Sports table

Abstract

The invention provides a motion table, and relates to the technical field of precision equipment. The motion platform comprises a base, a first direction motion mechanism arranged on the base, a first direction guide mechanism arranged on the base, a cross beam connected with the first direction motion mechanism and the first direction guide mechanism, a second direction motion mechanism arranged on the cross beam and a cross beam carrier plate arranged on the cross beam. The first-direction movement mechanism drives the beam to move relative to the base in the first direction. The second direction movement mechanism drives the cross beam carrier plate to move on the cross beam in the second direction; the first direction guiding mechanism comprises a flexible connecting piece arranged at one end of the cross beam, the flexible connecting piece can move in the first direction, the flexible connecting piece is configured to have rigidity in the first direction, the second direction and the third direction and have flexibility relative to rotation around the third direction, and the third direction is perpendicular to the first direction and the second direction.

Description

TECHNICAL FIELD

[0001] The present specification relates to the technical field of precision equipment, and in particular to a motion stage. BACKGROUND

[0002] A motion stage or a motion device can achieve precise motion in a first direction and / or a second direction at least in a horizontal plane. The motion stage can include a first direction motion mechanism, a cross beam, a second direction motion mechanism, and a driven member. The second direction motion mechanism can be configured to drive the driven member to move in the second direction, and the first direction motion mechanism can be configured to drive the whole of the cross beam, the second direction motion mechanism, and the driven member to move in the first direction, so as to achieve two-dimensional motion of the driven member, or further to achieve three-dimensional motion of the driven member. The movement of the cross beam in the first direction can be guided by arranging a first direction guiding mechanism, however, the installation precision of the first direction guiding mechanism and / or the installation perpendicularity between the cross beam and the first direction guiding mechanism has a great influence on the motion precision of the gantry motion device. SUMMARY

[0003] One or more embodiments of the present specification provide a motion stage, including a base, a first direction motion mechanism arranged on the base, a first direction guiding mechanism arranged on the base, a cross beam connected with the first direction motion mechanism and the first direction guiding mechanism, a second direction motion mechanism arranged on the cross beam, and a cross beam carrier arranged on the cross beam; the first direction motion mechanism drives the cross beam to move in a first direction relative to the base; the second direction motion mechanism drives the cross beam carrier to move in a second direction on the cross beam; the first direction guiding mechanism includes a flexible connecting member arranged at one end of the cross beam, the flexible connecting member is capable of moving in the first direction, and the flexible connecting member is configured to have rigidity in the first direction, the second direction, and a third direction, and flexibility relative to rotation around the third direction, the third direction being perpendicular to the first direction and the second direction.

[0004] In some embodiments, the flexible connecting member includes a reed fixing seat, a reed connecting member, and a first direction reed and a second direction reed connecting the reed fixing seat and the reed connecting member; the second direction reed extends in the second direction; and the first direction reed extends in the first direction or is arranged obliquely relative to the first direction.

[0005] In some embodiments, two ends of the second direction reed are connected to the reed fixing seat and the reed connecting piece respectively; two ends of the first direction reed are connected to the reed fixing seat and the reed connecting piece respectively; or one end of the first direction reed is connected to the reed fixing seat, and the other end of the first direction reed is connected to the second direction reed; or one end of the first direction reed is connected to the reed connecting piece, and the other end of the first direction reed is connected to the second direction reed.

[0006] In some embodiments, further comprising: a limiting module fixedly connected to the cross beam, the limiting module being configured to limit rotation of the cross beam around the third direction.

[0007] In some embodiments, further comprising: a first direction support base provided on the base and extending along the first direction; the first direction support base providing one or more of a first support surface, a second support surface, and a third limiting surface; the first direction movement mechanism being provided on the first support surface; the first direction guide mechanism being provided on the second support surface and comprising a first direction guide rail extending along the first direction and a first direction guide slider matching the first direction guide rail and fixedly connected to the flexible connecting piece; the cross beam being provided with a limiting module configured to abut against the third limiting surface to limit rotation of the cross beam around the third direction.

[0008] In some embodiments, the first support surface is part of an upper surface of the first direction support base, and the second support surface is part of the upper surface of the first direction support base; or the first direction support base has a stepped structure, the first support surface is at least part of a step surface of the first direction support base, and the second support surface is at least part of another step surface of the first direction support base; and the third limiting surface is at least part of a side surface of the first direction support base.

[0009] In some embodiments, the limiting module comprises: a limiting base fixedly connected to the cross beam, and two or more limiting bearings provided on the limiting base; the two or more limiting bearings cooperating with the third limiting surface to limit rotation of the cross beam around the third direction; and a gap between the two or more limiting bearings and the third limiting surface, the gap having a gap value smaller than a corresponding gap value when the flexible connecting piece plastically deforms.

[0010] In some embodiments, the first direction motion mechanism comprises a first direction stator and a first direction mover, the first direction stator extends along the first direction, and the first direction mover is rigidly connected with the cross beam.

[0011] In some embodiments, the first direction motion mechanism comprises a first direction stator and a first direction mover, the first direction stator extends along the first direction, and the first direction mover is rigidly connected with the cross beam.

[0012] In some embodiments, the first direction motion mechanism comprises a first direction stator and a first direction mover, the first direction stator extends along the first direction, and the first direction mover is rigidly connected with the cross beam.

[0013] In some embodiments, the first direction motion mechanism comprises a first direction stator and a first direction mover, the first direction stator extends along the first direction, and the first direction mover is rigidly connected with the cross beam.

[0014] In some embodiments, the first direction motion mechanism comprises a first direction stator and a first direction mover, the first direction stator extends along the first direction, and the first direction mover is rigidly connected with the cross beam.

[0015] In some embodiments, further comprising: a wire slot fixedly connected with the crossbeam, one end of the wire slot protruding from the crossbeam and connected with the free end of the first drag chain structure; the other end of the wire slot facing the second drag chain structure fixedly connected with the crossbeam directly or indirectly.

[0016] In some embodiments, further comprising: a first direction support base provided on the base, the first direction support base extending along the first direction; the first direction support base providing a fourth support surface; the fourth support surface being provided with the first drag chain guide mechanism, the first drag chain guide mechanism comprising: a first drag chain guide rail, a first drag chain guide slider matched with the first drag chain guide rail, and a first drag chain guide spring connecting the first drag chain guide slider and the free end of the first drag chain structure, the first drag chain guide rail being provided on the fourth support surface.

[0017] In some embodiments, two first direction movement mechanisms and two first direction guide mechanisms are included, one end of the crossbeam being connected with one first direction movement mechanism and one first direction guide mechanism, the other end of the crossbeam being connected with the other first direction movement mechanism and the other first direction guide mechanism; the number of crossbeams being two or more.

