Single-station optical detection equipment

Abstract

The invention discloses single-station type optical detection equipment, which is used for detecting four side surfaces of a material sheet. The single-station type optical detection equipment comprises a bearing base and two detection modules installed on the bearing base. The bearing base is used for arranging the material sheets, and each detection module comprises a light receiving unit, two light sources and a light transmission assembly. The four light sources of the two detection modules are used for emitting four light rays towards the four side surfaces of the material sheet respectively; the two light transmission assemblies of the two detection modules can be used for transmitting the four light rays reflected by the four side faces to the two light receiving units along four light paths which are not intersected with each other. Therefore, the single-station optical detection equipment can effectively reduce the time consumption of the detection process, and is more beneficial to reducing the overall size of the detection equipment.

Description

TECHNICAL FIELD

[0001] The present application relates to an optical inspection apparatus, in particular to a single-station optical inspection apparatus. BACKGROUND

[0002] Most of the existing optical inspection apparatuses are of a multi-station architecture to inspect multiple sides of a wafer, so that the whole inspection process of the wafer takes a long time, and the existing optical inspection apparatus of the multi-station architecture also occupies a large space. Therefore, the present inventor believes that the above defects can be improved, and after years of research and in combination with the application of scientific principles, finally proposes the present application which is reasonably designed and effectively improves the above defects. SUMMARY

[0003] The embodiment of the present application provides a single-station optical inspection apparatus which can effectively improve the defects that may be caused by the existing optical inspection apparatus.

[0004] The embodiment of the present application discloses a single-station optical inspection apparatus for inspecting two first sides and two second sides of a wafer, the single-station optical inspection apparatus comprising: a bearing base comprising: a support; and an inspection cavity connected to the support and surrounding a configuration space; wherein the inspection cavity has a placement area for the wafer and a first light transmission area and a second light transmission area connected to the configuration space; wherein the placement area and the first light transmission area are arranged along a first direction, and the second light transmission area is arranged along a second direction perpendicular to the first direction; wherein the two first sides are located on opposite sides of the wafer along the second direction, and the two second sides are located on opposite other sides of the wafer along a third direction perpendicular to the first direction and the second direction; a first inspection module comprising: a first light receiving unit mounted on the support and facing the first light transmission area along the first direction; two first light sources arranged to face the placement area; wherein the two first light sources are capable of emitting two first light beams respectively towards the two first sides; and a first light transmission assembly located in the configuration space and defining two first light paths, each of which passes through the first light transmission area from the configuration space to the first light receiving unit; wherein the first light transmission assembly is capable of transmitting the two first light beams reflected from the two first sides to the first light receiving unit along the two first light paths respectively; and

[0005] A second detection module includes: a second light receiving unit mounted on the bracket and facing the second light transmission area along the second direction; two second light sources arranged facing the placement area; wherein the two second light sources are capable of emitting two second light beams respectively toward the two second sides; and a second light transmission assembly located in the arrangement space and defining two second light paths each passing through the second light transmission area from the arrangement space to the second light receiving unit; wherein the two second light paths are located outside the two first light paths and do not intersect with each other; wherein the second light transmission assembly is capable of transmitting the two second light beams reflected from the two second sides along the two second light paths to the second light receiving unit respectively.

[0006] Optionally, the two first light sources are mounted in the detection cavity, and the two first light sources are respectively located on opposite sides of the placement area along the second direction and face each other; the two second light sources are mounted in the detection cavity, and the two second light sources are respectively located on opposite sides of the placement area along the third direction and face each other.

[0007] Optionally, the first light transmission assembly includes: two first beam splitters respectively adjacent to and between the two first light sources; two first front mirrors respectively adjacent to and below the two first beam splitters; and two first rear mirrors below the placement area; wherein the two first beam splitters, the two first front mirrors, and the two first rear mirrors collectively define two first light paths that are independent of and do not intersect with each other.

[0008] Optionally, the two first light sources and the two first beam splitters are arranged in a column along the second direction, and the two first front mirrors and the two first rear mirrors are arranged in a column along the second direction.

