Hot press head, hot press apparatus, and method for manufacturing heat-generating sheet

Abstract

The application relates to a hot pressing head, a hot pressing device and a manufacturing method of a heating sheet, and belongs to the technical field of the hot pressing device. The hot pressing head comprises a base, a heat insulation block and a heating sheet. The heat insulation block is arranged on the base, and the heating sheet is arranged on the side of the heat insulation block away from the base. The heating sheet comprises a hot pressing plate and a resistance wire arranged in the hot pressing plate. The resistance wire is arranged in the hot pressing plate along a first direction, extends to the direction of the hot pressing plate away from the heat insulation block, and is embedded on the inner wall of the hot pressing plate. The application has the effects of shortening the path of heat transmission from the resistance wire to the working surface, increasing the contact area and the combination precision of the resistance wire and the hot pressing plate, reducing the contact thermal resistance, quickly and efficiently transmitting the heat to the working surface of the hot pressing plate, accelerating the heating rate, and improving the hot pressing efficiency.

Description

Technical Field

[0001] This invention relates to the technical field of hot pressing equipment, and in particular to a method for manufacturing a hot pressing head, hot pressing equipment, and heating element. Background Technology

[0002] Thermocompression bonding technology is one of the key processes in microelectronic packaging, semiconductor manufacturing, and advanced electronic assembly. It is a solid-state bonding process that combines heat and force to cause plastic deformation between two thin sheets, forming a clean surface with close contact. The thermocompression head is the core component of thermocompression bonding technology, and its performance directly determines the bonding quality, efficiency, and yield.

[0003] The hot press head mainly consists of a heating element, a heat insulation block, and a base. The heating element is responsible for providing a precise and controllable heat source to achieve rapid heating of the bonding area and maintain the required temperature uniformity and stability. The heat insulation block can block heat from being transferred from the high-temperature heating element to the downstream base to the maximum extent, reducing heat loss and improving thermal efficiency.

[0004] In existing technologies, heating elements are made by horizontally laying resistance wires inside a hot press plate. The plane of the resistance wires is in contact with the inner wall of the hot press plate. When the resistance wires are energized, heat can be transferred to the hot press plate, thus making the heating element heat up. However, in this way, the heating element heats up slowly, resulting in low hot pressing efficiency. Summary of the Invention

[0005] In view of this, the purpose of the present invention is to provide a hot pressing head and a hot pressing device to solve the technical problems of slow heating rate and low hot pressing efficiency of the heating element in the prior art.

[0006] In a first aspect, the present invention provides a hot pressing head, comprising:

[0007] Base;

[0008] A heat insulation block is installed on the base;

[0009] A heating element is disposed on the side of the heat insulation block facing away from the base. The heating element includes a hot plate and a resistance wire located inside the hot plate. The resistance wire is arranged in the hot plate along a first direction and extends towards the hot plate in the direction away from the heat insulation block, and is embedded in the inner wall of the hot plate.

[0010] Optionally, a support member is provided on the side of the heat insulation block facing the heating element, and the heating element and the support member abut against each other and are detachably connected to the support member by bolts.

[0011] Optionally, the heat insulation block has a plurality of first through holes, and the plurality of first through holes are correspondingly provided with a support member connected to the heating element. The support member is disposed in the corresponding first through hole, and the bolt passes through the heating element and the corresponding support member in sequence and is threadedly connected to the support member. The bolt extends into the first through hole at the end facing away from the heating element.

[0012] Optionally, it also includes a first pipe fitting, which communicates with the first through hole;

[0013] The bolt has a second through hole, which is connected to the first through hole. The first pipe joint is used to sequentially draw air from the first through hole and the second through hole, thereby adsorbing the workpiece to be heated and pressed on the heating element.

[0014] Optionally, the first pipe joint is disposed on the base, and the base has a third through hole. The first pipe joint and the third through hole are connected. When the base and the heat insulation block are connected, the third through hole and the first through hole are sealed and connected.