[0018] The beneficial effects that the embodiments of the present specification can bring include but are not limited to: (1) the flexible connecting piece is used to connect the cross beam and the first direction guiding mechanism, allowing the cross beam to adjust its angle relative to the first direction guiding mechanism around the third direction, reducing the influence of the guide rail installation precision on the motion precision of the motion table; (2) by arranging the flexible connecting piece at both ends of the cross beam, the first direction motion mechanism on both sides of the cross beam is allowed to adjust the orthogonal state between the cross beam and the motion direction of the cross beam through differential adjustment; (3) the flexibility of the flexible connecting piece around the third direction is realized through the first direction spring piece and the second direction spring piece; (4) the rotation of the cross beam around the third direction is limited through the limiting module, avoiding plastic deformation of the flexible part in the flexible connecting piece; (5) the support surface and the limiting surface are provided through the first direction support base, and multiple mechanisms are integrated in the first direction support base; (6) the rigid connection of the first direction motion mechanism and the cross beam ensures the accuracy of driving and the precision of overall motion; (7) the movement of the first drag chain structure along with the cross beam is guided through the first drag chain guiding mechanism, reducing the vibration of the cross beam and improving the motion precision of the equipment; (8) the first drag chain guiding mechanism can bear part of the weight of the first drag chain structure, reducing the load of the cross beam; (9) the first drag chain guiding mechanism has rotational flexibility in the first direction, which can realize the decoupling between the cross beam and the first drag chain structure; (10) the cross beam adapter plate can realize cable adapter and transfer the weight of the cable to the cross beam instead of the cross beam carrier plate, so as to reduce the load of the cross beam carrier plate and improve the motion precision of the cross beam carrier plate; (11) the cross beam carrier plate and the cross beam adapter plate are arranged on the first surface and the second surface respectively, providing installation space and working space for the driven components on the cross beam carrier plate, and facilitating the cross beam to bear the weight of the cross beam adapter plate and the cable thereon; (12) the cross beam adapter plate can move synchronously with the cross beam carrier plate through the adapter plate spring piece; (13) the decoupling between the cross beam carrier plate and the cross beam adapter plate is realized through the adapter plate spring piece, avoiding friction or jamming caused by installation precision or machining precision; (14) the cable close to the cross beam carrier plate is accommodated, supported and guided through the second drag chain structure, so that the cable can move along with the cross beam carrier plate; (15) the cable is further supported through the wire slot; (16) the free end of the first drag chain structure is dragged to move along with the cross beam through the wire slot; (17) part of the weight of the first drag chain structure is transferred to the first direction support base through the first direction guiding mechanism, reducing the load of the cross beam. It should be noted that different embodiments can have different beneficial effects, and in different embodiments, the beneficial effects that can be produced can be any one or a combination of the above, or any other beneficial effects that can be obtained. BRIEF DESCRIPTION OF DRAWINGS

[0019] The present specification will be further illustrated in the manner of exemplary embodiments, which will be described in detail with reference to the drawings. The same reference numbers in the drawings represent the same structures or steps.

[0020] Figure 1 is a top view schematic diagram of a motion stage according to some embodiments of the present specification.

[0021] Figure 2 , Figure 3 is a perspective view schematic diagram of a motion stage according to some embodiments of the present specification.

[0022] Figure 4 is a partial cross-sectional view schematic diagram of a motion stage according to some embodiments of the present specification.

[0023] Figure 5 is a cross-sectional view schematic diagram of a first direction support base of a motion stage according to some embodiments of the present specification.

[0024] Figure 6 is a schematic diagram of a flexible connector of a motion stage according to some embodiments of the present specification.

[0025] Figure 7 is a top view schematic diagram of a flexible connector of a motion stage according to some embodiments of the present specification.

[0026] Figure 8 is a top view schematic diagram of a flexible connector of a motion stage according to some other embodiments of the present specification.

[0027] Figure 9 is a top view schematic diagram of a flexible connector of a motion stage according to some further embodiments of the present specification.

[0028] Figure 10 is a schematic diagram of a limit module of a motion stage according to some embodiments of the present specification.

[0029] Figure 11 is a schematic diagram of a crossbeam adapter plate of a motion stage according to some embodiments of the present specification.

[0030] Figure 12 is a schematic diagram of a first direction drag chain guide mechanism of a motion stage according to some embodiments of the present specification.

[0031] Figure 13 is a perspective view schematic diagram of a motion stage according to some embodiments of the present specification.

[0032] Figure 14 is a schematic diagram of a first direction limit mechanism of a motion stage according to some embodiments of the present specification.

[0033] Marked in the figure: 1 base; 11 first direction support base; 111 first support surface; 112 second support surface; 113 third limiting surface; 114 fourth support surface; 21 first direction movement mechanism; 211 first direction stator; 212 first direction rotor; 201 flexible connecting piece; 2011 reed fixing seat; 2012 reed connecting piece; 2013 first direction reed; 2014 second direction reed; 22 first direction guide mechanism; 221 first direction guide rail; 222 first direction guide slider; 3 cross beam; 31 first surface; 32 second surface; 41 second direction movement mechanism; 42 second direction guide mechanism; 5 cross beam carrier plate; 6 cross beam adapter plate; 61 auxiliary guide mechanism; 7 adapter plate reed; 8 limiting module; 81 limiting base; 82 limiting bearing; 9 wire channel; 91 wire channel connecting piece; 101 first drag chain structure; 102 second drag chain structure; 1021 second drag chain structure connecting piece; 103 first drag chain guide mechanism; 1031 first drag chain guide rail; 1032 first drag chain guide slider; 1033 first drag chain guide reed; 1034 first drag chain guide reed connecting piece; 1041 first direction first limiting module; 1042 first direction second limiting module; 1043 first direction third limiting module; 1044 first direction fourth limiting module. DETAILED DESCRIPTION

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present specification, the embodiments will be described in detail below with reference to the drawings. Obviously, the following description is some examples or embodiments of the present specification, and for those skilled in the art, the technical solutions or means disclosed in the present specification can be applied to other scenarios without creative labor.

[0035] It should be understood that the "system", "device", "equipment", "part" and / or "unit" and / or "module" used in the present specification is a method for distinguishing different components, elements, parts, parts or assemblies at different levels. However, if other words can achieve the same purpose, the words can be replaced by other expressions.

[0036] Unless otherwise specified, the technical terms of components, elements, etc. described in the present specification do not refer to a single number, but can also include a plurality. Generally speaking, the terms "include", "contain" and the like only indicate the inclusion of the steps, elements or components explicitly identified, and these steps, elements and components do not constitute an exclusive list, and the method or device described can also include other steps or components.

[0037] In the description of the present specification, it needs to be understood that the orientation description, such as the orientation or position relationship indicated by the upper, lower, front, rear, left, right and the like, is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application. In the description of the present specification, unless otherwise explicitly limited, the words such as arrangement, installation, connection and the like should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present specification in combination with the specific content of the technical scheme.

[0038] The motion table or motion device can at least realize precise motion in a horizontal plane in a first direction (for example, X-axis direction) and / or a second direction (for example, Y-axis direction). The motion table can include a first direction motion mechanism (for example, X-axis direction motion mechanism) and a second direction motion mechanism (for example, Y-axis direction motion mechanism). The second direction motion mechanism can be used to drive the driven member to move along the second direction, and the first direction motion mechanism can be used to drive the second direction motion mechanism and the whole of the driven member to move along the first direction, so as to realize two-dimensional motion of the driven member, or further realize three-dimensional motion of the driven member.

[0039] The motion table or motion device can be a gantry motion device, which can include two parallelly arranged first direction motion mechanisms and at least one second direction motion mechanism. Among them, the two parallelly arranged first direction motion mechanisms drive the cross beam and the related members on the cross beam to move along the first direction, and the second direction motion mechanism and the driven member driven by the second direction motion mechanism can be arranged on the cross beam.

[0040] In some related embodiments, the gantry motion device can include a first direction guide mechanism for guiding the movement of the cross beam along the first direction, and the cross beam can be rigidly connected with the first direction guide mechanism. The installation accuracy of the first direction guide mechanism and / or the installation perpendicularity between the cross beam and the first direction guide mechanism has a great influence on the motion accuracy of the gantry motion device.

[0041] Based on this, one or more embodiments of the present specification provide a motion table, which realizes flexible connection between the cross beam and the first direction guide mechanism through a flexible connecting piece, so as to reduce the influence of the installation accuracy of the first direction guide mechanism on the motion accuracy of the motion table.

[0042] Figure 1 is a top view schematic diagram of a motion table according to some embodiments of the present specification, Figure 2 , Figure 3 is a perspective view schematic diagram of a motion table according to some embodiments of the present specification, Figure 4is a schematic view of a motion stage according to some embodiments of the present disclosure, Figure 5 is a schematic view of a first direction support base of a motion stage according to some embodiments of the present disclosure. Referring to Figures 1 to 5 According to one or more embodiments of the present disclosure, as shown in the drawings, a motion stage can include a base 1, a first direction motion mechanism 21 disposed on the base 1, a first direction guiding mechanism 22 disposed on the base 1, a cross beam 3 connected to the first direction motion mechanism 21 and the first direction guiding mechanism 22, a second direction motion mechanism 41 disposed on the cross beam 3, and a cross beam load plate 5 disposed on the cross beam 3. In some embodiments, the first direction motion mechanism 21 drives the cross beam 3 to move relative to the base 1 along a first direction X. In some embodiments, the second direction motion mechanism 41 drives the cross beam load plate 5 to move on the cross beam 3 along a second direction Y.

