Multi-degree-of-freedom vibration testing device for turbo molecular pump

Abstract

The invention relates to the technical field of molecular pump vibration detection, and discloses a turbo molecular pump multi-degree-of-freedom vibration testing device which comprises a testing vibration table, the bottom end of the testing vibration table is provided with a supporting seat, and the testing vibration table achieves multi-degree-of-freedom adjustment through the supporting seat; one ends of a plurality of vibration sensors are mounted on the to-be-tested molecular pump at equal intervals in the circumferential direction, and the other ends of the vibration sensors are connected with a test platform of the test vibration table; the multiple vibration isolation tables are distributed on one side of the test vibration table in the axial direction, an input shaft of the molecular pump to be tested is fixedly connected with one end of a corrugated pipe, and the other end of the corrugated pipe sequentially penetrates through the multiple vibration isolation tables to be connected with the output end of an external backing pump; and the vibration reduction piece is arranged on the vibration isolation table and is used for reducing the vibration transmitted to the molecular pump to be tested by the backing pump. According to the invention, the test accuracy is improved, the vibration condition of the molecular pump during installation at any angle can be measured, the vibration of the backing pump is effectively isolated, and the test error is reduced.

Description

Technical Field

[0001] This invention relates to the field of molecular pump vibration detection technology, and in particular to a multi-degree-of-freedom vibration testing device for turbomolecular pumps. Background Technology

[0002] A molecular pump is a vacuum-generating device. Its working principle involves the linear velocity of the impellers, which, through high-speed rotation, reaches the thermal motion speed of molecules. Gas, through momentum exchange with the impellers, gains directional velocity and exits the cavity. Magnetic levitation turbomolecular pumps are widely used in various industries due to their advantages such as being oil-free, wear-free, low-noise, and capable of installation at any angle. However, the complex shape of the impeller and the presence of numerous thin blades with low modal frequencies in molecular pumps can cause vibrations. These vibrations can lead to performance degradation, increased noise, and potentially affect the stable operation of the equipment. Therefore, vibration testing of molecular pumps to analyze their vibration spectrum and identify and suppress the causes of vibration is crucial. Current vibration testing devices use a single sensor to measure the vibration of molecular pumps, which suffers from low accuracy. They cannot measure the vibration of the molecular pump when installed at any angle, and the vibration of the backing pump may interfere with the test, a problem that existing devices do not effectively isolate.

[0003] Therefore, there is an urgent need for a multi-degree-of-freedom vibration testing device for turbomolecular pumps to solve the above problems. Summary of the Invention

[0004] The purpose of this invention is to provide a multi-degree-of-freedom vibration testing device for turbomolecular pumps to solve the problems existing in the prior art.

[0005] To achieve the above objectives, the present invention provides the following solution: The present invention provides a multi-degree-of-freedom vibration testing device for a turbomolecular pump, comprising:

[0006] The test vibration table has a support base installed at its bottom, and the test vibration table can be adjusted in multiple degrees of freedom through the support base;

[0007] A molecular pump under test, wherein a plurality of vibration sensors are installed at equal intervals along the circumference of the molecular pump under test, and the other end of the vibration sensors is connected to the test platform of the test vibration table.

[0008] Multiple vibration isolation platforms are distributed along the axial direction on one side of the test vibration platform. The input shaft of the molecular pump under test is fixedly connected to one end of a bellows, and the other end of the bellows passes through multiple vibration isolation platforms in sequence and is connected to the output end of an external pre-pump.

[0009] A vibration damping element is provided on the vibration isolation platform to reduce the vibration transmitted from the fore-amplifier to the molecular pump under test.

[0010] According to the present invention, a multi-degree-of-freedom vibration testing device for a turbomolecular pump is provided, wherein the support base includes a base plate, and a plurality of rotating pairs are fixedly connected to the top of the base plate along the circumferential direction. One end of a hydraulic rod is rotatably connected to the rotating pairs, and the telescopic end of the hydraulic rod is hinged to a top plate. The test vibration table is fixedly connected to the top of the top plate.

