Sample testing method, device and system, storage medium and computer program product

Abstract

The invention provides a sample testing method, device and system, a storage medium and a computer program product, relates to the technical field of semiconductors, and can improve the energy spectrum acquisition efficiency. The method comprises the following steps: performing energy spectrum acquisition on a to-be-tested sample according to acquisition parameters corresponding to the to-be-tested sample to obtain first energy spectrum data; under the condition that the first energy spectrum data exceed the data acquisition range, correcting the acquisition parameters, and performing energy spectrum acquisition on the to-be-detected sample again according to the corrected acquisition parameters until second energy spectrum data meeting an energy spectrum acquisition condition is obtained according to the corrected acquisition parameters, or the correction times of the acquisition parameters reach preset times; and under the condition that the second test energy spectrum data is obtained, detecting whether the first to-be-tested sample meets the process conditions or not according to the second test energy spectrum data.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a sample testing method, apparatus, system, storage medium, and computer program product. Background Technology

[0002] Currently, X-ray photoelectron spectroscopy (XPS) has become an indispensable technique in the field of interface determination. Through XPS, researchers can obtain information such as the elemental composition, chemical state, and electronic structure of material surfaces and interfaces. However, XPS technology still has limitations. For example, when testing materials using XPS, it is necessary to manually set the sampling conditions and adjust the testing process. But the testing process generally involves multiple steps, and manual adjustment of sampling reduces the overall efficiency of the spectroscopy test. Summary of the Invention

[0003] This application discloses a sample testing method, apparatus, system, storage medium, and computer program product for improving the efficiency of energy spectrum acquisition.

[0004] Firstly, this application provides a sample testing method. This method can be executed by a sample testing device / apparatus, or by a processor, chip, or chip system of an energy spectrum acquisition device / apparatus, or by a logic module or software capable of implementing all or part of the energy spectrum acquisition device. The method includes: acquiring energy spectrum data of a first sample to be tested based on acquisition parameters corresponding to that sample, thereby obtaining first test energy spectrum data. If the first test energy spectrum data exceeds the data acquisition range, the acquisition parameters are corrected, and energy spectrum acquisition of the first sample to be tested is performed again based on the corrected acquisition parameters, until second test energy spectrum data meeting the energy spectrum acquisition conditions is obtained based on the corrected acquisition parameters, or the number of corrections to the acquisition parameters reaches a preset number. If second test energy spectrum data within the data acquisition range is obtained based on the corrected acquisition parameters, it is determined whether the first sample to be tested meets the process conditions based on the second test energy spectrum data.

[0005] Based on the technical solution provided in this application, the sample testing device acquires energy spectrum data of the first sample to be tested based on the acquisition parameters corresponding to the first sample to be tested. After obtaining the test energy spectrum data, if the test energy spectrum data exceeds the energy spectrum acquisition range, the sample testing device corrects the acquisition parameters and acquires energy spectrum data of the first sample to be tested according to the corrected acquisition parameters until energy spectrum data that meets the energy spectrum acquisition conditions is obtained according to the corrected acquisition parameters, or the number of corrections of the acquisition parameters reaches a preset number. That is, in this application, the sample testing device can automatically correct the acquisition parameters according to the test results until the energy spectrum parameters that meet the energy spectrum conditions are obtained, thus improving the adjustment efficiency of the energy spectrum parameters. At the same time, when the correction of the energy spectrum parameters reaches the preset number, the sample testing device can stop correcting the energy spectrum parameters to avoid wasting resources. Thus, when test data within the energy spectrum acquisition range is obtained according to the corrected acquisition parameters, the first sample to be tested is determined to meet the process conditions based on the test energy spectrum data within the energy spectrum acquisition range, so as to facilitate subsequent process adjustments or finished product processing.

[0006] In one possible implementation, the acquisition parameters may include one or more of the following: energy spectrum acquisition duration, energy spectrum acquisition range, and energy spectrum acquisition step size. Thus, based on these multiple acquisition parameters, energy spectrum data of the sample to be tested can be accurately acquired.

[0007] In one possible implementation, the above-mentioned re-acquisition of the energy spectrum of the first sample to be tested according to the modified acquisition parameters includes: re-acquiring the energy spectrum of the first sample to be tested according to the modified acquisition parameters and the preset acquisition method.

[0008] In one possible implementation, the aforementioned preset acquisition method may include: acquiring energy spectrum data from a fixed point on the first sample to be tested each time, or acquiring energy spectrum data from multiple points on the first sample to be tested each time. These multiple points can be all different or partially the same. Thus, the sample testing device can acquire energy spectrum data of the sample to be tested based on different acquisition methods, offering flexibility and convenience. Furthermore, if energy spectrum data from a fixed point is acquired each time, there is no need to adjust the position of the sample to be tested, improving efficiency. If energy spectrum data from multiple points is acquired each time, it is possible to more accurately determine whether the acquired energy spectrum data is within the energy spectrum acquisition range, avoiding errors from single-point energy spectrum data.

[0009] In one possible implementation, the aforementioned first test energy spectrum data includes multiple energy spectrum data. The first test energy spectrum data exceeding the data acquisition range includes: the fluctuation values ​​of multiple energy spectrum data exceeding a first preset value, and / or the change values ​​of the peak areas of the photoelectron spectra corresponding to multiple energy spectrum data exceeding a second preset value. That is, when the fluctuations in the acquired test energy spectrum data are large, it is determined that the acquired test energy spectrum data does not meet the requirements, and the acquisition parameters need to be adjusted accurately and conveniently.

[0010] In one possible implementation, the acquisition parameters are either pre-set or determined based on the photoelectron spectrum of the first sample to be tested.

[0011] In one possible implementation, the first test energy spectrum data is determined based on at least one of the film thickness of the first test sample, the film thickness ratio of the first test sample, the elemental content of the first test sample, and the elemental content ratio of the first test sample. Since the methods for obtaining the film thickness, elemental content, or elemental content ratio of the first test sample are relatively simple, the energy spectrum data can be quickly obtained by using the film thickness, elemental content, or elemental content ratio.

[0012] In one possible implementation, the above-mentioned correction of the acquisition parameters includes: correcting the acquisition parameters based on the number and / or energy of the acquired photoelectrons. Since the number and energy of the acquired photoelectrons can affect the energy spectrum data of the sample under test, the acquisition parameters can be corrected more accurately based on the number and / or energy of the acquired photoelectrons, making the acquisition results more reasonable.

[0013] In one possible implementation, the acquisition parameters include the energy spectrum acquisition time. If the number of photoelectrons acquired is less than a first preset number, and / or the relative standard deviation of the acquired energy spectrum is greater than a first preset value, the energy spectrum acquisition time is increased; if the number of photoelectrons acquired is greater than a second preset number, and / or the relative standard deviation of the acquired energy spectrum is less than a second preset value, the energy spectrum acquisition time is decreased. The first preset number is less than the second preset number, and the first preset value is greater than the second preset value. Since the number of photoelectrons acquired is related to the energy spectrum acquisition time, the energy spectrum acquisition time can be accurately corrected based on the number of photoelectrons acquired.

[0014] In one possible implementation, the acquisition parameters include the energy spectrum acquisition range and the energy spectrum acquisition step size. The method further includes: acquiring the initial photoelectron spectrum of the first test sample, and determining the acquisition parameters corresponding to the first test sample based on the initial photoelectron spectrum; wherein the energy spectrum acquisition range is not lower than the acquisition range corresponding to the peak region in the initial photoelectron spectrum, and the energy spectrum acquisition step size is not greater than the acquisition step size in the initial photoelectron spectrum.

[0015] Based on this implementation method, since there is a correspondence between the photoelectron spectrum of the sample under test and the acquisition parameters—for example, the more accurate the acquisition parameters, the more accurate the obtained photoelectron spectrum—compared to setting the acquisition parameters randomly or arbitrarily and then adjusting them multiple times, the initial acquisition parameters can be set more accurately using the photoelectron spectrum of the sample under test. This reduces the number of subsequent corrections and improves testing efficiency.

[0016] In one possible implementation, the method of this application may further include: storing target energy spectrum parameters in the case of the acquired second test energy spectrum data; the target energy spectrum parameters are the acquisition parameters used when acquiring the second test energy spectrum data.

[0017] Based on this implementation method, if the energy spectrum data of the test can be obtained within the data acquisition range after the acquisition parameters are corrected, the corrected acquisition parameters can be stored so that the acquisition parameters can be directly used to adjust the sample to be tested in the future without having to correct the acquisition parameters again, thereby reducing the correction time and improving the testing efficiency.

