Damping system, method and semiconductor manufacturing apparatus

Abstract

The application relates to a damping system, a method and a semiconductor manufacturing device, the system comprising a bottom plate and a top plate arranged in relative spacing and a damping support assembly arranged between the bottom plate and the top plate; the damping support assembly comprising a plurality of support legs, a plurality of slave cabinets, a master cabinet, a plurality of valves and a plurality of actuators; the plurality of support legs are used for supporting the top plate; the plurality of slave cabinets are used for respectively acquiring vibration data of the plurality of support legs; the master cabinet is used for integrating the vibration data of the plurality of support legs and determining overall vibration data of the damping system, and sending the overall vibration data to each slave cabinet; each slave cabinet is further used for determining a damping correction instruction of each support leg according to the overall vibration data and the vibration data; the plurality of actuators are used for damping adjustment of each support leg according to the damping correction instruction; for any large motion platform, any single point can be damped according to requirements.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of vibration reduction technology, in particular to a vibration reduction system, method and semiconductor manufacturing equipment. BACKGROUND

[0002] In the fields of high-precision manufacturing, aerospace and precision instruments, due to the extreme requirements of equipment precision, stability and safety in these industries, any slight vibration may lead to product quality decline, measurement error or operation risk, thus higher and stricter demands are put forward for vibration control systems. To cope with these challenges, high-performance active vibration control systems emerge as the times require, which actively monitor and real-time offset vibration interference through integrating advanced sensors, control algorithms and actuators, thereby significantly improving the overall reliability, efficiency and adaptability of the system.

[0003] However, high-performance active vibration control systems are mainly designed for miniaturized equipment, and more focused on scenarios where a single controller processes signals and a small number of vibration actuators output, thus unable to effectively meet the requirements of complex applications such as large motion table, high load bearing and large output demand.

[0004] Therefore, the prior art has the problem of being unable to better cope with the vibration reduction requirements of large motion tables. SUMMARY

[0005] Embodiments of the present application provide a vibration reduction system, method and semiconductor manufacturing equipment, aiming to solve the problem of the prior art that cannot better cope with the vibration reduction requirements of large motion tables.

[0006] To solve the above technical problems, the embodiments of the present application provide the following technical solutions:

[0007] A vibration reduction system, comprising a bottom plate and a top plate arranged in relative spacing, and a vibration reduction support assembly arranged between the bottom plate and the top plate;

[0008] The vibration reduction support assembly comprises a plurality of support legs, a plurality of slave boxes, a master box, a plurality of valves and a plurality of actuators, each support leg is fixedly connected with the top plate, and each support leg is connected with one slave box, one valve and one actuator respectively, the master box is signal connected with the plurality of slave boxes, and each actuator is signal connected with the corresponding slave box;

[0009] The plurality of support legs are used for supporting the top plate;

[0010] The plurality of slave boxes are used for acquiring vibration data of the plurality of support legs respectively;

[0011] The host cabinet is configured to integrate vibration data of the plurality of support legs and determine overall vibration data of the vibration reduction system, and send the overall vibration data to each slave cabinet;

[0012] Each slave cabinet is further configured to determine vibration reduction correction instructions for each support leg according to the overall vibration data and the vibration data;

[0013] The plurality of actuators are configured to adjust the vibration reduction of each support leg according to the vibration reduction correction instructions.

[0014] Optionally, the host cabinet comprises a first-level control cabinet and a plurality of second-level control cabinets;

[0015] Each second-level control cabinet is connected to a preset number of slave cabinets, and each second-level control cabinet is configured to obtain average vibration data of the corresponding preset number of slave cabinets;

[0016] The first-level control cabinet is signal-connected to the plurality of second-level control cabinets, and is configured to calculate the overall vibration data according to a plurality of average vibration data of the plurality of second-level control cabinets.

[0017] Optionally, the actuators comprise at least one of an external voice coil motor, a vibration reduction voice coil motor, and a valve regulator; and the vibration reduction correction instructions further comprise at least one of external voice coil correction instructions, vibration reduction voice coil correction instructions, and valve opening degree adjustment instructions.

