Load port module

Abstract

A substrate loading apparatus includes a frame adapted to connect the substrate loading apparatus to a substrate processing apparatus, the frame having a transport opening through which a substrate is transported between the loading apparatus and the processing apparatus; a cassette support for holding at least one substrate cassette container; and a cartridge support purge port having purge port nozzle locations disposed on the cartridge support, each nozzle location configured such that a nozzle at that nozzle location is coupled to at least one purge port of the substrate cartridge container, where each nozzle location defines an interchangeable purge port nozzle interface, the interchangeable purge port nozzle module is configured such that different interchangeable purge port nozzles are removably mounted to respective nozzle interfaces of nozzle positions corresponding to different nozzle configurations of the interchangeable purge port nozzle module, the interchangeable purge port nozzle module conforms to and enables coupling to different ports of different substrate cassette containers having different purge port characteristics.

Description

[0001] This application is a divisional application of Chinese invention patent application No. 201980090653.4, filed on November 26, 2019, entitled "Loading Port Module".

[0002] Cross-references to related applications

[0003] This non-provisional application claims priority and interest in U.S. Provisional Application No. 62 / 772,481, filed November 28, 2018, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0004] Various aspects of this disclosure generally relate to substrate processing apparatus, and more particularly to an improved loading port module for substrate processing apparatus. Background Technology

[0005] Typically, clean, dry air / gas enabled loading ports used in semiconductor manufacturing are used to purge substrate carrier containers (referred to herein as containers), such as front-opening wafer transport cassettes (FOUPs). FOUPs with purge options typically include front and / or rear (e.g., relative to the container substrate aisle opening) port locations. As an example, 300mm FOUPs with purge options are manufactured by various companies, including but not limited to Entegris Corporation, Shin-Etsu Polymer Ltd., and Miraial Ltd.; however, there is no industry standard for the location of FOUP purge ports on containers.

[0006] Given the lack of any industry standards for purge port locations, these locations can vary between manufacturers. For example, among the manufacturers mentioned above, there may be three different locations for the front purge port and two different locations for the rear purge port. The number of purge ports may also differ between manufacturers. The number of purge ports may also differ between different products from the same manufacturer. For instance, some FOUPs have only two front purge ports, while others have two front purge ports and two rear purge ports. The flow rate of purge gas entering and exiting the FOUP can also vary because the inlet and / or outlet port models of the purge ports on the FOUP may differ.

[0007] The purge port mating interface (i.e., the part of the purge port that mates with the purge nozzle of the loading port) is another variable between manufacturers. For example, some FOUPs have hard plastic purge port mating interfaces among other types of interfaces; while others have fluoropolymer elastomers (such as those produced by DuPont Performance Elastomers LLC under the trade name Viton). TM (For sale) Pairing interface for blow-through port. Attached Figure Description

[0008] In the following description, the foregoing aspects and other features of this disclosure are explained in conjunction with the accompanying drawings, wherein:

[0009] Figure 1A This is a schematic perspective view of a substrate processing apparatus according to various aspects of this disclosure;

[0010] Figure 1B These are schematic illustrations of substrate processing apparatus according to various aspects of this disclosure;

[0011] Figure 1C These are schematic illustrations of substrate processing apparatus according to various aspects of this disclosure;

[0012] Figure 2 Based on all aspects of this disclosure Figure 1A-1C A schematic diagram of the loading port module of any of the substrate processing devices;

[0013] Figure 3 Based on all aspects of this disclosure Figure 2 A schematic diagram of the loading port module;

[0014] Figures 4A-4D Based on all aspects of this disclosure Figure 2 A schematic diagram of a portion of the loading port module;

[0015] Figure 5 Based on all aspects of this disclosure Figure 2 A schematic diagram of a portion of the loading port module;

[0016] Figures 6A and 6B are schematic illustrations of substrate transport containers;

[0017] Figure 7A and Figure 7B Based on all aspects of this disclosure Figure 1A-1C A schematic illustration of a portion of the substrate processing apparatus of any of the following;

[0018] Figure 8 Based on all aspects of this disclosure Figure 2 An exemplary plan view of a portion of the loading port module;

[0019] Figure 9A Based on all aspects of this disclosure Figure 2 A schematic diagram of a portion of the loading port module;

[0020] Figure 9B Based on all aspects of this disclosure Figure 2 A schematic diagram of a portion of the loading port module;

[0021] Figure 9C-9G Based on all aspects of this disclosure Figure 2 A schematic diagram of a portion of the loading port module;

[0022] Figure 10 Based on all aspects of this disclosure Figure 2 A schematic diagram of a portion of the loading port module;

[0023] Figure 11A and Figure 11B Based on all aspects of this disclosure Figure 2 A schematic diagram of a portion of the loading port module;

[0024] Figure 12A and Figure 12B Based on all aspects of this disclosure Figure 2 A schematic diagram of a portion of the loading port module;

[0025] Figure 13 Based on all aspects of this disclosure Figure 2 A schematic diagram of a portion of the loading port module;

[0026] Figure 14 Based on all aspects of this disclosure Figure 2 A schematic diagram of a portion of the loading port module;

[0027] Figure 15 These are exemplary flowcharts based on various aspects of this disclosure;

[0028] Figure 16 These are exemplary flowcharts based on various aspects of this disclosure; and

[0029] Figure 17 These are exemplary flowcharts based on various aspects of this disclosure. Detailed Implementation

[0030] refer to Figure 1A The figure illustrates a perspective view of a substrate processing apparatus 10 incorporating features of the present disclosure. Although the present disclosure will be described with reference to aspects shown in the accompanying drawings, it should be understood that the present disclosure may be embodied in many alternative forms of its aspects. Furthermore, elements or materials of any suitable size, shape, or type may be used.

[0031] exist Figure 1A In the aspects illustrated herein, apparatus 10 has been shown for illustrative purposes only as having a general substrate batch processing tool configuration. In alternative embodiments, the substrate processing apparatus may have any other suitable configuration, as the features of the invention (which will be described in more detail below) are equally applicable to any substrate processing tool configuration, including tools and / or linear tool stations for individual substrate processing, such as in Figure 1B and Figure 1C The tool and / or linear tool station for individual substrate processing illustrated in and described in U.S. Patent Application No. 11 / 442,511, filed May 26, 2006, entitled "Linearly Distributed Semiconductor Workpiece Processing Tool," the disclosure of which is incorporated herein by reference in its entirety. The apparatus 10 may be capable of transporting and processing any desired type of flat panel or substrate, such as 200mm or 300mm semiconductor wafers, semiconductor packaging substrates (e.g., high-density interconnects), semiconductor manufacturing process imaging boards (e.g., masks or reticles), and substrates for flat panel displays. The apparatus 10 may generally include a front section 12 and a rear section 14. The front section 12 (for convenience, the term front is used herein to identify an exemplary reference frame, and in alternative embodiments, the front of the apparatus may be built on any desired side of the apparatus). The front section 12 has a system (which will be described in more detail below) providing an interface allowing substrates from a factory to be passed into the interior of the apparatus 10. The front section 12 also typically includes a housing 16 and automated components located within the housing, transporting substrates between the rear section 14 and the front section interface leading to the outside. The rear section 14 is connected to the housing 16 of the front section. The rear section 14 of the apparatus may have a controlled atmosphere (e.g., vacuum, inert gas) and typically includes a processing system for handling substrates. For example, the rear section may typically include a central transport chamber with substrate transport devices and peripheral processing modules for performing desired manufacturing processes (e.g., etching, material deposition, cleaning, baking, inspection, etc.) on the substrates within the apparatus. Within the factory, substrates may be transported to the processing apparatus 10 in a container T (also called a carrier). The container T may be positioned on or near the front section interface. Automated components may be used in the front section 12 to bring substrates from the container into the front section 12 through an interface (such as a BOLTS (box opener / loader to tool standard) interface). The substrate can then be transported via a loading lock to an atmosphere-controlled rear section for processing in one or more of the processing modules. The processed substrate can then be returned to the front section 12 and then to the transport container T in a substantially reverse manner for removal.

[0032] The front section 12 (which may also be referred to as the Environmental Front End Module or EFEM) may have a shell or enclosure defining a protected environment or microenvironment in which the substrate can enter, exit, and be transported, and with minimal potential for contamination between the transport container T for transporting the substrate within the FAB and the loading lock 14L providing an inlet to the controlled atmosphere in the subsequent processing section 14. Load ports or load port modules 24 (one or more in number, as further described below) are located on one or more sides of the front section, thereby providing an interface between the front section and the FAB. Load port modules may be substantially similar to the load port module described in U.S. Patent No. 8,821,099 entitled “LoadPort Module”, issued September 2, 2014, the disclosure of which is incorporated herein by reference in its entirety. Load port module 24 may have a closable port 30P forming a closable interface (such as a BOLTS interface) between the interior and exterior of the EFEM. Figure 1A As seen, the loading port module may have a support region for the substrate transport container T. A secondary holding region for temporarily cushioning the transport container may also be provided below this support region. The transport container support region allows the transport container T supported thereon to be automatically moved to its final or docked position. When the transport container is in the docked position, the port gate of the loading port module can engage the transport container to open it, and simultaneously open the inlet / outlet port 30P in the loading port frame to provide access to the substrate within the transport container and for transporting the substrate between the container and the interior of the EFEM. Engagement between the port gate and the transport container can be achieved via independently operable keys, as described in U.S. Patent No. 8,821,099.

[0033] According to various aspects of this disclosure, the (multiple) loading port modules 24 described herein are clean-dry air / gas enabled loading port modules that provide a reconfigurable purge nozzle configuration (see...). Figure 8 The illustration shows different purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, and 804B. The purge nozzle configuration depends on, for example, the configuration of the container T to be coupled to the loading port module 24 and can be selected from several different purge nozzle configurations. Conventional loading port manufacturers offer a single purge nozzle configuration on the loading port, which is customized for a single type of container with a predetermined purge port configuration. The loading ports(multiple) according to various aspects of this disclosure provide flexible loading ports 24 because the purge nozzles 900-903( Figure 9AThis allows for modular reconstruction, freeing semiconductor manufacturers from using only a single type of container from a single container manufacturer. The multiple load port modules 24 of this disclosure provide for use with containers having different purge port configurations without the cost and logistics of manufacturing different load port modules for each container purge port configuration. The multiple load port modules 24 of this disclosure also provide for purge nozzles 900-903 (… Figure 9A The location, quantity of purge nozzles 900-903, and model of purge nozzles as input or output nozzles are instantly (or, as may be referred to herein, as quick exchange) reconfigured. It should be noted that on-demand reconfiguration is the process by which the port manufacturer and / or end-user / customer reconfigures / repositions the purge nozzles 900-903 as needed, depending on the type of container used in the semiconductor manufacturing environment at a particular time. This applies to purge nozzle modules 1910T, 1910TA, 1910TB, 1910TC, 1910TD, 1910TE, 1910TF, 1910TG, 1910TH, 1910TI, 1910TJ, 1910TFLU, 1910TAFLU, 1910TBFLU, 1910TCFLU, 1910TDFLU, 1910TEFLU, 1910TFFLU, 1910TGFLU, 1910THFLU, 1910TIFLU, and 1910TJFLU (generally referred to herein as purge nozzle module 1910—see Figure 9B , Figure 9C , Figure 9F , Figure 9G ) and purge nozzle modules 910T, 910TA, 910TB, 910TC, 910TD, 910TE, 910TF, 910TG, 910TH, 910TI, 910TJ, 910T1, 910TA1, 910TB1, 910TC1, 910TD1, 910TE1, 910TF1, 910TG1, 910TH1, 910TI1, 910TJ1 (generally referred to as purge nozzle module 910 in this article—see Figure 9AThe purge nozzles 900-903 on the loading port 24 are quickly interchanged and located in predetermined fixed positions corresponding to predetermined purge nozzle configurations of the container T, without in-situ position adjustment after the purge nozzle modules 1910, 910 are coupled to the loading port 24. As described herein, each of the interchangeable purge port nozzle interfaces and the different predetermined purge nozzle configurations of each corresponding of the different interchangeable purge port nozzle modules 1910, 910 are configured to enable quick interchange installation of each corresponding of the different interchangeable purge port nozzle modules 1910, 910 with the other of the different interchangeable purge port nozzle modules 1910, 910. Suitable containers T (see also containers TA-TJ) that can be used with any aspect of this disclosure are FOUPs manufactured by Entegris, Shin-Etsu Polymer Ltd. and Miraial Ltd. (e.g., in one aspect, container T-TJ may correspond to FOUPs such as: CT-CF-S_SHIN_ETSY, T-CF-S_SHIN_ETSY, CF-A_SHIN-ENSY, OB-CB_SHIN_ETSY of Shin-Etsu Polymer Ltd.; Spectra of Entegris, Ltd.) TM A300, F300; and Miraial Ltd.'s 4-port and 2-port models).

[0034] As will be described herein, the operator can move each purge nozzle 900-903 of the loading port 24 to several predetermined purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B ( Figure 8 Any of the following. Flexible fluid hose 10020-10023 ( Figure 10 Each purge nozzle 900-903 (Figure 9) is optionally connected at least partially to the inlet gas manifold 10030. Figure 10 Or exhaust manifold 10040 ( Figure 10 A type of purge nozzle configuration (e.g., for a purge port for use with a rigid plastic construction of container T, and a fluoropolymer of container T (such as, manufactured by DuPont Performance Elastomers LLC under the trade name Viton)). TMThe purge port (or any other suitable purge port interface connection of container T) may also be selected from several different interchangeable purge nozzle configurations depending on the purge nozzle mating interface chosen for use with loading port 24 on container T. It should be noted that while aspects of this disclosure have been described with respect to front-opening wafer transport cassette (FOUP) type container T, these aspects are equally applicable to any desired type of transport container (including, but not limited to, SMIF containers).

[0035] Now for reference Figure 1B A schematic plan view of a linear substrate processing system 2010 is shown, wherein a tool interface segment 2012 is mounted to a transfer chamber module 3018 such that the interface segment 2012 generally faces (e.g., inwards) the longitudinal axis X of the transfer chamber 3018 but is offset from that longitudinal axis. The transfer chamber module 3018 can extend in any suitable direction by attaching other transfer chamber modules 3018A, 3018I, 3018J to interfaces 2050, 2060, 2070, as described in U.S. Patent Application No. 11 / 442,511, which is previously incorporated herein by reference. Each transfer chamber module 3018, 3019A, 3018I, 3018J includes a substrate transport member 2080 for transporting a substrate through the processing system 2010 and entering or exiting, for example, a processing module PM. As will be appreciated, each chamber module may be able to maintain an isolated, controlled, or sealed atmosphere (e.g., N2, clean air, vacuum).

[0036] refer to Figure 1C A schematic front view of an exemplary processing tool 410 is shown, such as that which can be cut along the longitudinal axis X of a linear transfer chamber 416. In one aspect, as Figure 1C As shown, the tool interface section 12 is typically connected to the transfer chamber 416. In this aspect, the interface section 12 may define one end of the tool transfer chamber 416. Figure 1C As seen, the transfer chamber 416 may, for example, have another workpiece inlet / outlet station 412 at the opposite end to the interface section 12. In other aspects, additional inlet / outlet stations for inserting / removing workpieces from the transfer chamber may be provided, such as between the ends of the tool transfer chamber 416. In one aspect of this disclosure, the interface section 12 and the inlet / outlet station 412 may allow workpiece loading and unloading from the tool. In other aspects, workpieces may be loaded into the tool from one end and removed from the other end. In one aspect, the transfer chamber 416 may have one or more transfer chamber modules 18B, 18i. Each chamber module may be able to maintain an isolated, controlled, or sealed atmosphere (e.g., N2, clean air, vacuum). As previously described, the transfer chamber modules 18B, 18i, loading lock modules 56A, 56B, and forming Figure 1CThe configuration / arrangement of the workpiece stations in the transfer chamber 416 shown is merely exemplary, and in other aspects, the transfer chamber may have more or fewer modules arranged in any desired modular layout. In one aspect, station 412 may be a loading lock. In other aspects, loading lock modules may be located between end inlet / outlet stations (similar to station 412), or adjacent transfer chamber modules (similar to module 18i) may be configured to operate as loading locks. Also as previously mentioned, transfer chamber modules 18B, 18i have one or more corresponding transport devices 26B, 26i located therein. The transport devices 26B, 26i of the corresponding transfer chamber modules 18B, 18i may cooperate to provide a linearly distributed workpiece transport system 420 within the transfer chamber. In other aspects, transfer chamber module 18B may be configured to allow any suitable transport vehicle (not shown) to travel between transfer chamber modules 18B along at least a portion of the length of the linear transfer chamber 416. As can be appreciated, the transport vehicle 900 may include any suitable transport equipment mounted thereto and substantially similar to those transport devices described herein. Figure 1C As shown, in one aspect, the arm of transport device 26B can be arranged to provide an arrangement that may be called a rapid exchange arrangement, which allows for the rapid exchange of wafers from pick / place positions, as will be described in further detail below. Transport arm 26B may have suitable drive sections to provide three (3) degrees of freedom (e.g., independent rotation about the shoulder and elbow joints and with Z-axis motion) to each arm from a simplified drive system compared to conventional drive systems. In other aspects, the drive sections may provide more or fewer than three degrees of freedom to the arm. Figure 1CAs seen in one aspect, modules 56A, 56, 30i may be gap-filled between transfer chamber modules 18B, 18i and may define suitable processing modules, (multiple) loading locks, (multiple) buffer stations, (multiple) metering stations, or (multiple) any other desired stations. For example, gap-filling modules (such as loading locks 56A, 56 and workpiece station 30i) may each have stationary workpiece supports / shelves 56S, 56S1, 56S2, 30S1, 30S2, which may cooperate with transport arms to enable transport or workpieces along the linear axis X of the transfer chamber for the length of the transfer chamber. For example, (multiple) workpieces may be loaded into transfer chamber 416 via interface section 12. (Multiple) workpieces may be positioned on (multiple) supports of loading lock module 56A via transport arm 15 of interface section. In loading lock module 56A, multiple workpieces can be moved between loading lock module 56A and loading lock module 56 via transport arm 26B in module 18B, and similarly and continuously moved between loading lock 56 and workpiece station 30i via arm 26i (in module 18i), and between station 30i and station 412 via arm 26i in module 18i. This process can be completely or partially reversed to move multiple workpieces in the opposite direction. Thus, in one aspect, workpieces can be moved along axis X in any direction and to any location along the transfer chamber, and can be loaded into and unloaded from any desired module (processing or otherwise) communicating with the transfer chamber. In other aspects, a gap-filling transfer chamber module with static workpiece supports or shelves may not be provided between transfer chamber modules 18B, 18i. In this aspect of the disclosure, the transport arms of adjacent transfer chamber modules can move workpieces directly (or by using a buffer station) from an end effector or from one transport arm to the end effector of another transport arm, thereby moving the workpiece through the transfer chamber. The processing station module can be operated on the substrate by various deposition, etching, or other types of processes to form circuits or other desired structures on the substrate. The processing station module is connected to the transfer chamber module to allow the transfer of the substrate from the transfer chamber to the processing station and vice versa. A similar process is described in U.S. Patent Application Serial No. 11 / 442,511. Figure 1C Suitable examples of processing apparatuses with general features similar to those described in the application, which is previously incorporated herein by reference.

