Six-axis sliding table

Abstract

The invention provides a six-axis sliding table, and relates to the technical field of sliding tables. The six-axis sliding table comprises a first platform, a second platform and a third platform; a translation seat and a first linear driving assembly are arranged on the first platform; a first shaft, a second shaft, a second linear driving assembly, a third linear driving assembly, a first rotary driving assembly and a second rotary driving assembly are arranged on the second platform; the third platform is provided with a rotating seat and a third rotation driving assembly, and the rotating seat is rotationally matched with the third platform in the third direction. The six-axis sliding table has six degrees of freedom, and an object fixed to the rotating base can be adjusted at any position and angle. Adjustment in four degrees of freedom can be achieved through the second platform and all components on the second platform, namely translation in the X direction, rotation around the X direction, translation in the Y direction and rotation around the Y direction, so that the whole six-axis sliding table is highly integrated and smaller in size.

Description

Technical Field

[0001] This invention relates to the field of slide table technology, and more particularly to a six-axis slide table. Background Technology

[0002] Existing multi-axis slides are usually composed of a three-axis translation platform and a separate rotary table, resulting in low integration and large size. Summary of the Invention

[0003] In order to solve the problems existing in the prior art, the purpose of this invention is to provide a six-axis slide table.

[0004] This invention provides the following technical solution: A six-axis slide table, comprising: The first platform includes a base plate, a translation seat, and a first linear drive assembly. The first linear drive assembly is disposed on the base plate. The translation seat and the base plate are slidably connected along the Z direction. The first linear drive assembly drives the translation seat to translate along the Z direction. The second platform includes a first axis, a second axis, a second linear drive assembly, a third linear drive assembly, a first rotary drive assembly, and a second rotary drive assembly. The first axis is fixedly connected to a translation seat and slides through the second platform along the X direction. The first axis and the second platform are rotatably coupled. The second linear drive assembly drives the second platform to translate along the axis of the first axis. The first rotary drive assembly is located around the first axis and drives the second platform to rotate around the first axis. The third platform is equipped with a rotating seat and a third rotation drive assembly. The rotating seat rotates in conjunction with the third platform, and the third rotation drive assembly drives the rotating seat to rotate around the Z direction. The second shaft is fixedly connected to the third platform. The second shaft slides through the second platform along the Y direction. The second shaft and the second platform rotate together. The third linear drive assembly drives the third platform to translate along the axis of the second shaft. The second rotary drive assembly is located on the periphery of the second shaft. The second rotary drive assembly drives the third platform to rotate around the second shaft.

[0005] As a further alternative to the six-axis slide table, a first reset member and a first elastic member are provided on the base plate. The first reset member slides through the base plate in the Z direction and is fixedly connected to the translation seat. One end of the first elastic member near the translation seat abuts against the base plate, and the other end of the first elastic member abuts against the end of the first reset member. The first linear drive assembly includes a first linear drive member, a first sliding member, and a first lifting member. The first linear drive member is rotatably mounted on the base plate, and the first sliding member is slidably mounted on the base plate along the rotation axis of the first linear drive member. The first sliding member is threadedly connected to the first linear drive member, and the first lifting member is fixedly connected to the translation seat. The first sliding member is provided with a first lifting surface, and the first lifting surface and the first lifting member abut against each other. The first linear drive member drives the first sliding member to move to change the distance between the base plate and the translation seat.

[0006] As a further optional solution for the six-axis slide table, the first platform also includes a sliding support assembly, which includes a first support plate, a second support plate, and a first locking member. The first support plate and the second support plate are slidably connected along the Z direction. The first support plate is fixedly connected to the base plate, and the second support plate is fixedly connected to the translation seat. A waist-shaped hole is provided in the first support plate along the Z direction. The first locking member is disposed in the waist-shaped hole, and the first support plate and the second support plate are fixedly connected by the thread of the first locking member.

[0007] As a further alternative to the six-axis slide, the second linear drive assembly includes a second linear drive member, a second locking member, and a second elastic member. The second linear drive member passes through the second platform along the X direction and is rotatably engaged with the second platform. The second linear drive member is threadedly connected to the first axis. The second locking member is threadedly connected to the second platform and locks the second linear drive member when it abuts against it. One end of the second elastic member near the second linear drive member abuts against the first axis, and the other end of the second elastic member abuts against the second platform.

[0008] As a further optional solution for the six-axis slide, the third linear drive assembly includes a third linear drive member, a third locking member, and a third elastic member. The third linear drive member is disposed along the Y direction through the second platform, and is rotatably engaged with the second platform. The third linear drive member is threadedly connected to the second axis. The third locking member is threadedly connected to the second platform and locks the third linear drive member when it abuts against the third linear drive member. One end of the third elastic member near the third linear drive member abuts against the second axis, and the other end of the third elastic member abuts against the second platform.

[0009] As a further optional solution for the six-axis slide, a first rotary drive assembly is disposed on one side of the first axis. The first rotary drive assembly includes a first rotary drive member, a second sliding member, a second lifting member, a fourth locking member, and a fourth elastic member. The first rotary drive member passes through the second platform along the X direction and is threadedly connected to the second platform. The second sliding member is slidably disposed on the second platform along the X direction and abuts against the first rotary drive member. The second sliding member is provided with a second lifting surface. The second lifting member abuts against the second lifting surface and a translation seat, respectively. The first rotary drive member drives the second sliding member to move to change the distance between the translation seat and the second sliding member. The fourth locking member is threadedly connected to the second platform and locks the first rotary drive member when abutting against it. One end of the fourth elastic member near the first rotary drive member abuts against the second sliding member, and the other end of the fourth elastic member abuts against the second platform.

[0010] As a further optional solution for the six-axis slide table, a first limiting support assembly is provided on the second platform. The first limiting support assembly is located on the side of the first axis facing away from the first rotary drive assembly. The first limiting support assembly includes a first elastic support member, a first rolling member, a first limiting drive member, a fourth sliding member, a fourth lifting member, and a first elastic lifting member. The first elastic support member abuts against the translation seat through the first rolling member. The first limiting drive member passes through the second platform along the X direction and is threadedly connected to the second platform. The fourth sliding member is slidably disposed on the second platform along the X direction and abuts against the first limiting drive member. The fourth sliding member is provided with a fourth lifting surface. The fourth lifting member abuts against the fourth lifting surface and the translation seat respectively. The first limiting drive member drives the fourth sliding member to move to change the distance between the translation seat and the fourth sliding member. The first elastic lifting member is located on the side of the fourth lifting member facing away from the translation seat and abuts against the fourth lifting member.

[0011] As a further optional solution for the six-axis slide, a second rotary drive assembly is disposed on one side of the second axis. The second rotary drive assembly includes a second rotary drive member, a third sliding member, a third lifting member, a fifth locking member, and a fifth elastic member. The second rotary drive member passes through the second platform along the Y direction and is threadedly connected to the second platform. The third sliding member is slidably disposed on the second platform along the Y direction and abuts against the second rotary drive member. The third sliding member is provided with a third lifting surface, and the third lifting member abuts against both the third lifting surface and the third platform. The second rotary drive member drives the third sliding member to move to change the distance between the third platform and the third sliding member. The fifth locking member is threadedly connected to the second platform and locks the second rotary drive member when abutting against it. One end of the fifth elastic member near the second rotary drive member abuts against the third sliding member, and the other end of the fifth elastic member abuts against the second platform.

