Movable baffle assembly for vacuum observation window

Abstract

The invention relates to the field of vacuum coating equipment, in particular to a movable baffle assembly for a vacuum observation window, which comprises a glass pressing plate, a sealing seat, a hand wheel and a movable baffle, the glass pressing plate is installed at one end of the sight glass long pipe and used for fixing the sight glass, and the other end of the sight glass long pipe is a vacuum side. The sealing seat is installed at the upper end of the sight glass short pipe, the sight glass short pipe is communicated with the sight glass long pipe, a first magnetic coupler and a second magnetic coupler are arranged in the sealing seat and located on the upper half side and the lower half side of the sealing seat respectively, and the upper half side and the lower half side of the sealing seat are not communicated with each other; the hand wheel is installed in the first magnetic coupler and used for driving the first magnetic coupler to rotate. The movable baffle is installed on the vacuum side of the sight glass long pipe and connected with the second magnetic coupler through the connecting rod. Through magnetic transmission, the whole structure has no dynamic seal, so that the problem of vacuum leakage caused by the action of the baffle is solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of vacuum coating equipment, in particular to a movable baffle assembly for a vacuum observation window. BACKGROUND

[0002] In the field of vacuum coating technology, in order to observe the coating effect in real time, internal information needs to be obtained through the equipment observation window. However, long-term opening of the observation window will cause the sight glass to be contaminated, affecting observation and possibly harming human health. Therefore, almost all vacuum equipment is equipped with an observation window with a movable baffle, which can be opened and closed flexibly according to the use requirements.

[0003] At present, the observation window of the traditional vacuum equipment has significant defects in actual application. For example, the existing observation window drives the baffle input shaft by rotating the hand screw part of the baffle input shaft, thereby realizing the opening and closing of the movable baffle. However, this structure design has a serious vacuum leakage problem. The root cause is that the baffle input shaft directly penetrates from the atmospheric side to the vacuum side. During the operation of the baffle, the baffle input shaft will exert a squeezing and stretching action on the skeleton oil seal. As the use time of the equipment increases, the material of the skeleton oil seal gradually ages, the sealing performance decreases, and the vacuum leakage problem becomes more serious. In addition, if the machining precision of the baffle input shaft and the baffle input seat is insufficient, and the surface roughness does not meet the standard, it will not only cause vacuum leakage, but also shorten the service life of the skeleton oil seal. When the vacuum leakage is serious, the equipment will trigger an alarm shutdown, greatly affecting the production continuity and efficiency, increasing the production cost, and reducing the economic benefit of the enterprise.

[0004] In addition, although the current vacuum equipment can seal the vacuum side, since the main movable parts are located in the vacuum side, some special situations will inevitably occur during the movement or rotation of the parts in the vacuum side, such as when a part is rotated to a certain angle range, a certain area in the vacuum side will be in an isolated state or integrated with the vacuum side, which cannot guarantee that the vacuum side pressure is always the same. SUMMARY

[0005] Therefore, it is necessary to provide a movable baffle assembly for a vacuum observation window, which adopts magnetic transmission, and the vacuum side and the atmospheric side do not need to be penetrated. When in action, the first magnetic coupling is in the atmospheric side, the second magnetic coupling is in the vacuum side, and the two are separated by a sealing seat. Through magnetic transmission, the entire structure has no dynamic seal, thereby solving the problem of vacuum leakage caused by the action of the baffle.

[0006] The present application provides a movable baffle assembly for a vacuum observation window, comprising:

[0007] A glass pressing plate is installed at one end of a sight glass long tube for fixing the sight glass. The other end of the sight glass long tube is the vacuum side.

[0008] a sealing seat is installed at the upper end of the sight short pipe, the sight short pipe is communicated with the sight long pipe, the sealing seat is provided with a first magnetic coupling and a second magnetic coupling, the first magnetic coupling and the second magnetic coupling are located at the upper half and the lower half of the sealing seat respectively, and the upper half and the lower half of the sealing seat are not communicated;

[0009] a hand wheel is installed in the first magnetic coupling for driving the first magnetic coupling to rotate;

[0010] a movable baffle is installed at the vacuum side of the sight long pipe, and the movable baffle is connected with the second magnetic coupling through a connecting rod.

