Lip seal orthopedic device

Abstract

The invention relates to the field of semiconductors, and discloses a lip-shaped sealing element shape correcting device which is characterized in that a profiling jig disc assembly is rotatably mounted on a spinning tool platform through a central shaft; the vertical support is installed on the spinning tool platform beside the profiling jig disc assembly. The spinning tool main shaft is installed on the vertical support, and the head of a downward pressing rod at the lower end of the spinning tool main shaft is used for applying downward pressure to conduct shape correcting operation. The spinning tool main knob is installed on the vertical support and drives the spinning tool main shaft to move up and down through a gear mechanism. The positioning knob assembly is installed on the lower portion of the vertical support and can limit rotation of the profiling jig disc assembly so as to ensure that the position, needing shape correction, of a product is located under the head of a lower pressing rod of a spinning tool spindle. The dial indicator is installed on the lower portion of the spinning tool spindle and used for measuring the deformation size of a product in the spinning process. The detection pin is installed on the spinning tool platform beside the vertical support and used for adjusting the height of the dial indicator installed on the spinning tool main shaft to the correction position.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor, in particular to an orthopedic device for depositing conductive metal (such as copper) process using a lip seal in integrated circuit manufacturing. BACKGROUND

[0002] Currently, the preferred method for semiconductor device metal interconnect layer deposition is electroplating. The electroplating device generally includes an electrolytic cell with electrolyte and a flipper copper plating head for fixing the semiconductor substrate during the electroplating process. During the operation of the electroplating device, the semiconductor substrate is immersed in the electrolytic cell, and one surface of the substrate is exposed to the electrolytic cell. Since the electroplating solution is corrosive, a lip seal is used between the copper plating head and the substrate to isolate and seal, so as to avoid the leakage of the electroplating solution into the internal unit of the copper plating head, avoid damaging the substrate to cause serious product quality problems or corrode the copper plating head.

[0003] There are the following technical problems in the production of the lip seal, which will cause the leakage of the electroplating solution into the internal unit of the copper plating head during the subsequent copper plating process, causing serious quality problems of the substrate; 1. The lip seal is composed of a very thin (about 0.4mm thick) circular ring-shaped skeleton and a rubber coating. The skeleton is usually made of 316 stainless steel. Because the skeleton is very thin, it is very easy to deform. The deformation of the skeleton will cause the rubber coating to fail to completely cover the skeleton, resulting in partial exposure of the skeleton, which will cause serious quality defects.

[0004] In addition, the deformation of the skeleton will also cause the sealing failure during the electroplating process, damage the electroplating device, and reduce the service life of the electroplating device.

[0005] 2. After the skeleton is coated with rubber, the lip seal is formed. The flatness of the bearing surface of the lip seal exceeds the tolerance range of the production process, resulting in a gap between the copper plating head and the substrate. During the electroplating process, irregular metal deposition will occur in the gap, causing sealing failure.

[0006] Therefore, there is an urgent need for a lip seal orthopedic device that can solve the above technical problems. SUMMARY

[0007] In the summary section, a series of simplified concepts are introduced, which are simplifications of the prior art in the field. This will be further described in the detailed description section. The summary section of the present application does not mean to attempt to limit the key features and necessary technical features of the claimed technical solution, nor to determine the protection scope of the claimed technical solution.

[0008] The technical problem solved by the present application is to provide a lip seal straightening device to solve the technical problem of seal failure caused by skeleton deformation or the flatness of the lip seal bearing surface exceeding the production process tolerance range, thereby improving the yield of electroplating products and the service life of the electroplating device.

[0009] To solve the above technical problem, the lip seal straightening device provided by the present application comprises: The profile fixture disc assembly is rotatably mounted on the spinning tool platform through a center shaft, and the bearing surface thereof is used to bear the product; The vertical support is mounted on the spinning tool platform beside the profile fixture disc assembly; The spinning tool main shaft is mounted on the vertical support, and the lower end of the lower pressing rod head is used to apply a pressing force for straightening operation; The spinning tool main knob is mounted on the vertical support, and is driven by a gear mechanism to move the spinning tool main shaft up and down; The positioning knob assembly is mounted on the lower part of the vertical support, and can limit the rotation of the profile fixture disc assembly to ensure that the position of the product to be straightened is directly below the lower pressing rod head of the spinning tool main shaft; The dial gauge is fixedly mounted on the lower part of the spinning tool main shaft, and can move up and down with the spinning tool main shaft, and is used to measure the deformation size of the product during spinning; The detection pin is mounted on the spinning tool platform beside the vertical support, and is used to adjust the height of the dial gauge mounted on the spinning tool main shaft to the straightening position; The product is a lip seal skeleton before encapsulation or a lip seal.

[0010] Preferably, the lip seal straightening device is further improved, and further comprises: a cover ring placed above the product for uniform force application.

[0011] Preferably, the lip seal straightening device is further improved, and further comprises: a positioning structure formed on the bearing surface of the profile fixture disc assembly.

[0012] Preferably, the lip seal straightening device is further improved, and further comprises: a lip seal convex portion clearance structure.

