Differential screw assembly for optical assembly, sliding table and angle adjusting device

Abstract

The invention discloses a differential screw assembly for an optical assembly, a sliding table and an angle adjusting device. The differential screw assembly comprises a differential screw body, a fixed end and a movable end. Wherein the first end of the differential screw main body is provided with a first external thread, and the second end of the differential screw main body is provided with a second external thread; the fixed end is arranged at the first end of the differential screw body in a sleeving mode, a first internal thread is arranged in the fixed end, and the first internal thread is connected with the first external thread in a matched mode; the movable end is arranged at the second end of the differential screw body in a sleeving mode, a second internal thread is arranged in the movable end, and the second internal thread is connected with the second external thread in a matched mode; wherein the direction of the first external thread is the same as that of the second external thread, and the lead of the first external thread is larger than that of the second external thread. According to the scheme, the precision and controllability of the adjusting device can be improved.

Description

TECHNICAL FIELD

[0001] The present application generally relates to the technical field of precision adjustment machinery. More particularly, the present application relates to a differential screw assembly, slide and angle adjustment device for optical assembly. BACKGROUND

[0002] In the high-end manufacturing field such as semiconductor manufacturing, optical instrument research and development, precision electronic processing, the core performance of high-precision equipment directly determines the quality and precision of the final product. In such equipment, the installation and adjustment precision of core components such as optical lenses, laser emitters, wafer stages and the like is extremely high, and generally needs to reach micron-level or even nanometer-level adjustment precision to meet the design index and production requirements of the equipment. For example, in a semiconductor lithography equipment, the lens group of the optical system needs to be precisely adjusted to achieve accurate calibration of the optical path, and any slight positional deviation may cause distortion of the lithography pattern, thereby affecting the yield and performance of the chip; in a high-precision laser measurement equipment, the positional adjustment precision of the laser emission module is directly related to the accuracy of the measurement data, and has a key influence on subsequent data analysis and application. To achieve precise adjustment of the above-mentioned core components, two mainstream adjustment methods are currently widely used in the industry, namely the micrometer fine adjustment slide adjustment method and the top-pulling mechanism adjustment method. The micrometer fine adjustment slide realizes displacement output through threaded transmission, although it has certain adjustment precision, but its load capacity is usually limited, and a spring mechanism is usually used for return reset. This structure is prone to problems such as elastic deformation, return gap and response lag in situations where a large load is borne or high-frequency reciprocating motion is required, resulting in a decrease in positioning accuracy and repeatability, making it difficult to meet the stringent requirements of modern precision equipment on dynamic performance and stability. On the other hand, the top-pulling mechanism adjusts the position and pose of the component by respectively adjusting the top-pushing screw and the pulling screw arranged oppositely. However, in this method, the end of the screw and the component to be adjusted are mostly in point contact or small area contact, resulting in large contact stress, easy wear and plastic deformation. In addition, this mechanism is prone to looseness under vibration or high-frequency micro-motion conditions, and the contact stiffness and stability are insufficient, which is also not suitable for long-period, high-stability precision motion control scenarios.

[0003] Therefore, there is an urgent need to provide a differential screw assembly, slide and angle adjustment device for optical assembly to improve the precision and controllability of the adjustment device. SUMMARY

[0004] To at least solve one or more of the above-mentioned technical problems, the present application provides, in various aspects, a differential screw assembly, slide and angle adjustment device for optical assembly.

[0005] In a first aspect, the present application provides a differential screw assembly for an optical assembly, the differential screw assembly comprising a differential screw body, a fixed end and a movable end; wherein a first end of the differential screw body is provided with a first external thread, and a second end of the differential screw body is provided with a second external thread; the fixed end is sleeved on the first end of the differential screw body, and the fixed end is provided with a first internal thread inside, the first internal thread and the first external thread are connected in cooperation; the movable end is sleeved on the second end of the differential screw body, and the movable end is provided with a second internal thread inside, the second internal thread and the second external thread are connected in cooperation; wherein the first external thread and the second external thread are in the same direction, and the lead of the first external thread is greater than the lead of the second external thread.