[0011] In an embodiment, the sealing seat comprises a first fixed seat, a second fixed seat and a third fixed seat; the first fixed seat, the second fixed seat and the third fixed seat are sequentially arranged from bottom to top, the first magnetic coupling is installed in the third fixed seat, the second magnetic coupling is installed in the second fixed seat, and an adjusting seat is arranged in the first fixed seat, the adjusting seat is attached to the second magnetic coupling, and the third fixed seat is isolated from the vacuum side.

[0012] In an embodiment, the upper surface of the first fixed seat is annularly arranged with a plurality of screw holes, the upper surface of the second fixed seat is annularly arranged with a plurality of through holes, and the upper surface of the third fixed seat is annularly arranged with a plurality of counterbores, the counterbores, the through holes and the screw holes correspond to each other, one second fastener is installed in each counterbore, and the bottom end of the second fastener is installed in the screw hole.

[0013] In an embodiment, the upper surface of the first fixed seat is provided with a fourth clamping groove, the lower surface of the second fixed seat is provided with a fifth clamping groove, the fourth clamping groove and the fifth clamping groove are both arranged in a ring structure, and a second sealing ring is arranged between the fourth clamping groove and the fifth clamping groove.

[0014] In an embodiment, the adjusting seat comprises an upper annular seat, a middle connecting seat and a lower annular seat; the upper annular seat, the middle connecting seat and the lower annular seat are sequentially connected from top to bottom, the outer diameter of the middle connecting seat is greater than the outer diameter of the lower annular seat and equal to the outer diameter of the upper annular seat, and the inner diameter of the middle connecting seat is greater than the inner diameter of the lower annular seat and less than the inner diameter of the upper annular seat.

[0015] In an embodiment, the upper surface of the upper annular seat is provided with a first limiting groove, the bottom end of the second magnetic coupling is installed in the first limiting groove, the upper annular seat and the middle connecting seat are rotationally connected, and the surface of the connecting rod abuts against the inner ring of the upper annular seat.

[0016] In one embodiment, the bottom surface of the first limit is provided with an annular groove, the bottom end of the second magnetic coupling is provided with a snap ring, the cross-sectional area of the annular groove is smaller than that of the snap ring in normal state, when the snap ring is inserted into the annular groove, the inner ring of the upper annular seat is extruded to form an elastic protrusion.

[0017] In one embodiment, the bottom surface of the middle connecting seat is provided with a second limit groove, the top surface of the lower annular seat is provided with a third limit groove, the second limit groove and the third limit groove are both provided in annular structure, the cross section of the second limit groove and the third limit groove are both provided in spherical structure, the spherical center of the cross section of the second limit groove is located above the lower surface of the middle connecting seat, the spherical center of the cross section of the third limit groove is located below the upper surface of the middle connecting seat, the fifth limit ring is clamped in the second limit groove and the third limit groove, and the two fifth limit rings are connected by a connecting ring provided in annular structure.

[0018] In one embodiment, the inner ring of the first fixed seat is provided with a fixed protrusion, the outer ring of the lower annular seat is provided with a fourth limit groove provided in annular structure, and the fixed protrusion is clamped in the fourth limit groove.

[0019] In one embodiment, the glass pressing plate comprises an inner pressing plate and an outer pressing plate, the inner pressing plate is fixed at one end of the sight glass long tube away from the vacuum side, the outer pressing plate is installed on the inner pressing plate by a first fastener, and the sight glass is clamped and fixed between the inner pressing plate and the outer pressing plate.