[0013] Preferably, the lip seal straightening device is further improved, and further comprises: the vertical support is formed as an L-shaped support, the short side of which is above the profile fixture disc assembly, and the long side is vertically fixedly connected to the spinning tool platform.

[0014] Preferably, the lip seal straightening device is further improved, and further comprises: The elastic section is formed on the spinning tool main shaft; Preferably, the lip seal orthopedic device is further improved, and comprises: An elastic section is formed between the head of the pressing rod and the main shaft of the spinning tool.

[0015] The main purpose of the present application is to correct the deformation of the lip seal framework before rubber coating and the insufficient flatness of the lip seal bearing surface, to meet the requirements of the copper-plated head electroplating process, to improve the production yield and the service life of the electroplating device, and to provide synchronous deformation measurement and stability during the correction process.

[0016] The working process and principle of the present application are described as follows: The present application provides a rotatable profiling jig disc assembly installed on a spinning tool platform, the flatness of the bearing surface of the profiling jig disc assembly has been ensured during the machining process, and when the profiling jig disc assembly is installed on the spinning tool platform, the perpendicularity and runout of the bearing surface of the profiling jig disc assembly and the head of the pressing rod of the main shaft of the spinning tool have been determined to meet the requirements.

[0017] By rotating the positioning knob assembly, the position of the product that needs to be corrected is ensured to be directly below the head of the pressing rod of the main shaft of the spinning tool. The runout requirement of the profiling jig disc assembly during rotation is ensured by measuring and checking the runout with the micrometer installed on the main shaft of the spinning tool. The profiling jig disc assembly has corresponding positioning structures and the product protrusion has a structure that allows the lip seal framework or the lip seal bearing to be placed on the profiling jig disc before rubber coating. The cover ring with good flatness and parallelism is placed on the product.

[0018] The height of the micrometer installed on the main shaft of the spinning tool is adjusted to the correction position by using the detection pin installed on the spinning tool platform. The main knob of the spinning tool is manually adjusted, the cover ring is driven by the gear mechanism to uniformly extrude the product, and the deformation size of the product to be corrected and the amount of pressing during the correction process are detected by using the micrometer installed on the main shaft of the spinning tool. The pressing force is maintained for a period of time by using the gear mechanism of the spinning tool to ensure that the stress of the product after correction is eliminated, thereby finally ensuring that the correction meets the technical requirements and the product after correction does not deform again.

[0019] The present application is intended to correct the lip seal framework before rubber coating and the lip seal bearing surface, to meet the requirements of the copper-plated head electroplating process, to improve the production yield and the service life of the electroplating device.

[0020] The present application can at least achieve the following technical effects: 1. High-precision measurement: the use of the micrometer ensures accurate measurement of the deformation size during the correction process, improving the accuracy of the correction.

[0021] 2. Uniform force application: The use of the cover ring ensures uniformity of force application, avoiding local over- or under-pressing.

[0022] 3. Stable straightening process: The use of the gear mechanism maintains the downforce during the straightening process, ensuring the stability of the straightening and preventing post-straightening rebound deformation.

[0023] In addition, the elastic section can effectively prevent product damage caused by rigid pressing.

[0024] 4. Provides high flatness and perpendicularity: The high flatness and perpendicularity of the profiling jig disc assembly ensure the uniformity of the straightening, reducing the problem of uneven straightening caused by positional deviation. BRIEF DESCRIPTION OF DRAWINGS

[0025] The drawings accompanying the present invention are intended to illustrate the general characteristics of the methods, structures and / or materials used in accordance with certain exemplary embodiments of the present invention, supplementing the description in the specification. However, the drawings of the present invention are schematic drawings not drawn to scale, and therefore can not accurately reflect the precise structural or performance characteristics of any given embodiment, and the drawings of the present invention should not be interpreted as defining or limiting the scope of the values or attributes encompassed by exemplary embodiments in accordance with the present invention. The present invention is further described in detail below in conjunction with the specific embodiments and the accompanying drawings.

[0026] Figure 1 is a schematic diagram of the present invention.

[0027] Figure 2 is a schematic diagram of the overall structure of the present invention.

[0028] Explanation of reference signs: Profiling jig disc assembly 1; Spinning tool platform 2; Vertical support 3; Spinning tool main shaft 4; Down rod head 5; Spinning tool main knob 6; Gear mechanism 7; Positioning knob assembly 8; Product 9; Dial gauge 10; Detection pin 11; Cover ring 12; Positioning structure 13; Let go structure 14; Elastic section 15. DETAILED DESCRIPTION

[0029] The advantages and effects of the present application can be fully understood by those skilled in the art from the description of the specific embodiments. The present application can also be implemented or applied in different specific embodiments, and the details in the description can be applied based on different views, with various modifications or changes without departing from the general design idea of the present application. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict. The exemplary embodiments of the present application can be implemented in various forms, and should not be interpreted as being limited to the specific embodiments described herein. It should be understood that these embodiments are provided to make the disclosure of the present application complete and complete, and to fully convey the technical solutions of the exemplary embodiments to those skilled in the art. It should be understood that when an element is referred to as "connected" or "coupled" to another element, the element can be directly connected or coupled to the other element, or there can be an intermediate element. Different is that when an element is referred to as "directly connected" or "directly coupled" to another element, there is no intermediate element. In all the drawings, the same reference signs always represent the same elements.