[0012] As a further optional solution for the six-axis slide, a second limiting support assembly is provided on the second platform. The second limiting support assembly is located on the side of the second axis facing away from the second rotary drive assembly. The second limiting support assembly includes a second elastic support member, a second rolling member, a second limiting drive member, a fifth sliding member, a fifth lifting member, and a second elastic lifting member. The second elastic support member abuts against the third platform through the second rolling member. The second limiting drive member passes through the second platform along the Y direction and is threadedly connected to the second platform. The fifth sliding member is slidably disposed on the second platform along the Y direction and abuts against the second limiting drive member. The fifth sliding member is provided with a fifth lifting surface. The fifth lifting member abuts against the fifth lifting surface and the third platform respectively. The second limiting drive member drives the fifth sliding member to move to change the distance between the third platform and the fifth sliding member. The second elastic lifting member is located on the side of the fifth lifting member facing away from the third platform and abuts against the fifth lifting member.

[0013] As a further optional solution for the six-axis slide, two sets of third rotary drive assemblies are provided. The two sets of third rotary drive assemblies are respectively arranged on opposite sides of the third platform. The third rotary drive assembly includes a third rotary drive component and a rotary limit seat. The third rotary drive component is inserted into the rotary seat in a direction perpendicular to the Z direction. The third rotary drive component is threadedly connected to the rotary seat, and the rotary limit seat abuts against the third rotary drive component.

[0014] The embodiments of the present invention have the following beneficial effects: In the aforementioned six-axis slide, the base plate, translation seat, first axis, second platform, second axis, third platform, and rotary seat are connected sequentially. When the first linear drive assembly drives the translation seat to translate along the Z direction, the translation seat sequentially drives the rotary seat to translate along the Z direction via the first axis, second platform, second axis, and third platform. Similarly, when the second linear drive assembly drives the second platform to translate along the axis of the first axis, the second platform drives the rotary seat to translate along the axis of the first axis, that is, to translate along the X direction; when the first rotary drive assembly drives the second platform to rotate around the first axis, the second platform drives the rotary seat to rotate around the first axis, that is, to rotate around the X direction; when the third linear drive assembly drives the third platform to translate along the axis of the second axis, the third platform drives the rotary seat to translate along the axis of the second axis, that is, to translate along the Y direction; when the second rotary drive assembly drives the third platform to rotate around the second axis, the third platform drives the rotary seat to rotate around the second axis, that is, to rotate around the Y direction. In addition, the third rotary drive assembly drives the rotary seat to rotate around the Z direction. Therefore, the aforementioned six-axis slide table has six degrees of freedom, enabling arbitrary position and angle adjustment of an object fixed on a rotary base. Specifically, the second platform is slidably and rotationally engaged with the translation base via the first axis, and slidably and rotationally engaged with the third platform via the second axis. The corresponding second linear drive assembly, third linear drive assembly, first rotary drive assembly, and second rotary drive assembly are all mounted on the second platform. Through the second platform and its components, adjustment in four degrees of freedom can be achieved: translation along the X-axis, rotation around the X-axis, translation along the Y-axis, and rotation around the Y-axis, resulting in a highly integrated and smaller six-axis slide table.

[0015] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This diagram illustrates the overall structure of a six-axis slide provided in an embodiment of the present invention. Figure 2 This diagram illustrates the internal structure of a six-axis slide provided in an embodiment of the present invention. Figure 3 The diagram shows a front view of the first platform in a six-axis slide provided in an embodiment of the present invention; Figure 4 It shows Figure 3 Schematic diagram of the cross section along the AA direction; Figure 5 The diagram shows a front view of the second platform in a six-axis slide provided in an embodiment of the present invention; Figure 6 It shows Figure 5 Schematic diagram of the cross section along the BB direction; Figure 7 A partial structural schematic diagram of the second platform in a six-axis slide provided by an embodiment of the present invention is shown; Figure 8 It shows Figure 5 Schematic diagram of the cross section along the CC direction; Figure 9 This invention provides a schematic diagram of the internal structure of the second platform in a six-axis slide table. Figure 10 It shows Figure 5 Schematic diagram of the cross section along the DD direction; Figure 11 The image shows a right view of the second platform in a six-axis slide provided in an embodiment of the present invention; Figure 12 It shows Figure 11 Schematic diagram of the cross section in the middle EE direction; Figure 13 This diagram shows another partial structural schematic of the second platform in a six-axis slide provided by an embodiment of the present invention; Figure 14 It shows Figure 11 Schematic diagram of the cross section in the middle FF direction; Figure 15 This shows a schematic diagram of the structure of the second platform in a six-axis slide provided by an embodiment of the present invention from another perspective; Figure 16 It shows Figure 11 Schematic diagram of the cross section in the middle GG direction; Figure 17 A schematic diagram of the structure of the third platform in a six-axis slide provided by an embodiment of the present invention is shown.

[0018] Explanation of key component symbols: 100-First platform; 110-Base plate; 111-First reset component; 112-First elastic component; 113-First mounting base; 120-Transfer base; 130-First linear drive assembly; 131-First linear drive component; 131a-Protruding ring; 132-First sliding component; 133-First lifting component; 140-Sliding support assembly; 141-First support plate; 141a-Oval hole; 142-Second support plate; 143-First locking component; 200 - Second platform; 201 - Second mounting base; 202 - Third mounting base; 210 - First axis; 220 - Second axis; 230 - Second linear drive assembly; 231 - Second linear drive component; 232 - Second locking component; 233 - Second elastic component; 240 - Third linear drive assembly; 241 - Third linear drive component; 242 - Third locking component; 243 - Third elastic component; 250 - First rotary drive assembly; 251 - First rotary drive component; 252 - Second sliding component; 253 - Second lifting component; 254 - Fourth locking component; 255 - Fourth elastic component; 260 - Second rotary drive assembly Components; 261-Second rotary drive component; 262-Third sliding component; 263-Third lifting component; 264-Fifth locking component; 265-Fifth elastic component; 270-First limiting support assembly; 271-First elastic support component; 272-First rolling component; 273-First limiting drive component; 274-Fourth sliding component; 275-Fourth lifting component; 276-First elastic lifting component; 280-Second limiting support assembly; 281-Second elastic support component; 282-Second rolling component; 283-Second limiting drive component; 284-Fifth sliding component; 285-Fifth lifting component; 286-Second elastic lifting component; 300 - Third platform; 310 - Rotary seat; 320 - Third rotary drive assembly; 321 - Third rotary drive component; 322 - Rotary limit seat; 330 - Bearing. Detailed Implementation

[0019] Please refer to the following: Figure 1 and Figure 2 This embodiment provides a six-axis slide, including a first platform 100, a second platform 200 and a third platform 300.