[0006] In some embodiments, the middle region of the differential screw body is provided with a rotating wheel, and the side of the rotating wheel is provided with a set of anti-skid stripes.

[0007] In some embodiments, the second external thread and the second internal thread are trapezoidal threads to realize self-locking of the movable end.

[0008] In some embodiments, the side of the fixed end is provided with a first through hole, and the first through hole is connected with a base of the optical assembly to realize fixation of the fixed end.

[0009] In some embodiments, the side of the movable end is provided with a second through hole, and the second through hole is connected with a moving assembly of the optical assembly to make the moving assembly move along the direction of the axis of the differential screw body.

[0010] In some embodiments, the lead of the first external thread is greater than the lead of the second external thread.

[0011] In some embodiments, the moving distance of the movable end conforms to:

[0012] wherein, the moving distance of the movable end, the lead of the first external thread, the lead of the second external thread.

[0013] In a second aspect, the present application provides a slide for an optical assembly, comprising the differential screw assembly according to any one of the first aspect, the slide further comprising a first flat plate and a second flat plate, wherein the first flat plate and the second flat plate are connected by one or more differential screw assemblies.

[0014] In a third aspect, the present application provides an angle adjustment device for an optical assembly, comprising the differential screw assembly according to any one of the first aspect, the angle adjustment device further comprising an optical platform, a mounting base and a hinge assembly, wherein the optical platform is arranged on the mounting base through the hinge assembly; the hinge assembly is provided with a first differential screw assembly and a second differential screw assembly on two sides respectively, wherein the movable end of the first differential screw assembly is connected with the first side of the mounting base, and the movable end of the second differential screw assembly is connected with the second side of the mounting base, wherein the differential screw body of the first differential screw assembly and the differential screw body of the second differential screw assembly are arranged on the same straight line.

[0015] By means of the differential screw assembly, the sliding table and the angle adjustment device for an optical assembly as provided above, the first end of the differential screw body is provided with a first external thread, the second end of the differential screw body is provided with a second external thread, the fixed end is sleeved on the first end of the differential screw body, the movable end is arranged on the second end of the differential screw body, and the lead of the first external thread is greater than the lead of the second external thread, so that when the differential screw body is rotated, the movable end will produce a slight movement to compensate for the difference in lead between the first external thread and the second external thread, thereby better subdividing and controlling the adjustment accuracy. BRIEF DESCRIPTION OF DRAWINGS

[0016] The above and other objects, features and advantages of the exemplary embodiments of the present application will be readily understood through reading the following detailed description in conjunction with the accompanying drawings, in which several embodiments of the present application are illustrated in example, not limitation. In the drawings, the same or corresponding parts are referred to by the same or corresponding reference numerals, and: Figure 1 A differential screw assembly for an optical assembly according to some embodiments of the present application is shown; Figure 2 An exemplary structural diagram of a sliding table for an optical assembly according to some embodiments of the present application is shown.

[0017] Label name 10 - differential screw body, 11 - first end, 111 - first external thread, 12 - second end, 121 - second external thread, 13 - rotating wheel, 131 - anti-slip stripe group, 20 - fixed end, 21 - first through hole, 30 - movable end, 31 - second through hole, 41 - first flat plate, 42 - second flat plate. DETAILED DESCRIPTION

[0018] With reference to the drawings and brief description of the drawings, embodiments of the present application will be described and illustrated. It should be understood that these embodiments are only a part of all possible specific embodiments of the present application, and thus are not intended to limit the present application.

