Vacuum system pressure control device and vacuum system pressure control method

Abstract

The invention discloses a vacuum system pressure control device and a vacuum system pressure control method. The device comprises a vacuum cavity, a sealing ring, a valve element, a driving mechanism and a self-adaptive adjusting assembly. The valve element is arranged in the vacuum cavity and used for adjusting the pressure in the vacuum cavity. The driving mechanism is connected with the valve element and used for driving the valve element to swing. The self-adaptive adjusting assembly is arranged between the valve element and the driving mechanism and used for enabling the valve element to be adjusted in a self-adaptive mode in the X-axis direction and the Y-axis direction, the X-axis direction and the Y-axis direction are parallel to the horizontal plane direction, and the X-axis direction is perpendicular to the Y-axis direction. The sealing ring is arranged in the vacuum cavity, the sealing ring and the valve element directly face each other in the Z-axis direction and are arranged in parallel in a spaced mode, and the Z-axis direction is perpendicular to the X-axis direction and the Y-axis direction. The parallelism between the valve element and the sealing ring can be improved, and it is guaranteed that the valve element is in good sealing contact with the sealing ring all the time in the moving process.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a vacuum system pressure control device and a vacuum system pressure control method. Background Technology

[0002] Vacuum system pressure control devices are widely used in semiconductor manufacturing, photolithography, and other industrial fields requiring precise pressure control. These devices control the pressure within the vacuum chamber by adjusting the position of a valve core, thereby ensuring the accuracy and stability of the process.

[0003] Existing vacuum system pressure control devices mainly rely on single-drive or dual-drive mechanisms to control the movement of the valve core. Single-drive mechanisms are widely used due to their simple structure and low cost, but they have certain limitations in terms of dynamic balance and response speed. Dual-drive mechanisms, on the other hand, provide higher stability and load capacity by having two drive sources work synchronously; however, their complex mechanical structure and higher cost limit their widespread adoption in certain applications.

[0004] Currently, the sealing performance of vacuum system pressure control devices still needs improvement. Summary of the Invention

[0005] The problem solved by the embodiments of the present invention is to provide a vacuum system pressure control device and a vacuum system pressure control method, thereby improving the sealing performance and pressure control accuracy of the vacuum system pressure control device.

[0006] To address the aforementioned problems, this invention provides a vacuum system pressure control device, comprising: a vacuum chamber, a sealing ring, a valve core, a drive mechanism, and an adaptive adjustment component; the valve core is disposed within the vacuum chamber and is used to adjust the pressure within the vacuum chamber; the drive mechanism is connected to the valve core and is used to drive the valve core to oscillate; the adaptive adjustment component is disposed between the valve core and the drive mechanism, and is used to enable the valve core to adaptively adjust around the X-axis and Y-axis directions, wherein the X-axis and Y-axis directions are parallel to the horizontal plane and perpendicular to each other; the sealing ring is disposed within the vacuum chamber, and the sealing ring and the valve core are directly opposite each other and spaced parallel in the Z-axis direction, wherein the Z-axis direction is perpendicular to the X-axis and Y-axis directions.

[0007] Optionally, the adaptive adjustment component includes: a main block; and multiple sets of damping bearings, each embedded in the main block and protruding from the side of the main block, with each set of damping bearings symmetrically arranged on the side of the main block.

[0008] Optionally, the adaptive adjustment component also includes a through hole located at the center of the main body block, with the through hole exposing multiple sets of damping bearings embedded in the main body.

[0009] Optionally, the multiple sets of damping bearings include: a first set of damping bearings and a second set of damping bearings, wherein the axial direction of the first set of damping bearings is parallel to the X-axis direction, and the axial direction of the second set of damping bearings is parallel to the Y-axis direction; or, the multiple sets of damping bearings include: a first set of damping bearings, a second set of damping bearings, and a third set of damping bearings, wherein the axial direction of the first set of damping bearings is parallel to the X-axis direction, the axial direction of the second set of damping bearings is parallel to the Y-axis direction, and the axial direction of the third set of damping bearings is parallel to the Z-axis direction.

[0010] Optionally, the shape of the main block can be three-dimensional or circular.

[0011] Optionally, the bottom of the main body block is in contact with the central area of ​​the valve core.

[0012] Optionally, the adaptive adjustment component is located in the drive mechanism, and multiple sets of damping bearings protruding from the side of the main body block are embedded in the drive mechanism.