[0020] The first platform 100 includes a base plate 110, a translation seat 120, and a first linear drive assembly 130. The first linear drive assembly 130 is disposed on the base plate 110, the translation seat 120 and the base plate 110 are slidably connected along the Z direction, and the first linear drive assembly 130 drives the translation seat 120 to translate along the Z direction.

[0021] The second platform 200 is provided with a first axis 210, a second axis 220, a second linear drive assembly 230, a third linear drive assembly 240, a first rotary drive assembly 250, and a second rotary drive assembly 260. The first shaft 210 is fixedly connected to the translation seat 120, and slides through the second platform 200 along the X direction, with the first shaft 210 and the second platform 200 in rotatable engagement. The second linear drive assembly 230 drives the second platform 200 to translate along the axis of the first shaft 210. The first rotary drive assembly 250 is disposed around the first shaft 210, and drives the second platform 200 to rotate around the first shaft 210.

[0022] In addition, a rotating base 310 and a third rotation drive assembly 320 are provided on the third platform 300. The rotating base 310 is rotatably engaged with the third platform 300, and the third rotation drive assembly 320 drives the rotating base 310 to rotate around the Z direction.

[0023] Accordingly, the second shaft 220 is fixedly connected to the third platform 300, and the second shaft 220 slides through the second platform 200 along the Y direction, with the second shaft 220 and the second platform 200 in rotational engagement. The third linear drive assembly 240 drives the third platform 300 to translate along the axis of the second shaft 220. The second rotary drive assembly 260 is disposed on the axial side of the second shaft 220, and the second rotary drive assembly 260 drives the third platform 300 to rotate around the second shaft 220.

[0024] In the aforementioned six-axis slide, the base plate 110, translation seat 120, first axis 210, second platform 200, second axis 220, third platform 300, and rotary seat 310 are connected in sequence. When the first linear drive assembly 130 drives the translation seat 120 to translate along the Z direction, the translation seat 120 sequentially drives the rotary seat 310 to translate along the Z direction via the first axis 210, second platform 200, second axis 220, and third platform 300. Similarly, when the second linear drive assembly 230 drives the second platform 200 to translate along the axis of the first axis 210, the second platform 200 drives the rotary seat 310 to translate along the axis of the first axis 210, that is, to translate in the X direction; when the first rotary drive assembly 250 drives the second platform 200 to rotate around the first axis 210, the second platform 200 drives the rotary seat 310 to rotate around the first axis 210, that is, to rotate in the X direction; when the third linear drive assembly 240 drives the third platform 300 to translate along the Y direction, the third platform 300 drives the rotary seat 310 to translate along the axis of the second axis 220, that is, to translate in the Y direction; when the second rotary drive assembly 260 drives the third platform 300 to rotate around the second axis 220, the third platform 300 drives the rotary seat 310 to rotate around the second axis 220, that is, to rotate in the Y direction. Additionally, the third rotary drive assembly 320 drives the rotary seat 310 to rotate in the Z direction. Therefore, the aforementioned six-axis slide table has six degrees of freedom, enabling arbitrary position and angle adjustment of an object fixed on the rotary base 310. Specifically, the second platform 200 is slidably and rotationally engaged with the translation base 120 via the first axis 210, and slidably and rotationally engaged with the third platform 300 via the second axis 220. The corresponding second linear drive assembly 230, third linear drive assembly 240, first rotary drive assembly 250, and second rotary drive assembly 260 are all mounted on the second platform 200. Through the second platform 200 and its components, adjustment in four degrees of freedom can be achieved: translation along the X-axis, rotation around the X-axis, translation along the Y-axis, and rotation around the Y-axis, resulting in a highly integrated and smaller six-axis slide table.

[0025] For example, the Z direction is the vertical direction, the X direction and the Y direction are both horizontal directions, and the first platform 100, the second platform 200 and the third platform 300 are arranged sequentially along the Z direction.

[0026] Please refer to the following: Figure 1 and Figure 3 In some embodiments, the first platform 100 further includes a sliding support assembly 140, which includes a first support plate 141, a second support plate 142, and a first locking member 143.

[0027] The first support plate 141 and the second support plate 142 are slidably connected along the Z direction. The first support plate 141 is fixedly connected to the base plate 110, and the second support plate 142 is fixedly connected to the translation seat 120.

[0028] That is to say, the translation seat 120 and the base plate 110 are slidably connected in the Z direction via the first support plate 141 and the second support plate 142. For example, the first support plate 141 and the second support plate 142 are slidably connected by a cross roller guide.

[0029] In addition, a waist-shaped hole 141a is provided in the first support plate 141 along the Z direction, and a first locking member 143 is provided in the waist-shaped hole 141a. The first support plate 141 and the second support plate 142 are fixedly connected by the first locking member 143 through threads.

[0030] Please see Figure 2 and Figure 4 In some embodiments, a first reset member 111 and a first elastic member 112 are provided on the base plate 110. The first reset member 111 slides through the base plate 110 in the Z direction and is fixedly connected to the translation seat 120. One end of the first elastic member 112 near the translation seat 120 abuts against the base plate 110, and the other end of the first elastic member 112 abuts against the end of the first reset member 111.

[0031] Furthermore, the first linear drive assembly 130 includes a first linear drive member 131, a first sliding member 132, and a first lifting member 133. The first linear drive member 131 is rotatably mounted on the base plate 110. The first sliding member 132 is slidably mounted on the base plate 110 along the rotation axis of the first linear drive member 131, and the first sliding member 132 is threadedly connected to the first linear drive member 131. The first lifting member 133 is fixedly connected to the translation seat 120, and the first sliding member 132 is provided with a first lifting surface, which abuts against the first lifting member 133. The first linear drive member 131 drives the first sliding member 132 to move to change the distance between the base plate 110 and the translation seat 120.

[0032] In use, the first linear drive member 131 is rotated, while the first sliding member 132 does not rotate. Since the first sliding member 132 is threadedly connected to the first linear drive member 131, the first sliding member 132 slides along the rotation axis of the first linear drive member 131. The first lifting surface on the first sliding member 132 abuts against the first lifting member 133, causing the translation seat 120 to move away from the base plate 110, that is, driving the translation seat 120 to move in the Z direction.

[0033] It should be noted that the first lifting surface intersects the rotation axis of the first linear drive member 131 at an angle, which is also the angle of intersection with the sliding direction of the first sliding member 132. Therefore, the first lifting surface can effectively support the first lifting member 133, and the pressure applied by the first lifting surface to the first lifting member 133 is perpendicular to the first lifting surface. The pressure applied by the first lifting surface to the first lifting member 133 has a component force along the Z direction, which drives the first lifting member 133 to translate along the Z direction, and ultimately drives the translation seat 120 to translate along the Z direction.