[0019] It should be understood that the terms "comprises" and "comprising" used in the specification and claims of the present application, indicate the presence of the described features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0020] It should also be understood that the terms used in the present specification and claims are merely used to describe particular embodiments and are not intended to limit the present application. As used in the specification and claims of the present application, the singular forms "a," "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising," when used in this specification and / or claims, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0021] As used in the specification and claims, the term "if' can be interpreted as meaning "when" or "once" or "in response to a determination" or "in response to a detection" depending on the context. Similarly, the phrase "if determined" or "if detected [the described condition or event]" can be interpreted as meaning "once determined" or "in response to a determination" or "once detected [the described condition or event]" or "in response to a detection [the described condition or event]" depending on the context.

[0022] The specific embodiments of the present application will be described in detail below with reference to the drawings.

[0023] Figure 1 Differential screw assemblies for optical assemblies are shown for some embodiments of the present application, such as Figure 1As shown, the differential screw assembly comprises a differential screw body 10, a fixed end 20 and a movable end 30; wherein the first end 11 of the differential screw body 10 is provided with a first external thread 111, and the second end 12 of the differential screw body 10 is provided with a second external thread 121; the fixed end 20 is sleeved on the first end of the differential screw body 10, and the fixed end 20 is provided with a first internal thread inside, and the first internal thread and the first external thread are connected in cooperation; the movable end 30 is sleeved on the second end of the differential screw body 10, and the movable end 30 is provided with a second internal thread inside, and the second internal thread and the second external thread are connected in cooperation; wherein the first external thread and the second external thread are in the same direction, and the lead of the first external thread is greater than the lead of the second external thread.

[0024] In some embodiments, the middle region of the differential screw body 10 is provided with a rotating wheel 13, and the side of the rotating wheel is provided with an anti-skid stripe group 131.

[0025] In some embodiments, the lead of the first external thread is greater than the lead of the second external thread.

[0026] In some embodiments, the aforementioned differential screw body 10 can be a stepped shaft or an equal-diameter shaft. The aforementioned differential screw body 10 can be composed of alloy steel, stainless steel or tool steel, etc.

[0027] In some embodiments, the differential screw body 10 can comprise two screw ends and a screw middle region, wherein the two screw ends can be the first end of the differential screw body 10 and the second end of the differential screw body 10 respectively, and the screw middle region can be the position between the aforementioned first end and the aforementioned second end.

[0028] In some embodiments, the screw middle region of the aforementioned differential screw body 10 can be provided with a rotating wheel.

[0029] In some embodiments, the aforementioned rotating wheel can be connected with the differential screw body 10 through a screw. Specifically, the aforementioned screw middle region can be provided with a light shaft segment, and the inside of the aforementioned rotating wheel can be provided with a rotating wheel through hole. The light shaft segment of the aforementioned differential screw body 10 can be connected with the rotating wheel through hole in cooperation, for example, it can be connected through a transition fit or an interference fit. Further, one or more threaded holes can be provided on the side of the aforementioned rotating wheel for installing screws, wherein the aforementioned screws can include set screws.

[0030] It can be understood that the aforementioned rotating wheel can be sleeved on the screw middle region of the aforementioned differential screw body 10, and then a clamping screw can be arranged in the threaded hole. By tightening the aforementioned clamping screw, the tip of the clamping screw can be clamped on the screw middle region of the differential screw body 10 and generate a friction force. At this time, the aforementioned differential screw body 10 can be driven to rotate by rotating the rotating wheel.

[0031] Further, a groove can be arranged on the screw middle region at a position in contact with the clamping screw, so that the tip of the clamping screw is clamped, thereby improving the stability of the transmission.

[0032] In other embodiments, the aforementioned rotating wheel can be connected to the differential screw body 10 by a key. Specifically, a first key groove can be arranged on the screw middle region of the differential screw body 10, and a second key groove opposite to the aforementioned first key groove can be arranged on the inner surface of the rotating hole of the rotating wheel, and a key groove accommodating space can be formed between the aforementioned first key groove and the second key groove. Further, a key can be embedded in the aforementioned key groove accommodating space, and the side wall of the key can be connected to the side wall of the aforementioned first key groove and the side wall of the second key groove, so that the torque generated by the rotating wheel when rotating can be transmitted to the differential screw body 10 through the key connection to drive the differential screw body 10 to rotate.