[0018] The host cabinet is further configured to obtain a vibration data change value of each support leg, and when the vibration data change value is greater than a preset change threshold, output the external voice coil correction instructions to the external voice coil motor, and / or output the vibration reduction voice coil correction instructions to the vibration reduction voice coil motor, and / or output the valve opening degree adjustment instructions to the valve regulator.

[0019] Optionally, the actuators comprise an external voice coil motor and a vibration reduction voice coil motor; and the vibration reduction correction instructions further comprise external voice coil correction instructions and vibration reduction voice coil correction instructions.

[0020] The host cabinet further comprises a current displacement characteristic acquisition module, which is configured to obtain a current displacement characteristic curve of the external voice coil motor in real time, and compare the current displacement characteristic curve with a preset motor rated load curve and a displacement threshold; when the current displacement characteristic curve exceeds the preset motor rated load curve and / or exceeds the displacement threshold, output the vibration reduction voice coil correction instructions to the vibration reduction voice coil motor; otherwise, output the external voice coil correction instructions to the external voice coil motor.

[0021] Optionally, the damping system further comprises an environment data acquisition module connected with the host box, configured to acquire environment vibration data of the damping system.

[0022] The host box is further configured to determine the overall vibration data according to the environment vibration data and the vibration data of the plurality of support legs.

[0023] Optionally, the slave box comprises a target acquisition module and a correction algorithm module.

[0024] The target acquisition module is configured to determine a target vibration of the slave box according to the overall vibration data.

[0025] The correction algorithm module is configured to perform difference calculation on the target vibration and vibration data of the slave box, determine a vibration offset of each support leg, and generate the damping correction instruction based on the vibration offset.

[0026] Optionally, the target vibration comprises at least one of the overall vibration data itself, input target vibration data, and target data obtained by adjusting the overall vibration data.

[0027] The step of obtaining the target data by adjusting the overall vibration data comprises:

[0028] Performing collaborative calculation on the overall vibration data and the vibration data of each slave box by a proportional-integral-derivative adjustment algorithm to determine that a vibration data value corresponding to a minimum vibration correction amount is the target data.

[0029] Optionally, the host box and the plurality of slave boxes are connected by an Ethernet switch for optical communication.

[0030] The Ethernet switch comprises a fiber switch or an optical-electric hybrid switch.

[0031] A damping method comprises:

[0032] Acquiring vibration data of a plurality of support legs;

[0033] Integrating the vibration data of the plurality of support legs to determine overall vibration data of a damping system;

[0034] Determining a damping correction instruction for each support leg according to the overall vibration data and the vibration data of each support leg;

[0035] Adjusting each support leg according to the damping correction instruction.

[0036] A semiconductor manufacturing equipment comprises a memory and a processor, the memory stores a computer program, and the computer program is executed by the processor to make the processor execute the following steps:

[0037] Obtain vibration data of a plurality of support legs;

[0038] Integrate the vibration data of the plurality of support legs to determine overall vibration data of a vibration reduction system;

[0039] Determine vibration reduction correction instructions for each support leg according to the overall vibration data and the vibration data of each support leg;

[0040] Adjust the vibration reduction of each support leg according to the vibration reduction correction instructions.

[0041] The beneficial effects of the present application are: by configuring independent slave boxes, valves and actuators for each support leg, since each support leg corresponds to a point position of the top plate, real-time detection and independent adjustment of single-point vibration (vibration change) of the top plate are realized, avoiding the influence of single-point failure on the overall system, improving the pertinence of local vibration reduction, and then, for any large motion platform, vibration reduction can be performed on any single point as needed; at the same time, since the master box integrates the vibration data of all support legs to generate overall vibration data, feedback of the vibration data to each slave box can realize adjustment instructions of each support leg while taking into account the local dynamic and overall vibration state of the system, avoiding overall instability caused by isolated adjustment, realizing the unity of local independent control and global collaborative optimization, and improving the overall stability of the vibration reduction system. BRIEF DESCRIPTION OF DRAWINGS

[0042] The technical solutions and other beneficial effects of the present application will become apparent through the following detailed description of specific embodiments of the present application in conjunction with the accompanying drawings.