[0034] When the first linear drive member 131 drives the translation seat 120 to translate along the Z direction, the first reset member 111 moves with the translation seat 120, and at the same time the first elastic member 112 keeps the first lifting member 133 in close contact with the first sliding member 132.

[0035] Specifically, the rotation axis of the first linear drive 131 is perpendicular to the Z direction.

[0036] For example, the rotation axis of the first linear drive member 131 is parallel to the X direction, and the first slider 132 is slidably disposed on the base plate 110 along the X direction.

[0037] In addition, the first linear drive 131 can be a screw.

[0038] Specifically, the first reset member 111 is a screw, with its rod passing through the first platform 100 and threadedly connected to the translation seat 120. The first elastic member 112 is a spring, sleeved on the rod of the first reset member 111, with the first elastic member 112 located on the side of the first reset member 111 facing the translation seat 120. Furthermore, the end of the first elastic member 112 near the translation seat 120 abuts against the first platform 100, and the end away from the translation seat 120 abuts against the head of the first reset member 111.

[0039] Understandably, the rod portion of the first reset member 111 can slide in conjunction with the first platform 100 and can also be used as a guide rod, so that the translation seat 120 can slide on the first platform 100 in the Z direction.

[0040] Please refer to it again. Figure 1 and Figure 2 Specifically, an annular protruding ring 131a is fixedly provided on the first linear drive member 131, and the protruding ring 131a abuts against the base plate 110 along the axial direction of the first linear drive member 131. A first mounting seat 113 is also provided on the base plate 110, and the first mounting seat 113 abuts against the side of the protruding ring 131a away from the base plate 110.

[0041] At this time, the first mounting base 113 and the base plate 110 clamp the protrusion 131a inside, so that the first linear drive member 131 can only rotate around its own axis and cannot translate along its own axis, thereby realizing the rotational connection between the first linear drive member 131 and the base plate 110.

[0042] It should be noted that the second linear drive assembly 230, the third linear drive assembly 240, etc., also include a screw structure similar to the first linear drive component 131, and this screw structure is rotatably mounted on the second platform 200 via a similar mounting base. The assembly relationship between this screw structure, the second platform 200, and the mounting base will not be described in detail.

[0043] Please refer to the following: Figure 5 , Figure 6 and Figure 7 In some embodiments, the second linear drive assembly 230 includes a second linear drive member 231, a second locking member 232, and a second elastic member 233.

[0044] The second linear drive member 231 is inserted through the second platform 200 along the X direction, and the second linear drive member 231 is rotatably engaged with the second platform 200. The second linear drive member 231 is threadedly connected to the first shaft 210.

[0045] In use, the second linear drive 231 is rotated while the first shaft 210 remains stationary. Since the second linear drive 231 is threadedly connected to the first shaft 210, the second linear drive 231 and the first shaft 210 move relative to each other in the X direction. Specifically, the first shaft 210 is fixedly mounted on the translation seat 120 and remains stationary, while the second linear drive 231 translates in the X direction, thereby driving the entire second platform 200 to translate in the X direction.

[0046] Accordingly, the second locking member 232 is threadedly connected to the second platform 200, and the second locking member 232 locks the second linear drive member 231 when it abuts against the second linear drive member 231.

[0047] After the second linear drive assembly 230 drives the second platform 200 to translate into position along the X direction, the second locking member 232 is screwed on to hold the second linear drive member 231 in place. The static friction between the second locking member 232 and the second linear drive member 231 keeps them relatively fixed, thus fixing the second linear drive member 231 in place. Conversely, if the position of the second platform 200 needs to be adjusted along the X direction, the second locking member 232 is screwed on in the opposite direction to disengage it from the second linear drive member 231.

[0048] In addition, one end of the second elastic member 233 near the second linear drive member 231 abuts against the first shaft 210, and the other end of the second elastic member 233 abuts against the second platform 200.

[0049] During use, the second elastic element 233 is always in a compressed state. The elastic force applied by the second elastic element 233 to the first shaft 210 makes the first shaft 210 and the second linear drive element 231 fit tightly together. Specifically, the threads of the first shaft 210 and the threads of the second linear drive element 231 fit tightly together to ensure adjustment accuracy.

[0050] For example, the second linear drive 231 is a screw.

[0051] In addition, a second mounting base 201 is fixedly provided on the second platform 200 to realize the rotational connection between the second linear drive 231 and the second platform 200. The installation method of the second linear drive 231 is similar to that of the first linear drive 131, and will not be described in detail here.

[0052] For example, the second locking member 232 is a bolt, which passes through the second mounting base 201 in the Z direction and is threadedly connected to the second mounting base 201, thereby indirectly connecting to the second platform 200 through the second mounting base 201.

[0053] For example, the second elastic element 233 is a spring. The following elastic structures are similar and will not be described in detail.

[0054] Please refer to the following: Figure 7 and Figure 8 In some embodiments, a first rotary drive assembly 250 is disposed on one side of the first shaft 210. The first rotary drive assembly 250 includes a first rotary drive member 251, a second sliding member 252, a second lifting member 253, a fourth locking member 254, and a fourth elastic member 255.

[0055] The first rotary drive member 251 is threadedly connected to the second platform 200 along the X-direction. The second sliding member 252 is slidably disposed on the second platform 200 along the X-direction, and abuts against the first rotary drive member 251. The second sliding member 252 has a second lifting surface, and a second lifting member 253 abuts against the second lifting surface and the translation seat 120. The first rotary drive member 251 drives the second sliding member 252 to change the distance between the translation seat 120 and the second sliding member 252.

[0056] In use, the first rotary drive member 251 is rotated. Since the first rotary drive member 251 is threadedly connected to the second platform 200, it rotates around the X direction while simultaneously translating along the X direction, thereby abutting against the second sliding member 252 and causing it to slide along the X direction. The second lifting surface on the second sliding member 252 abuts against the second lifting member 253, which in turn abuts against the translation seat 120. With the translation seat 120 stationary, the second sliding member 252 is lifted in the opposite direction by the second lifting member 253, thus moving it away from the translation seat 120. This causes the second platform 200, located on one side of the first shaft 210, to move away from the translation seat 120, effectively driving the second platform 200 to rotate around the axis of the first shaft 210.

[0057] Similar to the first lifting surface, the second lifting surface intersects the X direction at an angle, and its working principle will not be elaborated here.

[0058] Correspondingly, the fourth locking member 254 is threadedly connected to the second platform 200, and the fourth locking member 254 locks the first rotary drive member 251 when it abuts against the first rotary drive member 251.

[0059] After the first rotary drive assembly 250 drives the second platform 200 to rotate into position around the X direction, the fourth locking member 254 is tightened to abut against the first rotary drive member 251. The static friction between the fourth locking member 254 and the first rotary drive member 251 keeps them relatively fixed, thus fixing the first rotary drive member 251 in place. Conversely, when it is necessary to adjust the angle of the second platform 200 around the X direction, the fourth locking member 254 is first tightened in the opposite direction to disengage it from the first rotary drive member 251.