[0015] Optionally, the base has a groove corresponding to the third through hole, the third through hole is located in the groove, a sealing element is provided in the groove, and the third through hole penetrates the sealing element. When the base and the heat insulation block are connected, the third through hole and the first through hole are connected, and the sealing element and the heat insulation block abut against each other.

[0016] Optionally, the heating element has an adsorption groove on the side facing away from the heat insulation block, the adsorption groove extends on the heating element, and part of the bolt is located in the adsorption groove at the end facing away from the first through hole.

[0017] Optionally, the heating element further includes a power cord connected to the resistance wire, and a limiting member is detachably connected to the base. The limiting member is located on the side of the power cord facing away from the base and is used to restrict the power cord to the base.

[0018] In a second aspect, the present invention also provides a hot pressing device, including the hot pressing head described in any embodiment of the first aspect.

[0019] The present invention also provides a method for manufacturing a heating element, the method comprising:

[0020] Manufacturing resistance wires of predetermined specifications;

[0021] According to the size and shape of the heating element, fix the resistance wire in the corresponding position in the mold;

[0022] Ceramic slurry is added to the mold and sintered as a whole to produce a heating element.

[0023] The technical solution of the present invention has the following advantages:

[0024] 1. The hot press head provided by the present invention arranges the resistance wire of the heating element in a meandering manner along a first direction, and extends towards the direction away from the heat insulation block and is embedded in the inner wall of the hot press plate. Compared with horizontal flat laying, the longitudinal extension allows the resistance wire to be closer to the working surface of the hot press plate, that is, the side facing away from the heat insulation block, which shortens the path of heat transfer from the resistance wire to the working surface. At the same time, the embedded design increases the contact area and bonding precision between the resistance wire and the hot press plate, reduces the contact thermal resistance, and allows heat to be transferred to the working surface of the hot press plate more quickly and efficiently, thereby accelerating the heating rate and improving the hot pressing efficiency.

[0025] 2. The method for preparing a heating element provided by the present invention involves directly preparing a resistance wire of a preset specification, then placing the resistance wire of the preset specification into a mold according to the size and shape of the heating element, adding ceramic slurry into the mold, and sintering to form a heating element. The process is simple, and compared with the stacking production method in the prior art, the thickness of the heating element is controllable, and heating elements of any thickness can be formed. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the overall structure of the hot press head of the present invention;

[0028] Figure 2 This is an exploded view of the structure between the heating element, the heat insulation block, and the base in this invention;

[0029] Figure 3 This is a schematic diagram of the heating element in this invention;

[0030] Figure 4 for Figure 3 Enlarged diagram of section A in the middle;

[0031] Figure 5 This is a schematic diagram of the resistance wire structure in this invention;

[0032] Figure 6 This is a schematic diagram of the front structure of the heat insulation block in this invention;

[0033] Figure 7 This is a schematic diagram of the back structure of the heat insulation block in this invention;

[0034] Figure 8 This is a flowchart illustrating the manufacturing process of the heating element in this invention.

[0035] Explanation of reference numerals in the attached figures:

[0036] 1. Base; 2. Heat insulation block; 3. Heating element; 31. Hot press plate; 32. Resistance wire; 33. Power cord; 4. Supporting component; 41. First column; 42. Second column; 43. Third column; 5. First heat dissipation hole; 6. Second pipe joint; 7. Heat dissipation groove; 8. Exhaust hole; 9. Guide plate; 91. First plate; 92. Second plate; 93. Third plate; 10. Second heat dissipation hole; 11. First through hole; 12. First connecting part; 13. Second connecting part; 14. Hollowed-out part; 15. Protrusion; 151. First component; 152. Second component; 16. Bolt; 17. Guide hole; 18. First pipe joint; 19. Second through hole; 20. Groove; 21. Sealing component; 22. Adsorption groove; 23. Third through hole; 24. Limiting component. Detailed Implementation

[0037] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are merely some, not all, of the embodiments of the present invention. Based on the description of the present invention, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of the present invention.