[0009] Optionally, the two first rear mirrors are adjacent to the placement area, and the width of the two first rear mirrors in the second direction is less than the width of the material sheet in the second direction.

[0010] Optionally, the second light transmission assembly includes: two second beam splitters respectively adjacent to and between the two second light sources; two second front mirrors respectively adjacent to and below the two second beam splitters; two second middle mirrors respectively adjacent to the two second front mirrors and on opposite sides of the second light transmission area; and two second rear mirrors between the two second middle mirrors and in the second light transmission area; wherein the two second beam splitters, the two second front mirrors, the two second middle mirrors, and the two second rear mirrors collectively define two second light paths that are independent of and do not intersect with each other.

[0011] Optionally, the two first light sources, the two first beam splitters, the two second light sources, and the two second beam splitters are disposed at a first height zone within the detection cavity; the two first front mirrors and the two first rear mirrors are disposed at a second height zone within the detection cavity, which is lower than the first height zone.

[0012] Optionally, the virtual extension area of any one of the second beam splitters and the virtual extension area of the corresponding second front mirror intersect with each other within the detection cavity and form an acute angle of 30-60 degrees; the virtual extension area of any one of the second front mirrors and the virtual extension area of the corresponding second middle mirror intersect with each other within the detection cavity and form an acute angle of 30-60 degrees.

[0013] Optionally, any one of the second beam splitters, the corresponding second front mirror, and the corresponding second middle mirror are arranged in a triangular shape.

[0014] The embodiment of the present application also discloses a single-station optical detection device for detecting two first sides and two second sides of a wafer, which comprises a bearing base defining a configuration space and having a placement area for the wafer and a first light-transmitting area and a second light-transmitting area communicating with the configuration space; a first detection module comprising a first light-receiving unit mounted on the bearing base and facing the first light-transmitting area, two first light sources arranged to face the placement area, wherein the two first light sources are capable of emitting two first light beams respectively towards the two first sides, and a first light transmission assembly located within the configuration space and defining two first light paths each passing through the first light-transmitting area from the configuration space to the first light-receiving unit, wherein the first light transmission assembly is capable of transmitting the two first light beams reflected from the two first sides along the two first light paths to the first light-receiving unit respectively; and a second detection module comprising a second light-receiving unit mounted on the bearing base and facing the second light-transmitting area, two second light sources arranged to face the placement area, wherein the two second light sources are capable of emitting two second light beams respectively towards the two second sides, and a second light transmission assembly located within the configuration space and defining two second light paths each passing through the second light-transmitting area from the configuration space to the second light-receiving unit, wherein the two second light paths are located outside the two first light paths and do not intersect with each other, and the second light transmission assembly is capable of transmitting the two second light beams reflected from the two second sides along the two second light paths to the second light-receiving unit respectively.

[0015] In summary, the single-station optical inspection device disclosed in this embodiment of the invention, by properly matching the first inspection module and the second inspection module with the support base, achieves an optical path configuration in which the two second optical paths are located outside the two first optical paths and do not intersect each other. This enables simultaneous optical inspection of the two first sides and the two second sides of the material sheet at one time, thereby reducing the time consumption of the inspection process and helping to reduce the overall size of the inspection device.

[0016] To further understand the features and technical content of this invention, please refer to the following detailed description and accompanying drawings. However, these descriptions and drawings are only for illustrating the invention and are not intended to limit the scope of protection of the invention in any way. Attached Figure Description

[0017] Figure 1 This is a three-dimensional schematic diagram of a single-station optical inspection device according to an embodiment of the present invention.

[0018] Figure 2 for Figure 1 A three-dimensional diagram from another perspective.

[0019] Figure 3 This is a partial three-dimensional cross-sectional schematic diagram (I) of a single-station optical inspection device according to an embodiment of the present invention.

[0020] Figure 4 This is a partial three-dimensional cross-sectional schematic diagram (II) of a single-station optical inspection device according to an embodiment of the present invention.