[0060] In addition, one end of the fourth elastic member 255 near the first rotary drive member 251 abuts against the second sliding member 252, and the other end of the fourth elastic member 255 abuts against the second platform 200.

[0061] When the first rotary drive member 251 drives the second sliding member 252 to slide in the X direction, the second sliding member 252 always maintains close contact with the first rotary drive member 251 under the elastic force of the fourth elastic member 255.

[0062] For example, the first rotary drive member 251 is a screw. Optionally, the second lifting member 253 is a ball bearing, and the second lifting member 253 is slidably disposed on the second platform 200 along the Z direction. When the second platform 200 rotates about the X direction, the second lifting member 253 always abuts against the translation seat 120, while moving horizontally relative to the translation seat 120, and the direction of movement of the second lifting member 253 is perpendicular to the X direction. Since the second lifting member 253 is spherically shaped, the resistance encountered by the second lifting member 253 when moving horizontally relative to the translation seat 120 can be reduced, and wear can be reduced.

[0063] Optionally, a high-hardness top plate is embedded on the surface of the translation seat 120, and the second lifting member 253 directly abuts against the top plate, which can reduce the accuracy deviation caused by the deformation of the parts and improve the adjustment accuracy.

[0064] Optionally, in addition to using the fourth locking member 254 to lock the first rotary drive member 251, bolts can also be installed on the second platform 200 to directly lock the second sliding member 252.

[0065] Please refer to the following: Figure 9 and Figure 10 In some embodiments, a first limiting support assembly 270 is provided on the second platform 200. The first limiting support assembly 270 is disposed on the side of the first shaft 210 opposite to the first rotation drive assembly 250, and includes a first elastic support member 271, a first rolling member 272, a first limiting drive member 273, a fourth sliding member 274, a fourth lifting member 275, and a first elastic lifting member.

[0066] The first elastic support 271 abuts against the translation seat 120 via the first rolling element 272.

[0067] During the rotation of the second platform 200 around the X direction, the first elastic support 271 remains compressed. The bottom end of the first elastic support 271 abuts against the translation seat 120 via the first rolling element 272, while the top end abuts against the second platform 200. Simultaneously, the translation seat 120, through the reaction force applied to the second sliding element 252 by the second lifting element 253, lifts the second sliding element 252 upwards, further abutting against the second platform 200. Thus, the second platform 200 experiences two upward supporting forces, located on opposite sides of the first shaft 210. With the first shaft 210 as the fulcrum, the second platform 200 experiences balanced forces, enabling smooth rotation around the X direction. Specifically, the second platform 200, the second sliding element 252, the second lifting element 253, and the translation seat 120 maintain close contact throughout, ensuring the adjustment accuracy of the second platform 200.

[0068] The first rolling element 272 functions similarly to the ball bearings that act as the second lifting element 253, reducing the resistance experienced by the first elastic support 271 when it moves horizontally relative to the translation seat 120, and reducing wear.

[0069] Furthermore, the first limiting drive member 273 passes through the second platform 200 along the X direction and is threadedly connected to the second platform 200. The fourth sliding member 274 is slidably disposed on the second platform 200 along the X direction, and abuts against the first limiting drive member 273. The fourth sliding member 274 is provided with a fourth lifting surface, and a fourth lifting member 275 abuts against the fourth lifting surface and the translation seat 120. The first limiting drive member 273 drives the fourth sliding member 274 to move, thereby changing the distance between the translation seat 120 and the fourth sliding member 274.

[0070] After the first rotary drive assembly 250 drives the second platform 200 to rotate in the X direction to its designated position, the first limiting drive member 273 rotates. Since the first limiting drive member 273 is threadedly connected to the second platform 200, it translates along the X direction while rotating, thereby abutting against the fourth sliding member 274 and causing the fourth sliding member 274 to slide along the X direction. The fourth lifting surface on the fourth sliding member 274 abuts against the fourth lifting member 275, and in turn, the fourth lifting member 275 abuts against the translation seat 120.

[0071] At this time, the translation seat 120 located on one side of the first axis 210 applies a reaction force to the second platform 200 through the fourth lifting member 275 and the fourth sliding member 274, and the translation seat 120 located on the other side of the first axis 210 applies another reaction force to the second platform 200 through the second lifting member 253 and the second sliding member 252, so that the second platform 200 is subjected to balanced forces and is more stably maintained in the current position.

[0072] Similar to the first and second lifting surfaces, the fourth lifting surface intersects the X direction at an angle, and its working principle will not be elaborated here.

[0073] The first elastic lifting member 276 is located on the side of the fourth lifting member 275 facing away from the translation seat 120, and the first elastic lifting member 276 abuts against the fourth lifting member 275.

[0074] Under the elastic force of the first elastic lifting member 276, the fourth lifting member 275 always abuts against the translation seat 120 and maintains close contact with it. Based on this, the first limiting drive member 273 only needs to drive the fourth sliding member 274 to slide until it contacts the fourth lifting member 275, so that the fourth sliding member 274, the fourth lifting member 275, and the translation seat 120 abut against each other in sequence.

[0075] For example, the first limit drive 273 is a screw.

[0076] Optionally, the fourth lifting member 275 is generally conical. The middle sidewall of the fourth lifting member 275 is a frustum, abutting against the fourth sliding member 274. The bottom surface of the fourth lifting member 275 is spherical, abutting against the translation seat 120. Similar to the ball bearings of the second lifting member 253, when the fourth lifting member 275 moves horizontally relative to the translation seat 120, the spherical surface at the bottom of the fourth lifting member 275 reduces the resistance experienced by the fourth lifting member 275 and reduces wear.

[0077] Optionally, bolts are provided on the second platform 200 to lock the first limit drive component 273.

[0078] Please refer to the following: Figure 11 , Figure 12 and Figure 13 In some embodiments, the third linear drive assembly 240 includes a third linear drive member 241, a third locking member 242, and a third elastic member 243.

[0079] The third linear drive 241 is inserted through the second platform 200 along the Y direction, the third linear drive 241 is rotatably engaged with the second platform 200, and the third linear drive 241 is threadedly connected to the second shaft 220.

[0080] In use, the third linear drive 241 is rotated while the second shaft 220 remains stationary. Since the third linear drive 241 is threadedly connected to the second shaft 220, the third linear drive 241 and the second shaft 220 move relative to each other along the Y direction. Specifically, the third linear drive 241 is rotatably mounted on the second platform 200 and remains stationary, while the second shaft 220 translates along the Y direction, thereby causing the third platform 300 to translate along the Y direction.

[0081] Accordingly, the third locking member 242 is threadedly connected to the second platform 200, and the third locking member 242 locks the third linear drive member 241 when it abuts against the third linear drive member 241.

[0082] After the third linear drive assembly 240 drives the second platform 200 to translate into position along the Y direction, the third locking member 242 is screwed on to hold the third linear drive member 241 in place. The static friction between the third locking member 242 and the third linear drive member 241 keeps them relatively fixed, thus fixing the third linear drive member 241 in place. Conversely, if the position of the second platform 200 needs to be adjusted along the Y direction, the third locking member 242 is screwed on in the opposite direction to disengage it from the third linear drive member 241.

