In-situ radiation heating system for a high power electron beam physical vapor deposition apparatus

Abstract

The present application relates to the technical field of electron beam physical vapor deposition, and is applied to the preparation of aero-engine turbine blade thermal barrier coating, in particular to an in-situ radiation heating system of a high-power electron beam physical vapor deposition device, comprising two heating units oppositely arranged and forming a heating cavity, wherein the heating unit comprises a shell integrated with a heating element, end covers are arranged at both ends of the shell and a driving device is connected through the end covers, and the driving device is used to drive the two end covers to move closer to or away from each other. The in-situ radiation heating system provided by the present application performs heating treatment on the product outside the vapor deposition chamber, preheats the product, and can perform vapor deposition treatment more quickly after the product enters the vapor deposition chamber, thereby improving the effective utilization rate of the vapor deposition chamber and the flexibility and processing efficiency of the vapor deposition treatment.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of electron beam physical vapor deposition (EB-PVD) technology, and is applied to the preparation of thermal barrier coatings of turbine blades of an aero-engine, in particular to an in-situ radiation heating system of a high-power electron beam physical vapor deposition device. BACKGROUND

[0002] The electron beam physical vapor deposition (EB-PVD) technology is to use a high-energy-density electron beam to bombard, heat and evaporate a target material under high-vacuum conditions, and to form a thermal barrier coating with high bonding strength and excellent thermal shock resistance on a substrate, which is widely applied to the field of protective coating preparation of turbine blades of an aero-engine.

[0003] The existing electron beam physical vapor deposition device mainly includes a deposition chamber, a loading chamber and a feeding mechanism. The existing heating system needs to occupy the space inside the deposition chamber to complete the heating of the material, and the deposition equipment in the deposition chamber is in a waiting state during the heating process, which increases the waiting stage during the working period of the deposition chamber, and reduces the utilization rate of the deposition chamber. At the same time, the heating equipment itself is easily affected by the electron beam emitted by the electron gun to generate high temperature, and even produce impurity vapor to affect the cleanliness of the deposition chamber or the purity of the product surface film.

[0004] It can be seen that the existing vapor deposition system heating scheme still needs to be improved, and should be optimized to reduce the occupation of the working time of the deposition chamber and improve the utilization rate of the deposition chamber. At the same time, the protection of the heating system itself should be improved to avoid the damage of the heating system device itself caused by the influence of the electron beam, and to protect the cleanliness of the deposition chamber and the reliability of the product deposition film. Therefore, a more reasonable technical scheme is needed to solve the technical problems in the prior art. SUMMARY

[0005] In view of the problems in the prior art, the present application discloses an in-situ radiation heating system of a high-power electron beam physical vapor deposition device, which can preheat the heating system outside the loading chamber, expand the heating surface, realize the circumferential heating of the workpiece, form a relatively independent heating chamber through the support opening and closing mechanism to ensure the heating effect, and realize the heat insulation of the system.

[0006] In order to achieve the above purpose, the heating system disclosed by the present application can adopt the following scheme:

[0007] The in-situ radiation heating system of a high-power electron beam physical vapor deposition device comprises two heating units oppositely arranged and forming a heating cavity, the heating unit comprises a shell integrated with a heating element, end covers are arranged at both ends of the shell and a driving device is connected through the end covers to drive the two end covers to move closer to or away from each other.

[0008] The in-situ radiation heating system disclosed above forms a fixed heating cavity through the heating unit, and the temperature environment in the heating cavity is raised by the heating unit, so that the product entering the heating cavity is heated, thereby realizing the preheating treatment of the product before the vapor deposition treatment. The product after the preheating treatment can enter the vapor deposition link more quickly, greatly improving the efficiency of the product vapor deposition treatment. At the same time, the inside and outside of the heating cavity are isolated, and the internal heating does not affect the external environment temperature, ensuring the stability and reliability of the external equipment and structure.