[0037] refer to Figure 1A and Figure 2 ( Figure 2This is a perspective view of a loading port module 24 of a processing apparatus according to this exemplary aspect of the present disclosure. The loading port module 24 has a frame 29 adapted to connect the loading port module 24 to any suitable processing apparatus. The frame 29 of the loading port module 24 may generally define (as previously described) a transport container holding or supporting region 28 and a closable port 30P (or transport opening) through which a substrate is transported into and out of the microenvironment within the front section housing 16 (in other respects, the closable port 30P is a transport opening through which the substrate is transported between the loading port module 24 and any suitable processing apparatus (such as an EFEM, processing module, transfer chamber, etc.). The loading port module 24 may be substantially similar to the one authorized on September 2, 2014, entitled "Load..." The loading port module described in U.S. Patent No. 8,821,099, entitled "PortModule," is incorporated herein by reference in its entirety. As will be further described below, the housing 16 of the EFEM and the loading port module 24 are connected to form a substantially closed chamber or space 25 from the outside, and, as previously described, provide a controlled or microenvironment within the front section 12 (also referred to as the EFEM). For example, the front section may include a controlled airflow system (not shown), such as vents, louvers, or laminar flow systems, to prevent particulate contaminants from entering the microenvironment within the front section 12. Figure 1A and Figure 2 As seen, the transport container holding region 28 for the loading port module 24 may have a primary or first station 36 and a secondary station 34. In this aspect, each station 36, 34 of the holding region 28 may be able to hold the transport container T; however, in alternative embodiments, the transport container holding region may have more or fewer holding stations, and each holding station may be able to support any desired number of substrate transport containers. The transport container T (shown as being disposed on holding (or box support) stations 36, 34) Figure 1A For illustrative purposes, it is depicted as a front-opening wafer transport box (FOUP) type container; however, in alternative embodiments, the holding station with the loading port holding area may be able to support any desired type of transport container, such as an SMIF container.

[0038] exist Figure 1A In the aspects shown, for illustrative purposes, the front section 12 has a loading port module 24 located on the front face 12F of the front section 12. In this location, the loading port module 24 can be positioned to facilitate the placement of the transport container T onto at least one holding (or box support) station 34, 36 of the loading port module holding area 28 and the removal of the transport container T from said at least one holding station using any suitable automated material handling system (AMHS) (not shown). Figure 1A-2As seen, the loading port module holding area 28 projects forward from the front section face 12F, and the access for removing / placing the transport container T onto the holding area 28 using AMHS can be from the top or the front. In alternative embodiments, the loading port module may be located on other sides of the front section as needed. In still other alternative embodiments, the loading port module may be located on two or more sides of the front section 12. Figure 2 As seen in the example, the loading port module 24 may have an extension area 38 that protrudes outward from the base plate of the loading port module 24.

[0039] Refer again Figure 1A-3 The transport container holding area 28 of the loading port module 24 may have an upper support station 36 and a lower support station 34, each support station 36, 34 being capable of holding or supporting, for example, Figure 1A The transport container T is shown. In this aspect, the lower station 34 is generally located below the upper station 36. The lower station 34 may include opposing members 34L capable of conformally engaging the structure of the transport container T. Figure 3 (Only one is shown in the figure), such that when the transport container is placed in the lower station 34, the transport container is supported from the member 34L. Figures 6A-6B are front and bottom perspective views, respectively, of an exemplary substrate transport container T. The container T in Figures 6A-6B is shown as having a FOUP configuration. In alternative embodiments, the substrate container may have any other desired configuration, as best seen in Figure 6A, where the transport container T typically has a housing T2 and a housing cover or door T4 removably attached to the housing. The housing T4 has an upper surface T6 with a fixing device T8 projecting therefrom. The fixing device T8 may include a lateral flange offset from the upper surface T6 of the housing by a certain distance or an outwardly projecting mounting surface T10. The mounting surface T10 may be part of a transport flange conforming to SEMI; E47.1-1001. The mounting surface T10 may be used to engage the coupling portion (not shown) of the container transporter of an automated material transport system and thereby support the container from the transporter. Refer again Figure 2-3 In this respect, the support member 34L of the lower station 34 on the loading port module holding area 28 is shown to have an angled or generally L-shaped configuration. The member 34L has an inwardly projecting flange 34F as shown. In alternative embodiments, the support member 34L may have any other suitable shape. The support member 34L may be, for example, metal, plastic, or any other suitable material, and may be as follows: Figure 3The support structure 296 connected to the loading port frame 29 is shown. The inwardly pointing flange 34F is sized to receive between the mounting surface T10 (see FIG. 6A) on the transport container and the upper surface T6 of the container. The flange 34F of the opposing member 34L is sufficiently separated to allow the support and fixing device T8 of the container T to be inserted between the flanges, wherein the outwardly projecting mounting surface T10 is suspended (at least partially) above the corresponding flange 34F. Thus, when loaded into the lower station 34, the transport container T is supported by the mounting surface T10 on the flange 34F.

[0040] In this respect, the operator can insert container T (along with...) Figure 2 The direction indicated by arrow I in the diagram causes the fixing device T8 to move between flanges 34F, manually positioning the container on the lower station 34. In an alternative embodiment, the support members of the lower support station may have any other desired orientation to allow the transport container to be positioned from any other desired direction. Removal of the transport container T from the lower station 34 can be achieved in a substantially reverse manner, whereby the user manually retracts the container in the direction opposite to the installation. The lower support station 34 provides another container storage location to the loading port module, where the user may place the transport container T: when the upper support station 36 is occupied by another transport container or is in a state that prevents the transport container T from being placed on the upper station (e.g., for testing). As previously mentioned, in an alternative embodiment, the loading port module may not have a lower support station in the transport container holding area 28.

[0041] Now refer to it again Figure 2 The upper support station 36 of the transport container holding area 28 on the loading port module 24 typically includes a base support or shelf 50 and a carriage or reciprocating element 52 movably mounted on the shelf 50. A reciprocating element drive system 54 operably connects the reciprocating element 52 to the shelf 50 and is capable of moving the reciprocating element 52 on the shelf 50. The drive system 54 moves the reciprocating element between a first position and a second position (along a path...). Figure 2 (The direction indicated by arrow M in the diagram). As will be further described below, the reciprocating member 52 is configured to allow the transport container T to be placed thereon. A first reciprocating member position can be set such that the transport container T can be automatically positioned on (or removed from) a carriage by an automated material handling system (not shown). As will be further described below, a second position to which the reciprocating member 52 can move is positioned such that the transport container T on the reciprocating member can be engaged with a door 30D (see...). Figure 1A When the reciprocating component is in this second position, the transport container T on it is in a position that will be referred to as the docking position for convenience. As will be further described below, the controller 400 is communicatively connected to the drive system and the sensors on the reciprocating component.

[0042] like Figure 1A As seen, the transport container T is placed on the reciprocating member 52, with the bottom surface of the container disposed on the reciprocating member. Therefore, as will be further described below, the reciprocating member 52 is configured to conformally engage the bottom of the transport container T. Figure 6B is a bottom view illustrating the features of the bottom T3 of an exemplary substrate transport container T. In this aspect, the bottom T3 of the transport container has features that generally conform to the specifications in SEMIE 47.1. In alternative embodiments, the bottom of the substrate transport container may have any other desired features. In this case, the bottom T3 typically includes a container sensing pad T12, one each of front-end process (FEOL) and back-end process (BEOL) information pads T14 and T16, a container capacity (i.e., the number of substrate holding positions) information pad T18, and a box or cassette information pad T20. The container bottom T3 may further include a groove T22 for engagement by a positioning / kinematic coupling pin 66 on the reciprocating member 52. As can be appreciated, the kinematic coupling pin 66 defines a deterministic positioning reference between the transport container holding area of ​​the loading port module 24 periphery and the container feature thereby engaged, as will be further described below. A first recess T24 in the bottom surface is provided as a first holding feature. The bottom of the container also has a second holding feature T26 formed therein. The second holding feature generally includes a generally circular recess T30 formed in the bottom, the recess having an external aperture T32 having a substantially square edge T34 (forming an engagement lip T36).

[0043] Figures 4A-4D These are schematic perspective views, top plan views, front view views, and side view views of the reciprocating component 52 and a portion of the supporting shelf structure on which the reciprocating component is mounted (the supporting shelf structure 50 is only partially visible). Figures 4C-4D (See image below). The reciprocating component 52 typically includes a chassis or frame 55 and a cover 56 positioned on the chassis. The reciprocating component 52 may also typically have positioning features 58 for assisting in properly positioning the container T onto the reciprocating component, connection features 60 for positively engaging the placed container T onto the reciprocating component, and a detection system 62 for detecting the presence and accurate placement of the container T on the reciprocating component 52. Reference also is made to... Figure 5 It shows a partial cross-sectional view of the reciprocating component 52. The chassis 55 may have any suitable shape and may be made of any suitable material, capable of supporting static and dynamic loads associated with the placement and removal of the transport container T on the reciprocating component and the movement of the container and the reciprocating component between a first position and a second position. The chassis 55 may have features that allow the reciprocating component 52 (alongside...) Figure 2The direction indicated by arrow M in the diagram) is indicated by a motion system (not shown), such as rollers or sliders, that moves freely relative to the support shelf 50 of the loading port module frame. This can be achieved through frame 29 (see...). Figure 3 The supporting structure 296 is formed. Figure 5 The support shelf 50 shown in the middle part (see also) Figure 2 Shelf 50 may include rails or tracks (not shown) formed on or suspended from frame structure 296 (e.g., top plate 296H or side plate 296E), on which the motion system of chassis 55 rides. Container positioning feature 58, coupling feature 60, detection system 62, and cover 56 are mounted to chassis 55.

[0044] like Figures 4A-4B As best seen in this aspect, the container positioning feature 58 on the reciprocating member 52 may include a protruding engagement member 64. In this aspect, the engagement member 64 may have a generally frustopyramidal shape, generally conforming to the shape of the positioning recess T24 (see FIG. 6B) in the bottom T3 of the container. The engagement member 64 may be anchored to the chassis 55 and protrude through a suitable opening in the cap 56 and sufficiently above the upper surface 56U of the cap to engage the positioning recess T24 in the container when the container T is placed on the reciprocating member 52. The engagement member 64 may have a cam surface 64C for cooperating with the edge of the container positioning feature to aid in the proper automatic positioning of the container T onto the reciprocating member. In an alternative embodiment, the reciprocating member may not have an engagement member (e.g., member 64). In this aspect, the reciprocating member 52 may have a positioning post (also referred to as a kinematic coupling pin) 66. The post 66 can be used both as a positioning feature to help correctly position the container T on the reciprocating member 52, and as a device to force the container T to be kinematically coupled (i.e., kinematically coupled) to the reciprocating member 52. For example, it can be seen from... Figure 4B As recognized by 6B, column 66 is positioned on reciprocating member 52 to cooperate with slot T22 in container bottom T3. As Figure 5 As shown, the post 66, which can be formed of any suitable material (such as metal or plastic), can be directly anchored to the chassis 54 of the reciprocating component. The post 66 can protrude through a suitable hole in the cover 56 to engage the bottom of the container in the slot T22 (see FIG. 6B). In this respect, the post 66 can define a support plane for the transport container T on the reciprocating component. Figure 4D and 5 As seen, the end or tip 66T of the post 66 may have a generally conical or rounded shape. This provides the desired three contact points between the reciprocating member 52 and the bottom of the container to precisely and repeatably define the support plane for the container on the reciprocating member. As can be appreciated, the post 66 supports the weight of the container T and therefore has, for example, Figure 5The radial flange and similar configuration shown are used to distribute the container weight to the chassis. The conical top 66T of the column 66 also operates as a cam surface against the inclined side of the groove T22 in the bottom of the container, thereby mechanically guiding the container along the support plane until the desired position of the container on the reciprocating element is established (achieved by the geometry of the groove T22 and the top 66T of the column 66).

[0045] The detection system 62 for the reciprocating part 52 typically includes several switches 68 distributed over an area of ​​the reciprocating part. The switches 68 may be located on the reciprocating part 52 to cooperate with the container sensing pad T12, FEOL and BEOL information pads T14, T16, and container capacity and box information pads T18, T20 on the bottom of the container. Figure 4B The illustration shows the positions of pads T12-T20 on the bottom of the container T covering the cover 56 and the switch 68 of the reciprocating element 52. In this respect, the switches 68 are generally of the same type and similar to each other, and will be described below with reference to representative switches. In alternative embodiments, different types of switches may be used at different positions on the reciprocating element, corresponding to different types of information that can be relayed to a given switch via different information pads T16-T20 of the container T. The architecture of the representative switch 68 is shown in... Figure 5 As best seen in the image. In this respect, switch 68 can be a photoelectric switch typically comprising a base or sensor portion 68O and an actuation portion 68I. As will be further described below, the actuation portion 68I is spring-loaded and actuated by contact with a corresponding pad on the bottom of the container. The sensor portion 68O detects the actuation of the actuation portion, thereby sending a signal to the control system. Figure 5 As seen, the sensor portion 68O can be mounted on a PCB 74 positioned on a chassis 55 of the reciprocating component. The PCB 74 may have traces 68E formed therein for both power and signal transmission. The traces 68E may terminate at suitable surface contacts (not shown), to which contact terminals of electronic components can be connected as needed (using any suitable means for mounting electronic components to the PCB, including flush-wave soldering). The contact terminals of the sensor portion 68O (both power and signal) can be connected to the traces 68E in the PCB 74 in a similar manner. Mounting electronic components (such as the sensor portion 68O of switch 68) onto a PCB (such as PCB 74) with integrated traces eliminates the need for separate conductors originally used to connect components to power and control systems, and the expensive and time-consuming installation of these separate conductors on the chassis. The traces 68E in the PCB may extend to terminal connectors (not shown), such as flexible wire harnesses 72 (also see...). Figure 4DThe connectorized ends of the harness can be mated to the terminal connector. As can be appreciated, the harness can link traces 68E in PCB 74, and thus link electronic components (such as the sensor portion of detector switch 68) to control system 400 (see...). Figure 2 The sensor portion 68O may have, for example, a suitable light source (such as an LED) and a photodetector (such as a phototube). In the inactive state of the switch, the light source may, for example, illuminate the phototube, which causes the sensor portion 68O to send a signal (via trace 68E) to the control system 400, which interprets the signal as the inactive state of the switch 68. When the light source is blocked (e.g., through a portion of the actuation portion 68I of the switch), the signal from the phototube changes, which is then read by the control system as the switch now being actuated. In an alternative embodiment, the sensor portion 68O may be configured such that the light source is blocked when the switch 68 is in the inactive state, and the photodetector is illuminated when the switch is in the active state.