[0083] In addition, one end of the third elastic member 243 near the third linear drive member 241 abuts against the second shaft 220, and the other end of the third elastic member 243 abuts against the second platform 200.

[0084] During use, the third elastic element 243 is always in a compressed state. The elastic force applied by the third elastic element 243 to the second shaft 220 makes the second shaft 220 and the third linear drive element 241 fit tightly together. Specifically, it makes the threads of the second shaft 220 fit tightly with the threads of the third linear drive element 241 to ensure adjustment accuracy.

[0085] For example, the third linear drive 241 is a screw.

[0086] In addition, a third mounting base 202 is fixedly installed on the second platform 200 to realize the rotational connection between the third linear drive 241 and the second platform 200. The installation method of the third linear drive 241 is similar to that of the first linear drive 131, and will not be described in detail here.

[0087] For example, the third locking member 242 is a bolt, which passes through the third mounting base 202 in the Y direction and is threadedly connected to the third mounting base 202, thereby indirectly connecting to the second platform 200 through the third mounting base 202.

[0088] Please refer to the following: Figure 14 and Figure 15 In some embodiments, the second rotary drive assembly 260 is disposed on one side of the second shaft 220. The second rotary drive assembly 260 includes a second rotary drive member 261, a third sliding member 262, a third lifting member 263, a fifth locking member 264, and a fifth elastic member 265.

[0089] The second rotary drive member 261 is threadedly connected to the second platform 200 along the Y direction. The third sliding member 262 is slidably disposed on the second platform 200 along the Y direction, and abuts against the second rotary drive member 261. The third sliding member 262 has a third lifting surface, and a third lifting member 263 abuts against both the third lifting surface and the third platform 300. The second rotary drive member 261 drives the third sliding member 262 to change the distance between the third platform 300 and the third sliding member 262.

[0090] In use, the second rotary drive member 261 is rotated. Since the second rotary drive member 261 is threadedly connected to the second platform 200, it rotates around the Y direction while simultaneously translating along the Y direction, thereby abutting against the third sliding member 262 and causing the third sliding member 262 to slide along the Y direction. The third lifting surface on the third sliding member 262 abuts against the third lifting member 263, which in turn abuts against the third platform 300, lifting the third platform 300 and causing it to rotate around the axis of the second shaft 220, that is, driving the third platform 300 to rotate around the Y direction.

[0091] Similar to the first and second lifting surfaces, the third lifting surface intersects the Y direction at an angle, and its working principle will not be elaborated here.

[0092] Accordingly, the fifth locking member 264 is threadedly connected to the second platform 200, and the fifth locking member 264 locks the second rotary drive member 261 when it abuts against the second rotary drive member 261.

[0093] After the second rotary drive assembly 260 drives the third platform 300 to rotate into position around the Y direction, the fifth locking member 264 is screwed on to hold the second rotary drive member 261 in place. The static friction between the fifth locking member 264 and the second rotary drive member 261 keeps them relatively fixed, thus fixing the second rotary drive member 261 in place. Conversely, when it is necessary to adjust the angle of the third platform 300 around the Y direction, the fifth locking member 264 is screwed on in the opposite direction to disengage it from the second rotary drive member 261.

[0094] In addition, one end of the fifth elastic member 265 near the second rotary drive member 261 abuts against the third sliding member 262, and the other end of the fifth elastic member 265 abuts against the second platform 200.

[0095] When the second rotary drive member 261 drives the third slider 262 to slide along the Y direction, the third slider 262 always maintains close contact with the second rotary drive member 261 under the elastic force of the fifth elastic member 265.

[0096] For example, the second rotary drive 261 is a screw.

[0097] Optionally, the third lifting member 263 is made of ball bearings and is slidably disposed on the second platform 200 along the Z direction. When the third platform 300 rotates around the Y direction, the third lifting member 263 always abuts against the third platform 300. With the third platform 300 as a reference, the third lifting member 263 moves horizontally relative to the third platform 300, and the direction of movement of the third lifting member 263 is perpendicular to the Y direction. Since the third lifting member 263 is spherically shaped, the resistance encountered by the third lifting member 263 when moving horizontally relative to the third platform 300 can be reduced, and wear can be reduced.

[0098] Optionally, a high-hardness top plate is embedded on the surface of the third platform 300, and the third lifting member 263 directly abuts against the top plate, which can reduce the accuracy deviation caused by the deformation of the parts and improve the adjustment accuracy.

[0099] Optionally, in addition to using the fifth locking member 264 to lock the second rotary drive member 261, bolts can also be installed on the second platform 200 to directly lock the third sliding member 262.

[0100] Please refer to the following: Figure 6 and Figure 16 In some embodiments, a second limiting support assembly 280 is provided on the second platform 200. The second limiting support assembly 280 is disposed on the side of the second shaft 220 opposite to the second rotation drive assembly 260, and includes a second elastic support member 281, a second rolling member 282, a second limiting drive member 283, a fifth sliding member 284, a fifth lifting member 285, and a second elastic lifting member 286.

[0101] The second elastic support 281 abuts against the third platform 300 via the second rolling element 282.

[0102] During the rotation of the third platform 300 around the Y direction, the second elastic support 281 remains compressed. The bottom end of the second elastic support 281 abuts against the second platform 200 via the second rolling element 282, while its top end abuts against the third platform 300. Simultaneously, the third lifting element 263 abuts against the third platform 300 upwards. Thus, the third platform 300 experiences two upward supporting forces, located on opposite sides of the second shaft 220. With the second shaft 220 as the fulcrum, the third platform 300 experiences balanced forces, enabling it to rotate smoothly around the Y direction. Specifically, the second platform 200, the third sliding element 262, the third lifting element 263, and the third platform 300 maintain close contact at all times, ensuring the adjustment accuracy of the third platform 300.

[0103] The second rolling element 282 functions similarly to the first rolling element 272, reducing the resistance experienced by the second elastic support 281 when it moves horizontally relative to the third platform 300, and reducing wear.

[0104] Furthermore, a second limiting drive member 283 is threadedly connected to the second platform 200 along the Y direction. A fifth sliding member 284 is slidably disposed on the second platform 200 along the Y direction, and abuts against the second limiting drive member 283. A fifth lifting surface is provided on the fifth sliding member 284, and a fifth lifting member 285 abuts against the fifth lifting surface and the third platform 300 respectively. The second limiting drive member 283 drives the fifth sliding member 284 to move, thereby changing the distance between the third platform 300 and the fifth sliding member 284.

[0105] After the second rotary drive assembly 260 drives the third platform 300 to rotate in the Y direction to its designated position, the second limiting drive member 283 rotates. Since the second limiting drive member 283 is threadedly connected to the second platform 200, it translates along the Y direction while rotating in the Y direction, thereby abutting against the fifth sliding member 284 and causing the fifth sliding member 284 to slide along the Y direction. The fifth lifting surface of the fifth sliding member 284 abuts against the fifth lifting member 285, and thus the fifth lifting member 285 abuts against the third platform 300.