[0043] In some embodiments, the base 1 is configured to support the first direction motion mechanism 21, the first direction guiding mechanism 22, the cross beam 3, the second direction motion mechanism 41, the cross beam load plate 5, and a driven member. In some embodiments, the base 1 can be a marble base. In some embodiments, the first direction motion mechanism 21 is a linear motion mechanism. In some embodiments, the second direction motion mechanism 41 is a linear motion mechanism. In some embodiments, the driven member can be directly or indirectly disposed on the cross beam load plate 5. In some embodiments, a third direction motion mechanism can be disposed on the cross beam load plate 5, the third direction motion mechanism drives a mounting plate to move relative to the cross beam load plate 5 along a third direction Z, and the driven member can be disposed on the mounting plate.

[0044] In some embodiments, the second direction Y can be the extension direction of the cross beam 3, and the first direction X can intersect the second direction Y (e.g., the first direction X is perpendicular to the second direction Y). In some embodiments, the first direction X and the second direction Y can be in the same plane, e.g., in the same horizontal plane. In some embodiments, the third direction Z can be perpendicular to the first direction and the second direction.

[0045] In one or more embodiments of the present specification, the first direction guiding mechanism 22 comprises a flexible connection 201 provided at one end of the cross beam 3, the flexible connection 201 being movable along the first direction X. In some embodiments, the flexible connection 201 is configured to have rigidity in the first direction X, the second direction Y and the third direction Z. In some embodiments, the flexible connection 201 is configured to have flexibility with respect to rotation about the third direction Z to allow the cross beam 3 to rotate about the third direction Z relative to the first direction guiding mechanism 22, realizing a flexible connection between the cross beam 3 and the first direction guiding mechanism 22. In some use scenarios, when there is an installation error between the first direction guiding mechanism 22 and the movement direction of the cross beam 3, the position of the cross beam 3 relative to the first direction guiding mechanism 22 can be adjusted based on the flexible connection 201 to adjust the movement direction of the cross beam 3 to the designed direction (e.g., making the cross beam 3 perpendicular to the first direction X and making the cross beam 3 move along the first direction X), thereby reducing the influence of the installation precision of the first direction guiding mechanism 22 on the movement precision of the cross beam 3.

[0046] In one or more embodiments of the present specification, referring to Figures 6 to 9 As shown, the flexible connection 201 can comprise a reed fixing seat 2011, a reed connection 2012, and a first direction reed 2013 and a second direction reed 2014 connecting the reed fixing seat 2011 and the reed connection 2012.

[0047] In some embodiments, the second direction reed 2014 extends along the second direction Y. In some embodiments, the second direction reed 2014 can provide rigidity in the second direction Y and rigidity in the third direction Z. In some embodiments, the second direction reed 2014 can provide flexibility with respect to rotation about the third direction Z.

[0048] The first direction reed 2013 extends along the first direction X or is arranged obliquely with respect to the first direction X. In some embodiments, the first direction reed 2013 can provide rigidity in the first direction X and rigidity in the third direction Z. In some embodiments, the first direction reed 2013 can provide flexibility with respect to rotation about the third direction Z.

[0049] In some embodiments, referring to Figure 6 , Figure 7As shown, two ends of the second direction spring 2014 are connected with the spring fixing seat 2011 and the spring connecting piece 2012 respectively, and two ends of the first direction spring 2013 are connected with the spring fixing seat 2011 and the spring connecting piece 2012 respectively. In this embodiment, the spring fixing seat 2011 and the spring connecting piece 2012 are both in plate structure. In this embodiment, the second direction spring 2014 extends along the second direction Y, and two first direction springs 2013 are respectively arranged on two sides of one second direction spring 2014, and the two first direction springs 2013 are arranged obliquely relative to the first direction X. In some embodiments, the two first direction springs 2013 are mirror arranged relative to the second direction spring 2014.

[0050] In some embodiments, referring to Figure 8 As shown, two ends of the second direction spring 2014 are connected with the spring fixing seat 2011 and the spring connecting piece 2012 respectively, and two ends of the first direction spring 2013 are connected with the spring fixing seat 2011 and the spring connecting piece 2012 respectively. In this embodiment, the spring fixing seat 2011 and the spring connecting piece 2012 are both in plate structure. In this embodiment, the second direction spring 2014 extends along the second direction Y, and two first direction springs 2013 are respectively arranged on two sides of one second direction spring 2014, and the two first direction springs 2013 are arranged obliquely relative to the first direction X. In some embodiments, the two first direction springs 2013 are mirror arranged relative to the second direction spring 2014.

[0051] In some embodiments, referring to Figure 9 As shown, two ends of the second direction spring 2014 are connected with the spring fixing seat 2011 and the spring connecting piece 2012 respectively. In some embodiments, one end of the first direction spring 2013 (for example Figure 9 the first direction spring 2013 on the left side in FIG. 8) is connected with the spring fixing seat 2011, and the other end of the first direction spring 2013 is connected with the second direction spring 2014 (for example, the other end of the first direction spring 2013 is connected with the middle part of the second direction spring 2014). In some embodiments, one end of the first direction spring 2013 (for example Figure 9One end of the first direction spring 2013 on the right side is connected with the spring connecting piece 2012, and the other end of the first direction spring 2013 is connected with the second direction spring 2014 (for example, the other end of the first direction spring 2013 is connected with the middle part of the second direction spring 2014). In this embodiment, the spring fixing seat 2011 and the spring connecting piece 2012 are both in plate-shaped structure. In this embodiment, the second direction spring 2014 extends along the second direction Y, and two first direction springs 2013 are respectively arranged on the two sides of one second direction spring 2014, and the two first direction springs 2013 extend along the first direction X. In some embodiments, the two first direction springs 2013 are parallel to the spring fixing seat 2011. In some embodiments, the two first direction springs 2013 are parallel to the spring connecting piece 2012. In this embodiment, the middle part of the second direction spring 2014 forms a connecting structure 2014a, which divides the second direction spring 2014 into two parts, and the other end of the first direction spring 2013 is fixedly connected with the connecting structure 2014a. In some embodiments, the connecting structure 2014a can be in columnar structure, table structure or conical structure, for example, cylindrical structure, columnar structure, circular table structure, conical structure, etc. In this embodiment, the spring fixing seat 2011 extends in the direction of the spring connecting piece 2012 to form a spring fixing seat fixing part 2011a, and the side surface of one end of one first direction spring 2013 is fixedly connected with the spring fixing seat fixing part 2011a. In this embodiment, the spring connecting piece 2012 extends in the direction of the spring fixing seat 2011 to form a spring connecting piece fixing part 2012a, and the side surface of one end of the other first direction spring 2013 is fixedly connected with the spring connecting piece fixing part 2012a. In some embodiments, the two first direction springs 2013 are arranged in central symmetry with respect to the connecting structure 2014a.

[0052] In Figures 6 to 9 In one or more embodiments shown, the arrangement of the first direction spring 2013 and the second direction spring 2014 has smaller rigidity around the third direction rotation and larger rigidity in other directions, which can ensure the control stability of the cross beam 3 while allowing the cross beam 3 to rotate around the third direction with smaller rotation.

[0053] In some embodiments, by reasonably designing the length, thickness, width and position of the first direction spring 2013 and the second direction spring 2014, the rigidity around the third direction rotation and the rigidity in other directions can be balanced (for example, the rigidity around the third direction rotation is reduced while the rigidity in other directions is ensured), so that the rigidity in each direction meets the requirements.