[0020] The movable baffle assembly for the vacuum observation window is used in the following way: when the hand wheel is rotated to drive the first magnetic coupling to rotate, the first magnetic coupling can drive the second magnetic coupling to rotate synchronously, when the second magnetic coupling rotates, the movable baffle is synchronously driven to rotate, so that the worker can observe the inside of the vacuum side through the sight glass. The component adopts magnetic transmission, the vacuum side and the atmospheric side do not need to be connected, the first magnetic coupling is in the atmospheric side and the second magnetic coupling is in the vacuum side during operation, the two are separated by the sealing seat, the whole structure does not have dynamic sealing through magnetic transmission, so as to solve the problem of vacuum leakage caused by the movement of the baffle. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the present application or prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings described below are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0022] Figure 1A perspective view of the movable baffle assembly according to the present application is provided.

[0023] Figure 2 A cross-sectional view of the movable baffle assembly according to the present application is provided.

[0024] Figure 3 A partial cross-sectional view of the movable baffle assembly according to the present application is provided.

[0025] Figure 4 A partial cross-sectional view of the movable baffle assembly according to the present application is provided.

[0026] Figure 5 A structure view of the adjusting seat according to the present application is provided.

[0027] Reference signs:

[0028] 110, long mirror tube; 120, short mirror tube; 200, mirror glass; 210, first clamping groove; 300, glass pressing plate; 310, inner pressing plate; 311, first limiting ring; 3111, first mounting hole; 312, third limiting ring; 3121, second clamping groove; 320, outer pressing plate; 321, second limiting ring; 3211, second mounting hole; 322, fourth limiting ring; 3221, third clamping groove; 3222, inclined surface; 330, first fastener; 400, sealing seat; 510, first magnetic coupling; 520, second magnetic coupling; 521, clamping ring; 600, hand wheel; 710, first fixed seat; 711, threaded hole; 712, fourth clamping groove; 720, second fixed seat; 721, through hole; 722, fifth clamping groove; 730, third fixed seat; 731, counterbore; 740, second sealing ring; 750, second fastener; 760, fixing protrusion; 800, adjusting seat; 810, upper annular seat; 811, first limiting groove; 812, annular groove; 813, elastic protrusion; 820, middle connecting seat; 821, second limiting groove; 830, lower annular seat; 831, third limiting groove; 832, fourth limiting groove; 840, fifth limiting ring; 850, connecting ring; 910, connecting rod; 920, movable baffle. DETAILED DESCRIPTION

[0029] In order to make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the following will be combined with the accompanying drawings of the embodiments of the present application to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present application.

[0030] The application is described below Figures 1 to 5 An active shutter 920 assembly for a vacuum sight glass is described.

[0031] As shown in Figure 1 and Figure 2 In one embodiment, an active shutter 920 assembly for a vacuum sight glass includes a glass pressing plate 300, a sealing seat 400, a hand wheel 600, and an active shutter 920. The glass pressing plate 300 is installed at one end of a sight glass long tube 110 and is used to fix a sight glass 200. The other end of the sight glass long tube 110 is a vacuum side. The sealing seat 400 is installed at the upper end of a sight glass short tube 120. The sight glass short tube 120 is in communication with the sight glass long tube 110. The sealing seat 400 is provided with a first magnetic coupling 510 and a second magnetic coupling 520. The first magnetic coupling 510 and the second magnetic coupling 520 are respectively located on the upper half and the lower half of the sealing seat 400 and are not in communication with each other. The hand wheel 600 is installed in the first magnetic coupling 510 and is used to drive the first magnetic coupling 510 to rotate. The active shutter 920 is installed on the vacuum side of the sight glass long tube 110 and is connected to the second magnetic coupling 520 through a connecting rod 910.

[0032] The active shutter 920 assembly for the vacuum sight glass described above is used by rotating the hand wheel 600 to drive the first magnetic coupling 510 to rotate. The first magnetic coupling 510 can drive the second magnetic coupling 520 to rotate synchronously after the first magnetic coupling 510 rotates. When the second magnetic coupling 520 rotates, the active shutter 920 is synchronously driven to rotate, so that the worker can observe the inside of the vacuum side through the sight glass 200. The assembly uses magnetic transmission. The vacuum side and the atmospheric side do not need to be connected. When the first magnetic coupling 510 is in the atmospheric side and the second magnetic coupling 520 is in the vacuum side, the two are separated by the sealing seat 400. The whole structure has no dynamic seal through magnetic transmission, thereby solving the problem of vacuum leakage caused by the shutter action.