[0046] like Figure 5 As seen, the actuating portion 68I of switch 68 is integrated into the cover 56 of reciprocating member 52. In this aspect, the spring that biases the actuating portion 68I is formed from a portion of the cover 56. The cover 56 of reciprocating member 52 may be made, for example, of plastic or sheet metal or any other suitable material. In this aspect, the cover 56 may be a one-piece component (i.e., having an integral construction). If the cover 56 is plastic, it may be formed, for example, by injection molding or any other suitable process. Figures 4A-4D As seen in this aspect, the cover 56 may have a generally hexahedral shape, having an upper surface 56U and peripheral walls 56W projecting from the upper surface. In alternative embodiments, the reciprocating cover may have any other suitable shape. Figure 2 As best seen, when the cover 56 is mounted on the chassis 55, the cover serves to substantially enclose the chassis, but provides a small gap between the bottom edge of the cover's peripheral wall 56W and the shelf 50 to facilitate free relative movement of the reciprocating parts while minimizing the entry of dust or other particles into the reciprocating system. Figure 4A As shown, the top surface 56U of the cover has a through hole 56H formed therein. Figure 5 As best seen, hole 56H allows post 66 to extend through cover 56. As Figure 5 As also shown, in this aspect, the hole 56H is also used to position the cover 56 onto the reciprocating chassis 55 (the gap between the edge of the hole and the corresponding post 66 is small enough that the post 66 provides accurate positioning of the cover 56 relative to the chassis 55). Further, as... Figure 5As shown, in this aspect, the edge of the hole 56H is positioned on the collar 66C of the post 66, thereby supporting the cover 56 from the post. In alternative embodiments, the cover may have any other desired mounting system for attaching the cover and the chassis. Figures 4A-4B As seen, the upper surface 56U of the cap has a plurality of resilient, flexible protrusions or fingers 70 formed therein. The protrusions 70 can be formed by any suitable means, such as cutting the top surface 56U of the cap 56. The number of protrusions 70 may correspond to the number of switches 68 of the detection system 62. In this aspect, eight protrusions 70 are formed in the upper surface of the cap. In alternative embodiments, the cap may have any other desired number of flexible protrusions formed therein. In other alternative embodiments, the flexible protrusions may be formed in any other desired surface of the cap. Figures 4A-4B In the aspects shown, the protrusions 70 are substantially similar to each other, and therefore, the protrusions 70 can have similar elastic flexibility characteristics. In alternative embodiments, the shapes (i.e., lengths, cross-sections) of the different protrusions can be varied to provide different protrusions with different flexibility characteristics. In this aspect, the tips 70E of the protrusions 70 are located on the cover such that when the cover is mounted to the chassis, each tip 70E is substantially positioned at the corresponding switch 68 (see...). Figure 5 The protrusion is located on the sensor portion 68O of the corresponding switch. In an alternative embodiment, the protrusion may be positioned such that any other desired portion of the protrusion (i.e., the middle section of the protrusion) is positioned on the sensor portion of the corresponding switch. The orientation of the protrusion on the upper surface 56U of the cover may be further selected as needed to provide unconstrained cantilever flexibility to the protrusion. Figures 4A-4B The orientation of the protrusion 70 shown is merely exemplary, and the protrusion may have any other desired orientation.

[0047] like Figure 5As best seen in this respect, in this aspect, the actuating portion 68I of the switch 68 is mounted on or located on the tip 70E of the corresponding protrusion 70. The actuating portion 68I may have an integral construction with the protrusion 70 (e.g., formed during the molding process on the upper surface of the cap), or may be mounted to the protrusion 70 by a suitable bonding means (such as adhesive). The actuating portion 68I protrudes sufficiently from the upper surface 56U of the cap to contact the corresponding pads T12-T20 of the container placed on the post 66, and this contact produces sufficient deflection of the protrusion 70 to move the interruptor mark portion 68F of the actuating portion, thereby (e.g., blocking the light source and) activating the switch 68. When the container T is removed from the reciprocating member 52, the flexible protrusion 70 springs back to the undeflected position, thereby restoring the switch to the inactive state. As can be recognized, if the container T is not properly placed on the reciprocating member, there may be some misalignment between at least some of the pads T12-T20 of the container and at least some of the actuation portions 68I of the switch 68, causing at least some of the switches to be inactive. The signal combination of some active switches and other inactive switches can be interpreted by the control system 400 as indicating improper placement of the container T on the reciprocating member. The control system is then programmed to prevent movement of the reciprocating member 52 and to command corrective actions to correct the placement or remove the container from the reciprocating member.

[0048] As previously described, the reciprocating member 52 may have a coupling feature 60 for forcibly coupling the transport container T to the reciprocating member. Also as previously described, the post 66 serves as a kinematic coupling device between the reciprocating member and the container during reciprocating member movement. In this aspect, the reciprocating member coupling feature 60 may also include a container clamping system 61, which is substantially similar to the container clamping system described in U.S. Patent No. 8,821,099, which is previously incorporated herein by reference in its entirety.

[0049] Now refer to it again Figure 2 and Figures 4A-4D It can be moved between the first or loading position and the docking position of the reciprocating part 52 via the drive system 54 (along the path of the reciprocating part 52). Figure 2 The direction indicated by arrow M in the diagram represents the reciprocating component. Figures 4C-4D As best seen in this aspect, the reciprocating drive system 54 typically includes an electric motor 53 driving the lead screw 57. In alternative embodiments, the reciprocating element may have any suitable type of drive system, such as a pneumatic or hydraulic drive system. In this aspect, the electric motor 53 may be any suitable type of motor, such as an AC or DC motor, a stepper motor, or a servo motor. The motor 53 may be fixedly mounted to the shelf structure 50. The lead screw 57 is connected to the output shaft of the motor. The motor may be able to rotate the lead screw both clockwise and counterclockwise. The lead screw 57 is also drivably engaged along the linear bearing(s) 283 (... Figure 3The chassis 55 of the reciprocating component 52 is mounted on the lead screw. The engagement between the lead screw and the chassis can be provided by any suitable means, such as, for example, a threaded sleeve fixed to the chassis and threadedly engaged by the lead screw. Rotation of the lead screw 57 by the motor 53 causes axial movement of the sleeve on the lead screw, and thus axial movement of the chassis and the reciprocating component 52 relative to the shelf 50 (to which the motor 53 is fixed). Figure 4C As seen, motor 53 is communicatively connected to controller 400 via suitable circuitry 91. Controller 400 can supply both command signals and electrical power (from a suitable power source) to motor 53 via circuitry 91. Motor 54 may include a motor encoder 58E (see [link to encoder]) for transmitting position indication data to the controller. Figure 4D The controller 400 may be able to process motor encoder data to identify the position of the reciprocating element on the loading port. In an alternative embodiment, a linear encoder may be mounted between the reciprocating element and the support shelf to identify the position of the reciprocating element during movement. Figure 4C As seen in this aspect, circuit 91 may also include a squeeze protection circuit 90 capable of detecting obstruction to the movement of the reciprocating member. The squeeze protection circuit may include a current sensor 92 of any suitable type and with the desired sensitivity to measure changes in the current of motor 53. As needed, the current sensor 92 is configured to monitor the current supplied to motor 53 through circuit 91. The measurement signal from sensor 92 is transmitted to controller 400 via circuit 90. Squeeze protection circuit 90 may be a closed-loop or open-loop system as needed. As will be appreciated, when the reciprocating member advances past drive motor 53 and encounters an obstacle, the current supplied to the motor (via circuit 91) generally increases proportionally to the level of resistance to the movement of the reciprocating member provided by the obstacle. An “excess” current is detected by sensor 92 and the information is relayed to controller 400 via circuit 90. Sensor 92 may be able to send raw or unprocessed sensor data to controller 400. The controller can be programmed (e.g., a suitable algorithm) to process data from sensors, thereby identifying from noise when excessive current (of sufficient level and duration to indicate an obstacle) is supplied to motor 53. Controller 400 has an automatic reversal program 402 (see...). Figure 1AIn this system, upon detecting an excessive current (and thus an obstacle to the movement of the reciprocating element), the controller sends a command signal to the motor 53, thereby stopping the previously commanded operation and reversing the motor direction. Consequently, the rotation of the lead screw 57, which enables the movement of the reciprocating element 52, is also reversed, causing the movement of the reciprocating element to reverse away from the obstacle. The reciprocating element can be reversed a predetermined distance established from the information in the encoder 53E. In an alternative embodiment, the current sensor 92 can be programmable to select a desired setpoint for detecting excessive current. In this case, the current sensor can send an appropriate signal to the controller upon detecting an excessive current with a level and duration exceeding the programmed setpoint. Upon receiving a signal from the current sensor, the controller accesses the automatic reversal program 402 in the controller memory. This provides a superior obstacle detection and recovery system at a lower cost than conventional systems employing deflectable (i.e., squeezed) rods.

[0050] Now refer to it again Figure 2 The loading port module in the illustrated aspect may have a transport container forward detection system 110. Figure 2 (Illustrated schematically). The container forward detection system 110 is a non-contact system used to detect features of the container T mounted to the reciprocating member 52 and advancing through it, and to stop the reciprocating member such that when the container is in a docking position, the front face of the container is in a desired repeatable position, regardless of tolerance variations between different containers. It is desirable to stop the forward movement of the loading port reciprocating member such that there is a minimum clearance between the container and the loading port frame 29 without actual contact. Because container dimensions will vary (especially between manufacturing processes), in conventional systems, the reciprocating member movement is typically adjusted for a "worst-case" scenario, allowing for excessive clearance in most cases. The container forward detection system 110 of the loading port module 24 overcomes the problems of conventional systems, allowing different containers to stop while providing a minimum clearance at the front face at L1. In this respect, the detection system 110 has a "penetrating beam" sensor configuration, which has an emitter or source of radiated energy and a detector for detecting the energy radiated from the emitter. For example, in this aspect, the detection system 110 may have a light source 112, such as an LED or laser diode at the end of an optical fiber connected to a suitable remote light source. The system 110 may also have a suitable light-sensing section 114, such as a phototube for sensing the light beam from the source 112. Figure 2 As seen, the light source 112 and sensor 114 are positioned on opposite sides of the reciprocating member 52 and at a desired height, such that the container T mounted on the reciprocating member 52 and transported therethrough will interrupt the light beam B emitted by the source 112 and illuminating at least the sensing portion of the sensor 114. Although not in Figure 2As shown, however, the light source 112 and sensor 114 can be housed in a suitable cover to provide contact and particle protection and prevent unintentional interruption of the light beam by objects other than the container being transported via reciprocating member 52. Figure 2 As seen, sensors 112 and 114 travel along the direction of travel of the reciprocating component (from... Figure 2 The arrow M in the diagram indicates that the beam B is positioned at a certain offset distance such that when the container T is brought to the docking position by the reciprocating member, the beam B is spaced from the position L1 of the front face of the container by a desired distance d. As can be understood, when the beam B is at a distance d from the docking position L1, the front face of the container T, which is advancing through the reciprocating member, interrupts the beam. The controller 400 is programmed with this distance d. The controller 400 also uses an algorithm ( Figure 1A The algorithm is programmed using program module 401 in the program module, which uses reciprocating movement information (such as information from the motor encoder 53E, also see...) Figure 4D The sensor 114 provides the controller with reciprocating movement information and distance d to determine when to stop the reciprocating movement so that the front face of the container T on the reciprocating part is at position L1. Therefore, when the front face of the advancing container T interrupts the beam B, the sensor 114 sends an appropriate signal to the controller 400, thereby notifying the controller that the front face of the container has been detected. As described above, the controller 400 can then determine when to command the reciprocating movement to stop and send the command to the reciprocating drive section 54 at the correct time. In this way, each container T transported by the reciprocating part is properly positioned in its mating position so that the front face of the container is at position L1, regardless of dimensional variations between containers.

[0051] like Figure 1A As shown, with the container T in the docked position, the container door T4 can be engaged by the door 30D of the loading port module access port 30P. The door T4 in the front face of the container T is schematically illustrated in Figure 6A. The door T4 may include latching systems T40, T42 that hold the door T4 within the container housing when engaged. An example of a latching system for a container door is disclosed in U.S. Patent No. 5,772,386, issued June 30, 1998, and incorporated herein by reference in its entirety. The latching systems T40, T42 may include a pivotable hub T44 to which a latching protrusion T46 is hingedly linked. Rotation of the hub T44 actuates the latching protrusion T46 to engage and disengage from the engaged container housing. The latching hub T44 can be accessed through a latch key access hole T50 in the door T4. The container door T4 may also have a locator pin hole T52 as shown in Figure 6A. (Refer again) Figure 2The inlet / outlet door 30D of the loading port module has a locator pin 120 and a latch key 122 with a configuration complementary to or matching the locator pin hole T52 and latch key inlet / outlet hole T50 in the door T4 of the container. The locator pin 120 and latch key 122 in the port door 30D may be similar to the locator pin and latch key in U.S. Patent No. 5,772,386 (previously incorporated herein by reference). The latch key 122 of the port door 30D is adapted to the shape of the key inlet / outlet hole T50 in the container door and the keyhole in the hub T44 of the latching system. When the port door 30D engages the container door T4, the latch key 122 on the inlet / outlet door 30D enters through the key inlet / outlet hole T50 into the keyhole formed in the hub T44 of the container. Rotation of the latch key 122 causes rotation of the hub T44 and actuation of the latching system to engage / disengage the engagement latch protrusion, thereby locking or unlocking the container door T4 from the container. The latch key 122 is rotatably mounted in the access door structure and operates in a manner substantially similar to that described in U.S. Patent Application 8,821,099, the disclosure of which is incorporated herein by reference in its entirety.

[0052] Now for reference Figure 7A and Figure 7B A schematic front view of a substrate processing apparatus or tool 1002 according to another exemplary embodiment and the containers(s) T connected thereto is shown. Figure 7A In the exemplary embodiment shown, the processing device 1002 is generally similar to Figure 1A , Figure 1B and Figure 1C The substrate processing tool is illustrated in the figure. The processing tool 1002 may generally have a processing section 1006 and an EFEM 1004 (continuing to the convention for illustrative purposes only, where the wafer can be considered as being loaded into the tool from the front). In an exemplary embodiment, the processing section 1006 and the EFEM 1004 may share a common controlled environment or atmosphere (e.g., an inert gas (N2), (Ar), or very clean, dry air). The processing section 1006 is schematically shown and may include one or more processing sections or modules connected to the EFEM 1004. Figure 7A The arrangement shown is merely exemplary, and the EFEM and (multiple) processing section modules may be connected to each other in any desired arrangement in alternative embodiments. The (multiple) processing sections or modules 1006 may be isolated from the EFEM 1004, such as with a closable opening (e.g., a gate valve). Therefore, the processing sections may also be provided with a processing atmosphere different from the EFEM atmosphere. In alternative embodiments, processing section 1006 may include a loading lock that allows the processing modules to have dissimilar atmospheres or to maintain a vacuum connection to the EFEM, as will be further described below.

[0053] Figure 7AThe EFEM 1004 in the exemplary embodiment shown may be similar to the EFEM described above, unless otherwise stated. EFEM 1004 may include suitable environmental controls to maintain a desired controlled environment or atmosphere within the EFEM as the substrate is transported to and from processing section 1006. For example, EFEM 1004 may include: a controller 31000 (which may be substantially similar to the controller 400 described above); one or more fluid control valves 31010, 31020; a pressure relief valve or check valve 31030; and sensors, such as, for example, a pressure sensor 31040, a contamination sensor 31041, and a temperature sensor 31042. The controller may be configured to adjust or regulate properties of the airflow 31050 of the controlled environment within the EFEM (and processing section 1006), such as temperature, pressure, and rate. For example, controller 31000 may receive signals from pressure sensor 31040, temperature sensor 31042, and environmental contamination sensor 31041. Depending on the environmental information in those signals, the controller can release or increase the pressure within the EFEM, or increase or decrease the airflow within the EFEM 31050, by actuating appropriate valves 31010, 31030. The controller 31000 can also be configured to increase or decrease the temperature of the gas within the EFEM based on temperature readings provided by temperature sensor 31042 (e.g., by adjusting the coolant flow rate through radiator 31060). As can be appreciated, although regarding Figure 7A and Figure 7B The controller 31000 and associated valves and sensors are described, but the controller 31000 can be used to control environments (multiple) of other embodiments disclosed herein.

[0054] EFEM 1004 may include a substrate transport device or robot 1004R capable of holding and transporting substrates (as will be appreciated, the robot may be of any desired type). Similar to the case described above, EFEM 1004 may include a loading port 24 (as described herein) for connecting one or more container T interfaces to tool 1002 and allowing substrates to be loaded into and unloaded from tool 1002. The loading port 24 of EFEM 1004 and the corresponding complementary interface portions of the container(s) T(as described herein) may be configured to enable loading and unloading of substrates between the container and the EFEM without degrading the controlled environment in EFEM 1004 and processing section 1006. The complementary interface portions of EFEM loading port 24 and container T(as collectively referred to as container-to-EFEM interfaces) may be arranged such that the container(s) T(interfaced with the EFEM) are integrated into the tool. For example, the container(s) T thus integrated via loading port 24 can define multiple chambers sharing the same controlled atmosphere as the EFEM, and thus enable the substrate to be held in the same controlled atmosphere as the EFEM, allowing the substrate to be transported directly from the container(s) T to the processing section or processing module by the EFEM transport robot 1004R. Similar to the aspects of this disclosure previously described, Figure 7A In the exemplary embodiment shown, the container-to-EFEM interface defines a portion, which may be referred to as a clean tunnel, extending from the container chamber through the interface into the EFEM and through the processing section (having substantially the same cleanliness as that extending through the EFEM and processing section). The clean tunnel can be closed (e.g., when the container(s) are removed from the loading port) and can be freely opened without degrading the clean tunnel. Figure 7A In the aspects shown, the container-to-EFEM interface can also be arranged such that container T can be directly integrated with tools from the preceding container environment in a manner substantially similar to that described in U.S. Patent No. 9,105,673, entitled "SideOpening Unified Pod," issued August 11, 2015, the disclosure of which is incorporated herein by reference in its entirety. Therefore, in Figure 7AIn the aspects illustrated, (multiple) containers T can interface with and be directly integrated into processing tools that have different or dissimilar environments (e.g., clean air to an inert gas environment, or clean air to a vacuum), and then be transported directly between tools with different or dissimilar environments and interfaced and integrated with these tools again, as will be further described below. Thus, an EFEM robot 1004R can be used to directly transfer (multiple) substrates with controlled environments from a processing section (similar to processing section 1006) to (multiple) containers T via a clean tunnel, the (multiple) containers T being directly transported and interfaced to an EFEM (similar to EFEM 1004) of another tool that may have dissimilar / different controlled environments, and the EFEM robot can directly transfer (multiple) substrates to the processing section via a clean tunnel now defined in the other tool without degrading the controlled environment in the other processing tool. In practice, the container-to-EFEM interface and the container combination can be considered as defining an external loading lock or a container loading lock.