[0106] At this time, the second platform 200 applies pressure to the third platform 300 located on one side of the second shaft 220 through the fifth sliding member 284 and the fifth lifting member 285, and at the same time applies pressure to the third platform 300 located on the other side of the second shaft 220 through the second sliding member 252 and the second lifting member 253, so that the third platform 300 is subjected to balanced force and is more stably maintained in the current position.

[0107] Similar to the first and second lifting surfaces, the fifth lifting surface intersects with the Y direction at an inclination, and its working principle will not be elaborated here.

[0108] The second elastic lifting member 286 is located on the side of the fifth lifting member 285 facing away from the third platform 300, and the second elastic lifting member 286 abuts against the fifth lifting member 285.

[0109] Under the elastic force of the second elastic lifting member 286, the fifth lifting member 285 always abuts against the third platform 300, maintaining close contact with it. Based on this, the second limiting drive member 283 only needs to drive the fifth sliding member 284 to slide until it contacts the fifth lifting member 285, so that the fifth sliding member 284, the fifth lifting member 285, and the third platform 300 abut against each other in sequence.

[0110] For example, the second limit drive 283 is a screw.

[0111] Optionally, the fifth lifting member 285 is generally conical. The middle sidewall of the fifth lifting member 285 is a frustum, abutting against the fifth sliding member 284. The top surface of the fifth lifting member 285 is spherical, abutting against the third platform 300. Similar to the ball bearings of the third lifting member 263, when the fifth lifting member 285 moves horizontally relative to the third platform 300, the spherical surface at the top of the fifth lifting member 285 reduces the resistance experienced by the fifth lifting member 285 and reduces wear.

[0112] Optionally, bolts are provided on the second platform 200 to lock the second limit drive component 283.

[0113] Please see Figure 17 In some embodiments, the rotating seat 310 is rotatably connected to the third platform 300 via a bearing 330.

[0114] In some embodiments, two sets of third rotary drive assemblies 320 are provided, and the two sets of third rotary drive assemblies 320 are respectively disposed on opposite sides of the third platform 300. The third rotary drive assembly 320 includes a third rotary drive member 321 and a rotary limiting seat 322.

[0115] The third rotary drive member 321 is inserted through the rotary seat 310 in a direction perpendicular to the Z direction, and is threadedly connected to the rotary seat 310. The rotary limit seat 322 abuts against the third rotary drive member 321.

[0116] In use, the third rotary drive 321 is rotated. Since the third rotary drive 321 is threadedly connected to the third platform 300, the third rotary drive 321 translates in a direction perpendicular to the Z direction while rotating, thereby abutting against the rotary limit seat 322, and thus pushing the rotary seat 310 to rotate around the Z direction through the rotary limit seat 322.

[0117] When one of the third rotary drive members 321 is screwed in, the other third rotary drive member 321 is screwed out. After adjustment, the two rotary drive members simultaneously abut against the rotary limit seat 322, which locks the rotary seat 310 and keeps the rotary seat 310 and the third platform 300 relatively fixed.

[0118] For example, the third rotary drive 321 is made of bolts.

[0119] In summary, the aforementioned six-axis slide table has six degrees of freedom, enabling arbitrary position and angle adjustment of an object fixed on the rotary base 310. Specifically, the second platform 200 is slidably and rotationally engaged with the translation base 120 via the first axis 210, and slidably and rotationally engaged with the third platform 300 via the second axis 220. The corresponding second linear drive assembly 230, third linear drive assembly 240, first rotary drive assembly 250, and second rotary drive assembly 260 are all mounted on the second platform 200. Through the second platform 200 and its components, adjustment in four degrees of freedom—translation along the X-axis, rotation around the X-axis, translation along the Y-axis, and rotation around the Y-axis—is achieved, resulting in a highly integrated and smaller six-axis slide table. Furthermore, the aforementioned six-axis slide table also offers advantages such as ease of adjustment, high stability, and high adjustment precision.

[0120] In all examples shown and described herein, any specific values ​​should be interpreted as merely exemplary and not as limitations; therefore, other examples of exemplary embodiments may have different values.

[0121] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0122] The above-described embodiments are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention.

Claims

1. A six-axis slide table, characterized in that, include: A first platform (100) includes a base plate (110), a translation seat (120), and a first linear drive assembly (130). The first linear drive assembly (130) is disposed on the base plate (110). The translation seat (120) and the base plate (110) are slidably connected along the Z direction. The first linear drive assembly (130) drives the translation seat (120) to translate along the Z direction. The second platform (200) is provided with a first shaft (210), a second shaft (220), a second linear drive assembly (230), a third linear drive assembly (240), a first rotary drive assembly (250), and a second rotary drive assembly (260); the first shaft (210) is fixedly connected to the translation seat (120), the first shaft (210) slides through the second platform (200) in the X direction, the first shaft (210) and the second platform (200) are rotatably engaged, the second linear drive assembly (230) drives the second platform (200) to translate along the axis of the first shaft (210); the first rotary drive assembly (250) is disposed on the periphery of the first shaft (210), the first rotary drive assembly (250) drives the second platform (200) to rotate around the first shaft (210); The third platform (300) is provided with a rotating seat (310) and a third rotation drive assembly (320). The rotating seat (310) is rotatably engaged with the third platform (300), and the third rotation drive assembly (320) drives the rotating seat (310) to rotate around the Z direction. The second shaft (220) is fixedly connected to the third platform (300). The second shaft (220) slides through the second platform (200) in the Y direction. The second shaft (220) and the second platform (200) are rotatably engaged. The third linear drive assembly (240) drives the third platform (300) to translate along the axis of the second shaft (220). The second rotary drive assembly (260) is disposed on the periphery of the second shaft (220). The second rotary drive assembly (260) drives the third platform (300) to rotate around the second shaft (220).

2. The six-axis slide table according to claim 1, characterized in that, The base plate (110) is provided with a first reset member (111) and a first elastic member (112). The first reset member (111) slides through the base plate (110) in the Z direction and is fixedly connected to the translation seat (120). One end of the first elastic member (112) near the translation seat (120) abuts against the base plate (110), and the other end of the first elastic member (112) abuts against the end of the first reset member (111). The first linear drive assembly (130) includes a first linear drive member (131), a first sliding member (132), and a first lifting member (133). The first linear drive member (131) is rotatably disposed on the base plate (110). The first sliding member (132) is slidably disposed on the base plate (110) along the rotation axis of the first linear drive member (131). The first sliding member (132) is threadedly connected to the first linear drive member (131). The first lifting member (133) is fixedly connected to the translation seat (120). The first sliding member (132) is provided with a first lifting surface. The first lifting surface and the first lifting member (133) abut against each other. The first linear drive member (131) drives the first sliding member (132) to move to change the distance between the base plate (110) and the translation seat (120).

