Micro-channel cooling structure and planar motor stator

Abstract

The present application relates to the technical field of planar motor, and particularly relates to a micro-channel cooling structure and a planar motor stator. The micro-channel cooling structure comprises a first cooling plate and a cover plate which are stacked and covered with each other, and the surface of the first cooling plate towards the cover plate is provided with an array of flow channels for flowing cooling liquid; the lower surface wall of the cover plate towards the array of flow channels is sealingly matched with the array of flow channels; the micro-channel cooling structure is further provided with a first liquid inlet channel and a first liquid outlet channel which are respectively communicated with the array of flow channels, the first liquid inlet channel delivers cooling liquid to a central liquid inlet hole, and the array of flow channels is arranged outwardly from the central liquid inlet hole. By arranging the central liquid inlet hole and the array of flow channels which are arranged outwardly from the central liquid inlet hole, the matching of temperature gradient is realized, the cooling efficiency of the central heat gathering area of the planar motor stator is effectively improved, the temperature difference of each part of the planar motor stator is reduced, and the planar motor can normally operate.

Description

Technical Field

[0001] This invention relates to the field of planar motor technology, specifically to a microchannel cooling structure and a planar motor stator. Background Technology

[0002] Planar motors, primarily composed of a stator and a mover suspended above the stator and driven by it to perform planar motion, are a type of direct-drive motor that arranges coils and magnetic arrays in a two-dimensional plane. Due to their advantages such as high precision, high acceleration, absence of intermediate transmission mechanisms, and large range of motion, they are widely used in high-end equipment fields such as semiconductor lithography, precision machining, and high-speed material handling. The core component, the stator, is typically constructed by stacking coil plates, return plates, and drive plates. During operation, especially under high load conditions, the coils and drive electronic components generate a large amount of concentrated heat. If this heat cannot be dissipated promptly and evenly, it will lead to excessively high local temperatures in the motor, causing a series of serious problems such as thermal deformation, electromagnetic performance degradation, and decreased reliability, directly restricting further performance improvements and long-term stable operation of the motor.

[0003] In the development of planar motor technology, with the continuous increase in motor power density and the gradual miniaturization and planarization of structural dimensions, traditional cooling methods are no longer sufficient to meet the urgent need for efficient heat dissipation in modern motors. Existing planar motor heat dissipation structures typically employ a single-plate design with liquid inlet at one end and liquid outlet at the other, failing to fully consider the uneven temperature distribution within the motor. This structure lacks differentiated heat dissipation design for the central high-heat area and the edge low-temperature area, and also fails to construct a heat dissipation structure that can effectively improve coolant utilization efficiency.

[0004] Therefore, addressing the aforementioned thermal management issues of planar motors, and how to rationally design heat dissipation structures and optimize cooling paths to ensure the stable operation of planar motors, has become a key technical problem that urgently needs to be solved. Summary of the Invention

[0005] The purpose of this invention is to provide a microchannel cooling structure and a planar motor stator to solve the existing technical problems in the background art.

[0006] To solve the above-mentioned technical problems, the technical solution provided by the present invention is as follows: a microchannel cooling structure is provided, including a first cooling plate and a cover plate stacked on top of each other and overlapping each other. The surface of the first cooling plate facing the cover plate is provided with an array of channels for flowing coolant. The lower surface wall of the cover plate facing the channel array is sealed to the channel array. The microchannel cooling structure is also provided with a first liquid inlet channel and a first liquid outlet channel respectively connected to the channel array. The first liquid inlet channel delivers coolant to the central liquid inlet hole located at the center of the first cooling plate. The channel array extends outward from the central liquid inlet hole of the first cooling plate.

[0007] Based on the above technical solution, the flow channel array includes at least two sets of first flow channel sub-arrays arranged in a circle. Each set of first flow channel sub-arrays is fan-shaped. The first flow channel sub-array includes multiple first flow channels connected end to end. The first flow channel is divided into at least two closely arranged arc-shaped first flow channels arranged concentrically with the first cooling plate as the center and a radial first flow channel that connects two adjacent arc-shaped first flow channels in series. The first liquid inlet channel is connected to the nearest arc-shaped first flow channel, and the outermost arc-shaped first flow channel is connected to the first liquid outlet channel.

[0008] Based on the above technical solution, the radial first flow channel and the arc-shaped first flow channel are on the same plane, or the radial first flow channel is buried at the bottom of the arc-shaped first flow channel and its two ends are respectively connected to the bottom openings of the ends of two adjacent arc-shaped first flow channels.

[0009] Based on the above technical solution, the flow channel array includes at least two sets of second flow channel sub-arrays arranged in a circle, and a confluence cavity is formed between two adjacent sets of second flow channel sub-arrays. At least one confluence cavity is connected to the central liquid inlet hole, and one of the remaining confluence cavities is connected to the first liquid outlet channel.

[0010] Based on the above technical solution, one end of the manifold is connected to the central liquid inlet, and the other end is connected to the first liquid outlet channel; or one manifold is connected to the central liquid inlet, adjacent manifolds are connected to the first liquid outlet channel, and non-adjacent manifolds are connected to the central liquid inlet.

