Micro-rotary platform with self-compensation of rotation center offset

Abstract

The application discloses a micro-rotary platform with self-compensation of rotation center offset, and belongs to the technical field of micro / nano electromechanical systems. The micro-rotary platform comprises a positioning platform and a flexible mechanism; the flexible mechanism is arranged below the positioning platform; the flexible mechanism comprises two center-symmetrical branch chains; the branch chain comprises a primary lever displacement amplification mechanism, a force transmission mechanism and a secondary lever displacement amplification mechanism which are sequentially connected; the force transmission mechanism comprises an inclined first rigid beam; the secondary lever displacement amplification mechanism comprises a first flexible hinge which is a flexible beam and is fixedly constrained at both ends; when the primary lever displacement amplification mechanism is driven in a positive direction along the Y axis, the first rigid beam cooperates with the first flexible hinge to generate a force in a negative direction along the X axis and a force in a positive direction along the Y axis; the force in the negative direction along the X axis can generate displacement along the X axis to compensate for the offset of the rotation center; interaction forces generated at the end effector point and the positioning platform are avoided, and the positioning and measurement accuracy of a workpiece are improved.

Description

Technical Field

[0001] This invention relates to the field of micro / nano electromechanical systems technology, and in particular to a micro-rotation platform with self-compensation for rotation center offset. Background Technology

[0002] In current micro-motion rotary platforms, the rotational motion of the positioning platform (on which the mechanism to be positioned or the part to be measured is often coupled with other translational motions, causing the rotation center of the positioning platform to shift. That is, the positioning platform cannot rotate around its own center position, resulting in low rotational accuracy of the positioning platform, which in turn affects the positioning accuracy of the mechanism to be positioned or the measurement accuracy of the part to be measured.

[0003] To address the aforementioned issues, a high-rigidity platform is typically added to the end effector of the flexible amplification mechanism in the micro-motion rotary platform to resist the rotation center offset. However, this increases the load on the flexible amplification mechanism and causes an interaction force between the end effector point and the positioning platform, making it impossible to guarantee the horizontal placement of the mechanism to be positioned or the part to be measured on the positioning platform, thus affecting the positioning and measurement accuracy. Summary of the Invention

[0004] The purpose of this invention is to propose a micro-motion rotary platform with self-compensation for rotation center offset, so that the offset of the rotation center of the positioning platform is close to zero, avoiding convex or concave deformation of the positioning platform, thereby improving the positioning and measurement accuracy of the workpiece.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A micro-motion rotary platform with self-compensation for rotation center offset includes:

[0007] A positioning platform on which a workpiece to be positioned or measured is placed;

[0008] A flexible mechanism is located below the positioning platform. The flexible mechanism includes two centrally symmetrical branches. Each branch includes a first-stage lever displacement amplification mechanism, a force transmission mechanism, and a second-stage lever displacement amplification mechanism connected in sequence. The force transmission mechanism includes a first rigid beam that is inclined. The second-stage lever displacement amplification mechanism includes a first flexible hinge that is a flexible beam with fixed constraints at both ends. When the first-stage lever displacement amplification mechanism is driven along the positive Y-axis, the first rigid beam and the first flexible hinge cooperate to generate forces along the negative X-axis and the positive Y-axis. The force along the positive Y-axis can drive the positioning platform to rotate around the rotation center, and the force along the negative X-axis can generate displacement along the X-axis to compensate for the offset of the rotation center.

[0009] As an optional solution, in one of the branches, there are multiple primary lever displacement amplification mechanisms, which are connected in series. The primary lever displacement amplification mechanism at the end is connected to the secondary lever displacement amplification mechanism through the force transmission mechanism.

[0010] As an alternative, the two branches are arranged in a parallel structure.

[0011] As an optional feature, the flexible mechanism further includes:

[0012] A micro-displacement actuator is located between the two branches, and the micro-displacement actuator is used to simultaneously act on the first-stage lever displacement amplification mechanism in the two branches along the positive and negative Y-axis directions.

[0013] Alternatively, the center of the micro-displacement actuator, the rotation center of the positioning platform, and the center of the positioning platform coincide.