[0054] In some embodiments, referring to Figures 6 to 9As shown, the second direction spring 2014 is connected to the spring fixing seat 2011 at one side or both sides of which a deformation groove and / or a deformation chamfer are formed to provide space for deformation of the second direction spring 2014. In some embodiments, the second direction spring 2014 is connected to the spring connecting piece 2012 at one side or both sides of which a deformation groove and / or a deformation chamfer are formed to provide space for deformation of the second direction spring 2014. In some embodiments, the first direction spring 2013 has a gap between the spring fixing seat 2011 and the spring connecting piece 2012 to provide space for deformation of the first direction spring 2013.

[0055] In some embodiments, the first direction guiding mechanism 22 further comprises a first direction guiding rail 221 and a first direction guiding slider 222 matched with the first direction guiding rail 221, the first direction guiding rail 221 extending along the first direction X, and the first direction guiding slider 222 being fixedly connected with the flexible connecting piece 201.

[0056] In one or more embodiments of the present specification, the first direction movement mechanism 21 comprises a first direction stator 211 and a first direction rotor 212. In some embodiments, the first direction stator 211 is fixedly connected with the first support surface 111. In some embodiments, the first direction stator 211 extends along the first direction X. In some embodiments, the first direction rotor 212 is rigidly connected with the crossbeam 3 to avoid driving flexibility between the first direction movement mechanism 21 and the crossbeam 3, so as to directly transmit power to the crossbeam 3, so that the crossbeam 3 has a faster response speed, while reducing additional vibration of the crossbeam 3 due to flexible connection to the first direction rotor 212.

[0057] In some embodiments, the first direction movement mechanism 21 can allow the crossbeam 3 to move along the second direction Y while driving the crossbeam 3 to move along the first direction X. For example, the first direction stator 211 comprises a magnetic steel assembly, and the first direction rotor 212 comprises a coil assembly, the magnetic steel assembly being provided with a magnetic field space extending along the first direction X, and the size of the magnetic field space in the second direction Y being greater than the size of the first direction rotor 212 in the second direction Y, so as to allow the crossbeam 3 to have a certain rotational flexibility (for example, by differential fine adjustment of the two first direction movement mechanisms 21 to the perpendicularity of the crossbeam 3 relative to the first direction guiding mechanism 22) without affecting the driving of the crossbeam 3 in the first direction X.

[0058] In one or more embodiments of the present specification, the motion stage further comprises a first direction position detection mechanism. In some embodiments, the first direction position detection mechanism comprises a first direction grating ruler and a first direction reading head. In some embodiments, the first direction grating ruler is directly or indirectly fixedly connected with the base 1. In some embodiments, the first direction reading head is fixedly connected with the cross beam 3, for example, fixedly connected with one end or both ends of the cross beam 3. In some embodiments, the number of first direction position detection mechanisms is two, and the two first direction position detection mechanisms are respectively arranged at the two ends of the cross beam 3 to feedback the displacement posture of the cross beam 3, which can ensure the posture control accuracy of the cross beam 3.

[0059] In some embodiments, the positions of the two ends of the cross beam 3 fed back by the two first direction position detection mechanisms can obtain the displacement posture of the cross beam 3. In some embodiments, when the extension direction of the cross beam 3 is not in the orthogonal state or not in the designed orthogonal range (for example, not perpendicular or not substantially perpendicular) with the motion direction (for example, the first direction X) of the cross beam 3, due to the freedom provided by the flexible connector 201 arranged at the two ends of the cross beam 3 around the third direction Z, it allows the two first direction motion mechanisms 21 at the two ends of the cross beam 3 to be differential, so that the cross beam 3 rotates around the third direction Z to adjust the posture of the cross beam 3, so that the extension direction of the cross beam 3 is in the orthogonal state (for example, 90°) or in the designed orthogonal range (for example, 89.8° to 90.2°) with the motion direction thereof.

[0060] In one or more embodiments of the present specification, the first direction motion mechanism 21 and the first direction guiding mechanism 22 are independent of each other. In some embodiments, the first direction motion mechanism 21 and the first direction guiding mechanism 22 are respectively independently connected to the cross beam 3. In some embodiments, the rigid connection of the first direction motion mechanism 21 with the cross beam 3 ensures the accuracy of driving and the precision of overall motion. In some embodiments, the flexible connection of the first direction guiding mechanism 22 with the cross beam 3 realizes the decoupling of the flexible structure, avoids the overall precision decline caused by the insufficient installation precision of the first direction guiding rail 221, and at the same time can control the relative displacement of the two first direction guiding mechanisms 22 on both sides, so as to realize the complete orthogonality of the extension direction of the cross beam 3 with the motion direction thereof. In some embodiments, the two first direction position detection mechanisms can feedback the displacement posture of the cross beam 3, which ensures the control accuracy of the cross beam 3.

[0061] In some use scenarios, the extension direction of the cross beam 3 needs to be orthogonal to the movement direction (e.g., the first direction X) of the cross beam 3. If the extension direction of the cross beam 3 is not orthogonal to the movement direction (e.g., the first direction X) of the cross beam 3, when the driven member is displaced in the second direction Y, the position of the first direction X also changes; or when the driven member is displaced in the first direction X, the position of the second direction Y also changes, resulting in an inability to guarantee the movement accuracy. In some embodiments, based on the flexible connecting member 201 arranged at both ends of the cross beam 3, the positions of the two first direction guide sliders 222 in the second direction Y are allowed to be different, that is, the influence of installation accuracy, guide rail accuracy and other factors on the movement accuracy is avoided.

[0062] In one or more embodiments of the present specification, the motion stage further comprises a second direction position detection mechanism. In some embodiments, the second direction position detection mechanism comprises a second direction grating ruler and a second direction reading head. In some embodiments, the second direction grating ruler is directly or indirectly fixedly connected with the cross beam 3 (e.g., the side surface of the cross beam 3). In some embodiments, the second direction reading head is fixedly connected with the cross beam carrier plate 5.

[0063] In one or more embodiments of the present specification, referring to FIGS. Figure 4 、 Figure 10 In one or more embodiments of the present specification, referring to FIGS.

[0064] In some embodiments, the limiting module 8 can comprise a limiting base 81 fixedly connected with the cross beam 3 and two or more limiting bearings 82 provided on the limiting base 81. In some embodiments, the cross section of the limiting base 81 can be Z-shaped. In some embodiments, the limiting base 81 is rigidly connected with the cross beam 3 through screws and / or pins. In some embodiments, the limiting bearing 82 is capable of rotating relative to the limiting base 81 around the third direction Z.

[0065] In some embodiments, two or more limit bearings 82 can be matched with the limit surface to limit the rotation of the cross beam 3 around the third direction Z. For example, the limit module 8 includes two limit bearings 82, when the cross beam 3 rotates around the third direction Z, one of the limit bearings 82 moves away from the limit surface, and the other limit bearing 82 moves close to the limit surface until abutting the limit surface, thereby preventing further rotation of the cross beam 3. In some embodiments, when the limit bearing 82 abuts the limit surface, the limit bearing 82 can roll relative to the limit surface, reducing or avoiding friction or jamming between the limit bearing 82 and the limit surface, thereby not affecting the translation of the cross beam 3 along the first direction X while limiting the rotation of the cross beam 3. In some embodiments, two or more limit bearings 82 can be arranged along the first direction X.

[0066] In some use scenarios, the cross beam 3 can have rotation around the third direction Z, when the first direction movement mechanism 21 has a large output, the torsion angle is too large, the cross beam 3 can rotate, and the end of the cross beam 3 can cause plastic deformation to the first direction spring piece 2013 and / or the second direction spring piece 2014 of the flexible connecting piece 201. The limiting effect of the limit module 8 on the cross beam 3 can protect the first direction spring piece 2013 and / or the second direction spring piece 2014.