[0011] Based on the above technical solution, the second flow channel subarray includes at least two radially parallel W-shaped second flow channels, which extend to adjacent second flow channel subarrays.

[0012] Based on the above technical solution, the wall surface of the cover plate corresponding to the flow channel array is set as a plane; or the wall surface of the cover plate corresponding to the flow channel array is recessed to form a flow channel mating groove, and the flow channel mating groove and the flow channel array in the assembled state enclose to form a complete coolant flow channel.

[0013] Based on the above technical solution, the flow channel array is formed by the surface of the first cooling plate recessed towards the cover plate, and the wall protrusion between adjacent first or second flow channels forms a baffle. A first sealing strip is fixedly provided on the baffle, and a corresponding first groove is provided on the cover plate. The first sealing strip and the first groove are interference fit.

[0014] Based on the above technical solution, a second cooling plate is also stacked on the other side of the cover plate. The second cooling plate has a cooling mounting groove for accommodating the driving electronic components protruding from the driving plate. The wall surface of the second cooling plate facing the cover plate is provided with a second liquid inlet channel, a second liquid outlet channel, and a third flow channel connecting the second liquid inlet channel and the second liquid outlet channel. The cover plate is sealed to the groove openings of the second liquid inlet channel, the second liquid outlet channel, and the third flow channel.

[0015] Based on the above technical solution, the third flow channel is a rectangular flow channel that surrounds and is close to the inner wall of the cooling mounting groove, and the height of the rectangular flow channel is slightly less than the thickness of the second cooling plate.

[0016] Based on the above technical solution, the second cooling plate also includes a second groove on the bottom surface. The second groove is arranged along the inner and outer sides of the bottom surface of the second liquid inlet channel, the second liquid outlet channel and the third flow channel. A second sealing strip is arranged on the top surface of the cover plate corresponding to the second groove. The second sealing strip is interference-fitted with the second groove.

[0017] Based on the above technical solution, the first liquid inlet channel is disposed inside the first cooling plate, one end of the first liquid inlet channel leads to the outer surface of the first cooling plate to connect to an external cooling source, and the other end is connected to the central liquid inlet hole; the first liquid outlet channel is disposed inside the cover plate, one end of the first liquid outlet channel connects to the tail of the flow channel array, and the other end connects to the second liquid inlet channel or leads to the outer surface of the cover plate to output coolant; one end of the second liquid inlet channel connects to the first liquid outlet channel or leads to the outer surface of the second cooling plate to connect to an external cooling source, and the other end connects to the third flow channel; one end of the second liquid outlet channel connects to the third flow channel, and the other end leads to the outer surface of the second cooling plate to output coolant.

[0018] The present invention also provides a planar motor stator, including a coil plate, a return plate and a drive plate, and is further equipped with the aforementioned microfluidic cooling structure, and the coil plate, return plate, first cooling plate, cover plate and drive plate are fixedly connected together and arranged sequentially from bottom to top.

[0019] The present invention also provides a planar motor stator, including a coil plate, a return plate, and a drive plate, and is further equipped with the aforementioned microfluidic cooling structure, and the coil plate, return plate, first cooling plate, cover plate, second cooling plate, and drive plate are fixedly connected together and arranged sequentially from bottom to top. The drive plate is provided with protruding drive electronic components, which are inserted into the cooling mounting groove.

[0020] Based on the above technical solution, a first conductive hole is provided through the first cooling plate, and a second conductive hole corresponding to and connected to the first conductive hole is provided through the cover plate. The first and second conductive holes are filled with non-metallic conductive materials or have conductive pins installed to realize the electrical connection between the drive board and the coil board. The positions of the first and second conductive holes avoid the structures used to accommodate the coolant.

[0021] The beneficial effects of the technical solution provided by this invention are as follows:

[0022] 1. By setting a flow channel array on the first cooling plate, the coolant flows a longer path within a limited space, increasing the effective contact area with the cooling plate, fully absorbing heat, and improving cooling efficiency.

[0023] 2. By setting a first liquid inlet channel connected to the central liquid inlet hole of the first cooling plate, on the one hand, the coolant with the lowest temperature is introduced from the central liquid inlet hole, directly impacting and efficiently cooling the central area where heat is most concentrated; on the other hand, the flow channel array allows the coolant to flow from the center to the periphery, achieving matching of the temperature gradient. This design significantly improves the cooling efficiency of the central heat-generating area, effectively reduces the temperature difference between different parts of the planar motor stator, and ensures thermal balance and stable operation of the planar motor.

[0024] 3. By setting a radial first flow channel embedded at the bottom of the arc-shaped first flow channel, and cooperating with the arc-shaped first flow channel to form a smooth and connected first flow channel, the problems of low flow velocity, slow coolant circulation, high pressure, and easy coolant overflow at the bend are solved. This accelerates the circulation of coolant, improves cooling efficiency, and avoids coolant leakage, thus maintaining the normal operation of the planar motor.

