Wafer cassette loading equipment, control methods and apparatus, storage media and program products

The wafer cassette loading equipment, which uses a lifting mechanism and sensors working in tandem, solves the problem of positional deviation during wafer loading, achieving efficient and accurate wafer calibration and equipment simplification, thereby improving production stability and automation.

CN120954998BActive Publication Date: 2026-05-26BEIJING HEQI PRECISION TECH LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING HEQI PRECISION TECH LTD
Filing Date
2025-07-03
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

Existing wafer loading equipment can easily cause wafers to overlap, be missing, tilt, or partially protrude due to mechanical vibration or positioning errors during loading, which can lead to wafer damage or breakage. Furthermore, existing sensing devices and pushing mechanisms are complex and space-consuming, increasing manufacturing costs and maintenance difficulties.

Method used

The system employs a lifting mechanism to drive the separation or closing of the base and housing, combined with a first sensor to detect the wafer position in real time. The system then corrects wafers that are not in place through an action mechanism, simplifying the equipment structure, reducing redundant components, and improving efficiency.

Benefits of technology

It enables precise detection and correction of wafer position, avoids wafer breakage, optimizes equipment layout, reduces space occupation and maintenance costs, and improves production efficiency and automation level.

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Abstract

This disclosure provides a wafer cassette loading apparatus, control method and device, storage medium, and program product. The wafer cassette includes a carrier, a base, and a housing. The carrier is supported on the base and carries multiple wafers stacked in a vertical direction. The carrier allows wafers to be placed onto the carrier in a first direction perpendicular to the vertical direction and allows wafers to be removed from the carrier in a second direction opposite to the first direction. The base can detachably close the bottom opening of the housing to form a cavity with the housing for receiving the carrier. The wafer cassette loading apparatus includes a first support, a second support, a lifting mechanism, and a first sensor. The first sensor is used to sense whether there are any unpositioned wafers protruding beyond a target boundary in the second direction during the closing process of the base and housing. Performing wafer position detection simultaneously with the closing action improves efficiency, avoids the need for additional sensing mechanisms, reduces redundant components, and further simplifies the device structure.
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