[0021] Figure 5 for Figure 1 A top-down view.

[0022] Figure 6 for Figure 5 A cross-sectional view along section line VI-VI.

[0023] Figure 7 for Figure 6 A magnified view of a portion of the image.

[0024] Figure 8 for Figure 5 A schematic cross-sectional view along section line VIII-VIII.

[0025] Figure 9 for Figure 8 A magnified view of a portion of the image. Detailed Implementation

[0026] The present application is described in detail by way of specific embodiments as follows. Those skilled in the art can understand the advantages and effects of the present application from the disclosure herein. The present application can be implemented or applied in other different embodiments, and the details in the description can be modified and changed in various ways based on different views and applications without departing from the spirit and scope of the present application. In addition, the drawings of the present application are only simple schematic illustrations and not actual size depictions, as previously stated. The following embodiments will further illustrate the technical content of the present application in detail, but the disclosed content is not intended to limit the scope of protection of the present application.

[0027] It should be understood that although the terms "first", "second", "third", etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" used herein may include any one or more combinations of the associated listed items as appropriate.

[0028] Referring to Figures 1 to 9 , an embodiment of the present application is shown. As Figures 1 to 4 shown, the present embodiment discloses a single-station optical detection device 100 for detecting two first side surfaces M1 and two second side surfaces M2 of a wafer M. In the present embodiment, the wafer M is rectangular; that is, the ring side surface of the wafer M is illustrated as including only two first side surfaces M1 and two second side surfaces M2, but the present application is not limited thereto. Furthermore, the single-station optical detection device 100 detects the ring side surface of the wafer M at one time and excludes a mechanism for multi-station detection.

[0029] As Figures 4 to 6 shown, the single-station optical detection device 100 includes a bearing base 3, a first detection module 1 mounted on the bearing base 3, and a second detection module 2 mounted on the bearing base 3. Among them, the bearing base 3 includes a support 31 and a detection cavity 32 connected to the support 31, and the bearing base 3 is mainly functionally distinguished in the present embodiment, and the bottom of the detection cavity 32 is connected to the side top of the support 31.

[0030] Further, the detection cavity 32 is preferably a hollow square frame, and has a configuration space 321 defined therein. The detection cavity 32 has a placement area 322 for the sheet M, and a first light transmission area 323 and a second light transmission area 324 in communication with the configuration space 321. In addition to the placement area 322, the first light transmission area 323 and the second light transmission area 324, the detection cavity 32 is preferably capable of blocking light to avoid external light from entering the configuration space 321 and affecting the detection result.

[0031] In the present embodiment, the top of the detection cavity 32 is open, the placement area 322 is located at the top of the detection cavity 32, the first light transmission area 323 is an opening at the bottom of the detection cavity 32, and the second light transmission area 324 is another opening at the side of the detection cavity 32 adjacent to the support 31, but the present application is not limited thereto. For example, in other embodiments not shown in the present application, the first light transmission area 323 and / or the second light transmission area 324 can also be a light transmission member.

[0032] In another aspect, the placement area 322 and the first light transmission area 323 are arranged along a first direction D1, and the second light transmission area 324 is arranged along a second direction D2 perpendicular to the first direction D1. Further, when the sheet M is placed in the placement area 322, two first sides M1 are located on opposite sides of the sheet M along the second direction D2, and two second sides M2 are located on opposite sides of the sheet M along a third direction D3 perpendicular to the first direction D1 and the second direction D2.

[0033] In addition, the detection cavity 32 preferably further comprises two partitions 325 located in the configuration space 321, and each of the partitions 325 is perpendicular to the third direction D3. The two partitions 325 are spaced apart from each other, and the placement area 322 is located at the top of the two partitions 325 in the present embodiment, but the present application is not limited thereto.