[0009] Further, the specific structure of the heating element can be constructed in various forms, which is not uniquely limited, and one of the feasible options is optimized and proposed here: the heating element comprises a heating belt reciprocally wound inside the shell, and the first end and the last end of the heating belt are connected to the external power supply line. When the above scheme is adopted, the heating belt can be made of graphite material, which can generate heat after being powered on and used to heat the product. The heating belt made of graphite material is reciprocally wound in an S shape inside the shell.

[0010] Further, the cooperation structure of the heating element and the shell can also adopt various schemes, which is not uniquely limited, and one of the feasible options is optimized and proposed here: the heating element is connected and cooperated to the shell through a fixing seat. When the above scheme is adopted, the fixing seat can be made of various materials, and considering that the heating element generates heat during operation, a high-temperature-resistant material such as ceramic needs to be used. At the same time, the fixing seat can press and fit the heating element into the shell, for example, the fixing seat is set to a tablet shape and is connected and fixed to the shell through connecting bolts and other fasteners.

[0011] Further, the heating element generates heat and emits heat to its surroundings. In order to concentrate the heat in the heating cavity and avoid the influence of the heating element on the external environment temperature, a heat insulation and heat preservation structure can be arranged to maintain the temperature environment inside the heating cavity, and the structure is not uniquely limited, and one of the feasible options is optimized and proposed here: a heat preservation layer is formed inside the shell, the heating element and the shell form a clamping structure to the heat preservation layer, and the heat preservation layer is used to guide or reflect the heat generated by the heating element to the set direction. When the above scheme is adopted, the heat preservation layer fits and covers the inner wall surface of the shell, so as to block and reflect the heat of the heating element, so that the heat stays in the heating cavity and the heat transferred to the outside is reduced.

[0012] Further, the shell is the bearing component of the whole heating unit, and bears the whole weight load of the heating unit. The structure is not uniquely limited, and one feasible option is optimized and proposed herein: the shell is externally formed with several reinforcing ribs. When the above scheme is adopted, the reinforcing ribs are used to improve the overall structural strength of the shell and maintain the stability of the shell.

[0013] Further, the end cover is movably arranged on the shell and slides up and down relative to the shell to open or close the heating cavity. The cooperation structure of the end cover and the shell can adopt various schemes, and one feasible option is optimized and proposed herein: the shell is formed with several shaft seats, the shaft seats are provided with wheel shafts connected with the rollers, and the rollers are used to contact and roll along the external guide surface. When the above scheme is adopted, two shaft seats are arranged on the shell corresponding to each end cover, and the two rollers are rolled with the end cover to realize smoother action of the end cover.

[0014] Further, when the product is sent into the heating cavity, the product is fixed by the supporting feeding shaft which extends from the outside of the heating cavity to the inside of the heating cavity. In order to match the supporting feeding shaft, the structure of the end cover is improved, and one feasible option is optimized and proposed herein: the end cover is formed with a shaft groove for matching the feeding, and the shaft grooves are spliced to form a shaft hole after the two end covers are butted together. When the above scheme is adopted, the shaft groove is a semicircular groove, and a circular shaft hole is formed after splicing. The shaft hole is matched with the supporting feeding shaft, which not only realizes the feeding of the product into the heating cavity, but also considers the heat preservation and insulation of the heating cavity.

[0015] Further, when the supporting feeding shaft extends into the heating cavity, the stability of the feeding supporting shaft can be improved by strengthening the support due to the long extension length of the feeding supporting shaft. The structure is not uniquely limited, and one feasible option is optimized and proposed herein: the shaft groove is provided with a support structure for supporting the feeding shaft, and the support structure includes a support plate, and at least two support balls or support rollers are formed on the support plate. When the two end covers are butted together, the supporting feeding shaft is relatively surrounded by the two support structures and rotates under the cooperation of the support balls or support rollers. When the above scheme is adopted, the support structure not only supports the feeding supporting shaft, but also rolls with the feeding supporting shaft when the feeding supporting shaft moves axially, which improves the convenience of the operation of the feeding supporting shaft and makes the feeding action more stable and reliable.

[0016] Further, the driving device is used to cooperate with the end cover to realize the lifting action of the end cover and realize the opening and closing of the relative end cover, and the structure can be constructed in various forms and is not uniquely limited, and one of the feasible options is optimized and proposed here: the driving device comprises a telescopic cylinder, and the telescopic end of the telescopic cylinder is connected with the end cover and is used to drive the end cover to reciprocate.