[0038] Unless otherwise explicitly specified and limited, the terms "setup," "installation," and "connection" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium. Those skilled in the art can understand the specific meaning of these terms based on the specific circumstances.

[0039] The terms “upper,” “lower,” “left,” “right,” “front,” “back,” “top,” “bottom,” “inner,” and “outer,” etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of the invention is in use. They are only for the convenience of description and simplification, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0040] The terms “first,” “second,” “third,” etc., are used merely to distinguish elements with similar properties, not to indicate or imply relative importance or a specific order.

[0041] The terms “include,” “comprising,” or any other variation thereof are intended to cover non-exclusive inclusion, which includes not only the elements listed but also other elements not expressly listed.

[0042] Example 1

[0043] Reference Figures 1-7 As shown, the present invention provides a hot press head, including a base 1, a heat insulation block 2, and a heating element 3. The heat insulation block 2 is disposed on the top surface of the base 1, and the heating element 3 is disposed on the side of the heat insulation block 2 facing away from the base 1. Specifically, the heating element 3 includes a hot press plate 31 and a resistance wire 32. The hot press plate 31 is hollow, and the resistance wire 32 is located inside the hot press plate 31. The resistance wire 32 is arranged in the hot press plate 31 along a first direction. In this embodiment, the extension direction of the hot press plate 31 is the first direction. The resistance wire 32 extends towards the hot press plate 31 in the direction away from the heat insulation block 2 and is embedded in the inner wall of the hot press plate 31.

[0044] By arranging the resistance wire 32 of the heating element 3 in a meandering manner along the first direction and extending it in the direction away from the heat insulation block 2 and embedding it into the inner wall of the hot press plate 31, the longitudinal extension allows the resistance wire 32 to be closer to the working surface of the hot press plate 31, i.e., the side facing away from the heat insulation block 2, compared to horizontal flat laying. This shortens the path of heat transfer from the resistance wire 32 to the working surface. At the same time, the embedded design increases the contact area and bonding precision between the resistance wire 32 and the hot press plate 31, reduces contact thermal resistance, and allows heat to be transferred to the working surface of the hot press plate 31 more quickly and efficiently, accelerating the heating rate and improving the hot pressing efficiency.

[0045] As a specific implementation, the heating element 3 also includes a power cord 33. Multiple power cords 33 are provided. In this implementation, four power cords are provided. All four power cords 33 are electrically connected to the resistance wire 32. Two power cords 33 are set as a group. The two groups of power cords 33 are located on both sides of the hot press plate 31 and extend into the hot press plate 31 and are connected to the resistance wire 32.

[0046] Furthermore, a limiting member 24 is detachably connected to the base 1. The limiting member 24 is provided with four corresponding to the four power cords 33. The power cords 33 extend to the limiting member 24 and are located between the limiting member 24 and the base 1, thereby restricting and fixing the power cords 33 to the base 1, preventing the power cords 33 from becoming loose, swinging, or being accidentally pulled, ensuring safe and reliable electrical connection, and facilitating line maintenance.

[0047] As another implementation method, refer to Figure 2 and Figure 6As shown, a heat dissipation groove 7 is provided on the side of the heat insulation block 2 facing the heating element 3. The heat dissipation groove 7 occupies most of the area of ​​the top surface of the heat insulation block 2, leaving only four narrow sides. Multiple support members 4 are provided in the heat dissipation groove 7. The support members 4 are all located in the heat dissipation groove 7 and one end is connected to the bottom of the heat dissipation groove 7, while the other end is in contact with the heating element 3. The internal space of the heat dissipation groove 7 forms a heat dissipation cavity. Multiple first heat dissipation holes 5 are provided at the bottom of the heat dissipation groove 7. The first heat dissipation holes 5 extend towards the bottom of the heat insulation block 2 until they penetrate the bottom of the heat insulation block 2.