[0025] 4. By setting a flow channel matching groove on the cover plate, the inner diameter of the flow channel is enlarged, which increases the contact area between the coolant and the cover plate, allowing the coolant to absorb the heat of the planar motor stator more fully and improving the cooling efficiency of the planar motor stator.

[0026] 5. By setting up a cooling mounting slot and a third flow channel, the driving electronic component can be installed in the cooling mounting slot, with its side wall attached to the inner wall of the cooling mounting slot and its top wall attached to the cover plate. The coolant circulating in the third flow channel cools the side wall of the driving electronic component, and the coolant circulating in the flow channel of the cover plate and the flow channel array of the first cooling plate cools the top wall of the driving electronic component, thereby achieving efficient cooling of the driving electronic component.

[0027] 6. By setting sealing strips along both sides of the first, second, and third flow channels and interfering with the corresponding grooves, the sealing performance of the cooling device is improved on the one hand, and the fixing and limiting between the first cooling plate and the cover plate, and between the cover plate and the second cooling plate on the other hand, so as to avoid the microchannel cooling structure from shifting during movement and failing to operate normally.

[0028] 7. By setting up a microchannel cooling structure, the coil board and drive board of the planar motor are cooled, the temperature of the planar motor stator is reduced, and the normal operation of the planar motor is maintained. Attached Figure Description

[0029] Figure 1 This is an exploded view of Embodiment 1 of the present invention;

[0030] Figure 2 This is a schematic diagram of the top surface of a first cooling plate according to Embodiment 1 of the present invention;

[0031] Figure 3 This is a schematic diagram of the bottom surface of the cover plate according to Embodiment 1 of the present invention;

[0032] Figure 4 This is a schematic diagram of the top surface of another first cooling plate according to Embodiment 1 of the present invention;

[0033] Figure 5 This is a schematic diagram of the top surface of the first cooling plate according to Embodiment 2 of the present invention;

[0034] Figure 6 This is a schematic diagram of the top surface of another first cooling plate according to Embodiment 2 of the present invention;

[0035] Figure 7 This is an exploded view of Embodiment 3 of the present invention;

[0036] Figure 8 This is a schematic diagram of the top surface of the cover plate in Embodiment 3 of the present invention;

[0037] Figure 9 This is a schematic diagram of the structure of the bottom surface of the second cooling plate in Embodiment 3 of the present invention;

[0038] Figure 10 This is an exploded view of the planar motor stator of the present invention.

[0039] Coil plate 1, return plate 2, first cooling plate 31, first flow channel 311, arc-shaped first flow channel 3111, radial first flow channel 3112, second flow channel 312, confluence cavity 313, baffle 314, first sealing strip 3141, first conductive hole 315, central liquid inlet hole 316, cover plate 32, flow channel mating groove 321, first groove 322, second sealing strip 323, second conductive hole 324, first liquid inlet channel 33, first liquid outlet channel 34, second cooling plate 35, cooling mounting groove 351, second liquid inlet channel 352, second liquid outlet channel 353, third flow channel 354, drive plate 4, drive electronic component 41. Detailed Implementation

[0040] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0041] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0042] In the description of this invention, it should be understood that the terms "left", "right", "front", "rear", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0043] Example 1

[0044] like Figures 1 to 4 As shown, this embodiment provides a microchannel cooling structure for installation between the drive plate and the return plate of a planar motor stator. The microchannel cooling structure has microchannels for coolant flow to cool the drive plate, coil plate and return plate.

[0045] Specifically, the microchannel cooling structure includes a first cooling plate 31 and a cover plate 32 stacked on top of each other and overlapping each other. The surface of the first cooling plate 31 facing the cover plate 32 is provided with an array of channels for the flow of coolant. The lower surface wall of the cover plate 32 facing the channel array is sealed to the channel array. The microchannel cooling structure is also provided with a first liquid inlet channel 33 and a first liquid outlet channel 34 respectively connected to the channel array. The first liquid inlet channel 33 delivers coolant to the central liquid inlet hole 316 located in the center of the first cooling plate 31. The channel array extends outward from the central liquid inlet hole 316 of the first cooling plate 31.

[0046] The first liquid inlet channel 33 is disposed inside the first cooling plate 31. One end of the first liquid inlet channel 33 is connected to the outer surface of the first cooling plate 31 to connect to an external cooling source, and the other end is connected to the central liquid inlet hole 316. The first liquid outlet channel 34 is disposed inside the cover plate 32. One end of the first liquid outlet channel 34 is connected to the tail end of the flow channel array, and the other end is connected to the second liquid inlet channel 352 or connected to the outer surface of the cover plate 32 to output coolant.

[0047] By setting the first liquid inlet channel 33 to connect to the central liquid inlet hole 316, the coolant diffuses outward along the flow channel array with the central liquid inlet hole 316 as the center, effectively improving the cooling efficiency of the central heat accumulation area of ​​the planar motor stator, reducing the temperature difference between different parts of the planar motor stator, and maintaining the normal operation of the planar motor.