[0055] Still referencing Figure 7A ,exist Figure 7A In the aspects illustrated herein, for illustrative purposes, loading port 24 is shown connected to a container T interface; however, in alternative embodiments, the loading port may be arranged to connect to any desired number of container interfaces. For example, in an alternative aspect, the loading port may have a generally stacked configuration capable of connecting several container interfaces arranged in a certain stack, similar to the configuration described in U.S. Patent No. 9,105,673, the disclosure of which is previously incorporated herein by reference in its entirety. According to this disclosure, loading port 24 may have a vacuum source 1010V capable of communicatively connecting to the containers(s) T held at the loading port to pump down the containers, for example, to clean molecular contaminants from the interior of the containers and the substrate therein when the containers are at the loading port. Conversely, the containers may be arranged in any suitable manner to communicatively interface with the vacuum source 1010V at the loading port and to withstand the pressure in the container casement when the containers are pumped down to a vacuum, as described in U.S. Patent No. 9,105,673.

[0056] The container T may have suitable passageways and (multiple) orifices or ports 776 (which may be vacuum ports, purge gas ports, or ports shared by both vacuum gas sources and purge gas sources) such that when the container is connected or coupled to the loading port 24, the vacuum source 1010V of the loading port is automatically connected to the container housing and communicates with the interior of the container. As will be appreciated, the container seals (see, for example, door seal 940 in Figure 9) have the desired integrity to withstand vacuum across the seals.

[0057] like Figure 7A As seen in the illustrated exemplary embodiment, the container T can also be configured to be communicatively connected to a gas feeder, such as an exhaust or purge gas source. Figure 7A In the exemplary embodiment shown, when container T is placed on the container support of loading port 24, the container can be communicatively connected to gas source / feed 1010G. As will be appreciated, container T may have a suitable inlet port 776 (plug and suitable gas passage connecting the interior of the container) to be coupled (e.g., automatically) to the nozzle of gas feed 1010G, such as when the container is placed on the loading port support surface. Figure 7AThe arrangement of the gas source interface between the loading port and the container shown is merely exemplary, and in alternative embodiments, the gas source interface between the container and the loading port may have any other desired location and configuration. As previously stated, the gas source 1010G may be able to supply, for example, purge gas and / or exhaust gas to the container located at or on the loading port 24. For example, if the container T is properly positioned (e.g., from a top-mounted transport) at the loading port 24, and the gas feed nozzle is connected to the container to feed gas into the container housing, purge gas (e.g., N2) may be fed into the container if desired (depending on the internal atmosphere of the container when it is positioned at the loading port, and the environment maintained in the EFEM). Therefore, if the container contains, for example, a certain processing atmosphere (e.g., from the interface with the previous tool) and EFEM 1004 can maintain an inert gas or very clean air atmosphere that may be dissimilar to the container atmosphere, then when the container is positioned at the loading port, a desired purge gas can be fed into the container (e.g., via gas feeder 1010G) to purge the container atmosphere, allowing the container to be connected to the loading port opening interface and integrated into tool 1002, as previously described. Furthermore, if the container atmosphere is considered incompatible with the EFEM environment or may introduce undesirable contaminants into the EFEM environment, when the container is positioned at the loading port (but, for example, before exposing the interior of the container to the EFEM environment), the interior of the container can be evacuated sufficiently via vacuum source 1010V and filled with an inert gas (e.g., N2, very clean air) similar to the environment in the EFEM to remove potential contaminants from the container T and allow the container T to be integrated into the tool, as previously described. As can be appreciated, one or more of ports 776 may be connected to a vacuum source 1010V, and one or more other ports 776 may be connected to a purge gas source 1010G to purge the container T.

[0058] As described above, in addition to or in place of the vacuum source 1010V, the purge gas feeder 1010G can operate the actuator 5000 in a manner substantially similar to that described above. Information about the container atmosphere can be recorded on an RFID (Radio Frequency Identification) tag or other suitable data storage device that can be read (or otherwise accessed) by a suitable reader located at or near the loading port 24 where the container is loaded. Thus, suitable information about the container's interior can be obtained by the tool controller, reviewed with a desired protocol, and, if necessary, evacuated and vented when the container is positioned at the loading port 24, as previously described. For example, when the container is docked to the loading port or at any other suitable time, information about the container atmosphere can be recorded, for example, on a storage device carried by the container. This information can also be tracked by a controller distributed throughout the FAB if necessary. As will be appreciated, the container T can also be connected to an EFEM interface that may not have a vacuum and gas feeder connection. In alternative embodiments, the container may include an internal or onboard purge gas source (such as that described in U.S. Patent 9,105,673) to purge the container when it is positioned at the loading port. As will be appreciated, in other aspects, the loading port interface connected to the container interface may be provided with a vacuum connection without a gas feed, such that gas is supplied, for example, from a gas source onboard to the container. Thus, as will be appreciated, the container can now be used as a substrate cleaning chamber for a tool, which stores substrates at the tool so they are undergoing cleaning. As will be appreciated, container evacuation / venting may also be performed before the container T is removed from the loading port 24, such as when the container T is repositioned to another tool.

[0059] As mentioned above, Figure 7A The arrangement of the loading port and container-to-tool interface shown is merely exemplary, and in other respects the interface may have any other desired configuration. For example, the gas feeder may be positioned as needed to exhaust gas from the EFEM environment into the container after the container has been evacuated.

[0060] Now for reference Figure 2 Figure 6 Figure 8 and Figure 9AThe support station 36 of the loading port module 24 includes box support purge ports 810, 811 that can be optionally configured, and these box support purge ports have more than one purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B disposed on the container T support (such as the support station 36). Each of the more than one purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B is configured such that purge nozzles 900-903 at the respective purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B are connected to at least one purge port 600-609 of the containers T-TJ. Each purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B defines an interchangeable purge nozzle interface 820-831. Figure 8 and Figure 9A This allows for the rapid exchange of different interchangeable purge nozzles 900-903 corresponding to different interchangeable purge nozzle modules 1910, 910 (described below) between different purge nozzle positions, thereby instantly reconfiguring the loading port module with purge nozzles at the desired positions (so that different containers with different characteristics can be paired at the same loading port module). Each of the different interchangeable purge nozzle modules 1910, 910 has a different predetermined purge nozzle configuration (e.g., corresponding to a predetermined purge port configuration of the container T to be coupled to loading port 24). Each of the different interchangeable purge nozzle modules 1910, 910 is removably mounted to a corresponding purge nozzle interface 820-831 of one or more of purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B, which correspond to different predetermined purge nozzle configurations of the interchangeable purge nozzle modules 1910, 910. Each of the different interchangeable purge nozzle modules 1910, 910 conforms to and enables connection to different purge ports 600-603 of at least one purge port 600-609 of at least one container T-TJ (FIG. 6B) having different purge port 600-609 characteristics.

[0061] Still referencing Figure 2 Figure 6 Figure 8 and Figure 9AEach of the interchangeable purge nozzle modules 1910, 910 has at least one purge nozzle 900-903 and is selectable from several different interchangeable purge nozzle modules 1910, 910. Each of the purge nozzle modules 1910, 910 has a different predetermined purge nozzle configuration for modular mounting to the interchangeable purge nozzle interfaces 820-831, such that the selectable mounting of the interchangeable purge nozzle modules 1910, 910 changes the configuration of the box support purge ports 810, 811 from a first configuration to a second configuration, in which case, at the purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B, the at least A purge nozzle 900-903 conforms to and achieves connection with a first container T-TJ having a first predetermined purge port characteristic. In this second configuration, purge port nozzles 900-903 at purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, and 804B conform to and achieve connection with a second container T-TJ having a second predetermined purge port characteristic, which differs from the first predetermined purge port characteristic. For example, as can be seen in 6B, the different purge port characteristics of the container T-TJ are the position / configuration of purge ports 600-609 relative to the kinematic positioning features (e.g., slot T22) of the corresponding container T-TJ. For example, purge ports 600 and 601 of containers T, TA, and TD are referred to herein as narrow external front purge ports (e.g., found in OB-CB_SHIN_ETSYFOUP of Shin-Etsu Polymer Ltd.) and correspond to purge port nozzle positions 801A and 801B of loading port 24. Purge ports 606 and 607 of containers TG, TH, and TJ are referred to herein as wide external front purge ports (e.g., found in Spectra of Entegris Ltd.). TMThe purge ports 608 and 609 of containers TE, TF, and TI are referred to herein as internal front purge ports (such as those found on Entegris' A300 FOUP and Shin-Etsu Polymer's CF-A_SHIN-ENSY FOUP) and correspond to the purge port nozzle positions 802A and 802B of loading port 24. The purge ports 602 and 603 of containers T, TB, TE, and TJ are referred to herein as forward rear purge ports (such as those found on Entegris' Spectra...). TM The purge port FOUPs of containers 24 (such as the 4-port FOUP of Miraial Ltd., and the CT-CF-S_SHIN_ETSY and T-CF-S_SHIN_ETSY FOUPs of Shin-Etsu Polymer Ltd.) correspond to the nozzle positions 803A and 803B of the purge port of loading port 24. The purge ports 604 and 605 of containers TC, TD, TH, and TI are referred to herein as rearward purge ports (such as those found on the A300 FOUP of Entegris Ltd. and the CF-A_SHIN-ENSY FOUP of Shin-Etsu Polymer Ltd.) correspond to the nozzle positions 804A and 804B of the purge port of loading port 24. Therefore, the corresponding purge port configuration of each of containers T-TJ differs from the purge port configuration of the other of containers T-TJ.

[0062] Interchangeable purge nozzle modules 1910, 910 can be physical purge nozzle modules, virtual purge nozzle modules, or a combination of both. Each different purge port nozzle module 1910, 910 (virtual module 910 has a configuration similar to physical module 1910 and is similarly numbered except as described) corresponds to different predetermined purge port characteristics (generally referred to herein as container T, unless specific aspects of container T-TJ are mentioned), such as, for example, the location of purge ports 600-609 of container T (e.g., wide external front purge port, narrow external front purge port, internal front purge port, forward-facing rear purge port, backward-facing rear purge port) and / or configuration (e.g., hard plastic purge port mating interface, fluoropolymer purge port interface).

[0063] refer to Figure 9A-9G Examples of the physical purge nozzle module 1900 are purge nozzle modules 1910T, 1910TA, 1910TB, 1910TC, 1910TD, 1910TE, 1910TF, 1910TG, 1910TH, 1910TI, 1910TJ and purge nozzle modules 1910TFLU, 1910TAFLU, 1910TBFLU, 1910TCFLU, 1910TDFLU, 1910TEFLU, 1910TFFLU, 1910TGFLU, 1910THFLU, 1910TIFLU, 1910TJFLU (Note: purge nozzle modules 1910TFLU, 1910TAFLU, 1910TBFLU, 1910TCFLU, 1910TDFLU, 1910TEFLU, 1910TF...) FLU, 1910TGFLU, 1910THFLU, 1910TIFLU, and 1910TJFLU are substantially similar to one of the corresponding purge nozzle modules 1910T, 1910TA, 1910TB, 1910TC, 1910TD, 1910TE, 1910TF, 1910TG, 1910TH, 1910TI, and 1910TJ (e.g., 1910TFLU corresponds to 1910T, 1910TAFLU corresponds to 1910TA, etc.), but have a different type of purge nozzle connector portion (see [link to purge nozzle module]) than that of the corresponding one of the purge nozzles 1910T, 1910TA, 1910TB, 1910TC, 1910TD, 1910TE, 1910TF, 1910TG, 1910TH, 1910TI, and 1910TJ. Figure 9A (Refer to connector sections 934A and 934B). Figure 9A and Figure 9BThe purge nozzle modules 1910TB and 1910TC are interchangeably configured to be adjacent to the rear side of the reciprocating member 52 (opposite to the opening 30O of the loading port 24 frame 29) to be connected to the corresponding forward rear purge ports 602 and 603 or the rear purge ports 604 and 605 of the corresponding containers TB and TC, respectively. Each distinct physical purge port nozzle module 1910TB, 1910TC has a module frame (e.g., see base / frame 950, which does not exist for the virtual purge port nozzle module 910), wherein each corresponding purge port nozzle 902, 903 is mounted to a corresponding base 950 such that base 950 is common to each corresponding purge port nozzle 902, 903, and base 950 defines a common removable mounting to support station 36, such that removably mounting base 950 to support station 36 enables each purge port nozzle 902, 903 to the corresponding purge port nozzle interface 826-830 as a common module unit. In other respects, base 950 may be secured to container support 36 for use with the virtual purge port nozzle module 910 as described herein, wherein base 950 remains attached to support station 36.

[0064] It should be noted that purge nozzle modules 1910TB, 1910TC, 1910TBFLU, and 1910TCFLU are described in relation to purge nozzle module 1910TB. Unless otherwise stated, purge nozzle modules 1910TC, 1910TBFLU, and 1910TCFLU are substantially similar to purge nozzle module 1910TB. The substrate 950 of each different purge port nozzle module 1910TB, 1910TC, 1910TBFLU, and 1910TCFLU, having on it a plurality of corresponding purge port nozzles 902, 903, can be interchanged as a module unit with another module frame 950 of each other different purge port nozzle module 1910TB, 1910TC, 1910TBFLU, and 1910TCFLU, having on it a corresponding different purge port nozzle 902, 903, as described herein. The purge nozzle module 1910TB includes a base 950 and a nozzle support 951 movably coupled to the base 950. The nozzle support 951 can be movably coupled to the base 950 in any suitable manner (e.g., with multiple linear guides 955) to allow movement at least along a direction 999 (which is substantially perpendicular to the support plane defined by the positioning / kinematic coupling pin 66 of the container T). Any suitable physical limiting stops 946, 947 may be provided on the base 950 and / or the nozzle support 951 to limit the height 1200 of the purge nozzles 902, 903 above the reciprocating surface 52S. Figure 12A(It should be noted that height 1200 is representative, and the height 1200 of one or more of the purge nozzle modules may have different corresponding heights.) A linear actuator 985 is provided and communicatively coupled to a controller 400, wherein, upon command from the controller 400, the linear actuator 985 raises (or lowers) the nozzle support 951 and the purge port nozzles 902, 903 thereon, such that the purge port nozzles 902, 903 engage or disengage from the engagement container T. Multiple actuator engagement / disengagement postures can be taught to the controller 400 in any suitable manner, and in some aspects, these actuator engagement / disengagement postures can vary between the purge nozzle modules 1910TB, 1910TC (and 1910TBFLU, 1910TBTCFLU) and the containers TB, TC. Each of the multiple different actuator engagement / disengagement postures can be taught to the controller 400 and programmed into the controller selector table 403 (see...). Figure 1A In this configuration, when different purge nozzle modules 1910TB, 1910TC (and 1910TBFLU, 1910TCFLU) are exchanged, the controller detects / identifies the newly installed purge nozzle module (or the operator inputs the identification of the newly installed purge nozzle module into the controller), and the controller 400 selects (multiple) corresponding actuator engagement / disengagement postures from the controller selector table 403. Any suitable biasing member 954 can be provided to bias the at least one purge nozzle 902, 903 coupled to the purge nozzle module 1910TB away from (e.g., where the linear actuator 985 raises the nozzle support 951 toward the container T) or against (e.g., where the linear actuator 985 lowers the nozzle support 951 away from the container T) the forward rear purge ports 602, 603 of the corresponding container TB. When the biasing member 954 biases the at least one purge nozzle 902, 903 against the forward-type rear purge port 602, 603, the biasing member 954 can provide a predetermined engagement force (note that the at least one purge nozzle 902, 903 of the purge nozzle module 1910TC is biased against the rear-type rear purge port 604, 605 of the container TC).