[0013] Optionally, the drive mechanism has a through hole; multiple sets of damping bearings are embedded in the through hole.

[0014] Optionally, the drive mechanism includes an actuator and an actuator connected thereto, the actuator being connected to an adaptive adjustment component, and the actuator being used to drive the actuator to move.

[0015] Optionally, the actuator may include a single-arm structure or a double-arm structure.

[0016] Optionally, the actuator includes a first actuator arm, one end of which is connected to the actuator to receive driving force, and the other end of which is connected to the valve core to transmit driving force; or, the actuator includes a first actuator arm and a second actuator arm, the first actuator arm and the second actuator arm are arranged opposite to each other, and one end of the first actuator arm is connected to the actuator to receive driving force, and the other end of the first actuator arm is connected to the valve core and one end of the second actuator arm.

[0017] Optionally, the actuator may also include a connector for connecting the first actuator arm and the second actuator arm.

[0018] Accordingly, embodiments of the present invention also provide a vacuum system pressure control method for pressure control of the vacuum system pressure control device provided by the present invention, comprising: driving the valve core to move along the Z-axis direction; and using an adaptive adjustment component to adaptively adjust the valve core around the X-axis and Y-axis of the horizontal plane.

[0019] Optionally, the drive mechanism includes: an actuator rod and an actuator connected thereto, the actuator rod being connected to an adaptive adjustment component, and the actuator being used to drive the actuator rod to move; the step of driving the valve core to move along the Z-axis includes: the actuator driving the actuator rod to move according to a control signal; the actuator rod transmitting the motion to the valve core through the adaptive adjustment component; the valve core moving along the Z-axis under the drive of the actuator rod, and the adaptive adjustment component adaptively adjusting the valve core around the X-axis and Y-axis directions.

[0020] Optionally, adaptive adjustment includes adjusting the position of the valve core in the X and Y axis directions to keep the valve core parallel to the sealing ring.

[0021] Compared with the prior art, the technical solution of the embodiments of the present invention has the following advantages: The vacuum system pressure control device provided in this embodiment of the invention has an adaptive adjustment component disposed between the valve core and the drive mechanism. This component enables the valve core to adaptively adjust around the X-axis and Y-axis. This adaptive adjustment function can improve the parallelism between the valve core and the sealing ring, ensuring that the valve core maintains good sealing contact with the sealing ring during movement, thereby improving the sealing performance and pressure control accuracy of the vacuum system pressure control device. Attached Figure Description

[0022] Figures 1 to 2 This is a schematic diagram of a corresponding embodiment of the vacuum system pressure control device of the present invention; Figure 3 This is a schematic diagram of the valve core, adaptive adjustment component, and actuator of the present invention; Figures 4 to 5 This is a schematic diagram of the structure of an embodiment of the adaptive adjustment component of the present invention; Figure 6 This is a schematic diagram of the structure corresponding to the adaptive adjustment of the valve core around the X-axis of the present invention; Figure 7 This is a schematic diagram of the structure corresponding to the adaptive adjustment of the valve core around the Y-axis of the present invention; Figure 8 A flowchart of the steps corresponding to an embodiment of the vacuum system pressure control method of the present invention is shown. Detailed Implementation

[0023] As can be seen from the background technology, most vacuum system pressure control devices currently adopt a single-drive or dual-drive design. The single-drive structure, because it only drives one side, is prone to tilting when the valve core moves, which affects the sealing performance of the vacuum system pressure control device. While the dual-drive can provide a more stable driving force, it has a complex structure, high cost, and synchronization problems. If the two rods do not move synchronously, it will also lead to problems such as valve cover displacement and internal leakage, which will affect the efficiency of the entire process and product quality.

[0024] To address the aforementioned technical problems, embodiments of the present invention provide a vacuum system pressure control device, comprising: a vacuum chamber, a sealing ring, a valve core, a drive mechanism, and an adaptive adjustment component; the valve core is disposed within the vacuum chamber and is used to adjust the pressure within the vacuum chamber; the drive mechanism is connected to the valve core and is used to drive the valve core to oscillate; the adaptive adjustment component is disposed between the valve core and the drive mechanism, and is used to enable the valve core to adaptively adjust around the X-axis and Y-axis directions, wherein the X-axis and Y-axis directions are parallel to the horizontal plane and perpendicular to each other; the sealing ring is disposed within the vacuum chamber, and the sealing ring and the valve core are directly opposite each other and spaced parallel in the Z-axis direction, wherein the Z-axis direction is perpendicular to the X-axis and Y-axis directions.