[0048] like Figure 2 As shown, the arrows indicate the flow direction of the coolant, with the area through which the coolant flows first being the head end and the area through which it flows last being the tail end. The flow channel array includes at least two sets of first flow channel sub-arrays arranged in a circular pattern. Each set of first flow channel sub-arrays is fan-shaped and includes multiple first flow channels 311 connected end to end. The first flow channel 311 is divided into at least two closely arranged arc-shaped first flow channels 3111 concentrically arranged with the center of the first cooling plate 31 as the center, and a radial first flow channel 3112 connecting two adjacent arc-shaped first flow channels 3111. The central liquid inlet 316 is connected to the head end of the nearest arc-shaped first flow channel 3111, and the tail end of the outermost arc-shaped first flow channel 3111 is connected to the first liquid outlet channel 34.

[0049] In this embodiment, the first flow channel sub-array consists of three groups, each with the same central angle of the arc-shaped first flow channel 3111, which is slightly less than 120 degrees. The three groups of fan-shaped first flow channel sub-arrays are spliced ​​together to form a circular flow channel array covering the upper surface of the first cooling plate 31. In other embodiments, the first flow channel sub-array may consist of multiple groups.

[0050] like Figure 3 As shown, the cover plate 32 has a recessed wall surface corresponding to the flow channel array to form a flow channel mating groove 321. In the assembled state, the flow channel mating groove 321 and the flow channel array enclose each other to form a complete coolant flow channel.

[0051] By setting up flow channel matching grooves, the inner diameter of the flow channel is enlarged, which increases the contact area between the coolant and the cover plate, allowing the coolant to absorb the heat of the planar motor stator more fully and improving the cooling efficiency of the planar motor stator.

[0052] In other embodiments, the wall surface of the cover plate 32 corresponding to the flow channel array is planar.

[0053] Preferably, the inner walls of the first flow channel 311 and the flow channel mating groove 321 are provided with a nano-level rough texture layer to increase the contact area between the heat-conducting medium and the inner wall of the pipe, thereby improving the heat exchange efficiency.

[0054] By setting closely arranged arc-shaped first flow channels 3111 and radial first flow channels 3112 connected in series on the first cooling plate 31, and setting flow channel mating grooves 321 on the cover plate 32, the coolant flows through a longer path in a limited space, increasing the effective contact area between the coolant and the first cooling plate 31 and the cover plate 32, fully absorbing heat, and improving cooling efficiency.

[0055] In one embodiment of the radial first flow channel, such as Figure 2 As shown, the radial first flow channel 3112 and the arc-shaped first flow channel 3111 are on the same plane.

[0056] In another embodiment of the radial first flow channel, such as Figure 4 As shown, the radial first flow channel 3112 is embedded at the bottom of the arc-shaped first flow channel 3111, and its two ends are respectively connected to the bottom openings at the ends of two adjacent arc-shaped first flow channels 3111. In this embodiment, the first liquid inlet channel 33, the radial first flow channel 3112, and the arc-shaped first flow channel 3111 are located on different planes in space. Preferably, the plane containing the radial first flow channel 3112 is arranged between the plane containing the first liquid inlet channel 33 and the plane containing the arc-shaped first flow channel 3111.

[0057] Figure 2 In the embodiment described, since the arc-shaped first flow channel 3111 and the radial first flow channel 3112 are arranged on the same plane, during operation, when the coolant flows through the corner where these two flow channels meet, the coolant flow rate slows down, the pressure is higher at this point, and coolant overflow is likely to occur. Therefore, the sealing performance of the sealing structure at this point is required to be high; otherwise, coolant leakage is likely to occur at the corner. To solve this problem, Figure 4 In the proposed solution, by setting up an embedded radial first flow channel 3112, which works in conjunction with the arc-shaped first flow channel 3111 to form a smoothly connected first flow channel 311, the problem of high hydraulic pressure at the bend and easy leakage of coolant is solved. This reduces the difficulty of sealing, accelerates the circulation of coolant, improves cooling efficiency, and maintains the normal operation of the planar motor.

[0058] In this embodiment, the flow channel array is formed by the surface of the first cooling plate 31 recessed towards the cover plate 32, and the wall between adjacent first flow channels 311 protrudes to form baffles 314. A first sealing strip 3141 is fixedly disposed on the baffles 314, and a corresponding first groove 322 is provided on the cover plate 32. The first sealing strip 3141 and the first groove 322 are interference-fitted. In other embodiments, the first cooling plate 31 protrudes towards the surface of the cover plate 32 to form baffles 314, and adjacent baffles 314 enclose each other to form first flow channels 311. Other settings are adjusted accordingly.

[0059] Preferably, the sealing strip is made of silicone and is fixedly adhered to the baffle 314.

[0060] By setting the first sealing strip 3141 on the baffles 314 on both sides of the first flow channel 311 and the corresponding first groove 322 in an interference fit, the sealing between the first cooling plate 31 and the cover plate 32 is improved on the one hand, and the fixed positioning between the first cooling plate 31 and the cover plate 32 is facilitated on the other hand, so as to avoid displacement during movement and prevent the micro-flow channel cooling structure from operating normally.