[0017] Further, when preheating the product, the temperature in the heating cavity needs to be monitored in real time to ensure the preheating effect, and the temperature monitoring can be realized by various schemes, and one of the feasible options is optimized and proposed here: the shell is further provided with a temperature detection member for detecting the temperature inside the heating cavity. When the above scheme is adopted, the temperature detection member can be a temperature sensor.

[0018] Compared with the prior art, some beneficial effects of the technical scheme of the present application include:

[0019] The in-situ radiation heating system disclosed by the present application heats the product outside the gas deposition chamber, preheats the product in advance, and can perform gas deposition treatment faster after the product enters the gas deposition chamber, thereby improving the effective use rate of the gas deposition chamber and improving the flexibility and processing efficiency of the gas deposition treatment. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only represent some embodiments of the present application, and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor.

[0021] Fig. 1 It is a schematic diagram of the overall structure of the in-situ radiation heating device.

[0022] Fig. 2 It is a schematic diagram of the upper heating unit structure of the in-situ radiation heating device (showing the driving device, temperature monitoring member, etc.).

[0023] Fig. 3 It is a schematic diagram of the lower heating unit structure of the in-situ radiation heating device.

[0024] In the above drawings, the meanings of various marks are as follows:

[0025] 1, shell; 101, axle seat; 102, axle; 2, end cover; 201, axle slot; 202, limiting strip; 3, roller; 4, reinforcing rib plate; 5, driving device; 6, supporting plate; 7, supporting ball; 8, electrode seat; 9, thermocouple; 10, heating element; 11, heat preservation layer; 12, fixing seat. DETAILED DESCRIPTION

[0026] The present embodiment will be further explained in combination with the drawings and specific examples.

[0027] The prior art gas deposition equipment sends the product into the gas deposition chamber for preheating, which has the problem of insufficient effective use time of the gas deposition chamber, resulting in low gas deposition efficiency. The following embodiments optimize and overcome the defects in the prior art.

[0028] EMBODIMENT

[0029] As shown in Figs. 1-3 The present embodiment provides an in-situ radiation heating system of a high-power electron beam physical vapor deposition equipment, which comprises two heating units oppositely arranged to form a heating cavity. The heating unit comprises a shell 1 integrated with a heating element 10. End covers 2 are arranged at both ends of the shell 1 and connected to a driving device 5 through the end covers 2. The driving device 5 is used to drive the two end covers 2 to move closer to or away from each other.

[0030] Preferably, in the present embodiment, the two heating units are buckled in the height direction, including an upper heating unit and a lower heating unit.

[0031] The in-situ radiation heating system disclosed in the present embodiment forms a fixed heating cavity through the heating unit, and the temperature environment in the heating cavity is raised by the heating unit, so that the product entering the heating cavity is heated, thereby realizing preheating treatment before the product is subjected to gas deposition treatment. The product subjected to preheating treatment can enter the gas deposition link more quickly after entering the gas deposition chamber, greatly improving the efficiency of the product gas deposition treatment. At the same time, the inside and outside of the heating cavity are isolated, and the internal temperature rise does not affect the external ambient temperature, ensuring the stability and reliability of the external equipment and structure.

[0032] The specific structure of the heating element 10 can be constructed in various forms, which is not uniquely limited. The present embodiment optimizes and adopts one of the feasible options: the heating element 10 comprises a heating belt reciprocally wound inside the shell 1. The first end and the last end of the heating belt are connected to an external power supply line. When the above scheme is adopted, the heating belt can be made of graphite material, which can generate heat after being powered and used to heat the product. The heating belt made of graphite material is reciprocally wound in an S shape inside the shell 1.

[0033] Preferably, in the embodiment, the shell 1 is provided with an electrode base 8, and the heating unit is connected with the electrode base 8 and an external power supply line.