[0014] As an optional solution, the branch also includes:

[0015] A flexible input guide mechanism with a leaf spring is provided between the micro-displacement actuator and the first-stage lever displacement amplification mechanism. The flexible input guide mechanism with a leaf spring is used to guide the input direction of the force exerted by the micro-displacement actuator along the Y-axis to a reference linear input direction.

[0016] As an optional solution, the primary lever displacement amplification mechanism includes:

[0017] First fixed end;

[0018] The second rigid beam and the second flexible hinge are respectively connected at opposite ends to the first fixed end and the second rigid beam. The first fixed end is the first fulcrum and the second rigid beam is the first lever arm.

[0019] As an optional solution, the force transmission mechanism further includes:

[0020] The third flexible hinge has its two ends connected to one end of the second rigid beam and one end of the first rigid beam, respectively.

[0021] A fourth flexible hinge, one end of which is connected to the other end of the first rigid beam.

[0022] As an optional solution, the secondary lever displacement amplification mechanism further includes:

[0023] A fifth flexible hinge, one end of which is connected to the middle of the first flexible hinge, and the two opposite ends of the first flexible hinge are the second fulcrums;

[0024] The third rigid beam is the second lever arm. The other end of the fourth flexible hinge is connected to the third rigid beam. The other end of the fifth flexible hinge is connected to one end of the third rigid beam. The other end of the third rigid beam is a free end. The free end of the third rigid beam is connected to the positioning platform to drive the positioning platform to rotate.

[0025] As an optional solution, the free end of the third rigid beam is provided with a positioning hole, and the fastener is connected to the positioning platform through the positioning hole so that the fastener drives the positioning platform to rotate.

[0026] The beneficial effects of this invention are as follows:

[0027] The micro-motion rotary platform with self-compensation for rotation center offset in this invention comprises a branch consisting of a first-stage lever displacement amplification mechanism, a force transmission mechanism, and a second-stage lever displacement amplification mechanism connected in sequence. When the first-stage lever displacement amplification mechanism in one of the branches is driven along the positive Y-axis, the amplification is transmitted to the second-stage lever displacement amplification mechanism via the lever transmission mechanism. The first rigid beam in the force transmission mechanism acts as a connector, and its rigidity is high enough to prevent self-deformation or its self-deformation is negligible. That is, the interaction between the inclined first rigid beam and the first flexible hinges with fixed constraints at both ends can generate a displacement amplification along the negative X-axis and... A force along the positive Y-axis can drive the positioning platform to rotate around its rotation center. A force along the negative X-axis can generate a displacement along the negative X-axis. Simultaneously, another branch can generate a displacement along the positive X-axis. These two displacements along the X-axis can compensate for the offset of the rotation center, making the offset of the positioning platform's rotation center close to zero. This achieves a micro-motion rotation platform with a zero-crosstalk topology and self-compensation for rotation center offset. It does not increase the load on the secondary lever displacement amplification mechanism and avoids upward or downward deformation. It can better ensure the horizontal placement of the workpiece on the positioning platform, improving the positioning and measurement accuracy of the workpiece. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the micro-motion rotation platform with self-compensation for rotation center offset provided by the present invention;

[0029] Figure 2 This is a schematic diagram of the assembly structure of the flexible mechanism provided by the present invention on the frame;

[0030] Figure 3 This is a top view of the micro-motion rotation platform with self-compensation for rotation center offset provided by the present invention;

[0031] Figure 4 This is a schematic diagram illustrating the function of the flexible mechanism provided by the present invention.

[0032] Explanation of reference numerals in the attached figures:

[0033] 10-Rack;

[0034] 1-Positioning platform; 11-Rotation center;

[0035] 2-Flexible mechanism; 20-Branch; 21-First-stage lever displacement amplification mechanism; 211-First fixed end; 212-Second rigid beam; 213-Second flexible hinge; 22-Force transmission mechanism; 221-First rigid beam; 222-Third flexible hinge; 223-Fourth flexible hinge; 23-Second-stage lever displacement amplification mechanism; 231-First flexible hinge; 232-Fifth flexible hinge; 233-Third rigid beam; 2331-Positioning hole; 24-Leaf spring flexible input guide mechanism; 25-Second fixed end; 26-Mounting hole; 27-Micro-displacement actuator; 28-Fastener; 29-Bolt. Detailed Implementation

[0036] All features disclosed in this specification, or all steps in all disclosed methods or processes, may be combined in any way, except for mutually exclusive features and / or steps.