[0048] A second pipe connector 6 is provided on the base 1 and is located and connected to the side wall of the base 1. A second heat dissipation hole 10 is provided on the base 1 and penetrates the top surface of the base 1. The second pipe connector 6 and the second heat dissipation hole 10 are connected. When the base 1 and the heat insulation block 2 are connected, the first heat dissipation hole 5 and the second heat dissipation hole 10 are connected, thereby forming a connected heat dissipation channel. After the external heat dissipation airflow is introduced through the second pipe connector 6, the heat dissipation airflow can enter the second heat dissipation hole 10 and the first heat dissipation hole 5 in sequence under the action of the second pipe connector 6, and enter the heat dissipation cavity from the top of the first heat dissipation hole 5 to dissipate the heat at the top of the heat insulation block 2. By setting the second pipe connector 6 on the more stable base 1, the structure of the heat insulation block 2 is simplified, and a reliable and easy-to-assemble air circuit connection can be achieved by connecting the heat insulation block 2 and the base 1.

[0049] In addition, exhaust holes 8 are provided on the side wall of the heat insulation block 2. There are two sets of exhaust holes 8, and each set of exhaust holes 8 has three holes. The two sets of exhaust holes 8 are respectively located on both sides of the heat dissipation groove 7 and are connected to the heat dissipation cavity inside the heat dissipation groove 7. At this time, the exhaust holes 8 can discharge the heat dissipation airflow in the heat dissipation cavity to the heat insulation block 2.

[0050] Specifically, at least four first heat dissipation holes 5 are provided. In this embodiment, four first heat dissipation holes 5 are provided, but it is not limited to only four. Three, five, etc., can also be provided. The number of first heat dissipation holes 5 is not uniquely limited in this embodiment. The four first heat dissipation holes 5 are arranged in a rectangular pattern on the top surface of the heat insulation block 2 and are evenly distributed. At this time, the four first heat dissipation holes 5 can ensure that the heat dissipation airflow is evenly injected into the heat dissipation cavity from the multiple first heat dissipation holes 5, thereby avoiding local overheating and ensuring the uniformity of heat dissipation. Furthermore, the opening of the first heat dissipation hole 5 facing the heating element 3 is set to be open, which effectively reduces the resistance of the heat dissipation airflow entering the heat dissipation cavity, promotes the diffusion of the heat dissipation airflow around the first heat dissipation hole 5, optimizes the path of the heat dissipation airflow, and is conducive to uniform heat dissipation.

[0051] As one specific implementation method, refer to Figure 1As shown, the support member 4 includes a first column 41 and a second column 42. Multiple first columns 41 are arranged in a rectangular pattern on the side of the heat insulation block 2 facing the heating element 3. Specifically, four first columns 41 are arranged in a rectangular pattern at the bottom of the heat dissipation groove 7, with each column located at one of the four corners of the rectangle and surrounding the first heat dissipation hole 5. The second column 42 is located at the center of the side of the heat insulation block 2 facing the heating element 3, thus allowing the second column 42 to be positioned between multiple first columns 41.

[0052] In other embodiments, the support member 4 also includes a third column 43. Multiple third columns 43 are also provided. In this embodiment, there are 4 groups of third columns 43, with two columns in each group. A group of third columns 43 is provided between each pair of adjacent first columns 41, and gaps are left between the third columns 43 and between the third columns 43 and the first columns 41. One end of the first column 41, the second column 42 and the third column 43 are connected to the heat insulation block 2, and the other end extends towards the heating element 3 until the first column 41, the second column 42 and the third column 43 are flush with the opening of the heat dissipation groove 7, so that the first column 41, the second column 42 and the third column 43 can contact the heating element 3.