[0018] In one possible implementation, when it is determined that energy spectrum acquisition of the second test sample is necessary, energy spectrum acquisition of the second test sample is performed based on target acquisition parameters. The model of the second test sample is the same as that of the first test sample. That is, the test energy spectrum data of the second test sample is the same as or similar to the test energy spectrum data of the first test sample. In this way, the target acquisition parameters can be used to directly acquire data of the second test sample, which is accurate and convenient.

[0019] In one possible implementation, the method of this application may further include: performing an error reporting operation when the number of corrections to the acquisition parameters reaches a preset number. For example, the error reporting operation may include: outputting a prompt message for correcting the acquisition parameters, and / or pausing the operation. This avoids continuing to correct the acquisition parameters when satisfactory acquisition parameters cannot be obtained, thus reducing resource waste.

[0020] Secondly, this application provides a sample testing device, which can be the sample testing equipment in the first aspect above, or any implementation of the first aspect, or a device including the sample testing equipment, or a device included in the energy spectrum acquisition device, such as a chip.

[0021] In some possible designs, the sample testing device may include: an acquisition module and a processing module. The acquisition module is used to acquire energy spectrum data of the first sample under test based on the acquisition parameters corresponding to the first sample under test. The processing module is used to correct the acquisition parameters if the first energy spectrum data exceeds the data acquisition range. The processing module is also used to re-acquire energy spectrum data of the first sample under test based on the corrected acquisition parameters until second energy spectrum data meeting the energy spectrum acquisition conditions is acquired based on the corrected acquisition parameters, or the number of corrections to the acquisition parameters reaches a preset number. The processing module is also used to determine whether the first sample under test meets the process conditions based on the second energy spectrum data obtained according to the corrected acquisition parameters.

[0022] In one possible implementation, the above acquisition parameters may include one or more of the following: energy spectrum acquisition duration, energy spectrum acquisition range, and energy spectrum acquisition step size.

[0023] In one possible implementation, the acquisition module is specifically used to: re-acquire the energy spectrum of the first sample to be tested according to the corrected acquisition parameters and the preset acquisition method.

[0024] In one possible implementation, the aforementioned preset acquisition method may include: acquiring energy spectrum data from a fixed location on the first sample to be tested each time, or acquiring energy spectrum data from multiple locations on the first sample to be tested each time. At least some of these multiple locations are different.

[0025] In one possible implementation, the first test energy spectrum data exceeding the data acquisition range includes: the fluctuation value of multiple energy spectrum data included in the first test energy spectrum data is greater than a first preset value, and / or the change value of the peak area of ​​the photoelectron energy spectrum corresponding to the multiple energy spectrum data is greater than a second preset value.

[0026] In one possible implementation, the acquisition parameters are either pre-set or determined based on the photoelectron spectrum of the first sample to be tested.

[0027] In one possible implementation, the aforementioned test energy spectrum data (such as first test energy spectrum data, second test energy spectrum data) is determined based on at least one of the following: film thickness of the first test sample, film thickness ratio of the first test sample, film thickness ratio of the first test sample, elemental content of the first test sample, and elemental content ratio of the first test sample.

[0028] In one possible implementation, the above-mentioned processing module is specifically used to: correct the acquisition parameters based on the number and / or energy of the acquired photoelectrons.

[0029] In one possible implementation, the acquisition parameters include the energy spectrum acquisition duration. If the number of photoelectrons acquired is less than a first preset number, and / or the relative standard deviation of the acquired energy spectrum is greater than a first preset value, the energy spectrum acquisition duration is increased; if the number of photoelectrons acquired is greater than a second preset number, and / or the relative standard deviation of the acquired energy spectrum is less than a second preset value, the energy spectrum acquisition duration is decreased; the first preset number is less than the second preset number, and the first preset value is greater than the second preset value.

[0030] In one possible implementation, the acquisition parameters include the energy spectrum acquisition range and the energy spectrum acquisition step size. The acquisition module is further configured to: acquire the initial photoelectron spectrum of the first test sample. The processing module is further configured to determine the acquisition parameters corresponding to the first test sample based on the initial photoelectron spectrum; wherein the energy spectrum acquisition range is not lower than the acquisition range corresponding to the peak region in the initial photoelectron spectrum, and the energy spectrum acquisition step size is not greater than the acquisition step size in the initial photoelectron spectrum.

[0031] In one possible implementation, the apparatus provided in this application may further include a storage module. This storage module is used to store target energy spectrum parameters upon acquiring the second test energy spectrum data. The target energy spectrum parameters are the acquisition parameters used when acquiring the second test energy spectrum data.

[0032] In one possible implementation, the acquisition module is further configured to, when it is determined that energy spectrum acquisition of the second test sample is required, perform energy spectrum acquisition of the second test sample based on stored target acquisition parameters, wherein the model of the second test sample is consistent with the model of the first test sample.

[0033] In one possible implementation, the processing module is further configured to perform an error reporting operation when the number of corrections to the collected parameters reaches a preset number.

[0034] In one possible implementation, the above error reporting operation includes: outputting a prompt message for correcting the acquisition parameters, and / or stopping and exiting the system.

[0035] Thirdly, an energy spectrum acquisition system is provided, which may include the sample testing device provided in any embodiment of the second aspect.

[0036] Fourthly, a computer-readable storage medium is provided that stores a computer program or instructions that, when run on a sample testing apparatus, enable the sample testing apparatus to perform the methods of any of the above aspects or any of their embodiments.

[0037] Fifthly, a computer program product containing instructions is provided, which, when run on a sample testing apparatus, enables the sample testing apparatus to perform the methods of any of the above aspects or any of their embodiments.

[0038] In a sixth aspect, a sample testing apparatus (e.g., the sample testing apparatus may be a chip or a chip system) is provided, the sample testing apparatus including a processor for implementing the functions involved in any of the above aspects or any of the embodiments thereof.

[0039] In some possible designs, the communication device includes a memory for storing necessary program instructions and data.

[0040] In some possible designs, when the device is a chip system, it can be composed of chips or contain chips and other discrete components.

[0041] It is understood that when the communication device provided by either of the above parties is a chip, the above-mentioned sending action / function can be understood as output, and the above-mentioned receiving action / function can be understood as input.

[0042] The technical effects of any of the second to sixth aspects can be found in the technical effects of the corresponding embodiments of the first aspect, and will not be repeated here.

[0043] It should be noted that various possible implementation methods of any of the above aspects can be combined, provided that the solutions do not contradict each other. Attached Figure Description

[0044] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0045] Figure 1 A schematic diagram of a photoelectron spectrum provided in an embodiment of this application;

[0046] Figure 2 A schematic diagram of another photoelectron spectrum provided in an embodiment of this application;

[0047] Figure 3 This is a schematic diagram of the structure of an energy spectrum acquisition system provided in an embodiment of this application;

[0048] Figure 4 A schematic diagram of a photoelectric effect provided in an embodiment of this application;

[0049] Figure 5 A schematic diagram illustrating the generation of a photoelectric emission spectrum, provided as an embodiment of this application;

[0050] Figure 6 A schematic diagram of an energy spectrum acquisition method provided in an embodiment of this application;

[0051] Figure 7 A schematic diagram of another energy spectrum acquisition method provided in an embodiment of this application;

[0052] Figure 8 A schematic diagram illustrating yet another energy spectrum acquisition method provided in an embodiment of this application;

[0053] Figure 9 A schematic diagram illustrating yet another energy spectrum acquisition method provided in an embodiment of this application;

[0054] Figure 10 A schematic diagram illustrating yet another energy spectrum acquisition method provided in an embodiment of this application;

[0055] Figure 11 This is a schematic diagram of a sample testing device provided in an embodiment of this application. Detailed Implementation

[0056] XPS technology has wide applications in the fields of science and semiconductor metrology. XPS technology mainly uses X-rays to irradiate a sample (such as a wafer), and through the photoelectric effect, it causes the inner-shell electrons or valence electrons of the atoms or molecules in the sample to be emitted. These emitted electrons are called photoelectrons.

[0057] By analyzing the measured energy and quantity of photoelectrons, a photoelectron spectrum can be plotted. The horizontal axis of the photoelectron spectrum represents the kinetic energy of the photoelectrons, and the vertical axis represents the relative intensity (pulses / second) or the number of photoelectrons. By fitting the peak positions and peak areas in the photoelectron spectrum, information about the sample's composition and elemental content can be obtained.

[0058] Similar to many measurement techniques, increasing the XPS acquisition time within a reasonable range can optimize the relative standard deviation (RSD) of the acquired energy spectrum data. In scientific research, because the acquisition efficiency of photoelectrons is relatively insensitive, the available thresholds for acquisition conditions are usually quite wide. However, in the semiconductor measurement field, since the acquisition efficiency of photoelectrons is highly correlated with wafer per hour (WPH), optimizing the acquisition conditions according to RSD requirements is a crucial step in XPS measurement setup.