[0037] Any feature disclosed in this specification, unless specifically stated otherwise, may be replaced by other equivalent or similar features. That is, unless specifically stated otherwise, each feature is merely one example of a series of equivalent or similar features. Throughout this specification, the same reference numerals indicate the same elements.

[0038] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0039] This embodiment proposes a micro-motion rotary platform with self-compensation for rotation center offset. This micro-motion rotary platform with self-compensation for rotation center offset can ensure high-precision positioning of the workpiece to be positioned and high-precision measurement of the workpiece to be measured. It can also ensure the balance of the interaction force between the end effector and the positioning platform and the uniformity of the assembly. At the same time, it can realize a variety of large-stroke rotational motion ranges according to the requirements to meet the actual rotational working conditions. That is, this micro-motion rotary platform with self-compensation for rotation center offset can compensate for the offset of the rotation center, has a compact structure, and can realize large-stroke rotational motion.

[0040] Specifically, such as Figures 1 to 4As shown, a micro-motion rotary platform with self-compensation for rotation center offset includes a positioning platform 1 and a flexible mechanism 2. The positioning platform 1 is used to place the workpiece to be positioned or measured. The flexible mechanism 2 is located below the positioning platform 1 and is used to drive the positioning platform 1 to rotate. The flexible mechanism 2 includes two centrally symmetrical branches 20. Each branch 20 includes a first-stage lever displacement amplification mechanism 21, a force transmission mechanism 22, and a second-stage lever displacement amplification mechanism 23 connected in sequence. The force transmission mechanism 22 includes a first rigid beam 221 set at an incline. The second-stage lever displacement amplification mechanism 23 includes a first flexible hinge 231 with both ends fixed and constrained, forming a flexible beam. When the first-stage lever displacement amplification mechanism 21 is driven along the positive Y-axis, the first rigid beam 221 and the first flexible hinge 231 cooperate to generate forces along the negative X-axis and the positive Y-axis. The force along the positive Y-axis can drive the positioning platform 1 to rotate around the rotation center 11, and the force along the negative X-axis can generate displacement along the X-axis to compensate for the offset of the rotation center 11. Specifically, the positioning platform 1 is a rigid platform.

[0041] When the first-stage lever displacement amplification mechanism 21 in one of the branches 20 is driven along the positive Y-axis, the first-stage lever displacement amplification mechanism 21 is amplified by the lever and then transmitted to the second-stage lever displacement amplification mechanism 23 through the force transmission mechanism 22. The first rigid beam 221 in the force transmission mechanism 22 plays a connecting role, and the rigidity of the first rigid beam 221 is large and will not self-deform, or the self-deformation of the first rigid beam 221 is extremely small and negligible.

[0042] Compared with the prior art, the micro-motion rotary platform with self-compensation for rotation center offset in this embodiment changes the specific configuration and transmission method of the force transmission mechanism 22 and the secondary lever displacement amplification mechanism 23. Through the mutual cooperation between the inclined first rigid beam 221 and the first flexible hinge 231 with fixed constraints at both ends, forces are generated along the negative X-axis and the positive Y-axis. The force along the positive Y-axis can drive the positioning platform 1 to rotate around the rotation center 11, and the force along the negative X-axis can generate displacement along the negative X-axis. At the same time, another branch 20 can generate displacement along the positive X-axis. The offset of the rotation center 11 can be compensated by the two displacements along the X-axis, so that the offset of the rotation center 11 of the positioning platform 1 is close to zero. This achieves a micro-motion rotary platform with self-compensation for rotation center offset with zero crosstalk topology, without increasing the load on the secondary lever displacement amplification mechanism 23, and avoiding the upward or downward deformation of the positioning platform 1. This can better ensure the horizontal placement of the workpiece on the positioning platform 1 and improve the positioning and measurement accuracy of the workpiece. Specifically, the rotation direction of positioning platform 1 is as follows: Figure 4 As shown by arrow A in the diagram, and the angular displacement of the rotation is... Figure 4 The angle θ shown is given.