[0025] The vacuum system pressure control device provided in this embodiment of the invention has an adaptive adjustment component disposed between the valve core and the drive mechanism. This component enables the valve core to adaptively adjust around the X-axis and Y-axis. This adaptive adjustment function can improve the parallelism between the valve core and the sealing ring, ensuring that the valve core maintains good sealing contact with the sealing ring during movement, thereby improving the sealing performance and pressure control accuracy of the vacuum system pressure control device.

[0026] To make the above-mentioned objects, features, and advantages of the embodiments of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Figures 1 to 2 This is a schematic diagram of a corresponding embodiment of the vacuum system pressure control device of the present invention; Figure 3 This is a schematic diagram of the valve core, adaptive adjustment component, and actuator of the present invention; Figures 4 to 5 This is a schematic diagram of the structure of an embodiment of the adaptive adjustment component of the present invention; Figure 6 This is a schematic diagram of the structure corresponding to the adaptive adjustment of the valve core around the X-axis of the present invention; Figure 7 This is a schematic diagram of the structure corresponding to the adaptive adjustment of the valve core around the Y-axis of the present invention.

[0027] The vacuum system pressure control device includes: a vacuum chamber 100, a sealing ring 101, a valve core 102, a drive mechanism 198, and an adaptive adjustment component 120; the valve core 102 is disposed within the vacuum chamber 100 and is used to adjust the pressure within the vacuum chamber 100; the drive mechanism 198 is connected to the valve core 102 and is used to drive the valve core 102 to swing; the adaptive adjustment component 120 is disposed between the valve core 102 and the drive mechanism 198, and is used to enable the valve core 102 to adaptively adjust around the X-axis and Y-axis directions, wherein the X-axis and Y-axis directions are parallel to the horizontal plane and perpendicular to each other; the sealing ring 101 is disposed within the vacuum chamber 100, and the sealing ring 101 and the valve core 102 are directly opposite each other and spaced parallel in the Z-axis direction, wherein the Z-axis direction is perpendicular to the X-axis and Y-axis directions.

[0028] It should be noted that the adaptive adjustment component 120 is disposed between the valve core 102 and the drive mechanism 198, and is used to enable the valve core 102 to adaptively adjust around the X-axis and Y-axis. This adaptive adjustment function can improve the parallelism between the valve core 102 and the sealing ring 101, and ensure that the valve core 102 always maintains good sealing contact with the sealing ring 101 during the movement, thereby improving the sealing performance and pressure control accuracy of the vacuum system pressure control device.

[0029] Specifically, the vacuum chamber 100 is the main part of the vacuum system pressure control device, which is used to house the valve core 102, the sealing ring 101 and the adaptive adjustment component 120, provide space for the movement of the valve core 102 and maintain the internal vacuum environment.

[0030] It should be noted that the valve core 102 is used to regulate the pressure inside the vacuum chamber 100. By moving inside the vacuum chamber 100, the valve core 102 can change the cross-sectional area of ​​the gas flow, thereby achieving precise control of the pressure inside the chamber. The movement of the valve core 102 is driven by the drive mechanism 198 and the position is adjusted by the adaptive adjustment component 120 to ensure that it can remain parallel and tightly fitted with the sealing ring 101.

[0031] Specifically, the adaptive adjustment component 120 enables the valve core 102 to adaptively adjust around the X-axis and Y-axis. This adaptive adjustment function can improve the parallelism between the valve core 102 and the sealing ring 101, ensuring that the valve core 102 always maintains good sealing contact with the sealing ring 101 during the movement, thereby improving the sealing performance and pressure control accuracy of the vacuum system pressure control device.

[0032] In this embodiment, the adaptive adjustment component 120 includes: a main block 1201; and multiple sets of damping bearings, which are respectively embedded in the main block 1201 and protrude from the side of the main block 1201, and each set of damping bearings is symmetrically arranged on the side of the main block 1201.

[0033] It should be noted that the main body block 1201 is the core component of the adaptive adjustment assembly 120, which is used to support and fix multiple sets of damping bearings, facilitates the provision of installation positions for multiple sets of damping bearings, and ensures that the damping bearings can work stably during the movement of the valve core 102.