[0059] In one possible implementation, to improve the energy spectrum acquisition efficiency, both Snap and Scan acquisition methods can be used for energy spectrum measurement. These two acquisition methods are described below.

[0060] I. Snap acquisition method.

[0061] The Snap acquisition method refers to energy spectrum acquisition by simultaneously collecting the signal intensities of all channels on the microchannel board of the acquisition instrument after setting the acquisition conditions. The channels on the microchannel board can be physical channels or virtual channels. Each channel corresponds to one photoelectron kinetic energy. Acquisition conditions can include acquisition time, throughput, and energy point.

[0062] Typically, the number of channels on the microchannel plate of a data acquisition instrument can be 32, 64, or 128. Of course, there is no limit to the number that can be increased.

[0063] In one example, taking a microchannel plate with 128 channels in the acquisition instrument and silicon (Si) as the sample material, the photoelectron spectrum obtained based on the Snap method can be: Figure 1 As shown, the photoelectron spectrum has two peaks. The horizontal axis corresponds to the channel number, and the vertical axis represents the number of photoelectrons with the corresponding photoelectron kinetic energy.

[0064] In the Snap acquisition method, the acquisition efficiency of each channel on the microchannel plate of the acquisition device varies, thus requiring strict calibration of the acquisition efficiency of each channel. Furthermore, in this method, channels at peak values ​​operate at high counts for extended periods, leading to a rapid decline in acquisition efficiency and potential data distortion, thereby increasing the difficulty of calibration for those channels. Additionally, as mentioned above, the transmission energy of photoelectrons to be acquired in the Snap acquisition method is preset. Since the kinetic energy acquisition range and step size of photoelectrons are also limited by the transmission energy, the kinetic energy acquisition range and kinetic energy acquisition correction of the acquisition device are fixed and cannot be flexibly adjusted.

[0065] II. Scan spectral acquisition method.

[0066] The Scan acquisition method refers to changing the deceleration voltage so that each channel of the acquisition device scans the sample at a specified step size, allowing each channel to acquire data from the starting point of the kinetic energy range to the ending point. In other words, each channel can acquire photoelectrons at every kinetic energy level within the kinetic energy range.

[0067] Continuing with the example above, the microchannel plate of the acquisition device has 128 channels. After the acquisition device completes the scan, channels 1-128 are scanned once from the starting point to the ending point of the kinetic energy according to a specified step size, resulting in 128 sets of scan data. These 128 sets of scan data can be plotted to obtain the photoelectron energy spectrum, with the horizontal axis representing the electron kinetic energy and the vertical axis representing the counted photoelectron energy. By accumulating these photoelectron energy spectra, the final energy spectrum data can be obtained.

[0068] In one example, the photoelectron spectrum acquired by the acquisition device using the Scan spectral acquisition method is as follows: Figure 2 As shown. Each channel corresponds to a photoelectron spectrum. By traversing and integrating the data from all channels, differences caused by varying channel acquisition efficiencies can be avoided.

[0069] In the Scan spectral acquisition method, some data acquired from certain channels needs to be deleted due to acquisition issues. The proportion of data to be deleted is negatively correlated with the acquisition range. That is, the smaller the acquisition range, the higher the proportion of data discarded. Meanwhile, the energy measurement range and acquisition step size can be preset.

[0070] However, the Scan acquisition method requires setting many parameters. Among these, the main parameters affecting WPH include kinetic energy acquisition range, kinetic energy acquisition step size, single-step acquisition time, throughput energy, and the number of acquisitions. Under a fixed RSD requirement, these parameters can collectively have a significant impact on WPH. However, there are still some issues with setting these parameters, as shown in Table 1.

[0071] Table 1

[0072] Frequently Asked Questions Causes Consequences General solutions Time cost The kinetic energy harvesting range is too large. Peak position difference WPH decreased by approximately 20%. Post-test optimization Manual optimization takes several hours. Data collection step size too large / too small Peak Difference WPH decreased by approximately 20%. Generally not optimized. Optimization would take several days. Data collection time too long / too short Signal-to-noise ratio difference WPH decreased Optimization based on RSD It will take several days to optimize. The size is too large / too small Resolution requirements WPH decreased Generally not optimized. Optimization would take several days.

[0073] As shown in Table 1, if the energy spectrum acquisition parameters are not set properly, it will take a long time to optimize them, which reduces the energy spectrum acquisition efficiency.

[0074] Figure 3 This is a schematic diagram of an energy spectrum acquisition system provided in this application. For example, this energy spectrum acquisition system can be an X-ray acquisition system. Figure 3 As shown, the energy spectrum acquisition system may include an X-ray emitter and an energy analyzer.

[0075] The X-ray emitter generates X-rays. The energy analyzer (also called an energy spectrum acquisition device) collects electrons and generates an XPS spectrum based on the signal intensity of the collected electrons. This XPS spectrum is then analyzed to determine whether the sample meets the process requirements.

[0076] In one possible implementation, the XPS system can control an X-ray generator to emit X-rays onto the sample, exciting core-level electrons or valence electrons in the sample, overcoming their binding energy and work function, thereby forming free photoelectrons (also called free electrons) with a certain kinetic energy. The photoelectrons are collected by an energy analyzer to obtain the signal intensity of photoelectrons with different energies, and thus, the XPS energy spectrum of the sample can be generated.

[0077] XPS spectroscopy reflects the binding energy distribution of electrons in a sample, thus determining the elemental content and chemical environment within the sample. Consequently, the composition of the sample and the thickness of the thin film (referred to as film thickness for ease of description) can be calculated. For example, the types of elements on the sample surface can be identified by the binding energy peaks of photoelectrons in XPS spectroscopy, and the relative elemental content can be calculated based on the peak area. Furthermore, the film thickness can be calculated by utilizing the exponential decay of photoelectron signal intensity with depth, based on signal differences at different angles or energies.

[0078] In one example, the film thickness of the sample can be calculated based on the inelastic mean free path of photoelectrons in the thin film of the sample, the peak area of ​​the thin film and the relative sensitivity factor of the element, and the peak area of ​​the substrate of the sample and the relative sensitivity factor of the element.

[0079] For example, the film thickness of the sample satisfies the following formula:

[0080]

[0081] Where d represents the film thickness of the sample, λ represents the inelastic mean free path of photoelectrons in the film (this parameter is related to the sample material and photoelectron energy), θ represents the photoelectron emission angle (i.e., the angle between the photoelectron emission direction and the sample normal), Is represents the peak area of ​​the film, If represents the peak area of ​​the substrate, and RSF... s The relative sensitivity factor (RSF) of elements in a thin film. f Represents the relative sensitivity factor of the elements in the substrate. RSFs, RSF f It can be obtained through prior measurement. K represents the correction factor (related to the density ratio of the substrate to the film and the performance of the XPS system).

[0082] In one possible implementation, Figure 3 The illustrated energy spectrum acquisition system may also include a control device. This control device is communicatively connected to the X-ray emitter and the energy analyzer. The control device can control the X-ray emitter and the acquisition parameters of the energy analyzer.

[0083] In one example, the control device can be a standalone device or integrated with an energy analyzer.

[0084] In this embodiment, the XPS system tests the sample based on the photoelectric effect. The photoelectric effect refers to the phenomenon where a material emits electrons when light shines on its surface. Figure 4 The diagram shown illustrates a photoelectric effect. Figure 4 The diagram illustrates the process of the photoelectric effect and the kinetic energy distribution of photoelectrons.

[0085] Where 2p, 2s, and 1s represent the different orbital energy levels of an electron in an atom. 3 / 2 and 1 / 2 represent the total angular momentum quantum numbers of the electron. The binding energy refers to the energy state of an electron in an atom, and its magnitude is directly related to the energy required for it to be excited by a photon.

[0086] In one example, such as Figure 5 The diagram illustrates a method for generating a photoelectron emission spectrum. Here, E represents the kinetic energy of the photoelectron, hw represents the incident photon energy, Φ represents the electron work function, and Eg represents the band gap energy. F This refers to the Fermi level. A valence electron is an electron excited by a photon and located in the valence band. A core level electron is an electron located in the core level.

[0087] Figure 5 The diagram illustrates the basic principles of photoelectric emission energy spectrum, including photon-induced electron excitation, energy analysis, and the final energy spectrum information.

[0088] In one possible application scenario, in a wafer fabrication workshop, wafers on the production line need to be inspected to determine if they meet requirements. This necessitates energy dispersive spectroscopy (EDS) data for each wafer. Based on the collected EDS data, information such as elemental composition and film thickness is analyzed to determine the wafer's qualification. However, due to the large number of wafers on the production line, manually adjusting the acquisition parameters each time would be time-consuming, resulting in low measurement efficiency.