[0033] Further, an elastic retainer ring or an end cap can be arranged on the aforementioned differential screw body 10, and the aforementioned elastic retainer ring or end cap can abut against the rotating wheel, thereby limiting the movement of the rotating wheel in the axial direction.

[0034] In yet other embodiments, the aforementioned rotating wheel can be integrally formed with the differential screw body 10, and at this time the aforementioned rotating wheel and the differential screw body can be integrated, which has high strength and is tightly connected.

[0035] In some embodiments, a plurality of anti-skid stripes can be arranged on the side wall of the aforementioned rotating wheel. Specifically, the aforementioned anti-skid stripes can include straight stripes, mesh stripes and special-shaped stripes. It should be understood that the straight stripes can include a plurality of parallel straight lines, the mesh stripes can form a diamond or diamond-shaped pattern by two groups of intersecting diagonal lines, and the special-shaped stripes can include sun stripes and concentric circle stripes.

[0036] By arranging the anti-skid stripes, the friction between the user's hand and the rotating wheel can be increased, thereby facilitating the provision of a more accurate and labor-saving joystick, and avoiding misoperation due to hand slip.

[0037] In some embodiments, the first end of the differential screw body 10 is provided with a first external thread, and the second end of the differential screw body 10 is provided with a second external thread. It can be understood that the first external thread and the second external thread can be machined by turning, grinding or whirl milling.

[0038] In some embodiments, the first end of the differential screw body 10 can be connected with a fixed end, and the second end of the differential screw body 10 can be connected with a movable end.

[0039] In some embodiments, the inside of the fixed base can be provided with a thread, which can be connected with the differential screw body 10 through the thread.

[0040] In some embodiments, the fixed base can be arranged on the rack of the optical assembly of the device, and the middle of the fixed base can be provided with a threaded hole, wherein the fixed base can be machined from aluminum alloy or steel. In some embodiments, the threaded hole can be provided with a first internal thread, which can be connected with the first external thread on the first end of the differential screw body 10.

[0041] It can be understood that by connecting the first end of the differential screw body 10 with the fixed end 20, the differential screw body 10 can rotate in the fixed base while axially moving relative to the fixed base. It can be understood that when the differential screw body rotates one circle, the differential screw body 10 moves axially relative to the fixed base by a distance of the lead of the first external thread.

[0042] In some embodiments, the movable end 30 can include a moving platform, which can be connected with the second end of the differential screw body 10 through a moving nut. Specifically, the moving nut can be fixed below or inside the moving platform through a screw, wherein a mounting sleeve or a fish eye pit can be arranged on the connecting hole connecting the moving platform and the moving nut, and the centering of the nut can be fine-tuned by adjusting the screw, so as to ensure that the axis of the nut is parallel to the axis of the platform movement.

[0043] In some embodiments, the second end of the differential screw body 10 can pass through the fixed end bearing fixed on the base, and then be screwed into the moving nut of the movable end. In some embodiments, the moving nut can include an elastic nut.

[0044] In some embodiments, the differential screw assembly can further include a guide mechanism, which can include a linear guide, a sliding guide and other guide assemblies, and further, the guide mechanism can also include a combination of an optical axis and a linear bearing.

[0045] In some embodiments, the guiding mechanism can be connected to the moving platform, and can prevent the moving platform from rotating. It can be understood that when the screw rotates, the screw will generate a rotating force on the moving nut, and the moving nut will generate a rotating force on the moving platform. In order to prevent the moving platform from rotating, the guiding mechanism can be used to limit the movement of the moving platform, so that the moving platform can only move.