[0043] Figure 1 is a perspective structural schematic diagram of an embodiment of the vibration reduction system provided by the present application;

[0044] Figure 2 is a front structural schematic diagram of an embodiment of the vibration reduction system provided by the present application;

[0045] Figure 3 is a flow schematic diagram of an embodiment of the vibration reduction method provided by the present application. DETAILED DESCRIPTION

[0046] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0047] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0048] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0049] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0050] The following disclosure provides many different embodiments or examples for implementing different structures of the application. For the purpose of simplicity, the elements and settings of the specific examples in the following description will be described. Of course, they are only examples and the purpose is not to limit the application. In addition, the application can repeat the reference numerals and / or reference letters in different examples, and such repetition is for the purpose of simplification and clarity, which does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the application provides examples of various specific processes and materials, but those skilled in the art can realize the application of other processes and / or the use of other materials.

[0051] The following will be described in detail in conjunction with specific embodiments. It should be noted that the sequence of the following embodiments is not limited to the preferred order of the embodiments.

[0052] Please refer to Figures 1 to 2 , Figure 1 is a perspective structural schematic diagram of an embodiment of the vibration reduction system provided by the application, Figure 2 is a front structural schematic diagram of an embodiment of the vibration reduction system provided by the application. As shown in Figures 1 to 2 , the vibration reduction system comprises a bottom plate 10 and a top plate 20 arranged in relative spacing, and a vibration reduction support assembly 30 arranged between the bottom plate 10 and the top plate 20; the vibration reduction support assembly 30 comprises a plurality of support legs 310, a plurality of slave boxes 320, a master box (not shown), a plurality of valves 330 and a plurality of actuators 340, each support leg 310 is fixedly connected with the top plate 20, and each support leg 310 is connected with one slave box 320, one valve 330 and one actuator 340 respectively, the master box is signal connected with the plurality of slave boxes 320, and each actuator 340 is signal connected with the corresponding slave box 320; the plurality of support legs 310 are used to support the top plate 20; the plurality of slave boxes 320 are used to acquire vibration data of the plurality of support legs 310 respectively; the master box is used to integrate the vibration data of the plurality of support legs 310 and determine overall vibration data of the vibration reduction system, and send the overall vibration data to each slave box 320; each slave box 320 is further used to determine a vibration reduction correction instruction of each support leg 310 according to the overall vibration data and the vibration data; the plurality of actuators 340 are used to adjust each support leg 310 according to the vibration reduction correction instruction.

[0053] It should be noted that the support leg 310 can be a hydraulic cylinder, an air cylinder or an elastic support column, etc. having telescopic performance, each support leg 310 is fixedly connected with the top plate 20, and its specific form is not limited to the structure shown in the figure, as long as it can realize the support and height adjustment of the top plate 20.

[0054] The slave box 320 can be installed on the side or bottom of the support leg 310, which is convenient for real-time acquisition of dynamic data in the movement process of the support leg 310.

[0055] The master box communicates with the slave boxes 320 through wired or wireless mode to realize real-time control and collaborative control of the overall state of the vibration reduction system.

[0056] The opening adjustment of each valve 330 can change the internal pressure or flow of the support leg 310, so as to dynamically adjust the stiffness and damping characteristics of the support leg 310 to adapt to the change of external excitation. That is, by adjusting the gate opening of the valve 330, the internal pressure or flow of the support leg 310 can be precisely controlled, and the mechanical properties of the support leg 310 can be adjusted to achieve the purpose of optimizing the vibration reduction effect.

[0057] The actuator 340 is an electric actuator 340 or a hydraulic actuator 340, which has fast response capability and can complete the valve 330 gate opening adjustment within milliseconds, so as to realize real-time control of the vibration reduction system.