[0089] like Figure 6 As shown, after obtaining the process recipe or configuration requirements, the XPS system can perform optimization testing based on pre-set data acquisition conditions. This optimization testing involves the XPS system performing a test first, followed by manual optimization of the data acquisition range. The XPS system then re-performs the test based on the optimized data acquisition range. This optimization testing process typically takes several hours.

[0090] After determining the data collection scope, the XPS system performs repeatability testing until suitable data collection conditions are obtained. This repeatability testing includes: determining the data collection scope and conducting repeatability tests; optimizing the data collection step size and time based on the stability indicators from the tests, and then conducting repeatability tests again. This repeatability process typically takes several days or even weeks to set up. The testing cycle is relatively long.

[0091] In the aforementioned methods, optimizing test operations and repetitive operations are time-consuming, resulting in low testing efficiency. Therefore, this application provides an energy spectrum acquisition method that automatically adjusts acquisition parameters based on the acquired photoelectron energy spectrum, optimizing the RSD mechanical energy spectrum parameters without manual intervention. This improves the energy spectrum acquisition efficiency. The following will combine... Figure 7 This application introduces a sample testing method provided in its embodiments, which can be used for... Figure 3 The energy spectrum acquisition system is shown. The execution entity of this method can be the aforementioned XPS system, or the control device in an energy analyzer. The following explanation uses the control device as the execution entity. Figure 7 As shown, the method may include S701 to S703:

[0092] S701. Based on the acquisition parameters corresponding to the first test sample, perform energy spectrum acquisition on the first test sample to obtain the first test energy spectrum data.

[0093] The first test sample refers to a material that can generate photoelectrons under X-ray irradiation. For example, it can be a semiconductor material (such as a wafer). The acquisition parameters refer to the parameters used to collect the photoelectrons generated by the first test sample. For example, the acquisition parameters may include one or more of the following: energy spectrum acquisition time, energy spectrum acquisition range, and energy spectrum acquisition step size. The first test energy spectrum data can be determined based on one or more of the following: film thickness, film thickness ratio of multiple films, elemental content, and elemental content ratio. For specific details, please refer to the relevant descriptions in the following embodiments, which will not be repeated here.

[0094] In one possible implementation, the control device can control the X-ray emitter to emit X-rays toward the first sample to be tested, and collect the photoelectrons generated by the first sample to be tested through an energy analyzer, thereby obtaining the first test energy spectrum data of the first sample to be tested.

[0095] In one example, the energy analyzer can collect photoelectrons generated by the first sample under test using a Scan spectral method.

[0096] In this embodiment, samples made of different materials have different characteristics (such as the number and energy of photoelectrons generated). Therefore, different acquisition parameters can be set for samples made of different materials. This can reduce subsequent adjustment time.

[0097] In one example, taking the acquisition parameters including the energy spectrum acquisition step size and the energy spectrum acquisition range as an example, the control device uses a small step size and a large range to perform a single-point test on the first sample to be tested.

[0098] The "small step size, large range" approach can refer to determining the initial energy spectrum acquisition step size and initial energy spectrum acquisition range of the first test sample based on its initial photoelectron spectrum. Then, single-point testing is performed on the first test sample according to this initial energy spectrum acquisition step size and range, and the acquisition parameters corresponding to the first test sample are determined based on the energy spectrum generated by the acquired photoelectrons. The initial energy spectrum acquisition step size is smaller than the acquisition step size in the initial photoelectron spectrum, and the initial energy spectrum acquisition range is larger than the acquisition range corresponding to the energy peak of the photoelectrons in the initial photoelectron spectrum.

[0099] In one example, taking a standard acquisition step size of 0.5 electron volts (eV) and a photoelectron energy range of 50 eV to 70 eV as an example, a small step size and large range approach can refer to using an initial energy spectrum acquisition step size of less than 0.5 eV, encompassing an initial energy spectrum acquisition range of 50 eV to 70 eV, to acquire the energy spectrum of the first sample to be tested. For example, an initial energy spectrum acquisition step size of 0.2 eV and an initial energy spectrum acquisition range of 40 eV to 80 eV can be used to acquire the energy spectrum of the first sample to be tested, obtaining the test energy spectrum data.

[0100] In this embodiment, the initial photoelectron spectrum of the first test sample can be pre-set or generated during preliminary measurement in the mass production of the first test sample.

[0101] In another example, taking the energy spectrum acquisition time as an example of acquisition parameters, the XPS system can determine the acquisition time based on the number of photoelectrons acquired. For example, if the time required to acquire N photoelectrons is S, then the energy spectrum acquisition time for the first sample to be tested can be S or greater than S. N and S are positive numbers.

[0102] In some scenarios, the photoelectron energy spectrum generated by N photoelectrons is the minimum number of photoelectrons required to calculate the elemental content and film thickness of the first sample to be tested.

[0103] In another example, the acquisition parameters corresponding to the first sample to be tested can be set according to historical test data. For example, they can be set according to the acquisition parameters of other samples that are of the same or similar type as the first sample to be tested.

[0104] S702. If the first test energy spectrum data exceeds the data acquisition range, the acquisition parameters are corrected, and the energy spectrum of the first sample to be tested is re-acquired according to the corrected acquisition parameters until the correction stop condition is met.

[0105] The data acquisition range can be used to detect whether the acquired energy spectrum data meets the standards. For example, the data acquisition range can include fluctuation values ​​of the test energy spectrum data, changes in peak areas in the corresponding photoelectron energy spectrum, etc. Specific descriptions of these data acquisition ranges can be found in Example 1 below, and will not be repeated here.

[0106] The correction stopping conditions may include the energy spectrum data obtained based on the corrected acquisition parameters being within the data acquisition range, or the acquisition parameters being corrected a preset number of times. Once the correction stopping conditions are met, the correction of the acquisition parameters can be stopped.

[0107] In some examples, after correcting the acquisition parameters, the control device can re-acquire the energy spectrum of the first test sample using the corrected parameters. If the acquired energy spectrum data is within the data acquisition range, it indicates that the corrected acquisition parameters are acceptable. If the acquired energy spectrum data exceeds the data acquisition range, the control device can continue to correct the acquisition parameters and re-acquire the energy spectrum of the first test sample using the corrected parameters through the energy analyzer. This process is repeated until energy spectrum data that meets the energy spectrum acquisition conditions can be obtained based on the corrected acquisition parameters.

[0108] In another example, after correcting the acquisition parameters, the control device can count the number of corrections. If the number of corrections has not reached a preset number, and no energy spectrum data meeting the energy spectrum acquisition conditions is obtained based on the corrected acquisition parameters, the control device can continue to correct the acquisition parameters and count the number of corrections. If the number of corrections reaches the preset number, the control device will stop correcting the acquisition parameters regardless of whether energy spectrum data meeting the energy spectrum acquisition conditions can be obtained based on the corrected acquisition parameters. This avoids the control device continuously correcting the energy spectrum parameters when the energy spectrum acquisition conditions cannot be met, thus preventing the waste of processing resources.

[0109] In one possible implementation, taking the energy spectrum acquisition time as an example, the control device can adjust the energy spectrum acquisition time according to the number and / or energy of the acquired photoelectrons.

[0110] For example, if the number of photoelectrons collected is less than a first preset number, and / or the relative standard deviation of the collected energy spectrum is greater than a first preset value, the energy spectrum collection time can be increased. The first preset number and the first preset value can be set as needed and are not limited.

[0111] For example, if the number of photoelectrons collected is greater than a second preset number, and / or the relative standard deviation of the collected energy spectrum is less than a second preset value, the energy spectrum acquisition time can be reduced. The second preset value and the second preset number can be set as needed and are not limited. Specifically, the first preset number is less than the second preset number, and the first preset value is greater than the second preset value.

[0112] In one possible implementation, taking the acquisition parameters including the energy spectrum acquisition range as an example, the control device can correct the energy spectrum acquisition range based on the photoelectron energy spectrum formed by the acquired photoelectrons.

[0113] For example, if the peak shape in the photoelectron energy spectrum formed by the collected photoelectrons is incomplete, it indicates that the energy spectrum collection range is too small, and the energy spectrum collection range can be increased.

[0114] For example, if the background signal in the photoelectron energy spectrum formed by the collected photoelectrons is significantly longer, it indicates that the energy spectrum collection range is too large, and the energy spectrum collection range can be reduced.

[0115] In one possible implementation, taking the acquisition parameters including the energy spectrum acquisition step size as an example, the control device can correct the acquisition step size according to the number of photoelectrons acquired within the energy spectrum acquisition range.