[0034] As Figure 4 , Figure 6 , and Figure 7As shown, the first detection module 1 includes a first light receiving unit 11 mounted on the bracket 31, two first light sources 12 arranged facing the storage area 322, and a first light transmission component 13 located within the configuration space 321. The first light receiving unit 11 faces the first light-transmitting area 323 along the first direction D1, and the two first light sources 12 can emit two first light rays L1 towards the two first side surfaces M1 respectively. The first light transmission component 13 defines two first light paths P1, each passing through the configuration space 321, the first light-transmitting area 323, and arriving at the first light receiving unit 11. In other words, the first light transmission component 13 can transmit the two first light rays L1 reflected from the two first side surfaces M1 along the two first light paths P1 to the first light receiving unit 11.

[0035] Furthermore, such as Figure 4 , Figure 8 ,and Figure 9 As shown, the second detection module 2 includes a second light receiving unit 21 mounted on the bracket 31, two second light sources 22 arranged facing the storage area 322, and a second light transmission component 23 located within the configuration space 321. The second light receiving unit 21 faces the second light-transmitting area 324 along the second direction D2, and the two second light sources 22 can emit two second light rays L2 towards the two second side surfaces M2 respectively. The second light transmission component 23 defines two second light paths P2, each passing through the configuration space 321, the second light-transmitting area 324, and arriving at the second light receiving unit 21. In other words, the second light transmission component 23 can transmit the two second light rays L2 reflected from the two second side surfaces M2 along the two second light paths P2 to the second light receiving unit 21.

[0036] It should be noted that the two second optical paths P2 are located outside the two first optical paths P1 and do not intersect each other. In this embodiment, the two first optical paths P1 are mainly planned along the first direction D1 and the second direction D2, while the two second optical paths P2 are planned approximately along the inner wall of the detection cavity 32, so that the two first optical paths P1 and the two second optical paths P2 can avoid interfering with each other within the limited configuration space 321.

[0037] Furthermore, in this embodiment, the detection cavity 32 can be further configured with two partitions 325 to effectively separate the two first optical paths P1 from the two second optical paths P2, but this is not a limitation. For example, in other embodiments of the present invention not illustrated, the two partitions 325 may be omitted or replaced with other components according to actual needs.

[0038] As described above, in this embodiment, the single-station optical inspection device 100 is properly matched with the first inspection module 1 and the second inspection module 2 on the support base 3 to achieve an optical path configuration in which the two second optical paths P2 are located outside the two first optical paths P1 and do not intersect each other. This enables simultaneous optical inspection of the two first sides M1 and the two second sides M2 of the material sheet M, thereby reducing the time consumption of the inspection process and helping to reduce the overall size of the inspection device.

[0039] It should be further noted that, under the aforementioned conditions, the specific component configuration of the single-station optical inspection device 100 can be adjusted and varied according to actual needs. For example, as long as the support base 3 forms a configuration space 321, and the support base 3 has a placement area 322 for placing the material sheet M, and a first light-transmitting area 323 and a second light-transmitting area 324 connected to the configuration space 321, the structure of the support base 3 can differ from that shown in the drawings of this embodiment. Furthermore, for ease of understanding of this embodiment, the following description uses one preferred component configuration of the first detection module 1 and the second detection module 2, but the present invention is not limited thereto.

[0040] like Figure 1 , Figure 3 , Figure 7 ,and Figure 9 As shown, the first light receiving unit 11 includes a first lens group 111 facing the first light-transmitting area 323, a first camera 112 mounted and fixed to the first lens group 111, and a first linear slide rail 113. The first camera 112 is located on the side of the first lens group 111 away from the first light-transmitting area 323, and the first lens group 111 and the first camera 112 are movably fixed to the bracket 31 via the first linear slide rail 113. That is, the first lens group 111 and the first camera 112 can move relative to the first light-transmitting area 323 along the first direction D1 via the first linear slide rail 113.

[0041] Two first light sources 12 are mounted in the detection cavity 32, and the two first light sources 12 are located on opposite sides of the placement area 322 and facing each other along the second direction D2. That is, the two first light sources 12 and the two first side surfaces M1 of the material sheet M are arranged along the second direction D2.