[0061] During operation, the coolant flows from the external cooling source through the first inlet channel 33 to the central inlet hole 316. The coolant diffuses from the center to the surrounding areas and flows to each of the first flow channel sub-arrays. In each first flow channel sub-array, the coolant flows from the beginning of the nearest arc-shaped first flow channel 3111 through alternating arc-shaped first flow channels 3111 and radial first flow channels 3112, and flows to the end of the outermost arc-shaped first flow channel 3111 before flowing out through the first outlet channel 34.

[0062] Example 2

[0063] like Figure 5-6 As shown, a microchannel cooling structure differs from Embodiment 1 in that the channel array includes at least two sets of second channel subarrays arranged in a circular pattern, and a confluence cavity 313 is formed between two adjacent sets of second channel subarrays. At least one confluence cavity 313 is connected to the central liquid inlet 316, and one of the remaining confluence cavities 313 is connected to the first liquid outlet channel 34.

[0064] One end of the manifold 313 is connected to the central inlet hole 316, and the other end is connected to the first outlet channel 34; or a set of corresponding manifolds 313 are respectively connected to the central inlet hole 316, and another set of manifolds 313 adjacent to this set of manifolds is connected to the first outlet channel 34.

[0065] In this embodiment, the second channel subarray consists of four groups, while in other embodiments it may consist of multiple groups.

[0066] The second flow channel subarray includes at least two radially parallel W-shaped second flow channels 312, which extend to adjacent second flow channel subarrays, so that the second flow channel subarrays are spliced ​​together to form a flow channel array covering the upper surface of the first cooling plate 31.

[0067] Preferably, the second flow channel subarray further includes a U-shaped flow channel, which is disposed between the central liquid inlet 316 and the innermost W-shaped second flow channel 312.

[0068] One implementation of the manifold, such as Figure 5 As shown, each manifold 313 can be connected to the central inlet 316 at one end and to the first outlet channel 34 at the other end. In this embodiment, all four manifolds 313 are connected to the central inlet 316 at one end and to the first outlet channel 34 at the other end.

[0069] During operation, the coolant flows from the external cooling source through the first inlet channel 33 to the central inlet hole 316. The coolant then flows through the manifold 313 to the two W-shaped second channels 312 on both sides, and then through the W-shaped second channels 312 back to the manifold 313, and finally flows out through the first outlet channel 34.

[0070] Another implementation of the manifold, such as Figure 6 As shown, one manifold 313 is connected to the central inlet 316, one or two adjacent manifolds 313 are connected to the first outlet channel 34, and non-adjacent manifolds 313 are connected to the central inlet 316. In this embodiment, one of two adjacent manifolds 313 is connected to the central inlet 316 and the other is connected to the first outlet channel 34, and two opposing manifolds 313 are both connected to either the central inlet 316 or the first outlet channel 34.

[0071] During operation, the coolant flows from the external cooling source through the first inlet channel 33 and the central inlet hole 316 into a set of opposing manifolds 313, then through the second flow channel subarray on both sides of the manifolds 313 into another set of opposing manifolds 313, and finally flows out through the first outlet channel 34.

[0072] By setting up a manifold 313 connected to the central inlet 316, adjacent manifolds 313 connected to the first outlet channel 34, and non-adjacent manifolds 313 connected to the central inlet 316, compared to each manifold 313 being connected to both the central inlet 316 and the first outlet channel 34, the flow direction of the coolant is clear and orderly. This avoids the coolant flowing from the central inlet 316 to the manifold 313 without passing through the W-shaped second flow channel 312, and directly from the manifold 313 to the first outlet channel 34. This reduces the length of the coolant's flow path, reduces the contact area between the coolant and the first cooling plate 31 and the cover plate 32, and lowers the cooling efficiency.

[0073] The flow channel array is formed by the recess of the first cooling plate 31 toward the surface of the cover plate 32. The wall between adjacent second flow channels 312 protrudes to form a baffle 314. A first sealing strip 3141 is fixedly provided on the baffle 314. A first groove 322 is correspondingly provided on the cover plate 32. The first sealing strip 3141 and the first groove 322 are interference fit.

[0074] Example 3

[0075] like Figures 7 to 9As shown, a microfluidic cooling structure includes a first cooling plate 31 and a cover plate 32 as described in Embodiment 1 or Embodiment 2, and a second cooling plate 35 stacked on the other side of the cover plate 32. The second cooling plate 35 has a cooling mounting groove 351 for accommodating the driving electronic component 41 protruding from the driving plate 4. The wall surface of the second cooling plate 35 facing the cover plate 32 is provided with a second liquid inlet channel 352, a second liquid outlet channel 353, and a third flow channel 354 connecting the second liquid inlet channel and the second liquid outlet channel. The cover plate 32 is sealed to the groove openings of the second liquid inlet channel 352, the second liquid outlet channel 353, and the third flow channel 354.