[0067] In some embodiments, in the initial state or normal working state, the two or more limit bearings 82 and the limit surface have a standard gap with a gap value smaller than the corresponding gap value when the flexible connecting piece 201 is plastically deformed.

[0068] In some embodiments, due to processing and installation errors, the cross beam 3 can have a non-orthogonal problem after installation. During the orthogonal adjustment of the cross beam 3, the attitude of the cross beam 3 can be adjusted by controlling the relative displacement of the two sides of the cross beam 3 to achieve orthogonality.

[0069] In some embodiments, the limit module 8 can be installed after the orthogonal adjustment is completed. In some embodiments, when installing the limit module 8, a standard thickness gasket is inserted between the limit bearing 82 and the limit surface, and the limit module 8 is installed and locked against the gasket to form a standard gap. In some embodiments, the gasket thickness can be generally selected as about 0.5 mm, i.e., the limit module 8 and the limit surface have a standard gap of about 0.5 mm in the initial state or normal working state, which can separate the limit module 8 and the limit surface to avoid friction.

[0070] In some embodiments, the gap value of the standard gap can be verified, the maximum rotation angle of the rotation of the cross beam in the third direction Z at which the cross beam can appear is calculated, the first direction spring piece 2013 and / or the second direction spring piece 2014 of the cross beam 3 is strength checked at the maximum rotation angle, so as to ensure that the spring piece structure is not damaged and the spring piece appears plastic deformation. In some embodiments, if the allowable stress of the spring piece material of the first direction spring piece 2013 and / or the second direction spring piece 2014 is exceeded, the gap value of the reasonable standard gap needs to be reset.

[0071] In one or more embodiments of the present specification, referring to Figure 4 As shown, the motion table further comprises: a first direction support base 11, the first direction support base 11 is arranged on the base 1, and the first direction support base 11 extends along the first direction X. In some embodiments, each component of the motion table can be integrated on the first direction support base 11. For example, the first direction motion mechanism 21, the first direction guiding mechanism 22 and the limiting module 8 are integrated on the first direction support base 11. For example, the first direction grating ruler of the first direction position detection mechanism can also be integrated on the first direction support base 11.

[0072] In some embodiments, referring to Figure 4 、 Figure 5 As shown, the first direction support base 11 provides one or more of a first support surface 111, a second support surface 112 and a third limiting surface 113.

[0073] In some embodiments, the first direction motion mechanism 21 is arranged on the first support surface 111, for example, the first direction stator 211 of the first direction motion mechanism 21 is arranged on the first support surface 111.

[0074] In some embodiments, the first direction guiding mechanism 22 is arranged on the second support surface 112, for example, the second direction guiding rail 221 of the second direction guiding mechanism 22 is arranged on the second support surface 112.

[0075] In some embodiments, the cross beam 3 is provided with the limiting module 8, the limiting module 8 is configured to abut against the third limiting surface 113 (i.e. the limiting surface described above) to limit the rotation of the cross beam 3 around the third direction Z, for example, one of the two limiting bearings 82 of the limiting module 8 abuts against the third limiting surface 113 to limit the rotation of the cross beam 3 around the third direction Z.

[0076] In some embodiments, the first support surface 111 is a portion of the upper surface of the first directional support base 11, and the second support surface 112 is a portion of the upper surface of the first directional support base 11. In some embodiments, the upper surface of the first directional support base 11 is a plane, and both the first support surface 111 and the second support surface 112 are located on the upper surface of the first directional support base 11.

[0077] In some embodiments, see Figure 5 As shown, the first directional support base 11 has a stepped structure, such as a two-stage stepped structure. In some embodiments, the first support surface 111 is a stepped surface of the first directional support base 11 (e.g., Figure 5 The second support surface 112 is at least a portion of the stepped surface on the right side of the first direction support base 11, and the second support surface 112 is another stepped surface of the first direction support base 11 (e.g., the stepped surface on the right side of the first direction support base 11). Figure 5 At least a portion of the stepped surface on the left side of the middle.

[0078] In some embodiments, see Figure 5 As shown, the third limiting surface 113 is at least a portion of the side surface of the first direction support base 11 (e.g., at least a portion of the left side surface). In some embodiments, the side surface of the first direction support base 11 is parallel to the XZ plane.

[0079] In some related embodiments, the second-direction motion mechanism 41 may include a second-direction motion mechanism cable, which moves along the first direction as the second-direction motion mechanism 41 moves. In some related embodiments, the driven member may include a driven member cable, which moves along the first and / or second directions as the driven member moves. In some related application scenarios, the second-direction motion mechanism cable and / or the driven member cable lack guidance and support, which can easily affect the motion accuracy of the motion table.

[0080] Based on this, one or more embodiments of this specification provide a motion table with a first cable chain guiding mechanism that guides a first cable chain structure, capable of guiding and / or supporting cables to reduce the impact of cables on the motion accuracy of the motion table. See also Figures 2 to 4As shown, in some embodiments, the motion stage can further comprise a first drag chain structure 101, a free end of the first drag chain structure 101 being configured to be movable with the motion of the cross beam 3. In some embodiments, the first drag chain structure 101 is internally provided with a cable. In some embodiments, the cable can be a second direction motion mechanism cable of the second direction motion mechanism and / or a driven member cable of the driven member. In some embodiments, the first drag chain structure 101 can comprise a fixed end and a free end. In some embodiments, the fixed end of the first drag chain structure 101 is fixedly arranged, for example, to the base 1. In some embodiments, the free end of the first drag chain structure 101 is movably arranged to allow it to move with the motion of the cross beam 3.

[0081] In some embodiments, the free end of the first drag chain structure 101 can be directly or indirectly connected to the cross beam 3 to allow the cross beam 3 to drive the free end of the first drag chain structure 101 to move. In some embodiments, the cable inside the first drag chain structure 101 extends from the free end and is connected to a member on the cross beam 3 (for example, to the second direction motion mechanism 41 and / or to the driven member on the cross beam carrier plate 5), and when the cross beam 3 moves along the first direction X, the cable extending from the free end pulls the free end of the first drag chain structure 101, so that the free end of the first drag chain structure 101 moves with the motion of the cross beam 3.

[0082] In some embodiments, the motion stage further comprises a first drag chain guide mechanism 103, one end of the first drag chain guide mechanism 103 being directly or indirectly fixedly connected to the free end of the first drag chain structure 101. In some embodiments, the other end of the first drag chain guide mechanism 103 is configured to be movable relative to the base 1 along the first direction X to guide the first drag chain guide mechanism 103 and the free end of the first drag chain structure 101 connected to the first drag chain guide mechanism 103.

[0083] In some embodiments, the first drag chain structure 101 can generate vibrations during the motion of the cross beam 3, which can affect the motion of the cross beam 3. In some use scenarios, the vibrations can reduce the motion accuracy of the cross beam 3. In some use scenarios, the vibrations can reduce the working accuracy of the second direction motion mechanism 41 on the cross beam 3. Due to the guiding effect of the first drag chain guide mechanism 103 on the free end of the first drag chain structure 101, the vibrations at the free end of the first drag chain structure 101 can be reduced, thereby reducing the vibrations of the cable extending from the free end of the first drag chain structure 101, to reduce the impact of the vibrations on the cross beam 3.

[0084] In some embodiments, the first drag chain guide mechanism 103 may also provide additional support or tension to the first drag chain structure 101 during the process of guiding the first drag chain structure 101, thereby reducing the weight of the first drag chain structure 101 borne by the crossbeam 3 (for example, reducing the downward pulling effect on the crossbeam 3 due to the weight of the first drag chain structure 101, or reducing the unbalanced effect caused by the first drag chain structure 101 being located on one side of the crossbeam 3).

[0085] In some embodiments, the first drag chain guide mechanism 103 is configured to be flexible at least with respect to rotation about a first direction X, so as to decouple the guidance of the first drag chain guide mechanism 103.