[0042] In this embodiment, the first optical transmission component 13 includes two first beam splitters 131, two first front reflectors 132, and two first rear reflectors 133. Each of the first beam splitters 131, the first front reflectors 132, and the first rear reflectors 133 is elongated (e.g., rectangular) and defines two independent, non-intersecting first optical paths P1. That is, given that two first optical paths P1 can be defined to transmit the two first light rays L1 reflected from the two first side surfaces M1 to the first optical receiving unit 11, the specific component configuration of the first optical transmission component 13 can be adjusted and varied according to actual needs.

[0043] Furthermore, each of the first optical paths P1 is defined by a first beam splitter 131, a first front reflector 132, and a first rear reflector 133, and the two first optical paths P1 (or their corresponding components) are preferably arranged in a mirror-symmetrical configuration in this embodiment, but the invention is not limited thereto. Moreover, the major axis directions of the two first beam splitters 131, the two first front reflectors 132, and the two first rear reflectors 133 are described in this embodiment as parallel to the third direction D3, but are not limited thereto.

[0044] The two first beam splitters 131 are respectively adjacent to the two first light sources 12 and located between the two first light sources 12. That is, the two first light sources 12 and the two first beam splitters 131 are arranged in a row along the second direction D2. Among them, a portion (e.g., 40% to 60% of the first light rays L1 emitted by each first light source 12) passes through the adjacent first beam splitter 131 along the second direction D2 and then illuminates the corresponding first side M1.

[0045] Two first front-end reflectors 132 are respectively adjacent to two first beam splitters 131 and respectively located below the two first beam splitters 131. In this embodiment, the normal direction of each first beam splitter 131 preferably intersects perpendicularly with the normal direction of the adjacent first front-end reflector 132 within the detection cavity 32, and the projection space formed by each first beam splitter 131 along the first direction D1 completely covers the adjacent first front-end reflector 132, but the present invention is not limited thereto.

[0046] The two first rear-end reflectors 133 are located below the storage area 322. In this embodiment, the two first rear-end reflectors 133 are adjacent to the storage area 322 and are arranged adjacent to each other. The width of the two first rear-end reflectors 133 in the second direction D2 is preferably smaller than the width of the sheet M in the second direction D2, so as to concentrate the two first light paths P1, thereby facilitating the use of a smaller and higher resolution first camera 112.

[0047] Furthermore, the two first front reflectors 132 and the two first rear reflectors 133 are arranged in a row along the second direction D2, and the two first front reflectors 132 and the two first rear reflectors 133 are preferably disposed between the two partitions 325. In this embodiment, the normal direction of each first front reflector 132 is preferably parallel to the normal direction of the adjacent first rear reflector 133, and the projection space formed by each first front reflector 132 along the second direction D2 completely covers the adjacent first rear reflector 133, but the present invention is not limited thereto.

[0048] The second light receiving unit 21 includes a second lens group 211 facing the second light-transmitting area 324, a second camera 212 mounted and fixed to the second lens group 211, and a second linear slide rail 213. The second camera 212 is located on the side of the second lens group 211 away from the second light-transmitting area 324, and the second lens group 211 and the second camera 212 are movably fixed to the bracket 31 via the second linear slide rail 213. That is, the second lens group 211 and the second camera 212 can move relative to the first light-transmitting area 323 along the second direction D2 via the second linear slide rail 213.

[0049] Two second light sources 22 are mounted in the detection cavity 32, and the two second light sources 22 are located on opposite sides of the placement area 322 and facing each other along the third direction D3. That is, the two second light sources 22 and the two second side surfaces M2 of the material sheet M are arranged along the third direction D3.

[0050] In this embodiment, the second optical transmission component 23 includes two second beam splitters 231, two second front reflectors 232, two second middle reflectors 233, and two second rear reflectors 234. Each of these components is elongated (e.g., rectangular) and defines two independent, non-intersecting second optical paths P2. In other words, given that two second optical paths P2 can be defined to transmit the two second light rays L2 reflected from the two second side surfaces M2 to the second optical receiving unit 21, the specific component configuration of the second optical transmission component 23 can be adjusted and varied according to actual needs.