[0053] The support member 4, by employing a rectangular arrangement of the first column 41, the third column 43, and the second column 42, can stably support the heating element 3, providing stable load-bearing capacity to the heating element 3. At the same time, it can utilize the gaps between the first column 41, the second column 42, and the third column 43 to guide the heat dissipation airflow to flow in all directions, making the heat dissipation airflow flow more evenly at the bottom of the heating element 3, eliminating heat dissipation dead corners, and improving the overall heat dissipation uniformity.

[0054] In addition, the heating element 3 is detachably connected to the first column 41 and the second column 42 of the support member 4. Specifically, the bolt 16 corresponding to the first column 41 is inserted into the heating element 3 and the first column 41 in sequence and is threaded to the first column 41. The bolt 16 corresponding to the second column 42 is inserted into the heating element 3 and the second column 42 in sequence and is threaded to the second column 42, thereby achieving detachability, which greatly facilitates the replacement and maintenance of the heating element 3. At the same time, the heating element 3 is connected to the rectangular arrangement of the first column 41 and the second column 42, which improves the stability of the installation of the heating element 3.

[0055] Specifically, the heat insulation block 2 has multiple first through holes 11. The multiple first through holes 11 are connected to the multiple first pillars 41 and second pillars 42 in the support member 4, which are connected to the heating element 3. The first through holes 11 penetrate the top and bottom of the heat insulation block 2, and the first pillars 41 and second pillars 42 are respectively fixed in the corresponding first through holes 11. The bolts 16 on the first pillars 41 and second pillars 42 extend into the first through holes 11. The bolts 16 located in the first through holes 11 are coaxially arranged with the first through holes 11. The end of the bolt 16 facing away from the heating element 3 extends into the first through hole 11. The first through hole 11 can provide space for the bolt 16 to extend to the bottom of the first pillar 41 or the second pillar 42.

[0056] Furthermore, the hot press head also includes a first pipe connector 18, which is disposed on the base 1 or the heat insulation block 2. The first pipe connector 18 is connected to the first through hole 11. The bolt 16 has a second through hole 19, which penetrates the top and bottom walls of the bolt 16, thereby connecting the second through hole 19 with the first through hole 11. The first pipe connector 18 is used to sequentially draw air from the first through hole 11 and the second through hole 19, thereby adsorbing the workpiece to be hot-pressed on the heating element 3. At this time, the first through hole 11 not only provides space for the bolt 16 to extend to the bottom of the first column 41 or the second column 42, but also provides a physical channel for vacuum adsorption. The bolt 16 can not only install the heating element 3, but also act as a suction head, providing a physical channel for vacuum adsorption. Therefore, there is no need to set up an additional adsorption structure, which optimizes the structure and reduces the complexity of the structure.

[0057] In this embodiment, the first pipe connector 18 is specifically set on the base 1, and the base 1 has a third through hole 23. The first pipe connector 18 and the third through hole 23 are connected. When the base 1 and the heat insulation block 2 are connected, the third through hole 23 and the first through hole 11 are sealed and connected. The key first pipe connector 18 is integrated and set on the more stable base 1, thereby simplifying the structure of the heat insulation block 2. At this time, the third through hole 23, the first through hole 11 and the second through hole 19 can be completely connected to form a complete adsorption channel for vacuum adsorption of the workpiece to be processed.

[0058] Furthermore, refer to Figure 2 and Figure 4As shown, the base 1 has a groove 20 corresponding to the third through hole 23. The third through hole 23 is located on the bottom wall of the groove 20. A sealing element 21 is provided in the groove 20. The third through hole 23 passes through the sealing element 21. When the base 1 and the heat insulation block 2 are connected, the third through hole 23 and the first through hole 11 are connected. The sealing element 21 and the heat insulation block 2 abut against each other, thereby ensuring the airtightness of the connection between the third through hole 23 and the first through hole 11 and preventing vacuum leakage. Specifically, the sealing element 21 is set as sealing silicone. In addition, the first column 41 and the second column 42 need to be fixed and sealed to the top of the first through hole 11, thereby avoiding vacuum leakage between the first through hole 11 and the second through hole 19.