[0034] In this embodiment, the shape of the main block 1201 includes a three-dimensional shape or a circular shape.

[0035] Specifically, the three-dimensional main body block 1201 can provide more installation space and higher structural strength, making it suitable for applications requiring higher stability and load-bearing capacity. The circular main body block 1201, on the other hand, has a better streamlined design, which can reduce fluid flow resistance and is suitable for applications requiring high flow field uniformity. In other words, the shape of the main body block 1201 can be three-dimensional or circular to adapt to different usage requirements.

[0036] In this embodiment, the bottom of the main body block 1201 is in contact with the central region of the valve core 102.

[0037] The bottom of the main body block 1201 is in contact with the central area of ​​the valve core 102, ensuring that the driving force can be effectively transmitted to the valve core 102 and enabling the valve core 102 to move in the Z-axis direction. At the same time, it also helps the valve core 102 to adaptively adjust around the X-axis and Y-axis directions. This adaptive adjustment function can improve the parallelism problem between the valve core 102 and the sealing ring 101.

[0038] It should be noted that the damping bearing is used to provide the valve core 102 with adaptive adjustment function in the X and Y axis directions. Through its own rotation and oscillation, the damping bearing allows the valve core 102 to be finely adjusted in the horizontal plane, ensuring the parallelism between the valve core 102 and the sealing ring 101. At the same time, the damping characteristics of the damping bearing can also reduce the swaying of the valve core 102 during the movement, improving the stability and control accuracy of the system.

[0039] It should also be noted that the damping bearing protrudes from the side of the main body block 1201, which allows the damping bearing to provide a larger adjustment range when the valve core 102 moves. At the same time, the fact that each set of damping bearings is symmetrically arranged on the side of the main body block 1201 can improve the balance and stability of the valve core 102 when it is adjusted around the X-axis and Y-axis.

[0040] In this embodiment, the adaptive adjustment component 120 is located in the drive mechanism 198, and multiple sets of damping bearings protruding from the side of the main body block 1201 are embedded in the drive mechanism 198.

[0041] Specifically, the adaptive adjustment component 120 is located in the drive mechanism 198, so that the movement of the valve core 102 can be effectively transmitted through the drive mechanism 198. Multiple sets of damping bearings protruding from the side of the main body block 1201 are embedded in the drive mechanism 198. This design can ensure the tight cooperation between the damping bearings and the drive mechanism 198, and improve the efficiency and accuracy of motion transmission.

[0042] In this embodiment, as Figure 4As shown, the multiple sets of damping bearings include: a first set of damping bearings 1202 and a second set of damping bearings 1203. The axial direction of the first set of damping bearings 1202 is parallel to the X-axis direction, and the axial direction of the second set of damping bearings 1203 is parallel to the Y-axis direction.

[0043] It should be noted that the axis of the first set of damping bearings 1202 is parallel to the X-axis, and the axis of the second set of damping bearings 1203 is parallel to the Y-axis, so that the damping bearings can effectively control the swing of the valve core 102 in the X-axis and Y-axis directions respectively, and achieve precise adaptive adjustment.

[0044] like Figure 5 As shown, in other embodiments, the multiple sets of damping bearings include: a first set of damping bearings 1202, a second set of damping bearings 1203 and a third set of damping bearings 1204. The axial direction of the first set of damping bearings 1202 is parallel to the X-axis direction, the axial direction of the second set of damping bearings 1203 is parallel to the Y-axis direction, and the axial direction of the third set of damping bearings 1204 is parallel to the Z-axis direction.

[0045] Specifically, the axis of the first set of damping bearings 1202 is parallel to the X-axis, and the axis of the second set of damping bearings 1203 is parallel to the Y-axis, so that the damping bearings can effectively control the swing of the valve core 102 in the X-axis and Y-axis directions respectively, and achieve precise adaptive adjustment. The axis of the third set of damping bearings 1204 is parallel to the Z-axis, which further enhances the stability of the valve core 102 in the Z-axis direction.

[0046] In this embodiment, the adaptive adjustment component 120 further includes a through hole 180, which is located at the center of the main body block 1201, and the through hole 180 exposes multiple sets of damping bearings embedded in the main body.