[0043] Furthermore, in one branch 20, there are multiple first-stage lever displacement amplification mechanisms 21, which are connected in series. The last first-stage lever displacement amplification mechanism 21 is connected to the second-stage lever displacement amplification mechanism 23 through a force transmission mechanism 22. That is, one first-stage lever displacement amplification mechanism 21 and the second-stage lever displacement amplification mechanism 23 can form a second-stage amplification mechanism, two first-stage lever displacement amplification mechanisms 21 and the second-stage lever displacement amplification mechanism 23 can form a third-stage amplification mechanism, and so on. Here, the specific number of first-stage lever displacement amplification mechanisms 21 and the actual number of stages of the amplification mechanism formed are not limited.

[0044] By setting multiple first-level lever displacement amplification mechanisms 21, the entire flexible mechanism 2 design can be extended to a third-level amplification mechanism or even more levels of amplification mechanism through the series connection between the multiple first-level lever displacement amplification mechanisms 21, thereby meeting the actual large stroke working conditions and realizing the various large stroke movement ranges of the positioning platform 1.

[0045] Specifically, such as Figures 2 to 4 As shown, the two branches 20 are arranged in parallel. On the one hand, this makes the arrangement of the two branches 20 more reasonable and compact, improving the overall structural compactness of the flexible mechanism 2. On the other hand, the parallel arrangement of the two branches 20 can improve the assembly uniformity of the entire flexible mechanism 2, ensuring that the deformation on both sides of the positioning platform 1 is more balanced, so as to better ensure the horizontal placement of the workpiece by the positioning platform 1.

[0046] Furthermore, such as Figure 1 and Figure 2 As shown, the flexible mechanism 2 also includes a micro-displacement actuator 27, which is located between two parallel branches 20. The micro-displacement actuator 27 is used to simultaneously act on the first-stage lever displacement amplification mechanism 21 in the two branches 20 along the positive and negative Y-axis directions.

[0047] like Figure 1 and Figure 2 As shown, by nesting the micro-displacement actuator 27 between the two branches 20, the overall structural compactness of the flexible mechanism 2 can be improved, as well as the assembly uniformity and deformation balance. Simultaneously, by setting one micro-displacement actuator 27 to drive both branches 20, the entire control process is simplified and convenient, and the redundancy of the micro-displacement actuator 27 is avoided. The micro-displacement actuator 27 can be a piezoelectric ceramic actuator, a voice coil motor, or a micro-displacement actuator with other structures.

[0048] Specifically, the center of the micro-displacement actuator 27, the rotation center 11 of the positioning platform 1, and the center of the positioning platform 1 coincide to ensure that the rotation center 11 is in a relatively ideal position and to avoid the rotation center 11 from shifting.

[0049] Furthermore, such as Figure 3 As shown, the branch 20 also includes a leaf spring flexible input guide mechanism 24, which is located between the micro-displacement actuator 27 and the first-stage lever displacement amplification mechanism 21. The leaf spring flexible input guide mechanism 24 is used to guide the input direction of the force exerted by the micro-displacement actuator 27 along the Y-axis to the reference linear input direction.

[0050] By setting up the flexible input guide mechanism 24 with a leaf spring, the input end of the first-stage lever displacement amplification mechanism 21 does not use the direct driving force generated by the micro-displacement actuator 27 for input. Instead, it uses elastic deformation to replace mechanical contact after passing through the flexible input guide mechanism 24 with a leaf spring. This achieves physical-level motion filtering of the direct driving force generated by the micro-displacement actuator 27, thereby ensuring that the input force is applied to the first-stage lever displacement amplification mechanism 21 in the reference linear input direction. This ensures high accuracy in the positive Y-axis direction, thereby suppressing parasitic motion and improving the anti-interference capability of the entire flexible mechanism 2.

[0051] The flexible input guide mechanism 24 for the blade spring can adopt a flexible input guide structure commonly used in the prior art. Here, the structure and working principle of the flexible input guide mechanism 24 for the blade spring will not be described in detail.

[0052] Furthermore, such as Figures 2 to 4 As shown, the first-stage lever displacement amplification mechanism 21 includes a first fixed end 211, a second rigid beam 212, and a second flexible hinge 213; wherein, the first fixed end 211 is fixedly disposed; the two opposite ends of the second flexible hinge 213 are respectively connected to the first fixed end 211 and the second rigid beam 212, so as to amplify the lever by using the first fixed end 211 as the first fulcrum and the second rigid beam 212 as the first lever arm.