[0059] As one specific implementation method, refer to Figure 2 and Figure 3 As shown, the heating element 3 has an adsorption groove 22 on the side facing away from the heat insulation block 2. The adsorption groove 22 extends on the heating element 3. One end of the bolt 16 facing away from the first through hole 11 is located in the adsorption groove 22. Specifically, the top of the bolt 16 corresponding to the first column 41 is located in the adsorption groove 22 and does not protrude from the opening of the adsorption groove 22. Since the top of the bolt 16 is located in the adsorption groove 22, the negative pressure of the second through hole 19 directly acts on the space of the adsorption groove 22, thereby forming a negative pressure cavity. When the workpiece is covered by the adsorption groove 22, the negative pressure can be effectively conducted and distributed in the contact area of ​​the workpiece, improving the reliability and uniformity of adsorption.

[0060] As one specific implementation method, refer to Figure 2 and Figure 7 As shown, the heat insulation block 2 has a hollow portion 14 and a protrusion 15 on the side facing the base 1. A gap is left between the hollow portion 14 and the base 1, and the protrusion 15 is attached to the side of the base 1 facing the heat insulation block 2. By providing the protrusion 15 and the hollow portion 14 on the side of the heat insulation block 2 facing the base 1, the heat insulation block 2 and the base 1 only have partial contact at the protrusion 15, while a gap is formed between the hollow portion 14 and the base 1. The contact area between the heat insulation block 2 and the base 1 is greatly reduced, which significantly reduces the heat conduction efficiency from the heat insulation block 2 to the base 1 through the contact surface, improves the heat insulation performance of the heat insulation block 2, effectively reduces heat loss, and protects the base 1 and downstream components.

[0061] The protrusion 15 includes a first component 151 and a second component 152, both of which are integrally formed with the heat insulation block 2. The first component 151 is located at the center of the side of the heat insulation block 2 facing the base 1 and is X-shaped. The second component 152 is located on the periphery of the side of the heat insulation block 2 facing the base 1. The hollow portion 14 is located between the first component 151 and the second component 152. The protrusion 15 further defines the central first component 151 and the peripheral second component 152, so that the central first component 151 provides the main load-bearing capacity, and the peripheral second component 152 provides the edge load-bearing capacity. The first component 151 and the second component 152 together provide the load-bearing capacity for the heat insulation block 2, while the hollow portion 14 located between the first component 151 and the second component 152 minimizes the contact area between the heat insulation block 2 and the base 1, ensuring the stability of the heat insulation block 2 while minimizing the contact area, thus achieving a balance between structural strength and heat insulation effect.

[0062] Furthermore, the second component 152 has four supports located at the four corners of the side of the heat insulation block 2 facing the base 1. This symmetrical distribution design ensures that when the heat insulation block 2 is installed on the base 1, the support points are evenly distributed at the four most stable corners. This provides stable support while minimizing the contact area with the base 1, further optimizing the heat insulation effect. Simultaneously, the perforated portion 14 extends into the second component 152 until it penetrates the side wall of the heat insulation block 2. This perforated portion 14 allows some external airflow to pass through, thus more effectively removing locally accumulated heat and further improving the overall heat insulation and heat dissipation performance.

[0063] In addition, the first through hole 11 is opened on the first component 151. At this time, the first through hole 11 can also directly reduce the actual contact area between the protrusion 15 and the base 1, further improving the heat insulation performance.