[0086] In some embodiments, see Figures 2 to 4 as well as Figure 12 As shown, the first cable chain guiding mechanism 103 includes: a first cable chain guide rail 1031 directly or indirectly disposed on the base 1, a first cable chain guide slider 1032 matching the first cable chain guide rail 1031, and a first cable chain guide spring 1033 connecting the first cable chain guide slider 1032 and the free end of the first cable chain structure 101. In some embodiments, the first cable chain guide rail 1031 extends in a first direction X. In some embodiments, the first cable chain guide spring 1033 can be fixedly connected to the free end of the first cable chain structure 101 through a first cable chain guide spring connector 1034.

[0087] In some embodiments, the first cable chain guide spring 1033 may be arranged below the first cable chain guide slider 1032, and the free end of the first cable chain structure 101 is suspended on the first cable chain guide spring 1033 (e.g., suspended on the first cable chain guide spring connector 1034). In some embodiments, the first cable chain guide slider 1032 and the first cable chain guide spring 1033 provide the aforementioned tension to the free end of the first cable chain structure 101, and this tension may be borne by the first cable chain guide rail 1031.

[0088] In some embodiments, the first cable chain guide spring 1033 is configured to be flexible with respect to rotation about a first direction X, allowing the free end of the first cable chain structure 101 to bend relative to the first cable chain guide slider 1032 about the first direction X. In some embodiments, the first cable chain guide spring 1033 may be a sheet-like structure or a plate-like structure. In some embodiments, the mounting surface of the first cable chain guide rail 1031 and the mounting surface of the first cable chain guide spring connector 1034 may not be parallel due to issues such as machining accuracy, resulting in friction or jamming during movement. By providing a first cable chain guide spring 1033 that can bend about the first direction X, the problems of friction or jamming can be avoided.

[0089] In some embodiments, the first drag chain guide leaf 1033 is configured to be flexible with respect to rotation about the first direction X and the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X and twisted about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the third direction Z and twisted about the first direction X. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X, twisted about the third direction Z, and bent about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be twisted about the first direction X, bent about the third direction Z, and twisted about the third direction Z. Figure 12 In some embodiments, the first drag chain guide leaf 1033 is configured to be flexible with respect to rotation about the first direction X and the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X and twisted about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the third direction Z and twisted about the first direction X. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X, twisted about the third direction Z, and bent about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be twisted about the first direction X, bent about the third direction Z, and twisted about the third direction Z. Figure 12 In some embodiments, the first drag chain guide leaf 1033 is configured to be flexible with respect to rotation about the first direction X and the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X and twisted about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the third direction Z and twisted about the first direction X. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X, twisted about the third direction Z, and bent about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be twisted about the first direction X, bent about the third direction Z, and twisted about the third direction Z.

[0090] In some embodiments, the first drag chain guide leaf 1033 is configured to be flexible with respect to rotation about the first direction X and the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X and twisted about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the third direction Z and twisted about the first direction X. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X, twisted about the third direction Z, and bent about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be twisted about the first direction X, bent about the third direction Z, and twisted about the third direction Z. Figures 2 to 4 In some embodiments, the first drag chain guide leaf 1033 is configured to be flexible with respect to rotation about the first direction X and the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X and twisted about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the third direction Z and twisted about the first direction X. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X, twisted about the third direction Z, and bent about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be twisted about the first direction X, bent about the third direction Z, and twisted about the third direction Z. Figure 11 In some embodiments, the first drag chain guide leaf 1033 is configured to be flexible with respect to rotation about the first direction X and the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X and twisted about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the third direction Z and twisted about the first direction X. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X, twisted about the third direction Z, and bent about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be twisted about the first direction X, bent about the third direction Z, and twisted about the third direction Z.

[0091] In some embodiments, the first drag chain guide leaf 1033 is configured to be flexible with respect to rotation about the first direction X and the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X and twisted about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be bent about the third direction Z and twisted about the first direction X. In some embodiments, the first drag chain guide leaf 1033 can be bent about the first direction X, twisted about the third direction Z, and bent about the third direction Z. In some embodiments, the first drag chain guide leaf 1033 can be twisted about the first direction X, bent about the third direction Z, and twisted about the third direction Z.

[0092] In some embodiments, the adapter plate spring 7 is in a sheet structure. In some embodiments, the upper portion of the adapter plate spring 7 is fixedly connected to the crossbeam adapter plate 6. In some embodiments, the lower portion of the adapter plate spring 7 is fixedly connected to the crossbeam carrier plate 5. In some embodiments, a portion of the crossbeam adapter plate 6 can be above the crossbeam carrier plate 5, so that the adapter plate spring 7 can be arranged as much as possible in an initial state without deformation (for example, as much as possible in a vertical state), and in some embodiments, there is a gap between the crossbeam adapter plate 6 and the crossbeam carrier plate 5, and the adapter plate spring 7 can be arranged in the gap between the crossbeam adapter plate 6 and the crossbeam carrier plate 5.

[0093] In some embodiments, the adapter plate spring 7 is configured to be flexible at least for rotation around the second direction Y. In some embodiments, the running track of the crossbeam carrier plate 5 and the movement track of the crossbeam adapter plate 6 can not be parallel due to machining precision or installation precision and other problems, thereby generating friction or being stuck during movement. By setting the adapter plate spring 7 capable of bending around the second direction Y, the problem of generating friction or being stuck can be avoided.

[0094] In other embodiments, the adapter plate spring 7 is configured to be flexible for rotation around the second direction Y and rotation around the third direction Z. In some embodiments, the adapter plate spring 7 can be in a sheet structure or a plate structure. In this embodiment, the adapter plate spring 7 can not only bend around the first direction X, but also twist around the third direction Z, to further avoid the problem of generating friction or being stuck. In this embodiment, the adapter plate spring 7 twisting around the third direction Z can refer to: Figure 11 the front end of the lower portion of the adapter plate spring 7 moves to the left relative to the upper portion of the adapter plate spring 7, and the rear end of the lower portion of the adapter plate spring 7 moves to the right relative to the upper portion of the adapter plate spring 7, so that the middle portion of the adapter plate spring 7 forms a twist; or Figure 11 the front end of the lower portion of the adapter plate spring 7 moves to the right relative to the upper portion of the adapter plate spring 7, and the rear end of the lower portion of the adapter plate spring 7 moves to the left relative to the upper portion of the adapter plate spring 7, so that the middle portion of the adapter plate spring 7 forms a twist, and the like.

[0095] In one or more of the above embodiments, the adapter plate spring 7 is also configured to be rigid in the second direction Y, so that the crossbeam carrier plate 5 can pull the crossbeam adapter plate 6 to move in the second direction Y. In one or more of the above embodiments, the adapter plate spring 7 is also configured to be rigid in the third direction Z, so that the crossbeam carrier plate 5 supports the crossbeam adapter plate 6 in the third direction Z, or the crossbeam adapter plate 6 provides a pulling force in the third direction Z to the crossbeam carrier plate 5.

[0096] In one or more embodiments of the present specification, the beam 3 has an adjacent first surface 31 and a second surface 32, and the first surface 31 and the second surface 32 have an included angle therebetween. In some embodiments, the beam carrier plate 5 is capable of moving along the second direction Y on the first surface 31 of the beam 3. In some embodiments, the beam adapter plate 6 is capable of moving along the second direction Y on the second surface 32 of the beam 3.

[0097] In some embodiments, the first surface 31 is a side surface of the beam 3, so as to facilitate the arrangement of the driven member, for example, to make the end functional device have a space towards the side. In some embodiments, the second surface 32 is an upper surface of the beam 3, so as to facilitate the beam 3 to bear the weight of the beam adapter plate 6 and the driven member cable thereon. In some embodiments, the first surface 31 can be perpendicular to the second surface 32. In some embodiments, the first surface 31 can be a vertical surface. In some embodiments, the second surface 32 can be a horizontal surface.