3. The six-axis slide table according to claim 1, characterized in that, The first platform (100) further includes a sliding support assembly (140), which includes a first support plate (141), a second support plate (142), and a first locking member (143). The first support plate (141) and the second support plate (142) are slidably connected along the Z direction. The first support plate (141) is fixedly connected to the base plate (110), and the second support plate (142) is fixedly connected to the translation seat (120). A waist-shaped hole (141a) is provided in the first support plate (141) along the Z direction. The first locking member (143) is disposed in the waist-shaped hole (141a). The first support plate (141) and the second support plate (142) are fixedly connected by the first locking member (143) through threads.

4. The six-axis slide table according to claim 1, characterized in that, The second linear drive assembly (230) includes a second linear drive member (231), a second locking member (232), and a second elastic member (233). The second linear drive member (231) passes through the second platform (200) along the X direction. The second linear drive member (231) is rotatably engaged with the second platform (200). The second linear drive member (231) is threadedly connected to the first shaft (210). The second locking member (232) is threadedly connected to the second platform (200). The second locking member (232) locks the second linear drive member (231) when it abuts against the second linear drive member (231). The second elastic member (233) abuts against the first shaft (210) at one end near the second linear drive member (231), and the other end of the second elastic member (233) abuts against the second platform (200).

5. The six-axis slide table according to claim 1, characterized in that, The third linear drive assembly (240) includes a third linear drive member (241), a third locking member (242), and a third elastic member (243). The third linear drive member (241) passes through the second platform (200) along the Y direction. The third linear drive member (241) is rotatably engaged with the second platform (200). The third linear drive member (241) is threadedly connected to the second shaft (220). The third locking member (242) is threadedly connected to the second platform (200). The third locking member (242) locks the third linear drive member (241) when it abuts against the third linear drive member (241). One end of the third elastic member (243) near the third linear drive member (241) abuts against the second shaft (220), and the other end of the third elastic member (243) abuts against the second platform (200).

6. The six-axis slide table according to claim 1, characterized in that, The first rotary drive assembly (250) is disposed on one side of the first shaft (210). The first rotary drive assembly (250) includes a first rotary drive member (251), a second sliding member (252), a second lifting member (253), a fourth locking member (254), and a fourth elastic member (255). The first rotary drive member (251) passes through the second platform (200) along the X direction and is threadedly connected to the second platform (200). The second sliding member (252) is slidably disposed on the second platform (200) along the X direction and abuts against the first rotary drive member (251). A second lifting member is provided on the second sliding member (252). The second lifting member (253) abuts against the second lifting surface and the translation seat (120) respectively. The first rotary drive member (251) drives the second sliding member (252) to move to change the distance between the translation seat (120) and the second sliding member (252). The fourth locking member (254) is threadedly connected to the second platform (200). The fourth locking member (254) locks the first rotary drive member (251) when it abuts against the first rotary drive member (251). The fourth elastic member (255) abuts against the second sliding member (252) at one end near the first rotary drive member (251), and the other end of the fourth elastic member (255) abuts against the second platform (200).

7. The six-axis slide table according to claim 6, characterized in that, The second platform (200) is provided with a first limiting support assembly (270), which is located on the side of the first shaft (210) facing away from the first rotary drive assembly (250). The first limiting support assembly (270) includes a first elastic support member (271), a first rolling member (272), a first limiting drive member (273), a fourth sliding member (274), a fourth lifting member (275), and a first elastic lifting member (276). The first elastic support member (271) abuts against the translation seat (120) through the first rolling member (272). The first limiting drive member (273) passes through the second platform (200) in the X direction. The first limiting drive member (273) and the second platform (200) are connected. 00) Threaded connection, the fourth sliding member (274) is slidably disposed on the second platform (200) along the X direction, the fourth sliding member (274) abuts against the first limiting drive member (273), the fourth sliding member (274) is provided with a fourth lifting surface, the fourth lifting member (275) abuts against the fourth lifting surface and the translation seat (120) respectively, the first limiting drive member (273) drives the fourth sliding member (274) to move to change the distance between the translation seat (120) and the fourth sliding member (274); the first elastic lifting member (276) is located on the side of the fourth lifting member (275) facing away from the translation seat (120), the first elastic lifting member (276) abuts against the fourth lifting member (275).

8. The six-axis slide table according to claim 1, characterized in that, The second rotary drive assembly (260) is disposed on one side of the second shaft (220). The second rotary drive assembly (260) includes a second rotary drive member (261), a third sliding member (262), a third lifting member (263), a fifth locking member (264), and a fifth elastic member (265). The second rotary drive member (261) passes through the second platform (200) along the Y direction and is threadedly connected to the second platform (200). The third sliding member (262) is slidably disposed on the second platform (200) along the Y direction and abuts against the second rotary drive member (261). The third sliding member (262) is provided with a third lifting member. The third lifting member (263) abuts against the third lifting surface and the third platform (300) respectively. The second rotary drive member (261) drives the third sliding member (262) to move to change the distance between the third platform (300) and the third sliding member (262). The fifth locking member (264) is threadedly connected to the second platform (200). The fifth locking member (264) locks the second rotary drive member (261) when it abuts against the second rotary drive member (261). The fifth elastic member (265) abuts against the third sliding member (262) at one end near the second rotary drive member (261), and the other end of the fifth elastic member (265) abuts against the second platform (200).

9. The six-axis slide table according to claim 8, characterized in that, A second limiting support assembly (280) is provided on the second platform (200). The second limiting support assembly (280) is located on the side of the second shaft (220) facing away from the second rotation drive assembly (260). The second limiting support assembly (280) includes a second elastic support member (281), a second rolling member (282), a second limiting drive member (283), a fifth sliding member (284), a fifth lifting member (285), and a second elastic lifting member (286). The second elastic support member (281) abuts against the third platform (300) through the second rolling member (282). The second limiting drive member (283) passes through the second platform (200) along the Y direction. The second limiting drive member (283) and the second platform (200) are connected. 0) Threaded connection, the fifth sliding member (284) is slidably disposed on the second platform (200) along the Y direction, the fifth sliding member (284) abuts against the second limiting drive member (283), the fifth sliding member (284) is provided with a fifth lifting surface, the fifth lifting member (285) abuts against the fifth lifting surface and the third platform (300) respectively, the second limiting drive member (283) drives the fifth sliding member (284) to move to change the distance between the third platform (300) and the fifth sliding member (284); the second elastic lifting member (286) is located on the side of the fifth lifting member (285) facing away from the third platform (300), the second elastic lifting member (286) abuts against the fifth lifting member (285).

10. The six-axis slide table according to claim 1, characterized in that, The third rotary drive assembly (320) is provided in two sets, and the two sets of the third rotary drive assembly (320) are respectively provided on opposite sides of the third platform (300). The third rotary drive assembly (320) includes a third rotary drive member (321) and a rotary limiting seat (322). The third rotary drive member (321) is inserted into the rotary seat (310) in a direction perpendicular to the Z direction. The third rotary drive member (321) is threadedly connected to the rotary seat (310). The rotary limiting seat (322) abuts against the third rotary drive member (321).

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