[0034] The cooperation structure of the heating element 10 and the shell 1 can also adopt various schemes, which are not uniquely limited, and one of the feasible options is optimized and adopted in the embodiment: the heating element 10 is connected and cooperated to the shell 1 through a fixing seat 12. When the above scheme is adopted, the fixing seat 12 can be made of various materials, and considering that the heating element 10 generates heat during work, a high-temperature-resistant material such as ceramic needs to be adopted; at the same time, the fixing seat 12 can press and fit the heating element 10 into the shell 1, for example, the fixing seat 12 is provided in a tablet shape and is connected and fixed to the shell 1 through connecting bolts and other fasteners.

[0035] When the heating element 10 generates heat, it emits heat to its surroundings, in order to concentrate heat in the heating cavity and avoid the influence of the heating element 10 on the ambient temperature outside, a heat insulation structure can be provided to maintain the temperature environment inside the heating cavity, and the structure is not uniquely limited, and one of the feasible options is optimized and adopted in the embodiment: a heat preservation layer 11 is formed inside the shell 1, and the heating element 10 and the shell 1 form a clamping structure with the heat preservation layer 11, and the heat preservation layer 11 is used to guide or reflect the heat generated by the heating element 10 in a set direction. When the above scheme is adopted, the heat preservation layer 11 fits and covers the inner wall surface of the shell 1, so as to block and reflect the heat of the heating element 10, so that the heat stays in the heating cavity and reduces the heat transferred to the outside.

[0036] The shell 1 serves as a bearing part of the entire heating unit and bears the entire weight load of the heating unit, and the structure is not uniquely limited, and one of the feasible options is optimized and adopted in the embodiment: a plurality of reinforcing rib plates 4 are formed on the outside of the shell 1. When the above scheme is adopted, the reinforcing rib plates 4 are used to improve the overall structural strength of the shell 1 and maintain the stability of the shell 1.

[0037] The end cover 2 is movably arranged on the shell 1 and slides up and down relative to the shell 1 to open or close the heating cavity, and the cooperation structure of the end cover 2 and the shell 1 can adopt various schemes, and one of the feasible options is optimized and adopted in the embodiment: a plurality of shaft seats 101 are formed on the shell 1, and a wheel shaft 102 of a connecting roller 3 is arranged at the shaft seat 101, and the roller 3 is used to contact and roll along an external guide surface. When the above scheme is adopted, two shaft seats 101 are arranged on the shell 1 corresponding to each end cover 2, and the two rollers 3 are rolled with the end cover 2 to realize smoother action of the end cover 2.

[0038] Preferably, the roller 3 in the embodiment is provided with a limiting groove, and the corresponding cooperating end cover 2 is provided with a limiting strip 202 embedded in the limiting groove.

[0039] When the product is sent into the heating cavity, the product is fixed by the supporting feeding shaft which extends from the outside of the heating cavity to the inside of the heating cavity. In order to match the supporting feeding shaft, the structure of the end cover 2 is improved, and one of the feasible options is adopted in the embodiment: a shaft groove 201 is formed on the end cover 2 to match the feeding shaft. When the two end covers 2 are closed, the shaft grooves 201 are spliced to form a shaft hole. When the above scheme is adopted, the shaft groove 201 is a semicircular groove, and a circular shaft hole is formed after splicing. The shaft hole matches the supporting feeding shaft, which not only realizes the feeding of the product into the heating cavity, but also considers the heat preservation and insulation of the heating cavity.

[0040] When the supporting feeding shaft extends into the heating cavity, the stability of the feeding supporting shaft can be improved by strengthening the support due to the long extension length of the feeding supporting shaft. The structure is not uniquely limited, and one of the feasible options is adopted in the embodiment: a support structure is arranged at the shaft groove 201 to support the feeding shaft, and the support structure includes a support plate 6. At least two support balls 7 or support rollers are formed on the support plate 6. When the two end covers 2 are closed, the supporting feeding shaft is relatively surrounded by the two support structures and rotates under the cooperation of the support balls 7 or support rollers. When the above scheme is adopted, the support structure not only supports the feeding supporting shaft, but also rolls when the feeding supporting shaft moves axially, which improves the convenience of the operation of the feeding supporting shaft and makes the feeding action more stable and reliable.