[0053] Specifically, such as Figures 2 to 4 As shown, the force transmission mechanism 22 also includes a third flexible hinge 222 and a fourth flexible hinge 223; wherein, the two ends of the third flexible hinge 222 are respectively connected to one end of the second rigid beam 212 and the first rigid beam 221; one end of the fourth flexible hinge 223 is connected to the other end of the first rigid beam 221, so that the inclined first rigid beam 221 plays a connecting role.

[0054] Furthermore, such as Figures 2 to 4As shown, the secondary lever displacement amplification mechanism 23 also includes a fifth flexible hinge 232 and a third rigid beam 233; wherein, one end of the fifth flexible hinge 232 is connected to the middle of the first flexible hinge 231, the other end of the fourth flexible hinge 223 is connected to the third rigid beam 233, the other end of the fifth flexible hinge 232 is connected to one end of the third rigid beam 233, the other end of the third rigid beam 233 is a free end, and the free end of the third rigid beam 233 is connected to the positioning platform 1 to drive the positioning platform 1 to rotate.

[0055] Specifically, the angular displacement transmitted by the fourth flexible hinge 223 acts on the third rigid beam 233, so that the two ends of the first flexible hinge 231 serve as the second fulcrum and the third rigid beam 233 serves as the second lever arm, so that the amplified angular displacement is transmitted to the positioning platform 1 through the free end of the third rigid beam 233, so that the positioning platform 1 rotates.

[0056] It is worth noting that, such as Figures 2 to 4 As shown, since the two branches 20 have a centrally symmetrical structure, when rotational motion occurs, the slight offset of the rotation center 11 caused by the rotation of the third rigid beam 233 under the action of the rigid positioning platform 1 can be compensated by the first flexible hinge 231. Furthermore, since the first flexible hinge 231 is a flexible beam, it can ensure that the positioning platform 1 will not have convex or concave deformation. Therefore, under the double compensation, the offset of the rotation center 11 of the positioning platform 1 can be made closer to zero, so as to obtain a pure rotational displacement output with extremely low motion coupling.

[0057] Furthermore, such as Figures 1 to 4 As shown, a positioning hole 2331 is provided at the free end of the third rigid beam 233. The fastener 28 is connected to the positioning platform 1 through the positioning hole 2331. That is, the positioning platform 1 is fixedly connected by the fastener 28 through the positioning hole 2331 on the third rigid beam 233, so that the fastener 28 drives the positioning platform 1 to rotate. Specifically, the fastener 28 can be a fastening screw.

[0058] It is worth noting that a mathematical model of the flexible mechanism 2 can be established through flexibility modeling. This model can then be used for multi-objective parameter optimization design, including rotation center offset and output angular displacement. Through this optimization, the optimal dimensional parameters of the flexible mechanism 2 under the target conditions can be obtained, thus better ensuring that the offset of the rotation center 11 of the positioning platform 1 is close to zero. Finally, when the positioning platform 1 rotates, the slight deviation between the rotation center 11 of the positioning platform 1 and the flexible mechanism 2 is compensated again by the first flexible hinge 231 for the offset of the rotation center 11 of the positioning hole 2331 at the end effector point of the flexible mechanism 2, making the offset of the rotation center 11 even closer to zero.

[0059] Specifically, such as Figure 2 and Figure 4 As shown, the branch 20 also includes a fixed second fixed end 25, and the opposite ends of the leaf spring flexible input guide mechanism 24 are respectively connected to the first fixed end 211 and the second fixed end 25; and the opposite ends of the first flexible hinge 231 are respectively connected to the two ends of the second fixed end 25, so that both ends of the first flexible hinge 231 are fixed constraints.

[0060] Specifically, such as Figure 2 and Figure 3 As shown, both the first fixed end 211 and the second fixed end 25 can be fixed to the frame 10 through the mounting holes 26. The frame 10 is fixedly installed on the ground or a workbench. In actual installation, bolts 29 can be used to fix either the first fixed end 211 or the second fixed end 25 to the frame 10 through the mounting holes 26, making the installation and disassembly of the two fixed ends to the frame 10 simple and convenient. The specific structure of the frame 10 is not limited here, as long as it can provide stable support and allow for installation of the micro-motion rotary platform with self-compensation for rotation center offset.