[0058] The vibration data specifically includes one or more of acceleration, speed, displacement data, which is not limited here.

[0059] The overall vibration data is obtained by comprehensively analyzing and calculating the vibration data of each support leg 310, which reflects the motion state and dynamic response characteristics of the overall vibration reduction system.

[0060] In this embodiment, by configuring independent slave boxes 320, valves 330 and actuators 340 for each support leg 310, since each support leg 310 corresponds to a point position of the top plate 20, real-time detection and independent adjustment of single-point vibration change of the top plate 20 are realized, avoiding the influence of single-point failure on the overall system and improving the pertinence of local vibration reduction. Therefore, for any large motion platform, any single point can be damped as needed; at the same time, since the master box integrates the vibration data of all support legs 310 to generate overall vibration data, and feeds back the overall vibration data to each slave box 320, the adjustment instructions of each support leg 310 can take into account the local dynamics and overall vibration state of the system at the same time, avoiding overall instability caused by isolated adjustment, realizing the unity of local independent control and global collaborative optimization, and improving the overall stability of the vibration reduction system.

[0061] Further, for complex application scenarios such as large motion table, high bearing load and large power demand, the number of slave chassis 320 can include multiple, and the computing capacity of the master chassis is limited, especially the data of multiple slave chassis 320 as peer data can cause data over-coupling, therefore, the master chassis is set to include a first-level control chassis and multiple second-level control chassis; wherein each second-level control chassis connects a preset number of one or more slave chassis 320, and each second-level control chassis is used to obtain the average vibration data of the preset number of multiple slave chassis 320; the first-level control chassis is respectively connected with multiple second-level control chassis signals, and is used to determine the overall vibration data according to the multiple average vibration data of multiple second-level control chassis.

[0062] It should be noted that the master chassis adopts a hierarchical structure, and since the second-level control chassis locally processes (calculates the average vibration data) the data of the preset number of slave chassis 320 connected thereto, and then uploads the simplified average data to the first-level control chassis. Compared with directly processing all raw data by the first-level control chassis, the data processing amount of the first-level control chassis is greatly reduced (from “N raw data” to “M average vibration data”, generally N >> M), the computing load of the first-level control chassis is reduced, the overall data processing is more efficient, and the response speed is faster.

[0063] In addition, the above hierarchical structure also has good scalability. When the size of the vibration reduction system is expanded and the number of slave chassis 320 is increased, only the number of second-level control chassis needs to be increased accordingly, without the need for large-scale upgrade or reconstruction of the first-level control chassis, thereby reducing the maintenance cost and technical difficulty of the system. At the same time, by decentralizing the data processing task to each second-level control chassis, not only the overall response efficiency of the vibration reduction system is improved, but also the fault tolerance of the vibration reduction system is enhanced. Even if a second-level control chassis fails, the rest can continue to operate, ensuring the continuous and stable operation of the vibration reduction system under complex working conditions.

[0064] In summary, through hierarchical averaging processing, the overall vibration data integrates the average motion state of each group, avoiding the redundant interference of raw data while retaining the motion characteristics of each region, so that the first level can more accurately judge the overall vibration trend of the system, improving the adaptability and control accuracy of the vibration reduction system to complex dynamic vibration scenarios.

[0065] Further, generally the vibration direction of the vibration reduction system is consistent, therefore, in order to improve the feedback speed of the vibration reduction system, the second-level control chassis further includes a vibration compensation module for compensating and correcting the vibration data of the multiple slave chassis 320 according to the average vibration data of the preset number of multiple slave chassis 320.

[0066] It should be noted that the vibration compensation module takes the "average vibration data of multiple slave boxes 320" as the reference, which can effectively weaken the vibration data of a single slave box 320 due to hardware differences (such as sensor accuracy, transmission mechanism wear), environmental interference (such as temperature, vibration), or individual errors (such as initial calibration deviation), so that the actual running parameters of each slave box 320 are closer to the unified standard required by overall cooperation, reducing the influence of individual differences on the overall action of the system. Through compensation correction based on average vibration data, vibration data deviating from a reasonable range can be corrected, making the feedback data of each slave box 320 closer to the actual physical motion state, providing more reliable decision basis for the upper control logic, and reducing the deviation of control instructions caused by data distortion.