[0116] For example, if the number of photoelectrons collected within the energy spectrum acquisition range is less than the third preset number, the energy spectrum acquisition step size can be reduced. In this way, more photoelectrons can be collected by increasing the acquisition frequency.

[0117] For example, if the number of photoelectrons collected within the energy spectrum acquisition range is greater than the fourth preset number, it indicates that too many photoelectrons have been collected. Therefore, in order to improve the acquisition efficiency, the energy spectrum acquisition step size can be reduced.

[0118] In this embodiment, the modifications to the acquisition parameters (such as energy spectrum acquisition time, energy spectrum acquisition range, and energy spectrum acquisition step size) can be based on preset correction values. For example, each time the acquisition parameters need to be adjusted, the correction value can be added to or subtracted from the acquisition parameters. Each acquisition parameter has a corresponding correction value.

[0119] S703. If the second test energy spectrum data located within the data acquisition range is obtained according to the corrected acquisition parameters, determine whether the first test sample meets the process conditions based on the second test energy spectrum data.

[0120] The process conditions, also known as process requirements, reflect whether the sample under test can be mass-produced. For example, if the first sample under test meets the process conditions, it means that the first sample under test is qualified and meets the production standards. Thus, the same product as the first sample under test can be produced according to its production process. If the first sample under test does not meet the process conditions, it means that the first sample under test is unqualified and does not meet the production standards, indicating that the production process of the first sample under test needs to be adjusted. See Example 2 below for a specific example.

[0121] based on Figure 7 The technical solution described in this application involves acquiring energy spectrum data of the first test sample based on the acquisition parameters corresponding to that sample. If the acquired data does not meet the energy spectrum acquisition conditions, the acquisition parameters can be corrected, and energy spectrum acquisition of the first test sample can be repeated based on the corrected parameters until energy spectrum data meeting the acquisition conditions is obtained, or the number of parameter corrections reaches a preset number. In other words, this application allows for adaptive correction of acquisition parameters based on the energy spectrum acquisition results, eliminating the need for manual intervention and improving the efficiency of parameter adjustment. Furthermore, if acquisition parameters meeting the energy spectrum acquisition conditions cannot be obtained, correction can be stopped, avoiding system wastage.

[0122] In some implementations (Example 1), in the embodiments of this application, the above-mentioned S701 of obtaining the first test energy spectrum data may include: generating a photoelectron energy spectrum based on the number and energy of the collected photoelectrons, and obtaining the first test energy spectrum data based on the photoelectron energy spectrum.

[0123] Among them, the energy of photoelectrons can be the kinetic energy of photoelectrons.

[0124] In some possible implementations, combined Figure 5 The control equipment filters the collected photoelectrons by adjusting the scanning voltage of the energy analyzer to obtain photoelectrons corresponding to different kinetic energies, and converts each photoelectron into an electrical pulse. By counting the number of electrical pulses, the number of photoelectrons under different kinetic energies can be determined.

[0125] After determining the number of photoelectrons collected, a photoelectron energy spectrum can be plotted using the number of photoelectrons as the vertical axis and the kinetic energy of the photoelectrons as the horizontal axis. For example, the control device can generate the photoelectron energy spectrum based on preset plotting software. In this embodiment, after generating the photoelectron energy spectrum of the first sample to be tested, the control device can analyze the photoelectron energy spectrum to obtain data such as the film thickness, the thickness ratio of multiple films, the elemental content, and the elemental content ratio of the first sample to be tested. The control device can use this data as the first test energy spectrum data of the first sample to be tested, or process the data to obtain the test energy spectrum data of the first sample to be tested. For example, the variance and peak-to-valley values ​​of the data can be used as the first test energy spectrum data of the first sample to be tested.

[0126] After acquiring the first energy spectrum data of the first sample to be tested, the control device can detect the first energy spectrum data to determine whether it is within the data acquisition range. If the first energy spectrum data is within the data acquisition range, it means that the energy spectrum data that meets the requirements can be acquired according to the corrected acquisition parameters. In this case, subsequent operations can be performed, such as performing process analysis on the first sample to be tested based on the first energy spectrum data. If the first energy spectrum data exceeds the data acquisition range, the acquired first energy spectrum data does not meet the requirements, and the control device can continue to correct the acquisition parameters.

[0127] Whether the first test energy spectrum data is within the data acquisition range may include whether the fluctuation value of the first test energy spectrum data is less than a first preset value, and / or whether the change value of the peak area in the photoelectron energy spectrum corresponding to the first test energy spectrum data is less than a second preset value. A specific example will be provided below for further explanation.

[0128] For example, 1-1, whether the fluctuation value of the first test energy spectrum data is less than the first preset value.

[0129] The fluctuation value of the test energy spectrum data can be used to reflect the stability of the test energy spectrum data. The larger the fluctuation value, the worse the stability of the test energy spectrum data. The smaller the fluctuation value, the better the stability of the test energy spectrum data.

[0130] For example, the fluctuation value of the first test energy spectrum data can be the standard deviation or relative standard deviation (standard deviation divided by the average value) of multiple consecutive test energy spectrum data. Taking the fluctuation value as the relative standard deviation as an example, if the relative standard deviation is greater than or equal to the first preset value, it means that the first test energy spectrum data exceeds the data acquisition range; if the relative standard deviation is less than the preset value, it means that the first test energy spectrum data does not exceed the data acquisition range.

[0131] In one example, the first energy spectrum data includes the silicon (Si) content of the first sample under test, with a first preset value of 0.5%. If 10 tests are performed on the same location of the first sample under test, 10 first energy spectrum data points are collected. The percentages of Si in the silicon dioxide layer of these 10 energy spectrum data points are 30.12%, 29.97%, 30.05%, 30.08%, 29.93%, 30.15%, 29.89%, 30.11%, 30.02%, and 29.98%, respectively. The relative standard deviation of these values ​​is 0.33%, which is less than 0.5%, indicating that the fluctuation values ​​of these 10 first energy spectrum data points are relatively small. Therefore, the first energy spectrum data does not exceed the data acquisition range. Similarly, if the relative standard deviation of the first energy spectrum data is greater than or equal to 0.5%, it indicates that the fluctuation values ​​of the first energy spectrum data are relatively large, and the first energy spectrum data exceeds the data acquisition range.

[0132] In another example, the first test energy spectrum data includes the film thickness of the first sample under test, with a first preset value of 0.5%. If 10 consecutive tests are performed on the same location of the first sample under test, 10 first test energy spectrum data points are collected. The film thicknesses measured / calculated based on these 10 test energy spectrum data points are: 11.02 Å, 10.98 Å, 11.05 Å, 10.96 Å, 11.03 Å, 11.01 Å, 10.99 Å, 11.04 Å, 10.97 Å, and 11.00 Å. The relative standard deviation of these 10 film thicknesses is 0.59%, which is greater than 0.5%, indicating that the fluctuation value of these 10 first test energy spectrum data points is relatively large. Therefore, the first test energy spectrum data points exceed the data acquisition range. Similarly, if the relative standard deviation of the first test energy spectrum data points is less than 0.5%, it indicates that the fluctuation value of the first test energy spectrum data points is relatively small, and the first test energy spectrum data points do not exceed the data acquisition range.

[0133] Furthermore, if the fluctuation value of the first test energy spectrum data is relatively good (e.g., the difference between it and the first preset value is greater than the preset difference), it indicates that the first test energy spectrum data is relatively stable, and the XPS system can also reduce the energy spectrum acquisition time. For example, if the relative standard deviation of the content of multiple Si elements in the first test sample in the first test energy spectrum data is 0.05%, and the preset difference is 0.1%, since 0.5% - 0.05% = 0.45%, which is greater than 0.1%, it indicates that the first test energy spectrum data is relatively stable, and the XPS system can reduce the energy spectrum acquisition time, thereby saving the system's information processing resources.

[0134] For example, 1-2, whether the change in peak area in the photoelectron energy spectrum corresponding to the test energy spectrum data is less than the second preset value.

[0135] The photoelectron spectrum corresponding to the first test energy spectrum data refers to the photoelectron spectrum generated based on the collected first test energy spectrum data.

[0136] In one example, taking the test energy spectrum data including elemental content as an example, the photoelectron spectrum generated based on the first test energy spectrum data can include the peak shape and peak area corresponding to that elemental content. Thus, if the peak area corresponding to multiple consecutive first test energy spectrum data points varies significantly, it indicates that the first test energy spectrum data is unstable, and the control equipment needs to increase the energy spectrum acquisition time. If the peak area corresponding to multiple consecutive first test energy spectrum data points varies only slightly, it indicates that the first test energy spectrum data is stable, and the control equipment can reduce the energy spectrum acquisition time.