[0030] First embodiment; Reference Figure 1 Combined Figure 2 As shown, the present application provides a lip seal orthopedic device, comprising: The profile tool disc assembly 1 is rotatably mounted on the spinning tool platform 2 through the center shaft, and the bearing surface is used to bear the product; The vertical support 3 is installed on the spinning tool platform 2 beside the profile tool disc assembly 1; in this embodiment, the vertical support is formed as an L-shaped support, the short side is above the profile tool disc assembly 1, and the long side is vertically fixedly connected to the spinning tool platform 2; The spinning tool main shaft 4 is installed on the vertical support, and the lower end of the lower pressing rod head 5 is used to apply a pressing force for orthopedic operation; The spinning tool main knob 6 is installed on the vertical support, and is driven by the gear mechanism 7 to move the spinning tool main shaft 4 up and down; The positioning knob assembly 8 is installed on the lower part of the vertical support, which can limit the rotation of the profile tool disc assembly 1 to ensure that the position of the product 9 to be orthopedic is directly below the lower pressing rod head of the spinning tool main shaft 4; The dial gauge 10 is installed on the lower part of the spinning tool main shaft 4, which can move up and down with the spinning tool main shaft, and is used to measure the deformation size of the skeleton or the bearing surface of the lip seal during spinning; The detection pin 11 is installed on the spinning tool platform 2 beside the vertical support, which is used to adjust the height of the dial gauge 10 installed on the spinning tool main shaft 4 to the orthopedic position; Cover ring 12 is placed above product 9 to apply uniform force. Product 9 is a lip seal frame before rubber coating or a lip seal.

[0031] Optionally, the above embodiment is further improved, and further comprises positioning structure 13 formed on the bearing surface of the profiling tool disc assembly 1. In this embodiment, the positioning structure 13 is formed as a step structure that is adapted to the shape of the product 9, and the product 9 is fitted on the step structure. In addition, the lip seal convex portion is provided with a displacement structure 14.

[0032] Optionally, the above embodiment is further improved, and further comprises: Elastic section 15 is formed on the spinning tool spindle 4.

[0033] Optionally, the above embodiment is further improved, and further comprises: Elastic section 15 is formed between the pressing rod head and the spinning tool spindle 4.

[0034] The elastic section 15 can use a spring or other existing elastic structure to avoid rigid damage between the pressing rod head and the product.

[0035] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

[0036] The above has been described in detail through specific embodiments and examples, but these do not constitute a limitation on the application. Those skilled in the art can also make many modifications and improvements without departing from the principles of the application, and these should also be considered as falling within the scope of protection of the application.

Claims

1. A lip seal orthotic device, characterized by, It comprises: a profiled tooling disc assembly (1) rotatably mounted on a spinning tool platform (2) through a central shaft, which carries a surface for carrying a product (9); a vertical support (3) mounted on the spinning tool platform (2) beside the profiled tooling disc assembly (1); a spinning tool main shaft (4) mounted on the vertical support, with a lower pressing rod head (5) at the lower end for applying a pressing force for straightening operation; a spinning tool main knob (6) mounted on the vertical support, which drives the spinning tool main shaft (4) to move up and down through a gear mechanism (7); a positioning knob assembly (8) mounted on the lower part of the vertical support, which can limit the rotation of the profiled tooling disc assembly (1) to ensure that the position of the product (9) to be straightened is directly below the pressing rod head of the spinning tool main shaft (4); a dial gauge (10) fixedly mounted on the lower part of the spinning tool main shaft (4), which can move up and down with the spinning tool main shaft (4), for measuring the deformation size of the product (9) during spinning; a detection pin (11) mounted on the spinning tool platform (2) beside the vertical support, for adjusting the height of the dial gauge (10) mounted on the spinning tool main shaft (4) to the straightening position; The product (9) is a lip seal frame before rubber coating or a lip seal.

2. The lip seal orthopedic device of claim 1, wherein, It further comprises: a cover ring (12) placed above the product (9) for uniform force application.

3. The lip seal orthopedic device of claim 1, wherein, It further comprises: a positioning structure (13) formed on the carrying surface of the profiled tooling disc assembly (1).

4. The lip seal orthopedic device of claim 1, wherein, It further comprises: a lip seal convex portion accommodation structure (14).

5. The lip seal orthopedic device of claim 1, wherein: The vertical support is formed as an L-shaped support, with the short side above the profiled tooling disc assembly (1) and the long side vertically fixedly connected to the spinning tool platform (2).

6. The lip seal straightening device according to any one of claims 1-5, further comprising: a resilient section (15) formed on the spinning tool main shaft (4).

7. The lip seal straightening device according to any one of claims 1-5, further comprising: a resilient section (15) formed between the pressing rod head and the spinning tool main shaft (4).

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