[0011] According to the present invention, a multi-degree-of-freedom vibration testing device for a turbomolecular pump is provided. The test vibration table includes a frame, and a plurality of spring platforms are fixedly connected to the inner wall of the frame along the circumferential direction. The bottom end of a spring is fixedly connected to the top of the spring platform, and a mounting plate is fixedly connected to the top of the spring. The molecular pump under test is mounted on the bottom end of the mounting plate through the vibration sensor.

[0012] According to the present invention, a multi-degree-of-freedom vibration testing device for a turbomolecular pump includes a vibration damping component comprising several counterweights, which are disposed on the vibration isolation platform.

[0013] According to the present invention, a multi-degree-of-freedom vibration testing device for a turbomolecular pump is provided, wherein a first semi-circular groove is provided at the top of the vibration isolation table, a cover plate is fixedly connected to the top of the vibration isolation table, a second semi-circular groove is provided at the bottom of the cover plate, the first semi-circular groove and the second semi-circular groove are spliced ​​together to form a circular groove, and the corrugated pipe is located in the circular groove and is adapted to the circular groove.

[0014] According to the present invention, a multi-degree-of-freedom vibration testing device for a turbomolecular pump is provided, wherein the number of vibration sensors is at least eight.

[0015] According to the present invention, a multi-degree-of-freedom vibration testing device for a turbomolecular pump is provided, wherein the vibration sensor has threaded holes at both the top and bottom, and the threaded holes are connected to the mounting plate and the flange of the molecular pump under test by loosening studs and nuts.

[0016] According to the present invention, a multi-degree-of-freedom vibration testing device for a turbomolecular pump is provided, wherein the spring has a frustum-shaped structure.

[0017] According to the present invention, a multi-degree-of-freedom vibration testing device for a turbomolecular pump is provided, wherein the number of hydraulic rods is three.

[0018] According to the present invention, a multi-degree-of-freedom vibration testing device for a turbomolecular pump is provided, wherein both the frame and the vibration isolation platform are provided with a number of reinforcing ribs.

[0019] Compared with the prior art, the present invention has the following advantages and technical effects:

[0020] This invention provides a multi-degree-of-freedom vibration testing device for a turbomolecular pump. In use, the molecular pump under test, equipped with several vibration sensors, is mounted on a test vibration table. The vibration sensors improve testing accuracy. A support base allows for multi-angle adjustment of the molecular pump. The molecular pump is connected to an external backing pump via a bellows mounted on a vibration isolation platform. Vibration damping components reduce the vibration transmitted from the backing pump to the molecular pump under test. This invention improves testing accuracy, enabling the measurement of vibration of the molecular pump at any installation angle, effectively isolating the vibration of the backing pump, and reducing testing errors. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly described below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 This is a schematic diagram of the support structure of the present invention;

[0024] Figure 3 This is a schematic diagram of the molecular pump structure to be tested in this invention;

[0025] The components include: 1. Test vibration table; 11. Frame; 12. Spring table; 13. Spring; 14. Mounting plate; 2. Support base; 21. Base plate; 22. Rotary joint; 23. Hydraulic rod; 24. Top plate; 3. Molecular pump under test; 4. Vibration sensor; 5. Bellows; 6. Backing pump; 7. Vibration isolation table; 8. Counterweight; 9. Cover plate. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0028] Reference Figures 1-3 This invention provides a multi-degree-of-freedom vibration testing device for a turbomolecular pump, comprising:

[0029] The test vibration table 1 has a support base 2 installed at its bottom, and the test vibration table 1 can be adjusted in multiple degrees of freedom through the support base 2.

[0030] The molecular pump under test 3 has several vibration sensors 4 installed at equal intervals along the circumference of the molecular pump under test 3. The other end of the vibration sensors 4 is connected to the test platform of the test vibration table 1.

[0031] Multiple vibration isolation platforms 7 are distributed along the axial direction on one side of the test vibration table 1. The input shaft of the molecular pump 3 under test is fixedly connected to one end of the bellows 5. The other end of the bellows 5 passes through multiple vibration isolation platforms 7 in sequence and is connected to the output end of the external pre-pump 6.