[0065] Interchangeable purge port nozzle interface 820-831 ( Figure 8 and Figure 9AEach of the interchangeable purge port nozzle interfaces 820-830 is configured to have a predetermined position relative to a predetermined reference (e.g., kinematic positioning pin 66) of the cassette support station 36, such that each purge port nozzle 902, 903 of the different interchangeable purge port nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU mounted to the interchangeable purge port nozzle interfaces 826-830 is determined to be positioned relative to a predetermined reference (e.g., slot T22) of each different cassette container T. For example, the base 950 includes any suitable positioning features 956 (such as holes / orifices) that mate with corresponding pins 957 of the reciprocating member 52, such that the purge nozzle modules 1910TB, 1910TC, 1910TBFLU, and 1910TCFLU can be interchangeably and repeatably positioned relative to any suitable reference(s) of the reciprocating member 52 (e.g., kinematic positioning pins 66). In other aspects, the base 950 can be coupled to the reciprocating member 52 and can be interchangeably and repeatably positioned relative to any suitable reference(s) of the reciprocating member 52 (e.g., kinematic positioning pins 66) in any suitable manner, such as with any suitable positioning clamp 967 that interfaces with, for example, the positioning pins 66 and, for example, the positioning features 956 (or other suitable positioning features) of the base 950 for positioning the base 950 on the reciprocating member 52 relative to the positioning pins 66. The repeatable positioning of the purge nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU relative to the kinematic positioning pin 66 is essentially the positioning of the purge nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU and the at least one purge nozzle 902, 903 connected thereto relative to the purge ports 602-604 when the purge nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU are coupled to the reciprocating member 52 (i.e., the purge nozzles 902, 903 or modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU are not further positioned after being coupled to the reciprocating member 52). Therefore, the purge nozzle modules 1910TB, 1910TC, 1910TBFLU, and 1910TCFLU can be quickly interchanged, allowing the loading port 24 arrangement to be instantly reconfigured among different purge nozzle module configurations that correspond to the TB and TC purge port configurations of the containers.

[0066] refer to Figure 9A , Figure 9B , Figure 13 and Figure 14 Each of the interchangeable purge port nozzle interfaces 826-829 defines a nozzle positioning reference (or purge nozzle reference) 952, 953, which definitively represents each of the at least one purge port 602-605 of different substrate container TB, TC with different purge port characteristics (e.g., inlet, outlet, position, etc.). For example, nozzle support 951 includes purge nozzle references 952, 953 coupled to nozzle support 951 to define purge port nozzle positions 803A, 803B, 804A, 804B. References 952, 953 include any suitable purge nozzle positioning feature 1300 (e.g., orifice / orifice) to which purge nozzles 902, 903 are coupled (e.g., with a suitable pin 1400 inserted into the corresponding purge nozzle positioning feature 1300). Figure 9A The engagement between pin 1400 and purge nozzle positioning feature 1300 allows purge nozzles 902, 903 to be held on reciprocating member 52, enabling loading port 24 to operate for loading container T onto and unloading container T from processing equipment. In other respects, purge nozzles 902, 903 can be held on reciprocating member 52 in any suitable manner (e.g., fasteners, clamps, protrusions, etc.).

[0067] Also refer to Figure 10 The purge nozzles 902 and 903 can be connected to the inlet gas manifold 10030 or the outlet gas manifold 10040 in any suitable manner. In one aspect, the purge nozzles 902 and 903 may have corresponding fluid rigid / rigid lines or fluid lines 990 and 991 connected to them, wherein the corresponding connectors 992 of the fluid lines 990 and 991 extend below the container support station 36. Corresponding flexible hoses (see hoses 1020-1023) can connect the corresponding connectors 992 to the fluid lines 990 and 991 to connect the purge nozzles 902 and 903 to the inlet gas manifold 10030 or the outlet gas manifold 10040. In other aspects, the corresponding flexible hoses can connect the purge nozzles 902 and 903 to the inlet gas manifold 10030 or the outlet gas manifold 10040 without the intervention of the fluid lines 990 and 991.

[0068] Depending on the characteristics of the purge nozzles of the containers(s) TB, TC to be connected to loading port 24, the purge nozzle modules can be configured as purge nozzle modules 1910TB, 1910TBFLU (for connection to forward-facing rear purge ports 602, 603) or purge nozzle modules 1910TC, 1910TCFLU (for connection to rearward-facing rear purge ports 604, 605). Each purge nozzle 902, 903 is removably mounted to interchangeable purge port nozzle interfaces 826-829 as a unit of another purge port nozzle 902, 903 independent of the corresponding purge port nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU, and each independently mounted purge port nozzle 902 of the corresponding purge port nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU The nozzles 902 and 903 of the corresponding purge port nozzle modules 1910TB, 1910TC, 1910TBFLU, and 1910TCFLU are independently interchangeable to enable the interchangeability of the corresponding purge port nozzle modules 1910TB, 1910TC, 1910TBFLU, and 1910TCFLU with the corresponding purge port nozzle modules 1910TB, 1910TC, 1910TBFLU, and 1910TCFLU. For example, each purge nozzle reference 952, 953 includes a set of slots 1305 that define reference stops 1302, 1303 that interface with the corresponding positioning fasteners 905, 906. In order to move the purge nozzle references 952, 953 to the appropriate position (e.g., forward position) to interface with the purge ports 602, 603 and to configure the purge nozzle modules as purge nozzle modules 1910TB, 1910TBFLU, the positioning fasteners 905, 906 are loosened to allow the purge nozzle references 952, 953 to slide along direction 1401, such that the reference stop 1303 substantially contacts and rests against the positioning fastener 905 (e.g., ...). Figure 14 (As shown in the diagram). Here, in the forward position, the purge nozzles 902 and 903 of the purge nozzle modules 1910TB and 1910TBFLU are located in the purge port nozzle positions 803A and 803B. Similarly, in order to configure the purge nozzle modules as purge nozzle modules 1910TC and 1910TCFLU for interface connection with purge ports 604 and 605, the positioning fasteners 905 and 906 are released to provide purge nozzle references 952 and 953 to slide into the appropriate position (e.g., rearward position) for interface connection with purge ports 604 and 605, wherein the purge nozzle references 952 and 953 move in direction 1301 such that the reference stop 1302 substantially contacts and rests against the positioning fastener 906 (e.g., as shown in the diagram). Figure 13(As shown in the diagram). Here, in the rearward position, the purge nozzles 902 and 903 of the purge nozzle modules 1910TC and 1910TCFLU are located in the purge port nozzle positions 803A and 803B.

[0069] refer to Figure 8 , Figure 9A and Figure 9C-9E The purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU are interchangeably configured to be adjacent to the front side of the reciprocating element 52 (or adjacent to the opening 30O if it is the loading port 24 frame 29) to interface with the corresponding narrow external front purge ports 600, 601 or wide external front purge ports 606, 607 or internal front purge ports 608, 609 of the corresponding containers TA, TG, TF. Each different purge port nozzle module 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU has a module frame (e.g., see base / frame 970), wherein each corresponding purge port nozzle 900, 901 is mounted to the corresponding base 970 such that base 970 is common to each corresponding purge port nozzle 900, 901, and base 970 defines a common removable mounting to support station 36, such that removably mounting base 970 to support station 36 enables each purge port nozzle 900, 901 to the corresponding purge port nozzle interfaces 820-825, 831 as a common module unit. In other respects, base 970 may be fixed to container support 36 for use with virtual purge port nozzle modules as described herein.

[0070] It should be noted that purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU are described in relation to purge nozzle module 1910TG. Unless otherwise stated, purge nozzle modules 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU are substantially similar to purge nozzle module 1910TG. The base 970 of each different purge port nozzle module 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU, having a corresponding purge port nozzle 900, 901, can be interchanged as a module unit with another module frame 970 of each other different purge port nozzle module 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU, having a corresponding different purge port nozzle 900, 901, as described herein. The purge nozzle module 1910TG includes a base 970, a nozzle support 971 movably connected to the base 970, and a support bridge 972. The support bridge 972 is connected to and carried by the nozzle support 971. The nozzle support 971 can be movably coupled to the base 970 in any suitable manner (e.g., with (a plurality of) linear guides 975) so as to move at least along direction 999 (which is substantially perpendicular to the support plane defined by the positioning / kinematic coupling pin 66 of the container T). The support bridge 972 can be configured to engage the inner surface 1202 of the reciprocating member 52. Figure 12AThis is to control the height 1201 of the purge nozzles 900, 901 above the surface 52S of the reciprocating surface 52 (note that height 1201 is representative, and the height 1201 of one or more of the purge nozzle modules may have different corresponding heights). A linear actuator 985 is provided in a manner similar to that described above, and this linear actuator is communicatively coupled to the controller 400 to raise (or lower) the nozzle support 971 and the purge port nozzles 900, 901 thereon, such that the purge port nozzles 900, 901 engage or disengage from the engagement container T. In a manner similar to that described above, when exchanging purge nozzle modules, the controller can detect / identify newly installed purge nozzle modules 1910TG, 1910TGFLU, 1910TA, 1910TAFLU, 1910TF, 1910TFFLU (or the operator can manually input the identification of the newly installed purge nozzle module), causing the controller 400 to select (multiple) corresponding actuator engagement / disengagement postures from the controller selector table 403. Any suitable biasing member 974 can be provided to bias the at least one purge nozzle 900, 901 coupled to the purge nozzle module 1910TG (and purge nozzle module 1910TGFLU) away from (e.g., where the linear actuator 985 raises the nozzle support 951 toward the container T) or against (e.g., where the linear actuator 985 lowers the nozzle support 951 away from the container T) the wide external front purge ports 606, 607 of the corresponding container TG. When the biasing member 974 biases the at least one purge nozzle 900, 901 against the wide outer front purge ports 606, 607, the biasing member 974 can provide a predetermined engagement force (note that the at least one purge nozzle 900, 901 of the purge nozzle modules 1910TA, 1910TAFLU is biased against the narrow outer front purge ports 600, 601, and the at least one purge nozzle 900, 901 of the purge nozzle modules 1910TF, 1910TFFLU is biased against the inner front purge ports 608, 609).

[0071] As described above, the interchangeable purge port nozzle interface 820-831 ( Figure 8 and Figure 9AEach of the interchangeable purge port nozzle interfaces 820-831 is configured to have a predetermined position relative to a predetermined reference (e.g., kinematic positioning pin 66) of the cassette support station 36, such that each purge port nozzle 900, 901 of the different interchangeable purge port nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU mounted to the interchangeable purge port nozzle interfaces 820-825, 831 is determined to be positioned relative to a predetermined reference (e.g., slot T22) of the cassette support station 36. In other words, the interchangeable purge port nozzle interfaces 820-825, 831 are configured to have a predetermined position relative to a predetermined reference (e.g., pin 66) of the support station 36, such that each purge port nozzle 900, 901 of the different interchangeable purge port nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU is determined to be positioned relative to a predetermined reference (e.g., slot T22) of the cassette support station 36. For example, the base 970 includes any suitable positioning features 976 (such as holes / orifices) that mate with corresponding pins 977 of the reciprocating member 52, such that the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU can be interchangeably and repeatably positioned relative to any suitable reference(s) of the reciprocating member 52 (e.g., kinematic positioning pins 66). In other aspects, the base 970 can be coupled to the reciprocating member 52 and can be interchangeably and repeatably positioned relative to any suitable reference(s) of the reciprocating member 52 (e.g., kinematic positioning pins 66) in any suitable manner, such as with any suitable positioning jig 968 that interfaces with, for example, the positioning pins 66 and, for example, the positioning features 976 (or other suitable positioning features) of the base 970 for positioning the base 970 on the reciprocating member 52 relative to the positioning pins 66. The repeatable positioning of the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU relative to the kinematic positioning pin 66 is essentially achieved when the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU are connected to the reciprocating element 52, relative to the purge ports 600, 601, and 606-609. Positioning of purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU and at least one purge nozzle 900, 901 connected thereto (i.e., not further positioning of purge nozzle 900, 901 or module 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU after connection with reciprocating member 52).Therefore, the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU can be quickly interchanged, allowing the loading port 24 arrangement to be instantly reconfigured among different purge nozzle module configurations that correspond to the TG, TA, and TC purge port configurations of the container.

[0072] refer to Figure 9A , Figure 9C-9E , Figure 13 and Figure 14 As described above, each of the interchangeable purge port nozzle interfaces 820-825 defines a nozzle positioning reference (or purge nozzle reference) 980A, 980B, 981A, 981B, 982A, 982B, which definitively represents each of the at least one purge port 600, 601, 606-609 of different substrate container T having different purge port characteristics (e.g., inlet, outlet, etc.). For example, the nozzle support 971 includes purge nozzle references 980A, 980B, 981A, 981B, 982A, 982B coupled to the nozzle support 971 to define purge port nozzle positions 801A, 801B, 802A, 802B, 800A, 800B. References 980A, 980B, 981A, 981B, 982A, and 982B include any suitable purge nozzle positioning feature 1300 (such as a hole / orifice), to which purge nozzles 900 and 901 are coupled (e.g., by means of a suitable pin 1400 inserted into the corresponding purge nozzle positioning feature 1300). Figure 9A The engagement between pin 1400 and purge nozzle positioning feature 1300 allows purge nozzles 900, 901 to be held on reciprocating member 52, enabling loading port 24 to operate for loading container T onto and unloading container T from processing equipment. In other respects, purge nozzles 900, 901 can be held on reciprocating member 52 in any suitable manner (e.g., fasteners, clamps, protrusions, etc.). See also... Figure 10The purge nozzles 900, 901 can be connected to the inlet gas manifold 10030 or the outlet gas manifold 10040 in any suitable manner. In one aspect, the purge nozzles 900, 901 may have corresponding fluid rigid / rigid lines or fluid lines 993, 994 connected thereto, wherein the corresponding connectors 995 of the fluid lines 993, 994 extend below the container support station 36. Corresponding flexible hoses (see hoses 1020-1023) can be connected to the corresponding connectors 995 of the fluid lines 993, 994 to connect the purge nozzles 900, 901 to the inlet gas manifold 10030 or the outlet gas manifold 10040. In other aspects, the corresponding flexible hoses can connect the purge nozzles 900, 901 to the inlet gas manifold 10030 or the outlet gas manifold 10040 without the intervention of the fluid lines 993, 994.

[0073] Depending on the characteristics of the purge nozzles of the containers(s) T to be connected to loading port 24, the purge nozzle modules may be configured as purge nozzle modules 1910TG, 1910TGFLU (for connection to wide external front purge ports 606, 607), purge nozzle modules 1910TA, 1910TAFLU (for connection to narrow external front purge ports 600, 601), or purge nozzle modules 1910TF, 1910TFFLU (for connection to internal front purge ports 608, 609). Each purge nozzle 900, 901, as a unit independent of the corresponding purge port nozzle module 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU, is removably mounted to the interchangeable purge port nozzle interface 820-825, and each independently mounted purge port nozzle 900, 901 of the corresponding purge port nozzle module 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU is associated with a different corresponding purge port nozzle module. The purge port nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU have different purge port nozzles 900 and 901 that can be independently interchanged to enable the interchangeability of the corresponding purge port nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU with different corresponding purge port nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU. For example, the positioning feature 1300 of references 980A, 980B, 981A, 981B, 982A, 982B, and the purge nozzles 900, 901 are configured such that the purge nozzles 900, 901 can be selectively and interchangeably positioned at any or more of the purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B defined by the respective references 980A, 980B, 981A, 981B, 982A, 982B. Here, in order to construct the purge nozzle module as purge nozzle modules 1910TG, 1910TGFLU, the purge nozzles 900, 901 are connected to references 980A, 980B corresponding to the purge port nozzle positions 802A, 802B, wherein, for example, the purge nozzle positioning feature 1300 and pin 1400 ( Figure 9AThe interfaces between the reciprocating parts 52 and 901 are interchangeably and repeatably positioned relative to any suitable reference(s) (e.g., kinematic positioning pins 66) of the reciprocating part 52. The repeatable positioning of purge nozzles 900, 901 relative to kinematic positioning pin 66 is essentially achieved when purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU are coupled to reciprocating member 52, and the at least one purge nozzle 900, 901 is positioned relative to purge ports 600, 601, 606-609. (i.e., no further positioning of purge nozzles 900, 901 or modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU and the at least one purge nozzle 900, 901 coupled thereto is achieved after coupling with reciprocating member 52).

[0074] Although the interchangeable purge nozzle modules 1910TA, 1910TF, 1910TG, 1910TB, 1910TC, 1910TAFLU, 1910TFFLU, 1910TGFLU, 1910TBFLU, and 1910TCFLU are described as being constructed for connection to containers TA, TF, TG, TB, and TC with two purge ports, the interchangeable purge nozzle modules 1910T, 1910TD, 1910TE, 1910TH, 1910TI, 1910TJ, 1910TFLU, 1910TDFLU, 1910TEFLU, 1910THFLU, 1910TIFLU, and 1910TJFLU may also include front and rear sections to allow connection to containers T, TD, TE, TH, TI, and TJ with four purge ports, such as... Figure 9F and Figure 9GAs illustrated in the figure. The front and rear portions of the purge nozzle modules 1910T, 1910TD, 1910TE, 1910TH, 1910TI, 1910TJ, 1910TFLU, 1910TDFLU, 1910TEFLU, 1910THFLU, 1910TIFLU, and 1910TJFLU may be independently / separately connected to separate portions of the container support 36, or in other respects, the front and rear portions may be an integral module connected to the container support 36 as a single unit. The purge nozzle modules 1910T, 1910TD, 1910TE, 1910TH, 1910TI, 1910TJ, 1910TFLU, 1910TDFLU, 1910TEFLU, 1910THFLU, 1910TIFLU, and 1910TJFLU can also be quickly interchanged, allowing the loading port 24 arrangement to be instantly reconfigured among different purge nozzle module configurations that correspond to the container T-TJ purge port configuration.

[0075] A purge nozzle module 1910T (and a purge nozzle module 1910TFLU that is substantially similar to the purge nozzle module 1910T) is configured for connection to four purge ports 600, 601, 602, and 603 of the container T. The purge nozzle module 1910T includes a front portion 1910T1 that is substantially similar to the purge nozzle module 1910TA, for connection to the narrow external front purge ports 600 and 601. The purge nozzle module 1910T also includes a rear portion 1910T2 that is substantially similar to the purge nozzle module 1910TB, for connection to the forward-facing rear purge ports 602 and 603.