[0067] In a specific embodiment, in the case of strong local area vibration interference, the second level control box can respond quickly based on its own data without waiting for the global decision of the first level control box, thereby improving the real-time performance and robustness of the entire vibration reduction system.

[0068] In summary, in the embodiment, the vibration compensation module directly completes the compensation correction of the vibration data, so that the first level control box can better focus on overall task planning (such as trajectory planning, beat control).

[0069] In a specific embodiment, the actuator 340 includes at least one of an external voice coil motor, a vibration reduction voice coil motor, and a valve regulator; the vibration reduction correction instruction further includes at least one of an external voice coil correction instruction, a vibration reduction voice coil correction instruction, and a valve opening degree adjustment instruction; the master box is further configured to obtain a vibration data change value of each support leg 310, and when the vibration data change value is greater than a preset change threshold, output the external voice coil correction instruction to the external voice coil motor, and / or output the vibration reduction voice coil correction instruction to the vibration reduction voice coil motor, and / or output the valve opening degree adjustment instruction to the valve regulator.

[0070] It should be noted that the actuator 340 is a device that converts input energy (such as electrical energy, hydraulic energy, pneumatic energy, etc.) into mechanical motion or physical effect, and its core function is to drive mechanical components to complete specific actions according to the instructions of the control system.

[0071] The voice coil motor (VCM) is composed of a permanent magnet, a coil (voice coil), and a spring guide mechanism, and is a special direct-drive motor based on electromagnetic principle, named after its working principle similar to the voice coil structure in a loudspeaker.

[0072] The vibration damping voice coil motor is a kind of active vibration control device based on the principle of voice coil motor, and the core function thereof is to dynamically offset external vibration interference by generating reverse force or motion in real time, thereby improving the stability of the precision equipment.

[0073] Correspondingly, the host box compares the vibration data change value with the preset threshold value in real time, and since the preset threshold value represents the sensitivity boundary of the vibration damping system to vibration interference, when the change value exceeds the boundary, the system determines that the current disturbance belongs to a large amplitude vibration scene requiring rapid response, at which time the external voice coil motor is enabled for dynamic compensation in a large range and high thrust to rapidly suppress the vibration amplitude; when the change value does not exceed the preset threshold value, it is determined to be a steady state or a small amplitude disturbance, and the vibration damping voice coil motor is enabled for fine adjustment to achieve high-precision vibration suppression. Through this kind of hierarchical control strategy, the strength level of the vibration disturbance is automatically judged, and then the corresponding correction instruction is output, so as to automatically match the optimal correction mode according to the actual working condition, thereby improving the real-time performance, accuracy and automation level of the vibration damping control.

[0074] Further, although the external voice coil motor and the vibration damping voice coil motor belong to the same voice coil motor technology system, their control accuracies are different, the external voice coil motor is more suitable for processing scenes with large vibration data change values (such as fast dynamic disturbance and large amplitude vibration), and the fast response and large thrust / large stroke characteristics thereof are utilized to quickly suppress large vibration; the vibration damping voice coil motor is suitable for scenes with small change values (such as steady state disturbance and small vibration), and high-precision vibration damping is achieved through fine adjustment to ensure the smoothness of the system in the stable state.

[0075] In order to better exert the performance advantages of the two motors and ensure the synergistic effect of the two motors in vibration control, the actuator comprises the external voice coil motor and the vibration damping voice coil motor; the vibration damping correction instruction further comprises an external voice coil correction instruction and a vibration damping voice coil correction instruction; the host box further comprises a current displacement characteristic acquisition module, which is used for acquiring the current displacement characteristic curve of the external voice coil motor in real time, and comparing the current displacement characteristic curve with the preset motor rated load curve and the displacement threshold value; when the current displacement characteristic curve exceeds the preset motor rated load curve and / or exceeds the displacement threshold value, the vibration damping voice coil correction instruction is output to the vibration damping voice coil motor; otherwise, the external voice coil correction instruction is output to the external voice coil motor.