[0064] As one specific implementation method, refer to Figure 6 and Figure 7As shown, in order to connect the base 1 and the heat insulation block 2, a first connecting part 12 is integrally formed on the side wall of the base 1 facing the heat insulation block 2, and a second connecting part 13 corresponding to the first connecting part 12 is integrally formed on the side wall of the heat insulation block 2 facing the base 1. There are two of each of the first connecting parts 12 and the second connecting parts 13. The two first connecting parts 12 are symmetrically arranged about the base 1, and the two second connecting parts 13 are symmetrically arranged about the heat insulation block 2. When the base 1 and the heat insulation block 2 are installed, the two first connecting parts 12 and the two second connecting parts 13 are arranged one-to-one, and the corresponding first connecting parts 12 and second connecting parts 13 are detachably connected. The detachable connection facilitates the installation, disassembly and replacement of the heat insulation block 2, and avoids the connection on the bottom surface of the heat insulation block 2 or the top surface of the base 1. Thus, the connection point is set on the side wall, rather than on the main heat conduction path, which is conducive to maintaining good heat insulation performance.

[0065] As another implementation method, refer to Figure 1 and Figure 2 As shown, the hot press head also includes a guide plate 9. There are two guide plates 9, which are correspondingly set at the two sets of exhaust holes 8. The guide plates 9 are detachably connected to the first connecting part 12. The guide plates 9 are provided with guide holes 17. The guide holes 17 are located on the side wall of the heat insulation block 2 facing the base 1. The heat dissipation airflow discharged from the exhaust holes 8 passes through the guide plates 9 and flows out through the guide holes 17, so that the well-dissipated heat dissipation airflow can be directed to be discharged from the guide holes 17, so that the heat dissipation airflow is away from the working area and will not reach the workpiece along the exhaust holes 8, thus affecting the processing of the workpiece.

[0066] Specifically, the guide plate 9 includes a first plate 91, a second plate 92 and a third plate 93. The first plate 91 is horizontally arranged, flush with the top surface of the heat insulation block 2 and located on the side wall of the heat insulation block 2, so that it is located above the end of the exhaust hole 8 facing away from the heat dissipation cavity. When the heat dissipation airflow is discharged from the heat dissipation cavity along the exhaust hole 8 and moves upward, the first plate 91 can block the heat dissipation airflow from moving towards the heating element 3.

[0067] One end of the second plate 92 is connected to the first plate 91, and the other end extends toward the base 1. The second plate 92 is inclined. The second plate 92 moves away from the side connected to the first plate 91 and away from the heat insulation block 2. At this time, the heat dissipation airflow reaching the second plate 92 can move downward along the inclined surface of the second plate 92.

[0068] The third plate 93 is located on the side of the second plate 92 facing away from the first plate 91, and the third plate 93 is vertically arranged. One end of the third plate 93 is connected to the second plate 92, and the other end extends towards the base 1. The guide hole 17 is opened on the third plate 93, and one end of the guide hole 17 faces the direction of the heat insulation block 2. The heat dissipation airflow moving downward along the second plate 92 will reach the third plate 93. At this time, the guide hole 17 is opened on the third plate 93, and the heat dissipation airflow can be discharged from the guide hole 17, away from the heat pressure head. The heat dissipation airflow discharged from the exhaust hole 8 can form a smooth guide path along the first plate 91, the second plate 92 and the third plate 93. With the help of gravity and structural guidance, it is ensured that the heat dissipation airflow can be discharged efficiently and smoothly in a directional manner without affecting the processing of the workpiece.

[0069] Example 2

[0070] Reference Figures 1-7 As shown, this embodiment provides a hot pressing device, including the hot pressing head of embodiment 1. By arranging the resistance wire 32 of the heating element 3 along a first direction and extending it in the direction away from the heat insulation block 2, it is embedded into the inner wall of the hot pressing plate 31. Compared with horizontal laying, the longitudinal embedding allows the resistance wire 32 to be closer to the working surface of the hot pressing plate 31, that is, the side facing away from the heat insulation block 2. This shortens the path of heat transfer from the resistance wire 32 to the working surface. At the same time, the embedded design increases the contact area and bonding precision between the resistance wire 32 and the hot pressing plate 31, reduces the contact thermal resistance, and allows heat to be transferred to the working surface of the hot pressing plate 31 more quickly and efficiently, accelerating the heating rate and improving the hot pressing efficiency.