[0032] Vibration damping components, mounted on the vibration isolation platform 7, are used to reduce the vibration transmitted from the forestage pump 6 to the molecular pump 3 under test.

[0033] In one embodiment of the present invention, during use, the molecular pump 3 to be tested, equipped with several vibration sensors 4, is installed on the test vibration table 1. The test accuracy is improved by the several vibration sensors 4. The molecular pump 3 to be tested is adjusted at multiple angles by the set support seat 2. The molecular pump 3 to be tested is connected to the external pre-pump 6 through the bellows 5. The bellows 5 is installed on the vibration isolation table 7. The vibration transmitted to the molecular pump 3 to be tested by the set vibration damping component is reduced.

[0034] As an optional implementation, the support base 2 includes a base plate 21, and a plurality of rotating joints 22 are fixedly connected to the top of the base plate 21 along the circumferential direction. One end of a hydraulic rod 23 is rotatably connected to the rotating joint 22, and the telescopic end of the hydraulic rod 23 is hinged to a top plate 24. The test vibration table 1 is fixedly connected to the top of the top plate 24.

[0035] In one embodiment of the present invention, the hydraulic rod 23 and the drive motor are placed on the same power transmission box, which is connected to the base through a rotating joint 22. The lifting and lowering of the hydraulic rod 23 realizes the multi-angle adjustment of the top plate 24, thereby driving the test vibration table 1 to perform multi-angle adjustment.

[0036] As an optional implementation, the test vibration table 1 includes a frame 11, and a plurality of spring platforms 12 are fixedly connected to the inner wall of the frame 11 along the circumferential direction. The bottom end of a spring 13 is fixedly connected to the top of the spring platform 12, and a mounting plate 14 is fixedly connected to the top of the spring 13. The molecular pump 3 to be tested is mounted on the bottom end of the mounting plate 14 through a vibration sensor 4.

[0037] In one embodiment of the present invention, four spring stands 12 are provided at a distance of approximately one-quarter of the total length from the top of the test vibration table 1. The four spring stands 12 are respectively welded to the four vertical beams of the test vibration table 1. Four springs 13 are placed on the four spring stands 12, and their upper ends are welded together with the connecting plate. The connecting plate has threaded holes and is connected to the mounting plate 14 by bolts and nuts.

[0038] As an optional implementation, the vibration damping component includes several counterweights 8, which are disposed on the vibration isolation table 7.

[0039] In one embodiment of the present invention, a multi-layer counterweight platform is provided on the vibration isolation table 7. The weight of the vibration isolation table 7 is increased by adding counterweight blocks 8 to the counterweight platform, thereby isolating the interference of the fore-pump 6 on the molecular pump 3 under test.

[0040] As an optional implementation, the top of the vibration isolation table 7 is provided with a first semi-circular groove, and a cover plate 9 is fixedly connected to the top of the vibration isolation table 7. The bottom of the cover plate 9 is provided with a second semi-circular groove. The first semi-circular groove and the second semi-circular groove are spliced ​​together to form a circular groove. The corrugated pipe 5 is located in the circular groove and is adapted to the circular groove.

[0041] In one embodiment of the present invention, the bellows 5 is pressed into the circular groove by the cover plate 9 to ensure its stability.

[0042] As an optional implementation, the number of vibration sensors 4 is at least eight.

[0043] In one embodiment of the present invention, the number of vibration sensors 4 is at least eight, which are evenly distributed circumferentially to measure vibration values ​​in four positive directions and four negative directions respectively. More sensors can also be set without interference.

[0044] As an optional implementation, the vibration sensor 4 has threaded holes at both the top and bottom. The threaded holes are connected to the mounting plate 14 and the flange of the molecular pump 3 under test by loosening the studs and nuts.

[0045] In one embodiment of the present invention, a stable connection is ensured by using anti-loosening studs and nuts.

[0046] As an alternative implementation, the spring 13 has a frustum-shaped structure.

[0047] In one embodiment of the present invention, the spring 13 has a frustum-shaped structure, with its bottom end fixed on the spring platform 12 and its top end fixedly connected to a connecting plate, which is fixedly connected to the mounting plate 14.