[0033] As shown in Figure 3 In one embodiment, the sealing seat 400 includes a first fixed seat 710, a second fixed seat 720, and a third fixed seat 730. The first fixed seat 710, the second fixed seat 720, and the third fixed seat 730 are sequentially arranged from bottom to top. The first magnetic coupling 510 is installed in the third fixed seat 730. The second magnetic coupling 520 is installed in the second fixed seat 720. The first fixed seat 710 is provided with an adjusting seat 800. The adjusting seat 800 is attached to the second magnetic coupling and is used to isolate the third fixed seat 730 from the vacuum side.

[0034] Specifically, the upper surface of the first fixing seat 710 is provided with a plurality of threaded holes 711 in a ring array, the upper surface of the second fixing seat 720 is provided with a plurality of through holes 721 in a ring array, and the upper surface of the third fixing seat 730 is provided with a plurality of counterbores 731 in a ring array. The counterbores 731, the through holes 721 and the threaded holes 711 correspond one by one, and a second fastener 750 is installed in each counterbore 731. The bottom end of the second fastener 750 is installed in the threaded hole 711.

[0035] In one embodiment, the upper surface of the first fixing seat 710 is provided with a fourth clamping groove 712, and the lower surface of the second fixing seat 720 is provided with a fifth clamping groove 722. The fourth clamping groove 712 and the fifth clamping groove 722 are both provided in a ring structure, and the second sealing ring 740 is arranged between the fourth clamping groove 712 and the fifth clamping groove 722.

[0036] As shown in Figure 5 Further, the adjusting seat 800 includes an upper ring seat 810, a middle connecting seat 820 and a lower ring seat 830. The upper ring seat 810, the middle connecting seat 820 and the lower ring seat 830 are connected in sequence from top to bottom. The outer diameter of the middle connecting seat 820 is greater than the outer diameter of the lower ring seat 830 and equal to the outer diameter of the upper ring seat 810. The inner diameter of the middle connecting seat 820 is greater than the inner diameter of the lower ring seat 830 and less than the inner diameter of the upper ring seat 810.

[0037] Specifically, according to the arrangement of the inner and outer diameters of the upper ring seat 810, the middle connecting seat 820 and the lower ring seat 830, the connecting rod 910 can be clamped only in the inner circle of the upper ring seat 810 without contacting the middle connecting seat 820 and the lower ring seat 830, so that the vacuum side is blocked at the position of the inner circle of the upper ring seat 810.

[0038] In one embodiment, the upper surface of the upper ring seat 810 is provided with a first limiting groove 811, and the bottom end of the second magnetic coupling 520 is installed in the first limiting groove 811. The upper ring seat 810 and the middle connecting seat 820 are rotationally connected, and the surface of the connecting rod 910 abuts against the inner circle of the upper ring seat 810.

[0039] Specifically, the bottom surface of the first limiting groove 812 is provided with a ring groove 812, and the bottom end of the second magnetic coupling 520 is provided with a snap ring 521. Under normal circumstances, the cross-sectional area of the ring groove 812 is smaller than that of the snap ring 521. When the snap ring 521 is inserted into the ring groove 812, the inner circle of the upper ring seat 810 is extruded to form an elastic protrusion 813.

[0040] Wherein, the upper annular seat 810 does not produce elastic protrusion 813 in normal state, because the inner space of the annular groove 812 is smaller than the occupied space of the clamping ring 521, when the clamping ring 521 is clamped into the annular groove 812, the upper annular seat 810 will be deformed, and because the inner circle of the upper annular seat 810 is small in volume, the inner circle of the upper annular seat 810 will be deformed to form elastic protrusion 813 to tightly fit the connecting rod 910.