[0047] It should be noted that the through hole 180 is located at the center of the main body block 1201, providing a spatial position for the valve core 102 to adjust and swing around the X and Y axes. In other words, during the adaptive adjustment range, the damping bearing can extend into the spatial area of ​​the through hole 180.

[0048] Specifically, the drive mechanism 198 is used to provide power to drive the valve core 102 to move in the Z-axis direction.

[0049] In this embodiment, the drive mechanism 198 has a through hole 130.

[0050] It should be noted that the through hole 130 of the drive mechanism 198 is used to accommodate multiple sets of damping bearings protruding from the side of the main body block 1201, ensuring the stability and reliability of the damping bearings during the movement of the drive mechanism 198.

[0051] In this embodiment, multiple sets of damping bearings are embedded in the through hole 130.

[0052] Specifically, multiple sets of damping bearings are embedded in the through holes 130, which ensures that the damping bearings are tightly fixed to the drive mechanism 198, which helps to improve the efficiency of motion transmission, reduce energy loss, and ensure the stability and reliability of the damping bearings during the movement of the drive mechanism 198.

[0053] In this embodiment, the drive mechanism 198 includes an actuator 106 and an actuator 110 connected thereto. The actuator 106 is connected to the adaptive adjustment component 120, and the actuator 110 is used to drive the actuator 106 to move.

[0054] Specifically, the actuator 110 drives the actuator rod 106 to move according to the control signal, and the actuator rod 106 then transmits the motion to the valve core 102 through the adaptive adjustment component 120, thereby realizing the position change and pressure regulation of the valve core 102.

[0055] It should be noted that the actuator 106 transmits the driving force generated by the actuator 110 to the valve core 102, thereby enabling the valve core 102 to move in the Z-axis direction.

[0056] It should also be noted that the actuator 110 is used to generate driving force according to the control signal.

[0057] In this embodiment, the actuator 110 can be a motor, a pneumatic device or other type of drive equipment, which can precisely control the movement of the actuator rod 106, thereby achieving precise adjustment of the position of the valve core 102.

[0058] In this embodiment, the actuator 106 includes a single-arm structure or a double-arm structure.

[0059] Specifically, the single-arm actuator 106 helps reduce interference and energy loss during movement, while the double-arm actuator 106 provides better balance.

[0060] In this embodiment, as Figure 1 As shown, the actuator 106 includes a first actuator arm 1061. One end of the first actuator arm 1061 is connected to the actuator 110 to receive driving force, and the other end of the first actuator arm 1061 is connected to the valve core 102 to transmit driving force.

[0061] In other embodiments, such as Figure 2 As shown, the actuator 106 includes a first actuator arm 1061 and a second actuator arm 122. The first actuator arm 1061 and the second actuator arm 122 are arranged opposite to each other. One end of the first actuator arm 1061 is connected to the actuator 110 to receive driving force, and the other end of the first actuator arm 1061 is connected to the valve core 102 and one end of the second actuator arm 122.

[0062] Specifically, the first actuator arm 1061 and the second actuator arm 122 are arranged opposite to each other, and one end of the first actuator arm 1061 is connected to the actuator 110 to receive the driving force, and the other end of the first actuator arm 1061 is connected to the valve core 102 and one end of the second actuator arm 122. That is to say, the actuator rod 106 is symmetrically arranged in a double-arm flow field. The symmetrical arrangement of the double-arm flow field can optimize the flow field distribution, improve the uniformity of gas flow, and make the actuator rod 106 more balanced.

[0063] In this embodiment, the actuator 106 further includes a connector for connecting the first actuator 1061 and the second actuator 122.

[0064] In this embodiment, the sealing ring 101 is disposed inside the vacuum chamber 100, and the sealing ring 101 and the valve core 102 are directly opposite each other in the Z-axis direction and are arranged parallel to each other at intervals. The Z-axis direction is perpendicular to the X-axis direction and the Y-axis direction.

[0065] Specifically, the main function of the sealing ring 101 is to cooperate with the valve core 102 to ensure the sealing of the vacuum chamber 100, prevent gas leakage, maintain the vacuum environment inside the chamber, and ensure the accuracy of pressure control and the stability of the process. At the same time, the adaptive adjustment component 120 enables the valve core 102 to adaptively adjust around the X-axis and Y-axis. This adaptive adjustment function can improve the parallelism between the valve core 102 and the sealing ring 101, ensuring that the valve core 102 always maintains good sealing contact with the sealing ring 101 during movement, thereby improving the sealing performance and pressure control accuracy of the vacuum system pressure control device.

