cap (220) is provided with a cover body (221), and the cover body (221) is provided with the irregular hole (222) and the fixing hole (223). The cover body (221) is screwed to the body (211) through the fixing hole (223).

7. The powder rotary clamp assembly (300) according to any one of claims 1 to 6, characterized in that, The rotary clamp (100) includes a first end cap (110), a second end cap (120), and a clamping cylinder (130). The gripper cylinder (130) is provided with the inner cavity (131), and the baffle (140) is detachably protruding from the inner wall (132) of the gripper cylinder (130). The first end cap (110) and the second end cap (120) are detachably connected to the two ends of the gripper drum (130), and the first end cap (110) is provided with the gripper stop (111).

8. The powder rotary clamp assembly (300) according to claim 7, characterized in that, The gripper cylinder (130) has a baffle mounting groove (133) on its inner wall (132), and the baffle (140) is partially embedded in the baffle mounting groove (133); or, The first end cap (110) and the second end cap (120) are respectively screwed onto the clamping drum (130); or, The baffle (140) is screwed into the baffle mounting groove (133).

9. The powder rotary clamp assembly (300) according to claim 7, characterized in that, The clamping drum (130) is provided with a first mounting groove (134) and a second mounting groove (135) at both ends. The first end cap (110) is provided with a first protrusion (112), which is embedded in the first mounting groove (134); The second end cap (120) is provided with a second protrusion (122), which is embedded in the second mounting groove (135); or, The first end cap (110) is provided with a first slot (113) communicating with the inner cavity (131); or, The second end cap (120) is provided with a second slot (123) communicating with the inner cavity (131); or, The powder rotary clamp assembly (300) also includes a first filter and a second filter; The first filter screen is disposed between the first end cap (110) and the clamping drum (130); The second filter screen is disposed between the gripper cylinder (130) and the second end cap (120).

10. A powder atomic layer deposition apparatus, characterized in that, Includes the powder rotary clamp assembly (300) as described in any one of claims 1 to 9.

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