[0137] For example, taking a second preset value of 0.5%, after generating a photoelectron spectrum based on the first test energy spectrum data, the control device can calculate the peak area in the photoelectron spectrum. This application does not limit the specific calculation method for the peak area. If the relative standard deviation of the peak area in the photoelectron spectrum corresponding to multiple consecutive first test energy spectrum data is less than 0.5%, it indicates that the change value of the photoelectron spectrum corresponding to the first test energy spectrum data is less than the second preset value; if the relative standard deviation of the peak area in the photoelectron spectrum corresponding to multiple consecutive first test energy spectrum data is greater than or equal to 0.5%, it indicates that the change value corresponding to the multiple consecutive first test energy spectrum data is greater than or equal to the second preset value. Therefore, the acquisition parameters can be corrected; for example, the energy spectrum acquisition time can be increased.

[0138] In some other implementations (Example 2), in S703 above, when the second test energy spectrum data located within the data acquisition range is obtained, determining whether the first test sample meets the process conditions may include: the control device can detect whether the second test energy spectrum data is within a preset range.

[0139] If the second test energy spectrum data is within a preset range, it indicates that the first test sample meets the process conditions; if the second test energy spectrum data is not within the preset range, it indicates that the first test sample does not meet the process conditions. The preset range can be set as needed and is not limited.

[0140] In one example, the second test energy spectrum data includes the film thickness of the first test sample. If the film thickness of the first test sample is between 10 angstroms and 12 angstroms, it indicates that the first test sample meets the production standard; otherwise, it indicates that the first test sample is unqualified.

[0141] In another example, the second energy dispersive spectroscopy (EDS) data includes the elemental composition of the first sample to be tested. If the first sample to be tested is a monocrystalline silicon wafer, typically, monocrystalline silicon includes a monocrystalline silicon substrate, a boron-doped layer, and a silicon dioxide layer. In the monocrystalline silicon substrate, the silicon (Si) content is greater than 99.9999999%, and the content of other impurity elements is less than 0.0000001%. In the boron-doped layer, the boron (B) content is between 0.001% and 0.1%. In the silicon dioxide layer, the Si content is 33.3%, and the oxygen (O) content is 66.7%. Therefore, if the elemental composition of the monocrystalline silicon wafer exceeds the corresponding range, the monocrystalline silicon wafer is considered unqualified.

[0142] In another example, the second energy dispersive spectroscopy (EDS) data includes the elemental composition ratio of the first sample under test. Considering the Si and oxygen content of the silicon dioxide layer in the previous example, it is assumed that, under normal circumstances, the ratio of Si to oxygen content in the silicon dioxide layer should be between 0.48 and 0.51. If the ratio is greater than 0.51 or less than 0.48, then the elemental composition ratio of the silicon dioxide layer is determined to be outside the preset range. Therefore, the single-crystal silicon wafer is defective.

[0143] Based on this implementation method, the control device can detect whether the acquired test energy spectrum data meets the standards according to multiple preset energy spectrum acquisition conditions, which is simple and convenient.

[0144] In some other embodiments, S702 above, retesting the sample to be tested according to the corrected acquisition parameters may include: retesting the first sample to be tested according to the corrected acquisition parameters and the preset acquisition method.

[0145] The preset acquisition method refers to the method of acquiring the energy spectrum of the first sample each time based on the corrected acquisition parameters. For example, it may include the location and / or number of acquisition points, whether the first sample is adjusted, etc. The preset acquisition method is explained in detail below.

[0146] For example, the preset acquisition method can be 2-1, acquiring the energy spectrum data of a fixed point of the first sample to be tested each time.

[0147] This method can also be described as ensuring that the location of the first sample to be tested is the same each time. The number of fixed locations can be one.

[0148] Based on this acquisition method, since the number and energy of photoelectrons generated at the same location under X-ray irradiation are similar, the consistency of the energy spectrum data acquired each time can be guaranteed.

[0149] For example, the preset acquisition method can be 2-2, acquiring energy spectrum data from multiple points of the first sample to be tested each time.

[0150] Among these multiple points, at least some are different. That is, the multiple points can be completely different or partially the same.

[0151] In one example, the control device can acquire different points of the first sample each time by adjusting the position of the X-ray emitter or the irradiation position of the X-rays.

[0152] In one application scenario, the control device can acquire energy spectrum data at different points on the first sample to be tested by adjusting its position. For example, after each acquisition of data from the first sample, its position can be adjusted, thus allowing the control device to obtain energy spectrum data at different points.

[0153] In another application scenario, after each correction of the acquisition parameters, the control device can perform multiple acquisitions at the same location based on the corrected acquisition parameters, thereby obtaining multiple test energy spectrum data for that location.

[0154] Furthermore, to avoid the influence of the testing equipment itself on the test results, dynamic stability testing can be used to check the stability of the testing equipment. When the testing equipment has good stability, the energy dispersive spectroscopy (EDS) acquisition time can be reduced. When the testing equipment has poor stability, the EDS acquisition time can be increased. For example, the stability of the testing equipment can be determined by performing dynamic repeatability testing on the first sample to be tested. The testing equipment can be used to hold the sample to be tested.

[0155] Dynamic repeatable acquisition refers to the process of acquiring energy dispersive spectral data for each pair of test samples, removing the sample, and then placing it back on the testing equipment for the next acquisition. A deviation may exist between these two positions. By repeatedly adjusting the position of the test sample and acquiring energy dispersive spectral data after each adjustment, multiple energy dispersive spectral data points can be obtained for the first test sample. The XPS system can then calculate the stability of the testing equipment based on these multiple energy dispersive spectral data points. For example, if the relative standard deviation of these multiple energy dispersive spectral data points is greater than a first threshold, it indicates poor stability of the testing equipment. If the relative standard deviation is less than a second threshold, it indicates good stability of the testing equipment. (The first threshold is greater than the second threshold.)

[0156] In this embodiment, the positions of the multiple adjustments are all within a preset area. That is, the XPS system can collect energy dispersive spectral data from multiple points within the preset area of ​​the first sample to be tested. In this way, the elemental content at the collected points within the preset area will not change significantly, and therefore will not have a significant impact on the acquisition results.

[0157] In one example, the positions of these multiple adjustments can be distributed in a serpentine pattern.

[0158] In some scenarios, when a batch of samples needs to be measured, the placement of different samples may vary. Therefore, the energy spectrum data obtained by this method can ensure that the energy spectrum data of the batch of samples is within a relatively stable range.

[0159] In other implementations, when second test energy spectrum data that meets the energy spectrum acquisition conditions is obtained, such as... Figure 8 As shown, the method provided in this application embodiment may further include:

[0160] S801, Store target acquisition parameters.

[0161] The target acquisition parameters are the energy spectrum parameters used when acquiring the second test energy spectrum data that is within the data acquisition range. In other words, the test energy spectrum data acquired by the control device based on the target acquisition parameters is within the data acquisition range.

[0162] S802. If it is determined that energy spectrum acquisition of the second test sample is required, energy spectrum acquisition of the second test sample is performed based on the target energy spectrum parameters.

[0163] The model number of the second test sample is the same as that of the first test sample. For example, the first and second test samples are wafers with the same diameter.

[0164] Furthermore, after storing the corrected acquisition parameters, the control device can adjust the correspondence between the first sample to be tested and the acquisition parameters, and record the relevant parameter modification log files.

[0165] based on Figure 8 With this technical solution, if it is necessary to collect energy spectrum data from other samples of the same type as the first sample to be tested, the XPS system can accurately determine the acquisition parameters based on this correspondence, and basically no longer need to correct the acquisition parameters, thus improving the acquisition efficiency.

[0166] In other implementations, when the number of corrections to the collected parameters reaches a preset number, such as... Figure 9 As shown, the method provided in this application embodiment may further include:

[0167] S901, Perform error reporting operation.

[0168] The error reporting operation can include inputting a prompt message to suggest modifying the acquisition parameters, and / or pausing the operation.

[0169] In one possible scenario, if the number of times the collected parameters have been corrected reaches a preset number, the control device can stop modifying the collected parameters and output a prompt message. This prompt message can be a voice prompt and / or a text prompt.

[0170] Based on this prompt, you can make significant adjustments to the collected parameters or check for any abnormalities in the XPS system.

[0171] In another possible scenario, if the number of times the collected parameters are corrected reaches a preset number, the control device can be terminated (shut down) and the current operation can be forcibly exited (jump out).

[0172] based on Figure 9 The technical solution allows the control equipment to perform error reporting operations when there are many corrections to the collected parameters, thus avoiding repeated energy spectrum parameter modification operations and saving test resources.