[0066] Accordingly, the present invention also provides a method for pressure control of a vacuum system. Wherein, Figure 8 A flowchart of the steps corresponding to an embodiment of the vacuum system pressure control method of the present invention is shown.

[0067] The vacuum system pressure control method is used to control the pressure of the vacuum system pressure control device provided in the foregoing embodiments, including: Step S1: Drive the valve core 102 to move along the Z-axis direction; Step S2: The valve core 102 is adaptively adjusted around the X and Y axes of the horizontal plane by the adaptive adjustment component 120.

[0068] Specifically, the adaptive adjustment component 120 enables the valve core 102 to adaptively adjust around the X and Y axes of the horizontal plane. This adaptive adjustment function can improve the parallelism between the valve core 102 and the sealing ring 101, ensuring that the valve core 102 always maintains good sealing contact with the sealing ring 101 during movement, thereby improving the sealing performance and pressure control accuracy of the vacuum system pressure control device.

[0069] refer to Figures 1 to 5 Step S1: Drive the valve core 102 to move along the Z-axis.

[0070] Specifically, by precisely controlling the Z-axis movement of the valve core 102, the opening and closing size of the valve core 102 can be controlled, thereby achieving rapid response and precise adjustment of the pressure inside the vacuum chamber 100, and meeting the strict requirements for pressure changes during the process.

[0071] In this embodiment, the drive mechanism 198 includes an actuator 106 and an actuator 110 connected thereto. The actuator 106 is connected to the adaptive adjustment component 120, and the actuator 110 is used to drive the actuator 106 to move.

[0072] Specifically, the actuator 110 drives the actuator rod 106 to move according to the control signal, and the actuator rod 106 then transmits the motion to the valve core 102 through the adaptive adjustment component 120, thereby realizing the position change and pressure regulation of the valve core 102.

[0073] It should be noted that the actuator 106 transmits the driving force generated by the actuator 110 to the valve core 102, thereby enabling the valve core 102 to move in the Z-axis direction.

[0074] It should also be noted that the actuator 110 is used to generate driving force according to the control signal.

[0075] In this embodiment, the actuator 110 can be a motor, a pneumatic device or other type of drive equipment, which can precisely control the movement of the actuator rod 106, thereby achieving precise adjustment of the position of the valve core 102.

[0076] In this embodiment, the step of driving the valve core 102 to move along the Z-axis includes: the actuator 110 driving the actuator rod 106 to move according to the control signal; the actuator rod 106 transmitting the motion to the valve core 102 through the adaptive adjustment component 120; and the valve core 102 moving along the Z-axis under the drive of the actuator rod 106.

[0077] Specifically, the actuator 110 drives the actuator rod 106 to move according to the control signal. The actuator rod 106 transmits the motion to the valve core 102 through the adaptive adjustment component 120. The valve core 102 moves along the Z-axis under the drive of the actuator rod 106, which improves the stability and accuracy of the valve core 102's movement. At the same time, the intervention of the adaptive adjustment component 120 enhances the system's ability to finely control the position of the valve core 102.

[0078] refer to Figures 6 to 7 Step S2: The valve core 102 is adaptively adjusted around the X and Y axes of the horizontal plane by the adaptive adjustment component 120.

[0079] It should be noted that the adaptive adjustment component 120 enables the valve core 102 to adaptively adjust around the X and Y axes of the horizontal plane. This adaptive adjustment function can improve the parallelism between the valve core 102 and the sealing ring 101, ensuring that the valve core 102 always maintains good sealing contact with the sealing ring 101 during the movement, thereby improving the sealing performance and pressure control accuracy of the vacuum system pressure control device.

[0080] In this embodiment, adaptive adjustment includes adjusting the position of the valve core 102 in the X-axis and Y-axis directions to keep the valve core 102 parallel to the sealing ring 101.

[0081] Specifically, maintaining the parallelism between the valve core 102 and the sealing ring 101 is crucial for ensuring the sealing performance of the device, effectively reducing the risk of poor sealing and unstable pressure control caused by the tilting of the valve core 102.