[0076] The purge nozzle module 1910TD (and the purge nozzle module 1910TDFLU, which is substantially similar to the purge nozzle module 1910TD) is configured for connection to four purge ports 600, 601, 604, and 605 of the container TD. The purge nozzle module 1910TD includes a front portion 1910TD1, substantially similar to the purge nozzle module 1910TA, for connection to the narrow external front purge ports 600 and 601. The purge nozzle module 1910TD also includes a rear portion 1910TD2, substantially similar to the purge nozzle module 1910TC, for connection to the rearward rear purge ports 604 and 605.

[0077] A purge nozzle module 1910TE (and a purge nozzle module 1910TEFLU, which is substantially similar to the purge nozzle module 1910TE) is configured for connection to four purge ports 608, 609, 602, and 603 of the container TE. The purge nozzle module 1910TE includes a front portion 1910TE1, substantially similar to the purge nozzle module 1910TF, for connection to the internal front purge ports 608 and 609. The purge nozzle module 1910TE also includes a rear portion 1910TE2, substantially similar to the purge nozzle module 1910TB, for connection to the forward-facing rear purge ports 602 and 603.

[0078] The purge nozzle module 1910TH (and the purge nozzle module 1910THFLU, which is substantially similar to the purge nozzle module 1910TH) is configured for connection to four purge ports 606, 607, 604, and 605 of the container TH. The purge nozzle module 1910TH includes a front portion 1910TH1, substantially similar to the purge nozzle module 1910TG, for connection to the wide external front purge ports 606 and 607. The purge nozzle module 1910TH also includes a rear portion 1910TH2, substantially similar to the purge nozzle module 1910TC, for connection to the rearward rear purge ports 604 and 605.

[0079] The purge nozzle module 1910TI (and the purge nozzle module 1910TIFLU, which is substantially similar to the purge nozzle module 1910TI) is configured for connection to four purge ports 608, 609, 604, and 605 of the container TI. The purge nozzle module 1910TI includes a front portion 1910TI1, substantially similar to the purge nozzle module 1910TF, for connection to the internal front purge ports 608 and 609. The purge nozzle module 1910TI also includes a rear portion 1910TI2, substantially similar to the purge nozzle module 1910TC, for connection to the rearward rear purge ports 604 and 605.

[0080] The purge nozzle module 1910TJ (and the purge nozzle module 1910TJFLU, which is substantially similar to the purge nozzle module 1910TJ) is configured for connection to four purge ports 606, 607, 602, and 603 of the container TJ. The purge nozzle module 1910TJ includes a front portion 1910TJ1, substantially similar to the purge nozzle module 1910TG, for connection to the wide external front purge ports 606 and 607. The purge nozzle module 1910TJ also includes a rear portion 1910TJ2, substantially similar to the purge nozzle module 1910TB, for connection to the forward-facing rear purge ports 602 and 603.

[0081] The purge nozzle module 1910T-1910TJ (and the substantially similar 1910TFLU-1910TJFLU, as described herein) is illustrated as having (refer to...) Figure 9A and Figure 9B ) Base portion 936 (see example) Figure 9D The base portion 936 is substantially similar for all purge nozzles 900-903. The connector portion 934A is removably connected to the base portion 936 in any suitable manner (e.g., by clips, threads, snaps, or any other releasable fasteners) and is configured to interface with the corresponding purge ports 600-609 (depending on the position of the purge nozzle on the support station 36) to substantially form a seal between the corresponding purge ports 600-609 and the purge nozzles 900-903. The connector portion 934A may be configured to interface with purge ports constructed of hard plastic (or other suitable hard material) and includes a sealing member 935A (e.g., such as...). Figure 9A , Figure 9B The fluorinated elastomer O-ring shown is a sealing member that substantially contacts and seals the purge port constructed of hard plastic (or other suitable hard material). In other aspects, the connector portion 934A of the purge nozzle module 1910T-1910TJ can be replaced by a connector portion 934B (e.g., interchangeable with connector portion 934B in a manner similar to that described below), which is configured to interface with the purge port constructed of fluorinated elastomer and includes a substantially hard surface 935B. Figure 9A This surface substantially contacts and seals the purge port, which is constructed of a fluoroelastomer. In other aspects, purge nozzle modules 1910TFLU-1910TJFLU (see...) are available. Figure 9G The purge nozzle module 1910TFLU-1910TJFLU is basically similar to the corresponding purge nozzle module 1910T-1910T1; however, the purge nozzle module 1910T1-1910TJ is constructed with a connector portion 934B instead of a connector portion 934A.

[0082] As described above, the interchangeable purge nozzle modules 1910 and 910 can be physical purge nozzle modules, virtual purge nozzle modules, or a combination of both. Examples of the virtual purge nozzle module 910 include... Figure 9AThe virtual purge nozzle modules 910T, 910TA, 910TB, 910TC, 910TD, 910TE, 910TF, 910TG, 910TH, 910TI, 910TJ, 910T1, 910TA1, 910TB1, 910TC1, 910TD1, 910TE1, 910TF1, 910TG1, 910TH1, 910TI1, and 910TJ1 are illustrated in the figure. The virtual purge nozzle module 910 can be an array of purge nozzles 900-903, 900A-903A, which are interchangeably connected to the purge port nozzle interfaces 820-829 at one of the corresponding purge port nozzle positions 801A, 801B, 802A, 802B, 800A, 800B, 803A, 803B, 804A, and 804B. For example, virtual purge nozzle modules 910T and 1910T1 correspond to the purge port configuration of container T (with narrow external front purge ports 600 and 601 and forward-facing rear purge ports 602 and 603); virtual purge nozzle modules 910TD and 910TD1 correspond to the purge port configuration of container TD (with narrow external front purge ports 600 and 601 and backward-facing rear purge ports 604 and 605); virtual purge nozzle modules 910TE and 910TE1 correspond to the purge port configuration of container TE (with internal front purge ports 602 and 603 and forward-facing rear purge ports 602 and 603). The virtual purge nozzle modules 910TH and 910TH1 correspond to the purge port configuration of container TH (with wide external front purge ports 606 and 607 and rearward purge ports 604 and 605); the virtual purge nozzle modules 910TI and 910TI1 correspond to the purge port configuration of container TI (with internal front purge ports 608 and 609 and rearward purge ports 604 and 605); and the virtual purge nozzle modules 910TJ and 910TJ1 correspond to the purge port configuration of container TJ (with wide external front purge ports 606 and 607 and forward-facing rearward purge ports 602 and 603).

[0083] Virtual purge nozzle modules 910TA and 910TA1 correspond to the purge port configuration of container TA (with narrow external front purge ports 606 and 607). Virtual purge nozzle modules 910TF and 910TF1 correspond to the purge port configuration of container TF (with internal front purge ports 608 and 609). Virtual purge nozzle modules 910TG and 910TG1 correspond to the purge port configuration of container TG (with wide external front purge ports 606 and 607).

[0084] Virtual purge nozzle modules 910TB and 910TB1 correspond to the purge port configuration of container TB (with forward-facing rear purge ports 602 and 603). Virtual purge nozzle modules 910TC and 910TC1 correspond to the purge port configuration of container TC (with rearward-facing rear purge ports 604 and 605).

[0085] As will be appreciated, in one aspect, purge nozzles 900-903, 900A-903A are interchangeable with each other, such that purge nozzles 900, 901, 900A, 901A intended for connection with a front container purge port can be located on container support 36 for connection with a rear container purge port interface, and purge nozzles 902, 903, 902A, 903B intended for connection with a rear container purge port can be located on container support 36 for connection with a front container purge port interface. Additionally, purge nozzles 902, 903 can be moved between purge port nozzle positions 803A, 803B, 804A, 804B by moving purge nozzle references 952, 953 (as described herein) while the frame 950 remains attached to container support 36.

[0086] In other respects, different virtual purge nozzle modules 910T-910TJ, 910T1-910TJ1 (as described above) corresponding to one or more (or each) of containers T-TJ may also exist, such as in cases where the purge ports 600-609 of the containers have different connection characteristics (e.g., purge ports constructed of hard plastic or purge ports constructed of fluoroelastomer). For example, refer to Figure 9A and Figure 9B And as described above, each purge nozzle 900-903, 900A-903A includes a base portion 936 (see example...) Figure 9D ) and connector sections 934A, 934B (see example) Figure 9A and Figure 9B The base portion 936 is substantially similar for all purge nozzles 900-903, 900A-903A, and therefore the different connector portions 934A, 934B are interchangeable with each of the purge nozzles 900-903, 900A-903A and purge nozzle positions 801A, 801B, 802A, 802B, 800A, 800B, 803A, 803B, 804A, 804B. The base portion 936 includes, for example, a pin 1400. Figure 9A The pin is inserted into the corresponding purge nozzle positioning feature 1300, as described herein. The base portion 936 is also configured for connection with the corresponding flexible hose (see hoses 1020-1023) and / or the corresponding fluid lines 990, 991, 993, 994.

[0087] The connector portions 934A, 934B are removably connected to the base portion 936 in any suitable manner (e.g., by clips, threads, snaps, or any other releasable fasteners) and are configured to interface with the respective purge ports 600-609 (depending on the position of the purge nozzles on the support station 36) to substantially form a seal between the respective purge ports 600-609 and the purge nozzles 900-903, 900A-903A. The connector portion 934A may be configured to interface with a purge port constructed of hard plastic (or other suitable hard material) and includes a sealing member 935A (e.g., such as...). Figure 9A , Figure 9B The fluoroelastomer O-ring shown is a sealing member that substantially contacts and seals a purge port constructed of hard plastic (or other suitable hard material). The connector portion 934B can be configured to interface with a purge port constructed of fluoroelastomer and includes a substantially hard surface 935B. Figure 9A The surface substantially contacts and seals the purge port, which is constructed of a fluoroelastomer. The configurations of the purge nozzles 900-903, 900A-903A described herein are exemplary, and the purge nozzles may have any other suitable configurations for connection to any suitable purge port of any suitable container.

[0088] Since each purge nozzle 900-903, 900A-903A of the virtual purge nozzle modules 910T-910TJ, 910T1-910TJ1 is a separate and distinct purge nozzle (i.e., a separate purge nozzle that is installed and / or removed from the container support 36 on the frame, as with modules 1910TG, 1910TB), each purge port nozzle 900-903, 900A-903A is removably mounted to the purge port nozzle interface 820-829 as a unit independent of another purge port nozzle 900-903, 900A-903A of the corresponding purge port nozzle modules 910T-910TJ, 910T1-910TJ1. The corresponding purge port nozzle modules 910T-910TJ, 910T1-910TJ1 are also interchangeable with different purge port nozzle modules 910T-910TJ, 910T1-910TJ1 that have different corresponding purge port nozzles 900-903, 900A-903A. For example, when the virtual purge nozzle module 910TG is connected to the container support 36 in place of the virtual purge nozzle module 910T, each purge nozzle 900-903 of the virtual purge nozzle module 910T can be individually removed / detached from the container support 36 in any suitable order. After removing the purge nozzles 900-903 of the virtual purge nozzle module 910T, the purge nozzles 900A, 901A of the virtual purge nozzle module 910TG can be individually installed / connected to the container support 36 in any suitable order. In other respects, the connector portion 934A of the virtual purge nozzle module 910T can be removed and replaced with the connector portion 934B, instead of replacing the entire purge nozzles 900, 901, so that the virtual purge nozzle module 910T can be reconstructed as the virtual purge nozzle module 910T1. As described herein, depending on the purge port characteristics of the container T, the purge nozzles 900-903, 900A-903A can be connected to the container support 36 at any of the different purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B.

[0089] As described above, the interchangeable purge port nozzle interfaces 820-829 to which the purge nozzles 900-903, 900A-903A are connected are configured to have a predetermined position relative to a predetermined reference (e.g., pin 66) of the housing support 36, such that the optional installation of the interchangeable purge port nozzle modules 912-914, 912A-914A enables a deterministic positioning of each purge port nozzle 900-903, 900A-903A of the interchangeable purge port nozzle modules 910T-910TJ, 910T1-910TJ1 installed to the interchangeable purge port nozzle interfaces 820-829 relative to a predetermined reference (e.g., slot T22) of each different substrate housing T. This deterministic positioning is substantially consistent with the installation.

[0090] refer to Figure 11A-14 The container support 36 is illustrated with purge nozzles 900-903 and / or purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TB, 1910TC in different configurations (although purge nozzles 900-903 are illustrated, it should be understood that purge nozzles 900A-903A can be used in place of or in combination with purge nozzles 900-903). It should be noted that... Figure 11A-14 The configurations illustrated in the figures are not exhaustive of those described in this paper. For example, Figure 11A and Figure 11BThe illustration shows purge nozzles 900, 901 (e.g., for connection to wide external front purge ports 606, 607) located in purge port nozzle positions 802A, 802B, and purge nozzles 902, 903 (e.g., for connection to rearward purge ports 604, 605) located in purge nozzle positions 804A, 804B. As described above, in one aspect, purge nozzles 900-903 may be configured as virtual purge nozzle modules 910TH, 910TH1 or a combination of virtual purge nozzle modules 910TG, 910TG1 and 910TC, 910TC1. In other aspects, purge nozzles 902-903 may be part of physical purge nozzle modules 1910TC, 1910TCFLU (for connection to rearward purge ports 604, 605 – see Figure 6B), and purge nozzles 900-901 may be configured as purge nozzle modules 1910TG, 1910TGFLU (for connection to wide external front purge ports 606, 607 – see Figure 6B). In still other aspects, purge nozzles 900, 901 may be configured as virtual purge nozzle modules 910TG, 910TG1, while purge nozzles 902, 903 may be configured as physical purge nozzle modules 1910TC, 1910TCFLU. In other respects, purge nozzles 900 and 901 may be configured as physical purge nozzle modules 1910TG and 1910TGFLU, while purge nozzles 902 and 903 may be configured as virtual purge nozzle modules 910TC and 910TC1.

[0091] Figure 12A and Figure 12BThe illustration shows purge nozzles 900, 901 (e.g., for interface connection with internal front purge ports 600, 601) located in purge port nozzle positions 800A, 800B, and purge nozzles 902, 903 (e.g., for interface connection with forward-facing rear purge ports 602, 603) located in purge nozzle positions 803A, 803B. As described above, in one aspect, purge nozzles 900-903 may be configured as virtual purge nozzle modules 910TE, 910TEFLU or combinations of virtual purge nozzle modules 910TF, 910TF1 and 910TB, 910TB1. In other aspects, purge nozzles 902-903 may be part of physical purge nozzle modules 1910TB and 1910TBFLU (for connection to the front-facing rear purge ports 602 and 603 – see Figure 6B), and purge nozzles 900-901 may be configured as purge nozzle modules 1910TF and 1910TFFLU (for connection to the internal front purge ports 608 and 609 – see Figure 6B). In still other aspects, purge nozzles 900 and 901 may be configured as virtual purge nozzle modules 910TF and 910TF1, while purge nozzles 902 and 903 may be configured as physical purge nozzle module 1910TB. In other aspects, purge nozzles 900 and 901 may be configured as physical purge nozzle modules 1910TF and 1910TFFLU, while purge nozzles 902 and 903 may be configured as virtual purge nozzle modules 910TB and 910TB1.

[0092] Figure 13 The illustration shows purge nozzles 900-901 located in purge port nozzle positions 801A, 801B (e.g., for interface connection with narrow external front purge ports 600, 601). In this aspect, the base 950 and nozzle support 951 are illustrated as being fixed to the container support 36 (where positioning features 1300 are located in purge port nozzle positions 804A, 804B for interface connection with rearward rear purge ports 604, 605) for use with virtual purge nozzle modules 910TC, 910TC1; however, in Figure 13 In the purge nozzle configuration illustrated, virtual purge nozzle modules 910TC and 910TC1 are not used. As described above, in one aspect, purge nozzles 900 and 901 may be configured as one of virtual purge nozzle modules 910TA and 910TA1. In other aspects, purge nozzles 900 and 901 may be part of physical purge nozzles 1910TA and 1910TAFLU (for interface connection with narrow external front purge ports 600 and 601 – see Figure 6B).

[0093] Figure 14The illustration shows purge nozzles 900-901 located in purge port nozzle positions 802A, 802B (e.g., for connection to the wide external front purge ports 606, 607). In this aspect, the base 950 and nozzle support 951 are illustrated as being fixed to the container support 36 (where positioning features 1300 are located in purge port nozzle positions 803A, 803B for connection to the forward-facing rear purge ports 602, 603) for use with virtual purge nozzle modules 910TB, 910TB1; however, in Figure 13 In the purge nozzle configuration illustrated, virtual purge nozzle modules 910TB and 910TB1 are not used. As described above, in one aspect, purge nozzles 900 and 901 may be configured as one of virtual purge nozzle modules 910TG and 910TG1. In other aspects, purge nozzles 900 and 901 may be part of physical purge nozzles 1910TG and 1910TGFLU (for interface connection with wide external front purge ports 606 and 607 – see Figure 6B).