[0051] Furthermore, each second optical path P2 is defined by a second beam splitter 231, a second front reflector 232, a second middle reflector 233, and a first rear reflector 133. The two second optical paths P2 (or their corresponding components) are preferably arranged in a mirror-symmetrical configuration in this embodiment, but the invention is not limited thereto. In addition, the major axis direction of each of the two second beam splitters 231 is described in this embodiment as parallel to the second direction D2, while the major axis direction of each of the two second front reflectors 232, the two second middle reflectors 233, and the two second rear reflectors 234 is described in this embodiment as parallel to the first direction D1, but this is not a limitation.

[0052] The two second beam splitters 231 are respectively adjacent to the two second light sources 22 and located between the two second light sources 22. That is, the two second light sources 22 and the two second beam splitters 231 are arranged in a row along the third direction D3. Among them, a portion (e.g., 40% to 60% of the second light rays L2 emitted by each second light source 22) passes through the adjacent second beam splitter 231 along the third direction D3 and then illuminates the corresponding second side M2.

[0053] The two second front reflectors 232 are respectively adjacent to the two second beam splitters 231 and are respectively located below the two second beam splitters 231. In this embodiment, the projection space formed by each second beam splitter 231 along the first direction D1 completely covers the adjacent second front reflector 232, but the present invention is not limited thereto.

[0054] Furthermore, the virtual extension region of any one of the second beam splitters 231 and the corresponding virtual extension region of the second front reflector 232 intersect each other within the detection cavity 32 and form an acute angle σ1 between 30 degrees and 60 degrees.

[0055] The two second mid-section reflectors 233 are respectively adjacent to the two second front-section reflectors 232 and located on opposite sides of the second light-transmitting area 324. The two second front-section reflectors 232 and the two second rear-section reflectors 234 are preferably disposed outside the two partitions 325. In this embodiment, the projection space formed by each second front-section reflector 232 along the second direction D2 completely covers the adjacent second mid-section reflector 233, but the invention is not limited thereto.

[0056] Furthermore, the virtual extension region of any second front reflector 232 and the corresponding virtual extension region of the second middle reflector 233 intersect each other within the detection cavity 32, forming an acute angle σ2 between 30 and 60 degrees. That is, any second beam splitter 231, the corresponding second front reflector 232, and the corresponding second middle reflector 233 are arranged in a triangular shape, and the normal directions of any second beam splitter 231 and the corresponding second middle reflector 233 intersect each other perpendicularly within the detection cavity 32.

[0057] Two second rear-section reflectors 234 are located between two second middle-section reflectors 233 and in the second light-transmitting area 324. The two second rear-section reflectors 234 are arranged adjacent to each other to concentrate the two second light paths P2, thereby facilitating the use of a smaller and higher-resolution second camera 212.

[0058] Furthermore, the two second middle section reflectors 233 and the two second rear section reflectors 234 are arranged in a row along the third direction D3. In this embodiment, the normal direction of each second middle section reflector 233 is preferably parallel to the normal direction of the adjacent second rear section reflector 234, and the projection space formed by each second middle section reflector 233 along the third direction D3 completely covers the adjacent second rear section reflector 234, but the present invention is not limited thereto.

[0059] In other words, the two second front section reflectors 232 are respectively disposed on the two inner walls of the detection cavity 32 facing each other, while the two second middle section reflectors 233 are respectively disposed at the two corners of the detection cavity 32.

[0060] Furthermore, the two first light sources 12, the two first beam splitters 131, the two second light sources 22, and the two second beam splitters 231 are all disposed in a first height block R1 within the detection cavity 32 (above the first direction D1). Moreover, the two first front reflectors 132 and the two first rear reflectors 133 are all disposed in a second height block R2 within the detection cavity 32 (above the first direction D1), which is lower than the first height block R1. The two second front reflectors 232, the two second middle reflectors 233, and the two second rear reflectors 234 are disposed in a third height block R3 within the detection cavity 32 (above the first direction D1), which may be lower than or at least partially overlap with the second height block R2.