[0041] In one embodiment, the bottom surface of the middle connecting seat 820 is provided with a second limiting groove 821, and the top surface of the lower annular seat 830 is provided with a third limiting groove 831, both of which are annular structures, and the cross sections of the second limiting groove 821 and the third limiting groove 831 are spherical structures, the spherical center of the cross section of the second limiting groove 821 is above the lower surface of the middle connecting seat 820, and the spherical center of the cross section of the third limiting groove 831 is below the upper surface of the middle connecting seat 820, and the fifth limiting ring 840 is clamped in the second limiting groove 821 and the third limiting groove 831, and the two fifth limiting rings 840 are connected by the annular connecting ring 850.

[0042] Specifically, when connecting the middle connecting seat 820 and the lower annular seat 830, only need to clamp the two limiting rings in the second limiting groove 821 and the third limiting groove 831 respectively, and after installation, the two are rotationally connected, and because the two are connected by the fifth limiting ring 840 and the connecting ring 850, the middle connecting seat 820 and the lower annular seat 830 are tightly connected, and there is no air leakage, so as to ensure that the vacuum side inner space is always the same, and the pressure change is not produced.

[0043] In one embodiment, the inner circle of the first fixed seat 710 is provided with a fixed protrusion 760, and the outer circle of the lower annular seat 830 is provided with a fourth limiting groove 832 in an annular structure, and the fixed protrusion 760 is clamped in the fourth limiting groove 832.

[0044] Further, as shown in Figure 4 In one embodiment, the glass pressing plate 300 includes an inner pressing plate 310 and an outer pressing plate 320, the inner pressing plate 310 is fixed at one end of the sight glass long tube 110 away from the vacuum side, and the outer pressing plate 320 is installed on the inner pressing plate 310 by the first fastener 330, and the sight glass 200 is clamped and fixed between the inner pressing plate 310 and the outer pressing plate 320.

[0045] Specifically, the inner pressing plate 310 comprises a first limiting ring 311 and a third limiting ring 312, the end face of the first limiting ring 311 is provided with a plurality of first mounting holes 3111 arranged in an annular array, the end face of the third limiting ring 312 is provided with a second clamping groove 3121 arranged in an annular structure, the outer pressing plate 320 comprises a second limiting ring 321 and a fourth limiting ring 322, the end face of the second limiting ring 321 is provided with a plurality of second mounting holes 3211 arranged in an annular array, the end face of the fourth limiting ring 322 is provided with a third clamping groove 3221 arranged in an annular structure, the two faces of the mirror glass 200 are both provided with a first clamping groove 210 arranged in an annular structure, the first clamping groove 210 and the second clamping groove 3121, and the first clamping groove 210 and the third clamping groove 3221 are all clamped with a first sealing ring, the first mounting hole 3111 and the second mounting hole 3211 are provided with a first fastener 330, and the inner ring of the fourth limiting ring 322 and the end face away from the mirror glass 200 are provided with an inclined surface 3222.

[0046] The technical features of the above-described embodiments can be combined in any manner. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described, but as long as the combinations of the technical features do not exist contradictions, they should be considered as the scope of the present disclosure.

[0047] The above-described embodiments only express several implementation manners of the present disclosure, and the description is relatively specific and detailed, but it should not be understood as a limitation on the scope of the present disclosure. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present disclosure, a number of modifications and improvements can be made, which are all within the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be subject to the appended claims.

Claims

1. A movable baffle assembly for a vacuum observation window, characterized in that, include: A glass pressure plate is installed at one end of the sight glass tube to fix the sight glass, and the other end of the sight glass tube is a vacuum side; A sealing seat is installed at the upper end of the short tube of the sight glass, which is connected to the long tube of the sight glass. A first magnetic coupling and a second magnetic coupling are provided inside the sealing seat. The first magnetic coupling and the second magnetic coupling are located on the upper half and the lower half of the sealing seat, respectively, and the upper half and the lower half of the sealing seat are not interconnected. A handwheel, installed inside the first magnetic coupling, is used to drive the first magnetic coupling to rotate; A movable baffle is installed on the vacuum side of the sight glass tube, and the movable baffle is connected to the second magnetic coupling via a connecting rod.