[0076] The third flow channel 354 is a rectangular flow channel that surrounds and is close to the inner wall of the cooling mounting groove 351. The height of the rectangular flow channel is slightly less than the thickness of the second cooling plate 35.

[0077] like Figure 8-9 As shown, the second cooling plate 35 also includes a second groove on the bottom surface. The second groove is arranged along the inner and outer sides of the bottom surface of the second liquid inlet channel 352, the second liquid outlet channel 353 and the third flow channel 354. The top surface of the cover plate 32 is provided with a second sealing strip 323 corresponding to the second groove. The second sealing strip 323 is interference-fitted with the second groove.

[0078] Preferably, the second sealing strip 323 is made of silicone and is fixedly adhered to the top surface of the cover plate 32.

[0079] The second liquid inlet channel 352 leads to the outer surface of the second cooling plate 35 to connect to an external cooling source; or as... Figure 8-9 As shown, one end of the second liquid inlet channel 352 is connected to the first liquid outlet channel 34, and the other end is connected to the third flow channel 354. One end of the second liquid outlet channel 353 is connected to the third flow channel 354, and the other end leads to the outer surface of the second cooling plate 35 to output coolant.

[0080] In this embodiment, there are three first liquid outlet channels 34, which extend from the flow channel mating groove 321 at the bottom of the cover plate 32 to the top surface of the cover plate 32. A second liquid inlet channel 352 is provided at the corresponding position on the bottom surface of the second cooling plate 35. The second liquid inlet channel 352 is linearly connected to the third flow channel 354, so that the coolant is transported from the first liquid outlet channel 34 to the third flow channel 354.

[0081] Optionally, the cooling mounting slot 351 is square.

[0082] Preferably, the inner wall of the third flow channel 354 is provided with a nanoscale rough texture layer to increase the contact area between the heat-conducting medium and the inner wall of the pipe, thereby improving the heat exchange efficiency.

[0083] By setting a second sealing strip 323 along the inner and outer sides of the third flow channel 354 and interfering with the corresponding second groove, the sealing between the cover plate 32 and the second cooling plate 35 is improved on the one hand, and the fixed positioning between the cover plate 32 and the second cooling plate 35 is facilitated on the other hand, so as to avoid the cooling device from shifting during movement and failing to operate normally.

[0084] By setting up a cooling mounting slot 351 and a third flow channel 354, the driving electronic component 41 can be installed in the cooling mounting slot 351, with its sidewalls attached to the inner wall of the cooling mounting slot 351 and its top wall attached to the cover plate 32. The coolant circulating in the third flow channel 354 cools the sidewalls of the driving electronic component 41, and the coolant circulating in the flow channel array of the cover plate 32 and the first cooling plate 31 cools the top wall of the driving electronic component 41, thereby achieving efficient cooling of the driving electronic component 41.

[0085] Preferably, the space between the cooling mounting groove 351 and the driving electronic component 41 is filled with thermally conductive potting compound. The thermally conductive potting compound has excellent thermal conductivity and can fill any possible small gaps when filled in the cooling mounting groove 351, ensuring that the heat conduction path between the driving board 4 and the second cooling plate 35 is as unobstructed as possible.

[0086] During operation, the coolant flows from the first outlet channel 34 through the second inlet channel 352 into the third flow channel 354, and then flows through the third flow channel 354 into the second outlet channel 353 to flow out.

[0087] Example 4

[0088] like Figure 10 As shown, in this embodiment, a planar motor stator includes a coil plate 1, a return plate 2, and a drive plate 4. It also installs a microchannel cooling structure as described in Embodiment 3, and the coil plate 1, return plate 2, first cooling plate 31, cover plate 32, second cooling plate 35, and drive plate 4 are arranged sequentially from bottom to top and fixedly connected together. The drive plate 4 is provided with a protruding drive electronic component 41, which is inserted into the cooling mounting groove 351.

[0089] In other embodiments, a planar motor stator includes a coil plate 1, a return plate 2, and a drive plate 4, and is also equipped with the microchannel cooling structure described in Embodiment 1 or Embodiment 2, as well as the coil plate 1, return plate 2, first cooling plate 31, cover plate 32, and drive plate 4, which are fixedly connected together and arranged sequentially from bottom to top.

[0090] The coil board 1 is a pressed PCB printed circuit board used to carry and connect electronic components in the motor, including but not limited to coils and electronic drive chips. The return plate 2 is used to close the coil of the coil board 1.

[0091] Preferably, the return plate 2 is provided with a through channel corresponding to the position of the electronic component, and the electronic component passes through the through channel.

[0092] Preferably, a non-magnetic metal heat-conducting plate or thermally conductive potting compound is provided between the return plate 2 and the microchannel cooling structure to improve the cooling efficiency of the microchannel cooling structure for the return plate 2 and the coil plate 1.