[0048] As an optional implementation, the number of hydraulic rods 23 is three.

[0049] In one embodiment of the present invention, the test vibration table 1 is adjusted in three degrees of freedom by three hydraulic rods 23, so as to realize the rotation of the test vibration table 1 in three-dimensional space, thereby simulating the installation of the molecular pump 3 under test at any angle.

[0050] As an optional implementation, both the frame 11 and the vibration isolation table 7 are provided with several reinforcing ribs.

[0051] In one embodiment of the present invention, the stability of the structure is increased by setting reinforcing ribs, thereby enhancing the stability during the testing process.

[0052] In the description of this invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this invention, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0053] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1. A multi-degree-of-freedom vibration testing device for a turbomolecular pump, characterized in that, include: The test vibration table (1) has a support base (2) installed at its bottom end. The test vibration table (1) can be adjusted in multiple degrees of freedom through the support base (2). The molecular pump to be tested (3) has a plurality of vibration sensors (4) installed at equal intervals along the circumference at one end, and the other end of the vibration sensors (4) is connected to the test platform of the test vibration table (1). Multiple vibration isolation tables (7) are distributed along the axial direction on one side of the test vibration table (1). The input shaft of the molecular pump (3) to be tested is fixedly connected to one end of a bellows (5). The other end of the bellows (5) passes through multiple vibration isolation tables (7) and is connected to the output end of an external pre-pump (6). A vibration damper is provided on the vibration isolation table (7) to reduce the vibration transmitted from the fore-pump (6) to the molecular pump (3) under test.

2. The multi-degree-of-freedom vibration testing device for a turbomolecular pump according to claim 1, characterized in that: The support base (2) includes a base plate (21), and a plurality of rotating joints (22) are fixedly connected to the top of the base plate (21) along the circumferential direction. One end of a hydraulic rod (23) is rotatably connected to the rotating joint (22). The telescopic end of the hydraulic rod (23) is hinged to a top plate (24). The test vibration table (1) is fixedly connected to the top of the top plate (24).

3. The multi-degree-of-freedom vibration testing device for a turbomolecular pump according to claim 1, characterized in that: The test vibration table (1) includes a frame (11), and a plurality of spring platforms (12) are fixedly connected to the inner wall of the frame (11) along the circumference. The bottom end of a spring (13) is fixedly connected to the top of the spring platform (12), and a mounting plate (14) is fixedly connected to the top of the spring (13). The molecular pump (3) to be tested is mounted on the bottom end of the mounting plate (14) through the vibration sensor (4).

4. The multi-degree-of-freedom vibration testing device for a turbomolecular pump according to claim 1, characterized in that: The vibration damping component includes several counterweights (8), which are disposed on the vibration isolation table (7).

5. The multi-degree-of-freedom vibration testing device for a turbomolecular pump according to claim 1, characterized in that: The vibration isolation table (7) has a first semi-circular groove at its top end, and a cover plate (9) is fixedly connected to the top end of the vibration isolation table (7). The cover plate (9) has a second semi-circular groove at its bottom end. The first semi-circular groove and the second semi-circular groove are spliced ​​together to form a circular groove. The corrugated pipe (5) is located in the circular groove and is adapted to the circular groove.

6. The multi-degree-of-freedom vibration testing device for a turbomolecular pump according to claim 1, characterized in that: The number of vibration sensors (4) is at least eight.

7. The multi-degree-of-freedom vibration testing device for a turbomolecular pump according to claim 3, characterized in that: The vibration sensor (4) has threaded holes at both the top and bottom. The threaded holes are connected to the mounting plate (14) and the flange of the molecular pump (3) by loosening the stud and nut.

8. The multi-degree-of-freedom vibration testing device for a turbomolecular pump according to claim 3, characterized in that: The spring (13) has a frustum-shaped structure.

9. The multi-degree-of-freedom vibration testing device for a turbomolecular pump according to claim 2, characterized in that: The number of hydraulic rods (23) is three.

10. A multi-degree-of-freedom vibration testing device for a turbomolecular pump according to claim 3, characterized in that: Both the frame (11) and the vibration isolation table (7) are provided with several reinforcing ribs.

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