[0061] As described above, in this embodiment, the single-station optical inspection device 100 adopts the above configuration so that the second inspection module 2 can be further configured within the size of the inspection cavity 32 to which the first inspection module 1 is applicable, thereby effectively reducing the overall volume of the single-station optical inspection device 100.

[0062] Furthermore, although the first detection module 1 and the second detection module 2 are described with the above configuration in this embodiment, they can be adjusted and changed according to actual needs. For example, in other embodiments of the present invention not shown, the two first beam splitters 131 and the two second beam splitters 231 can be omitted, and the positions of the two first light sources 12 and the two second light sources 22 are higher than the sheet M, and emit two first light rays L1 and two second light rays L2 towards the two first side surfaces M1 and the two second side surfaces M2 of the sheet M, respectively, so that the two first light rays L1 and the two second light rays L2 are reflected by the two first side surfaces M1 and the two second side surfaces M2 to form acute angles of incidence and reflection, and then transmitted to the first light receiving unit 11 and the second light receiving unit 21 through corresponding adjustments of the first light transmission component 13 and the second light transmission component 23.

[0063] [Technical Effects of the Embodiments of the Invention]

[0064] In summary, the single-station optical inspection device disclosed in this embodiment of the invention, by properly matching the first inspection module and the second inspection module with the support base, achieves an optical path configuration in which the two second optical paths are located outside the two first optical paths and do not intersect each other. This enables simultaneous optical inspection of the two first sides and the two second sides of the material sheet at one time, thereby reducing the time consumption of the inspection process and helping to reduce the overall size of the inspection device.

[0065] The above-disclosed content is only a preferred and feasible embodiment of the present invention, and is not intended to limit the patent scope of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention specification and drawings are included within the patent scope of the present invention.

Claims

1. A single-station optical inspection device, characterized in that, The single-station optical inspection device is used to inspect two first sides and two second sides of a material sheet. The single-station optical inspection device includes: A supporting base, comprising: A support frame; and A detection chamber, connected to the support and surrounding a defined configuration space; wherein, The detection chamber has a placement area for placing the material sheet, and a first light-transmitting area and a second light-transmitting area connected to the configuration space; The storage area and the first light-transmitting area are arranged along a first direction, while the second light-transmitting area is arranged in a second direction perpendicular to the first direction; the two first side surfaces are located on opposite sides of the material sheet along the second direction, and the two second side surfaces are located on opposite sides of the material sheet along a third direction perpendicular to both the first and second directions. A first detection module, comprising: A first light receiving unit is mounted on the bracket and faces the first light-transmitting area along the first direction; Two first light sources are configured facing the storage area; wherein the two first light sources are capable of emitting two first light rays respectively toward the two first sides; and A first optical transmission component is located within the configuration space and defines two first optical paths, which respectively pass through the configuration space, the first light-transmitting area and arrive at the first optical receiving unit. The first optical transmission component is capable of transmitting two first light rays reflected from the two first sides along the two first optical paths to the first optical receiving unit; and A second detection module, comprising: A second light receiving unit is mounted on the bracket and faces the second light-transmitting area along the second direction; Two second light sources are configured facing the storage area; wherein the two second light sources are capable of emitting two second rays of light respectively toward the two second sides; and A second optical transmission component is located within the configuration space and defines two second optical paths. The two second optical paths pass through the configuration space, through the second light-transmitting area, and arrive at the second optical receiving unit. The two second optical paths are located outside the two first optical paths and do not intersect each other. The second optical transmission component can be used to transmit two second light rays reflected from the two second sides along two second optical paths to the second optical receiving unit.

2. The single-station optical inspection device according to claim 1, characterized in that, Two first light sources are installed in the detection cavity, and the two first light sources are located on opposite sides of the placement area and facing each other along the second direction; two second light sources are installed in the detection cavity, and the two second light sources are located on opposite other sides of the placement area and facing each other along the third direction.