[0173] In other implementations, when it is necessary to acquire energy spectrum data for a third test sample with specifications different from the first test sample, such as... Figure 10 As shown, after acquiring a new process formula or formula scheme, the control equipment can perform energy dispersive spectroscopy (EDS) acquisition on the third sample to be tested according to the settings.

[0174] The new process formulation can be the process formulation corresponding to the third test sample. The difference between the specifications of the third test sample and the first test sample can refer to differences in the physical parameters of the third test sample and the first test sample. Physical parameters can include dimensions, thickness, and other physical parameters.

[0175] Figure 10 In this context, the setting method refers to automatic spectrum acquisition and, in response to a selection operation, determining the repeatability index. The selection operation can refer to specifying the energy dispersive spectral data to be acquired (such as film thickness, elemental content, etc.). Correspondingly, the repeatability index can refer to the data acquisition range corresponding to the energy dispersive spectral data.

[0176] The control device can first perform a small-step, large-range test at a single point to select the acquisition range and acquisition step size. Then, the XPS system can perform several stability tests at a single point and check if the test results meet the standards. If the test results meet the standards, the control device can store (solidify) the acquisition parameters for subsequent energy dispersive spectroscopy (EDS) acquisition of other samples based on these parameters. If the detection results do not meet the standards, the control device can perform iterative repeatability tests or execute an error reporting operation.

[0177] Among them, meeting the test results can mean that the test energy spectrum data is within the data acquisition range.

[0178] In one application scenario, for ease of operation, when the specifications of the first test sample and the third test sample are different but similar (e.g., the difference between the size of the first test sample and the size of the third test sample is less than a preset difference), the control device can also use the target acquisition parameters corresponding to the first test sample to acquire energy spectrum data of the third test sample, and correct the first test sample if the acquired energy spectrum data exceeds the data acquisition range corresponding to the third test sample.

[0179] For example, the preset difference value is 4. If the diameter of the first sample to be tested is 12 inches and the diameter of the third sample to be tested is 10 inches, since 12-10=2 which is less than 4, it means that the specifications of the first sample to be tested and the third sample to be tested are different but similar. In this case, the control device can use the target acquisition parameters of the first sample to be tested to acquire energy dispersive spectroscopy data of the third sample to be tested.

[0180] In another application scenario, when the specifications of the first and third test samples differ significantly (e.g., the difference between the diameters of the first and third test samples is greater than a preset difference), the control device can execute... Figure 7 The technical solution shown is used to obtain the target acquisition parameters corresponding to the third sample to be tested.

[0181] For example, referring to the above example, the preset difference is 4, and the diameter of the first sample to be tested is 12 inches. If the diameter of the third sample to be tested is 6 inches, since 12-6=6 is greater than 4, it indicates that the specifications of the first sample to be tested differ significantly from those of the third sample. In this case, the control device can execute... Figure 7 The technical solution shown is used to obtain the target acquisition parameters corresponding to the third sample to be tested.

[0182] The various solutions in the embodiments of this application can be combined without contradiction.

[0183] In this embodiment of the application, in the above description of using a preset threshold as a judgment condition, for example, "greater than or equal to" can be replaced with "greater than", and "less than or equal to" can be replaced with "less than". In one example, if the relative standard deviation is greater than a first preset value, it means that the test energy spectrum data exceeds the data acquisition range, which can be replaced with: if the relative standard deviation is less than or equal to the first preset value, it means that the test energy spectrum data does not exceed the data acquisition range.

[0184] This application embodiment can divide the sample testing device into functional modules or functional units according to the above method examples. For example, each function can be divided into a separate functional module or functional unit, or two or more functions can be integrated into one processing module. The integrated module can be implemented in hardware or in software functional modules or functional units. The module or unit division in this application embodiment is illustrative and only represents one logical functional division; other division methods may be used in actual implementation.

[0185] When dividing each function into modules according to its corresponding function. Figure 11 A schematic diagram of a sample testing device 110 is shown. The sample testing device 110 can be the control device described above, or it can be a device (such as a chip, chip system, etc.) applied in the control device. The sample testing device 110 can be used to perform the functions of the sample testing device involved in the above embodiments. Figure 11 The sample testing device 110 shown may include: an acquisition module 111 and a processing module 112.

[0186] The acquisition module 111 is used to acquire energy spectrum data of the first test sample according to the acquisition parameters corresponding to the first test sample. The processing module 112 is used to correct the acquisition parameters if the first test energy spectrum data exceeds the data acquisition range. The processing module 112 is also used to re-acquire energy spectrum data of the first test sample according to the corrected acquisition parameters until second test energy spectrum data meeting the energy spectrum acquisition conditions is acquired according to the corrected acquisition parameters, or the number of corrections to the acquisition parameters reaches a preset number. The processing module 112 is also used to determine whether the first test sample meets the process conditions based on the second test energy spectrum data if second test energy spectrum data is acquired according to the corrected acquisition parameters.

[0187] In one possible implementation, the above acquisition parameters may include one or more of the following: energy spectrum acquisition duration, energy spectrum acquisition range, and energy spectrum acquisition step size.

[0188] In one possible implementation, the acquisition module 111 is specifically used to: re-acquire the energy spectrum of the first sample to be tested according to the corrected acquisition parameters and the preset acquisition method.

[0189] In one possible implementation, the aforementioned preset acquisition method may include: acquiring energy spectrum data at a fixed location of the first sample to be tested each time, or acquiring energy spectrum data at multiple locations of the first sample to be tested each time, or acquiring energy spectrum data at multiple locations of the first sample to be tested each time. At least some of these multiple locations are different.

[0190] In one possible implementation, the first test energy spectrum data exceeding the data acquisition range includes: the fluctuation value of multiple energy spectrum data included in the first test energy spectrum data is greater than a first preset value, and / or the change value of the peak area of ​​the photoelectron energy spectrum corresponding to the multiple energy spectrum data is greater than a second preset value.

[0191] In one possible implementation, the acquisition parameters are either pre-set or determined based on the photoelectron spectrum of the first sample to be tested.

[0192] In one possible implementation, the first test energy spectrum data is determined based on at least one of the film thickness of the first test sample, the elemental content of the first test sample, and the elemental content ratio of the first test sample.

[0193] In one possible implementation, the processing module 112 is specifically used to: correct the acquisition parameters based on the number and / or energy of the acquired photoelectrons.

[0194] In one possible implementation, the acquisition parameters include the energy spectrum acquisition duration. If the number of photoelectrons acquired is less than a first preset number, and / or the relative standard deviation of the acquired energy spectrum is greater than a first preset value, the energy spectrum acquisition duration is increased; if the number of photoelectrons acquired exceeds a second preset number, and / or the relative standard deviation of the acquired energy spectrum is less than a second preset value, the energy spectrum acquisition duration is decreased. The first preset number is less than the second preset number, and the first preset value is greater than the second preset value.

[0195] In one possible implementation, the apparatus provided in this application may further include a storage module 113. This storage module 113 is used to store target energy spectrum parameters upon acquiring the second test energy spectrum data; the target energy spectrum parameters are the acquisition parameters used when acquiring the second test energy spectrum data.

[0196] In one possible implementation, the acquisition module 111 is further configured to, when it is determined that energy spectrum acquisition of the second test sample is required, perform energy spectrum acquisition of the second test sample based on stored modified acquisition parameters, wherein the model of the second test sample is consistent with the model of the first test sample.

[0197] In one possible implementation, the acquisition parameters include the energy spectrum acquisition range and the energy spectrum acquisition step size. The processing module 112 is also used to acquire the initial electron energy spectrum of the first test sample and determine the acquisition parameters corresponding to the first test sample based on the initial photoelectron energy spectrum. The energy spectrum acquisition range is greater than the acquisition range corresponding to the peak region in the initial photoelectron energy spectrum, and the energy spectrum acquisition step size is less than the acquisition step size in the initial photoelectron energy spectrum.

[0198] In one possible implementation, the processing module 112 is further configured to perform an error reporting operation when the number of corrections to the collected parameters reaches a preset number.

[0199] In one possible implementation, the above error reporting operation includes: outputting a prompt message for correcting the acquisition parameters, and / or pausing the operation.

[0200] Those skilled in the art will understand that all or part of the processes in the above embodiments can be implemented by a computer program instructing related hardware. The program can be stored in a computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods. The storage medium can be a magnetic disk, optical disk, read-only memory (ROM), or random access memory (RAM), etc.

[0201] Each of the above modules or units can be implemented through software, hardware, or a combination of both. For example, the processing module mentioned above can be implemented based on software.