[0046] In some embodiments, the guiding mechanism can include a linear guide rail, which can include a guide rail and a plurality of sliders. The slider contains a ball or roller circulation system inside. The ball or roller rolls on the precise rolling way between the guide rail and the slider, and changes the sliding friction into rolling friction. In other embodiments, the guiding mechanism can include an optical shaft and a linear bearing sleeved on the optical shaft. The linear bearing has a ball or retainer inside.

[0047] In some embodiments, the moving distance of the movable end 30 can be determined by the following formula: wherein, is the moving distance of the movable end, is the lead of the first external thread, is the lead of the second external thread.

[0048] It can be understood that the lead of the first external thread can be the same as the lead of the first internal thread, and the lead of the second external thread can be the same as the lead of the second internal thread. In some embodiments, the lead of the first external thread can be the linear distance of the first external thread moving around the axis direction when the first external thread rotates one turn, and the lead of the second external thread can be the linear distance of the second external thread moving around the axis direction when the second external thread rotates one turn. Since the lead of the first external thread can be greater than the lead of the second external thread, and the fixed end can be fixed on the rack, the moving distance of the movable end can be equal to the difference between the lead of the first external thread and the lead of the second external thread when the screw body rotates.

[0049] In some embodiments, the first internal thread on the fixed end 20 can be connected to the first external thread on the first end of the differential screw body 10, and the second internal thread on the movable end 30 can be connected to the second external thread on the second end of the differential screw body 10.

[0050] In some embodiments, the first internal thread can have the same direction as the second internal thread, the first external thread can have the same direction as the second external thread, and the first internal thread can have a lead greater than the second internal thread, and the first external thread can have a lead greater than the second external thread. It can be understood that when the differential screw body 10 is rotated, the first external thread of the first end of the differential screw body 10 can be rotated relative to the first internal thread of the fixed end 20, so as to drive the differential screw body 10 to move axially along the fixed end; further, the second external thread of the second end of the differential screw body 10 can be rotated relative to the second internal thread of the movable end 30, so as to drive the differential screw body 10 to move along the movable end, and because the first internal thread has a lead greater than the second internal thread, there is a distance difference between the displacement of the differential screw body 10 relative to the fixed end and the movable end, so as to adjust the distance between the movable end and the fixed end, and further adjust the distance between the moving platform connected with the movable end and the rack connected with the fixed end.

[0051] In some embodiments, the moving distance of the movable end can be obtained by the difference between the lead of the first external thread and the lead of the second external thread, which can be the relative displacement between the movable end and the fixed end when the screw assembly is rotated one circle.

[0052] In some embodiments, the second external thread and the second internal thread are trapezoidal threads, so as to realize self-locking of the movable end 30.

[0053] In some embodiments, the trapezoidal thread can have a helix angle and an equivalent friction angle, and the helix angle can be greater than the equivalent friction angle, so as to realize self-locking.

[0054] It can be understood that when the screw body is rotated, a torque can be applied to the screw assembly, which can overcome the friction in the thread pair, so as to drive the system to move. When the rotation of the screw body is stopped, the load of the movable end can generate a reverse axial force through the moving platform and the moving nut, and at this time, the reverse axial force cannot overcome the static friction torque generated by the trapezoidal thread of the fixed end, so as to make it unable to move relatively, and further realize self-locking, so as to fix the position.

[0055] By the scheme of the present application, the second external thread and the second internal thread are set as trapezoidal threads and self-locking of the movable end is realized, so as to avoid accidental movement of the moving platform, and further improve the safety and reliability.

[0056] In some embodiments, the side of the fixed end 20 is provided with a first through hole, and the first through hole is connected with the base of the optical assembly, so as to realize fixation of the fixed end 20.

[0057] In some embodiments, the side of the movable end 30 is provided with a second through hole, which is connected with a moving assembly of the optical assembly, so that the moving assembly moves along the direction of the axis of the differential screw body 10.