[0076] The current displacement characteristic curve is a dynamic curve describing the correspondence between the input current of the externally hung voice coil motor and the mechanical displacement amount, and can reflect the current-displacement correspondence of the motor under different working conditions, and represent whether the motor is running within the rated load range. For example, when the displacement amount increases, the current demand may rise nonlinearly, and if the curve exceeds the preset motor rated load curve, it indicates that the motor has been overloaded.

[0077] In this embodiment, by decomposing the actuator 340 into a vibration reduction voice coil motor and an externally hung voice coil motor, and corresponding to two correction instructions (externally hung voice coil correction instruction, vibration reduction voice coil correction instruction), the main machine box can adaptively select the appropriate voice coil motor for correction according to the change degree of the vibration data of the support leg 310, better exert the performance advantages of the two motors respectively, and improve the correction efficiency and accuracy; Specifically, by taking the current displacement characteristic curve of the externally hung voice coil motor as the basis, dynamic comparison is respectively made with the preset rated load curve and the displacement threshold, so as to accurately select the externally hung voice coil correction instruction or the vibration reduction voice coil correction instruction according to the actual working state (normal / overload) of the externally hung motor. Under normal working conditions, the externally hung voice coil correction instruction is used preferentially (adapted to the general vibration reduction demand, and the response is more direct and efficient); under abnormal working conditions, the vibration reduction voice coil correction instruction is switched to, so as to realize "on-demand adjustment", avoid invalid energy consumption, and improve the overall response efficiency of the system.

[0078] In order to improve the accuracy of the vibration data, the vibration reduction system further comprises an environment data acquisition module connected with the main machine box, for acquiring the environment vibration data of the vibration reduction system; the main machine box is further used for determining the overall vibration data according to the environment vibration data and the vibration data of the plurality of support legs 310.

[0079] It should be noted that the environment vibration data reflects the interference source information of the external environment to the vibration reduction system (such as ground vibration, external equipment vibration, etc.); the vibration data of the plurality of support legs 310 reflects the real-time response state of the vibration reduction system itself (such as the movement speed and displacement amount of the support leg 310); by fusing the external environment interference in the process of determining the overall vibration data, the influence of the environmental interference factors on the vibration data of the support leg 310 is effectively eliminated, so that the overall vibration data can more comprehensively and accurately reflect the real motion state of the vibration reduction system.

[0080] In summary, the embodiment realizes dynamic perception of the vibration characteristic changes (such as vibration frequency and amplitude fluctuation) of the external environment by real-time acquisition of the environment vibration data, and enhances the adaptability of the vibration reduction system to environmental changes.

[0081] Further, the slave cabinet 320 comprises a target acquisition module and a correction algorithm module; the target acquisition module is configured to determine the target vibration of the slave cabinet 320 according to the overall vibration data; and the correction algorithm module is configured to calculate the difference between the target vibration and the vibration data of the slave cabinet 320, determine the vibration offset of each support leg 310, and generate a vibration reduction correction instruction based on the vibration offset.

[0082] Specifically, the target vibration comprises at least one of the overall vibration data itself, the input target vibration data, and the target data calculated by adjusting the overall vibration data; and the step of calculating the target data by adjusting the overall vibration data comprises: cooperatively calculating the overall vibration data and the vibration data of each slave cabinet 320 by a proportional-integral-derivative (PID) adjustment algorithm, and determining the vibration data value corresponding to the minimum vibration correction amount as the target data.

[0083] It should be noted that determining the target vibration of the slave cabinet 320 according to the overall vibration data avoids the incoordination between the independently controlled slave cabinet 320 and the overall motion; directly obtaining the vibration offset of the support leg 310 by difference calculation and generating a correction instruction realizes real-time reduction of the deviation between the actual vibration and the target value, and improves the vibration control precision of the single slave cabinet 320.