[0202] In one embodiment, optionally, this application also provides a sample testing device (e.g., the sample testing device may be a chip or a chip system), which includes a processor for implementing the methods in any of the above method embodiments. In one possible design, the sample testing device further includes a memory. The memory is used to store necessary program instructions and data, and the processor can call the program code stored in the memory to instruct the communication device to execute the methods in any of the above method embodiments. Of course, the memory may not be included in the sample testing device. When the communication device is a chip system, it may be composed of chips or may include chips and other discrete devices; this application does not specifically limit this.

[0203] In one embodiment, this application provides an energy spectrum acquisition system, which may include the control device described in the above-described method embodiments. Of course, it may also include other devices, such as X-ray emitters, energy analyzers, etc.

[0204] In this application, "implemented through software" means that the processor reads and executes program instructions stored in memory to implement the functions corresponding to the aforementioned modules or units. Here, "processor" refers to a processing circuit capable of executing program instructions, including but not limited to at least one of the following: a central processing unit (CPU), a microprocessor, a digital signal processor (DSP), a microcontroller unit (MCU), or an artificial intelligence processor, etc., all processing circuits capable of running program instructions. In other embodiments, the processor may also include circuits with other processing functions (such as hardware circuits for hardware acceleration, bus and interface circuits, etc.). The processor can be presented as an integrated chip, for example, as an integrated chip whose processing function only includes executing software instructions, or it can also be presented as a SoC (system on a chip), that is, on a single chip, in addition to the processing circuit capable of running program instructions (often referred to as a "core"), it also includes other hardware circuits for implementing specific functions (of course, these hardware circuits can also be implemented separately based on ASICs or FPGAs). Correspondingly, the processing functions, in addition to executing software instructions, may also include various hardware acceleration functions (such as AI calculation, encoding / decoding, compression / decompression, etc.).

[0205] In this application, "implemented in hardware" refers to implementing the functions of the aforementioned modules or units through hardware processing circuits that do not have program instruction processing capabilities. These hardware processing circuits can be composed of discrete hardware components or integrated circuits. To reduce power consumption and size, integrated circuits are typically used. The hardware processing circuits can include ASICs (application-specific integrated circuits) or PLDs (programmable logic devices); PLDs can further include FPGAs (field-programmable gate arrays), CPLDs (complex programmable logic devices), and so on. These hardware processing circuits can be a single packaged semiconductor chip (e.g., packaged as an ASIC); or they can be integrated with other circuits (e.g., CPUs, DSPs) and packaged into a single semiconductor chip. For example, multiple hardware circuits and a CPU can be formed on a silicon substrate and packaged into a single chip; this type of chip is also called a SoC. Alternatively, circuits for implementing FPGA functions and a CPU can be formed on a silicon substrate and encapsulated into a single chip; this type of chip is also called a SoPC (system on a programmable chip).

[0206] It should be noted that when this application is implemented through software, hardware, or a combination of both, different software or hardware can be used, and it is not limited to using only one type of software or hardware. For example, one module or unit can be implemented using a CPU, while another module or unit can be implemented using a DSP. Similarly, when implemented using hardware, one module or unit can be implemented using an ASIC, while another module or unit can be implemented using an FPGA. Of course, it is not limited to using the same software (e.g., all through a CPU) or the same hardware (e.g., all through an ASIC) to implement some or all modules or units. Furthermore, those skilled in the art will understand that software is generally more flexible but less performant than hardware, while hardware is the opposite. Therefore, those skilled in the art can choose software, hardware, or a combination of both based on actual needs.

Claims

1. A sample testing method, characterized in that, The method includes: Based on the acquisition parameters corresponding to the first test sample, the first test sample is subjected to energy spectrum acquisition to obtain the first test energy spectrum data; If the first test energy spectrum data exceeds the data acquisition range, the acquisition parameters are corrected, and the first test sample is re-acquired based on the corrected acquisition parameters until the second test energy spectrum data within the energy spectrum acquisition range is obtained based on the corrected acquisition parameters, or the number of corrections to the acquisition parameters reaches a preset number. Having obtained the second test energy spectrum data, it is determined whether the first test sample meets the process conditions based on the second test energy spectrum data.

2. The method according to claim 1, characterized in that, The acquisition parameters include at least one of the following: Energy spectrum acquisition time; Energy spectrum acquisition range; Energy spectrum acquisition step size.

3. The method according to claim 1 or 2, characterized in that, The step of re-acquiring the energy spectrum of the first sample to be tested based on the corrected acquisition parameters includes: Based on the corrected acquisition parameters and the preset acquisition method, the first sample to be tested is re-acquired using energy dispersive spectroscopy.

4. The method according to claim 3, characterized in that, The preset acquisition methods include: Each time, energy spectrum data is collected from fixed points on the first sample to be tested; or, Each time, energy spectrum data are collected from multiple points of the first sample to be tested; at least some of the multiple points are different.

5. The method according to any one of claims 1-4, characterized in that, The first test energy spectrum data includes multiple energy spectrum data, and the first test energy spectrum data exceeding the data acquisition range includes: The fluctuation values ​​of the multiple energy spectrum data are greater than a first preset value; and / or, The change in peak area of ​​the photoelectron spectrum corresponding to the multiple energy spectrum data is greater than the second preset value.

6. The method according to any one of claims 1-5, characterized in that, The acquisition parameters are either preset or determined based on the photoelectron spectrum of the first sample to be tested.

7. The method according to any one of claims 1-6, characterized in that, The first test energy spectrum data is determined based on at least one of the following: The film thickness of the first sample to be tested; The elemental content of the first sample to be tested; The elemental content ratio of the first sample to be tested.

8. The method according to any one of claims 1-7, characterized in that, The correction of the collected parameters includes: The acquisition parameters are corrected based on the number and / or energy of the acquired photoelectrons.

9. The method according to claim 8, characterized in that, The acquisition parameters include the energy spectrum acquisition duration; the correction of the acquisition parameters based on the number and / or energy of the acquired photoelectrons includes: If the number of photoelectrons collected is less than a first preset number, and / or the relative standard deviation of the collected energy spectrum is greater than a first preset value, the energy spectrum acquisition time is increased; or, If the number of photoelectrons collected is greater than the second preset number, and / or the relative standard deviation of the collected energy spectrum is less than the second preset value, the energy spectrum collection time is reduced; wherein the first preset number is less than the second preset number, and the first preset value is greater than the second preset value.

10. The method according to claim 2, characterized in that, The acquisition parameters include the energy spectrum acquisition range and the energy spectrum acquisition step size; the method further includes: Obtain the initial photoelectron spectrum of the first sample to be tested; Based on the initial photoelectron spectrum, determine the acquisition parameters corresponding to the first sample to be tested; Wherein, the energy spectrum acquisition range is larger than the acquisition range corresponding to the peak region in the initial photoelectron energy spectrum, and the energy spectrum acquisition step size is smaller than the acquisition step size in the initial photoelectron energy spectrum.

11. The method according to any one of claims 1-10, characterized in that, The method further includes: Upon obtaining the second test energy spectrum data, target acquisition parameters are stored; wherein, the target acquisition parameters are the acquisition parameters used when obtaining the second test energy spectrum data.

12. The method according to claim 11, characterized in that, The method further includes: Energy dispersive spectroscopy (EDS) is performed on the second sample to be tested based on the target acquisition parameters. The model of the second sample to be tested is the same as that of the first sample to be tested.

13. The method according to any one of claims 1-12, characterized in that, The method further includes: If the number of times the collected parameters are corrected reaches the preset number, an error reporting operation is performed.

14. The method according to claim 13, characterized in that, The error reporting operation includes: Output a prompt message for modifying the acquisition parameters; and / or, Operation suspended.

15. A sample testing device, characterized in that, include: The acquisition module is used to acquire the energy spectrum of the first test sample according to the acquisition parameters corresponding to the first test sample, and acquire the first test energy spectrum data. The processing module is used to correct the acquisition parameters when the first test energy spectrum data does not meet the energy spectrum acquisition conditions; The processing module is further configured to re-acquire the energy spectrum of the first sample to be tested according to the corrected acquisition parameters until the second test energy spectrum data under the energy spectrum acquisition conditions is obtained according to the corrected acquisition parameters, or the number of times the acquisition parameters are corrected reaches a preset number. The processing module is further configured to, upon obtaining the second test energy spectrum data, determine whether the first test sample meets the process conditions based on the second test energy spectrum data.

16. An energy spectrum acquisition system, characterized in that, The energy spectrum acquisition system includes the sample testing device as described in claim 15.

17. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer instructions or programs that, when executed on a computer, cause the sample testing apparatus to perform the method as described in any one of claims 1-14.

18. A computer program product, characterized in that, When the computer program product is run on the sample testing device, the sample testing device performs the method as described in any one of claims 1-14.

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