[0058] In some embodiments, the aforementioned fixed end can be connected with the rack through a connecting shaft. It should be understood that the surfaces of the fixed end 20 provided with the through holes connected with the screw body can be the top and the side of the fixed end, and the other four surfaces of the fixed end can be the sides of the fixed end. The side of the aforementioned fixed end can be provided with one or more first through holes 21, wherein the aforementioned first through holes 21 can be connected with the connecting shaft. Specifically, the aforementioned first through holes can be fixedly connected with the first end of the connecting shaft, and the second end of the connecting shaft can be fixedly connected with the rack, so as to realize the connection between the fixed end and the rack. It can be understood that since the rack is fixed, the aforementioned fixed end can also remain fixed.

[0059] In some embodiments, the surfaces of the aforementioned movable end 30 provided with the through holes connected with the screw body can be the top and the side of the movable end 30, and the other four surfaces of the movable end 30 can be the sides of the movable end 30. In some embodiments, the side of the aforementioned movable end 30 can be provided with a second through hole 31, and the moving assembly of the aforementioned optical assembly can include a moving platform, and the side of the movable end 30 can be connected with the moving platform through a movable connecting rod. In some embodiments, the first end of the movable connecting rod can be connected with the second through hole 31 of the movable end 30, and the second end of the movable connecting rod can be connected with the moving platform.

[0060] Through the scheme of the present application, the first end of the differential screw body is provided with a first external thread, the second end of the differential screw body is provided with a second external thread, the fixed end is sleeved on the first end of the differential screw body, the movable end is arranged on the second end of the differential screw body, and the lead of the first external thread is greater than the lead of the second external thread, so that when the differential screw body is rotated, the movable end will produce a slight movement to compensate for the difference in the leads of the first external thread and the second external thread, so that the accuracy of adjustment can be better subdivided and controlled.

[0061] Figure 2 An exemplary structural diagram of a slide for an optical assembly is shown in some embodiments of the present application, as shown in Figure 2 As shown, the slide includes the differential screw assembly as described in any one of the preceding embodiments, and the slide further includes a first flat plate 41 and a second flat plate 42, wherein the first flat plate 41 and the second flat plate 42 are connected by one or more differential screw assemblies.

[0062] In some embodiments, the first plate 41 can be connected to the fixed end 20 of the differential screw assembly, and the second plate 42 can be connected to the movable end 30 of the differential screw assembly. When the rotating screw body is rotated, the distance between the movable end 30 and the fixed end 20 of the differential screw assembly can be controlled, so that the distance between the first plate 41 and the second plate 42 can be controlled.

[0063] The application also provides an angle adjustment device for an optical assembly, comprising the differential screw assembly according to any one of the preceding embodiments, and further comprising an optical platform, a mounting base, and a hinge assembly, wherein the optical platform is arranged on the mounting base through the hinge assembly; the hinge assembly is provided with a first differential screw assembly and a second differential screw assembly on two sides thereof, wherein the movable end of the first differential screw assembly is connected to the first side of the mounting base, and the movable end of the second differential screw assembly is connected to the second side of the mounting base, and the differential screw body of the first differential screw assembly and the differential screw body of the second differential screw assembly are arranged on the same straight line.

[0064] In some embodiments, the first differential screw assembly is rotated towards the direction away from the second differential screw assembly, and the second differential screw assembly is rotated towards the direction away from the first differential screw assembly, so as to increase the angle; the first differential screw assembly is rotated towards the direction close to the second differential screw assembly, and the second differential screw assembly is rotated towards the direction close to the first differential screw assembly, so as to decrease the angle.

[0065] In some embodiments, the optical platform is arranged on the mounting base through the hinge assembly, so that the optical platform can be rotated relative to the mounting base. Further, the first end of the mounting base can be connected to the first differential screw assembly, and the second end of the mounting base can be connected to the second differential screw assembly, so that the first differential screw assembly and the second differential screw assembly can be rotated relative to the optical platform, thereby adjusting the angle of the optical assembly.