[0082] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A pressure control device for a vacuum system, characterized in that, include: Vacuum chamber, sealing ring, valve core, drive mechanism, and adaptive adjustment assembly; The valve core is disposed in the vacuum chamber and is used to regulate the pressure in the vacuum chamber; The drive mechanism is connected to the valve core and is used to drive the valve core to swing. An adaptive adjustment component is disposed between the valve core and the drive mechanism to enable the valve core to adaptively adjust around the X-axis and Y-axis directions, wherein the X-axis and Y-axis directions are parallel to the horizontal plane direction and perpendicular to each other. A sealing ring is disposed in the vacuum chamber, and the sealing ring and the valve core are directly opposite each other in the Z-axis direction and are arranged parallel to each other at intervals. The Z-axis direction is perpendicular to the X-axis direction and the Y-axis direction.

2. The vacuum system pressure control device as described in claim 1, characterized in that, The adaptive adjustment component includes: Main block; Multiple sets of damping bearings are embedded in the main body block and protrude from the side of the main body block, and each set of damping bearings is symmetrically arranged on the side of the main body block.

3. The vacuum system pressure control device as described in claim 2, characterized in that, The adaptive adjustment component further includes a through hole located at the center of the main body block, and the through hole exposes multiple sets of damping bearings embedded in the main body.

4. The vacuum system pressure control device as described in claim 2, characterized in that, The multiple sets of damping bearings include: a first set of damping bearings and a second set of damping bearings, wherein the axial direction of the first set of damping bearings is parallel to the X-axis direction, and the axial direction of the second set of damping bearings is parallel to the Y-axis direction; or, The multiple sets of damping bearings include: a first set of damping bearings, a second set of damping bearings, and a third set of damping bearings. The axial direction of the first set of damping bearings is parallel to the X-axis direction, the axial direction of the second set of damping bearings is parallel to the Y-axis direction, and the axial direction of the third set of damping bearings is parallel to the Z-axis direction.

5. The vacuum system pressure control device as described in claim 2, characterized in that, The shape of the main block can be three-dimensional or circular.

6. The vacuum system pressure control device as described in claim 2, characterized in that, The bottom of the main body block is in contact with the central area of ​​the valve core.

7. The vacuum system pressure control device as described in claim 2, characterized in that, The adaptive adjustment component is located in the drive mechanism, and multiple sets of damping bearings protruding from the side of the main body block are embedded in the drive mechanism.

8. The vacuum system pressure control device as described in claim 7, characterized in that, The drive mechanism has a through hole; Multiple sets of the damping bearings are embedded in the through holes.

9. The vacuum system pressure control device as described in claim 1, characterized in that, The drive mechanism includes an actuator and an actuator connected thereto. The actuator is connected to the adaptive adjustment assembly, and the actuator is used to drive the actuator to move.

10. The vacuum system pressure control device as described in claim 9, characterized in that, The actuator may be a single-arm structure or a double-arm structure.

11. The vacuum system pressure control device as described in claim 9, characterized in that, The actuator includes a first actuator arm, one end of which is connected to the actuator to receive driving force, and the other end of which is connected to the valve core to transmit driving force. or, The actuator includes a first actuator arm and a second actuator arm. The first actuator arm and the second actuator arm are arranged opposite to each other. One end of the first actuator arm is connected to the actuator to receive driving force, and the other end of the first actuator arm is connected to the valve core and one end of the second actuator arm.

12. The vacuum system pressure control device as described in claim 11, characterized in that, The actuator further includes a connector for connecting the first actuator arm and the second actuator arm.

13. A vacuum system pressure control method, used for pressure control of the vacuum system pressure control device as described in any one of claims 1 to 12, characterized in that, include: Drive the valve core to move along the Z-axis direction; The adaptive adjustment component enables the valve core to adaptively adjust around the X and Y axes of the horizontal plane.

14. The vacuum system pressure control method as described in claim 13, characterized in that, The drive mechanism includes: an actuator rod and an actuator connected thereto, the actuator rod being connected to the adaptive adjustment component, and the actuator being used to drive the actuator rod to move; The steps of driving the valve core to move along the Z-axis include: the actuator driving the actuator rod to move according to the control signal; The actuator transmits motion to the valve core via the adaptive adjustment assembly; The valve core moves along the Z-axis direction under the drive of the actuator.

15. The vacuum system pressure control method as described in claim 13 or 14, characterized in that, The adaptive adjustment includes adjusting the position of the valve core in the X and Y axis directions to keep the valve core parallel to the sealing ring.

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