[0093] A first conductive hole 315 is provided through the first cooling plate 31, and a second conductive hole 324 corresponding to and connected to the first conductive hole 315 is provided through the cover plate 32. The first conductive hole 315 and the second conductive hole 324 are filled with non-metallic conductive material or have conductive pins installed to realize the electrical connection between the drive plate 4 and the coil plate 1. The positions of the first conductive hole 315 and the second conductive hole 324 avoid the structures used to contain the coolant.

[0094] Preferably, the inner wall of the conductive hole is coated with an insulating coating.

[0095] During assembly, conductive pins are inserted into conductive holes and pressed against the pads of the upper and lower circuit boards.

[0096] Preferably, the coil plate 1 is provided with a support column, which extends vertically and penetrates the return plate 22, the microchannel cooling structure, and the drive plate 4. The support column should be positioned in a location that does not interfere with the electronic components, the winding conductor, and the flow of coolant. The support column is positioned at the edges or in the gaps of these critical components to avoid directly covering or contacting any sensitive areas.

[0097] Preferably, the support columns are located at the four corners of the edge of the coil plate 1.

[0098] Preferably, an auxiliary heat sink is also provided at the bottom of the planar motor stator. The auxiliary heat sink is made of aluminum alloy with a high thermal conductivity and has an array of grooves on its surface to increase the heat dissipation area. The auxiliary heat sink is fixed to the bottom of the planar motor stator by bolts and is connected to the bottom area of ​​the first flow channel 311 or the second flow channel 312. When the coolant flows through the auxiliary heat sink, the heat is quickly conducted to the external environment through the groove structure.

[0099] During installation, the coil plate 1 is placed at the bottom, and conductive pins are soldered to the corresponding positions of the electronic components on the coil plate 1. The return plate 2 is inserted into the support column of the coil plate 1 and fixed to the coil plate 1. The protruding electronic components of the coil plate 1 are installed in the through-channel of the return plate 2. The first cooling plate 31, the cover plate 32, and the second cooling plate 35 are installed and fixed to the corresponding grooves by sealing strips, with the first cooling plate 31 at the bottom and the second cooling plate 35 at the top. The whole is inserted into the support column, and conductive pins are inserted into the corresponding conductive holes to fix the microchannel cooling structure on the return plate 2. The drive plate 4 is inserted into the support column and fixed to the second cooling plate 35. The protruding drive electronic component 41 of the drive plate 4 is installed in the cooling mounting groove 351 of the second cooling plate 35, and the conductive pins are soldered to the drive electronic component 41.

[0100] When the circuit is connected, the current is conducted through the driving electronic component 41 on the driving board 4 to the conductive needle, and from the conductive needle to the electronic components on the coil board 1, thus realizing the electrical connection between the driving board 4 and the coil board 1.

[0101] During operation, the coolant flows into the central inlet hole 316 from the first inlet channel 33, flows through the flow channel array to the first outlet channel 34, then flows through the second inlet channel 352 to the third flow channel 354, and finally flows out of the microchannel cooling structure through the second outlet channel 353.

[0102] The cooling path is as follows: when the stator of the planar motor is working, the heat generated by the coil plate 1 and the return plate 2 is transferred to the first cooling plate 31, and the heat is carried away by the coolant circulating inside the flow channel array; the heat generated by the drive electronic component 41 is transferred to the side wall of the cooling mounting groove 351, and the heat is carried away by the coolant circulating inside the third flow channel 354; the drive electronic component 41 transfers the heat through the top wall to the cover plate 32, and the heat is carried away by the coolant circulating inside the flow channel array of the first cooling plate 31 and the flow channel mating groove 321 of the cover plate 32.

[0103] During operation, the heat generated by the coil plate 1, return plate 2, and drive plate 4 in the stator of the planar motor is efficiently carried away by the coolant circulating within the microchannel cooling structure. The key to the microchannel cooling structure lies in its differentiated heat dissipation design: on the one hand, the coolant with the lowest temperature is introduced through the central inlet 316, directly impacting and efficiently cooling the central area where heat generation is most concentrated; on the other hand, the flow channel array allows the coolant to flow from the center to the periphery, achieving temperature gradient matching. This design significantly improves the cooling efficiency of the central heat-generating area, effectively reduces the temperature difference between different parts of the planar motor stator, and ensures thermal balance and stable operation of the planar motor.

[0104] The foregoing has shown and described the basic principles and main features of the present invention. It will be apparent to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments. Therefore, the embodiments should be considered as exemplary and not restrictive. The scope of the present invention is defined by the appended claims rather than the foregoing description. Therefore, it is intended that all variations falling within the meaning and scope of the equivalents of the claims be included within the present invention.