[0061] The specific working process of the micro-motion rotary platform with self-compensation for rotation center offset in this embodiment is as follows, taking the upper left branch 20 as an example:

[0062] First, such as Figure 2 and Figure 3 As shown, the first fixed end 211 and the second fixed end 25 are both fixed to the frame 10 by bolts 29, and the positioning platform 1 is fixedly connected to the third rigid beam 233 by fasteners 28. Then, the micro-displacement actuator 27 directly inputs force F to the leaf spring flexible input guide mechanism 24, so that F is guided to switch to the reference linear input direction under the action of the leaf spring flexible input guide mechanism 24, and the force in the reference linear input direction is transmitted to the first-stage lever displacement amplification mechanism 21. In the first-stage lever displacement amplification mechanism 21, the first fixed end 211 is used as the first fulcrum, and the second rigid beam 212 is used as the first lever arm for lever amplification.

[0063] Then, the angular displacement amplified by the first-stage lever displacement amplification mechanism 21 is transmitted to the second-stage lever displacement amplification mechanism 23 through the force transmission mechanism 22; in the second-stage lever displacement amplification mechanism 23, the opposite ends of the first flexible hinge 231 serve as the second fulcrum, and the third rigid beam 233 serves as the second lever arm for lever amplification; subsequently, as Figures 1 to 4 As shown, the angular displacement amplified by the secondary lever displacement amplification mechanism 23 is transmitted to the positioning platform 1 through the positioning hole 2331 on the third rigid beam 233 and the fastener 28, causing the positioning platform 1 to rotate.

[0064] The micro-motion rotary platform with self-compensation for rotation center offset in this embodiment designs the first flexible hinge 231 as a flexible beam with fixed constraints at both ends, and the first rigid beam 221 as a non-perpendicular structure, so that the first rigid beam 221 forms angles with the second rigid beam 212 and the third rigid beam 233 respectively. This allows the force transmission mechanism 22, which is in a non-perpendicular structure, to decompose the force into two components: a vertically upward (positive Y-axis) component and a horizontally leftward (negative X-axis) component. The vertically upward component generates rotational motion through the fifth flexible hinge 232, while the horizontally leftward component generates displacement along the X-axis through the first flexible hinge 231. This displacement along the X-axis compensates for the offset of the rotation center 11 of the positioning platform 1, resulting in pure rotational displacement output and ensuring low coupling characteristics achieved through a purely mechanical structure. Specifically, the positive Y-axis refers to the direction indicated by arrow Y, and the negative X-axis refers to the opposite direction indicated by arrow X.

[0065] The micro-motion rotation platform with self-compensation for rotation center offset in this embodiment adopts a single drive input method of one micro-displacement driver 27. That is, only one micro-displacement driver 27 is needed to obtain the angular displacement output of the positioning platform 1, avoiding the redundancy problem of micro-displacement driver 27 (i.e., multiple micro-displacement drivers 27 are configured for a single degree of freedom). This makes the control of the flexible mechanism 2 simpler and the control performance better while saving costs.

[0066] The micro-motion rotating platform with self-compensation for rotation center offset in this embodiment can compensate for the poor stiffness of the series flexible mechanism 2 by setting two parallel branches 20, thereby improving the overall stiffness of the entire flexible mechanism 2, effectively resisting parasitic elastic deformation, and ensuring good load-displacement linearity.

[0067] In this embodiment, the micro-motion rotary platform with self-compensation for rotation center offset connects a leaf spring flexible input guide mechanism 24 to the output end of the micro-displacement actuator 27. This allows the imperfect driving force of the micro-displacement actuator 27 under actual working conditions to be converted into a reference linear input through the leaf spring flexible input guide mechanism 24. In other words, the input end of the first-stage lever displacement amplification mechanism 21 does not use direct driving force input, but connects the leaf spring flexible input guide mechanism 24 to the driving force, replacing mechanical contact with elastic deformation. This allows the physical motion filtering of the leaf spring flexible input guide mechanism 24 to suppress parasitic motion and improve the anti-interference capability of the entire flexible mechanism 2.