3. The single-station optical inspection device according to claim 2, characterized in that, The first optical transmission component includes: Two first beam splitters are respectively adjacent to two first light sources and located between the two first light sources; Two first front reflectors are respectively adjacent to the two first beam splitters and respectively located below the two first beam splitters; and Two first rear-section reflectors are located below the storage area; Among them, the two first beam splitters, the two first front reflectors, and the two first rear reflectors together define two independent and non-intersecting first optical paths.

4. The single-station optical inspection device according to claim 3, characterized in that, The two first light sources and the two first beam splitters are arranged in a row along the second direction, and the two first front reflectors and the two first rear reflectors are arranged in a row along the second direction.

5. The single-station optical inspection device according to claim 3, characterized in that, The two first rear-end reflectors are adjacent to the placement area, and the width of the two first rear-end reflectors in the second direction is smaller than the width of the sheet in the second direction.

6. The single-station optical inspection device according to claim 3, characterized in that, The second optical transmission component includes: Two second beam splitters are respectively adjacent to the two second light sources and located between the two second light sources; Two second front reflectors are respectively adjacent to the two second beam splitters and respectively located below the two second beam splitters; Two second middle-section reflectors are respectively adjacent to two second front-section reflectors and located on opposite sides of the second light-transmitting area; and Two second rear-section reflectors are located between two second middle-section reflectors and within the second light-transmitting area; Among them, the two second beam splitters, the two second front reflectors, the two second middle reflectors, and the two second rear reflectors together define two independent and non-intersecting second optical paths.

7. The single-station optical inspection device according to claim 6, characterized in that, The two first light sources, the two first beam splitters, the two second light sources, and the two second beam splitters are all disposed in a first height block within the detection cavity; the two first front reflectors and the two first rear reflectors are all disposed in a second height block within the detection cavity, and the second height block is lower than the first height block.

8. The single-station optical inspection device according to claim 6, characterized in that, The virtual extension region of any of the second beam splitters and the corresponding virtual extension region of the second front reflector intersect each other within the detection cavity and form an acute angle between 30 degrees and 60 degrees; the virtual extension region of any of the second front reflectors and the corresponding virtual extension region of the second middle reflector intersect each other within the detection cavity and form an acute angle between 30 degrees and 60 degrees.

9. The single-station optical inspection device according to claim 6, characterized in that, Each of the second beam splitters, the corresponding second front reflector, and the corresponding second middle reflector are arranged in a triangular shape.

10. A single-station optical inspection device, characterized in that, The single-station optical inspection device is used to inspect two first sides and two second sides of a material sheet. The single-station optical inspection device includes: A support base is defined with a configuration space, and the support base has a placement area for placing the sheet, and a first light-transmitting area and a second light-transmitting area communicating with the configuration space. A first detection module, comprising: A first light receiving unit is installed on the supporting base and faces the first light-transmitting area; Two first light sources are configured facing the storage area; wherein the two first light sources are capable of emitting two first light rays respectively toward the two first sides; and A first optical transmission component is located within the configuration space and defines two first optical paths. Each of the two first optical paths passes through the configuration space, passes through the first light-transmitting area, and arrives at the first optical receiving unit. The first optical transmission component is capable of transmitting two first light rays reflected from the two first sides along the two first optical paths to the first optical receiving unit; and A second detection module, comprising: A second light receiving unit is installed on the supporting base and faces the second light-transmitting area; Two second light sources are configured facing the storage area; wherein the two second light sources are capable of emitting two second rays of light respectively toward the two second sides; and A second optical transmission component is located within the configuration space and defines two second optical paths. Each of the two second optical paths passes through the configuration space, through the second light-transmitting area, and arrives at the second optical receiving unit. The two second optical paths are located outside the two first optical paths and do not intersect each other. The second optical transmission component can be used to transmit two second light rays reflected from the two second sides along two second optical paths to the second optical receiving unit.

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