[0084] The vibration correction amount is the sum of the absolute values of the vibration changes of all the slave cabinets 320, and determining the vibration data value corresponding to the minimum vibration correction amount as the target data can reduce the adjustment amplitude of the support leg 310, on the one hand, reduces unnecessary energy consumption, and on the other hand, avoids system overshoot or oscillation caused by large correction amount, so that the support leg 310 of the slave cabinet 320 can quickly converge to the target state, and the dynamic stability of the vibration reduction system is improved.

[0085] The target vibration is determined by cooperatively calculating the overall vibration data and the vibration data of each slave cabinet 320 by a proportional-integral-derivative (PID) adjustment algorithm, which realizes the coupling of the overall system state and the individual state of each slave cabinet 320, avoids the local vibration interference caused by ignoring the overall coordination of the system when the single slave cabinet 320 is independently controlled, ensures that the actions of the multiple slave cabinets 320 are consistent with the overall vibration reduction demand, and improves the collaborative effect of the system-level vibration reduction.

[0086] In summary, the embodiment can significantly improve the control precision, collaboration and stability of the vibration reduction system by accurately determining and dynamically correcting the target vibration of the slave cabinet 320.

[0087] Further, it should be emphasized that, in order to ensure the real-time performance of data interaction, the host cabinet and the multiple slave cabinets 320 are connected by an Ethernet switch for optical communication; the Ethernet switch comprises a fiber switch or an optical-electric hybrid switch.

[0088] After obtaining the damping system, the application further provides a damping method, please refer to Figure 3 , Figure 3 A flowchart of an embodiment of the damping method provided by the application is shown in the figure, which includes the following steps:

[0089] S301: Obtain vibration data of a plurality of support legs;

[0090] S302: Integrate the vibration data of the plurality of support legs to determine overall vibration data of the damping system;

[0091] S303: Determine a damping correction instruction for each support leg according to the overall vibration data and the vibration data of each support leg;

[0092] S304: Adjust the damping of each support leg according to the damping correction instruction.

[0093] It should be noted that the damping correction instruction is a specific control instruction for each support leg obtained by comparing and analyzing the overall expected damping state of the damping system (represented by the overall vibration data) and the current actual motion state of each support leg (represented by the vibration data of each support leg). The damping correction instruction can guide each support leg to adjust its speed and displacement to match the overall damping requirement of the system, and finally adjust the opening of the driving valve to adjust the motion state (such as speed and displacement) of the support leg, thereby achieving the overall damping effect.

[0094] In this embodiment, through the overall optimization and local adaptive correction driven by data, the coordination, accuracy and stability of the damping system are improved, and the control is more accurate and the operation is more reliable.

[0095] The application further provides a semiconductor manufacturing equipment including a memory and a processor, the memory stores a computer program, and the computer program is executed by the processor to make the processor execute the following steps: obtaining vibration data of a plurality of support legs; integrating the vibration data of the plurality of support legs to determine overall vibration data of a damping system; determining a damping correction instruction for each support leg according to the overall vibration data and the vibration data of each support leg; and adjusting the damping of each support leg according to the damping correction instruction.

[0096] It should be noted that the damping system provided by the embodiments of the application can achieve the beneficial effects of any damping system provided by the embodiments of the application due to the damping support assembly provided by the embodiments of the application. Details are shown in the previous embodiments and will not be repeated here.

[0097] The above only describes preferred embodiments of the present application and is not used to limit the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A vibration damping system, characterized by, The damping support assembly is arranged between the bottom plate and the top plate, and comprises a plurality of support legs, a plurality of slave cabinets, a master cabinet, a plurality of valves and a plurality of actuators, each support leg is fixedly connected with the top plate, and each support leg is connected with one slave cabinet, one valve and one actuator respectively, the master cabinet is signal connected with the plurality of slave cabinets, and each actuator is signal connected with the corresponding slave cabinet respectively. The plurality of support legs are used for supporting the top plate. The plurality of slave cabinets are used for acquiring vibration data of the plurality of support legs respectively. The master cabinet is used for integrating the vibration data of the plurality of support legs and determining overall vibration data of the damping system, and sending the overall vibration data to each slave cabinet. Each slave cabinet is further used for determining a damping correction instruction of each support leg according to the overall vibration data and the vibration data. The plurality of actuators are used for damping adjustment of each support leg according to the damping correction instruction. The master cabinet comprises a first-level control cabinet and a plurality of second-level control cabinets.