[0068] The micro-motion rotation platform with self-compensation for rotation center offset in this embodiment can obtain a large range of rotational motion by setting multiple first-stage lever displacement amplification mechanisms 21, so that the angular displacement range of the positioning platform 1 is larger, thereby meeting the actual rotational working conditions.

[0069] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A micro-rotating platform with self-compensation of center of rotation offset, characterized in that, The utility model relates to a positioning platform (1) is used for placing workpiece to be positioned or to be measured on, flexible mechanism (2) is equipped below the positioning platform (1), the flexible mechanism (2) includes two center symmetry support chain (20), the support chain (20) includes sequentially connected primary lever displacement amplification mechanism (21), force transmission mechanism (22) and secondary lever displacement amplification mechanism (23), the force transmission mechanism (22) includes the first rigid beam (221) of inclination arrangement, the secondary lever displacement amplification mechanism (23) includes the first flexible hinge (231) of both ends fixed constraint and flexible beam, when driving the primary lever displacement amplification mechanism (21) along Y axis positive direction, the first rigid beam (221) and the first flexible hinge (231) cooperate each other to produce along X axis negative direction and along Y axis positive direction acting force, and along Y axis positive direction acting force can drive the positioning platform (1) produce rotary motion around the rotation center (11), and along X axis negative direction acting force can produce along X axis displacement to offset the offset amount of rotation center (11). The two support chains (20) are arranged in parallel. The flexible mechanism (2) further comprises: A micro-displacement driver (27) is arranged between the two support chains (20), and the micro-displacement driver (27) is used to simultaneously act on the primary lever displacement amplification mechanism (21) in the two support chains (20) along the Y axis positive direction and the Y axis negative direction. The primary lever displacement amplification mechanism (21) comprises: A first fixed end (211); A second rigid beam (212) and a second flexible hinge (213), the opposite ends of the second flexible hinge (213) are connected to the first fixed end (211) and the second rigid beam (212) respectively, the first fixed end (211) is a first fulcrum, and the second rigid beam (212) is a first lever arm. The force transmission mechanism (22) further comprises: A third flexible hinge (222), the opposite ends of the third flexible hinge (222) are connected to the second rigid beam (212) and one end of the first rigid beam (221) respectively; A fourth flexible hinge (223), one end of the fourth flexible hinge (223) is connected to the other end of the first rigid beam (221); The secondary lever displacement amplification mechanism (23) further comprises: A fifth flexible hinge (232), one end of the fifth flexible hinge (232) is connected to the middle part of the first flexible hinge (231), and the opposite ends of the first flexible hinge (231) are second fulcrums; A third rigid beam (233), the third rigid beam (233) is a second lever arm, the other end of the fourth flexible hinge (223) is connected to the third rigid beam (233), the other end of the fifth flexible hinge (232) is connected to one end of the third rigid beam (233), the other end of the third rigid beam (233) is a free end, and the free end of the third rigid beam (233) is connected to the positioning platform (1) to drive the positioning platform (1) to rotate. ​ ​ 2. The micro-rotation stage with self-compensation of rotation center offset according to claim 1, wherein, In one of the branch chains (20), a plurality of the primary lever displacement amplification mechanisms (21) are provided and connected in series, and one of the primary lever displacement amplification mechanisms (21) at the end is connected with the secondary lever displacement amplification mechanism (23) through the force transmission mechanism (22).

3. The micro-rotation stage with self-compensation of rotation center offset according to claim 1, wherein, The center of the micro-displacement driver (27), the rotation center (11) of the positioning platform (1), and the center of the positioning platform (1) coincide.

4. The micro-rotating platform with self-compensation of rotation center offset according to claim 1, wherein, The branch chain (20) further comprises: A leaf spring flexible input guide mechanism (24) is arranged between the micro-displacement driver (27) and the primary lever displacement amplification mechanism (21), and is used for guiding and converting the input direction of the force output by the micro-displacement driver (27) along the Y axis into a reference straight line input direction.

5. The micro-rotating platform with self-compensation of rotation center offset according to claim 1, wherein, The free end of the third rigid beam (233) is provided with a positioning hole (2331), and a fastener (28) is connected with the positioning platform (1) through the positioning hole (2331), so that the fastener (28) drives the positioning platform (1) to rotate.

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