[0041] The driving device 5 is used to match the end cover 2 to realize the lifting action of the end cover 2 and realize the opening and closing of the relative end cover 2. The structure can be constructed in various forms, and the specific structure is not uniquely limited. One of the feasible options is adopted in the embodiment: the driving device 5 includes a telescopic cylinder, and the telescopic end of the telescopic cylinder is connected with the end cover 2 to drive the end cover 2 to reciprocate. When the above scheme is adopted, the driving device 5 is arranged one by one with the end cover 2, and each end cover 2 is provided with a telescopic cylinder.

[0042] When the product is preheated, the temperature in the heating cavity needs to be monitored in real time to ensure the preheating effect. The temperature monitoring can be realized by various schemes. One of the feasible options is adopted in the embodiment: a temperature detection member is arranged on the shell 1 to detect the temperature in the heating cavity. When the above scheme is adopted, the temperature detection member can be a temperature sensor.

[0043] Preferably, in the embodiment, the temperature sensor includes a thermocouple 9 arranged on the shell.

[0044] The above are the embodiments listed in the present embodiment; however, the present embodiment is not limited to the above optional embodiments; those skilled in the art can obtain other various embodiments according to the arbitrary combination of the above modes; anyone can obtain other various forms of embodiments under the inspiration of the present embodiment. The above specific embodiments should not be understood as limiting the protection scope of the present embodiment; the protection scope of the present embodiment should be defined by the claims.

Claims

1. An in-situ radiation heating system for a high power electron beam physical vapor deposition apparatus, characterized by: The application relates to a heating device comprising two heating units oppositely arranged and forming a heating cavity, wherein the heating unit comprises a shell (1) integrated with a heating element (10), end covers (2) arranged at both ends of the shell (1) and connected with driving devices (5) for driving the two end covers (2) to move towards or away from each other. The end cover (2) is provided with shaft grooves (201) for matching feeding, and the shaft grooves (201) are spliced to form shaft holes after the two end covers (2) are connected. The shaft grooves (201) are provided with support structures for supporting a feeding shaft, wherein the support structures comprise support plates (6) provided with at least two support balls (7) or support rollers, and the feeding shaft is relatively surrounded by the two support structures and rotates under the cooperation of the support balls (7) or the support rollers after the two end covers (2) are connected.

2. An in-situ radiant heating system for a high power e-beam physical vapor deposition apparatus as defined in claim 1, characterized in that: The heating element (10) comprises a heating belt reciprocally arranged in the shell (1), and the first end and the last end of the heating belt are connected with external power supply lines.

3. An in-situ radiant heating system for a high power e-beam physical vapor deposition apparatus as defined in claim 2, characterized in that: The heating element (10) is connected to the shell (1) through a fixing seat (12).

4. In-situ radiation heating system for a high power e-beam physical vapor deposition apparatus according to claim 2 or 3, characterized in that: The shell (1) is internally provided with a heat preservation layer (11), the heating element (10) and the shell (1) form a clamping structure with the heat preservation layer (11), and the heat preservation layer (11) is used for guiding or reflecting the heat generated by the heating element (10) to a set direction.

5. The in-situ radiant heating system for a high power e-beam physical vapor deposition apparatus of claim 1, wherein: The shell (1) is externally provided with a plurality of reinforcing ribs (4).

6. The in-situ radiant heating system for a high power e-beam physical vapor deposition apparatus of claim 1, wherein: The shell (1) is provided with a plurality of shaft seats (101), the shaft seats (101) are provided with wheel shafts (102) connected with connecting rollers (3), and the connecting rollers (3) are used for contacting and rolling along external guide surfaces.

7. The in-situ radiant heating system for a high power e-beam physical vapor deposition apparatus of claim 1, wherein: The driving device (5) comprises a telescopic cylinder, the telescopic cylinder is connected with the end cover (2) and is used for driving the end cover (2) to reciprocally move.

8. The in-situ radiant heating system for a high power e-beam physical vapor deposition apparatus of claim 1, wherein: The shell (1) is further provided with a temperature detecting element for detecting the temperature inside the heating cavity.

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