[0098] In some embodiments, the first surface 31 is provided with a second direction guiding mechanism 42 for guiding the movement of the beam carrier plate 5 along the second direction Y. In some embodiments, the second direction guiding mechanism 42 can include a second direction guiding rail fixed on the first surface 31 extending along the second direction Y, a second direction guiding block matched with the second direction guiding rail, and the beam carrier plate 5 is fixedly connected with the second direction guiding block.

[0099] In some embodiments, the second surface 32 is provided with an auxiliary guiding mechanism 61 for guiding the movement of the beam adapter plate 6 along the second direction Y. In some embodiments, the auxiliary guiding mechanism 61 can include an auxiliary guiding rail fixed on the second surface 32 extending along the second direction Y, an auxiliary guiding block matched with the auxiliary guiding rail, and the beam adapter plate 6 is fixedly connected with the auxiliary guiding block.

[0100] In some embodiments, the auxiliary guiding mechanism 61 at least partially supports the weight of the beam adapter plate 6, or the auxiliary guiding mechanism 61 at least partially supports the weight of the beam adapter plate 6 and the cable connected to the beam adapter plate 6.

[0101] In some embodiments, two second direction guiding mechanisms 42 are provided on the first surface 31, and the second direction movement mechanism 41 is arranged between the two second direction guiding mechanisms 42. Based on this arrangement, when the beam carrier plate 5 is installed to the side surface of the beam 3, the force is more stable, the structure is more stable, the bearing performance is higher, and the rigidity is higher. In some embodiments, the second direction movement mechanism 41 can include a second direction stator arranged between the two second direction guiding mechanisms 42 and a second direction mover connected with the beam carrier plate 5.

[0102] In one or more embodiments of the present specification, referring toFigures 2 to 4 As shown, the motion stage further comprises a second drag chain structure 102, a fixed end of the second drag chain structure 102 is directly or indirectly fixedly connected with the cross beam 3, and a free end of the second drag chain structure 102 is configured to be movable with the movement of the cross beam load plate 5.

[0103] In some embodiments, the second drag chain structure 102 is used to receive part or all of the cables extending from the inside of the first drag chain structure 101. In some embodiments, the cables entering the inside of the second drag chain structure 102 extend from the free end of the second drag chain structure 102 and are connected to the driven members on the cross beam load plate 5 and / or perform cable switching through the cross beam adapter plate 6.

[0104] In some embodiments, the motion stage further comprises a wire slot 9, the wire slot 9 is fixedly connected with the cross beam 3. In some embodiments, the wire slot 9 is used to provide support for part of the cables. In some embodiments, the wire slot 9 can be a closed tubular structure or an open slot structure. In some embodiments, the cables extending from the first drag chain structure 101 pass through the wire slot to enter the inside of the second drag chain structure 102. In some embodiments, there is a gap between the wire slot 9 and the first drag chain structure 101 to facilitate the extension of the cables. In some embodiments, there is a gap between the wire slot 9 and the second drag chain structure 102 to facilitate the extension of the cables.

[0105] In some embodiments, one end of the wire slot 9 protrudes from the cross beam 3 and is connected with the free end of the first drag chain structure 101. In some embodiments, the cross beam 3 moves in the second direction Y to drive the wire slot 9 to move with the cross beam 3, and the free end of the first drag chain structure 101 is pulled along the second direction Y through the wire slot 9.

[0106] In some embodiments, the wire slot 9 is a rigid member. In some embodiments, the free end of the first drag chain structure 101 has a rigid member. In some embodiments, the wire slot 9 is fixedly connected with the rigid member of the free end of the first drag chain structure 101 to pull the free end of the first drag chain structure 101 to move in the second direction Y.

[0107] In some embodiments, one end of the first drag chain guide mechanism 103 can be fixedly connected with the free end of the first drag chain structure 101 through the wire slot 9, for example, the first drag chain guide leaf 1033 of the first drag chain guide mechanism 103 is connected to the wire slot 9 through the first drag chain guide leaf connector 1034. The first drag chain guide mechanism 103 can also provide an upward pulling force to the part of the wire slot 9 protruding from the cross beam 3, avoiding the part of the wire slot 9 protruding from the cross beam 3 to be suspended, and reducing the influence of the weight of the cables on the relevant accuracy of the cross beam 3.

[0108] In some embodiments, the other end of the wire slot 9 is towards a second drag chain structure 102 which is directly or indirectly fixedly connected with the cross beam 3. In some embodiments, the wire slot 9 is fixed to or suspended from the lower surface of the cross beam 3 by a wire slot connector 91. In some embodiments, the second drag chain structure 102 is fixed to or suspended from the lower surface of the cross beam 3 by a second drag chain structure connector 1021.

[0109] In one or more embodiments of the present disclosure, the first direction support base 11 can further provide a fourth support surface 114. In some embodiments, the fourth support surface 114 is provided with a first drag chain guide mechanism 103. In some embodiments, the components of the motion stage can be integrated on the first direction support base 11. For example, the first direction motion mechanism 21, the first direction guide mechanism 22, the limit module 8, the first drag chain guide mechanism 103 and the first drag chain structure 101 connected to the first drag chain guide mechanism 103 can all be integrated on the first direction support base 11.

[0110] In some embodiments, the first drag chain guide rail 1031 can be arranged on the fourth support surface 114. In some embodiments, as shown in Figure 5 In some embodiments, a portion of the first drag chain structure 101 is suspended below the fourth support surface 114 of the first direction support base 11 in turn from the bottom up through the first drag chain guide leaf connector 1034, the first drag chain guide leaf 1033, the first drag chain guide slider 1032 and the first drag chain guide rail 1031.

[0111] In one or more embodiments of the present disclosure, as shown in Figures 1 to 4 In some embodiments, the motion stage can include two motion modules which are mirror arranged. In some embodiments, the motion stage can be a double gantry motion stage. In some embodiments, the gantry can refer to the door-shaped structure formed by the cross beam 3 and the two first direction motion mechanisms 21.

[0112] In some embodiments, each motion module includes two first direction motion mechanisms 21, two first direction guide mechanisms 22 and one cross beam 3. In some embodiments, one end of the cross beam 3 is connected with one first direction mechanism 21 and one first direction guide mechanism 22, and the other end of the cross beam 3 is connected with the other first direction mechanism 21 and the other first direction guide mechanism 22. In some embodiments, the cross beam 3 is further provided with the second direction motion mechanism 41, the cross beam load plate 5, the cross beam adapter plate 6 and the adapter plate leaf 7 described above.

[0113] In some embodiments, referring to Figure 13 As shown, the motion stage can further include: a first direction first limit module 1041 and a first direction second limit module 1042, the first direction first limit module 1041 is fixedly connected with the beam 3 of one motion module, and the first direction second limit module 1042 is fixedly connected with the beam 3 of another motion module. In some embodiments, the first direction first limit module 1041 and the first direction second limit module 1042 are used to limit the movement position of the two beams 3 in the first direction X. In some embodiments, the two beams 3 can have a coincident working area, and the first direction first limit module 1041 and the first direction second limit module 1042 can be used to avoid interference or collision of the driven members on the two beams 3.

[0114] In some embodiments, the first direction first limit module 1041 includes a proximity sensor. In some embodiments, a buffer rubber sleeve is further sleeved on the proximity sensor. In some embodiments, the first direction second limit module 1042 includes a sensing head. In some embodiments, the proximity sensor is used to detect the position of the sensing head, so as to detect the distance between the ends of the first direction first limit module 1041 and the first direction second limit module 1042, and provide electrical limit. In some embodiments, when the sensing head is within the detection range of the proximity sensor, the movement of the beam 3 in the first direction X and / or the second direction Y is stopped.

[0115] In some embodiments, one or more first direction first limit modules 1041 and / or first direction second limit modules 1042 can be arranged on the same beam 3. For example, two first direction first limit modules 1041 are arranged on one beam 3, and two first direction second limit modules 1042 are arranged on the other beam 3. For example, referring to Figure 13 As shown, one first direction first limit module 1041 and one first direction second limit module 1042 are arranged on the beam 3 on the left side, and one first direction second limit module 1042 and one first direction first limit module 1041 are arranged at the corresponding positions on the beam 3 on the right side.