[0066] In summary, according to the scheme of the application, the first end of the differential screw body is provided with a first external thread, the second end of the differential screw body is provided with a second external thread, the fixed end is sleeved on the first end of the differential screw body, the movable end is arranged on the second end of the differential screw body, and the lead of the first external thread is greater than the lead of the second external thread, so that when the differential screw body is rotated, the movable end will produce a slight movement to compensate for the difference in lead between the first external thread and the second external thread, thereby better subdividing and controlling the adjustment accuracy.

[0067] While several embodiments of the application have been shown and described herein, it will be obvious to those skilled in the art that many changes, modifications, and substitutions can be made to the embodiments without departing from the spirit and scope of the application. It is to be understood that various alternatives to the embodiments of the application described herein can be employed in practicing the application. The appended claims are intended to cover all such alternatives as would be included within the spirit and scope of the application.

Claims

1. A differential screw assembly for an optical assembly, characterized by, The differential screw assembly comprises a differential screw body (10), a fixed end (20) and a movable end (30); wherein, The first end of the differential screw body (10) is provided with a first external thread, and the second end of the differential screw body (10) is provided with a second external thread; The fixed end (20) is sleeved on the first end of the differential screw body (10), and the fixed end (20) is provided with a first internal thread inside, and the first internal thread and the first external thread are connected in cooperation; The movable end (30) is sleeved on the second end of the differential screw body (10), and the movable end (30) is provided with a second internal thread inside, and the second internal thread and the second external thread are connected in cooperation; Wherein, the first external thread and the second external thread are in the same direction, and the lead of the first external thread is greater than the lead of the second external thread.

2. The differential screw assembly of claim 1, wherein, The middle region of the differential screw body (10) is provided with a rotating wheel, and the side of the rotating wheel is provided with an anti-skid stripe group.

3. The differential screw assembly of claim 1, wherein, The second external thread and the second internal thread are trapezoidal threads to realize self-locking of the movable end (30).

4. The differential screw assembly of claim 1, wherein, The side of the fixed end (20) is provided with a first through hole, and the first through hole is connected with the base of the optical assembly to realize the fixation of the fixed end (20).

5. The differential screw assembly of claim 1, wherein, The side of the movable end (30) is provided with a second through hole, and the second through hole is connected with the moving assembly of the optical assembly to make the moving assembly move along the direction of the axis of the differential screw body (10).

6. The differential screw assembly of claim 1, wherein, The lead of the first external thread is greater than the lead of the second external thread.

7. The differential screw assembly of any of claims 1-6, wherein, The moving distance of the movable end (30) meets: wherein is the distance of movement of the active end, is the lead of the first external thread, is the lead of the second external thread.

8. A slide for an optical assembly, characterized in that The slide table further comprises a first flat plate and a second flat plate, wherein the first flat plate and the second flat plate are connected by one or more differential screw assemblies.

9. An angular adjustment device for an optical assembly, characterized by The adjustment angle device further comprises an optical platform, a mounting base and a hinge assembly, wherein, The optical platform is arranged on the mounting base through the hinge assembly; The two sides of the hinge assembly are respectively provided with a first differential screw assembly and a second differential screw assembly, wherein the movable end of the first differential screw assembly is connected with the first side of the mounting base, and the movable end of the second differential screw assembly is connected with the second side of the mounting base, and wherein the differential screw body of the first differential screw assembly and the differential screw body of the second differential screw assembly are arranged on the same straight line.

10. The adjustment angle device according to claim 9, wherein, The first differential screw assembly rotates towards the direction away from the second differential screw assembly, and the second differential screw assembly rotates towards the direction away from the first differential screw assembly to increase the angle; The first differential screw assembly rotates towards the direction close to the second differential screw assembly, and the second differential screw assembly rotates towards the direction close to the first differential screw assembly to decrease the angle.

Images