[0071] Example 3

[0072] Reference Figure 8 As shown, this embodiment provides a method for manufacturing a heating element, used to manufacture the heating element 3 in Embodiment 1, specifically including:

[0073] S1, manufacture resistance wires of preset specifications;

[0074] S2. According to the size and shape of the heating element, fix the resistance wire in the corresponding position of the mold. The size and shape of the mold must be consistent with the size and shape of the heating element to be manufactured.

[0075] S3, add ceramic slurry into the mold and sinter the whole to obtain heating element 3.

[0076] By directly preparing resistance wires of a preset specification, and then placing the wires into a mold according to the size and shape of the heating element, and adding ceramic slurry to the mold, the heating element can be formed by sintering. The process is simple and fast. Compared with the stacking production method in the existing technology, the thickness of the heating element is controllable, and heating elements of any thickness can be formed. In the existing method, resistance wires are stacked to form a heating element of a certain thickness, which can only be N times the thickness of the stacked resistance wires. It is impossible to prepare heating elements of other thicknesses, and the thickness of the heating element is uncontrollable.

[0077] It should be noted that the various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0078] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.

Claims

1. A hot press head, characterized in that, include: Base (1); A heat insulation block (2) is disposed on the base (1); A heating element (3) is disposed on the side of the heat insulation block (2) facing away from the base (1). The heating element (3) includes a heat pressing plate (31) and a resistance wire (32) located in the heat pressing plate (31). The resistance wire (32) is arranged in the heat pressing plate (31) along the extension direction of the heat pressing plate (31). The resistance wire (32) extends towards the heat pressing plate (31) in the direction away from the heat insulation block (2) and is embedded in the inner wall of the heat pressing plate (31). The heat insulation block (2) is provided with a support member (4) on the side facing the heating element (3). The heating element (3) and the support member (4) abut against each other and are detachably connected to the support member (4) by bolts (16). The heat insulation block (2) is provided with a plurality of first through holes (11), and the plurality of first through holes (11) are correspondingly provided with a support member (4) connected to the heating element (3). The support member (4) is provided in the corresponding first through hole (11). The bolt (16) passes through the heating element (3) and the corresponding support member (4) in sequence and is threadedly connected to the support member (4). The bolt (16) extends into the first through hole (11) with one end facing away from the heating element (3). It also includes a first pipe connector (18), which is connected to the first through hole (11); The bolt (16) has a second through hole (19) connected to the first through hole (11). The first pipe joint (18) is used to sequentially draw air from the first through hole (11) and the second through hole (19), thereby adsorbing the workpiece to be heated on the heating element (3). The first pipe connector (18) is disposed on the base (1), and the base (1) is provided with a third through hole (23). The first pipe connector (18) and the third through hole (23) are connected. When the base (1) and the heat insulation block (2) are connected, the third through hole (23) and the first through hole (11) are sealed and connected.

2. The hot press head as described in claim 1, characterized in that, The base (1) has a groove (20) corresponding to the third through hole (23). The third through hole (23) is located in the groove (20). A sealing element (21) is provided in the groove (20). The third through hole (23) passes through the sealing element (21). When the base (1) and the heat insulation block (2) are connected, the third through hole (23) and the first through hole (11) are connected, and the sealing element (21) and the heat insulation block (2) abut against each other.

3. The hot press head as described in claim 2, characterized in that, The heating element (3) has an adsorption groove (22) on the side facing away from the heat insulation block (2). The adsorption groove (22) extends on the heating element (3), and part of the bolt (16) is located in the adsorption groove (22) at the end facing away from the first through hole (11).

4. The hot press head as described in claim 1, characterized in that, The heating element (3) also includes a power cord (33), which is connected to the resistance wire (32). A limiting member (24) is detachably connected to the base (1). The limiting member (24) is located on the side of the power cord (33) facing away from the base (1) and is used to restrict the power cord (33) on the base (1).

5. A hot pressing device, characterized in that, Includes the hot press head as described in any one of claims 1-4.

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