[0105] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A microchannel cooling structure for a planar motor stator, characterized in that, The system includes a first cooling plate (31) and a cover plate (32) stacked on top of each other and overlapping each other. The surface of the first cooling plate (31) facing the cover plate (32) is provided with an array of channels for the flow of coolant. The lower surface wall of the cover plate (32) facing the channel array is sealed to the channel array. The microchannel cooling structure is also provided with a first liquid inlet channel (33) and a first liquid outlet channel (34) respectively connected to the channel array. The first liquid inlet channel (33) delivers coolant to the central liquid inlet hole (316) located in the center of the first cooling plate (31). The channel array extends outward from the central liquid inlet hole (316) of the first cooling plate (31). The channel array includes at least two sets of second channel sub-arrays arranged in a circle. A confluence cavity (313) is formed between two adjacent sets of second channel sub-arrays. A set of corresponding manifolds (313) are connected to the central liquid inlet (316), and another set of manifolds (313) adjacent to this set of manifolds is connected to the first liquid outlet channel (34). It also includes a second cooling plate (35) stacked on the other side of the cover plate (32). The second cooling plate (35) has a cooling mounting groove (351) for accommodating the driving electronic components (41) protruding from the drive plate (4). The cooling mounting groove (351) is through-hole. The wall of the second cooling plate (35) facing the cover plate (32) is provided with a second liquid inlet channel (352), a second liquid outlet channel (353), and a third flow channel (354) connecting the second liquid inlet channel and the second liquid outlet channel. The cover plate (32) is sealed to the groove openings of the second liquid inlet channel (352), the second liquid outlet channel (353), and the third flow channel (354). The third flow channel (354) is a rectangular flow channel that surrounds and is close to the inner wall of the cooling mounting groove (351). The first liquid outlet channel (34) is located inside the cover plate (32). One end of the first liquid outlet channel (34) is connected to the tail of the flow channel array, and the other end of the first liquid outlet channel (34) is connected to the second liquid inlet channel (352), or leads to the outer surface of the cover plate (32) to output coolant. One end of the second liquid inlet channel (352) is connected to the first liquid outlet channel (34) or to the outer surface of the second cooling plate (35) to connect to an external cooling source, and the other end is connected to the third flow channel (354); one end of the second liquid outlet channel (353) is connected to the third flow channel (354), and the other end is connected to the outer surface of the second cooling plate (35) to output coolant; The height of the rectangular flow channel is slightly less than the thickness of the second cooling plate (35); the second cooling plate (35) also includes a second groove (355) on the bottom surface, the second groove (355) being arranged along the inner and outer sides of the bottom surface of the second liquid inlet channel (352), the second liquid outlet channel (353) and the third flow channel (354).

2. The microchannel cooling structure according to claim 1, characterized in that, The second flow channel subarray includes at least two radially parallel, W-shaped second flow channels (312) that extend into adjacent second flow channel subarrays.

3. The microchannel cooling structure according to claim 1, characterized in that, The cover plate (32) has a flat surface on the wall of the channel array; or the cover plate (32) has a recessed wall of the channel array to form a channel mating groove (321). The channel mating groove (321) and the channel array in the assembled state enclose a complete coolant flow channel.

4. The microchannel cooling structure according to claim 1, characterized in that, The flow channel array is formed by the recess of the surface of the first cooling plate (31) facing the cover plate (32). The wall between adjacent first flow channels (311) or second flow channels (312) is raised to form a baffle (314). A first sealing strip (3141) is fixedly provided on the baffle (314). A first groove (322) is correspondingly provided on the cover plate (32). The first sealing strip (3141) and the first groove (322) are interference fit.

5. The microchannel cooling structure according to claim 1, characterized in that, The top surface of the cover plate (32) is provided with a second sealing strip (323) corresponding to the second groove (355), and the second sealing strip (323) is interference-fitted with the second groove (355).

6. The microchannel cooling structure according to claim 1, characterized in that, The first liquid inlet channel (33) is located inside the first cooling plate (31). One end of the first liquid inlet channel (33) is connected to the outer surface of the first cooling plate (31) to connect to an external cooling source, and the other end is connected to the central liquid inlet hole (316).

7. A planar motor stator, comprising a coil plate (1), a return plate (2), and a drive plate (4), characterized in that, It is also equipped with a microchannel cooling structure as described in any one of claims 1-5, consisting of a coil plate (1), a return plate (2), a first cooling plate (31), a cover plate (32), and a drive plate (4) arranged sequentially from bottom to top and fixedly connected together.

8. The planar motor stator according to claim 7, characterized in that, A first conductive hole (315) is provided through the first cooling plate (31), and a second conductive hole (324) is provided through the cover plate (32) corresponding to and connected to the first conductive hole (315). The first conductive hole (315) and the second conductive hole (324) are filled with non-metallic conductive material or have conductive pins installed to realize the electrical connection between the drive plate (4) and the coil plate (1). The positions of the first conductive hole (315) and the second conductive hole (324) avoid the structures used to contain the coolant.

9. A planar motor stator, comprising a coil plate (1), a return plate (2), and a drive plate (4), characterized in that, It is also equipped with the microchannel cooling structure as described in claim 5 or 6, and the coil plate (1), return plate (2), first cooling plate (31), cover plate (32), second cooling plate (35) and drive plate (4) arranged sequentially from bottom to top and fixedly connected together. The drive plate (4) is provided with a protruding drive electronic component (41), and the drive electronic component (41) is inserted into the cooling mounting groove (351).

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