2. The movable baffle assembly for a vacuum observation window according to claim 1, characterized in that, The sealing seat includes a first fixed seat, a second fixed seat, and a third fixed seat; the first fixed seat, the second fixed seat, and the third fixed seat are arranged sequentially from bottom to top; the first magnetic coupling is installed in the third fixed seat; the second magnetic coupling is installed in the second fixed seat; an adjusting seat is provided in the first fixed seat; the adjusting seat is in contact with the second magnetic coupling and is used to isolate the third fixed seat from the vacuum side.

3. The movable baffle assembly for a vacuum observation window according to claim 2, characterized in that, The upper surface of the first fixing base has multiple screw holes arranged in a ring array. The upper surface of the second fixing base has multiple through holes arranged in a ring array. The upper surface of the third fixing base has multiple countersunk holes arranged in a ring array. The countersunk holes, through holes and screw holes correspond one-to-one. A second fastener is installed in each countersunk hole. The bottom end of the second fastener is installed in the screw hole.

4. The movable baffle assembly for a vacuum observation window according to claim 3, characterized in that, The upper surface of the first fixing seat is provided with a fourth slot, and the lower surface of the second fixing seat is provided with a fifth slot. Both the fourth and fifth slots are configured as annular structures, and a second sealing ring is provided between the fourth and fifth slots.

5. The movable baffle assembly for a vacuum observation window according to claim 4, characterized in that, The adjusting seat includes an upper annular seat, a middle connecting seat, and a lower annular seat; the upper annular seat, the middle connecting seat, and the lower annular seat are connected sequentially from top to bottom. The outer diameter of the middle connecting seat is larger than the outer diameter of the lower annular seat and equal to the outer diameter of the upper annular seat. The inner diameter of the middle connecting seat is larger than the inner diameter of the lower annular seat and smaller than the inner diameter of the upper annular seat.

6. The movable baffle assembly for a vacuum observation window according to claim 5, characterized in that, The upper surface of the upper annular seat is provided with a first limiting groove, the bottom end of the second magnetic coupling is installed in the first limiting groove, the upper annular seat and the middle connecting seat are rotatably connected, and the surface of the connecting rod abuts against the inner ring of the upper annular seat.

7. The movable baffle assembly for a vacuum observation window according to claim 6, characterized in that, The bottom surface of the first limiting device is provided with an annular groove, and the bottom end of the second magnetic coupling is provided with a retaining ring. Under normal conditions, the cross-sectional area of ​​the annular groove is smaller than the cross-sectional area of ​​the retaining ring. When the retaining ring is inserted into the annular groove, the inner ring of the upper annular seat is squeezed, forming an elastic protrusion.

8. The movable baffle assembly for a vacuum observation window according to claim 7, characterized in that, The bottom surface of the middle connecting seat is provided with a second limiting groove, and the top surface of the lower annular seat is provided with a third limiting groove. Both the second limiting groove and the third limiting groove are set as annular structures. The cross-sections of the second limiting groove and the third limiting groove are both set as spherical structures. The center of the cross-section of the second limiting groove is located above the lower surface of the middle connecting seat, and the center of the cross-section of the third limiting groove is located below the upper surface of the middle connecting seat. A fifth limiting ring is engaged in both the second limiting groove and the third limiting groove. The two fifth limiting rings are connected by a connecting ring that is set in annular shape.

9. The movable baffle assembly for a vacuum observation window according to claim 8, characterized in that, The inner ring of the first fixed seat is provided with a fixed protrusion, and the outer ring of the lower annular seat is provided with a fourth limiting groove in an annular structure, and the fixed protrusion is engaged in the fourth limiting groove.

10. The movable baffle assembly for a vacuum observation window according to claim 9, characterized in that, The glass pressure plate includes an inner pressure plate and an outer pressure plate. The inner pressure plate is fixed to the end of the sight glass tube away from the vacuum side. The outer pressure plate is installed on the inner pressure plate by a first fastener. The sight glass is clamped and fixed between the inner pressure plate and the outer pressure plate.

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