[0094] refer to Figure 8 and Figure 10 As described above, flexible fluid hoses 10020-10023 selectively connect each purge nozzle 900-903 to either the input gas manifold 10030 or the output gas manifold 10040, at least in part. According to various aspects of this disclosure, any of the purge nozzles 900-903 located at any of the different purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B can be configured as an input nozzle (e.g., for inputting gas / fluid into a container T coupled to container support 36) or an output nozzle (e.g., for outputting gas / fluid from a container T coupled to container support 36) by connection to either the input gas manifold 10030 or the output gas manifold 10040. For example, the input gas manifold 10030 may include any suitable number of connection ports 10010-10013 for connecting one or more of the purge nozzles 900-903 to any suitable gas source 10031. The output gas manifold 10040 may include any suitable number of connection ports 10001-10004 for connecting one or more of the purge nozzles 900-903 to any suitable vacuum / suction source 10041.

[0095] It should be noted that although each of the input gas manifold 10030 and the output gas manifold is illustrated to have four connection ports 10010-10013, 1001-1004, in other respects, depending on, for example, the number of purge nozzles to be connected to the container support 36, one or more of the input gas manifold 10030 and the output gas manifold 10040 may be provided with more or fewer than four connection ports. In one aspect, the number of connection ports of the input gas manifold 10030 may be equal to the number of purge port nozzle positions of the container support 36. In one aspect, the number of connection ports of the output gas manifold 10040 may be equal to the number of purge port nozzle positions of the container support 36. Accordingly, the input gas manifold 10030 and the output gas manifold 10040 are configured to support any suitable combination of input and output nozzles. For example, the input gas manifold 10030 may include any suitable number of connection ports such that all purge nozzles 900-901 (again, note that there may be more or fewer than four purge nozzles) located at one or more (or all) of the different purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B are input nozzles. The output gas manifold 10040 may include any suitable number of connection ports such that all purge nozzles 900-901 (again, note that there may be more or fewer than four purge nozzles) located at one or more (or all) of the different purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B are output nozzles. As another example, any suitable combination of input nozzles and output nozzles may be provided by the input gas manifold 10030 and / or the output gas manifold 10040.

[0096] refer to Figure 8 , Figures 9A-9C , Figure 10 and Figure 15 Exemplary methods according to various aspects of this disclosure will be described. In one aspect, at least one interchangeable purge nozzle module 1910T-1910TJ, 1910TFLU-1910TJFLU, 910T-910TJ, 910T1-910TJ1 from several different interchangeable purge nozzle modules 1910T-1910TJ, 1910TFLU-1910TJFLU, 910T-910TJ, 910T1-910TJ1 is selectively coupled to a container support 36 of a loading port 24. Figure 15(frame 1500). In one aspect, connecting the at least one interchangeable purge nozzle module 1910T-1910TJ, 1910TFLU-1910TJFLU to the container support 36 includes: connecting more than one purge nozzle 900-903 as a modular unit to the container support 36 (frame 1500). Figure 15 (frame 1505), wherein the more than one purge nozzle 900-903 is mounted on a common frame 950, 970, as described herein. In another aspect, connecting the at least one interchangeable purge nozzle module 910T-910TJ, 910T1-910TJ1 to the container support 36 comprises: connecting the more than one purge nozzle 900-903 nozzle by nozzle to the container support 36 (frame 1505), wherein the more than one purge nozzle 900-903 is mounted on a common frame 950, 970, as described herein. Figure 15 (frame 1510), wherein the more than one purge nozzle 900-903 are separate individual nozzles, which are connected to the container support 36 independently of the other purge nozzles in the more than one purge nozzle 900-903, as described above. In one aspect, at least one of the at least one interchangeable purge nozzle module 1910T-1910TJ, 1910TFLU-1910TJFLU is connected to the container support 36 as a modular unit. Figure 15 (frame 1505), and one of the at least one purge nozzle modules 910T-910TJ, 910T1-910TJ1 is connected nozzle by nozzle to the container support 36 ( Figure 15 (Frame 1510).

[0097] In one aspect, at least one of the more than one purge nozzle 900-901 is communicatively connected to the input gas manifold 10030. Figure 15 (frame 1515) to configure at least one of the more than one purge nozzle 900-903 as an input nozzle, as described herein. In another aspect, at least one of the more than one purge nozzle 900-901 is communicatively connected to an output gas manifold 10040 (frame 1515). Figure 15 (frame 1520) to configure at least one of the more than one purge nozzle 900-903 as an output nozzle, as described herein. In another aspect, at least one of the more than one purge nozzle 900-901 is communicatively connected to an input gas manifold 10030 (frame 1520). Figure 15 (frame 1515), while another of the more than one purge nozzle 900-901 can be connected in communication to the output gas manifold 10040 (frame 1515). Figure 15 (Frame 1520).

[0098] At least one interchangeable purge nozzle module 1910T-1910TJ, 1910TFLU-1910TJFLU, 910T-910TJ, 910T1-910TJ1 can be removed / detached from the container support 36. Figure 15 (frame 1525), and can select another of different interchangeable purge nozzle modules 1910T-1910TJ, 1910TFLU-1910TJFLU, 910T-910TJ, 910T1-910TJ1 based on the purge port characteristics of the container T to be connected to the container support 36. Figure 15 (frame 1530). In another aspect, at least one connector portion 934A, 934B of at least one purge nozzle 900-903 of the at least one purge nozzle module 1910T-1910TJ, 1910TFLU-1910TJFLU, 910T-910TJ, 910T1-910TJ1 can be detached / removed from the corresponding base portion 936 of the corresponding purge nozzle 900-903. Figure 15 (frame 1535), and another different connector section 934A, 934B can be selected based on the purge port characteristics of the container T to be connected to the container support 36. Figure 15 (frame 1540). The different connector portions 934A, 934B are connected to at least one purge nozzle 900-903 from which the connector portions 934A, 934B are disconnected / removed. Figure 15 (See frame 1545). According to various aspects of this disclosure, the corresponding purge nozzles 900-901 may be connected to, disconnected from, and reconnected to the input gas manifold 10030 and the output gas manifold 10040 as needed, depending on, for example, the purge port characteristics of the container T.

[0099] refer to Figure 8 , Figures 9A-9C , Figure 10 and Figure 16 The following describes an exemplary method 1600 according to various aspects of this disclosure. Method 1600 includes: providing a frame for a substrate loading device (…). Figure 16 A frame (1601) is provided, adapted to connect a substrate loading device to a substrate processing apparatus 10. The frame has a transport opening 30P through which the substrate is transported between the substrate loading device and the substrate processing apparatus 10. A box support 36 is also provided. Figure 16(Frame 1602) and the box support is connected to the frame for holding at least one substrate box container T so that substrates can be transferred to and from the at least one substrate box container T through the transport opening 30P. Different interchangeable purge port nozzles 900-903 can be selectively mounted to the substrate loading device ( Figure 16 (frame 1603), wherein purge ports 810, 811 of the housing support having more than one purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B are disposed on the housing support 36. Each of the more than one purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B is configured such that the purge port nozzle 900-903 at the purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B is connected to at least one purge port 600-609 of the at least one substrate housing T. Each purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B defines an interchangeable purge port nozzle interface 820-831, such that different interchangeable purge port nozzles 900-903 corresponding to different interchangeable purge port nozzle modules 1910-910 with different predetermined purge nozzle configurations for each can be removably mounted to the more than one purge port nozzle position 800A, 800B, 801A, 802A, 802B, 803A, 803B, 804A, 804B. The corresponding purge port nozzle interfaces 820-831 in 1B, 802A, 802B, 803A, 803B, 804A, and 804B, wherein the more than one purge port nozzle position corresponds to different predetermined purge nozzle configurations of interchangeable purge port nozzle modules 1910-910, wherein the interchangeable purge port nozzle modules conform to and enable connection to different ports in the at least one purge port 600-609 of different substrate container T with different purge port characteristics in the at least one substrate container T.

[0100] refer to Figure 8 , Figures 9A-9C , Figure 10 and Figure 17 Exemplary method 1700 according to various aspects of this disclosure will be described. Method 1700 includes: providing a frame for a substrate loading device ( Figure 17 Frame 1701), adapted to connect a substrate loading device to a substrate processing apparatus 10, the frame having a transport opening 30P through which the substrate is transported between the substrate loading device and the substrate processing apparatus 10. A box support 36 is provided. Figure 17 (Frame 1702) and the box support is connected to the frame for holding at least one substrate box container T so as to transfer substrates to and from the at least one substrate box container T through transport opening 30P. The box support purge ports 810, 811 (which can be optionally configured) are provided. Figure 17 (See frame 1703). The cassette support purge ports 810, 811, which can be optionally constructed, have more than one purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B disposed on the cassette support 36. Each of the more than one purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B is configured such that the purge port nozzle at that purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B is connected to at least one purge port 600-609 of the at least one substrate cassette container T. Each purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B defines an interchangeable purge port nozzle interface 820-831. An interchangeable purge port nozzle module with at least one purge port nozzle is selected from several different interchangeable purge port nozzle modules 1910-910. Figure 17 (frame 1704), each different interchangeable purge port nozzle module has a different predetermined purge port nozzle configuration for modular mounting to interchangeable purge port nozzle interfaces 820-831, such that the selective mounting of the interchangeable purge port nozzle modules allows the configuration of the box support purge ports 810, 811 to be selectively constructed from a first configuration to a second configuration, in which case, at purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 800B ... In the second configuration, the purge port nozzle at positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, and 804B aligns with and connects to a second device in the at least one substrate container T that has a second predetermined purge port characteristic, which differs from the first predetermined purge port characteristic.

[0101] According to one or more aspects of this disclosure, a substrate loading device includes: a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which a substrate is transported between the substrate loading device and the substrate processing apparatus; a cassette support connected to the frame for holding at least one substrate cassette container for transferring a substrate to and from the at least one substrate cassette container through the transport opening; and a cassette support purge port having more than one purge port nozzle position disposed on the cassette support, each of the more than one purge port nozzle position being configured such that a purge port nozzle at the purge port nozzle position is connected to... At least one purge port is connected to the at least one substrate container; wherein each purge port nozzle position defines an interchangeable purge port nozzle interface, such that different interchangeable purge port nozzles of different interchangeable purge port nozzle modules corresponding to each having different predetermined purge nozzle configurations are removably mounted to the corresponding purge port nozzle interfaces of the more than one purge port nozzle position, the more than one purge port nozzle position corresponding to the different predetermined purge nozzle configurations of the interchangeable purge port nozzle modules, the interchangeable purge port nozzle modules conforming to and enabling connection to different ports of the at least one purge port of the at least one substrate container having different purge port characteristics.

[0102] According to one or more aspects of this disclosure, each of the interchangeable purge port nozzle interfaces is configured to have a predetermined position relative to a predetermined reference of the cartridge support, such that each purge port nozzle interface is definitively positioned relative to a predetermined reference of each different substrate cartridge container.

[0103] According to one or more aspects of this disclosure, the different predetermined purge nozzle configurations of each of the interchangeable purge port nozzle interfaces and each corresponding of the different interchangeable purge port nozzle modules are configured to enable rapid interchangeable installation of each corresponding of the different interchangeable purge port nozzle modules with the other of the different interchangeable purge port nozzle modules.

[0104] According to one or more aspects of this disclosure, each of the interchangeable purge port nozzle interfaces defines a nozzle positioning reference, the nozzle positioning reference specifically representing each of the at least one purge port of the different substrate container having different purge port characteristics.

[0105] According to one or more aspects of this disclosure, each purge port nozzle is removably mounted to the interchangeable purge port nozzle interface as a unit of another purge port nozzle independent of the corresponding purge port nozzle module, and each independently mounted purge port nozzle of the corresponding purge port nozzle module is independently interchangeable with different purge port nozzles of different corresponding purge port nozzle modules in order to achieve interchangeability between the corresponding purge port nozzle module and the different corresponding purge port nozzle modules.

[0106] According to one or more aspects of this disclosure, each purge port nozzle is removably mounted to the purge port nozzle interface as a unit of another purge port nozzle independent of the corresponding purge port nozzle module, and the corresponding purge port nozzle module is interchangeable nozzle-by-nozzle with different purge port nozzle modules having different corresponding purge port nozzles.

[0107] According to one or more aspects of this disclosure, each different purge port nozzle module has a module frame, wherein each corresponding purge port nozzle is mounted to the module frame such that the module frame is common to each corresponding purge port nozzle, and the module frame defines a common removable mounting member connected to the box support, such that removably connecting the module frame to the box support enables the installation of each purge port nozzle to the corresponding purge port nozzle interface as a common module unit.

[0108] According to one or more aspects of this disclosure, the module frame of each different purge port nozzle module having the corresponding purge port nozzle can be interchanged as a module unit with another module frame of each other different purge port nozzle module having the corresponding different purge port nozzle.

[0109] According to one or more aspects of this disclosure, each different purge port nozzle module corresponds to a different predetermined purge port characteristic of different ones in the at least one substrate container.

[0110] According to one or more aspects of this disclosure, a substrate loading device includes: a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which a substrate is transported between the substrate loading device and the substrate processing apparatus; a cassette support connected to the frame for holding at least one substrate cassette container for transferring a substrate to and from the at least one substrate cassette container through the transport opening; and cassette support purge ports having more than one purge port nozzle position disposed on the cassette support, each of the more than one purge port nozzle position being configured such that a purge port nozzle at the purge port nozzle position is coupled to at least one purge port of the at least one substrate cassette container; wherein each purge port nozzle position defines an interchangeable purge port nozzle interface; and an interchangeable purge port nozzle module. A block having at least one purge port nozzle and selectable from several different interchangeable purge port nozzle modules, each having a different predetermined purge port nozzle configuration for modular mounting to the interchangeable purge port nozzle interface, such that the selectable mounting of the interchangeable purge port nozzle modules changes the configuration of the selectively configurable cartridge support purge port from a first configuration to a second configuration. In the first configuration, the purge port nozzle at the purge port nozzle position conforms to and achieves connection with a first one having a first predetermined purge port characteristic in the at least one substrate cartridge container. In the second configuration, the purge port nozzle at the purge port nozzle position conforms to and achieves connection with a second one having a second predetermined purge port characteristic in the at least one substrate cartridge container, the second predetermined purge port characteristic being different from the first predetermined purge port characteristic.

[0111] According to one or more aspects of this disclosure, the interchangeable purge port nozzle interface is configured to have a predetermined position relative to a predetermined reference of the cartridge support, such that each purge port nozzle of the different interchangeable purge port nozzle modules mounted to the interchangeable purge nozzle interface is definitively positioned relative to a predetermined reference of each different substrate cartridge container.

[0112] According to one or more aspects of this disclosure, the interchangeable purge port nozzle interface is configured to have a predetermined position relative to a predetermined reference of the cartridge support, such that the selective mounting of the interchangeable purge port nozzle module enables deterministic positioning of each purge port nozzle of the interchangeable purge port nozzle module mounted to the interchangeable purge port nozzle interface relative to a predetermined reference of each different substrate cartridge container, the deterministic positioning being substantially consistent with the mounting.

[0113] According to one or more aspects of this disclosure, each of the interchangeable purge port nozzle interfaces is configured to have a predetermined position relative to a predetermined reference of the cartridge support, such that each of the interchangeable purge port nozzle interfaces is definitively positioned relative to a predetermined reference of each different substrate cartridge container.

[0114] According to one or more aspects of this disclosure, the different predetermined purge nozzle configurations of each of the interchangeable purge port nozzle interfaces and each corresponding of the different interchangeable purge port nozzle modules are configured to enable rapid interchangeable installation of each corresponding of the different interchangeable purge port nozzle modules with the other of the different interchangeable purge port nozzle modules.

[0115] According to one or more aspects of this disclosure, each of the interchangeable purge port nozzle interfaces defines a nozzle positioning reference, the nozzle positioning reference specifically representing each of the at least one purge port of the different substrate container having different purge port characteristics.

[0116] According to one or more aspects of this disclosure, each purge port nozzle is removably mounted to the interchangeable purge port nozzle interface as a unit of another purge port nozzle independent of the interchangeable purge port nozzle module, and each independently mounted purge port nozzle of the interchangeable purge port nozzle module is independently interchangeable with a different purge port nozzle from another different purge port nozzle module from the plurality of different purge port nozzle modules, so as to enable interchangeability between the interchangeable purge port nozzle module and the other different purge port nozzle module.

[0117] According to one or more aspects of this disclosure, each purge port nozzle is removably mounted to the interchangeable purge port nozzle interface as a unit of another purge port nozzle independent of the interchangeable purge port nozzle module, and the interchangeable purge port nozzle module is interchanged nozzle-by-nozzle with another of the different purge port nozzle modules that has a different corresponding purge port nozzle.

[0118] According to one or more aspects of this disclosure, each of the plurality of different purge port nozzle modules has a module frame, wherein each corresponding purge port nozzle is mounted to the module frame such that the module frame is common to each corresponding purge port nozzle, and the module frame defines a common removable mounting member connected to the housing support, such that removably connecting the module frame to the housing support enables the installation of each purge port nozzle to the corresponding purge port nozzle interface as a common module unit.

[0119] According to one or more aspects of this disclosure, the module frame of each different purge port nozzle module having the corresponding purge port nozzle can be interchanged as a module unit with another module frame of each different purge port nozzle module from the plurality of different purge port nozzle modules having the corresponding different purge port nozzle.

[0120] According to one or more aspects of this disclosure, each of the plurality of different purge port nozzle modules corresponds to a different predetermined purge port characteristic of a different one of the at least one substrate container.