2. The vibration damping system of claim 1, wherein Each second-level control cabinet is connected with a preset number of slave cabinets, and is used for acquiring average vibration data of the preset number of slave cabinets. The first-level control cabinet is signal connected with the plurality of second-level control cabinets, and is used for calculating the overall vibration data according to a plurality of average vibration data of the plurality of second-level control cabinets. The actuator comprises at least one of an external voice coil motor, a damping voice coil motor and a valve regulator.

3. The vibration reduction system of claim 1, wherein, The master cabinet is further used for acquiring a vibration data change value of each support leg, and when the vibration data change value is greater than a preset change threshold, outputting the external voice coil correction instruction to the external voice coil motor, and / or, outputting the damping voice coil correction instruction to the damping voice coil motor, and / or, outputting the valve opening degree adjustment instruction to the valve regulator. The actuator comprises an external voice coil motor and a damping voice coil motor.

4. The vibration reduction system of claim 1, wherein, The master cabinet further comprises a current displacement characteristic acquisition module, which is used for acquiring a current displacement characteristic curve of the external voice coil motor in real time, and comparing the current displacement characteristic curve with a preset motor rated load curve and a displacement threshold value. The damping system further comprises an environment data acquisition module connected with the master cabinet, which is used for acquiring environment vibration data of the damping system.

5. The vibration reduction system of claim 1, wherein, The master cabinet is further used for determining the overall vibration data according to the environment vibration data and the vibration data of the plurality of support legs. ​ 6. The vibration reduction system of claim 1, wherein, The slave cabinet comprises a target acquisition module and a correction algorithm module. The target acquisition module is configured to determine the target vibration of the slave cabinet according to the overall vibration data. The correction algorithm module is configured to calculate the difference between the target vibration and the vibration data of the slave cabinet, determine the vibration offset of each support leg, and generate the vibration reduction correction instruction based on the vibration offset.

7. The vibration reduction system of claim 6, wherein, The target vibration comprises at least one of the overall vibration data itself, typed target vibration data, and target data calculated by adjusting the overall vibration data. The step of calculating the target data by adjusting the overall vibration data comprises: The proportional-integral-derivative adjustment algorithm is used to cooperatively calculate the overall vibration data and the vibration data of each slave cabinet, and the vibration data value corresponding to the minimum vibration correction amount is determined as the target data.

8. The vibration reduction system of claim 1, wherein, The master cabinet and the plurality of slave cabinets are connected through an Ethernet switch for optical communication. The Ethernet switch comprises a fiber switch or an optical-electric hybrid switch.

9. A vibration damping method characterized by, The application is applied to the vibration reduction system of any one of claims 1-8, comprising: obtaining the vibration data of the plurality of support legs; integrating the vibration data of the plurality of support legs to determine the overall vibration data of the vibration reduction system; determining the vibration reduction correction instruction of each support leg according to the overall vibration data and the vibration data of each support leg; adjusting the vibration of each support leg according to the vibration reduction correction instruction.

10. A semiconductor manufacturing apparatus, characterized by comprising: The application comprises the vibration reduction system of any one of claims 1-8, a memory, and a processor, wherein the memory stores a computer program, and the computer program is executed by the processor to make the processor perform the following steps: obtaining the vibration data of the plurality of support legs; integrating the vibration data of the plurality of support legs to determine the overall vibration data of the vibration reduction system; determining the vibration reduction correction instruction of each support leg according to the overall vibration data and the vibration data of each support leg; adjusting the vibration of each support leg according to the vibration reduction correction instruction.

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