[0116] In some embodiments, referring to Figure 13 , Figure 14 As shown, the motion stage can further include: a first direction third limit module 1043 and a first direction fourth limit module 1044, the first direction third limit module 1043 is fixedly connected with the beam 3, and the first direction fourth limit module 1044 is fixedly connected with the base 1.

[0117] In some embodiments, the first direction third limit module 1043 and the first direction fourth limit module 1044 are used to limit the movement position of the beam 3 in the first direction X (for example, used to limit the position of the beam 3 located at the center of the base 1).Figure 13 In some embodiments, the first direction third limit module 1043 can be an optical limit switch, and the first direction fourth limit module 1044 can be an optical limit stop.

[0118] Having described the basic concepts, it is obvious to the skilled in the art that the above detailed disclosure is merely exemplary and does not limit the present specification. Although not explicitly stated herein, the skilled in the art can make various modifications, improvements and corrections to the present specification. Such modifications, improvements and corrections are taught in the present specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of the present specification.

Claims

1. A motion stage, characterized by, The device comprises: a base, a first direction movement mechanism arranged on the base, a first direction guiding mechanism arranged on the base, a crossbeam connected with the first direction movement mechanism and the first direction guiding mechanism, a second direction movement mechanism arranged on the crossbeam, and a crossbeam carrier arranged on the crossbeam; the first direction movement mechanism drives the crossbeam to move along a first direction relative to the base; the second direction movement mechanism drives the crossbeam carrier to move along a second direction on the crossbeam; the first direction guiding mechanism comprises a flexible connecting piece arranged at one end of the crossbeam, the flexible connecting piece being capable of moving along a first direction, the flexible connecting piece being configured to have rigidity in a first direction, a second direction and a third direction, and flexibility relative to rotation around the third direction, the third direction being perpendicular to the first direction and the second direction.

2. The motion stage of claim 1, wherein, the flexible connecting piece comprises a reed fixing seat, a reed connecting piece, and a first direction reed and a second direction reed connecting the reed fixing seat and the reed connecting piece; the second direction reed extends along the second direction; the first direction reed extends along the first direction or is arranged obliquely relative to the first direction.

3. The motion stage of claim 2, wherein, two ends of the second direction reed are respectively connected with the reed fixing seat and the reed connecting piece; two ends of the first direction reed are respectively connected with the reed fixing seat and the reed connecting piece, or one end of the first direction reed is connected with the reed fixing seat, and the other end of the first direction reed is connected with the second direction reed, or one end of the first direction reed is connected with the reed connecting piece, and the other end of the first direction reed is connected with the second direction reed.

4. The motion stage of claim 1, wherein, Further comprising: a limiting module, the limiting module being fixedly connected with the crossbeam, and the limiting module being used for limiting rotation of the crossbeam around the third direction.

5. The motion stage of claim 1, wherein, Further comprising: a first direction support base, the first direction support base being arranged on the base, and the first direction support base extending along the first direction; the first direction support base providing one or more of a first support surface, a second support surface, and a third limiting surface; the first direction movement mechanism being arranged on the first support surface; the first direction guiding mechanism being arranged on the second support surface, the first direction guiding mechanism comprising a first direction guiding rail and a first direction guiding slider matched with the first direction guiding rail, the first direction guiding rail extending along the first direction, and the first direction guiding slider being fixedly connected with the flexible connecting piece; the crossbeam being provided with a limiting module, the limiting module being configured to abut against the third limiting surface to limit rotation of the crossbeam around the third direction.

6. The motion stage of claim 5, wherein, The first support surface is a part of the upper surface of the first direction support base, and the second support surface is a part of the upper surface of the first direction support base; or the first direction support base has a stepped structure, the first support surface is at least a part of one step surface of the first direction support base, and the second support surface is at least a part of another step surface of the first direction support base. The third limit surface is at least a part of the side surface of the first direction support base.

7. A motion stage according to any one of claims 4 to 6, wherein, The limit module comprises a limit base fixedly connected with the cross beam and two or more limit bearings arranged on the limit base, and the two or more limit bearings are matched with the third limit surface to limit the rotation of the cross beam around the third direction. The gap between the two or more limit bearings and the third limit surface has a gap value smaller than the corresponding gap value when the flexible connecting piece is plastically deformed.

8. The motion stage of claim 1, wherein, The first direction movement mechanism comprises a first direction stator and a first direction rotor, the first direction stator extends along the first direction, and the first direction rotor is rigidly connected with the cross beam.

9. The motion stage of claim 1, wherein, Further comprising: A first drag chain structure and a first drag chain guide mechanism, the free end of the first drag chain structure is configured to move with the movement of the cross beam, one end of the first drag chain guide mechanism is fixedly connected with the free end of the first drag chain structure, and the other end of the first drag chain guide mechanism is configured to move along the first direction relative to the base; The first drag chain guide mechanism comprises a first drag chain guide rail arranged on the base directly or indirectly, a first drag chain guide slider matched with the first drag chain guide rail, and a first drag chain guide spring connecting the first drag chain guide slider and the free end of the first drag chain structure. The first drag chain guide spring is configured to be flexible around the first direction, or the first drag chain guide spring is configured to be flexible around the first direction and the third direction.

10. The motion stage of claim 9, wherein, Further comprising: A cross beam adapter plate arranged on the cross beam and a adapter plate spring connecting the cross beam carrier plate and the cross beam adapter plate; The cross beam has adjacent first and second surfaces, and the first and second surfaces have an included angle therebetween; The cross beam carrier plate can move along the second direction on the first surface of the cross beam; The cross beam adapter plate can move along the second direction on the second surface of the cross beam; The adapter plate spring is configured to be flexible around the second direction, or the adapter plate spring is configured to be flexible around the second direction and the third direction; The adapter plate spring is also configured to be rigid in the second and third directions.

11. The motion stage of claim 10, wherein, Further comprising: A second direction guide mechanism, the first surface is provided with the second direction guide mechanism for guiding the movement of the cross beam carrier plate along the second direction; The second surface is provided with an auxiliary guide mechanism for guiding the movement of the cross beam adapter plate in the second direction; The cross beam adapter plate is used for cable adapter; The auxiliary guide mechanism at least partially supports the weight of the cross beam adapter plate, or the auxiliary guide mechanism at least partially supports the weight of the cross beam adapter plate and the cable connected to the cross beam adapter plate.

12. The motion stage of claim 9, wherein, Further comprising: A second drag chain structure, the fixed end of the second drag chain structure is directly or indirectly fixedly connected with the cross beam, and the free end of the second drag chain structure is configured to be movable with the movement of the cross beam carrier plate.

13. The motion stage of claim 9, wherein, Further comprising: A wiring slot, the wiring slot is fixedly connected with the cross beam, one end of the wiring slot protrudes from the cross beam and is connected with the free end of the first drag chain structure; The other end of the wiring slot is towards the second drag chain structure which is directly or indirectly fixedly connected with the cross beam.

14. The motion stage of claim 9, wherein, Further comprising: A first direction support base, the first direction support base is provided on the base, the first direction support base extends in the first direction; The first direction support base provides a fourth support surface; The fourth support surface is provided with the first drag chain guide mechanism, the first drag chain guide mechanism comprises a first drag chain guide rail, a first drag chain guide block matched with the first drag chain guide rail, and a first drag chain guide spring connecting the first drag chain guide block and the free end of the first drag chain structure, and the first drag chain guide rail is provided on the fourth support surface.

15. The motion stage of claim 1, wherein, Two first direction movement mechanisms and two first direction guide mechanisms are included, one end of the cross beam is connected with one first direction mechanism and one first direction guide mechanism, and the other end of the cross beam is connected with another first direction mechanism and another first direction guide mechanism; The number of cross beams is two or more.

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