[0121] According to one or more aspects of this disclosure, a method is provided. The method includes: providing a frame for a substrate loading device adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which a substrate is transported between the substrate loading device and the substrate processing apparatus; providing a cassette support connected to the frame for holding at least one substrate cassette container for transferring a substrate to and from the at least one substrate cassette container through the transport opening; and selectively mounting different interchangeable purge port nozzles to the substrate loading device, wherein purge ports of the cassette support having more than one purge port nozzle position are disposed on the cassette support, each of the more than one purge port nozzle position being configured such that, during purge... A purge port nozzle at a purge port nozzle position is connected to at least one purge port of the at least one substrate container. Each purge port nozzle position defines an interchangeable purge port nozzle interface, such that the different interchangeable purge port nozzles of different interchangeable purge port nozzle modules corresponding to each having different predetermined purge nozzle configurations are removably mounted to the corresponding purge port nozzle interfaces of more than one purge port nozzle position, the more than one purge port nozzle position corresponding to the different predetermined purge nozzle configurations of the interchangeable purge port nozzle module, the interchangeable purge port nozzle module conforming to and enabling connection to different ports of the at least one purge port of the at least one substrate container having different purge port characteristics.

[0122] According to one or more aspects of this disclosure, it further includes: configuring each of the interchangeable purge port nozzle interfaces to have a predetermined position relative to a predetermined reference of the cartridge support, such that each purge port nozzle interface is definitively positioned relative to a predetermined reference of each different substrate cartridge container.

[0123] According to one or more aspects of this disclosure, it further includes: enabling rapid interchangeable installation of each corresponding one of the different interchangeable purge port nozzle modules with another of the different interchangeable purge port nozzle modules.

[0124] According to one or more aspects of this disclosure, each of the interchangeable purge port nozzle interfaces defines a nozzle positioning reference, the nozzle positioning reference specifically representing each of the at least one purge port of the different substrate container having different purge port characteristics.

[0125] According to one or more aspects of this disclosure, each purge port nozzle is removably mounted to the interchangeable purge port nozzle interface as a unit of another purge port nozzle independent of the corresponding purge port nozzle module, and each independently mounted purge port nozzle of the corresponding purge port nozzle module is independently interchangeable with different purge port nozzles of different corresponding purge port nozzle modules, the method further comprising: realizing the interchangeability of the corresponding purge port nozzle module with the different corresponding purge port nozzle modules.

[0126] According to one or more aspects of this disclosure, each purge port nozzle is removably mounted to the purge port nozzle interface as a unit of another purge port nozzle independent of the corresponding purge port nozzle module, the method further comprising: interchangeing the corresponding purge port nozzle module with different purge port nozzle modules having different corresponding purge port nozzles nozzle by nozzle.

[0127] According to one or more aspects of this disclosure, each different purge port nozzle module has a module frame, wherein each corresponding purge port nozzle is mounted to the module frame such that the module frame is common to each corresponding purge port nozzle, and the module frame defines a common removable mounting member connected to the housing support, the method further comprising: removably connecting the module frame to the housing support to achieve installation of each purge port nozzle to the corresponding purge port nozzle interface as a common module unit.

[0128] According to one or more aspects of this disclosure, the module frame of each different purge port nozzle module having the corresponding purge port nozzle can be interchanged as a module unit with another module frame of each other different purge port nozzle module having the corresponding different purge port nozzle.

[0129] According to one or more aspects of this disclosure, each different purge port nozzle module corresponds to a different predetermined purge port characteristic of different ones in the at least one substrate container.

[0130] According to one or more aspects of this disclosure, a method is provided. The method includes: providing a frame for a substrate loading device adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which a substrate is transported between the substrate loading device and the substrate processing apparatus; providing a cassette support connected to the frame for holding at least one substrate cassette container for transferring a substrate to and from the at least one substrate cassette container through the transport opening; and providing a cassette support purge port that can be selectively configured, the cassette support purge port having more than one purge port nozzle position disposed on the cassette support, each of the more than one purge port nozzle position being configured such that a purge port nozzle at the purge port nozzle position is coupled to at least one purge port of the at least one substrate cassette container, wherein each purge port nozzle position defines an interchangeable purge port nozzle interface; and from A plurality of different interchangeable purge port nozzle modules are selected, each having at least one purge port nozzle. Each different interchangeable purge port nozzle module has a different predetermined purge port nozzle configuration for modular mounting to the interchangeable purge port nozzle interface, such that the selectable mounting of the interchangeable purge port nozzle module changes the configuration of the selectively configurable housing support purge port from a first configuration to a second configuration. In the first configuration, the purge port nozzle at the purge port nozzle position conforms to and achieves connection with a first one having a first predetermined purge port characteristic in the at least one substrate housing. In the second configuration, the purge port nozzle at the purge port nozzle position conforms to and achieves connection with a second one having a second predetermined purge port characteristic in the at least one substrate housing, the second predetermined purge port characteristic being different from the first predetermined purge port characteristic.

[0131] According to one or more aspects of this disclosure, the interchangeable purge port nozzle interface is configured to have a predetermined position relative to a predetermined reference of the cartridge support, such that each purge port nozzle of the different interchangeable purge port nozzle modules mounted to the interchangeable purge nozzle interface is definitively positioned relative to a predetermined reference of each different substrate cartridge container.

[0132] According to one or more aspects of this disclosure, the interchangeable purge port nozzle interface is configured to have a predetermined position relative to a predetermined reference of the cartridge support, such that the selective mounting of the interchangeable purge port nozzle module enables deterministic positioning of each purge port nozzle of the interchangeable purge port nozzle module mounted to the interchangeable purge port nozzle interface relative to a predetermined reference of each different substrate cartridge container, the deterministic positioning being substantially consistent with the mounting.

[0133] According to one or more aspects of this disclosure, each of the interchangeable purge port nozzle interfaces is configured to have a predetermined position relative to a predetermined reference of the cartridge support, such that each of the interchangeable purge port nozzle interfaces is definitively positioned relative to a predetermined reference of each different substrate cartridge container.

[0134] According to one or more aspects of this disclosure, it further includes: enabling rapid interchangeable installation of each corresponding one of the different interchangeable purge port nozzle modules with another of the different interchangeable purge port nozzle modules.

[0135] According to one or more aspects of this disclosure, each of the interchangeable purge port nozzle interfaces defines a nozzle positioning reference, the nozzle positioning reference specifically representing each of the at least one purge port in the at least one substrate container having a corresponding one with different purge port characteristics.

[0136] According to one or more aspects of this disclosure, each purge port nozzle is removably mounted to the interchangeable purge port nozzle interface as a unit of another purge port nozzle independent of the interchangeable purge port nozzle module, and each independently mounted purge port nozzle of the interchangeable purge port nozzle module is independently interchangeable with a different purge port nozzle from another different purge port nozzle module from the plurality of different purge port nozzle modules, so as to enable interchangeability between the interchangeable purge port nozzle module and the other different purge port nozzle module.

[0137] According to one or more aspects of this disclosure, each purge port nozzle is removably mounted to the interchangeable purge port nozzle interface as a unit of another purge port nozzle independent of the interchangeable purge port nozzle module, and the interchangeable purge port nozzle module is interchanged nozzle-by-nozzle with another of the different purge port nozzle modules that has a different corresponding purge port nozzle.

[0138] According to one or more aspects of this disclosure, each of the plurality of different purge port nozzle modules has a module frame, wherein each corresponding purge port nozzle is mounted to the module frame such that the module frame is common to each corresponding purge port nozzle, and the module frame defines a common removable mounting member connected to the housing support, such that removably connecting the module frame to the housing support enables the installation of each purge port nozzle to the corresponding purge port nozzle interface as a common module unit.

[0139] According to one or more aspects of this disclosure, the module frame of each different purge port nozzle module having the corresponding purge port nozzle can be interchanged as a module unit with another module frame of each different purge port nozzle module from the plurality of different purge port nozzle modules having the corresponding different purge port nozzle.

[0140] According to one or more aspects of this disclosure, each of the plurality of different purge port nozzle modules corresponds to a different predetermined purge port characteristic of a different one of the at least one substrate container.

[0141] It should be understood that the foregoing description is merely illustrative of various aspects of this disclosure. Various alternatives and modifications can be devised by those skilled in the art without departing from these aspects. Therefore, these aspects are intended to cover all such alternatives, modifications, and variations falling within the scope of any of the appended claims. Furthermore, the indisputable fact that different features are recited in mutually different dependent or independent claims does not imply that combinations of these features cannot be advantageously used, such combinations still remain within the scope of these aspects.

Claims

1. A substrate transport container holding device, comprising: A frame configured to maintain at least one substrate transport container in predetermined communication with a controlled environment region; A container support member connected to the frame for supporting the at least one substrate transport container on the frame in a predetermined orientation, such that the at least one substrate transport container is maintained in predetermined communication with the controlled environment; and Selectably variable container support purge ports are disposed on the container support, each container support purge port having a variable purge port nozzle that can vary among more than one selectable predetermined purge port nozzle characteristic, each of the more than one purge port nozzle characteristics being configured such that the purge port nozzle having each selected predetermined purge port nozzle characteristic is complementary to and coupled to at least one purge port of the at least one substrate transport container.

2. The substrate transport container holding device according to claim 1, wherein, The optional variable container support purge port has more than one purge port nozzle position, and each of the more than one purge port nozzle positions is configured with a selected predetermined purge port nozzle characteristic corresponding to the selected nozzle characteristic, such that the purge port nozzle at each position is complementary to and connected to the at least one purge port.

3. The substrate transport container holding device according to claim 2, wherein, The optional variable container support purge port includes an interchangeable purge port nozzle module having at least one purge port nozzle, and can be selected from several different interchangeable purge port nozzle modules, each different interchangeable purge port nozzle module defining one of the more than one predetermined nozzle characteristics.

4. The substrate transport container holding device according to claim 3, wherein, Each of the more than one predetermined nozzle characteristics is defined for modular mounting to a different predetermined purge port nozzle configuration defined by the more than one selectable predetermined purge port nozzle characteristics, such that the selectable mounting of the interchangeable purge port nozzle module changes the configuration of the selectively configurable container support purge port from a first configuration to a second configuration. In the first configuration, the purge port nozzle at the purge port nozzle position conforms to and achieves connection with a first in the at least one substrate transport container having a first predetermined purge port characteristic. In the second configuration, the purge port nozzle at the purge port nozzle position conforms to and achieves connection with a second in the at least one substrate transport container having a second predetermined purge port characteristic, which is different from the first predetermined purge port characteristic.

5. The substrate transport container holding device according to claim 3, wherein: Each of the more than one purge port nozzle positions defines an interchangeable purge port nozzle interface; and The interchangeable purge port nozzle interface is configured to have a predetermined position relative to a predetermined reference of the container support, such that each purge port nozzle of the different interchangeable purge port nozzle modules mounted to the interchangeable purge nozzle interface is definitively positioned relative to a predetermined reference of each different substrate transport container.

6. The substrate transport container holding device according to claim 3, wherein: Each of the more than one purge port nozzle positions defines an interchangeable purge port nozzle interface; and The interchangeable purge port nozzle interface is configured to have a predetermined position relative to a predetermined reference of the container support, such that the selective installation of the interchangeable purge port nozzle module enables deterministic positioning of each purge port nozzle of the interchangeable purge port nozzle module mounted to the interchangeable purge port nozzle interface relative to a predetermined reference of each different substrate transport container, the deterministic positioning being substantially consistent with the installation.

7. The substrate transport container holding device according to claim 3, wherein: Each of the more than one purge port nozzle positions defines an interchangeable purge port nozzle interface; and Each of the interchangeable purge port nozzle interfaces is configured to have a predetermined position relative to a predetermined reference of the container support, such that each of the interchangeable purge port nozzle interfaces is definitively positioned relative to a predetermined reference of each different substrate transport container.

8. The substrate transport container holding device according to claim 3, wherein: Each of the more than one purge port nozzle positions defines an interchangeable purge port nozzle interface; and The different predetermined purge nozzle outlet configurations of each of the interchangeable purge port nozzle interfaces and each corresponding of the different interchangeable purge port nozzle modules are configured to enable rapid interchangeable installation of each corresponding of the different interchangeable purge port nozzle modules with the other of the different interchangeable purge port nozzle modules.

9. The substrate transport container holding device according to claim 3, wherein: Each of the more than one purge port nozzle positions is defined as an interchangeable purge port nozzle interface; and Each of the interchangeable purge port nozzle interfaces defines a nozzle positioning reference, which specifically represents each of the at least one purge port of a different substrate transport container having different purge port characteristics.

10. The substrate transport container holding device according to claim 3, wherein: Each of the more than one purge port nozzle positions defines an interchangeable purge port nozzle interface; and Each purge port nozzle is removably mounted to the interchangeable purge port nozzle interface as a unit of another purge port nozzle independent of the interchangeable purge port nozzle module, and each independently mounted purge port nozzle of the interchangeable purge port nozzle module is independently interchangeable with a different purge port nozzle from another different purge port nozzle module from the plurality of different purge port nozzle modules, so as to realize the interchangeability of the interchangeable purge port nozzle module with the other different purge port nozzle module.

11. The substrate transport container holding device according to claim 3, wherein: Each of the more than one purge port nozzle positions defines an interchangeable purge port nozzle interface; and Each purge port nozzle is removably mounted to the interchangeable purge port nozzle interface as a unit of another purge port nozzle independent of the interchangeable purge port nozzle module, and the interchangeable purge port nozzle module is interchanged nozzle-by-nozzle with another of the different purge port nozzle modules that has a different corresponding purge port nozzle.

12. The substrate transport container holding device according to claim 3, wherein: Each of the more than one purge port nozzle positions defines an interchangeable purge port nozzle interface; and Each of the plurality of different purge port nozzle modules has a module frame, wherein each corresponding purge port nozzle is mounted to the module frame such that the module frame is common to each corresponding purge port nozzle, and the module frame defines a common removable mounting member connected to the container support, such that removably connecting the module frame to the container support enables the installation of each purge port nozzle to the corresponding purge port nozzle interface as a common module unit.

13. The substrate transport container holding device according to claim 12, wherein, The module frame of each different purge port nozzle module having the corresponding purge port nozzle can be interchanged as a module unit with another module frame of each different purge port nozzle module from the plurality of different purge port nozzle modules having the corresponding different purge port nozzle.

14. A method comprising: A frame is provided for a substrate transport container holding device, the frame being configured to hold at least one substrate transport container in predetermined communication with a controlled environmental area; A container support is provided, the container support being connected to the frame for supporting the at least one substrate transport container on the frame in a predetermined orientation, such that the at least one substrate transport container is maintained in predetermined communication with the controlled environment; and A container support purge port that can be selectively configured has more than one purge port nozzle position, the container support purge port being disposed on the container support, each of the more than one purge port nozzle position being configured such that a purge port nozzle at the purge port nozzle position is coupled to at least one purge port of the at least one substrate transport container, wherein each purge port nozzle position defines an interchangeable purge port nozzle interface. as well as An interchangeable purge port nozzle module is selected from several different interchangeable purge port nozzle modules, each having at least one purge port nozzle. Each different interchangeable purge port nozzle module has a different predetermined purge port nozzle configuration for modular installation onto the interchangeable purge port nozzle interface, such that the selectable installation of the interchangeable purge port nozzle module changes the configuration of the selectively configurable container support purge port from a first configuration to a second configuration. In the first configuration, the purge port nozzle at the purge port nozzle position conforms to and achieves connection with a first in the at least one substrate transport container having a first predetermined purge port characteristic. In the second configuration, the purge port nozzle at the purge port nozzle position conforms to and achieves connection with a second in the at least one substrate transport container having a second predetermined purge port characteristic, which differs from the first predetermined purge port characteristic.

15. The method according to claim 14, wherein, The interchangeable purge port nozzle interface is configured to have a predetermined position relative to a predetermined reference of the container support, such that each purge port nozzle of the different interchangeable purge port nozzle modules mounted to the interchangeable purge nozzle interface is definitively positioned relative to a predetermined reference of each different substrate transport container.

16. The method of claim 14, wherein, The interchangeable purge port nozzle interface is configured to have a predetermined position relative to a predetermined reference of the container support, such that the selective installation of the interchangeable purge port nozzle module enables deterministic positioning of each purge port nozzle of the interchangeable purge port nozzle module mounted to the interchangeable purge port nozzle interface relative to a predetermined reference of each different substrate transport container, the deterministic positioning being substantially consistent with the installation.

17. The method according to claim 14, wherein, Each of the interchangeable purge port nozzle interfaces is configured to have a predetermined position relative to a predetermined reference of the container support, such that each of the interchangeable purge port nozzle interfaces is definitively positioned relative to a predetermined reference of each different substrate transport container.

18. The method according to claim 14, further comprising: This enables the rapid interchangeable installation of each of the different interchangeable purge port nozzle modules with the other of the different interchangeable purge port nozzle modules.

19. The method of claim 14, wherein, Each of the interchangeable purge port nozzle interfaces defines a nozzle positioning reference, the nozzle positioning reference specifically representing each of the at least one purge port in the at least one substrate transport container having a corresponding one with different purge port characteristics.

20. The method of claim 14, wherein, Each purge port nozzle is removably mounted to the interchangeable purge port nozzle interface as a unit of another purge port nozzle independent of the interchangeable purge port nozzle module, and each independently mounted purge port nozzle of the interchangeable purge port nozzle module is independently interchangeable with a different purge port nozzle from another different purge port nozzle module from the plurality of different purge port nozzle modules, so as to realize the interchangeability of the interchangeable purge port nozzle module with the other different purge port nozzle module.

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